WO2023286657A1 - 波長測定装置及び波長測定方法 - Google Patents

波長測定装置及び波長測定方法 Download PDF

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Publication number
WO2023286657A1
WO2023286657A1 PCT/JP2022/026693 JP2022026693W WO2023286657A1 WO 2023286657 A1 WO2023286657 A1 WO 2023286657A1 JP 2022026693 W JP2022026693 W JP 2022026693W WO 2023286657 A1 WO2023286657 A1 WO 2023286657A1
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Prior art keywords
wavelength
light
led chip
reading
measurement
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PCT/JP2022/026693
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English (en)
French (fr)
Japanese (ja)
Inventor
亮 大木
祐亮 平尾
明 小坂
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コニカミノルタ株式会社
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Priority to CN202280049869.8A priority Critical patent/CN117651850A/zh
Priority to KR1020247004298A priority patent/KR20240027128A/ko
Priority to JP2023535257A priority patent/JPWO2023286657A1/ja
Publication of WO2023286657A1 publication Critical patent/WO2023286657A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/2806—Array and filter array

Definitions

  • the present invention relates to a wavelength measuring device and wavelength measuring method for measuring a representative wavelength of an LED (light emitting diode) chip.
  • backlight LEDs used in displays such as televisions have their emission colors strictly controlled, as variations in color can cause deterioration in image quality, such as color unevenness on the display. For this reason, a so-called binning process, in which the wavelength of each LED chip is measured and classified by color, has been conventionally performed.
  • Wavelength measurement of an LED chip involves splitting the light emitted from the LED chip into different wavelengths, receiving the split light of each wavelength with a plurality of pixels of the light receiving sensor, and reading out the signal from each pixel that received the light.
  • signal readout is performed for pixels of all spectrally separated wavelengths, so the time required for signal readout increases, and it is difficult to shorten the wavelength measurement time.
  • a CCD (Charge Coupled Device) detector including a plurality of light receiving elements arranged two-dimensionally, an optical system for dispersing incident light and irradiating it on the CCD detector, and the plurality of light receiving elements
  • An optical spectrum measuring apparatus includes a limiting section that limits irradiation of light from the optical system to at least one of some rows of each row and some columns of each column of elements.
  • At least one of the number of rows and columns irradiated with light can be reduced. It is said that the time required for the charge acquisition process can be shortened.
  • the present invention has been made in view of such a technical background, and provides a wavelength measurement device that does not require a physical restriction unit for restricting light irradiation and that can shorten the measurement time of the representative wavelength of an LED chip.
  • An object is to provide an apparatus and a wavelength measurement method.
  • spectroscopy means for spectroscopy the light emitted by the excited LED chip; a light-receiving means having a plurality of pixels for receiving the light separated by the spectroscopic means for each wavelength; a plurality of reading means corresponding to each of the plurality of pixels and reading a signal from each pixel; computing means for computing a representative wavelength of the LED chip based on a signal read by some of the plurality of reading means; Wavelength measurement device with (2) The wavelength measuring apparatus according to (1) above, wherein the partial readout means forms one readout means group, and there are a plurality of readout means groups.
  • the computing means Prior to the main measurement, acquires the spectrum information of the LED chip based on the signals read by all the reading means, and from the acquired spectrum information, a part of the readout of the signal in the main measurement 3.
  • the computing means acquires the spectrum information of the LED chip based on the signals read by all the reading means prior to the main measurement, and from the acquired spectrum information, the read means group for reading out the signals in the main measurement.
  • the wavelength measuring device according to the preceding item 2 to be selected.
  • the light receiving means is an area sensor; Each pixel in one pixel row of the area sensor receives light from a plurality of regions within the light emitting surface of the LED chip, and each pixel in the other pixel row orthogonal to the one pixel row receives light from each of the regions. 5.
  • the wavelength measuring device according to any one of the preceding items 1 to 4, which receives the light emitted from and dispersed by each wavelength.
  • the wavelength measuring device according to the preceding item 5, wherein the computing means averages signals from a plurality of regions within the light emitting surface of the LED chip.
  • the wavelength measuring device according to any one of the preceding items 1 to 9, comprising a light source section that excites the LED chip to emit light.
  • the light receiving means and the reading means are composed of CMOS sensors.
  • a spectroscopic step of spectroscopically dispersing the light emitted by the excited LED chip with spectroscopic means a light-receiving step of receiving the light split by the splitting step by a plurality of pixels for each wavelength; a reading step of reading out the signals by some reading means among a plurality of reading means corresponding to the plurality of pixels and reading signals from the respective pixels; a computing step of computing a representative wavelength of the LED chip based on the signal read out by the reading step; Wavelength measurement method including.
  • the spectrum information of the LED chip is obtained based on the signals read by all the reading means, and from the obtained spectrum information, the signal in the main measurement is read out. 14.
  • the spectrum information of the LED chip is obtained based on the signals read by all the reading means, and from the obtained spectrum information, a reading means group for reading the signal in the main measurement 14. The wavelength measurement method according to 13 above.
  • the light receiving means is an area sensor; Each pixel in one pixel row of the area sensor receives light from a plurality of regions within the light emitting surface of the LED chip, and each pixel in the other pixel row orthogonal to the one pixel row receives light from each of the regions. 16.
  • the light emitted by the excited LED chip is separated by the spectroscopic means and received for each wavelength by the light receiving means having a plurality of pixels.
  • the readout means read the signals of the pixels. Then, the representative wavelength of the LED chip is calculated by the calculating means based on the read signal.
  • the emission colors of the LED chip are red (R), green (G), and blue (B), and the wavelength range required for measuring each representative wavelength is generally limited. No signal acquisition is required. For example, when measuring an LED chip for red color, it is sufficient to acquire signals in the 550 to 700 nm region. Therefore, there is no problem even if the signal from the pixel is read out by restricting the wavelength region, and the advantage of shortening the wavelength measurement time due to the shortening of the readout time can be enjoyed.
  • the LED chip is excited by the excitation light and emits light, it is necessary to eliminate the influence of the excitation light. There is also an effect that can be done.
  • some of the reading means form one reading means group, and there are a plurality of reading means groups. can read out signals in the respective limited wavelength regions.
  • the computing means acquires the spectral information of the LED chip based on the signals read by all the reading means, and from the acquired spectral information , it is possible to accurately set a part of reading means for reading signals in the main measurement.
  • the computing means acquires the spectral information of the LED chip based on the signals read by all the reading means, and from the acquired spectral information , the reading means group for reading the signal in the main measurement can be selected with high accuracy.
  • each pixel in one pixel row of the area sensor receives light from a plurality of regions in the light emitting surface of the LED chip, Each pixel in the other orthogonal pixel row receives the light emitted from each region and separated for each wavelength, thereby separating the light from the plurality of regions within the light emitting surface of the LED chip for each wavelength. can receive light.
  • the computing means averages the signals from a plurality of regions within the light emitting surface of the LED chip, so that the setting of the reading means for reading the signals is performed with high accuracy. be able to.
  • the light emitting surface of the LED chip it can receive light from a two-dimensional region within.
  • At least one of the emission peak wavelength, the centroid wavelength, and the central wavelength can be obtained as the representative wavelength.
  • the light source section can excite the LED chip to emit light.
  • the light receiving means and the reading means are composed of CMOS sensors. Readout can be realized.
  • FIG. 1 is a block diagram showing the configuration of a wavelength measuring device according to one embodiment of the present invention
  • FIG. 2 is a perspective view showing a specific configuration of part of the wavelength measurement device of FIG. 1
  • It is a circuit diagram which shows the structural example of a CMOS sensor.
  • FIG. 4 is an explanatory diagram for setting a wavelength readout range;
  • FIG. 4 is a diagram for explaining the relationship between a plurality of LED chips on the object to be measured and the pixel size of the light receiving means; It is a figure for demonstrating the determination example of the wavelength read-out range in this measurement.
  • FIG. 10 is a diagram for explaining another example of determination of the wavelength readout range in the main measurement;
  • (A), (B), and (C) are explanatory diagrams for setting the reading unit group.
  • the light received from the surface of the object to be measured the light of any wavelength, for example, the wavelength with the maximum brightness among the data of the pixel group in the appropriate area containing the measurement data of a plurality of LED chips
  • FIG. 4 is a diagram schematically showing only the data of ⁇ extracted;
  • (A) is a diagram showing a state in which measurement data for each pixel is separated for each LED chip,
  • (B) is a diagram for explaining a method of calculating a representative wavelength, and
  • (C) is an enlarged view of (B). .
  • 4 is a spectrum graph plotting the value of one pixel for each wavelength for data regions of a plurality of LED chips; It is the graph which calculated the average value of 9 pixels for every wavelength about the data area
  • FIG. 1 is a block diagram showing the configuration of a wavelength measuring device according to one embodiment of the present invention.
  • the measurement object 100 is a wafer on which a plurality of LED chips are formed will be described.
  • the light source 1 for excitation irradiates a plurality of LED chips on the measurement object 100 with excitation light to excite the plurality of LED chips to emit light.
  • the spectroscopic section 3 separates the light from each LED chip that has passed through the objective lens 2 into wavelengths, and the imaging lens 4 forms an image of the light of each wavelength separated by the spectroscopic section 3 on the area sensor 5 .
  • the light is split into respective wavelengths at a wavelength pitch of 5 nm.
  • the area sensor 5 corresponds to light receiving means, and includes a plurality of pixels 51 arranged vertically and horizontally as shown in FIG.
  • the horizontal direction of the area sensor 5 (space X direction in FIG. 2) means the horizontal direction of the physical space, and each horizontal pixel 51 corresponds to the horizontal region of the measurement object 100 .
  • the vertical direction of the area sensor 5 (wavelength Z direction in FIG. 2) corresponds to the wavelength of light. That is, each pixel 51 in the pixel row in the spatial X direction corresponds to a plurality of regions (row regions) 100a in the one-dimensional direction of the object 100 to be measured.
  • the measurement object 100 is moved (scanned) in the Z1 direction orthogonal to the row region 100a in the one-dimensional direction.
  • the wavelength measurement device including the area sensor 5 may be moved in the wavelength Z direction orthogonal to the space X direction in FIG. may be moved with a speed difference, in short, at least one of the measurement object 100 and the wavelength measurement device should be moved relative to the other.
  • the measurement object 100 Each time the measurement object 100 is relatively moved, the row regions 100a of the measurement object 100 are switched, and a plurality of frames of spectral data are obtained with the spectral data of each row region 100a as one frame, and accumulated as a spectral data cube. To go.
  • the measurement object 100 LED chip 101
  • the measurement object 100 is to be moved, and as shown in FIG. ing.
  • the plane of the measurement object 100 as described above is divided into regions each having a size corresponding to each pixel 51 of the area sensor 5 , and the light from each region is spectrally separated by each pixel 51 of the area sensor 5 .
  • a technique for obtaining spectral data by receiving light and repeating this while moving at least one of the measurement object 100 and the wavelength measurement device relative to the other is called a push bloom method, and can be used, for example, as a hyperspectral camera. It is publicly known.
  • the area sensor 5 is a sensor that has a plurality of readout units that read out signals from respective pixels and that can designate a readout range, and uses, for example, a CMOS sensor.
  • the area sensor is hereinafter also referred to as a CMOS sensor.
  • a configuration example of the CMOS sensor 5 is schematically shown in FIG.
  • each pixel 51 includes a light receiving element 511 such as a photodiode, an amplifier 512 that converts and amplifies the charge accumulated by the light receiving element 511 into a voltage, and a pixel selection switch 513.
  • a pixel selection switch 513 of each pixel 51 is connected to a corresponding vertical signal line 52 among a plurality of vertical signal lines 52 arranged for each column of pixels 51 .
  • the vertical signal line 52 is connected to the horizontal signal line 55 via the CDS circuit 53 and the column selection switch 54 .
  • the pixel selection switch 513 of the pixel 51 from which the signal is to be read is turned on to connect the light receiving element 511 and the vertical signal line 52, and the vertical signal line 52 is connected to the horizontal signal line 55 by turning on the column selection switch 54.
  • the signal of the selected pixel 51 can be read out through the vertical signal line 52 and the horizontal signal line 55 . That is, the pixel selection switch 513 of each pixel 51, the vertical signal line 52 common to the plurality of pixels 51, the horizontal signal line 55, the column selection switch 54, and the like form a signal readout portion of each pixel 51, and the signal readout is performed.
  • a signal of an arbitrary pixel 51 can be read out by controlling the unit.
  • a readout range W2 is set from the entire readout area W1 in the wavelength Z direction of the area sensor 5, and the readout portions of the plurality of pixels 51 existing within the set readout range W2 are determined. By setting them as one readout unit group, it is possible to read out only the signals of the wavelengths in the specified range W2 among the wavelengths spectroscopically separated by the spectroscopic unit 3 .
  • Measured data which are signals output from the plurality of pixels 51 of the area sensor 5 with a designated readout range, are converted to digital data through a current/voltage (IV) conversion circuit and an analog/digital (AD) conversion circuit (not shown) as necessary. It is converted into a signal and sent to the calculation unit 6 . Using the sent measurement data, the computing unit 6 computes the representative wavelength for each of the plurality of LED chips on the object to be measured by the CPU or the like. The details of the method of calculating the representative wavelength will be described later.
  • the measurement result display unit 7 displays the calculation result by the calculation unit 6. Note that the calculation unit 6 may convert the measurement data output from the area sensor 5 into a digital signal.
  • the computing unit 6 may be a dedicated device, or may be configured by a personal computer. Moreover, the measurement data output from the area sensor 5 and processed into a digital signal may be sent to the calculation unit 6 via a network. In this case, the representative wavelength of the LED chip can be measured even if the computing unit 6 is located away from the measurement location.
  • FIG. 5 is a diagram for explaining the relationship between the plurality of LED chips 101 on the measurement object 100 and the size of the pixels 51 of the area sensor 5.
  • FIG. The horizontal axis of the fine grid in FIG. 5 is the spatial X direction, and the vertical axis is the spatial Y direction produced by scanning the LED chip 101 in the wavelength Z direction.
  • the size of one grid is the measurement area and corresponds to the size of the pixel 51 .
  • the LED chips 101 are displayed as rectangles and arranged vertically and horizontally on the measurement object 100 . Also, the rectangular area becomes the light emitting surface of each LED chip 101 as it is.
  • the light emitted from a plurality of regions of a size corresponding to the pixels 51 on the light emitting surface of one LED chip 101 is obtained so that data can be obtained with a plurality of pixels 51 for the light emitting surface of one LED chip 101.
  • pre-measurement is performed to determine the readout range in the wavelength Z direction, in other words, the wavelength region to be readout.
  • signals for one line in the spatial X direction that is, measurement data for one frame are read from pixels corresponding to all wavelength ranges (380 to 780 nm) (all pixels in the wavelength Z direction in FIGS. 2 and 4).
  • the read measurement data for one frame is spectrum data (brightness data at each wavelength) with a wavelength pitch of 5 nm.
  • the wavelength ⁇ 0 of the pixel 51 having the maximum brightness is determined from the data of the pixel group of the suitable partial area containing the plurality of LED chips 101 .
  • ⁇ 0 may be the average of the wavelengths of a plurality of pixels 51 with the highest brightness, instead of the wavelength of the pixel 51 having the highest brightness. Averaging the wavelengths increases the accuracy of the wavelength ⁇ 0.
  • a preset range of, for example, ⁇ 75 nm centered on the wavelength ⁇ 0 thus determined is taken as the readout range, that is, the wavelength range in the main measurement (hereinafter also referred to as the main measurement wavelength range).
  • the main measurement wavelength range As an example, as shown in FIG. 6, when the determined wavelength ⁇ 0 is 626.0 nm, 551 nm to 701 nm, which is 626.0 ⁇ 75 nm, is determined as the main measurement wavelength range. Note that ⁇ 75 nm may be other values.
  • a readout unit group consisting of a part of the readout units that perform readout among all the readout units of the pixels 51 of the area sensor 5 is set.
  • a method of selecting from a plurality of main measurement wavelength ranges prepared in advance based on the determined value of the wavelength ⁇ 0 For example, as shown in FIG. 7, when the LED chip 101 is blue, 390 to 540 nm (center wavelength: 465 nm) is preset as the main measurement wavelength range WB, and when the LED chip 101 is green, 465 to 540 nm is set as the main measurement wavelength range WG. 615 nm (central wavelength: 540 nm) is preset, and in the case of red, 550 to 700 nm (central wavelength: 625 nm) is preset as the main measurement wavelength range WR.
  • the main measurement wavelength range WB of 390 to 540 nm set for blue is selected, and if the value of wavelength ⁇ 0 is close to 540 nm, 465 to 615 nm set for green is selected. is selected, and if the value of the wavelength ⁇ 0 is close to 625 nm, the main measurement wavelength range WR of 550 to 700 nm set for red is selected.
  • a reading unit group for reading out the pixels 51 is set by selecting the main measurement wavelength range. For example, when the main measurement wavelength range WR is determined, as shown in FIG. When the wavelength range WG is determined, as shown in FIG.
  • a reading unit group 50G for reading the measurement data of the plurality of pixels 51 corresponding to the main measurement wavelength range WG is set, and the main measurement wavelength range WB is set.
  • a reading unit group 50B for reading the measurement data of the plurality of pixels 51 corresponding to the main measurement wavelength range WB is set as shown in FIG. 8(C). In this manner, different readout unit groups are set from among the plurality of readout unit groups 50R, 50G, and 50B according to the main measurement wavelength range.
  • the main measurement wavelength ranges WB, WG, and WR may be selected. Also in this case, among the readout unit groups 50R, 50G, and 50B, the readout unit groups 50B, 50G, and 50R corresponding to the main measurement wavelength ranges WB, WG, and WR are set.
  • the main measurement is performed as follows.
  • the excitation light source 1 irradiates the measurement object 100 placed on the table 200 with excitation light, and while the table 200 is moved by the moving device 300, the LED chips 101 on the measurement object 100 emit light.
  • Each pixel 51 of the area sensor 5 receives the emitted light.
  • Light emitted from the LED chip 101 is separated into predetermined wavelengths by the spectroscopic section 3 , and the separated light of each wavelength is received by each pixel 51 .
  • the table 200 is moved after reading out the main measurement wavelength range for one frame of measurement data. If exposure has been completed, the table 200 may be moved during readout or the like.
  • readout of measurement data from the pixels 51 is performed only in the readout unit group set corresponding to the main measurement wavelength range determined in the pre-measurement.
  • the read measurement data is sent to the computing unit 6 and stored in a memory (not shown) within the computing unit 6 .
  • the measurement is performed while moving the measurement object 100 on the table 200 by the moving device 300, and one frame of measurement data is obtained each time it moves (each time it scans). Then, multiple frames of measurement data are obtained for the planar area.
  • the measurement data is read out only for the pixels 51 corresponding to the readout section group, and the measurement data for the wavelengths within the main measurement wavelength range among the spectrally separated wavelengths is obtained.
  • the calculation unit 6 obtains the representative wavelength of each LED chip 101 by calculation.
  • FIG. 9 shows the light of an arbitrary wavelength among the light received from the surface of the measurement object 100, for example, the data of the pixel group in the appropriate area containing the measurement data of the plurality of LED chips 101, the maximum Only the data of the wavelength ⁇ with the brightness of ⁇ are extracted and schematically shown.
  • a black frame 8 shown in FIG. 9 indicates a region corresponding to the light emitting surface of one LED chip 101 .
  • the darkened region 9 has high brightness, and the brightness decreases toward the periphery.
  • each pixel 51 of the area sensor 5 is separated for each LED chip 10 .
  • This separation may be performed, for example, as follows. That is, the wavelength ⁇ with the maximum brightness is obtained from the data of the pixel group in the appropriate area including the measurement data of the plurality of LED chips 101 .
  • each pixel 51 is divided into levels according to brightness, and image processing is performed using a certain brightness level as a threshold value, thereby separating each LED chip 101 .
  • FIG. 10A shows a state in which measurement data for each pixel 51 is separated for each LED chip 101 . In FIG. 10A, it is separated into nine data areas 10a to 10i indicated by black frames.
  • the pixel of interest with the maximum brightness is specified.
  • the maximum value at a certain wavelength is obtained at a target pixel 51a
  • this pixel 51a is It is specified as a pixel of interest.
  • a certain wavelength is a wavelength used only for finding a separate brightness level or a pixel of interest.
  • the wavelength with the maximum brightness, the wavelength with the maximum brightness in the measurement data of the data area for one LED chip, the design wavelength of the LED chip, and the like can be mentioned.
  • the value of the pixel of interest 51a and the value of a certain wavelength obtained from one or a plurality of pixels surrounding the pixel of interest 51a are averaged to obtain spectral data of that wavelength (brightness at that wavelength). data).
  • spectral data of that wavelength (brightness at that wavelength). data).
  • the reason why the pixels to be averaged are the pixels around the target pixel 51a is that the wavelength measurement region of the LED chip 101 is contained within the light emitting surface. value can be obtained. Specifically, by using the values of nine surrounding pixels including the target pixel 51a showing the maximum brightness, it is possible to obtain a value that is sufficiently less affected by variations.
  • FIG. 11 shows four data areas 10b, 10d, 10f, and 10h among the data areas 10a to 10i of the plurality of LED chips 101 shown in FIG. is a spectral graph plotting average values of pixels of .
  • FIG. 12 is a spectral graph plotting the values of only the pixel of interest 51a obtained for each wavelength in four data areas 10b, 10d, 10f, and 10h.
  • the horizontal axis represents wavelength and the vertical axis represents brightness. Comparing both graphs, it can be seen that the value of only the target pixel 51a shown in FIG. 12 has the shape of the spectrum distorted.
  • the brightness values of the target pixel 51a and the surrounding pixels 51b to 51i are averaged for each wavelength as described above, and the representative wavelength is obtained from the obtained average value of each wavelength. Specifically, as shown in FIG. 13, a fitting curve is obtained by Gaussian fitting or the like based on the average value of each wavelength, and the wavelength of the peak value of the fitting curve is taken as the representative wavelength. If the wavelength pitch is small, the wavelength with the largest average value among the average values of the wavelengths may be used as the representative wavelength without fitting.
  • the representative wavelength is calculated from the measurement data.
  • the representative wavelength calculated in this embodiment is the emission peak wavelength, it may be the centroid wavelength, the central wavelength, or the like.
  • the centroid wavelength is a weighted average of wavelengths weighted by the emission spectrum.
  • the centroid wavelength is a value obtained by integrating the product of each wavelength and the light intensity of that wavelength over the entire emission wavelength and dividing the value by integrating the light intensity over the entire emission wavelength.
  • the central wavelength is the average value of two half-value wavelengths that are 3 dB lower than the maximum amplitude on both sides of the peak wavelength.
  • the main measurement wavelength range for reading is determined, and the determined main measurement wavelength Signals are read out by a reading unit group composed of reading units of a part of the pixels 51 set corresponding to the range. Therefore, it is not necessary to read out the signals of all the pixels, so that the readout time can be shortened, the wavelength measurement time can be shortened, and the binning time can be shortened. Moreover, since a physical limiting section for limiting the light reception of the pixels 51 that are not read is not required, the configuration is not complicated.
  • the emission colors of the LED chip 101 are red (R), green (G), and blue (B), and the wavelength range required to measure each representative wavelength is generally limited. is unnecessary, there is no problem even if the signal from the pixel 51 is read out by limiting the wavelength region, and the advantage of shortening the wavelength measurement time due to the shortening of the readout time can be enjoyed.
  • the frame rate indicating the number of frames that can be read out per second is about 520 FPS.
  • the frame rate can be improved to around 920 FPS when the range is limited to 150 nm, and the readout time can be shortened.
  • the LED chip 101 is excited by the excitation light and emits light, it is necessary to eliminate the influence of the excitation light. There are also possible effects.
  • the present invention can be used to measure the representative wavelength of LED chips.

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PCT/JP2022/026693 2021-07-16 2022-07-05 波長測定装置及び波長測定方法 WO2023286657A1 (ja)

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