WO2024060273A1 - 扩散炉 - Google Patents

扩散炉 Download PDF

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Publication number
WO2024060273A1
WO2024060273A1 PCT/CN2022/121466 CN2022121466W WO2024060273A1 WO 2024060273 A1 WO2024060273 A1 WO 2024060273A1 CN 2022121466 W CN2022121466 W CN 2022121466W WO 2024060273 A1 WO2024060273 A1 WO 2024060273A1
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WIPO (PCT)
Prior art keywords
wire
wiring
housing
diffusion furnace
port
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PCT/CN2022/121466
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English (en)
French (fr)
Inventor
范宜灏
Original Assignee
台湾积体电路制造股份有限公司
台积电(中国)有限公司
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Publication of WO2024060273A1 publication Critical patent/WO2024060273A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R27/00—Coupling parts adapted for co-operation with two or more dissimilar counterparts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present application belongs to the technical field of diffusion furnaces, and particularly relates to a diffusion furnace.
  • Diffusion furnace is one of the important process equipments in the front process of semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.
  • the diffusion furnace includes a vacuum pipeline with multiple sections. Each section of the vacuum pipeline controls the temperature in a closed loop to maintain a constant temperature and avoid internal deposition of reactants. Each section of the vacuum pipeline is wrapped with a heating tape. Therefore, each section of the vacuum pipeline is connected to the power cord of the heating tape and the thermocouple connector that controls the vacuum pipeline to connect to the control machine that provides power and thermocouple wiring.
  • the vacuum pipeline In order to ensure the performance of the diffusion furnace, the vacuum pipeline needs to be maintained from time to time. Each maintenance requires the removal of the heating belt to replace the vacuum pipeline. Therefore, the power supply and thermocouple wiring connected to it also need to be removed. After the replacement is completed Reconnect. In related technologies, since the placement of the power supply and thermocouple wiring is not fixed, it is often necessary to re-identify them after each disassembly to test whether the connections are correct, resulting in low maintenance efficiency.
  • the embodiment of the present application provides a diffusion furnace, which makes the maintenance of the diffusion furnace convenient and low-cost.
  • the embodiment of the present application provides a diffusion furnace, including a control machine, a vacuum tube rate and a hub.
  • the hub includes a housing, a plurality of first wiring ports and a plurality of second wiring ports provided on the housing.
  • the first wiring ports and the second wiring ports correspond one to one, and the first wiring port and the second wiring port include Wire channel; the control machine is connected to a first wire, and the vacuum pipeline is connected to a second wire.
  • the first wire extends into the first connection port and is partially accommodated in the wire channel.
  • the first wire and the second wire are connected through the second connection port. .
  • the diffusion furnace provided by the embodiment of the present application is provided with a hub.
  • the hub includes a one-to-one corresponding first connection port and a second connection port.
  • the first wire drawn from the control machine is connected to the first connection port of the hub and is led out by the vacuum pipeline.
  • the second wire is connected to the second connection port, so that the first wire and the second wire are connected to ensure that the connections between the control machine and the vacuum pipeline are in one-to-one correspondence.
  • the diffusion furnace further includes a first connector and a second connector, the first connector is disposed between the control machine and the hub, and a plurality of second connectors are disposed at intervals in the vacuum pipeline.
  • the first wire includes a first general section and a plurality of first sections.
  • the first general section is connected between the control machine and the first connector, and the plurality of first sections are connected to the first connector and the first connector. between multiple first wiring ports of the hub.
  • the second wire includes a plurality of second sub-wires, the second sub-wires extend along the vacuum pipeline, one end of the second sub-wires is connected to the second connector, and the other end is connected to the second connection port.
  • the first wiring port and the second wiring port are provided on the same side of the housing, the first wiring port and the second wiring port are spaced apart along the height direction of the housing, the plurality of first wiring ports and the plurality of The second wiring ports are arranged on the housing at intervals along the height direction of the housing.
  • the interior of the housing includes partitions extending along the thickness direction of the housing and spaced apart along the width direction.
  • the partitions divide the internal space of the housing into a plurality of wire channels.
  • first connection port and the second connection port are provided at the same end of the wire channel; or the first connection port and the second connection port are provided at both ends of the wire channel.
  • the entrance of the first wiring port includes an irregular edge.
  • the first wiring port includes a plurality of first-type interfaces and at least one second-type interface, and the first-type interfaces and the second-type interfaces are arranged in sequence.
  • the size of the hub in the height direction of the housing, is 290mm to 320mm; in the width direction of the housing, the size of the hub is 180mm to 210mm; in the thickness direction of the housing, the size of the hub is 45mm to 70mm .
  • Figure 1 is an overall schematic diagram of a diffusion furnace provided by an embodiment of the present application.
  • FIG2 is a schematic diagram of the structure of a hub provided in an embodiment of the present application.
  • FIG. 3 is a schematic diagram of the internal structure of the hub provided by the embodiment of the present application.
  • an embodiment means that a particular feature, structure or characteristic described in connection with the embodiment may be included in at least one embodiment of the application.
  • the appearances of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments.
  • connection should be understood in a broad sense.
  • connection can be a fixed connection, It can also be detachably connected or integrally connected; it can be directly connected or indirectly connected through an intermediate medium; it can be internal communication between two components.
  • connection can be a fixed connection
  • connection can also be detachably connected or integrally connected; it can be directly connected or indirectly connected through an intermediate medium; it can be internal communication between two components.
  • connection can also be detachably connected or integrally connected; it can be directly connected or indirectly connected through an intermediate medium; it can be internal communication between two components.
  • “Plural” appearing in this application means two or more (including two).
  • parallel includes not only the absolutely parallel situation, but also the roughly parallel situation that is conventionally recognized in engineering; at the same time, the term “perpendicular” includes not only the absolutely vertical situation, but also the roughly parallel situation that is conventionally recognized in engineering. vertical situation.
  • each section of the vacuum pipeline of the diffusion furnace is wrapped with a heating tape, and the control machine simultaneously connects multiple power wiring and multiple thermocouple wiring for corresponding connection with each section of the vacuum pipeline.
  • the heating tape needs to be removed and the vacuum pipeline replaced during maintenance, the power cord and thermocouple wire connectors need to be removed from the vacuum pipeline. When reinstalling, it is often necessary to identify the power cord and thermocouple wire again before confirming Whether the connection is correct seriously affects the efficiency of maintenance.
  • a hub is provided.
  • the hub includes a one-to-one corresponding first connection port and a second connection port.
  • the first wire drawn from the control machine is connected to the first connection port of the hub.
  • the second wire drawn from the vacuum pipeline is connected to the second connection port, so that the first wire and the second wire are connected to ensure that the connections between the control machine and the vacuum pipeline are in one-to-one correspondence.
  • a wire channel is included between the first wiring port and the second wiring port. Placing the redundant first wires in the wire channel can realize the organizing and storage function, improve the orderliness of the diffusion furnace cables, and reduce the mess caused by wires. The security risks arising from this.
  • FIG. 1 is an overall schematic diagram of a diffusion furnace provided by an embodiment of the present application.
  • FIG. 2 is a schematic structural diagram of the hub 100 provided by the embodiment of the present application.
  • the diffusion furnace includes a control machine 300 , a vacuum pipeline 200 and a hub 100 .
  • the control machine 300 is connected to the first wire 41
  • the vacuum pipeline 200 is connected to the second wire 42 .
  • first wire 41 and the second wire 42 here do not represent only one wire.
  • the first wire 41 and the second wire 42 can be a combination of a power wire and a thermocouple wire, or they can also refer to a co-extending wire.
  • the embodiments of the present application do not limit the multi-strand power supply wires and thermocouple wires.
  • the hub 100 includes a housing 1, a first wiring port 21 and a second wiring port 22.
  • the first wiring ports 21 and the second wiring ports 22 are disposed on the housing 1, corresponding to each other and including a wire channel 23 therebetween.
  • the first wire 41 is connected to the first connection port 21
  • the second wire 42 is connected to the second connection port 22 .
  • the first wire 41 can include multiple strands, and each first wire 41 is regarded as a group of power wires led out from the control machine 300 and thermocouple wires, connected to multiple first wiring ports 21;
  • the second wires 42 may also include multiple strands, and each second wire 42 is regarded as a set of power wires and thermocouple wires led out from the second wiring ports 22. , connected to each section of the vacuum pipeline 200.
  • the first connection port 21 also corresponds to the second connection port 22 one-to-one, and the first wire 41 and the second wire 42 can be connected correspondingly through the wire channel 23 . In this way, it can be ensured that each power line and each thermocouple line drawn from the control machine 300 are correspondingly connected to each section of the vacuum pipeline 200.
  • the first wiring port 21 and the second wiring port 22 are provided on the same side of the housing 1, and the first wiring port 21 and the second wiring port 22 are spaced apart along the thickness direction Y of the housing 1, The plurality of first connection ports 21 and the plurality of second connection ports 22 are respectively arranged in the housing 1 at intervals along the height direction Z of the housing 1 .
  • the width direction, thickness direction and height direction of the housing 1 may be the X direction, Y direction and Z direction.
  • the width direction X, the thickness direction Y, and the height direction Z intersect each other.
  • the width direction X, the thickness direction Y, and the height direction Z are perpendicular to each other.
  • the width direction X, the thickness direction Y and the height direction Z can be regarded as perpendicular to each other.
  • the width direction, thickness direction and height direction can also be along other directions, and there can also be other included angles between them.
  • a plurality of first connection ports 21 are arranged at intervals along the height direction Z on one side of the housing 1
  • a plurality of second connection ports 22 are also arranged side by side with the first connection ports 21 and at intervals along the height direction Z.
  • the first wiring port 21 and the second wiring port 22 are in one-to-one correspondence in the thickness direction Y, so that it is easier to determine the positions of the first wiring port 21 and the second wiring port 22 during use. relation.
  • keeping the first wiring port 21 and the second wiring port 22 at a certain distance in the thickness direction Y can facilitate the first wire 41 and the second wire 42 to enter the first wiring port 21 and the second wiring port 22, thereby improving the hub 100 availability.
  • first wiring port 21 and the second wiring port 22 can be arranged in other ways, as long as they are connected through the wire channel 23, which is not limited in the embodiment of the present application.
  • FIG. 3 is a schematic diagram of the internal structure of the hub 100 provided by the embodiment of the present application.
  • the first wire 41 extends into the first wiring port 21 and is partially accommodated in the wire channel 23 , and the first wire 41 and the second wire 42 pass through the second wiring port 22 connected.
  • the first wire 41 includes multiple strands of wire.
  • Each strand of the first wire 41 is regarded as a set of power wires and thermocouple wires drawn from the control machine 300 , extending into multiple first wiring ports 21 , and the redundant parts are It is stored in the wire channel 23 so that the first wire 41 is connected to the second wiring port 22 inside the hub 100 . In this way, when the second wire 42 is connected to the second wiring port 22 , the corresponding connection with the first wire 41 can be achieved.
  • the interior of the housing 1 includes partitions 11 extending along the thickness direction Y of the housing 1 and arranged at intervals along the width direction X.
  • the partitions 11 divide the internal space of the housing 1 into a plurality of wire channels 23 .
  • the separation piece 11 extends along the width direction X. And by arranging them at intervals along the height direction Z, the internal space of the housing 1 can be divided into a plurality of small spaces arranged sequentially along the height direction Z to be used as wire channels 23 for accommodating the first wire 41 . Therefore, the wire channel 23 can be regarded as a trough located inside the housing 1 .
  • the plurality of wire channels 23 may be connected to each other or not connected to each other, as long as the effect of accommodating the first wire 41 can be achieved.
  • the wire channel 23 can also be provided by other components.
  • other components that can accommodate the first wires 41 may also be provided in the wire channel 23, such as winding the first wires 41 thereon. reel, the embodiment of the present application does not limit this.
  • first connection port 21 and the second connection port 22 are provided at the same end of the wire channel 23; or the first connection port 21 and the second connection port 22 are provided at both ends of the wire channel 23. That is to say, when the wire passages 23 are formed as spaces arranged sequentially along the height direction Z inside the housing 1 , the first wiring port 21 and the second wiring port 22 can also be arranged opposite to each other along the width direction X of the housing 1 . On both sides, just make sure they correspond one to one.
  • the entrance of the first wiring port 21 includes irregular edges.
  • the entrance edge of the first wiring port 21 presents irregular protrusions, which can fix the first wire 41 .
  • the first wiring port 21 may also be provided with a component capable of fixing the wire, for example, a lock capable of locking the wire may be provided in the first wiring port 21 , which is not limited in the embodiment of the present application.
  • the first wiring port 21 includes a plurality of first-type interfaces 211 and at least one second-type interface 212.
  • the first-type interfaces 211 and the second-type interfaces 212 are arranged in sequence.
  • the first type of interface 211 is an interface into which the first wire 41 can extend.
  • the first type of interface 211 can accommodate two wires: a power cord and a thermocouple wire.
  • the second type of interface 212 can The first type interface 211 can accommodate at least another strand of grounding wire, that is, it can accommodate three strands of wire or more.
  • the hub 100 may not include the second type interface 212.
  • the second type interface 212 may also be of other types.
  • the second type interface 212 may not be provided at the end of the first wiring port 21.
  • the embodiment of the present application is suitable for There is no restriction on this.
  • the diffusion furnace also includes a first connector 31 and a second connector 32.
  • the first connector 31 is provided between the control machine 300 and the hub 100, and a plurality of second connectors 32 are spaced apart. Set in vacuum line 200.
  • the first connector 31 may be a combined connector that functions as a branching connector.
  • the first wire 41 includes a first main section 411 and a plurality of first subsections 412.
  • the first main section 411 is connected between the control machine 300 and the first connector 31, and the plurality of first subsections 412 are connected between the first connector 31 and a plurality of first wiring ports 21 of the hub 100.
  • the first main section 411 may be regarded as a collection of multiple strands of power lines and thermocouple wires drawn from the control machine 300, or multiple strands of power lines and thermocouple wires extending together.
  • the first main section 411 is connected to the first connector 31, and the first connector 31 may function as a branching connector, and the multiple strands of power lines and thermocouple wires are correspondingly divided into a plurality of groups of first subsections 412, each group of which includes a strand of power line and a strand of thermocouple wire, and each group of first subsections 412 is connected to the first wiring port 21 of the hub 100.
  • first wire 41 is led out of the control machine 300 in the first entire section 411 , the arrangement of this section of wire can be more orderly.
  • the second connector 32 may be a combination connector capable of simultaneously connecting the power line and the thermocouple wire, and is provided at intervals in the vacuum pipeline 200 so that each section of the vacuum pipeline 200 can be connected to the power wire and the thermocouple wire.
  • the second wire 42 includes a plurality of second sub-wires 421 extending along the vacuum pipeline 200 . One end of the second sub-wire 421 is connected to the second connector 32 and the other end is connected to the second connector 32 .
  • the second wiring port 22 That is to say, each second sub-wire 421 is respectively connected between the second connection port 22 of the hub 100 and each section of the vacuum pipeline 200 .
  • the second wire 42 can be regarded as a plurality of second sub-wires 421 A collection of multiple second sub-lines 421 extending together. Combining the plurality of second sub-wires 421 into the second wire 42 and extending along the vacuum pipeline 200 can also increase the orderliness of the wire arrangement.
  • the second wire 42 may also include a second general section and a plurality of second segments, and the second general section is connected to the first connector 31 or other combinations that can function as branch lines. Between the connector and the second connector 32 , a plurality of second segments are connected between the first connector 31 and the plurality of second wiring ports 22 of the hub 100 . It should be understood that the second general section indicates that a plurality of second sub-lines 421 are gathered together and extend along the vacuum pipeline 200.
  • the plurality of second sub-lines 421 can be led out from the second general section to the corresponding second joint 32, That is to say, when the second general segment is a bundle of wires, the second segment indicates that a plurality of second sub-wires 421 are respectively connected to the second wiring port 22 from the first connector 31 to form a multi-strand wire. Condition.
  • the size of the hub 100 in the height direction Z of the housing 1, is 290mm to 320mm; in the width direction X of the housing 1, the size of the hub 100 is 180mm to 210mm; in the thickness of the housing 1 Direction Y, the size of the hub 100 is 45mm to 70mm. That is to say, the housing 1 of the hub 100 can be placed exactly between the control machine 300 and the vacuum pipeline 200 of the diffusion furnace, so that the hub box can cleverly utilize the existing space for installation without changing any structure of the diffusion furnace, and Does not take up extra space and has good usability.
  • the diffusion furnace in the embodiment of the present application is provided with a hub 100.
  • the hub 100 includes a one-to-one corresponding first connection port 21 and a second connection port 22.
  • the first wire 41 drawn from the control machine 300 is connected to the hub.
  • 100's first connection port 21, the second wire 42 drawn from the vacuum pipeline 200 is connected to the second connection port 22, so that the first wire 41 and the second wire 42 are connected to ensure the control machine 300 and the vacuum pipeline 200
  • the connections correspond one to one.
  • a wire channel 23 is included between the first wiring port 21 and the second wiring port 22. Placing the redundant first wire 41 in the wire channel 23 can realize the organization and storage function and improve the orderliness of the diffusion furnace cables. , Reduce safety risks caused by messy wires.

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Abstract

本申请提供了一种扩散炉，包括控制机台、真空管路以及集线器，集线器包括壳体、设置于壳体的多个第一接线口以及多个第二接线口，第一接线口与第二接线口一一对应，两者之间包括线材通道，控制机台连接有第一线材，真空管路连接有第二线材，第一线材伸入第一接线口且部分容纳于线材通道，第一线材与第二线材通过第二接线口相连接。根据本申请实施例的扩散炉，能够提高维护保养的工作效率。

Description

扩散炉 技术领域
本申请属于扩散炉技术领域，尤其涉及一种扩散炉。
背景技术
扩散炉是半导体生产线前工序的重要工艺设备之一，用于大规模集成电路、分立器件、电力电子、光电器件和光导纤维等行业的扩散、氧化、退火、合金及烧结等工艺。扩散炉包括真空管路，真空管路具有多段，每一段真空管路闭环控制温度，以保持温度恒定，避免内部沉积反应物。真空管路的每一段都包裹有加热带，因此，每一段真空管路都连接有加热带的电源线以及控制真空管路的热电偶接头，以与提供电源以及热电偶接线的控制机台相连接。
为了保证扩散炉的性能，需要时时对真空管路进行维护保养，每次维护保养都需要拆除加热带以更换真空管路，因此，也需要一并拆除与其连接的电源以及热电偶接线，在更换完毕后进行重新连接。在相关技术中，由于电源以及热电偶接线的摆放位置不固定，常需要在每次拆除后对其进行重新识别，以测试连接是否正确，使得维护保养效率较低。
发明内容
本申请实施例提供一种扩散炉，使得扩散炉的维护保养便捷且成本较低。
本申请实施例提供一种扩散炉，包括控制机台、真空管率以及集线器。集线器，包括壳体、设置于壳体的多个第一接线口以及多个第二接线 口，第一接线口与第二接线口一一对应，第一接线口与第二接线口之间包括线材通道；控制机台连接有第一线材，真空管路连接有第二线材，第一线材伸入第一接线口且部分容纳于线材通道，第一线材与第二线材通过第二接线口相连接。
本申请实施例提供的扩散炉通过设置集线器，集线器包括一一对应的第一接线口以及第二接线口，将由控制机台引出的第一线材连接于集线器的第一接线口，由真空管路引出的第二线材连接于第二接线口，使得第一线材与第二线材相连接，以保证控制机台以及真空管路的连线一一对应。通过集线器将原本的电源以及热电偶接线分为第一线材以及第二线材，能够减少接线的长度，减少接线出现接触不良的可能性，与此同时，在每次进行维护保养时，用户无需重新测试连线，仅需拆除第二线材一端并重新连接即可，能够减少连线所用时间，提高维护保养扩散炉的便捷性，同时提高了作业效率以降低维护成本。
在一些实施例中，扩散炉还包括第一接头以及第二接头，第一接头设置于控制机台与集线器之间，多个第二接头间隔设置于真空管路。
在一些实施例中，第一线材包括第一总段以及多个第一分段，第一总段连接于控制机台以及第一接头之间，多个第一分段连接于第一接头以及集线器的多个第一接线口之间。
在一些实施例中，第二线材包括多第二子线，第二子线沿真空管路延伸，第二子线一端连接于第二接头，另一端连接于第二接线口。
在一些实施例中，第一接线口以及第二接线口设置于壳体的同一侧，第一接线口以及第二接线口沿壳体的高度方向间隔设置，多个第一接线口以及多个第二接线口分别沿壳体的高度方向间隔排列于壳体。
在一些实施例中，壳体内部包括沿壳体厚度方向延伸且沿宽度方向间隔排列的分隔片，分隔片将壳体的内部空间分隔为多个线材通道。
在一些实施例中，第一接线口以及第二接线口设置于线材通道的同一端；或第一接线口以及第二接线口设置于线材通道的两端。
在一些实施例中，第一接线口的入口包括不规则边缘。
在一些实施例中，第一接线口包括多个第一类接口以及至少一个第二类接口，第一类接口以及第二类接口依次间隔排列。
在一些实施例中，在壳体的高度方向，集线器的尺寸为290mm至320mm；在壳体的宽度方向，集线器的尺寸为180mm至210mm；在壳体的厚度方向，集线器的尺寸为45mm至70mm。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对本申请实施例中所需要使用的附图作简单地介绍，显而易见地，下面所描述的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据附图获得其他的附图。
图1为本申请实施例提供的扩散炉的整体示意图；
图2为本申请实施例提供的集线器的结构示意图；
图3为本申请实施例提供的集线器的内部结构示意图；
具体实施方式的附图标记如下：
1000、扩散炉；300、控制机台；200、真空管路；
100、集线器；1、壳体；11、分隔片；21、第一接线口；211、第一类接口；212、第二类接口；22、第二接线口；23、线材通道；
31、第一接头；32、第二接头；41、第一线材；411、第一总段；412、第一分段；42、第二线材；421、第二子线；
Z、高度方向；X、宽度方向；Y、厚度方向。
具体实施方式
为使本申请实施例的目的、技术方案和优点更加清楚，下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚地描述，显然，所描述的实施例是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
除非另有定义，本申请所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同；本申请中在申请的说明书中所使用的术语只是为了描述具体的实施例的目的，不是旨在于限制本申请；本申请的说明书和权利要求书及上述附图说明中的术语“包括”和“具有”以及它们的任何变形，意图在于覆盖不排他的包含。本申请的说明书和权利要求书或上述附图中的术语“第一”、“第二”等是用于区别不同对象，而不是用于描述特定顺序或主次关系。
在本申请中提及“实施例”意味着，结合实施例描述的特定特征、结构或特性可以包含在本申请的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例，也不是与其它实施例互斥的独立的或备选的实施例。
在本申请的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“附接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。
本申请中术语“和/或”，仅仅是一种描述关联对象的关联关系，表示可以存在三种关系，例如，A和/或B，可以表示：单独存在A，同时存 在A和B，单独存在B这三种情况。另外，本申请中字符“/”，一般表示前后关联对象是一种“或”的关系。
在本申请的实施例中，相同的附图标记表示相同的部件，并且为了简洁，在不同实施例中，省略对相同部件的详细说明。应理解，附图示出的本申请实施例中的各种部件的厚度、长宽等尺寸，以及集成装置的整体厚度、长宽等尺寸仅为示例性说明，而不应对本申请构成任何限定。
本申请中出现的“多个”指的是两个以上(包括两个)。
本申请中术语“平行”不仅包括绝对平行的情况，也包括了工程上常规认知的大致平行的情况；同时，“垂直”也不仅包括绝对垂直的情况，还包括工程上常规认知的大致垂直的情况。
目前，扩散炉的每一段真空管路上包裹有加热带，控制机台同时连接出多股电源接线以及多股热电偶接线用于与每一段真空管路对应连接。然而，申请人注意到，在由控制机台向每一段真空管路都引出电源线以及热电偶线的情况下，电源线以及电热偶线常常没有特定的排布顺序，多条线材凌乱布置，不仅影响美观，更存在安全风险。并且，由于在维护保养时需要拆除加热带更换真空管路，电源线以及热电偶线接头都需要从真空管路拆除，再重新安装时，往往需要对电源线以及电热偶线进行再次识别，才能够确认是否连接正确，严重影响维护保养的效率。
鉴于此，本申请实施例提供一种扩散炉，通过设置集线器，集线器包括一一对应的第一接线口以及第二接线口，将由控制机台引出的第一线材连接于集线器的第一接线口，由真空管路引出的第二线材连接于第二接线口，使得第一线材与第二线材相连接，以保证控制机台以及真空管路的连线一一对应。通过集线器将原本的电源以及热电偶接线分为第一线材以及第二线材，能够减少接线的长度，减少接线出现接触不良的可能性，与此同时，在每次进行维护保养时，用户无需重新测试连线，仅需拆除第二 线材一端并重新连接即可，能够减少连线所用时间，提高维护保养扩散炉的便捷性，同时提高了作业效率以降低维护成本。并且，第一接线口以及第二接线口之间包括线材通道，将冗余的第一线材摆放于线材通道内，能够实现整理收纳功能，提升扩散炉排线的整齐度，降低由于线材杂乱而产生的安全风险。
图1为本申请实施例提供的扩散炉整体示意图。图2为本申请实施例提供的集线器100的结构示意图。如图1以及图2所示，本申请的一些实施例中，扩散炉包括控制机台300、真空管路200以及集线器100。控制机台300连接有第一线材41，真空管路200连接有第二线材42。
应理解，第一线材41以及第二线材42在此处并不代表仅有一股线材，第一线材41以及第二线材42可以为电源线以及热电偶线的组合，也可以代指共同延伸的多股电源线以及热电偶线，本申请实施例对此不做限制。
集线器100包括壳体1、第一接线口21以及第二接线口22。多个第一接线口21以及多个第二接线口22设置于壳体1，两者一一对应且之间包括线材通道23。
在一些可能的连线示例中，第一线材41连接于第一接线口21，第二线材42连接于第二接线口22。在控制机台300可以引出多股电源线以及多股热电偶线的情况下，第一线材41可以包括多股，将每个第一线材41视作从控制机台300引出的一组电源线以及热电偶线，连接于多个第一接线口21；第二线材42也可包括多股，将每个第二线材42视作从第二接线口22引出的一组电源线以及热电偶线，与真空管路200的每段相连接。在第一线材41与第二线材42相对应的情况下，第一接线口21也与第二接线口22一一对应，且第一线材41与第二线材42可以通过线材通道23对应连接。如此，可以保证控制机台300所引出的每股电源线以及每股热电偶 线对应连接于的真空管路200的每一段。
本申请的一些实施例中，第一接线口21以及第二接线口22设置于壳体1的同一侧，第一接线口21以及第二接线口22沿壳体1的厚度方向Y间隔设置，多个第一接线口21以及多个第二接线口22分别沿壳体1的高度方向Z间隔排列于壳体1。
为便于描述，在本申请实施例中，以壳体1本身为参照物，壳体1的宽度方向、厚度方向以及高度方向可以为X方向、Y方向以及Z方向。其中，宽度方向X、厚度方向Y以及高度方向Z彼此相交，在本申请实施例中，宽度方向X、厚度方向Y以及高度方向Z彼此垂直。应理解，当宽度方向X、厚度方向Y以及高度方向Z彼此之间的夹角为85°-95°时，即可将宽度方向X、厚度方向Y以及高度方向Z三者视为彼此垂直。可选地，宽度方向、厚度方向以及高度方向也可以沿其它方向，三者之间也可以具有其它夹角。
在本申请实施例中，多个第一接线口21沿高度方向Z间隔排列于壳体1的一侧，多个第二接线口22也与第一接线口21并排而沿高度方向Z间隔排列于壳体1的一侧，使得第一接线口21与第二接线口22在厚度方向Y上一一对应，以便于在使用过程中更易判断第一接线口21与第二接线口22的位置关系。并且，使得第一接线口21与第二接线口22在厚度方向Y上保持一定距离，能够便于第一线材41以及第二线材42进入第一接线口21以及第二接线口22，提高集线器100的可用性。
可选地，第一接线口21以及第二接线口22可以以其它方式排列，保证两者通过线材通道23连接即可，本申请实施例对此不做限制。
图3为本申请实施例提供的集线器100的内部结构示意图。如图3所示，在另一些可能的连线示例中，第一线材41伸入第一接线口21且部分容纳于线材通道23，第一线材41与第二线材42通过第二接线口22相连 接。第一线材41包括多股线材，将每股第一线材41视作从控制机台300引出的一组电源线以及热电偶线，伸入多个第一接线口21，而将冗余的部分保存于线材通道23内，使第一线材41在集线器100内部连接于第二接线口22。如此，在第二线材42连接于第二接线口22的情况下，即可与第一线材41实现对应连接。
本申请的一些实施例中，壳体1内部包括沿壳体1厚度方向Y延伸且沿宽度方向X间隔排列的分隔片11，分隔片11将壳体1的内部空间分隔为多个线材通道23。
由于第一接线口21以及第二接线口22沿厚度方向Y间隔排列，且多个第一接线口21以及多个第二接线口22沿高度方向Z间隔排列，分隔片11沿宽度方向X延伸且沿高度方向Z间隔排列，可以将壳体1的内部空间分隔为多个沿高度方向Z依次排列的小空间，以用作容纳第一线材41的线材通道23。因此，可以将线材通道23视为位于壳体1内部的槽体，多个线材通道23彼此之间可以相互联通也可以相互不连通，能够实现容纳第一线材41的效果即可。
可选地，线材通道23也可以通过其它部件设置。在本身实施例中，为将第一线材41整齐排布于线材通道23内，线材通道23内也可以设置有其它能够收纳第一线材41的部件，例如将第一线材41卷绕于其上的卷轴，本申请实施例对此不做限制。
可选地，第一接线口21以及第二接线口22设置于线材通道23的同一端；或第一接线口21以及第二接线口22设置于线材通道23的两端。也即是说，在线材通道23形成为在壳体1内部沿高度方向Z依次排列的空间时，第一接线口21以及第二接线口22也可以沿宽度方向X相对设置于壳体1的两侧，保证两者能够一一对应即可。
再次参考图2。本申请的一些实施例中，第一接线口21的入口包括 不规则边缘。
由于第一线材41伸入第一接线口21，使得第一接线口21的入口边缘呈现不规则的凸起，能够对第一线材41起到固定作用。可选地，也可以采取在第一接线口21设置能够固定线材的部件的方式，例如在第一接线口21设置能够锁紧线材的锁扣，本申请实施例对此不做限制。
本申请的一些实施例中，第一接线口21包括多个第一类接口211以及至少一个第二类接口212，第一类接口211以及第二类接口212依次间隔排列。
第一类接口211也即能够使得第一线材41伸入其中的接口，在一些实施例中，第一类接口211能够容纳电源线以及热电偶线两股线材，第二类接口212则相较于第一类接口211至少能够容纳另一股接地用的线材，也即可以容纳三股线材或更多。可选地，集线器100可以不包括第二类接口212，第二类接口212也可以为其它类型，第二类接口212也可以不设置于第一接线口21的尾端，本申请实施例对此不做限制。
再次参考图1，本申请的一些实施例中，扩散炉还包括第一接头31以及第二接头32，第一接头31设置于控制机台300与集线器100之间，多个第二接头32间隔设置于真空管路200。
第一接头31可以为起到分线作用的组合接头。在一些可能的连线示例中，第一线材41包括第一总段411以及多个第一分段412，第一总段411连接于控制机台300以及第一接头31之间，多个第一分段412连接于第一接头31以及集线器100的多个第一接线口21之间。也即是说，第一总段411可以视作由控制机台300引出的多股电源线以及热电偶线的集合，或共同延伸的多股电源线以及热电偶线，第一总段411连接于第一接头31，第一接头31可以起到分线效果，而将多股电源线以及热电偶线对应分为每一组内包括一股电源线以及一股热电偶线的多组第一分段412，每组第一分 段412连接于集线器100的第一接线口21。在将第一线材41以第一总段411从控制机台300引出的情况下，能够增加这一段线材排布的整齐度。
第二接头32可以为能够同时接入电源线以及热电偶线的组合接头，间隔设置于真空管路200，以使得真空管路200的每一段能够连接有电源线以及热电偶线。在一些可能的连线示例中，第二线材42包括多个第二子线421，第二子线421沿真空管路200延伸，第二子线421一端连接于第二接头32，另一端连接于第二接线口22。也即是说，每一股第二子线421分别连接于集线器100的第二接线口22以及真空管路200的每一段之间，因此，第二线材42可以视作多股第二子线421的集合，或共同延伸的多股第二子线421。使得多股第二子线421组合为第二线材42而沿真空管路200延伸，同样能够增加线材排布的整齐度。
在另一些可选的连线示例中，第二线材42也可以包括第二总段以及多个第二分段，第二总段连接于第一接头31或其它能够起到分线作用的组合接头与第二接头32之间，多个第二分段连接于第一接头31与以及集线器100的多个第二接线口22之间。应理解，第二总段所指示的是多个第二子线421相集合而共同沿真空管路200延伸，多个第二子线421可以由第二总段向对应的第二接头32引出，也即是第二总段为一束线材的情况，第二分段所指示的是多个第二子线421分别由第一接头31向第二接线口22连接，而形成为多股线材的情况。
本申请的一些实施例中，在壳体1的高度方向Z，集线器100的尺寸为290mm至320mm；在壳体1的宽度方向X，集线器100的尺寸为180mm至210mm；在壳体1的厚度方向Y，集线器100的尺寸为45mm至70mm。也即是说，集线器100的壳体1可以恰好设置于扩散炉的控制机台300与真空管路200之间，使得集线盒巧妙地利用现有空间设置，无需改变扩散炉的任何结构，且不占用额外空间，具有良好的可用性。
综上所述，本申请实施例的扩散炉通过设置集线器100，集线器100包括一一对应的第一接线口21以及第二接线口22，将由控制机台300引出的第一线材41连接于集线器100的第一接线口21，由真空管路200引出的第二线材42连接于第二接线口22，使得第一线材41与第二线材42相连接，以保证控制机台300以及真空管路200的连线一一对应。通过集线器100将原本的电源以及热电偶接线分为第一线材41以及第二线材42，能够减少接线的长度，减少接线出现接触不良的可能性，与此同时，在每次进行维护保养时，用户无需重新测试连线，仅需拆除第二线材42一端并重新连接即可，能够减少连线所用时间，提高维护保养扩散炉1000的便捷性，同时提高了作业效率以降低维护成本。并且，第一接线口21以及第二接线口22之间包括线材通道23，将冗余的第一线材41摆放于线材通道23内，能够实现整理收纳功能，提升扩散炉排线的整齐度，降低由于线材杂乱而产生的安全风险。
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。
最后应说明的是：以上实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换，但这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的精神和范围。

Claims (10)

  1. 一种扩散炉，包括：
    控制机台(300)；
    真空管路(200)；以及
    集线器(100)，包括壳体(1)、设置于所述壳体(1)的多个第一接线口(21)以及多个第二接线口(22)，所述第一接线口(21)与所述第二接线口(22)一一对应，所述第一接线口(21)与所述第二接线口(22)之间包括线材通道(23)；
    所述控制机台(300)连接有第一线材(41)，所述真空管路(200)连接有第二线材(42)，所述第一线材(41)伸入所述第一接线口(21)且部分容纳于所述线材通道(23)，所述第一线材(41)与所述第二线材(42)通过所述第二接线口(22)相连接。
  2. 根据权利要求1所述的扩散炉，其中，所述扩散炉还包括第一接头(31)以及第二接头(32)，所述第一接头(31)设置于所述控制机台(300)与所述集线器(100)之间，多个所述第二接头(32)间隔设置于所述真空管路(200)。
  3. 根据权利要求2所述的扩散炉，其中，所述第一线材(41)包括第一总段(411)以及多个第一分段(412)，所述第一总段(411)连接于所述控制机台(300)以及所述第一接头(31)之间，多个所述第一分段(412)连接于所述第一接头(31)以及所述集线器(100)的多个所述第一接线口(21)之间。
  4. 根据权利要求2所述的扩散炉，其中，所述第二线材(42)包括多第二子线(421)，所述第二子线(421)沿所述真空管路(200)延伸，一端连接于所述第二接头(32)，另一端连接于所述第二接线口(22)。
  5. 根据权利要求1所述的扩散炉，其中，所述第一接线口(21)以及所述第二接线口(22)设置于所述壳体(1)的同一侧，所述第一接线口(21)以及所述第二接线口(22)沿所述壳体(1)的厚度方向间隔设置，多个所述第一接线 口(21)以及多个所述第二接线口(22)分别沿所述壳体(1)的高度方向间隔排列于所述壳体(1)。
  6. 根据权利要求1所述的扩散炉，其中，所述壳体(1)内部包括沿所述壳体(1)厚度方向延伸且沿高度方向间隔排列的分隔片(11)，所述分隔片(11)将所述壳体(1)的内部空间分隔为多个所述线材通道(23)。
  7. 根据权利要求6所述的扩散炉，其中，所述第一接线口(21)以及所述第二接线口(22)设置于所述线材通道(23)的同一端；或
    所述第一接线口(21)以及所述第二接线口(22)设置于所述线材通道(23)的两端。
  8. 根据权利要求1所述的扩散炉，其中，所述第一接线口(21)的入口包括不规则边缘。
  9. 根据权利要求1所述的扩散炉，其中，所述第一接线口(21)包括多个第一类接口(211)以及至少一个第二类接口(212)，所述第一类接口(211)以及所述第二类接口(212)依次间隔排列。
  10. 根据权利要求1所述的扩散炉，其中，在所述壳体(1)的高度方向，所述集线器(100)的尺寸为290mm至320mm；
    在所述壳体(1)的宽度方向，所述集线器(100)的尺寸为180mm至210mm；
    在所述壳体(1)的厚度方向，所述集线器(100)的尺寸为45mm至70mm。
PCT/CN2022/121466 2022-09-19 2022-09-26 扩散炉 WO2024060273A1 (zh)

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