WO2023060733A1 - 一种蒸发舟挡板组件 - Google Patents

一种蒸发舟挡板组件 Download PDF

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Publication number
WO2023060733A1
WO2023060733A1 PCT/CN2021/136669 CN2021136669W WO2023060733A1 WO 2023060733 A1 WO2023060733 A1 WO 2023060733A1 CN 2021136669 W CN2021136669 W CN 2021136669W WO 2023060733 A1 WO2023060733 A1 WO 2023060733A1
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WIPO (PCT)
Prior art keywords
annular
arc
baffle
plate
cover plate
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PCT/CN2021/136669
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English (en)
French (fr)
Inventor
熊继光
肖平
赵志国
刘家梁
李梦洁
赵东明
秦校军
张赟
王雪玲
Original Assignee
中国华能集团清洁能源技术研究院有限公司
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Application filed by 中国华能集团清洁能源技术研究院有限公司 filed Critical 中国华能集团清洁能源技术研究院有限公司
Publication of WO2023060733A1 publication Critical patent/WO2023060733A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • the invention relates to the field of new energy technologies, in particular to an evaporation boat baffle assembly.
  • evaporation coating is a common coating deposition process.
  • the baffle of the evaporation coating equipment can improve the gradient of the evaporation rate at different angles to improve the uniformity of the evaporation coating.
  • the baffles commonly used in evaporation coating equipment are generally semicircular or rectangular baffles, and the number is two.
  • the direction of opening and closing, the baffle adjustment window range is small, and the applicable evaporation scenarios are limited.
  • the present invention provides an evaporation boat baffle assembly to enhance the adjustment range of the window of the baffle.
  • the present invention provides the following technical solutions:
  • An evaporation boat baffle assembly including an annular bottom plate, an annular cover plate and a plurality of arc-shaped baffles,
  • annular bottom plate, the arc-shaped baffle plate and the annular cover plate are sequentially arranged from bottom to top,
  • a plurality of arc-shaped baffles are stacked sequentially from bottom to top, the first end of the arc-shaped baffle is rotatably connected to the annular bottom plate, and the second end of the arc-shaped baffle is connected to the annular cover plate sliding fit, the sliding direction of the second end of the arc-shaped baffle is along the radial direction of the annular cover plate,
  • first end of the arc-shaped baffle and the second end of the arc-shaped baffle are respectively the two ends of the arc where the arc-shaped baffle is located
  • the annular cover plate is rotatably matched with the annular bottom plate, the diameter of the inner circle of the annular cover plate is at least equal to the diameter of the inner circle of the annular bottom plate, and the annular cover plate rotates around its own axis while driving the arc
  • the second end of the baffle slides along the radial direction of the annular cover plate to adjust the size of the window surrounded by the plurality of arc-shaped baffles, so as to realize the adjustment of the evaporation angle.
  • the annular cover plate is provided with a chute along the radial direction of the annular cover plate, and a slider is provided at the second end of the arc-shaped baffle plate, so that The ring-shaped cover plate is slidably matched with the second end of the arc-shaped baffle through a slider that slidably fits with the chute, and the number of the chute is equal to the number of the arc-shaped baffle.
  • a rotating rod is provided at the first end of the arc-shaped baffle, a groove is provided on the annular bottom plate, and the arc-shaped baffle cooperates with the rotating rod
  • the grooves are rotatably connected with the annular bottom plate, and the number of the grooves is equal to the number of the arc baffles.
  • the width of the arc-shaped baffle is at most equal to the width of the annular bottom plate, and the arc-shaped baffle is arranged coaxially with the annular bottom plate.
  • the outer ring of the annular cover plate is provided with a lever, and the lever is used to drive the annular cover plate to rotate around its own axis.
  • the driving rod is integrally formed with the annular cover plate.
  • the outer ring of the annular bottom plate is provided with a limit baffle
  • the limit baffle is higher than the upper surface of the annular bottom plate
  • the annular cover is positioned at the limit inside the circle surrounded by the position baffle and the outer ring of the annular cover is in close contact with the inner wall of the limit plate
  • a limit slot is provided on the limit baffle, and the driving rod passes through the limit groove to connect with the annular cover plate, and the limit groove is used to move the drive rod along the annular bottom plate.
  • the limit in the circumferential direction is used to prevent the sliding block from sliding out of the sliding groove caused by the transition of the driving lever.
  • annular pressing plate is further included, the annular pressing plate is located above the annular cover plate, and is used to press the annular cover plate on the annular bottom plate, and the annular pressing plate
  • the diameter of the inner ring is at least equal to the diameter of the inner ring of the annular cover plate, and the annular pressure plate is detachably connected to the annular bottom plate.
  • a hook is provided on the outer ring of the annular pressure plate, and a slot matching the hook is provided on the limit baffle, and the hook can be inserted into the inside the card slot.
  • the evaporator boat baffle assembly further includes a rotating rod and a driving assembly, the driving assembly is used to drive the rotating rod to rotate around its own axis, and the upper end of the rotating rod is connected to the annular bottom plate through a connecting rod. connected, the axis of the rotating rod is parallel to the axis of the annular bottom plate, and the rotating rod is perpendicular to the connecting rod.
  • the rotating rod is connected to the connecting rod through a connecting piece
  • the connecting rod is a prismatic rod, and the rotating rod is a cylindrical rod;
  • the connector is provided with a first through hole, a second through hole and a third through hole,
  • the first through hole is used for the connecting rod to pass through
  • the second through hole is used for passing the rotating rod, the hole wall of the second through hole is provided with an internal thread, and the rotating rod is provided with an external thread matching the internal thread,
  • a locking bolt is arranged in the third through hole, and the locking bolt is used to lock the connecting rod in the first through hole, and the third through hole is perpendicular to the second through hole.
  • the rotating rod is hingedly connected to the connecting rod
  • An angle adjuster for adjusting the angle between the annular bottom plate and the horizontal plane is also included.
  • the angle adjuster is a telescopic cylinder
  • the cylinder body of the telescopic cylinder is hinged to the rotating rod
  • the telescopic rod of the telescopic cylinder is hinged to the connecting rod.
  • the angle adjuster is a screw assembly
  • the screw of the screw assembly is hinged to the rotating rod
  • the nut of the screw assembly is hinged to the connecting rod
  • the lead screw is driven by a servo motor.
  • the drive assembly includes a motor, a first gear and a second gear, the output shaft of the motor is connected to the first gear, and the lower end of the rotating rod is connected to the A second gear is connected, and the second gear meshes with the first gear.
  • the drive assembly includes a motor, a first sprocket, a chain and a second sprocket, the output shaft of the motor is connected to the first sprocket, and the second sprocket A sprocket is connected to the lower end of the rotating rod, and the first sprocket and the second sprocket are connected through the chain.
  • the evaporation boat baffle plate assembly provided by the present invention includes an annular bottom plate, an annular cover plate and a plurality of arc-shaped baffle plates.
  • the annular cover plate rotates around its own axis, and at the same time, the annular cover plate drives the second end of the arc-shaped baffle to slide along the radial direction of the annular cover plate. At this time, the first end of the arc-shaped baffle rotates around the connection position with the annular bottom plate.
  • the size of the window surrounded by the plates is also different, which increases the adjustment range of the window of the evaporation boat baffle assembly and enhances the adaptability of the evaporation boat baffle assembly to the evaporation scene.
  • Fig. 1 is a schematic structural view of an evaporation boat baffle assembly provided by an embodiment of the present invention
  • Fig. 2 is a front view of the evaporation boat baffle assembly provided by the embodiment of the present invention
  • Fig. 3 is a structural schematic diagram of the connection between the annular bottom plate and the connecting rod provided by the embodiment of the present invention.
  • Fig. 4 is a schematic structural view of an annular cover plate provided by an embodiment of the present invention.
  • Fig. 5 is a schematic structural diagram of an arc-shaped baffle provided by an embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of a connector provided by an embodiment of the present invention.
  • Fig. 7 is a schematic structural diagram of a connector provided by an embodiment of the present invention.
  • the invention discloses an evaporation boat baffle assembly to enhance the adjustment range of the window of the baffle.
  • the invention discloses an evaporation boat baffle assembly, which comprises an annular bottom plate 1 , an annular cover plate 2 and a plurality of arc-shaped baffle plates 3 .
  • the annular base plate 1, the arc-shaped baffle plate 3 and the annular cover plate 2 are arranged sequentially from bottom to top, the annular base plate 1 is located at the bottom layer, the arc-shaped baffle plate 3 is located on the upper surface of the annular base plate 1, and the annular cover plate 2 is located on the arc-shaped baffle plate. 3, and the annular cover plate 2 is connected with the annular bottom plate 1, and the annular cover plate 2 is used to press the arc-shaped baffle plate 3 on the upper surface of the annular bottom plate 1.
  • a plurality of arc-shaped baffles 3 are stacked sequentially from bottom to top along the circumference of the arc-shaped bottom plate. After the plurality of arc-shaped baffles 3 are stacked in sequence from bottom to top, the plurality of arc-shaped baffles 3 can completely cover the ring the upper surface of the bottom plate 1.
  • the layered arrangement means that the second end of the upper curved baffle 3 of two adjacent curved baffles 3 covers the upper surface of the first end of the lower curved baffle 3 .
  • the first end of the arc-shaped baffle 3 is rotationally connected with the annular bottom plate 1, the second end of the arc-shaped baffle 3 is slidably connected with the annular cover 2, and the sliding direction of the second end of the arc-shaped baffle 3 is along the direction of the annular cover 2 radial direction.
  • the annular cover plate 2 is rotatably matched with the annular base plate 1, the diameter of the inner ring of the annular cover plate 2 is at least equal to the diameter of the inner ring of the annular base plate 1, and the annular cover plate 2 rotates around its own axis while the annular cover plate 2 drives the arc baffle plate 3
  • the second end of the second end slides along the radial direction of the annular cover plate 2 to adjust the size of the window surrounded by a plurality of arc-shaped baffles 3 to realize the adjustment of the evaporation angle.
  • the evaporation boat baffle plate assembly disclosed in this solution includes an annular bottom plate 1 , an annular cover plate 2 and a plurality of arc-shaped baffle plates 3 .
  • the annular cover plate 2 rotates around its own axis, and at the same time, the annular cover plate 2 drives the second end of the arc-shaped baffle plate 3 to slide along the radial direction of the annular cover plate 2.
  • connection position of 1 is rotated to realize the adjustment of the size of the window surrounded by multiple arc-shaped baffles 3, and to adjust the evaporation angle of the evaporation boat baffle assembly; the second end of the arc-shaped baffle 3 slides along the annular cover 2 If the distance is different, the size of the window surrounded by multiple arc-shaped baffles 3 is also different, which increases the adjustment range of the window of the evaporation boat baffle assembly and enhances the adaptability of the evaporation boat baffle assembly to the evaporation scene.
  • the size of the window surrounded by multiple arc-shaped baffles 3 can be increased or decreased, but the rotation direction of the annular cover plate 2 is opposite during the process of increasing or decreasing the size of the window.
  • the shape of the window surrounded by a plurality of arc-shaped baffles 3 is not limited to a centrally symmetrical window such as a circle or a polygon, and may also be a non-centrosymmetrically shaped window such as a shuttle shape or a willow leaf shape.
  • the window is a circle or a regular polygon.
  • the windows enclosed by the arc-shaped baffle 3 have different shapes, and the shape of the inner arc of the arc-shaped baffle 3 needs to be adjusted appropriately to meet the requirements of the deposition and coating environment for windows of different shapes.
  • the arc baffle 3 is provided with a chute along the radial direction of the arc baffle 3, the second end of the arc baffle 3 is provided with a slider, and the arc baffle 3
  • the chute of 3 is slidably matched with the slider of the arc-shaped baffle 3, that is, the arc-shaped baffle 3 is slidably matched with the second end of the arc-shaped baffle 3 through the slider which is slidably matched with the chute.
  • the number of chutes is equal to the number of arc-shaped baffles 3 , and only one slider is provided on each arc-shaped baffle 3 .
  • the first end of the arc-shaped baffle 3 is provided with a rotating rod
  • the annular base 1 is provided with a groove
  • the rotating rod of the arc-shaped baffle 3 can extend into the groove of the annular base 1
  • the rotating rod can rotate in the groove, that is, the arc-shaped baffle plate 3 is rotatably matched with the annular bottom plate 1 through the groove matched with the rotating rod.
  • the number of grooves is equal to the number of arc-shaped baffles 3, and only one rotating rod is arranged on each arc-shaped baffle 3, and the rotating rod is perpendicular to the plane where the arc-shaped baffles 3 are located. .
  • the width of the arc baffle 3 is at most equal to the width of the annular bottom plate 1, that is, when the size of the window surrounded by a plurality of arc baffles 3 is the largest, the projection of the arc baffle 3 along the axial direction of the annular bottom plate 1 all falls on In the projection of the annular bottom plate 1 along its own axial direction, when the size of the window surrounded by a plurality of arc-shaped baffles 3 is the smallest, most of the projections of the arc-shaped baffles 3 along the axial direction of the annular bottom plate 1 fall on the center of the annular bottom plate 1.
  • the inner ring, and the minimum size of the window surrounded by the plurality of arc-shaped baffles 3 can be zero.
  • the width of the arc-shaped baffle 3 is equal to the width of the annular bottom plate 1 .
  • the arc-shaped baffle 3 is arranged coaxially with the annular bottom plate 1 .
  • the rotation of the annular cover plate 2 can be to apply a power to the outer ring of the annular cover plate 2 .
  • the outer ring of the annular cover plate 2 is provided with a driving rod 4, and an external force is applied to the driving rod 4, and the driving rod 4 drives the ring-shaped cover plate 2 to rotate around its own axis.
  • the lever 4 is arranged along the radial direction of the annular cover plate 2 .
  • the driving rod 4 and the annular cover plate 2 are integrally formed in this solution.
  • connection method between the driving lever 4 and the annular cover plate 2 is not limited to integral molding, and other connection methods are also possible, which are not specifically limited here.
  • the outer ring of the annular bottom plate 1 is provided with a limit baffle, the limit baffle is higher than the upper surface of the annular bottom plate 1, the annular cover plate 2 is located in the ring formed by the limit plate, and the annular cover When the plate 2 rotates, the outer ring of the annular cover plate 2 can be attached to the inner wall of the limiting plate.
  • the inner wall of the limiting plate is the wall of the limiting plate close to the inner ring of the annular bottom plate 1 .
  • the limit baffle is integrally formed with the annular bottom plate 1 .
  • a limiting groove is provided on the limiting baffle, and the driving rod 4 passes through the limiting groove and is connected with the annular cover plate 2, and the limiting groove is used for limiting the driving rod 4.
  • the limit groove limits the position of the driving rod 4 in two directions.
  • the limit in the first direction is the limit along the axial direction of the annular bottom plate 1, preventing the lever 4 from swinging along the axial direction during the process of driving the annular cover plate 2 to rotate, and the limit in the second direction is along the axis of the annular bottom plate 1.
  • the limit in the circumferential direction prevents the slide block from sliding out of the chute due to the rotation transition of the driving lever 4.
  • the structure of the chute is described here.
  • the chute is arranged along the radial direction of the annular cover plate 2.
  • the chute is a linear chute.
  • One end of the chute in the direction of length extension communicates with the inner ring of the annular cover plate 2.
  • the other end of the groove in the length extension direction is a closed end, which does not penetrate the annular cover plate 2 along the radial direction of the annular cover plate 2 .
  • the evaporator boat baffle assembly disclosed in this solution also includes an annular pressure plate, which is located above the annular cover plate 2 and connected to the annular bottom plate 1 for pressing the annular cover plate 2 on the annular bottom plate 1.
  • the diameter of the inner circle of the annular pressure plate in this solution is at least equal to the diameter of the inner circle of the annular cover plate 2, that is, the diameter of the inner circle of the annular pressure plate needs to be greater than or equal to The diameter of the inner ring of the annular cover plate 2.
  • the annular pressing plate is connected to the annular bottom plate 1 in a detachable connection manner.
  • a hook is provided on the outer ring of the annular pressing plate, and a slot matching the hook is provided on the limit baffle, and the hook can be embedded in the slot, that is, the annular pressing plate passes through the hook and The matching card slot is connected with the limit baffle.
  • the outer ring of the annular pressure plate is connected to the limit baffle through rivets.
  • the outer ring of the annular pressure plate is connected to the limit baffle by screws.
  • the evaporation boat baffle assembly disclosed in this solution also includes a rotating rod 5 and a driving assembly.
  • the upper end of the rotating rod 5 is connected with the annular base plate 1 through the connecting rod 6, the connecting rod 6 is perpendicular to the rotating rod 5, the axis of the rotating rod 5 is parallel to the axis of the annular base plate 1, and the rotating rod 5 is connected with the drive assembly.
  • the driving assembly drives the rotating rod 5 to rotate around its own axis, and the rotating rod 5 drives the connecting rod 6 to rotate around the axis of the rotating rod 5, and finally drives the annular bottom plate 1 to rotate around the axis of the rotating rod 5.
  • the annular bottom plate 1 is driven to rotate by the rotating rod 5 and the driving assembly, and the position of the annular bottom plate 1 is changed.
  • the evaporation boat baffle assembly disclosed in this solution can not only realize the adjustment of the window range, but also realize the adjustment of the position, which further enhances the adaptability of the evaporation boat baffle assembly to the evaporation scene.
  • the rotating rod 5 and the connecting rod 6 adopt a connection mode of fixed connection.
  • the fixed connection method can be that the rotating rod 5 and the connecting rod 6 are connected by bolts, or the rotating rod 5 and the connecting rod 6 are connected by riveting, or the rotating rod 5 Adhesively connected with the connecting rod 6.
  • the rotating rod 5 is connected to the connecting rod 6 through a connecting piece 7 .
  • the connecting rod 6 is a prismatic rod, and the rotating rod 5 is a cylindrical rod.
  • the connecting rod 6 is provided with a first through hole 71, a second through hole 72 and a third through hole 73, the first through hole 71 is used for passing the connecting rod 6, and the second through hole 72 is used for passing the rotating rod 5.
  • the hole wall of the second through hole 72 is provided with an internal thread
  • the rotating rod 5 is provided with an external thread that cooperates with the internal thread, that is, the rotating rod 5 is connected with the connecting piece 7 through the external thread that cooperates with the internal thread
  • the third through A locking bolt is arranged in the hole 73 for locking the connecting rod in the first through hole 71 .
  • the first through hole 71, the second through hole 72 and the third through hole 73 are vertical in pairs, the shape of the first through hole 71 is the same as that of the connecting rod 6, and the shape of the second through hole 72 The shape is the same as that of the rotating rod 5 , the first through hole 71 is not connected to the second through hole 72 , and the first through hole 71 is connected to the third through hole 73 .
  • the rotating rod 5 and the connecting rod 6 may also be connected in a flexible manner, specifically, the rotating rod 5 and the connecting rod 6 are hingedly connected.
  • the angle between the rotating rod 5 and the connecting rod 6 can be adjusted, so that the connecting rod 6 can move along the axis of the annular floor.
  • the rotating rod 5 and the connecting rod 6 are connected through an angle adjuster, and the angle adjuster is used to adjust the angle between the annular bottom plate 1 and the horizontal plane.
  • the angle regulator is a telescopic cylinder
  • the cylinder body of the telescopic cylinder is hinged to the rotating rod 5
  • the telescopic rod of the telescopic cylinder is hinged to the connecting rod 6 .
  • the angle adjuster is a lead screw assembly
  • the lead screw of the lead screw assembly is hinged to the rotating rod 5
  • the nut of the lead screw assembly is hinged to the connecting rod 6
  • the lead screw is driven by a servo motor , the servo motor is connected with the rotating rod 5 .
  • driver component There are many ways to implement the driver component.
  • the drive assembly includes a motor, a first gear and a second gear, the output shaft of the motor is connected to the first gear, the lower end of the rotating rod 5 is connected to the second gear, and the second gear is connected to the first gear. gears meshing.
  • the output shaft of the motor drives the first gear to rotate, and the first gear meshes with the second gear to drive the second gear to rotate, finally realizing that the second gear drives the rotating rod 5 to rotate.
  • the drive assembly includes a motor, a first sprocket, a chain and a second sprocket, the output shaft of the motor is connected to the first sprocket, and the second sprocket is connected to the lower end of the rotating rod 5 , the first sprocket and the second sprocket are connected by a chain.
  • the output shaft of the motor drives the first sprocket to rotate, and the first sprocket drives the second sprocket to rotate through the chain, finally realizing that the second sprocket drives the rotating rod 5 to rotate.
  • the driving component is not limited to the above implementation manner, and may also be other driving components capable of implementing the present solution, which is not specifically limited here.

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Abstract

本发明公开了一种蒸发舟挡板组件，包括环形底板、环形盖板和多个弧形挡板。环形盖板绕自身轴线转动，同时环形盖板带动弧形挡板的第二端沿环形盖板的径向方向滑动，此时弧形挡板的第一端绕与环形底板的连接位置转动，实现多个弧形挡板围成的窗口的尺寸的调节，实现蒸发舟挡板组件对蒸发角度的调节；弧形挡板的第二端沿环形盖板滑动的距离不同，多个弧形挡板围成的窗口的尺寸也就不同，增大了蒸发舟挡板组件窗口的调节范围，增强了蒸发舟挡板组件对蒸镀场景的适应性。

Description

一种蒸发舟挡板组件
本申请要求于2021年10月11日提交中国专利局、申请号为202122445849.8、发明名称为“一种蒸发舟挡板组件”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及新能源技术领域，特别涉及一种蒸发舟挡板组件。
背景技术
在半导体制造领域，蒸发镀膜是一种常见的镀膜沉积工艺。
蒸发镀膜设备的挡板能够改善蒸发速率在不同角度的渐变性，以提高蒸发镀膜的均匀性。
现有技术中，蒸发镀膜设备常用的挡板一般为半圆形或者矩形形状的挡板，且个数为两个，两个挡板通过气动装置控制开合，两个挡板只能在特定的方向开合，挡板调节窗口范围小，适应的蒸镀场景有限。
发明内容
有鉴于此，本发明提供了一种蒸发舟挡板组件，以增强挡板的窗口的调节范围。
为实现上述目的，本发明提供如下技术方案：
一种蒸发舟挡板组件，包括环形底板、环形盖板和多个弧形挡板，
所述环形底板、所述弧形挡板和所述环形盖板自下而上依次设置，
多个所述弧形挡板自下而上依次层叠布置，所述弧形挡板的第一端与所述环形底板转动连接，所述弧形挡板的第二端与所述环形盖板滑动配合，所述弧形挡板的第二端的滑动方向沿所述环形盖板的径向方向，
其中，所述弧形挡板的第一端和所述弧形挡板的第二端分别为所述弧形挡板的所在圆弧的两端，
所述环形盖板与所述环形底板转动配合，所述环形盖板的内圈的直径至少等于所述环形底板的内圈的直径，所述环形盖板绕自身轴线转动同时带动所述弧形挡板的第二端沿所述环形盖板的径向方向滑动以调节多个所述弧形挡板围成的窗口的尺寸，实现蒸发角的调节。
优选地，在上述蒸发舟挡板组件中，所述环形盖板上开设有沿所述环形盖板的径向方向的滑槽，所述弧形挡板的第二端设置有滑块，所述环形盖板通过与所述滑槽滑动配合的滑块实现与所述弧形挡板的第二端的滑动配合，所述滑槽的个数与所述弧形挡板的个数相等。
优选地，在上述蒸发舟挡板组件中，所述弧形挡板的第一端设置有转动杆，所述环形底板上设置有凹槽，所述弧形挡板通过与所述转动杆配合的凹槽与所述环形底板转动连接，所述凹槽的个数与所述弧形挡板的个数相等。
优选地，在上述蒸发舟挡板组件中，所述弧形挡板的宽度至多等于所述环形底板的宽度，所述弧形挡板与所述环形底板同轴布置。
优选地，在上述蒸发舟挡板组件中，所述环形盖板的外圈设置有拨杆，所述拨杆用于驱动所述环形盖板绕自身轴线转动。
优选地，在上述蒸发舟挡板组件中，所述拨杆与所述环形盖板一体成型。
优选地，在上述蒸发舟挡板组件中，所述环形底板的外圈设置有限位挡板， 所述限位挡板高于所述环形底板的上表面，所述环形盖板位于所述限位挡板围成的圆环内且所述环形盖板的外圈与所述限位板的内壁贴合，
所述限位挡板上开设有限位槽，所述拨杆穿过所述限位槽与所述环形盖板连接，所述限位槽用于对所述拨杆进行沿所述环形底板的周向方向上的限位，用于防止所述拨杆转动过渡导致所述滑块滑出所述滑槽。
优选地，在上述蒸发舟挡板组件中，还包括环形压板，所述环形压板位于所述环形盖板的上方，用于压紧所述环形盖板在所述环形底板上，所述环形压板的内圈的直径至少等于所述环形盖板的内圈的直径，所述环形压板与所述环形底板可拆卸连接。
优选地，在上述蒸发舟挡板组件中，所述环形压板的外圈设置有卡钩，所述限位挡板上设置有与所述卡钩配合的卡槽，所述卡钩能够嵌入所述卡槽内。
优选地，在上述蒸发舟挡板组件中，还包括旋转杆和驱动组件，所述驱动组件用于驱动所述旋转杆绕自身轴线转动，所述旋转杆的上端通过连接杆与所述环形底板连接，所述旋转杆的轴线与所述环形底板的轴线平行，所述旋转杆与所述连接杆垂直。
优选地，在上述蒸发舟挡板组件中，所述旋转杆与所述连接杆通过连接件连接，
所述连接杆为棱柱形杆，所述旋转杆为圆柱形杆；
所述连接件上开设有第一通孔、第二通孔和第三通孔，
其中，所述第一通孔用于供所述连接杆穿过，
所述第二通孔用于供所述旋转杆穿过，所述第二通孔的孔壁设置有内螺纹，所述旋转杆上设置有与所述内螺纹配合的外螺纹，
所述第三通孔内设置锁紧螺栓，所述锁紧螺栓用于锁紧所述连接杆在所述第一通孔内，所述第三通孔与所述第二通孔垂直。
优选地，在上述蒸发舟挡板组件中，所述旋转杆与所述连接杆铰接连接，
还包括用于调节所述环形底板与水平面之间的夹角的角度调节器。
优选地，在上述蒸发舟挡板组件中，所述角度调节器为伸缩缸，所述伸缩缸的缸体与所述旋转杆铰接，所述伸缩缸的伸缩杆与所述连接杆铰接。
优选地，在上述蒸发舟挡板组件中，所述角度调节器为丝杠组件，所述丝杠组件的丝杠与所述旋转杆铰接，所述丝杠组件的螺母与所述连接杆铰接，所述丝杠通过伺服电机驱动。
优选地，在上述蒸发舟挡板组件中，所述驱动组件包括电机、第一齿轮和第二齿轮，所述电机的输出轴与所述第一齿轮连接，所述旋转杆的下端与所述第二齿轮连接，所述第二齿轮与所述第一齿轮啮合。
优选地，在上述蒸发舟挡板组件中，所述驱动组件包括电机、第一链轮、链条和第二链轮，所述电机的输出轴与所述第一链轮连接，所述第二链轮与所述旋转杆的下端连接，所述第一链轮和所述第二链轮通过所述链条连接。
从上述技术方案可以看出，本发明提供的蒸发舟挡板组件，包括环形底板、环形盖板和多个弧形挡板。环形盖板绕自身轴线转动，同时环形盖板带动弧形挡板的第二端沿环形盖板的径向方向滑动，此时弧形挡板的第一端绕与环形底板的连接位置转动，实现多个弧形挡板围成的窗口的尺寸的调节，实现蒸发舟挡板组件对蒸发角度的调节；弧形挡板的第二端沿环形盖板滑动的距离不同，多个弧形挡板围成的窗口的尺寸也就不同，增大了蒸发舟挡板组件窗口的调节 范围，增强了蒸发舟挡板组件对蒸镀场景的适应性。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明实施例提供的蒸发舟挡板组件的结构示意图；
图2为本发明实施例提供的蒸发舟挡板组件的主视图；
图3为本发明实施例提供的环形底板与连接杆连接的结构示意图；
图4为本发明实施例提供的环形盖板的结构示意图；
图5为本发明实施例提供的弧形挡板的结构示意图；
图6为本发明实施例提供的连接件的结构示意图；
图7为本发明实施例提供的连接件的结构示意图。
附图标记如下：
1、环形底板，2、环形盖板，3、弧形挡板，4、拨杆，5、旋转杆，6、连接杆，7、连接件，71、第一通孔，72、第二通孔，73、第三通孔。
具体实施方式
本发明公开了一种蒸发舟挡板组件，以增强挡板的窗口的调节范围。
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清 楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图1-图7。
本发明公开了一种蒸发舟挡板组件，包括环形底板1、环形盖板2和多个弧形挡板3。
环形底板1、弧形挡板3和环形盖板2自下而上依次设置，环形底板1位于最下层，弧形挡板3位于环形底板1的上表面，环形盖板2位于弧形挡板3上，且环形盖板2与环形底板1连接，环形盖板2用于压紧弧形挡板3在环形底板1的上表面。
多个弧形挡板3沿着弧形底板的周向自下而上依次层叠布置，多个弧形挡板3自下而上依次层叠布置后，多个弧形挡板3能够完全覆盖环形底板1的上表面。依次层叠布置的意思是，相邻两个弧形挡板3的位于上层的弧形挡板3的第二端覆盖在位于下层的弧形挡板3的第一端的上表面。
弧形挡板3的第一端与环形底板1转动连接，弧形挡板3的第二端与环形盖板2滑动连接，且弧形挡板3的第二端的滑动方向沿环形盖板2的径向方向。
环形盖板2与环形底板1转动配合，环形盖板2的内圈的直径至少等于环形底板1的内圈的直径，环形盖板2绕自身轴线转动同时环形盖板2带动弧形挡板3的第二端沿环形盖板2的径向方向滑动，调节多个弧形挡板3围成的窗口的尺寸，实现蒸发角的调节。
此处需要说明的是，多个弧形挡板3围成的窗口的尺寸进行调节时，仅环形盖板2转动，环形底板1不随环形盖板2一起发生转动。
本方案公开的蒸发舟挡板组件，包括环形底板1、环形盖板2和多个弧形挡板3。环形盖板2绕自身轴线转动，同时环形盖板2带动弧形挡板3的第二端沿环形盖板2的径向方向滑动，此时弧形挡板3的第一端绕与环形底板1的连接位置转动，实现多个弧形挡板3围成的窗口的尺寸的调节，实现蒸发舟挡板组件对蒸发角度的调节；弧形挡板3的第二端沿环形盖板2滑动的距离不同，多个弧形挡板3围成的窗口的尺寸也就不同，增大了蒸发舟挡板组件窗口的调节范围，增强了蒸发舟挡板组件对蒸镀场景的适应性。
多个弧形挡板3围成的窗口的尺寸可以增大，也可以减小，只不过窗口的尺寸增大或者减小的过程，环形盖板2的转动方向相反。
多个弧形挡板3围成的窗口的形状不限于圆形或者多边形等中心对称的窗口，还可以为梭形或者柳叶形等非中心对称的窗口。优选地，窗口为圆形或者正多边形。
弧形挡板3围成的窗口的形状不同，需要对弧形挡板3的内圆弧的形状进行适当调整，以满足沉积镀膜环境对不同形状的窗口的需求。
在本申请的一个具体实施例中，弧形挡板3上开设有沿弧形挡板3的径向方向的滑槽，弧形挡板3的第二端设置有滑块，弧形挡板3的滑槽与弧形挡板3的滑块滑动配合，即弧形挡板3通过与滑槽滑动配合的滑块与弧形挡板3的第二端滑动配合。此处需要说明的是，滑槽的个数与弧形挡板3的个数相等，每个弧形挡板3上仅设置一个滑块。
弧形挡板3的第二端与环形盖板2连接时，上下相邻的两个弧形挡板3的滑块分别与周向上位置相邻的滑槽配合。
在本申请的一个具体实施例中，弧形挡板3的第一端设置有转动杆，环形 底板1上设置有凹槽，弧形挡板3的转动杆能够伸入环形底板1的凹槽内，转动杆能够在凹槽内转动，即弧形挡板3通过与转动杆配合的凹槽与环形底板1转动配合。此处需要说明的是，凹槽的个数与弧形挡板3的个数相等，每个弧形挡板3上仅设置一个转动杆，且转动杆与弧形挡板3所在的平面垂直。
弧形挡板3的第一端与环形底板1连接时，上下相邻的两个弧形挡板3的转动杆分别与周向上位置相邻的凹槽配合。
弧形挡板3的宽度至多等于环形底板1的宽度，即在多个弧形挡板3围成的窗口的尺寸最大时，弧形挡板3沿环形底板1的轴线方向的投影全部落在环形底板1沿自身轴线方向的投影内，在多个弧形挡板3围成的窗口的尺寸最小时，弧形挡板3沿环形底板1的轴线方向的投影大部分落在环形底板1的内圈，且多个弧形挡板3围成的窗口的尺寸最小可以为零。优选地，弧形挡板3的宽度与环形底板1的宽度相等。
优选地，弧形挡板3与环形底板1同轴布置。
环形盖板2的转动可以是对环形盖板2的外圈施加一个动力。
在本方案的一个具体实施例中，环形盖板2的外圈设置有拨杆4，外力施加在拨杆4上，通过拨杆4驱动环形盖板2绕自身轴线转动。
优选地，拨杆4沿环形盖板2的径向方向设置。
为了降低拨杆4与环形盖板2的连接难度，本方案中拨杆4与环形盖板2一体成型。
拨杆4与环形盖板2的连接方式不限于一体成型，还可以为其他连接方式，在此不做具体限定。
为了进一步优化上述技术方案，环形底板1的外圈设置有限位挡板，限位 挡板高于环形底板1的上表面，环形盖板2位于限位板围设成的圆环内，环形盖板2转动时，环形盖板2的外圈能够与限位板的内壁贴合。此处需要说明的是，限位板的内壁为限位板靠近环形底板1的内圈的壁。
优选地，限位挡板与环形底板1一体成型。
限位挡板上开设有限位槽，拨杆4穿过限位槽与环形盖板2连接，限位槽用于对拨杆4进行限位。
限位槽对拨杆4进行两个方向的限位。第一方向的限位为沿环形底板1的轴线方向的限位，防止拨杆4在带动环形盖板2转动的过程中发生沿轴线方向的摆动，第二方向的限位为沿环形底板1的周向方向的限位，防止拨杆4转动过渡导致滑块滑出滑槽。
此处对滑槽的结构进行说明，滑槽沿环形盖板2的径向方向设置，滑槽为直线型滑槽，滑槽的长度延伸方向的一端与环形盖板2的内圈连通，滑槽的长度延伸方向的另一端为封闭端，并没有沿环形盖板2的径向方向贯穿环形盖板2。
为了进一步提高蒸发舟挡板组件的结构稳定性，本方案公开的蒸发舟挡板组件还包括环形压板，环形压板位于环形盖板2的上方且与环形底板1连接，用于压紧环形盖板2在环形底板1上。
为了避免环形压板对蒸发舟挡板组件的蒸发角度产生影响，本方案中环形压板的内圈的直径至少等于环形盖板2的内圈的直径，即环形压板的内圈的直径需要大于或者等于环形盖板2的内圈的直径。
此处需要说明的是，拨杆4带动环形盖板2转动时，环形压板和环形底板1均不发生转动，另外，弧形挡板3、环形盖板2、环形压板和环形底板1同 轴布置。
环形压板与环形底板1采用可拆卸的连接方式连接。
在本方案的一个具体实施例中，环形压板的外圈设置有卡钩，限位挡板上设置有与卡钩配合的卡槽，卡勾能够嵌入卡槽内，即环形压板通过与卡钩配合的卡槽与限位挡板连接。
在本方案的另一个具体实施例中，环形压板的外圈与限位挡板通过铆钉连接。
在本方案的另一个具体实施例中，环形压板的外圈与限位挡板通过螺钉连接。
本方案公开的蒸发舟挡板组件还包括旋转杆5和驱动组件。
旋转杆5的上端通过连接杆6与环形底板1连接，连接杆6与旋转杆5垂直，旋转杆5的轴线与环形底板1的轴线平行，旋转杆5与驱动组件连接。
具体工作时，驱动组件驱动旋转杆5绕自身轴线转动，旋转杆5带动连接杆6绕旋转杆5的轴线转动，最终带动环形底板1绕旋转杆5的轴线转动。
通过旋转杆5和驱动组件带动环形底板1转动，改变环形底板1的位置。
本方案公开的蒸发舟挡板组件不仅可以实现窗口范围的调节，而且能够实现位置的调节，进一步增强了蒸发舟挡板组件对蒸镀场景的适应性。
旋转杆5与连接杆6采用固定连接的连接方式，固定连接的方式可以为旋转杆5与连接杆6通过螺栓连接，也可以为旋转杆5与连接杆6铆接连接，也可以为旋转杆5与连接杆6粘接连接。
在本申请的一些实施例中，旋转杆5与连接杆6通过连接件7连接。
连接杆6为棱柱形杆，旋转杆5为圆柱形杆。
连接杆6上开设有第一通孔71、第二通孔72和第三通孔73，第一通孔71用于供连接杆6穿过，第二通孔72用于供旋转杆5穿过，第二通孔72的孔壁设置有内螺纹，旋转杆5上设置有与内螺纹配合的外螺纹，即旋转杆5通过与内螺纹配合的外螺纹与连接件7连接，第三通孔73内设置有锁紧螺栓，锁紧螺栓用于锁紧连接杆在第一通孔71内。
如图6和7所示，第一通孔71、第二通孔72和第三通孔73两两垂直，第一通孔71的形状与连接杆6的形状相同，第二通孔72的形状与旋转杆5的形状相同，第一通孔71和第二通孔72不连通，第一通孔71与第三通孔73连通。
旋转杆5与连接杆6也可以采用活动连接的连接方式，具体的，旋转杆5与连接杆6铰接连接。
本方案中旋转杆5与连接杆6之间的角度可以进行调节，使连接杆6发生沿环形地板的轴线方向的运动。具体的，旋转杆5与连接杆6通过角度调节器连接，角度调节器用于调节环形底板1与水平面之间的夹角。
在本方案的一个具体实施例中，角度调节器为伸缩缸，伸缩缸的缸体与旋转杆5铰接，伸缩缸的伸缩杆与连接杆6铰接。
在本方案的另一个具体实施例中，角度调节器为丝杠组件，丝杠组件的丝杠与旋转杆5铰接，丝杠组件的螺母与连接杆6铰接，所述丝杠通过伺服电机驱动，伺服电机与旋转杆5连接。
驱动组件有多种实现方式。
在本方案的一个具体实施例中，驱动组件包括电机、第一齿轮和第二齿轮，电机的输出轴与第一齿轮连接，旋转杆5的下端与第二齿轮连接，第二齿轮与 第一齿轮啮合。
工作时，电机的输出轴带动第一齿轮转动，第一齿轮与第二齿轮啮合，带动第二齿轮转动，最终实现第二齿轮带动旋转杆5转动。
在本方案的另一个具体实施例中，驱动组件包括电机、第一链轮、链条和第二链轮，电机的输出轴与第一链轮连接，第二链轮与旋转杆5的下端连接，第一链轮和第二链轮通过链条连接。
工作时，电机的输出轴带动第一链轮转动，第一链轮通过链条带动第二链轮转动，最终实现第二链轮带动旋转杆5转动。
驱动组件不限于上述实现方式，还可以为其他能够实现本方案的驱动组件，在此不做具体限定。
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。

Claims (16)

  1. 一种蒸发舟挡板组件，其特征在于，包括环形底板(1)、环形盖板(2)和多个弧形挡板(3)，
    所述环形底板(1)、所述弧形挡板(3)和所述环形盖板(2)自下而上依次设置，
    多个所述弧形挡板(3)自下而上依次层叠布置，所述弧形挡板(3)的第一端与所述环形底板(1)转动连接，所述弧形挡板(3)的第二端与所述环形盖板(2)滑动配合，所述弧形挡板(3)的第二端的滑动方向沿所述环形盖板(2)的径向方向，
    其中，所述弧形挡板(3)的第一端和所述弧形挡板(3)的第二端分别为所述弧形挡板(3)的所在圆弧的两端，
    所述环形盖板(2)与所述环形底板(1)转动配合，所述环形盖板(2)的内圈的直径至少等于所述环形底板(1)的内圈的直径，所述环形盖板(2)绕自身轴线转动同时带动所述弧形挡板(3)的第二端沿所述环形盖板(2)的径向方向滑动以调节多个所述弧形挡板(3)围成的窗口的尺寸，实现蒸发角的调节。
  2. 根据权利要求1所述的蒸发舟挡板组件，其特征在于，所述环形盖板(2)上开设有沿所述环形盖板(2)的径向方向的滑槽，所述弧形挡板(3)的第二端设置有滑块，所述环形盖板(2)通过与所述滑槽滑动配合的滑块实现与所述弧形挡板(3)的第二端的滑动配合，所述滑槽的个数与所述弧形挡板(3)的个数相等。
  3. 根据权利要求1所述的蒸发舟挡板组件，其特征在于，所述弧形挡板(3)的第一端设置有转动杆，所述环形底板(1)上设置有凹槽，所述弧形挡板(3)通过与所述转动杆配合的凹槽与所述环形底板(1)转动连接，所述凹槽的个数与所述弧形挡板(3)的个数相等。
  4. 根据权利要求1所述的蒸发舟挡板组件，其特征在于，所述弧形挡板(3)的宽度至多等于所述环形底板(1)的宽度，所述弧形挡板(3)与所述环形底板(1)同轴布置。
  5. 根据权利要求2所述的蒸发舟挡板组件，其特征在于，所述环形盖板(2)的外圈设置有拨杆(4)，所述拨杆(4)用于驱动所述环形盖板(2)绕自身轴线转动。
  6. 根据权利要求5所述的蒸发舟挡板组件，其特征在于，所述拨杆(4)与所述环形盖板(2)一体成型。
  7. 根据权利要求5所述的蒸发舟挡板组件，其特征在于，所述环形底板(1)的外圈设置有限位挡板，所述限位挡板高于所述环形底板(1)的上表面，所述环形盖板(2)位于所述限位挡板围成的圆环内且所述环形盖板(2)的外圈与所述限位板的内壁贴合，
    所述限位挡板上开设有限位槽，所述拨杆(4)穿过所述限位槽与所述环形盖板(2)连接，所述限位槽用于对所述拨杆(4)进行沿所述环形底板(1)的周向方向上的限位，用于防止所述拨杆(4)转动过渡导致所述滑块滑出所述滑槽。
  8. 根据权利要求7所述的蒸发舟挡板组件，其特征在于，还包括环形压板，所述环形压板位于所述环形盖板(2)的上方，用于压紧所述环形盖板(2) 在所述环形底板(1)上，所述环形压板的内圈的直径至少等于所述环形盖板(2)的内圈的直径，所述环形压板与所述环形底板(1)可拆卸连接。
  9. 根据权利要求8所述的蒸发舟挡板组件，其特征在于，所述环形压板的外圈设置有卡钩，所述限位挡板上设置有与所述卡钩配合的卡槽，所述卡钩能够嵌入所述卡槽内。
  10. 根据权利要求1所述的蒸发舟挡板组件，其特征在于，还包括旋转杆(5)和驱动组件，所述驱动组件用于驱动所述旋转杆(5)绕自身轴线转动，所述旋转杆(5)的上端通过连接杆(6)与所述环形底板(1)连接，所述旋转杆(5)的轴线与所述环形底板(1)的轴线平行，所述旋转杆(5)与所述连接杆(6)垂直。
  11. 根据权利要求10所述的蒸发舟挡板组件，其特征在于，所述旋转杆(5)与所述连接杆(6)通过连接件(7)连接，
    所述连接杆(6)为棱柱形杆，所述旋转杆(5)为圆柱形杆；
    所述连接件(7)上开设有第一通孔(71)、第二通孔(72)和第三通孔(73)，
    其中，所述第一通孔(71)用于供所述连接杆(6)穿过，
    所述第二通孔(72)用于供所述旋转杆(5)穿过，所述第二通孔(72)的孔壁设置有内螺纹，所述旋转杆(5)上设置有与所述内螺纹配合的外螺纹，
    所述第三通孔(73)内设置锁紧螺栓，所述锁紧螺栓用于锁紧所述连接杆(6)在所述第一通孔(71)内，所述第三通孔(73)与所述第一通孔(71)连通。
  12. 根据权利要求10所述的蒸发舟挡板组件，其特征在于，所述旋转杆(5)与所述连接杆(6)铰接连接，
    还包括用于调节所述环形底板(1)与水平面之间的夹角的角度调节器。
  13. 根据权利要求12所述的蒸发舟挡板组件，其特征在于，所述角度调节器为伸缩缸，所述伸缩缸的缸体与所述旋转杆(5)铰接，所述伸缩缸的伸缩杆与所述连接杆(6)铰接。
  14. 根据权利要求12所述的蒸发舟挡板组件，其特征在于，所述角度调节器为丝杠组件，所述丝杠组件的丝杠与所述旋转杆(5)铰接，所述丝杠组件的螺母与所述连接杆(6)铰接，所述丝杠通过伺服电机驱动。
  15. 根据权利要求10所述的蒸发舟挡板组件，其特征在于，所述驱动组件包括电机、第一齿轮和第二齿轮，所述电机的输出轴与所述第一齿轮连接，所述旋转杆(5)的下端与所述第二齿轮连接，所述第二齿轮与所述第一齿轮啮合。
  16. 根据权利要求10所述的蒸发舟挡板组件，其特征在于，所述驱动组件包括电机、第一链轮、链条和第二链轮，所述电机的输出轴与所述第一链轮连接，所述第二链轮与所述旋转杆(5)的下端连接，所述第一链轮和所述第二链轮通过所述链条连接。
PCT/CN2021/136669 2021-10-11 2021-12-09 一种蒸发舟挡板组件 WO2023060733A1 (zh)

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