WO2023231225A1 - 一种桨结构 - Google Patents

一种桨结构 Download PDF

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Publication number
WO2023231225A1
WO2023231225A1 PCT/CN2022/118510 CN2022118510W WO2023231225A1 WO 2023231225 A1 WO2023231225 A1 WO 2023231225A1 CN 2022118510 W CN2022118510 W CN 2022118510W WO 2023231225 A1 WO2023231225 A1 WO 2023231225A1
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WO
WIPO (PCT)
Prior art keywords
paddle
split
propeller
head
structure according
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Application number
PCT/CN2022/118510
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English (en)
French (fr)
Inventor
朱太荣
庞爱锁
林佳继
Original Assignee
拉普拉斯新能源科技股份有限公司
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Publication of WO2023231225A1 publication Critical patent/WO2023231225A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
    • F27B7/20—Details, accessories, or equipment peculiar to rotary-drum furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present application belongs to the field of photovoltaic equipment and relates, for example, to a paddle structure.
  • Paddles are used to carry boats and are widely used in diffusion, coating and other process equipment. As the length of the furnace tube increases, the length of the paddle continues to increase. In the related technology, the processing difficulty of the propeller increases, and when the propeller body is damaged, the entire propeller body needs to be replaced, resulting in high manufacturing and maintenance costs.
  • This application provides a propeller structure that can eliminate the need to replace the entire propeller head or propeller body when the propeller head or propeller body is damaged, only the parts need to be replaced, thereby reducing the manufacturing cost and maintenance cost of the propeller.
  • the present application provides a paddle structure, which includes a paddle head and a paddle body.
  • the paddle head and the paddle body are detachably connected.
  • the paddle body includes at least one split paddle.
  • Figure 1 is a schematic diagram of a split propeller in Embodiment 1 of the present application.
  • Figure 2 is a schematic diagram of a split propeller in Embodiment 2 of the present application.
  • Figure 3 is a schematic diagram of a split propeller in Embodiment 3 of the present application.
  • Figure 4 is a schematic diagram of a split propeller in Embodiment 4 of the present application.
  • FIG. 5 is a schematic diagram of a paddle in Embodiment 5 of the present application.
  • FIG. 6 is a schematic diagram of the paddle head in Embodiment 5 of the present application.
  • Figure 7 is a schematic diagram of the propeller body in Embodiment 5 of the present application.
  • FIG. 8 is a schematic diagram of the paddle in Embodiment 6 of the present application.
  • FIG. 9 is a schematic diagram of the paddle in Embodiment 7 of the present application.
  • the directional indications (such as up, down, left, right, front, back, transverse, longitudinal, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement, etc. between the components in a specific posture. If the specific posture changes, the directional indication also changes.
  • the parallel relationship referred to in the embodiments of this application may actually be an approximately parallel relationship
  • the vertical relationship may actually be an approximately vertical relationship
  • the paddles are one-piece paddles.
  • the one-piece paddles are difficult to process and require too high requirements on molds and processing conditions.
  • once the paddles are formed they are not compatible with furnace tubes of different sizes and have poor compatibility.
  • the longer the length of the paddle the greater the amount of deformation produced by the paddle far away from the cantilever end, so there is a problem of excessive space requirements for the furnace tube.
  • this embodiment provides a paddle structure, which includes a paddle head 1 and a paddle body.
  • the paddle head 1 and the paddle body are detachably connected.
  • the paddle head 1 includes a paddle head fixed part 11, a paddle head support part 12 and a paddle head connecting part 13.
  • the paddle head fixed part 11 is connected to the equipment for controlling the paddle.
  • the paddle head support part 12 is used to support the boat holder or/and the quartz boat.
  • the propeller head support part 12 is provided with a plurality of through grooves 121. Under the load-bearing requirements of the propeller head 1, the through grooves 121 can reduce the self-weight of the propeller head 1 as much as possible, and at the same time reduce the obstruction of the diffusion gas in the furnace tube, ensuring Better diffusion effect.
  • the length direction of the paddle body (that is, the length direction of the furnace tube) is set to the x direction.
  • the paddle body is detachably connected to the paddle head 1 along the positive direction of the x direction.
  • the thickness direction of the paddle body is set to the y direction.
  • the height direction of the propeller body is set to the z direction.
  • the split paddle 2 may be a first split paddle 20.
  • the split paddle 2 includes a split paddle support part 21 and a split paddle connection part 22.
  • the split paddle support The portion 21 is provided with a plurality of through grooves 121. Under the load-bearing requirements of the split propeller 2, the through grooves 121 reduce the dead weight of the split propeller 2 as much as possible, and at the same time reduce the obstruction of the diffusion gas in the furnace tube, ensuring better Diffusion effect.
  • the propeller head connection part 13 and the split propeller connection part 22 are fixedly connected to connect the propeller head 1 and the split propeller 2.
  • the fixed connection in this embodiment is bonding, such as welding, gluing, etc., once the propeller head 1 or/and When the propeller body is damaged, there is no need to replace the entire propeller body. You only need to disconnect the propeller head 1 and the split propeller 2 and replace the damaged parts. The replacement is simple, which greatly reduces the manufacturing and maintenance costs.
  • Furnace tubes of different sizes can be connected to the paddle head 1 using split paddles 2 of different lengths, thereby achieving compatibility with furnace tubes of different sizes through the connection of the same paddle head 1 and split paddles 2 of different lengths.
  • the propeller body includes one split propeller 2.
  • the propeller body includes multiple split propellers 2.
  • the split propellers 2 2 may include a first split paddle 20 and other split paddles except the first split paddle 20 (ie, a second split paddle 23).
  • the split propeller 2 includes a split propeller support part 21 and a split propeller connection part 22.
  • the split propeller connection part 22 is provided with one set. One set of split propeller connection parts 22 is located at both ends of the split propeller support part 21.
  • the second set of split propeller connection parts 22 is located at both ends of the split propeller support part 21.
  • the split propeller connection part 22 is fixedly connected to the split propeller connection part 22 of the adjacent split propeller 2
  • the propeller head connection part 13 is fixedly connected to the split propeller connection part 22 of the first split propeller 20 , connect the propeller head 1 to the split propeller 2 and the adjacent split propeller 2.
  • the fixed connection in this embodiment is bonding, such as welding, gluing, etc.
  • the thicknesses of the plurality of split propellers 2 may be the same or different.
  • the thicknesses of the plurality of split propellers 2 may be successively reduced so that the thickness of the split propellers 2 far away from the propeller head 1 is the thinnest.
  • the split propeller 2 far away from the propeller head 1 can be set to a wider thickness.
  • the actual value can be set according to actual needs. By reducing the weight of the split propeller 2 away from the propeller head 1, the thickness of the split propeller can be reduced.
  • the deformation amount of 2 reduces the requirement for the space at the end of the furnace tube and increases the productivity of furnace tubes of the same size.
  • the number of split paddles 2 can be set according to the size of the furnace tube. Different numbers of split paddles 2 constitute paddles of different lengths. Paddles of different lengths are compatible with furnace tubes of different sizes, so that the same propeller head 1 and multiple splitters can be used. The body paddle 2 is compatible with furnace tubes of different sizes.
  • the difference between this embodiment and the above-mentioned embodiment is that in the above-mentioned embodiment, at least one of the split-paddle connection part 22 and the propeller head connection part 13 of the adjacent split-propeller 2 is connected to the split-paddle connection part 22 can be bonded, that is, the first split paddle 20 is bonded to the paddle head 1, and the other split paddles 2 (ie, the second split paddle 23) except the first split paddle 20 are bonded to the adjacent split paddles.
  • the paddles 2 are bonded together; or, in this embodiment, at least one of the split paddle connecting portion 22 and the propeller head connecting portion 13 of the adjacent split propellers 2 can be connected to the split paddle connecting portion 22 using a slot, that is, the third One split propeller 20 is connected with the slot of the propeller head 1, and the second split propeller 23 is connected with the adjacent split propeller 2 with a slot.
  • the propeller head connection portion 13 of the propeller head 1 is provided with a propeller head slot 131
  • the split propeller connection portion 22 at the first end of the split propeller 2 is provided with a connecting bar 221
  • the split propeller connection portion 22 at the second end of the split propeller 2 is provided with a connection bar 221 .
  • the connecting strip 221 of the first split propeller 20 is inserted into the propeller head slot 131 of the propeller head 1, and the connecting strip 221 of the adjacent split propeller 2 is inserted into the connecting groove 222 of the first split propeller 20, thereby realizing the first The connection between the split propeller 20 and the propeller head 1 and the connection between the adjacent split propellers 2.
  • Embodiment 4 is a diagrammatic representation of Embodiment 4:
  • the difference between this embodiment and Embodiments 1 and 2 is that in the above embodiments, at least one of the split-paddle connecting portion 22 and the propeller head connecting portion 13 of the adjacent split-paddle 2 is connected to the split-paddle connection portion 22 .
  • the connecting part 22 can be bonded, that is, the first split propeller 20 is bonded to the propeller head 1, and the other split propellers 2 (ie, the second split propeller 23) except the first split propeller 20 are bonded to the adjacent propeller head 1.
  • split propellers 2 are bonded; alternatively, in this embodiment, at least one of the split propeller connecting portion 22 and the propeller head connecting portion 13 of the adjacent split propellers 2 can be connected to the split propeller connecting portion 22 using a slot, that is, The first split propeller 20 is connected with the slot of the propeller head 1, and the second split propeller 23 is connected with the adjacent split propeller 2 with a slot.
  • the propeller head connection part 13 of the propeller head 1 is provided with a propeller head clip 132, the split propeller connection part 22 at the first end of the split propeller 2 is provided with a split propeller clamping groove, and the split propeller connection part 22 at the second end of the split propeller 2
  • a split propeller clip 223 is provided, the propeller head clip 132 of the propeller head 1 is inserted into the split propeller clip slot of the first split propeller 20, and the split propeller clip 223 of the first split propeller 20 is inserted into the adjacent split propeller. 2, thereby realizing the connection between the first split propeller 20 and the propeller head 1 and the connection between the adjacent split propellers 2.
  • a limiting mechanism is provided at the connection position between the propeller head 1 and the split propeller 2.
  • at least one of the propeller head support part 12 and the split propeller support part 21 is provided with a positioning and fixing mechanism
  • at least one of the propeller head connection part 13 and the split propeller connection part 22 is provided with a limiting mechanism.
  • the propeller head connecting part 13 is provided with a first limiting block 133
  • the split propeller connecting part 22 is provided with a second limiting block 224.
  • the first limiting block 133 and the second limiting block 224 are located in the up and down direction.
  • the lower end surface of the first limiting block 133 contacts the lower end surface of the second limiting block 224, limiting the vertical movement range of the propeller head 1 and the split propeller 2, not only Position the subsequent connection between the paddle head 1 and the split paddle 2 to improve the efficiency of the connection.
  • the split paddle 2 carrying the boat holder or/and the quartz boat lower the paddle head 1 and the split paddle 2 to bond or The load connected to the card slot plays a certain role.
  • Embodiment 6 is a diagrammatic representation of Embodiment 6
  • the difference between this embodiment and the above-mentioned embodiment is that the thickness of the split paddle 2 in this embodiment is different.
  • the split propeller 2 close to the propeller head 1 is used as the front split propeller, and the split propeller 2 far away from the propeller head 1 is used as the end split propeller.
  • the split propeller from the head end to the end split propeller is The direction of the body propeller is the positive x direction.
  • the thickness of the split propeller 2 gradually decreases along the positive x direction, which gradually reduces the weight of the split propeller 2, thereby reducing the deformation amount of the end split propeller and reducing the impact on the rear end of the furnace tube. space requirements to increase the production capacity of furnace tubes of the same size.
  • the propeller head 1 of a single propeller and the split propeller 2 are made of the same material, so the weight of the split propeller 2 can also be quantified by the thickness of the split propeller 2 .
  • Embodiment 7 is a diagrammatic representation of Embodiment 7:
  • Embodiment 6 the difference between this embodiment and Embodiment 6 is that in Embodiment 6, the split propeller 2 is along the positive x direction, and its thickness gradually decreases, while in this embodiment, the split propeller 2 is along the positive x direction. , its height gradually decreases.
  • the split paddle in the above embodiment can be used as a single paddle structure, and the bottom of the boat holder or/and the quartz boat supports the boat holder or/and the quartz boat; the split paddle can also be used as a multi-paddle structure, with the boat holder or/and the quartz boat supported at the bottom. The bottom or/and side of the boat supports the boat holder or/and the quartz boat.
  • the paddle head support part 12 of the paddle head 1 or/and the split paddle support part 21 of the split paddle 2 are provided with partitions or/and grooves.
  • the partitions are used to isolate adjacent boat supports or/and quartz boats.
  • the groove is used to position and install the boat holder or/and quartz boat.
  • the split propeller is made of high-temperature-resistant and pressure-resistant materials, and optionally quartz or silicon carbide materials.
  • each split paddle 2 of the paddle body can be reduced in steps, or the thickness or/and height of at least one split paddle 2 can be changed to achieve the weight of the end split paddle. Compared with the weight of the adjacent and previous split propellers.

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Abstract

本申请公开了一种桨结构包括桨头和桨体，桨头和桨体可拆卸连接，桨体包括至少一件分体桨。

Description

一种桨结构
本申请要求在2022年06月02日提交中国专利局、申请号为202221374016.5的中国专利申请的优先权，该申请的全部内容通过引用结合在本申请中。
技术领域
本申请属于光伏设备领域，例如涉及一种桨结构。
背景技术
随着光伏行业的发展，对加大电池产能提出了更大需求，因此对于单炉管内硅片的数量要求越来越高，炉管的长度也不断加长。
桨用于承载舟，广泛应用于扩散、镀膜等工艺设备。随着炉管的长度加大，桨的长度不断加长。相关技术中，桨的加工难度增大，而且桨体发生损坏时需要整体更换桨体，制造及维修成本高。
发明内容
本申请提供一种桨结构，能够在桨头或桨体发生损坏时，无需更换整体，仅需更换部件，降低了桨的制造成本及维护成本。
本申请提供一种桨结构,包括桨头和桨体，桨头和桨体可拆卸连接，桨体包括至少一件分体桨。
附图说明
图1为本申请实施例一中分体式桨的示意图；
图2为本申请实施例二中分体式桨的示意图；
图3为本申请实施例三中分体式桨的示意图；
图4为本申请实施例四中分体式桨的示意图；
图5为本申请实施例五中桨的示意图；
图6为本申请实施例五中桨头的示意图；
图7为本申请实施例五中桨体的示意图；
图8为本申请实施例六中桨的示意图；
图9为本申请实施例七中桨的示意图。
图中标识：
1、桨头；11、桨头固定部；12、桨头支撑部；13、桨头连接部；121、穿槽；131、桨头卡槽；132、桨头卡条；133、第一限位块；
2、分体桨；21、分体桨支撑部；22、分体桨连接部；221、连接条；222、连接槽；223、分体桨卡条；224、第二限位块；20、第一分体桨；23、第二分体桨。
具体实施方式
以下通过实例说明本申请的实施方式，本领域技术人员可由本说明书所揭露的内容了解本申请的其他优点与功效。本申请还可以通过另外不同的具体实施方式加以实施或应用，本说明书中的细节也可以基于不同观点与应用，在没有背离本申请的情况下进行修饰或改变。需说明的是，在不冲突的情况下，以下实施例及实施例中的特征可以相互组合。
需要说明的是，以下实施例中所提供的图示仅以示意方式说明本申请的基本构想，遂图中仅显示与本申请中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制，其实际实施时各组件的型态、数量及比例可为一种随意的改变，且其组件布局型态也可能更为复杂。
本申请实施例中的方向性指示(诸如上、下、左、右、前、后、横向、纵向等)仅用于解释在一特定姿态下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变，则该方向性指示也随之改变。
因安装误差等原因，本申请实施例中所指的平行关系可能实际为近似平行关系，垂直关系可能实际为近似垂直关系。
相关技术中，桨多为一体式桨，一体式桨存在加工困难，对模具和加工条件要求过高的问题，且桨一旦成型，无法兼容不同尺寸的炉管，兼容性差。另外，桨的长度越长，远离悬臂端的桨产生的形变量越大，因而存在对炉管空间要求过高的问题。
实施例一：
如图1所示，本实施例提供了一种桨结构，包括桨头1和桨体，桨头1和桨体可拆卸连接。
桨头1包括桨头固定部11、桨头支撑部12和桨头连接部13，桨头固定部11与控制桨的设备连接，桨头支撑部12用于支撑舟托或/和石英舟，桨头支撑 部12设置有多个穿槽121，在保证桨头1的承重要求下，通过穿槽121可尽可能的减少了桨头1的自重，同时减少炉管内对扩散气体的阻碍，保证更好的扩散效果。
本实施例将桨体的长度方向(即炉管的长度方向)设为x方向，桨体沿x方向的正方向可拆卸连接在桨头1，将桨体的厚度方向设为y方向，将桨体的高度方向设为z方向。
在桨体包括一件分体桨2的情况下，分体桨2可以是第一分体桨20，分体桨2包括分体桨支撑部21和分体桨连接部22，分体桨支撑部21设置有多个穿槽121，在保证分体桨2的承重要求下，穿槽121尽可能的减少了分体桨2的自重，同时减少炉管内对扩散气体的阻碍，保证更好的扩散效果。
桨头连接部13和分体桨连接部22固定连接，使桨头1与分体桨2连接，本实施例的固定连接为粘接，如焊接、胶粘等，一旦桨头1或/和桨体发生损坏时，无需更换整体，只要解除桨头1与分体桨2的连接关系，将损坏的部件进行更换即可，更换简单，大大降低了制造成本及维护成本。
不同尺寸的炉管可采用不同长度的分体桨2与桨头1连接，从而实现通过同一桨头1和不同长度的分体桨2的连接兼容不同尺寸的炉管。
实施例二：
如图2所示，本实施例与实施例一的区别在于，实施例一中，桨体包括一件分体桨2，本实施例中，桨体包括多个分体桨2，分体桨2可以包括第一分体桨20和除第一分体桨20外的其他分体桨(即，第二分体桨23)。分体桨2包括分体桨支撑部21和分体桨连接部22，分体桨连接部22设有一组，一组分体桨连接部22位于分体桨支撑部21的两端，第二分体桨23中，分体桨连接部22与相邻分体桨2的分体桨连接部22固定连接，桨头连接部13和第一分体桨20的分体桨连接部22固定连接，使桨头1和分体桨2以及相邻分体桨2连接，本实施例的固定连接为粘接，如焊接、胶粘等。
多个分体桨2的厚度可相同，也可不同，如多个分体桨2的厚度可依次递减，使远离桨头1的分体桨2的厚度最薄。可选的，远离桨头1的分体桨2可设置较宽厚度，实际的数值可根据实际需要进行设定，通过减轻远离桨头1的分体桨2的重量，从而减小分体桨2的形变量，降低对炉管尾端空间的要求，提升同尺寸炉管的产能。
分体桨2的数量可根据炉管的尺寸进行设定，不同数量的分体桨2构成不同长度的桨，不同长度的桨兼容不同尺寸的炉管，从而通过同一桨头1和多个分体桨2可兼容不同尺寸的炉管。
实施例三：
如图3所示，本实施例与上述实施例的区别在于，上述实施例中，相邻分体桨2的分体桨连接部22和桨头连接部13至少之一与分体桨连接部22可以采用粘接，即，第一分体桨20与桨头1粘接，除第一分体桨20外的其他分体桨2(即，第二分体桨23)与相邻分体桨2粘接；或者，本实施例中相邻分体桨2的分体桨连接部22和桨头连接部13的至少之一与分体桨连接部22可以采用卡槽连接，即，第一分体桨20与桨头1卡槽连接，第二分体桨23与相邻分体桨2卡槽连接。
桨头1的桨头连接部13设置桨头卡槽131，分体桨2第一端的分体桨连接部22设置连接条221，分体桨2第二端的分体桨连接部22设置连接槽222，第一分体桨20的连接条221插入桨头1的桨头卡槽131，相邻分体桨2的连接条221插入第一分体桨20的连接槽222，从而实现第一分体桨20与桨头1的连接以及相邻分体桨2的连接。
实施例四：
如图4所示，本实施例与实施例一、二的区别在于，上述实施例中，相邻分体桨2的分体桨连接部22和桨头连接部13至少之一与分体桨连接部22可以采用粘接，即，第一分体桨20与桨头1粘接，除第一分体桨20外的其他分体桨2(即，第二分体桨23)与相邻分体桨2粘接；或者，本实施例中相邻分体桨2的分体桨连接部22和桨头连接部13至少之一与分体桨连接部22可以采用卡槽连接，即，第一分体桨20与桨头1卡槽连接，第二分体桨23与相邻分体桨2卡槽连接。
桨头1的桨头连接部13设置桨头卡条132，分体桨2第一端的分体桨连接部22设置分体桨卡槽，分体桨2第二端的分体桨连接部22设置分体桨卡条223，桨头1的桨头卡条132插入第一分体桨20的分体桨卡槽，第一分体桨20的分体桨卡条223插入相邻分体桨2的分体桨卡槽，从而实现第一分体桨20与桨头1的连接以及相邻分体桨2的连接。
实施例五：
如图5-7所示，本实施例与上述实施例的区别在于，本实施例中桨头1和分体桨2的连接位置设置限位机构。可选的，桨头支撑部12和分体桨支撑部21至少之一设置定位固定机构，桨头连接部13和分体桨连接部22至少之一设置限位机构。在一实施例中，桨头连接部13设置第一限位块133,分体桨连接部22设置第二限位块224，第一限位块133和第二限位块224位于上下方向，桨头1和分体桨2装配过程中，第一限位块133的下端面与第二限位块224的 下端面接触，限定桨头1和分体桨2竖直方向的移动范围，不仅对桨头1和分体桨2后续的连接进行定位，提高连接的效率，同时在分体桨2承载舟托或/和石英舟过程中，对降低桨头1和分体桨2粘接或卡槽连接的负载起到一定的作用。
实施例六：
如图8所示，本实施例与上述实施例的区别在于，本实施例中分体桨2的厚度不同。
本实施例将靠近桨头1的分体桨2作为首端分体桨，将远离桨头1的分体桨2作为末端分体桨，如图8所示，首端分体桨至末端分体桨的方向为x正方向，分体桨2沿x正方向，其厚度逐渐减小，使分体桨2的重量逐渐减少，从而减少末端分体桨的形变量，降低对炉管尾端空间的要求，提升同尺寸炉管的产能。
一般情况下，一件桨的桨头1和分体桨2采用相同材质，因此分体桨2的重量大小也可通过分体桨2的厚度进行量化。
实施例七：
如图9所示，本实施例与实施例六的区别在于，实施例六中分体桨2沿x正方向，其厚度逐渐减小，而本实施例中，分体桨2沿x正方向，其高度逐渐减小。
上述实施例的分体式桨可作为单桨结构，在舟托或/和石英舟的底部承托舟托或/和石英舟；分体式桨还可以作为多桨结构，在舟托或/和石英舟的底部或/和侧部承托舟托或/和石英舟。
上述实施例中桨头1的桨头支撑部12或/和分体桨2的分体桨支撑部21设置隔板或/和凹槽，隔板用于隔离相邻舟托或/和石英舟，凹槽用于定位安装舟托或/和石英舟。
上述实施例中分体式桨采用耐高温、抗压材料，可选采用石英或碳化硅材料。
在其他实施例中，桨体的各分体桨2的厚度或/和高度可阶梯减小，或其中至少一个分体桨2的厚度或/和高度发生改变，能实现末端分体桨的重量相较于相邻以及之前分体桨的重量即可。

Claims (12)

  1. 一种桨结构,包括：桨头和桨体，所述桨头和所述桨体可拆卸连接，所述桨体包括至少一件分体桨。
  2. 根据权利要求1所述的桨结构，其中，所述桨头包括：桨头固定部、桨头支撑部和桨头连接部，所述桨头固定部与控制桨的设备连接，所述桨头连接部与所述分体桨连接。
  3. 根据权利要求2所述的桨结构，其中，所述分体桨包括分体桨支撑部和分体桨连接部，所述分体桨包括第一分体桨，所述第一分体桨的分体桨连接部与所述桨头连接部连接。
  4. 根据权利要求3所述的桨结构，其中，所述分体桨设有多个，所述多个分体桨包括所述第一分体桨和第二分体桨；
    所述第二分体桨中，所述分体桨连接部与相邻分体桨的分体桨连接部连接。
  5. 根据权利要求1-4任一所述的桨结构，其中，所述分体桨的厚度和高度至少之一不同。
  6. 根据权利要求3所述的桨结构，其中，所述第一分体桨与所述桨头粘接。
  7. 根据权利要求4所述的桨结构，其中，第二分体桨与相邻分体桨粘接。
  8. 根据权利要求3所述的桨结构，其中，所述第一分体桨与所述桨头卡槽连接。
  9. 根据权利要求4所述的桨结构，其中，第二分体桨与相邻分体桨卡槽连接。
  10. 根据权利要求8所述的桨结构，其中，所述桨头连接部设置桨头卡槽或卡条，所述第一分体桨的分体桨连接部设有与桨头连接部配合的卡条或卡槽。
  11. 根据权利要求3所述的桨结构，其中，所述桨头支撑部和分体桨支撑部至少之一设置多个穿槽。
  12. 根据权利要求3所述的桨结构，其中，所述桨头支撑部和所述分体桨支撑部至少之一设置定位固定机构，所述桨头连接部和所述分体桨连接部至少之一设置限位机构。
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US3705714A (en) * 1971-05-20 1972-12-12 Norton Co Silicon nitride kiln furniture
US4516897A (en) * 1983-05-23 1985-05-14 Berkeley Glasslab Cantilever paddle for use with wafer boats
US4761134A (en) * 1987-03-30 1988-08-02 Norton Company Silicon carbide diffusion furnace components with an impervious coating thereon
US4761134B1 (en) * 1987-03-30 1993-11-16 Silicon carbide diffusion furnace components with an impervious coating thereon
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