WO2024056273A1 - Composant transducteur - Google Patents

Composant transducteur Download PDF

Info

Publication number
WO2024056273A1
WO2024056273A1 PCT/EP2023/071553 EP2023071553W WO2024056273A1 WO 2024056273 A1 WO2024056273 A1 WO 2024056273A1 EP 2023071553 W EP2023071553 W EP 2023071553W WO 2024056273 A1 WO2024056273 A1 WO 2024056273A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
transducer
membrane
component
signal
Prior art date
Application number
PCT/EP2023/071553
Other languages
German (de)
English (en)
Inventor
Stefan SAX
Amira HEDHILI
Alexander FEDOROVSKIY
Dominik TAFERNER
Original Assignee
Tdk Electronics Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk Electronics Ag filed Critical Tdk Electronics Ag
Publication of WO2024056273A1 publication Critical patent/WO2024056273A1/fr

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521—Constructional features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52004—Means for monitoring or calibrating

Definitions

  • the present invention relates to a transducer component having an electromechanical transducer element for generating an electrical signal from a mechanical vibration or vice versa.
  • This can in particular be an ultrasonic transducer in which a vibration of a mechanical system is generated by an acoustic signal above the human hearing range.
  • Such sound transducers are now used for many measurement tasks, for example for distance measurement.
  • a well-known application example is the parking aid in cars, which is now largely carried out by measuring the running time with ultrasonic transducers in the bumper.
  • DE 10 2010 027 780 A1 discloses a transducer component in which an oscillatable membrane has different thicknesses to generate different resonance frequencies.
  • EP 3 095 530 A1 and JP H05122793 A each disclose transducer components in which different vibration modes are excited by targeted control of structured electrodes. Signals of different amplitude, frequency and phase position are generated via the electrodes and evaluated electronically.
  • EP 0 706 835 A1 discloses a transducer component in which the resonance frequency is adjusted depending on the operation by changing the active electrode surface using external circuitry and control.
  • CN 1 09 225 789 A discloses a MEMS ultrasound transducer having a multi-layered composite structure in which circular electrodes and annular electrodes are controlled with a phase difference in order to improve the transmission performance of the converter.
  • the object of the present invention is to provide a converter component with improved properties.
  • the signal strength of the converter component should be improved.
  • a transducer component has an electromechanical transducer element for generating an electrical signal from a mechanical vibration.
  • This can in particular be an acoustically generated membrane vibration.
  • the converter component can alternatively or additionally also be designed to generate a mechanical vibration from an electrical signal.
  • the transducer element has at least a first electrode, at least a second electrode and at least one transducer layer lying therebetween.
  • the transducer layer is in particular a piezoelectric layer which, when deformed, generates an electrical voltage between the electrodes.
  • the converter layer has a ceramic material or a polymer material.
  • the transducer element can be attached to an oscillatable membrane and designed to detect the vibration.
  • the membrane is held in an edge area by a carrier. It is also possible for the transducer element itself to form an oscillatable membrane and to be held directly by the carrier.
  • the membrane is held in particular at the edge by a carrier.
  • the membrane is attached to the carrier, for example by gluing.
  • the first and second electrodes can be designed in such a way that they do not overlap in areas of the transducer layer and/or the membrane in which different types of deformation occur during vibration.
  • areas of a side on which the transducer element and/or the electrodes are arranged are considered here. In particular, this can be an inside of the membrane that faces an interior of the converter component.
  • the signal strength can be increased with a smaller design of the transducer element or with a smaller design of the electrodes. This is due to the fact that compressed and stretched volume areas lead to signal components of different polarities. When the electrodes overlap in areas of different deformation, the signal components of different polarities add up so that the overall signal is attenuated. By limiting the expansion of the electrodes only to areas of uniform deformation, an attenuation of the signal is avoided. It is also possible for an overlap of the electrodes to extend into a third area that separates the first area from the second area. No signal is generated in the third area.
  • transducer element i.e. both electrodes and the transducer layer
  • the entire transducer element i.e. both electrodes and the transducer layer
  • the different areas of the page can also be characterized by the fact that the curvature of the surface in these areas has a different sign. Between the areas of different curvature there is a third area in which the curvature is zero.
  • the transducer layer, the electrodes and/or the membrane can each have a circular circumferential line. It is also possible that the perimeter lines are not circular.
  • the membrane can be held on the edge by a support, the area held on the edge having a non-circular circumferential line.
  • a circumferential line is in the form of segments of a circular ring.
  • the circumferential line of the membrane and/or the transducer layer and/or the area of the membrane held at the edge has corners, while the circumferential line of the overlap area of the electrodes or the circumferential line of the electrodes has no corners.
  • the transducer layer and/or the membrane and/or the area held at the edge are angular and the electrodes are circular or oval. This can result from the fact that the first and second areas are free of edges even with an angular circumferential line and the overlap areas are adapted accordingly to the areas.
  • the overlap area of the electrodes can exactly cover the first area.
  • the circumferential line of the first area can correspond to the circumferential line of the overlap area.
  • one or both of the electrodes can cover exactly the first area.
  • the overlap area can extend slightly beyond the first area, but it should not extend into the second area.
  • several first electrodes and/or several second electrodes to be present.
  • a further first electrode is present.
  • the further first electrode is arranged in an area of a different type of deformation than the first electrode.
  • the first electrode is arranged in a central region of a membrane and the further first electrode completely surrounds the first electrode in an outer region of the membrane.
  • the second electrode can be designed as a common counter electrode for both first electrodes.
  • the membrane is not held by a carrier in an area between the electrode and the further electrode.
  • the membrane therefore carries out a uniform oscillation in the area of the electrode and the further electrode and is not separated into different areas by being attached to a support.
  • the voltage components generated at the first and further first electrodes can be tapped separately from one another.
  • a first signal, which is picked up at the first electrode can represent the actual measurement signal of the converter component. It is also possible for the measurement signal to be formed as a total signal from the sum of the amounts of the first signal and the further signal. This means that the overall signal is larger than a signal in which both components of a first electrode designed to have a completely flat surface are summed directly.
  • the further first signal can also be used as a control signal. Due to the different type of deformation, the further first signal should be designed to be 180° out of phase with the first signal. If the phase shift is not present, this may be a sign of a fault in the converter element. Overall, the further first electrode is therefore not used for any other type of signal measurement or control of the transducer element. When the transducer element is activated, for example, the further first electrode is supplied with a signal that is phase-shifted by 180°. Overall, the control of the second electrode should not lead to a different type of oscillation; for example, no higher-order oscillation should be excited. Alternatively, when the converter element is activated, no voltage can be applied to the further first electrode. For example, a voltage for error detection can be measured there, while the first electrode is subjected to a voltage and causes an oscillation.
  • a first signal is tapped or applied to the first electrode and a further signal is tapped or applied to the further first electrode.
  • a total signal can be formed from the absolute sum of the signals and/or the additional signal can be used to control the function of the converter component.
  • a method for producing the previously described converter component is specified.
  • a membrane is provided which is held at the edge by a carrier.
  • Types of deformation in the membrane are measured and a first area with a first type of deformation and a second area with a second type of deformation are determined on one side of the membrane, which is designed for attaching the transducer element and/or electrodes.
  • a transducer element or electrodes are then provided and arranged on the membrane so that the membrane overlaps Electrodes are not present in areas of different types of deformation.
  • the present invention encompasses several aspects, particularly devices and methods.
  • the characteristics, properties and described for one of the aspects are
  • Figure 1 shows an embodiment of a converter component in cross section
  • Figure 2 shows a transducer element from Figure 1 in cross section
  • Figure 3 shows a deformation of a membrane of a converter component in cross section and in a top view
  • FIG. 4A shows a non-inventive geometry of a transducer element in the membrane from FIG. 3 in a top view
  • Figure 4B shows a diagram of deflection and sensor voltage for a converter component having the converter element from Figure 4A and the membrane from Figure 3,
  • FIG. 5A shows an embodiment of a converter element in the membrane from FIG. 3,
  • FIG. 5B shows a diagram of deflection and sensor voltage for a converter component having the converter element from FIG. 5A and the membrane from FIG. 3,
  • FIG. 6A shows a further embodiment of a converter component in cross section
  • FIG. 6B shows a top view of the converter in the converter component of FIG. 6A
  • FIG. 6C shows a diagram of deflection and sensor voltage for a converter component according to FIG. 6A
  • FIG. 7 shows a further embodiment of a converter component in a perspective partial sectional view
  • FIG. 8A shows a further embodiment of a converter component in a perspective view
  • FIG. 8B shows a deformation pattern of a membrane of the converter component from FIG. 8A in a top view
  • FIG. 8C shows a transducer adapted to the deformation pattern from FIG. 8B in a top view
  • Figure 8D shows the structure of the converter element from Figure 8C in an exploded view.
  • the same reference symbols preferably refer to functionally or structurally corresponding parts of the different embodiments.
  • Figure 1 shows an embodiment of a converter component 1 having an electromechanical converter element 2 for converting a vibration into an electrical signal.
  • the transducer component 1 can thus detect mechanical vibrations.
  • the converter component 1 can be used to generate oscillations by applying an electrical voltage.
  • the transducer component 1 has a mechanically oscillatable system 3, which is caused to oscillate by physical influences, such as a pressure wave, sound or structure-borne noise.
  • the oscillatable system 3 has, for example, a membrane 4 which is held in its edge regions by a support 5.
  • the membrane 4 can be fixed to the carrier 5 completely or only partially.
  • the membrane 4 is attached to the carrier by gluing.
  • this is a component that is manufactured using classic joining techniques of the individual parts and not a component in MEMS construction.
  • the membrane 4 can also be formed in one piece with the carrier 5.
  • the carrier 5 is designed in the form of a hollow cylinder.
  • the carrier 5 forms side walls.
  • the oscillation of the membrane 4 can be generated by ultrasonic waves, so that the transducer element is designed as an ultrasonic transducer.
  • the electromechanical converter element 2 is fastened to one side 6 of the membrane 4, in particular fastened in a force-fitting manner. Due to the deformation of the electromechanical transducer element 2 that occurs when the membrane 4 oscillates, an electrical signal is generated at contacts, which is fed to electronic signal processing by means of electrical contacts 14, 15.
  • FIG. 2 shows a structure of an electromechanical converter 2, as can be present, for example, in the converter component 1 of FIG. 1.
  • the transducer element 2 has a transducer layer 7 which is arranged between a first electrode 8 and a second electrode 9 .
  • the transducer layer 7 is piezoelectric and has, for example, a ceramic, a polymer material or a composite material.
  • the electrodes 8 , 9 are electrically conductive and comprise, for example, a metal, polymer or a composite material.
  • the electrodes 8 , 9 are designed in particular as a coating on the converter layer 7 .
  • the converter layer 7, for example, is not a thin layer in the one- to lower two-digit pm range, but rather a thicker layer that can be attached to the carrier 5 using classic fastening techniques, i.e. no semiconductor manufacturing processes.
  • the stack of first electrode 8, converter layer 7 and second electrode 9 can be arranged on a substrate 10.
  • the substrate 10 can on the one hand Serve to produce the stack and on the other hand serve to attach it to the oscillatable system 3.
  • the substrate 10 can be attached directly to a membrane 4. It is also possible that the substrate 10 is not present and the stack with the second electrode 9 is attached directly to a membrane 4.
  • the substrate 10 comprises, for example, plastic, a metal or a composite material.
  • the electrodes 8 , 9 are preferably not electrically connected to the substrate 10 .
  • the transducer layer 7 may directly form an oscillatable membrane, so that the additional membrane 4 from Figure 1 is not present and the transducer layer 7 is held on the edge by the carrier 5.
  • the transducer element 2 can also be formed from several partial transducers stacked one above the other with several transducer layers 7 stacked one above the other and electrodes 8, 9 lying between them.
  • the electrodes 8, 9 can be connected to one another in parallel or in series.
  • An overlap area is created by the fact that when looking at the main surface of the membrane in the resting state, the electrodes overlap.
  • Figure 3 shows a mechanical pre-shaping of the converter component 1 from Figure 1 with representation of the different types of deformation.
  • the converter component 1 as in the figure 1 shown in cross section, once dashed without deformation and in different shades with deformation. The shades indicate the type of deformation that occurs, such as compression and expansion.
  • the illustration below shows a view of the membrane 4 from below, also showing the different types of deformation.
  • the deformation pattern can be determined in a simulation.
  • the deflection and frequency at selected points can be determined using measurements.
  • the outer circular ring thus corresponds to a second region 12 of a second type of deformation. Accordingly, there is a compression on the top of the membrane 4.
  • the third area 13 can be referred to as a node area.
  • the third area 13 can be a turning area in which the curvature of the membrane 4 changes its sign.
  • the third area 13 separates the areas 11 , 12 of different types of deformation from one another.
  • a voltage is generated in an electromechanical converter element 2 that has a different polarity than in the second area 12.
  • the size and arrangement of the electromagnetic transducer element 2 can be selected such that the transducer layer 7 is arranged completely in one of the regions 11, 12 of a uniform type of deformation on the membrane 4.
  • FIG 4A shows an example not according to the invention of an electromagnetic converter element 2 for a component 1.
  • the transducer element 2 has a stacked arrangement of first electrode 8, second electrode 9 and transducer layer 7 lying between them.
  • the first electrode 8 can be seen completely here in the top view.
  • the first electrode 8 has a contact 14.
  • the first electrode 8 completely covers the converter layer 7.
  • the converter layer 7 is therefore only indicated by dashed lines.
  • the diameter D of an overlap area of the electrodes 8, 9 corresponds here to the diameter of the converter layer 7 and the diameter of the circular area of the first electrode 8. Only the contact 15 of the second electrode 9 is closed see .
  • the second electrode 9 has the same geometry as the first electrode 8.
  • the transducer element 2 is arranged on the membrane 4 as in FIG. 3, but the transducer layer 7 completely covers the inside of the membrane 4.
  • the diameter D of the overlap area therefore corresponds to the outside diameter Dg of the second area 12.
  • the diameter Dg 10 mm.
  • the electrodes 8 , 9 thus overlap both in an area 11 of a first type of deformation and in an area 12 of a second type of deformation. In this case, two signal components with opposite signs occur in the same converter element, which reduce the overall signal.
  • FIG. 4B shows a diagram of deflection d and sensor voltage U over time t of a component with a full-surface transducer layer 7 according to FIG. 4A.
  • a deflection of approx. 2 ⁇ m results in a voltage signal of several 10 mV.
  • the electrodes 8, 9 only overlap in the area 11 of expansion during outward movement and compression during backward movement.
  • the entire transducer element 2 only covers this area. The simultaneous occurrence of electrical voltage signal components with the opposite sign in the same transducer element 2 is thus avoided here, so that no reduction in the overall signal occurs within the electromagnetic transducer element 2.
  • 5B shows a diagram of deflection d and sensor voltage U over time t of a converter component 1 with a converter element 2 according to FIG. 5A, the active area of which only covers the first area 11 of the membrane 4.
  • Figure 6A shows a further embodiment of a converter component 1.
  • Figure 6B shows the transducer element 2 used there in a top view.
  • the transducer element 2 has a plurality of first electrodes 8, 16, each of which is only arranged in one of the regions 11, 12 of a type of deformation.
  • the first electrodes 8, 16 are not electrically connected to one another.
  • the membrane 4 is not attached to the carrier 5 between the electrodes 8, 16.
  • FIGS. 6C shows a diagram of deflection d and sensor voltage U over time t of a component with a full-surface transducer layer 7 according to FIGS. 6A and 6B.
  • the diagram shows a first voltage signal Ug, which is tapped at the first electrode 8, and a second voltage signal Ug, which is tapped at the further first electrode 16.
  • the second electrode 9 is designed as a common counter electrode of the first electrode 8 and the further first electrode 16. The respective voltage signals are therefore always a voltage occurring between one of the first electrodes 8, 16 and the second electrode 9.
  • the sign of the voltage Ug tapped between the further first electrode 16 and the second electrode 9 can be changed electronically and added to the voltage Ug tapped between the first electrode 8 and the second electrode 9. This means that a signal increase can be achieved without an active amplifier.
  • the voltage signal of the further first electrode 16 can be used to check the function of the converter component 1.
  • the voltage signal should be 180° out of phase with the signal that is above the first electrode 8 is tapped. If this signal is not present, an error can be concluded.
  • the electrodes there are several second electrodes, each of which is only arranged in areas 11, 12 of one type of deformation. It is also possible for the electrodes to be divided on both sides. In addition, it is also possible to provide several separate transducers 2, so that the transducer layer 7 also has a subdivision, with partial areas then only being arranged in areas 11, 12 of one type of deformation.
  • the active area and the volume of the transducer element 2, in particular the transducer layer 7, can be reduced and at the same time the signal quality can be improved.
  • the component design is adapted to the deformation pattern of the mechanical system 3 by adapting the external shape of the transducer layer and/or the electrodes.
  • the converter element 2 can therefore be produced in a resource-saving and cost-effective manner.
  • the overall signal can be improved.
  • additional information can also be generated.
  • the measurement signal can be increased, so that the system sensitivity can be increased with the same electronics or the requirements on the electronics can be reduced.
  • the increase in signal strength is achieved without additional electrodes, so that the existing control electronics (AS IC) can be used.
  • Figure 7 shows a further embodiment of a converter component 1.
  • the converter component 1 is designed according to the embodiment of FIGS. 1, 2, 5A and 5B.
  • the shape of the transducer layer 7 and the electrodes 8, 9 is adapted to the deformation pattern of the membrane 4, so that only a first region 11 of a first type of deformation is covered by the transducer layer 7 and the electrodes 8, 9.
  • the substrate 10 is led out here on the inner side walls of the carrier 5 and thus also serves to lead out the contacts 14, 15.
  • the converter component 1 is designed to be rotationally symmetrical. Alternatively, contacts can also be formed using separate wires.
  • FIGS 8A to 8D show a further embodiment of a converter component 1 as well as steps in the production of a converter component 1.
  • the membrane 4 here does not have a circular shape. This is intended to make it clear that the invention does not apply to a circular membrane 4 and/or a circular region attached to a support Membrane 4 is limited, but rather a membrane 4 or the attached area of the membrane 4 can be chosen to have any other shape.
  • the converter component 1 can have several membranes 4.
  • Figure 8A shows the transducer component 1, in which a plurality of membranes 4 in the form of segments of a circular ring are clamped in a carrier 5.
  • FIG. 8B shows a deformation pattern of the membrane 4 on a side 6 on which the transducer element 2 is arranged.
  • a first region 11 there is again a first type of deformation and in a second region 12 there is a second type of deformation.
  • the areas 11 , 12 are separated from one another by a third area 13 .
  • FIG. 8C shows a transducer 2 whose geometry is adjusted after determining the deformation pattern of the membrane 4, so that an overlap area of the electrodes 8, 9 only exists in the first area 11. It is also possible that, in addition, the converter layer 7 is only arranged in the first region 11 or that only one of the electrodes 8, 9 is limited to only one of the regions 11, 12.
  • Figure 8D shows the structure of the converter element 2 in an exploded view.
  • the electrodes 8, 9 have an approximately oval shape. Both that in Fig. 8A shown traveling component 1 with multiple membranes 4 as well as only one of the membranes 4 with the respective transducer element 2 can be viewed as a traveling component 1. reference symbol

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Un composant transducteur (1) comprend un élément transducteur électromécanique (2) comprenant au moins une première électrode (8, 16), au moins une seconde électrode (9) et au moins une couche de transducteur (7) située entre elles, le composant transducteur (1) ayant un diaphragme (4), qui est capable d'osciller, auquel l'élément transducteur (2) est fixé, ou l'élément transducteur (2) étant conçu pour une oscillation mécanique directement, les première et seconde électrodes (8, 9, 16) ne se chevauchant pas dans des régions (11, 12) d'un côté (6) du diaphragme (4) et/ou de la couche de transducteur (7) qui ont différents types de déformation, les différents types de déformation étant une compression ou un allongement.
PCT/EP2023/071553 2022-09-14 2023-08-03 Composant transducteur WO2024056273A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102022123500.9 2022-09-14
DE102022123500 2022-09-14

Publications (1)

Publication Number Publication Date
WO2024056273A1 true WO2024056273A1 (fr) 2024-03-21

Family

ID=87567810

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2023/071553 WO2024056273A1 (fr) 2022-09-14 2023-08-03 Composant transducteur

Country Status (1)

Country Link
WO (1) WO2024056273A1 (fr)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05122793A (ja) 1991-10-25 1993-05-18 Murata Mfg Co Ltd 圧電スピーカ
EP0706835A1 (fr) 1994-10-10 1996-04-17 Endress + Hauser GmbH + Co. Méthode de mise en oeuvre d'un transducteur ultrasonique, piezoélectrique et circuit destiné à sa mise en application
EP0718900A2 (fr) * 1994-12-21 1996-06-26 Ngk Insulators, Ltd. Couche mince piézo-électrique à membrane comportant au moins une section aux bords pour l'absorption de contraintes
EP1096469A2 (fr) * 1999-10-28 2001-05-02 Murata Manufacturing Co., Ltd. Dispositif à vibration ultrasonore
US20080122320A1 (en) * 2006-11-27 2008-05-29 Fazzio R Shane Transducers with annular contacts
DE102010027780A1 (de) 2010-04-15 2011-10-20 Robert Bosch Gmbh Verfahren zum Ansteuern eines Ultraschallsensors und Ultraschallsensor
EP3095530A1 (fr) 2015-05-20 2016-11-23 Robert Bosch Gmbh Dispositif d'envoi et/ou de reception de signaux acoustiques
CN109225789A (zh) 2018-09-06 2019-01-18 姬俊鹏 一种组合式变刚度薄膜pMUTs及其制备方法
DE102018133329A1 (de) * 2017-12-25 2019-06-27 Aisin Seiki Kabushiki Kaisha Ultraschallwandler

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05122793A (ja) 1991-10-25 1993-05-18 Murata Mfg Co Ltd 圧電スピーカ
EP0706835A1 (fr) 1994-10-10 1996-04-17 Endress + Hauser GmbH + Co. Méthode de mise en oeuvre d'un transducteur ultrasonique, piezoélectrique et circuit destiné à sa mise en application
EP0718900A2 (fr) * 1994-12-21 1996-06-26 Ngk Insulators, Ltd. Couche mince piézo-électrique à membrane comportant au moins une section aux bords pour l'absorption de contraintes
EP1096469A2 (fr) * 1999-10-28 2001-05-02 Murata Manufacturing Co., Ltd. Dispositif à vibration ultrasonore
US20080122320A1 (en) * 2006-11-27 2008-05-29 Fazzio R Shane Transducers with annular contacts
DE102010027780A1 (de) 2010-04-15 2011-10-20 Robert Bosch Gmbh Verfahren zum Ansteuern eines Ultraschallsensors und Ultraschallsensor
EP3095530A1 (fr) 2015-05-20 2016-11-23 Robert Bosch Gmbh Dispositif d'envoi et/ou de reception de signaux acoustiques
DE102018133329A1 (de) * 2017-12-25 2019-06-27 Aisin Seiki Kabushiki Kaisha Ultraschallwandler
CN109225789A (zh) 2018-09-06 2019-01-18 姬俊鹏 一种组合式变刚度薄膜pMUTs及其制备方法

Similar Documents

Publication Publication Date Title
EP2297798B1 (fr) Procédé d'accord d'une fréquence de résonance d'un composant piézoélectrique
DE3731196C2 (fr)
EP2559024B1 (fr) Procédé pour commander un capteur ultrasonore et capteur ultrasonore
EP1550349B1 (fr) Membrane et procede de realisation associe
DE69127074T2 (de) Vorrichtung und verfahren zur dynamischen drehmomentmessung
DE102011083487B4 (de) Beschleunigungssensor und Verfahren zum Betrieb eines Beschleunigungssensors
DE102006007494A1 (de) Ultraschallelement
DE102010010099A1 (de) Schwingfähiges System für einen Ultraschallwandler und Verfahren zur Herstellung des schwingfähigen Systems
EP3095530B1 (fr) Dispositif d'envoi et de reception de signaux acoustiques
EP2144715A1 (fr) Batterie de convertisseurs ultrasoniques pour applications dans des fluides gazeux
DE102005008515A1 (de) MEMS-Mikrofon und Verfahren zu dessen Herstellung
WO2024056273A1 (fr) Composant transducteur
WO2018224325A1 (fr) Capteur à ultrasons
EP3386649A1 (fr) Ensemble transducteur acoustique comprenant une couche métallique structurée et procédé de fabrication d'un ensemble transducteur acoustique comprenant une couche métallique structurée
EP2423654A1 (fr) Capteur micromécanique doté d'une caractéristique de passage de bande
DE102008013395A1 (de) Kondensatormikrofon
DE102013222076A1 (de) Schallwandler und Herstellungsverfahren für einen Schallwandler
DE102020126959A1 (de) Niederfrequenz-schwingungsaktorvorrichtung
DE1616276A1 (de) Verfahren zur Herstellung magnetostriktiver Schwinger und Schwinger nach diesem Verfahren
DE2714709A1 (de) Elektroakustischer wandler mit einer hochpolymeren piezoelektrischen membran
DE102009027011A1 (de) Körperschallsensor
DE19726355A1 (de) Mikromechanische Resonanzstruktur
DE102022114407B3 (de) Ringförmiger mikroelektromechanischer Drehratensensor
DE10013673C2 (de) Mikromechanischer elektroakustischer Wandler
WO2017153281A1 (fr) Dispositif capteur mems et procédé de fabrication associé

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23751962

Country of ref document: EP

Kind code of ref document: A1