WO2023095290A1 - ミスト流量測定装置、超音波霧化システム及びミスト流量測定方法 - Google Patents
ミスト流量測定装置、超音波霧化システム及びミスト流量測定方法 Download PDFInfo
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- WO2023095290A1 WO2023095290A1 PCT/JP2021/043420 JP2021043420W WO2023095290A1 WO 2023095290 A1 WO2023095290 A1 WO 2023095290A1 JP 2021043420 W JP2021043420 W JP 2021043420W WO 2023095290 A1 WO2023095290 A1 WO 2023095290A1
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- mist
- flow rate
- imaging
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- mist flow
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- 239000003595 mist Substances 0.000 title claims abstract description 374
- 238000005259 measurement Methods 0.000 title claims abstract description 19
- 238000000889 atomisation Methods 0.000 title claims description 93
- 238000000691 measurement method Methods 0.000 title claims description 4
- 238000003384 imaging method Methods 0.000 claims abstract description 228
- 239000002994 raw material Substances 0.000 claims abstract description 132
- 238000000034 method Methods 0.000 claims abstract description 82
- 238000004364 calculation method Methods 0.000 claims abstract description 81
- 230000008569 process Effects 0.000 claims abstract description 66
- 238000012545 processing Methods 0.000 claims description 80
- 239000000470 constituent Substances 0.000 claims description 11
- 238000009795 derivation Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 47
- 238000011144 upstream manufacturing Methods 0.000 description 38
- 239000007788 liquid Substances 0.000 description 20
- 238000010586 diagram Methods 0.000 description 19
- 238000005303 weighing Methods 0.000 description 11
- 239000012159 carrier gas Substances 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/74—Devices for measuring flow of a fluid or flow of a fluent solid material in suspension in another fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
- G01F1/708—Measuring the time taken to traverse a fixed distance
- G01F1/7086—Measuring the time taken to traverse a fixed distance using optical detecting arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
Definitions
- mist flow rate measuring device that measures the flow rate of raw material mist under conditions where mist-containing gas containing raw material mist flows.
- FIG. 14 is an explanatory diagram showing the configuration (part 1) of a conventional ultrasonic atomization system.
- a conventional ultrasonic atomization system 2001 has an ultrasonic atomization device 201, a raw material solution supply section 20, and a flow control section 27 as main components.
- the ultrasonic atomization device 201 includes an atomization container 1, a liquid level detection sensor 25, and an ultrasonic transducer 2 as main components.
- a raw material solution 15 is accommodated in the atomization container 1 .
- a predetermined number of ultrasonic transducers 2 are arranged on the bottom surface of the atomization container 1 .
- the ultrasonic atomization device 201 having such a configuration, when ultrasonic vibration processing is performed in which the ultrasonic transducer 2 applies ultrasonic vibrations, vibrational energy of the ultrasonic waves is transmitted through the bottom surface of the container 1 for atomization, It is transmitted to the raw material solution 15 in the atomization container 1 .
- the raw material solution 15 shifts to mist with a particle size of 10 ⁇ m or less, whereby the raw material mist 3 is obtained in the atomization container 1 .
- a carrier gas G4 is supplied into the atomization container 1 from the gas supply pipe 4 .
- the carrier gas G4 is supplied into the atomization container 1 at a predetermined flow rate in order to convey the raw material mist 3 to the mist utilization processing section outside the ultrasonic atomization device 201 through the mist gas pipe 28 .
- mist-containing gas G3 containing the raw material mist 3 is conveyed outside within the mist gas pipe 28 .
- the atomization container 1 has a liquid level detection sensor 25 inside.
- the liquid level position detection sensor 25 is a sensor capable of detecting the liquid level height position of the raw material solution 15 . Part of the liquid surface position detection sensor 25 is immersed in the raw material solution 15 .
- the liquid surface position detection sensor 25 detects the position of the liquid surface 15a of the raw material solution 15 and obtains sensor information S25 indicating the detected position of the liquid surface 15a.
- the raw material solution supply unit 20 includes a container 21, a pump 22, a flow meter 23, and a raw material solution supply side pipe 24 as main components.
- the container 21 contains the raw material solution 15 .
- the flowmeter 23 measures the flow rate of the raw material solution supply side pipe 24 to obtain measured flow rate information S23 indicating the measured flow rate.
- the flow rate control unit 27 receives measured flow rate information S23 from the flow meter 23 and sensor information S25 from the liquid surface position detection sensor 25 .
- the flow rate control unit 27 always recognizes the flow rate of the raw material solution supply side pipe 24 based on the measured flow rate indicated by the measured flow rate information S23.
- the flow control unit 27 always recognizes the amount of change in the raw material solution 15 in the atomization container 1 from the position of the liquid surface 15a of the raw material solution 15 indicated by the sensor information S25.
- the flow rate control unit 27 executes raw material supply control processing for outputting a pump drive signal S27 that instructs the drive amount of the pump 22 so as to satisfy the flow rate control conditions described later. .
- the flow rate control condition described above is a condition that "the position of the liquid surface 15a of the raw material solution 15 indicated by the sensor information S25 is within an allowable range from a predetermined liquid surface height".
- the amount of change from the predetermined liquid level height of the raw material solution 15 in the atomization container 1 is recognized and recognized.
- a first flow rate estimation method is employed in which the flow rate of the raw material mist 3 contained in the mist-containing gas G3 is estimated from the amount of change in the raw material solution 15 obtained.
- FIG. 15 is an explanatory diagram showing the configuration (part 2) of a conventional ultrasonic atomization system.
- the ultrasonic atomization system 2002 has an ultrasonic atomization device 202, a raw material solution supply section 20, a weighing scale 26, and a flow control section 27B as main components.
- the ultrasonic atomization device 202 includes an atomization container 1 and an ultrasonic transducer 2 as main components.
- the ultrasonic atomization device 202 differs from the ultrasonic atomization device 201 in that it does not have the liquid level detection sensor 25 .
- the raw material solution supply unit 20 includes a container 21, a pump 22, a flow meter 23, and a raw material solution supply side pipe 24 as main components.
- the raw material solution supply unit 20 supplies the raw material solution 15 to the ultrasonic atomization device 100 .
- the container 21 contains the raw material solution 15 .
- the flowmeter 23 measures the flow rate of the raw material solution supply side pipe 24 to obtain measured flow rate information S23 indicating the measured flow rate.
- the weighing scale 26 supports the container 21 so that its weight can be measured.
- the weighing scale 26 measures the weight of the container 21 containing the raw material solution 15 and outputs a weighing signal S26 indicating the weight.
- the flow rate control unit 27B receives the measured flow rate information S23 from the flow meter 23 and the weighing signal S26 from the weighing meter 26.
- the flow rate control unit 27B always recognizes the flow rate of the raw material solution supply side pipe 24 based on the measured flow rate indicated by the measured flow rate information S23.
- the flow control unit 27B always recognizes the remaining amount of the raw material solution 15 in the container 21 from the weight of the container 21 indicated by the weighing signal S26.
- the flow rate control section 27B executes raw material supply control processing for outputting a pump drive signal S27B that instructs the drive amount of the pump 22 so as to satisfy the flow rate control conditions described later. .
- the flow rate control condition described above is a condition that "the amount of change per unit time of the weight indicated by the weighing signal S26 is within the allowable range".
- the conventional ultrasonic atomization system 2002 recognizes the amount of change in the raw material solution 15 in the container 21 from the weighing signal S26 obtained from the weighing scale 26.
- the ultrasonic atomization system 2002 employs a second flow rate estimation method of estimating the flow rate of the raw material mist 3 contained in the mist-containing gas G3 from the amount of change in the raw material solution 15 in the container 21 .
- the second flow estimation method is used, for example, in the atomization device disclosed in Patent Document 1.
- the conventional first and second flow rate estimation methods indirectly estimate the flow rate of the raw material mist 3 based on the amount of change in the raw material solution 15 in the atomization container 1 or the amount of change in the raw material solution 15 in the container 21. I am looking for
- the conventional method for measuring the flow rate of the raw material mist 3, including the first and second flow rate estimation methods, has the above-described estimation error factors, so the flow rate of the raw material mist 3 cannot be measured accurately. There was a problem.
- An object of the present disclosure is to solve the above problems and to provide a mist flow rate measuring device capable of accurately determining the flow rate of raw material mist.
- the mist flow rate measuring device of the present disclosure includes a mist imaging camera that acquires imaging information by performing imaging processing with at least a part of a mist distribution area in which mist-containing gas containing raw material mist flows as an imaging target area, and the imaging information. and a mist flow rate calculation unit that performs a mist flow rate calculation process for obtaining the flow rate of the raw material mist in the mist-containing gas based on is characterized by showing
- the mist flow rate calculation unit in the mist flow rate measuring device of the present disclosure executes mist flow rate calculation processing based on imaging information indicating a plurality of luminance values corresponding to the imaging target region.
- the mist flow rate measuring device of the present disclosure can accurately obtain the flow rate of the raw material mist by executing the mist flow rate arithmetic processing using the correlation parameter based on the imaging information.
- FIG. 1 is an explanatory diagram showing the configuration of an ultrasonic atomization system according to Embodiment 1 of the present disclosure
- FIG. 2 is an explanatory diagram showing an example of an imaging result by the camera shown in FIG. 1
- FIG. FIG. 2 is an explanatory diagram schematically showing an example of imaging information of the camera shown in FIG. 1
- It is explanatory drawing which shows the cross-sectional structure of upstream piping, transparent piping, and downstream piping which were shown in FIG. 4 is a flow chart showing a processing procedure for calculating a correlation parameter
- 4 is a flow chart showing a processing procedure of a raw material solution control method in the ultrasonic atomization system of Embodiment 1.
- FIG. 1 is an explanatory diagram showing the configuration of an ultrasonic atomization system according to Embodiment 1 of the present disclosure
- FIG. 2 is an explanatory diagram showing an example of an imaging result by the camera shown in FIG. 1
- FIG. 2 is an explanatory diagram schematically showing an example of
- FIG. 5 is a graph showing an example of mist flow rate measurement results obtained by the mist flow rate measuring device of Embodiment 1.
- FIG. 9 is a flowchart showing imaging processing and mist flow rate calculation processing according to a modification of Embodiment 1;
- FIG. 2 is an explanatory diagram showing the configuration of an ultrasonic atomization system according to Embodiment 2 of the present disclosure;
- FIG. 10 is an explanatory diagram showing the configuration of an ultrasonic atomization system according to Embodiment 3 of the present disclosure;
- FIG. 10 is an explanatory diagram showing the configuration of an ultrasonic atomization system according to Embodiment 4 of the present disclosure;
- FIG. 10 is an explanatory diagram showing the configuration of an ultrasonic atomization system according to Embodiment 5 of the present disclosure
- FIG. 13 is an explanatory diagram showing cross-sectional structures of upstream piping and downstream piping shown in FIG. 12 ; It is an explanatory view showing the composition (the 1) of the conventional ultrasonic atomization system. It is explanatory drawing which shows the structure (2) of the conventional ultrasonic atomization system.
- FIG. 1 is an explanatory diagram showing the configuration of an ultrasonic atomization system 1001 according to Embodiment 1 of the present disclosure.
- the ultrasonic atomization system 1001 includes the mist flow rate measuring device of the first embodiment.
- the mist flow rate measuring device of Embodiment 1 includes a camera 5, a light source 6, a transparent pipe 10, and a mist flow rate calculator 16 as main components.
- an ultrasonic atomization system 1001 includes an ultrasonic atomization device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream pipe 7 and a downstream pipe 8, in addition to the mist flow rate measuring device described above. It contains as a main component.
- the upstream pipe 7 and the downstream pipe 8 serve as auxiliary members of the mist flow rate measuring device for providing the transparent pipe 10 .
- the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8 are connected to each other, and the combination of the pipes 7, 10 and 9 constitutes a pipe for discharging the mist-containing gas G3 to the outside.
- the upstream pipe 7 serves as a first gas supply pipe
- the downstream pipe 8 serves as a second gas supply pipe
- the transparent pipe 10 serves as an imaging pipe.
- the ultrasonic atomization device 100 includes an atomization container 1 and an ultrasonic transducer 2 as main components.
- a raw material solution 15 is accommodated in the atomization container 1 .
- a predetermined number of ultrasonic transducers 2 (only one is shown in FIG. 1) are arranged on the bottom surface of the atomization container 1 .
- the raw material solution 15 for example, a material solution containing metal elements such as aluminum (Al) and zinc (Zn) can be considered.
- the ultrasonic atomization device 100 having such a configuration, when ultrasonic vibration processing is performed in which the ultrasonic transducer 2 applies ultrasonic vibrations, vibrational energy of the ultrasonic waves is transmitted through the bottom surface of the atomization container 1 to It is transmitted to the raw material solution 15 in the atomization container 1 .
- the raw material solution 15 shifts to mist with a particle size of 10 ⁇ m or less, whereby the raw material mist 3 is obtained in the atomization container 1 .
- a carrier gas G4 is supplied into the atomization container 1 from the gas supply pipe 4 .
- the carrier gas G4 is supplied at a predetermined flow rate. is supplied into the atomizing container 1 at .
- a high-concentration inert gas for example, can be employed as the carrier gas G4.
- the mist-containing gas G3 containing the raw material mist 3 propagates through the external discharge pipe composed of the combination of the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8, and is finally supplied to the outside.
- the mist-containing gas G3 means gas in which the raw material mist 3 is transported by the carrier gas G4.
- the raw material solution supply unit 20 includes a container 21, a pump 22, a flow meter 23, and a raw material solution supply side pipe 24 as main components.
- the container 21 contains the raw material solution 15 .
- the flowmeter 23 measures the flow rate of the raw material solution supply side pipe 24 to obtain measured flow rate information S23 indicating the measured flow rate.
- the mist-containing gas G3 containing the raw material mist 3 is supplied to the outside from the atomization container 1 via the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8.
- the insides of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8 serve as flow paths for the mist-containing gas G3. That is, the upstream pipe 7 and the downstream pipe 8 each have a mist distribution area inside.
- the ultrasonic atomization device 100 performs ultrasonic vibration treatment on the raw material solution 15 by the ultrasonic oscillator 2 to generate the raw material mist 3, and the carrier gas G4 causes the mist-containing gas G3 to flow into the mist distribution area.
- part of the mist circulation area in the transparent pipe 10, which is the imaging pipe becomes the imaging target region of the camera 5, which is the mist imaging camera.
- the light source 6 irradiates the imaging target area in the transparent pipe 10 with the incident light L1. Then, the incident light L1 is reflected in the imaging target area of the mist-containing gas G3 to obtain the reflected light L2.
- the camera 5 which is a mist imaging camera, executes imaging processing for imaging the reflected light L2. That is, the imaging process by the camera 5 is the imaging process of the reflected light L2 in which at least a part of the mist distribution area through which the mist-containing gas G3 containing the raw material mist 3 flows is taken as the imaging target area.
- the camera 5 executes imaging processing and acquires imaging information S5.
- the imaging information S5 indicates a plurality of luminance values of a plurality of pixels corresponding to the imaging target area.
- FIG. 2 is an explanatory diagram showing an example of imaging results by the camera 5.
- FIG. 3 is an explanatory diagram schematically showing an example of the imaging information S5.
- an imaging result in the imaging target region R5 is obtained.
- a dark black region has a higher luminance than a light black region.
- the camera 5 executes internal arithmetic processing based on the imaging result as shown in FIG. 2 to obtain imaging information S5 as shown in FIG.
- a plurality of pixels arranged in a matrix of N ( ⁇ 2) ⁇ M ( ⁇ 2) correspond to the imaging target region R5, and each of the plurality of pixels has a luminance value. ing.
- the larger the luminance value indicated by the pixel the higher the luminance.
- the imaging information S5 is information indicating a plurality of luminance values for a plurality of pixels. It should be noted that the imaging result shown in FIG. 2 and the imaging information S5 shown in FIG. 3 are merely examples, and there is no correlation between them.
- the mist flow rate calculation unit 16 executes mist flow rate calculation processing for obtaining the flow rate of the raw material mist 3 in the mist-containing gas G3 based on the imaging information S5 obtained from the camera 5, and mist flow rate information indicating the flow rate of the raw material mist 3. S16 is obtained.
- the mist flow rate information S ⁇ b>16 is given to the flow rate control section 17 .
- the mist flow rate calculation processing by the mist flow rate calculation unit 16 includes the following total sum value calculation processing and flow rate derivation processing.
- Total sum value calculation processing processing to obtain a luminance sum value that is the sum of a plurality of luminance values indicated by the imaging information S5
- Flow rate derivation processing processing for deriving the flow rate of the raw material mist 3 from the luminance sum value obtained by the sum value calculation processing
- the mist flow rate calculation unit 16 executes mist flow rate calculation processing including total sum value calculation processing and flow rate derivation processing based on a plurality of luminance values indicated by imaging information S5.
- FIG. 4 is an explanatory diagram showing the cross-sectional structures of the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8.
- FIG. 4 shows an XYZ orthogonal coordinate system.
- an upstream pipe 7, a transparent pipe 10, and a downstream pipe 8, which constitute external discharge pipes, are arranged along the Z direction parallel to the vertical direction. , and the transparent pipe 10 and the downstream pipe 8 are connected respectively.
- the mist-containing gas G3 supplied from the ultrasonic atomization device 100 flows inside each of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8 along the +Z direction. That is, the flow path for the mist-containing gas G3 is provided inside each of the upstream pipe 7 , the transparent pipe 10 and the downstream pipe 8 .
- the cross-sectional shape of each of the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8 is circular with a constant inner diameter, and the inner diameters of the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8 are set to be the same.
- the constituent material of the transparent pipe 10, which is the imaging pipe, has transparency. Furthermore, the constituent material of the pipe inner surface S10 of the transparent pipe 10 has hydrophilicity.
- the thickness of each of the upstream pipe 7, the transparent pipe 10 and the downstream pipe 8 is set arbitrarily.
- FIG. 5 is a flowchart showing the processing procedure for calculating the correlation parameter for obtaining the flow rate of the raw material mist 3.
- the correlation parameter calculation process is performed prior to the actual operation of the mist flow rate measuring device of the first embodiment.
- step ST11 a predetermined ultrasonic atomization device with a known flow rate of raw material mist 3 is prepared.
- the flow rate value of the raw material mist 3 is assumed to be a mist flow rate MT.
- imaging conditions for the camera 5 are set.
- This imaging condition is the same as the imaging condition of the camera 5 during the actual operation of the mist flow rate measuring device of the first embodiment.
- the camera 5 is the camera for the mist flow rate measuring device of the first embodiment.
- Imaging conditions may include, for example, the light intensity and wavelength of the light source 6, the irradiation angle of the incident light L1 to the transparent pipe 10, the imaging position of the camera 5, the imaging target area, the imaging light type (reflected light, transmitted light), and the like. It is desirable that the flow rate of the carrier gas G4 in a predetermined ultrasonic atomization device is set to be the same as the flow rate of the carrier gas G4 in the ultrasonic atomization device 100 .
- step ST13 the camera 5 starts imaging processing
- step ST14 the camera 5 acquires the imaging information S5 by executing the imaging processing for the reflected light L2.
- step ST15 a brightness sum value, which is the sum of a plurality of brightness values indicated by the imaging information S5, is calculated.
- the luminance total value LS is calculated.
- step ST16 the correlation parameter K1 is calculated.
- the mist flow rate MT has a relationship expressed as a linear function of the luminance total value LS as shown in Equation (1).
- MT K1 ⁇ LS+c1 (1) c1 is a constant.
- the correlation parameter K1 can be calculated from the following formula (2) based on formula (1).
- the correlation parameter K1 that can be calculated according to the flow shown in FIG. 5 can be prepared in advance for the mist flow rate measuring device of the first embodiment.
- FIG. 6 is a flow chart showing the processing procedure of the control method for the raw material solution 15 in the ultrasonic atomization system 1001 shown in FIG. This flow includes a mist flow rate measuring method using the mist flow rate measuring device of the first embodiment.
- This flow includes a mist flow rate measuring method using the mist flow rate measuring device of the first embodiment.
- step ST1 the imaging conditions for the mist flow rate measuring device of Embodiment 1 are set.
- the imaging conditions are the same as those for calculating the correlation parameter K1 shown in FIG.
- step ST2 the mist flow rate calculator 16 acquires the correlation parameter K1.
- a method of acquiring the correlation parameter K1 for example, a method of storing the correlation parameter K1 in an external storage device (not shown) and acquiring it by the mist flow rate calculation unit 16 as necessary is conceivable.
- step ST2 is a step of obtaining the correlation parameter K1 for deriving the mist flow rate MF from the total brightness value of a plurality of brightness values.
- step ST3 the mist flow rate measuring device of the first embodiment starts the imaging process for the reflected light L2 by the camera 5, and in step ST4, the camera 5 performs the imaging process to acquire the imaging information S5. .
- the above-described step ST4 is a step of using the camera 5 to perform imaging processing with at least a part of the mist distribution area in which the mist-containing gas G3 flows as an imaging target area, and acquiring imaging information S5.
- step ST2 the acquisition process of the correlation parameter K1 in step ST2 described above may be performed after step ST4 is performed and before step ST5 is performed.
- step ST5 the mist flow rate calculation unit 16 executes mist flow rate calculation processing to calculate the mist flow rate MF.
- the details of the mist flow rate calculation process will be described below.
- the mist flow rate calculation unit 16 first performs a total sum value calculation process for obtaining a brightness sum value, which is the sum of a plurality of brightness values indicated by the imaging information S5. After that, the mist flow rate calculation unit 16 executes a flow rate derivation process for deriving the mist flow rate MF from the luminance sum value obtained in the sum value calculation process.
- the mist flow rate MF can be obtained by the following formula (1A) to which the above formula (1) is applied.
- step ST5 based on the imaging information S5, using the correlation parameter K1, the mist flow rate calculation process is executed to obtain the mist flow rate MF in the mist-containing gas G3 from the luminance sum value LS of a plurality of luminance values. are doing.
- the mist flow rate measuring device of Embodiment 1 can measure the mist flow rate MF based on the imaging information S5 by executing the mist flow rate measuring method including steps ST1 to ST5.
- (L (liter)/min) can be considered as a unit of the mist flow rate MF.
- the mist flow rate information S16 indicating the mist flow rate MF calculated by the mist flow rate calculation unit 16 is output to the flow rate control unit 17 at the next stage.
- step ST6 the flow rate control unit 17 of the ultrasonic atomization system 1001 executes raw material supply control processing for controlling the supply state of the raw material solution 15 supplied from the container 21 of the raw material solution supply unit 20 to the atomization container 1. .
- the details of the processing of step ST6 by the flow control unit 17 will be described below.
- the flow control unit 17 which is a raw material supply control unit, receives the measured flow rate information S23 from the flow meter 23 and the mist flow rate information S16 from the mist flow calculation unit 16.
- the flow rate control unit 17 always recognizes the flow rate of the raw material solution supply side pipe 24 based on the measured flow rate indicated by the measured flow rate information S23.
- the flow control unit 17 always recognizes the flow rate of the raw material mist 3 from the mist flow rate MF indicated by the mist flow rate information S16.
- the flow rate control unit 17 executes raw material supply control processing for outputting a pump drive signal S17 that instructs the drive amount of the pump 22 so as to satisfy the flow rate control conditions described later. do.
- the flow rate control condition is, for example, the condition that "the mist flow rate MF indicated by the mist flow rate information S16 is within an allowable range from the reference mist flow rate".
- the flow control unit 17 recognizes the flow rate of the raw material mist 3 generated by the ultrasonic atomization device 100 based on the mist flow rate information S16 obtained from the mist flow calculation unit 16, and the flow rate of the recognized raw material mist 3 is is a predetermined flow rate within the allowable range from the reference mist flow rate.
- FIG. 7 is a graph showing an example of measurement results of the mist flow rate MF by the mist flow rate measuring device of Embodiment 1.
- the conversion flow rate F1 indicates the case where one ultrasonic transducer 2 is subjected to ultrasonic vibration processing
- the conversion flow rate F4 indicates the case where four ultrasonic transducers 2 are caused to perform ultrasonic vibration processing. indicates the case.
- the converted flow rate F4 is larger than the converted flow rate F1, and the converted flow rate F1 and the converted flow rate F4 are within the range of agreement, and the raw material supply control process by the flow rate control unit 17 is appropriately executed. I know there is.
- the mist flow rate calculation unit 16 in the mist flow rate measurement device of Embodiment 1 executes mist flow rate calculation processing based on imaging information S5 indicating a plurality of luminance values of a plurality of pixels corresponding to the imaging target region R5.
- a correlation parameter K1 for deriving the mist flow rate MF from the plurality of brightness values indicated by the imaging information S5 is obtained in advance. (See Figure 5).
- the mist flow rate measuring device of Embodiment 1 can accurately obtain the mist flow rate MF by executing the mist flow rate calculation process using the correlation parameter K1 based on the imaging information S5.
- the mist flow rate calculation unit 16 can perform simple and highly accurate mist flow rate calculation processing.
- the mist flow rate measuring device of the first embodiment suppresses the diffusion of the raw material mist 3 contained in the mist-containing gas G3 by providing the transparent pipe 10 serving as an imaging pipe having a flow path of the mist-containing gas G3 therein.
- the imaging process by the camera 5 can be executed in space.
- the constituent material of the transparent pipe 10 has transparency, the presence of the transparent pipe 10 does not affect the imaging process by the camera 5.
- the transparent pipe 10 serving as the imaging pipe is arranged along the vertical direction (Z direction), the liquid condensed in the transparent pipe 10 does not accumulate in the transparent pipe 10, and the liquid is (-Z direction) can be discharged.
- the mist flow rate measuring device of Embodiment 1 can minimize the influence of dew condensation in the transparent pipe 10 and perform imaging processing by the camera 5 .
- the constituent material of the pipe inner surface S10 of the transparent pipe 10 has hydrophilicity, even if dew condensation occurs in the transparent pipe 10, the phenomenon that the condensed liquid adheres to the pipe inner surface S10 of the transparent pipe 10 as water droplets is suppressed. can be done.
- the flow control unit 17 (raw material supply control unit) in the ultrasonic atomization system 1001 of Embodiment 1 adjusts the mist flow rate MF to a predetermined flow rate based on the mist flow rate information S16 obtained from the mist flow rate calculation unit 16. , the raw material supply control process is executed.
- the ultrasonic atomization system 1001 of Embodiment 1 can stabilize the mist flow rate MF generated from the ultrasonic atomization device 100 at a predetermined flow rate over a long period of time.
- Step ST5 in the mist flow rate measurement method executed by the mist flow rate measurement device of Embodiment 1 uses the correlation parameter K1 based on a plurality of luminance values of a plurality of pixels corresponding to the imaging target region R5. to obtain the mist flow rate MF.
- the mist flow rate measurement method of Embodiment 1 can accurately obtain the mist flow rate MF by using the correlation parameter K1.
- the imaging process by the camera 5 shows the case where the imaging process is performed once, but a modification in which the imaging process is performed a plurality of times in succession An example is possible.
- the imaging processing can be performed 20 times by continuously operating the camera 5 for 20 seconds.
- FIG. 8 is a flowchart showing imaging processing and mist flow calculation processing according to a modification of the mist flow rate measuring device of Embodiment 1.
- FIG. 8 is a flowchart showing imaging processing and mist flow calculation processing according to a modification of the mist flow rate measuring device of Embodiment 1.
- steps ST41 to ST44 corresponds to the processing of step ST4 in FIG. 6, and the processing of step ST50 corresponds to the processing of step ST5 in FIG.
- the control shown in steps ST41 to ST44 in FIG. 8 may be performed under the control of the mist flow calculation unit 16 or by a control mechanism such as a CPU built into the camera 5, for example. Also, the example shown in FIG. 8 shows a case where K ( ⁇ 2) imaging processing is performed.
- step ST42 the first imaging process is performed by the camera 5, and the obtained imaging information S5 is acquired as the first imaging information.
- step ST43 When step ST43 becomes "YES", it means that the first to K-th imaging information (plurality of imaging information) have been obtained by executing the imaging process K times (multiple times). It is conceivable that the camera 5 itself has the function of temporarily storing the 1st to Kth imaging information, or the mist flow calculation unit 16 is provided with the function.
- step ST50 which is executed when step ST43 is YES, the mist flow rate calculation unit 16 first executes mist flow rate calculation processing based on the first to Kth imaging information.
- the first to K-th imaging information are a plurality of pieces of imaging information obtained by executing the imaging process a plurality of times. The details of step ST50 will be described below.
- the mist flow rate calculation unit 16 performs total sum value calculation processing on each of the first to Kth imaging information to obtain the first to Kth luminance sum values LS(1) to LS(K) (a plurality of luminance sum values). ).
- the mist flow rate calculation unit 16 obtains the average value of the luminance summation values LS(1) to LS(K) as the total mean value, and obtains the mist flow rate MF from the total mean value using the correlation parameter K1.
- the mist flow rate MF can be obtained by the following formula (1B) to which the above formula (1) is applied.
- the mist flow rate deriving process of the mist flow rate calculation unit 16 derives the mist flow rate MF from the first to K-th total luminance values LS(1) to LS(K).
- the correlation parameter K1 in the modified example as in the actual operation of the mist flow rate measuring device of the modified example, from the average value of the first to Kth luminance sum values LS (1) to LS (K), It is desirable to calculate along the flow shown in FIG.
- the mist flow rate MF by deriving the mist flow rate MF from the total average value MS of the first to K-th luminance total values LS(1) to LS(K), which are a plurality of luminance total values, the accuracy is improved. high mist flow rate MF can be obtained.
- FIG. 9 is an explanatory diagram showing the configuration of an ultrasonic atomization system 1002 according to Embodiment 2 of the present disclosure.
- the ultrasonic atomization system 1002 includes the mist flow rate measuring device of the second embodiment.
- the mist flow rate measuring device of Embodiment 2 includes a camera 5, a light source 6, a transparent pipe 10, and a mist flow rate calculator 16 as main components.
- an ultrasonic atomization system 1002 includes an ultrasonic atomization device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream pipe 7, and a downstream pipe 8 in addition to the mist flow rate measuring device described above. It contains as a main component.
- the upstream pipe 7 and the downstream pipe 8 serve as auxiliary members of the mist flow rate measuring device for providing the transparent pipe 10 .
- the light source 6 irradiates the imaging target area in the transparent pipe 10 with the incident light L1. Then, the incident light L1 passes through the imaging target area of the mist-containing gas G3 to obtain the transmitted light L3.
- the camera 5, which is a camera for imaging mist, is arranged at a position facing the light source 6 with the transparent pipe 10 interposed therebetween, and performs imaging processing for imaging the transmitted light L3. That is, the imaging process by the camera 5 is the imaging process of the transmitted light L3 in which at least a part of the mist circulation area in which the mist-containing gas G3 containing the raw material mist 3 flows is taken as the imaging target area.
- the camera 5 executes imaging processing and acquires imaging information S5.
- the imaging information S5 includes a plurality of luminance values of a plurality of pixels corresponding to the imaging target area.
- the mist flow rate calculation unit 16 in the mist flow rate measuring device of the second embodiment executes mist flow rate calculation processing based on the imaging information S5 indicating a plurality of luminance values obtained by the imaging processing of the camera 5 for the transmitted light L3. ing.
- the mist flow rate measuring device of the second embodiment can accurately obtain the mist flow rate MF by executing the mist flow rate calculation process using the correlation parameter K1 based on the imaging information S5, as in the first embodiment. can.
- the camera 5, which is the mist imaging camera of the mist flow rate measuring device of Embodiment 3, can relatively easily obtain the imaging information S5 by executing the imaging process of imaging the transmitted light L3.
- FIG. 10 is an explanatory diagram showing the configuration of an ultrasonic atomization system 1003 according to Embodiment 3 of the present disclosure.
- the ultrasonic atomization system 1003 includes the mist flow rate measuring device of the third embodiment.
- the mist flow rate measuring device of Embodiment 3 includes a camera 5, a light source 6, a transparent pipe 10, a heater 12, and a mist flow rate calculator 16 as main components.
- the ultrasonic atomization system 1003 includes an ultrasonic atomization device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream pipe 7 and a downstream pipe 8 in addition to the mist flow rate measuring device described above. It contains as a main component.
- the upstream pipe 7 and the downstream pipe 8 serve as auxiliary members of the mist flow rate measuring device for providing the transparent pipe 10 .
- a heater 12 is provided in the vicinity of the transparent pipe 10, which is the imaging pipe, along the extending direction (Z direction) of the transparent pipe 10. .
- the heater 12 heats the transparent pipe 10 and its interior.
- the mist flow rate calculation unit 16 in the mist flow rate measuring device of the third embodiment executes mist flow rate calculation processing based on the imaging information S5 indicating a plurality of luminance values, as in the first embodiment.
- the mist flow rate measuring device of Embodiment 3 can accurately obtain the mist flow rate MF by executing the mist flow rate calculation process using the correlation parameter K1 based on the imaging information S5, as in the case of the first embodiment. can.
- the mist flow rate measuring device of Embodiment 3 further includes a heater 12, and the heater 12 can heat the transparent pipe 10, which is the pipe for imaging, and the inside, so that the occurrence of dew condensation in the transparent pipe 10 is suppressed. be able to.
- FIG. 11 is an explanatory diagram showing the configuration of an ultrasonic atomization system 1004 according to Embodiment 4 of the present disclosure.
- the ultrasonic atomization system 1004 includes the mist flow rate measuring device of the fourth embodiment.
- the mist flow rate measuring device of Embodiment 4 includes a light source 6, a transparent pipe 10, a mist flow rate calculator 16, and cameras 51 and 52 as main components.
- the ultrasonic atomization system 1004 includes the ultrasonic atomization device 100, the raw material solution supply unit 20, the flow control unit 17, the upstream pipe 7, and the downstream pipe 8 in addition to the mist flow rate measuring device described above. It has as a main component.
- the upstream pipe 7 and the downstream pipe 8 serve as auxiliary members of the mist flow rate measuring device for providing the transparent pipe 10 .
- part of the mist circulation area in the transparent pipe 10, which is the imaging pipe becomes the imaging target region of the camera 5, which is the mist imaging camera.
- the light source 6 irradiates the imaging target area in the transparent pipe 10 with the incident light L1. Then, the incident light L1 is reflected in the imaging target area of the mist-containing gas G3 to obtain two reflected lights L21 and L22 (a plurality of reflected lights). The reflected lights L21 and L22 are reflected in different directions and are in a relationship of not interfering with each other.
- cameras 51 and 52 which are a plurality of mist imaging cameras, are arranged for the reflected lights L21 and L22, which are a plurality of reflected lights.
- the camera 51 executes imaging processing for imaging the reflected light L21
- the camera 52 executes imaging processing for imaging the reflected light L22.
- the imaging process by the cameras 51 and 52 is the imaging process of the reflected lights L21 and L22 with at least a part of the mist distribution area through which the mist-containing gas G3 containing the raw material mist 3 flows as the imaging target area.
- the camera 51 performs imaging processing for the reflected light L21 and acquires imaging information S51.
- the imaging information S51 indicates a plurality of luminance values of a plurality of pixels corresponding to the reflected light L21 from the imaging target area.
- the camera 52 performs imaging processing for the reflected light L22 and obtains imaging information S52.
- the imaging information S52 includes a plurality of luminance values of a plurality of pixels corresponding to the reflected light L22 from the imaging target area.
- the reflected lights L21 and L22 do not interfere with each other, and the imaging information S51 and S52, which are multiple types of imaging information, indicate multiple luminance values with different contents.
- the mist flow rate calculation unit 16 executes mist flow rate calculation processing to obtain the flow rate of the raw material mist 3 in the mist-containing gas G3 based on the imaging information S51 and S52, which are multiple types of imaging information, and the mist indicating the flow rate of the raw material mist 3. Obtain flow rate information S16.
- the mist flow rate calculation process includes the following total sum value calculation process and flow rate derivation process.
- Total sum value calculation processing A first total luminance value that is the sum of a plurality of luminance values indicated by the imaging information S51 and a second total luminance value that is a sum of a plurality of luminance values indicated by the imaging information S52 are obtained. Processing to obtain the average value of the first and second luminance total values as the total luminance average value Flow rate derivation processing ... processing to derive the flow rate of the raw material mist 3 from the luminance total average value obtained in the total sum value calculation processing
- the mist flow rate MF can be obtained by the following formula (1C) to which the above formula (1) is applied.
- the mist flow rate calculation unit 16 executes mist flow rate calculation processing based on a plurality of luminance values indicated by the imaging information S51 and S52.
- the average value of the first and second luminance sum values is calculated from the average value of the first and second luminance sum values shown in FIG. It is desirable to calculate along the flow.
- the mist flow rate calculation unit 16 in the mist flow rate measuring device of Embodiment 4 executes mist flow rate calculation processing based on the imaging information S51 and S52, each of which indicates a plurality of luminance values.
- the mist flow rate measuring device of the fourth embodiment uses the correlation parameter K1 based on the imaging information S51 and S52 to execute the mist flow rate calculation process, thereby obtaining the mist flow rate MF with high accuracy. be able to.
- the mist flow rate calculation unit 16 executes mist flow rate calculation processing based on multifaceted imaging information S51 and S52 (multiple types of imaging information) obtained from cameras 51 and 52, which are a plurality of mist imaging cameras.
- the mist flow rate measuring device of Embodiment 4 can more accurately determine the flow rate of the raw material mist 3 .
- the mist flow rate calculation unit 16 of Embodiment 4 obtains the average value of the first and second luminance sum values when executing the total sum value calculation process, but the difference between the first and second luminance sum values , and one ratio may be higher than the other ratio.
- the ratio of the first total brightness value and the second total brightness value may be ⁇ 2:1 ⁇ .
- the configuration in which one light source 6 is provided is shown, but the number of light sources 6 may also be two in accordance with the number of cameras 51 and 52 .
- two cameras 51 and 52 are shown as a plurality of mist imaging cameras, but three or more mist imaging cameras may be used to obtain three or more types of imaging information.
- FIG. 12 is an explanatory diagram showing the configuration of an ultrasonic atomization system 1005 according to Embodiment 5 of the present disclosure.
- the ultrasonic atomization system 1005 includes the mist flow rate measuring device of the fifth embodiment.
- the mist flow rate measuring device of Embodiment 5 includes a camera 5, a light source 6, an upstream pipe 7, a downstream pipe 8, a pipe absent space 9, and a mist flow rate calculator 16 as main components.
- the ultrasonic atomization system 1005 includes an ultrasonic atomization device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream pipe 7 and a downstream pipe 8 in addition to the mist flow rate measuring device described above. It has as a main component.
- the upstream pipe 7 and the downstream pipe 8 are separated from each other with a pipe absent space 9 interposed therebetween, and the combination of the upstream pipe 7 and the downstream pipe 8 separated from each other constitutes a pipe for discharging the mist-containing gas G3 to the outside.
- the upstream pipe 7 serves as a first gas supply pipe
- the downstream pipe 8 serves as a second gas supply pipe
- the pipe-free space 9 serves as a clearance space.
- the upstream pipe 7 (first gas supply pipe) and the downstream pipe 8 (second gas supply pipe) are the main components of the mist flow rate measuring device that are indispensable for providing the pipe absent space 9. It works as an element.
- the mist-containing gas G3 containing the raw material mist 3 is supplied from the atomization container 1 to the outside through the upstream pipe 7, the pipe-absent space 9, and the downstream pipe 8.
- FIG. 13A and 13B are explanatory diagrams showing cross-sectional structures of the upstream pipe 7 and the downstream pipe 8.
- FIG. 13 shows an XYZ orthogonal coordinate system.
- each of the upstream pipe 7 and the downstream pipe 8 serves as a flow path for the mist-containing gas G3. That is, the upstream pipe 7 and the downstream pipe 8 each have a mist distribution area inside.
- a pipe-free space 9 exists as a clearance space between the upstream pipe 7 and the downstream pipe 8 .
- the interior of the pipe-free space 9 also serves as a flow path for the mist-containing gas G3. That is, the pipe-absent space 9 has a mist distribution area inside.
- the upstream pipe 7 and the downstream pipe 8 are arranged along the extension direction (+Z direction).
- the mist-containing gas G3 is conveyed by the carrier gas G4 at a constant flow rate, the mist-containing gas G3 flowing from the upstream pipe 7 into the pipe-absent space 9 flows along the +Z direction without leaking from the pipe-absent space 9 to the outside. and flows into the downstream pipe 8 .
- a part of the mist distribution area in the pipe-absent space 9, which is a clearance space becomes an imaging target area of the camera 5, which is a camera for imaging mist.
- the light source 6 irradiates the imaging target area in the pipe absent space 9 with the incident light L1. Then, the incident light L1 is reflected in the imaging target area of the mist-containing gas G3 to obtain the reflected light L2.
- the camera 5 which is a mist imaging camera, executes imaging processing for imaging the reflected light L2.
- the camera 5 executes imaging processing and acquires imaging information S5.
- the imaging information S ⁇ b>5 includes a plurality of luminance values of a plurality of pixels corresponding to an imaging target area within the pipe absence space 9 .
- the mist flow rate calculation unit 16 in the mist flow rate measuring device of the fifth embodiment executes mist flow rate calculation processing based on the imaging information S5 indicating a plurality of luminance values, as in the first embodiment.
- the mist flow rate measuring device of Embodiment 5 can obtain the mist flow rate MF with high accuracy by executing the mist flow rate arithmetic processing using the correlation parameter K1 based on the imaging information S5, as in the case of the first embodiment. can.
- the imaging target area of the camera 5, which is a camera for capturing mist exists in the pipe-absent space 9, which is a gap space
- the camera 5 in the mist flow rate measuring device of Embodiment 5 is not affected by condensation at all. It is possible to accurately perform imaging processing on the light L2.
- each embodiment can be freely combined, and each embodiment can be appropriately modified or omitted.
- the heater 12 used in Embodiment 3 can also be used in Embodiments 2, 4 and 5, or the structure having the transparent pipe 10 in Embodiments 2 to 4 can be used in Embodiments. It is possible to change the structure to provide a pipe absent space 9 indicated by 5 .
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Abstract
Description
(2) 原料溶液15から原料ミスト3をミスト化するミスト化効率が設定時より低下すると、その低下分、推定された流量と真の原料ミスト3の流量とのズレが大きくなる。
図1は本開示の実施の形態1である超音波霧化システム1001の構成を示す説明図である。超音波霧化システム1001は実施の形態1のミスト流量測定装置を含んでいる。実施の形態1のミスト流量測定装置は、カメラ5、光源6、透明配管10、及びミスト流量演算部16を主要構成要素として含んでいる。
流量導出処理…総和値演算処理で得た輝度総和値から原料ミスト3の流量を導く処理
c1は定数である。
図1~図7で示す実施の形態1のミスト流量測定装置では、カメラ5による撮像処理は1回の撮像処理を実行する場合を示したが、連続して複数回の撮像処理を実行する変形例が考えられる。
図9は本開示の実施の形態2である超音波霧化システム1002の構成を示す説明図である。超音波霧化システム1002は実施の形態2のミスト流量測定装置を含んでいる。実施の形態2のミスト流量測定装置は、カメラ5、光源6、透明配管10、及びミスト流量演算部16を主要構成要素として含んでいる。
図10は本開示の実施の形態3である超音波霧化システム1003の構成を示す説明図である。超音波霧化システム1003は実施の形態3のミスト流量測定装置を含んでいる。実施の形態3のミスト流量測定装置は、カメラ5、光源6、透明配管10、ヒーター12、及びミスト流量演算部16を主要構成要素として含んでいる。
図11は本開示の実施の形態4である超音波霧化システム1004の構成を示す説明図である。超音波霧化システム1004は実施の形態4のミスト流量測定装置を含んでいる。実施の形態4のミスト流量測定装置は、光源6、透明配管10、ミスト流量演算部16、カメラ51及び52を主要構成要素として含んでいる。
流量導出処理…総和値演算処理で得た輝度総和平均値から原料ミスト3の流量を導く処理
図12は本開示の実施の形態5である超音波霧化システム1005の構成を示す説明図である。超音波霧化システム1005は実施の形態5のミスト流量測定装置を含んでいる。実施の形態5のミスト流量測定装置は、カメラ5、光源6、上流配管7、下流配管8、配管不在空間9及びミスト流量演算部16を主要構成要素として含んでいる。
本開示は詳細に説明されたが、上記した説明は、すべての局面において、例示であって、本開示がそれに限定されるものではない。例示されていない無数の変形例が、本開示の範囲から外れることなく想定され得るものと解される。
2 超音波振動子
3 原料ミスト
4 ガス供給配管
5,51,52 カメラ
6 光源
7 上流配管
8 下流配管
9 配管不在空間
10 透明配管
12 ヒーター
16 ミスト流量演算部
17 流量制御部
20 原料溶液供給部
1001~1005 超音波霧化システム
L1 入射光
L2,L21,L22 反射光
L3 透過光
Claims (13)
- 原料ミストを含むミスト含有ガスが流れるミスト流通領域の少なくとも一部を撮像対象領域として撮像処理を実行して撮像情報を取得するミスト撮像用カメラと、
前記撮像情報に基づき、前記ミスト含有ガスにおける前記原料ミストの流量を求めるミスト流量演算処理を実行するミスト流量演算部とを備え、
前記撮像情報は、前記撮像対象領域に対応する複数の画素における複数の輝度値を示していることを特徴とする、
ミスト流量測定装置。 - 請求項1記載のミスト流量測定装置であって、
前記撮像対象領域に入射光を照射する光源をさらに備え、
前記ミスト撮像用カメラが実行する前記撮像処理は、前記入射光が前記撮像対象領域にて反射した反射光を撮像する処理を含む、
ミスト流量測定装置。 - 請求項1記載のミスト流量測定装置であって、
前記撮像対象領域に入射光を照射する光源をさらに備え、
前記ミスト撮像用カメラが実行する前記撮像処理は、前記入射光が前記撮像対象領域を透過した透過光を撮像する処理を含む、
ミスト流量測定装置。 - 請求項1から請求項3のうち、いずれか1項に記載のミスト流量測定装置であって、
前記ミスト流量演算部による前記ミスト流量演算処理は、
前記撮像情報が示す前記複数の輝度値の総和である輝度総和値を求める総和値演算処理と、
前記輝度総和値から前記原料ミストの流量を導く流量導出処理とを含む、
ミスト流量測定装置。 - 請求項4記載のミスト流量測定装置であって、
前記撮像処理は複数回の撮像処理を含み、
前記撮像情報は、前記複数回の撮像処理の実行によって得られた複数の撮像情報を含み、前記輝度総和値は複数の輝度総和値を含み、
前記ミスト流量演算部は、前記複数の撮像情報それぞれに対し前記総和値演算処理を行い前記複数の輝度総和値を求め、
前記流量導出処理は、前記複数の輝度総和値から前記原料ミストの流量を導く、
ミスト流量測定装置。 - 請求項1から請求項5のうち、いずれか1項に記載のミスト流量測定装置であって、
前記ミスト流通領域を内部に有する撮像用配管をさらに備え、
前記撮像用配管内の前記ミスト流通領域の一部が前記撮像対象領域となり、
前記撮像用配管の構成材料は透明性を有する、
ミスト流量測定装置。 - 請求項6記載のミスト流量測定装置であって、
前記撮像用配管は鉛直方向に沿って配置される、
ミスト流量測定装置。 - 請求項6または請求項7に記載のミスト流量測定装置であって、
前記撮像用配管を加熱するヒーターをさらに備える、
ミスト流量測定装置。 - 請求項6から請求項8のうち、いずれか1項に記載のミスト流量測定装置であって、
前記撮像用配管の内面の構成材料は親水性を有する、
ミスト流量測定装置。 - 請求項1から請求項5のうち、いずれか1項に記載のミスト流量測定装置であって、
各々が前記ミスト流通領域を内部に有する第1及び第2のガス供給用配管をさらに備え、前記第1のガス供給用配管と前記第2のガス供給用配管との間に隙間空間が存在し、前記隙間空間は内部に前記ミスト流通領域を有し、前記ミスト含有ガスは前記隙間空間を介して前記第1及び第2のガス供給用配管間を流れ、
前記隙間空間内における前記ミスト流通領域の一部が前記撮像対象領域となる、
ミスト流量測定装置。 - 請求項1から請求項10のうち、いずれか1項に記載のミスト流量測定装置であって、
前記ミスト撮像用カメラは複数のミスト撮像用カメラを含み、前記撮像情報は前記複数のミスト撮像用カメラに対応する複数種の撮像情報を含み、前記複数種の撮像情報は異なる内容であり、
前記ミスト流量演算部は、前記複数種の撮像情報に基づき、前記ミスト流量演算処理を実行する、
ミスト流量測定装置。 - 請求項1から請求項11のうち、いずれか1項に記載のミスト流量測定装置と、
原料溶液に対し超音波振動処理を行い前記原料ミストを生成し、前記原料ミストを含む前記ミスト含有ガスを前記ミスト流通領域に流す超音波霧化装置と、
前記超音波霧化装置に前記原料溶液を供給する原料溶液供給部と、
前記原料溶液供給部から前記超音波霧化装置に供給される前記原料溶液の供給状態を制御する原料供給制御処理を実行する原料供給制御部とを備え、
前記ミスト流量測定装置の前記ミスト流量演算部は、前記ミスト流量演算処理の実行時に前記原料ミストの流量を示すミスト流量情報を出力し、
前記原料供給制御部は、前記ミスト流量情報に基づき、前記原料ミストの流量が所定の流量になるように、前記原料供給制御処理を実行する、
超音波霧化システム。 - (a) ミスト撮像用カメラを用いて、原料ミストを含むミスト含有ガスが流れるミスト流通領域の少なくとも一部を撮像対象領域として撮像処理を実行して撮像情報を取得するステップを備え、前記撮像情報は、前記撮像対象領域に対応する複数の画素における複数の輝度値を示し、
(b) 前記複数の輝度値から前記原料ミストの流量を導くための相関パラメータを取得するステップと、
(c) 前記撮像情報に基づき、前記相関パラメータを用いて、前記複数の輝度値から前記ミスト含有ガスにおける前記原料ミストの流量を求めるミスト流量演算処理を実行するステップとをさらに備える、
ミスト流量測定方法。
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CN202180083210.XA CN116583719A (zh) | 2021-11-26 | 2021-11-26 | 雾流量测量装置超声波雾化系统及雾流量测量方法 |
PCT/JP2021/043420 WO2023095290A1 (ja) | 2021-11-26 | 2021-11-26 | ミスト流量測定装置、超音波霧化システム及びミスト流量測定方法 |
JP2022532017A JP7309307B1 (ja) | 2021-11-26 | 2021-11-26 | ミスト流量測定装置、超音波霧化システム及びミスト流量測定方法 |
KR1020237019095A KR20230098866A (ko) | 2021-11-26 | 2021-11-26 | 미스트 유량 측정 장치, 초음파 안개화 시스템 및 미스트 유량 측정 방법 |
US18/270,213 US20240102841A1 (en) | 2021-11-26 | 2021-11-26 | Mist flow rate measuring apparatus, ultrasonic atomization system, and mist flow rate measuring method |
TW111136808A TW202325411A (zh) | 2021-11-26 | 2022-09-28 | 霧滴流量測量裝置、超音波霧化系統及霧滴流量測量方法 |
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JP (1) | JP7309307B1 (ja) |
KR (1) | KR20230098866A (ja) |
CN (1) | CN116583719A (ja) |
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WO (1) | WO2023095290A1 (ja) |
Citations (5)
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JPS5570716A (en) * | 1978-11-22 | 1980-05-28 | Dainippon Printing Co Ltd | Detection method of spray amount of germicide and its unit |
JPH0933419A (ja) * | 1995-07-18 | 1997-02-07 | Dainippon Printing Co Ltd | 半濁物測定方法及び装置 |
JPH09264769A (ja) * | 1996-03-28 | 1997-10-07 | Jasco Corp | 冷凍サイクルの潤滑油戻り量計測装置 |
WO2006100814A1 (ja) * | 2005-03-23 | 2006-09-28 | Ohm Electric Co., Ltd. | 流動状態観測装置および流動状態観測方法 |
JP2012177598A (ja) * | 2011-02-25 | 2012-09-13 | Japan Polyethylene Corp | 管路監視装置及びそれを用いた管路監視方法 |
Family Cites Families (5)
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JPS5939608Y2 (ja) * | 1978-11-20 | 1984-11-06 | 塩野義製薬株式会社 | 点滴型流量検出素子 |
JPS6158336U (ja) | 1984-09-20 | 1986-04-19 | ||
JP2007021608A (ja) * | 2005-07-13 | 2007-02-01 | Daido Metal Co Ltd | セミドライ加工システム |
JP2009240898A (ja) * | 2008-03-31 | 2009-10-22 | Toyota Motor Corp | 霧状液体流量測定装置及び霧状液体流量測定方法 |
JP6172422B1 (ja) * | 2015-10-23 | 2017-08-02 | 株式会社村田製作所 | 点滴筒および輸液セット |
-
2021
- 2021-11-26 KR KR1020237019095A patent/KR20230098866A/ko unknown
- 2021-11-26 US US18/270,213 patent/US20240102841A1/en active Pending
- 2021-11-26 JP JP2022532017A patent/JP7309307B1/ja active Active
- 2021-11-26 CN CN202180083210.XA patent/CN116583719A/zh active Pending
- 2021-11-26 WO PCT/JP2021/043420 patent/WO2023095290A1/ja active Application Filing
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2022
- 2022-09-28 TW TW111136808A patent/TW202325411A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5570716A (en) * | 1978-11-22 | 1980-05-28 | Dainippon Printing Co Ltd | Detection method of spray amount of germicide and its unit |
JPH0933419A (ja) * | 1995-07-18 | 1997-02-07 | Dainippon Printing Co Ltd | 半濁物測定方法及び装置 |
JPH09264769A (ja) * | 1996-03-28 | 1997-10-07 | Jasco Corp | 冷凍サイクルの潤滑油戻り量計測装置 |
WO2006100814A1 (ja) * | 2005-03-23 | 2006-09-28 | Ohm Electric Co., Ltd. | 流動状態観測装置および流動状態観測方法 |
JP2012177598A (ja) * | 2011-02-25 | 2012-09-13 | Japan Polyethylene Corp | 管路監視装置及びそれを用いた管路監視方法 |
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CN116583719A (zh) | 2023-08-11 |
TW202325411A (zh) | 2023-07-01 |
US20240102841A1 (en) | 2024-03-28 |
KR20230098866A (ko) | 2023-07-04 |
JPWO2023095290A1 (ja) | 2023-06-01 |
JP7309307B1 (ja) | 2023-07-18 |
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