WO2023238710A1 - Glass sheet manufacturing method and scribe device - Google Patents

Glass sheet manufacturing method and scribe device Download PDF

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Publication number
WO2023238710A1
WO2023238710A1 PCT/JP2023/019762 JP2023019762W WO2023238710A1 WO 2023238710 A1 WO2023238710 A1 WO 2023238710A1 JP 2023019762 W JP2023019762 W JP 2023019762W WO 2023238710 A1 WO2023238710 A1 WO 2023238710A1
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Prior art keywords
glass plate
scribing
scribe
tip
pressing force
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PCT/JP2023/019762
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French (fr)
Japanese (ja)
Inventor
泰生 松伏
将雄 中嶋
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日本電気硝子株式会社
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Publication of WO2023238710A1 publication Critical patent/WO2023238710A1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/04Cutting or splitting in curves, especially for making spectacle lenses

Definitions

  • the present invention relates to a method of manufacturing a glass plate and a scribing device, and particularly to a method of manufacturing a glass plate having a curved portion as a contour shape, and a scribing device used in the manufacturing method.
  • Cited Document 1 control of the pressing force of the scribe tip when forming scribe lines was not studied in detail. Therefore, when the glass plate is cut out, there is a problem in that horn-shaped uncut portions are likely to be left at the starting point (and ending point) of the scribe line. That is, the conventional technology has not been able to suppress the occurrence of defects, and there remains room for improvement in productivity.
  • An object of the present invention is to provide a method for manufacturing a glass plate and a scribing apparatus that suppress the above-mentioned horn-like defects and enable manufacturing of glass plates having curved portions with high productivity.
  • a method for manufacturing a glass plate according to the present invention is, as a first invention, a method for manufacturing a glass plate obtained by cutting out a glass plate having a curved portion in at least a part of its outline from a mother glass plate, the method comprising: A scribing process in which a scribe line is formed by pressing and running a scribe tip on the main surface of a mother glass plate from a starting point located above to an end point located at the same position as the starting point to draw the outline of the glass plate; After the scribing process, the glass plate is cut out along the scribe line by applying stress to the mother glass plate.
  • an initial scribing step in which the scribing tip is pressed with an initial pressing force greater than a target pressing force and is made to run from the time when the scribing tip starts running until it moves to a constant pressure scribing step.
  • the initial pressing force is 1.5 times or more the target pressing force.
  • the initial travel distance that is the travel distance of the scribe tip in the initial scribing step is 1/40 to 1/40 of the constant pressure travel distance that is the travel distance of the scribe tip in the constant pressure scribe step. Preferably it is 1/30.
  • the outline shape of the glass plate is circular with a diameter of 10 to 1000 mm.
  • the thickness of the mother glass plate is 0.3 mm or less.
  • the scribing step may further include, after the constant pressure scribing step, a detachment scribing step of running the scribing tip from the end point to the edge of the mother glass plate. preferable.
  • the scribing tip is run with a separation pressing force greater than the target pressing force in the separation scribing step.
  • the scribing device is a scribing device that scribes a contour shape of a glass plate having at least a part of a curved portion onto a mother glass plate, and the scribing device starts from a starting point located on the curved portion and scribes at the same position as the starting point.
  • a glass plate having a curved portion can be manufactured with high productivity compared to the conventional technology.
  • FIG. 2 is an image diagram showing how scribe lines are formed in the glass plate manufacturing method according to the embodiment of the present invention.
  • 1 is a flowchart outlining a method for manufacturing a glass plate according to an embodiment of the present invention. It is a graph showing the change in the pressing force of the scribe tip in the method for manufacturing a glass plate according to the embodiment of the present invention.
  • FIG. 1 is an image diagram showing how a scribe line T is formed in a method for manufacturing a glass plate according to an embodiment of the present invention.
  • FIG. 2 is a flowchart showing an overview of the method for manufacturing the glass plate 1 according to the embodiment of the present invention. As shown in FIG. 2, the method for manufacturing a glass plate of the present invention includes a scribing step S1 and a cutting step S2.
  • the scribing step S1 is a step of forming a scribe line T by pressing and running the scribe tip 20 on the main surface of the mother glass plate 10 so as to draw the outline shape of the glass plate 1.
  • the scribe line T is a scribe groove that becomes the starting point of a crack that occurs when cutting the mother glass plate 10.
  • the scribe line T includes an initial scribe line T1, a constant pressure scribe line T2, and a withdrawal scribe line T3.
  • the glass plate 1 is a plate-shaped or sheet-shaped glass having at least a partially curved contour.
  • the glass plate 1 is disk-shaped with a circular outline in plan view, that is, the entire outline consists of a curved line.
  • the diameter of the glass plate 1 can be arbitrarily set depending on the application, but is, for example, 10 mm or more and 1000 mm or less, preferably 50 mm or more and 800 mm or less, and more preferably 100 mm or more and 600 mm or less.
  • the mother glass plate 10 is a plate glass from which the glass plate 1 can be cut out.
  • the mother glass plate 10 is larger than the glass plate 1 and has a shape that can include the outer shape of the glass plate 1.
  • a case where the mother glass plate 10 has a rectangular shape in plan view will be exemplified.
  • the thickness t of the glass plate 1 and the mother glass plate 10 can be arbitrarily set within a range of 0.3 mm (300 ⁇ m) or less, preferably 10 ⁇ m or more and 200 ⁇ m or less, preferably 20 ⁇ m or more and 150 ⁇ m or less, more preferably It is 30 ⁇ m or more and 80 ⁇ m or less.
  • the glass plate 1 and the mother glass plate 10 are, for example, alkali-free glass or alkali aluminosilicate glass.
  • the glass composition has the following composition.
  • the glass plate 1 and the mother glass plate 10 contain, for example, SiO 2 60-75%, Al 2 O 3 5-20%, B 2 O 3 0-15%, Li 2 O+Na 2 O+K 2 O (Li 2 O, Na 2 O and K 2 O) 0 to less than 1%, MgO 0 to 10%, CaO 0 to 15%, SrO 0 to 10%, and BaO 0 to 10%.
  • SiO 2 60-75% Al 2 O 3 5-20%
  • B 2 O 3 0-15% Li 2 O+Na 2 O+K 2 O (Li 2 O, Na 2 O and K 2 O) 0 to less than 1%
  • MgO 0 to 10% CaO 0 to 15%
  • SrO 0 to 10% SrO 0 to 10%
  • BaO 0 to 10% BaO 0 to 10%.
  • the glass composition has the following composition.
  • the glass plate 1 and the mother glass plate 10 contain, for example, SiO 2 40-80%, Al 2 O 3 1-25%, B 2 O 3 0-30%, Li 2 O 0-20%, Na. Contains 1-25% of 2 O and 0-10% of K 2 O.
  • the glass plate 1 can be easily processed into chemically strengthened glass by ion exchange to obtain high strength properties, and is particularly suitable for mobile display applications, touch panel display applications, and the like.
  • the scribing step S1 includes an initial scribing step S11, a constant pressure scribing step S12, and a detachment scribing step S13.
  • an initial scribing step S11 is performed.
  • a constant pressure scribing step S12 is then executed.
  • the constant pressure scribing step S12 is a step of forming a constant pressure scribe line T2.
  • the constant pressure scribe line T2 is formed from the section point B to the end point C, as shown by the dashed line in FIG.
  • the end point C is set at substantially the same position as the start point A.
  • the initial scribe line T1 and the constant pressure scribe line T2 are configured as closed curves showing the outline of the glass plate 1 or closed frame lines that partially include straight lines.
  • the scribe tip 20 is pressed with a constant target pressing force Pt from the section point B to the end point C, that is, while forming the constant pressure scribe line T2.
  • the target pressing force Pt is set to a value smaller than the initial pressing force Ps.
  • the target pressing force Pt is set according to the characteristics (hardness and thickness) of the mother glass plate 10 and the characteristics (hardness and shape) of the scribe tip 20 so that the scribe line T is formed at a depth that makes it easy to cut out the glass plate 1. can do.
  • the initial traveling distance L1 i.e., the length of the initial scribe line T1
  • the constant pressure traveling distance L2 that is, the traveling distance of the scribing tip 20 in the constant pressure scribing step S12. That is, it is preferably shorter than the length of the constant pressure scribe line T2.
  • the running distance L1 is 1/40 to 1/30 of the running distance L2.
  • the position of section point B is set within a range that satisfies the above-mentioned mileage condition.
  • the detachment scribe step S13 is a step of forming a detachment scribe line T3.
  • the separation scribe line T3 is formed from the end point C to the glass edge D, as shown by the solid line in FIG.
  • the glass edge portion D is set at an arbitrary position on the edge portion of the mother glass plate 10.
  • the glass edge portion D is more preferably the shortest distance to the edge of the mother glass plate 10, and is set at a position where the separation scribe line T3 is substantially perpendicular to the edge of the mother glass plate 10.
  • the scribe tip 20 is pressed with a detachment pressing force Pe in the initial stage of forming the detachment scribe line T3 from the end point C. It is preferable that the detachment pressing force Pe is set to a value larger than the target pressing force Pt. Further, the detachment pressing force Pe may be set to a smaller value than the initial pressing force Ps. In this way, by performing scribing with a large pressing force in the initial stage of forming the detachment scribe line T3, the direction of the scribe tip 20 can be easily changed, and the occurrence of defects in the glass plate 1 can be suppressed. In addition, in the process of forming the separation scribe line T3, it is preferable that the pressing force of the scribe tip 20 is lowered from the separation pressing force Pe to the target pressing force Pt.
  • the cutting out step S2 is then executed.
  • the glass plate manufacturing method described above by appropriately controlling the pressing force of the scribe tip 20, it is possible to suppress the occurrence of horn-like defects that may occur when cutting out the glass plate 1 having a curved contour. , the glass plate 1 can be manufactured with high productivity.
  • the processing of the scribing step S1 can be performed by a scribing device that is capable of controlling the pressing force of the scribe tip 20 and is equipped with a controller that stores a program for controlling the scribing step S1 as described above.
  • the glass plate 1 has a flat plate shape
  • the glass plate 1 according to the present invention may be given a curved shape as a three-dimensional shape as necessary.
  • a region other than the bendable portion may be partially or entirely provided with an uneven shape.
  • through holes, notches, etc. may be formed in the glass plate 1.
  • the scribe line T includes the detachment scribe line T3
  • the detachment scribe step S13 can be omitted and the detachment scribe line T3 can be formed. It may also be an embodiment in which no formation is made. That is, in the present invention, the scribe line T only needs to include at least the initial scribe line T1 and the constant pressure scribe line T2. Further, in order to make it easier to cut out the glass plate 1 from the mother glass plate 10, a plurality of detachment scribe lines T3 may be formed.
  • the method for manufacturing a glass plate of the present invention can be applied to, for example, display devices such as smartphones, mobile phones, tablet computers, personal computers, digital cameras, touch panel displays, in-vehicle display devices, in-vehicle panels, power generation panels, and other optical devices. It can be used as a method for manufacturing glass plates used as semiconductor manufacturing substrates, other supporting substrates, and the like.

Abstract

The present invention comprises: a scribe step for forming a scribe line by causing a scribe tip to travel while pressing the scribe tip on a main surface of a mother glass sheet so as to draw the contour shape of the glass sheet from a start point positioned on a curve to an end point that is the same position as the start point; and a cutout step for cutting out the glass sheet along the scribe line by applying stress to the mother glass sheet, after the scribe step, wherein the scribe step includes a constant pressure scribe step for causing the scribe tip to travel while pressing the scribe tip with a constant target pressure, and an initial scribe step for causing the scribe tip to travel while pressing the scribe tip with an initial pressure greater than the target pressure from the travel start time of the scribe tip until transitioning to the constant pressure scribe step.

Description

ガラス板の製造方法、およびスクライブ装置Glass plate manufacturing method and scribing device
 本発明は、ガラス板の製造方法、およびスクライブ装置に関し、特に輪郭形状として曲線部を備えるガラス板の製造方法、およびその製造方法に用いられるスクライブ装置に関する。 The present invention relates to a method of manufacturing a glass plate and a scribing device, and particularly to a method of manufacturing a glass plate having a curved portion as a contour shape, and a scribing device used in the manufacturing method.
 近年様々な用途において円形の輪郭形状を有する板状の、すなわち円盤状のガラス板が用いられている。このような円盤状ガラスを得る方法としては、所望の輪郭形状に沿ったスクライブ線を母ガラス板に形成し、当該スクライブ線に沿ってガラスを切り出す方法が知られている(例えば、特許文献1)。 In recent years, plate-shaped, ie, disk-shaped glass plates with circular contours have been used in various applications. As a method for obtaining such a disc-shaped glass, a method is known in which a scribe line along a desired contour shape is formed on a mother glass plate and the glass is cut out along the scribe line (for example, as disclosed in Patent Document 1). ).
特開2020-117434号公報Japanese Patent Application Publication No. 2020-117434
 しかしながら、引用文献1の技術ではスクライブ線を形成する際のスクライブチップの押圧力の制御については詳細に検討されていなかった。そのため、ガラス板を切り出した際に、スクライブ線の始点(および終点)となっていた箇所にツノ状の切り残りが生じ易いという問題があった。すなわち、従来の技術では欠陥の発生を抑制できておらず、生産性において改善の余地が残されていた。 However, in the technique of Cited Document 1, control of the pressing force of the scribe tip when forming scribe lines was not studied in detail. Therefore, when the glass plate is cut out, there is a problem in that horn-shaped uncut portions are likely to be left at the starting point (and ending point) of the scribe line. That is, the conventional technology has not been able to suppress the occurrence of defects, and there remains room for improvement in productivity.
 本発明は、上記のツノ状欠陥を抑制し、曲線部を有するガラス板を高い生産性で製造可能とするガラス板の製造方法およびスクライブ装置を提供することを目的とする。 An object of the present invention is to provide a method for manufacturing a glass plate and a scribing apparatus that suppress the above-mentioned horn-like defects and enable manufacturing of glass plates having curved portions with high productivity.
 本発明に係るガラス板の製造方法は、第1の発明として、輪郭形状の少なくとも一部に曲線部を有するガラス板を、母ガラス板から切り出して得るガラス板の製造方法であって、曲線部上に位置する始点から、当該始点と同一位置となる終点まで、ガラス板の輪郭形状を描くよう母ガラス板の主表面上にスクライブチップを押圧しつつ走行させてスクライブラインを形成するスクライブ工程と、スクライブ工程後に母ガラス板に応力を印加することによりスクライブラインに沿ってガラス板を切り出す切り出し工程と、を備え、スクライブ工程は、スクライブチップを一定の目標押圧力で押圧しつつ走行させる定圧スクライブ工程と、スクライブチップの走行開始時点から、定圧スクライブ工程に移行するまで、目標押圧力より大きな初期押圧力でスクライブチップを押圧しつつ走行させる初期スクライブ工程と、を備えることを特徴とする。 A method for manufacturing a glass plate according to the present invention is, as a first invention, a method for manufacturing a glass plate obtained by cutting out a glass plate having a curved portion in at least a part of its outline from a mother glass plate, the method comprising: A scribing process in which a scribe line is formed by pressing and running a scribe tip on the main surface of a mother glass plate from a starting point located above to an end point located at the same position as the starting point to draw the outline of the glass plate; After the scribing process, the glass plate is cut out along the scribe line by applying stress to the mother glass plate. and an initial scribing step in which the scribing tip is pressed with an initial pressing force greater than a target pressing force and is made to run from the time when the scribing tip starts running until it moves to a constant pressure scribing step.
 第2の発明として、第1の発明において、初期押圧力が、目標押圧力の1.5倍以上であることが好ましい。 As a second invention, in the first invention, it is preferable that the initial pressing force is 1.5 times or more the target pressing force.
 第3の発明として、第1または第2の発明において、初期スクライブ工程におけるスクライブチップの走行距離である初期走行距離が、定圧スクライブ工程におけるスクライブチップの走行距離である定圧走行距離の1/40~1/30であることが好ましい。 As a third invention, in the first or second invention, the initial travel distance that is the travel distance of the scribe tip in the initial scribing step is 1/40 to 1/40 of the constant pressure travel distance that is the travel distance of the scribe tip in the constant pressure scribe step. Preferably it is 1/30.
 第4の発明として、第1から第3のいずれかの発明において、ガラス板の輪郭形状が直径10~1000mmの円形であることが好ましい。 As a fourth invention, in any one of the first to third inventions, it is preferable that the outline shape of the glass plate is circular with a diameter of 10 to 1000 mm.
 第5の発明として、第1から第4のいずれかの発明において、母ガラス板の厚みが0.3mm以下であることが好ましい。 As a fifth invention, in any one of the first to fourth inventions, it is preferable that the thickness of the mother glass plate is 0.3 mm or less.
 第6の発明として、第1から第5のいずれかの発明において、スクライブ工程は、定圧スクライブ工程後、スクライブチップを終点から母ガラス板の端縁部まで走行させる離脱スクライブ工程をさらに備えることが好ましい。 As a sixth invention, in any one of the first to fifth inventions, the scribing step may further include, after the constant pressure scribing step, a detachment scribing step of running the scribing tip from the end point to the edge of the mother glass plate. preferable.
 第7の発明として、第1から第6のいずれかの発明において、離脱スクライブ工程において、目標押圧力より大きな離脱押圧力でスクライブチップを走行させることが好ましい。 As a seventh invention, in any one of the first to sixth inventions, it is preferable that the scribing tip is run with a separation pressing force greater than the target pressing force in the separation scribing step.
 本発明に係るスクライブ装置は、少なくとも一部に曲線部を有するガラス板の輪郭形状を母ガラス板にスクライビングするスクライブ装置であって、曲線部上に位置する始点から、当該始点と同一位置となる終点まで、ガラス板の輪郭形状を描くよう母ガラス板の主表面上にスクライブチップを押圧しつつ走行させてスクライブラインを形成するスクライブ手段と、スクライブ手段に、スクライブチップを一定の目標押圧力で押圧しつつ走行させる定圧スクライブ工程と、スクライブチップの走行開始時点から、定圧スクライブ工程に移行するまで、目標押圧力より大きな初期押圧力でスクライブチップを押圧しつつ走行させる初期スクライブ工程と、を実行させる制御手段と、を備えることを特徴とする。 The scribing device according to the present invention is a scribing device that scribes a contour shape of a glass plate having at least a part of a curved portion onto a mother glass plate, and the scribing device starts from a starting point located on the curved portion and scribes at the same position as the starting point. A scribing means for forming a scribe line by running a scribe tip while pressing it on the main surface of a mother glass plate so as to draw the outline shape of the glass plate until the end point; A constant pressure scribing process in which the scribe tip runs while being pressed, and an initial scribing process in which the scribe tip runs while being pressed with an initial pressing force greater than the target pressing force from the time when the scribe tip starts running until it moves to the constant pressure scribing process. and a control means for controlling.
 本発明によれば、従来技術に比べ、曲線部を有するガラス板を高い生産性で製造することができる。 According to the present invention, a glass plate having a curved portion can be manufactured with high productivity compared to the conventional technology.
本発明の実施形態に係るガラス板の製造方法においてスクライブラインが形成される様子を示すイメージ図である。FIG. 2 is an image diagram showing how scribe lines are formed in the glass plate manufacturing method according to the embodiment of the present invention. 本発明の実施形態に係るガラス板の製造方法の概要を示すフローチャートである。1 is a flowchart outlining a method for manufacturing a glass plate according to an embodiment of the present invention. 本発明の実施形態に係るガラス板の製造方法におけるスクライブチップの押圧力の変化を示すグラフである。It is a graph showing the change in the pressing force of the scribe tip in the method for manufacturing a glass plate according to the embodiment of the present invention.
 以下、本発明の実施形態に係るガラス板1の製造方法ついて説明する。図1は、本発明の実施形態に係るガラス板の製造方法においてスクライブラインTが形成される様子を示すイメージ図である。図2は、本発明の実施形態に係るガラス板1の製造方法の概要を示すフローチャートである。図2に示すように、本発明のガラス板の製造方法は、スクライブ工程S1と、切り出し工程S2とを備える。 Hereinafter, a method for manufacturing the glass plate 1 according to an embodiment of the present invention will be described. FIG. 1 is an image diagram showing how a scribe line T is formed in a method for manufacturing a glass plate according to an embodiment of the present invention. FIG. 2 is a flowchart showing an overview of the method for manufacturing the glass plate 1 according to the embodiment of the present invention. As shown in FIG. 2, the method for manufacturing a glass plate of the present invention includes a scribing step S1 and a cutting step S2.
 スクライブ工程S1は、ガラス板1の輪郭形状を描くように母ガラス板10の主表面上にスクライブチップ20を押圧しつつ走行させてスクライブラインTを形成する工程である。スクライブラインTは、母ガラス板10を切断する際に生じるクラックの起点となる罫書溝である。スクライブラインTは、初期スクライブラインT1、定圧スクライブラインT2、および離脱スクライブラインT3を含む。 The scribing step S1 is a step of forming a scribe line T by pressing and running the scribe tip 20 on the main surface of the mother glass plate 10 so as to draw the outline shape of the glass plate 1. The scribe line T is a scribe groove that becomes the starting point of a crack that occurs when cutting the mother glass plate 10. The scribe line T includes an initial scribe line T1, a constant pressure scribe line T2, and a withdrawal scribe line T3.
 図1に示す通り、ガラス板1は、輪郭形状として少なくとも一部に曲線部を有する板状またはシート状のガラスである。本実施形態では、ガラス板1が、平面視円形の輪郭形状を有する円盤状である場合、すなわち輪郭形状の全部が曲線から成る場合を例示する。ガラス板1の直径は、用途に応じて任意に設定可能であるが、例えば、10mm以上1000mm以下、好ましくは50mm以上800mm以下、より好ましくは100mm以上600mm以下である。 As shown in FIG. 1, the glass plate 1 is a plate-shaped or sheet-shaped glass having at least a partially curved contour. In this embodiment, a case is illustrated in which the glass plate 1 is disk-shaped with a circular outline in plan view, that is, the entire outline consists of a curved line. The diameter of the glass plate 1 can be arbitrarily set depending on the application, but is, for example, 10 mm or more and 1000 mm or less, preferably 50 mm or more and 800 mm or less, and more preferably 100 mm or more and 600 mm or less.
 母ガラス板10は、ガラス板1を切り出し可能な板状ガラスである。換言すれば、母ガラス板10は、ガラス板1より大きく、ガラス板1の外形を包含し得る形状のガラスである。本実施形態では母ガラス板10が平面視矩形状の形状を有する場合を例示する。 The mother glass plate 10 is a plate glass from which the glass plate 1 can be cut out. In other words, the mother glass plate 10 is larger than the glass plate 1 and has a shape that can include the outer shape of the glass plate 1. In this embodiment, a case where the mother glass plate 10 has a rectangular shape in plan view will be exemplified.
 ガラス板1および母ガラス板10の厚みtは、0.3mm(300μm)以下の範囲で任意に設定することができ、好ましくは10μm以上200μm以下であり、好ましくは20μm以上150μm以下、より好ましくは30μm以上80μm以下である。 The thickness t of the glass plate 1 and the mother glass plate 10 can be arbitrarily set within a range of 0.3 mm (300 μm) or less, preferably 10 μm or more and 200 μm or less, preferably 20 μm or more and 150 μm or less, more preferably It is 30 μm or more and 80 μm or less.
 ガラス板1および母ガラス板10は、例えば、無アルカリガラス、またはアルカリアルミノシリケートガラスである。 The glass plate 1 and the mother glass plate 10 are, for example, alkali-free glass or alkali aluminosilicate glass.
 ガラス板1および母ガラス板10が、無アルカリガラスである場合、ガラス組成として以下の組成を有することが好ましい。ガラス板1および母ガラス板10は、例えば、モル%で、SiO2 60~75%、Al23 5~20%、B23 0~15%、Li2O+Na2O+K2O(Li2O、Na2O及びK2Oの合量) 0~1%未満、MgO 0~10%、CaO 0~15%、SrO 0~10%、BaO 0~10%を含有する。このようなガラス組成とすれば、ガラス板1において、低膨張且つ高い耐候性を得ることができ、特に、ディスプレイ用途や、光発電パネル用途等に好適である。 When the glass plate 1 and the mother glass plate 10 are alkali-free glass, it is preferable that the glass composition has the following composition. The glass plate 1 and the mother glass plate 10 contain, for example, SiO 2 60-75%, Al 2 O 3 5-20%, B 2 O 3 0-15%, Li 2 O+Na 2 O+K 2 O (Li 2 O, Na 2 O and K 2 O) 0 to less than 1%, MgO 0 to 10%, CaO 0 to 15%, SrO 0 to 10%, and BaO 0 to 10%. With such a glass composition, low expansion and high weather resistance can be obtained in the glass plate 1, and it is particularly suitable for display applications, photovoltaic panel applications, and the like.
 ガラス板1および母ガラス板10が、アルカリアルミノシリケートガラスである場合、ガラス組成として以下の組成を有することが好ましい。ガラス板1および母ガラス板10は、例えば、モル%で、SiO2 40~80%、Al23 1~25%、B23 0~30%、Li2O 0~20%、Na2O 1~25%、K2O 0~10% を含有する。このようなガラス組成とすれば、ガラス板1をイオン交換により容易に化学強化ガラスに加工して高い強度特性を得ることができ、特に、モバイルディスプレイ用途や、タッチパネルディスプレイ用途等に好適である。 When the glass plate 1 and the mother glass plate 10 are alkali aluminosilicate glass, it is preferable that the glass composition has the following composition. The glass plate 1 and the mother glass plate 10 contain, for example, SiO 2 40-80%, Al 2 O 3 1-25%, B 2 O 3 0-30%, Li 2 O 0-20%, Na. Contains 1-25% of 2 O and 0-10% of K 2 O. With such a glass composition, the glass plate 1 can be easily processed into chemically strengthened glass by ion exchange to obtain high strength properties, and is particularly suitable for mobile display applications, touch panel display applications, and the like.
 母ガラス板10は、例えば、オーバーフローダウンドロー法、スロットダウンドロー法、フロート法、リドロー法等の成形方法により得られた板状またはシート状の母ガラスをそのまま、或いは小片に切断、加工して得られる。平滑な表面を得るためには成形方法としてオーバーフローダウンドロー法を用いることが好ましい。 The mother glass plate 10 is made of, for example, a plate-like or sheet-like mother glass obtained by a molding method such as an overflow downdraw method, a slot downdraw method, a float method, or a redraw method, or by cutting and processing it into small pieces. can get. In order to obtain a smooth surface, it is preferable to use an overflow down-draw method as the molding method.
 スクライブチップ20は、母ガラス板10にスクライブラインTを形成可能な鋭利な硬質部材である。スクライブチップ20は、典型的にはダイヤモンド圧子であるが、ホイール状のチップなど、ガラスのスクライブ用途として使用可能な周知の部材を用いることができる。スクライブチップ20は、図示しないスクライブ装置に取り付けられ、母ガラス板10に押圧されながら母ガラス板10の主表面上を罫書くよう走行する。スクライブ装置は、スクライブチップ20の押圧力を制御可能に構成され、スクライブチップ20を支持および移動可能なアクチュエータ等の機構を具備する。 The scribe tip 20 is a sharp hard member that can form a scribe line T on the mother glass plate 10. The scribing tip 20 is typically a diamond indenter, but it is also possible to use a well-known member that can be used for scribing glass, such as a wheel-shaped tip. The scribing tip 20 is attached to a scribing device (not shown), and runs so as to write marks on the main surface of the mother glass plate 10 while being pressed against the mother glass plate 10. The scribing device is configured to be able to control the pressing force of the scribing tip 20, and includes a mechanism such as an actuator that can support and move the scribing tip 20.
 図2に示すように、スクライブ工程S1は、初期スクライブ工程S11、定圧スクライブ工程S12、および離脱スクライブ工程S13を備える。スクライブ工程S1において、まず、初期スクライブ工程S11が実行される。 As shown in FIG. 2, the scribing step S1 includes an initial scribing step S11, a constant pressure scribing step S12, and a detachment scribing step S13. In the scribing step S1, first, an initial scribing step S11 is performed.
 初期スクライブ工程S11は、初期スクライブラインT1を形成する工程である。本実施形態では、初期スクライブラインT1は、図1に破線で示すように始点Aから区間点Bまで形成される。図3に示すように、スクライブチップ20は、始点Aから区間点Bまで、すなわち初期スクライブラインT1を形成している間、初期押圧力Psで押圧される。初期押圧力Psは、後述の目標押圧力Ptより大きな押圧力である。初期押圧力Psは、好ましくは目標押圧力Ptの1.5倍以上である。図3は、スクライブチップ20に付与する押圧力の変化を示すグラフである。図3において、縦軸はスクライブチップ20に付与される押圧力を、横軸はスクライブチップ20の走行距離(走行位置)を各々示す。 The initial scribe step S11 is a step of forming an initial scribe line T1. In this embodiment, the initial scribe line T1 is formed from the starting point A to the section point B, as shown by the broken line in FIG. As shown in FIG. 3, the scribe tip 20 is pressed with an initial pressing force Ps from the starting point A to the section point B, that is, while forming the initial scribe line T1. The initial pressing force Ps is a pressing force larger than a target pressing force Pt, which will be described later. The initial pressing force Ps is preferably 1.5 times or more the target pressing force Pt. FIG. 3 is a graph showing changes in the pressing force applied to the scribe tip 20. As shown in FIG. In FIG. 3, the vertical axis represents the pressing force applied to the scribe tip 20, and the horizontal axis represents the travel distance (traveling position) of the scribe chip 20.
 初期スクライブ工程S11の処理を終えると、次いで定圧スクライブ工程S12の処理が実行される。 After completing the initial scribing step S11, a constant pressure scribing step S12 is then executed.
 定圧スクライブ工程S12は、定圧スクライブラインT2を形成する工程である。定圧スクライブラインT2は、図1に一点鎖線で示すように区間点Bから終点Cまで形成される。終点Cは、始点Aと実質的に同一の位置に設定される。これにより、初期スクライブラインT1および定圧スクライブラインT2は、ガラス板1の輪郭を示す閉曲線、または一部に直線を含む閉じた枠線として構成される。図3に示すように、スクライブチップ20は、区間点Bから終点Cまで、すなわち定圧スクライブラインT2を形成している間、一定の目標押圧力Ptで押圧される。目標押圧力Ptは、初期押圧力Psより小さな値に設定される。目標押圧力Ptは、母ガラス板10の特性(硬度や厚み)およびスクライブチップ20の特性(硬度や形状)に応じて、ガラス板1を切り出し易い深さでスクライブラインTが形成されるよう設定することができる。 The constant pressure scribing step S12 is a step of forming a constant pressure scribe line T2. The constant pressure scribe line T2 is formed from the section point B to the end point C, as shown by the dashed line in FIG. The end point C is set at substantially the same position as the start point A. Thereby, the initial scribe line T1 and the constant pressure scribe line T2 are configured as closed curves showing the outline of the glass plate 1 or closed frame lines that partially include straight lines. As shown in FIG. 3, the scribe tip 20 is pressed with a constant target pressing force Pt from the section point B to the end point C, that is, while forming the constant pressure scribe line T2. The target pressing force Pt is set to a value smaller than the initial pressing force Ps. The target pressing force Pt is set according to the characteristics (hardness and thickness) of the mother glass plate 10 and the characteristics (hardness and shape) of the scribe tip 20 so that the scribe line T is formed at a depth that makes it easy to cut out the glass plate 1. can do.
 なお、上述初期スクライブ工程S11におけるスクライブチップ20の走行距離である初期走行距離L1(すなわち初期スクライブラインT1の長さ)は、定圧スクライブ工程S12におけるスクライブチップ20の走行距離である定圧走行距離L2(すなわち定圧スクライブラインT2の長さ)より短いことが好ましい。具体的には、走行距離L1は走行距離L2の1/40~1/30であることが好ましい。また、区間点Bの位置は、上記の走行距離条件を満たす範囲内で設定されることが好ましい。このように、初期の短い距離を大きな押圧力でスクライビングすることによって、始点A(および終点C)近傍において確実に母ガラス板10の厚み方向にクラックを進展させることができ、ガラス板1を切り出す際のツノ状欠陥の発生を抑制することができる。 Note that the initial traveling distance L1 (i.e., the length of the initial scribe line T1), which is the traveling distance of the scribe tip 20 in the above-mentioned initial scribing step S11, is equal to the constant pressure traveling distance L2 (that is, the traveling distance of the scribing tip 20 in the constant pressure scribing step S12). That is, it is preferably shorter than the length of the constant pressure scribe line T2. Specifically, it is preferable that the running distance L1 is 1/40 to 1/30 of the running distance L2. Further, it is preferable that the position of section point B is set within a range that satisfies the above-mentioned mileage condition. In this way, by scribing over a short initial distance with a large pressing force, cracks can reliably develop in the thickness direction of the mother glass plate 10 near the starting point A (and ending point C), and the glass plate 1 can be cut out. It is possible to suppress the occurrence of horn-like defects during the process.
 定圧スクライブ工程S12の処理を終えると、次いで離脱スクライブ工程S13の処理が実行される。 After the constant pressure scribing step S12 is completed, the detachment scribing step S13 is then executed.
 離脱スクライブ工程S13は、離脱スクライブラインT3を形成する工程である。離脱スクライブラインT3は、図1の実線で示すように終点Cからガラス端縁部Dまで形成される。ガラス端縁部Dは、母ガラス板10の端縁部の任意の位置に設定される。ガラス端縁部Dは、より好ましくは母ガラス板10の端縁まで最短距離となり、離脱スクライブラインT3が母ガラス板10の端辺に対して略垂直となる位置に設定される。このように離脱スクライブラインT3を形成することにより、後述の切り出し工程S2において、母ガラス板10からガラス板1を切り出し易くなる。図3に示すように、スクライブチップ20は、終点Cから離脱スクライブラインT3を形成する初期段階において、離脱押圧力Peで押圧されることが好ましい。離脱押圧力Peは、目標押圧力Ptより大きな値に設定されることが好ましい。また、離脱押圧力Peは、初期押圧力Psより小さな値に設定されて良い。このように、離脱スクライブラインT3を形成する初期段階において大きな押圧力でスクライビングすることによって、スクライブチップ20の方向を容易に切り替え、ガラス板1への欠陥の発生を抑制することができる。なお、離脱スクライブラインT3を形成する過程で、スクライブチップ20の押圧力は、離脱押圧力Peから目標押圧力Ptへ下降させることが好ましい。 The detachment scribe step S13 is a step of forming a detachment scribe line T3. The separation scribe line T3 is formed from the end point C to the glass edge D, as shown by the solid line in FIG. The glass edge portion D is set at an arbitrary position on the edge portion of the mother glass plate 10. The glass edge portion D is more preferably the shortest distance to the edge of the mother glass plate 10, and is set at a position where the separation scribe line T3 is substantially perpendicular to the edge of the mother glass plate 10. By forming the detachment scribe line T3 in this way, it becomes easier to cut out the glass plate 1 from the mother glass plate 10 in the cutting step S2 described later. As shown in FIG. 3, it is preferable that the scribe tip 20 is pressed with a detachment pressing force Pe in the initial stage of forming the detachment scribe line T3 from the end point C. It is preferable that the detachment pressing force Pe is set to a value larger than the target pressing force Pt. Further, the detachment pressing force Pe may be set to a smaller value than the initial pressing force Ps. In this way, by performing scribing with a large pressing force in the initial stage of forming the detachment scribe line T3, the direction of the scribe tip 20 can be easily changed, and the occurrence of defects in the glass plate 1 can be suppressed. In addition, in the process of forming the separation scribe line T3, it is preferable that the pressing force of the scribe tip 20 is lowered from the separation pressing force Pe to the target pressing force Pt.
 離脱スクライブ工程S13の処理を終えると、次いで切り出し工程S2の処理が実行される。 After finishing the separation scribing step S13, the cutting out step S2 is then executed.
 切り出し工程S2は、母ガラス板10へ応力を印加することによりスクライブラインT(初期スクライブラインT1、定圧スクライブラインT2、および離脱スクライブラインT3)に沿ってクラックを進展させ、ガラス板1を切り出す工程である。具体的には、母ガラス板10のうちガラス板1を構成しない部分(以下、不要部2と称する)を把持し、曲げ荷重を作用させることにより曲げ応力を付与し、スクライブラインTに沿ってクラックを進展させることにより、母ガラス板10を、ガラス板1と不要部2とに分離する。応力の付与は、母ガラス板10を把持および変形可能とする装置を用いて自動的に行っても良いし、作業者が母ガラス板10を把持して曲げ作業を行うことにより実行しても良い。 The cutting step S2 is a step of applying stress to the mother glass plate 10 to develop cracks along the scribe lines T (initial scribe line T1, constant pressure scribe line T2, and detachment scribe line T3), and cutting out the glass plate 1. It is. Specifically, a portion of the mother glass plate 10 that does not constitute the glass plate 1 (hereinafter referred to as unnecessary portion 2) is gripped, and a bending stress is applied by applying a bending load to the part of the mother glass plate 10 that does not constitute the glass plate 1. By allowing the crack to develop, the mother glass plate 10 is separated into the glass plate 1 and the unnecessary portion 2. The stress may be applied automatically using a device that can grip and deform the mother glass plate 10, or may be applied by an operator holding the mother glass plate 10 and performing a bending operation. good.
 以上に示したガラス板の製造方法によれば、スクライブチップ20の押圧力を適切に制御することにより、輪郭として曲線部を有するガラス板1を切り出す際に生じ得るツノ状欠陥の発生を抑制し、ガラス板1を高い生産性で製造することができる。 According to the glass plate manufacturing method described above, by appropriately controlling the pressing force of the scribe tip 20, it is possible to suppress the occurrence of horn-like defects that may occur when cutting out the glass plate 1 having a curved contour. , the glass plate 1 can be manufactured with high productivity.
 上記スクライブ工程S1の処理は、スクライブチップ20の押圧力を制御可能なスクライブ装置であって、上述の通りスクライブ工程S1の制御を行うプログラムを記憶したコントローラを備えるスクライブ装置により実行可能である。 The processing of the scribing step S1 can be performed by a scribing device that is capable of controlling the pressing force of the scribe tip 20 and is equipped with a controller that stores a program for controlling the scribing step S1 as described above.
 本発明に係るガラス板の製造方法により得られるガラス板1は、スマートフォン、携帯電話、タブレットコンピュータ、パーソナルコンピュータ、デジタルカメラ、タッチパネルディスプレイ、車載用表示デバイス、車載用パネルなどの表示デバイス、発電パネル、その他光学デバイス等、半導体製造用基板、その他支持基板等として用いることができる。また、ガラス板1は、これら用途に用いるに際して、任意の板状またはシート状の樹脂材料、或いは金属材料と接着剤、接着シート等を介して積層し、積層体として用いることができる。 The glass plate 1 obtained by the glass plate manufacturing method according to the present invention can be used for display devices such as smartphones, mobile phones, tablet computers, personal computers, digital cameras, touch panel displays, in-vehicle display devices, in-vehicle panels, power generation panels, etc. It can also be used as other optical devices, semiconductor manufacturing substrates, other supporting substrates, and the like. Further, when the glass plate 1 is used for these purposes, it can be laminated with any plate-shaped or sheet-shaped resin material or metal material via an adhesive, an adhesive sheet, etc., and used as a laminate.
(変形例)
 上記実施形態ではガラス板1は厚み方向に視た場合の輪郭形状が真円状である場合を例示したが、ガラス板1の形状は輪郭形状の少なくとも一部に曲線部を有する形状であれば、これに限らず任意の形状として良い。例えば、ガラス板1の輪郭形状は、楕円状であっても良いし、真円形状の一部にノッチ(切り欠き部)や、オリエンテーションフラットを備えた形状であっても良い。
(Modified example)
In the above embodiment, the glass plate 1 has a perfectly circular outline when viewed in the thickness direction, but the glass plate 1 may have a curved part in at least a part of its outline. , the shape is not limited to this and may be any shape. For example, the outline shape of the glass plate 1 may be elliptical, or may be a perfect circle with a notch (notch) or an orientation flat in a part thereof.
 また、母ガラス板10の形状は、ガラス板1を切り出し可能であれば任意の形状として良く、例えば、円盤状などであっても良い。 Further, the shape of the mother glass plate 10 may be any shape as long as the glass plate 1 can be cut out, and may be, for example, a disk shape.
 上記実施形態ではガラス板1が平坦な板状である場合を一例として説明したが、本発明に係るガラス板1には、必要に応じて三次元的な形状として曲面形状を付与してもよく、折曲可能部以外の領域に凹凸形状を一部または全体的に付与してもよい。また、ガラス板1には貫通孔や切り欠き等を形成しても良い。 In the above embodiment, the case where the glass plate 1 has a flat plate shape is described as an example, but the glass plate 1 according to the present invention may be given a curved shape as a three-dimensional shape as necessary. , a region other than the bendable portion may be partially or entirely provided with an uneven shape. Further, through holes, notches, etc. may be formed in the glass plate 1.
 上記実施形態ではスクライブラインTに離脱スクライブラインT3を含む場合を例示したが、母ガラス板10からガラス板1をくり抜くように切り出し可能であれば離脱スクライブ工程S13を省略し、離脱スクライブラインT3を形成しない態様としても良い。すなわち、本発明においてはスクライブラインTには少なくとも初期スクライブラインT1および定圧スクライブラインT2が含まれていれば良い。また、母ガラス板10からガラス板1を切り出し易くするために離脱スクライブラインT3を複数形成しても良い。 In the above embodiment, the case where the scribe line T includes the detachment scribe line T3 has been illustrated, but if it is possible to cut out the glass plate 1 from the mother glass plate 10 so as to hollow out the detachment scribe line T3, the detachment scribe step S13 can be omitted and the detachment scribe line T3 can be formed. It may also be an embodiment in which no formation is made. That is, in the present invention, the scribe line T only needs to include at least the initial scribe line T1 and the constant pressure scribe line T2. Further, in order to make it easier to cut out the glass plate 1 from the mother glass plate 10, a plurality of detachment scribe lines T3 may be formed.
 本発明のガラス板の製造方法は、例えば、スマートフォン、携帯電話、タブレットコンピュータ、パーソナルコンピュータ、デジタルカメラ、タッチパネルディスプレイ、車載用表示デバイス、車載用パネルなどの表示デバイス、発電パネル、その他光学デバイス等、半導体製造用基板、その他支持基板等として用いられるガラス板の製造方法として利用可能である。 The method for manufacturing a glass plate of the present invention can be applied to, for example, display devices such as smartphones, mobile phones, tablet computers, personal computers, digital cameras, touch panel displays, in-vehicle display devices, in-vehicle panels, power generation panels, and other optical devices. It can be used as a method for manufacturing glass plates used as semiconductor manufacturing substrates, other supporting substrates, and the like.
1  ガラス板
10 母ガラス板
20 スクライブチップ
T1 初期スクライブライン
T2 定圧スクライブライン
T3 離脱スクライブライン
Ps 初期押圧力
Pt 目標押圧力
Pe 離脱押圧力
L1 初期走行距離
L2 定圧走行距離
1 Glass plate 10 Mother glass plate 20 Scribe tip T1 Initial scribe line T2 Constant pressure scribe line T3 Separation scribe line Ps Initial pressing force Pt Target pressing force Pe Separating pressing force L1 Initial travel distance L2 Constant pressure travel distance

Claims (8)

  1.  輪郭形状の少なくとも一部に曲線部を有するガラス板を、母ガラス板から切り出して得るガラス板の製造方法であって、
     前記曲線部上に位置する始点から、当該始点と同一位置となる終点まで、前記ガラス板の輪郭形状を描くよう前記母ガラス板の主表面上にスクライブチップを押圧しつつ走行させてスクライブラインを形成するスクライブ工程と、
     前記スクライブ工程後に前記母ガラス板に応力を印加することにより前記スクライブラインに沿って前記ガラス板を切り出す切り出し工程と、を備え、
     前記スクライブ工程は、
      前記スクライブチップを一定の目標押圧力で押圧しつつ走行させる定圧スクライブ工程と、
      前記スクライブチップの走行開始時点から、前記定圧スクライブ工程に移行するまで、前記目標押圧力より大きな初期押圧力で前記スクライブチップを押圧しつつ走行させる初期スクライブ工程と、を備える、ガラス板の製造方法。
    A method for manufacturing a glass plate obtained by cutting out a glass plate having a curved part in at least a part of its outline from a mother glass plate, the method comprising:
    A scribe line is created by running a scribe tip while pressing it on the main surface of the mother glass plate so as to draw the outline shape of the glass plate from a starting point located on the curved part to an end point located at the same position as the starting point. a scribing process to form;
    a cutting step of cutting out the glass plate along the scribe line by applying stress to the mother glass plate after the scribing process,
    The scribing step includes:
    a constant pressure scribing step in which the scribe tip is moved while being pressed with a constant target pressing force;
    A method for producing a glass plate, comprising: an initial scribing step in which the scribing tip is pressed and moved with an initial pressing force greater than the target pressing force from the time when the scribing tip starts running until moving to the constant pressure scribing step; .
  2.  前記初期押圧力が、前記目標押圧力の1.5倍以上である、請求項1に記載のガラス板の製造方法。 The method for manufacturing a glass plate according to claim 1, wherein the initial pressing force is 1.5 times or more the target pressing force.
  3.  前記初期スクライブ工程における前記スクライブチップの走行距離である初期走行距離が、前記定圧スクライブ工程における前記スクライブチップの走行距離である定圧走行距離の1/40~1/30である、請求項1または2に記載のガラス板の製造方法。 2. An initial travel distance, which is a travel distance of the scribe tip in the initial scribing step, is 1/40 to 1/30 of a constant pressure travel distance, which is a travel distance of the scribe tip in the constant pressure scribe step. A method for manufacturing a glass plate as described in .
  4.  前記ガラス板の輪郭形状が直径10~1000mmの円形である、請求項1または2に記載のガラス板の製造方法。 The method for manufacturing a glass plate according to claim 1 or 2, wherein the outline shape of the glass plate is circular with a diameter of 10 to 1000 mm.
  5.  前記母ガラス板の厚みが0.3mm以下である、請求項1または2に記載のガラス板の製造方法。 The method for manufacturing a glass plate according to claim 1 or 2, wherein the thickness of the mother glass plate is 0.3 mm or less.
  6.  前記スクライブ工程は、
      前記定圧スクライブ工程後、前記スクライブチップを前記終点から前記母ガラス板の端縁部まで走行させる離脱スクライブ工程をさらに備える、請求項1または2に記載のガラス板の製造方法。
    The scribing step includes:
    The method for manufacturing a glass plate according to claim 1 or 2, further comprising a detachment scribing step of running the scribe tip from the end point to an edge of the mother glass plate after the constant pressure scribing step.
  7.  前記離脱スクライブ工程において、前記目標押圧力より大きな離脱押圧力で前記スクライブチップを走行させる、請求項6に記載のガラス板の製造方法。 The method for manufacturing a glass plate according to claim 6, wherein in the separation scribing step, the scribe tip is run with a separation pressing force greater than the target pressing force.
  8.  少なくとも一部に曲線部を有するガラス板の輪郭形状を母ガラス板にスクライビングするスクライブ装置であって、
     前記曲線部上に位置する始点から、当該始点と同一位置となる終点まで、前記ガラス板の輪郭形状を描くよう前記母ガラス板の主表面上にスクライブチップを押圧しつつ走行させてスクライブラインを形成するスクライブ手段と、
     前記スクライブ手段に、
      前記スクライブチップを一定の目標押圧力で押圧しつつ走行させる定圧スクライブ工程と、
      前記スクライブチップの走行開始時点から、前記定圧スクライブ工程に移行するまで、前記目標押圧力より大きな初期押圧力で前記スクライブチップを押圧しつつ走行させる初期スクライブ工程と、を実行させる制御手段と、を備える、スクライブ装置。
    A scribing device for scribing a contour shape of a glass plate having a curved portion in at least a portion on a mother glass plate, the scribing device comprising:
    A scribe line is created by running a scribe tip while pressing it on the main surface of the mother glass plate so as to draw the outline shape of the glass plate from a starting point located on the curved part to an end point located at the same position as the starting point. scribing means for forming;
    the scribing means;
    a constant pressure scribing step in which the scribe tip is moved while being pressed with a constant target pressing force;
    a control means for performing an initial scribing step in which the scribing tip is pressed and moved with an initial pressing force greater than the target pressing force from the time when the scribing tip starts traveling until the transition to the constant pressure scribing step; Equipped with a scribing device.
PCT/JP2023/019762 2022-06-10 2023-05-26 Glass sheet manufacturing method and scribe device WO2023238710A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002121039A (en) * 2000-08-11 2002-04-23 Mitsuboshi Diamond Industrial Co Ltd Cutter for cutting brittle material, scriber using the same and scribing method
JP2015027933A (en) * 2013-06-27 2015-02-12 日本電気硝子株式会社 Scribing method of strengthened glass plate
WO2019244712A1 (en) * 2018-06-21 2019-12-26 日本電気硝子株式会社 Method for manufacturing glass sheet and method for manufacturing device
JP2021109788A (en) * 2020-01-08 2021-08-02 日本電気硝子株式会社 Method of manufacturing glass plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002121039A (en) * 2000-08-11 2002-04-23 Mitsuboshi Diamond Industrial Co Ltd Cutter for cutting brittle material, scriber using the same and scribing method
JP2015027933A (en) * 2013-06-27 2015-02-12 日本電気硝子株式会社 Scribing method of strengthened glass plate
WO2019244712A1 (en) * 2018-06-21 2019-12-26 日本電気硝子株式会社 Method for manufacturing glass sheet and method for manufacturing device
JP2021109788A (en) * 2020-01-08 2021-08-02 日本電気硝子株式会社 Method of manufacturing glass plate

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