WO2023216740A1

WO2023216740A1 - Crushed material detection and removal apparatus and method, and sorting system

Info

Publication number: WO2023216740A1
Application number: PCT/CN2023/083872
Authority: WO
Inventors: 薛峰; 苏傲; 蒋佳清; 刘孟昊; 熊勇; 曹葵康
Original assignee: 苏州天准科技股份有限公司
Priority date: 2022-05-09
Filing date: 2023-03-24
Publication date: 2023-11-16
Also published as: CN114733795A; CN219378063U

Abstract

A crushed material detection and removal apparatus and method, and a sorting system, relating to the field of detection and sorting. The apparatus comprises a fragment detection module (100), a crushed material removal module (200), a material flow line (300), and a crushed material detection controller. The crushed material removal module (200) comprises a crushed material box (210), a top-absorption conveyor belt set (220), and a received material conveyor belt set (230), and intercept and remove crushed materials; for intact materials, the crushed material detection controller controls the top-absorption conveyor belt set (220) to produce vacuum, so that the materials on the tail end of the material flow line therebelow are adsorbed and transmitted, are naturally separated on the tail end of the top-absorption conveyor belt set (220) and fall onto the received material conveyor belt set (230), and continue to be transmitted downstream. Pre-detection and pre-sorting are provided for sorting of sheet materials, replacing swing-based material removal with top-absorption conveying greatly improves the working efficiency and the productivity, and it is convenient for popularization and application in the fields of silicon wafers and PCBs involving sheet products.

Description

Debris detection and rejection device, detection and rejection method and sorting system

Technical field

The invention belongs to the field of silicon wafer detection and sorting, and relates to tail material storage technology. Specifically, it discloses a scrap detection and rejection device, a detection and rejection method and a sorting system.

Background technique

As an important industrial raw material, silicon wafers are widely used in photovoltaic and semiconductor fields. The quality of silicon wafers needs to be strictly controlled before they are produced and shipped out of the factory to ensure the quality of solar cells, circuit boards and other products made from silicon wafers. Silicon wafer sorting machine is an automated inspection and sorting equipment that integrates automation, measurement, and visual defect detection. It is used in the solar silicon wafer production process, such as the blanking disclosed in the patent applied for by our company (publication number CN112605010A) Sorting device and silicon wafer intelligent sorting machine, the sorting machine can realize the thickness, TTV, line marks, resistivity, size, dirt, edge chipping, cracking and other items of the solar silicon wafers sliced and cleaned. Measurement and inspection, and according to the sorting menu, the silicon wafers are automatically sorted into different boxes according to quality grade requirements, fully meeting the quality control needs of the silicon wafer manufacturers, and is an indispensable link in production.

Currently, there are often broken silicon wafers in the silicon wafer box, which has a negative impact on subsequent detection. Therefore, our company has disclosed a fragment detection and rejection device and silicon wafer detection and sorting equipment in patent CN213558494U. , used to remove debris before inspection to ensure stable operation of subsequent processes. However, when the detected fragments are rejected, they need to be oscillated and conveyed through the swing structure, which seriously limits the feeding rate. Therefore, it is necessary to design a new type of scrap kicking device to meet the current demand for high efficiency and high productivity.

Contents of the invention

In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide a scrap detection and rejection device, a detection and rejection method and a sorting system, which can solve the above problems.

A debris detection and rejection device, including a debris detection module, a debris removal module, a material flow line and a debris inspection controller, the debris removal module is arranged downstream of the debris detection module; the debris The detection module is installed above the material flow line to perform image detection on the materials transported on the material flow line; under the control of the fragment inspection controller, the fragment removal module detects the fragments detected by the fragment detection module. The material is pre-sorted to intercept and reject the broken materials, while the complete materials are sucked up and transferred downstream by the belt; wherein, the scrap material removal module adopts the top suction and discharge method, and the scrap material removal module (the top suction The unloading direction is staggered and parallel to the incoming direction of the material flow line.

Further, the debris detection module includes a detection camera component and a bottom light source component arranged in the detection box frame; the material flow line passes through the detection box frame to transport materials; the detection camera component is arranged in the detection box The inner side of the top of the rack is used to collect images of materials on the material flow line below; the bottom light source assembly is provided below the material flow line and is used to provide a light source for the materials above to improve the imaging effect of the detection camera assembly.

Further, the debris detection module also includes a detection air blowing component arranged in or in front of the detection box frame, used to blow air to the upper surface of the material on the material flow line before debris detection to remove dust on the surface of the material. Blow away.

Further, the scrap removal module includes a scrap box arranged on the rejection frame group, a top suction conveyor belt group and a material receiving conveyor belt group; the scrap box is arranged below the end of the material flow line, so The material receiving conveyor belt group is arranged above the end of the scrap box, and the top suction conveyor belt group is suspended from above across the end of the material flow line and the front end of the material receiving conveyor belt group.

Further, the top suction conveyor belt group includes a belt frame, a conveyor belt set, a coupling, a top suction motor, an adsorption component, a material sensor and a top suction door frame; two sets of conveyor belt groups are arranged on both sides of the belt frame. , And driven by the coupling and the top suction motor; the adsorption component is arranged in the middle of the belt frame along the streamline transmission direction, and the adsorption bottom surface of the adsorption component is set higher than the belt bottom surface of the conveyor belt group , in order to realize the separated adsorption belt to transport materials; the belt frame and the top suction motor are suspended and installed under the top suction door frame through an adapter plate; the material sensor is set at the front end of the belt frame, Used to sense whether materials have arrived.

Further, the material receiving conveyor belt group includes a material receiving frame, a material receiving belt group, a material receiving end shaft, a material receiving driving belt group, a material receiving motor and a material receiving support column; the material receiving frame passes through the material receiving The support column is fixed to the rejection frame group; two sets of material-receiving belt groups are arranged on both sides of the material-receiving frame through the material-receiving end shaft; the two groups of material-receiving belt groups are driven by the material-receiving belt group and the material-receiving The motor drives the machine to receive and transmit materials falling from the upper suction conveyor belt group.

Further, the material streamline includes streamline side plates, streamline conveyor belts, streamline end shafts, streamline idlers, streamline drive wheels, streamline drive shafts, streamline motors, side plate frames and streamline supports. seat; two streamline side plates are arranged in parallel with adjustable spacing, and are supported on the streamline support at both ends by the side plate frames; the streamline end shafts are arranged on both sides of the streamline side plate end; the streamline transmission belt is supported and installed by the streamline end shaft, streamline idler wheel, streamline drive wheel, and is driven and transmitted by the streamline drive shaft and streamline motor.

Furthermore, the device for detecting and rejecting scraps also includes an ion fan assembly, which includes an ion fan, a fan adapter, and a fan frame. The ion fan is arranged downwards facing the end of the material flow line for ionizing. The material after pre-testing is dust-removed, cooled and static electricity removed.

The invention also provides a method for detecting and removing scraps, which is characterized in that the method includes:

S1. Loading: materials are transported through the material streamline;

S2. Debris detection: Use the debris detection module to detect whether the material flowing below is damaged;

S3. Rejection and sorting: For damaged materials, the scraps are directly sent to the end through the material flow line. In the box; for complete materials, the broken inspection controller controls the top suction conveyor belt group to create a vacuum, so that the material at the end of the material flow line below is adsorbed and transported, and then naturally separates and falls to the receiving conveyor belt at the end of the top suction conveyor belt group. group and continue to transport the complete material downstream.

The invention also provides an intelligent silicon wafer sorting system. The sorting system includes loading equipment, detection equipment and unloading sorting equipment; the aforementioned scrap detection and rejection device is provided between the loading equipment and the detection equipment. , and detect the silicon wafer model and whether it is broken according to the aforementioned method, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment.

Compared with the existing technology, the beneficial effect of the present invention is that: through the scrap detection and rejection device, detection and rejection method and sorting system of the present application, pre-detection and pre-sorting can be provided for the sorting of sheet materials. Conveying instead of swing picking greatly improves work efficiency and production capacity, and facilitates the promotion and application in the fields of silicon wafers and PCBs involving sheet products.

Description of the drawings

Figures 1-2 are schematic diagrams of the scrap detection and removal device of the present invention;

Figure 3 is a schematic diagram of the fragment detection module;

Figure 4 is a schematic diagram of the scrap removal module;

Figure 5 is a schematic diagram of the material flow line;

Figure 6 is a schematic flow line diagram of material loading, inspection, and scrap picking;

Figure 7 is a schematic diagram of the intelligent silicon wafer sorting system.

In the picture:
100. Fragment detection module;
110. Detect camera components; 111. Camera; 112. Lens; 113. Camera adapter;
120. Bottom light source assembly; 121. Bottom light source; 122. Light source bottom plate; 123. Light source bottom column; 124.
Light source reinforcement;
130. Detection box frame; 131. Profile frame; 132. Door panel assembly; 133. Streamline port;
200. Debris removal module;
210. Scrap box; 211. Box body; 212. Material box frame;
220. Top suction conveyor belt group; 221. Belt frame; 222. Conveyor belt group; 223. Coupling; 224.
Top suction motor; 225, adsorption component; 226, material sensor; 227, top suction mast;
230. Material receiving conveyor belt group; 231. Material receiving frame; 232. Material receiving belt group; 233. Material receiving end shaft; 234.
Material receiving drive belt group; 235, material receiving motor; 236, material receiving support column;
240. Eliminate the rack group;
300. Material streamline; 301. Streamline side plate; 302. Streamline conveyor belt; 303. Streamline end shaft; 304.
Streamline idler; 305, streamline drive wheel; 306, streamline drive shaft; 307, streamline motor; 308, side plate frame; 309, streamline support; 310, streamline material sensor;
400. Machine;
500. Ion fan assembly; 501. Ion fan; 502. Fan adapter; 503. Fan bracket;
1000. Blanking and sorting equipment
2000. Testing equipment;
3000, loading equipment.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, not all embodiments. Based on the present invention All other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

It should be understood that the "system", "device", "mechanism", "unit" and/or "module" used in this specification are used to distinguish different components, elements, parts, parts or assemblies at different levels. method. However, said words may be replaced by other expressions if they serve the same purpose.

Debris detection and rejection device

A scrap detection and rejection device, see Figures 1 and 2, including a scrap detection module 100, a scrap removal module 200, a material flow line 300 and a scrap inspection controller.

Arrangement relationship: the debris detection module 100, the debris removal module 200, and the material flow line 300 are set on the machine 400; the scrap removal module 200 is set downstream of the debris detection module 100; the debris detection module The group 100 is set up above the material flow line 300 to perform image detection on the materials transported on the material flow line 300; it is characterized in that: under the control of the broken inspection controller, the broken material removal module 200 The materials detected by the fragment detection module 100 are pre-sorted and processed, and the broken materials are intercepted and rejected, while the intact materials are sucked up and transferred downstream by the belt. Among them, the scrap removal module 200 adopts a top suction and unloading method, and the top suction and unloading direction of the scrap removal module 200 and the incoming direction of the material flow line 300 are staggered and arranged in parallel up and down.

Referring to Figure 3, the fragment detection module 100 includes a detection camera component 110 and a bottom light source component 120 arranged in the detection box frame 130; the material flow line 300 passes through the detection box frame 130 to transport materials; the detection camera The component 110 is arranged inside the top of the detection box frame 130 and is used to collect images of the materials on the material flow line 300 below; the bottom light source component 120 is arranged below the material flow line 300 and is used to provide information for the materials above. The light source is used to improve the imaging effect of the detection camera assembly 110.

Further, the detection camera assembly 110 includes a camera 111, a lens 112 and a camera adapter 113, The camera 111 is connected to the upper part of the detection box frame 130 through the camera adapter 113, and shoots and collects images downward.

Further, the bottom light source assembly 120 includes a bottom light source 121, a light source bottom plate 122, a light source bottom column 123 and a light source reinforcement 124. This structure has low design cost. The uppermost bottom light source 121 is arranged below the material flow line 300 to provide light sources upward. .

In one example, the light source of the bottom light source assembly 120 adopts a surface light source.

Further, the detection box frame 130 includes a profile frame 131, a door panel assembly 132, and a streamline port 133 opened in the material conveying direction; the streamline port 133 is used for the material streamline 300 to pass through the detection box in the material conveying direction. Rack 130 to transport materials downstream.

Further, the debris detection module 100 also includes a detection blowing component (not shown) disposed in or in front of the detection box frame 130 for blowing air to the upper surface of the material on the material flow line 300 before debris detection. , to blow away the dust on the surface of the material.

4, the scrap removal module 200 includes a scrap box 210, a top suction conveyor belt group 220 and a material receiving conveyor belt group 230 arranged on the rejection frame group 240; the scrap box 210 is disposed on the Below the end of the material flow line 300, the material receiving conveyor belt group 230 is disposed above the end of the scrap box 210, and the top suction conveyor belt group 220 spans the end of the material flow line 300 and the material receiving and conveying unit from above. The front end of the belt group 230 is suspended.

Further, the scrap box 210 includes an open and inclined box body 211 and a box frame 212 .

Further, the top suction conveyor belt group 220 includes a belt frame 221, a conveyor belt group 222, a coupling 223, a top suction motor 224, an adsorption component 225, a material sensor 226 and a top suction door frame 227; two sets of conveyor belt groups 222 It is arranged on both sides of the belt frame 221 and is driven by the coupling 223 and the top suction motor 224; the adsorption assembly 225 is arranged on the belt frame 221 along the streamline transmission direction. in the middle, and the adsorption bottom surface of the adsorption component 225 is set higher than the belt bottom surface of the conveyor belt group 222, so as to realize the separated adsorption belt transmission of materials; the belt frame 221 and the top suction motor 224 are suspended through an adapter plate. Installed below the top suction door frame 227; the material sensor 226 is provided at the front end of the belt frame 221 for sensing whether materials arrive.

The belt frame 221 is provided with an adsorption through hole for installing the suction cup or suction head of the adsorption assembly 225 .

Each conveyor belt group 222 includes two transmission end shafts, end shaft wheels, a plurality of idler gears, a transmission shaft and a conveyor belt, and the conveyor belt is installed on the end shaft wheels and a plurality of idler wheels.

The output end of the top suction motor 224 is connected to the transmission shaft of the conveyor belt group 222 through a coupling 223 to drive the belt transmission.

Further, the material receiving conveyor belt group 230 includes a material receiving frame 231, a material receiving belt group 232, a material receiving end shaft 233, a material receiving driving belt group 234, a material receiving motor 235 and a material receiving support column 236. The material receiving frame 231 is fixed to the rejecting frame group 240 through the material receiving support column 236; two sets of material receiving belt groups 232 are arranged on both sides of the material receiving frame 231 through the material receiving end shafts 233; The material collecting belt group 232 is driven by the material collecting driving belt group 234 and the material collecting motor 235 to receive and transmit materials dropped from the upper suction conveyor belt group 220 .

Among them, referring to Figure 5, the material streamline 300 includes a streamline side plate 301, a streamline conveyor belt 302, a streamline end shaft 303, a streamline idler 304, a streamline drive wheel 305, a streamline drive shaft 306, and a streamline motor. 307. Side plate frame 308 and streamline support 309.

Two streamline side plates 301 are arranged in parallel with an adjustable spacing, and are supported on the streamline support 309 by the side plate frames 308 at both ends.

Streamline end shafts 303 are provided at both ends of the streamline side plate 301 .

The streamline transmission belt 302 is supported and installed by the streamline end shaft 303, the streamline idler wheel 304, and the streamline drive wheel 305, and is driven and transmitted by the streamline drive shaft 306 and the streamline motor 307.

The streamline drive shaft 306 that penetrates the two sets of side plate frames 308 is supported on the streamline support 309 at both ends through bearing frame groups.

The streamline motor 307 is supported on the streamline support 309 through the streamline motor base.

An induction installation groove is provided on the streamline side plate 301 for installing the streamline material sensor 310 .

Further, the scrap detection and rejection device also includes an ion fan assembly 500. The ion fan assembly 500 includes an ion fan 501, a fan adapter 502 and a fan frame 503. The ion fan 501 faces the material flow line downwards. 300 terminal arrangement is used to remove dust, cool down and remove static electricity from the materials after pre-inspection.

Debris detection and rejection method

A method for detecting and removing scraps based on the aforementioned device for detecting and rejecting scraps. See Figure 6. The method includes:

S1. Loading: materials are transported through the material flow line 300;

S2. Debris detection: Use the debris detection module 100 to detect whether the material flowing below is damaged;

S3. Rejection and sorting: For damaged materials, they are directly transported to the scrap box 210 at the end through the material flow line 300; for complete materials, the scrap inspection controller controls the top suction conveyor belt group 220 to create a vacuum, so that the lower part is The material at the end of the material flow line 300 is adsorbed and transported, and naturally separates and falls at the end of the top suction conveyor belt group 220 to the receiving conveyor belt group 230, and continues to transmit the complete material downstream.

Furthermore, ion blowing is also included between the scrap detection and rejection and sorting, and the ion fan assembly 500 is used to remove dust, cool down and remove static electricity from the pre-detected materials at the end of the material flow line 300 .

sorting system

An intelligent silicon wafer sorting system, see Figure 7. The sorting system includes a loading equipment 3000, a detection equipment 2000 and a unloading sorting equipment 1000; between the loading equipment 3000 and the detection equipment 2000, a method according to the aforementioned The scrap detection and rejection device detects the silicon wafer model and whether it is broken according to the aforementioned method, and removes the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment 2000.

Among them, the unloading and sorting equipment 1000 adopts a non-contact adsorption slicing device, which improves the efficiency of sorting and sheeting, and the multi-layer staggered box storage device improves the efficiency of box replacement; the testing equipment 2000 integrates multiple tests, including but It is not limited to the measurement and detection of thickness, TTV, line marks, resistivity, size, dirt, chipping, cracks and other items. The detection items can be modularized to increase or decrease according to actual needs; the debris can be removed in advance through the debris detection and removal device. , improving the overall production capacity of the system.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be used Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent substitutions are made to some of the technical features; however, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

A scrap detection and rejection device includes a debris detection module (100), a scrap removal module (200), a material flow line (300) and a scrap detection controller. The scrap removal module (200) is arranged on Downstream of the debris detection module (100); the debris detection module (100) is installed above the material flow line (300) to perform image detection on the materials transported on the material flow line (300); Its characteristics are:

The scrap removal module (200) adopts a top suction and unloading method, and the top suction and unloading direction of the scrap removal module (200) and the incoming direction of the material flow line (300) are staggered up and down in parallel;

The scrap removal module (200) includes a scrap box (210), a top suction conveyor belt group (220) and a material receiving conveyor belt group (230) arranged on the rejection frame group (240); the scrap material The box (210) is arranged below the end of the material flow line (300), the material receiving conveyor belt group (230) is arranged above the end of the scrap box (210), and the top suction conveyor belt group (220) ) is suspended from above across the end of the material flow line (300) and the front end of the material receiving conveyor belt group (230);

Under the control of the fragment inspection controller, the fragment removal module (200) pre-sorts the materials detected by the fragment detection module (100), intercepts and rejects the broken materials, and sucks up the intact materials and conveys them to the belt. forwarded downstream.
The chip detection and rejection device according to claim 1, characterized in that: the chip detection module (100) includes a detection camera component (110) and a bottom light source component (120) arranged in the detection box frame (130). ; The material flow line (300) passes through the detection box frame (130) to transport materials; the detection camera assembly (110) is arranged inside the top of the detection box frame (130) for monitoring the material flow line (130) below. 300) to collect images of the material; the bottom light source component (120) is provided below the material flow line (300), and is used to provide a light source for the material above to improve the imaging effect of the detection camera component (110).
The chip detection and rejection device according to claim 2, characterized in that: the chip detection module (100) further includes a detection blowing component arranged in or in front of the detection box frame (130), for Before detecting debris, air is blown to the upper surface of the material on the material flow line (300) to blow away the dust on the surface of the material.
The scrap detection and rejection device according to claim 1, characterized in that: the top suction conveyor belt group (220) includes a belt frame (221), a conveyor belt group (222), a coupling (223), and a top suction motor. (224), adsorption assembly (225), material sensor (226) and top suction door frame (227); two sets of conveyor belt groups (222) are arranged on both sides of the belt frame (221), and are connected through the connection The shaft device (223) and the top suction motor (224) drive and operate; the adsorption component (225) is arranged in the middle of the belt frame (221) along the streamline transmission direction, and the adsorption bottom surface of the adsorption component (225) is high The height of the belt bottom surface of the conveyor belt group (222) is set to realize separated adsorption belt transmission of materials; the belt frame (221) and the top suction motor (224) are suspended and installed on the top through an adapter plate. Below the suction door frame (227); the material sensor (226) is provided at the front end of the belt frame (221) for sensing whether materials arrive.
The scrap detection and rejection device according to claim 1, characterized in that: the material receiving conveyor belt group (230) includes a material receiving frame (231), a material receiving belt group (232), and a material receiving end shaft (233) , material receiving drive belt group (234), material receiving motor (235) and material receiving support column (236);

The material receiving rack (231) is fixed to the rejection frame group (240) through the material receiving support column (236); two sets of material receiving belt groups (232) are arranged on the receiving end shaft (233). Both sides of the material receiving frame (231); two sets of material receiving belt groups (232) are driven by the material receiving drive belt group (234) and the material receiving motor (235) to receive and transmit the top suction from above. The conveyor belt group (220) transports the falling material.
The scrap detection and rejection device according to claim 1, characterized in that: the material streamline (300) includes a streamline side plate (301), a streamline conveyor belt (302), a streamline end shaft (303), Streamline idler wheel (304), streamline drive wheel (305), streamline drive shaft (306), streamline motor (307), side plate frame (308) and streamline support (309);

Two streamline side plates (301) are arranged in parallel with an adjustable spacing, and are supported on the streamline support (309) by the side plate frame (308) at both ends;

Streamline end shafts (303) are provided at both ends of the streamline side plate (301);

The streamline conveyor belt (302) is supported and installed by the streamline end shaft (303), the streamline idler wheel (304), and the streamline drive wheel (305), and is connected via the streamline drive shaft (306) and The streamline motor (307) drives the transmission.
The chip detection and rejection device according to claim 1, characterized in that: the chip detection and rejection device further includes an ion fan assembly (500), the ion fan assembly (500) includes an ion fan (501), a fan rotor The connector (502) and the fan frame (503), the ion fan (501) is arranged downward and facing the end of the material flow line (300) to remove dust, cool down and remove static electricity from the material after pre-detection.
A method for detecting and removing scraps according to the device for detecting and rejecting scraps according to claim 7, characterized in that the method includes:

Loading: transfer materials through the material flow line (300);

Debris detection: Use the debris detection module (100) to detect whether the material flowing below is damaged;

Rejection and sorting: For damaged materials, they are directly transported to the scrap box (210) at the end through the material flow line (300); for intact materials, the top suction conveyor belt group (220) is controlled by the scrap inspection controller to create a vacuum , thereby adsorbing and transporting the material at the end of the lower material flow line (300), and naturally separates and falls to the end of the top suction conveyor belt group (220) to the material receiving conveyor belt group (230), and continues to transmit the complete material downstream.
The scrap detection and elimination method according to claim 8, characterized in that: during scrap detection and The process of rejecting and sorting also includes ion blowing, and the ion fan assembly (500) is used to remove dust, cool down and remove static electricity from the material after pre-detection at the end of the material flow line (300).
An intelligent silicon wafer sorting system, characterized in that: the sorting system includes loading equipment (3000), detection equipment (2000) and unloading sorting equipment (1000); between the loading equipment (3000) and detection equipment A scrap detection and rejection device according to claim 8 is arranged between the equipment (2000), and the silicon wafer model and whether it is broken are detected according to the method described in claim 8 or 9, and the broken silicon wafers are removed to avoid breakage. Silicon wafer inflow detection equipment (2000).