WO2023201841A1 - 一种多层膜系的各层膜厚检测系统及其检测方法 - Google Patents

一种多层膜系的各层膜厚检测系统及其检测方法 Download PDF

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WO2023201841A1
WO2023201841A1 PCT/CN2022/095141 CN2022095141W WO2023201841A1 WO 2023201841 A1 WO2023201841 A1 WO 2023201841A1 CN 2022095141 W CN2022095141 W CN 2022095141W WO 2023201841 A1 WO2023201841 A1 WO 2023201841A1
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layer
film
coating
sample
carrier
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PCT/CN2022/095141
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English (en)
French (fr)
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潘振强
朱宇彬
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广东振华科技股份有限公司
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Publication of WO2023201841A1 publication Critical patent/WO2023201841A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention belongs to the technical field of vacuum coating, and particularly relates to a rapid and independent detection system for the thickness of each layer of a multi-layer film system and a detection method thereof.
  • the film thickness measurement methods commonly used in the industry are mainly divided into online inspection and post-plating inspection.
  • the former data can be fed back in real time, while the latter data feedback has a certain delay, and the total film thickness is measured, and the data of each layer's film thickness cannot be obtained; while online detection mainly includes optical film thickness detection and quartz crystal oscillation thickness gauge.
  • the accuracy of the former is affected by the test conditions (continuous movement and shaking of the sample, etc.) and is difficult to guarantee.
  • the latter is affected by the service life of the crystal and cannot be measured continuously for a long time. It can only measure the deposition rate of one coating source. If there are multiple coating sources, it is necessary Multiple thickness measuring instruments are very costly.
  • the current mainstream film thickness detection method is still post-plating detection, and the process can be corrected through detection result feedback.
  • the purpose of the present invention is to overcome the shortcomings of the prior art, and specifically discloses a rapid and independent detection system for the thickness of each layer of a multi-layer film system.
  • the detection system can accurately, timely and independently detect each layer of the multi-layer film system.
  • the film thickness of the coating layer is determined, the detection process is convenient and fast, the detection cost is low, and the practicability is strong.
  • the film thickness detection system of each layer of a multi-layer film system includes a detection box installed on a slide rack inside the vacuum coating chamber and capable of moving forward with the slide rack.
  • the front cover of the detection box There is a coating opening window for receiving coating materials.
  • the center of the carrier plate is equipped with a movable carrier plate. Or after the front cover of the detection box is rotated, the next sample can correspond to the toggle device at the position of the coating opening window.
  • There is a trigger mechanism inside the vacuum coating chamber that can trigger the operation of the toggle device on the carrier plate.
  • the toggle device is a carrier plate toggle device that can rotate the carrier plate.
  • the carrier plate toggle device sequentially includes a single unit fixedly installed at the center of the carrier plate from the inside to the outside of the detection box.
  • a fixed seat is provided inside the front cover of the detection box body.
  • the one-way ratchet clutch and connecting shaft are installed on the fixed seat, and a part of the connecting shaft is placed on the detection box.
  • the other part is placed inside the detection box body, and the other part is placed outside the detection box body.
  • the connecting shaft section placed outside the detection box body is covered with a return spring. In the initial state, the lever is tilted and set in a direction close to the triggering mechanism.
  • the triggering mechanism is a fixed touch rod fixed between two adjacent coating sources, and there are several fixed touch rods, all of which are fixed horizontally on the vacuum coating chamber. , and are arranged along the direction of movement of the detection box. In the initial state, the height of the lever projected in the vertical direction is slightly higher than the height of the touch lever.
  • the carrier plate is provided with sample positioning devices arranged in a circular matrix for fixing samples.
  • the positioning device includes a positioning surface for placing the sample and an elastic limiting connector installed on the positioning surface.
  • the positioning device includes a positioning pin fixed on the carrier plate and an elastic limiting connection installed on the positioning pin.
  • the invention also discloses a detection method of the film thickness detection system of each layer of the multi-layer film system.
  • the specific steps are:
  • the carrier disk toggle device touches the first contact rod, the carrier disk toggle The device will drive the carrier plate to rotate at an angle, corresponding to the first sample to be plated to the opening window position of the detection box, and perform the coating work of the first film layer of the first sample;
  • the detection system of the present invention because the triggering mechanism triggers the rotation of the carrier plate toggle device, accurately corresponds the sample to be plated to the position of the coating opening window, and can switch new samples for film deposition sampling respectively to complete different
  • the coating work of different film layers of the sample makes it possible to obtain the actual thickness samples of each film layer of the multi-layer film in one complete coating cycle, providing an accurate basis for detecting the thickness of different film layers, and the detection process Convenient, fast and easy to implement;
  • the detection method of the present invention uses common film thickness detection methods to detect the film thickness of different samples and different film layers. It can quickly obtain coating results, save process debugging time, and can detect individual films.
  • the layer thickness data is conducive to precise process control, and can provide feedback based on the film thickness detection data of each layer. The deviation range and degree of the process parameters can be accurately confirmed, and the production process can be corrected quickly, accurately and conveniently.
  • trial production may be required every time maintenance or consumables are replaced, and the data can also be confirmed in one go, saving debugging time.
  • Figure 1 is a schematic structural diagram of the detection system according to the present invention installed in a vacuum coating chamber
  • Figure 2 is a schematic front structural view of the detection system according to the present invention.
  • Figure 3 is a schematic side structural view of the detection system according to the present invention.
  • Figure 4 is an enlarged schematic diagram of point A in Figure 3 above;
  • FIG. 5 is a schematic structural diagram of the disc moving device in the present invention when it comes into contact with the triggering mechanism.
  • the film thickness detection system 10 of each layer of the multi-layer film system includes a carrier 30 installed inside the vacuum coating chamber 100 and can move forward with the carrier 30
  • the detection box body 1 is provided with a coating opening window 11 for receiving coating materials on the front cover of the detection box body 1.
  • a number of samples to be plated 20 are evenly arranged inside the detection box body 1 for installing samples.
  • 20 carrier tray 2 the center position of the carrier tray 2 is provided with a toggle device that can move the next sample 20 to the position of the coating opening window 11 after the carrier tray 2 is rotated, and the vacuum coating chamber 100 is equipped with a toggle device inside
  • the carrier 30 is a common device inside the vacuum coating chamber 100 in the field of vacuum coating technology.
  • a rolling device 50 is installed at the bottom of the vacuum coating chamber 100 for the carrier 30 to move.
  • the vacuum coating chamber A number of coating sources 40 are provided inside the 100 in front of the carrier 30. When the carrier 30 brings the sample 20 close to the coating source 40, the coating sources 40 are activated to start the coating work of different film layers.
  • the dialing device is a plate-carrying plate toggle device 3 that rotates the plate.
  • the plate-carrying device 3 sequentially includes a plate fixedly installed on the plate from the inside to the outside of the detection box 1. 2.
  • One-way ratchet clutch 31, connecting shaft 32, and lever 33 are located at the center.
  • a fixed seat 5 is provided inside the front cover of the detection box 1.
  • the one-way ratchet clutch 31 and connecting shaft 32 are installed on the fixed base.
  • part of the connecting shaft 32 is placed inside the detection box 1, and the other part is placed outside the detection box 1.
  • the section of the connecting shaft 32 placed outside the detection box 1 is covered with a return spring 34.
  • the lever 33 is inclined and disposed in a direction close to the trigger mechanism 4 .
  • the disk-loading toggle device 3 can be replaced by a toggle device that moves the front cover of the detection box 1. Its working principle is basically the same as the above-mentioned disk-carrying toggle device 3, and will not be described again here.
  • the trigger mechanism 4 is a fixed touch rod fixed between two adjacent coating sources 40, and there are several fixed touch rods, all of which are fixed horizontally to the vacuum. coating chamber 100, and are arranged along the direction in which the detection box 1 moves.
  • the height of the lever 33 projected in the vertical direction is slightly higher than the height of the touch lever, and the detection box 1 follows The carrier 30 moves forward.
  • the lever 33 will drive the connecting shaft 32 and the one-way ratchet clutch 31 to rotate the carrier plate 2 counterclockwise by an angle. At this time, the carrier plate 2 will rotate counterclockwise.
  • the sample 20 is aligned with the coating window 11 to complete the coating of the first film layer of the first sample 20, and then the fixed touch rod leaves the lever 33, and the lever 33 returns to its original position under the action of elastic recovery force, and continues to wait. Until the next fixed touch rod is touched, the coating work of the second film layer of the next sample 20 is completed, and the cycle continues.
  • the carrier plate 2 is provided with sample positioning devices 6 arranged in a circular matrix for fixing the samples 20 .
  • the sample positioning device 6 includes a sample positioning device 6 for placing the samples 20 .
  • the positioning surface 61 and the elastic limiting connector 62 installed on the positioning surface 61 can more conveniently install the sample 20 on the carrier tray 2 and also facilitate its disassembly.
  • the sample 20 can also be installed through the combined installation of the pin shaft and the limiting connector 62.
  • the structural principles are the same and will not be described again.
  • the present invention also discloses a detection method of the film thickness detection system of each layer of the multi-layer film system. The specific steps are:

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

一种多层膜系的各层膜厚检测系统（10），包括安装在真空镀膜腔（100）内部的载片架（30）上可随载片架（30）向前移动的检测盒体（1），检测盒体（1）的前盖上设有用于接收镀膜材料的镀膜开口窗（11），检测盒体（1）内部均匀的设有若干待镀的样品（20）、用于安装样品（20）的载盘（2），载盘（2）的中心位置设有能拨动载盘（2）转动或检测盒体（1）前盖转动后将下一个样品（20）能对应到镀膜开口窗（11）位置的拨动装置（3），真空镀膜腔（100）内部设有能触动拨动装置（3）工作的触发机构（4）。多层膜系的各层膜厚检测系统（10）能准确及时的检测出镀膜设备中单独的各膜层的膜厚，检测过程简单方便快速，检测成本低。

Description

一种多层膜系的各层膜厚检测系统及其检测方法 技术领域
本发明属于真空镀膜技术领域，特别涉及一种多层膜系的各层膜厚快速独立检测系统及其检测方法。
背景技术
汽车行业、手机行业、玻璃镀膜行业等的产品有在透明基材上镀膜的需要，尤其是有特殊功能需求的光学薄膜，以往生产设备基本是以单体机镀膜为主，对产品的最大尺寸、产量等有比较大的影响。
市场发展的需求产量大、成本低的生产方式，其趋势逐渐倾向于有规模产量化优势的连续镀膜生产线的生产方式。生产薄膜的良好品质通常需求多层薄膜的镀膜，因此，每层膜的稳定品质控制就成了重点，尤其是精准的膜层厚度，膜层数量越多，难度则越高。
目前行业常用的膜层厚度测量方式主要分为在线检测与镀后检测。前者数据可以实时反馈，后者的数据反馈有一定的延迟，并且测量的是总膜厚，无法得到各层膜厚的数据；而在线检测主要有光学膜厚检测与石英晶体振荡测厚仪，前者的精度受测试条件(样片持续运动晃动等)影响难以保证，后者受到晶体使用寿命的影响，不能长期连续测量，并且只能测量一个镀膜源的沉积速率，如果有多个镀膜源则需要多个测厚仪器，成本很高。由于溅射镀膜的沉积速率比较稳定，虽然随着靶材消耗镀膜条件会逐渐发生变化从而影响沉积速率，但是目前主流的膜厚检测方法仍是镀后检测，可以通过检测结果反馈来修正工艺。
因为多层膜系镀膜设备配置了数量很多的溅射阴极，膜系层数增多提高了对膜厚控制的精度要求，同时由于工艺流程较长，反馈时间会加长，另外在进行维护、更换靶材后，均需要进行试镀来确定工艺参数，单独检测每一层膜占用了很多时间，影响生产效率。
因此，开发一种成本低又能对多层膜系的各层膜厚快速独立检测系统及其检测方法迫在眉睫。
发明内容
本发明的目的是克服现有技术的不足，具体公开一种多层膜系的各层膜厚快速独立检测系统，该检测系统能准确的及时的且能独立的检测出多层膜系中各层镀膜层的膜厚，检测过程方便快速，检测成本低，实用性强。
为了达到上述技术目的，本发明是按以下技术方案实现的：
本发明所述的多层膜系的各层膜厚检测系统，包括安装在真空镀膜腔内部的载片架上可 随载片架向前移动的检测盒体，所述检测盒体的前盖上设有用于接收镀膜材料的镀膜开口窗，所述检测盒体内部均匀的设有若干待镀的样品、用于安装样品的载盘，所述载盘的中心位置设有能拨动载盘或检测盒体的前盖转动后将下一个样品能对应到镀膜开口窗位置的拨动装置，所述真空镀膜腔内部设有能触动载盘拨动装置工作的触发机构。
作为上述技术的进一步改进，所述拨动装置为能拨动载盘转动的载盘拨动装置，载盘拨动装置从检测盒体的内部至外部依次包括固定安装在载盘中心位置的单向棘齿离合器、连接轴、拨杆，所述检测盒体前盖的内部设有固定座，所述单向棘齿离合器、连接轴安装在固定座上，所述连接轴一部分置于检测盒体内部，另一部分置于检测盒体的外部，其中置于检测盒体外部的连接轴段上套设有复位弹簧，在初始状态，所述拨杆倾斜且向着靠近触发机构的方向设置。
作为上述技术的更进一步改进，所述触发机构为固定在相邻的两层镀膜源之间位置的固定触碰杆，且固定触碰杆为若干个，均水平向的固定于真空镀膜腔上，并沿着检测盒体移动的方向排布，在初始状态，所述拨杆在竖直方向投影的高度略高于触碰杆的高度。
作为上述技术的更进一步改进，所述载盘上设有成圆形矩阵排布的用于固定样品的样品定位装置。
作为上述技术的更进一步改进，所述定位装置包括用于放置样品的定位面和安装于定位面上的带有弹性的限位连接件。
作为上述技术的更进一步改进，所述定位装置包括固定在载盘上的定位销轴和安装于定位销轴上的带有弹性的限位连接件。
本发明还公开了多层膜系的各层膜厚检测系统的检测方法，其具体步骤是：
(1)首先，将检测系统组装完成，并在检测盒体内安装上待镀膜的新样品，并做好样品标记；
(2)其次，将安装有新样品的检测系统固定在真空镀膜腔的载片架上，在镀膜前确认载盘拨动装置是否能进行弹性复位；
(3)接着，运转镀膜设备，让检测系统在真空镀膜腔内随同载片架一起向前移动，当载盘拨动装置中的拨杆触碰到第一触碰杆时，载盘拨动装置会带动载盘转动一个角度，将待镀的第一个样品对应至检测盒体的开口窗位置，进行第一个样品的第一膜层的镀膜工作；
(4)然后，当检测系统随着载片架继续向前移动时，第一个触碰杆脱离拨杆，在复位弹簧的弹簧回复力的作用下，载盘拨动装置回复到原始位置，直至移动到第二膜层的镀膜源位置，第二触碰杆触碰到拨杆，将第二个样品拨动到检测盒体的开口窗位置，进行第二个样品的第二膜层的镀膜工作，并按此循环进行第三个样品的第三膜层的镀膜工作直至第N样品的 第N膜层的镀膜工作；
(5)各样品对应的各膜层的镀膜工作完成后，依次按序取出已完成膜层镀膜工作的各样片，按照与对应膜层作好标识，进行各膜层的膜厚检测工作。
(6)最后，将各膜层厚度数据输入电脑制作膜厚分布曲线，根据其趋势对生产工艺参数进行修订。
与现有技术相比，本发明的有益效果是：
(1)本发明所述检测系统，由于通过触发机构触动载盘拨动装置转动，将待镀样品准确的对应至镀膜开口窗的位置，可以切换新样品分别进行膜层沉积采样，以完成不同样品不同膜层的镀膜工作，使得可以通过一次完整的镀膜周期内，就能分别获得多层膜的各层膜层的实际厚度样品，为检测不同膜层厚度提供了准确的依据，且检测过程方便快速，易于实现；
(2)本发明所述的检测方法，其通过常用的膜层厚度的检测方法对不同样品不同膜层进行膜厚检测，可以快速取得镀膜结果，节约工艺的调试时间，能检测单独的各膜层厚度数据，有利于工艺精准控制，并能根据各层膜厚检测数据反馈，可以精准确认工艺参数的偏差范围与程度，可以快速、准确、方便地对生产工艺进行修正。
(3)本发明所述的检测方法，每次维护或更换耗材时，可需要进行试产，也可以一次就能确认数据，节约调试时间。
附图说明
下面结合附图和具体实施例对本发明做详细的说明：
图1是本发明所述的检测系统安装在真空镀膜腔内的结构示意图；
图2是本发明所述的检测系统的正面结构示意图；
图3是本发明所述的检测系统的侧面结构示意图；
图4是上述图3中A处放大示意图；
图5是本发明中载盘拨动装置与触发机构触碰时的结构示意图。
具体实施方式
如图1至图5所示，本发明所述的多层膜系的各层膜厚检测系统10，包括安装在真空镀膜腔100内部的载片架30上可随载片架30向前移动的检测盒体1，所述检测盒体1的前盖上设有用于接收镀膜材料的镀膜开口窗11，所述检测盒体1内部均匀的设有若干待镀的样品20、用于安装样品20的载盘2，所述载盘2的中心位置设有能拨动载盘2转动后将下一个样品20能对应到镀膜开口窗11位置的拨动装置，所述真空镀膜腔100内部设有能触动拨动装置工作的触发机构4。
所述载片架30是真空镀膜技术领域真空镀膜腔100内部常备的设备，所述真空镀膜腔 100的底部安装有供载片架30在其上进行移动的滚动装置50，所述真空镀膜腔100的内部在载片架30的前方位置设有若干镀膜源40，当载片架30带着样品20靠近镀膜源40位置时，镀膜源40启动，开启不同膜层的镀膜工作。
如图3、图5所示，所述拨动装置为拨动载盘转动的载盘拨动装置3，载盘拨动装置3从检测盒体1的内部至外部依次包括固定安装在载盘2中心位置的单向棘齿离合器31、连接轴32、拨杆33，所述检测盒体1前盖的内部设有固定座5，所述单向棘齿离合器31、连接轴32安装在固定座5上，所述连接轴32一部分置于检测盒体1内部，另一部分置于检测盒体1的外部，其中置于检测盒体1外部的连接轴32段上套设有复位弹簧34，且在初始状态，所述拨杆33倾斜且向着靠近触发机构4的方向设置。
在本发明中，所述载盘拨动装置3可以替换为拨动检测盒体1前盖的拨动装置其工作原理与上述载盘拨动装置3基本雷同，在此不再赘述。
如图3、图5所示，所述触发机构4为固定在相邻的两个镀膜源40之间位置的固定触碰杆，且固定触碰杆为若干个，均水平向的固定于真空镀膜腔100上，并均沿着检测盒体1移动的方向排布，在初始状态，所述拨杆33在竖直方向投影的高度略高于触碰杆的高度，检测盒体1随着载片架30向前移动，当固定触碰杆触碰到拨杆33时，拨杆33会驱动连接轴32、单向棘齿离合器31带着载盘2逆时针旋转一个角度，此时将样品20对准镀膜开窗口11完成该第一个样品20的第一膜层镀膜的工作，接着固定触碰杆离开拨杆33，拨杆33在弹性回复力的作用下回复原位，继续等待直至碰到下一个固定触碰杆，完成下一个样品20的第二膜层的镀膜工作，如此循环。
在本发明中，如图4所示，所述载盘2上设有成圆形矩阵排布的用于固定样品20的样品定位装置6，所述样品定位装置6包括用于放置样品20的定位面61和安装于定位面61上的带有弹性的限位连接件62，能较为方便的将样品20安装在载盘2上，同时也方便拆卸。此外，也可通过销轴和限位连接件62的组合安装的方式进行安装样品20，其结构原理相同，在次不再赘述。
此外，本发明还公开了多层膜系的各层膜厚检测系统的检测方法，其具体步骤是：
(1)首先，将检测系统组装完成，并在检测盒体1内安装上待镀膜的新样品20，并做好样品20标记；
(2)其次，将安装有新样品20的检测系统固定在真空镀膜腔100内的载片架30上，在镀膜前确认载盘拨动装置3是否能进行弹性复位；
(3)接着，运转镀膜设备，让检测系统在真空镀膜腔100内随同载片架30一起向前移动，当载盘拨动装置3中的拨杆33触碰到第一触碰杆4’时，载盘拨动装置3会带动载盘2转动 一个角度，将待镀的第一个样品20对应至检测盒体1的开口窗11的位置，镀膜源40启动，进行第一个样品20的第一膜层的镀膜工作；
(4)然后，当检测系统随着载片架30继续向前移动时，当第一个触碰杆4脱离拨杆33，在复位弹簧34的弹簧回复力的作用下，载盘拨动装置3回复到原始位置，直至移动到第二膜层的镀膜源40位置，第二个触碰杆触碰到拨杆33，将第二个样品20拨动到检测盒体1的开口窗位置，镀膜源40启动，进行第二个样品20的第二膜层的镀膜工作，并按此循环进行第三个样品20的第三膜层的镀膜工作直至第N样品20的第N膜层的镀膜工作；
(5)各样品20对应的各膜层的镀膜工作完成后，依次按序取出已完成膜层镀膜工作的各样片，按照与对应膜层作好标识，进行各膜层的膜厚检测工作。
(6)最后，将各膜层厚度数据输入电脑制作膜厚分布曲线，根据其趋势对生产工艺参数进行修订。
本发明并不局限于上述实施方式，凡是对本发明的各种改动或变型不脱离本发明的精神和范围，倘若这些改动和变型属于本发明的权利要求和等同技术范围之内，则本发明也意味着包含这些改动和变型。

Claims (7)

  1. 一种多层膜系的各层膜厚检测系统，其特征在于：包括安装在真空镀膜腔内部的载片架上可随载片架向前移动的检测盒体，所述检测盒体的前盖上设有用于接收镀膜材料的镀膜开口窗，所述检测盒体内部均匀的设有若干待镀的样品、用于安装样品的载盘，所述载盘的中心位置设有能拨动载盘或检测盒体的前盖转动后将下一个样品能对应到镀膜开口窗位置的拨动装置，所述真空镀膜腔内部设有能触动载盘拨动装置工作的触发机构。
  2. 根据权利要求1所述的多层膜系的各层膜厚检测系统，其特征在于：所述拨动装置为能拨动载盘转动的载盘拨动装置，载盘拨动装置从检测盒体的内部至外部依次包括固定安装在载盘中心位置的单向棘齿离合器、连接轴、拨杆，所述检测盒体前盖的内部设有固定座，所述单向棘齿离合器、连接轴安装在固定座上，所述连接轴一部分置于检测盒体内部，另一部分置于检测盒体的外部，其中置于检测盒体外部的连接轴段上套设有复位弹簧，在初始状态，所述拨杆倾斜且向着靠近触发机构的方向设置。
  3. 根据权利要求2所述的多层膜系的各层膜厚检测系统，其特征在于：所述触发机构为固定在相邻的两层镀膜源之间位置的固定触碰杆，且固定触碰杆为若干个，均水平向的固定于真空镀膜腔的腔体上，并沿着检测盒体移动的方向排布，在初始状态，所述拨杆在竖直方向投影的高度略高于触碰杆的高度。
  4. 根据权利要求1所述的多层膜系的各层膜厚检测系统，其特征在于：所述载盘上设有成圆形矩阵排布的用于固定样品的样品定位装置。
  5. 根据权利要求4所述的多层膜系的各层膜厚检测系统，其特征在于：所述定位装置包括用于放置样品的定位面和安装于定位面上的带有弹性的限位连接件。
  6. 根据权利要求4所述的多层膜系的各层膜厚检测系统，其特征在于：所述定位装置包括固定在载盘上的定位销轴和安装于定位销轴上的带有弹性的限位连接件。
  7. 根据权利要求4所述的多层膜系的各层膜厚检测系统的检测方法，其具体步骤是：
    (1)首先，将检测系统组装完成，并在检测盒体内安装上待镀膜的新样品，并做好样品标记；
    (2)其次，将安装有新样品的检测系统固定在真空镀膜腔的载片架上，在镀膜前确认载盘拨动装置是否能进行弹性复位；
    (3)接着，运转镀膜设备，让检测系统在真空镀膜腔内随同载片架一起向前移动，当载盘拨动装置中的拨杆触碰到第一触碰杆时，载盘拨动装置会带动载盘转动一个角度，将待镀的 第一个样品对应至检测盒体的开口窗位置，进行第一个样品的第一膜层的镀膜工作；
    (4)然后，当检测系统随着载片架继续向前移动时，第一个触碰杆脱离拨杆，在复位弹簧的弹簧回复力的作用下，载盘拨动装置回复到原始位置，直至移动到第二膜层的镀膜源位置，第二触碰杆触碰到拨杆，将第二个样品拨动到检测盒体的开口窗位置，进行第二个样品的第二膜层的镀膜工作，并按此循环进行第三个样品的第三膜层的镀膜工作直至第N样品的第N膜层的镀膜工作；
    (5)各样品对应的各膜层的镀膜工作完成后，依次按序取出已完成膜层镀膜工作的各样片，按照与对应膜层作好标识，进行各膜层的膜厚检测工作。
    (6)最后，将各膜层的厚度数据输入电脑制作膜厚分布曲线，根据其趋势对生产工艺参数进行修订。
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