DE102021207621A1 - Heizelement - Google Patents
Heizelement Download PDFInfo
- Publication number
- DE102021207621A1 DE102021207621A1 DE102021207621.1A DE102021207621A DE102021207621A1 DE 102021207621 A1 DE102021207621 A1 DE 102021207621A1 DE 102021207621 A DE102021207621 A DE 102021207621A DE 102021207621 A1 DE102021207621 A1 DE 102021207621A1
- Authority
- DE
- Germany
- Prior art keywords
- heating element
- area
- tube
- lattice structure
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 87
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000004020 conductor Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 13
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 7
- 239000004917 carbon fiber Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 9
- 238000009434 installation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003763 carbonization Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/06—Heater elements structurally combined with coupling elements or holders
- H05B3/08—Heater elements structurally combined with coupling elements or holders having electric connections specially adapted for high temperatures
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/145—Carbon only, e.g. carbon black, graphite
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
Landscapes
- Resistance Heating (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102021207621.1A DE102021207621A1 (de) | 2021-07-16 | 2021-07-16 | Heizelement |
TW111125922A TW202320585A (zh) | 2021-07-16 | 2022-07-11 | 加熱元件 |
PCT/EP2022/069668 WO2023285563A1 (fr) | 2021-07-16 | 2022-07-13 | Élément chauffant |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102021207621.1A DE102021207621A1 (de) | 2021-07-16 | 2021-07-16 | Heizelement |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102021207621A1 true DE102021207621A1 (de) | 2023-01-19 |
Family
ID=82846386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102021207621.1A Pending DE102021207621A1 (de) | 2021-07-16 | 2021-07-16 | Heizelement |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE102021207621A1 (fr) |
TW (1) | TW202320585A (fr) |
WO (1) | WO2023285563A1 (fr) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4687911A (en) | 1985-06-27 | 1987-08-18 | Btu Engineering Corporation | Electric furnace heater |
EP0543075A1 (fr) | 1991-11-22 | 1993-05-26 | Kanthal GmbH | Elément chauffant électrique pour un filtre à suie |
US5224973A (en) | 1992-04-20 | 1993-07-06 | Donaldson Company, Inc. | Filter cartridge for trap apparatus |
EP2567138B1 (fr) | 2010-05-05 | 2016-04-06 | Technip France | Pipeline |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3314906B2 (ja) * | 1995-07-05 | 2002-08-19 | 住友電気工業株式会社 | 光ファイバ線引き炉 |
DE102010011156B4 (de) * | 2010-03-12 | 2013-11-28 | Centrotherm Thermal Solutions Gmbh & Co. Kg | Vorrichtung zur thermischen Behandlung von Halbleitersubstraten |
DE102017005909A1 (de) * | 2016-07-11 | 2018-01-11 | Shin-Etsu Chemical Co., Ltd. | Wärmofen |
JP2023500093A (ja) * | 2019-10-31 | 2023-01-04 | カンタール・アクチボラグ | 開放セル構造体を有する加熱素子 |
-
2021
- 2021-07-16 DE DE102021207621.1A patent/DE102021207621A1/de active Pending
-
2022
- 2022-07-11 TW TW111125922A patent/TW202320585A/zh unknown
- 2022-07-13 WO PCT/EP2022/069668 patent/WO2023285563A1/fr active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4687911A (en) | 1985-06-27 | 1987-08-18 | Btu Engineering Corporation | Electric furnace heater |
EP0543075A1 (fr) | 1991-11-22 | 1993-05-26 | Kanthal GmbH | Elément chauffant électrique pour un filtre à suie |
US5224973A (en) | 1992-04-20 | 1993-07-06 | Donaldson Company, Inc. | Filter cartridge for trap apparatus |
EP2567138B1 (fr) | 2010-05-05 | 2016-04-06 | Technip France | Pipeline |
Also Published As
Publication number | Publication date |
---|---|
TW202320585A (zh) | 2023-05-16 |
WO2023285563A1 (fr) | 2023-01-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R012 | Request for examination validly filed |