WO2023106355A1 - Printing device and printing method - Google Patents

Printing device and printing method Download PDF

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Publication number
WO2023106355A1
WO2023106355A1 PCT/JP2022/045198 JP2022045198W WO2023106355A1 WO 2023106355 A1 WO2023106355 A1 WO 2023106355A1 JP 2022045198 W JP2022045198 W JP 2022045198W WO 2023106355 A1 WO2023106355 A1 WO 2023106355A1
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WO
WIPO (PCT)
Prior art keywords
blade
mask
cleaning unit
cleaning
paste
Prior art date
Application number
PCT/JP2022/045198
Other languages
French (fr)
Japanese (ja)
Inventor
正幸 萬谷
俊行 村上
哲矢 田中
祐介 末安
仁史 山内
Original Assignee
パナソニックIpマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニックIpマネジメント株式会社 filed Critical パナソニックIpマネジメント株式会社
Priority to JP2023566351A priority Critical patent/JPWO2023106355A1/ja
Priority to CN202280055866.5A priority patent/CN117813201A/en
Publication of WO2023106355A1 publication Critical patent/WO2023106355A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/08Machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/08Machines
    • B41F15/12Machines with auxiliary equipment, e.g. for drying printed articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F35/00Cleaning arrangements or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41MPRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00Inking and printing with a printer's forme
    • B41M1/12Stencil printing; Silk-screen printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering

Definitions

  • the present disclosure relates to a printing device and a printing method.
  • a screen printer that scrapes off the paste adhering to the bottom surface of the screen mask.
  • This screen printer is a screen printer in which a substrate is brought into contact with the lower surface of a screen mask having patterned holes, and a squeegee is slid on the screen mask to print paste on the substrate through the patterned holes.
  • a cleaning device for removing the paste adhering to the lower surface of the screen mask, the cleaning device having a plurality of scrapers for scraping off the paste adhering to the lower surface of the screen mask by sliding the lower surface of the screen mask in the cleaning direction.
  • a member and a holding body for holding a plurality of scraping members are provided, and the plurality of scraping members are held by the holding body while being aligned in series with respect to the cleaning direction.
  • the present disclosure provides a printing apparatus and a printing method that can improve the cleaning accuracy of the mask and improve the printing accuracy of the paste through the mask.
  • One aspect of the present disclosure is a printing apparatus that prints solder paste on a substrate using a mask having predetermined openings, comprising: a substrate holding unit that holds the substrate and aligns the substrate with the opening; a printing head that fills the space with paste and prints the solder paste on the substrate; a cleaning unit that includes a blade that scrapes off the solder paste adhering to the back surface of the mask; a cleaning unit moving mechanism that scrapes off the solder paste adhered to the back surface of the mask by moving the blade with the blade; and a blade cleaning unit that cleans the blade.
  • One aspect of the present disclosure is a printing method for printing solder paste on a substrate using a mask having predetermined openings, comprising: holding the substrate and aligning it with the opening; and printing the solder paste on the substrate; and moving a cleaning unit equipped with a blade for scraping off the solder paste adhering to the back surface of the mask along the back surface of the mask.
  • the printing method includes the steps of scraping off the solder paste adhering to the back surface of the mask with a blade, and cleaning the blade.
  • FIG. 1 is a side view of a configuration example of a printing apparatus according to an embodiment of the present disclosure
  • FIG. FIG. 2 is a top view of a configuration example of a printing apparatus according to the first embodiment
  • Block diagram showing a configuration example of a control system of a printing apparatus A diagram for explaining a printing operation by a printing device.
  • a diagram for explaining a printing operation by a printing device. A diagram for explaining a printing operation by a printing device.
  • FIG. 5 is a diagram for explaining the printing operation by the printing device (a continuation of FIGS. 5A to 5C);
  • FIG. 5 is a diagram for explaining the printing operation by the printing device (a continuation of FIGS. 5A to 5C);
  • FIG. 5 is a diagram for explaining the printing operation by the printing device (a continuation of FIGS. 5A to 5C);
  • FIG. 4 is a diagram for explaining adhesion of paste to a screen mask and mask cleaning related to a printing operation;
  • FIG. 4 is a diagram for explaining adhesion of paste to a screen mask and mask cleaning related to a printing operation;
  • Diagram showing paste remaining on the blade after mask cleaning 6A and 6B are diagrams for explaining the printing operation by the printing apparatus 1 (a continuation of FIGS. 6A and 6B);
  • FIG. Schematic diagram showing a first example of a blade cleaning unit Schematic diagram showing a second example of the blade cleaning unit
  • FIG. 1 is a side view of a configuration example of a printing apparatus 1 according to an embodiment of the present disclosure.
  • FIG. 2 is a top view of a configuration example of the printing apparatus 1.
  • the transport direction of the substrate 2 is defined as the X direction
  • the direction perpendicular to the X direction in the horizontal plane is defined as the Y direction
  • the direction perpendicular to the XY plane is defined as the Z direction.
  • the positive side in the Z direction is also called “up”
  • the negative side in the Z direction is called "down”.
  • the printing device 1 has a function of printing a paste P such as cream solder or conductive paste on the substrate 2 .
  • the printing device 1 may be, for example, a screen printer.
  • the printing apparatus 1 includes a substrate support table 4 and a substrate support table moving mechanism 5.
  • the substrate support table 4 clamps, fixes and supports the substrate 2 transported from the upstream side.
  • the substrate support table moving mechanism 5 can move the substrate support table 4 in the X and Y directions, and can move (lift) the substrate support table 4 in the Z direction. Further, the substrate support table moving mechanism 5 can rotate the substrate support table 4 in a rotation direction ⁇ that is different from the XY plane. Therefore, the substrate support table 4 is movable in the X direction (bx direction), Y direction (by direction), and Z direction (bz direction), and is rotatable in the rotational direction ⁇ (b ⁇ direction).
  • the substrate support table 4 is driven by the substrate support table moving mechanism 5 to adjust the position and orientation of the substrate support table 4, that is, the position and orientation of the substrate 2, and the screen mask 13 (specifically, the pattern holes of the screen mask 13). 13h) to determine the position of the substrate 2 and align it.
  • the substrate 2 is carried in by a substrate transport mechanism (not shown) from the upstream side and positioned. After printing on the substrate 2, the substrate 2 is carried out downstream by the substrate transport mechanism.
  • the printing device 1 includes a screen mask 13, a print head 14, a print head moving mechanism 15, and a squeegee 16.
  • a flexible screen mask 13 is spread over the mask frame 13a. Further, the screen mask 13 is formed with a plurality of pattern holes 13h corresponding to the shape, position, etc. of the electrodes to be printed on the substrate 2, and the like.
  • a paste P is supplied onto the screen mask 13 by a paste supply mechanism (not shown). The paste P contains an adhesive flux.
  • a print head 14 is arranged on the screen mask 13 .
  • the print head 14 has a squeegee elevating mechanism for elevating the squeegee 16 .
  • Two squeegees 16 are provided as a pair along the Y direction.
  • the squeegee 16 is formed in an elongated shape with the X direction as its longitudinal direction.
  • the squeegee 16 is moved up and down in the z direction by driving the squeegee lifting mechanism. That is, one squeegee 16 moves up and down in the a1 direction, and the other squeegee 16 moves up and down in the a2 direction. As the squeegee 16 descends, the squeegee 16 comes into contact with the upper surface of the screen mask 13 .
  • the squeegee 16 contacts the screen mask 13 and slides on the upper surface of the screen mask 13 to print the paste onto the substrate 2 through the pattern holes 13 h of the screen mask 13 . Further, the contact of the squeegee 16 with the upper surface of the screen mask 13 is released by raising the squeegee 16 .
  • the print head moving mechanism 15 moves the print head 14 along the Y direction.
  • the print head 14 is movable in the Y direction (ay direction) by driving the print head moving mechanism 15 . Therefore, the squeegee 16 attached to the print head 14 moves in the Y direction and prints the paste P onto the substrate 2 through the pattern holes 13 h of the screen mask 13 .
  • the printing device 1 includes a camera unit 26.
  • a camera unit 26 is arranged below (on the back side of) the screen mask 13 .
  • the camera unit 26 is configured to be mounted on a camera unit movement base 28 and movable in the X direction.
  • the camera unit movement base 28 has a mechanism for moving the camera unit 26 along the X direction.
  • the camera unit movement base 28 extends along the X direction.
  • a guide rail 29 is arranged along the Y direction, and a slider 30 slidably fitted to the guide rail 29 is connected to the camera unit moving base 28 via a bracket. ing.
  • the camera unit moving base 28 is slidable (movable) in the Y direction.
  • the camera unit movement base 28 is horizontally moved in the Y direction by a camera unit movement base movement mechanism 33 .
  • the camera unit movement base movement mechanism 33 includes, for example, a nut, a feed screw, and a movement motor that rotationally drives the feed screw.
  • the camera unit movement base 28 and the camera unit movement base movement mechanism 33 constitute a camera unit movement mechanism 34 that horizontally moves the camera unit 26 in the X and Y directions. Therefore, the camera unit 26 is movable in the X direction (cx direction) and the Y direction (cy direction).
  • the camera unit 26 has a camera 26c and a prism 26p.
  • the camera 26c has, for example, a function as a board recognition camera that captures an image of the board 2 from above and a function as a mask recognition camera that captures an image of the screen mask 13 from the bottom side.
  • the camera 26c may have these two functions by itself, or may have these two cameras.
  • the prism 26p can image the lower surface 13c of the screen mask 13 and the upper surface of the substrate 2 by dispersing, refracting, or reflecting light.
  • the camera unit 26 moves horizontally along the X direction and the Y direction, and images the substrate 2 and the screen mask 13 at the same time, thereby making it possible to recognize the substrate 2 and the screen mask 13 at the same time. do.
  • the printing device 1 includes a cleaning unit 27.
  • a cleaning unit 27 is arranged below (on the back side of) the screen mask 13 . Note that the standby positions of the camera unit 26 and the cleaning unit 27 when not in use are, for example, both sides of the screen mask 13 along the X direction, but are not limited to this.
  • the cleaning unit 27 cleans the lower surface 13c of the screen mask 13 (mask cleaning).
  • the cleaning unit 27 has a function of cleaning by removing the paste P adhering to the lower surface 13c of the screen mask 13 or the paste P remaining in the pattern holes 13h without being transferred to the substrate 2, or the like.
  • the cleaning unit 27 includes a blade 42 , a blade holder 38 and a cleaning unit moving base 35 .
  • the blade 42 contacts the lower surface 13c of the screen mask 13 and scrapes off the paste P.
  • Blade holder 38 holds blade 42 .
  • the cleaning unit moving base 35 holds a blade holder 38 .
  • the blade holder 38 may or may not be moved up and down in the Z direction by driving an elevating mechanism (not shown).
  • the cleaning unit moving base 35 extends along the X direction.
  • a guide rail 29 is arranged along the Y direction, and a slider 31 slidably fitted to the guide rail 29 is connected to a cleaning unit moving base 35 via a bracket. .
  • the cleaning unit moving base 35 is slidable (movable) in the Y direction.
  • the cleaning unit moving base 35 is horizontally moved in the Y direction by the cleaning unit moving mechanism 36 .
  • the cleaning unit moving mechanism 36 includes, for example, a nut, a feed screw, and a moving motor that rotationally drives the feed screw.
  • the cleaning unit moving mechanism 36 horizontally moves the cleaning unit 27 in the Y direction. Therefore, the cleaning unit 27 is movable in the Y direction (dy direction).
  • the cleaning unit 27 performs mask cleaning while the paste P is not being printed using the screen mask 13 .
  • the cleaning unit 27 is arranged in the area A1 below the screen mask 13 by being driven by the cleaning unit moving mechanism 36 during mask cleaning.
  • the cleaning unit 27 is arranged in a waiting area A2 adjacent to the lower area A1 of the screen mask 13 and stands by during a period in which mask cleaning is not performed.
  • the standby area A2 is positioned so as not to overlap the screen mask 13 when the printer 1 is viewed from above.
  • the printing device 1 includes a blade cleaning unit 50 and a blade cleaning unit moving mechanism 51.
  • the blade cleaning unit 50 cleans the blades 42 of the cleaning unit 27 .
  • the blade cleaning unit moving mechanism 51 extends along the X direction and has a mechanism for moving the blade cleaning unit 50 along the X direction. Therefore, the blade cleaning unit 50 is movable along the X direction (ex direction).
  • the blade cleaning unit 50 cleans the blade 42 while moving from one end of the blade 42 to the other end along the X direction, for example, during the period of cleaning the blade 42 .
  • the blade cleaning unit 50 is placed, for example, at the positive end in the X direction and stands by while the blade 42 is not being cleaned.
  • the period during which the blade 42 is cleaned is included in the period during which the cleaning unit 27 is arranged in the standby area A2 at the end in the Y direction, not during the mask cleaning period.
  • FIG. 3 is a perspective view showing a configuration example around the blade holder 38.
  • FIG. 3 is a perspective view showing a configuration example around the blade holder 38.
  • the cleaning unit 27 scrapes off the paste P adhering to the lower surface 13c of the screen mask 13 and sucks and removes the scraped off paste P.
  • the blade holder 38 of the cleaning unit 27 has a frame 38a and a mask receiving portion 38b.
  • the frame 38a and the mask receiving portion 38b form the outer edges (sides and bottom) of the blade holder 38.
  • the blade holder 38 has an opening or a notch extending in the X direction inside the space formed by the frame 38a and the mask receiving portion 38b.
  • the mask receiving portions 38b are arranged at both ends of the blade holder 38.
  • the blade holder 38 can accommodate a plurality of flat blades 42 through openings or notches.
  • the upper surface of the mask receiving portion 38b is a mask contact surface 38m, which contacts the screen mask 13 during mask cleaning. As a result, the inside of the blade holder 38 becomes a closed space during mask cleaning. The end (upper end) of the blade 42 on the side of the screen mask 13 is located above the mask contact surface 38m.
  • the blade 42 is a thin "spatula-shaped" flexible member made of metal such as SUS.
  • the blade 42 may be made of an elastic material such as urethane rubber.
  • the blade 42 has a substantially rectangular cross section elongated in the X direction.
  • a plurality of blades 42 are arranged at predetermined intervals along the Y direction.
  • the upper end of the blade 42 contacts the lower surface 13c of the screen mask 13 and slides along the Y direction. Thereby, the blade 42 can scrape off the paste P adhering to the lower surface 13 c of the screen mask 13 .
  • the blade 42 may be bent.
  • the blade 42 may be replaceable, fixed and unfixable with respect to the blade holder 38, and removable.
  • the attack angle of the blade 42 with respect to the horizontal lower surface 13c of the screen mask 13 may be an angle smaller than 90°, that is, an acute angle.
  • the attack angle of the blade 42 is the angle formed by the lower surface 13c of the screen mask 13 and the blade 42 with respect to the cleaning direction (here, the Y direction). Then, the blade 42 slides in the cleaning direction in this angular state to scrape off the paste P adhering to the lower surface 13c of the screen mask 13 .
  • the frame 38a of the blade holder 38 has an opening in a part of the lower surface on the negative side in the Z direction, and communicates with the vacuum suction mechanism 56 (see FIG. 4) from the opening through a conduit.
  • the vacuum suction mechanism 56 By driving the vacuum suction mechanism 56, the inside of the pipeline is vacuum-sucked, and the components of the paste P that have passed through the filter after being scraped off by the blade 42 are sucked through the pipeline.
  • the blade cleaning unit 50 cleans the blade 42 while moving along the X direction during the blade cleaning period. During the blade cleaning period, the lower surface of the blade cleaning unit 50 may contact the upper end side of the blade 42 .
  • the blade cleaning unit 50 may, for example, wipe off the paste P adhering to the blade 42, blow it downward, or suck it upward.
  • FIG. 4 is a block diagram showing a configuration example of the control system of the printing apparatus 1. As shown in FIG. 4
  • the control unit 52 included in the printing apparatus 1 includes a storage unit 53, a mechanism driving unit 54, and a recognition processing unit 55.
  • the control unit 52 also controls the substrate support table moving mechanism 5, the print head 14, the print head moving mechanism 15, the camera unit 26, the camera unit moving base 28, the camera unit moving base moving mechanism 33, the cleaning unit moving mechanism 36, the blade cleaning mechanism. It is connected to the unit 50, the blade cleaning unit moving mechanism 51, the vacuum suction mechanism 56, and the like.
  • the storage unit 53 stores printing work data necessary for screen-printing the paste P on the substrate 2, cleaning work data necessary for cleaning the lower surface 13c of the screen mask 13, and blade cleaning data necessary for cleaning the blade 42. Store work data, etc.
  • the mechanism driving section 54 drives the substrate support table moving mechanism 5, the print head 14, the print head moving mechanism 15, the camera unit 26, the camera unit moving base 28, the camera unit moving base moving mechanism 33, and the like. As a result, the printing device 1 executes the printing operation of screen printing. Further, the mechanism driving section 54 drives the cleaning unit moving mechanism 36, the vacuum suction mechanism 56, and the like. As a result, the printing apparatus 1 executes mask cleaning. Further, the mechanism driving section 54 drives the blade cleaning unit 50, the blade cleaning unit moving mechanism 51, the vacuum suction mechanism 56, and the like. As a result, the printing apparatus 1 cleans the blade 42 for mask cleaning (blade cleaning).
  • the recognition processing unit 55 performs recognition processing on the image captured by the camera 26c.
  • the image includes the substrate 2, the screen mask 13, or the like.
  • the recognition processing unit 55 can detect the positions of the substrate 2 and the screen mask 13 by performing recognition processing. This position detection result may be used, for example, for alignment between the screen mask 13 and the substrate 2 . Further, the recognition processing unit 55 may recognize the state of the lower surface 13c of the screen mask 13 (for example, how much paste P remains, whether mask cleaning has been properly performed) by image recognition processing. .
  • FIG. 5A, 5B, and 5C are diagrams for explaining the printing operation of the printing apparatus 1.
  • FIG. 5A, 5B and 5C, substrate recognition, alignment of substrate 2 and screen mask 13, movement of print head 14 and filling of paste P are performed.
  • the substrate 2 has a pattern including a plurality of electrodes and is formed in a plate shape. It is assumed that the screen mask 13 is provided with pattern holes 13h at predetermined intervals corresponding to the intervals at which a plurality of electrodes are arranged on the upper surface of the substrate 2 .
  • the substrate support table 4 holds the substrate 2 transported by the substrate transport device.
  • the camera unit 26 is driven by the camera unit moving mechanism 34 to move in the X direction and the Y direction and pick up an image of the substrate 2 .
  • the control unit 52 recognizes the imaged state of the substrate 2 (FIG. 5A).
  • the substrate support table 4 is driven by the substrate support table moving mechanism 5 to move in the XY plane and rotate in the rotation direction ⁇ as needed so that the electrodes of the substrate 2 and the pattern holes 13h of the screen mask 13 face each other. Then, the substrate 2 and the screen mask 13 are aligned (FIG. 5B).
  • the substrate support table 4 is driven by the substrate support table moving mechanism 5 to move in the Z direction to bring the substrate 2 into contact with the lower surface 13 c of the screen mask 13 . Thereby, the screen mask 13 is aligned and superimposed on the substrate 2 .
  • the print head 14 moves (lowers) the squeegee 16 downward in the Z direction, lands the squeegee 16 on the screen mask 13 , and brings the lower edges of the pair of squeegees 16 into contact with the upper surface of the screen mask 13 .
  • the print head moving mechanism 15 moves the print head 14 in the printing direction A, and slides the pair of squeegees 16 on the screen mask 13 (Fig. 5C). During this time, each pattern hole 13h on each electrode of the substrate 2 is filled with the paste P supplied to the upper surface of the screen mask 13 (FIG. 5C).
  • the printing direction A may be in one direction (positive direction or negative direction in the Y direction) or in both directions (positive direction and negative direction in the Y direction). That is, one-way printing or two-way printing may be used.
  • FIGS. 6A and 6B are diagrams for explaining the printing operation by the printing device 1 (continuation of FIGS. 5A to 5C).
  • FIGS. 6A and 6B plate separation and transfer of paste P, as well as mask cleaning and unloading of substrate 2 are performed.
  • the print head moving mechanism 15 stops the movement of the print head 14.
  • the print head 14 raises the squeegees 16 to separate the lower edges of the pair of squeegees 16 from the upper surface of the screen mask 13 .
  • the substrate support table moving mechanism 5 lowers the substrate support table 4 to separate the substrate 2 from the screen mask 13 (plate separation) (FIG. 6A).
  • the paste P remains on each electrode 2a of the substrate 2, and the paste P is printed (transferred) onto the substrate 2 (FIG. 6A).
  • a substrate transport device removes the substrate 2 from the substrate support table 4 and transports (carries out) it outside the printing device 1 (FIG. 6B).
  • the cleaning unit 27 departs from the standby area A ⁇ b>2 and enters the area A ⁇ b>1 below the screen mask 13 .
  • the cleaning unit 27 performs mask cleaning by moving in the Y direction while the upper end of the blade 42 is in contact with the lower surface 13c of the screen mask 13 (FIG. 6B).
  • the cleaning unit 27 contacts the lower surface 13c of the screen mask 13 with the upper end of the blade 42 only in one Y direction of the reciprocating movement in the Y direction, and moves in one direction in this state. , may be mask cleaning. Further, the cleaning unit 27 moves in both directions in the Y direction, with the upper end of the blade 42 in contact with the lower surface 13c of the screen mask 13 in both directions of the Y direction, and moves in both directions in this state to clean the mask. good too.
  • FIG. 6B illustrates mask cleaning in only one direction (return pass only).
  • 7A and 7B are diagrams for explaining the adhesion of the paste P to the screen mask 13 and mask cleaning related to the printing operation.
  • 7A and 7B show in more detail the operation of the cleaning unit 27 during mask cleaning.
  • FIGS. 7A and 7B illustrate that when the cleaning unit 27 moves in the positive Y direction, the blade 42 comes into contact with the lower surface 13c of the screen mask 13 to perform mask cleaning.
  • the paste P remains in the pattern holes 13h of the screen mask 13 and on the bottom surface 13c.
  • the blade holder 38 is lifted under the control of the controller 52 to bring the blades 42 into contact with the lower surface 13 c of the screen mask 13 .
  • the control unit 52 drives the vacuum suction mechanism 56 to reduce the pressure in the closed space formed inside the blade holder 38 through the pipe, thereby creating a vacuum suction state.
  • the lower surface 13c of the screen mask 13 is in a state of being sucked.
  • the blade holder 38 moves in the cleaning direction (for example, the positive direction in the Y direction) to remove the paste P adhering to the lower surface 13c of the screen mask 13 and the pattern holes 13h.
  • Perform a removing mask cleaning operation FIGS. 7A and 7B. That is, while the blade holder 38 is moving, the blade 42 scrapes the paste P adhering to the lower surface 13c of the screen mask 13, and the scraped paste P is sucked.
  • FIG. 7B the paste P remaining in the pattern holes 13h of the screen mask 13 and on the lower surface 13c is removed after the cleaning unit 27 that performs mask cleaning has passed.
  • the control section 52 stops driving the vacuum suction mechanism 56 . Also, the cleaning unit 27 descends to a predetermined position in the standby area A2.
  • FIG. 8 is a diagram showing paste P remaining on the blade 42 after mask cleaning.
  • a blade 42A, a blade 42B, a blade 42C, and a blade 42D are installed in order from the positive side in the Y direction (the head in the leading direction).
  • the amount of paste P adhering to the blade 42A located at the leading edge of the print head 14 in the traveling direction is the largest. This is because the blade 42A first comes into contact with the region of the lower surface 13c of the screen mask 13 that has not been mask-cleaned.
  • the amount of paste P adhered to the blade 42 gradually decreases toward the direction opposite to the traveling direction of the print head 14 .
  • the blade 42A positioned at the leading edge in the cleaning direction scrapes off the paste P adhering to the lower surface 13c of the screen mask 13. As shown in FIG. While the number of mask cleaning operations is small, all the paste P is completely scraped off by the leading blade 42A. In the process of repeating and continuing the cleaning operation, the paste P that has not been sucked by the cleaning unit 27 is gradually accumulated on the upper end of the leading blade 42A. Then, as the accumulated amount of the paste P increases, the blade 42A bends backward (in the direction opposite to the cleaning direction), creating a gap between the screen mask 13 and the blade 42A.
  • the gap may be caused not only by the bending of the blade 42 but also by the unevenness of the lower surface 13 c of the screen mask 13 . Due to this gap, a portion of the paste P that has not been scraped off by the blade 42A may remain on the lower surface 13c of the screen mask 13. FIG. However, behind the blade 42A, the next blade 42B slides on the lower surface 13c of the screen mask 13, so the remaining paste P is scraped off by this blade 42B. Since the same bending as that of the blade 41A occurs in order from the leading end to the trailing end in the advancing direction, the amount of paste P remaining on the blade 42 after mask cleaning is the same as that of the blade 42A, the blade 42B, and the blade 42C. , blade 42D.
  • FIG. 9 is a diagram for explaining the printing operation by the printing device 1 (a continuation of FIGS. 6A and 6B). In FIG. 9, blade 42 is cleaned.
  • the cleaning unit 27 When the mask cleaning is completed, the cleaning unit 27 returns to the standby area A2 and stops moving.
  • the cleaning unit 27 faces the blade cleaning unit 50 in the Z direction when arranged in the standby area A2 (positive end in the Y direction).
  • the blade cleaning unit 50 cleans the blade 42 of the cleaning unit 27 while moving in the X direction by being driven by the blade cleaning unit moving mechanism 51 (FIG. 9). Thereby, the blade cleaning unit 50 removes the paste P adhering to, for example, the upper end of the blade 42 .
  • the blade cleaning unit 50 may clean the blade only in one direction in the X direction during the reciprocating movement in the X direction. Further, the blade cleaning unit 50 may clean the blade in both directions in the X direction during the reciprocating movement in the X direction.
  • the printing apparatus 1 After cleaning the blade, when a new substrate 2 is brought in, the printing apparatus 1 repeats printing of the paste P using the screen mask 13 (paste printing), cleaning the mask, and cleaning the blade. Note that the printing apparatus 1 may perform mask cleaning each time paste printing is completed a predetermined number of times (for example, once or multiple times). Further, the printing apparatus 1 may perform blade cleaning each time mask cleaning is completed a predetermined number of times (for example, once or multiple times).
  • FIG. 10 is a schematic diagram showing a first example of the blade cleaning unit 50.
  • the blade cleaning unit 50 has an air blower 50A that blows air toward the object.
  • the air blow section 50A removes the paste P adhering to the blade 42 of the cleaning unit 27 by blowing it downward inside the blade holder 38 that holds the blade 42 with an air blow (air (compressed air, for example)).
  • the removed blade 42 is vacuum-sucked and discharged to the outside of the blade holder 38 .
  • the air blower 50A has an air ejection nozzle that blows air toward the blade 42.
  • the orientation of the air ejection nozzle may determine the orientation of the air.
  • the air blower 50A may control the direction of blowing air.
  • the direction in which the air is delivered may be along the installation angle (attack angle) of the blade 42 or may be at an angle close to vertical (for example, vertical) with respect to the blade 42 .
  • the air blower 50A blows air in a direction along the installation angle of the blade 42, the paste P adhering to the lower end side of the blade 42 is also easily removed.
  • the air blowing part 50A blows air at an angle nearly perpendicular to the installation angle of the blade 42, the paste P adhering to the vicinity of the upper end of the blade 42 can be easily removed with a strong force.
  • the air blow unit 50A may control the amount of air to be delivered, the compression rate of air, or the like, or control the delivery pattern of delivering air (for example, the amount of air in time series or the magnitude of the compression rate of air). You may When air is sent by the air blower 50A, the air blower 50A may or may not contact the blade 42 during blade cleaning.
  • FIG. 11 is a schematic diagram showing a second example of the blade cleaning unit 50.
  • the blade cleaning unit 50 has a suction part 50B that sucks the target (for example, paste P) by sucking air from around the blade cleaning unit 50 .
  • the suction part 50B sucks upward the paste P adhering to the blade 42 and removes it.
  • the suction part 50B may be connected to a vacuum suction mechanism 56, similar to the blade holder 38.
  • the suction part 50B has a suction nozzle that sucks air from the blade 42 side.
  • the orientation of the suction nozzle may determine the orientation of air suction.
  • the suction unit 50B may control the direction in which air is sucked.
  • the direction in which the air is sucked may be along the installation angle (attack angle) of the blade 42 or may be at an angle close to perpendicular to the blade 42 (for example, perpendicular).
  • the suction part 50B can easily remove the paste P adhering to the lower end side of the blade 42 as well.
  • the suction part 50B can easily remove the paste P adhering to the vicinity of the upper end of the blade 42 with a strong force when the air is sucked at an angle nearly perpendicular to the installation angle of the blade 42 .
  • the sucked paste P is sucked by the suction section 50B and discharged to the outside of the suction section 50B, for example.
  • the suction unit 50B may control the suction force, or may control the suction pattern (for example, the size of the suction force in chronological order) when sucking.
  • the suction portion 50B may be in contact with or not in contact with the blade 42 during blade cleaning.
  • FIG. 12 is a schematic diagram showing a third example of the blade cleaning unit 50.
  • the blade cleaning unit 50 has a wiping part 50C that wipes off the paste P that is the object.
  • the wiping part 50C is, for example, a cleaning material, and may be cloth, paper, or sponge.
  • the suction portion 50B comes into contact with the blade 42 during blade cleaning. That is, the paste P may be wiped off by tracing the upper end of the blade 42 while the wiping portion 50C is pressed against the upper end side of the blade 42 .
  • the blade 42 used for mask cleaning is cleaned, so that when the lower surface 13c of the screen mask 13 contacts and slides with the blade 42, residual particles remain on the blade 42. It is possible to prevent the paste P from being transferred to the lower surface 13 c of the screen mask 13 . Therefore, the printing apparatus 1 can prevent the paste P from remaining on the lower surface 13c of the screen mask 13 or the pattern holes 13h after mask cleaning. Therefore, the printing apparatus 1 can improve the cleaning accuracy of the screen mask 13 and improve the printing accuracy of the paste P through the screen mask 13 .
  • the cleaning unit 10A is arranged in the standby area A2 and faces the blade cleaning unit 50. Therefore, the printing apparatus 1 can clean the blade during printing. Therefore, the printing apparatus 1 can clean the blade with less influence on printing efficiency and mask cleaning efficiency.
  • the blade cleaning unit 50 may be fixedly arranged in the waiting area A2 so as to face the cleaning unit 27 on standby in the Z direction.
  • the blade cleaning unit 50 may have a shape elongated in the X direction when viewed from above, for example, so as to cover the entire area above the blade 42 .
  • the printing apparatus 1 of the present embodiment uses the screen mask 13 (an example of the mask) formed with the predetermined pattern holes 13h (an example of the opening) to apply the paste P (an example of the solder paste) to the substrate 2. to print.
  • the printing apparatus 1 includes a substrate support table 4 (an example of a substrate holding unit) that holds the substrate 2 and aligns it with the pattern hole 13h, and a printing table that fills the pattern hole 13h with a paste P and prints the paste P on the substrate 2.
  • the printing apparatus 1 includes a cleaning unit 27 having a blade 42 for scraping off the paste P adhering to the bottom surface 13 c (an example of the back surface) of the screen mask 13 , and moving the cleaning unit 27 along the bottom surface 13 c of the screen mask 13 .
  • a cleaning unit moving mechanism 36 that scrapes off the paste P adhering to the lower surface 13 c of the screen mask 13 with the blade 42 .
  • the printing device 1 includes a blade cleaning unit 50 that cleans the blade 42 .
  • the printing apparatus 1 cleans the blade 42 used for mask cleaning, so that the paste P remaining on the blade 42 is removed from the screen mask 13 when the lower surface 13c of the screen mask 13 and the blade 42 contact and slide. can be suppressed from being transferred to the lower surface 13c of the . Therefore, the printing apparatus 1 can prevent the paste P from remaining on the lower surface 13c of the screen mask 13 or the pattern holes 13h after mask cleaning. Therefore, the printing apparatus 1 can improve the cleaning accuracy of the screen mask 13 and improve the printing accuracy of the paste P through the screen mask 13 .
  • the blade cleaning unit 50 may have an air blower 50A that removes the paste P adhering to the blade 42 by an air blow.
  • the printing apparatus 1 can clean the blade 42 by blowing off the paste P from the blade 42 , and can gather the portions where the paste P remains in the blade holder 38 other than the screen mask 13 .
  • the blade cleaning unit 50 may have a suction part 50B that sucks and removes the paste P adhering to the blade 42 .
  • the printing apparatus 1 can suck the paste P into the suction portion 50B, and can suppress an increase in the residual amount of the paste P in the blade holder 38 .
  • the blade cleaning unit 50 may have a wiping part 50C that wipes off the paste P adhering to the blade 42.
  • the printing apparatus 1 can wipe the paste P directly with the cleaning material of the blade cleaning unit 50 without performing electrical control within the blade cleaning unit 50 .
  • the blade cleaning unit 50 may be arranged at a position not overlapping the screen mask 13 when the printing apparatus 1 is viewed from above.
  • the cleaning unit moving mechanism 36 may move the cleaning unit 27 below the blade cleaning unit 50 .
  • the printing apparatus 1 can automatically clean the lower surface 13c of the mask by allowing the cleaning unit moving mechanism 36 to move. Further, the printing apparatus 1 can arrange the movable cleaning unit 27 so as to face the blade cleaning unit 50 . Therefore, when the blade cleaning unit 50 and the blade 42 face each other (for example, when the paste P is printed), the printing apparatus 1 reduces the influence on the printing efficiency and the mask cleaning efficiency so that the blade cleaning unit 50 moves the blade 42. Easy to clean.
  • the printing apparatus 1 may also include a blade cleaning unit moving mechanism 51 that moves the blade cleaning unit 50 along the longitudinal direction of the blade 42 (for example, the X direction).
  • the printing apparatus 1 can clean the entire blade 42 by moving the blade cleaning unit 50 between both ends of the blade 42 (for example, between both ends in the Y direction). can.
  • the present disclosure is useful for a printing apparatus, a printing method, and the like that can improve mask cleaning accuracy and paste printing accuracy through the mask.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Screen Printers (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)

Abstract

This printing device comprises: a substrate holding unit that holds a substrate and positions the same with respect to an opening of a mask; a printing head that fills the opening with a paste and prints a solder paste on the substrate; a cleaning unit provided with a blade for scraping off the solder paste adhered to the back surface of the mask; a cleaning unit movement mechanism that moves the cleaning unit along the back surface of the mask so as to perform an operation of scraping off the solder paste adhered to the back surface of the mask with the blade; and a blade cleaning unit that cleans the blade.

Description

印刷装置及び印刷方法Printing device and printing method
 本開示は、印刷装置及び印刷方法に関する。 The present disclosure relates to a printing device and a printing method.
 従来、スクリーンマスクの下面に付着したペーストを掻き取るスクリーン印刷機が知られている。このスクリーン印刷機は、パターン孔が形成されたスクリーンマスクの下面に基板を当接させ、スクリーンマスク上でスキージを摺動させることによりパターン孔を介して基板にペーストを印刷するスクリーン印刷機であって、スクリーンマスクの下面に付着したペーストを除去するクリーニング装置を備え、クリーニング装置は、スクリーンマスクの下面をクリーニング方向に摺動することによりスクリーンマスクの下面に付着したペーストを掻き取る複数の掻き取り部材と、複数の掻き取り部材を保持する保持体を備え、複数の掻き取り部材は、クリーニング方向に対して直列に並んで保持体に保持されている。 Conventionally, a screen printer is known that scrapes off the paste adhering to the bottom surface of the screen mask. This screen printer is a screen printer in which a substrate is brought into contact with the lower surface of a screen mask having patterned holes, and a squeegee is slid on the screen mask to print paste on the substrate through the patterned holes. and a cleaning device for removing the paste adhering to the lower surface of the screen mask, the cleaning device having a plurality of scrapers for scraping off the paste adhering to the lower surface of the screen mask by sliding the lower surface of the screen mask in the cleaning direction. A member and a holding body for holding a plurality of scraping members are provided, and the plurality of scraping members are held by the holding body while being aligned in series with respect to the cleaning direction.
日本国特開2015-075781号公報Japanese Patent Application Laid-Open No. 2015-075781
 特許文献1の印刷装置では、スクリーンマスクの下面に付着したペーストの掻き取り(マスククリーニング)を継続すると、掻き取り部材に掻き取ったペーストが堆積する。ペーストには、粘着質のフラックスが含まれるので、マスククリーニングを反復して実施すると、掻き取り部材上のペーストがマスクの下面に転写されることがある。この場合、基板へのペーストの印刷精度が低下し得る。したがって、マスククリーニングについては改善の余地がある。 In the printing apparatus of Patent Literature 1, if the paste adhering to the lower surface of the screen mask is continued to be scraped off (mask cleaning), the scraped paste accumulates on the scraping member. Since the paste contains sticky flux, repeated mask cleaning may transfer the paste on the scraping member to the lower surface of the mask. In this case, the printing precision of the paste onto the substrate may be degraded. Therefore, there is room for improvement in mask cleaning.
 本開示は、マスクのクリーニング精度を向上して、マスクを介したペーストの印刷精度を向上できる印刷装置及び印刷方法を提供する。 The present disclosure provides a printing apparatus and a printing method that can improve the cleaning accuracy of the mask and improve the printing accuracy of the paste through the mask.
 本開示の一態様は、所定の開口が形成されたマスクを用いて基板に半田ペーストを印刷する印刷装置であって、前記基板を保持して前記開口に位置合わせする基板保持部と、前記開口にペーストを充填して前記基板に前記半田ペーストを印刷する印刷ヘッドと、前記マスクの裏面に付着する前記半田ペーストを掻き取るブレードを備えたクリーニングユニットと、前記クリーニングユニットを前記マスクの裏面に沿って移動させることにより前記ブレードで前記マスクの裏面に付着した前記半田ペーストを掻き取る動作を行うクリーニングユニット移動機構と、前記ブレードをクリーニングするブレード清掃ユニットと、を備える印刷装置、である。 One aspect of the present disclosure is a printing apparatus that prints solder paste on a substrate using a mask having predetermined openings, comprising: a substrate holding unit that holds the substrate and aligns the substrate with the opening; a printing head that fills the space with paste and prints the solder paste on the substrate; a cleaning unit that includes a blade that scrapes off the solder paste adhering to the back surface of the mask; a cleaning unit moving mechanism that scrapes off the solder paste adhered to the back surface of the mask by moving the blade with the blade; and a blade cleaning unit that cleans the blade.
 本開示の一態様は、所定の開口が形成されたマスクを用いて基板に半田ペーストを印刷する印刷方法であって、前記基板を保持して前記開口に位置合わせするステップと、前記開口にペーストを充填して前記基板に前記半田ペーストを印刷するステップと、前記マスクの裏面に付着する前記半田ペーストを掻き取るブレードを備えたクリーニングユニットを、前記マスクの裏面に沿って移動させることにより、前記ブレードで前記マスクの裏面に付着した前記半田ペーストを掻き取る動作を行うステップと、前記ブレードをクリーニングするステップと、を有する印刷方法である。 One aspect of the present disclosure is a printing method for printing solder paste on a substrate using a mask having predetermined openings, comprising: holding the substrate and aligning it with the opening; and printing the solder paste on the substrate; and moving a cleaning unit equipped with a blade for scraping off the solder paste adhering to the back surface of the mask along the back surface of the mask. The printing method includes the steps of scraping off the solder paste adhering to the back surface of the mask with a blade, and cleaning the blade.
 本開示によれば、マスクのクリーニング精度を向上して、マスクを介したペーストの印刷精度を向上できる。 According to the present disclosure, it is possible to improve the cleaning accuracy of the mask and improve the printing accuracy of the paste through the mask.
本開示の実施形態における印刷装置の構成例を側方から見た図1 is a side view of a configuration example of a printing apparatus according to an embodiment of the present disclosure; FIG. 第1の実施形態における印刷装置の構成例を上方から見た図FIG. 2 is a top view of a configuration example of a printing apparatus according to the first embodiment; ブレード保持体周辺の構成例を示す斜視図Perspective view showing a configuration example around the blade holder 印刷装置の制御系の構成例を示すブロック図Block diagram showing a configuration example of a control system of a printing apparatus 印刷装置による印刷動作を説明するための図A diagram for explaining a printing operation by a printing device. 印刷装置による印刷動作を説明するための図A diagram for explaining a printing operation by a printing device. 印刷装置による印刷動作を説明するための図A diagram for explaining a printing operation by a printing device. 印刷装置による印刷動作(図5A~図5Cの続き)を説明するための図FIG. 5 is a diagram for explaining the printing operation by the printing device (a continuation of FIGS. 5A to 5C); 印刷装置による印刷動作(図5A~図5Cの続き)を説明するための図FIG. 5 is a diagram for explaining the printing operation by the printing device (a continuation of FIGS. 5A to 5C); 印刷動作に係るスクリーンマスクへのペーストの付着及びマスククリーニングを説明するための図FIG. 4 is a diagram for explaining adhesion of paste to a screen mask and mask cleaning related to a printing operation; 印刷動作に係るスクリーンマスクへのペーストの付着及びマスククリーニングを説明するための図FIG. 4 is a diagram for explaining adhesion of paste to a screen mask and mask cleaning related to a printing operation; マスククリーニング後のブレードにペーストが残留していることを示す図Diagram showing paste remaining on the blade after mask cleaning 印刷装置1による印刷動作(図6A及び図6Bの続き)を説明するための図6A and 6B are diagrams for explaining the printing operation by the printing apparatus 1 (a continuation of FIGS. 6A and 6B); FIG. ブレード清掃ユニットの第1例を示す模式図Schematic diagram showing a first example of a blade cleaning unit ブレード清掃ユニットの第2例を示す模式図Schematic diagram showing a second example of the blade cleaning unit ブレード清掃ユニットの第3例を示す模式図Schematic diagram showing a third example of the blade cleaning unit
 以下、適宜図面を参照しながら、本開示に係る印刷装置の構成および作用を具体的に開示した実施形態を詳細に説明する。但し、必要以上に詳細な説明は省略する場合がある。例えば、既によく知られた事項の詳細説明や実質的に同一の構成に対する重複説明を省略する場合がある。これは、以下の説明が不必要に冗長になるのを避け、当業者の理解を容易にするためである。なお、添付図面および以下の説明は、当業者が本開示を十分に理解するために提供されるのであって、これらにより特許請求の範囲に記載の主題を限定することは意図されていない。 Hereinafter, embodiments specifically disclosing the configuration and operation of the printing apparatus according to the present disclosure will be described in detail with reference to the drawings as appropriate. However, more detailed description than necessary may be omitted. For example, detailed descriptions of well-known matters and redundant descriptions of substantially the same configurations may be omitted. This is to avoid unnecessary verbosity in the following description and to facilitate understanding by those skilled in the art. It should be noted that the accompanying drawings and the following description are provided for a thorough understanding of the present disclosure by those skilled in the art and are not intended to limit the claimed subject matter.
(第1の実施形態)
<印刷装置の構成>
 図1は、本開示の実施形態における印刷装置1の構成例を側方から見た図である。図2は、印刷装置1の構成例を上方から見た図である。以下、基板2の搬送方向をX方向、X方向と水平面内において直交する方向をY方向、XY平面に対して垂直な方向をZ方向と定義する。また、Z方向の正側を「上」、Z方向の負側を「下」とも称する。
(First embodiment)
<Configuration of printing device>
FIG. 1 is a side view of a configuration example of a printing apparatus 1 according to an embodiment of the present disclosure. FIG. 2 is a top view of a configuration example of the printing apparatus 1. As shown in FIG. Hereinafter, the transport direction of the substrate 2 is defined as the X direction, the direction perpendicular to the X direction in the horizontal plane is defined as the Y direction, and the direction perpendicular to the XY plane is defined as the Z direction. In addition, the positive side in the Z direction is also called "up", and the negative side in the Z direction is called "down".
 印刷装置1は、基板2にクリーム半田又は導電性ペースト等のペーストPを印刷する機能を有する。印刷装置1は、例えばスクリーン印刷機でよい。 The printing device 1 has a function of printing a paste P such as cream solder or conductive paste on the substrate 2 . The printing device 1 may be, for example, a screen printer.
 印刷装置1は、基板支持テーブル4と、基板支持テーブル移動機構5と、を含む。基板支持テーブル4は、上流側から搬送されてきた基板2をクランプして固定し、支持する。基板支持テーブル移動機構5は、X方向及びY方向に基板支持テーブル4を移動させることが可能であり、Z方向に基板支持テーブル4を移動(昇降)させることが可能である。また、基板支持テーブル移動機構5は、XY平面に変更な回転方向θに、基板支持テーブル4を回転させることが可能である。よって、基板支持テーブル4は、X方向(bx方向)、Y方向(by方向)、及びZ方向(bz方向)に移動自在であり、回転方向θ(bθ方向)に回転自在である。基板支持テーブル4は、基板支持テーブル移動機構5の駆動により、基板支持テーブル4の位置及び向きつまり基板2の位置及び向きを調整して、スクリーンマスク13(具体的にはスクリーンマスク13のパターン孔13h)に対する基板2の位置を決定し、位置合わせする。 The printing apparatus 1 includes a substrate support table 4 and a substrate support table moving mechanism 5. The substrate support table 4 clamps, fixes and supports the substrate 2 transported from the upstream side. The substrate support table moving mechanism 5 can move the substrate support table 4 in the X and Y directions, and can move (lift) the substrate support table 4 in the Z direction. Further, the substrate support table moving mechanism 5 can rotate the substrate support table 4 in a rotation direction θ that is different from the XY plane. Therefore, the substrate support table 4 is movable in the X direction (bx direction), Y direction (by direction), and Z direction (bz direction), and is rotatable in the rotational direction θ (bθ direction). The substrate support table 4 is driven by the substrate support table moving mechanism 5 to adjust the position and orientation of the substrate support table 4, that is, the position and orientation of the substrate 2, and the screen mask 13 (specifically, the pattern holes of the screen mask 13). 13h) to determine the position of the substrate 2 and align it.
 基板2は、上流側から基板搬送機構(図示省略)によって搬入され、位置決めされる。そして、基板2への印刷が行われた後、基板2は、基板搬送機構によって下流側に搬出される。 The substrate 2 is carried in by a substrate transport mechanism (not shown) from the upstream side and positioned. After printing on the substrate 2, the substrate 2 is carried out downstream by the substrate transport mechanism.
 印刷装置1は、スクリーンマスク13、印刷ヘッド14、印刷ヘッド移動機構15、及びスキージ16を含む。マスク枠13aには可撓性を有するスクリーンマスク13が展張されている。また、スクリーンマスク13には、基板2における印刷対象となる電極等の形状又は位置等に対応して、複数のパターン孔13hが形成されている。スクリーンマスク13上には、ペースト供給機構(図示省略)によってペーストPが供給される。ペーストPには、粘着性を有するフラックスが含まれる。スクリーンマスク13上には、印刷ヘッド14が配設されている。 The printing device 1 includes a screen mask 13, a print head 14, a print head moving mechanism 15, and a squeegee 16. A flexible screen mask 13 is spread over the mask frame 13a. Further, the screen mask 13 is formed with a plurality of pattern holes 13h corresponding to the shape, position, etc. of the electrodes to be printed on the substrate 2, and the like. A paste P is supplied onto the screen mask 13 by a paste supply mechanism (not shown). The paste P contains an adhesive flux. A print head 14 is arranged on the screen mask 13 .
 印刷ヘッド14は、スキージ16を昇降させるスキージ昇降機構を有する。スキージ16は、Y方向に沿って2つのスキージ16が一対で設けられる。スキージ16は、X方向を長手方向として細長形状に形成される。スキージ16は、スキージ昇降機構の駆動によってz方向に昇降する。つまり一方のスキージ16は、a1方向に昇降し、他方のスキージ16は、a2方向に昇降する。スキージ16が降下することで、スキージ16は、スクリーンマスク13の上面に当接する。スキージ16は、スクリーンマスク13に当接してスクリーンマスク13の上面を摺動することで、スクリーンマスク13のパターン孔13hを介してペーストを基板2に印刷する。また、スキージ16が上昇することで、スクリーンマスク13の上面へのスキージ16の当接が解除される。 The print head 14 has a squeegee elevating mechanism for elevating the squeegee 16 . Two squeegees 16 are provided as a pair along the Y direction. The squeegee 16 is formed in an elongated shape with the X direction as its longitudinal direction. The squeegee 16 is moved up and down in the z direction by driving the squeegee lifting mechanism. That is, one squeegee 16 moves up and down in the a1 direction, and the other squeegee 16 moves up and down in the a2 direction. As the squeegee 16 descends, the squeegee 16 comes into contact with the upper surface of the screen mask 13 . The squeegee 16 contacts the screen mask 13 and slides on the upper surface of the screen mask 13 to print the paste onto the substrate 2 through the pattern holes 13 h of the screen mask 13 . Further, the contact of the squeegee 16 with the upper surface of the screen mask 13 is released by raising the squeegee 16 .
 印刷ヘッド移動機構15は、印刷ヘッド14をY方向に沿って移動させる。印刷ヘッド14は、印刷ヘッド移動機構15の駆動により、Y方向(ay方向)に移動自在である。よって、印刷ヘッド14に取りつけられたスキージ16は、Y方向に移動してスクリーンマスク13のパターン孔13hを介してペーストPを基板2に印刷する。 The print head moving mechanism 15 moves the print head 14 along the Y direction. The print head 14 is movable in the Y direction (ay direction) by driving the print head moving mechanism 15 . Therefore, the squeegee 16 attached to the print head 14 moves in the Y direction and prints the paste P onto the substrate 2 through the pattern holes 13 h of the screen mask 13 .
 印刷装置1は、カメラユニット26を含む。スクリーンマスク13の下方(裏側)に、カメラユニット26が配設されている。 The printing device 1 includes a camera unit 26. A camera unit 26 is arranged below (on the back side of) the screen mask 13 .
 図2に示すように、カメラユニット26は、カメラユニット移動ベース28に装着されてX方向に移動可能な構成となっている。カメラユニット移動ベース28は、カメラユニット26をX方向に沿って移動させる機構を有する。カメラユニット移動ベース28は、X方向に沿って延びている。 As shown in FIG. 2, the camera unit 26 is configured to be mounted on a camera unit movement base 28 and movable in the X direction. The camera unit movement base 28 has a mechanism for moving the camera unit 26 along the X direction. The camera unit movement base 28 extends along the X direction.
 また、図2に示すように、ガイドレール29がY方向に沿って配設されており、ガイドレール29にスライド自在に嵌合したスライダ30は、カメラユニット移動ベース28にブラケットを介して連結されている。これにより、カメラユニット移動ベース28は、Y方向にスライド自在(移動自在)となっている。カメラユニット移動ベース28は、カメラユニット移動ベース移動機構33によってY方向に水平移動する。カメラユニット移動ベース移動機構33は、例えば、ナット、送りねじ、及び送りねじを回転駆動する移動用モータを備える。このように、カメラユニット移動ベース28及びカメラユニット移動ベース移動機構33は、カメラユニット26をX方向及びY方向に水平移動させるカメラユニット移動機構34を構成する。よって、カメラユニット26は、X方向(cx方向)及びY方向(cy方向)に移動自在になっている。 As shown in FIG. 2, a guide rail 29 is arranged along the Y direction, and a slider 30 slidably fitted to the guide rail 29 is connected to the camera unit moving base 28 via a bracket. ing. As a result, the camera unit moving base 28 is slidable (movable) in the Y direction. The camera unit movement base 28 is horizontally moved in the Y direction by a camera unit movement base movement mechanism 33 . The camera unit movement base movement mechanism 33 includes, for example, a nut, a feed screw, and a movement motor that rotationally drives the feed screw. Thus, the camera unit movement base 28 and the camera unit movement base movement mechanism 33 constitute a camera unit movement mechanism 34 that horizontally moves the camera unit 26 in the X and Y directions. Therefore, the camera unit 26 is movable in the X direction (cx direction) and the Y direction (cy direction).
 カメラユニット26は、カメラ26cと、プリズム26pと、を有する。カメラ26cは、例えば、基板2を上方から撮像する基板認識カメラとしての機能と、スクリーンマスク13を下面側から撮像するマスク認識カメラとしての機能と、を有する。カメラ26cは、単体でこの2つの機能を有してもよいし、この2つのカメラを有してもよい。プリズム26pは、光を分散、屈折、又は反射させることで、スクリーンマスク13の下面13c及び基板2の上面を撮像可能としている。カメラユニット26は、X方向及びY方向に沿って水平移動して、基板2とスクリーンマスク13とを同時に撮像することで、基板2の認識とスクリーンマスク13の認識とを同時に行うことを可能にする。 The camera unit 26 has a camera 26c and a prism 26p. The camera 26c has, for example, a function as a board recognition camera that captures an image of the board 2 from above and a function as a mask recognition camera that captures an image of the screen mask 13 from the bottom side. The camera 26c may have these two functions by itself, or may have these two cameras. The prism 26p can image the lower surface 13c of the screen mask 13 and the upper surface of the substrate 2 by dispersing, refracting, or reflecting light. The camera unit 26 moves horizontally along the X direction and the Y direction, and images the substrate 2 and the screen mask 13 at the same time, thereby making it possible to recognize the substrate 2 and the screen mask 13 at the same time. do.
 印刷装置1は、クリーニングユニット27を含む。スクリーンマスク13の下方(裏側)に、クリーニングユニット27が配設されている。なお、カメラユニット26及びクリーニングユニット27が使用されていない期間の待機位置は、例えばX方向に沿ってスクリーンマスク13を挟んで両側であるが、これに限られない。 The printing device 1 includes a cleaning unit 27. A cleaning unit 27 is arranged below (on the back side of) the screen mask 13 . Note that the standby positions of the camera unit 26 and the cleaning unit 27 when not in use are, for example, both sides of the screen mask 13 along the X direction, but are not limited to this.
 クリーニングユニット27は、スクリーンマスク13の下面13cをクリーニング(マスククリーニング)する。クリーニングユニット27は、スクリーンマスク13の下面13cに付着したペーストP、又は基板2に転写されずにパターン孔13hに残留したペーストP等を除去して、クリーニングする機能を有する。クリーニングユニット27は、ブレード42と、ブレード保持体38と、クリーニングユニット移動ベース35と、を含む。ブレード42は、スクリーンマスク13の下面13cに当接してペーストPを掻き取る。ブレード保持体38は、ブレード42を保持する。クリーニングユニット移動ベース35は、ブレード保持体38を保持する。ブレード保持体38は、昇降機構(不図示)の駆動によってZ方向に昇降してもよいし、しなくてもよい。クリーニングユニット移動ベース35は、X方向に沿って延びている。 The cleaning unit 27 cleans the lower surface 13c of the screen mask 13 (mask cleaning). The cleaning unit 27 has a function of cleaning by removing the paste P adhering to the lower surface 13c of the screen mask 13 or the paste P remaining in the pattern holes 13h without being transferred to the substrate 2, or the like. The cleaning unit 27 includes a blade 42 , a blade holder 38 and a cleaning unit moving base 35 . The blade 42 contacts the lower surface 13c of the screen mask 13 and scrapes off the paste P. As shown in FIG. Blade holder 38 holds blade 42 . The cleaning unit moving base 35 holds a blade holder 38 . The blade holder 38 may or may not be moved up and down in the Z direction by driving an elevating mechanism (not shown). The cleaning unit moving base 35 extends along the X direction.
 図2に示すように、ガイドレール29がY方向に沿って配設されており、ガイドレール29にスライド自在に嵌合したスライダ31は、クリーニングユニット移動ベース35にブラケットを介して連結されている。これにより、クリーニングユニット移動ベース35は、Y方向にスライド自在(移動自在)となっている。クリーニングユニット移動ベース35は、クリーニングユニット移動機構36によってY方向に水平移動する。クリーニングユニット移動機構36は、例えば、ナット、送りねじ、及び送りねじを回転駆動する移動用モータを備える。このように、クリーニングユニット移動機構36は、クリーニングユニット27をY方向に水平移動させる。よって、クリーニングユニット27は、Y方向(dy方向)に移動自在になっている。 As shown in FIG. 2, a guide rail 29 is arranged along the Y direction, and a slider 31 slidably fitted to the guide rail 29 is connected to a cleaning unit moving base 35 via a bracket. . As a result, the cleaning unit moving base 35 is slidable (movable) in the Y direction. The cleaning unit moving base 35 is horizontally moved in the Y direction by the cleaning unit moving mechanism 36 . The cleaning unit moving mechanism 36 includes, for example, a nut, a feed screw, and a moving motor that rotationally drives the feed screw. Thus, the cleaning unit moving mechanism 36 horizontally moves the cleaning unit 27 in the Y direction. Therefore, the cleaning unit 27 is movable in the Y direction (dy direction).
 クリーニングユニット27は、スクリーンマスク13を用いたペーストPの印刷が実施されていない期間に、マスククリーニングする。クリーニングユニット27は、マスククリーニングを実施する期間には、クリーニングユニット移動機構36の駆動により、スクリーンマスク13の下方エリアA1に配置される。一方、クリーニングユニット27は、マスククリーニングを実施しない期間には、スクリーンマスク13の下方エリアA1に隣接する待機エリアA2に配置されて、待機する。待機エリアA2は、印刷装置1を上方から平面視した場合に、スクリーンマスク13と重ならない位置にある。 The cleaning unit 27 performs mask cleaning while the paste P is not being printed using the screen mask 13 . The cleaning unit 27 is arranged in the area A1 below the screen mask 13 by being driven by the cleaning unit moving mechanism 36 during mask cleaning. On the other hand, the cleaning unit 27 is arranged in a waiting area A2 adjacent to the lower area A1 of the screen mask 13 and stands by during a period in which mask cleaning is not performed. The standby area A2 is positioned so as not to overlap the screen mask 13 when the printer 1 is viewed from above.
 印刷装置1は、ブレード清掃ユニット50と、ブレード清掃ユニット移動機構51と、を含む。ブレード清掃ユニット50は、クリーニングユニット27が備えるブレード42を清掃する。ブレード清掃ユニット移動機構51は、X方向に沿って延びており、ブレード清掃ユニット50をX方向に沿って移動させる機構を有する。よって、ブレード清掃ユニット50は、X方向(ex方向)に沿って移動自在になっている。ブレード清掃ユニット50は、ブレード42を清掃する期間には、例えばX方向に沿ってブレード42の一端から他端まで移動しながら、ブレード42を清掃する。ブレード清掃ユニット50は、ブレード42を清掃しない期間には、例えばX方向の正側端部に配置されて、待機する。ブレード42を清掃する期間は、マスククリーニングを実施する期間ではなく、クリーニングユニット27がY方向端部の待機エリアA2に配置されている期間に含まれる。 The printing device 1 includes a blade cleaning unit 50 and a blade cleaning unit moving mechanism 51. The blade cleaning unit 50 cleans the blades 42 of the cleaning unit 27 . The blade cleaning unit moving mechanism 51 extends along the X direction and has a mechanism for moving the blade cleaning unit 50 along the X direction. Therefore, the blade cleaning unit 50 is movable along the X direction (ex direction). The blade cleaning unit 50 cleans the blade 42 while moving from one end of the blade 42 to the other end along the X direction, for example, during the period of cleaning the blade 42 . The blade cleaning unit 50 is placed, for example, at the positive end in the X direction and stands by while the blade 42 is not being cleaned. The period during which the blade 42 is cleaned is included in the period during which the cleaning unit 27 is arranged in the standby area A2 at the end in the Y direction, not during the mask cleaning period.
 図3は、ブレード保持体38周辺の構成例を示す斜視図である。 FIG. 3 is a perspective view showing a configuration example around the blade holder 38. FIG.
 クリーニングユニット27は、スクリーンマスク13の下面13cに付着するペーストPを掻き取り、掻き取ったペーストPを吸引して除去する。クリーニングユニット27のブレード保持体38は、枠体38aと、マスク受け部38bと、を有する。枠体38a及びマスク受け部38bは、ブレード保持体38の外縁(側部及び底部)を形成する。ブレード保持体38は、枠体38a及びマスク受け部38bにより形成された空間の内部に、開口又はX方向に延びる切込み部を有する。マスク受け部38bは、ブレード保持体38の両端部に配置される。ブレード保持体38は、開口又は切込み部を介して、平板上の複数のブレード42を収容可能である。マスク受け部38bの上面は、マスク当接面38mとなっており、マスククリーニング時にスクリーンマスク13に当接する。これにより、ブレード保持体38の内部は、マスククリーニング時には密閉空間となる。ブレード42のスクリーンマスク13側の端部(上端)は、マスク当接面38mよりも上方に位置する。 The cleaning unit 27 scrapes off the paste P adhering to the lower surface 13c of the screen mask 13 and sucks and removes the scraped off paste P. The blade holder 38 of the cleaning unit 27 has a frame 38a and a mask receiving portion 38b. The frame 38a and the mask receiving portion 38b form the outer edges (sides and bottom) of the blade holder 38. As shown in FIG. The blade holder 38 has an opening or a notch extending in the X direction inside the space formed by the frame 38a and the mask receiving portion 38b. The mask receiving portions 38b are arranged at both ends of the blade holder 38. As shown in FIG. The blade holder 38 can accommodate a plurality of flat blades 42 through openings or notches. The upper surface of the mask receiving portion 38b is a mask contact surface 38m, which contacts the screen mask 13 during mask cleaning. As a result, the inside of the blade holder 38 becomes a closed space during mask cleaning. The end (upper end) of the blade 42 on the side of the screen mask 13 is located above the mask contact surface 38m.
 ブレード42は、SUS等の金属で成形された薄い「へら状」の可撓性を有する部材である。ブレード42は、ウレタンゴム等の弾性体で成形されたものでもよい。ブレード42は、X方向に長い略矩形状の断面を有する。ブレード42は、Y方向に沿って所定間隔で複数配列される。マスククリーニング時には、ブレード42の上端がスクリーンマスク13の下面13cに当接し、Y方向に沿って摺動する。これにより、ブレード42は、スクリーンマスク13の下面13cに付着するペーストPを掻き取りできる。ブレード42がスクリーンマスク13の下面13cに当接する際には、ブレード42が撓んでよい。なお、ブレード42は、交換自在であり、ブレード保持体38に対して固定及び固定解除でき、取り外し自在であってよい。 The blade 42 is a thin "spatula-shaped" flexible member made of metal such as SUS. The blade 42 may be made of an elastic material such as urethane rubber. The blade 42 has a substantially rectangular cross section elongated in the X direction. A plurality of blades 42 are arranged at predetermined intervals along the Y direction. During mask cleaning, the upper end of the blade 42 contacts the lower surface 13c of the screen mask 13 and slides along the Y direction. Thereby, the blade 42 can scrape off the paste P adhering to the lower surface 13 c of the screen mask 13 . When the blade 42 contacts the lower surface 13c of the screen mask 13, the blade 42 may be bent. The blade 42 may be replaceable, fixed and unfixable with respect to the blade holder 38, and removable.
 スクリーンマスク13の下面13cにブレード42が当接した状態では、スクリーンマスク13の水平な下面13cに対するブレード42のアタック角は、90°より小さい角、即ち鋭角でよい。ブレード42のアタック角は、クリーニング方向(ここではY方向)に対してスクリーンマスク13の下面13cとブレード42とのなす角度である。そして、ブレード42は、この角度状態でクリーニング方向に摺動することで、スクリーンマスク13の下面13cに付着するペーストPを掻き取る。 When the blade 42 is in contact with the lower surface 13c of the screen mask 13, the attack angle of the blade 42 with respect to the horizontal lower surface 13c of the screen mask 13 may be an angle smaller than 90°, that is, an acute angle. The attack angle of the blade 42 is the angle formed by the lower surface 13c of the screen mask 13 and the blade 42 with respect to the cleaning direction (here, the Y direction). Then, the blade 42 slides in the cleaning direction in this angular state to scrape off the paste P adhering to the lower surface 13c of the screen mask 13 .
 ブレード保持体38内では、ブレード42によって掻き取られたペーストPが下方に導かれ、フィルタ(不図示)により、ペーストPに含まれる半田粒子などの固形成分が捕捉される。ブレード保持体38の枠体38aは、Z方向負側の下面の一部に開口部を有し、開口部から管路を介して真空吸引機構56(図4参照)と連通する。真空吸引機構56が駆動することで、管路内が真空吸引され、ブレード42により掻き取られた後にフィルタを通過したペーストPの成分が、管路を介して吸引される。 Inside the blade holder 38, the paste P scraped off by the blade 42 is guided downward, and solid components such as solder particles contained in the paste P are captured by a filter (not shown). The frame 38a of the blade holder 38 has an opening in a part of the lower surface on the negative side in the Z direction, and communicates with the vacuum suction mechanism 56 (see FIG. 4) from the opening through a conduit. By driving the vacuum suction mechanism 56, the inside of the pipeline is vacuum-sucked, and the components of the paste P that have passed through the filter after being scraped off by the blade 42 are sucked through the pipeline.
 ブレード清掃ユニット50は、ブレード清掃期間に、X方向に沿って移動しながらブレード42を清掃する。ブレード清掃期間には、ブレード清掃ユニット50の下面がブレード42の上端側と当接してよい。ブレード清掃ユニット50は、例えば、ブレード42に付着したペーストPを拭き取り、下方に吹き飛ばし、又は上方に吸引してよい。 The blade cleaning unit 50 cleans the blade 42 while moving along the X direction during the blade cleaning period. During the blade cleaning period, the lower surface of the blade cleaning unit 50 may contact the upper end side of the blade 42 . The blade cleaning unit 50 may, for example, wipe off the paste P adhering to the blade 42, blow it downward, or suck it upward.
 次に、印刷装置1の制御系の構成について説明する。
 図4は、印刷装置1の制御系の構成例を示すブロック図である。
Next, the configuration of the control system of the printing apparatus 1 will be described.
FIG. 4 is a block diagram showing a configuration example of the control system of the printing apparatus 1. As shown in FIG.
 印刷装置1が備える制御部52は、記憶部53、機構駆動部54、認識処理部55を含んで構成される。また、制御部52は、基板支持テーブル移動機構5、印刷ヘッド14、印刷ヘッド移動機構15、カメラユニット26、カメラユニット移動ベース28、カメラユニット移動ベース移動機構33、クリーニングユニット移動機構36、ブレード清掃ユニット50、ブレード清掃ユニット移動機構51、及び真空吸引機構56等と接続される。 The control unit 52 included in the printing apparatus 1 includes a storage unit 53, a mechanism driving unit 54, and a recognition processing unit 55. The control unit 52 also controls the substrate support table moving mechanism 5, the print head 14, the print head moving mechanism 15, the camera unit 26, the camera unit moving base 28, the camera unit moving base moving mechanism 33, the cleaning unit moving mechanism 36, the blade cleaning mechanism. It is connected to the unit 50, the blade cleaning unit moving mechanism 51, the vacuum suction mechanism 56, and the like.
 記憶部53は、基板2にペーストPをスクリーン印刷するために必要な印刷作業データ、スクリーンマスク13の下面13cをクリーニングするために必要なクリーニング作業データ、ブレード42を清掃するために必要なブレード清掃作業データ、等を記憶する。 The storage unit 53 stores printing work data necessary for screen-printing the paste P on the substrate 2, cleaning work data necessary for cleaning the lower surface 13c of the screen mask 13, and blade cleaning data necessary for cleaning the blade 42. Store work data, etc.
 機構駆動部54は、基板支持テーブル移動機構5、印刷ヘッド14、印刷ヘッド移動機構15、カメラユニット26、カメラユニット移動ベース28、及びカメラユニット移動ベース移動機構33等を駆動する。これにより、印刷装置1は、スクリーン印刷の印刷動作を実行する。また、機構駆動部54は、クリーニングユニット移動機構36及び真空吸引機構56等を駆動する。これにより、印刷装置1は、マスククリーニングを実行する。また、機構駆動部54は、ブレード清掃ユニット50、ブレード清掃ユニット移動機構51、及び真空吸引機構56等を駆動する。これにより、印刷装置1は、マスククリーニング用のブレード42の清掃(ブレード清掃)を実行する。 The mechanism driving section 54 drives the substrate support table moving mechanism 5, the print head 14, the print head moving mechanism 15, the camera unit 26, the camera unit moving base 28, the camera unit moving base moving mechanism 33, and the like. As a result, the printing device 1 executes the printing operation of screen printing. Further, the mechanism driving section 54 drives the cleaning unit moving mechanism 36, the vacuum suction mechanism 56, and the like. As a result, the printing apparatus 1 executes mask cleaning. Further, the mechanism driving section 54 drives the blade cleaning unit 50, the blade cleaning unit moving mechanism 51, the vacuum suction mechanism 56, and the like. As a result, the printing apparatus 1 cleans the blade 42 for mask cleaning (blade cleaning).
 認識処理部55は、カメラ26cによって撮像された画像に対して認識処理する。画像には、基板2又はスクリーンマスク13等が映り込んでいる。認識処理部55は、認識処理することで、基板2とスクリーンマスク13との位置を検出可能である。この位置の検出結果は、例えば、スクリーンマスク13と基板2との位置合わせに用いられてよい。また、認識処理部55は、画像の認識処理により、スクリーンマスク13の下面13cの状態(例えばどの程度ペーストPが残存しているか、マスククリーニングが適正に行われてたか)を認識してもよい。 The recognition processing unit 55 performs recognition processing on the image captured by the camera 26c. The image includes the substrate 2, the screen mask 13, or the like. The recognition processing unit 55 can detect the positions of the substrate 2 and the screen mask 13 by performing recognition processing. This position detection result may be used, for example, for alignment between the screen mask 13 and the substrate 2 . Further, the recognition processing unit 55 may recognize the state of the lower surface 13c of the screen mask 13 (for example, how much paste P remains, whether mask cleaning has been properly performed) by image recognition processing. .
<印刷装置の動作>
 次に、印刷装置1による動作について説明する。
<Operation of printing device>
Next, the operation of the printer 1 will be described.
 図5A、図5B及び図5Cは、印刷装置1による印刷動作を説明するための図である。図5A、図5B及び図5Cでは、基板認識、基板2とスクリーンマスク13との位置合わせ、並びに、印刷ヘッド14の移動及びペーストPの充填が行われる。 5A, 5B, and 5C are diagrams for explaining the printing operation of the printing apparatus 1. FIG. 5A, 5B and 5C, substrate recognition, alignment of substrate 2 and screen mask 13, movement of print head 14 and filling of paste P are performed.
 ここでは、基板2は、例えば、複数の電極を含むパターンを備え、板状に形成されているとする。スクリーンマスク13には、基板2の上面に複数の電極が配置される間隔に対応する所定の間隔で、パターン孔13hが設けられているとする。 Here, it is assumed that the substrate 2 has a pattern including a plurality of electrodes and is formed in a plate shape. It is assumed that the screen mask 13 is provided with pattern holes 13h at predetermined intervals corresponding to the intervals at which a plurality of electrodes are arranged on the upper surface of the substrate 2 .
 印刷装置1は、基板搬送装置により搬送されてきた基板2を基板支持テーブル4が保持する。カメラユニット26は、カメラユニット移動機構34の駆動によってX方向及びY方向に移動し、基板2を撮像する。制御部52は、撮像された基板2の状態等を認識する(図5A)。 In the printing apparatus 1, the substrate support table 4 holds the substrate 2 transported by the substrate transport device. The camera unit 26 is driven by the camera unit moving mechanism 34 to move in the X direction and the Y direction and pick up an image of the substrate 2 . The control unit 52 recognizes the imaged state of the substrate 2 (FIG. 5A).
 基板支持テーブル4は、基板支持テーブル移動機構5の駆動により、必要に応じてXY平面において移動し回転方向θに回転して、基板2の電極とスクリーンマスク13のパターン孔13hとが対向するように、基板2とスクリーンマスク13とを位置合わせする(図5B)。基板支持テーブル4は、基板支持テーブル移動機構5の駆動により、Z方向に移動し、基板2をスクリーンマスク13の下面13cに接触させる。これにより、基板2上にスクリーンマスク13が位置合わせして重ねられる。 The substrate support table 4 is driven by the substrate support table moving mechanism 5 to move in the XY plane and rotate in the rotation direction θ as needed so that the electrodes of the substrate 2 and the pattern holes 13h of the screen mask 13 face each other. Then, the substrate 2 and the screen mask 13 are aligned (FIG. 5B). The substrate support table 4 is driven by the substrate support table moving mechanism 5 to move in the Z direction to bring the substrate 2 into contact with the lower surface 13 c of the screen mask 13 . Thereby, the screen mask 13 is aligned and superimposed on the substrate 2 .
 印刷ヘッド14は、スキージ16をZ方向下方に移動(降下)させ、スキージ16をスクリーンマスク13上に着地させ、一対のスキージ16のそれぞれの下端縁をスクリーンマスク13の上面に当接させる。 The print head 14 moves (lowers) the squeegee 16 downward in the Z direction, lands the squeegee 16 on the screen mask 13 , and brings the lower edges of the pair of squeegees 16 into contact with the upper surface of the screen mask 13 .
 印刷ヘッド移動機構15は、印刷ヘッド14を印刷方向Aに移動させ、一対のスキージ16をスクリーンマスク13上で摺動させる(図5C)。この間、スクリーンマスク13の上面に供給されたペーストPを、基板2の各電極上の各パターン孔13hに充填する(図5C)。なお、印刷方向Aは、一方向(Y方向の正方向又は負方向)であってもよいし、両方向(Y方向の正方向及び負方向)であってもよい。つまり、片道印刷でも往復印刷でもよい。 The print head moving mechanism 15 moves the print head 14 in the printing direction A, and slides the pair of squeegees 16 on the screen mask 13 (Fig. 5C). During this time, each pattern hole 13h on each electrode of the substrate 2 is filled with the paste P supplied to the upper surface of the screen mask 13 (FIG. 5C). The printing direction A may be in one direction (positive direction or negative direction in the Y direction) or in both directions (positive direction and negative direction in the Y direction). That is, one-way printing or two-way printing may be used.
 図6A及び図6Bは、印刷装置1による印刷動作(図5A~図5Cの続き)を説明するための図である。図6A及び図6Bでは、版離れ及びペーストPの転写、並びに、マスククリーニング及び基板2の搬出が行われる。 6A and 6B are diagrams for explaining the printing operation by the printing device 1 (continuation of FIGS. 5A to 5C). In FIGS. 6A and 6B, plate separation and transfer of paste P, as well as mask cleaning and unloading of substrate 2 are performed.
 印刷装置1による印刷の全体が完了し、スクリーンマスク13における全てのパターン孔13hにペーストPを充填完了すると、印刷ヘッド移動機構15は、印刷ヘッド14の移動を停止させる。印刷ヘッド14は、スキージ16を上昇させて、一対のスキージ16の下端縁をスクリーンマスク13の上面から離間させる。そして、基板支持テーブル移動機構5が基板支持テーブル4を下降させ、基板2をスクリーンマスク13から離間(版離れ)させる(図6A)。これにより、基板2の各電極2a上にペーストPが残り、基板2にペーストPが印刷(転写)された状態となる(図6A)。 When the entire printing by the printing device 1 is completed and all the pattern holes 13h in the screen mask 13 are filled with the paste P, the print head moving mechanism 15 stops the movement of the print head 14. The print head 14 raises the squeegees 16 to separate the lower edges of the pair of squeegees 16 from the upper surface of the screen mask 13 . Then, the substrate support table moving mechanism 5 lowers the substrate support table 4 to separate the substrate 2 from the screen mask 13 (plate separation) (FIG. 6A). As a result, the paste P remains on each electrode 2a of the substrate 2, and the paste P is printed (transferred) onto the substrate 2 (FIG. 6A).
 基板2へペーストPの印刷が完了すると、図示しない基板搬送装置は、基板支持テーブル4から基板2を取り外し、印刷装置1の外部に搬送(搬出)する(図6B)。クリーニングユニット27は、基板2への印刷終了後に、待機エリアA2から出発し、スクリーンマスク13の下方エリアA1に進入する。クリーニングユニット27は、ブレード42の上端をスクリーンマスク13の下面13cに当接させた状態でY方向に移動することで、マスククリーニングする(図6B)。 When the printing of the paste P onto the substrate 2 is completed, a substrate transport device (not shown) removes the substrate 2 from the substrate support table 4 and transports (carries out) it outside the printing device 1 (FIG. 6B). After completing printing on the substrate 2 , the cleaning unit 27 departs from the standby area A<b>2 and enters the area A<b>1 below the screen mask 13 . The cleaning unit 27 performs mask cleaning by moving in the Y direction while the upper end of the blade 42 is in contact with the lower surface 13c of the screen mask 13 (FIG. 6B).
 マスククリーニングでは、クリーニングユニット27は、Y方向における往復移動のうち、Y方向の一方向のみにおいてブレード42の上端をスクリーンマスク13の下面13cに当接させ、この状態で一方向に移動することで、マスククリーニングしてもよい。また、クリーニングユニット27は、Y方向における往復移動のうち、Y方向の両方向においてブレード42の上端をスクリーンマスク13の下面13cに当接させ、この状態で両方向に移動することで、マスククリーニングしてもよい。図6Bでは、一方向のみ(復路のみ)でマスククリーニングすることを例示している。 In the mask cleaning, the cleaning unit 27 contacts the lower surface 13c of the screen mask 13 with the upper end of the blade 42 only in one Y direction of the reciprocating movement in the Y direction, and moves in one direction in this state. , may be mask cleaning. Further, the cleaning unit 27 moves in both directions in the Y direction, with the upper end of the blade 42 in contact with the lower surface 13c of the screen mask 13 in both directions of the Y direction, and moves in both directions in this state to clean the mask. good too. FIG. 6B illustrates mask cleaning in only one direction (return pass only).
 図7A及び図7Bは、印刷動作に係るスクリーンマスク13へのペーストPの付着及びマスククリーニングを説明するための図である。図7A及び図7Bでは、クリーニングユニット27のマスククリーニング時の動作をより詳細に示している。図7A及び図7Bでは、クリーニングユニット27のY方向の正方向に移動時に、ブレード42がスクリーンマスク13の下面13cに当接してマスククリーニングすることを例示する。 7A and 7B are diagrams for explaining the adhesion of the paste P to the screen mask 13 and mask cleaning related to the printing operation. 7A and 7B show in more detail the operation of the cleaning unit 27 during mask cleaning. FIGS. 7A and 7B illustrate that when the cleaning unit 27 moves in the positive Y direction, the blade 42 comes into contact with the lower surface 13c of the screen mask 13 to perform mask cleaning.
 図7Aでは、ペーストPが、スクリーンマスク13のパターン孔13h内や下面13cに残存している。マスククリーニング時には、クリーニングユニット27がマスククリーニングの開始位置に配置されると、ブレード保持体38は、制御部52の制御により上昇し、各ブレード42をスクリーンマスク13の下面13cに当接させる。なお、ブレード保持体38の上昇時に、制御部52は、真空吸引機構56を駆動させて管路を介してブレード保持体38の内部に形成される密閉空間を減圧し、真空吸引状態とする。これにより、スクリーンマスク13の下面13cは吸引された状態となる。 In FIG. 7A, the paste P remains in the pattern holes 13h of the screen mask 13 and on the bottom surface 13c. During mask cleaning, when the cleaning unit 27 is placed at the start position of mask cleaning, the blade holder 38 is lifted under the control of the controller 52 to bring the blades 42 into contact with the lower surface 13 c of the screen mask 13 . When the blade holder 38 is lifted, the control unit 52 drives the vacuum suction mechanism 56 to reduce the pressure in the closed space formed inside the blade holder 38 through the pipe, thereby creating a vacuum suction state. As a result, the lower surface 13c of the screen mask 13 is in a state of being sucked.
 スクリーンマスク13の下面13cを吸引した状態で、ブレード保持体38は、クリーニング方向(例えばY方向の正方向)に移動することにより、スクリーンマスク13の下面13cやパターン孔13hに付着するペーストPを除去するマスククリーニング動作を実行する(図7A及び図7B)。すなわち、ブレード保持体38が移動する過程で、ブレード42がスクリーンマスク13の下面13cに付着するペーストPを掻き取り、掻き取ったペーストPが吸引される。図7Bでは、マスククリーニングを行うクリーニングユニット27が通過した後には、スクリーンマスク13のパターン孔13h内や下面13cに残存していたペーストPが除去されている。 With the lower surface 13c of the screen mask 13 sucked, the blade holder 38 moves in the cleaning direction (for example, the positive direction in the Y direction) to remove the paste P adhering to the lower surface 13c of the screen mask 13 and the pattern holes 13h. Perform a removing mask cleaning operation (FIGS. 7A and 7B). That is, while the blade holder 38 is moving, the blade 42 scrapes the paste P adhering to the lower surface 13c of the screen mask 13, and the scraped paste P is sucked. In FIG. 7B, the paste P remaining in the pattern holes 13h of the screen mask 13 and on the lower surface 13c is removed after the cleaning unit 27 that performs mask cleaning has passed.
 クリーニングユニット27は、スクリーンマスク13の下方エリアA1を通過して待機エリアA2まで移動すると、制御部52は、真空吸引機構56の駆動を停止させる。また、クリーニングユニット27は、待機エリアA2において所定の位置まで下降する。 When the cleaning unit 27 passes through the lower area A1 of the screen mask 13 and moves to the waiting area A2, the control section 52 stops driving the vacuum suction mechanism 56 . Also, the cleaning unit 27 descends to a predetermined position in the standby area A2.
 ここで、マスククリーニングを実施する時間の経過とともに、ブレード42の上端側には、スクリーンマスク13の下面13cから掻き出したペーストPが付着し、ペーストPの付着量が徐々に増大していく(図7B)。 Here, as the mask cleaning time elapses, the paste P scraped out from the lower surface 13c of the screen mask 13 adheres to the upper end side of the blade 42, and the adhesion amount of the paste P gradually increases (Fig. 7B).
 図8は、マスククリーニング後のブレード42にペーストPが残留していることを示す図である。図8では、Y方向の正側(先行方向の先頭)から順に、ブレード42A、ブレード42B、ブレード42C、及びブレード42Dが設置されている。図8に示すように、マスククリーニング時に、印刷ヘッド14の進行方向の先頭に位置するブレード42AへのペーストPの付着量が最も多い。ブレード42Aは、スクリーンマスク13の下面13cにおけるマスククリーニングされていない領域に最初に当接するためである。また、印刷ヘッド14の進行方向とは反対方向に向かって、ブレード42へのペーストPの付着量が徐々に少なくなっている。 FIG. 8 is a diagram showing paste P remaining on the blade 42 after mask cleaning. In FIG. 8, a blade 42A, a blade 42B, a blade 42C, and a blade 42D are installed in order from the positive side in the Y direction (the head in the leading direction). As shown in FIG. 8, during mask cleaning, the amount of paste P adhering to the blade 42A located at the leading edge of the print head 14 in the traveling direction is the largest. This is because the blade 42A first comes into contact with the region of the lower surface 13c of the screen mask 13 that has not been mask-cleaned. In addition, the amount of paste P adhered to the blade 42 gradually decreases toward the direction opposite to the traveling direction of the print head 14 .
 具体的には、ブレード42が摺動する過程で、クリーニング方向の先頭に位置するブレード42Aは、スクリーンマスク13の下面13cに付着するペーストPを掻き取る。マスククリーニング動作の回数が少ない間は、先頭に位置するブレード42Aによって全てのペーストPが漏れなく掻き取られる。クリーニング動作を反復して継続する過程で、先頭のブレード42Aの上端には、クリーニングユニット27によって吸引しきれなかったペーストPが徐々に蓄積する。そして、ペーストPの蓄積量が増加するにしたがって、ブレード42Aは後方(クリーニング方向とは反対の方向)に撓み、スクリーンマスク13とブレード42Aとの間に隙間が生じる。なお、隙間はブレード42の撓みのみならず、スクリーンマスク13の下面13cの凹凸によっても生じ得る。この隙間により、ブレード42Aによって掻き取れなかった一部のペーストPがスクリーンマスク13の下面13cに残留し得る。しかしながら、ブレード42Aの後方では、次点に位置するブレード42Bがスクリーンマスク13の下面13cを摺動しているため、残留したペーストPはこのブレード42Bによって掻き取られる。このようなブレード41Aの撓みと同様の撓みが進行方向の先頭側から末端側に向かって順に発生するので、マスククリーニング後のブレード42に残るペーストPの量は、ブレード42A、ブレード42B、ブレード42C、ブレード42Dの順に多くなる。 Specifically, while the blade 42 slides, the blade 42A positioned at the leading edge in the cleaning direction scrapes off the paste P adhering to the lower surface 13c of the screen mask 13. As shown in FIG. While the number of mask cleaning operations is small, all the paste P is completely scraped off by the leading blade 42A. In the process of repeating and continuing the cleaning operation, the paste P that has not been sucked by the cleaning unit 27 is gradually accumulated on the upper end of the leading blade 42A. Then, as the accumulated amount of the paste P increases, the blade 42A bends backward (in the direction opposite to the cleaning direction), creating a gap between the screen mask 13 and the blade 42A. In addition, the gap may be caused not only by the bending of the blade 42 but also by the unevenness of the lower surface 13 c of the screen mask 13 . Due to this gap, a portion of the paste P that has not been scraped off by the blade 42A may remain on the lower surface 13c of the screen mask 13. FIG. However, behind the blade 42A, the next blade 42B slides on the lower surface 13c of the screen mask 13, so the remaining paste P is scraped off by this blade 42B. Since the same bending as that of the blade 41A occurs in order from the leading end to the trailing end in the advancing direction, the amount of paste P remaining on the blade 42 after mask cleaning is the same as that of the blade 42A, the blade 42B, and the blade 42C. , blade 42D.
 図9は、印刷装置1による印刷動作(図6A及び図6Bの続き)を説明するための図である。図9では、ブレード42の清掃が行われる。 FIG. 9 is a diagram for explaining the printing operation by the printing device 1 (a continuation of FIGS. 6A and 6B). In FIG. 9, blade 42 is cleaned.
 マスククリーニングが終了すると、クリーニングユニット27は、待機エリアA2に帰還して移動を停止する。クリーニングユニット27は、待機エリアA2(Y方向の正側端部)に配置されると、Z方向においてブレード清掃ユニット50と対向する。ブレード清掃ユニット50は、ブレード清掃ユニット移動機構51の駆動により、X方向に移動しながら、クリーニングユニット27のブレード42を清掃する(図9)。これにより、ブレード清掃ユニット50は、ブレード42の例えば上端に付着したペーストPを除去する。 When the mask cleaning is completed, the cleaning unit 27 returns to the standby area A2 and stops moving. The cleaning unit 27 faces the blade cleaning unit 50 in the Z direction when arranged in the standby area A2 (positive end in the Y direction). The blade cleaning unit 50 cleans the blade 42 of the cleaning unit 27 while moving in the X direction by being driven by the blade cleaning unit moving mechanism 51 (FIG. 9). Thereby, the blade cleaning unit 50 removes the paste P adhering to, for example, the upper end of the blade 42 .
 ブレード清掃では、ブレード清掃ユニット50は、X方向における往復移動のうち、X方向の一方向のみにおいてブレード清掃してもよい。また、ブレード清掃ユニット50は、X方向における往復移動のうち、X方向の両方向においてブレード清掃してもよい。 In blade cleaning, the blade cleaning unit 50 may clean the blade only in one direction in the X direction during the reciprocating movement in the X direction. Further, the blade cleaning unit 50 may clean the blade in both directions in the X direction during the reciprocating movement in the X direction.
 ブレード清掃後に、新たに基板2が搬入されると、印刷装置1は、上記のスクリーンマスク13を用いたペーストPの印刷(ペースト印刷)、マスククリーニング、及びブレード清掃を繰り返す。なお、印刷装置1は、ペースト印刷が所定回数(例えば1回又は複数回)終了する度に、マスククリーニングを実施してよい。また、印刷装置1は、マスククリーニングが所定回数(例えば1回又は複数回)終了する度に、ブレード清掃を実施してよい。 After cleaning the blade, when a new substrate 2 is brought in, the printing apparatus 1 repeats printing of the paste P using the screen mask 13 (paste printing), cleaning the mask, and cleaning the blade. Note that the printing apparatus 1 may perform mask cleaning each time paste printing is completed a predetermined number of times (for example, once or multiple times). Further, the printing apparatus 1 may perform blade cleaning each time mask cleaning is completed a predetermined number of times (for example, once or multiple times).
 次に、ブレード清掃ユニット50の具体例について説明する。 Next, a specific example of the blade cleaning unit 50 will be described.
 図10は、ブレード清掃ユニット50の第1例を示す模式図である。図10では、ブレード清掃ユニット50が、対象物に対して空気を送出するエアブロー部50Aを有する。エアブロー部50Aは、クリーニングユニット27のブレード42に付着するペーストPを、エアブロー(空気(例えば圧縮空気))で、ブレード42を保持するブレード保持体38内において下方に飛ばして除去する。除去されたブレード42は、真空吸引されてブレード保持体38の外部に排出される。 FIG. 10 is a schematic diagram showing a first example of the blade cleaning unit 50. FIG. In FIG. 10, the blade cleaning unit 50 has an air blower 50A that blows air toward the object. The air blow section 50A removes the paste P adhering to the blade 42 of the cleaning unit 27 by blowing it downward inside the blade holder 38 that holds the blade 42 with an air blow (air (compressed air, for example)). The removed blade 42 is vacuum-sucked and discharged to the outside of the blade holder 38 .
 エアブロー部50Aは、ブレード42に向かって空気を送出するエア噴出ノズルを有する。エア噴出ノズルの向きによって、空気を送出する向きが決定されてよい。エアブロー部50Aは、空気を送出する向きを制御してもよい。空気が送出される向きは、ブレード42の設置角度(アタック角度)に沿った向きでもよいし、ブレード42に対して垂直に近い(例えば垂直な)角度でもよい。エアブロー部50Aは、ブレード42の設置角度に沿った向きに空気が送出される場合には、ブレード42の下端側に付着したペーストPも除去し易くなる。エアブロー部50Aは、ブレード42の設置角度に対して垂直に近い角度で空気が送出される場合には、ブレード42の上端付近に付着したペーストPを強い力で除去し易くなる。 The air blower 50A has an air ejection nozzle that blows air toward the blade 42. The orientation of the air ejection nozzle may determine the orientation of the air. The air blower 50A may control the direction of blowing air. The direction in which the air is delivered may be along the installation angle (attack angle) of the blade 42 or may be at an angle close to vertical (for example, vertical) with respect to the blade 42 . When the air blower 50A blows air in a direction along the installation angle of the blade 42, the paste P adhering to the lower end side of the blade 42 is also easily removed. When the air blowing part 50A blows air at an angle nearly perpendicular to the installation angle of the blade 42, the paste P adhering to the vicinity of the upper end of the blade 42 can be easily removed with a strong force.
 また、エアブロー部50Aは、送出される空気量又は空気の圧縮率等を制御してもよいし、空気を送出する送出パターン(例えば時系列での空気量や空気の圧縮率の大小)を制御してもよい。エアブロー部50Aにより空気が送出される場合、ブレード清掃時には、エアブロー部50Aはブレード42と接触しても非接触でもよい。 In addition, the air blow unit 50A may control the amount of air to be delivered, the compression rate of air, or the like, or control the delivery pattern of delivering air (for example, the amount of air in time series or the magnitude of the compression rate of air). You may When air is sent by the air blower 50A, the air blower 50A may or may not contact the blade 42 during blade cleaning.
 図11は、ブレード清掃ユニット50の第2例を示す模式図である。図11では、ブレード清掃ユニット50は、ブレード清掃ユニット50の周囲から空気を吸引することで対象物(例えばペーストP)を吸引する吸引部50Bを有する。吸引部50Bは、ブレード42に付着したペーストPを上方に吸引して除去する。吸引部50Bは、ブレード保持体38と同様に、真空吸引機構56に接続されていてよい。 FIG. 11 is a schematic diagram showing a second example of the blade cleaning unit 50. FIG. In FIG. 11 , the blade cleaning unit 50 has a suction part 50B that sucks the target (for example, paste P) by sucking air from around the blade cleaning unit 50 . The suction part 50B sucks upward the paste P adhering to the blade 42 and removes it. The suction part 50B may be connected to a vacuum suction mechanism 56, similar to the blade holder 38.
 吸引部50Bは、ブレード42側から空気を吸引する吸引ノズルを有する。吸引ノズルの向きによって、空気を吸引する向きが決定されてよい。吸引部50Bは、空気を吸引する向きを制御してもよい。空気が吸引される向きは、ブレード42の設置角度(アタック角度)に沿った向きでもよいし、ブレード42に対して垂直に近い(例えば垂直な)角度でもよい。吸引部50Bは、ブレード42の設置角度に沿った向きで空気が吸引される場合には、ブレード42の下端側に付着したペーストPも除去し易くなる。吸引部50Bは、ブレード42の設置角度に対して垂直に近い角度で空気が吸引される場合には、ブレード42の上端付近に付着したペーストPを強い力で除去し易くなる。吸引されたペーストPは、吸引部50Bに吸引され、例えば吸引部50Bの外部に排出される。 The suction part 50B has a suction nozzle that sucks air from the blade 42 side. The orientation of the suction nozzle may determine the orientation of air suction. The suction unit 50B may control the direction in which air is sucked. The direction in which the air is sucked may be along the installation angle (attack angle) of the blade 42 or may be at an angle close to perpendicular to the blade 42 (for example, perpendicular). When air is sucked in the direction along the installation angle of the blade 42, the suction part 50B can easily remove the paste P adhering to the lower end side of the blade 42 as well. The suction part 50B can easily remove the paste P adhering to the vicinity of the upper end of the blade 42 with a strong force when the air is sucked at an angle nearly perpendicular to the installation angle of the blade 42 . The sucked paste P is sucked by the suction section 50B and discharged to the outside of the suction section 50B, for example.
 また、吸引部50Bは、吸引力を制御してもよいし、吸引する際の吸引パターン(例えば時系列での対する吸引力の大小)を制御してもよい。吸引部50Bにより吸引される場合、ブレード清掃時には、吸引部50Bはブレード42と接触しても非接触でもよい。 In addition, the suction unit 50B may control the suction force, or may control the suction pattern (for example, the size of the suction force in chronological order) when sucking. When suction is performed by the suction portion 50B, the suction portion 50B may be in contact with or not in contact with the blade 42 during blade cleaning.
 図12は、ブレード清掃ユニット50の第3例を示す模式図である。図12では、ブレード清掃ユニット50は、対象物であるペーストPを拭き取る拭き取り部50Cを有する。拭き取り部50Cは、例えば、清掃材であり、布、紙又はスポンジであってよい。拭き取り部50Cにより拭き取られる場合、ブレード清掃時には吸引部50Bはブレード42と接触する。つまり、拭き取り部50Cがブレード42の上端側に押し付けられた状態でブレード42の上端をなぞって、ペーストPが拭き取られてよい。 FIG. 12 is a schematic diagram showing a third example of the blade cleaning unit 50. FIG. In FIG. 12, the blade cleaning unit 50 has a wiping part 50C that wipes off the paste P that is the object. The wiping part 50C is, for example, a cleaning material, and may be cloth, paper, or sponge. When wiped by the wiping portion 50C, the suction portion 50B comes into contact with the blade 42 during blade cleaning. That is, the paste P may be wiped off by tracing the upper end of the blade 42 while the wiping portion 50C is pressed against the upper end side of the blade 42 .
 このように、本実施形態の印刷装置1によれば、マスククリーニングに用いられるブレード42を掃除するので、スクリーンマスク13の下面13cとブレード42との接触及び摺動時に、ブレード42に残存していたペーストPがスクリーンマスク13の下面13cに転写されることを抑制できる。よって、印刷装置1は、マスククリーニング後にスクリーンマスク13の下面13c又はパターン孔13hにペーストPが残存することを抑制できる。よって、印刷装置1は、スクリーンマスク13のクリーニング精度を向上して、スクリーンマスク13を介したペーストPの印刷精度を向上できる。 As described above, according to the printing apparatus 1 of the present embodiment, the blade 42 used for mask cleaning is cleaned, so that when the lower surface 13c of the screen mask 13 contacts and slides with the blade 42, residual particles remain on the blade 42. It is possible to prevent the paste P from being transferred to the lower surface 13 c of the screen mask 13 . Therefore, the printing apparatus 1 can prevent the paste P from remaining on the lower surface 13c of the screen mask 13 or the pattern holes 13h after mask cleaning. Therefore, the printing apparatus 1 can improve the cleaning accuracy of the screen mask 13 and improve the printing accuracy of the paste P through the screen mask 13 .
 また、基板2へのペーストPの印刷中には、待機エリアA2にクリーニングユニット10Aが配置され、ブレード清掃ユニット50と対向する。よって、印刷装置1は、印刷中にブレード清掃できる。よって、印刷装置1は、印刷効率及びマスククリーニング効率への影響を小さくして、ブレード清掃できる。 Also, during printing of the paste P onto the substrate 2, the cleaning unit 10A is arranged in the standby area A2 and faces the blade cleaning unit 50. Therefore, the printing apparatus 1 can clean the blade during printing. Therefore, the printing apparatus 1 can clean the blade with less influence on printing efficiency and mask cleaning efficiency.
 なお、ブレード清掃ユニット50は、待機エリアA2において、Z方向に待機中のクリーニングユニット27に対向して固定配置されてもよい。この場合、ブレード清掃ユニット50は、ブレード42の上方の全体を覆うように、例えば上方から平面視した場合にX方向に長い形状を有してよい。 Note that the blade cleaning unit 50 may be fixedly arranged in the waiting area A2 so as to face the cleaning unit 27 on standby in the Z direction. In this case, the blade cleaning unit 50 may have a shape elongated in the X direction when viewed from above, for example, so as to cover the entire area above the blade 42 .
 以上のように、本実施形態の印刷装置1は、所定のパターン孔13h(開口の一例)が形成されたスクリーンマスク13(マスクの一例)を用いて基板2にペーストP(半田ペーストの一例)を印刷する。印刷装置1は、基板2を保持してパターン孔13hに位置合わせする基板支持テーブル4(基板保持部の一例)と、パターン孔13hにペーストPを充填して基板2にペーストPを印刷する印刷ヘッド14と、を備える。印刷装置1は、スクリーンマスク13の下面13c(裏面の一例)に付着するペーストPを掻き取るブレード42を備えたクリーニングユニット27と、クリーニングユニット27をスクリーンマスク13の下面13cに沿って移動させることにより、ブレード42でスクリーンマスク13の下面13cに付着したペーストPを掻き取る動作を行うクリーニングユニット移動機構36と、を備える。印刷装置1は、ブレード42をクリーニングするブレード清掃ユニット50を備える。 As described above, the printing apparatus 1 of the present embodiment uses the screen mask 13 (an example of the mask) formed with the predetermined pattern holes 13h (an example of the opening) to apply the paste P (an example of the solder paste) to the substrate 2. to print. The printing apparatus 1 includes a substrate support table 4 (an example of a substrate holding unit) that holds the substrate 2 and aligns it with the pattern hole 13h, and a printing table that fills the pattern hole 13h with a paste P and prints the paste P on the substrate 2. a head 14; The printing apparatus 1 includes a cleaning unit 27 having a blade 42 for scraping off the paste P adhering to the bottom surface 13 c (an example of the back surface) of the screen mask 13 , and moving the cleaning unit 27 along the bottom surface 13 c of the screen mask 13 . a cleaning unit moving mechanism 36 that scrapes off the paste P adhering to the lower surface 13 c of the screen mask 13 with the blade 42 . The printing device 1 includes a blade cleaning unit 50 that cleans the blade 42 .
 これにより、印刷装置1は、マスククリーニングに用いられるブレード42を掃除するので、スクリーンマスク13の下面13cとブレード42との接触及び摺動時に、ブレード42に残存していたペーストPがスクリーンマスク13の下面13cに転写されることを抑制できる。よって、印刷装置1は、マスククリーニング後にスクリーンマスク13の下面13c又はパターン孔13hにペーストPが残存することを抑制できる。よって、印刷装置1は、スクリーンマスク13のクリーニング精度を向上して、スクリーンマスク13を介したペーストPの印刷精度を向上できる。 As a result, the printing apparatus 1 cleans the blade 42 used for mask cleaning, so that the paste P remaining on the blade 42 is removed from the screen mask 13 when the lower surface 13c of the screen mask 13 and the blade 42 contact and slide. can be suppressed from being transferred to the lower surface 13c of the . Therefore, the printing apparatus 1 can prevent the paste P from remaining on the lower surface 13c of the screen mask 13 or the pattern holes 13h after mask cleaning. Therefore, the printing apparatus 1 can improve the cleaning accuracy of the screen mask 13 and improve the printing accuracy of the paste P through the screen mask 13 .
 また、ブレード清掃ユニット50は、ブレード42に付着するペーストPをエアブローで除去するエアブロー部50Aを有してよい。これにより、印刷装置1は、ブレード42からペーストPを吹き飛ばしてブレード42を清掃でき、スクリーンマスク13以外の箇所においてペーストPが残存する箇所を、ブレード保持体38内に集約できる。 Further, the blade cleaning unit 50 may have an air blower 50A that removes the paste P adhering to the blade 42 by an air blow. As a result, the printing apparatus 1 can clean the blade 42 by blowing off the paste P from the blade 42 , and can gather the portions where the paste P remains in the blade holder 38 other than the screen mask 13 .
 また、ブレード清掃ユニット50は、ブレード42に付着するペーストPを吸引して除去する吸引部50Bを有してよい。これにより、印刷装置1は、吸引部50BにペーストPを吸引でき、ブレード保持体38内のペーストPの残存量が増加することを抑制できる。 Further, the blade cleaning unit 50 may have a suction part 50B that sucks and removes the paste P adhering to the blade 42 . As a result, the printing apparatus 1 can suck the paste P into the suction portion 50B, and can suppress an increase in the residual amount of the paste P in the blade holder 38 .
 また、ブレード清掃ユニット50は、ブレード42に付着するペーストPを拭き取る拭き取り部50Cを有してよい。これにより、印刷装置1は、ブレード清掃ユニット50内で電気的な制御を行うことなく、ブレード清掃ユニット50の清掃材がペーストPを直接拭き取りできる。 In addition, the blade cleaning unit 50 may have a wiping part 50C that wipes off the paste P adhering to the blade 42. As a result, the printing apparatus 1 can wipe the paste P directly with the cleaning material of the blade cleaning unit 50 without performing electrical control within the blade cleaning unit 50 .
 また、ブレード清掃ユニット50は、印刷装置1を上方から平面視して、スクリーンマスク13と重ならない位置に配置されていてよい。クリーニングユニット移動機構36は、クリーニングユニット27をブレード清掃ユニット50の下方まで移動させてよい。 Further, the blade cleaning unit 50 may be arranged at a position not overlapping the screen mask 13 when the printing apparatus 1 is viewed from above. The cleaning unit moving mechanism 36 may move the cleaning unit 27 below the blade cleaning unit 50 .
 これにより、印刷装置1は、クリーニングユニット移動機構36が移動可能であることで、マスクの下面13cを自動でクリーニングできる。また、印刷装置1は、移動可能なクリーニングユニット27をブレード清掃ユニット50に対向して配置できる。よって、印刷装置1は、ブレード清掃ユニット50とブレード42との対向時(例えばペーストPの印刷時)に、印刷効率及びマスククリーニング効率への影響を小さくして、ブレード清掃ユニット50がブレード42を容易に掃除できる。 As a result, the printing apparatus 1 can automatically clean the lower surface 13c of the mask by allowing the cleaning unit moving mechanism 36 to move. Further, the printing apparatus 1 can arrange the movable cleaning unit 27 so as to face the blade cleaning unit 50 . Therefore, when the blade cleaning unit 50 and the blade 42 face each other (for example, when the paste P is printed), the printing apparatus 1 reduces the influence on the printing efficiency and the mask cleaning efficiency so that the blade cleaning unit 50 moves the blade 42. Easy to clean.
 また、印刷装置1は、ブレード清掃ユニット50をブレード42の長手方向(例えばX方向)に沿って移動させるブレード清掃ユニット移動機構51、を備えてよい。 The printing apparatus 1 may also include a blade cleaning unit moving mechanism 51 that moves the blade cleaning unit 50 along the longitudinal direction of the blade 42 (for example, the X direction).
 これにより、印刷装置1は、ブレード清掃ユニット50を小型化しても、ブレード清掃ユニット50がブレード42の両端部間(例えばY方向の両端部間)を移動することで、ブレード42の全体を清掃できる。 As a result, even if the blade cleaning unit 50 is downsized, the printing apparatus 1 can clean the entire blade 42 by moving the blade cleaning unit 50 between both ends of the blade 42 (for example, between both ends in the Y direction). can.
 以上、図面を参照しながら各種の実施形態について説明したが、本開示はかかる例に限定されないことは言うまでもない。当業者であれば、特許請求の範囲に記載された範疇内において、各種の変更例、修正例、置換例、付加例、削除例、均等例に想到し得ることは明らかであり、それらについても当然に本開示の技術的範囲に属するものと了解される。
また、発明の趣旨を逸脱しない範囲において、上述した各種の実施形態における各構成要素を任意に組み合わせてもよい。
Various embodiments have been described above with reference to the drawings, but it goes without saying that the present disclosure is not limited to such examples. It is obvious that a person skilled in the art can conceive of various modifications, modifications, substitutions, additions, deletions, and equivalents within the scope of the claims. Naturally, it is understood that it belongs to the technical scope of the present disclosure.
In addition, the constituent elements of the various embodiments described above may be arbitrarily combined without departing from the gist of the invention.
 なお、本出願は、2021年12月8日出願の日本特許出願(特願2021-199675)に基づくものであり、その内容は本出願の中に参照として援用される。 This application is based on a Japanese patent application (Japanese Patent Application No. 2021-199675) filed on December 8, 2021, the contents of which are incorporated herein by reference.
 本開示は、マスクのクリーニング精度を向上して、マスクを介したペーストの印刷精度を向上できる印刷装置及び印刷方法等に有用である。 The present disclosure is useful for a printing apparatus, a printing method, and the like that can improve mask cleaning accuracy and paste printing accuracy through the mask.
1 印刷装置
2 基板
4 基板支持テーブル
5 基板支持テーブル移動機構
13 スクリーンマスク
13a マスク枠
13c 下面
13h パターン孔
14 印刷ヘッド
15 印刷ヘッド移動機構
16 スキージ
26 カメラユニット
26c カメラ
26p プリズム
27 クリーニングユニット
33 カメラユニット移動ベース移動機構
34 カメラユニット移動機構
35 クリーニングユニット移動ベース
36 クリーニングユニット移動機構
38 ブレード保持体
38a 枠体
38b マスク受け部
38m マスク当接面
42 ブレード
50 ブレード清掃ユニット
50A エアブロー部
50B 吸引部
50C 拭き取り部
51 ブレード清掃ユニット移動機構
52 制御部
53 記憶部
54 機構駆動部
55 認識処理部
56 真空吸引機構
P ペースト
1 printing device 2 substrate 4 substrate support table 5 substrate support table movement mechanism 13 screen mask 13a mask frame 13c lower surface 13h pattern hole 14 print head 15 print head movement mechanism 16 squeegee 26 camera unit 26c camera 26p prism 27 cleaning unit 33 camera unit movement Base moving mechanism 34 Camera unit moving mechanism 35 Cleaning unit moving base 36 Cleaning unit moving mechanism 38 Blade holder 38a Frame 38b Mask receiving part 38m Mask contact surface 42 Blade 50 Blade cleaning unit 50A Air blow part 50B Suction part 50C Wiping part 51 Blade cleaning unit moving mechanism 52 Control section 53 Storage section 54 Mechanism driving section 55 Recognition processing section 56 Vacuum suction mechanism P Paste

Claims (7)

  1.  所定の開口が形成されたマスクを用いて基板に半田ペーストを印刷する印刷装置であって、
     前記基板を保持して前記開口に位置合わせする基板保持部と、
     前記開口に半田ペーストを充填して前記基板に前記半田ペーストを印刷する印刷ヘッドと、
     前記マスクの裏面に付着する前記半田ペーストを掻き取るブレードを備えたクリーニングユニットと、
     前記クリーニングユニットを前記マスクの裏面に沿って移動させることにより、前記ブレードで前記マスクの裏面に付着した前記半田ペーストを掻き取る動作を行うクリーニングユニット移動機構と、
     前記ブレードをクリーニングするブレード清掃ユニットと、
     を備える印刷装置。
    A printing apparatus for printing solder paste on a substrate using a mask having predetermined openings,
    a substrate holder that holds the substrate and aligns it with the opening;
    a print head that fills the opening with a solder paste and prints the solder paste on the substrate;
    a cleaning unit having a blade for scraping off the solder paste adhering to the back surface of the mask;
    a cleaning unit moving mechanism that scrapes off the solder paste adhered to the back surface of the mask with the blade by moving the cleaning unit along the back surface of the mask;
    a blade cleaning unit for cleaning the blade;
    a printing device.
  2.  前記ブレード清掃ユニットは、前記ブレードに付着する前記半田ペーストをエアブローで除去するエアブロー部を有する、
     請求項1に記載の印刷装置。
    The blade cleaning unit has an air blower that removes the solder paste adhering to the blade with an air blow.
    A printing device according to claim 1 .
  3.  前記ブレード清掃ユニットは、前記ブレードに付着する前記半田ペーストを吸引して除去する吸引部を有する、
     請求項1に記載の印刷装置。
    The blade cleaning unit has a suction unit that sucks and removes the solder paste adhering to the blade,
    A printing device according to claim 1 .
  4.  前記ブレード清掃ユニットは、前記ブレードに付着する前記半田ペーストを拭き取る拭き取り部を有する、
     請求項1に記載の印刷装置。
    The blade cleaning unit has a wiping part that wipes off the solder paste adhering to the blade,
    A printing device according to claim 1 .
  5.  前記ブレード清掃ユニットは、前記印刷装置を上方から平面視して、前記マスクと重ならない位置に配置されており、
     前記クリーニングユニット移動機構は、前記クリーニングユニットを前記ブレード清掃ユニットの下方まで移動させる、
     請求項1~4のいずれか1項に記載の印刷装置。
    The blade cleaning unit is arranged at a position not overlapping the mask when the printing apparatus is viewed from above,
    The cleaning unit moving mechanism moves the cleaning unit below the blade cleaning unit.
    The printing apparatus according to any one of claims 1-4.
  6.  前記ブレード清掃ユニットを前記ブレードの長手方向に沿って移動させるブレード清掃ユニット移動機構、を更に備える、
     請求項1~5いずれか1項に記載の印刷装置。
    a blade cleaning unit moving mechanism for moving the blade cleaning unit along the longitudinal direction of the blade;
    The printing apparatus according to any one of claims 1-5.
  7.  所定の開口が形成されたマスクを用いて基板に半田ペーストを印刷する印刷方法であって、
     前記基板を保持して前記開口に位置合わせするステップと、
     前記開口にペーストを充填して前記基板に前記半田ペーストを印刷するステップと、
     前記マスクの裏面に付着する前記半田ペーストを掻き取るブレードを備えたクリーニングユニットを、前記マスクの裏面に沿って移動させることにより、前記ブレードで前記マスクの裏面に付着した前記半田ペーストを掻き取る動作を行うステップと、
     前記ブレードをクリーニングするステップと、
     を有する印刷方法。
    A printing method for printing a solder paste on a board using a mask having a predetermined opening,
    holding and aligning the substrate with the opening;
    filling the opening with a paste and printing the solder paste on the substrate;
    An operation of scraping off the solder paste adhered to the back surface of the mask with the blade by moving a cleaning unit equipped with a blade for scraping the solder paste adhered to the back surface of the mask along the back surface of the mask. and
    cleaning the blade;
    A printing method having
PCT/JP2022/045198 2021-12-08 2022-12-07 Printing device and printing method WO2023106355A1 (en)

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