JP5035270B2 - Screen printing apparatus and screen printing method - Google Patents

Description

  The present invention relates to a screen printing apparatus and a screen printing method for printing paste such as cream solder or conductive paste on a substrate.

  In an electronic component mounting process, screen printing is used as a method for printing paste such as cream solder or conductive paste on a substrate. In this method, a mask plate provided with a pattern hole according to a printing target part is brought into contact with the substrate, a paste is supplied onto the mask plate, and a squeegee is slid on the substrate through the pattern hole. The paste is printed.

  During the printing operation, cream solder that protrudes from the printed area on the substrate adheres to the lower surface of the mask plate, or cream solder that has not been completely transferred onto the substrate remains in the opening of the mask plate. Pollution occurs. Such contamination by cream solder hinders normal printing on the subsequent substrate, and therefore it is necessary to perform cleaning to remove these cream solders.

For this reason, conventionally, a screen printing apparatus having a cleaning mechanism for removing residual cream solder by wiping the mask plate from the lower surface side using a dedicated cleaning paper is known (for example, see Patent Document 1). In this cleaning mechanism, the cleaning paper drawn from the paper roll is pressed against the lower surface of the mask plate by the cleaning head, and then the cleaning head is moved horizontally, whereby the lower surface of the mask plate is wiped by the cleaning paper. In the example shown here, both sides of the cleaning paper are used in order to effectively use the cleaning paper.
JP 2005-199452 A

  However, in the prior art in which the cleaning is performed by pressing the cleaning paper against the mask plate as described above, there are the following problems due to the method. That is, since the cleaning paper is supplied while being wound around the paper roll, it is necessary to replace the paper roll every time a predetermined amount of cleaning paper supplied by one paper roll is used up. For this reason, in the process of continuing the screen printing operation continuously, it is necessary to stop the apparatus at a predetermined frequency in order to replace the paper roll, which is one factor that causes a decrease in productivity. Further, since the cleaning paper is disposable, it is difficult to reduce the running cost, and at the same time, waste of resources is generated.

  Therefore, an object of the present invention is to provide a screen printing apparatus and a screen printing method capable of realizing reduction in running cost and improvement in productivity.

The screen printing apparatus of the present invention is a screen printing for printing a paste on a substrate through the pattern hole by bringing the substrate into contact with a mask plate provided with a pattern hole and sliding a squeegee on the mask plate. And a cleaning mechanism for cleaning the mask plate by sliding a cleaning member formed of a porous material into a predetermined shape in contact with the lower surface of the mask plate by a cleaning head. The cleaning mechanism collects by sliding the cleaning member with respect to the lower surface of the mask plate, and further removes a cleaning object impregnated in the cleaning member, and the cleaning mechanism Head elevator that raises and lowers the head And a cleaning head moving means that horizontally moves the cleaning head together with the head lifting mechanism and the member cleaning means, and the member cleaning means is a surface opposite to the sliding contact surface that is in sliding contact with the mask plate. Suction means for separating and removing the cleaning object from the cleaning member by sucking the cleaning member from the side is provided.

  In the screen printing method of the present invention, a cleaning head is provided with a screen printing portion for bringing a substrate into contact with a mask plate provided with pattern holes and sliding a squeegee on the mask plate, and a cleaning member formed with a porous material. A cleaning mechanism that cleans the mask plate by making it contact and slide against the lower surface of the mask plate, and the cleaning mechanism slides the cleaning member against the lower surface of the mask plate. A member cleaning unit that removes a cleaning target that has been collected and impregnated inside the cleaning member, a head lifting mechanism that lifts and lowers the cleaning head, and the cleaning head integrated with the head lifting mechanism and the member cleaning unit To move horizontally A cleaning head moving means, and the member cleaning means separates / removes the cleaning object from the cleaning member by sucking the cleaning member from a surface opposite to the sliding contact surface that is in sliding contact with the mask plate. A screen printing method for printing a paste on a substrate through the pattern hole by a screen printing apparatus having a suction unit, wherein the screen printing unit performs a printing operation for printing the paste on the substrate. And after the printing execution step is finished, the cleaning head is lifted and the cleaning member is pressed against the lower surface of the mask plate, and the cleaning head is moved horizontally to clean the lower surface of the mask plate. Process and said cree While the ring member is slid is brought into contact with the lower surface of the mask plate by the cleaning head, and a member cleaning step of removing the cleaning object impregnated into the cleaning member by the member cleaning means.

  According to the present invention, in a cleaning mechanism for cleaning a mask plate by causing a cleaning member formed of a porous material to slide against the lower surface of the mask plate by a cleaning head, the cleaning member is placed on the lower surface of the mask plate. A member cleaning means for removing the cleaning object collected by sliding against the cleaning member and impregnated inside the cleaning member, and a cleaning member from the opposite side of the sliding contact surface for scraping the cleaning object By providing a suction means for separating / removing the cleaning object from the cleaning member by sucking the cleaning member, the cleaning member can be reused repeatedly without the need to stop the apparatus, thereby reducing running costs and improving productivity. Improvements can be realized.

  Next, embodiments of the present invention will be described with reference to the drawings. 1 is a front view of a screen printing apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the screen printing apparatus according to an embodiment of the present invention, and FIG. 3 is a screen printing apparatus according to an embodiment of the present invention. FIG. 4 is a diagram illustrating the configuration of the cleaning unit in the screen printing apparatus according to the embodiment of the present invention. FIGS. 5 and 7 are provided in the cleaning unit of the screen printing apparatus according to the embodiment of the present invention. FIG. 6 is a functional explanatory view of the cleaning member in the cleaning unit of the screen printing apparatus according to the embodiment of the present invention, and FIG. 8 is an operation showing the screen printing method according to the embodiment of the present invention. It is explanatory drawing.

  First, the structure of the screen printing apparatus will be described with reference to FIG. 1, FIG. 2, and FIG. In FIG. 1, the screen printing apparatus is configured by disposing a screen printing unit 10 above a substrate positioning unit 1. The substrate positioning unit 1 is configured by stacking a Y-axis table 2, an X-axis table 3, and a θ-axis table 4, and further placing a Z-axis table 5 thereon. On the Z-axis table 5, there is provided a substrate holder 6 that receives and holds the substrate 8 from the lower surface side. The substrate 8 carried in from the upstream side via the carry-in conveyor 9A (FIG. 2) is carried onto the substrate holding unit 6 by the printing conveyor 9, and is sandwiched from both sides by the clamper 7 to fix the position. The substrate 8 after being printed by the screen printing unit 10 described below is carried out to the downstream side via the carry-out conveyor 9B (see FIG. 2).

  A screen printing unit 10 disposed above the substrate positioning unit 1 includes a mask plate 12 extended on a mask frame 11. The mask plate 12 is provided with a pattern hole 12a (see FIG. 3) corresponding to a printing target. As shown in FIG. 2, two bar-shaped brackets 22 are horizontally extended on the side surfaces of the vertical frame 21 provided on both sides of the substrate positioning portion 1. On the upper surfaces of the two brackets 22, an L-shaped cross-sectional mask holder 23 is installed in the Y direction. The mask holder 23 positions and holds the mask frame 11 of the mask plate 12.

  A squeegee head 13 is disposed on the mask plate 12. The squeegee head 13 has a structure in which a squeegee raising / lowering mechanism 14 for raising and lowering the squeegee 15 is disposed on a horizontal plate 13a. As shown in FIG. 2, both ends of the plate 13a are guides arranged on a vertical frame 21. The mechanism is supported so as to be slidable in the Y direction. The plate 13a is horizontally moved in the Y direction by squeegee moving means including a nut 16a, a feed screw 16b, and a rotary drive motor (not shown). Further, by driving the squeegee raising / lowering mechanism 14, the squeegee 15 moves up and down and comes into contact with the upper surface of the mask plate 12.

  The squeegee is moved on the mask plate 12 supplied with the cream solder 25 (see FIG. 8A) as a paste in a state where the Z-axis table 5 is raised and the lower surface of the mask plate 12 is brought into contact with the substrate 8. By driving the means and moving the squeegee 15 in the Y direction, the cream solder 25 is printed on the substrate 8 through the pattern holes 12a. That is, the screen printing unit 10 causes the substrate 8 to come into contact with the mask plate 12 provided with the pattern holes 12a, and slides the squeegee 15 on the mask plate 12 to paste the substrate 8 through the pattern holes 12a with the paste. A certain cream solder 25 is printed.

  A camera 19 is provided above the screen printing unit 10. As shown in FIG. 3, the camera 19 is horizontally moved in the XY directions by the X-axis table 18 and the Y-axis table 17. The X-axis table 18 and the Y-axis table 17 serve as a camera moving mechanism that moves the camera 19. By moving the camera 19 with respect to the mask plate 12 by the camera moving mechanism, the camera 19 images an arbitrary position of the mask plate 12. The substrate positioning unit 1 is moved in the Y direction from below the screen printing unit 10 by the Y-axis table 2 so that the held substrate 8 can be moved to the substrate recognition position. In this state, the camera 19 is moved. By moving to the substrate 8 on the substrate positioning unit 1, an arbitrary position of the substrate 8 can be imaged by the camera 19 and the substrate position can be recognized.

A cleaning unit 20 (cleaning mechanism) is disposed on the side of the substrate positioning unit 1 on the Y-axis table 2. The cleaning unit 20 has a configuration in which each element described below is built in the main body 20a, and the cleaning head 24 protrudes from the upper part of the main body 20a. By driving the Y-axis table 2, the cleaning unit 2
0 moves in the Y direction together with the substrate positioning unit 1, and the lower surface 12 b of the mask plate 12 is cleaned by the cleaning head 24.

  In the present embodiment, a cleaning member 26 in which a porous material is molded into a predetermined shape suitable for scraping off an object to be cleaned is mounted on the upper portion of the cleaning head 24, and the cleaning member 26 is attached to the lower surface of the mask plate 12. A cleaning configuration is employed in which the cleaning object 25a adhering to the mask plate 12 is scraped off and removed by being brought into contact with and sliding on 12b. That is, the cleaning unit 20 serving as a cleaning mechanism cleans the mask plate 12 by causing the cleaning member 26 formed of a porous material into a predetermined shape to slide against the lower surface of the mask plate 12 by the cleaning head 24. Like to do.

  The configuration of the cleaning unit 20 will be described with reference to FIG. Inside the main body 20a, a cleaning head 24 is arranged with a head upper part 24a protruding from the upper part of the main body 20a. The cleaning head 24 can be raised and lowered by a head lifting mechanism 27. By driving the head lifting / lowering mechanism 27, the cleaning head 24 moves up and down (arrow a), and the sliding contact surface 26a provided on the cleaning member 26 mounted on the head upper portion 24a thereby contacts the lower surface 12b of the mask plate 12. It is freely accessible. With the cleaning head 24 raised and the sliding contact surface 26a in contact with the lower surface 12b, the cleaning unit 20 is moved horizontally in the Y direction (arrow b), so that the cleaning object attached to the lower surface 12b is removed from the cleaning member 26. Is scraped and removed.

  Next, the structure of the cleaning head 24 will be described with reference to FIG. FIG. 5 shows a part of the YZ plane cross section of the cleaning unit 20 shown in FIGS. The cleaning head 24 has a substantially box-shaped suction chamber 30 as a main body, and a head-shaped upper portion 24a corresponding to the top of the suction chamber 30 has a block-shaped cleaning member 26 elongated in the X direction (see also the plan view shown in FIG. 3). ) Is installed. The cleaning member 26 is made of a porous material having physical properties that can be molded into a predetermined shape. As porous materials, resin materials with fine pores formed inside, rubber-based materials, sponge-like resin materials, and resin materials molded with foam-like pores inside by foam molding, etc. are used It is done. In short, any material may be used as long as it has a property capable of being impregnated and permeated with a cleaning object such as cream solder, which is a viscous material, and can be formed into an elongated block shape.

  As shown in FIG. 5, the cleaning member 26 has a cross-sectional shape in which a concave portion 26b is provided at the center portion, and sliding contact surfaces 26a that slide in contact with the lower surface 12b of the mask plate 12 are provided at both ends in the Y direction. It has a form (see FIG. 4). By setting the cross section of the cleaning member 26 to such a shape, a cleaning object such as a residue of the cream solder 25 attached to the lower surface 12b can be scraped off by the edge portions 26d at both ends of the sliding contact surface 26a. It is possible to improve the cleaning efficiency as compared with a mode in which the cleaning paper is pressed and wiped off.

  Inside the cleaning member 26, a liquid hole 26 c is provided in the vicinity of the surface of the sliding contact surface 26 a, and the liquid hole 26 c is connected to the solvent supply unit 33. By operating the solvent supply unit 33, a mask cleaning solvent such as a cleaning alcohol or an organic solvent is supplied into the liquid hole 26c. As a result, the surface of the slidable contact surface 26a can be wet-cleaned in which the solvent oozes out through the holes in the material and the cleaning is performed with the solvent supplied to the cleaning surface. Therefore, the liquid hole 26c and the solvent supply unit 33 provided in the cleaning member 26 are solvents that supply the mask cleaning solvent to the sliding contact surface 26a that slides in contact with the lower surface 12b of the mask plate 12 in the cleaning member 26. It is a supply means.

  An upper suction opening 30 b provided immediately below the cleaning member 26 communicates with a suction space 30 a provided in the suction chamber 30. In the suction space 30a, a bag-shaped dust collection pack 31 having an introduction opening 31a provided in the upper part is detachably mounted. The introduction opening 31a is fitted into the suction space 30a and the lower surface of the cleaning member 26 is covered. The inside of the dust collection pack 31 is exposed. The material of the dust collection pack 31 is made of paper, cloth, or the like that has excellent air permeability and does not transmit the cleaning object 25a.

  A lower suction opening 30c is provided on the bottom surface side of the suction space 30a, and an exhaust mechanism 32 is connected to the lower suction opening 30c. By driving the exhaust mechanism 32, the inside of the suction space 30a is exhausted through the lower suction opening 30c (arrow c). By driving the exhaust mechanism 32 with the dust collection pack 31 mounted in the suction chamber 30, the inside of the dust collection pack 31 is sucked through the dust collection pack 31 having air permeability. Suction is performed from the lower surface side through the upper suction opening 30b.

  As a result, the cleaning object 25 a impregnated in the cleaning member 26 by cleaning the mask plate 12 passes through the hole in the cleaning member 26 and is separated and removed from the cleaning member 26. To the dust collection pack 31. By continuing this suction, the cleaning object 25 a that has passed through the cleaning member 26 is collected by the dust collection pack 31. Since the cleaning object 25a collected in this manner contains a reusable solder component, it is recovered and reprocessed.

  In the above-described configuration, the suction chamber 30, the dust collection pack 31, and the exhaust mechanism 32 to which the cleaning member 26 is attached are collected by sliding the cleaning member 26 against the lower surface 12b of the mask plate 12, and are further porous. A member cleaning means for removing the cleaning object 25a impregnated in the cleaning member 26 made of a material is configured. In the example shown in the embodiment of the present invention, the member cleaning means sucks the cleaning member 26 from the opposite surface side of the sliding contact surface 26a that is in sliding contact with the mask plate 12, thereby removing the cleaning object 25a from the cleaning member. 26 is provided with suction means (lower suction opening 30c and exhaust mechanism 32) for separating and removing from 26.

  Further, in the above-described configuration, the Y-axis table 2 constitutes a cleaning head moving unit that horizontally moves the cleaning head 24 together with the head lifting mechanism and the member cleaning unit. The dust collection pack 31 is disposed in the suction path by the aforementioned suction means, and functions as a collection means for capturing and collecting the separated / removed cleaning object 25a. In order to detect the collection state of the cleaning object 25a in the dust collection pack 31, a differential pressure between the upper suction opening 30b and the lower suction opening 30c is detected, and this differential pressure exceeds a threshold value. In such a case, it may be output as an alarm that it is time to replace the dust collection pack 31.

  Next, cleaning of the mask plate 12 by the cleaning member 26 will be described with reference to FIG. FIG. 6A shows an example of wet cleaning in which cleaning is performed in a wet state while supplying a solvent to the sliding contact surface 26a. That is, while the cleaning member 26 is slid in the horizontal direction with respect to the mask plate 12 (arrow d), the solvent supply unit 33 is operated to supply the solvent into the liquid hole 26c of the cleaning member 26. At this time, the solvent is continuously supplied from the solvent supply unit 33, so that the solvent that has permeated to the surroundings from the liquid hole 26c always reaches the sliding contact surface 26a (arrow e). As a result, the cleaning object 25a attached to the lower surface 12b is scraped off by the sliding contact surface 26a while being softened by the solvent and is accumulated in the recess 26b.

  At this time, since the lower surface side of the cleaning member 26 is sucked (arrow f), the scraped cleaning object 25a passes through the cleaning member 26 made of a porous material in the thickness direction and collects from the lower surface side. It is sucked into the dust pack 31. In this wet cleaning, even when there is a cleaning object 25a firmly attached in a semi-solid state inside the pattern hole 12a or the lower surface 12b of the mask plate 12, the cleaning object 25a is removed by a solvent. It can be softened and easily cleaned.

  FIG. 6B shows an example of dry cleaning in which cleaning is performed in a dry state without supplying a solvent to the sliding contact surface 26a. That is, in the process of sliding the cleaning member 26 in the horizontal direction with respect to the mask plate 12 (arrow d), the supply of the solvent to the cleaning member 26 is stopped without operating the solvent supply unit 33. At this time, even if the solvent is supplied to the cleaning member 26 in the work performed previously, the cleaning member 26 is always sucked from the lower surface side, so that the solvent remaining in the cleaning member 26 is removed from the lower surface. To the side (arrow g), and the sliding contact surface 26a is in a dry state.

  When cleaning is repeatedly performed on the mask plate 12, the wet / dry cleaning must be appropriately switched and applied in accordance with the contamination state of the mask plate 12. In the case of dry cleaning, there is a disadvantage that the removal ability is insufficient for the cleaning object 25a firmly fixed. On the other hand, in the case of wet cleaning, although the removal target 25a is removed while being softened, the removal performance is excellent, but the flux component dissolved by the solvent becomes a thin film on the lower surface 12b of the mask plate 12. There is a disadvantage that it adheres and remains. In such an application example that requires dry / wet switching, the screen printing apparatus shown in the present embodiment switches between dry cleaning and wet cleaning simply by turning on and off the operation of the solvent supply unit 33. It is possible to execute.

  In the example shown in FIG. 5, an example in which the dust collection pack 31 is used as a collecting unit that captures and collects the separated / removed cleaning target 25a is shown, but the collecting unit is not limited to this, for example, It is good also as a structure as shown in FIG. In FIG. 7, the cleaning head 24A has a substantially box-shaped suction chamber 30A as a main body, similarly to the cleaning head 24 shown in FIG. A cleaning member 26 similar to that shown in FIG. 5 is mounted on the head upper portion 24a. In the upper portion of the suction chamber 30A, a slit 30d penetrating the suction chamber 30A in the Y direction is provided at a height position corresponding to just below the cleaning member 26.

  A reel supply type dust collecting paper 36 is inserted in the slit 30d so as to be movable in the horizontal direction (arrow h), and the dust collecting paper 36 supplied by the supply reel 34A is taken up by the recovery reel 34B. The dust collecting paper 36 is a low-priced, low-quality paper sheet that has air permeability and has a characteristic of capturing the cleaning object 25a. In cleaning using the cleaning head 24A, the suction space 30a is empty, and the suction space 30a is directly sucked by driving the exhaust mechanism 32 (arrow c). This suction force acts on the lower surface side of the cleaning member 26 through the air-permeable dust collecting paper 36. As a result, the cleaning object 25a impregnated in the cleaning member 26 by cleaning passes through the hole in the cleaning member 26, is separated and removed from the cleaning member 26, and is sucked and sucked from the lower surface of the cleaning member 26. Move into the space 30a. At this time, the cleaning object 25a is collected and attached by the dust collecting paper 36 (collecting means). If the amount of dust adhering to the dust collecting paper 36 increases and the collecting power of the cleaning object 25a decreases, the dust collecting paper 36 is wound up by the collection reel 34B, and the new dust collecting paper 36 is placed directly under the cleaning member 26. Position. The dust collecting paper 36 used for such an application is much cheaper than the dedicated cleaning paper conventionally used for cleaning the mask plate 12, so that the running cost can be greatly reduced. It has become.

  Next, a screen printing method by the screen printing apparatus having the above configuration will be described with reference to FIG. FIG. 8A shows a printing process in which the screen printing unit 10 performs a printing operation for printing the cream solder 25 as a paste on the substrate 8. That is, in the substrate positioning unit 1, the substrate 8 held on the lower surface side by the substrate holding unit 6 and sandwiched on both sides by the clamper 7 is brought into contact with the lower surface of the mask plate 12. In this state, by sliding the squeegee 15 on the mask plate 12 (arrow i), the cream solder 25 as a paste is printed on the substrate 8 through the pattern holes 12a.

  In the process of repeatedly executing this printing process, the mask cleaning process is executed at predetermined intervals. That is, as shown in FIG. 8B, after the printing process is completed, the cleaning unit 20 is moved to the lower surface side of the mask plate 12, and then the cleaning head 24 is moved up (arrow j). It abuts on the lower surface 12b. Then, with the cleaning member 26 pressed against the lower surface of the mask plate 12, the cleaning head 24 is moved horizontally (arrow k) to clean the lower surface 12b of the mask plate 12.

  In the present embodiment, as described above, the cleaning member 26 that has been soiled by cleaning is brought into contact with the lower surface 12b of the mask plate 12 by the cleaning head 24 and is slid on the cleaning member 26 by the above-described member cleaning means. A member cleaning process for removing the impregnated cleaning object 25a is performed. This member cleaning process may be performed concurrently with the mask cleaning process shown in FIG. 8B, and in the printing process shown in FIG. 8A, the cleaning unit 20 executes the mask cleaning process. It may be executed at the time of waiting for cleaning.

  As described above, in the present invention, in the cleaning mechanism for cleaning the mask plate 12, the cleaning member 26 formed of the porous material is brought into contact with the lower surface 12 b of the mask plate 12 by the cleaning head 24 and is slid. A member cleaning means for removing the cleaning object 25a collected by sliding the cleaning member 26 against the lower surface 12b of the mask plate 12 and scraping it, and impregnated inside the cleaning member 26; A suction means for separating / removing the cleaning object 25a from the cleaning member 26 by sucking the cleaning member 26 from the side opposite to the sliding contact surface 26a for scraping the object 25a is provided.

  As a result, a device stop inevitably occurred in a conventional device using disposable cleaning paper, that is, a device stop for exchanging a roll accompanying the use of a cleaning paper supplied in the form of a paper roll occurs. There is no. Therefore, the same cleaning member 26 can be reused repeatedly to reduce running costs and improve productivity.

  INDUSTRIAL APPLICABILITY The screen printing apparatus and the screen printing method of the present invention have an effect that a running cost can be reduced and productivity can be improved, and screen printing for printing paste such as cream solder or conductive paste on a substrate is effective. Useful in the field.

1 is a front view of a screen printing apparatus according to an embodiment of the present invention. The side view of the screen printing apparatus of one embodiment of this invention The top view of the screen printing apparatus of one embodiment of this invention Structure explanatory drawing of the cleaning unit in the screen printing apparatus of one embodiment of this invention Structure explanatory drawing of the member cleaning means with which the cleaning unit of the screen printing apparatus of one embodiment of this invention was equipped Functional explanatory drawing of the cleaning member in the cleaning unit of the screen printing apparatus of one embodiment of the present invention Structure explanatory drawing of the member cleaning means with which the cleaning unit of the screen printing apparatus of one embodiment of this invention was equipped Operation explanatory diagram showing a screen printing method of one embodiment of the present invention

1 Substrate positioning unit 2 Y-axis table (cleaning head moving means)
8 Substrate 12 Mask plate 12a Pattern hole 15 Squeegee 20 Cleaning unit (cleaning mechanism)
24, 24A Cleaning head 25 Cream solder (paste)
25a Cleaning object 26 Cleaning member 26a Sliding surface 27 Elevating mechanism (head elevating mechanism)
30 Suction chamber (member cleaning means)
31 Dust collection pack (member cleaning means, recovery means)
32 Exhaust mechanism (member cleaning means, suction means)
36 Dust collection paper (member cleaning means, recovery means)

Claims (6)

The substrate is brought into contact with a mask plate provided with pattern holes, and a squeegee is slid on the mask plate, whereby a screen printing unit for printing paste on the substrate through the pattern holes and a porous material are predetermined. A screen printing apparatus having a cleaning mechanism for cleaning the mask plate by sliding the cleaning member formed into a shape into contact with the lower surface of the mask plate by a cleaning head;
The cleaning mechanism is a member cleaning unit that removes a cleaning object that is collected by sliding the cleaning member with respect to the lower surface of the mask plate and further impregnated in the cleaning member;
A head lifting mechanism for lifting and lowering the cleaning head, and a cleaning head moving means for horizontally moving the cleaning head together with the head lifting mechanism and the member cleaning means,
Further, the member cleaning means includes suction means for separating / removing the cleaning object from the cleaning member by sucking the cleaning member from the side opposite to the sliding contact surface that is in sliding contact with the mask plate. A screen printing device.   The screen printing apparatus according to claim 1, further comprising a collection unit that is disposed in a suction path by the suction unit and captures and collects the separated / removed cleaning object.   The screen printing apparatus according to claim 1, further comprising a solvent supply unit configured to supply a mask cleaning solvent to a sliding surface of the cleaning member that contacts and slides on a lower surface of the mask plate. A screen printing unit for bringing a substrate into contact with a mask plate provided with a pattern hole and sliding a squeegee on the mask plate, and a cleaning member formed with a porous material are brought into contact with the lower surface of the mask plate by a cleaning head. And a cleaning mechanism for cleaning the mask plate by sliding it
The cleaning mechanism includes a member cleaning unit that removes a cleaning target that is collected by sliding the cleaning member against the lower surface of the mask plate and impregnated inside the cleaning member, and the cleaning head. A head elevating mechanism for elevating and a cleaning head moving means for horizontally moving the cleaning head together with the head elevating mechanism and the member cleaning means; and the member cleaning means is in sliding contact with the mask plate. By applying a suction means for separating and removing the object to be cleaned from the cleaning member by sucking the cleaning member from the opposite side of the surface, paste is applied to the substrate through the pattern hole by the screen printing apparatus. With screen printing method to print I,
A printing step of performing a printing operation of printing a paste on the substrate by the screen printing unit;
A mask cleaning step of cleaning the lower surface of the mask plate by moving the cleaning head horizontally in a state where the cleaning head is raised and the cleaning member is pressed against the lower surface of the mask plate after the printing execution step is completed; ,
And a member cleaning step of removing a cleaning object impregnated in the cleaning member by the member cleaning means while sliding the cleaning member in contact with the lower surface of the mask plate by the cleaning head. Screen printing method.   The screen printing method according to claim 4, wherein the member cleaning step is executed concurrently with the mask cleaning step.   The screen printing method according to claim 4, wherein the medium cleaning process is executed during a cleaning standby period in which the mask cleaning process is not executed.

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