DE102021207621A1 - Heizelement - Google Patents

Heizelement Download PDF

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Publication number
DE102021207621A1
DE102021207621A1 DE102021207621.1A DE102021207621A DE102021207621A1 DE 102021207621 A1 DE102021207621 A1 DE 102021207621A1 DE 102021207621 A DE102021207621 A DE 102021207621A DE 102021207621 A1 DE102021207621 A1 DE 102021207621A1
Authority
DE
Germany
Prior art keywords
heating element
area
tube
lattice structure
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102021207621.1A
Other languages
German (de)
English (en)
Inventor
Uwe Ziegler
Andreas Reichart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centrotherm International AG
Original Assignee
Centrotherm International AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrotherm International AG filed Critical Centrotherm International AG
Priority to DE102021207621.1A priority Critical patent/DE102021207621A1/de
Priority to TW111125922A priority patent/TW202320585A/zh
Priority to PCT/EP2022/069668 priority patent/WO2023285563A1/fr
Publication of DE102021207621A1 publication Critical patent/DE102021207621A1/de
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/02Details
    • H05B3/06Heater elements structurally combined with coupling elements or holders
    • H05B3/08Heater elements structurally combined with coupling elements or holders having electric connections specially adapted for high temperatures
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/145Carbon only, e.g. carbon black, graphite
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67109Apparatus for thermal treatment mainly by convection

Landscapes

  • Resistance Heating (AREA)
DE102021207621.1A 2021-07-16 2021-07-16 Heizelement Pending DE102021207621A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102021207621.1A DE102021207621A1 (de) 2021-07-16 2021-07-16 Heizelement
TW111125922A TW202320585A (zh) 2021-07-16 2022-07-11 加熱元件
PCT/EP2022/069668 WO2023285563A1 (fr) 2021-07-16 2022-07-13 Élément chauffant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102021207621.1A DE102021207621A1 (de) 2021-07-16 2021-07-16 Heizelement

Publications (1)

Publication Number Publication Date
DE102021207621A1 true DE102021207621A1 (de) 2023-01-19

Family

ID=82846386

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102021207621.1A Pending DE102021207621A1 (de) 2021-07-16 2021-07-16 Heizelement

Country Status (3)

Country Link
DE (1) DE102021207621A1 (fr)
TW (1) TW202320585A (fr)
WO (1) WO2023285563A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687911A (en) 1985-06-27 1987-08-18 Btu Engineering Corporation Electric furnace heater
EP0543075A1 (fr) 1991-11-22 1993-05-26 Kanthal GmbH Elément chauffant électrique pour un filtre à suie
US5224973A (en) 1992-04-20 1993-07-06 Donaldson Company, Inc. Filter cartridge for trap apparatus
EP2567138B1 (fr) 2010-05-05 2016-04-06 Technip France Pipeline

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3314906B2 (ja) * 1995-07-05 2002-08-19 住友電気工業株式会社 光ファイバ線引き炉
DE102010011156B4 (de) * 2010-03-12 2013-11-28 Centrotherm Thermal Solutions Gmbh & Co. Kg Vorrichtung zur thermischen Behandlung von Halbleitersubstraten
DE102017005909A1 (de) * 2016-07-11 2018-01-11 Shin-Etsu Chemical Co., Ltd. Wärmofen
JP2023500093A (ja) * 2019-10-31 2023-01-04 カンタール・アクチボラグ 開放セル構造体を有する加熱素子

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687911A (en) 1985-06-27 1987-08-18 Btu Engineering Corporation Electric furnace heater
EP0543075A1 (fr) 1991-11-22 1993-05-26 Kanthal GmbH Elément chauffant électrique pour un filtre à suie
US5224973A (en) 1992-04-20 1993-07-06 Donaldson Company, Inc. Filter cartridge for trap apparatus
EP2567138B1 (fr) 2010-05-05 2016-04-06 Technip France Pipeline

Also Published As

Publication number Publication date
TW202320585A (zh) 2023-05-16
WO2023285563A1 (fr) 2023-01-19

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Legal Events

Date Code Title Description
R012 Request for examination validly filed