WO2023285563A1 - Élément chauffant - Google Patents

Élément chauffant Download PDF

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Publication number
WO2023285563A1
WO2023285563A1 PCT/EP2022/069668 EP2022069668W WO2023285563A1 WO 2023285563 A1 WO2023285563 A1 WO 2023285563A1 EP 2022069668 W EP2022069668 W EP 2022069668W WO 2023285563 A1 WO2023285563 A1 WO 2023285563A1
Authority
WO
WIPO (PCT)
Prior art keywords
heating element
tube
lattice structure
connection terminals
heating
Prior art date
Application number
PCT/EP2022/069668
Other languages
German (de)
English (en)
Inventor
Uwe Ziegler
Andreas Reichart
Original Assignee
centrotherm international AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by centrotherm international AG filed Critical centrotherm international AG
Publication of WO2023285563A1 publication Critical patent/WO2023285563A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H05B3/08—Heater elements structurally combined with coupling elements or holders having electric connections specially adapted for high temperatures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/145—Carbon only, e.g. carbon black, graphite
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Definitions

  • the present invention relates to a heating element, in particular a heating element for high-temperature applications, which enables a substrate to be treated to be heated to temperatures above 1000°C, in particular above 2000°C.
  • Such heating elements which are usually formed out as resistance heating elements, are used, for example, in process systems for the production of semiconductor components or also for carbonization in the production of carbon fibers.
  • the heating elements are usually designed as a solid tube.
  • the geometry of the heating element, in particular the length and the material thickness of the tube wall, is limited by the mass and the resistivity of the material of the heating element. While a large material thickness can allow for greater stability, it increases the thermal mass of the heater to be heated, which is typically undesirable as it results in slow heater response. In the case of a horizontal implementation in particular, however, high stability of the heating elements is necessary in order to prevent the heating elements from bending. The lower the stability of the heating elements, the shorter the distances between support elements for suspension and electrical contacting of the tubular elements.
  • the heating element In one type of process installation, which is used, for example, for the carbonization of a carbon fiber, the heating element simultaneously forms a process tube, with the heating element designed as a tube forming the boundary of the process space.
  • the substrate the fiber to be carbonized
  • the substrate is moved through the process tube. Process gases that evaporate from the substrate can contaminate the process tube (and thus the heating element), which must therefore be replaced again and again Must. This causes high maintenance costs and downtimes of the process plant.
  • the heating element comprises an elongate tubular element made of electrically conductive material.
  • the tubular element has at least one region with a plurality of recesses such that the at least one region forms a lattice structure, wherein a cross section of the lattice structure perpendicular to the longitudinal extension of the tubular element has the same cross-sectional area at every position along the at least one region.
  • the lattice structure of the tubular element gives it a high degree of stability while at the same time having a reduced mass compared to a solid tube. Furthermore, the lattice structure and reduced mass of the heating element enable high temperatures to be reached with a lower connected load than a solid tube. The reduced mass enables good dynamic controllability through improved response of the heating element. The same cross-sectional area at every position along the lattice structure ensures an advantageous distribution of the current density, so that the heating element 1 heats up homogeneously over the lattice structure.
  • One or more areas of the at least one area with the lattice structure can be designed as a middle area, so that the tubular element also has end areas at the ends of the respective middle area.
  • the end regions can be designed as a solid tube and have a greater material thickness than the rest of the tubular element.
  • the at least one area with the lattice structure takes up at least 80%, preferably 90%, of the length of the tubular element. A high utilization of the advantages of the lattice structure is thus achieved.
  • Graphite is a suitable material for the heating element.
  • other materials such as silicon carbide, can be used that meet the high temperature and structural requirements.
  • the heating element is advantageously formed in one piece; however, it can also be formed from several elements, for example separate middle and end regions in order to simplify the manufacturing process.
  • An exemplary process plant with a heating element also has a process pipe for receiving or passing through a substrate, with the heating element surrounding at least a section of the process pipe.
  • the process system also has connection terminals which carry the heating element at the end areas and make electrical contact.
  • the connection terminals can also be connected to a power supply.
  • the process tube forms an essentially closed process space for the passage of a carbon fiber.
  • a device can create a controlled gas atmosphere in the process space, in particular an oxygen-free gas atmosphere or negative pressure.
  • the controlled gas atmosphere is a prerequisite for many processes. For example, the carbonization of a carbon fiber is only possible with an oxygen-free atmosphere.
  • the heating elements and the process tube can be arranged essentially horizontally in the process plant. This enables a long process line to be implemented, in particular a longer process line than in a vertical arrangement.
  • the advantageous structure of the heating element according to the invention is able to reduce temperature-dependent deformations.
  • the connection terminals can be attached essentially immovably in the process system and/or on the heating element, with the connection terminals deforming only reversibly during operation of the process system in the event of temperature-related deformation of the heating element.
  • Figure 1A is a partial schematic perspective view of a heating element according to the invention.
  • Figure 1B is a partial schematic perspective view of an alternative heating element according to the invention.
  • FIG. 2A shows a schematic, perspective partial view of an end area of the heating element according to an embodiment
  • FIG. 2B is another schematic partial perspective view of the end portion showing a different portion compared to FIG. 2A;
  • FIG. 3 shows a schematic perspective partial view of heating elements connected to a connection terminal
  • FIG. 4 shows a schematic sectional view through a section of a process system with a heating element according to an exemplary embodiment
  • FIG. 5 shows a schematic sectional view through a section of a process system with a heating element according to an exemplary embodiment.
  • the structure of a heating element 1 is explained in more detail below with reference to the figures.
  • the same reference numbers are used throughout the figures insofar as the same or similar elements are described.
  • the heating element 1 is essentially formed by an elongate tubular element made of electrically conductive material.
  • the tubular element consists of a central area 2 and two end areas 3.
  • the electrically conductive material is graphite, but it can also be silicon carbide or another material that is suitable for high-temperature applications and has the required stability.
  • the tubular element has a substantially greater length in the longitudinal extension than in the other dimensions.
  • the central area 2 has a multiplicity of diamond-shaped recesses 4 so that the area 2 forms a lattice structure made up of webs 5 and nodes 6 .
  • the recesses 4 can also have other suitable shapes.
  • the webs 5 each have the same dimensions.
  • FIG. 1B shows optional node openings 6b, which are formed in the area of the nodes.
  • the node recesses 6b are circular in shape, but may also have other suitable shapes.
  • the cross-sectional area (perpendicular to the longitudinal extent) of the tubular element in the central region 2 is the same at every position along the longitudinal extent of the lattice structure. This means that the sum of the areas of all partial cross-sections of the webs 5 or nodes 6 is the same at the respective position.
  • FIGS. 2A and 2B the end regions 3 of the heating element are shown, which are designed as solid tubes.
  • the end regions 3 have at least partially a greater material thickness than the rest of the tubular element, in particular than the webs 5 and nodes 6 of the lattice structure of the central region 2. This enables advantageous electrical contacting of the heating element 1 at the end regions 3.
  • Figures 3 and 4 is a Connection terminal 7 shown in order to electrically contact heating elements 1 via the respective end regions 3 and to supply them with electricity.
  • FIG. 4 shows a schematic sectional view through a section of a process installation 8 with a heating element 1 according to an exemplary embodiment.
  • the process system 8 has heating elements 1, connection terminals 7, a process tube 9, thermal insulation 10, a device 11 for a controlled gas atmosphere in the process tube and a housing 12.
  • a plurality of heating elements 1 are provided horizontally and are connected to one another and electrically contacted via connection terminals 7 .
  • Two heating elements are shown in FIG. However, it is also possible to design a process installation with only one heating element 1 .
  • the thermal insulation 9 encloses the heating elements 1 and insulates them from the environment. It is designed for high temperatures and, if necessary, makes it possible to set a desired gas atmosphere, in particular an oxygen-free atmosphere, inside an outer jacket.
  • a process tube 10 extends internally through a plurality of heating elements 1 and forms a substantially closed process space 10a in which a substrate can be treated.
  • the process tube 10 is connected to a device 11 for creating a controlled gas atmosphere in the process space 10a, so that a desired, in particular an oxygen-free, gas atmosphere and/or negative pressure can be generated in the process space 10a.
  • the process tube 10 consists of a temperature-resistant material, for example the same material as the heating elements 1.
  • the heating elements 1 and the process tube 10 are provided in a housing 12, where the heating elements 1 carry and electrically contact at connection terminals 7.
  • the connection terminals 7 are electrically conductively connected out of the housing 12 so that the heating elements 1 can be supplied with electricity.
  • a substrate to be treated (not shown), for example a carbon fiber, is guided through the process tube 10 in an oxygen-free atmosphere and moved through the process tube 10 at, for example, about 0.3-2.5 m/min.
  • the process pipe 10 can be open at the ends, for example, in order to allow the substrate to be treated to pass through. However, the ends can also be closed for other applications.
  • the heating elements 1 heat up by current flow via the connection terminals 7 and heat the carbon fibers in the process tube 10 up to 2600°C.
  • a heating element 1 heats up depending on the resistance of the heating element 1 and the power used, which is correspondingly controlled by a controller (not shown).
  • the resistance of the heating element 1 is determined by the specific resistance of the material used, for example graphite, as well as the cross-sectional area and the length of the heating element 1. The larger the cross-sectional area selected and the longer the heating element 1, the more power is required to to generate the same radiated heat.
  • the same cross-sectional area at every position along the lattice structure ensures an advantageous distribution of the current density, so that the heating element 1 heats up homogeneously over the lattice structure.
  • the heating elements 1 used make it possible to achieve the high process temperature with a lower connected load than with already known heating elements. Furthermore, larger heating sections can be realized, so that fewer connection terminals 7 or heating element connections can be used.
  • the suspension of the heating element connections must take into account the longitudinal expansion of the materials, the high temperatures, the joining of several components and the inertial forces that act. As can be seen in FIG. 5, the connection terminals 7 or the suspension of the heating element connections can be rigid, ie essentially immovable, in the process system 8 and/or on the heating element 1.
  • the temperature-related longitudinal expansion of the heating elements 1 is partially compensated by the advantageous structure of the heating elements, so that the connection terminals 7 or the suspension of the heating element connections is only reversibly deformed. In this way, for example, a suspension in which the heating elements are movable can be avoided, which, among other things, improves the electrical contacting of the heating elements.
  • connection terminal 7 dissipate heat so that the contacted point has temperatures that are up to 200° C. lower.
  • the lattice structure reduces the mass as well as the cross-sectional area of the tubular element. This makes it possible to use longer heating elements or lower power.
  • the lattice structure used also offers high structural stability, which is particularly advantageous in a hori zontal arrangement of the heating element 1 .
  • the heating element 1 described is used as a heating lamp.
  • heating elements 1 are provided adjacent to a heating area in a housing so that the heat from the heating elements 1 is radiated to the outside.
  • the heating elements 1 can be enclosed in another element to ensure a controlled gas atmosphere.
  • the invention was explained in more detail above using a preferred embodiment of the invention, without being restricted to the specific embodiment.
  • the shapes of the end regions 3, the recesses 4, the webs 5, the nodes 6 or the node recesses 6b can differ from the shape shown. reference sign

Landscapes

  • Resistance Heating (AREA)

Abstract

L'invention concerne un élément chauffant, en particulier un élément chauffant pour des applications à haute température, pour chauffer un substrat à traiter. L'élément chauffant comporte un élément tubulaire allongé en matériau électriquement conducteur. L'élément tubulaire présente au moins une zone pourvue d'une pluralité d'ouvertures, et l'au moins une zone forme une structure en treillis. Une section transversale de la structure en treillis perpendiculairement à l'étendue longitudinale de l'élément tubulaire a une surface de section transversale identique à chaque position le long de l'au moins une région.
PCT/EP2022/069668 2021-07-16 2022-07-13 Élément chauffant WO2023285563A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021207621.1A DE102021207621A1 (de) 2021-07-16 2021-07-16 Heizelement
DE102021207621.1 2021-07-16

Publications (1)

Publication Number Publication Date
WO2023285563A1 true WO2023285563A1 (fr) 2023-01-19

Family

ID=82846386

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2022/069668 WO2023285563A1 (fr) 2021-07-16 2022-07-13 Élément chauffant

Country Status (3)

Country Link
DE (1) DE102021207621A1 (fr)
TW (1) TW202320585A (fr)
WO (1) WO2023285563A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0752393A1 (fr) * 1995-07-05 1997-01-08 Sumitomo Electric Industries, Ltd Four pour l'étirage d'une fibre optique à partir d'une préforme
DE102010011156A1 (de) * 2010-03-12 2011-09-15 Centrotherm Thermal Solutions Gmbh + Co. Kg Vorrichtung zur thermischen Behandlung von Halbleitersubstraten
DE102017005909A1 (de) * 2016-07-11 2018-01-11 Shin-Etsu Chemical Co., Ltd. Wärmofen
WO2021083947A1 (fr) * 2019-10-31 2021-05-06 Kanthal Ab Élément chauffant à structure à cellules ouvertes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687911A (en) 1985-06-27 1987-08-18 Btu Engineering Corporation Electric furnace heater
DE4138426A1 (de) 1991-11-22 1993-05-27 Kanthal Gmbh Elektrisches heizelement eines russfilters
US5224973A (en) 1992-04-20 1993-07-06 Donaldson Company, Inc. Filter cartridge for trap apparatus
GB2480072A (en) 2010-05-05 2011-11-09 Technip France Electrical heating of a pipeline

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0752393A1 (fr) * 1995-07-05 1997-01-08 Sumitomo Electric Industries, Ltd Four pour l'étirage d'une fibre optique à partir d'une préforme
DE102010011156A1 (de) * 2010-03-12 2011-09-15 Centrotherm Thermal Solutions Gmbh + Co. Kg Vorrichtung zur thermischen Behandlung von Halbleitersubstraten
DE102017005909A1 (de) * 2016-07-11 2018-01-11 Shin-Etsu Chemical Co., Ltd. Wärmofen
WO2021083947A1 (fr) * 2019-10-31 2021-05-06 Kanthal Ab Élément chauffant à structure à cellules ouvertes

Also Published As

Publication number Publication date
TW202320585A (zh) 2023-05-16
DE102021207621A1 (de) 2023-01-19

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