WO2024057697A1 - 水処理システムおよび水処理方法 - Google Patents
水処理システムおよび水処理方法 Download PDFInfo
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- WO2024057697A1 WO2024057697A1 PCT/JP2023/025729 JP2023025729W WO2024057697A1 WO 2024057697 A1 WO2024057697 A1 WO 2024057697A1 JP 2023025729 W JP2023025729 W JP 2023025729W WO 2024057697 A1 WO2024057697 A1 WO 2024057697A1
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/008—Control or steering systems not provided for elsewhere in subclass C02F
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
- C02F1/325—Irradiation devices or lamp constructions
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/722—Oxidation by peroxides
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/30—Organic compounds
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/32—Details relating to UV-irradiation devices
- C02F2201/326—Lamp control systems
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/001—Upstream control, i.e. monitoring for predictive control
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/005—Processes using a programmable logic controller [PLC]
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/20—Total organic carbon [TOC]
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/22—O2
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/40—Liquid flow rate
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
Definitions
- the present invention relates to a water treatment system and a water treatment method.
- Patent Document 1 describes a technique for controlling the irradiation amount of an ultraviolet irradiation device of a main system based on the TOC value of treated water of a sub-ultrapure water production system provided separately from the main system.
- Patent Document 2 describes a technique in which a sulfur compound is added to water to be treated and the water is treated with ultraviolet light.
- the main system ultraviolet oxidation device is a low-pressure UV oxidation device. This method is effective when only TOC components that can be easily removed by low-pressure UV are detected.
- the water to be treated in a sub-ultrapure water production system may contain persistent TOC that is difficult to remove with RO or low-pressure UV oxidation equipment.
- the UV irradiation amount of the main system is controlled based on the TOC value of the treated water of the sub-ultrapure water production system, it is conceivable that the irradiation amount will be inappropriate (for example, excessive).
- Patent Document 2 does not include any description of controlling the irradiation amount or persulfuric acid concentration.
- the amount of irradiation or addition to TOC may be excessive or insufficient, making stable treatment difficult.
- excessive irradiation and additive amounts lead to increased power consumption, leading to higher operating costs.
- the above-mentioned technique has the problem that TOC cannot be removed stably and efficiently.
- An object of the present invention is to provide a water treatment system and a water treatment method that can perform stable and efficient TOC removal.
- the water treatment system of the present invention includes: A water treatment facility that includes multiple water treatment devices and processes water to be treated; a water treatment management device to which the water to be treated is supplied to any of the plurality of water treatment devices; and a control device that controls operating conditions of the water treatment device
- the water treatment management device includes: a first measurement unit that measures the TOC concentration of water flowing through the water flow line of the water treatment management device; a second measurement unit that measures the concentration of specific organic matter in the water flowing through the water flow line of the water treatment management device;
- the control device controls operating conditions of the water treatment device based on the TOC concentration measured by the first measuring section and the specific organic substance concentration measured by the second measuring section.
- the water treatment system of the present invention includes: A water treatment facility that includes multiple water treatment devices and processes water to be treated; a water treatment management device to which the water to be treated is supplied to any of the plurality of water treatment devices; oxidizing agent addition means for adding an oxidizing agent to the water to be treated; and a control device that controls operating conditions of the water treatment device
- the water treatment management device has a measurement unit that measures the TOC concentration of water flowing through the water flow line of the water treatment management device, The control device determines the amount of the oxidant added by the oxidizing agent adding means and the amount of the oxidizing agent added by the oxidizing agent adding means, based on the TOC concentration measured by the measuring section, and the amount of the oxidizing agent added by the oxidizing agent adding means to the water to be treated.
- the irradiation amount of at least one of the plurality of water treatment devices is controlled by the ultraviolet irradiation device.
- the water treatment method of the present invention includes: Water is passed through a water line of a water treatment management device to which the water to be treated is supplied to any of the plurality of water treatment devices of a water treatment facility that processes water to be treated using a plurality of water treatment devices. Measure the TOC concentration of the water being Measuring the concentration of specific organic matter in the water flowing through the water line of the water treatment management device, Operating conditions of the water treatment device are controlled based on the measured TOC concentration and the measured specific organic substance concentration.
- TOC can be removed stably and efficiently.
- FIG. 1 is a diagram showing a first embodiment of a water treatment system of the present invention.
- 2 is a flowchart for explaining an example of processing in the control device shown in FIG. 1.
- FIG. It is a figure showing the 2nd embodiment of the water treatment system of the present invention.
- 4 is a flowchart for explaining an example of processing in the control device shown in FIG. 3.
- FIG. It is a figure showing the 3rd embodiment of the water treatment system of the present invention.
- 6 is a flowchart for explaining an example of processing in the control device shown in FIG. 5.
- FIG. It is a figure showing the 4th embodiment of the water treatment system of the present invention.
- 8 is a flowchart for explaining an example of processing in the control device shown in FIG. 7.
- FIG. 7 is a diagram showing a first embodiment of a water treatment system of the present invention.
- FIG. 2 is a diagram showing a configuration for Example 1-1 of the water treatment system of the present invention.
- FIG. 2 is a diagram showing a configuration for Comparative Example 1-1 to be compared with Example 1-1.
- FIG. 2 is a diagram showing a configuration for Example 1-2 of the water treatment system of the present invention.
- FIG. 3 is a diagram showing a configuration for Comparative Example 1-2 to be compared with Example 1-2.
- FIG. 3 is a diagram showing a configuration for Example 2-1 of the water treatment system of the present invention.
- FIG. 3 is a diagram showing a configuration for Example 2-2 of the water treatment system of the present invention.
- FIG. 3 is a diagram showing a configuration for Example 3-1 of the water treatment system of the present invention.
- FIG. 3 is a diagram showing a configuration for Example 3-2 of the water treatment system of the present invention.
- FIG. 4 is a diagram showing a configuration for Example 4-1 of the water treatment system of the present invention.
- FIG. 4 is a diagram showing a configuration for Example 4-2 of the water treatment system of the present invention.
- FIG. 1 is a diagram showing a first embodiment of the water treatment system of the present invention.
- the water treatment system in this embodiment includes a water treatment facility 231 that includes a water treatment device 20 having a function of removing urea, a UV 21 that is an ultraviolet irradiation device, and a water treatment device 22.
- the water treatment devices 20 and 22 are, for example, one of the devices (unit devices) for treating the target liquid, such as a filtration device, activated carbon, deionization device, reverse osmosis membrane device, deaerator, ultraviolet irradiation device, etc. It is made up of a combination of multiple items.
- the water treatment device 20 includes a filtration device, activated carbon, a deionization device, and a reverse osmosis membrane device
- the water treatment device 22 includes a deionization device, a deaeration device, and a membrane treatment device.
- Raw water which is water to be treated, is supplied to the water treatment facility 231 (specifically, the water treatment device 20).
- the supplied raw water is sequentially treated by the water treatment device 20, the UV 21, and the water treatment device 22.
- water of a predetermined quality for example, pure water, etc.
- the produced water is supplied from the water treatment device 22 to points of use, other water treatment facilities, and the like. In the example shown in FIG.
- the water treatment system in this embodiment includes a water treatment management device 10 to which at least a portion of the water to be treated is supplied to the water treatment equipment 231.
- the water treatment management device 10 includes an activated carbon AC11, a reverse osmosis membrane device RO12, an electric regeneration pure water device EDI13, an ultraviolet irradiation device UV14, and an ion exchange resin filling device CP15. , a TOC measuring section 16, and a specific organic matter measuring section 17.
- the AC 11, the RO 12, the EDI 13, the UV 14, and the CP 15 are arranged in series along the water passage line of the water to be treated. At least a portion of the water to be treated supplied to the water treatment facility 231 is sequentially passed to the AC 11, RO 12, EDI 13, UV 14, and CP 15. Furthermore, the water treatment system in this embodiment includes a control device 30.
- the water treatment management device 10 is provided with a water treatment device that executes a unit operation for removing TOC components, such as an AC 11, RO 12, UV 14, and an ion exchange resin filling device as shown in FIG.
- the water treatment management device 10 does not need to have the same configuration as the main water treatment facility 231. It is preferable that the water treatment management device 10 is not equivalent to the main water treatment equipment 231 and has a simple configuration in order to speed up the detection of TOC contained in the water to be treated.
- the ion exchange resin filling device may be EDI13 as shown in FIG. Further, the CP15 may be an EDI13. There is no restriction on the order in which water is passed to the water treatment devices provided in the water treatment management device 10.
- the order of water flow is preferably activated carbon, RO, EDI, UV, and ion exchange resin filling device, taking into consideration the UV treatment efficiency and the lifespan of the ion exchange resin.
- the water treatment management device 10 may be provided with a degassing device such as a degassing membrane to improve treatment performance.
- a degassing device such as a degassing membrane to improve treatment performance.
- each of AC11, RO12, EDI13, UV14, and CP15 may be multi-staged. This also applies to the second to sixth embodiments described below.
- the TOC measuring unit 16 is a first measuring unit (TOC meter) that measures the TOC concentration of water flowing through the water line of the water treatment management device 10.
- the TOC measurement unit 16 outputs the measured TOC concentration value to the control device 30.
- the TOC measurement unit 16 may measure the TOC concentration not only of water passed through the CP 15 but also of water treated by another water treatment device.
- the specific organic matter measuring section 17 is a second measuring section that measures the organic matter concentration using an index other than the TOC measured by the TOC measuring section 16.
- the measurement point at which the specific organic matter measuring section 17 measures the organic matter concentration may be the same point as the point at which the TOC measuring section 16 measures the TOC concentration, or may be a different point.
- the specific organic substance measurement unit 17 may be measured using an index other than TOC.
- the specific organic substance measurement unit 17 determines the specific organic substance concentration in the treated water of the CP 15, taking into account the specific organic substance rejection rate in the RO 12. You can guess.
- the specific organic substance measuring unit 17 measures the TOC concentration of the treated water of the CP 15 and the specific organic substance measuring unit 17 measures the specific organic substance concentration at a measurement point before the AC 11 or before the RO 12, the specific organic substance measuring unit 17
- the specific organic substance concentration of the treated water of CP15 may be estimated by considering the specific organic substance rejection rate in RO12.
- the specific organic substance measuring section 17 may be, for example, a urea meter that measures the concentration of urea.
- the specific organic substance measuring section 17 outputs the measured organic substance concentration value to the control device 30. Moreover, when the specific organic substance measurement unit 17 estimates the specific organic substance concentration of the treated water of the CP 15, it outputs the estimated value to the control device 30 as a measured value.
- the control device 30 configures the water treatment equipment 231 based on the TOC concentration value (TOC value) output from the TOC measuring section 16 and the specific organic matter concentration value output from the specific organic matter measuring section 17. control the operating conditions of water treatment equipment.
- the control device 30 controls the amount of ultraviolet rays irradiated by the UV 21.
- the amount of ultraviolet irradiation controlled by the control device 30 is the irradiation power per unit flow rate.
- the control device 30 converts (converts) the value of the specific organic substance concentration output from the specific organic substance measurement unit 17 into a TOC value. This conversion is performed using the ratio between the atomic weight of carbon in the organic molecule and the molecular weight of the organic substance (eg, urea).
- the control device 30 converts the TOC value (first TOC value) outputted from the TOC measuring section 16 and the TOC value (second TOC value) converted from the organic matter concentration value outputted from the specific organic matter measuring section 17.
- the amount of ultraviolet irradiation irradiated by the UV 21 may be calculated based on the difference between the TOC value and the ratio (the ratio of the second TOC value to the first TOC value; the same applies hereinafter).
- the control device 30 may use a predetermined calculation formula or correspondence for calculating the amount of ultraviolet irradiation from the difference or ratio between the first TOC value and the second TOC value. .
- the control device 30 when calculating the amount of ultraviolet irradiation, the control device 30 also calculates the difference or ratio between the first TOC value and the second TOC value and the water quality ( For example, a comparison with a threshold value (one or more may be used) calculated in advance based on the TOC value or dissolved oxygen concentration may be used.
- the control device 30 controls at least one of the number of UV 21 lamps lit, the processing flow rate, and lamp dimming as the amount of UV irradiation.
- the control device 30 may control the amount of ultraviolet rays irradiated by the UV light provided in the water treatment devices 20 and 22. Further, the control device 30 may start or stop the operation of the UV 21 based on the difference or ratio between the first TOC value and the second TOC value.
- the control device 30 may stop the operation of the UV 21, and if the difference is greater than or equal to the threshold value, the control device 30 may start the operation of the UV 21.
- a reverse osmosis membrane device is installed in the water treatment equipment constituting the water treatment equipment 231, and the control device 30 receives the TOC concentration value (TOC value) output from the TOC measurement unit 16 and the specific organic matter measurement unit 17.
- the recovery rate, water temperature, etc. of the reverse osmosis membrane device may be controlled based on the value of the organic matter concentration output from the reverse osmosis membrane device.
- FIG. 2 is a flowchart for explaining an example of processing in the control device 30 shown in FIG.
- a case where the specific organic substance measuring section 17 measures the concentration of urea will be described as an example.
- the control device 30 acquires the TOC value measured by the TOC measurement unit 16 (step S1). Further, the control device 30 acquires the value of the urea concentration measured by the specific organic substance measuring section 17 (step S2). The control device 30 converts the obtained urea concentration value into a TOC value. The control device 30 calculates the amount of ultraviolet irradiation based on the acquired TOC value and the TOC value converted from the urea concentration (step S3). Then, the control device 30 controls the UV 21 to irradiate the calculated amount of UV irradiation (Step S4).
- the water treatment management device 10 through which at least a part of the water to be treated to be supplied to the water treatment equipment 231 is passed (supplied) is provided, and the water treatment management device 10 is provided with A measuring device measures the TOC value and specific organic matter concentration of the water being passed through.
- the control device 30 controls the amount of ultraviolet irradiation from the ultraviolet irradiation device provided in the water treatment facility 231 based on the measured TOC value and specific organic matter concentration. Examples of specific organic substances include urea, which is difficult to remove with a reverse osmosis membrane device or an ultraviolet irradiation device.
- Urea is generally treated using bromide and hypochlorous acid, but the treatment time is relatively long and it is difficult to install a urea treatment device in a water treatment management system. Therefore, TOC can be efficiently removed by controlling the amount of ultraviolet rays irradiated by the ultraviolet irradiation device based on the measurement value taking into account urea, which is difficult to remove with the water treatment management device.
- FIG. 3 is a diagram showing a second embodiment of the water treatment system of the present invention.
- the water treatment system in this embodiment includes a water treatment facility 232 that includes a water treatment device 20, an MD 23 that is a deaerator, a UV 21 that is an ultraviolet irradiation device, and a water treatment device 22.
- Raw water which is water to be treated, is supplied to the water treatment facility 232 (specifically, the water treatment device 20).
- the supplied raw water is sequentially treated by the water treatment device 20, MD 23, UV 21, and water treatment device 22.
- water of a predetermined quality for example, pure water, etc.
- the produced water is supplied from the water treatment device 22 to points of use, other water treatment facilities, and the like.
- the water treatment system in this embodiment includes the water treatment management device 10 to which at least a portion of the water to be treated is supplied to the water treatment equipment 232.
- the water treatment management device 10 is the same as that in the first embodiment.
- the water treatment system in this embodiment includes a control device 31.
- the control device 31 configures the water treatment equipment 232 based on the TOC concentration value (TOC value) output from the TOC measuring section 16 and the specific organic matter concentration value output from the specific organic matter measuring section 17. control the operating conditions of water treatment equipment.
- the control device 31 controls the MD 23 to control the dissolved oxygen concentration of the UV 21 treated water.
- the control device 31 sets the dissolved oxygen concentration of the UV21 treated water of the water treatment facility 232, and the value of the dissolved oxygen meter of the water treatment facility 232 is set to the set value.
- the dissolved oxygen concentration can be controlled so that For example, a dissolved oxygen meter can be provided between MD23 and UV21.
- Examples of the MD23 include a vacuum deaerator, a membrane deaerator, and a nitrogen deaerator.
- Other deaerators that can be used include those that remove oxygen by adding hydrogen and reacting oxygen with hydrogen to form water using a Pd catalyst.
- the control device 31 uses a vacuum pump or the like to adjust the degree of vacuum and control the dissolved oxygen concentration. At this time, the control device 31 can perform control using an inverter. For example, the control device 31 converts (converts) the value of the organic substance concentration output from the specific organic substance measurement unit 17 into a TOC value.
- the control device 31 controls the MD 23 based on the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17.
- the dissolved oxygen concentration of the water to be treated with UV21 may be calculated.
- the control device 31 calculates the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17.
- a predetermined calculation formula or correspondence may be used to calculate the dissolved oxygen concentration.
- the control device 31 calculates the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17. and a threshold value (one or more may be used) calculated in advance based on the water quality (for example, TOC value and dissolved oxygen concentration) of the water supplied from the water treatment device 22 to the point of use at that time. It's okay.
- the control device 31 also controls the MD 23 based on the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17. The operation may be started or stopped.
- the control device 31 stops the operation of the MD 23, and if the difference is greater than or equal to the threshold, the control device 31 stops the operation of the MD 23. You can start it.
- the control device 31 determines the UV 21
- the amount of ultraviolet irradiation irradiated by UV21 and the dissolved oxygen concentration of the water to be treated may be calculated.
- the control device 31 controls the UV 21 to irradiate the calculated amount of ultraviolet rays, and controls the MD 23 so that the dissolved oxygen concentration of the water to be treated becomes the calculated dissolved oxygen concentration.
- control device 31 may perform control to obtain the calculated amount of ultraviolet irradiation or the calculated dissolved oxygen concentration by combining the operation of the UV 21 and the operation of the MD 23. Note that whether the control device 31 prioritizes controlling the amount of ultraviolet irradiation or the dissolved oxygen concentration is determined by taking into consideration not only treatment performance but also operational costs and the load on the water treatment equipment placed in the subsequent stage. You may decide.
- FIG. 4 is a flowchart for explaining an example of processing in the control device 31 shown in FIG.
- a case where the specific organic substance measuring section 17 measures the concentration of urea will be described as an example.
- the control device 31 acquires the TOC value measured by the TOC measurement unit 16 (step S11). Further, the control device 31 acquires the value of the urea concentration measured by the specific organic substance measuring section 17 (step S12). The control device 31 converts the obtained urea concentration value into a TOC value. The control device 31 calculates the dissolved oxygen concentration based on the acquired TOC value and the TOC value converted from the urea concentration (step S13). Then, the control device 31 controls the MD 23 so that the dissolved oxygen concentration of the water to be treated becomes the calculated dissolved oxygen concentration (step S14).
- the water treatment management device 10 is provided through which at least a portion of the water to be treated to be supplied to the water treatment equipment 232 is passed (supplied), and the water treatment management device 10 is provided on the water flow line of the water treatment management device 10.
- a measuring device measures the TOC value and specific organic matter concentration of the water being passed through.
- the control device 31 controls the deaerator provided in the water treatment facility 232 based on the measured TOC value and specific organic matter concentration.
- TOC can be efficiently removed by controlling the dissolved oxygen concentration based on a measurement value that takes into account urea, which is difficult to remove with a water treatment management device.
- FIG. 5 is a diagram showing a third embodiment of the water treatment system of the present invention.
- the water treatment system in this embodiment includes a water treatment facility 233 including a water treatment device 20, a UV 21 which is an ultraviolet irradiation device, and a water treatment device 22.
- Raw water which is water to be treated, is supplied to the water treatment facility 233 (specifically, the water treatment device 20).
- the supplied raw water is sequentially treated by the water treatment device 20, the UV 21, and the water treatment device 22.
- water of a predetermined quality for example, pure water, etc.
- the produced water is supplied from the water treatment device 22 to points of use, other water treatment facilities, and the like.
- the water treatment system in this embodiment includes the water treatment management device 10 to which at least a portion of the water to be treated is supplied to the water treatment equipment 233.
- the water treatment management device 10 is the same as that in the first embodiment.
- the water treatment system in this embodiment includes a control device 32 and a sulfur compound addition section 24 that is an oxidizing agent addition means.
- the sulfur compound addition unit 24 may be included in the water treatment equipment 233.
- the sulfur compound addition unit 24 adds an oxidizing agent to the water to be treated that is passed through the UV 21 under the control of the control device 32.
- the oxidizing agent added by the sulfur compound addition unit 24 may be a general oxidizing agent such as hydrogen peroxide, a halogen oxoacid, a permanganate, or a sulfur compound containing a peroxide group.
- the oxidizing agent added by the sulfur compound addition unit 24 is preferably a sulfur compound containing a peroxide group from the viewpoint of removal performance. Examples of the sulfur compound containing a peroxide group include ammonium peroxodisulfate, sodium peroxodisulfate, potassium peroxodisulfate, and the like. These sulfur compounds are used alone or in combination.
- the UV 21 in this embodiment is a medium-pressure ultraviolet irradiation device whose internal pressure is within a predetermined pressure range (more than the first pressure and less than the second pressure) or a medium-pressure ultraviolet irradiation device whose internal pressure is within a predetermined pressure range (more than the first pressure and less than the second pressure). (2nd pressure) or higher.
- the UV 21 irradiates the water to be treated to which the oxidizing agent has been added from the sulfur compound addition unit 24 with ultraviolet rays.
- the UV 21 may be a low-pressure ultraviolet irradiation device whose internal pressure is less than a predetermined pressure (first pressure).
- the UV 21 it is preferable to use a medium-pressure ultraviolet irradiation device or a high-pressure ultraviolet irradiation device that has a high irradiation power per ultraviolet lamp because the device can be made compact.
- a reducing means may be provided after the UV 21.
- the control device 32 configures the water treatment equipment 233 based on the TOC concentration value (TOC value) output from the TOC measuring section 16 and the specific organic matter concentration value output from the specific organic matter measuring section 17. control the operating conditions of water treatment equipment.
- the control device 32 controls the amount of the oxidizing agent added by the sulfur compound adding section 24. By doing so, the control device 32 can control the oxidizing agent concentration of the UV21 water to be treated (the same applies to the following description).
- the control device 32 converts (converts) the value of the organic substance concentration output from the specific organic substance measurement unit 17 into a TOC value. This conversion is performed using the ratio between the atomic weight of carbon in the organic molecule and the molecular weight of the organic substance (eg, urea).
- the control device 32 controls the addition of sulfur compounds based on the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17.
- the amount of the oxidizing agent to be added may be calculated from section 24.
- the control device 32 calculates the difference between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17.
- a predetermined calculation formula or correspondence may be used to calculate the amount of oxidizing agent added from the ratio.
- the control device 32 calculates the TOC value outputted from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value outputted from the specific organic matter measuring section 17.
- a threshold value (one or more may be used) that is calculated in advance based on the difference or ratio of You may also use a comparison of Note that the control device 32 determines the UV 21
- the amount of ultraviolet irradiation irradiated by the sulfur compound addition unit 24 and the amount of the oxidizing agent added by the sulfur compound addition unit 24 may be calculated.
- the control device 32 controls the UV 21 to irradiate the calculated amount of ultraviolet rays, and controls the sulfur compound addition unit 24 to add the oxidizing agent at the calculated concentration.
- the control device 32 also controls the UV 21 based on the difference or ratio between the TOC value outputted from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value outputted from the specific organic matter measuring section 17.
- the operation and addition of the oxidizing agent from the sulfur compound addition section 24 may be started or stopped. For example, if the difference is smaller than the threshold, the control device 32 stops the operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition unit 24, and if the difference is more than the threshold, the control device 32 The operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition section 24 may be started.
- FIG. 6 is a flowchart for explaining an example of processing in the control device 32 shown in FIG.
- a case where the specific organic substance measuring section 17 measures the concentration of urea will be described as an example.
- the control device 32 acquires the TOC value measured by the TOC measurement unit 16 (step S21). Furthermore, the control device 32 acquires the value of the urea concentration measured by the specific organic substance measuring section 17 (step S22). The control device 32 converts the obtained urea concentration value into a TOC value. The control device 32 calculates the amount of the oxidizing agent added by the sulfur compound addition unit 24 based on the acquired TOC value and the TOC value converted from the urea concentration (step S23). Then, the control device 32 controls the sulfur compound addition unit 24 so that the oxidizing agent at the calculated concentration is added (step S24).
- the water treatment management device 10 is provided through which at least part of the water to be treated to be supplied to the water treatment equipment 233 is passed (supplied), and the water treatment management device 10 is provided with A measuring device measures the TOC value and specific organic matter concentration of the water being passed through.
- the control device 32 controls the amount of oxidizing agent added to the water to be treated that is passed through the ultraviolet irradiation device provided in the water treatment facility 233 based on the measured TOC value and specific organic substance concentration. .
- the effect of improving TOC removal performance can be obtained. It should be noted that whether the control device 32 gives priority to controlling the amount of oxidizing agent added to the water to be treated or the amount of ultraviolet rays irradiated by the ultraviolet irradiation device depends on not only treatment performance but also operation costs and subsequent steps. It may be determined by taking into consideration the load on the water treatment equipment located in the area. (Fourth embodiment)
- FIG. 7 is a diagram showing a fourth embodiment of the water treatment system of the present invention.
- the water treatment system in this embodiment includes a water treatment device 20, a UV 21 which is an ultraviolet irradiation device, a water treatment device 22, and the internal pressure is less than a predetermined pressure (first pressure). It has a water treatment facility 234 that includes a low pressure UV 25 that is an ultraviolet irradiation device and a water treatment device 26.
- Raw water which is water to be treated, is supplied to the water treatment facility 234 (specifically, the water treatment device 20). The supplied raw water is sequentially treated by the water treatment device 20, UV 21, water treatment device 22, low pressure UV 25, and water treatment device 26.
- the water treatment system in this embodiment includes the water treatment management device 10 to which at least a portion of the water to be treated is supplied to the water treatment equipment 234.
- the water treatment management device 10 is the same as that in the first embodiment.
- the water treatment system in this embodiment includes a control device 33 and a sulfur compound addition section 24 that is an oxidizing agent addition means.
- the sulfur compound addition section 24 is the same as that in the third embodiment.
- the sulfur compound addition section 24 may be included in the water treatment equipment 234.
- the control device 33 configures the water treatment equipment 234 based on the TOC concentration value (TOC value) outputted from the TOC measuring section 16 and the organic matter concentration value outputted from the specific organic matter measuring section 17. Control the operating conditions of water treatment equipment.
- the control device 33 controls at least one of the amount of ultraviolet rays emitted by the UV 21, the amount of ultraviolet rays emitted by the low-pressure UV 25, and the amount of the oxidizing agent added by the sulfur compound addition unit 24. .
- the control device 33 converts (converts) the value of the specific organic substance concentration output from the specific organic substance measurement unit 17 into a TOC value.
- the control device 33 determines whether the UV 21 is irradiated based on the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17. At least one of the amount of ultraviolet irradiation applied by the low-pressure UV 25, and the amount of the oxidizing agent added by the sulfur compound addition unit 24 may be calculated. When calculating these irradiation doses and concentrations, the control device 33 calculates the TOC value outputted from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value outputted from the specific organic matter measuring section 17.
- a predetermined calculation formula or correspondence may be used to calculate the irradiation amount or concentration from the difference or ratio.
- the control device 33 calculates the TOC value converted from the TOC value output from the TOC measuring section 16 and the organic matter concentration value output from the specific organic matter measuring section 17.
- a threshold value (one or more may be used) that is calculated in advance based on the difference or ratio between the You may also use a comparison with Further, the control device 33 controls the UV 21 based on the difference or ratio between the TOC value outputted from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value outputted from the specific organic matter measuring section 17.
- the operation and addition of the oxidizing agent from the sulfur compound addition section 24 may be started or stopped. For example, if the difference is smaller than the threshold, the control device 33 stops the operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition unit 24, and if the difference is more than the threshold, the control device 33 The operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition section 24 may be started.
- FIG. 8 is a flowchart for explaining an example of processing in the control device 33 shown in FIG.
- a case where the specific organic substance measuring section 17 measures the concentration of urea will be described as an example.
- a case will be described as an example in which the control device 33 controls the amount of ultraviolet rays irradiated by the low-pressure UV 25.
- the control device 33 acquires the TOC value measured by the TOC measurement unit 16 (step S31). Furthermore, the control device 33 acquires the value of the urea concentration measured by the specific organic substance measuring section 17 (step S32). The control device 33 converts the obtained urea concentration value into a TOC value. The control device 33 calculates the amount of ultraviolet light irradiated by the low-pressure UV 25 based on the acquired TOC value and the TOC value converted from the urea concentration (step S33). Then, the control device 33 controls the low-pressure UV 25 so that the low-pressure UV 25 irradiates the calculated amount of ultraviolet rays (step S34).
- the water treatment management device 10 is provided through which at least a portion of the water to be treated to be supplied to the water treatment equipment 234 is passed (supplied), and the water treatment management device 10 is provided with A measuring device measures the TOC value and specific organic matter concentration of the water being passed through.
- the control device 33 controls the amount of ultraviolet irradiation from the ultraviolet irradiation device installed in the water treatment facility 234, the amount of ultraviolet irradiation from the low-pressure ultraviolet irradiation device, and the amount of ultraviolet irradiation from the ultraviolet irradiation device provided in the water treatment facility 234 based on the measured TOC value and specific organic matter concentration. At least one of the amount of an oxidizing agent added to the water to be treated is controlled.
- TOC can be efficiently removed by controlling the amount of ultraviolet irradiation and the amount of oxidizing agent added based on measured values that take into account urea, which is difficult to remove with a water treatment management device.
- the form shown in FIG. 7 shows the form in which the low voltage
- a low-pressure UV 25 separate from the UV 21 as an ultraviolet irradiation device As in this embodiment, the UV 21 that irradiates ultraviolet rays to the water to be treated to which the oxidizing agent (sulfur compound) has been added from the sulfur compound addition unit 24 is operated at all times. There's no need to. Further, the low pressure UV 25 can be operated at low concentration and low irradiation amount. Therefore, TOC in the water to be treated can be efficiently removed. For example, when the specific organic substance is urea, control using addition of a sulfur compound and irradiation of ultraviolet rays is performed only when the ratio of urea to TOC becomes higher than a predetermined threshold value. Thereby, TOC in the water to be treated can be efficiently removed.
- medium-pressure UV or high-pressure UV is used for UV treatment with sulfur compounds. Since medium-voltage UV and high-voltage UV consume large amounts of power, power consumption can be reduced by using low-voltage UV.
- a low-pressure UV 25 different from the UV 21 is arranged as an ultraviolet irradiation device as in this embodiment, based on the TOC value measured by the TOC measurement unit 16 and the urea concentration value measured by the specific organic substance measurement unit 17, , the amount of ultraviolet irradiation irradiated by the low-pressure UV 25 and the amount of oxidizing agent added by the sulfur compound addition unit 24 are controlled. Thereby, TOC in the water to be treated can be removed more efficiently. Furthermore, when the water to be treated to which the oxidizing agent has been added from the sulfur compound addition unit 24 is irradiated with ultraviolet rays, the amount of ultraviolet irradiation from the low-pressure UV 25 may be controlled to be small.
- the control device 33 controls the oxidizing agent added by the sulfur compound addition unit 24, including starting or stopping the operation of the sulfur compound addition unit 24 and the UV 21, based on the ratio. If the ratio at the time of measurement is equal to or lower than the threshold value B, the control device 33 controls the addition amount of UV 21 and the amount of UV irradiation irradiated by the UV 21, and starts or stops the operation of the low pressure UV 25 based on the ratio, The amount of ultraviolet light emitted by the low-pressure UV 25 may be controlled.
- the control device 33 controls the amount of oxidizing agent added by the sulfur compound addition unit 24, including starting or stopping the operation of the sulfur compound addition unit 24, and performs the measurement.
- the control device 33 may control the amount of ultraviolet light emitted by the low-pressure UV 25, including starting or stopping the operation of the low-pressure UV 25, based on the ratio.
- the control device 33 may use such a ratio. Further, the control device 33 may use the difference or ratio between the TOC value measured by the TOC measurement unit 16 and the TOC conversion value of the urea concentration measured by the specific organic substance measurement unit 17. By doing this, stable processing becomes possible even when persistent organic substances other than urea are mixed in. (Fifth embodiment)
- FIG. 9 is a diagram showing a fifth embodiment of the water treatment system of the present invention.
- the water treatment system in this embodiment includes a water treatment device 20, a UV 21 that is an ultraviolet irradiation device, a water treatment device 22, and an MD 27 that is a deaerator, and the internal pressure is set to a predetermined pressure
- the water treatment equipment 235 includes a low pressure UV 25 which is an ultraviolet irradiation device having a pressure lower than the first pressure
- Raw water which is water to be treated, is supplied to the water treatment facility 235 (specifically, the water treatment device 20). The supplied raw water is sequentially treated by the water treatment device 20, UV 21, water treatment device 22, MD 27, low pressure UV 25, and water treatment device 26.
- the water treatment system in this embodiment includes the water treatment management device 10 to which at least a portion of the water to be treated is supplied to the water treatment equipment 235.
- the water treatment management device 10 is the same as that in the first embodiment.
- the water treatment system in this embodiment includes a control device 34 and a sulfur compound addition section 24 that is an oxidizing agent addition means.
- the sulfur compound addition section 24 is the same as that in the third embodiment.
- the sulfur compound addition unit 24 may be included in the water treatment equipment 235.
- the control device 34 configures the water treatment equipment 235 based on the TOC concentration value (TOC value) output from the TOC measurement section 16 and the organic matter concentration value output from the specific organic matter measurement section 17. Control the operating conditions of water treatment equipment.
- the control device 34 controls at least the amount of ultraviolet irradiation irradiated by the UV 21, the dissolved oxygen concentration of the water to be treated by the UV 21 controlled by the MD 27, and the amount of the oxidizing agent added by the sulfur compound addition unit 24. Control one.
- the control device 34 converts (converts) the value of the organic substance concentration output from the specific organic substance measurement unit 17 into a TOC value.
- the control device 34 determines whether the UV 21 is irradiated based on the difference or ratio between the TOC value output from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value output from the specific organic matter measuring section 17. At least one of the amount of ultraviolet irradiation, the dissolved oxygen concentration of the UV 21 to be treated water controlled by the MD 27, and the amount of the oxidizing agent added by the sulfur compound addition unit 24 may be calculated.
- the control device 34 uses the TOC value outputted from the TOC measuring section 16 and the organic matter concentration value outputted from the specific organic matter measuring section 17.
- a predetermined calculation formula or correspondence may be used to calculate the irradiation amount, dissolved oxygen concentration, and amount of oxidizing agent added from the difference or ratio with the TOC value converted from .
- the control device 34 uses the TOC value outputted from the TOC measuring section 16 and the organic matter concentration outputted from the specific organic matter measuring section 17.
- a threshold value calculated in advance based on the difference or ratio with the TOC value converted from the value of You may use a comparison with (one or more may be sufficient). Further, the control device 34 controls the UV 21 based on the difference or ratio between the TOC value outputted from the TOC measuring section 16 and the TOC value converted from the organic matter concentration value outputted from the specific organic matter measuring section 17. The operation and addition of the oxidizing agent from the sulfur compound addition section 24 may be started or stopped.
- control device 34 stops the operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition unit 24, and if the difference is more than the threshold, the control device 34 The operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition section 24 may be started.
- FIG. 10 is a flowchart for explaining an example of processing in the control device 34 shown in FIG.
- a case where the specific organic substance measuring section 17 measures the concentration of urea will be described as an example.
- a case will be described as an example in which the control device 34 controls the amount of ultraviolet radiation irradiated by the UV 21 or the dissolved oxygen concentration of the water to be treated.
- the control device 34 acquires the TOC value measured by the TOC measurement unit 16 (step S41). Further, the control device 34 acquires the value of the urea concentration measured by the specific organic substance measuring section 17 (step S42). The control device 34 converts the obtained urea concentration value into a TOC value. The control device 34 calculates the amount of ultraviolet radiation irradiated by the UV 21 or the dissolved oxygen concentration of the water to be treated by the UV 21 controlled by the MD 27 based on the acquired TOC value and the TOC value converted from the urea concentration ( Step S43). Then, the control device 34 controls the UV 21 so that the UV 21 irradiates the calculated amount of ultraviolet rays, or controls the MD 27 so that the dissolved oxygen concentration of the water to be treated becomes the calculated dissolved oxygen concentration (step S44 ).
- the water treatment management device 10 is provided through which at least part of the water to be treated to be supplied to the water treatment equipment 235 is passed (supplied), and the water treatment management device 10 is provided on the water flow line of the water treatment management device 10.
- a measuring device measures the TOC value and specific organic matter concentration of the water being passed through. Based on the measured TOC value and organic matter concentration, the control device 34 determines the amount of ultraviolet irradiation from the ultraviolet irradiation device installed in the water treatment facility 235 and the amount of dissolved water in the treated water from the ultraviolet irradiation device controlled by the deaerator.
- At least one of the oxygen concentration and the amount of oxidizing agent added to the water to be treated that is passed through the ultraviolet irradiation device is controlled.
- a control device 34 controls the amount of ultraviolet irradiation, the dissolved oxygen concentration of the water to be treated, and the amount of oxidizing agent added, based on measured values that take into account urea, which is difficult to remove by the water treatment management device. This makes it possible to efficiently remove TOC.
- a low-pressure UV 25 different from the UV 21 is arranged as an ultraviolet irradiation device as in this embodiment, based on the TOC value measured by the TOC measurement unit 16 and the urea concentration value measured by the specific organic substance measurement unit 17, , the dissolved oxygen concentration of the water to be treated by the low-pressure UV 25 controlled by the MD 27 provided before the low-pressure UV 25 and the amount of the oxidizing agent added by the sulfur compound addition unit 24 are controlled. Thereby, TOC can be removed more efficiently. Furthermore, when the water to be treated to which the oxidizing agent has been added from the sulfur compound addition unit 24 is irradiated with ultraviolet rays, the amount of ultraviolet irradiation from the low-pressure UV 25 may be controlled to be small.
- the control device 34 controls the addition of the oxidizing agent added by the sulfur compound addition unit 24, including starting or stopping the operation of the sulfur compound addition unit 24, based on the ratio. If the ratio at the time of measurement is equal to or lower than threshold B, the control device 34 controls the amount of ultraviolet rays emitted by the low-pressure UV 25, including starting or stopping the operation of the low-pressure UV 25, based on the ratio. It may be controlled.
- the control device 34 controls the amount of oxidizing agent added by the sulfur compound addition unit 24, including starting or stopping the operation of the sulfur compound addition unit 24, and performs the measurement.
- the control device 34 may control the amount of ultraviolet light emitted by the low-pressure UV 25, including starting or stopping the operation of the low-pressure UV 25, based on the ratio.
- the control device 34 may use such a ratio, or may use the difference or ratio between the TOC value measured by the TOC measurement unit 16 and the TOC conversion value of the urea concentration measured by the specific organic substance measurement unit 17. Also good. By doing this, stable processing becomes possible even when persistent organic substances other than urea are mixed in. (Sixth embodiment)
- FIG. 11 is a diagram showing a sixth embodiment of the water treatment system of the present invention.
- the water treatment system in this embodiment includes a water treatment facility 236 that includes a water treatment device 20, a UV 21 that is an ultraviolet irradiation device, and a water treatment device 22.
- Raw water which is water to be treated, is supplied to the water treatment facility 236 (specifically, the water treatment device 20).
- the supplied raw water is sequentially treated by the water treatment device 20, the UV 21, and the water treatment device 22.
- water of a predetermined quality for example, pure water, etc.
- the produced water is supplied from the water treatment device 22 to points of use, other water treatment facilities, and the like.
- the water treatment system in this embodiment includes a water treatment management device 18 to which at least a portion of the water to be treated that is supplied to the water treatment equipment 236 is supplied.
- the water treatment management device 18 is obtained by removing the specific organic substance measuring section 17 from the components of the water treatment management device 10 in the first embodiment.
- the water treatment system in this embodiment includes a control device 35 and a sulfur compound addition section 24 that is an oxidizing agent addition means.
- the sulfur compound addition section 24 is the same as that in the third embodiment.
- the sulfur compound addition section 24 may be included in the water treatment equipment 236.
- the control device 35 controls the operating conditions of the water treatment equipment that constitutes the water treatment equipment 236 based on the TOC concentration value (TOC value) output from the TOC measurement unit 16.
- the control device 35 controls at least one of the amount of ultraviolet irradiation irradiated by the UV 21 and the amount of the oxidizing agent added by the sulfur compound addition unit 24.
- the control device 35 determines at least one of the amount of ultraviolet irradiation irradiated by the UV 21 and the amount of the oxidizing agent added by the sulfur compound addition section 24 based on the TOC value output from the TOC measurement section 16. You can also calculate it.
- the control device 35 uses a predetermined calculation formula or the like for calculating the amount of ultraviolet irradiation and the amount of oxidizing agent added from the TOC value output from the TOC measurement unit 16. Correspondence may also be used.
- the control device 35 uses the TOC value outputted from the TOC measurement unit 16 and the water quality of the water supplied from the water treatment device 22 to the use point at that time. (For example, TOC value or dissolved oxygen concentration) Comparison with a threshold value (one or more may be used) calculated in advance based on the TOC value or dissolved oxygen concentration may be used.
- the control device 35 controls the UV 21 to irradiate the calculated amount of ultraviolet rays, and controls the sulfur compound addition unit 24 to add the oxidizing agent at the calculated concentration. Further, the control device 35 may start or stop the operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound addition section 24 based on the TOC value output from the TOC measurement section 16. For example, when the TOC value outputted from the TOC measuring section 16 is smaller than the threshold value, the control device 35 stops the operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound adding section 24, and stops the TOC measuring section 16. When the TOC value outputted from the sulfur compound adding section 24 is equal to or higher than the threshold value, the control device 35 may start the operation of the UV 21 and the addition of the oxidizing agent from the sulfur compound adding section 24.
- FIG. 12 is a flowchart for explaining an example of processing in the control device 35 shown in FIG. 11.
- the control device 35 controls the amount of ultraviolet light irradiated by the UV 21 or the amount of the oxidizing agent added by the sulfur compound addition unit 24 as an example.
- the control device 35 acquires the TOC value measured by the TOC measurement unit 16 (step S51). Then, the control device 35 calculates the amount of ultraviolet rays emitted by the UV 21 or the amount of the oxidizing agent added by the sulfur compound adding section 24 based on the acquired TOC value (step S52). When the control device 35 calculates the amount of ultraviolet rays emitted by the UV 21 in step S52, it controls the UV 21 so that the calculated amount of ultraviolet rays is emitted from the UV 21. Alternatively, when the control device 35 calculates the amount of the oxidizing agent to be added by the sulfur compound adding section 24 in step S52, the control device 35 controls the sulfur compound adding section 24 so that the oxidizing agent at the calculated concentration is added ( Step S53).
- the water treatment management device 18 is provided through which at least a part of the water to be treated to be supplied to the water treatment equipment 236 is passed (supplied), and the water treatment management device 18 is provided with A measuring device measures the TOC value of the water being passed through. Based on the measured TOC value, the control device 35 determines the amount of ultraviolet irradiation from the ultraviolet irradiation device installed in the water treatment facility 236 and the addition of an oxidizing agent to the water to be treated that is passed through the ultraviolet irradiation device. controlling at least one of the amounts; This makes it possible to remove TOC stably and efficiently. Further, by providing an oxidizing agent addition means upstream of the ultraviolet irradiation device to treat TOC, the effect of improving TOC removal performance can be obtained.
- the water to be treated that is passed through the water treatment management devices 10 and 18 is not limited to raw water, but may be any treated water in the water treatment system. If the raw water is recycled water or recovered water, it may be treated water from any water treatment device in the system that produces the recycled water or recovered water. Further, a plurality of water treatment management devices 10, 18 may be provided depending on the water to be treated. Further, in addition to the measured value of the treated water in the water treatment management device, the amount of ultraviolet rays irradiated by the water treatment system may be controlled based on the amount of ultraviolet rays irradiated and the dissolved oxygen concentration in the water treatment management device. (Example) ⁇ Example 1-1>
- FIG. 13 is a diagram showing the configuration for Example 1-1 of the water treatment system of the present invention.
- a water treatment management device is installed in parallel to a water treatment facility 200 that includes a water treatment device 201 that performs pretreatment, an ultraviolet irradiation device (UV) 202, and an ion exchange resin filling device (CP) 203. 10 was installed, and TOC-containing water was passed through it.
- the TOC measuring unit 204 measured the treated water of the CP203.
- the water treatment device 201 has a function of removing urea from TOC-containing water.
- the water treatment management device 10 is in the embodiment described above.
- a TOC measuring section 16 and a specific organic substance measuring section 17 were provided in the treated water line of the water treatment management device 10.
- the UV 202 irradiates ultraviolet rays based on the measured value obtained from the water treatment management device 10 (the difference between the measured value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17).
- the control device 30 set and controlled the irradiation amount.
- FIG. 14 is a diagram showing a configuration for Comparative Example 1-1 to be compared with Example 1-1.
- a water treatment management device 50 was installed in parallel in the same water treatment facility 200 as the water treatment facility 200 shown in FIG. 13, and TOC-containing water was passed therethrough.
- the TOC measuring unit 204 measured the treated water of the CP203.
- the water treatment management device 50 has a configuration in which the specific organic matter measuring section 17 is excluded from the water treatment management device 10 shown in FIG. Based on the measured value obtained from the water treatment management device 50 (the measured value measured by the TOC measurement unit 16), the control device 40 adjusts the amount of ultraviolet rays emitted by the UV 202 to the same measured value as in Example 1-1. It was set and controlled in relation to the irradiation dose.
- FIG. 15 is a diagram showing the configuration for Example 1-2 of the water treatment system of the present invention.
- a water treatment facility 210 is installed in which a deaerator MD205 is placed upstream of the UV202 included in the configuration for Example 1-1 shown in FIG. was treated with water.
- the TOC measuring unit 204 measured the treated water of the CP203.
- the water treatment management device 10 has the configuration for Example 1-1 shown in FIG.
- the control device 31 sets the dissolved oxygen concentration (DO concentration) of the UV-treated water based on the difference between the measured value of urea and the TOC conversion value, and the MD 205 sets the dissolved oxygen concentration (DO concentration) of the UV-treated water so that the measured value of the dissolved oxygen meter becomes the set value. It was controlled by adjusting the degree of vacuum. Note that a dissolved oxygen meter was installed between MD205 and UV202.
- FIG. 16 is a diagram showing a configuration for Comparative Example 1-2 to be compared with Example 1-2.
- a water treatment management device 50 was installed in parallel in the same water treatment facility 210 as the water treatment facility 210 shown in FIG. 15, and TOC-containing water was passed therethrough.
- the TOC measuring unit 204 measured the treated water of the CP203.
- the water treatment management device 50 has a configuration in which the specific organic substance measuring section 17 is excluded from the water treatment management device 10 shown in FIG.
- the control device 41 determines the dissolved oxygen concentration (DO concentration) with the same measured value as in Example 1-2. It was set and controlled in relation to the oxygen concentration.
- DO concentration dissolved oxygen concentration
- Ultraviolet irradiation device Low pressure UV oxidation device manufactured by Nippon Photoscience Co., Ltd.
- Ion exchange resin filling device Strong acid cation exchange resin AMBERJET 1024 H type (manufactured by Organo Co., Ltd.), strong base anion exchange resin AMBERJET 4002 OH type (manufactured by Organo Co., Ltd.) Co., Ltd.)
- Mixed bed filling Specific organic substance (urea) measurement method: ORUREA manufactured by Organo Water treatment equipment: Consists of urea removal equipment, filtration equipment, activated carbon, ion exchange resin filling equipment, and reverse osmosis membrane equipment TOC concentration of TOC-containing water: 500 to 700 ppb-C TOC meter: Sievers M500e Reverse osmosis membrane device for water treatment management equipment: Two-stage treatment Irradiation amount control: Controlled by the number of lit lamps Deaerator
- Example 1-1 and 1-2 and Comparative Examples 1-1 and 1-2 are shown in Tables 1 and 2.
- the "urea-TOC conversion value" in Tables 1 and 2 is a value obtained by converting the concentration of urea measured by the specific organic substance measurement unit 17 into a TOC value (the same applies below).
- the values measured by the TOC measurement unit 204 in both Example 1-1 and Comparative Example 1-1 are maintained at less than 0.5 ppb.
- the amount of ultraviolet rays emitted by UV202 in Example 1-1 was 0.1 kWh/m 3
- the amount of ultraviolet rays emitted by UV202 in Comparative Example 1-1 was 0.2 to 0.3 kWh/m
- the number increased to 3 and was brought under control. This is because in Comparative Example 1-1, the amount of ultraviolet irradiation is controlled using a measured value that includes TOC derived from urea, which is difficult to remove by ultraviolet treatment. Therefore, the amount of irradiation is excessive for TOCs other than urea.
- FIG. 17 is a diagram showing the configuration for Example 2-1 of the water treatment system of the present invention.
- a water treatment facility 200 includes a water treatment device 201 that performs pretreatment, an ultraviolet irradiation device (UV) 206 that is a medium pressure UV device, and an ion exchange resin filling device (CP) 203.
- a water treatment management device 10 was installed in parallel, and TOC-containing water was passed through and treated.
- the water treatment management device 10 is in the embodiment described above.
- a TOC measuring section 16 and a specific organic substance measuring section 17 were provided in the treated water line of the water treatment management device 10.
- a sulfur compound addition section 24 for adding an oxidizing agent to the water to be treated passed through the UV 206 was provided.
- the sulfur compound addition section 24 may be included in the water treatment equipment 200. Based on the measurement value obtained from the water treatment management device 10 (the difference between the measurement value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic matter measurement unit 17), the sulfur compound addition unit 24 The controller 32 set and controlled the amount of the oxidizing agent added. The results are shown in Table 3. As in Examples 1-1 and 1-2, the value measured by the TOC measurement unit 204 was less than 0.5 ppb, indicating that stable processing was possible.
- FIG. 18 is a diagram showing the configuration for Example 2-2 of the water treatment system of the present invention.
- the configuration for Example 2-2 is the same as the configuration shown in FIG. 17.
- the control device 32 The amount of ultraviolet light emitted by UV206 was set and controlled. The results are shown in Table 4. As in Examples 1-1 and 1-2, the value measured by the TOC measurement unit 204 was less than 0.5 ppb, indicating that stable processing was possible.
- FIG. 19 is a diagram showing the configuration for Example 3-1 of the water treatment system of the present invention.
- a water treatment device 201 that performs pretreatment, an ultraviolet irradiation device (UV) 206, an ion exchange resin filling device (CP) 203, a deaerator (MD) 205, and a low-pressure ultraviolet irradiation device (UV)
- a water treatment management device 10 was installed in parallel to a water treatment facility 220 composed of an ion exchange resin filling device (CP) 207 and an ion exchange resin filling device (CP) 208, and TOC-containing water was passed therethrough.
- the water treatment management device 10 is in the embodiment described above.
- a TOC measuring section 16 and a specific organic substance measuring section 17 were provided in the treated water line of the water treatment management device 10. Based on the measurement value obtained from the water treatment management device 10 (the difference between the measurement value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17), each of UV206 and 207 A control device 33 set and controlled the amount of ultraviolet rays to be irradiated. At this time, two threshold values (threshold E>threshold F) are set in advance, and the difference between the measured value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17 is equal to or greater than the threshold E.
- the control device 33 controlled the amount of ultraviolet rays emitted from the UV 206. Further, if the difference between the measured value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17 is less than the threshold value E and greater than or equal to the threshold value F, the control device 33 , 207 was controlled at a constant value. Further, if the difference between the measured value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17 is less than the threshold value F, the control device 33 irradiates the ultraviolet rays irradiated from the UV 207. The amount was controlled. The results are shown in Table 5. The value measured by the TOC measurement unit 204 was less than 0.5 ppb, indicating that stable processing was possible.
- the sulfur compound addition unit 24 may be included in the water treatment equipment 220.
- FIG. 20 is a diagram showing the configuration for Example 3-2 of the water treatment system of the present invention.
- the configuration for Example 3-2 is the same as the configuration shown in FIG. 19.
- the control device 34 Based on the measurement value obtained from the water treatment management device 10 (the difference between the measurement value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17), the control device 34 The irradiation amount of ultraviolet rays irradiated by UV206 and the dissolved oxygen concentration of the water to be UV treated were set, and the degree of vacuum of MD205 was adjusted and controlled so as to reach the set values. At this time, two threshold values (threshold G>threshold H) are set in advance.
- the control device 34 controls the amount of ultraviolet rays emitted from the UV 206. controlled. Further, if the difference between the measured value measured by the TOC measurement unit 16 and the TOC conversion value of the urea measurement value measured by the specific organic substance measurement unit 17 is less than the threshold value G and greater than or equal to the threshold value H, the control device 34 The irradiation amount and the dissolved oxygen concentration of the UV-treated water were controlled to be constant values.
- the control device 34 controls the dissolved oxygen concentration of the UV-treated water. was set, and the degree of vacuum of the MD 205 was adjusted and controlled so as to reach the set value.
- the results are shown in Table 6.
- the value measured by the TOC measurement unit 204 was less than 0.5 ppb, indicating that stable processing was possible.
- FIG. 21 is a diagram showing the configuration for Example 4-1 of the water treatment system of the present invention.
- a water treatment facility 200 includes a water treatment device 201 that performs pretreatment, an ultraviolet irradiation device (UV) 206 that is a medium pressure UV device, and an ion exchange resin filling device (CP) 203.
- a water treatment management device 18 was installed in parallel, and TOC-containing water was passed through and treated.
- the water treatment management device 18 is in the embodiment described above.
- a TOC measurement unit 16 was provided in the treated water line of the water treatment management device 18.
- a sulfur compound addition section 24 for adding an oxidizing agent to the water to be treated passed through the UV 206 was provided.
- the sulfur compound addition section 24 may be included in the water treatment equipment 200.
- the water treatment device 201 is not provided with a urea removal function.
- the control device 35 Based on the measured value obtained by the water treatment management device 18 (the measured value measured by the TOC measurement section 16), the control device 35 set and controlled the concentration of persulfuric acid added by the sulfur compound addition section 24. The results are shown in Table 7.
- the results of Comparative Example 2 shown in Table 7 are the measurement results in a configuration in which the water treatment device 201 shown in FIG. 14 is not provided with a urea removal function and the UV 206 is a medium pressure UV device. Further, a urea meter was installed in parallel with the TOC measuring section 16, and the urea concentration was measured using the urea meter. In the configuration shown in FIG.
- the value measured by the TOC measurement unit 204 was less than 0.5 ppb, and stable processing was obtained. Further, in Comparative Example 2, urea was not removed, and the value measured by the TOC measurement unit 204 exceeded 1 ppb.
- FIG. 22 is a diagram showing the configuration for Example 4-2 of the water treatment system of the present invention.
- a water treatment facility 200 includes a water treatment device 201 that performs pretreatment, an ultraviolet irradiation device (UV) 206 that is a medium pressure UV device, and an ion exchange resin filling device (CP) 203.
- a water treatment management device 18 was installed in parallel, and TOC-containing water was passed through and treated.
- the water treatment management device 18 is in the embodiment described above.
- a TOC measurement unit 16 was provided in the treated water line of the water treatment management device 18.
- a sulfur compound addition section 24 for adding an oxidizing agent to the water to be treated passed through the UV 206 was provided.
- the sulfur compound addition section 24 may be included in the water treatment equipment 200.
- the water treatment device 201 is not provided with a urea removal function.
- the control device 35 Based on the measured value obtained by the water treatment management device 18 (the measured value measured by the TOC measurement unit 16), the control device 35 set and controlled the amount of ultraviolet rays irradiated by the UV 206.
- the results are shown in Table 8.
- the results of Comparative Example 2 shown in Table 8 are the measurement results in a configuration in which the water treatment device 201 shown in FIG. 14 is not provided with a urea removal function and the UV 206 is a medium pressure UV device. Further, a urea meter was installed in parallel with the TOC measuring section 16, and the urea concentration was measured using the urea meter. In the configuration shown in FIG.
- the value measured by the TOC measurement unit 204 was less than 0.5 ppb, and stable processing was obtained. Further, in Comparative Example 2, urea was not removed, and the value measured by the TOC measurement unit 204 exceeded 1 ppb.
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Abstract
Description
複数の水処理装置を備え、被処理水を処理する水処理設備と、
前記複数の水処理装置のいずれかに供給される前記被処理水が供給される水処理管理装置と、
前記水処理装置の運転条件を制御する制御装置とを有し、
前記水処理管理装置は、
前記水処理管理装置の通水ラインに通水されている水のTOC濃度を測定する第1の測定部と、
前記水処理管理装置の通水ラインに通水されている水の特定有機物濃度を測定する第2の測定部とを有し、
前記制御装置は、前記第1の測定部が測定したTOC濃度と、前記第2の測定部が測定した特定有機物濃度とに基づいて、前記水処理装置の運転条件を制御する。
複数の水処理装置を備え、被処理水を処理する水処理設備と、
前記複数の水処理装置のいずれかに供給される前記被処理水が供給される水処理管理装置と、
前記被処理水に酸化剤を添加する酸化剤添加手段と、
前記水処理装置の運転条件を制御する制御装置とを有し、
前記水処理管理装置は、前記水処理管理装置の通水ラインに通水されている水のTOC濃度を測定する測定部を有し、
前記制御装置は、前記測定部が測定したTOC濃度に基づいて、前記酸化剤添加手段が添加する酸化剤の添加量と、前記酸化剤添加手段が前記酸化剤を添加した被処理水に対する、前記複数の水処理装置のうちの紫外線照射装置の照射量との少なくとも1つを制御する。
複数の水処理装置を用いて被処理水を処理する水処理設備の前記複数の水処理装置のいずれかに供給される前記被処理水が供給される水処理管理装置の通水ラインに通水されている水のTOC濃度を測定し、
前記水処理管理装置の通水ラインに通水されている水の特定有機物濃度を測定し、
前記測定したTOC濃度と、前記測定した特定有機物濃度とに基づいて、前記水処理装置の運転条件を制御する。
(第1の実施の形態)
(第2の実施の形態)
(第3の実施の形態)
(第4の実施の形態)
(第5の実施の形態)
(第6の実施の形態)
(実施例)
<実施例1-1>
<比較例1-1>
<実施例1-2>
<比較例1-2>
紫外線照射装置:低圧UV酸化装置(株)日本フォトサイエンス社製
イオン交換樹脂充填装置:強酸カチオン交換樹脂AMBERJET 1024 H型(オルガノ(株)製)、強塩基アニオン交換樹脂AMBERJET 4002 OH型(オルガノ(株)製) 混床充填
特定有機物(尿素)測定手段:オルガノ製ORUREA
水処理装置:尿素除去装置、ろ過装置、活性炭、イオン交換樹脂充填装置、逆浸透膜装置で構成
TOC含有水のTOC濃度:500~700ppb-C
TOC計:Sievers製M500e
水処理管理装置の逆浸透膜装置:2段処理
照射量制御:点灯ランプ本数で制御
脱気装置:真空脱気膜
溶存酸素制御:インバータを用いて脱気装置の真空度を調整
被処理水DO濃度:1ppm
尿素除去装置:次亜塩素酸ナトリウムおよび臭化ナトリウムが添加された滞留槽
<実施例2-1>
Claims (10)
- 複数の水処理装置を備え、被処理水を処理する水処理設備と、
前記複数の水処理装置のいずれかに供給される前記被処理水が供給される水処理管理装置と、
前記水処理装置の運転条件を制御する制御装置とを有し、
前記水処理管理装置は、
前記水処理管理装置の通水ラインに通水されている水のTOC濃度を測定する第1の測定部と、
前記水処理管理装置の通水ラインに通水されている水の特定有機物濃度を測定する第2の測定部とを有し、
前記制御装置は、前記第1の測定部が測定したTOC濃度と、前記第2の測定部が測定した特定有機物濃度とに基づいて、前記水処理装置の運転条件を制御する水処理システム。 - 請求項1に記載の水処理システムにおいて、
前記水処理装置として紫外線照射装置を備え、
前記制御装置は、前記運転条件として前記紫外線照射装置の照射量を制御する水処理システム。 - 請求項2に記載の水処理システムにおいて、
前記制御装置は、前記紫外線照射装置のランプ点灯本数と、処理流量と、ランプ調光との少なくとも1つを制御する水処理システム。 - 請求項2または請求項3に記載の水処理システムにおいて、
前記水処理装置として前記紫外線照射装置の前段に配置された脱気装置をさらに備え、
前記制御装置は、前記紫外線照射量と、前記紫外線照射装置の被処理水の溶存酸素濃度との少なくとも1つを制御する水処理システム。 - 請求項2または請求項3に記載の水処理システムにおいて、
前記紫外線照射装置に通水される前記被処理水に酸化剤を添加する酸化剤添加手段を有し、
前記制御装置は、前記第1の測定部が測定したTOC濃度と、前記第2の測定部が測定した特定有機物濃度とに基づいて、前記酸化剤添加手段が添加する酸化剤の添加量と前記紫外線照射装置の照射量との少なくとも1つを制御する水処理システム。 - 請求項5に記載の水処理システムにおいて、
前記酸化剤は、ペルオキシド基を含む硫黄化合物である水処理システム。 - 請求項2または請求項3に記載の水処理システムにおいて、
前記水処理装置として前記紫外線照射装置の前段または後段に配置された低圧紫外線照射装置をさらに備える水処理システム。 - 請求項7に記載の水処理システムにおいて、
前記制御装置は、前記第1の測定部が測定したTOC濃度と、前記第2の測定部が測定した有機物濃度とに基づいて、前記低圧紫外線照射装置が照射する紫外線の照射量を制御する水処理システム。 - 複数の水処理装置を備え、被処理水を処理する水処理設備と、
前記複数の水処理装置のいずれかに供給される前記被処理水が供給される水処理管理装置と、
前記被処理水に酸化剤を添加する酸化剤添加手段と、
前記水処理装置の運転条件を制御する制御装置とを有し、
前記水処理管理装置は、前記水処理管理装置の通水ラインに通水されている水のTOC濃度を測定する測定部を有し、
前記制御装置は、前記測定部が測定したTOC濃度に基づいて、前記酸化剤添加手段が添加する酸化剤の添加量と、前記酸化剤添加手段が前記酸化剤を添加した被処理水に対する、前記複数の水処理装置のうちの紫外線照射装置の照射量との少なくとも1つを制御する水処理システム。 - 複数の水処理装置を用いて被処理水を処理する水処理設備の前記複数の水処理装置のいずれかに供給される前記被処理水が供給される水処理管理装置の通水ラインに通水されている水のTOC濃度を測定し、
前記水処理管理装置の通水ラインに通水されている水の特定有機物濃度を測定し、
前記測定したTOC濃度と、前記測定した特定有機物濃度とに基づいて、前記水処理装置の運転条件を制御する水処理方法。
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10337568A (ja) * | 1997-06-09 | 1998-12-22 | Kurita Water Ind Ltd | 超純水製造装置 |
| JP2003126850A (ja) * | 2001-10-26 | 2003-05-07 | Kurita Water Ind Ltd | 有機物含有水の処理装置及び処理方法 |
| JP2016005829A (ja) * | 2014-06-20 | 2016-01-14 | 栗田工業株式会社 | 超純水製造方法および超純水製造装置 |
| JP2018079448A (ja) * | 2016-11-18 | 2018-05-24 | オルガノ株式会社 | 水処理方法および装置 |
| JP2018518352A (ja) * | 2015-05-04 | 2018-07-12 | エヴォクア ウォーター テクノロジーズ エルエルシーEvoqua Water Technologies LLC | 柔軟なランプ構成を備えた超純水提供システム及び方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10337568A (ja) * | 1997-06-09 | 1998-12-22 | Kurita Water Ind Ltd | 超純水製造装置 |
| JP2003126850A (ja) * | 2001-10-26 | 2003-05-07 | Kurita Water Ind Ltd | 有機物含有水の処理装置及び処理方法 |
| JP2016005829A (ja) * | 2014-06-20 | 2016-01-14 | 栗田工業株式会社 | 超純水製造方法および超純水製造装置 |
| JP2018518352A (ja) * | 2015-05-04 | 2018-07-12 | エヴォクア ウォーター テクノロジーズ エルエルシーEvoqua Water Technologies LLC | 柔軟なランプ構成を備えた超純水提供システム及び方法 |
| JP2018079448A (ja) * | 2016-11-18 | 2018-05-24 | オルガノ株式会社 | 水処理方法および装置 |
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