Classifications

• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
  • H02K33/12—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with armatures moving in alternate directions by alternate energisation of two coil systems
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
  • H02K41/02—Linear motors; Sectional motors
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
  • H02K41/02—Linear motors; Sectional motors
  • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
  • H02K41/02—Linear motors; Sectional motors
  • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
  • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
  • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information

Definitions

• the disclosed technology relates to a moving magnet type electromagnetic device in which a field moves relative to an armature coil.
• JP-A-2003-209963 describes a linear motor having field poles having a Halbach array structure.
• a first main magnetic pole is arranged at both ends of a yoke of a field pole that moves relative to the armature
• a second main magnetic pole is arranged at a position other than both ends of the yoke
• the first main magnetic pole and A first sub magnetic pole is arranged between the two main magnetic poles
• a second sub magnetic pole is arranged between the second main magnetic poles.
• the width of the first main magnetic pole is narrower than the width of the second main magnetic pole, and the width of the first sub-magnetic pole is wider than the width of the second sub-magnetic pole.
• the present invention has been made in view of the above facts, and an object of the present invention is to provide an electromagnetic device that can effectively suppress thrust ripples caused by end effects.
• a first aspect of the electromagnetic device for achieving the above object is a movable body that is relatively moved in the longitudinal direction of a long fixed body, with one period of magnetic poles using an integer of 3 or more as the number of divisions n.
• the magnetization direction is sequentially changed by an angle obtained by dividing one period of the corresponding electrical angle by the division number n, so that the length becomes a natural number times the length of one period of the electrical angle along the moving direction of the moving body.
• a field part in which a plurality of permanent magnets are arranged, and a plurality of sets of armature coils provided on the fixed body, each set of which corresponds to the number of phases, are arranged in the longitudinal direction of the fixed body within the movement range of the movable body. and an armature section that is arranged such that power is supplied so that the same current flows through each of the armature coils that are in the same phase.
• the movable body is moved relative to the fixed body.
• a disclosure section is arranged on the moving body.
• the magnetization direction is sequentially changed by an angle obtained by dividing one period of electrical angle corresponding to one period of the magnetic pole by the number of divisions n, using one of the integers of 3 or more as the number of divisions n.
• a plurality of permanent magnets are arranged so that the length is a natural number multiple (an integral multiple of 1 or more) of the length of one period of electrical angle (one period of magnetic pole) along the moving direction.
• An armature section is disposed on the fixed body, and the armature section has multiple sets of armature coils arranged in the longitudinal direction of the fixed body within the movement range of the moving body. has been done.
• the armature coils are arranged throughout the movement range of the field part that moves with the moving body, and by supplying the required AC power to the multi-phase armature coils, the armature coils and the field The movable body can be moved together with the field part by the thrust generated between the magnetic part and the magnetic part.
• the same current flows through the armature coils of each phase.
• armature coils of the same phase may be connected in series, and power may be supplied so that the same current flows between the armature coils of the same phase.
• one period of electrical angle corresponds to one period of magnetic pole, where n is an integer of 3 or more.
• a plurality of permanent magnets are arranged so that the magnetization direction is sequentially changed by an angle obtained by dividing the number n by the division number n, and the length is a natural number times the length of one period of electrical angle along the moving direction of the moving body.
• a plurality of sets of armature coils arranged in the longitudinal direction of the fixed body within the movement range of the movable body, the armature coils being arranged in the fixed body and each set corresponding to the number of phases.
• the electromagnetic device of the third aspect supplies power to each of the armature coils in the first aspect so that the same current flows between the armature coils of the same phase when moving the moving body. Includes power supply.
• the power feeding unit is configured to transmit the electric power to the electric motor in the same phase with respect to the armature coil in a range interlinked with magnetic flux by the field unit of the moving body. It includes supplying power so that the same current flows through each of the child coils.
• the power feeding section has a length ranging from each end of the array of permanent magnets to a half period with respect to one period of the magnetic poles.
• the method includes supplying power to the armature coils so that the same current flows through each of the armature coils having the same phase.
• the electromagnetic device in the fourth or fifth aspect, includes a detection means that is provided on the fixed body facing the field part and detects magnetic flux to detect the arrangement of the permanent magnets. , the power supply unit supplies power to the armature coil according to a detection result of the detection means.
• the length Lc of the arrangement of the armature coils is equal to the length Lm of one period of the magnetic poles of the permanent magnet. Including what is considered to be a natural number multiple.
• the length of the array of the armature coils in the armature section is the length of the array of one set of the armature coils. This includes the fact that it is a natural number multiple of Lc.
• the field section includes a first magnet array and a second magnet array, each of which has the plurality of permanent magnets arranged therein. , the first magnet array and the second magnet array are opposed to each other with the armature coil in between so that the magnetic fields formed by each other strengthen each other.
• the armature section includes a plurality of the armature coils on a side opposite to the field section of the armature coil.
• the ferromagnetic material is arranged in the arrangement range of .
• the electromagnetic device has the effect that the thrust ripple caused by the end effect can be suppressed by the current flowing through the armature coil, thereby effectively suppressing the thrust ripple caused by the end effect.
• FIG. 1 is a schematic configuration diagram of main parts of an example of an electromagnetic device according to the present embodiment.
• 1A is a schematic configuration diagram showing a magnetic flux density distribution in the electromagnetic device of FIG. 1A.
• FIG. 1A is a schematic configuration diagram showing main parts and magnetic flux density distribution of an electromagnetic device in which a Halbach magnet array is applied to the electromagnetic device of FIG. 1A.
• FIG. FIG. 2 is a diagram schematically showing changes in magnetic flux density with respect to the position of a magnet array for one period of magnetic poles.
• 1A is a diagram illustrating an example of a change in voltage due to a back electromotive force in the electromagnetic device of FIG. 1A.
• FIG. 1A is a diagram showing an example of torque change in the electromagnetic device of FIG. 1A.
• FIG. 1 is a perspective view schematically showing a conveying device according to a first embodiment.
• FIG. 3 is a longitudinal cross-sectional view showing the main parts of the conveyance device.
• FIG. 3 is a cross-sectional view of the main part of the conveyance device when viewed in the width direction.
• FIG. 2 is a block diagram showing a schematic configuration of the main parts of the drive device.
• FIG. 2 is a block diagram showing a schematic configuration of an electrical angle detection section.
• FIG. 2 is a block diagram showing a schematic configuration of a coil excitation section. It is a perspective view showing an outline of a vibrating device concerning a 2nd example.
• FIG. 2 is a longitudinal cross-sectional view showing the main parts of the vibration excitation device.
• FIG. 2 is a plan view of the main parts of the vibration device.
• the electromagnetic device is applied with AC power of two or more phases.
• the electromagnetic device includes a field part in which a plurality of permanent magnets are arranged, and an armature part in which armature coils of the number of phases corresponding to AC power are arranged.
• an armature part is placed on a fixed body and a field part is placed on a moving body.
• the length of the coil array has been increased.
• An electromagnetic device functions as a drive source that moves a moving body (moves in one direction or reciprocates) by a thrust generated between an armature coil and a permanent magnet within the length of an array of armature coils.
• the electromagnetic device can function as a power generation device that generates power in the armature coil when the moving body is moved.
• an electromagnetic device that functions as a drive source in various moving devices will be described as an example.
• the term "identical” includes not only the same shape, size, numerical value, or change in numerical value, but also the range in which the shape, size, numerical value, or change in numerical value, etc. can be considered to be similar. , will be explained as being similar including being the same.
• FIG. 1A and 1B show the main parts of the electromagnetic device 10 according to the present embodiment in a schematic configuration diagram
• FIG. 2 shows the main parts of the electromagnetic device 12 corresponding to the electromagnetic device 10 in a schematic diagram. is shown.
• the direction in which the permanent magnets and armature coils are arranged is defined as the thrust direction
• the thrust direction also referred to as the movement direction
• FIG. 1B shows the distribution of magnetic lines of force (magnetic flux density distribution) in the electromagnetic device 10
• FIG. 2 shows the distribution of magnetic lines of force (magnetic flux density distribution) in the electromagnetic device 12.
• the electromagnetic device 10 includes an armature section 14 disposed on a fixed body, and a field section 16 disposed on a movable body facing the armature section 14.
• armature coils hereinafter referred to as coils
• permanent magnets 20 are arranged in the field section 16 and the coils 18 and the permanent magnets 20 are arranged as follows. Each is arranged along the thrust direction.
• the length of the armature section 14 along the thrust direction (the total length of the array of the coils 18) is longer than the length of the field section 16 (the total length of the array of the permanent magnets 20). .
• the field section 16 is relatively moved along the arrangement direction (thrust direction) of the plurality of coils 18 within the range of the arrangement of the plurality of coils 18 in the armature section 14.
• the direction in which the plurality of coils 18 are arranged which is the thrust direction, is not limited to the direction along a plane, but may also include the direction along an arcuate curved surface. will be explained as a direction along a plane.
• the permanent magnets 20 of the field section 16 each have the same outer diameter shape (size), and have a cross-sectional shape cut along the thrust direction and the vertical direction (direction intersecting the plane along the thrust direction, vertical direction in the paper). (hereinafter simply referred to as cross-sectional shape) are considered to be the same.
• the permanent magnet 20 has a rectangular cross-sectional shape. Note that in the following description, "similar” includes shapes, sizes, etc. that are the same and can be considered to be the same.
• the permanent magnet 20 is not limited to a rectangular cross-sectional shape, but may have a similar shape among a plurality of permanent magnets 20, for example, an isosceles triangular shape, etc. Shapes such as triangular, trapezoidal, fan-shaped, circular, etc. may be applied.
• a Halbach magnet arrangement is applied to the arrangement of the permanent magnets 20.
• the division number n is an integer greater than or equal to 3
• permanent magnets 20 whose magnetization directions are changed by a set angle ⁇ are sequentially arranged. Note that the magnetization direction is a direction from the S pole to the N pole inside the permanent magnet 20 (inside the cross section) (the direction shown by the arrow in each permanent magnet 20 in FIG. 1A).
• the length of one magnetic pole period corresponding to the period is defined as a length Lm, and a magnet array 22 is formed by arranging 12 permanent magnets 20A to 20L in order within the range of length Lm.
• the field section 16 may be formed by arranging one or more magnet arrays 22 so that the overall length in the array direction is a natural number multiple (an integer multiple of 1 or more) of the length Lc. good.
• the magnetic field on one side in the direction intersecting the arrangement direction of the permanent magnets 20 is suppressed (weakened) due to the Halbach magnet arrangement, and the magnetic field on the other side is smaller than the magnetic field on one side. be strengthened.
• the side where the magnetic field is strengthened is the armature section 14 side.
• multiple phases of power are used as the AC power, and the number of phases of the AC power can be two or three phases or more.
• three-phase AC power is applied, for example.
• a plurality of coil arrays 24 are arranged in the armature section 14, each having a set of coils 18 for each phase (a U-phase coil 18U, a V-phase coil 18V, and a W-phase coil 18W).
• Each coil 18 uses a litz wire for winding, and each coil 18 has an air core (it is sufficient if it is magnetically air cored).
• each coil 18 (18U, 18V, 18W) is arranged at a required gap interval, and a plurality of coil arrays 24 are arranged along the thrust direction and arranged on the support body 26.
• the length of one electrical angle period corresponding to the length of one set of coils 18U to 18W (coil array 24) is set to Lc.
• the length Lc of one electrical angle period is the length (distance) of each gap intermediate position between the coil array 24 and the coil arrays 24 on both sides of this coil array 24, and the length Lc of the gap between the coil 18W and the coil 18U. The length is from the center position to the center position of the gap between the next coil 18W and coil 18U.
• the electromagnetic device 12 corresponds to the electromagnetic device 10, and the electromagnetic device 12 includes an armature section 14 and a field section 28 facing the armature section 14.
• the field section 28 a plurality of sets are arranged along the thrust direction, with one set being a magnet array (corresponding to the magnet array 22) of permanent magnets 20A to 20L whose magnetization directions are shifted by a predetermined setting angle ⁇ . ing.
• the field section 28 uses a general Halbach array field that is longer than the field section 16.
• the field section 28 focusing on a set of permanent magnets 20A to 20L and a permanent magnet 20A adjacent to the permanent magnet 20L, the intermediate position of one permanent magnet 20A and the intermediate position of the other permanent magnet 20A in this arrangement are determined.
• the distance (length) becomes the length Lm of one period of the magnetic pole.
• the field section 28 becomes a Halbach magnet array in which the number of interlinked magnetic fluxes interlinking with the coil 18 changes sinusoidally within the range of each magnet array 30. Therefore, the field section 28, which is provided with a plurality of arrays of permanent magnets 20A to 20L (corresponding to the magnet array 22), is configured with a plurality of magnet arrays 30 arranged.
• FIG. 1B shows a field section 16A in which the magnet array 22 of the field section 16 is replaced with a magnet array 30 in the electromagnetic device 10.
• the length of one magnetic pole period becomes Lm. That's what I do.
• the magnetic flux density distribution around the permanent magnets 20A at both ends of the magnet arrangement 30 in the arrangement direction is the same as that of the magnet when applied to the Halbach magnet arrangement (field section 28).
• the magnetic flux density distribution at both ends of the array 30 in the array direction is different.
• the difference in magnetic flux density distribution at both ends of the magnet arrangement 30 in the arrangement direction causes an end effect in the electromagnetic device 10.
• the magnetic flux density distribution between the two magnet arrays 30 is similar to that of the Halbach magnet array (the magnet array 30 in the field section 28) based on the superposition theorem of electromagnetism. Become.
• the back electromotive force generated in the coil 18U changes sinusoidally due to the magnetic flux density distribution of one period of magnetic poles of the magnet array 30.
• the voltage between the winding start and winding end of the coil 18U depends on the vector sum of the magnetic fluxes of one period of the magnetic poles of the magnet array 30.
• the magnetic flux of the permanent magnet 20A at one end of the magnet array 30 interlinks with the coil 18U of the coil array 24 facing the magnet array 30, and the other end of the magnet array 30
• the magnetic flux of the permanent magnet 20A at the end of is linked to the coil 18U of the coil array 24 adjacent to the coil array 24 facing the magnet array 30.
• the sum of the number of magnetic fluxes interlinked to two coils 18U by the magnet arrangement 30 is the sum of the magnetic flux interlinkages interlinked to one coil 18U by one magnet arrangement 30 in the field section 28. It is the same as the number. Therefore, in the field section 16A, the sum of the voltages generated in the two coils 18U whose magnetic fluxes are interlinked by the magnet array 30 is equal to is equal to the voltage generated at
• FIGS. 1A and 1B From here, as shown in FIGS. 1A and 1B, in the electromagnetic device 10, a plurality of coils 18U are electrically connected in series (indicated by broken lines in FIGS. 1A and 1B) along the thrust direction (arrangement direction). There is. As a result, in the field section 16A (the same applies to the field section 16), in the plurality of coils 18U, the connection points between adjacent coils 18U have the same potential.
• the magnet array 22 (magnet array 30) of the electromagnetic device 10 can suppress the occurrence of end effects in the U-phase coil 18U, similar to the magnet array 30 in the field section 28 to which the Halbach magnet array is applied.
• the effect of the magnet array 30 of the field section 16A is similarly achieved in the magnet array 22 of the field section 16. Furthermore, the above configuration that is valid for the coil 18U of one phase can be similarly applied to the configuration of the coils 18V and 18W of the other phases, and the end effect also occurs in the coil 18V of the V phase and the coil 18W of the W phase. can be suppressed.
• the same current flows between the coils 18 of the same phase.
• the coils 18 of the same phase By allowing the coils 18 of the same phase to flow so that it can be considered that the coils 18 are electrically connected in series, it is possible to suppress the occurrence of end effects.
• the length of the field section 16 is an integral multiple (positive integral multiple) of the length Lm
• the length of the armature section 14 is an integral multiple (positive integral multiple) of the length Lc
• FIG. 3A shows an outline of the change in magnetic flux density By along the approach and separation direction of the magnet array on the surface of the coil 18 on the magnet array side for the magnet array for one period of the magnetic pole (corresponding to the magnet array 22) shown in FIG. 1B. is shown in the diagram.
• the horizontal axis (x-axis) is the position of the coil 18 on the magnet array side (relative position to the magnet array)
• the vertical axis (y-axis) is the direction from the coil 18 toward the magnet array. .
• the magnetic flux density becomes large at the center and at both ends in the arrangement direction.
• leakage magnetic flux is generated in the range from position ⁇ to position 2 ⁇ , which is away from the end of the magnet array, and in the range from position - ⁇ to position -2 ⁇ , and the magnetic flux density is 0 [ T] is not indicated.
• this leakage magnetic flux is one of the causes of the end effect.
• FIG. 3B in the electromagnetic device 10, a change in the back electromotive force generated in the coil 18 by the magnet array 22 (the same applies to the magnet array 30) for one period of magnetic poles is shown as a voltage change in a line diagram.
• FIG. 3C shows a diagram of the change in torque (thrust torque) generated between the magnet array 22 and the coil 18.
• the horizontal axis is time (sec)
• the vertical axis in FIG. 3B is voltage (V)
• the vertical axis in FIG. 3C is torque (thrust torque) (N).
• 3B and 3C also show voltage changes and torque changes with respect to time when the magnet array 22 is moved relative to the coil 18 at a predetermined speed.
• a conveying device linear motor
• the electromagnetic device 10 as a drive source
• the direction of a moving magnetic field or The field section 16 moves in parallel.
• the number of magnetic flux linkages to one coil facing the Halbach array field changes sinusoidally due to relative movement between the coil and the field.
• the number of magnetic flux linkages in each coil 18 changes sinusoidally as the magnet array 22 moves relative to each other.
• the back electromotive force generated in the coil 18 also has a sine wave shape with harmonic components suppressed (does not include harmonic components).
• an excitation current having the same frequency as the sine wave of the inverse machine power generated in each coil 18 flows through the coil, so that an excitation current is generated between the magnet array 22 and the coil 18. It is possible to suppress ripples from occurring in thrust. Therefore, in the electromagnetic device 10, it is possible to suppress the occurrence of end effects, and it is possible to effectively suppress (occurrence of) thrust ripples caused by end effects.
• the effect of such an electromagnetic device 10 is that the length of the magnet array in the field section 16 is not limited to the length Lm of one magnetic pole period, but the length of the magnet array is a natural number times the length Lm of one magnetic pole period ( (an integral multiple of 1 or more). Further, the effect of the electromagnetic device 10 is that the arrangement length of the coils 18 in the armature section 14 is longer than the length of the magnet arrangement in the field section 16, and the arrangement length of one set of coils 18 in the armature section 14 is Lc. may be a natural number multiple (an integer multiple of 1 or more). Furthermore, the effect of the electromagnetic device 10 may be such that the length of the magnet arrangement in the field section 16 is an integral multiple of 1 or more of the arrangement length Lc of one set of coils 18 in the armature section 14 .
• FIG. 4A shows a schematic configuration diagram of the main parts of an electromagnetic device 50 according to the present embodiment
• FIG. 4B shows a schematic diagram of the main parts of an electromagnetic device 60 corresponding to the electromagnetic device 50. ing.
• the electromagnetic device 50 includes an armature section 52 disposed on a fixed body and a field section 54 disposed on a moving body.
• a field section 54A and a field section 54B are arranged as a pair with each other sandwiched therebetween.
• a magnet array 22 in which permanent magnets 20A to 20L are sequentially arranged is used in the field sections 54A and 54B, but the magnet array 30 is shown here to facilitate comparison with the electromagnetic device 60.
• the magnet array 30 of the field section 54A and the magnet array 30 of the field section 54B (hereinafter referred to as "magnet array 30" to simplify the explanation) are arranged so that the magnetic fields on the sides facing each other (on the armature section 52 side) are strengthened. It is located.
• the electromagnetic device 60 is provided with an armature section 52 and a field section 62, and the field section 62 has a field section 62A and a field section 62B. They are arranged in pairs with the two sides in between.
• the plurality of magnet arrays 22 of the field section 62A and the plurality of magnet arrays 22 of the field section 62B are arranged so that the magnetic fields on the sides facing each other (armature section 52 side) are strengthened.
• a plurality of magnet arrays 22 are used to form a dual Halbach magnet array, and in the field section 62, a plurality of magnets are arranged in each of the field sections 62A, 62.
• the configuration is similar to that in which the arrays 30 are arranged to form a dual Halbach array.
• the length of one magnetic pole period is Lm.
• the length of one electrical angle period of each coil array 24 (one set of coils 18U, 18V, 18W) in the armature portion 52 is set to Lc.
• the number of interlinked magnetic fluxes of the magnetic flux interlinked to one coil 18U by the pair of magnet arrays 30 changes in a sinusoidal manner, and the magnetic flux of one period of the magnetic poles of the pair of magnet arrays 30 changes in a sinusoidal manner.
• the back electromotive force generated in the coil 18U changes sinusoidally due to the density distribution.
• the magnetic flux of the permanent magnet 20A at one end of the pair of magnet arrays 30 is transferred to the coil array 24 that the pair of magnet arrays 30 face.
• the magnetic flux of the permanent magnet 20A at the other end of the pair of magnet arrays 30 interlinks with the coil 18U of the coil array 24 adjacent to the coil array 24 facing the pair of magnet arrays 30.
• a back electromotive force is generated in the coil 18U of the coil array 24 adjacent to the array 24.
• a plurality of coils 18 of the same phase are electrically connected between one side and the other side along the thrust direction. (indicated by a broken line in FIG. 4A). That is, in the electromagnetic device 50, a plurality of coils 18 arranged in the thrust direction in each phase are connected in series by connecting the winding end of the coil 18 to the winding start of the next in-phase coil 18.
• the electromagnetic device 50 for example, for the U phase, the sum of the number of magnetic fluxes intersecting in two coils 18U by a pair of magnet arrays 30 is chained to one coil 18U by a pair of magnet arrays 34 in the electromagnetic device 60.
• the number of intersecting magnetic fluxes is set to be the same as the number of intersecting magnetic fluxes.
• the sum of the voltages generated in the two coils 18U to which magnetic fluxes are interlinked by the pair of magnet arrays 30 is applied to one coil 18U to which the magnetic fluxes are interlinked by the pair of magnet arrays 30 in the electromagnetic device 60. It is made to be equal to the voltage generated.
• the same current (same current By allowing the coils 18 of the same phase to flow so that it can be considered that the coils 18 of the same phase are electrically connected in series, it is possible to suppress the occurrence of end effects.
• the electromagnetic device 50 by using the field section 54, a larger output can be obtained compared to the electromagnetic device 10.
• the mirror image method in an electric field can also be applied (holds true) in a magnetic field.
• a ferromagnetic material made of electromagnetic steel plate or the like is arranged opposite to the field section 16 so as to be at a required distance from the field section 16.
• a coil array 24 (coil 18) may be arranged between the ferromagnetic material. At this time, it is preferable that the ferromagnetic material is prevented from being exposed from the coil 18 when viewed from the field section 16 side.
• the field portion can be made simpler in structure and lighter in weight than the field portion 54 of the electromagnetic device 50, and a larger output can be obtained than in the electromagnetic device 10. .
• FIG. 5 shows a main part of the transport device 100 in a perspective view
• FIG. 6 shows a main part of the transport device 100 in a cross-sectional view as viewed in the longitudinal direction
• FIG. The main parts are shown in a cross-sectional view from the outside in the width direction.
• the width direction of the device is indicated by an arrow X
• the longitudinal direction (direction along the thrust direction) of the device is indicated by an arrow Y
• the upper side of the device in the vertical direction is indicated by an arrow Z.
• the transport device 100 includes a long track 102 and a transport platform (transport cart) 104.
• the track 102 includes a base 106 as a fixed body whose cross-sectional shape when viewed in the longitudinal direction is directed upward (substantially U-shaped), and floating guides 108 formed in pairs on both sides of the base 106 in the width direction. , and an armature section 110 disposed on the base 106.
• a pair of supporting parts 106B are arranged on both sides of the substrate 106A in the width direction, and the supporting parts 106B protrude upward from both ends of the substrate 106A in the width direction. Further, the protruding tip portion of the support portion 106B is further protruded upward in the device width direction, and a floating guide 108 having a substantially L-shaped cross section is formed at the upper end portion of the support portion 106B.
• the floating guide 108 has a first surface 108A facing upward and a second surface 108B facing inward in the width direction. A large number of ejection holes (not shown) are opened therein. Further, a conveyance table 104 is arranged so as to span between the floating guides 108 .
• the conveying device 100 compressed air is supplied from a compressor or the like (not shown), and the supplied compressed air is ejected from the ejection holes on the first surface 108A and the second surface 108B.
• the conveyance table 104 which is stretched over the floating guide 108, is floated and supported, and the conveyance table 104 is prevented from coming into contact with each other when it is moved along the track 102.
• the carrier 104 is not limited to air levitation, and may be movably supported on the first surface 108A via a rotating body such as a tire or a wheel.
• An armature section 110 is arranged on the base 106 between a pair of support sections 106B.
• a plurality of armature coils (coils) 112 are arranged on a long flat arrangement plate 110A arranged on the substrate 106A of the base 106.
• the plurality of coils 112 are arranged at predetermined intervals in the longitudinal direction of the arrangement plate 110A.
• the arrangement plate 110A is provided with a plurality of optical sensors 114 as position detection means and a plurality of Hall sensors 116 as position detection means and detection means (field detection means).
• the optical sensor 114 is arranged at one end in the width direction of the arrangement board 110A, and the Hall sensor 116 is arranged at the other end in the width direction of the arrangement board 110A.
• the optical sensor 114 and the hall sensor 116 are each attached between the coils 112 adjacent to each other in the longitudinal direction of the arrangement plate 110A, and each of the optical sensor 114 and the hall sensor 116 is attached in the longitudinal direction of the base 106.
• a plurality of transport tables 104 are arranged along the moving direction of the transport table 104.
• the optical sensor 114 detects the transport platform 104 on the track 102 based on whether light emitted from a light emitting section (not shown) is reflected and reaches a light receiving section. Further, a Hall element is used for the Hall sensor 116 , and the Hall sensor 116 detects magnetism emitted from the conveyance table 104 to detect a field portion 118 of the conveyance table 104 .
• the transfer device 100 uses three-phase AC power, and the coils 112 include a U-phase coil 112U, a V-phase coil 112V, and a W-phase coil 112U, each of which has an air core (magnetically air core).
• a coil of 112W is used.
• the coils 112U, 112V, and 112W are set as one set, and each set is arranged at predetermined gap intervals in the longitudinal direction of the track 102.
• the conveyance table 104 includes a rectangular underframe 120, and the conveyance table 104 is arranged such that the underframe 120 is spanned and supported between a pair of floating guides 108 and is movable along the track 102. Ru. Note that sliders 124 are arranged at the four corners of the underframe 120, and the underframe 120 is supported by floating as the sliders 124 receive air ejected from the jet holes of the floating guide 108.
• a field section 118 is arranged on the lower surface of the underframe 120.
• a plurality of permanent magnets 122 are arranged in the field section 118.
• the number of divisions n is an integer greater than or equal to 3
• one period of the magnetic pole corresponding to one period of electrical angle has a length Lm, and five permanent magnets 122A to 122E are sequentially arranged in the longitudinal direction of the orbit 102 within the range of length Lm. It is opposed to the coil 112.
• each of the coils 112 is excited, and the transport platform 104 is moved along the track 102 by the thrust generated between the armature section 110 (coil 112) and the field section 118 (permanent magnet 122). will be moved.
• the transport device 100 includes a drive device 126 as a power feeding section for exciting the coil 112. 8 to 10, main parts of the drive device 126 are shown in schematic configuration diagrams.
• the drive device 126 includes a field detection section 128 to which the Hall sensor 116 is connected, and an output signal of the field detection section 128 that determines the direction of the armature section 110 relative to the field N pole.
• the electrical angle detection unit 130 detects the electrical angle ⁇ of the U-phase coil 112U.
• the drive device 126 includes a vector control drive control section 132, and the vector control drive control section 132 controls the field section 118 (transfer platform 104) based on the electrical angle ⁇ detected by the electrical angle detection section 130.
• the current target values itu, itv, and itw of the coil 112 of each phase necessary for speed control and position control are calculated and output.
• the drive device 126 includes a coil excitation section 134, and a power supply device 136 that supplies power for exciting each of the coils 112 is connected to the coil excitation section 134.
• the coil excitation unit 134 excites the coils 112U, 112V, and 112W of each phase near the field unit 118 based on the current target values itu, itv, and itw of the coil 112 of each phase and the output of the field detection unit 128. do.
• the drive device 126 can make the current value (target current value) flowing through each of the coils 112 of the same phase the same for each phase, and can make it as if the coils 112 of the same phase are connected in series.
• the magnetization direction of the permanent magnet 122C at the center of the conveyance table 104 is directed downward.
• the origin position of the moving magnetic field generated by the coil 112 and the origin position of the conveyance table 104 are set. This makes it easy to adjust the origin to match.
• the field portion 118 has a length Lm corresponding to one period of the magnetic pole corresponding to one period of electrical angle.
• the drive device 126 selects each of the U-phase, V-phase, and W-phase based on the presence or absence of the conveyance table 104 detected by the optical sensor 114 and the accurate position of the field part 118 detected by the Hall sensor 116. , the two coils 112 closest to both ends of the field section 118 can be selected. Further, the drive device 126 controls the selected coil 112 so that it is excited with a similar (same) excitation current value (target current value).
• the drive device 126 controls the coil closest to both ends of each phase among the coils 112 facing the field section 118.
• the coils 112 other than 112 are also controlled to be excited with the same excitation current value as the coil 112 closest to both ends of each phase.
• the electrical angle detection unit 130 includes a plurality of output selectors 138, a plurality of output adjusters 140, an output calculator 142, and an electrical angle calculator 144.
• the output selector 138 associates each of the optical sensors 114 arranged in a direction perpendicular to the direction of movement of the transport platform 104 (arrow X direction) with each of the Hall sensors 116, for example, corresponds to the U-phase Hall sensor 116U. It outputs whether or not all three optical sensors 114, that is, the optical sensor 114 that moves and the optical sensors 114 on both sides thereof, are detecting the transport table 104.
• the output regulator 140 receives the output signals of the Hall sensors 116 (116U, 116V, 116W) of each phase and the output signal of the output selector 138, so that the Hall sensors 116 are inputted into the U-phase Hall sensors 116U in a predetermined order. , a V-phase Hall sensor 116, and a W-phase Hall sensor 116W.
• the output calculator 142 is provided for each phase (U-phase output calculator 142U, V-phase output calculator 142V, W-phase output calculator 142W), and outputs the output signal of the output adjuster 140 based on the output of the output selector 138. The sum is calculated for each phase.
• the electrical angle calculator 144 calculates the electrical angle ⁇ based on the output signals of the phase output calculators 142U to 142W of each phase.
• the output regulator 140 outputs a voltage proportional to the negative maximum voltage value to the positive maximum voltage in proportion to the magnetic flux density generated by a predetermined NS pole serving as a reference from the output signal of the Hall sensor 116. Note that when the detected magnetic flux density is zero, the output regulator 140 outputs zero volts.
• the coil excitation section 134 includes a plurality of excitation selectors 146 and a plurality of excitation devices 148.
• the excitation selector 146 is arranged on the center line of the coil 112 and carries optical sensors 114 arranged at the same pitch as the coil pitch, and optical sensors 114 arranged on both sides of the coil 112 corresponding to the optical sensors 114.
• a signal indicating whether or not the stand 104 is detected is output.
• the excitation device 148 is provided for each phase (excitation device 148U, 148V, 148W).
• the excitation devices 148U, 148V, and 148W for each phase are activated by the vector control drive control unit 132 when a signal indicating that each optical sensor 114 detects the conveyance platform 104 is input from the output signal of the excitation selector 146.
• An excitation current that matches the output current target values itu, itv, and itw of each phase is applied to the coil 112 of the corresponding phase.
• the excitation device 148 stops energizing the coil 112 of the corresponding phase. .
• the coil excitation unit 134 can excite only the coil 112 near the conveyance table 104, and the power consumption for exciting the coil 112 can be suppressed.
• the vector control drive control unit 132 controls the movement speed of the transport platform 104 to a preset speed. starts vector control and excites each coil 112.
• the magnetic pole of the moving magnetic field formed by exciting the coil 112 is controlled to have a strength corresponding to the moving speed of the field section 118.
• the electromagnetic force by the coil 112 is applied to the field section 118, and the transport table 104 starts floating.
• a back electromotive force is generated in each coil 112 due to the magnetic field formed by the field section 118 as the transport table 104 moves.
• the flux linkage of the magnetic fluxes interlinking to the two coils 112 facing the field section 118 in each phase becomes a sine wave component with the same amplitude and 120° phase shift. Therefore, when viewed from the three-phase power supply side, the back electromotive force generated in the coil 112 has a similar sine wave component, and the excitation current that flows due to the difference between the power supply voltage and the back electromotive force also has a sine wave component.
• the length along the arrangement direction of the permanent magnets 122 in the field section 118 is a natural number multiple (an integer multiple of 1 or more) of the length Lm of one period of magnetic poles, then the length of the permanent magnets 20 is The same current flows through the coils 112 near the ends on both sides in the moving direction as when the permanent magnets 122 continue for one cycle of the next magnetic pole.
• the drive device 126 detects the position of the conveyance table 104 on the track 102 using the optical sensor 114 and the Hall sensor 116, and detects the position of the conveyance table 104 on the track 102, and detects the coil 112 facing the conveyance table 104 and the coils before and after the conveyance direction. 112.
• the conveyance device 100 power can be supplied so that the same current flows to the coils 112 of the same phase in the coils 112 in the range where the magnetic fluxes of the permanent magnets 122 of the field section 118 interlink. Further, in the conveying device 100, power can be supplied so that the same current flows to the coils 112 of the same phase in the coils 112 within a range of half a period of the magnetic pole from each end of the arrangement of the permanent magnets 122. Thereby, the conveyance device 100 can effectively supply power so as to suppress end effects.
• the cargo placed on the transport table 104 does not collapse or get damaged due to vibrations, etc., and even semiconductor wafers, etc., which are easily broken by vibrations, etc., are not damaged. It can be transported without any problems. Further, in the transport device 100, since no thrust ripple occurs, the transport table 104 can be moved and stopped at the target position, and the transport table 104 can be moved with high precision.
• the transport platform 104 can be accelerated or decelerated according to the target value, and the transport device 100 can also be used as a vibration testing machine.
• the output calculator 142 of each phase calculates the phase difference between them. is 120°, and a sinusoidal voltage signal containing no harmonic components can be generated. Therefore, in the conveying device 100, since the electrical angle ⁇ is calculated with high accuracy in the electrical angle calculator 144, there is a gap between the excited coil 112 (armature section 110) and the permanent magnet 122 of the field section 118. , no electromagnetic force is generated that causes thrust ripple.
• FIG. 11 shows a main part of the vibration device 200 in a perspective view
• FIG. 12 shows a main part of the vibration device 200 in a cross-sectional view as viewed in the longitudinal direction
• FIG. The main parts of the shaking device 200 are shown in a plan view.
• the vibration device 200 includes a track 202 and a vibration cart (vibration table) 204.
• the track 202 includes a long flat base 206, a pair of left and right floating guides 208 are arranged on the upper surface of the base 206, and an armature section 210 is arranged between the floating guides 208.
• Each of the floating guides 208 has a guide portion 208B erected at one end in the width direction of a band-like base portion 208A, and the pair of floating guides 208 have sides opposite to the guide portion 208B facing each other at a predetermined interval. It is mounted on a base 206.
• the upper surface of the base portion 208A is a first surface 108A
• the inner surface in the width direction of the guide portion 208B is a second surface 108B.
• the armature section 210 includes a plurality of coils 212 (U-phase coil 212U, V-phase coil 212V, and W-phase coil 212W) that are excited by three-phase alternating current (AC power).
• the coil 212 is molded to have a substantially plate-like outer shape (molded coil).
• each coil 212 whose longitudinal direction is an up-down direction is connected in the width direction, and the armature portion 210 is shaped like a strip.
• the lower side of the coil 212 which is one side in the width direction, is fitted between the base portions 208A of the pair of floating guides 208. As a result, the armature section 210 is erected on the base 206.
• a vibration cart 204 as a moving body is arranged on a base 206.
• the vibration truck 204 includes a non-magnetic underframe 214, and the underframe 214 has a substantially box shape with open bottom and both sides in the longitudinal direction of the track 202.
• the lower part of the underframe 214 is arranged between the guide parts 208B of the pair of floating guides 208, with the armature part 210 inserted through the lower opening.
• a pair of sliders 218 are arranged on the underframe 214, and each slider 218 is shaped like a long block.
• the sliders 218 are arranged so as to sandwich the armature section 210, and each is attached to the lower end of the underframe 214, and each of the sliders 218 is opposed to the first surface 108A and the second surface 108B of the floating guide 208.
• the underframe 214 is floated and supported by the air ejected from the floating guide 208, and the vibration truck 204 moves along the track 202 while straddling the armature section 210 erected on the base 206. It is said that it can be moved without contact.
• a field section 220 is arranged inside the underframe 214.
• the field section 220 is provided with a pair of magnet arrays 224 each having a plurality of permanent magnets 222 arranged therein. attached to the inside.
• the initial angle of the arrangement of the permanent magnets 222 in the magnet arrangement 224 is 45°.
• eight permanent magnets 222A to 222H are arranged based on the set angle ⁇ and the initial angle, and are opposed to each other in the underframe 214 so that their magnetic fields strengthen each other.
• a non-magnetic, non-conductive partition wall 226 is fitted between adjacent permanent magnets 222 in each of the magnet arrays 224.
• the sum of the width dimension of the permanent magnets 222 along the arrangement direction and the width dimension (thickness dimension) of the partition wall 226 is 1/8 (8 minutes) of the length of one electrical angle period of the armature section 210. 1), and the thickness dimension of one partition wall 226 is set to 1/4 (1/4) of the width dimension of one permanent magnet 222.
• n the division number 8.
• the underframe 214 protrudes from both sides of each magnet array 224 by 1/2 of the thickness of the partition wall 226.
• a plurality of optical sensors 114 are arranged on one side of the track 202 in the width direction, and a plurality of Hall sensors 116 are arranged on the other side of the track 202 in the width direction.
• the optical sensor 114 is used to detect the position of the underframe 214 (vibration truck 204) with respect to the armature section 210, and the Hall sensor 116 is used to detect the magnetic pole position of the magnet array 224 attached to the underframe 214 with respect to the coil 212. Used for detection.
• the direction of the magnetic flux in the gap between the center lines is in the width direction of the track 202 (arrow X direction), and the center line of the vibration truck 204 and the center line of the magnet array 224 are aligned. , the north pole center line of the magnet array 224, and the south pole center line of the magnet array 224 coincide with each other.
• the center line of the vibration truck 204 is set at the center position of the U-phase coil 212U of the coils 212. The origin can be easily adjusted in the vibrating cart 204.
• the vibrating cart 204 has a length corresponding to two periods of magnetic poles of the magnetic flux density distribution of a pair of magnet arrays 224 when a plurality of magnet arrays 224 are arranged with the partition wall 226 in between.
• the selection of the coil 212 and the selected coil are based on the exact position of the magnet array 224 calculated based on the magnetic flux density detected by the Hall sensor 116 and the presence or absence of the vibrating cart 204 detected by the optical sensor 114.
• the excitation current value of 212 can be determined.
• the output regulator 140 corresponding to the Hall sensor 116 of each phase outputs a signal indicating whether or not any of the three optical sensors 114 corresponding to the output is detecting the excitation cart 204. It is sufficient that the excitation selector 146 outputs a signal indicating whether or not one of the optical sensors 114 at both ends of the coil 212 is detecting the excitation cart 204.
• the ratio of the number of field poles to the number of armature slots is 2:3, whereas in the vibration device 200, the ratio of the number of field poles to the number of armature slots is 2:3.
• the ratio is 4 to 3.
• the same drive control as in the transport device 100 can be performed by replacing the connection between the coils 212V and 212W and the connection between the Hall sensors 116V and 116W in the drive device 126.
• the vibration device 200 when the power is turned on, the drive device 126 starts operating by three-phase AC power supplied from the power supply device 136, and the vibration truck 204 starts floating.
• the vibration device 200 as the vibration cart 204 moves, a counter electromotive force is generated in the coil 212 due to the magnetic field generated by the magnet array 224, which is a dual Halbach array field.
• the partition wall 226 provided in the field section 220 will be explained.
• the electromagnetic force that acts between a magnet array (Halbach field array) with a length that is an integral multiple of one magnetic pole period and the three-phase coil facing it causes the Halbach array field to become longer in the magnetic flux density distribution.
• the electromagnetic force acting between the three-phase coils 212 arranged to face each other can be made equal to the electromagnetic force obtained by extracting an integral multiple of one period of the magnetic pole.
• the length of the magnet array 224 of the field section 220 is a natural number multiple (an integral multiple of 1 or more) of the length Lm of one period of the axial angle along the array direction of the permanent magnets 222. If there is, a current similar to that in the case where the permanent magnets 222 are continuous flows through the coils 212 near the ends on both sides of the field section 220 in the moving direction.
• the drive device 126 uses the optical sensor 114 and the Hall sensor 116 to detect the position of the vibration truck 204 on the track 202 and the magnetic pole of the field section 220, and moves the vibration truck 204 opposite to the vibration truck 204. Since power is supplied to the coil 212 that moves and the front and rear coils 212 in the transport direction, power can be effectively supplied. As a result, the vibration device 200 can achieve the same effect as the above-described transport device 100.
• the magnetic flux linkage of the magnetic flux that interlinks with the two coils 212 of each phase that are selectively excited is a sine wave (
• the thrust force electromagnétique force
• the excitation device 200 can accelerate and decelerate the excitation cart 204 according to the target value, and the excitation cart 204 can apply a desired excitation force to the vibrating test object with a simple configuration. I can do it.
• a smooth thrust acts on the vibration truck 204, and no vibration or noise is generated. Therefore, the vibration device 200 can be used both as a structure for transporting cargo and as a transport device for transporting fragile items (such as cargo) to a target point without causing collapse or damage to the cargo. can also be used.
• the electromagnetic device according to the present disclosure has been described using the conveying device 100 of the first embodiment and the vibration device 200 of the second embodiment as examples.
• the present disclosure can be applied to any type of magnet movable type in which the field part is moved relative to the armature part, and can also be applied to speakers etc. in which the diaphragm is vibrated by moving the field part (vibration movement). Applicable.
• the electromagnetic device according to the present invention can prevent end effects, it can be applied to various positioning devices, and by being applied to a positioning device, positioning can be performed with high precision.
• the electromagnetic device according to the present disclosure can be modified in various ways.
• the period length of the magnetic poles in the magnet arrangement forming the Halbach array field may be an integer (positive integer) times one period of the magnetic poles, and there is no problem with it being three or more period lengths.
• the permanent magnets constituting the array field were magnetized so that the N pole position on the side where the magnetic field of the Halbach array field was strengthened was at the center of the field. There is no problem in magnetizing the permanent magnet so that the S pole is located at an arbitrary position in the field.
• the arrangement of the permanent magnets is not limited to a straight line, but may be an arc or other curved shape, and although the permanent magnet shape is rectangular, this does not limit the cross-sectional shape of the permanent magnet in any way. It's not something.
• one period of electrical angle corresponding to one period of the magnetic pole is divided by the number of divisions n, with any integer of 3 or more being the number of divisions n.
• a field section in which a plurality of permanent magnets are arranged so that the magnetization direction is sequentially changed by the angle of the moving body, and the length is a natural number times the length of one period of electrical angle along the moving direction of the moving body;
• a plurality of sets of armature coils provided on the fixed body, each having a set corresponding to the number of phases, are arranged in the longitudinal direction of the fixed body within the moving range of the movable body, and each of the armature coils of the same phase an armature section that is powered so that the same current flows; electromagnetic devices, including
• one period of electrical angle corresponding to one period of the magnetic pole is divided by the number of divisions n, where any integer of 3 or more is the number of divisions n.
• a field section in which a plurality of permanent magnets are arranged so that the magnetization direction is sequentially changed by the angle divided by the angle, and the length is a natural number times the length of one period of electrical angle along the moving direction of the moving body;
• an armature section provided on the fixed body, in which a plurality of sets of armature coils each having a number of phases are arranged in a longitudinal direction of the fixed body within a movement range of the movable body;
• a power supply supplying power to each of the armature coils of the armature section so that the same current flows between the armature coils of the same phase when the movable body is moved by supplying power to each of the armature coils of the armature section.
• Department and including electromagnetic devices supplying power to each of the armature coils of the armature section.
• the electromagnetic device including a power supply unit that supplies power to each of the armature coils so that the same current flows between the armature coils of the same phase when the movable body is moved.
• the power supply unit supplies power to the armature coils in a range where magnetic fluxes from the field unit of the moving body intersect, so that the same current flows through each of the armature coils in the same phase.
• the power supply unit supplies the same current to each of the armature coils in the same phase, with respect to the armature coils in a range of a length corresponding to a half period of one magnetic pole period from each end of the array of permanent magnets.
• the electromagnetic device according to any one of ⁇ 2> to ⁇ 4>, which includes supplying electric power so that the current flows.
• a detection means provided on the fixed body opposite to the field part and configured to detect magnetic flux to detect the arrangement of the permanent magnets;
• the length Lc of the arrangement of the armature coils is a natural number multiple of the length Lm of one period of the magnetic poles of the permanent magnet. Electromagnetic device.
• the length of the arrangement of the armature coils in the armature section is any one of ⁇ 1> to ⁇ 6>, wherein the length of the arrangement of the armature coils in the armature section is a natural number multiple of the length Lc of the arrangement of one set of the armature coils. 1 electromagnetic device.
• the field section includes a first magnet array and a second magnet array in which the plurality of permanent magnets are arranged, and the first magnet array and the second magnet array are formed by each other.
• the electromagnetic device according to any one of ⁇ 1> to ⁇ 8>, which are opposed to each other with the armature coil in between so that the magnetic fields strengthen each other.
• a ferromagnetic material is arranged in an arrangement range of the plurality of armature coils on the opposite side of the armature coil from the field section ⁇ 1> to ⁇ 8> Any one of the electromagnetic devices.

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• 2023
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