WO2023276856A1 - Structure de montage de tête froide et dispositif cryogénique - Google Patents

Structure de montage de tête froide et dispositif cryogénique Download PDF

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Publication number
WO2023276856A1
WO2023276856A1 PCT/JP2022/025159 JP2022025159W WO2023276856A1 WO 2023276856 A1 WO2023276856 A1 WO 2023276856A1 JP 2022025159 W JP2022025159 W JP 2022025159W WO 2023276856 A1 WO2023276856 A1 WO 2023276856A1
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Prior art keywords
cold head
heat transfer
vacuum vessel
coldhead
transfer stage
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PCT/JP2022/025159
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English (en)
Japanese (ja)
Inventor
健太 出村
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住友重機械工業株式会社
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Publication of WO2023276856A1 publication Critical patent/WO2023276856A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00—Superconducting magnets; Superconducting coils
    • H01F6/04—Cooling

Definitions

  • Cryogenic refrigerators are used to cool devices that operate at extremely low temperatures, such as superconducting devices, to extremely low temperatures.
  • a cryogenic refrigerator is installed in a vacuum vessel containing an object to be cooled (eg, a superconducting coil). During long-term operation of such a cryogenic apparatus, maintenance such as inspection, repair, and replacement of the cryogenic refrigerator may become necessary.
  • a maintenance sleeve is configured to keep the vacuum vessel airtight and extends inwardly from the wall of the vacuum vessel, inside which the coldhead is removably mounted.
  • the cold head can be removed from the vacuum vessel while the object to be cooled in the vacuum vessel remains cooled to an extremely low temperature, the cold head can be maintained, and then reattached to the vacuum vessel.
  • maintenance of the cold head requires raising the temperature of the object to be cooled to room temperature (for example, about 300K) in advance and recooling it to an extremely low temperature after maintenance, which takes a considerable amount of time. It can take several days or more, especially for large items to be cooled.
  • Adopting a maintenance sleeve eliminates the need for heating and re-cooling time, and maintenance can be completed in a short time.
  • One exemplary object of some aspects of the present invention is to provide a sleeveless coldhead mounting structure.
  • a coldhead mounting structure includes a heat transfer stage located in a vacuum region within a vacuum vessel and contacting or separating from a cooling stage of the coldhead by movement of the coldhead relative to the vacuum vessel; A hermetic connection connecting the coldhead to the vacuum vessel to isolate the vacuum area and permit movement of the coldhead relative to the vacuum vessel; a non-hermetic support structure positioned around the coldhead in an exposed manner.
  • a cryogenic apparatus comprises a vacuum vessel defining a vacuum region therein, a cooling stage, a cold head attached to the vacuum vessel, a cold head disposed in the vacuum region within the vacuum vessel, the vacuum vessel comprising: a heat transfer stage that contacts or separates the cooling stage of the coldhead by movement of the coldhead relative to the vacuum vessel; and a non-hermetic support structure supporting the heat transfer stage to the vacuum vessel and positioned around the coldhead such that the cooling stage of the coldhead is exposed to the vacuum region.
  • a sleeveless cold head mounting structure can be provided.
  • FIG. 1 is a perspective view schematically showing a cold head mounting structure according to an embodiment
  • FIG. 4(a) is a plan view schematically showing a first heat transfer stage according to an embodiment
  • FIG. 4(b) is a plan view schematically showing a second heat transfer stage according to an embodiment
  • It is a diagram. 5(a) and 5(b) are diagrams schematically showing an elevating mechanism provided in the cold head mounting structure according to the embodiment.
  • FIG. 4 is a perspective view schematically showing an example of a first heat transfer stage that can be used in the cold head mounting structure according to the embodiment
  • FIG. 7(a) is a perspective view schematically showing an example of a second heat transfer stage that can be used in the cold head mounting structure according to the embodiment
  • FIG. 7(b) is a perspective view of FIG. FIG. 4 schematically illustrates a portion of a coldhead mounting structure incorporating the second heat transfer stage shown.
  • FIG. 4 is a diagram schematically showing an example of a non-airtight support structure that can be used in the coldhead mounting structure according to the embodiment
  • FIG. 5 is a diagram schematically showing another example of the cold head mounting structure according to the embodiment;
  • FIG. 1 and 2 are diagrams schematically showing a cryogenic apparatus according to an embodiment.
  • FIG. 3 is a perspective view schematically showing the cold head mounting structure according to the embodiment. 1 and 3 show a state in which the object to be cooled in the cryogenic apparatus is thermally coupled with the cold head of the cryogenic refrigerator provided in the cryogenic apparatus, and FIG. and the object to be cooled are thermally decoupled.
  • movement of the coldhead with respect to the coldhead mounting structure can bring the coldhead into or out of thermal contact with the object to be cooled.
  • the cryogenic apparatus 10 is configured to cool a superconducting coil 12, which is an example of an object to be cooled, from room temperature to a cryogenic temperature, and to maintain the superconducting coil 12 at a cryogenic temperature during use of the superconducting coil 12. .
  • the superconducting coil 12 is used as a magnetic field source for, for example, a single crystal pulling apparatus, an NMR system, an MRI system, an accelerator such as a cyclotron, a high energy physical system such as a nuclear fusion system, or other high magnetic field utilization equipment (not shown). It is installed in a magnetic field utilization device and can generate a high magnetic field required for the device.
  • the superconducting coil 12 is configured to generate a strong magnetic field by energizing the superconducting coil 12 while being cooled to an extremely low temperature below the superconducting transition temperature.
  • the cryogenic apparatus 10 includes a cryogenic refrigerator 20, a vacuum vessel 30, a radiant heat shield 40, and a cold head mounting structure 50. Although the details will be described later, the cryogenic refrigerator 20 is attached to the vacuum vessel 30 via the cold head attachment structure 50 . It can also be said that the cold head mounting structure 50 constitutes a cooling device for cooling an object to be cooled together with the cryogenic refrigerator 20 .
  • the coldhead mounting structure 50 may be provided to the customer by the manufacturer of the cryogenic refrigerator 20 along with the cryogenic refrigerator 20 (and/or the vacuum vessel 30).
  • the cryogenic refrigerator 20 in this embodiment, is a two-stage Gifford-McMahon (GM) refrigerator.
  • the cryogenic refrigerator 20 includes a two-stage cold head 20a and a compressor 20b.
  • Compressor 20 b is located in ambient environment 14 outside vacuum vessel 30 .
  • Ambient environment 14 is, for example, a room temperature atmospheric pressure environment.
  • the compressor 20b is configured to recover the refrigerant gas of the cryogenic refrigerator 20 from the cold head 20a, pressurize the recovered refrigerant gas, and supply the refrigerant gas to the cold head 20a again.
  • the cold head 20a is also called an expander, and can generate cold by adiabatically expanding the supplied refrigerant gas in an internal expansion chamber.
  • Refrigeration cycle (eg GM cycle) is configured to cool each cooling stage of coldhead 20a to the desired cryogenic temperature.
  • the cold head 20a and the compressor 20b are connected by a refrigerant gas pipe such as a flexible pipe.
  • the refrigerant gas also called working gas, is typically helium gas, although other suitable gases may be used.
  • the cold head 20a includes a cooling stage 22, specifically a first cooling stage 22a and a second cooling stage 22b.
  • the first cooling stage 22a is cooled to a first cooling temperature, for example, 30K to 80K
  • the second cooling stage 22b is cooled to a second cooling temperature lower than the first cooling temperature, For example, it is cooled to 3K to 20K.
  • the second cooling temperature is a temperature lower than the superconducting transition temperature of the superconducting coil 12 .
  • the cold head 20a also includes a first cylinder 24a, a second cylinder 24b, a driving portion 26, and a mounting flange 28.
  • a first cylinder 24a connects a mounting flange 28 to the first cooling stage 22a
  • a second cylinder 24b connects the first cooling stage 22a to the second cooling stage 22b.
  • the drive portion 26 is attached to a mounting flange 28 on the side opposite to the first cylinder 24a.
  • the cold head 20 a When the cold head 20 a is attached to the vacuum vessel 30 , the cold head 20 a is inserted into the cold head insertion port 31 of the vacuum vessel 30 and the mounting flange 28 is attached to the cold head insertion port 31 outside the vacuum vessel 30 .
  • the cold head 20a has the first cylinder 24a, the first cooling stage 22a, the second cylinder 24b, and the second cooling stage 22b arranged in the vacuum region 32 within the vacuum vessel 30, and the drive section 26 is located in the ambient environment 14. It is installed in the vacuum vessel 30 so as to be arranged at
  • the cold head insertion port 31 is formed in the top plate of the vacuum vessel 30, and the cold head 20a has its center axis parallel to the vertical direction so that the drive unit 26 is directed upward and cooled. It is installed in a vacuum container 30 with the stage 22 directed downward.
  • the orientation of installation of the cold head 20a is not limited to such vertical orientation, and may be installed in other orientations such as horizontal orientation or oblique orientation.
  • the cold head insertion port 31 may be formed on any surface such as the side surface or the bottom surface of the vacuum vessel 30 .
  • first cylinder 24a and the second cylinder 24b are cylindrical members, and the second cylinder 24b has a smaller diameter than the first cylinder 24a.
  • the first cooling stage 22a and the second cooling stage 22b are cylindrical members fixed to the ends of the first cylinder 24a and the second cylinder 24b, respectively.
  • the first cylinder 24a, the first cooling stage 22a, the second cylinder 24b, and the second cooling stage 22b are arranged coaxially along the central axis of the cold head 20a.
  • the first cooling stage 22a and the second cooling stage 22b are made of a highly heat-conductive metal such as copper (for example, pure copper) or other heat-conductive material.
  • the first cylinder 24a and the second cylinder 24b are made of metal such as stainless steel.
  • the thermal conductivity of the thermally conductive material forming the cooling stage 22 is higher than the thermal conductivity of the material forming the cylinder.
  • the first and second cylinders 24a and 24b respectively accommodate a first displacer and a second displacer containing a cold storage material. ing.
  • the first displacer and the second displacer are connected to each other and reciprocable along the first cylinder 24a and the second cylinder 24b, respectively.
  • the drive unit 26 includes a motor and a coupling mechanism that couples the motor to the first displacer and the second displacer so as to convert the rotational motion output by the motor into axial reciprocating motion of the displacer.
  • the drive unit 26 also houses a pressure switching valve that is driven by the motor in synchronism with the displacer. The pressure switching valve is configured to periodically switch between receiving high pressure refrigerant gas and sending low pressure refrigerant gas to the cold head 20a.
  • FIG. 1 shows one cryogenic refrigerator 20 as an example
  • the cryogenic apparatus 10 may include a plurality of cryogenic refrigerators 20 .
  • a coldhead mounting structure 50 may be provided for each cryogenic refrigerator 20 .
  • the vacuum vessel 30 is configured to separate the vacuum region 32 from the ambient environment 14 .
  • a vacuum region 32 is defined within the vacuum vessel 30 .
  • Vacuum vessel 30 may be, for example, a cryostat.
  • Superconducting coil 12 , cooling stage 22 of cryogenic refrigerator 20 , and radiant heat shield 40 are located in vacuum region 32 and are vacuum-insulated from ambient environment 14 .
  • Insulating material may be provided along the surfaces of, or within the wall members of the vacuum vessel 30 that separate the vacuum region 32 from the ambient environment 14 to enhance thermal insulation.
  • the radiation heat shield 40 is thermally coupled to the first cooling stage 22a via the cold head mounting structure 50 and cooled to the first cooling temperature.
  • the radiant heat shield 40 is made of a metallic material such as copper or other material with high thermal conductivity.
  • the radiation heat shield 40 is arranged so as to surround the superconducting coil 12 cooled to the second cooling temperature, the second cooling stage 22b of the cryogenic refrigerator 20, and other low temperature parts, and protects these low temperature parts from external radiant heat. can be thermally protected.
  • the cold head mounting structure 50 is a tool for mounting the cold head 20 a on the vacuum vessel 30 and is provided at the cold head insertion port 31 of the vacuum vessel 30 .
  • the cold head mounting structure 50 also supports the cold head 20a so that the cold head 20a can move relative to the vacuum vessel 30 in the direction of its central axis.
  • the coldhead mounting structure 50 thermally couples the coldhead 20a with an object to be cooled (eg, the superconducting coil 12) in the vacuum vessel 30 by moving the coldhead 20a with respect to the vacuum vessel 30, or causes this thermal coupling. It is installed in the vacuum vessel 30 as a thermal switch for releasing.
  • the cold head mounting structure 50 comprises a heat transfer stage 52, an airtight connection 54, and a non-airtight support structure 56.
  • the cold head mounting structure 50 is also configured in two stages corresponding to the cold head 20a.
  • the heat transfer stage 52 includes a first heat transfer stage 52a and a second heat transfer stage 52b. Both the first heat transfer stage 52 a and the second heat transfer stage 52 b are located in the vacuum region 32 within the vacuum vessel 30 .
  • the first heat transfer stage 52a and the second heat transfer stage 52b come into contact with or separate from the first cooling stage 22a and the second cooling stage 22b, respectively, as the cold head moves relative to the vacuum vessel 30 .
  • These heat transfer stages 52 like the cooling stage 22, are made of a highly heat conductive metal such as copper (for example, pure copper) or other heat conductive material.
  • the first heat transfer stage 52a is connected to the radiation heat shield 40 via the first flexible heat transfer member 58a.
  • the flexible heat transfer member may be formed as a flexible bundle of wires or a laminate of foils, for example, and may be formed of a highly thermally conductive material such as copper. Therefore, when the first cooling stage 22a contacts the first heat transfer stage 52a, the first cooling stage 22a is thermally connected to the radiant heat shield 40 via the first heat transfer stage 52a and the first flexible heat transfer member 58a. coupled to When the first cooling stage 22a separates from the first heat transfer stage 52a, the thermal coupling between the first cooling stage 22a and the radiation heat shield 40 is released.
  • the second heat transfer stage 52b is connected to the heat transfer member 42 via the second flexible heat transfer member 58b.
  • the superconducting coil 12 is placed on the heat transfer member 42 or connected with the heat transfer member 42 .
  • Heat transfer member 42 may be a flexible or rigid heat transfer member and is formed of a metallic material such as copper or other material with high thermal conductivity, for example.
  • the heat transfer member 42 is not essential, and the second heat transfer stage 52b may be connected to the superconducting coil 12 via the second flexible heat transfer member 58b.
  • the second cooling stage 22b When the second cooling stage 22b contacts the second heat transfer stage 52b, the second cooling stage 22b moves through the second heat transfer stage 52b, the second flexible heat transfer member 58b, and the heat transfer member 42 to form a superconducting coil. 12 are thermally coupled. Thereby, the second cooling stage 22b can cool the superconducting coil 12 to the second cooling temperature. When the second cooling stage 22b separates from the second heat transfer stage 52b, the thermal coupling between the second cooling stage 22b and the superconducting coil 12 is released.
  • the hermetic connection 54 isolates the vacuum region 32 from the ambient environment 14 and connects the cold head 20a to the vacuum vessel 30 so as to allow movement of the cold head 20a relative to the vacuum vessel 30 .
  • the airtight connection 54 comprises an airtight partition 60 that is extendable in the direction of movement of the cold head 20a (that is, in the direction of the central axis), and the airtight partition 60 is, for example, a bellows.
  • This expandable airtight partition 60 connects the mounting flange 28 of the cold head 20 a to the cold head insertion port 31 of the vacuum vessel 30 .
  • the airtight connection portion 54 also includes a guide portion 62 .
  • the guide portion 62 is arranged around the airtight partition 61 outside the vacuum vessel 30 and fixed to the vacuum vessel 30 .
  • the guide portion 62 includes a guide plate 62a and a support portion 62b, as shown in FIG.
  • the guide plate 62 a is a ring-shaped plate arranged so as to surround the airtight partition 60 and may have approximately the same diameter as the mounting flange 28 .
  • the support portion 62b is provided below the guide plate 62a, and the guide plate 62a is attached to the vacuum vessel 30 via the support portion 62b.
  • the support portions 62b may be provided at a plurality of locations (for example, four locations) along the guide plate 62a, and three support portions 62b are shown in FIG.
  • the mounting flange 28 of the cold head 20a contacts the top surface of the guide plate 62a and is fastened with the guide plate 62a using fastening members such as bolts. The fastening can be released and the mounting flange 28 can then move along the guide portion 62 .
  • a guide pin 62c (see FIG. 3) is erected on the upper surface of the guide plate 62a, and the mounting flange 28 is formed with a guide hole corresponding to the guide pin 62c. The guide pin 62c guides the mounting flange 28 in that direction during axial movement of the coldhead 20a.
  • the cold head mounting structure 50 includes an elevating mechanism 64 that elevates the cold head 20a with respect to the vacuum vessel 30, as will be described later.
  • An operation plate 29 (see FIG. 3) is provided on the mounting flange 28, and the lifting mechanism 64 may be configured to move the operation plate 29 up and down in the axial direction of the cold head 20a.
  • the operating plate 29 extends radially outwardly from the mounting flange 28 to facilitate operation by the lifting mechanism 64 .
  • two operating plates 29 are attached to both sides of the mounting flange 28 .
  • the operating plate 29 may be integral with the mounting flange 28 .
  • a non-hermetic support structure 56 is placed in the vacuum region 32 within the vacuum vessel 30 .
  • a support structure 56 supports the heat transfer stage 52 to the vacuum vessel 30 and is positioned around the coldhead 20a such that the cooling stage 22 of the coldhead 20a is exposed to the vacuum region 32 .
  • the support structure 56 includes a plurality of (for example, four) support rods 66 extending from the cold head insertion port 31 of the vacuum vessel 30 to the heat transfer stage 52 .
  • a plurality of support rods 66 are arranged around the cold head 20a at regular intervals, for example, in the circumferential direction.
  • Each of the plurality of support rods 66 extends through the first heat transfer stage 52a and the second heat transfer stage 52b parallel to the central axis of the cold head 20a.
  • FIG. 3 only a few support rods 66 are provided around the coldhead 20a, and the coldhead 20a is open to the vacuum region 32 within the vacuum vessel 30.
  • the space around the cold head 20 a always has the same pressure as the vacuum area 32 . As long as the vacuum area 32 remains evacuated, the space around the coldhead 20a will also be evacuated.
  • At least one support rod 66 among the plurality of support rods 66 is hollow. All support bars 66 may be hollow. Compared to the case where the support rod 66 is a solid rod, the cross-sectional area of the support rod 66 is smaller, and the heat entering the low-temperature part in the vacuum vessel 30 from the surrounding environment 14 through the support rod 66 can be reduced. can.
  • the support bar 66 has a circular cross-section, but may have a cross-section of any other shape, such as a polygon such as a rectangle or hexagon, or an L-shape. Note that the support rod 66 may be a solid rod.
  • the support rod 66 is made of heat insulating material such as fiber reinforced plastic (FRP).
  • the support rods 66 may be formed of a material, such as stainless steel, that has a lower thermal conductivity than the highly thermally conductive material forming the heat transfer paths in the cryogenic apparatus 10 .
  • support rods 66 may have the same shape and dimensions. Having one support bar 66 have a different cross-section than other support bars 66 may mitigate the effects of offset loads that may occur when the coldhead 20 a is pressed against the coldhead mounting structure 50 .
  • the support structure 56 includes a first spring portion 68a and a second spring portion 68b attached to a plurality of support rods 66.
  • Each support bar 66 has a first spring portion 68a and a second spring portion 68b.
  • the first spring portion 68a is attached to the support rod 66 below the first heat transfer stage 52a.
  • the second spring portion 68b is attached to the support rod 66 below the second heat transfer stage 52b.
  • the spring portion may comprise, for example, a coiled spring or other spring.
  • the plurality of support rods 66 elastically support the first heat transfer stage 52a via the first spring portions 68a and guide the movement of the first heat transfer stage 52a in the movement direction of the cold head 20a. Moreover, the plurality of support rods 66 elastically support the second heat transfer stage 52b via the second spring portions 68b, and guide the movement of the second heat transfer stage 52b in the movement direction of the cold head 20a.
  • the support structure 56 also includes a first stopper 70a and a second stopper 70b.
  • the first stopper 70 a regulates the amount of movement of the first heat transfer stage 52 a in the direction of approaching the cold head insertion port 31 of the vacuum vessel 30 .
  • the first stopper 70a is provided on the support rod 66 on the side opposite to the first spring portion 68a with respect to the first heat transfer stage 52a.
  • the first stopper 70a is a projection or flange-like portion projecting radially from the support rod 66, and when the first heat transfer stage 52a moves along the support rod 66, it hits the first stopper 70a, 1 The movement of the heat transfer stage 52a is restricted.
  • the second stopper 70b regulates the amount of movement of the second heat transfer stage 52b in the direction of approaching the cold head insertion port 31 of the vacuum vessel 30.
  • the second stopper 70b is provided on the support rod 66 on the opposite side of the second heat transfer stage 52b to the second spring portion 68b.
  • the second stopper 70b is a protrusion or a flange-like portion projecting radially from the support rod 66.
  • the first spring portion 68a and the second spring portion 68b may be attached to the support rod 66 above the first heat transfer stage 52a and the second heat transfer stage 52b, respectively.
  • the first spring portion 68a and the second spring portion 68b respectively regulate the movement of the first heat transfer stage 52a and the second heat transfer stage 52b in the direction approaching the cold head insertion port 31 of the vacuum vessel 30. It may function as the stopper 70a and the second stopper 70b.
  • Devices to be cooled such as the superconducting coil 12 and the radiation heat shield 40 placed in the vacuum vessel 30 may be structurally connected to and supported by the support structure 56 .
  • the heat transfer path from the vacuum vessel 30 to the object to be cooled in the vacuum vessel 30 can be limited to the support structure 56, and heat entering the object to be cooled can be reduced.
  • the object to be cooled in the vacuum vessel 30 may be connected to the wall of the vacuum vessel 30 by a supporting member (not shown) and supported by the vacuum vessel 30 .
  • FIG. 4(a) is a plan view schematically showing the first heat transfer stage 52a according to the embodiment
  • FIG. 4(b) is a schematic plan view showing the second heat transfer stage 52b according to the embodiment. It is a plan view showing. 4(a) and 4(b) respectively show top views of the first heat transfer stage 52a and the second heat transfer stage 52b viewed from the cold head insertion port 31 side.
  • the first heat transfer stage 52 a has a central opening 71 , a first contact surface 72 and a plurality of first guide holes 73 .
  • the central opening 71 is a through hole for the cold head 20a, and the second cylinder 24b of the cold head 20a is inserted through the central opening 71 when the cold head 20a is mounted on the cold head mounting structure 50.
  • the first contact surface 72 is a portion of the first heat transfer stage 52a surrounding the central opening 71, and is located on the upper surface of the first heat transfer stage 52a facing the first cooling stage 22a. The contact of the first cooling stage 22a with the first contact surface 72 thermally couples the first cooling stage 22a and the first heat transfer stage 52a.
  • FIG. 5(a) and 5(b) are diagrams schematically showing an elevating mechanism 64 provided in the cold head mounting structure 50 according to the embodiment.
  • the lifting mechanism 64 includes a pressure device 64a for pushing the coldhead 20a into the coldhead mounting structure 50 and a lifting mechanism 64b for lifting the coldhead 20a from the coldhead mounting structure 50.
  • the pressurizing device 64 a is installed near the guide section 62 outside the vacuum vessel 30 .
  • the pressurizing device 64a may be a suitable device that generates a pressing force, such as a hydraulic jack.
  • the pressurizing device 64a can apply a pressing force to the operation plate 29 to push the operation plate 29 toward the guide portion 62 as indicated by the arrow in the drawing.
  • the operation plate 29 moves along the guide pin 62c and comes into contact with the guide plate 62a supported by the support portion 62b.
  • the pressure device 64a may be provided for each operation plate 29 . In this manner, the pressurizing device 64a can force the coldhead 20a into the coldhead mounting structure 50.
  • the pressurizing device 64a is temporarily installed to push the cold head 20a, but instead of this, a permanent lifting mechanism 64 may be provided.
  • the lifting mechanism 64b may be a push bolt 64b2 screwed into a bolt hole 64b1 provided in the operation plate 29 (see FIG. 5(a)).
  • the lifting mechanism 64b moves the operation plate 29 as indicated by the arrow in the figure. It can be lifted from the guide part 62 .
  • the operation plate 29 moves along the guide pin 62c and leaves the guide plate 62a.
  • the lifting mechanism 64 b can lift the coldhead 20 a from the coldhead mounting structure 50 .
  • a lifting mechanism 64b may be used to push the coldhead 20a into the coldhead mounting structure 50 instead of the pressurizing device 64a.
  • lift mechanism 64 b can push cold head 20 a into cold head mounting structure 50 .
  • a pressure device 64a may be used to lift the coldhead 20a from the coldhead mounting structure 50.
  • the cold head 20a and the cold head mounting structure 50 are out of thermal contact, the cold head 20a is positioned at the end, for example, the upper end of the movable range. At this time, the mounting flange 28 of the cold head 20 a is separated from the guide portion 62 of the cold head mounting structure 50 .
  • the hermetic partition 60 of the hermetic connection 54 is elongated so that the hermetic connection 54 isolates the vacuum region 32 from the ambient environment 14 .
  • the cryogenic refrigerator 20 is separated from the vacuum vessel 30.
  • the heat transfer path to the internal object to be cooled eg, the radiant heat shield 40 and the superconducting coil 12 is cut off.
  • first heat transfer stage 52a and the second heat transfer stage 52b are at their initial positions.
  • first heat transfer stage 52a and second heat transfer stage 52b may each contact first stopper 70a and second stopper 70b, respectively.
  • the first spring portion 68a and the second spring portion 68b are in an uncompressed neutral state, or the first heat transfer stage 52a and the second heat transfer stage 52b are each preloaded with some preload to the first stopper 70a. It may be pressed against the second stopper 70b.
  • first heat transfer stage 52a and second heat transfer stage 52b may be some distance from first stop 70a and second stop 70b, respectively, with first spring portion 68a and second spring portion 68b in a neutral state. There may be.
  • Movement of the coldhead 20a relative to the coldhead mounting structure 50 causes the first cooling stage 22a and the second cooling stage 22b to approach and eventually come into physical contact with the first heat transfer stage 52a and the second heat transfer stage 52b, respectively. .
  • the first cooling stage 22a moves the first heat transfer stage 52a
  • the first heat transfer stage 52a moves along the support rod 66 while compressing the first spring portion 68a.
  • the second cooling stage 22b moves the second heat transfer stage 52b
  • the second heat transfer stage 52b moves along the support rod 66 while compressing the second spring portion 68b.
  • mounting flange 28 of coldhead 20a contacts guide portion 62 of coldhead mounting structure 50 (i.e., mounting flange 28 moves along guide pin 62c and guide plate 62a as described above). ), movement of the cold head 20a stops.
  • the mounting flange 28 is fastened to the guide plate 62a using fastening members such as bolts, for example, to secure the coldhead 20a to the coldhead mounting structure 50 .
  • the pressing load applied to the operation plate 29 and the mounting flange 28 by the pressurizing device 64a is released.
  • the cold head 20a is moved to the opposite end of the movable range, for example, the lower end, and the cold head 20a and the cold head mounting structure 50 are thermally coupled.
  • the first cooling stage 22a is thermally coupled to the radiant heat shield 40 via the first heat transfer stage 52a, and the radiant heat shield 40 is cooled to the first cooling temperature by the cold head 20a.
  • Second cooling stage 22b is thermally coupled to superconducting coil 12 via second heat transfer stage 52b, and superconducting coil 12 is cooled to a second cooling temperature by coldhead 20a.
  • the compressed first spring portion 68a creates a predetermined contact surface pressure between the first cooling stage 22a and the first heat transfer stage 52a, thereby increasing the pressure between the first cooling stage 22a and the first heat transfer stage 52a. good thermal contact is achieved.
  • the compressed second spring portion 68b generates a predetermined contact pressure between the second cooling stage 22b and the second heat transfer stage 52b, thereby causing the second cooling stage 22b and the second heat transfer stage 52b to contact. Good thermal contact is achieved between By providing a spring portion for each heat transfer stage in this way, it is possible to give different elastic characteristics to each spring portion, thereby making it possible to individually adjust the contact surface pressure for each heat transfer stage.
  • the coupling between the cold head 20a and the cold head mounting structure 50 is released. Then, the cold head 20a is lifted from the cold head mounting structure 50 by the lifting mechanism 64, for example, the lifting mechanism 64b. Specifically, the push bolt 64b2 is screwed into the bolt hole 64b1 of the operation plate 29, and the push bolt 64b2 is rotated while the tip of the push bolt 64b2 abuts against the vacuum vessel 30. lifted from The mounting flange 28 of the coldhead 20a is separated from the guide portion 62 of the coldhead mounting structure 50, and the airtight partition 60 of the airtight connection 54 is extended.
  • the lifting mechanism 64 for example, the lifting mechanism 64b.
  • the push bolt 64b2 is screwed into the bolt hole 64b1 of the operation plate 29, and the push bolt 64b2 is rotated while the tip of the push bolt 64b2 abuts against the vacuum vessel 30. lifted from The mounting flange 28 of the coldhead 20a is separated from the guide portion 62 of the coldhead mounting structure 50, and the
  • the cold head 20a is lifted so that the first cooling stage 22a and the second cooling stage 22b are moved above the first stopper 70a and the second stopper 70b, respectively.
  • the first stopper 70a and the second stopper 70b can restrict the upward movement of the first heat transfer stage 52a and the second heat transfer stage 52b, and the first cooling stage 22a and the second cooling stage 22b. can be reliably separated from the first heat transfer stage 52a and the second heat transfer stage 52b, respectively.
  • the first cooling stage 22a is physically separated from the first heat transfer stage 52a, and the second cooling stage 22b is physically separated from the second heat transfer stage 52b, as shown in FIG.
  • the thermal coupling between the cold head 20a and the object to be cooled inside the vacuum vessel 30 is released, and the heat transfer path from the cryogenic refrigerator 20 to the object to be cooled inside the vacuum vessel 30 is cut off.
  • the temperature of the cold head 20a is raised to a temperature higher than that of the radiation heat shield 40 and the superconducting coil 12, such as room temperature, as long as the vacuum region 32 is kept in a vacuum, the radiation heat shield 40 and the superconducting coil 12 will be removed from the cold head 20a. have limited or negligible thermal impact on Therefore, the radiation heat shield 40 and the superconducting coil 12 can be maintained at a different temperature (eg, cryogenic temperature) than the cold head 20a.
  • a conventional coldhead mounting structure or maintenance sleeve, is configured to keep the vacuum vessel airtight and extends inwardly from the wall of the vacuum vessel into which the coldhead is removed. can be worn.
  • the coldhead is pressed against the maintenance sleeve with a strong force in order to bring the coldhead into good thermal contact with the sleeve, and the maintenance sleeve must be robust to withstand this.
  • the maintenance sleeve isolates the space around the cold head from the vacuum region in the vacuum vessel, the maintenance sleeve is required to have a structure that maintains airtightness. In order to meet these requirements, maintenance sleeves tend to have relatively complex structures and high manufacturing costs.
  • the cold head mounting structure according to the embodiment is not limited to the specific embodiment described above, and can take various other forms. Some specific examples are given.
  • FIG. 6 is a perspective view schematically showing an example of the first heat transfer stage 52a that can be used in the cold head mounting structure according to the embodiment.
  • a reinforcing portion 76 may be provided in the first heat transfer stage 52a.
  • the reinforcing portion 76 may be provided on the surface opposite to the first contact surface 72 (see FIG. 4A) that contacts the first cooling stage 22a, for example, the lower surface.
  • the reinforcing portion 76 may be arranged to avoid the central opening 71 and the first guide hole 73 .
  • the reinforcing portion 76 may be a reinforcing rib integrally formed with the first heat transfer stage 52a and attached to the first heat transfer stage 52a, the reinforcing rib extending radially or circumferentially or in some other direction. may By providing the reinforcing portion 76, deformation of the first heat transfer stage 52a when the first cooling stage 22a is pressed against the first heat transfer stage 52a can be suppressed. Note that the second heat transfer stage 52b may similarly have a reinforcing portion 76. As shown in FIG.
  • FIG. 7(a) is a perspective view schematically showing an example of a second heat transfer stage 52b that can be used in the cold head mounting structure according to the embodiment
  • FIG. 7(b) is a perspective view of FIG. 7(a).
  • 1 schematically shows a portion of a coldhead mounting structure 50 incorporating a second heat transfer stage 52b shown in FIG.
  • the second heat transfer stage 52b may have a flange portion 77, as shown in FIG. 7(a).
  • the flange portion 77 extends radially outward from the lower portion of the body portion of the second heat transfer stage 52b having a second contact surface 74 that contacts the second cooling stage 22b.
  • a second guide hole 75 is formed in the flange portion 77 .
  • the distance from the first heat transfer stage 52a to the flange portion 77 can be increased as shown in FIG. 7(b).
  • the portion of the support bar 66 extending from the first heat transfer stage 52a to the second heat transfer stage 52b can be lengthened. This helps reduce the heat entering the second heat transfer stage 52b from the first heat transfer stage 52a.
  • a flange portion 77 is provided on the first heat transfer stage 52a, thereby increasing the distance from the wall of the vacuum vessel 30 to which the support rod 66 is fixed to the flange portion 77 of the first heat transfer stage 52a. , the portion of the support rod 66 extending from the vacuum vessel 30 to the first heat transfer stage 52a may be lengthened. This helps reduce the heat entering the first heat transfer stage 52a from the vacuum vessel 30.
  • FIG. 8 is a diagram schematically showing an example of a non-airtight support structure 56 that can be used in the cold head mounting structure 50 according to the embodiment.
  • the support structure 56 includes first, second and third stiffeners 78a, 78b and 78c that connect the support bars 66 together.
  • the first reinforcing members 78a connect circumferentially adjacent support rods 66 between the vacuum vessel 30 and the first heat transfer stage 52a.
  • the second stiffeners 78b connect circumferentially adjacent support bars 66 between the first heat transfer stage 52a and the second heat transfer stage 52b.
  • the third reinforcing member 78c connects the tips of the support rods 66 passing through the second heat transfer stage 52b.
  • These reinforcing members can suppress deformation of the support structure 56 when the cold head 20 a is pressed against the cold head mounting structure 50 . Any one of the first reinforcing member 78a, the second reinforcing member 78b, and the third reinforcing member 78c may be omitted.
  • FIG. 9 is a diagram schematically showing another example of the cold head mounting structure 50 according to the embodiment.
  • the coldhead mounting structure 50 may include a mounting portion 80 to which the hermetic connections 54 and the non-hermetic support structure 56 are attached and which is removable from the vacuum vessel 30 .
  • the mount part 80 is a plate-like member having the cold head insertion port 31 at its center, and has, for example, a disc shape.
  • the cold head mounting structure 50 is installed in the vacuum vessel 30 by attaching the mount section 80 to the vacuum vessel 30 so as to close the opening of the vacuum vessel 30 with the mount section 80 .
  • a seal member 81 such as an O-ring sandwiched between the mount portion 80 and the vacuum vessel 30 may be attached to the mount portion 80 so that the vacuum vessel 30 is airtight when the mount portion 80 is attached to the vacuum vessel 30 . maintains sexuality.
  • Mounting portion 80 can be detachably attached to lifting mechanism 64 (not shown in FIG. 9).
  • the support rod 66 extends from the vacuum vessel 30, penetrates the first heat transfer stage 52a, and reaches the second heat transfer stage 52b. It is not essential that the first heat transfer stage 52a and the second heat transfer stage 52b are provided along one support rod 66 in this way.
  • the support structure 56 includes a first portion of support bars extending from the vacuum vessel 30 to the first heat transfer stage 52a and support bars extending from the first heat transfer stage 52a to the second heat transfer stage 52b. and a second portion of In this case, the first portion and the second portion of the support rod may have different diameters or may have different numbers. The first and second portions of the support bar may be arranged differently, such as with the second portion being radially inward with respect to the first portion.
  • the support rod 66 extends linearly in parallel with the central axis of the cold head 20a in the above embodiment, it is not limited to this.
  • the support rod 66 may extend obliquely with respect to the central axis of the cold head 20a, or may extend spirally around the cold head 20a. In this way, the length of the support rods 66 can be increased, and the heat entering the first heat transfer stage 52a or the second heat transfer stage 52b from the vacuum vessel 30 through the support rods 66 can be reduced. Helpful.
  • the support structure 56 comprises a plurality of support bars 66, but may have other shapes.
  • a portion of support structure 56 eg, the portion connecting vacuum vessel 30 to first heat transfer stage 52a
  • cryogenic refrigerator 20 is a two-stage GM refrigerator, but the cryogenic refrigerator 20 may be a single-stage GM refrigerator. good.
  • the coldhead mounting structure 50 has one heat transfer stage 52 corresponding to the coldhead 20 a having one cooling stage 22 .
  • Cryogenic refrigerator 20 may also be a pulse tube refrigerator, a Stirling refrigerator, or some other type of cryogenic refrigerator.
  • the present invention can be used in the field of cold head mounting structures and cryogenic equipment.
  • cryogenic device 14 ambient environment, 20a cold head, 22 cooling stage, 28 mounting flange, 30 vacuum container, 31 cold head insertion port, 32 vacuum area, 50 cold head mounting structure, 52 heat transfer stage, 54 hermetic connection , 56 Support structure, 60 Airtight partition, 64 Elevating mechanism, 66 Support rod, 80 Mount part.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Electron Beam Exposure (AREA)

Abstract

Une structure (50) de montage de tête froide comprend : un étage de transfert de chaleur (52) disposé dans une zone sous vide (32) à l'intérieur d'un récipient sous vide (30) et se mettant en contact avec un étage de refroidissement (22), ou se séparant de ce dernier, d'une tête froide (20a) au moyen du déplacement de la tête froide (20a) par rapport au récipient sous vide (30) ; un élément de liaison étanche à l'air (54) destiné à relier la tête froide (20a) au récipient sous vide (30) afin d'isoler la zone sous vide (32) d'un environnement ambiant (14) et de permettre le déplacement de la tête froide (20a) par rapport au récipient sous vide (30) ; et une structure de support non étanche à l'air (56) destinée à porter l'étage de transfert de chaleur (52) dans le récipient sous vide (30), et disposée autour de la tête froide (20a) de telle manière que l'étage de refroidissement (22) de la tête froide (20a) soit exposé à la zone sous vide (32).
PCT/JP2022/025159 2021-06-30 2022-06-23 Structure de montage de tête froide et dispositif cryogénique WO2023276856A1 (fr)

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JP2021108455A JP2023006063A (ja) 2021-06-30 2021-06-30 コールドヘッド装着構造および極低温装置
JP2021-108455 2021-06-30

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129232A (en) * 1991-06-03 1992-07-14 General Electric Company Vibration isolation of superconducting magnets
JPH0540762U (ja) * 1991-10-29 1993-06-01 ダイキン工業株式会社 スターリング冷凍機
JPH09287837A (ja) * 1996-04-19 1997-11-04 Kobe Steel Ltd 極低温冷却装置
JPH09287838A (ja) * 1996-04-24 1997-11-04 Kobe Steel Ltd クライオスタットにおける極低温冷凍機の接続構造
JPH109696A (ja) * 1996-06-20 1998-01-16 Sumitomo Heavy Ind Ltd 冷凍機を用いた超電導マグネット装置
JP2016211803A (ja) * 2015-05-12 2016-12-15 株式会社東芝 極低温容器および超電導磁石装置
CN109632150A (zh) * 2018-12-26 2019-04-16 合肥中科离子医学技术装备有限公司 一种用于gm制冷机制冷功率测量的装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6276033B2 (ja) * 2013-01-15 2018-02-07 株式会社神戸製鋼所 極低温装置及び被冷却体に対する冷凍機の接続及び切り離し方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129232A (en) * 1991-06-03 1992-07-14 General Electric Company Vibration isolation of superconducting magnets
JPH0540762U (ja) * 1991-10-29 1993-06-01 ダイキン工業株式会社 スターリング冷凍機
JPH09287837A (ja) * 1996-04-19 1997-11-04 Kobe Steel Ltd 極低温冷却装置
JPH09287838A (ja) * 1996-04-24 1997-11-04 Kobe Steel Ltd クライオスタットにおける極低温冷凍機の接続構造
JPH109696A (ja) * 1996-06-20 1998-01-16 Sumitomo Heavy Ind Ltd 冷凍機を用いた超電導マグネット装置
JP2016211803A (ja) * 2015-05-12 2016-12-15 株式会社東芝 極低温容器および超電導磁石装置
CN109632150A (zh) * 2018-12-26 2019-04-16 合肥中科离子医学技术装备有限公司 一种用于gm制冷机制冷功率测量的装置

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