WO2023110573A1 - Dispositif de détection de défauts de surface sur une surface d'un corps de test, et procédé de fonctionnement du dispositif - Google Patents

Dispositif de détection de défauts de surface sur une surface d'un corps de test, et procédé de fonctionnement du dispositif Download PDF

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Publication number
WO2023110573A1
WO2023110573A1 PCT/EP2022/084765 EP2022084765W WO2023110573A1 WO 2023110573 A1 WO2023110573 A1 WO 2023110573A1 EP 2022084765 W EP2022084765 W EP 2022084765W WO 2023110573 A1 WO2023110573 A1 WO 2023110573A1
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WO
WIPO (PCT)
Prior art keywords
light
test body
sensor
tested
image
Prior art date
Application number
PCT/EP2022/084765
Other languages
German (de)
English (en)
Inventor
Christian David ADLER
Marcel Werner
Jakob DOBNER
Original Assignee
Elkamet Kunststofftechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elkamet Kunststofftechnik Gmbh filed Critical Elkamet Kunststofftechnik Gmbh
Priority to EP22830831.8A priority Critical patent/EP4337941A1/fr
Publication of WO2023110573A1 publication Critical patent/WO2023110573A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G01N2021/9586—Windscreens

Definitions

  • the invention relates to a device for detecting surface defects on a surface of a test body, in particular on the surface of a transparent vehicle window, with a housing for delimiting an interior space, in which a light source and a light sensor are arranged, the light source for impinging on the test body having a Test light is used and the light sensor is used to receive emission light, which the test body emits as a result of being exposed to the test light, with a sensor surface of the light sensor perpendicular to an optical plummet of the surface to be tested of the test body can be aligned or is aligned.
  • Such a device is known from WO 02/090952 A1.
  • the present invention is based on the object of specifying a device which is particularly suitable for detecting surface defects in a transparent vehicle window, in particular a windshield.
  • This object is achieved with a device of the type mentioned at the outset in that the angle of incidence of the test light on the test body, measured relative to the optical plummet, and a positioning of the light source and the light sensor relative to the surface of the test body to be tested are coordinated in such a way that the light sensor diffusely reflected light from the test object surface to be tested reaches the light sensor and that light reflected from the test object surface to be tested does not reach the light sensor.
  • the optical plummet corresponds in particular to a central optical axis of the device.
  • the emission light emitted by the test body as a result of being exposed to the test light contains both diffusely reflected light ("scattered light ”) as well as directed reflected light components, but the directed reflected light does not reach the light sensor.
  • spetered light diffusely reflected light
  • the light sensor is usually undamaged when new, so that when the device according to the invention is used, its light sensor ideally does not detect any diffusely reflected light.
  • the surface of a test body is at least essentially free of damage, when the test body is exposed to a test light, only emission light occurs that corresponds at least approximately to fully directed reflected light.
  • Suitable angles of incidence of light can be provided in particular when the light source is arranged between the light sensor and the surface to be checked, viewed along the optical plummet.
  • a distance between the light source and the surface to be tested can be set within a setting range, e.g. by means of a setting device that changes the position of the light source, preferably along a setting axis that is oriented in particular parallel to the optical plummet.
  • the light reflected in a direction that is spatially offset from the light sensor impinges on a boundary of the interior of the housing.
  • at least one Absorption diaphragm for hiding directed reflected light is arranged between the test body and the light sensor. This makes it possible to minimize undesired light influences in a spatial environment of the light sensor.
  • the absorption diaphragm is arranged between the light source and the light sensor as seen along the optical perpendicular and thus in a spatial area that is preferably free or substantially free of test light and that serves at least substantially for emission light to pass through.
  • the absorption screen preferably has a light passage opening, which allows passage of diffusely reflected light in the direction of the light sensor. It is optionally provided that a lens is arranged inside the light passage opening, which lens enables the diffusely reflected light to be focused on a sensor surface of the light sensor or which images a section of the surface to be tested on the sensor surface.
  • the light source has at least three light emission points, which are distributed in a plane perpendicular to the optical plumb and around the optical plumb, in particular are regularly distributed. This allows the section of the surface to be tested to be exposed to test light from different spatial directions, but preferably with identical light incidence angles in each case.
  • the light emission points of the light source form a ring arrangement. This can be realized, for example, in that the light source has at least ten, preferably at least twenty, in particular at least thirty, light emission points, which are distributed in a ring around the optical plummet. Such a large number of light emission points enables a particularly uniform illumination of a surface section to be checked.
  • the light source or the light emission points of the light source may have a defined light emission direction in order to apply test light to (only) a spatially limited section of the surface to be tested.
  • a light entrance screen it is preferable for a light entrance screen to be arranged between the light source and the test body, as viewed along the optical plummet, the light entrance screen having an aperture opening which is delimited by a peripherally closed aperture stop. This enables a larger area to be illuminated, which can extend spatially beyond the section of the surface to be tested and can also include the aperture stop, but with a particularly homogeneous light distribution being made possible in the section of the surface to be tested illuminated in this way.
  • the diaphragm limiter of the light incidence diaphragm can be adjustable, see above that a size, such as a diameter, the aperture is adjustable.
  • An arrangement that is particularly well suited for capturing scattered light results when the light emission points of the light source are arranged radially outside of a straight, prism-shaped space, with the aperture opening forming a base area of the prism-shaped space and with the aperture limit, with an imaginary parallel displacement along the optical perpendicular, covering the lateral surface of the forms a prismatic space. In this way, it is also particularly easy to prevent light that is reflected in a directed manner from reaching the light sensor.
  • Preferred smallest angles of incidence of light are at least approximately 5°, in particular at least approximately 6°.
  • Preferred light incidence angles are a maximum of approximately 20°, in particular a maximum of approximately 18°.
  • the device is a hand-held device.
  • the housing has a boundary which extends parallel to the optical plummet and is, for example, cylindrical and has a maximum external diameter of, for example, 15 cm. This allows the enclosure to be grasped by hand from the outside and placed on a surface to be inspected, particularly in an area where which the surface of the test specimen is damaged, for example by stone chipping.
  • the device comprises an evaluation unit for evaluating the diffusely reflected light detected by the light sensor.
  • the light sensor can detect a quantity of diffusely reflected light, for example by means of integration over a predetermined period of time.
  • a limit value preferably related to an intensity of the test light, is specified for a quantity of light to be detected by the light sensor; if the limit value is exceeded, the test specimen can be classified, which corresponds to the evaluation of the test specimen as "defective". For the example of a vehicle window, an evaluation as "defective" can be linked to a recommendation for further testing or for replacing the vehicle window.
  • the quantity of light determined by the light sensor can be corrected by a quantity of reference light, which the sensor detects under otherwise identical conditions, but without applying test light to the surface to be tested.
  • the light sensor prefferably be an image sensor.
  • an image of a section of the surface to be checked can be recorded, combined with a graphic evaluation of the image of a section of the surface to be checked.
  • a first scattered light image is created using the image sensor.
  • the creation of the first scattered light image can include a correction step in which a reference image created under otherwise identical conditions—but without subjecting the surface to be tested to test light—is subtracted from an image captured under subject to test light. In this way, extraneous light influences and/or other error influences can be minimized.
  • a modified scattered light image is created by calculation on the basis of the first scattered light image, with the first scattered light image and the modified scattered light image then being subtractively superimposed.
  • the modified scattered light image for example, image elements that are caused by diffusely reflected light on the surface to be tested can be at least partially removed.
  • the subtractive superimposition of such a modified scattered light image with the first scattered light image makes it possible to generate an image of the tested section of the surface that contains exclusively or at least largely exclusively image components that correlate with surface defects that were the cause of the emission of diffusely reflected light.
  • the modified scattered light image is created using a median filter and that the modified scattered light image is free of high-frequency image components.
  • High-frequency image components are understood to mean those image components in which intensity values of image points or pixels that are adjacent to one another differ from one another by a minimum difference or a minimum factor.
  • the first scattered light image has a first image area and a second image area, the first image area being assigned to a first surface section of the surface to be inspected, the second image area being assigned to a second surface section of the surface to be inspected, the surface sections being different are strongly illuminated and the intensities of the image areas are adjusted to compensate for the different illuminance levels of the surface sections.
  • Such an adjustment can take place, for example, by mathematical amplification of an image area that is assigned to a weaker illuminated surface section.
  • the light source or its test light can be modulated and/or for a modulator to be arranged between the light source and the surface to be tested, for example a mechanical "chopper" with which the test light emitted by the light source can be approximately rectangular in intensity, for example can be modulated between 0% and 100%.
  • a modulator to be arranged between the light source and the surface to be tested, for example a mechanical "chopper" with which the test light emitted by the light source can be approximately rectangular in intensity, for example can be modulated between 0% and 100%.
  • an electro-optical or acousto-optical modulator can also be used for intensity modulation.
  • Direct modulation of the light source for example by modulating the operating voltage and/or the operating current, is also possible.
  • the Test light to impress a characteristic, in particular a frequency and a phase, whereby a frequency- and phase-dependent detection of the light diffusely reflected on the surface to be tested is made possible by the light sensor. This allows influences from extraneous light
  • Eliminate for example, by ambient lighting or - when using the device to test a vehicle window in the installed state - by light sources inside the vehicle.
  • FIG. 1 shows a schematic representation of an embodiment of a device for detecting surface defects on a surface of a test body
  • FIG. 2 shows a representation corresponding to FIG. 1 of a further embodiment
  • FIG. 3 shows a representation corresponding to FIG. 1 of a further embodiment
  • Fig. 4 is a side view of another embodiment; and 5 shows a perspective view of a light source for use in a device according to one of FIGS. 1 to 4.
  • a test body 12 is preferably a transparent vehicle pane 14 with a surface 16 to be tested, which corresponds in particular to an outside of the vehicle pane 14 .
  • the vehicle pane 14 is in particular a windshield, the outside of which is exposed to increased wear when used in a motor vehicle compared to an inside 18 , for example due to stone impact or wiper blade wear.
  • a section 20 of the surface 16 to be checked can in particular be a section of the vehicle window 14 that is assigned to sensors or cameras of vehicle assistance systems. Such a section is located, for example, in an upper and central area of the vehicle when a windshield is installed, in which area a rear-view mirror is usually arranged on the inside. Section 20 can also represent a partial area of a field of vision through which a vehicle driver perceives the surroundings of the vehicle.
  • Section 20 is in particular a circular section with a diameter of 2 cm to 6 cm, for example.
  • the device 10 has a housing which is identified overall by the reference numeral 22 and is composed of a particularly cylindrical side wall 24, a particularly circular disk-shaped cover section 26 and a particularly annular disk-shaped base section 28.
  • a diameter of the side wall 24 is preferably a maximum of 15 cm; a height of the side wall 24 extending between the cover section 26 and the base section 28 is between approximately 10 cm and approximately 35 cm, for example.
  • the above dimensions allow the housing 22 to be manually guided and placed on the specimen 12 and moved across the surface 16 to be tested so that different sections 20 of the surface 16 to be tested can be tested while the device can be guided manually .
  • the device 10 On its underside and adjacent to the bottom section 28, the device 10 has supports 30 made of a plastic or elastomer material, which gently support the device 10 on the surface 16 to be tested, but at the same time also ensure a defined alignment of the device 10 relative to the testing surface 16 allow.
  • the pads 30 or feet are preferably distributed in a ring along a circumference; it is also possible for only one support 30, which is closed in the form of a ring, to be provided.
  • the annular disk-shaped bottom section 28 forms a light incidence screen 32, which extends parallel to the surface 16 to be tested when the device 10 is placed on it the portion 20 of the surface to be inspected 16; a particularly circular diaphragm opening 34, which is delimited by the light entry diaphragm 32, is also oriented parallel to the section 20.
  • An optical plummet 36 of section 20 of surface 16 to be tested forms a normal to surface 16 to be tested and in particular forms a central optical axis of device 10.
  • a sensor surface 38 of a light sensor 40 is aligned perpendicular to optical plummet 36.
  • the light sensor 40 is spaced from the surface 16 to be inspected and is preferably located adjacent to the lid portion 26 .
  • the device 10 also includes a light source 42, which is also shown in FIG.
  • the light source 42 has a multiplicity of light emission points, which are denoted by the reference numeral 44 in FIG. 5 by way of example.
  • the light emission points 44 extend within a plane 46, cf. FIG.
  • the light emission points 44 are arranged in a distributed manner around the optical plummet 36, preferably arranged in a regularly distributed manner, so that the section 20 of the surface 16 to be checked can be illuminated essentially homogeneously and without shadows.
  • the light source 42 is arranged between the light sensor 40 and the surface 16 to be tested, viewed along the optical plumb 36 . Contrary to what is shown in the drawing, it is possible that the light source 42 is further away from the surface 16 to be checked than from the light sensor 40.
  • the light emission points 44 of the light source 42 are distributed along an imaginary circular line, the diameter of which is larger than the diameter of a circular aperture stop 48 of the light entrance aperture 32.
  • the light source 42 emits test light not only in the direction of the section 20 of the surface 16 to be tested, but also radially outward beyond the aperture 34 . Inspection light not impinging on portion 20 of the surfaces 16 to be inspected is absorbed by the insides of portions 28, 24 and 26 of housing 22, for example using a matte black coating.
  • FIG. 1 shows light beams by way of example which correlate with a minimum light incidence angle ⁇ min and with a maximum light incidence angle ⁇ max .
  • the angles of incidence of light are each measured in relation to the optical plummet 36 .
  • a first light beam 50 hits the surface 16 to be checked with a minimum light incidence angle ⁇ min of, for example, 7° and is reflected with a first light component in a directed manner, with a light emergence angle ⁇ min also related to the optical plummet 36 being equal to the minimum light incidence angle ⁇ min is
  • the directionally reflected light beam 52 is part of the emission light emitted by the test body 12 as a result of being exposed to test light.
  • the light beam 52 does not strike the sensor surface 38 of the light sensor 40, but strikes an inside of the cover section 26.
  • a second part of the emission light is formed by diffusely reflected light, which is indicated by a light beam 54 in FIG. This diffusely reflected light is caused by irradiation with the light beam 50 and by surface defects of the surface 16 to be checked.
  • the diffusely reflected light 54 strikes the sensor surface 38 of the light sensor 40.
  • FIG. 1 shows another light beam 56 as an example, which is assigned to a maximum light incidence angle ⁇ max . This angle is 16°, for example.
  • a light beam 58 reflected by the surface 16 to be tested impinges on an underside of the light incidence screen 32 which is formed by the bottom section 28 of the housing 22 and which faces the surface to be tested. The light beam 58 does not reach the light sensor 40 either.
  • Another light beam 60 is indicated in FIG.
  • At least the light sensor 40 and the light source 42 are arranged in an interior space 62 of the housing 22 .
  • the diameter of a section 20 to be detected of the surface 16 of the test body 12 to be tested is denoted by G in FIG. 1 .
  • a diameter of the sensor surface 38 is denoted by d.
  • a distance measured along the optical plummet 36 between the surface to be checked 16 of the Test body 12 on the one hand and the sensor surface 38 of the light sensor 40 on the other hand is denoted by a.
  • the light source 42 has a radial distance R from the optical plummet 36 and a distance b, measured along the optical plummet 36, from the surface 16 of the test body 12 to be tested.
  • FIG. 2 A device 10 is shown in FIG. 2, the construction of which is supplemented with additional elements described below in comparison to the device 10 according to FIG.
  • the aperture stop 32 can be adjustable so that the size of the aperture opening 34 can be adjusted.
  • the light sensor 40 of the device 10 according to FIG. 2 is an image sensor whose sensor surface 38 is aligned parallel to the surface 16 of the test body 16 to be tested.
  • an absorption diaphragm 64 is arranged, which extends in a plane 66 oriented perpendicular to the optical plummet 36 is.
  • the absorption screen 64 has an in particular circular light passage opening 68 .
  • the light passage opening 68 is used for the passage of diffusely reflected light 54 and 60 from the test body 12 in the direction of the light sensor 40.
  • the absorption screen 64 serves to block out light 52 that is reflected in a directed manner, so that light 52 that is reflected in a directed manner is already blocked out before it reaches the cover section 26 of the housing 22 .
  • a lens 70 is optionally arranged in the light passage opening 68 , which focuses diffusely reflected light 54 , 60 onto the sensor surface 38 of the light sensor 40 or which images the section 20 of the surface 16 to be checked onto the sensor surface 38 .
  • the diameter of a section 20 to be detected of the surface 16 of the test body 12 to be tested is denoted by G in FIG. 2 .
  • a diameter of the light passage opening 68 of the absorption diaphragm 64 is denoted by d.
  • a distance, measured along the optical perpendicular 36, between the surface 16 to be tested of the test body 12 on the one hand and the absorption diaphragm 64 on the other is denoted by a.
  • the light source 42 has a radial distance R from the optical plummet 36 and a distance b, measured along the optical plummet 36, from the surface 16 of the test body 12 to be tested.
  • An embodiment of a device 10 shown in Figure 3 differs from the device 10 according to Figure 2 in that the absorption stop 64 is arranged immediately adjacent to the light source 42 . No lens is arranged in the light passage opening 68 .
  • the device 10 according to FIG. 3 comprises an additional light source 72 which is arranged between the light source 42 and the surface 16 of the test body 12 to be tested in relation to the optical plummet 36 .
  • the additional light source 72 extends within a plane 74 which is oriented perpendicularly to the optical plummet 36 .
  • the additional light source 72 has a structure comparable to that of the light source 42 (compare FIG. 5); however, it is possible for the light emission points 44 of the additional light source 72 to be distributed over a larger or smaller diameter than the light emission points 44 of the light source 42.
  • the additional light source 72 enables a particularly good illumination of the section 20 of the test body 12.
  • the diameter of a section 20 to be detected of the surface 16 of the test body 12 to be tested is denoted by G in FIG. 3 .
  • a diameter of the light passage opening 68 of the absorption diaphragm 64 is denoted by d.
  • a distance, measured along the optical perpendicular 36, between the surface 16 to be tested of the test body 12 on the one hand and the absorption diaphragm 64 on the other is denoted by a.
  • the light source 42 has a radial distance R to the optical plummet 36 and one along the optical plummet 36 measured distance b to the surface to be tested 16 of the test body 12.
  • FIG. 4 shows a device 10 whose structure correlates with the structure of the device 10 according to FIG.
  • an evaluation unit 78 is provided, which is used to evaluate the diffusely reflected light detected by the light sensor 40 .
  • the evaluation unit 78 can also be part of an external computing unit with which the light sensor 40 communicates in a wired or wireless manner.
  • FIG. 4 also shows a carrier element 76 for fastening the light sensor 40 and a carrier element 80 for fastening the light source 42 .
  • the term "diameter" in the above description and in the following patent claims should not be understood to mean that the respective element - such as the section 20 to be detected, the sensor surface 38 or the light passage opening 64 - must have a circular shape. Rather, configurations of the respective element that deviate from the circular shape are also conceivable and expressly included. Instead of a "half diameter", there is then a distance between a boundary of the respective element and the optical plummet 36.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
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  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

L'invention concerne un dispositif (10) pour détecter des défauts de surface sur une surface d'un corps de test (12), en particulier sur la surface (16) d'une vitre de véhicule transparente (14), comprenant un boîtier (22) pour délimiter un intérieur (62) dans lequel une source de lumière (42) et un capteur de lumière (40) sont agencés, la source de lumière servant à laisser agir la lumière de test sur le corps de test et le capteur de lumière servant à enregistrer la lumière d'émission émise par le corps de test suite à l'incidence de la lumière de test sur celui-ci, une surface de capteur (38) du capteur de lumière pouvant être alignée ou étant alignée perpendiculairement à une normale optique (36) de la surface du corps de test à tester, des angles d'incidence de lumière (αmin, αmax) de la lumière de test sur le corps de test mesurés par rapport à la normale optique et un positionnement de la source de lumière et du capteur de lumière par rapport à la surface du corps de test à tester étant mis en correspondance les uns avec les autres de sorte que la lumière (54, 60) qui a été réfléchie de manière diffuse depuis la surface du corps de test à tester atteint le capteur de lumière et que la lumière (52, 58) qui a été réfléchie de manière spéculaire depuis la surface du corps de test à tester n'atteint pas le capteur de lumière.
PCT/EP2022/084765 2021-12-17 2022-12-07 Dispositif de détection de défauts de surface sur une surface d'un corps de test, et procédé de fonctionnement du dispositif WO2023110573A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP22830831.8A EP4337941A1 (fr) 2021-12-17 2022-12-07 Dispositif de détection de défauts de surface sur une surface d'un corps de test, et procédé de fonctionnement du dispositif

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DE102021133610.4A DE102021133610A1 (de) 2021-12-17 2021-12-17 Vorrichtung zur Erfassung von Oberflächendefekten auf einer Oberfläche eines Prüfkörpers und Verfahren zum Betrieb der Vorrichtung
DE102021133610.4 2021-12-17

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989428A (fr) * 1972-12-27 1974-08-27
JPH05180781A (ja) * 1991-12-27 1993-07-23 Kawasaki Steel Corp 表面欠陥検査方法及び装置
DE4318358A1 (de) * 1993-05-28 1994-12-01 Visolux Elektronik Gmbh Verfahren und Vorrichtung zum Messen von Streulicht erzeugenden Oberflächenfehlern von optischen Medien, wie Glas oder Kunststoff, insbesondere von Fahrzeugscheiben
JPH11326224A (ja) * 1998-03-15 1999-11-26 Omron Corp 検査方法及び検査装置
WO2002090952A1 (fr) 2001-05-08 2002-11-14 Wolfgang Weinhold Procede et dispositif d'examen sans contact d'un objet, en particulier pour l'examen de la forme superficielle dudit objet
EP1424551A1 (fr) * 2001-07-27 2004-06-02 Nippon Sheet Glass Co., Ltd. Procede d'evaluation de la contamination superficielle d'un objet et dispositif imageur utilise a cet effet
JP5900187B2 (ja) * 2012-06-27 2016-04-06 住友金属鉱山株式会社 表面傷検査装置及び表面傷検査方法
JP2019095238A (ja) * 2017-11-20 2019-06-20 パナソニックＩｐマネジメント株式会社 画像処理システム、画像処理方法、及びプログラム

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989428A (fr) * 1972-12-27 1974-08-27
JPH05180781A (ja) * 1991-12-27 1993-07-23 Kawasaki Steel Corp 表面欠陥検査方法及び装置
DE4318358A1 (de) * 1993-05-28 1994-12-01 Visolux Elektronik Gmbh Verfahren und Vorrichtung zum Messen von Streulicht erzeugenden Oberflächenfehlern von optischen Medien, wie Glas oder Kunststoff, insbesondere von Fahrzeugscheiben
JPH11326224A (ja) * 1998-03-15 1999-11-26 Omron Corp 検査方法及び検査装置
WO2002090952A1 (fr) 2001-05-08 2002-11-14 Wolfgang Weinhold Procede et dispositif d'examen sans contact d'un objet, en particulier pour l'examen de la forme superficielle dudit objet
US20040233421A1 (en) * 2001-05-08 2004-11-25 Wolfgang Weinhold Method and device for examining an object in a contactless manner, especially for examining the surface form of the same
EP1424551A1 (fr) * 2001-07-27 2004-06-02 Nippon Sheet Glass Co., Ltd. Procede d'evaluation de la contamination superficielle d'un objet et dispositif imageur utilise a cet effet
JP5900187B2 (ja) * 2012-06-27 2016-04-06 住友金属鉱山株式会社 表面傷検査装置及び表面傷検査方法
JP2019095238A (ja) * 2017-11-20 2019-06-20 パナソニックＩｐマネジメント株式会社 画像処理システム、画像処理方法、及びプログラム

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EP4337941A1 (fr) 2024-03-20

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