EP2144715A1 - Batterie de convertisseurs ultrasoniques pour applications dans des fluides gazeux - Google Patents

Batterie de convertisseurs ultrasoniques pour applications dans des fluides gazeux

Info

Publication number
EP2144715A1
EP2144715A1 EP08748715A EP08748715A EP2144715A1 EP 2144715 A1 EP2144715 A1 EP 2144715A1 EP 08748715 A EP08748715 A EP 08748715A EP 08748715 A EP08748715 A EP 08748715A EP 2144715 A1 EP2144715 A1 EP 2144715A1
Authority
EP
European Patent Office
Prior art keywords
ultrasonic transducer
transducer array
ultrasonic
layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08748715A
Other languages
German (de)
English (en)
Inventor
Christian Degel
Thomas Velten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP2144715A1 publication Critical patent/EP2144715A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B06B1/0692—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF with a continuous electrode on one side and a plurality of electrodes on the other side

Definitions

  • the layer of the piezoelectrically active, cellular electret material is preferably formed by a foil of this material.
  • a layer structure of a plurality of superimposed layers or films of a use such electret material.
  • An example of a suitable electret material is porous polypropylene.
  • One or both electrode structures for the formation of the individual transducer elements are in this case preferably applied directly to the layer of the
  • the proposed ultrasonic array can have different geometries and, for example, be designed as a linear array, as a phased array, as a curved array or as a circular array.
  • the transducer elements or electrode elements of the array can be curved to allow the beam
  • FIG. 3 shows an example of a device for directional radiation and / or for the directional reception of ultrasonic waves with an ultrasonic transducer array according to the present invention
  • Example 32 includes finger-shaped electrode elements 3, which are arranged side by side. Through these 32 electrode elements 3, the active aperture of the Ultrasonic transducer arrays formed. Each individual electrode element 3 is electrically contactable via a supply line 7 from the outside independently of the respective other electrode elements. On the back side of the electret film 1, the counterelectrode 4 is applied over its entire area in this example, which is also indicated in FIG.
  • FIG. 2 shows by way of example a cross section through such an ultrasonic transducer array in a schematic representation.
  • the electret film 1 and the upper 2 and lower electrode structure 4 can be seen.
  • the ultrasonic transducer array is designed for an ultrasonic frequency of 250 kHz. This corresponds to an ultrasonic wavelength in air of 1.4 mm.
  • the pitch of the electrode elements 3 was set to be less than half the wavelength at 0.5 mm.
  • Electrode elements 3 is 0.1 mm and the length of the elements is 10 mm.
  • the production of the electrode structure of Figure 1 on the electret film 1 was carried out by sputtering and subsequent etching.
  • the cellular electrophotme 1 was mounted on a ceramic substrate having a flat surface.
  • a chromium adhesion layer was first sputtered onto the surface of the electret film 1.
  • a gold layer was deposited by sputtering on this adhesion layer.
  • the electrode structure exposed.
  • the counter electrode 4 was applied in the same way to the front side of the electret film 1 and structured to form active finger electrodes.
  • the electret film 1 must additionally be charged in the area of the active aperture.
  • different techniques are possible, which are known in the art.
  • a simple corona poling method was used in which the electret film 1 is exposed to a field strength below the breakdown voltage for a short time.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

L'invention concerne une batterie de convertisseurs ultrasoniques qui présente au moins une couche (1) en un matériau d'électret cellulaire piézoélectriquement actif comprise entre une première structure d'électrodes (2) et une deuxième structure d'électrodes (4). La première structure d'électrodes (2) est formée de plusieurs éléments d'électrode (3) qui peuvent être adressés indépendamment les uns des autres et par lesquels, chaque fois en association avec la deuxième structure d'électrodes (4), des oscillations locales d'épaisseur de la couche (1) ou de pores que contient la couche (1) peuvent être formées et/ou détectées à des fréquences comprises dans la plage des ultrasons. La batterie de convertisseurs ultrasoniques selon l'invention peut être avantageusement utilisée dans des applications dans des fluides gazeux, peut être fabriquée aisément et permet un fonctionnement à déphasage contrôlé en vue d'une émission et d'une réception orientées des ultrasons.
EP08748715A 2007-05-04 2008-03-28 Batterie de convertisseurs ultrasoniques pour applications dans des fluides gazeux Withdrawn EP2144715A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007021392 2007-05-04
PCT/DE2008/000540 WO2008135004A1 (fr) 2007-05-04 2008-03-28 Batterie de transducteurs ultrasonores pour applications dans des fluides gazeux

Publications (1)

Publication Number Publication Date
EP2144715A1 true EP2144715A1 (fr) 2010-01-20

Family

ID=39705308

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08748715A Withdrawn EP2144715A1 (fr) 2007-05-04 2008-03-28 Batterie de convertisseurs ultrasoniques pour applications dans des fluides gazeux

Country Status (3)

Country Link
EP (1) EP2144715A1 (fr)
DE (1) DE112008001734A5 (fr)
WO (1) WO2008135004A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010063438A1 (de) * 2010-12-17 2012-06-21 Robert Bosch Gmbh Schallwellenbasierter Sensor zur Umfelddetektion und Verwendung desselben
DE102012202422A1 (de) * 2012-02-16 2013-08-22 Robert Bosch Gmbh Schallwandleranordnung
SE541810C2 (en) * 2016-05-24 2019-12-17 Scania Cv Ab Variable cam timing phaser having two central control valves
DE102018005540B4 (de) 2018-07-13 2022-06-09 Pepperl+Fuchs Ag 1D-Ultraschallwandler-Einheit
DE102018006139B3 (de) 2018-08-03 2019-06-19 Pepperl+Fuchs Gmbh 1D-Ultraschallwandler-Einheit für die Bereichsüberwachung
DE102018006127B4 (de) 2018-08-03 2021-07-08 Pepperl+Fuchs Ag 1D-Ultraschallwandler-Einheit für die Materialerfassung
DE102018006130B3 (de) 2018-08-03 2019-08-08 Pepperl + Fuchs Gmbh 1D-Ultraschallwandler-Einheit zur Gefahrenerkennung für ein Fahrzeug

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144565A (ja) * 1984-12-18 1986-07-02 Toshiba Corp 高分子圧電型超音波探触子
JPH03178645A (ja) * 1989-12-08 1991-08-02 Hitachi Ltd 超音波映像装置用駆動回路
AU2002243224A1 (en) * 2000-11-16 2002-06-24 The Trustees Of The Stevens Institute Of Technology Large aperture vibration and acoustic sensor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
LEKKALA J ET AL: "EMFi - New Electret Material for Sensors and Actuators", ELECTRETS, 1999. ISE 10. PROCEEDINGS. 10TH INTERNATIONAL SYMPOSIUM ON ATHENS, GREECE 22-24 SEPT. 1999, PISCATAWAY, NJ, USA,IEEE, US, 22 September 1999 (1999-09-22), pages 743 - 746, XP010376652, ISBN: 978-0-7803-5025-0, DOI: 10.1109/ISE.1999.832151 *
See also references of WO2008135004A1 *
SESSLER G M ET AL: "Electromechanical Response of Cellular Electret Films", ELECTRETS, 1999. ISE 10. PROCEEDINGS. 10TH INTERNATIONAL SYMPOSIUM ON ATHENS, GREECE 22-24 SEPT. 1999, PISCATAWAY, NJ, USA,IEEE, US, 22 September 1999 (1999-09-22), pages 261 - 264, XP010376538, ISBN: 978-0-7803-5025-0, DOI: 10.1109/ISE.1999.832037 *

Also Published As

Publication number Publication date
WO2008135004A1 (fr) 2008-11-13
DE112008001734A5 (de) 2010-04-15

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