WO2023119864A1 - Procédé de production d'un transducteur élastomère diélectrique - Google Patents

Procédé de production d'un transducteur élastomère diélectrique Download PDF

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Publication number
WO2023119864A1
WO2023119864A1 PCT/JP2022/040168 JP2022040168W WO2023119864A1 WO 2023119864 A1 WO2023119864 A1 WO 2023119864A1 JP 2022040168 W JP2022040168 W JP 2022040168W WO 2023119864 A1 WO2023119864 A1 WO 2023119864A1
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Prior art keywords
dielectric elastomer
elastomer layer
state
layer
pair
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PCT/JP2022/040168
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English (en)
Japanese (ja)
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正毅 千葉
美紀夫 和氣
誠 竹下
貢 上島
Original Assignee
正毅 千葉
日本ゼオン株式会社
美紀夫 和氣
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Publication of WO2023119864A1 publication Critical patent/WO2023119864A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions

Definitions

  • the present invention relates to a method of manufacturing a dielectric elastomer transducer.
  • Dielectric elastomer transducers with dielectric elastomer layers are attracting attention as transducers with excellent energy conversion efficiency.
  • This dielectric elastomer transducer utilizes the deformation (stretching and contracting) of a dielectric elastomer layer to convert arbitrary energy into other energy.
  • Patent Document 1 discloses an example of a conventional method for manufacturing a dielectric elastomer transducer.
  • a method of providing a pair of electrode layers on both sides of the dielectric elastomer layer is described.
  • the expansion and contraction of the dielectric elastomer layer is the basic operation. Desirably, this expansion and contraction achieves the desired expansion and contraction under the intended conditions. For example, when operating a dielectric elastomer transducer as an actuator, it is common to require a high voltage of 5 kV or higher as the voltage applied to the pair of electrode layers.
  • the present invention has been conceived under the circumstances described above, and an object of the present invention is to provide a method of manufacturing a dielectric elastomer transducer capable of appropriately expanding and contracting a dielectric elastomer layer.
  • a method of manufacturing a dielectric elastomer transducer provided by the present invention is a method of manufacturing a dielectric elastomer transducer comprising a dielectric elastomer layer and a pair of electrode layers sandwiching the dielectric elastomer layer, wherein the dielectric elastomer layer in a first state a straightening step of maintaining the dielectric elastomer layer in a second state in which tension is generated by stretching the dielectric elastomer layer more than the first state; and after the straightening step, the pair of electrode layers are formed.
  • the thickness of the dielectric elastomer layer in is 80 ⁇ m or less.
  • the thickness of the dielectric elastomer layer in the first state is 400 ⁇ m or less.
  • the dielectric elastomer layer has an elongation rate of 800% or more in the first state.
  • FIG. 1 is a flow diagram showing an example of a method of manufacturing a dielectric elastomer transducer according to the present invention
  • FIG. 3A is a schematic plan view showing a preparation step, (b) a straightening step, and (c) a fixing step in the method of manufacturing a dielectric elastomer transducer according to the present invention
  • 1 is a perspective view showing an example of a dielectric elastomer transducer manufactured by a dielectric elastomer transducer manufacturing method according to the present invention
  • FIG. 1 is a schematic plan view showing an embodiment of a method of manufacturing a dielectric elastomer transducer according to the present invention
  • FIG. 1 shows a flow diagram of an example of a method for manufacturing a dielectric elastomer transducer according to the first embodiment of the present invention.
  • FIG. 2 shows the dielectric elastomer layer at each step.
  • the manufacturing method of the dielectric elastomer transducer of this embodiment comprises a preparation step, a straightening step and a fixing step.
  • the preparation step is a step of preparing the dielectric elastomer layer 11 in the first state.
  • the dielectric elastomer layer 11 in the first state refers to, for example, the original thin film itself, which is the material of the dielectric elastomer layer, or the dielectric elastomer layer 11 in the state of being cut from the original thin film into individual pieces of a required size and shape. .
  • the thickness of the dielectric elastomer layer 11 in the first state is 400 ⁇ m or less, preferably 300 ⁇ m or less.
  • the dielectric elastomer layer 11 has an elongation rate of 800% or more in the first state.
  • the elongation rate in the present invention refers to the ratio of the elongated length to the length before elongation, and the elongation rate is 0% before the elongation.
  • Examples of materials for the dielectric elastomer layer 11 include silicone-based materials, acrylic-based materials, and nitrile-based rubbers. Moreover, when the dielectric elastomer layer 11 is made of an acrylic material, it preferably contains a cross-linking agent having a molecular weight of 168 or less. Moreover, when the dielectric elastomer layer 11 is made of nitrile rubber, it preferably contains a cross-linking agent having a molecular weight of 340 or less.
  • FIG. 2(a) is an example of the dielectric elastomer layer 11 prepared by the preparation process.
  • the dielectric elastomer layer 11 of this example has a substantially rectangular shape (square shape) for convenience of explanation, the shape and size of the dielectric elastomer layer 11 are not limited at all.
  • the straightening step is a step of maintaining the dielectric elastomer layer 11 prepared in the preparation step for a first time or more in a second state in which tension is generated by stretching the dielectric elastomer layer 11 more than in the first state.
  • the first time is set by the material of dielectric elastomer layer 11 .
  • the material of dielectric elastomer layer 11 For example, when the dielectric elastomer layer 11 is made of silicone-based material or nitrile-based rubber, the first time is 0.5 hours.
  • the first time is 24 hours if the dielectric elastomer layer is made of an acrylic material.
  • the elongation rate of the dielectric elastomer layer is set as follows. First, when the dielectric elastomer layer 11 is stretched along the x direction (first direction), which is an example of the direction perpendicular to the thickness direction of the dielectric elastomer layer 11, the length in the second state of the straightening process shown in FIG. The expansion rate Ex of the length Lx2 with respect to the length Lx1 in the first state of the preparation process in FIG. Further, when the dielectric elastomer layer 11 is stretched along the y direction (second direction) orthogonal to the x direction, the length Ly2 in the second state of the straightening step in FIG. is set to 50% or more and 350% or less with respect to the length Ly1 in the first state. In the straightening step, the film may be stretched in both the x and y directions, or may be stretched in only one of the x and y directions.
  • the pair of electrode layers 12 are formed after the correcting process and before the fixing process.
  • a pair of electrode layers 12 are arranged on both sides of the dielectric elastomer layer 11 .
  • the electrode layer 12 is made of a material that exhibits sufficient electrical conductivity while appropriately following expansion and contraction of the dielectric elastomer layer 11 .
  • Electrode layer 12 contains, for example, one or more of conductive materials such as carbon materials, conductive polymer compounds, and metal materials. Carbon materials are, for example, graphite, fullerene, carbon nanotubes (CNT), graphene, and the like.
  • the carbon material may be subjected to one or more of treatments such as metal doping treatment, metal inclusion treatment and metal plating treatment.
  • Examples of conductive polymer compounds include polyacetylene, polythiophene, polypyrrole, polyphenylene, polyphenylene vinylene, and polybenzothiazole.
  • the metal material is, for example, silver (Ag), gold (Au), aluminum (Al), etc., and may be an alloy.
  • each of the pair of electrode layers 12 has an annular shape for convenience of explanation, but the shape and size of the electrode layers 12 are not limited at all.
  • the pair of electrode layers 12 may be formed after the fixing process as long as it is after the correcting process.
  • the fixing step is a step of fixing the dielectric elastomer layer 11 to the support member 2 in the third state.
  • This fixation is for allowing the dielectric elastomer layer 11 to function as one element constituting the dielectric elastomer transducer.
  • the process configuration may be such that it is further expanded and contracted.
  • FIG. 4C the outer peripheral portion and the inner peripheral portion of the ring-shaped electrode layer 12 are fixed to the supporting member 2 .
  • a specific configuration of the support member 2 and a specific fixing mode of the dielectric elastomer layer 11 are not limited at all.
  • the thickness of the electrode layer 12 in the third state is 80 ⁇ m or less.
  • FIG. 3 shows an example of a dielectric elastomer transducer manufactured by the dielectric elastomer transducer manufacturing method of this embodiment.
  • the dielectric elastomer transducer A1 shown in the figure comprises a pair of dielectric elastomer elements 1 and a support member 2.
  • a pair of dielectric elastomer elements 1 consists of the dielectric elastomer layer 11 and a pair of electrode layers 12 described above.
  • the illustrated dielectric elastomer element 1 has, for example, a rectangular dielectric elastomer layer 11 shown in FIG. It is cut to shape.
  • the support member 2 includes an inner peripheral member 21 , a pair of outer peripheral members 22 and a plurality of rods 23 .
  • the support member 2 is preferably made of an insulating material, and a wiring layer may be formed on the surface layer and electrically connected to the pair of electrode layers 12 .
  • the inner peripheral member 21 is fixed to each inner peripheral portion of the pair of dielectric elastomer elements 1 .
  • the pair of outer peripheral members 22 are individually fixed to the outer peripheral portions of the pair of dielectric elastomer elements 1 .
  • a plurality of rods 23 maintain the pair of outer peripheral members 22 in a state of being separated from each other. Thereby, the pair of dielectric elastomer elements 1 are maintained in a truncated conical shape under tension.
  • a part of the support member 2 may be made of a conductive material.
  • the portion made of this conductive material can be used, for example, as a conductive path between the electrode layer 12 and an external circuit.
  • the rods 23 may be made of a conductive material, and the grounded electrode layers 12 of the pair of dielectric elastomer elements 1 may be electrically connected to each other via the rods 23 . In this case, the number of wires for connecting the pair of dielectric elastomer elements 1 and the external circuit can be reduced.
  • the dielectric elastomer transducer A1 When the dielectric elastomer transducer A1 is used as an actuator, a voltage is applied to either one pair of electrode layers 12 of the pair of dielectric elastomer elements 1 . This causes one dielectric elastomer element 1 to expand and the other dielectric elastomer element 1 to correspondingly contract. As a result, the inner peripheral member 21 moves upward or downward to exert a driving force. Also, the inner peripheral member 21 may be fixed. In this case, the peripheral member 22 descends or ascends.
  • the dielectric elastomer transducer A1 when used as a sensor or a power generation element, a member (not shown) is connected to the inner peripheral member 21 to transmit external force, reciprocating motion, etc. from outside the dielectric elastomer transducer A1.
  • the dielectric elastomer layer 11 was prepared by using an acrylic material with an elongation of 1200% and a cross-linking agent with a molecular weight of 128.
  • the thickness of the dielectric elastomer layer 11 in the first state was 300 ⁇ m.
  • the elongation rate of the dielectric elastomer in the preparation process is a value measured using a measuring method conforming to JISK6251. No. 6 dumbbells were used for the measurement, the length between chucks was set to 40 mm, and the pulling speed was set to 100 mm/min.
  • the dielectric elastomer layer 11 was stretched in both the x-direction and the y-direction.
  • the extension rate Ex and the extension rate Ey were each set to 100%.
  • the maintenance time (first time) for maintaining the second state was set to 48 hours.
  • the dielectric elastomer 11 was fixed to a predetermined support member.
  • the thickness of the dielectric elastomer layer 11 in the third state when fixed was 65 ⁇ m.
  • the electrode layer 12 was formed after the fixing process.
  • a conductive grease containing carbon black as a main component was used to form the electrode layer 12 .
  • both sides of the dielectric elastomer layer 11 were provided with electrode layers 12 having circular portions with a diameter D of approximately 20 mm.
  • Comparative Example 1 As Comparative Example 1, a dielectric elastomer 11 in the first state of an acrylic material having an elongation rate of 1200% was prepared in a preparation step. The thickness at this time was 300 ⁇ m. In Comparative Example 1, the fixing step was performed without passing through the straightening step. The thickness of the dielectric elastomer layer 11 in the third state when fixed in the fixing step was 75 ⁇ m. After the fixing step, an electrode layer 12 similar to that of the example was formed.
  • Comparative Example 2 As Comparative Example 2, an acrylic material having an elongation rate of 1200% was prepared. The thickness of the dielectric elastomer layer 11 in the first state at this time was 450 ⁇ m.
  • the dielectric elastomer layer 11 was stretched in both the x-direction and the y-direction.
  • the extension rate Ex and the extension rate Ey were each about 100%.
  • the maintenance time (first time) for maintaining the second state was set to 48 hours.
  • the dielectric elastomer 11 was fixed to a predetermined support member.
  • the thickness of the dielectric elastomer layer 11 in the third state when fixed was 90 ⁇ m.
  • Comparative Example 3 As Comparative Example 3, an acrylic material having an elongation rate of 600% was prepared in the preparation process. The thickness of the dielectric elastomer layer 11 in the first state at this time was 300 ⁇ m.
  • the dielectric elastomer layer 11 was stretched in both the x-direction and the y-direction.
  • the extension rate Ex and the extension rate Ey were each about 100%.
  • the maintenance time (first time) for maintaining the second state was set to 48 hours.
  • the dielectric elastomer 11 was fixed to a predetermined support member.
  • the thickness of the dielectric elastomer layer 11 in the third state when fixed was 65 ⁇ m.
  • Comparative Example 4 As Comparative Example 4, an acrylic material using a cross-linking agent having a molecular weight of 245 was prepared in the preparation step. The thickness of the dielectric elastomer layer 11 in the first state at this time was 300 ⁇ m.
  • the dielectric elastomer layer 11 was stretched in both the x-direction and the y-direction.
  • the extension rate Ex and the extension rate Ey were each about 100%.
  • the maintenance time (first time) for maintaining the second state was set to 48 hours.
  • the dielectric elastomer 11 was fixed to a predetermined support member.
  • the thickness of the dielectric elastomer layer 11 in the third state when fixed was 65 ⁇ m.
  • the diameter D at the beginning of preparation was 20.2 mm, and the diameter D after about two days was also 20.2 mm, and significant expansion and contraction was not confirmed. Also, no distortion or the like in the circular portion was confirmed. In the operation test, 96% deformation was obtained under the condition that a voltage of 3200 V was applied to the pair of electrode 12 layers.
  • the diameter D was 20.8 mm at the beginning of production, and after about two days had passed, the diameter D was 19.6 mm, confirming shrinkage of about 6%. In addition, it was confirmed that the circular portion was distorted and the roundness was lowered compared to the initial stage of preparation. In the operation test, 87% deformation was obtained under the condition that a voltage of 3200 V was applied to the pair of electrode layers 12 .
  • the diameter D was 20.4 mm at the beginning of production, and the diameter D after about two days was also 20.4 mm, and no significant expansion or contraction was confirmed. Also, no distortion or the like in the circular portion was confirmed.
  • 66% deformation was obtained under the condition that a voltage of 3200V was applied to the pair of electrode 12 layers, and 78% deformation was obtained under the condition that a voltage of 4800V was applied, but it broke immediately. .
  • the diameter D was 20.8 mm at the beginning of preparation, and the diameter D after about two days was also 20.8 mm, and no significant expansion or contraction was confirmed. Also, no distortion or the like in the circular portion was confirmed. In the operation test, a deformation of 38% was obtained under the condition that a voltage of 3200 V was applied to the pair of electrode 12 layers.
  • the diameter D was 20.2 mm at the beginning of production, and the diameter D after about two days was also 20.2 mm, and no significant expansion or contraction was confirmed. Also, no distortion or the like in the circular portion was confirmed. In the operation test, a deformation of 42% was obtained under the condition that a voltage of 3200 V was applied to the pair of electrode 12 layers.
  • the correction process is performed between the preparation process and the fixing process.
  • the dielectric elastomer layer 11 is maintained in the second state for the first time or more. This makes it possible to homogenize, for example, the heterogeneous structure inherent in the elastomer in the state of the original thin film.
  • the Example realized deformation larger than that of the Comparative Example by about 11%. Therefore, the dielectric elastomer transducer A1 can be expanded and contracted more appropriately.
  • Example 1 no significant expansion or contraction was observed in the diameter D after about two days, whereas in Comparative Example 1, contraction of about 6% was confirmed. . This is considered to be the effect of implementing the above-described correction process in the example. Also, under the same conditions, a deformation greater than about 9% was obtained.
  • Comparative Example 2 damage occurred immediately after the voltage of 4800 V was applied, but similar damage was not confirmed in Example. This is because the thickness of the dielectric elastomer layer 11 in the first state and the third state of Comparative Example 1 was thicker than the thickness applied to the examples (first state: 400 ⁇ m or less, third state: 80 ⁇ m or less). This is thought to be due to
  • the method of manufacturing a dielectric elastomer transducer according to the present invention is not limited to the above-described embodiments.
  • the specific configuration of the method for manufacturing a dielectric elastomer transducer according to the present invention can be modified in various ways.

Abstract

Procédé de production d'un transducteur élastomère diélectrique qui comprend une couche d'élastomère diélectrique et une paire de couches d'électrode, entre lesquelles la couche d'élastomère diélectrique est prise en sandwich. Selon la présente invention, le procédé comprend : une étape de préparation dans laquelle une couche d'élastomère diélectrique dans un premier état est préparée; une étape de correction dans laquelle la couche d'élastomère diélectrique est maintenue dans un deuxième état dans lequel la couche d'élastomère diélectrique est allongée par rapport au premier état, ce qui permet de générer une tension; une étape dans laquelle la paire de couches d'électrode est formée après l'étape de correction; et une étape de fixation dans laquelle la couche d'élastomère diélectrique, qui se trouve dans un troisième état (la couche d'élastomère diélectrique étant allongée par rapport au premier état), est fixée à un élément de support. L'épaisseur de la couche d'élastomère diélectrique dans le troisième état est inférieure ou égale à 80 µm. Grâce à cette configuration, la couche d'élastomère diélectrique peut être étendue et contractée plus convenablement.
PCT/JP2022/040168 2021-12-22 2022-10-27 Procédé de production d'un transducteur élastomère diélectrique WO2023119864A1 (fr)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082346A (ja) * 2004-09-15 2006-03-30 Fuji Xerox Co Ltd インクジェット記録ヘッドに代表される流体噴射ヘッド、及びそれを利用した流体噴射装置
JP2013257994A (ja) * 2012-06-11 2013-12-26 Bando Chem Ind Ltd トランスデューサ用可撓性シート及びトランスデューサ用可撓性シートの製造方法。
JP2017108601A (ja) * 2015-12-09 2017-06-15 国立大学法人信州大学 誘電アクチュエータ
WO2019146429A1 (fr) * 2018-01-26 2019-08-01 正毅 千葉 Procédé de fabrication de transducteur à base d'élastomère diélectrique
JP2020516227A (ja) * 2017-04-04 2020-05-28 ダブリュ．エル．ゴア アンド アソシエーツ，ゲゼルシャフト ミット ベシュレンクテル ハフツングＷ．Ｌ． Ｇｏｒｅ ＆ Ａｓｓｏｃｉａｔｅｓ， Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 強化されたエラストマー及び統合電極を含む誘電複合体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082346A (ja) * 2004-09-15 2006-03-30 Fuji Xerox Co Ltd インクジェット記録ヘッドに代表される流体噴射ヘッド、及びそれを利用した流体噴射装置
JP2013257994A (ja) * 2012-06-11 2013-12-26 Bando Chem Ind Ltd トランスデューサ用可撓性シート及びトランスデューサ用可撓性シートの製造方法。
JP2017108601A (ja) * 2015-12-09 2017-06-15 国立大学法人信州大学 誘電アクチュエータ
JP2020516227A (ja) * 2017-04-04 2020-05-28 ダブリュ．エル．ゴア アンド アソシエーツ，ゲゼルシャフト ミット ベシュレンクテル ハフツングＷ．Ｌ． Ｇｏｒｅ ＆ Ａｓｓｏｃｉａｔｅｓ， Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 強化されたエラストマー及び統合電極を含む誘電複合体
WO2019146429A1 (fr) * 2018-01-26 2019-08-01 正毅 千葉 Procédé de fabrication de transducteur à base d'élastomère diélectrique

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