WO2023142653A1 - 分区管理方法、装置、计算机设备和存储介质 - Google Patents

分区管理方法、装置、计算机设备和存储介质 Download PDF

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Publication number
WO2023142653A1
WO2023142653A1 PCT/CN2022/135183 CN2022135183W WO2023142653A1 WO 2023142653 A1 WO2023142653 A1 WO 2023142653A1 CN 2022135183 W CN2022135183 W CN 2022135183W WO 2023142653 A1 WO2023142653 A1 WO 2023142653A1
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Prior art keywords
target
storage bin
information
area
target storage
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PCT/CN2022/135183
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English (en)
French (fr)
Inventor
缪峰
申国莉
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弥费科技(上海)股份有限公司
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Publication of WO2023142653A1 publication Critical patent/WO2023142653A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

Definitions

  • the present application belongs to the technical field of wafer storage device management, and more precisely relates to a partition management method, device, computer equipment and storage medium.
  • a storage cabinet (Stocker) for storing FOUPs is provided in a semiconductor production equipment factory, and each cabinet on a shelf in the storage cabinet is used to store a plurality of wafer transfer boxes (FOUPs).
  • FOUPs wafer transfer boxes
  • An embodiment of the present application provides a partition management method, including: receiving a wafer cassette transport request, the wafer cassette transport request carrying attribute information of the target wafer cassette, current storage bin information, target storage bin information, and the The preset time period during which the target wafer cassette is transported to the target storage bin; the target state information of the target storage bin is obtained according to the attribute information, and the target state information includes the storage information of the physical area of the target storage bin; according to The attribute information and the target state information judge whether there is an available area in the physical area of the target storage bin within the preset time period; when the judgment is no, acquire the area setting information related to the target storage bin and Area storage information in each setting area; perform area setting again according to the area setting information and the area storage information, and transport the target wafer cassette to the target storage bin within the preset time period .
  • the present application also provides a partition management device, the device includes: a request receiving module, configured to receive a wafer cassette transport request, the wafer cassette transport request carries the attribute information of the target wafer cassette, and the current storage bin information , the target storage bin information and the preset time period during which the target wafer cassette is transported to the target storage bin; the storage information acquisition module is used to acquire the target status information of the target storage bin according to the attribute information, and the target status The information includes the storage information of the physical area of the target storage bin; the area judging module is used to judge whether the physical area of the target storage bin exists within the preset time period according to the attribute information and the target state information available area; an area information acquisition module, used to obtain the area setting information of the target storage bin and the area storage information in each setting area when the judgment is no; an area reset module, used to set the information according to the area Re-setting the area according to the area storage information, and transporting the target wafer cassette to the target storage bin within the preset time period.
  • a request receiving module configured to
  • the present application also provides a computer device, including a memory and a processor, the memory stores a computer program, wherein the processor implements the steps of the above method when executing the computer program.
  • the present application also provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the above method are realized.
  • FIG. 1 is a schematic flow diagram of a partition management method in an embodiment of the present application
  • Fig. 2 is a structural block diagram of a partition management device in an embodiment of the present application
  • FIG. 3 is an internal structural diagram of a computer device in an embodiment of the present application.
  • a storage cabinet (Stocker) for storing FOUPs is provided in a semiconductor production equipment factory, and each cabinet on a shelf in the storage cabinet is used to store a plurality of wafer transfer boxes (FOUPs).
  • FOUP wafer transfer boxes
  • the conveying route can be adjusted in time and the quantity of each FOUP stored in each warehouse can be balanced.
  • the relevant technology cannot adjust the conveying path in time, or realize the balance of FOUP well, or store the FOUP on the operation platform corresponding to the process in time when the properties of FOUP change.
  • the purpose of some embodiments of the present application is to provide a partition management method, device, computer equipment, and storage medium, so as to overcome the above-mentioned shortcomings of the prior art.
  • An embodiment of the present application provides a partition management method, including: receiving a wafer cassette transport request, the wafer cassette transport request carrying attribute information of the target wafer cassette, current storage bin information, target storage bin information, and the The preset time period during which the target wafer cassette is transported to the target storage bin; the target state information of the target storage bin is obtained according to the attribute information, and the target state information includes the storage information of the physical area of the target storage bin; according to The attribute information and the target state information judge whether there is an available area in the physical area of the target storage bin within the preset time period; when the judgment is no, acquire the area setting information related to the target storage bin and Area storage information in each setting area; perform area setting again according to the area setting information and the area storage information, and transport the target wafer cassette to the target storage bin within the preset time period .
  • the target status information further includes the storage information of the logical area of the target storage bin, and the judging according to the attribute information and the target status information within the preset time period Whether there is an available area in the physical area of the target storage bin, including: judging whether there is an available area in the physical area of the target storage bin within the preset time period according to the attribute information and the storage information of the physical area; If no, judge whether there is an available area in the logical region of the target storage bin within the preset time period according to the attribute information and the storage information of the logical region, and output a judgment result.
  • the target storage bin is also provided with a cache area, and when the storage information of the target storage bin is not updated in time, resulting in a mistaken determination that the target storage bin has an available area, at the preset time Transporting the target wafer cassette to the buffer area of the target storage bin within a segment.
  • the method when the area setting cannot be re-set according to the area setting information and the area storage information, the method further includes: acquiring temporary state information of a temporary storage bin adjacent to the target storage bin , and according to the temporary state information and the target state information, filter out the handover cassette list information in the target storage bin and the temporary storage bin that can be handed over to each other; hand over the wafer cassette list information according to the handover the wafer cassettes in the target storage bin and the temporary storage bin, and transport the target wafer cassettes into the target storage bin within the preset time period.
  • the wafer cassettes in the target storage bin and the temporary storage bin are transferred according to the transfer wafer cassette list information, and the target wafer cassettes are transferred within the preset time period.
  • Transporting the round box into the target storage bin includes: based on the transfer wafer box list, transferring the first batch of handover wafer boxes in the target storage bin and the temporary storage bin within the preset time period Carry out handover and storage beforehand; transport the target wafer box to the target storage bin within the preset time period; The second batch of handover wafer cassettes in the process are handed over and stored after the preset time period, so as to realize the resetting of the stored wafer cassettes in the target storage bin and the temporary storage bin.
  • the present application also provides a partition management device, the device includes: a request receiving module, configured to receive a wafer cassette transport request, the wafer cassette transport request carries the attribute information of the target wafer cassette, and the current storage bin information , the target storage bin information and the preset time period during which the target wafer cassette is transported to the target storage bin; the storage information acquisition module is used to acquire the target status information of the target storage bin according to the attribute information, and the target status The information includes the storage information of the physical area of the target storage bin; the area judging module is used to judge whether the physical area of the target storage bin exists within the preset time period according to the attribute information and the target state information available area; an area information acquisition module, used to obtain the area setting information of the target storage bin and the area storage information in each setting area when the judgment is no; an area reset module, used to set the information according to the area Re-setting the area according to the area storage information, and transporting the target wafer cassette to the target storage bin within the preset time period.
  • a request receiving module configured to
  • the present application also provides a computer device, including a memory and a processor, the memory stores a computer program, wherein the processor implements the steps of the above method when executing the computer program.
  • the present application also provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the above method are realized.
  • the advantage of this application is that in this application, the priority of FOUP can be obtained by identifying the attributes of FOUP, and the location information of FOUP can be determined according to the attribute priority, so as to ensure that the wafers in FOUP can be processed in the nearest process, and further Shorten working hours and improve production efficiency.
  • the processing technology corresponding to the wafer balances the situation of the wafer cassettes stored in the target storage warehouse, and when the properties of the FOUP conveyed on the conveyor line change, the storage warehouse can be changed in time, not only ensuring the accuracy of wafer cassette transportation, but also Moreover, it is also ensured that the wafer cassettes can be stored in the storage bin near the corresponding workbench, so as to prevent the FOUP from waiting and affecting the process flow.
  • each FOUP has its own attributes and priorities, so during the FOUP transmission process, it is necessary to set the priority of the FOUP, and adjust the specific FOUP according to its FOUP priority and attributes. Place a position.
  • the FOUPs to be stored are managed and controlled by partitions, and they are placed more reasonably. , to avoid the problem that the transportation equipment cannot be placed when the FOUP is running, and the placement is unreasonable, so as to improve the utilization rate of the FOUP storage space.
  • the embodiment of the present application provides a partition management method, which can be applied to terminals or servers.
  • Terminals include but are not limited to various personal computers, notebook computers, smart phones, tablet computers, and portable smart devices. Servers It can be implemented with an independent server or a server cluster composed of multiple servers. In one embodiment, the partition management method of FOUP is applied to the MCS system, and the terminal or server operation method includes the following steps:
  • Step 101 receiving a cassette transport request, which carries attribute information of the target cassette, current storage bin information, target storage bin information, and a preset time period for the target wafer cassette to be transported to the target storage bin.
  • the cassette is a wafer transfer box (FOUP) that can transfer different types of wafers.
  • the attribute information can include the priority information of the wafer cassette, which can be identified by numerical value or text.
  • the attribute information can be divided into Un-Know, Common, Standard, HotLot, Empty-Clean-A -Free etc.
  • the storage area priority of the corresponding target storage warehouse can also be divided into Un-Know, Common, Standard, HotLot, Empty-Clean-A-Free, etc.; or the storage area priority of the corresponding target storage warehouse can also be divided into Un- Know, Common, etc.
  • the Common storage area can store four priority wafer cassettes: Common, Standard, HotLot, and Empty-Clean-A-Free.
  • the attribute information may also include the priority information of the wafer box and the value of the required capacity of the wafer box.
  • the target storage bin in the cassette transport request can be selected according to the wafer processing process and the type of wafers in the wafer transfer box (FOUP).
  • the server receives the wafer box transportation request, and can obtain the storage bin information near the corresponding operation table according to the process applicable to the current wafer.
  • the current storage bin information and the target storage bin information may be physical address information corresponding to the storage bin.
  • the server receives the wafer cassette transport request, and the wafer cassette transport request carries attribute information of the target wafer cassette, current storage bin information, target storage bin information, and a preset time period for the target wafer cassette to be transported to the target storage bin.
  • Step 102 obtain the target state information of the target storage bin according to the attribute information, and the target state information includes the storage information of the physical area of the target storage bin.
  • the target status information includes the storage information of the physical area of the target storage bin.
  • the storage information includes the information about the wafer cassettes stored in the current target storage bin.
  • the wafer cassette related information can include storage time period, storage capacity, transportation equipment and many other information .
  • the server obtains the target status information of the target storage bin according to the attribute information.
  • Step 103 judging whether there is an available area in the physical area of the target storage bin within a preset time period according to the attribute information and the target status information.
  • the server judges whether there is an available area in the physical area of the target storage bin within a preset time period according to the attribute information and the target state information.
  • the server can judge whether the physical area of the target storage bin is free within the preset time period, or judge whether the physical area of the target storage bin exists within the preset time period according to the capacity information in the attribute information and the capacity in the target status information Availability zone.
  • Step 104 when the determination is no, acquire the area setting information related to the target storage bin and the area storage information in each setting area.
  • the server determines yes, the server controls the transport system to transport the target wafer cassette to the target storage bin within a preset time period.
  • the server determines no, the server acquires the area setting information related to the target storage bin and the area storage information in each setting area.
  • Step 105 resetting the region according to the region setting information and the region storage information, and transporting the target wafer cassette to the target storage bin within a preset time period.
  • the server may also re-set the region based on the region setting information and the region storage information according to the balance rule, and transport the target wafer cassette to the target storage bin within a preset time period.
  • the server may expand the storage area corresponding to the attribute information of the target wafer cassette, and transport the target wafer cassette to the expanded target storage bin within a preset time period.
  • the balance rule can be to obtain the process flow corresponding to the attribute information of the FOUP, and determine the proportion of each corresponding FOUP according to the process flow, and allocate wafers based on the storage capacity of the storage bin near the operation table Number of boxes to send.
  • the above partition management method can balance the wafer cassettes stored in the target storage warehouse according to the priority of the wafer cassettes and the corresponding processing technology of the wafers, and when the properties of the wafer cassettes on the conveying line change, the transportation can be changed in time
  • the storage bin not only ensures the accuracy of wafer box delivery, but also ensures that the wafer box can be stored in the storage bin near the corresponding workbench.
  • the target status information also includes the storage information of the logical area of the target storage bin, and judging whether there is an available area in the physical area of the target storage bin within a preset period of time according to the attribute information and the target status information includes: according to the attribute Information and storage information of the physical area to determine whether there is an available area in the physical area of the target storage bin within the preset time period; when the judgment is no, judge the target storage bin within the preset time period according to the attribute information and the storage information of the logical area Whether there is an available area in the logical area, and output the judgment result.
  • the physical area of a target storage bin refers to the actual number of shelves reserved for these areas in a target storage bin; the logical area of a target storage bin refers to the theoretical number of shelves that can be set in each area of a target storage bin,
  • the number of shelves can be greater than the actual number of physical shelves corresponding to this area, but the number of shelves in a single logical area cannot be greater than the total number of physical shelves in the target storage warehouse. For example, when the actual number of physical shelves in the storage warehouse is 100, it is evenly distributed to 5 Priority storage areas, each storage area can set the upper and lower limits of the storage quantity, where the number of shelves in the physical area corresponding to each storage area is 20, but the upper limit of the logical area can be set from 20 to 100.
  • the server can reset the corresponding shelves in each area, and can also re-allocate the wafer cassettes stored in the physical area according to the time period in which the wafer cassettes are located.
  • the logical area is divided according to the attributes of FOUPs (wafer cassettes), the purpose of which is to balance the number of different types of FOUPs in each storage bin.
  • the target state information also includes storage information of the logical area of the target storage bin.
  • the server judges whether there is an available area in the physical area of the target storage bin within a preset time period according to the attribute information and the storage information of the physical area. When the server determines yes, the server controls the transport system to transport the target wafer cassette to the target storage bin within a preset time period. When the judgment is no, the server judges whether there is an available area in the logical area of the target storage bin within the preset time period according to the attribute information and the storage information of the logical area, and outputs the judgment result.
  • the target storage bin is also provided with a buffer area, and when the storage information of the target storage bin is not updated in time, resulting in a false determination that there is an available area in the target storage bin, the target wafer cassette will be transported within a preset time period to the cache area of the target storage bin.
  • the server may set the buffer area for transporting and storing the wafer cassette as a temporary storage bin corresponding to the target wafer cassette, and transport the target wafer cassette to the target storage bin when the target storage bin is free.
  • the purpose of the buffer area is to temporarily store the transmitted FOUP in a buffer area when the PORT port used for transfer is occupied during the transmission process to wait for the PORT port to be free before transmitting.
  • the area used for transfer waiting is the buffer area; second, it is used as a reserved area.
  • a wafer box needs to be transferred to machine B for subsequent processing after it is processed from machine A, and machine B is in production.
  • the round box is placed in the storage warehouse near machine B, which is the reserved area. After machine B finishes processing the current wafer box, it will transfer the wafer box to machine B from the storage. It is to reduce the transmission time and reduce the idle time of the machine.
  • the method when the area setting cannot be reset according to the area setting information and the area storage information, the method further includes: obtaining the temporary state information of the temporary storage bin adjacent to the target storage bin, and according to the temporary state information and the Target status information screens out the handover cassette list information in the target storage bin and temporary storage bin that can be handed over to each other; transfers the wafer cassettes in the target storage bin and temporary storage bin according to the transfer wafer box list information, and at the preset time Transport the target wafer cassette to the target storage bin within the segment.
  • the server can also obtain the data adjacent to the target storage bin.
  • the temporary status information of the temporary storage warehouse and filter out the transfer cassette list information in the target storage warehouse and the temporary storage warehouse that can be handed over to each other according to the temporary status information and the target status information;
  • the wafer box in the storage bin and the temporary storage bin and transport the target wafer box to the target storage bin within a preset time period.
  • the parameters included in the temporary state information and the target state information are basically the same.
  • the handover cassette list information may include wafer cassette identification, location information of wafer cassettes stored in different storage bins before and after being exchanged, expected storage time period, exchanged time period, etc.
  • handing over the wafer cassettes in the target storage warehouse and the temporary storage warehouse according to the handover wafer cassette list information, and transporting the target wafer cassettes to the target storage warehouse within a preset time period includes: Handover wafer box list, transfer and store the first batch of handover wafer boxes in the target storage warehouse and temporary storage warehouse before the preset time period; transport the target wafer box to the target storage warehouse within the preset time period ; Based on the handover wafer box list, the second batch of handover wafer boxes in the target storage bin and the temporary storage bin are handed over and stored after a preset time period, so as to realize the reset of the storage wafer boxes in the target storage bin and the temporary storage bin .
  • the server can not only transfer and store the wafer boxes according to the handover wafer box list, but also transfer the second batch of wafer boxes in the target storage warehouse and the temporary storage warehouse after a preset time period after the target storage warehouse is free. Hand over the storage to realize the reset of the storage wafer cassettes in the target storage bin and the temporary storage bin, so as to avoid abnormalities when the wafer cassettes are taken out.
  • the server transfers and stores the first batch of handover wafer boxes in the target storage warehouse and the temporary storage warehouse before the preset time period; transports the target wafer box to the target storage within the preset time period
  • the server based on the list of handed over wafer boxes, the second batch of handed over wafer boxes in the target storage warehouse and temporary storage warehouse will be handed over and stored after a preset period of time, so as to realize the storage of wafer boxes in the target storage warehouse and temporary storage warehouse reset.
  • a partition management device which includes a request receiving module 201 , a storage information obtaining module 202 , a region judging module 203 , a region information obtaining module 204 and a region reset module 205 .
  • the request receiving module 201 is configured to receive a wafer cassette transport request, and the wafer cassette transport request carries attribute information of the target wafer cassette, current storage bin information, target storage bin information, and a schedule for transporting the target wafer cassette to the target storage bin. Set time period.
  • the storage information acquisition module 202 is configured to acquire target state information of the target storage bin according to attribute information, and the target state information includes storage information of a physical area of the target storage bin.
  • the area judging module 203 is configured to judge whether there is an available area in the physical area of the target storage bin within a preset time period according to the attribute information and the target state information.
  • the area information obtaining module 204 is configured to obtain the area setting information of the target storage bin and the area storage information in each setting area when the determination is negative.
  • the area reset module 205 is configured to reset the area according to the area setting information and the area storage information, and transport the target wafer cassette to the target storage bin within a preset time period.
  • the area judgment module includes:
  • the physical area judging unit is configured to judge whether there is an available area in the physical area of the target storage bin within a preset time period according to the attribute information and the storage information of the physical area.
  • the logical area judging unit is used to judge whether there is an available area in the logical area of the target storage bin within the preset time period according to the attribute information and the storage information of the logical area when the judgment is negative, and output the judgment result.
  • the device also includes:
  • the handover cassette list screening module is used to obtain the temporary state information of the temporary storage bin adjacent to the target storage bin, and filter out the mutually transferable ones in the target storage bin and the temporary storage bin according to the temporary state information and the target state information. Hand over cassette inventory information.
  • the wafer box handover module is used to hand over the wafer boxes in the target storage warehouse and the temporary storage warehouse according to the handover wafer box list information, and transport the target wafer box to the target storage warehouse within a preset time period.
  • the device also includes:
  • the handover storage module is used for handing over and storing the first batch of handover wafer boxes in the target storage warehouse and the temporary storage warehouse before a preset time period based on the handover wafer box list.
  • the transport instruction generation module is used to transport the target wafer box to the target storage bin within a preset time period.
  • the handover reset module is used for handing over and storing the second batch of handover wafer boxes in the target storage bin and the temporary storage bin after a preset time period based on the list of handover wafer boxes, so as to realize storage in the target storage bin and the temporary storage bin Reset of the wafer cassette.
  • Each module in the above-mentioned partition management device can be fully or partially realized by software, hardware and a combination thereof.
  • the above-mentioned modules can be embedded in or independent of the processor in the computer device in the form of hardware, and can also be stored in the memory of the computer device in the form of software, so that the processor can invoke and execute the corresponding operations of the above-mentioned modules.
  • a computer device is provided.
  • the computer device may be a server, and its internal structure may be as shown in FIG. 3 .
  • the computer device includes a processor, memory, network interface and database connected by a system bus. Wherein, the processor of the computer device is used to provide calculation and control capabilities.
  • the memory of the computer device includes a non-volatile storage medium and an internal memory.
  • the non-volatile storage medium stores an operating system, computer programs and databases.
  • the internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium.
  • the database of the computer device is used to store attribute information and the like.
  • the network interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a partition management method is realized.
  • Figure 3 is a block diagram of a partial structure related to the solution of the present application, and does not constitute a limitation to the computer equipment on which the solution of the application is applied.
  • the specific computer equipment may include There may be more or fewer components than shown in the figures, or certain components may be combined, or have different component arrangements.
  • a computer device including a memory and a processor, the memory stores a computer program, and the processor implements the following steps when executing the computer program: receiving a wafer cassette transport request, and carrying the wafer cassette transport request There are attribute information of the target wafer cassette, the current storage bin, the target storage bin, and the preset time period for the target wafer cassette to be transported to the target storage bin; the target status information of the target storage bin is obtained according to the attribute information, and the target status information includes the target storage bin The storage information of the physical area of the bin; according to the attribute information and the target state information, it is judged whether there is an available area in the physical area of the target storage bin within the preset time period; Setting the area storage information in the area; re-setting the area according to the area setting information and the area storage information, and transporting the target wafer cassette to the target storage bin within a preset time period.
  • the target state information realized when the processor executes the computer program also includes the storage information of the logical area of the target storage bin, and it is judged whether the physical area of the target storage bin is There is an available area, including: judging whether there is an available area in the physical area of the target storage bin within a preset time period according to the attribute information and the storage information of the physical area; Whether there is an available area in the logical area of the target storage bin within the preset time period, and output the judgment result.
  • the method when the computer program is executed by the processor, when the region cannot be reset according to the region setting information and the region storage information, the method further includes: acquiring temporary state information of a temporary storage bin adjacent to the target storage bin, And according to the temporary state information and the target state information, screen out the handover cassette list information in the target storage bin and the temporary storage bin that can be handed over to each other; hand over the wafers in the target storage bin and the temporary storage bin according to the handover wafer cassette list information box, and transport the target wafer box to the target storage bin within a preset time period.
  • the wafer cassettes in the target storage bin and the temporary storage bin are transferred according to the handover wafer cassette list information, and the target wafer cassette is transported to the target within a preset time period.
  • the storage warehouse including: based on the list of handover wafer boxes, the first batch of handover wafer boxes in the target storage warehouse and the temporary storage warehouse are handed over and stored before the preset time period; the target wafers are stored within the preset time period
  • the box is transported to the target storage warehouse; based on the handover wafer box list, the second batch of handover wafer boxes in the target storage warehouse and temporary storage warehouse will be handed over and stored after a preset period of time, so as to realize the target storage warehouse and temporary storage warehouse
  • the reset of the wafer cassette is stored in .
  • a computer-readable storage medium on which a computer program is stored.
  • the computer program is executed by a processor, the following steps are implemented: receiving a wafer cassette transport request, the wafer cassette transport request carrying a target wafer The attribute information of the round box, the current storage bin, the target storage bin, and the preset time period for the target wafer box to be transported to the target storage bin; the target status information of the target storage bin is obtained according to the attribute information, and the target status information includes the physical status of the target storage bin.
  • the storage information of the area according to the attribute information and the target state information, it is judged whether there is an available area in the physical area of the target storage bin within the preset time period; area storage information; re-set the area according to the area setting information and the area storage information, and transport the target wafer cassette to the target storage bin within a preset time period.
  • the target state information realized when the computer program is executed by the processor also includes the storage information of the logical area of the target storage bin, and the physical area of the target storage bin within a preset time period is judged according to the attribute information and the target state information Whether there is an available area, including: judging whether there is an available area in the physical area of the target storage bin within the preset time period according to the attribute information and the storage information of the physical area; when the judgment is no, judging according to the attribute information and the storage information of the logical area Whether there is an available area in the logical area of the target storage bin within the preset time period, and output the judgment result.
  • the method when the computer program is executed by the processor, when the region cannot be re-set according to the region setting information and the region storage information, the method further includes: acquiring temporary state information of a temporary storage bin adjacent to the target storage bin , and according to the temporary state information and the target state information, screen out the handover cassette list information in the target storage bin and the temporary storage bin that can be handed over to each other; hand over the wafer cassettes in the target storage bin and the temporary storage bin The wafer box is transported to the target storage bin within a preset time period.
  • the wafer cassettes in the target storage bin and the temporary storage bin are transferred according to the handover wafer cassette list information, and the target wafer cassette is transported to the destination within a preset time period.
  • the target storage warehouse including: based on the handover wafer box list, the first batch of handover wafer boxes in the target storage warehouse and the temporary storage warehouse are handed over and stored before the preset time period; Cartons are transported to the target storage warehouse; based on the handover wafer box list, the second batch of handed-over wafer boxes in the target storage warehouse and temporary storage warehouse are handed over and stored after a preset period of time to achieve target storage warehouse and temporary storage The resetting of the wafer cassette is stored in the bin.

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Abstract

本申请部分实施例提供了一种分区管理方法、装置、计算机设备和存储介质。采用本申请的实施例，接收晶圆盒运输请求；根据属性信息获取目标存储仓的目标状态信息；根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域；当判定为否时，获取与目标存储仓的区域设置信息以及各设置区域内的区域存储信息；根据区域设置信息和区域存储信息重新进行区域设置，并在预设时间段内将目标晶圆盒运输到目标存储仓内。

Description

分区管理方法、装置、计算机设备和存储介质
本申请基于申请号为“202210108743.5”、申请日为2022年01月28日的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此以引入方式并入本申请。
技术领域
本申请属于晶圆储存装置管理技术领域，更确切的说涉及一种分区管理方法、装置、计算机设备和存储介质。
背景技术
在半导体生产设备厂设置有用于存放FOUP的存储柜(Stocker)，在存储柜中的货架上的各阁位用于存储多个晶圆传送盒(FOUP)。在通过传送设备进行传输过程中，目前相关技术无法及时对输送路径等进行调整，或是很好地实现FOUP的平衡，或是当FOUP的属性发生变化时，可以及时将FOUP存储在与工艺对应的操作台上。
发明概述
本申请实施例提供了一种分区管理方法，包括：接收晶圆盒运输请求，所述晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及所述目标晶圆盒输送至目标存储仓的预设时间段；根据所述属性信息获取所述目标存储仓的目标状态信息，所述目标状态信息包含所述目标存储仓的物理区域的存储信息；根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；当判定为否时，获取与所述目标存储仓的区域设置信息以及各设置区域内的区域存储信息；根据所述区域设置信息和所述区域存储信息重新进行区域设置，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
本申请还提供了一种分区管理装置，所述装置包括：请求接收模块，用于接收晶圆盒运输请求，所述晶圆盒运输请求携带有目标晶圆盒的属性信息、当 前存储仓信息、目标存储仓信息以及所述目标晶圆盒输送至目标存储仓的预设时间段；存储信息获取模块，用于根据所述属性信息获取所述目标存储仓的目标状态信息，所述目标状态信息包含所述目标存储仓的物理区域的存储信息；区域判断模块，用于根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；区域信息获取模块，用于当判定为否时，获取与所述目标存储仓的区域设置信息以及各设置区域内的区域存储信息；区域重设模块，用于根据所述区域设置信息和所述区域存储信息重新进行区域设置，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
本申请还提供了一种计算机设备，包括存储器和处理器，所述存储器存储有计算机程序，其中，所述处理器执行所述计算机程序时实现上述方法的步骤。
本申请还提供了一种计算机可读存储介质，其上存储有计算机程序，所述计算机程序被处理器执行时实现上述的方法的步骤。
附图说明
下面将以明确易懂的方式，结合附图说明优选实施方式，对上述特性、技术特征、优点及其实现方式予以进一步说明。
图1是本申请的实施例中分区管理方法的流程示意图；
图2是本申请的实施例中分区管理装置的结构框图；
图3是本申请的实施例中计算机设备的内部结构图。
本发明的实施方式
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对照附图说明本申请的具体实施方式。显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，并获得其他的实施方式。
基于本申请，所属领域的技术人员应了解，本文中所描述的一个方面可与任何其它方面独立地实施，且可以各种方式组合这些方面中的两者或两者以上。举例来说，可使用本文中所阐述的任何数目和方面来实施设备及/或实践方法。 另外，可使用除了本文中所阐述的方面中的一或多者之外的其它结构及/或功能性实施此设备及/或实践此方法。
还需要说明的是，以下实施例中所提供的图示仅以示意方式说明本申请的基本构想，图式中仅显示与本申请中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制，其实际实施时各组件的型态、数量及比例可为一种随意的改变，且其组件布局型态也可能更为复杂。
另外，在以下描述中，提供具体细节是为了便于透彻理解实例。然而，所属领域的技术人员将理解，可在没有这些特定细节的情况下实践所述方面。术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”等描述的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，除非另有说明，“多个”的含义是两个或两个以上。
在半导体生产设备厂设置有用于存放FOUP的存储柜(Stocker)，在存储柜中的货架上的各阁位用于存储多个晶圆传送盒(FOUP)。在通过传送设备进行传输过程中，为将各晶圆传送盒传送到目的位，由于每个晶圆传送盒(FOUP)都有自己的属性和优先级，而且在不同生产工艺阶段需要的FOUP属性会随工艺进行而发生变化，因此，需要对各类型的晶圆传送盒进行管理，保证其位于与工艺对应最近的操作台上，完成各工艺的加工；同时进一步保证在输送过程中同一输送线中的FOUP的优先级会发生变更时，可以及时对输送路径等进行调整并平衡每个仓库存储各FOUP的数量。
目前相关技术无法及时对输送路径等进行调整，或是很好地实现FOUP的平衡，或是当FOUP的属性发生变化时，可以及时将FOUP存储在与工艺对应的操作台上。
本申请部分实施例的目的在于提供一种分区管理方法、装置、计算机设备和存储介质，克服上述现有技术的缺点。
本申请实施例提供了一种分区管理方法，包括：接收晶圆盒运输请求，所述晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及所述目标晶圆盒输送至目标存储仓的预设时间段；根据所述属性信 息获取所述目标存储仓的目标状态信息，所述目标状态信息包含所述目标存储仓的物理区域的存储信息；根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；当判定为否时，获取与所述目标存储仓的区域设置信息以及各设置区域内的区域存储信息；根据所述区域设置信息和所述区域存储信息重新进行区域设置，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
在其中一个实施例中，所述目标状态信息还包含所述目标存储仓的逻辑区域的存储信息，所述根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域，包括：根据所述属性信息和所述物理区域的存储信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；当判定为否时，根据所述属性信息和所述逻辑区域的存储信息判断在所述预设时间段内所述目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
在其中一个实施例中，所述目标存储仓还设置有缓存区域，当所述目标存储仓的存储信息未及时更新，导致误判定所述目标存储仓存在可用区域时，在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓的所述缓存区域内。
在其中一个实施例中，当根据所述区域设置信息和所述区域存储信息无法重新进行区域设置时，所述方法还包括：获取与所述目标存储仓相邻的临时存储仓的临时状态信息，并根据该临时状态信息和所述目标状态信息筛选出所述目标存储仓和所述临时存储仓中可相互移交的移交晶圆盒清单信息；根据所述移交晶圆盒清单信息移交所述目标存储仓和所述临时存储仓中的晶圆盒，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
在其中一个实施例中，所述根据所述移交晶圆盒清单信息移交所述目标存储仓和所述临时存储仓中的晶圆盒，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内，包括：基于所述移交晶圆盒清单，将所述目标存储仓和所述临时存储仓中的第一批移交晶圆盒在所述预设时间段前进行移交存储；在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内；基于所 述移交晶圆盒清单，将所述目标存储仓和所述临时存储仓中的第二批移交晶圆盒在所述预设时间段后进行移交存储，实现所述目标存储仓和所述临时存储仓中存储晶圆盒的复位。
本申请还提供了一种分区管理装置，所述装置包括：请求接收模块，用于接收晶圆盒运输请求，所述晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及所述目标晶圆盒输送至目标存储仓的预设时间段；存储信息获取模块，用于根据所述属性信息获取所述目标存储仓的目标状态信息，所述目标状态信息包含所述目标存储仓的物理区域的存储信息；区域判断模块，用于根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；区域信息获取模块，用于当判定为否时，获取与所述目标存储仓的区域设置信息以及各设置区域内的区域存储信息；区域重设模块，用于根据所述区域设置信息和所述区域存储信息重新进行区域设置，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
本申请还提供了一种计算机设备，包括存储器和处理器，所述存储器存储有计算机程序，其中，所述处理器执行所述计算机程序时实现上述方法的步骤。
本申请还提供了一种计算机可读存储介质，其上存储有计算机程序，所述计算机程序被处理器执行时实现上述的方法的步骤。
与相关技术相比，本申请的优点在于：本申请中通过对FOUP属性的识别可以获取其优先级，根据属性优先级确定FOUP的位置信息，保证FOUP中的晶圆可以实现就近工艺加工，进一步缩短工时，提高了生产效率。
晶圆对应的处理工艺平衡目标存储仓中存储的晶圆盒情况，并当输送线上输送过来的FOUP的属性发生变化时，可以及时变更输送存储仓，不仅保证晶圆盒输送的准确性，而且也保证晶圆盒可以被存储在对应的工作台附近的存储仓中，避免使FOUP处于等待，而影响工艺流程。
以下结合各附图，说明本申请各实施例提供的技术方案。
在半导体的晶圆厂中，每个FOUP都有自己的属性和优先级，所以在FOUP进行传输过程中，需要对FOUP进行优先级的设置，并根据其FOUP优先级以 及属性来平衡调整具体的放置仓位。此外，当仓位装满时，将很难控制放置空间，目前缺少应急处理预案，以及合理调配的方案，为解决当前存在的问题，对待存储的FOUP进行分区管理控制，并将其放置的更加合理，避免运输设备带FOUP运行时出现无法放置，以及放置不合理的问题，以此提高FOUP放置仓位的利用率问题。如图1所示，本申请实施例提供一种分区管理方法，可以应用在终端或服务器上，终端包括但不限于是各种个人计算机、笔记本电脑、智能手机、平板电脑和便携式智能设备，服务器可以用独立的服务器或者是多个服务器组成的服务器集群来实现，在一个实施例中，将FOUP的分区管理方法应用在MCS系统中，在终端或服务器运行方法包括以下步骤：
步骤101，接收晶圆盒运输请求，晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及目标晶圆盒输送至目标存储仓的预设时间段。
晶圆盒为可以传送不同类型晶圆的晶圆传送盒(FOUP)。属性信息可以包含晶圆盒所属的优先级信息，可以采用数值或文字等进行标识，例如，在一个实施例中，属性信息可以分为Un-Know、Common、Standard、HotLot、Empty-Clean-A-Free等。对应的目标存储仓的存储区域优先级也可以分为Un-Know、Common、Standard、HotLot、Empty-Clean-A-Free等；或者对应的目标存储仓的存储区域优先级也可以分为Un-Know、Common等，Common存储区域可以存储Common、Standard、HotLot、Empty-Clean-A-Free四种优先级晶圆盒。属性信息还可以包含晶圆盒所属的优先级信息以及晶圆盒所需容量数值等。晶圆盒运输请求中的目标存储仓可以根据晶圆处理工艺、晶圆传送盒(FOUP)中晶圆的类型进行选择。服务器接收晶圆盒运输请求，可以根据当前晶圆适用的工艺获取对应操作台附近的存储仓信息。当前存储仓信息、目标存储仓信息可以是存储仓对应的物理地址信息。
服务器接收晶圆盒运输请求，晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及目标晶圆盒输送至目标存储仓的预设时间段。
步骤102，根据属性信息获取目标存储仓的目标状态信息，目标状态信息 包含目标存储仓的物理区域的存储信息。
目标状态信息包含目标存储仓的物理区域的存储信息，该存储信息包含当前目标存储仓中存储的晶圆盒相关信息，晶圆盒相关信息可以包含存储时间段、存储容量、运输设备等诸多信息。服务器根据属性信息获取目标存储仓的目标状态信息。
步骤103，根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域。
服务器根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域。服务器可以判断在预设时间段内目标存储仓的物理区域是否存在空闲，也可以根据属性信息中的容量信息和目标状态信息中的容量判断在预设时间段内目标存储仓的物理区域是否存在可用区域。
步骤104，当判定为否时，获取与目标存储仓的区域设置信息以及各设置区域内的区域存储信息。
当服务器判定为是时，服务器控制传输系统在预设时间段内将目标晶圆盒运输到目标存储仓内。当服务器判定为否时，服务器获取与目标存储仓的区域设置信息以及各设置区域内的区域存储信息。
步骤105，根据区域设置信息和区域存储信息重新进行区域设置，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
服务器也可以根据平衡规则，基于区域设置信息和区域存储信息重新进行区域设置，并在预设时间段内将目标晶圆盒运输到目标存储仓内。服务器可以将与目标晶圆盒属性信息对应的存储区域进行扩充，并将在预设时间段内将目标晶圆盒运输到扩充后的目标存储仓内。平衡规则可以是获取与晶圆传送盒(FOUP)的属性信息对应的工艺流程，并根据工艺流程确定各对应的晶圆传送盒占比，并基于操作台附近的存储仓的存储容量分配晶圆传送盒数量。
上述分区管理方法，可以根据晶圆盒的优先级以及晶圆对应的处理工艺平衡目标存储仓中存储的晶圆盒情况，并当输送线上晶圆盒的属性发生变化时，可以及时变更输送存储仓，不仅保证晶圆盒输送的准确性，而且也保证晶圆盒可以被存储在对应的工作台附近的存储仓中。
在一个实施例中，目标状态信息还包含目标存储仓的逻辑区域的存储信息，根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域，包括：根据属性信息和物理区域的存储信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域；当判定为否时，根据属性信息和逻辑区域的存储信息判断在预设时间段内目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
目标存储仓的物理区域是指在一个目标存储仓中为这些区域预留了实际的货架数量；目标存储仓的逻辑区域是指在一个目标存储仓中每个区域理论上可以设置的货架数量，该货架数量可以大于该区域实际对应的物理货架数量，但单个逻辑区域货架数量不能大于目标存储仓总的物理货架数量，例如，当存储仓实际的物理货架数为100个，均匀分配给5个优先级的存储区域，每个存储区域均可设置存放数量的上下限，其中，每个存储区域对应的物理区域的货架数量为20，但逻辑区域的上限可以设置为20～100，当在预设时间段晶圆盒数量大于货架数量时，服务器可以重设各区域对应的货架，也可以根据晶圆盒所在的时间段重新调配在物理区域内存储的晶圆盒。逻辑区域依据FOUP(晶圆盒)的属性进行划分，其目的在于平衡每个存储仓中不同FOUP种类的数量。
目标状态信息还包含目标存储仓的逻辑区域的存储信息。服务器根据属性信息和物理区域的存储信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域。当服务器判定为是时，服务器控制传输系统在预设时间段内将目标晶圆盒运输到目标存储仓内。当判定为否时，服务器根据属性信息和逻辑区域的存储信息判断在预设时间段内目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
在其中一个实施例中，目标存储仓还设置有缓存区域，当目标存储仓的存储信息未及时更新，导致误判定目标存储仓存在可用区域时，在预设时间段内将目标晶圆盒运输到目标存储仓的缓存区域内。
服务器可以设置传输存储晶圆盒的缓存区域作为与目标晶圆盒对应的临时存储仓，待目标存储仓空闲时，将目标晶圆盒运输到目标存储仓中。缓存区域的目的在于当传输过程中用于中转的PORT口被占用时需要临时将传送的 FOUP存放在一个缓存区域中用于等待PORT口空闲，再进行传输，用于中转等待的区域即为缓存区域；二，作为预留区使用，在生产过程中，一个晶圆盒从A机台加工完成后需要传送至B机台进行后续加工，而B机台正在生产，那此时可以先将晶圆盒放置在B机台附近的存储仓中，该位置即为预留区，待B机台加工完成当前的晶圆盒后，再从存储器中将晶圆盒传输给B机台，其目的在于减少传输时间，减少机台空闲时间。
在上述实施例中，对于传送中FOUP可以提供物理区域、逻辑区域以及缓存区域，通过不同属性条件的设置，及时对输送路径等进行调整并平衡每个仓库存储，将FOUP进行调配更加合理。
在其中一个实施例中，当根据区域设置信息和区域存储信息无法重新进行区域设置时，方法还包括：获取与目标存储仓相邻的临时存储仓的临时状态信息，并根据该临时状态信息和目标状态信息筛选出目标存储仓和临时存储仓中可相互移交的移交晶圆盒清单信息；根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
当根据区域设置信息和区域存储信息无法重新进行区域设置时，此时目标存储仓的逻辑区域或物理区域的数量已达到该类型存储区域的上限值，服务器还可以获取与目标存储仓相邻的临时存储仓的临时状态信息，并根据该临时状态信息和目标状态信息筛选出目标存储仓和临时存储仓中可相互移交的移交晶圆盒清单信息；服务器根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
临时状态信息和目标状态信息所囊括的参数基本一致。移交晶圆盒清单信息可以包含晶圆盒标识、被交换前后晶圆盒在不同存储仓存储的位置信息、预计存储时间段、被交换的时间段等。
在其中一个实施例中，根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒运输到目标存储仓内，包括：基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第一批移交晶圆盒在预设时间段前进行移交存储；在预设时间段内将目标晶圆盒运输到目标存储仓内； 基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第二批移交晶圆盒在预设时间段后进行移交存储，实现目标存储仓和临时存储仓中存储晶圆盒的复位。
服务器不仅可以根据移交晶圆盒清单对晶圆盒进行移交存储，也可以在目标存储仓空闲后，将目标存储仓和临时存储仓中的第二批移交晶圆盒在预设时间段后进行移交存储，实现目标存储仓和临时存储仓中存储晶圆盒的复位，从而避免晶圆盒被取出时的异常。服务器基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第一批移交晶圆盒在预设时间段前进行移交存储；在预设时间段内将目标晶圆盒运输到目标存储仓内；基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第二批移交晶圆盒在预设时间段后进行移交存储，实现目标存储仓和临时存储仓中存储晶圆盒的复位。
在一个实施例中，如图2所示，提供了一种分区管理装置，装置包括请求接收模块201、存储信息获取模块202、区域判断模块203、区域信息获取模块204和区域重设模块205。
请求接收模块201，用于接收晶圆盒运输请求，晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及目标晶圆盒输送至目标存储仓的预设时间段。
存储信息获取模块202，用于根据属性信息获取目标存储仓的目标状态信息，目标状态信息包含目标存储仓的物理区域的存储信息。
区域判断模块203，用于根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域。
区域信息获取模块204，用于当判定为否时，获取与目标存储仓的区域设置信息以及各设置区域内的区域存储信息。
区域重设模块205，用于根据区域设置信息和区域存储信息重新进行区域设置，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
在一个实施例中，区域判断模块包括：
物理区域判断单元，用于根据属性信息和物理区域的存储信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域。
逻辑区域判断单元，用于当判定为否时，根据属性信息和逻辑区域的存储 信息判断在预设时间段内目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
在一个实施例中，装置还包括：
移交晶圆盒清单筛选模块，用于获取与目标存储仓相邻的临时存储仓的临时状态信息，并根据该临时状态信息和目标状态信息筛选出目标存储仓和临时存储仓中可相互移交的移交晶圆盒清单信息。
晶圆盒移交模块，用于根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
在一个实施例中，装置还包括：
移交存储模块，用于基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第一批移交晶圆盒在预设时间段前进行移交存储。
运输指令生成模块，用于在预设时间段内将目标晶圆盒运输到目标存储仓内。
移交复位模块，用于基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第二批移交晶圆盒在预设时间段后进行移交存储，实现目标存储仓和临时存储仓中存储晶圆盒的复位。
关于分区管理装置的具体限定可以参见上文中对于分区管理方法的限定，在此不再赘述。上述分区管理装置中的各个模块可全部或部分通过软件、硬件及其组合来实现。上述各模块可以硬件形式内嵌于或独立于计算机设备中的处理器中，也可以以软件形式存储于计算机设备中的存储器中，以便于处理器调用执行以上各个模块对应的操作。
在一个实施例中，提供了一种计算机设备，该计算机设备可以是服务器，其内部结构图可以如图3所示。该计算机设备包括通过系统总线连接的处理器、存储器、网络接口和数据库。其中，该计算机设备的处理器用于提供计算和控制能力。该计算机设备的存储器包括非易失性存储介质、内存储器。该非易失性存储介质存储有操作系统、计算机程序和数据库。该内存储器为非易失性存储介质中的操作系统和计算机程序的运行提供环境。该计算机设备的数据库用于存储属性信息等。该计算机设备的网络接口用于与外部的终端通过网络连接 通信。该计算机程序被处理器执行时以实现一种分区管理方法。
本领域技术人员可以理解，图3中示出的结构，是与本申请方案相关的部分结构的框图，并不构成对本申请方案所应用于其上的计算机设备的限定，具体的计算机设备可以包括比图中所示更多或更少的部件，或者组合某些部件，或者具有不同的部件布置。
在一个实施例中，提供了一种计算机设备，包括存储器和处理器，该存储器存储有计算机程序，该处理器执行计算机程序时实现以下步骤：接收晶圆盒运输请求，晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓、目标存储仓以及目标晶圆盒输送至目标存储仓的预设时间段；根据属性信息获取目标存储仓的目标状态信息，目标状态信息包含目标存储仓的物理区域的存储信息；根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域；当判定为否时，获取与目标存储仓的区域设置信息以及各设置区域内的区域存储信息；根据区域设置信息和区域存储信息重新进行区域设置，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
在一个实施例中，处理器执行计算机程序时实现的目标状态信息还包含目标存储仓的逻辑区域的存储信息，根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域，包括：根据属性信息和物理区域的存储信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域；当判定为否时，根据属性信息和逻辑区域的存储信息判断在预设时间段内目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
在一个实施例中，处理器执行计算机程序时实现的当根据区域设置信息和区域存储信息无法重新进行区域设置时，方法还包括：获取与目标存储仓相邻的临时存储仓的临时状态信息，并根据该临时状态信息和目标状态信息筛选出目标存储仓和临时存储仓中可相互移交的移交晶圆盒清单信息；根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
在一个实施例中，处理器执行计算机程序时实现的根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒 运输到目标存储仓内，包括：基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第一批移交晶圆盒在预设时间段前进行移交存储；在预设时间段内将目标晶圆盒运输到目标存储仓内；基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第二批移交晶圆盒在预设时间段后进行移交存储，实现目标存储仓和临时存储仓中存储晶圆盒的复位。
在一个实施例中，提供了一种计算机可读存储介质，其上存储有计算机程序，计算机程序被处理器执行时实现以下步骤：接收晶圆盒运输请求，晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓、目标存储仓以及目标晶圆盒输送至目标存储仓的预设时间段；根据属性信息获取目标存储仓的目标状态信息，目标状态信息包含目标存储仓的物理区域的存储信息；根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域；当判定为否时，获取与目标存储仓的区域设置信息以及各设置区域内的区域存储信息；根据区域设置信息和区域存储信息重新进行区域设置，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
在一个实施例中，计算机程序被处理器执行时实现的目标状态信息还包含目标存储仓的逻辑区域的存储信息，根据属性信息和目标状态信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域，包括：根据属性信息和物理区域的存储信息判断在预设时间段内目标存储仓的物理区域是否存在可用区域；当判定为否时，根据属性信息和逻辑区域的存储信息判断在预设时间段内目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
在一个实施例中，计算机程序被处理器执行时实现的当根据区域设置信息和区域存储信息无法重新进行区域设置时，方法还包括：获取与目标存储仓相邻的临时存储仓的临时状态信息，并根据该临时状态信息和目标状态信息筛选出目标存储仓和临时存储仓中可相互移交的移交晶圆盒清单信息；根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆盒运输到目标存储仓内。
在一个实施例中，计算机程序被处理器执行时实现的根据移交晶圆盒清单信息移交目标存储仓和临时存储仓中的晶圆盒，并在预设时间段内将目标晶圆 盒运输到目标存储仓内，包括：基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第一批移交晶圆盒在预设时间段前进行移交存储；在预设时间段内将目标晶圆盒运输到目标存储仓内；基于移交晶圆盒清单，将目标存储仓和临时存储仓中的第二批移交晶圆盒在预设时间段后进行移交存储，实现目标存储仓和临时存储仓中存储晶圆盒的复位。
以上所述，仅为本申请的具体实施例，但本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到的变化或替换，都应涵盖在本申请的保护范围之内。因此，本申请的保护范围应以权利要求的保护范围为准。

Claims (8)

  1. 一种分区管理方法，包括：
    接收晶圆盒运输请求，所述晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及所述目标晶圆盒输送至目标存储仓的预设时间段；
    根据所述属性信息获取所述目标存储仓的目标状态信息，所述目标状态信息包含所述目标存储仓的物理区域的存储信息；
    根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；
    当判定为否时，获取与所述目标存储仓的区域设置信息以及各设置区域内的区域存储信息；
    根据所述区域设置信息和所述区域存储信息重新进行区域设置，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
  2. 根据权利要求1所述的方法，其中，所述目标状态信息还包含所述目标存储仓的逻辑区域的存储信息，所述根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域，包括：
    根据所述属性信息和所述物理区域的存储信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；
    当判定为否时，根据所述属性信息和所述逻辑区域的存储信息判断在所述预设时间段内所述目标存储仓的逻辑区域是否存在可用区域，并输出判定结果。
  3. 根据权利要求2所述的方法，其中，所述目标存储仓还设置有缓存区域，当所述目标存储仓的存储信息未及时更新，导致误判定所述目标存储仓存在可用区域时，在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓的所述缓存区域内。
  4. 根据权利要求1所述的方法，其中，当根据所述区域设置信息和所述区域存储信息无法重新进行区域设置时，所述方法还包括：
    获取与所述目标存储仓相邻的临时存储仓的临时状态信息，并根据该临 时状态信息和所述目标状态信息筛选出所述目标存储仓和所述临时存储仓中可相互移交的移交晶圆盒清单信息；
    根据所述移交晶圆盒清单信息移交所述目标存储仓和所述临时存储仓中的晶圆盒，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
  5. 根据权利要求4所述的方法，其中，所述根据所述移交晶圆盒清单信息移交所述目标存储仓和所述临时存储仓中的晶圆盒，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内，包括：
    基于所述移交晶圆盒清单，将所述目标存储仓和所述临时存储仓中的第一批移交晶圆盒在所述预设时间段前进行移交存储；
    在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内；
    基于所述移交晶圆盒清单，将所述目标存储仓和所述临时存储仓中的第二批移交晶圆盒在所述预设时间段后进行移交存储，调控所述目标存储仓和所述临时存储仓中存储晶圆盒的复位。
  6. 一种分区管理装置，其中，所述装置包括：
    请求接收模块，用于接收晶圆盒运输请求，所述晶圆盒运输请求携带有目标晶圆盒的属性信息、当前存储仓信息、目标存储仓信息以及所述目标晶圆盒输送至目标存储仓的预设时间段；
    存储信息获取模块，用于根据所述属性信息获取所述目标存储仓的目标状态信息，所述目标状态信息包含所述目标存储仓的物理区域的存储信息；
    区域判断模块，用于根据所述属性信息和所述目标状态信息判断在所述预设时间段内所述目标存储仓的物理区域是否存在可用区域；
    区域信息获取模块，用于当判定为否时，获取与所述目标存储仓的区域设置信息以及各设置区域内的区域存储信息；
    区域重设模块，用于根据所述区域设置信息和所述区域存储信息重新进行区域设置，并在所述预设时间段内将所述目标晶圆盒运输到所述目标存储仓内。
  7. 一种计算机设备，包括存储器和处理器，所述存储器存储有计算机程 序，其中，所述处理器执行所述计算机程序时实现权利要求1至5中任一项所述方法的步骤。
  8. 一种计算机可读存储介质，其上存储有计算机程序，其中，所述计算机程序被处理器执行时实现权利要求1至5中任一项所述的方法的步骤。
PCT/CN2022/135183 2022-01-28 2022-11-29 分区管理方法、装置、计算机设备和存储介质 WO2023142653A1 (zh)

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