WO2023108313A1 - 一种提高工件镀膜均匀度的真空镀膜设备 - Google Patents

一种提高工件镀膜均匀度的真空镀膜设备 Download PDF

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Publication number
WO2023108313A1
WO2023108313A1 PCT/CN2021/137338 CN2021137338W WO2023108313A1 WO 2023108313 A1 WO2023108313 A1 WO 2023108313A1 CN 2021137338 W CN2021137338 W CN 2021137338W WO 2023108313 A1 WO2023108313 A1 WO 2023108313A1
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Prior art keywords
assembly
workpiece
sliding
hole
clamping
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PCT/CN2021/137338
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English (en)
French (fr)
Inventor
黄国兴
孙桂红
黄乐
祝海生
梁红
陈立
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湘潭宏大真空技术股份有限公司
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Priority to PCT/CN2021/137338 priority Critical patent/WO2023108313A1/zh
Publication of WO2023108313A1 publication Critical patent/WO2023108313A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Definitions

  • the invention relates to the technical field of coating devices, in particular to a vacuum coating device for improving the coating uniformity of workpieces.
  • the invention provides a vacuum coating device for improving the coating uniformity of workpieces, so as to solve the technical problems of low coating efficiency and poor uniformity in the prior art.
  • the invention provides a vacuum coating device for improving the coating uniformity of a workpiece, which includes a housing assembly, a vacuum mechanism, a clamping mechanism, a pushing mechanism, a multi-arc target and a control system.
  • the pushing mechanism and the clamping mechanism are both Installed on the inner side of the shell assembly, the pushing mechanism is used to push the workpiece onto the clamping mechanism so that the clamping mechanism can clamp the workpiece, and the vacuum pumping mechanism is installed on the shell
  • the body assembly is used to extract the internal air of the shell assembly, the multi-arc target is installed on the shell assembly for coating the workpiece, the control system is connected with the vacuum pumping mechanism, the pushing mechanism, the The clamping mechanism is electrically connected with the multi-arc target.
  • the housing assembly includes a first airtight door and a housing, the clamping mechanism, the pushing mechanism and the multi-arc target are installed inside the housing, the vacuuming mechanism, the control The systems are installed on the outer surface of the casing, and a first through hole is opened on the casing near the position of the pushing mechanism, and the first airtight door is sealed and installed on the casing near the first through hole .
  • the vacuum coating equipment also includes a storage mechanism, the storage mechanism includes a second casing and a second airtight door, and the second casing is provided with a plurality of tubes that are vertically fixed in the casing away from the On one side of the pushing mechanism, a second through hole is opened on the side of the casing close to the second sleeve, and the second airtight door is sealed and installed on the side of the casing close to the second through hole.
  • the housing assembly also includes two electric doors, the two electric doors separate the pushing mechanism, the clamping mechanism and the storage mechanism respectively, and the electric doors and the control system are electrically connected to each other. connect.
  • the pushing mechanism includes a first bushing, a first slide assembly, a push rod and a pressure sensor, the first bushings are arranged in multiples and equidistantly arranged inside the housing component, the first bushing A third through hole is symmetrically opened on the inner side of the sleeve, and the third through hole extends toward the axial direction of the first sleeve, and the first sliding assembly is installed vertically on the inner side of the first sleeve , the pressure sensor is mounted on the sliding part of the first sliding assembly, the push rod is mounted on the pressure sensor, and the two sides of the push rod pass through the two third through holes respectively from the
  • the first sleeve protrudes from the inside to the outside, the workpiece is sleeved on the outer ring of the first sleeve and located above the push rod, the first sliding assembly and the pressure sensor are connected with the control System electrical connections.
  • the clamping mechanism includes a second sliding assembly, an electric telescopic rod, a connecting plate, a rotating assembly, a rotating shaft and a clamping assembly
  • the second sliding assembly is installed on the inner top of the housing assembly
  • the electric The telescopic rod is vertically installed on the sliding part of the second sliding assembly
  • the connecting plate is mounted on the bottom of the electric telescopic rod
  • the rotating shaft is provided with multiple and circular arrays on the bottom surface of the connecting plate
  • the rotating shaft is rotatably connected to the connecting plate
  • the rotating assembly is installed on the connecting plate for driving a plurality of rotating shafts to rotate synchronously
  • the clamping assembly is installed at the bottom of the rotating shaft for The workpiece is clamped;
  • the second sliding assembly, the electric telescopic rod, the rotating assembly and the clamping assembly are all electrically connected to the control system.
  • the rotating assembly includes a motor, a first gear and a second gear, the motor is installed on the bottom of the connecting plate, the first gear is installed on the outer ring of the rotating shaft, and the second gear is installed On the output shaft of the motor, the first gear and the second gear mesh with each other, and the motor is electrically connected with the control system.
  • the clamping assembly includes a cross bar, an electric sliding piece, a vertical bar, a winding piece, a fixed block, a sliding block, a pull cord, a first spring, a second spring, a stopper and a movable block, and the crossbar fixed on the bottom surface of the rotating shaft, two electric sliders are arranged symmetrically on the bottom surface of the cross bar, and the vertical bar is installed on the sliding part of the electric slider;
  • a chute is vertically opened on the inward side of the vertical bar, the fixed block is installed on the top of the chute, and a plurality of sliding blocks are installed equidistantly on the chute.
  • the fixed block is arranged on the top of the sliding block, the winding member is installed on the top of the vertical bar, and the fourth through hole is vertically opened on the fixed block, and all but the lowermost sliding block
  • the sliding block is provided with a fifth through hole, one end of the stay cord is connected to the winding member, and the other end of the stay cord passes through the fourth through hole and the fifth through hole respectively, and connected and fixed on the lowermost sliding block;
  • first springs There are multiple first springs and they are all sleeved on the pull cord.
  • the first springs are arranged between the fixed block and the sliding block and between the two adjacent sliding blocks.
  • the movable block is slidably connected in the blind hole, and the second spring is arranged in the blind hole.
  • the stopper is fixed on the fixed block and the sliding block to prevent the movable block from sliding out of the blind hole;
  • Both the electric sliding part and the winding part are electrically connected with the control system.
  • the fourth through hole on the fixed block is on the same vertical line as the fifth through hole on the sliding block on the same vertical rod.
  • This equipment can automatically clamp and stagger the workpiece through the clamping mechanism, which is convenient for multi-arc target coating, and does not require operators to install the workpiece on the fixture. After the coating is completed, the clamping mechanism can stack the workpieces for storage In terms of mechanism, it is convenient for unified processing, and does not require the operator to remove the workpiece from the fixture, which reduces the labor intensity of the operator and improves the overall efficiency of the coating;
  • two movable blocks clamp the large end of the conical workpiece.
  • the contact mode between the movable block and the workpiece is point-to-point contact, and the workpiece circulates during the coating process, making the coating of the workpiece more efficient. uniform.
  • Fig. 1 is a structural representation of the present invention
  • Fig. 2 is a partially enlarged schematic diagram of part A of Fig. 1;
  • Fig. 3 is the sectional view of the B-B position of Fig. 2;
  • Fig. 4 is an enlarged view of the structural schematic diagram of the clamping assembly
  • Fig. 5 is a partially enlarged schematic diagram of part C of Fig. 4;
  • Fig. 6 is a schematic diagram of a partial state of the workpiece clamped by the clamping assembly
  • Fig. 7 is an enlarged view of the structural schematic diagram of the rotating assembly.
  • Shell assembly 110. First airtight door; 120. Shell; 130. First through hole; 140. Electric door; 200. Vacuum mechanism;
  • 300 clamping mechanism; 310, second sliding assembly; 320, electric telescopic rod; 330, connecting plate; 340, rotating assembly; 341, motor; 342, first gear; 343, second gear; 350, rotating shaft; 360 , clamping assembly; 361, cross bar; 362, electric sliding piece; 363, vertical bar; 363a, chute; 364, winding piece; 365, fixed block; 365a, fourth through hole; , the fifth through hole; 367, stay rope; 368, the first spring; 369, movable block;
  • Push mechanism 410. First casing; 420. First sliding assembly; 430. Push rod; 440. Pressure sensor; 450. Third through hole;
  • an embodiment of the present application provides a vacuum coating device for improving the coating uniformity of workpieces, including a housing assembly 100, a vacuum mechanism 200, a clamping mechanism 300, a pushing mechanism 400, a multi-arc target 500 and a control system 600 , the pushing mechanism 400 and the clamping mechanism 300 are installed inside the housing assembly 100, the pushing mechanism 400 is used to push the workpiece 800 onto the clamping mechanism 300 so that the clamping The mechanism 300 clamps the workpiece 800, the vacuum mechanism 200 is installed on the housing assembly 100 for extracting the air inside the housing assembly 100, and the multi-arc target 500 is installed on the housing assembly 100 is used to coat the workpiece 800 , and the control system 600 is electrically connected to the vacuum mechanism 200 , the pushing mechanism 400 , the clamping mechanism 300 and the multi-arc target 500 .
  • the working process of the vacuum coating equipment is as follows: the operator places the conical workpiece 800 on the push mechanism 400, after completion, starts the vacuum mechanism 200, and the vacuum mechanism 200 removes the air in the housing assembly 100. Extract until the air inside the housing assembly 100 reaches a specified value, at the same time, start the clamping mechanism 300, the clamping mechanism 300 will remove the conical workpiece 800 from the pushing mechanism 400, start the multi-arc target 500, and the multi-arc target 500 Coating the workpiece 800 until the coating is completed; this process does not require the operator to install the workpieces 800 on the fixture one by one, which reduces the labor intensity of the operator and improves the coating efficiency.
  • the housing assembly 100 includes a first hermetic door 110 and a housing 120 , and the clamping mechanism 300 , the pushing mechanism 400 and the multi-arc target 500 are installed inside the housing 120 , the vacuum mechanism 200 and the control system 600 are installed on the outer surface of the casing 120, and a first through hole 130 is opened on the casing 120 close to the position of the pushing mechanism 400, which can be opened and closed.
  • the first airtight door 110 is hermetically installed on the housing 120 near the first through hole 130 .
  • the vacuum coating equipment further includes a storage mechanism
  • the storage mechanism includes a second sleeve and a second hermetic door 700
  • the second sleeve is provided with a plurality of tubes that are vertically fixed on the casing 120 on the side away from the push mechanism 400
  • a second through hole is opened on the side of the casing 120 close to the second sleeve
  • the second airtight door 700 is sealed and installed on the casing 120 close to the One side of the second through hole
  • the clamping mechanism 300 can set the workpiece 800 on the second sleeve, and after reaching a certain number, the operator will open the second airtight door 700, and put the storage mechanism All the workpieces 800 on the machine are taken out, which is convenient for unified processing.
  • the housing assembly 100 further includes two electric doors 140, and the two electric doors 140 separate the pushing mechanism 400, the clamping mechanism 300 and the storage mechanism respectively.
  • the door 140 is electrically connected to the control system 600; during the coating process of the multi-arc target 500, both electric doors 140 are closed to prevent the multi-arc target 500 from coating the workpiece 800 on the pushing mechanism 400 and the storage mechanism.
  • the pushing mechanism 400 includes a first sleeve 410, a first sliding assembly 420, a push rod 430 and a pressure sensor 440, and the first sleeve 410 is provided with multiple pieces and arranged equidistantly among them.
  • the inner side of the housing assembly 100, the inner side of the first sleeve 410 is symmetrically opened with a third through hole 450, the third through hole 450 extends toward the axial direction of the first sleeve 410, the first A slide assembly 420 is installed vertically on the inner side of the first sleeve 410, the first slide assembly 420 is composed of a slide rail and an electric slider, the slide rail is vertically installed on the inside of the first sleeve 410, and the electric slide
  • the block is installed on the slide rail, the pressure sensor 440 is installed on the electric slider, the push rod 430 is installed on the pressure sensor 440, and the two sides of the push rod 430 pass through the two third channels respectively.
  • the hole 450 protrudes outward from the inside of the first sleeve 410 , the workpiece 800 is sleeved on the outer ring of the first sleeve 410 and is located above the push rod 430 , and the first slide assembly 420 , the pressure sensor 440 is electrically connected to the control system 600 .
  • the working process of the pushing mechanism 400 is: start the first sliding assembly 420, the sliding part on the first sliding assembly 420 pushes the conical workpiece 800 upward until it is pushed to a designated position, and the pressure sensor 440 can be used to weigh the workpiece 800 The weight is fed back to the control system 600 , so that the conical workpiece 800 on the top layer on the first sleeve 410 can always be in the same transverse plane, which facilitates the clamping mechanism 300 to clamp the workpiece 800 .
  • the clamping mechanism 300 includes a second sliding assembly 310, an electric telescopic rod 320, a connecting plate 330, a rotating assembly 340, a rotating shaft 350 and a clamping assembly 360, and the second sliding assembly 310 is installed on The inner top of the housing assembly 100, the electric telescopic rod 320 is installed vertically on the sliding part of the second sliding assembly 310, the connecting plate 330 is installed on the bottom of the electric telescopic rod 320, the There are multiple rotating shafts 350 arranged in a circular array on the bottom surface of the connecting plate 330, the rotating shaft 350 is rotationally connected with the connecting plate 330, and the rotating assembly 340 is installed on the connecting plate 330 for driving multiple rotate synchronously with the rotating shaft 350; the clamping assembly 360 is installed at the bottom of the rotating shaft 350 for clamping the workpiece 800;
  • the second sliding assembly 310 , the electric telescopic rod 320 , the rotating assembly 340 and the clamping assembly 360 are all electrically connected to the control system 600 .
  • the rotating assembly 340 includes a motor 341, a first gear 342 and a second gear 343, the motor 341 is mounted on the bottom of the connecting plate 330, and the first gear 342 is mounted on the outside of the rotating shaft 350
  • the second gear 343 is mounted on the output shaft of the motor 341 , the first gear 342 and the second gear 343 mesh with each other, and the motor 341 is electrically connected to the control system 600 .
  • the clamping assembly 360 includes a cross bar 361, an electric sliding piece 362, a vertical bar 363, a winding piece 364, a fixed block 365, a sliding block 366, a pull cord 367, a first spring 368, a second Two springs, stoppers and movable blocks 369, the crossbar 361 is fixed on the bottom surface of the rotating shaft 350, the electric slider 362 is provided with two and symmetrically arranged on the bottom surface of the crossbar 361, the The vertical bar 363 is installed on the sliding part of the electric slider 362;
  • a sliding slot 363a is vertically provided on the inner side of the vertical bar 363, the fixed block 365 is installed on the top of the sliding slot 363a, and the sliding block 366 is provided with a plurality of equidistant installations on the sliding slots.
  • the fixed block 365 is arranged above the sliding block 366, the winding member 364 is installed on the top of the vertical bar 363, and the fourth through hole 365a is vertically opened on the fixed block 365,
  • the sliding blocks 366 except the bottom sliding block 366 are provided with a fifth through hole 366a, one end of the pull cord 367 is connected to the winding member 364, and the other end of the pull cord 367 is pass through the fourth through hole 365a and the fifth through hole 366a respectively, and be connected and fixed on the lowermost sliding block 366;
  • the first spring 368 is provided in multiples and is sleeved on the pull cord 367.
  • the first spring 368 is arranged between the fixed block 365 and the sliding block 366 and two adjacent two between the two sliding blocks 366; the fixed block 365 and the sliding block 366 are provided with a blind hole on the side away from the corresponding vertical bar 363, and the movable block 369 is slidably connected in the blind hole,
  • the second spring is arranged between the inner wall of the blind hole and the end face of the movable block 369, and the stopper is fixed on the fixed block 365 and the sliding block 366 to prevent the movable block 369 from moving
  • the electric sliding part 362 and the winding part 364 are both electrically connected with the control system 600 .
  • the working process of the clamping mechanism 300 and the entire coating process is as follows: start the second sliding assembly 310, the second sliding assembly 310 transports the clamping assembly 360 directly above the pushing mechanism 400, start the electric telescopic rod 320, The electric telescopic rod 320 is extended, and the clamping assembly 360 moves downward until the first sleeve 410 is inserted into the clamping assembly 360, and the winding part 364 is started, and the winding part 364 winds the pull rope 367 until the first sleeve 410 is inserted into the clamping assembly 360.
  • Roller 364 winds up stay cord 367 to the limit state, and now the vertical distance between fixed block 365 and the movable block 369 of the next layer and the vertical distance between two adjacent sliding blocks 366 on the same vertical bar 363 are equal.
  • the vertical distance between two adjacent workpieces 800 on the first sleeve 410 is equal, and at this time, the fixed block 365 and the workpiece 800 on the top layer of the first sleeve 410 are in the same plane, and the electric sliding part 362 is started, and the electric sliding Part 362 drives the vertical bar 363 to move closer to the first sleeve pipe 410 until the two fixed blocks 365 on the same horizontal bar 361 and the movable blocks 369 on the two sliding blocks 366 clamp the cylindrical workpiece 800.
  • the contact mode between the movable block 369 and the workpiece 800 is point-to-point contact.
  • the electric telescopic rod 320 contracts, and the clamping mechanism 300 moves upward.
  • the clamping mechanism 300 removes the workpiece 800 from the pushing mechanism 400. The following work process is completed;
  • the second sliding assembly 310 will deliver the clamping assembly 360 to the position of the multi-arc target 500, and start the winding part 364 at the same time, the pull cord 367 is unscrewed from the winding part 364, and the first spring 368 Under the action of the same distance between the fixed block 365 and the sliding block 366 on the same cross bar 361, as well as between the two vertically adjacent sliding blocks 366, the equidistant is staggered from each other.
  • This process can make the stacked conical
  • the workpiece 800 is disassembled, the rotating assembly 340 is started, the rotating assembly 340 drives the clamping assembly 360 to rotate, the multi-arc target 500 is started, and the multi-arc target 500 coats the conical workpiece 800.
  • the workpiece 800 is in a rotating state, which can make The workpiece 800 is more evenly coated, and at the same time, since the movable block 369 and the conical workpiece 800 are in point-to-point contact, the distance between the two vertical rods 363 can be adjusted by the electric slider 362 at this time, so that the conical workpiece Under the action of gravity and centrifugal force, 800 oscillates cyclically, which can make the workpiece 800 be coated more uniformly.
  • the fourth through hole 365a on the fixed block 365 is on the same vertical line as the fifth through hole 366a on the sliding block 366 on the same vertical rod 363.
  • the structure enables the winding member 364 to more smoothly wind up the pull cord 367 .

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Abstract

本发明提供了一种提高工件镀膜均匀度的真空镀膜设备，包括壳体组件、抽真空机构、夹持机构、推送机构、多弧靶和控制系统，推送机构、夹持机构均安装在所述壳体组件的内侧，推送机构用于将工件推送到夹持机构上以使夹持机构将所述工件夹紧，抽真空机构安装在壳体组件上用于抽取壳体组件内部空气，多弧靶安装在壳体组件上用于向工件镀膜，控制系统与抽真空机构、推送机构、夹持机构和所述多弧靶电连接；本发明提供的真空镀膜设备，能对工件进行自动夹紧，镀膜完成后可自动将工件叠放整齐，不需要操作人员安装和拆卸工件，提高了工件的镀膜效率，同时在工件镀膜的过程中，工件持续转动，提高了工件镀膜的均匀性。

Description

一种提高工件镀膜均匀度的真空镀膜设备 技术领域
本发明涉及镀膜装置技术领域，特别涉及一种提高工件镀膜均匀度的真空镀膜设备。
背景技术
圆锥形工件，如：灯上的反光罩等，在镀膜前，操作人员需要将工件分批安装在特制的夹具上，然后放入镀膜设备中进行镀膜，镀膜完成后，也需要逐个将工件拆下，操作人员的劳动强度大，镀膜整体效率低；同时一般的镀膜设备，在镀膜完成之后，圆锥形工件上覆盖的镀膜均匀性也比较差。
发明内容
本发明提供了一种提高工件镀膜均匀度的真空镀膜设备，以解决现有技术中的镀膜效率低，均匀性差技术问题。
为达到上述目的，本发明的技术方案是这样实现的：
本发明提供了一种提高工件镀膜均匀度的真空镀膜设备，包括壳体组件、抽真空机构、夹持机构、推送机构、多弧靶和控制系统，所述推送机构、所述夹持机构均安装在所述壳体组件的内侧，所述推送机构用于将工件推送到所述夹持机构上以使所述夹持机构将所述工件夹紧，所述抽真空机构安装在所述壳体组件上用于抽取所述壳体组件内部空气，所述多弧靶安装在所述壳体组件上用于向工件镀膜，所述控制系统与所述抽真空机构、所述推送机构、所述夹持机构和所述多弧靶电连接。
进一步地，所述壳体组件包括第一密封门、外壳，所述夹持机构、所述推送机构和所述多弧靶均安装在所述外壳的内侧，所述抽真空机构、所述控制系统均安装在所述外壳的外表面上，所述外壳上靠近所述推送机构位置开设有第 一通孔，所述第一密封门密封安装在所述外壳上靠近所述第一通孔位置。
进一步地，所述真空镀膜设备还包括存放机构，所述存放机构包括第二套管、第二密封门，所述第二套管设置有多根均竖向固定在所述外壳内远离所述推送机构的一侧，所述外壳上靠近所述第二套管一侧开设有第二通孔，所述第二密封门密封安装在所述外壳上靠近所述第二通孔的一侧。
进一步地，所述壳体组件还包括两个电动门，两个所述电动门将所述推送机构、所述夹持机构和所述存放机构分别隔开，所述电动门和所述控制系统电连接。
进一步地，所述推送机构包括第一套管、第一滑动组件、推杆和压力传感器，所述第一套管设置有多根且等距布设在所述壳体组件的内侧，所述第一套管的内侧对称开设有第三通孔，所述第三通孔朝所述第一套管的轴向方向延伸，所述第一滑动组件竖向安装在所述第一套管的内侧，所述压力传感器安装在所述第一滑动组件的滑动部位上，所述推杆安装在所述压力传感器上，所述推杆的两侧分别通过两个所述第三通孔从所述第一套管内向外伸出，所述工件套设在所述第一套管的外圈上且位于所述推杆的上方，所述第一滑动组件、所述压力传感器均与所述控制系统电连接。
进一步地，所述夹持机构包括第二滑动组件、电动伸缩杆、连接板、转动组件、转轴和夹紧组件，所述第二滑动组件安装在所述壳体组件的内侧顶部，所述电动伸缩杆竖向安装在所述第二滑动组件的滑动部位上，所述连接板安装在所述电动伸缩杆的底部，所述转轴设置有多根且圆形阵列在所述连接板的底面上，所述转轴和所述连接板转动连接，所述转动组件安装在所述连接板上用于驱动多根所述转轴同步转动；所述夹紧组件安装在所述转轴的底部用于对所述工件进行夹紧；
所述第二滑动组件、所述电动伸缩杆、所述转动组件和所述夹紧组件均与所述控制系统电连接。
进一步地，所述转动组件包括电机、第一齿轮和第二齿轮，所述电机安装在是连接板的底部，所述第一齿轮安装在所述转轴的外圈上，所述第二齿轮安 装在所述电机的输出轴上，所述第一齿轮和第二齿轮相互啮合，所述电机和所述控制系统电连接。
进一步地，所述夹紧组件包括横杆、电滑动件、竖杆、收卷件、固定块、滑动块、拉绳、第一弹簧、第二弹簧、挡块和活动块，所述横杆固定在所述转轴的底面上，所述电滑动件设置有两个且对称设置在所述横杆的底面上，所述竖杆安装在所述电滑动件的滑动部位上；
所述竖杆上朝内一侧竖向开设有滑槽，所述固定块安装在所述滑槽的顶部，所述滑动块设置有多个且等距安装在所述滑槽上，所述固定块设置在所述滑动块的上方，所述收卷件安装在所述竖杆的顶部，所述固定块上竖向开设第四通孔，除最下方的所述滑动块之外的所述滑动块上均开设有第五通孔，所述拉绳一端连接在所述收卷件上，所述拉绳另一端分别穿过所述第四通孔、所述第五通孔，并连接固定在最下方的所述滑动块上；
所述第一弹簧设置有多个且均套设在所述拉绳上，所述第一弹簧设置在所述固定块与所述滑动块之间以及两个相邻的两个所述滑动块之间；所述固定块、所述滑动块上远离对应的所述竖杆一侧开设有盲孔，所述活动块滑动连接在所述盲孔内，所述第二弹簧设置在所述盲孔内壁和所述活动块端面之间，所述挡块固定在所述固定块上以及所述滑动块上以防止所述活动块从所述盲孔内滑出；
所述电滑动件、所述收卷件均与所述控制系统电连接。
进一步地，所述固定块上的所述第四通孔与同一根所述竖杆上的所述滑动块上的所述第五通孔处于同一竖直线上。
本发明的有益效果：
1、本设备能通过夹持机构对工件自动夹紧并等距错开，便于多弧靶进行镀膜，不需要操作人员将工件安装在夹具上，镀膜完成后，夹持机构可将工件叠放存放机构上，便于统一进行处理，也不需要操作人员将工件从夹具上拆下，降低了操作人员的劳动强度，提高了镀膜的整体效率；
2、在镀膜时，两个活动块将圆锥形的工件的大端部位夹紧，活动块与工件 的接触方式为点与点接触，且工件在镀膜的过程中，循环运动，使得工件镀膜更加均匀。
附图说明
图1为本发明的结构示意图；
图2为图1的A部位的局部放大示意图；
图3为图2的B-B位置的剖视图；
图4为夹紧组件的结构示意图的放大图；
图5为图4的C部位的局部放大示意图；
图6为夹紧组件夹紧工件的局部状态示意图；
图7为转动组件的结构示意图的放大图。
附图标记说明：
100、壳体组件；110、第一密封门；120、外壳；130、第一通孔；140、电动门；200、抽真空机构；
300、夹持机构；310、第二滑动组件；320、电动伸缩杆；330、连接板；340、转动组件；341、电机；342、第一齿轮；343、第二齿轮；350、转轴；360、夹紧组件；361、横杆；362、电滑动件；363、竖杆；363a、滑槽；364、收卷件；365、固定块；365a、第四通孔；366、滑动块；366a、第五通孔；367、拉绳；368、第一弹簧；369、活动块；
400、推送机构；410、第一套管；420、第一滑动组件；430、推杆；440、压力传感器；450、第三通孔；
500、多弧靶；600、控制系统；700、第二密封门；800、工件。
具体实施方式
下面结合附图及具体实施例对本发明再作进一步详细的说明。在本发明的描述中，相关方位或位置关系为基于图1所示的方位或位置关系，其中，“上”、“下”是指图1的上下方向。需要理解的是，这些方位术语仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、 以特定的方位构造和操作，因此不能理解为对本发明的限制。
另外，在本发明中的“第一”、“第二”等描述，仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量或顺序。由此，限定有“第一”、“第二”的特征可以明示或隐含地包括至少一个该特征。在本发明的描述中，“多个”的含义是至少两个，例如两个、三个等，除非另有明确具体的限定。
参照图1，本申请实施例提供了一种提高工件镀膜均匀度的真空镀膜设备，包括壳体组件100、抽真空机构200、夹持机构300、推送机构400、多弧靶500和控制系统600，所述推送机构400、所述夹持机构300均安装在所述壳体组件100的内侧，所述推送机构400用于将工件800推送到所述夹持机构300上以使所述夹持机构300将所述工件800夹紧，所述抽真空机构200安装在所述壳体组件100上用于抽取所述壳体组件100内部空气，所述多弧靶500安装在所述壳体组件100上用于向工件800镀膜，所述控制系统600与所述抽真空机构200、所述推送机构400、所述夹持机构300和所述多弧靶500电连接。
在本实施例中，真空镀膜设备的工作过程为：操作人员将圆锥形的工件800放置在推送机构400上，完成之后，启动抽真空机构200，抽真空机构200将壳体组件100内部的空气抽出，直至壳体组件100内部的空气达到指定数值，同时，启动夹持机构300，夹持机构300将圆锥形的工件800从推送机构400上取下，启动多弧靶500，多弧靶500向工件800镀膜，直至镀膜完成；该过程不需要操作人员将工件800逐个安装在夹具上，降低了操作人员的劳动强度，提高了镀膜效率。
在一些实施例中，所述壳体组件100包括第一密封门110、外壳120，所述夹持机构300、所述推送机构400和所述多弧靶500均安装在所述外壳120的内侧，所述抽真空机构200、所述控制系统600均安装在所述外壳120的外表面上，所述外壳120上靠近所述推送机构400位置开设有第一通孔130，可开闭的所述第一密封门110密封安装在所述外壳120上靠近所述第一通孔130位置。
在一些实施例中，所述真空镀膜设备还包括存放机构，所述存放机构包括第二套管、第二密封门700，所述第二套管设置有多根均竖向固定在所述外壳120内远离所述推送机构400的一侧，所述外壳120上靠近所述第二套管一侧开设有第二通孔，所述第二密封门700密封安装在所述外壳120上靠近所述第二通孔的一侧，所述夹持机构300可将工件800套设在所述第二套管上，达到一定的数量后，操作人员将第二密封门700打开，并将存放机构上的工件800全部取出，便于进行统一处理。
参照图1，所述壳体组件100还包括两个电动门140，两个所述电动门140将所述推送机构400、所述夹持机构300和所述存放机构分别隔开，所述电动门140和所述控制系统600电连接；在多弧靶500镀膜的过程中，两个电动门140均为关闭状态，防止多弧靶500向推送机构400以及存放机构上的工件800镀膜。
参照图2和图3，所述推送机构400包括第一套管410、第一滑动组件420、推杆430和压力传感器440，所述第一套管410设置有多根且等距布设在所述壳体组件100的内侧，所述第一套管410的内侧对称开设有第三通孔450，所述第三通孔450朝所述第一套管410的轴向方向延伸，所述第一滑动组件420竖向安装在所述第一套管410的内侧，所述第一滑动组件420由滑轨和电动滑块组成，滑轨竖向安装在第一套管410的内侧，电动滑块安装在滑轨上，所述压力传感器440安装在电动滑块上，所述推杆430安装在所述压力传感器440上，所述推杆430的两侧分别通过两个所述第三通孔450从所述第一套管410内向外伸出，所述工件800套设在所述第一套管410的外圈上且位于所述推杆430的上方，所述第一滑动组件420、所述压力传感器440均与所述控制系统600电连接。
推送机构400的工作过程为：启动第一滑动组件420，第一滑动组件420上的滑动部位将圆锥形的工件800向上推送，直至推送到指定的位置，压力传感器440可用于称量工件800的重量并反馈到控制系统600上，使得第一套管410上的顶层的所述圆锥形的工件800始终能处于同一横向平面内，便于夹持 机构300对工件800进行夹紧。
参照图4至图6，所述夹持机构300包括第二滑动组件310、电动伸缩杆320、连接板330、转动组件340、转轴350和夹紧组件360，所述第二滑动组件310安装在所述壳体组件100的内侧顶部，所述电动伸缩杆320竖向安装在所述第二滑动组件310的滑动部位上，所述连接板330安装在所述电动伸缩杆320的底部，所述转轴350设置有多根且圆形阵列在所述连接板330的底面上，所述转轴350和所述连接板330转动连接，所述转动组件340安装在所述连接板330上用于驱动多根所述转轴350同步转动；所述夹紧组件360安装在所述转轴350的底部用于对所述工件800进行夹紧；
所述第二滑动组件310、所述电动伸缩杆320、所述转动组件340和所述夹紧组件360均与所述控制系统600电连接。
参照图7，所述转动组件340包括电机341、第一齿轮342和第二齿轮343，所述电机341安装在是连接板330的底部，所述第一齿轮342安装在所述转轴350的外圈上，所述第二齿轮343安装在所述电机341的输出轴上，所述第一齿轮342和第二齿轮343相互啮合，所述电机341和所述控制系统600电连接。
参照图4至图6，所述夹紧组件360包括横杆361、电滑动件362、竖杆363、收卷件364、固定块365、滑动块366、拉绳367、第一弹簧368、第二弹簧、挡块和活动块369，所述横杆361固定在所述转轴350的底面上，所述电滑动件362设置有两个且对称设置在所述横杆361的底面上，所述竖杆363安装在所述电滑动件362的滑动部位上；
所述竖杆363上朝内一侧竖向开设有滑槽363a，所述固定块365安装在所述滑槽363a的顶部，所述滑动块366设置有多个且等距安装在所述滑槽363a上，所述固定块365设置在所述滑动块366的上方，所述收卷件364安装在所述竖杆363的顶部，所述固定块365上竖向开设第四通孔365a，除最下方的所述滑动块366之外的所述滑动块366上均开设有第五通孔366a，所述拉绳367一端连接在所述收卷件364上，所述拉绳367另一端分别穿过所述第四通孔365a、所述第五通孔366a，并连接固定在最下方的所述滑动块366上；
所述第一弹簧368设置有多个且均套设在所述拉绳367上，所述第一弹簧368设置在所述固定块365与所述滑动块366之间以及两个相邻的两个所述滑动块366之间；所述固定块365、所述滑动块366上远离对应的所述竖杆363一侧开设有盲孔，所述活动块369滑动连接在所述盲孔内，所述第二弹簧设置在所述盲孔内壁和所述活动块369端面之间，所述挡块固定在所述固定块365上以及所述滑动块366上以防止所述活动块369从所述盲孔内滑出；所述电滑动件362、所述收卷件364均与所述控制系统600电连接。
在本实施例中，夹持机构300以及整个镀膜的工作过程为：启动第二滑动组件310，第二滑动组件310将夹紧组件360输送到推送机构400的正上方，启动电动伸缩杆320，电动伸缩杆320伸长，夹紧组件360向下运动，直至第一套管410伸入到夹紧组件360内，启动收卷件364，收卷件364对拉绳367进行收卷，直至收卷件364将拉绳367收卷到极限状态，此时固定块365与其下一层的活动块369的竖直间距以及同一根竖杆363上两个相邻的滑动块366的竖向间距均与第一套管410上两个相邻的工件800的竖向间距相等，且此时，固定块365和第一套管410顶层的工件800处于同一平面内，启动电滑动件362，电滑动件362带动竖杆363向第一套管410方向靠拢，直至同一根横杆361上的两个固定块365以及两个滑动块366上的活动块369将圆柱形的工件800夹紧，此时活动块369与工件800的接触方式为点与点接触，启动电动伸缩杆320，电动伸缩杆320收缩，夹持机构300向上运动，此时，夹持机构300将工件800从推送机构400上取下的工作过程完成；
启动第二滑动组件310，第二滑动组件310将夹紧组件360输送到多弧靶500位置处，同时启动收卷件364，拉绳367从收卷件364上旋出，在第一弹簧368的作用下，同一根横杆361上的固定块365、滑动块366之间以及竖向相邻的两个滑动块366之间等距相互错开，该过程能将叠放在一起的圆锥形的工件800分拆开，启动转动组件340，转动组件340带动夹紧组件360转动，启动多弧靶500，多弧靶500向圆锥形的工件800镀膜，此时，工件800为转动状态，可使得工件800被镀膜的更加均匀，同时，由于活动块369和圆锥形的工件800 为点与点接触，此时可通过电滑动件362调节两根竖杆363之间的间距，使得圆锥形的工件800在重力和离心力的作用下，循环摆动，可使得工件800被镀膜的更加均匀，镀膜完成后，启动第二滑动组件310，第二滑动组件310将夹持机构300输送到存放机构的正上方，启动电动伸缩杆320，电动伸缩杆320伸长，夹紧组件360将圆锥形的工件800叠放在第二套管上，便于操作人员后期统一处理，该批次圆锥形的工件800的整个镀膜工作完成。
参照图6，所述固定块365上的所述第四通孔365a与同一根所述竖杆363上的所述滑动块366上的所述第五通孔366a处于同一竖直线上，该结构能使得收卷件364能更顺畅的对拉绳367进行收卷。
以上所述，仅为本发明的具体实施方式，但本发明的保护范围并不同限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本发明的保护范围之内。并且，本发明各个实施方式之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。因此，本发明的保护范围应以所述权利要求的保护范围为准。

Claims (9)

  1. 一种提高工件镀膜均匀度的真空镀膜设备，其特征在于：包括壳体组件、抽真空机构、夹持机构、推送机构、多弧靶和控制系统，所述推送机构、所述夹持机构均安装在所述壳体组件的内侧，所述推送机构用于将工件推送到所述夹持机构上以使所述夹持机构将所述工件夹紧，所述抽真空机构安装在所述壳体组件上用于抽取所述壳体组件内部空气，所述多弧靶安装在所述壳体组件上用于向工件镀膜，所述控制系统与所述抽真空机构、所述推送机构、所述夹持机构和所述多弧靶电连接。
  2. 根据权利要求1所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述壳体组件包括第一密封门、外壳，所述夹持机构、所述推送机构和所述多弧靶均安装在所述外壳的内侧，所述抽真空机构、所述控制系统均安装在所述外壳的外表面上，所述外壳上靠近所述推送机构位置开设有第一通孔，所述第一密封门密封安装在所述外壳上靠近所述第一通孔位置。
  3. 根据权利要求2所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述真空镀膜设备还包括存放机构，所述存放机构包括第二套管、第二密封门，所述第二套管设置有多根均竖向固定在所述外壳内远离所述推送机构的一侧，所述外壳上靠近所述第二套管一侧开设有第二通孔，所述第二密封门密封安装在所述外壳上靠近所述第二通孔的一侧。
  4. 根据权利要求3所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述壳体组件还包括两个电动门，两个所述电动门将所述推送机构、所述夹持机构和所述存放机构分别隔开，所述电动门和所述控制系统电连接。
  5. 根据权利要求1所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述推送机构包括第一套管、第一滑动组件、推杆和压力传感器，所述第一套管设置有多根且等距布设在所述壳体组件的内侧，所述第一套管的内侧对称开设有第三通孔，所述第三通孔朝所述第一套管的轴向方向延伸，所述第一滑动组件竖向安装在所述第一套管的内侧，所述压力传感器安装在所述第一滑 动组件的滑动部位上，所述推杆安装在所述压力传感器上，所述推杆的两侧分别通过两个所述第三通孔从所述第一套管内向外伸出，所述工件套设在所述第一套管的外圈上且位于所述推杆的上方，所述第一滑动组件、所述压力传感器均与所述控制系统电连接。
  6. 根据权利要求1至5任一项所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述夹持机构包括第二滑动组件、电动伸缩杆、连接板、转动组件、转轴和夹紧组件，所述第二滑动组件安装在所述壳体组件的内侧顶部，所述电动伸缩杆竖向安装在所述第二滑动组件的滑动部位上，所述连接板安装在所述电动伸缩杆的底部，所述转轴设置有多根且圆形阵列在所述连接板的底面上，所述转轴和所述连接板转动连接，所述转动组件安装在所述连接板上用于驱动多根所述转轴同步转动；所述夹紧组件安装在所述转轴的底部用于对所述工件进行夹紧；
    所述第二滑动组件、所述电动伸缩杆、所述转动组件和所述夹紧组件均与所述控制系统电连接。
  7. 根据权利要求6所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述转动组件包括电机、第一齿轮和第二齿轮，所述电机安装在是连接板的底部，所述第一齿轮安装在所述转轴的外圈上，所述第二齿轮安装在所述电机的输出轴上，所述第一齿轮和第二齿轮相互啮合，所述电机和所述控制系统电连接。
  8. 根据权利要求6或7所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述夹紧组件包括横杆、电滑动件、竖杆、收卷件、固定块、滑动块、拉绳、第一弹簧、第二弹簧、挡块和活动块，所述横杆固定在所述转轴的底面上，所述电滑动件设置有两个且对称设置在所述横杆的底面上，所述竖杆安装在所述电滑动件的滑动部位上；
    所述竖杆上朝内一侧竖向开设有滑槽，所述固定块安装在所述滑槽的顶部，所述滑动块设置有多个且等距安装在所述滑槽上，所述固定块设置在所述滑动块的上方，所述收卷件安装在所述竖杆的顶部，所述固定块上竖向开设第四通 孔，除最下方的所述滑动块之外的所述滑动块上均开设有第五通孔，所述拉绳一端连接在所述收卷件上，所述拉绳另一端分别穿过所述第四通孔、所述第五通孔，并连接固定在最下方的所述滑动块上；
    所述第一弹簧设置有多个且均套设在所述拉绳上，所述第一弹簧设置在所述固定块与所述滑动块之间以及两个相邻的两个所述滑动块之间；所述固定块、所述滑动块上远离对应的所述竖杆一侧开设有盲孔，所述活动块滑动连接在所述盲孔内，所述第二弹簧设置在所述盲孔内壁和所述活动块端面之间，所述挡块固定在所述固定块上以及所述滑动块上以防止所述活动块从所述盲孔内滑出；
    所述电滑动件、所述收卷件均与所述控制系统电连接。
  9. 根据权利要求8所述的提高工件镀膜均匀度的真空镀膜设备，其特征在于，所述固定块上的所述第四通孔与同一根所述竖杆上的所述滑动块上的所述第五通孔处于同一竖直线上。
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