WO2023162492A1 - Dispositif de mesure d'odeur - Google Patents

Dispositif de mesure d'odeur Download PDF

Info

Publication number
WO2023162492A1
WO2023162492A1 PCT/JP2023/000472 JP2023000472W WO2023162492A1 WO 2023162492 A1 WO2023162492 A1 WO 2023162492A1 JP 2023000472 W JP2023000472 W JP 2023000472W WO 2023162492 A1 WO2023162492 A1 WO 2023162492A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
substrate
housing
odor
sensor substrate
Prior art date
Application number
PCT/JP2023/000472
Other languages
English (en)
Japanese (ja)
Inventor
佐藤和紀
恩田陽介
服部将志
Original Assignee
太陽誘電株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 太陽誘電株式会社 filed Critical 太陽誘電株式会社
Publication of WO2023162492A1 publication Critical patent/WO2023162492A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00—Details not covered by any other group of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

Definitions

  • the present invention relates to an odor measuring device.
  • an object of the present invention is to provide an odor measuring device capable of achieving a smaller flow channel space and improved detection sensitivity.
  • a sensor substrate provided with an odor sensor; a housing having an inner wall forming a flow path for supplying gas to the odor sensor, one surface of the inner wall being the main surface of the sensor substrate; a mounting board on which a power source for driving is mounted, which is located below the sensor board and is provided in the housing; a connecting portion detachable from the sensor substrate for electrically connecting the sensor substrate and the mounting substrate; an inlet provided in the housing and connected to the flow path and taking in the gas from the outside; a discharge port provided in the housing and connected to the flow path for discharging the gas to the outside; is solved by an odor measuring device having at least Second,
  • the sensor substrate is composed of a plurality of unit substrates, the first unit substrate is attached with the environment sensor, and the second unit substrate is attached with the odor sensor.
  • the housing includes a first housing having a recessed space for housing the sensor substrate, and a lid body connected to the first housing and constituting a lid of the first housing, The problem is solved by configuring the flow path with the main surface of the sensor substrate and the surface of the lid on the concave space side.
  • the problem is solved by arranging the sensor substrate close to the surface of the inner wall facing the sensor substrate. Further, the distance between the main surface of the sensor substrate and the surface of the inner wall facing the sensor substrate is perpendicular to the direction in which the main surface and the facing surface are arranged and to the direction in which the gas flows. This is solved by making the distance between the facing surfaces of the inner wall shorter than the distance in the direction.
  • the connection part is a lead pin or a connector, which solves the problem.
  • the housing has an upper surface to which the inlet is connected and a lower surface facing the upper surface, The lower surface is provided with an opening in which the sensor substrate is arranged and a concave portion facing the inlet and having a bottom surface whose distance from the upper surface is greater than the distance between the upper surface and the main surface. It is a solution.
  • Each of the plurality of unit substrates has a side surface surrounding the main surface, and the side surfaces contact each other to form the sensor substrate.
  • FIG. 1 is a perspective view of an odor measuring device according to a first embodiment of the present invention
  • FIG. Fig. 3 is an exploded perspective view of a partial configuration of the odor measuring device
  • FIG. 2 is a plan view of a partial configuration of the odor measuring device
  • FIG. 4 is a cross-sectional view of the odor measuring device, and is a cross-sectional view taken along the line AA in FIG. 3.
  • FIG. FIG. 4 is a cross-sectional view of a partial configuration of the odor measuring device, and is a cross-sectional view taken along the line AA in FIG. 3.
  • FIG. FIG. 3 is a perspective view of a second housing included in the odor measuring device;
  • FIG. Fig. 3 is an exploded perspective view of a partial configuration of the odor measuring device
  • FIG. 2 is a plan view of a partial configuration of the odor measuring device
  • FIG. 4 is a cross-sectional view of the odor measuring device, and is a cross-sectional
  • FIG. 4 is a perspective view of a sensor substrate included in the odor measuring device; 8 is a cross-sectional view of the sensor substrate, and is a cross-sectional view taken along line BB of FIG. 7.
  • FIG. 4 is a perspective view of an odor sensor unit substrate that constitutes the sensor substrate;
  • FIG. 4 is a cross-sectional view of the odor sensor unit substrate.
  • FIG. 4 is a perspective view of an environment sensor unit substrate that constitutes the sensor substrate; 4 is a cross-sectional view of the environment sensor unit substrate;
  • FIG. FIG. 2 is a perspective view of a sensor board and a mounting board connected by a connecting portion provided in the odor measuring device;
  • FIG. 14 is a cross-sectional view of the sensor substrate and the mounting substrate connected by the connecting portion, and is a cross-sectional view taken along line CC of FIG. 13; It is a cross-sectional view of a unit substrate and a connecting portion provided in the odor measuring device.
  • FIG. 3 is a perspective view of the unit board and the connecting portion;
  • FIG. 4 is a cross-sectional view of a housing, a sensor substrate, a mounting substrate, and a connecting portion included in the odor measuring device, and is a cross-sectional view taken along line DD in FIG.
  • FIG. 3 is a schematic diagram showing the distance S1 between the bottom surface of the concave portion and the upper surface of the channel space and the distance S2 between the first main surface of the sensor substrate and the upper surface of the channel space in the odor measuring device.
  • FIG. 3 is a schematic diagram of an airflow F1 in the odor measuring device;
  • FIG. 3 is a schematic diagram of an airflow F2 in the odor measuring device;
  • FIG. 3 is a schematic diagram showing the size of a mounting substrate included in the odor measuring device;
  • FIG. 3 is a schematic diagram showing the size of an odor sensor unit substrate included in the odor measuring device.
  • FIG. 4 is a schematic diagram showing the size of the environment sensor unit substrate included in the odor measuring device.
  • FIG. 3 is a schematic diagram showing sizes of lead pins provided in the odor measuring device.
  • FIG. 4 is a schematic diagram showing the size of a second housing included in the odor measuring device;
  • the odor measurement device 100 includes a housing 101, a sensor substrate 102, an odor sensor 103 and an environment sensor 104 mounted on the sensor substrate 102, and a mounting substrate 105 located below the sensor substrate 102. , a sensor control circuit 106 and a power supply circuit 107 provided on the mounting board 105, a connecting portion 108 connecting the sensor board 102 and the mounting board 105, a first pump 109, a second pump 110, and a pump positioned above the housing 101.
  • a control circuit 111 is provided.
  • the odor measuring device 100 is a device for measuring odorous substances contained in gas (for example, air).
  • the housing 101 is composed of a plurality of members, and constitutes a container for storing sensors, circuits, printed circuit boards, and the like. It has a channel for introducing the gas M, an internal space for passing the gas to the odor sensor 103, and a channel for discharging to the outside.
  • the housing 101 is composed of three members, a first housing 131, a second housing 132 and a third housing 133, which are joined together by screws 134.
  • an internal space 141 is formed by the first housing 131 and the second housing 132 .
  • the first housing 131 is a lid, functions as a lid, and is roughly plate-shaped, and the second housing 132 is box-shaped with four side walls and a bottom. Since a packing (not shown) is arranged between each housing, the first housing 131 and the second housing 132 are kept in close contact with each other.
  • 3 is a view of the second housing 132 from above with the first housing 131 and the third housing 133 removed, and the mounted sensor substrate 102 can be seen.
  • the housing 101 is provided with a first channel 151 , a second channel 152 and a third channel 153 .
  • the first flow path 151 is provided in the first housing 131 and the third housing 133 and allows the internal space 141 and the outside of the housing 101 to communicate with each other.
  • the first housing 131 has a space for housing the first pump 109 and the second pump 110, and the upper plate thereof is provided with first and second through holes, respectively.
  • the first housing 131 also has third and fourth through holes corresponding to these two holes.
  • a first flow path 151 is directed to the internal space 141 via the first through hole, the first pump, and the third through hole.
  • the second flow path 152 is the second through hole, the second pump, and the fourth through hole.
  • the third channel 153 is provided on the side wall of the first housing 131 and allows the internal space 141 and the outside of the housing 101 to communicate with each other.
  • the third flow path 153 is located on the diagonally upper right side wall, and the first flow path 151 and the second flow path 152 are arranged upward from the diagonally lower left side wall facing the third flow path. Although it is provided, it may be provided on the left obliquely lower side wall.
  • Each of the first housing 131, the second housing 132, and the third housing 133 is integrally molded with heat-resistant and chemical-resistant resin such as PTFE (polytetrafluoroethylene). However, it may be a metal member such as aluminum, Cu, or stainless steel. Alternatively, separate parts may be prepared with different materials such as resin or metal and combined.
  • the internal space 141 has an upper surface 141a serving as the lower surface of the first housing 131, a lower surface 141b facing the upper surface 141a, and a side surface 141c surrounding the upper surface 141a and the lower surface 141b.
  • the bottom surface and four side surfaces of the second housing 132 correspond to each other.
  • a recess 142 and an opening 143 are provided in the lower surface 141b.
  • a first flow path 151 and a second flow path 152 are connected to the upper surface 141a, and the concave portion 142 is provided at a position facing the first flow path 151 and the second flow path 152 in the lower surface 141b.
  • the sensor board 102 is a printed board made of a resin material having wiring, and the smell sensor 103 and the environment sensor 104 are mounted thereon.
  • the sensor substrate 102 may be a ceramic substrate or the like.
  • the sensor substrate 102 has a first major surface 102a, a second major surface 102b and side surfaces 102c as shown in FIGS.
  • the first main surface 102a and the second main surface 102b are opposite main surfaces, and the side surface 102c is a surface surrounding the first main surface 102a and the second main surface 102b.
  • one direction parallel to the first principal surface 102a and the second principal surface 102b is defined as the X direction, and a direction parallel to these principal surfaces and perpendicular to the X direction is defined as the Y direction. Also, the direction perpendicular to these main surfaces is defined as the Z direction.
  • the sensor board 102 is composed of four odor sensor unit boards 161 and one environment sensor unit board 162 .
  • Unit boards 161 and 162 are a first unit board and a second unit board, respectively.
  • each unit substrate 161 has a first main surface 161a, a second main surface 161b and side surfaces 161c.
  • the first main surface 161a and the second main surface 161b are opposite main surfaces, and the side surface 161c is a surface surrounding the first main surface 161a and the second main surface 161b.
  • a plurality of first electrodes (not shown) are provided on the first main surface 161a, and the odor sensor 103 is connected to the first electrodes and mounted on the first main surface 161a.
  • the odor sensor 103 is composed of one oscillation circuit 163 and two odor sensor elements 164, which are mounted on the first principal surface 161a via first electrodes.
  • the number of sensor elements 164 constituting the odor sensor 103 may be one or three or more.
  • a plurality of odor sensors 103 may be mounted on one unit substrate 161 .
  • a plurality of second electrodes are provided on the second main surface 161b. It is connected to the.
  • the unit board 162 has a first main surface 162a, a second main surface 162b and side surfaces 162c.
  • the first main surface 162a and the second main surface 162b are opposite main surfaces, and the side surface 162c is a surface surrounding the first main surface 162a and the second main surface 162b.
  • a first electrode (not shown) is provided on the first main surface 162a, and the environment sensor 104 is connected to this first electrode and mounted on the first main surface 162a.
  • a second electrode (not shown) is provided on the second main surface 162b, and the first electrode is electrically connected to the second electrode by an in-substrate wiring that connects the first main surface 162a and the second main surface 162b.
  • Unit substrate 161 and unit substrate 162 are supported on mounting substrate 105 by connecting portion 108 as shown in FIGS. As shown in FIG. 7, the side surfaces 161c and 162c of the unit substrates 161 and 162 are in contact with each other to form the sensor substrate 102. As shown in FIG. The first main surface 161 a and the first main surface 162 a of each unit substrate 161 and unit substrate 162 are positioned on the same plane and constitute the first main surface 102 a of the sensor substrate 102 . A second main surface 161 b and a second main surface 162 b of each unit substrate 161 and unit substrate 162 are positioned on the same plane and constitute a second main surface 102 b of sensor substrate 102 . Of the side surfaces 161 c and 162 c of each unit substrate 161 and unit substrate 162 , the surface located on the outer periphery of sensor substrate 102 constitutes side surface 102 c of sensor substrate 102 .
  • the number of unit substrates 161 and 162 constituting the sensor substrate 102 is not particularly limited, and each may be one or more. Further, sensor substrate 102 may be a single substrate. In this case, the odor sensor 103 and the environment sensor 104 are mounted together on the same plane.
  • the two electrodes provided on the second main surface 102b are electrically connected to the first electrode by an in-substrate wiring that connects the first main surface 102a and the second main surface 102b.
  • the odor sensor 103 absorbs odor substances and moisture contained in the gas, and outputs a detection value corresponding to the amount of adsorption.
  • the oscillation circuit 163 supplies a predetermined drive signal to the odor sensor element 164 to vibrate the odor sensor element 164 at a predetermined resonance frequency.
  • the resonance frequency of the odor sensor element 164 changes.
  • a piezoelectric vibrator such as an FBAR (Film Bulk Acoustic Resonator) element, a QCM (Quartz Crystal Microbalance) element, or a SAW (Surface Acoustic Wave) element can be used as the odor sensor element 164 .
  • a capacitive odor sensor in which the dielectric constant of the film changes and a resistive sensor with a MEMS structure.
  • a rectangular parallelepiped chip having a sensitive film on the front surface and a back surface of the chip that can be connected to the sensor substrate 102 by soldering or the like is preferable.
  • a plurality of odor sensors 103 are mounted on the sensor substrate 102 .
  • the adsorption film of each odor sensor 103 is made of a different material for each odor sensor 103 .
  • the odor contained in the gas M to be measured contains one or more gases or suspended substances containing a plurality of gaseous chemical components.
  • a different adsorption film is used for each odor sensor 103, and various odor substances can be detected by comprehensively judging the output thereof.
  • Adsorption membranes include cellulose, fluoropolymer, lecithin, phthalocyanine compound, porphyrin compound, polyimide, polypyrrole, polystyrene, acrylic polymer, sphingomyelin, polybutadiene, polyisoprene, polyvinyl alcohol polymer, UiO-66, MIL-125, A metal organic framework (MOF) such as ZI-8 can be used. Also, the adsorption film may be formed by coating the device with any one of these materials, or by laminating or mixing two or more materials.
  • MOF metal organic framework
  • the environment sensor 104 detects the humidity, pressure and/or temperature of the gas within the sensor space 144b.
  • the environmental sensors 104 are prepared, for example, one each of a temperature sensor, a humidity sensor, and an atmospheric pressure sensor. Only a temperature sensor or only a humidity sensor may be used, or a plurality of each may be used.
  • a commercially available humidity sensor such as a QCM sensor provided with a sensitive film having adsorption property to water vapor, a resistance type, a capacitance type, or the like can be used.
  • a thermistor or an electronic sensor using Pt can be used as the temperature sensor. Note that only one of the temperature sensor and the humidity sensor among the environment sensors 104 may be mounted on the unit substrate 162 . Also, the environment sensor 104 is not mounted on the sensor substrate 102, and may be provided in another portion or may be omitted.
  • the mounting board 105 is a printed board made of a resin material having wiring, and as shown in FIG. 4, the sensor control circuit 106 and the power supply circuit 107 are mounted.
  • the mounting substrate 105 may be a ceramic substrate or the like.
  • the mounting board 105 has a third main surface 105a, a fourth main surface 105b and side surfaces 105c. When the mounting substrate 105 and the sensor substrate 102 are connected by the connecting portion 108, the third main surface 105a faces the second main surface 102b.
  • a third electrode (not shown) is provided on the third main surface 105a, and a fourth electrode (not shown) is provided on the fourth main surface 105b.
  • the third electrode and the fourth electrode are electrically connected by wiring in the substrate.
  • the sensor control circuit 106 and the power circuit 107 are mounted on the fourth main surface 105b and electrically connected to the fourth electrode.
  • the sensor control circuit 106 executes processing of signals output from the odor sensor 103 and communication with the outside, and includes, for example, BLE (Bluetooth (registered trademark) Low Energy) elements.
  • the sensor control circuit 106 also includes a circuit for driving the odor sensor 103 and a power source for driving the circuit. This power supply becomes a heat source.
  • Circuit board 191 supplies drive power to first pump 109 and second pump 110 .
  • the power supply circuit 107 includes a circuit element 172 mounted on a circuit board 171 and a connector 173 electrically connecting the circuit board 171 and the fourth electrode, as shown in FIG.
  • the configuration of the power supply circuit 107 is not limited to this, and the circuit element 172 may be directly mounted on the fourth main surface 105b.
  • connection part 108 is arranged between the mounting board 105 and the sensor board 102 as shown in FIGS. Also, the connecting portion 108 electrically connects the mounting substrate 105 and the sensor substrate 102 . Specifically, the connecting portion 108 is physically connected to each of the second main surface 102b and the third main surface 105a, and is connected to the second electrode provided on the second main surface 102b and the third main surface 105a. is electrically connected to the third electrode provided on the .
  • This connecting portion 108 can have the following effects.
  • the first effect is that the unit substrates 161 and 162 can be individually replaced. If each unit board is composed of one sheet, normal sensors will also be discarded, resulting in high costs.
  • a second effect is to make the gas M in the sensor chamber as uniform as possible.
  • the sensor substrate 102 is used as part of the internal space 141 or a part of the flow path, and the distance between the sensor substrate 102 forming the sensor chamber and the first housing 131 forming the upper surface is narrowed. , the flowing gas M is made into a thin laminar flow and made uniform. As a result, the gas M supplied to a plurality of sensors has the same conditions.
  • the volume of the space serving as the sensor chamber is small, the time required for the temperature to reach equilibrium, the replacement of the gas, and the uniform distribution of the gas can be shortened.
  • the distance between the main surface of the sensor substrate 102 and the surface (upper surface 141a) facing the sensor substrate 102 be the first distance.
  • the distance between the main surface of the sensor substrate 102 and the upper surface 141a (side surface 141c) in the direction (Y direction) orthogonal to the arrangement direction (Z direction) and orthogonal to the gas flow direction (X direction) is measured as the first 2 distance. At this time, it is preferable to make the first distance shorter than the second distance.
  • the first distance is preferably 1/2 or less of the second distance, more preferably 1/5 or less, and even more preferably 1/10 or less.
  • a third effect is that the influence of temperature is suppressed by separating the odor sensor 103 from the mounting board 105 which is a heat source.
  • a lead pin is preferable for connection of the sensor substrate 102 to the mounting substrate 105 in order to generate these effects.
  • soldering or connector connection can be selected. This connector can be easily removed if an insertion type connector with male leads and female leads is connected to the mounting board.
  • connection portion 108 includes lead pin 181 and connector 182 . As shown in FIGS.
  • a plurality of lead pins 181 are provided on the second main surface 161b of each unit substrate 161.
  • the lead pin 181 is a pin made of metal, conducts to the second electrode, and protrudes in the vertical direction (Z direction) from the second main surface 161b.
  • Each unit board 162 is supported and electrically connected to the mounting board 105 by inserting these lead pins 181 into holes provided in the third main surface 105a of the mounting board 105 .
  • the holes are for example plated through holes.
  • Each lead pin 181 is inserted into a hole penetrating from the third main surface 105a to 105b and connected to the plated hole. It is generally soldered.
  • the arrangement of the lead pins 181 on the second main surface 161b is not particularly limited, but as shown in FIG. Since it is arranged in .
  • the lead pin 181 is fixed to each unit board 161 and can be inserted into and removed from the mounting board 105 . If each unit board 161 is provided with a female connector on the mounting board 105 together with the lead pin 181, the unit board 161 can be detached from the mounting board 105, facilitating replacement when the odor sensor 103 fails or when the detection target is changed.
  • the connector 182 is provided with the second main surface 162b of the unit substrate 162.
  • the connector 182 is fitted with a connector provided on the third main surface 105a, supports the unit board 162 with respect to the mounting board 105, and electrically connects the second electrode and the third electrode.
  • the configuration of the connector 182 is not particularly limited as long as it is removable. As a result, the unit board 162 can also be attached to and detached from the mounting board 105 .
  • the unit board 162 may be connected to the mounting board 105 by the lead pins 181 like the unit board 161 instead of the connector 182 . Also. Each unit board 161 may be connected to the mounting board 105 by a connector 182 similar to the unit board 162 instead of the lead pin 181 . Further, the connecting portion 108 may be any other than the lead pin 181 and the connector 182 as long as it can separate the sensor substrate 102 and the mounting substrate 105 and electrically connect the sensor substrate 102 and the mounting substrate 105 .
  • the sensor board 102 and the mounting board 105 connected to each other by the connecting portion 108 shown in FIG. 14 are fixed to the housing 101 and housed.
  • the third main surface 105a of the mounting substrate 105 is joined to the lower surface 132a of the second housing 132.
  • This joining is not particularly limited to screwing, adhesion, or the like.
  • a packing (not shown) is arranged between the mounting board 105 and the second housing 132 .
  • the fourth main surface 105b is opposite to the lower surface 132a and does not face the internal space 141.
  • the sensor board 102 is fitted and inserted into the opening 143, and as shown in FIG.
  • the side surface 102c of the sensor substrate 102 contacts the inner peripheral surface of the opening 143 to close the opening 143.
  • the internal space 141 is defined by the first housing 131 , the second housing 132 and the mounting board 105 .
  • the sensor substrate 102 is separated from the mounting substrate 105 by the connecting portion 108 , and divides the internal space 141 into a channel space 144 and a non-channel space 145 .
  • the channel space 144 is a space surrounded by the first main surface 102a, the upper surface 141a, the lower surface 141b, and the side surface 141c, and is a space forming a channel of the gas M.
  • the channel space 144 includes a recessed space 144a that is the space between the recessed portion 142 and the upper surface 141a, and a sensor space 144b that is the space between the lower surface 141b and the first main surface 102a and the upper surface 141a.
  • the first main surface 102a forms one surface of the sensor space 144b.
  • the sensor substrate 102 is arranged close to the upper surface 141a of the first housing 131, which is the surface of the recessed space 144a side.
  • the first channel 151 and the second channel 152 are connected to the recess space 144a, and the third channel 153 is connected to the sensor space 144b.
  • the concave space 144a may not necessarily be provided, and the first channel 151 and the second channel 152 may be connected to the sensor space 144b.
  • the non-flow path space 145 is a space surrounded by the second main surface 102b, the third main surface 103b, and the housing, and is a space in which the flow path of the gas M is not formed.
  • the connecting portion 108 is located within the non-flow space 145 .
  • Gas M flowing through channel space 144 is prevented from flowing into non-channel space 145 by sensor substrate 102 .
  • the side surface 161c of the unit substrate 161 and the side surface 162c of the unit substrate 162 are brought into contact with each other to block the flow of the gas M between the channel space 144 and the non-channel space 145. .
  • the non-flow path space 145 Even if a small amount of gas M flows into the non-flow path space 145, the non-flow path space 145 is sealed by the mounting substrate 105, so the gas M stays in the non-flow path space 145. Inflow is prevented. In particular, heat from the mounting board 105 is not directly transmitted to the sensor board, thereby preventing malfunction. In addition, if the non-channel space 145 communicates with the outside air below, the heat can be released to the outside.
  • the recesses 142 are provided at positions facing the first flow path 151 and the second flow path 152 on the lower surface 141b. Thereby, as shown in FIG. 19, the distance S1 between the bottom surface 142a and the top surface 141a of the recess 142 can be made larger than the distance S2 between the first main surface 102a and the top surface 141a.
  • the first pump 109 is arranged in the first channel 151 and pumps the gas M to be measured into the channel space 144 . Also, the first pump 109 may be arranged outside the first channel 151 . The first pump 109 closes the first flow path 151 when the operation is stopped.
  • the flow of the gas M by the first pump 109 is indicated by symbol F1 in FIG.
  • the gas M flows from the outside through the first channel 151 into the recessed space 144a, flows from the recessed space 144a into the sensor space 144b, and is discharged from the third channel 153.
  • the first flow path 151 is connected to the flow path space 144, which is a flow path, and is an inlet for taking in gas from the outside.
  • the third flow path 153 is connected to the flow path space 144, and is an outlet for discharging the gas to the outside. is. Therefore, the flow passage space 144 has a positive pressure.
  • airflow F1 the flow of gas M in this odor measuring device 100 is referred to as "airflow F1".
  • the first pump 109 is, for example, a diaphragm pump. Also, instead of the first pump 109 , the odor measuring apparatus 100 may have a gas delivery mechanism such as a fan that operates in the same manner as the first pump 109 .
  • a second pump 110 is disposed in the second flow path 152 to pump cleaning gas into the flow space 144 .
  • the cleaning gas is gas that does not contain odorants.
  • the second pump 110 may be arranged outside the second flow path 152 .
  • the second pump 110 closes the second flow path 152 when the operation is stopped.
  • the cleaning gas flows from the second channel 152 into the recessed space 144a, flows from the recessed space 144a into the sensor space 144b, and is discharged from the third channel 153 as shown in FIG.
  • the second pump 110 is, for example, a diaphragm pump.
  • the odor measuring apparatus 100 may include a gas delivery mechanism such as a fan that operates in the same manner as the second pump 110 .
  • the odor measuring apparatus 100 has a separate cleaning mechanism, but the second pump 110 and the second channel 152 are omitted, and the first pump 109 and the first channel 151 are used for both cleaning and measurement. good too. That is, cleaning can be performed by sucking the cleaning gas with the first pump 109 after measuring the odorant.
  • the pump control circuit 111 includes a circuit board 191 and a control element 192 mounted on the circuit board 191, and controls the first pump 109 and the second pump 110, as shown in FIG.
  • the configuration of the pump control circuit 111 is not particularly limited.
  • the channel space 144 is cleaned.
  • the second pump 110 is driven, and the cleaning gas flows from the second channel 152 into the channel space 144 and is discharged from the third channel 153 .
  • the cleaning gas not only takes in the odorous substances and moisture adsorbed on the adsorption film and releases them to the outside, but also cleans the odorous substances adsorbed on the inner wall of the channel space 144 and the like.
  • the first main surface 102 a and the side surface 102 c of the sensor substrate 102 are covered with the housing 101 and together with the inner peripheral surface of the housing 101 form a channel space 144 .
  • the area of the substrate exposed to the flow path space 144 is smaller than when the entire mounting substrate 105 is covered, and the area of the flow path space 144 occupied by the housing 101 is reduced. Since it can be made small, the airtightness of the channel space 144 and the rigidity of the housing 101 are improved.
  • the area of the channel space 144 in the direction parallel to the sensor substrate 102 can be reduced, and the gas M can be efficiently supplied to the odor sensor 103 .
  • the area of the channel space 144 in the direction perpendicular to the sensor substrate 102 can be minimized. As a result, turbulent flow in this direction is less likely to occur, and the gas M can easily flow uniformly through the odor sensors 103. At the same time, the flow velocity of the gas M is increased by reducing the area of the channel space 144. FIG.
  • the capacity of the sensor chamber can be reduced, the internal gas can be quickly replaced, the responsiveness to the gas can be improved, and the cleaning time can be shortened. Furthermore, by separating the sensor substrate 102 from the mounting substrate 105, it becomes possible to provide the recess 142 side by side with the sensor substrate 102 as shown in FIG.
  • the gas M flowing into the channel space 144 from the first channel 151 and the second channel 152 becomes a laminar flow after making the gas turbulent.
  • the odor substance can be uniformly supplied to a plurality of odor sensors.
  • a non-flow path space 145 is provided between the sensor substrate 102 and the mounting substrate 105, and thermal resistance is generated from the mounting substrate 105 to the sensor substrate 102 by the gas in the non-flow space 145. Therefore, the heat generated from the mounting board 105 is less likely to be transmitted to the sensor board 102 , thereby reducing the thermal influence on the odor sensor 103 .
  • the mounting substrate 105 is provided with a power supply circuit 107 serving as a heat source. Therefore, the thermal effect of the power supply circuit 107 can also be reduced.
  • the first pump 109 sends the gas M from the first channel 151 to the channel space 144, but the gas may be sent in the opposite direction. That is, the first pump 109 may suck the gas in the channel space 144 and discharge it to the outside through the first channel 151 .
  • the flow of the gas M by the first pump 109 in this case is indicated by symbol F2 in FIG.
  • the gas M flows from the third channel 153 into the sensor space 144b, flows from the sensor space 144b into the recessed space 144a, and is discharged from the first channel 151.
  • FIG. Therefore, the pressure in the channel space 144 becomes negative.
  • airflow F2 the flow of the gas M in this odor measuring device 100
  • the second pump 110 may also suck the gas in the channel space 144 and discharge it to the outside through the second channel 152 .
  • the cleaning gas flows from the third channel 153 into the sensor space 144b, flows from the sensor space 144b into the recessed space 144a, and is discharged from the second channel 152.
  • FIG. 21 the cleaning gas flows from the third channel 153 into the sensor space 144b, flows from the sensor space 144b into the recessed space 144a, and is discharged from the second channel 152.
  • the mounting substrate 105 has, for example, a rectangular shape with a short side (Y direction) length L1 of 54.4 mm and a long side (X direction) length L2 of 70.4 mm.
  • the length L1 is preferably 36 mm or more and 65 mm or less, and the length L2 is preferably 36 mm or more and 80 mm or less.
  • the unit substrate 161 has, for example, a rectangular shape with a long side (Y direction) length L3 of 16 mm and a short side (X direction) length L4 of 13 mm.
  • the length L3 is preferably 16 mm or more and 20 mm or less, and the length L4 is preferably 13 mm or more and 17 mm or less.
  • the unit substrate 162 has, for example, a rectangular shape with a long side (Y direction) length L5 of 14 mm and a short side (X direction) length L6 of 6 mm.
  • the length L5 is preferably 14 mm or more and 40 mm or less, and the length L6 is preferably 6 mm or more and 10 mm or less.
  • Each of the mounting substrate 105, the unit substrate 161, and the unit substrate 162 has a thickness (Z direction) of, for example, 1.6 mm, preferably 1 mm or more and 5 mm or less. Each substrate has sufficient strength if it has a thickness of 1 mm or more.
  • the length L7 (Z direction) of the lead pin 181 is, for example, 4.7 mm.
  • the length L7 is preferably 3 mm or more and 6 mm or less.
  • the length L8 of the long side (X direction) of the channel space 144 is, for example, 52.4 mm, preferably 50 mm or more and 60 mm or less.
  • a distance S1 (in the Z direction) between the bottom surface 142a and the top surface 141a of the concave portion 142 shown in FIG. 19 is, for example, 6.4 mm, preferably 5 mm or more and 10 mm or less.
  • a distance S2 (in the Z direction) between the first main surface 102a and the upper surface 141a is, for example, 1.6 mm, preferably 1 mm or more and 10 mm or less.
  • the thickness (Z direction) of the second housing 132 is, for example, 9.5 mm, and the thickness of the distance S1+2 mm or more and 5 mm or less is suitable. Note that the size of each part of the odor measuring device 100 shown above is an example, and can be changed as appropriate.

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Dispositif de mesure d'odeur comprenant un substrat de capteur, un boîtier, un substrat de montage, une pièce de connexion, un orifice d'entrée et un orifice de décharge.　Le substrat de capteur est pourvu d'un capteur d'odeur. Le boîtier présente une paroi interne qui forme un canal qui fournit du gaz au capteur d'odeur, une surface de la paroi interne étant une surface principale du substrat de capteur. Le substrat de montage présente une alimentation électrique d'entraînement montée sur ce dernier et est disposé sur le boîtier de façon à être au-dessous du substrat de capteur à un intervalle de ce dernier. La pièce de connexion est électriquement connectée au substrat de capteur et au substrat de montage et peut être fixée au substrat de capteur ou détachée du substrat de capteur. L'orifice d'entrée est disposé dans le boîtier de façon à communiquer avec le canal et prend du gaz provenant de l'extérieur. L'orifice de sortie est disposé dans le boîtier de façon à communiquer avec le canal et évacue le gaz vers l'extérieur.　
PCT/JP2023/000472 2022-02-28 2023-01-11 Dispositif de mesure d'odeur WO2023162492A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-030386 2022-02-28
JP2022030386 2022-02-28

Publications (1)

Publication Number Publication Date
WO2023162492A1 true WO2023162492A1 (fr) 2023-08-31

Family

ID=87765395

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/000472 WO2023162492A1 (fr) 2022-02-28 2023-01-11 Dispositif de mesure d'odeur

Country Status (1)

Country Link
WO (1) WO2023162492A1 (fr)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177994A (en) * 1991-05-22 1993-01-12 Suntory Limited And Tokyo Institute Of Technology Odor sensing system
JP2003526768A (ja) * 1998-03-20 2003-09-09 サイラノ サイエンシズ，インコーポレイティド 手持ち式感知装置
JP2004286585A (ja) * 2003-03-20 2004-10-14 Seiko Epson Corp 質量測定チップおよびその製造方法ならびに質量測定装置
JP2005337761A (ja) * 2004-05-24 2005-12-08 National Institute Of Advanced Industrial & Technology ガス濃度測定装置及びガスセンサー素子の性能評価装置
JP2005337794A (ja) * 2004-05-25 2005-12-08 Nippon Telegr & Teleph Corp <Ntt> ガスセンサ
JP2009222669A (ja) * 2008-03-18 2009-10-01 Seiko Epson Corp 質量測定装置
WO2018061092A1 (fr) * 2016-09-27 2018-04-05 株式会社アロマビット Dispositif de mesure d'odeur et dispositif de gestion de données d'odeur
WO2021172592A1 (fr) * 2020-02-28 2021-09-02 太陽誘電株式会社 Dispositif de détection de gaz

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177994A (en) * 1991-05-22 1993-01-12 Suntory Limited And Tokyo Institute Of Technology Odor sensing system
JP2003526768A (ja) * 1998-03-20 2003-09-09 サイラノ サイエンシズ，インコーポレイティド 手持ち式感知装置
JP2004286585A (ja) * 2003-03-20 2004-10-14 Seiko Epson Corp 質量測定チップおよびその製造方法ならびに質量測定装置
JP2005337761A (ja) * 2004-05-24 2005-12-08 National Institute Of Advanced Industrial & Technology ガス濃度測定装置及びガスセンサー素子の性能評価装置
JP2005337794A (ja) * 2004-05-25 2005-12-08 Nippon Telegr & Teleph Corp <Ntt> ガスセンサ
JP2009222669A (ja) * 2008-03-18 2009-10-01 Seiko Epson Corp 質量測定装置
WO2018061092A1 (fr) * 2016-09-27 2018-04-05 株式会社アロマビット Dispositif de mesure d'odeur et dispositif de gestion de données d'odeur
WO2021172592A1 (fr) * 2020-02-28 2021-09-02 太陽誘電株式会社 Dispositif de détection de gaz

Similar Documents

Publication Publication Date Title
US20190302075A1 (en) Actuation-and-detecting module
EP2669654A2 (fr) Capteur piézoélectrique et instrument de détection
WO2007047097A1 (fr) Capteur de propriété de liquide à onde acoustique en volume à fonctions multiples
EP1830168A1 (fr) Capteur a quartz et dispositif de detection
US8312774B2 (en) Flow-through pressure sensor apparatus
JP5160584B2 (ja) 感知装置
WO2006064951A1 (fr) Capteur a quartz et dispositif de detection
US20230324344A1 (en) Odor detection device and odor detection method
JP2004009166A (ja) 負圧吸着装置および吸着確認センサ
US11754528B2 (en) Gas detection device
WO2023162492A1 (fr) Dispositif de mesure d&#39;odeur
JP4256871B2 (ja) 水晶センサ及び感知装置
JP6088857B2 (ja) 感知センサ
JP2008051788A (ja) 流体マニフォールド
TWI436063B (zh) Concentration sensor and concentration detection device
JP4473815B2 (ja) 水晶センサ及び感知装置
WO2023119851A1 (fr) Dispositif de mesure d&#39;odeur, procédé de commande de capteur d&#39;odeur et procédé de nettoyage de dispositif de mesure d&#39;odeur
US10620199B2 (en) Sensing sensor and sensing method
TWI776431B (zh) 物質檢測系統
JP6668072B2 (ja) 感知センサ及び感知装置
JP2015004571A (ja) 感知センサ
JP2023161655A (ja) においセンサモジュールおよびにおいセンサ装置
JP4369452B2 (ja) 濃度センサー及び濃度検出装置。
TWM554624U (zh) 具致動傳感模組之電子裝置
JP2592418Y2 (ja) ガスメータ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23759498

Country of ref document: EP

Kind code of ref document: A1