WO2023228846A1 - プローブ - Google Patents

プローブ Download PDF

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Publication number
WO2023228846A1
WO2023228846A1 PCT/JP2023/018527 JP2023018527W WO2023228846A1 WO 2023228846 A1 WO2023228846 A1 WO 2023228846A1 JP 2023018527 W JP2023018527 W JP 2023018527W WO 2023228846 A1 WO2023228846 A1 WO 2023228846A1
Authority
WO
WIPO (PCT)
Prior art keywords
plunger
spring
loosely wound
barrel
wound portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/018527
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
拓也 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
Original Assignee
Yokowo Co Ltd
Yokowo Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokowo Co Ltd, Yokowo Mfg Co Ltd filed Critical Yokowo Co Ltd
Priority to CN202380042916.0A priority Critical patent/CN119278382A/zh
Publication of WO2023228846A1 publication Critical patent/WO2023228846A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Definitions

  • the present invention relates to a probe.
  • a probe includes a first conductive plunger having a hollow barrel part, a second conductive plunger that is slidable within the barrel part and protrudes from an open end of the barrel part, and a second conductive plunger having a hollow barrel part.
  • a structure is known that includes a spring that urges the plunger and the second plunger away from each other.
  • Patent Document 1 discloses a probe pin in which the part of the pin that contacts the spring (hereinafter referred to as the bottom surface of the pin) is processed into a conical shape, and a spring is installed in a space formed by a hole in the pin and a tube. has been done.
  • the spring has a central portion with approximately equal diameters and an adjacent tapered portion whose diameter gradually decreases and whose central axis is offset diagonally from the central axis of the central portion, and is curved as a whole. It is characterized by its shape.
  • the pin When both ends of the spring are compressed by the conical part on the bottom of the pin and the bottom of the tube hole, the pin receives a load from the tapered part of the spring in a direction inclined from the axial direction of the tube, so the pin is in an inclined state.
  • a side pressure corresponding to the amount of compression in the axial direction of the spring is generated.
  • the structure of the spring is complex and may take time to manufacture.
  • the present invention was made in recognition of this situation, and an example of its purpose is to provide a probe that uses a simple spring structure to reliably generate internal side pressure of the plunger and stabilize the resistance value. be.
  • Other objects of the invention will become apparent from the description herein.
  • One aspect of the present invention is a probe including a first electrically conductive plunger having a hollow barrel portion; a second electrically conductive plunger slidable within the barrel portion and protruding from an open end of the barrel portion; a spring provided inside the barrel portion and biasing the first plunger and the second plunger in a direction away from each other;
  • the spring includes a loosely wound portion, a first end portion that is located at one end of the loosely wound portion and abuts the first plunger, and a first end portion that is located at the other end of the loosely wound portion and contacts the second plunger.
  • first end-turning part and the second end-turning part having different diameters from the sparsely winding part;
  • the center axes of the first end turn portion and the second end turn portion are offset in the same direction with respect to the center axis of the sparse turn portion.
  • FIG. 1 is a longitudinal sectional view showing an embodiment of a probe according to the present invention.
  • FIG. 3 is a front view of a spring used in the embodiment. It is a left side view of the same. It is a right side view of the same.
  • FIG. 3 is an explanatory diagram showing an example of how the probe shown in the embodiment is used.
  • the probe 1 includes a first conductive plunger 10 integrally having a barrel portion 11, and a conductive first plunger 10 that is slidable within the barrel portion 11 and protrudes from the open end of the barrel portion 11. 2 plungers 20, and a spring 30 that is provided inside the barrel portion 11 and urges the first plunger 10 and the second plunger 20 in a direction away from each other.
  • the barrel portion 11 of the first plunger 10 has a bottomed cylindrical shape with a cylindrical hollow portion 12 inside, and is open at one end.
  • the opposite side of the opening of the first plunger 10 is a tip 13 that comes into contact with a bump or electrode of an object to be inspected such as a semiconductor, and the tip 13 has a plurality of sharp protrusions 14, for example.
  • the second plunger 20 has a cylindrical shape with a bottom and a cylindrical hollow part 21 into which a part of the spring 30 is inserted.
  • the second plunger 20 has an entry tube portion 22 that is slidable inside the barrel portion 11 and a tip portion 23 that has a smaller diameter than the entry tube portion 22 and projects from the end of the barrel portion 11 .
  • the tip portion 23 is provided with a protrusion 24 that comes into contact with the electrode of the test substrate.
  • the entry pipe section 22 is held by the caulking section 15 at the open end of the barrel section 10 so as not to come off from the barrel section 10 .
  • the spring 30 is a conductive coil spring made by winding an elastic metal wire, and includes a loosely wound portion 31 wound to have a constant outer diameter, and one end side of the loosely wound portion 31.
  • a first end turn portion 32 is located at the other end of the loosely wound portion 31 and comes into contact with the inner bottom surface of the first plunger 10
  • a second end turn portion 33 is located at the other end of the loosely wound portion 31 and comes into contact with the inner bottom surface of the second plunger 20 and has.
  • the loosely wound portion 31 is an effective wound portion that functions as a compression spring, and is, for example, tightly wound.
  • the first end-turning portion 32 and the second end-turning portion 33 have different diameters from that of the loosely wound portion 31. In the illustrated case, the first end turn portion 32 and the second end turn portion 33 have larger diameters than the sparse turn portion 31, and as can be seen from FIGS.
  • the central axis a of the first end turn portion 32 is The center axis b of the second end turn portion 33 is offset (eccentric) in the same direction with respect to the center axis c of the loosely wound portion 31, and the outer peripheral end of the loosely wound portion 31 and the first end turn portion 32 and The outer circumferential end of the second end-wound portion 33 is aligned with the outer peripheral end of the loosely wound portion 31 on the opposite side in the offset direction with respect to the central axis c.
  • a recess 16 is formed on the inner bottom surface of the barrel portion 11, into which the first end turn portion 32 of the spring 30 is fitted.
  • the bottom surface 16a of the recess 16 with which the first end turn portion 32 comes into contact is formed into a flat surface perpendicular to the central axis 11a of the barrel portion 11 by, for example, end milling. ing. Note that ordinary drilling does not result in a flat surface.
  • the spring 30 when a load is applied to the probe 1 from the unloaded state shown in FIG. 1 and the tip 23 of the second plunger 20 is pushed in, the spring 30 is compressed; Because the end turn portion 32 and the second end turn portion 33 are formed at eccentric positions with respect to the sparse turn portion 41, the spring 30 is bent in an arch shape, in other words, in a bow shape.
  • the inner wall of the second plunger 20 is pressed by the spring 30, and a side pressure is generated in the direction of pressing the entry pipe section 22 of the second plunger 20 against the inner wall of the barrel section 11. Due to this side pressure, the entry pipe portion 22 of the second plunger 20 stably contacts the inner wall of the barrel portion 11, and the contact resistance value between the first plunger 10 and the second plunger 20 can be stably maintained at a low value.
  • FIG. 5 is an explanatory diagram showing an example of use of the probe 1 shown in the embodiment.
  • the probe 1 is installed in a socket 90 with an insulating support 100.
  • the insulating support 100 has a structure in which a first insulating support 101 having a through hole 101a and a second insulating support 102 having a through hole 102a are overlapped, and the probe 1 falls into the through hole 101a and the through hole 102a. It is held that it does not.
  • test object 110 such as a semiconductor using the socket 90
  • the test object 110 is pushed down to bring the protrusion 14 of the first plunger 10 into contact with the bump 111 of the test object 110, and the test board
  • the protrusion 24 provided at the tip 23 of the second plunger 20 is brought into contact with the electrode 121 of the second plunger 20 .
  • electrical connection is established between the bumps 111 of the object to be inspected 110 and the inspection substrate 120 via the probe 1 .
  • the first and second end-wound portions 32 and 33 of the spring 30 that bias the first plunger 10 and the second plunger 20 in the direction of separation from each other have a diameter different from that of the loosely-wound portion 41, and
  • the center axes of the first and second end-wound portions 32 and 33 are offset (eccentric) in the same direction with respect to the center axis of the sparsely wound portion 31 . Therefore, the spring 30 is easily bent in an arch shape.
  • the inner wall of the second plunger 20 is pushed by the spring 30, and the entry tube part 22 of the second plunger 20 stably contacts the inner wall of the barrel part 11, causing contact between the first plunger 10 and the second plunger 20.
  • the resistance value can be stably maintained at a low value.
  • a recess 16 into which the first end turn part 32 fits is formed on the inner bottom surface of the barrel part 11, and the bottom surface 16a of the recess 16, which the first end turn part 32 comes into contact with, is perpendicular to the central axis 11a of the barrel part 11. Since it is a flat surface, the first end turn portion 32 can be stably seated on the inner bottom surface of the first plunger 10.
  • the spring 30, which has the loosely wound portion 31 and the first and second end wound portions 32 and 33 on both sides thereof, has a symmetrical shape and provides the same performance even when upside down, so it is easy to assemble. There is no need to consider the direction in which the spring 30 is inserted into the barrel portion 11 during assembly.
  • the center axis a of the first end turn portion 32 and the center axis b of the second end turn portion 33 are offset (eccentric) in the same direction with respect to the center axis c of the sparse turn portion 31. Furthermore, the outer peripheral end of the loosely wound portion 31 and the outer peripheral end of the first end-wound portion 32 are aligned on opposite sides in the offset direction with respect to the center axis c of the loosely wound portion 31. That is, in FIG. 1 and the like, the lower part of the loosely wound part 31 is aligned with the lower part of the first end wound part 32.
  • the outer peripheral end of the loosely wound portion 31 and the outer peripheral end of the second end wound portion 33 are aligned on opposite sides in the offset direction with respect to the central axis c of the loosely wound portion 31. That is, in FIG. 1 and the like, the lower part of the loosely wound part 31 is aligned with the lower part of the second end wound part 33. From the above, manufacturing of the probe 1 is easy.
  • the first plunger is a single part having an integral barrel part, but it may also have a structure in which the hollow barrel part and the tip part are made up of separate parts and integrally joined together.
  • the first end turn part and the second end turn part on both sides of the loosely wound part have a larger diameter than the loosely wound part.
  • the winding portion may have a small diameter.
  • the case where the first plunger has a plurality of sharp protrusions at the tip is illustrated, but the number of protrusions may be one, and the shape and arrangement of the protrusions may vary depending on the bump or electrode of the object to be inspected. etc., and can be changed as appropriate.
  • the spring 40 may be left-handed.
  • Aspect 1 includes a first electrically conductive plunger having a hollow barrel portion; a second electrically conductive plunger slidable within the barrel portion and protruding from an open end of the barrel portion; a spring provided inside the barrel portion and biasing the first plunger and the second plunger in a direction away from each other;
  • the spring includes a loosely wound portion, a first end portion that is located at one end of the loosely wound portion and abuts the first plunger, and a first end portion that is located at the other end of the loosely wound portion and contacts the second plunger.
  • the center axes of the first end turn portion and the second end turn portion are probes offset in the same direction with respect to the center axis of the sparse turn portion.
  • the second plunger is pressed by the spring to stably contact the inner wall of the barrel portion, and the contact resistance value between the first plunger and the second plunger is reduced to a low value. Can be maintained stably.
  • first end turn portion and the second end turn portion have a larger diameter than the sparse turn portion.
  • the first end-turning portion and the second end-turning portion have smaller diameters than the sparsely turning portion.
  • Aspect 4 is characterized in that the outer circumferential end of the loosely wound portion and the outer circumferential ends of the first end turn portion and the second end turn portion are aligned on the outside on the opposite side of the offset direction with respect to the center axis of the loosely wound portion. ing.
  • the amount of offset of the first and second end-wound portions with respect to the loosely wound portion can be increased, and manufacturing is also easy.
  • a recess into which the first end turn part is fitted is formed on the inner bottom surface of the barrel part.
  • the sitting of the first end turn portion on the inner bottom surface of the barrel portion is stabilized.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
PCT/JP2023/018527 2022-05-26 2023-05-18 プローブ Ceased WO2023228846A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202380042916.0A CN119278382A (zh) 2022-05-26 2023-05-18 探针

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-085829 2022-05-26
JP2022085829A JP2023173519A (ja) 2022-05-26 2022-05-26 プローブ

Publications (1)

Publication Number Publication Date
WO2023228846A1 true WO2023228846A1 (ja) 2023-11-30

Family

ID=88919256

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/018527 Ceased WO2023228846A1 (ja) 2022-05-26 2023-05-18 プローブ

Country Status (4)

Country Link
JP (1) JP2023173519A (https=)
CN (1) CN119278382A (https=)
TW (1) TW202405450A (https=)
WO (1) WO2023228846A1 (https=)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039973U (ja) * 1983-08-25 1985-03-20 三興線材工業株式会社 回路検査針
JPH11162545A (ja) * 1993-02-10 1999-06-18 Yokowo Co Ltd 電気接続用コネクタ
JP2002008761A (ja) * 2000-06-23 2002-01-11 Tyco Electronics Amp Kk スプリングコンタクト
JP2009539108A (ja) * 2006-06-01 2009-11-12 リカ デンシ アメリカ， インコーポレイテッド 接触部材を有する電気試験プローブ、接触部材を有する電気試験プローブを製造し使用する方法
JP2010060527A (ja) * 2008-09-05 2010-03-18 Yokowo Co Ltd グランド用コンタクトプローブを有する検査ユニット
JP2017037021A (ja) * 2015-08-11 2017-02-16 山一電機株式会社 検査用コンタクト端子、および、それを備える電気接続装置
JP2018200821A (ja) * 2017-05-29 2018-12-20 株式会社エンプラス 電気接触子及び電気部品用ソケット
WO2021225121A1 (ja) * 2020-05-07 2021-11-11 株式会社ヨコオ スプリングコネクタ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340867A (ja) * 2003-05-19 2004-12-02 Nec Electronics Corp スプリングプローブ及びｉｃソケット
US7507110B1 (en) * 2008-03-25 2009-03-24 Cheng Uei Precision Industry Co., Ltd. Probe connector

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039973U (ja) * 1983-08-25 1985-03-20 三興線材工業株式会社 回路検査針
JPH11162545A (ja) * 1993-02-10 1999-06-18 Yokowo Co Ltd 電気接続用コネクタ
JP2002008761A (ja) * 2000-06-23 2002-01-11 Tyco Electronics Amp Kk スプリングコンタクト
JP2009539108A (ja) * 2006-06-01 2009-11-12 リカ デンシ アメリカ， インコーポレイテッド 接触部材を有する電気試験プローブ、接触部材を有する電気試験プローブを製造し使用する方法
JP2010060527A (ja) * 2008-09-05 2010-03-18 Yokowo Co Ltd グランド用コンタクトプローブを有する検査ユニット
JP2017037021A (ja) * 2015-08-11 2017-02-16 山一電機株式会社 検査用コンタクト端子、および、それを備える電気接続装置
JP2018200821A (ja) * 2017-05-29 2018-12-20 株式会社エンプラス 電気接触子及び電気部品用ソケット
WO2021225121A1 (ja) * 2020-05-07 2021-11-11 株式会社ヨコオ スプリングコネクタ

Also Published As

Publication number Publication date
CN119278382A (zh) 2025-01-07
TW202405450A (zh) 2024-02-01
JP2023173519A (ja) 2023-12-07

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