WO2023162674A1 - Élément réfléchissant optique - Google Patents
Élément réfléchissant optique Download PDFInfo
- Publication number
- WO2023162674A1 WO2023162674A1 PCT/JP2023/003967 JP2023003967W WO2023162674A1 WO 2023162674 A1 WO2023162674 A1 WO 2023162674A1 JP 2023003967 W JP2023003967 W JP 2023003967W WO 2023162674 A1 WO2023162674 A1 WO 2023162674A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- movable
- reflecting element
- optical reflecting
- movable portion
- detection
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 56
- 238000001514 detection method Methods 0.000 claims abstract description 117
- 230000004048 modification Effects 0.000 description 37
- 238000012986 modification Methods 0.000 description 37
- 238000005452 bending Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000012447 hatching Effects 0.000 description 5
- 230000002452 interceptive effect Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Abstract
L'invention concerne un élément réfléchissant optique (1) comprenant : une partie mobile (40) ayant une surface supérieure sur laquelle une surface réfléchissante (61) est formée ; une partie fixe (10) qui supporte la partie mobile (40) de telle sorte que la partie mobile peut tourner autour d'un axe de rotation (R10) ; une partie d'entraînement qui fait tourner la partie mobile (40) autour de l'axe de rotation (R10) ; et une partie de détection (70) qui détecte la rotation de la partie mobile (40). La partie de détection (70) est formée d'un seul tenant avec la partie mobile (40) dans une plage sur la surface supérieure de la partie mobile (40).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-028560 | 2022-02-25 | ||
| JP2022028560 | 2022-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2023162674A1 true WO2023162674A1 (fr) | 2023-08-31 |
Family
ID=87765657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2023/003967 WO2023162674A1 (fr) | 2022-02-25 | 2023-02-07 | Élément réfléchissant optique |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2023162674A1 (fr) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003131161A (ja) * | 2001-07-11 | 2003-05-08 | Canon Inc | 光偏向器及びその製造方法、それを用いた光学機器そしてねじれ揺動体 |
| JP2005326465A (ja) * | 2004-05-12 | 2005-11-24 | Canon Inc | 光偏向器 |
| JP2011150055A (ja) * | 2010-01-20 | 2011-08-04 | Stanley Electric Co Ltd | 光偏向器及びこれを用いた光学装置 |
| WO2013136759A1 (fr) * | 2012-03-15 | 2013-09-19 | パナソニック株式会社 | Élément optique réfléchissant et actionneur |
| JP2014123020A (ja) * | 2012-12-21 | 2014-07-03 | Seiko Epson Corp | アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ |
| JP2017207630A (ja) * | 2016-05-18 | 2017-11-24 | スタンレー電気株式会社 | 光偏向器 |
| WO2020045152A1 (fr) * | 2018-08-31 | 2020-03-05 | パナソニックＩｐマネジメント株式会社 | Élément optique réfléchissant |
-
2023
- 2023-02-07 WO PCT/JP2023/003967 patent/WO2023162674A1/fr unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003131161A (ja) * | 2001-07-11 | 2003-05-08 | Canon Inc | 光偏向器及びその製造方法、それを用いた光学機器そしてねじれ揺動体 |
| JP2005326465A (ja) * | 2004-05-12 | 2005-11-24 | Canon Inc | 光偏向器 |
| JP2011150055A (ja) * | 2010-01-20 | 2011-08-04 | Stanley Electric Co Ltd | 光偏向器及びこれを用いた光学装置 |
| WO2013136759A1 (fr) * | 2012-03-15 | 2013-09-19 | パナソニック株式会社 | Élément optique réfléchissant et actionneur |
| JP2014123020A (ja) * | 2012-12-21 | 2014-07-03 | Seiko Epson Corp | アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ |
| JP2017207630A (ja) * | 2016-05-18 | 2017-11-24 | スタンレー電気株式会社 | 光偏向器 |
| WO2020045152A1 (fr) * | 2018-08-31 | 2020-03-05 | パナソニックＩｐマネジメント株式会社 | Élément optique réfléchissant |
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