CN216189096U - Crystal boat clamping device and manipulator - Google Patents
Crystal boat clamping device and manipulator Download PDFInfo
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- CN216189096U CN216189096U CN202122443656.9U CN202122443656U CN216189096U CN 216189096 U CN216189096 U CN 216189096U CN 202122443656 U CN202122443656 U CN 202122443656U CN 216189096 U CN216189096 U CN 216189096U
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Abstract
The utility model discloses a wafer boat clamping device and a manipulator, and relates to the technical field of semiconductor manufacturing. The wafer boat clamping device comprises a screw rod nut arranged on a screw rod of a screw rod stepping motor, wherein a lifting plate is arranged on the screw rod nut, a connecting plate is connected onto the lifting plate, a lifting linkage shaft is connected onto the connecting plate and is perpendicular to the side wall of the screw rod, two swinging shafts are arranged in parallel with the lifting linkage shaft and are uniformly distributed on two sides of the lifting linkage shaft, two transmission plates are sleeved on the lifting linkage shaft, and one ends, far away from the lifting linkage shaft, of the two transmission plates are respectively connected to different swinging shafts; at least a pair of centre gripping subassembly is connected respectively on two swing shafts, and the centre gripping subassembly is including connecting in swing shaft's centre gripping fixed plate and the cyclic annular clamping part of dismantling the connection with centre gripping fixed plate. The clamping mechanism aims at solving the technical problems that the existing rotating shaft crystal boat clamping mechanism is complex in positioning process, and partial unhooking is easy to occur, so that the crystal boat is unstable to fix.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing, in particular to a wafer boat clamping device and a manipulator.
Background
In a manufacturing plant of a semiconductor industry, a plurality of wet process apparatuses are generally arranged to process a large number of wafers in a batch manner. To cope with different kinds of electronic products, wafers or substrates of different shapes and sizes are used. Therefore, the kind of the boat used in the wet process is different. For example, when performing a wet process with a 4 "or 6" substrate, a wafer boat of a corresponding size is typically used to carry the substrate.
In order to facilitate the clamping of the crystal boat, the existing crystal boat clamping mechanism generally adopts a hook arranged on a clamping arm to fix the crystal boat, and then the crystal boat is moved through a material moving component, so that the crystal boat is moved.
However, the wafer boat is fixed by adopting the hook mode, and the technical problems are as follows: 1. the hook and the wafer boat need to be accurately positioned. 2. The hooks are mutually independent, and the situation that the boat is unstable due to partial unhooking is easy to occur. How to solve the technical problems becomes a technical problem to be solved urgently.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to provide a crystal boat clamping device and a manipulator, and aims to solve the technical problems that an existing rotating shaft crystal boat clamping mechanism is complex in positioning process and easy to partially unhook, so that a crystal boat is unstable to fix.
In order to achieve the above object, the present invention provides a boat clamping device,
the device comprises a screw rod stepping motor, a screw rod nut, a lifting linkage shaft, two transmission plates, two swinging shafts and at least one pair of clamping components;
the screw rod nut is installed on a screw rod of the screw rod stepping motor, a lifting plate is arranged on the screw rod nut, a connecting plate perpendicular to the horizontal plane of the lifting plate is arranged on the lifting plate, the lifting linkage shaft is connected to the connecting plate and perpendicular to the side wall of the screw rod, the two swinging shafts are arranged in parallel to the lifting linkage shaft and are uniformly distributed on two sides of the lifting linkage shaft, the two transmission plates are both sleeved on the lifting linkage shaft, and one ends of the two transmission plates, far away from the lifting linkage shaft, are respectively connected to different swinging shafts; the pair of clamping components are respectively connected to the two swinging shafts, and each clamping component comprises a clamping fixing plate connected to the swinging shaft and an annular clamping part detachably connected with the clamping fixing plate.
In one embodiment of the present application, the annular clamping portion includes a clamping seat detachably connected to the clamping fixing plate and a U-shaped clamping claw whose free end is detachably connected to the clamping seat.
In an embodiment of the present application, the holder is M-shaped.
In an embodiment of the present application, a guide shaft for limiting the horizontal rotation of the lifting linkage shaft is disposed between the feed screw nut and the lifting linkage shaft.
The application also discloses manipulator, include as above the device is got to the boat clamp and drive the lifting unit of device elevating movement is got to the boat clamp.
In an embodiment of the application, the lifting component comprises a lifting support frame, a lifting driving piece is arranged on the lifting support frame, an output shaft of the lifting driving piece is connected with a lifting lead screw, and a lifting lead screw nut which drives the crystal boat clamping device to lift is sleeved on the lifting lead screw.
In an embodiment of the application, the lifting support frame is further provided with a lifting in-place detection module for detecting the movement position of the lifting nut.
In one embodiment of the application, the lifting support frame further comprises a traversing component for driving the lifting support frame to horizontally traverse.
In one embodiment of the present application, the traversing assembly includes a guide rail slidably coupled to the lift support frame and a traversing drive configured to drive the lift support frame to reciprocate on the guide rail.
In an embodiment of the application, the device further comprises a transverse moving in-place detection module for detecting the transverse moving position of the lifting support frame.
Adopt above-mentioned technical scheme, set up cyclic annular clamping part through the one end of keeping away from the bearing frame on the oscillating axle, press from both sides through cyclic annular clamping part and get the crystal boat, reduced the degree of difficulty to the crystal boat location, also avoid appearing partial unhook at the centre gripping in-process simultaneously, lead to the fixed unstability of crystal boat, the crystal boat damaged condition appears.
Drawings
The utility model is described in detail below with reference to specific embodiments and the attached drawing figures, wherein:
FIG. 1 is a schematic front view of a robot in accordance with an embodiment of the present invention;
FIG. 2 is a schematic view of a wafer boat clamping apparatus according to an embodiment of the present invention;
FIG. 3 is an enlarged schematic view of the structure at A in FIG. 2;
FIG. 4 is an enlarged view of the structure at B in FIG. 3;
FIG. 5 is an enlarged schematic view of the traversing assembly of FIG. 1;
figure 6 is a right side view of a robot in accordance with an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and examples. It should be understood that the following specific examples are only for illustrating the present invention and are not to be construed as limiting the present invention.
As shown in fig. 1 to 6, in order to achieve the above purpose, the present invention provides a boat clamping device 10, which includes a screw stepping motor 11, a screw nut 12, a lifting linkage shaft 13, two transmission plates 14, two swing shafts 15, and at least one pair of clamping components;
the screw rod nut 12 is mounted on a screw rod of the screw rod stepping motor 11, a lifting plate is arranged on the screw rod nut 12, a connecting plate perpendicular to the horizontal plane of the lifting plate is arranged on the lifting plate, the lifting linkage shaft 13 is connected to the connecting plate and perpendicular to the side wall of the screw rod, the two swinging shafts 15 and the lifting linkage shaft 13 are arranged in parallel and are uniformly distributed on two sides of the lifting linkage shaft 13, the two transmission plates 14 are both sleeved on the lifting linkage shaft 13, and one ends, away from the lifting linkage shaft 13, of the two transmission plates 14 are respectively connected to different swinging shafts 15; the pair of clamping assemblies are respectively connected to the two swing shafts 15, and each clamping assembly comprises a clamping fixing plate 161 connected to the swing shaft 15 and an annular clamping part detachably connected with the clamping fixing plate 161.
Specifically, the boat clamping device 10 comprises a screw rod stepping motor 11, a screw rod nut 12, a lifting linkage shaft 13, two transmission plates 14, two swinging shafts 15 and at least one pair of clamping components.
The screw stepping motor 11 is fixed on a bottom plate 19, and two parallel bearing seats 101 are arranged on the bottom plate 19. The lead screw nut 12 is installed on a lead screw shaft of the lead screw stepping motor 11, a lifting plate horizontally arranged is fixedly connected to the lead screw nut 12, a connecting plate perpendicular to the horizontal plane of the lifting plate is connected to one side face of the horizontal lifting plate, the lifting linkage shaft is fixed to the connecting plate and perpendicular to the side wall of the lead screw, and the lead screw nut 12 drives the lifting plate and the connecting plate to move together when lifting along the lead screw so as to drive the lifting linkage shaft 13 connected to the connecting plate to move together.
The two swinging shafts 15 are parallel to the lifting linkage shaft 13, the two swinging shafts 15 are respectively arranged at two horizontal sides of the lifting linkage shaft 13, and the two swinging shafts 15 are inserted into bearing holes of the bearing block 101.
The two swing shafts 15 are respectively provided with a transmission plate 14, one end of each transmission plate is movably sleeved on the lifting linkage shaft 13, and at least one pair of clamping components are respectively fixed at one ends of the two swing shafts 15, which are far away from the bearing block 101.
The screw rod stepping motor 11 is used as a power source to drive the screw rod nut 12 to ascend or descend, and the lifting linkage shaft 13 ascends or descends along with the screw rod nut 12. When the screw rod stepping motor 11 drives the screw rod nut 12 to move upwards, the lifting linkage shaft 13 drives the two swinging shafts 15 to rotate inwards, namely the two clamping components rotate inwards to contact with the outer edge of the wafer boat, so that the wafer boat is clamped. When the screw rod stepping motor 11 drives the screw rod nut 12 to move downwards, the lifting linkage shaft 13 drives the two swinging shafts 15 to rotate outwards, namely the two clamping components rotate outwards to be separated from the outer edge of the wafer boat, so that the wafer boat is released.
It is conceivable that, in order to facilitate accurate control of the position of the screw nut 12, a height detection member 18 for detecting the movement position of the screw nut may be disposed on the bottom plate 19, and the occurrence of the situation that the screw nut 12 is excessively clamped by the clamping assembly due to excessive movement can be effectively avoided by the height detection member 18.
The clamping fixing plate 161 is provided with a through hole for the swing shaft 15 to pass through, and the side wall of the through hole is provided with an opening, so that the clamping fixing plate 161 can adapt to swing shafts 15 with different sizes, and the clamping fixing plate 161 is convenient to mount and fix. The clamping fixing plate 161 is further provided with a fastener for integrally connecting two side walls of the opening, and the fastener is a screw.
It is conceivable that the clamping fixing plate 161 and the swing shaft 15 may be fixedly connected, such as by welding or integral molding, and the connection strength between the swing shaft 15 and the clamping fixing plate 161 may be improved by the fixed connection.
The clamping fixing plate 161 is detachably connected with an annular clamping portion by means of screws, clamping, and the like. Because cyclic annular clamping part is an overall structure, when cup jointing cyclic annular clamping part on the outer fringe of brilliant boat, whole cyclic annular clamping part atress is even for its outer fringe with the brilliant boat only has two kinds of circumstances: the first is to completely clamp the wafer boat; the second is a completely undamped boat. Thereby avoiding the unstable condition of the crystal boat caused by partially clamping the crystal boat and improving the stability of clamping the whole crystal boat. Meanwhile, the contact position of the annular clamping part and the shell of the wafer boat is large, and the alignment is very convenient.
Optionally, a photoelectric sensor and/or a distance sensor may be disposed on the annular clamping portion to detect whether the annular clamping portion clamps the boat, so as to improve real-time monitoring of the clamping portion.
Adopt above-mentioned technical scheme, set up cyclic annular clamping part through the one end of keeping away from bearing frame 101 on oscillating shaft 15, get the crystal boat through cyclic annular clamping part clamp, reduced the degree of difficulty to the crystal boat location, also avoid appearing partly unhook at the centre gripping in-process simultaneously, lead to the fixed unstability of crystal boat, the crystal boat damaged condition appears.
In an embodiment of the present application, the annular clamping portion includes a clamping seat 1621 detachably connected to the clamping fixing plate 161 and a U-shaped clamping claw 1622 having a free end detachably connected to the clamping seat 1621.
Specifically, the annular clamping portion comprises a clamping seat 1621 detachably connected to the clamping fixing plate 161, the clamping seat 1621 is composed of a metal framework and a teflon pipe coated outside the metal framework, the metal framework can be made of aluminum alloy, stainless steel and the like, and the clamping seat manufactured by the method has the advantages of strong supporting capacity, wear resistance, corrosion resistance and the like. In order to facilitate the mounting and dismounting between the clamping seat 1621 and the clamping fixing plate 161, the clamping seat 1621 and the clamping fixing plate 161 are connected by screws and/or bolts.
One side of the clamping seat 1621 far away from the clamping fixing plate 161 is detachably connected with a U-shaped clamping claw 1622, and the clamping seat 1621 is detachably connected with the clamping claw, so that the clamping claw can be conveniently replaced to adapt to the crystal boats with different sizes. The flexibility of gripper jaw use has been improved.
By adopting the technical scheme, the adaptation of the boat clamping device 10 to boats of different sizes is improved, and the application range of the boat clamping device 10 is further improved.
In an embodiment of the present application, the clamping seat 1621 is M-shaped.
Specifically, the clamping seat 1621 adopts an M-shaped structure, has a simple structure and high structural strength, and can be adapted to the U-shaped clamping claws 1622 with different sizes.
In an embodiment of the present application, a guide shaft 17 for limiting the horizontal rotation of the lifting linkage shaft 13 is disposed between the feed screw nut 12 and the lifting linkage shaft 13.
Specifically, the guide shaft 17 is fixedly connected to the bottom plate 19, and the longitudinal direction of the guide shaft 17 is parallel to the longitudinal direction of the screw shaft.
The guide shaft 17 for limiting the horizontal rotation of the lifting linkage shaft 13 is arranged between the screw rod nut 12 and the lifting linkage shaft 13, so that the horizontal rotation of the lifting linkage shaft 13 is avoided, and the stable operation of the equipment is ensured.
The application also discloses a manipulator 100, which comprises the boat clamping device 10 and a lifting component 20 for driving the boat clamping device 10 to move up and down.
Specifically, a manipulator 100 includes a boat clamping device 10 and a lifting assembly 20 connected with the boat clamping device 10, and after the boat clamping device 10 clamps a boat, the lifting assembly 20 moves the boat in a vertical direction, so that the flexibility of the operation of the boat clamping device 10 is improved.
In an embodiment of the present application, the lifting assembly 20 includes a lifting support frame 21, a lifting driving member 22 is disposed on the lifting support frame 21, an output shaft of the lifting driving member 22 is connected to a lifting screw 23, and a lifting screw nut 24 for driving the boat clamping device 10 to ascend and descend is sleeved on the lifting screw 23.
Specifically, the lifting assembly 20 includes a lifting support frame 21, and the lifting support frame 21 may be fixed on a fixed frame or other movable assembly.
The robot arm 100 can drive only the movement of the boat gripper 10 in the vertical direction when the elevating bracket is fixed to the fixing bracket. When the lifting support frame 21 is fixed to other moving components, such as the traverse assembly 40, a more complicated motion of the boat gripper 10 can be achieved.
The lifting support frame 21 is provided with a lifting driving member 22, and the lifting driving member 22 can be a screw rod stepping motor 11 or a common driving motor. When the lifting driving member 22 is a common driving motor, an output shaft of the lifting driving member 22 is connected with a lifting screw 23, and a lifting screw nut 24 for driving the boat clamping device 10 to ascend and descend is sleeved on the lifting screw 23.
When the lifting driving member 22 drives the lifting screw 23 to rotate, the lifting screw nut 24 moves along the length direction of the lifting screw 23, so as to drive the boat clamping device 10 to ascend or descend.
In order to reduce the length of the lifting assembly 20, the lifting driving member 22 and the lifting screw 23 may be arranged in parallel, an output shaft of the lifting driving member 22 and the lifting screw 23 are parallel to each other, and the lifting screw 23 and the output shaft of the lifting driving member 22 are driven by a driving belt.
By adopting the technical scheme, the lifting assembly 20 is arranged on the wafer boat clamping device 10 to drive the wafer boat clamping device 10 to perform lifting movement, so that the flexibility of the operation of the wafer boat clamping device 10 is improved.
In an embodiment of the present application, the lifting support frame 21 is further provided with a lifting in-place detection module 30 for detecting a movement position of the lifting nut.
Specifically, the in-place lifting detection module 30 may be a photoelectric detection module, an electromagnetic induction detection module, or the like.
The lifting in-place detection module 30 for detecting the movement position of the lifting nut is arranged at two ends of the lifting support frame 21, so that the movement position of the lifting nut can be detected in real time, and the accurate adjustment of the position of the wafer boat clamping device 10 is realized.
In one embodiment of the present application, a traverse assembly 40 for driving the horizontal traverse of the lifting support frame 21 is further included.
In one embodiment of the present application, the traverse assembly 40 includes a guide rail 41 slidably coupled to the lift support frame 21 and a traverse drive 42 for driving the lift support frame 21 to reciprocate on the guide rail 41.
Specifically, the traverse module includes a guide rail 41, the guide rail 41 is fixed on the main body of the apparatus, and the lifting support frame 21 is slidably connected to the guide rail 41.
The traverse driving member 42 is a general driving motor, and the traverse driving member 42 drives the lifting support frame 21 to reciprocate on the guide rail 41.
In order to facilitate the driving of the traverse driving member 42, at least one rack 43 is disposed parallel to the guide rail 41, the rack 43 is fixed to the main body of the apparatus, the traverse driving member 42 is fixed to the lifting support frame 21, and the gear 44 on the output shaft of the traverse driving member 42 is engaged with the rack 43, so that the lifting support frame 21 is driven to slide on the guide rail 41 when the output shaft of the traverse driving member 42 rotates.
In order to improve the stability of the connection between the guide rail 41 and the elevator support frame 21, the guide rail 41 is preferably two parallel.
By adopting the technical scheme, the transverse moving component 40 is connected to the lifting support frame 21 to realize the transverse moving of the lifting support frame 21, so that the application range of the wafer boat clamping device 10 is widened.
In an embodiment of the present application, a traverse position detecting module 50 is further included for detecting a traverse position of the lifting support frame 21.
Specifically, the traverse in-place detection module 50 may be a photoelectric detection module, an electromagnetic induction detection module, or the like.
The transverse moving in-place detection module 50 for detecting the moving position of the lifting support frame 21 is arranged at the two ends of the guide rail 41, so that the moving position of the lifting support frame 21 can be detected in real time, and accurate adjustment of the position of the lifting support frame 21 is facilitated.
Conceivably, avoid equipment to cause the injury to the user, can set up corresponding safety protection subassembly on lifting combination 20 and sideslip subassembly 40, when detecting that the maintainer overhauls equipment, pause equipment work.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the technical solutions of the present invention, which are made by using the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A boat clamping device comprises a screw rod stepping motor, a screw rod nut, a lifting linkage shaft, two transmission plates, two swinging shafts and at least one pair of clamping components;
the screw rod nut is installed on a screw rod of the screw rod stepping motor, a lifting plate is arranged on the screw rod nut, a connecting plate perpendicular to the horizontal plane of the lifting plate is arranged on the lifting plate, the lifting linkage shaft is connected to the connecting plate and perpendicular to the side wall of the screw rod, the two swinging shafts are arranged in parallel to the lifting linkage shaft and are uniformly distributed on two sides of the lifting linkage shaft, the two transmission plates are both sleeved on the lifting linkage shaft, and one ends of the two transmission plates, far away from the lifting linkage shaft, are respectively connected to different swinging shafts; the pair of clamping components are respectively connected to the two swinging shafts, and the clamping components are characterized by comprising clamping fixing plates connected to the swinging shafts and annular clamping parts detachably connected with the clamping fixing plates.
2. The boat clamping apparatus of claim 1, wherein the annular clamping portion comprises a clamping seat detachably coupled to the clamping fixture plate and a U-shaped clamping claw having a free end detachably coupled to the clamping seat.
3. The boat clamping apparatus of claim 2, wherein the clamping base is M-shaped.
4. The boat clamping device as claimed in claim 1, wherein a guide shaft for limiting the horizontal rotation of the lifting linkage shaft is provided between the feed screw nut and the lifting linkage shaft.
5. A robot comprising the boat gripper according to any one of claims 1 to 4 and a lifting unit for driving the boat gripper to move up and down.
6. The robot of claim 5, wherein the lifting assembly comprises a lifting support frame, the lifting support frame is provided with a lifting driving member, an output shaft of the lifting driving member is connected with a lifting screw rod, and a lifting screw rod nut for driving the boat clamping device to lift is sleeved on the lifting screw rod.
7. The manipulator according to claim 6, wherein the lifting support frame is further provided with a lifting in-place detection module for detecting the movement position of the lifting feed screw nut.
8. The robot of claim 6, further comprising a traverse assembly for driving horizontal traverse of the lift support frame.
9. The robot of claim 8, wherein the traverse assembly includes a guide rail slidably coupled to the lift support frame and a traverse drive driving the lift support frame to reciprocate on the guide rail.
10. The robot of claim 9, further comprising a traverse-to-position detection module for detecting a traverse position of the lift support frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122443656.9U CN216189096U (en) | 2021-10-11 | 2021-10-11 | Crystal boat clamping device and manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122443656.9U CN216189096U (en) | 2021-10-11 | 2021-10-11 | Crystal boat clamping device and manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216189096U true CN216189096U (en) | 2022-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122443656.9U Active CN216189096U (en) | 2021-10-11 | 2021-10-11 | Crystal boat clamping device and manipulator |
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| Country | Link |
|---|---|
| CN (1) | CN216189096U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024060277A1 (en) * | 2022-09-20 | 2024-03-28 | 台湾积体电路制造股份有限公司 | Clamping apparatus, manipulator, and mechanical apparatus |
-
2021
- 2021-10-11 CN CN202122443656.9U patent/CN216189096U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024060277A1 (en) * | 2022-09-20 | 2024-03-28 | 台湾积体电路制造股份有限公司 | Clamping apparatus, manipulator, and mechanical apparatus |
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