WO2023037964A1 - 吸脱着部材の取付構造 - Google Patents
吸脱着部材の取付構造 Download PDFInfo
- Publication number
- WO2023037964A1 WO2023037964A1 PCT/JP2022/032999 JP2022032999W WO2023037964A1 WO 2023037964 A1 WO2023037964 A1 WO 2023037964A1 JP 2022032999 W JP2022032999 W JP 2022032999W WO 2023037964 A1 WO2023037964 A1 WO 2023037964A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- adsorption
- desorption
- plate
- flange portion
- mounting
- Prior art date
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- 238000002336 sorption--desorption measurement Methods 0.000 title claims abstract description 220
- 239000007789 gas Substances 0.000 claims abstract description 103
- 239000012159 carrier gas Substances 0.000 claims abstract description 30
- 239000003960 organic solvent Substances 0.000 claims description 47
- 230000000903 blocking effect Effects 0.000 claims description 42
- 238000007789 sealing Methods 0.000 claims description 38
- 238000003466 welding Methods 0.000 claims description 22
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 239000002904 solvent Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 5
- 238000001179 sorption measurement Methods 0.000 description 20
- 239000000463 material Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000003795 desorption Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
- B01D53/44—Organic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/81—Solid phase processes
Definitions
- the present disclosure relates to a mounting structure for an adsorption/desorption member.
- an organic solvent-containing gas treatment system is used as an organic solvent-containing gas treatment system that cleans the raw gas by separating the organic solvent from the raw gas and discharges it, and also recovers the organic solvent separated from the raw gas using a carrier gas.
- An adsorption/desorption treatment apparatus having an adsorption/desorption member including a desorption element is known (see Patent Documents 1, 2, and 3).
- An object of the present disclosure is to provide a mounting structure for an adsorption/desorption member that prevents gas leakage in the mounting area associated with replacement of the adsorption/desorption member.
- the mounting structure of the adsorption/desorption member of the present disclosure separates the organic solvent from the raw gas containing the organic solvent to purify and discharge the raw gas, and recovers the organic solvent separated from the raw gas using a carrier gas.
- TECHNICAL FIELD The present invention relates to a mounting structure for an adsorption/desorption member that is arranged in an adsorption/desorption treatment apparatus that adsorbs and desorbs an organic solvent.
- a plate-like member having one or more openings through which the adsorption/desorption member is inserted is disposed above the adsorption/desorption treatment apparatus.
- the adsorption/desorption member includes a tubular adsorption/desorption element, and a mounting plate provided on the upper surface of the adsorption/desorption element and having a flange portion projecting outward from an edge portion of the adsorption/desorption element.
- a mounting region is provided at a position where the flange portion and the plate-like member overlap when the adsorption/desorption member is inserted into the opening hole and accommodated inside the adsorption/desorption processing apparatus.
- the attachment area includes a bolt.
- the flange portion has a hole. The bolt is fixed on the plate member side.
- a leakage blocking structure is formed to block leakage of raw gas or carrier gas to the part side.
- the mounting structure of the adsorption/desorption member of the present disclosure separates the organic solvent from the raw gas containing the organic solvent to purify and discharge the raw gas, and recovers the organic solvent separated from the raw gas using a carrier gas.
- TECHNICAL FIELD The present invention relates to a mounting structure for an adsorption/desorption member that is arranged in an adsorption/desorption treatment apparatus that adsorbs and desorbs an organic solvent.
- a plate-like member having one or more openings through which the adsorption/desorption member is inserted is disposed above the adsorption/desorption treatment apparatus.
- the adsorption/desorption member includes a tubular adsorption/desorption element, and a mounting plate provided on the upper surface of the adsorption/desorption element and having a flange portion projecting outward from an edge portion of the adsorption/desorption element.
- a mounting region is provided at a position where the flange portion and the plate-like member overlap when the adsorption/desorption member is inserted into the opening hole and accommodated inside the adsorption/desorption processing apparatus.
- the attachment area includes a stripped bolt and a nut.
- the flange portion has a hole.
- the plate member has a threaded portion.
- the flange portion side of the threaded bolt inserted through the hole portion and joined to the threaded portion is tightened, and the end portion of the threaded portion is covered with a sealing member, whereby the flange portion and the threaded portion are joined together.
- a portion between the plate-like member and the position connecting the sealing member is sealed to form a leakage blocking structure that blocks leakage of raw gas or carrier gas from the plate-like member side to the flange portion side.
- the mounting structure of the adsorption/desorption member of the present disclosure separates the organic solvent from the raw gas containing the organic solvent to purify and discharge the raw gas, and recovers the organic solvent separated from the raw gas using a carrier gas.
- TECHNICAL FIELD The present invention relates to a mounting structure for an adsorption/desorption member that is arranged in an adsorption/desorption treatment apparatus that adsorbs and desorbs an organic solvent.
- a plate-like member having one or more openings through which the adsorption/desorption member is inserted is disposed above the adsorption/desorption treatment apparatus.
- the adsorption/desorption member includes a tubular adsorption/desorption element, and a mounting plate provided on the upper surface of the adsorption/desorption element and having a flange portion projecting outward from an edge portion of the adsorption/desorption element.
- a mounting region is provided at a position where the flange portion and the plate-like member overlap when the adsorption/desorption member is inserted into the opening hole and accommodated inside the adsorption/desorption processing apparatus.
- the mounting area includes a hex bolt, an O-ring and a nut.
- the flange portion has a hole.
- the plate member has a threaded portion.
- the hexagon bolt is engaged with the threaded portion, the threaded portion of the hexagonal bolt of the flange portion inserted through the hole is tightened with the nut, and at least one of the hole and the threaded portion is tightened.
- the space between the flange portion and the plate-like member and the position where the O-ring is connected are sealed, and the raw gas or carrier flows from the plate-like member side to the flange portion side.
- a leak blocking structure is formed to block gas leakage.
- the mounting structure of the adsorption/desorption member of the present disclosure separates the organic solvent from the raw gas containing the organic solvent to purify and discharge the raw gas, and recovers the organic solvent separated from the raw gas using a carrier gas.
- TECHNICAL FIELD The present invention relates to a mounting structure for an adsorption/desorption member that is arranged in an adsorption/desorption treatment apparatus that adsorbs and desorbs an organic solvent.
- a plate-like member having one or more openings through which the adsorption/desorption member is inserted is disposed above the adsorption/desorption treatment apparatus.
- the adsorption/desorption member includes a tubular adsorption/desorption element, and a mounting plate provided on the upper surface of the adsorption/desorption element and having a flange portion projecting outward from an edge portion of the adsorption/desorption element.
- a mounting region is provided at a position where the flange portion and the plate-like member overlap when the adsorption/desorption member is inserted into the opening hole and accommodated inside the adsorption/desorption processing apparatus.
- the mounting area includes a hex bolt and a nut.
- the flange portion has a hole.
- the plate member has a threaded portion.
- the hexagon bolt inserted through the hole is engaged with the threaded portion, the plate member side of the hexagon bolt is tightened with the nut, and the head of the hexagon bolt on the flange side is tightened.
- the welded part and the position connecting between the flange part and the plate-like member are sealed, and leakage of raw gas or carrier gas from the plate-like member side to the flange part side is prevented.
- a leakage blocking structure is formed to block the
- the mounting structure of the adsorption/desorption member of the present disclosure separates the organic solvent from the raw gas containing the organic solvent to purify and discharge the raw gas, and recovers the organic solvent separated from the raw gas using a carrier gas.
- TECHNICAL FIELD The present invention relates to a mounting structure for an adsorption/desorption member that is arranged in an adsorption/desorption treatment apparatus that adsorbs and desorbs an organic solvent.
- a plate-like member having one or more openings through which the adsorption/desorption member is inserted is disposed above the adsorption/desorption treatment apparatus.
- the adsorption/desorption member includes a tubular adsorption/desorption element, and a mounting plate provided on the upper surface of the adsorption/desorption element and having a flange portion projecting outward from an edge portion of the adsorption/desorption element.
- a mounting region is provided at a position where the flange portion and the plate-like member overlap when the adsorption/desorption member is inserted into the opening hole and accommodated inside the adsorption/desorption processing apparatus.
- the mounting region includes a bolt and a base fixed to the upper portion of the plate member.
- the flange portion has a hole.
- the pedestal has a threaded portion.
- a leak blocking structure is formed to block leakage of raw gas or carrier gas from the plate member side to the flange portion side.
- the plate member In the attachment structure of the adsorption/detachment member, the plate member has a threaded recess. In the mounting area, the bolts inserted through the holes are brought into contact with the threaded recesses, and the flange side is tightened, so that the positions connecting the flange portion and the plate-like member and the threaded recesses are adjusted.
- a leak blocking structure is formed which is sealed and blocks leakage of raw gas or carrier gas from the plate member side to the flange portion side.
- the bolt In the mounting structure of the adsorption/desorption member, the bolt is vertically welded to the upper portion of the plate member. In the mounting region, the flange portion side of the bolt inserted through the hole is tightened to seal the position connecting between the flange portion and the plate-like member and between the welded portion of the bolt. , a leakage blocking structure is formed for blocking leakage of raw gas or carrier gas from the plate member side to the flange portion side.
- the leakage blocking structure has a seal member on the lower surface of the flange portion at a position on the side of the adsorption/desorption element when viewed from the hole.
- an attachment structure for an adsorption/desorption member that prevents gas leakage in the attachment region associated with replacement of the adsorption/desorption member.
- FIG. 1 is a diagram schematically showing the configuration of an organic solvent-containing gas treatment system according to Embodiment 1; FIG. It is an enlarged view of an attachment area.
- FIG. 2 is a plan view of the adsorption/desorption treatment device with some adsorption/desorption members removed;
- FIG. 3 is an enlarged view of part C of FIG. 2;
- FIG. 11 is an enlarged view of a mounting area in Embodiment 2;
- FIG. 11 is an enlarged view of a mounting area in Embodiment 3;
- FIG. 11 is an enlarged view of a mounting area in Embodiment 4;
- FIG. 11 is an enlarged view of a mounting area in Embodiment 5; It is an enlarged view of the attachment area
- FIG. 11 is an enlarged view of a mounting area in Embodiment 6;
- FIG. 14 is an enlarged view of a mounting area in Embodiment 7;
- FIG. 21 is an enlarged view of a mounting area in Embodiment 8;
- FIG. 21 is an enlarged view of a mounting area in Embodiment 9;
- FIG. 20 is an enlarged view of a mounting area in Embodiment 10;
- FIG. 1 is a diagram schematically showing the configuration of an organic solvent-containing gas treatment system according to this embodiment.
- a gas A to be treated containing an organic solvent passes through a gas to be treated line 101 and flows through an adsorption gas line 103 by a blower 102 for the gas to be treated.
- the liquid is sent to adsorption tanks 104A and 104B in the adsorption process.
- the organic solvent is adsorbed while passing through the adsorption/desorption elements 105A and 105B in the adsorption tank.
- the gas to be treated A becomes clean air B and is released into the atmosphere.
- the organic solvent adsorbed by the adsorption/desorption elements 105A and 105B in the adsorption tanks 104A and 104B which are in the desorption process by opening and closing the upper dampers 106A and 106B and the lower dampers 107A and 107B, passes through the water vapor line 108. Then, it is desorbed by water vapor C introduced from water vapor valves 109A and 109B, passed through a desorption water vapor line 110, introduced into a condenser 111 from a condenser inlet 111B, and cooled.
- the liquefied and condensed organic solvent is discharged from the condenser outlet 111C, sent to the separator 113 via the condensate line 112, separated into the separated waste water 113A and the organic solvent 113B, and recovered as the recovered solvent D.
- the uncondensed organic solvent in the condenser 111 and the separator 113 is introduced into the upstream side of the to-be-processed gas blower 102 via the return gas line 114 .
- FIG. 2 is an enlarged view of the mounting area.
- FIG. 3 is a plan view of the adsorption/desorption treatment apparatus with some adsorption/desorption members removed.
- FIG. 4 is an enlarged view of part C of FIG.
- the adsorption/desorption treatment apparatus 100 includes an adsorption/desorption member 15 having the adsorption/desorption elements 105A and 105B shown in FIG. 1 that adsorb and desorb an organic solvent.
- the adsorption/desorption elements 105A and 105B shown in FIG. 1 will be collectively described as an adsorption/desorption element 131.
- the adsorption/desorption member 15 includes a cylindrical adsorption/desorption element 131 and a flange provided on the upper surface of the adsorption/desorption element 131 and projecting outward from the edge of the adsorption/desorption element 131. a mounting plate 2 having a portion 2F.
- a plate-like member 3 having three openings 3A for inserting the adsorption/desorption members 15 is arranged in the upper part of the adsorption/desorption treatment apparatus 100.
- FIG. 3 shows a state in which the adsorption/detachment member 15 is attached to one of the three openings 3A.
- the adsorption/desorption member 15 is accommodated in the adsorption/desorption processing apparatus 100 in a suspended state by inserting the cylindrical adsorption/desorption element 131 into the opening hole 3A and overlapping the flange portion 2F and the plate-like member 3 .
- FIG. 3 shows a state in which the adsorption/detachment member 15 is attached to one of the three openings 3A.
- the adsorption/desorption member 15 is accommodated in the adsorption/desorption processing apparatus 100 in a suspended state by inserting the cylindrical adsorption/desorption element 131 into the opening hole 3A and overlapping the flange portion 2F and the plate
- a region provided at a position where the flange portion 2F and the plate member 3 overlap is referred to as a mounting region. 2 and 4, the attachment area will be described as an attachment area 1A.
- the mounting area 1A includes a mounting plate 2, a plate-like member 3, a threaded bolt 4, a nut 5, and a sealing member 6.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded recess 3a.
- the threaded recess 3a is engaged with the threaded recess 3a by the threaded bolt 4 inserted through the hole 2a.
- the nut 5 is used to tighten the flange portion 2F side of the threaded bolt 4 .
- a soft gasket for example, can be used for the sealing member 6 .
- the sealing member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the cut bolt 4 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- the gap between the flange portion 2F and the plate-like member 3 and the position connecting the threaded recess 3a are sealed to form a leakage blocking structure that blocks leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side. It is formed.
- gas leakage in the attachment area 1A accompanying replacement of the adsorption/desorption member 15 can be prevented by forming a leak blocking structure. Therefore, unpurified gas is prevented from being discharged into the atmosphere, and the adsorption/desorption treatment apparatus 100 can be used for a long period of time simply by replacing the adsorption/desorption member 15 .
- FIG. 5 is an enlarged view of the attachment area in Embodiment 2.
- FIG. A mounting region 1B of the second embodiment includes a mounting plate 2, a plate-like member 3, a threaded bolt 4, a nut 5, a seal member 6, and a pedestal portion 7.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the base portion 7 is fixed to the upper portion of the plate-like member 3 and has a threaded recess 7a.
- the threaded bolt 4 inserted through the hole 2a is engaged with the threaded recess 7a.
- the nut 5 is used to tighten the flange portion 2F side of the threaded bolt 4 .
- a soft gasket for example, can be used for the sealing member 6 .
- the sealing member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the cut bolt 4 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the base portion 7 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is formed to block the
- gas leakage from the attachment area 1B associated with the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, unpurified gas is prevented from being discharged into the atmosphere, and the adsorption/desorption treatment apparatus 100 can be used for a long period of time simply by replacing the adsorption/desorption member 15 .
- Both the pedestal portion 7 and the plate member 3 may be provided with threaded recesses.
- the pedestal portion 7 may be fixed to the plate-like member 3 by welding or the like, but may be molded integrally with the plate-like member 3 .
- FIG. 6 is an enlarged view of the attachment area in Embodiment 3.
- FIG. A mounting region 1 ⁇ /b>C of Embodiment 3 includes a mounting plate 2 , a plate member 3 , a hexagonal bolt 8 and a sealing member 6 .
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded recess 3a.
- the flange portion 2F side is tightened by tightening the head portion 8a of the hexagon bolt 8 inserted through the hole 2a so that the threaded portion 8b of the hexagon bolt 8 is engaged with the threaded recess 3a.
- a soft gasket for example, can be used for the sealing member 6 .
- the seal member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the hexagonal bolt 8 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is achieved in which the portion between the flange portion 2F and the plate-like member 3 and the position connecting the threaded recess 3a are sealed to block the leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side. It is formed.
- gas leakage from the attachment region 1C associated with the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, unpurified gas is prevented from being discharged into the atmosphere, and the adsorption/desorption treatment apparatus 100 can be used for a long period of time simply by replacing the adsorption/desorption member 15 .
- FIG. 7 is an enlarged view of the attachment area in Embodiment 4.
- FIG. A mounting region 1 ⁇ /b>D of the fourth embodiment includes a mounting plate 2 , a plate-like member 3 , a hexagon bolt 8 , a seal member 6 and a pedestal portion 7 .
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the base portion 7 is fixed to the upper portion of the plate-like member 3 and has a threaded recess 7a.
- the flange portion 2F side is tightened by tightening the head portion 8a of the hexagon bolt 8 inserted through the hole 2a so that the threaded portion 8b of the hexagon bolt 8 is engaged with the threaded recess 7a.
- a soft gasket for example, can be used for the sealing member 6 .
- the seal member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the hexagonal bolt 8 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the base portion 7 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is formed to block the
- gas leakage from the attachment area 1D associated with the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, unpurified gas is prevented from being discharged into the atmosphere, and the adsorption/desorption treatment apparatus 100 can be used for a long period of time simply by replacing the adsorption/desorption member 15 .
- Both the pedestal portion 7 and the plate member 3 may be provided with threaded recesses.
- the pedestal portion 7 may be fixed to the plate-like member 3 by welding or the like, but may be molded integrally with the plate-like member 3 .
- FIG. 8 is an enlarged view of the mounting area in Embodiment 5.
- FIG. The mounting region 1E of Embodiment 5 includes a mounting plate 2, a plate-like member 3, a threaded bolt 4, a nut 5, and a sealing member 6.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded portion 3b.
- a nut 5 is used to tighten the flange portion 2F side of the threaded bolt 4 inserted through the hole portion 2a and engaged with the threaded portion 3b.
- the threaded bolt 4 is fixed so as to protrude from the end surface of the plate member 3 .
- a welding member 9 serving as a sealing member is used to weld the entire periphery of the position where the end portion of the bolt 4 protruding from the end surface of the plate-like member 3 and the plate-like member 3 intersect.
- a soft gasket for example, can be used for the sealing member 6 .
- the sealing member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the cut bolt 4 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is provided in which the portion between the flange portion 2F and the plate-like member 3 and the position connecting the welding member 9 are sealed to block the leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side. It is formed.
- gas leakage from the attachment area 1E associated with the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, unpurified gas is prevented from being discharged into the atmosphere, and the adsorption/desorption treatment apparatus 100 can be used for a long period of time simply by replacing the adsorption/desorption member 15 .
- FIG. 9 is an enlarged view of the mounting area in the reference example.
- a mounting region 1 ⁇ /b>F of the reference example includes a mounting plate 2 , a plate member 3 , a hexagon bolt 8 , a nut 5 and a seal member 6 .
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded portion 3b. In the mounting area 1F, the threaded portion 8b of the hexagonal bolt 8 is engaged with the threaded portion 3b by tightening the head portion 8a of the hexagonal bolt 8 on the plate member 3 side.
- the threaded portion 8b of the hexagon bolt 8 inserted through the hole 2a of the flange portion 2F is tightened by the nut 5 on the flange portion 2F side.
- the position where the end surface of the plate member 3 and the head portion 8a of the hexagonal bolt 8 intersect is welded all around with a welding member 9 as a sealing member.
- a soft gasket for example, can be used for the sealing member 6 .
- the seal member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the hexagonal bolt 8 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is provided in which the portion between the flange portion 2F and the plate-like member 3 and the position connecting the welding member 9 are sealed to block the leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side. It is formed.
- the attachment structure of the adsorption/desorption member 15 of the reference example gas leakage from the attachment area 1F accompanying the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, it is possible to prevent uncleaned gas from being discharged into the atmosphere, and to use the first adsorption/desorption treatment apparatus 100 for a long period of time only by exchanging the adsorption/desorption member 15 .
- FIG. 10 is an enlarged view of the mounting area in Embodiment 6.
- FIG. A mounting region 1 ⁇ /b>G of Embodiment 6 includes a mounting plate 2 , a plate member 3 , a hexagon bolt 8 , a nut 5 and a seal member 6 .
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded portion 3b. In the mounting region 1G, the threaded portion 8b of the hexagonal bolt 8 inserted through the hole 2a of the flange portion 2F is engaged with the threaded portion 3b.
- the head 8a of the hexagon bolt 8 on the flange portion 2F side is tightened, and the plate member 3 side is tightened by the nut 5.
- the position where the end face of the flange portion 2F and the head portion 8a of the hexagonal bolt 8 intersect is welded all around with a welding member 9 as a sealing member.
- a soft gasket for example, can be used for the sealing member 6 .
- the seal member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the hexagonal bolt 8 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is provided in which the portion between the flange portion 2F and the plate-like member 3 and the position connecting the welding member 9 are sealed to block the leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side. It is formed.
- gas leakage from the attachment region 1G associated with the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, it is possible to prevent uncleaned gas from being discharged into the atmosphere, and to use the first adsorption/desorption treatment apparatus 100 for a long period of time only by exchanging the adsorption/desorption member 15 .
- FIG. 11 is an enlarged view of the attachment area in Embodiment 7.
- the mounting region 1H of Embodiment 7 includes a mounting plate 2, a plate-like member 3, an undercut bolt 4, a nut 5, and a seal member 6.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded portion 3b.
- a nut 5 is used to tighten the flange portion 2F side of the threaded bolt 4 inserted through the hole portion 2a and engaged with the threaded portion 3b.
- the threaded bolt 4 is fixed at a position flush with the end surface of the plate member 3 .
- the position where the end surface of the plate-like member 3 and the end portion of the cut bolt 4 intersect is welded all around with a welding member 9 as a sealing member.
- a soft gasket for example, can be used for the sealing member 6 .
- the sealing member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the cut bolt 4 .
- the sealing portion 6 material is annularly arranged around the opening 3A of the plate-like member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leakage blocking structure is provided in which the portion between the flange portion 2F and the plate-like member 3 and the position connecting the welding member 9 are sealed to block the leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side. It is formed.
- gas leakage from the attachment area 1H accompanying the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, it is possible to prevent uncleaned gas from being discharged into the atmosphere, and to use the first adsorption/desorption treatment apparatus 100 for a long period of time only by exchanging the adsorption/desorption member 15 .
- FIG. 12 is an enlarged view of the attachment area in the eighth embodiment.
- the mounting region 1I of the eighth embodiment includes a mounting plate 2, a plate-like member 3, a threaded bolt 4, a nut 5, and a sealing member 6. As shown in FIG.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- a threaded bolt 4 is vertically attached to the upper portion of the plate-like member 3 by stud welding.
- the plate member 3 and the cut bolt 4 are joined at the welded portion 19 .
- Stud welding is a welding method in which an electric current is passed between a bolt 4 as a stud material and a plate member 3 as a base material to generate an electric discharge, thereby melting and joining the stud material and the base material. be.
- a soft gasket for example, can be used for the sealing member 6 .
- the sealing member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the cut bolt 4 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- a leak-blocking structure is formed to block leakage of raw gas or carrier gas from the plate-like member 3 side to the flange portion 2F side by sealing the connecting position.
- the leak blocking structure is formed, so that gas leakage in the attachment area 1I associated with replacement of the adsorption/desorption member 15 can be prevented. Therefore, it is possible to prevent uncleaned gas from being discharged into the atmosphere, and to use the first adsorption/desorption treatment apparatus 100 for a long period of time only by exchanging the adsorption/desorption member 15 .
- FIG. 13 is an enlarged view of the attachment area in the ninth embodiment.
- the mounting region 1J of the ninth embodiment includes a mounting plate 2, a plate member 3, a hexagon bolt 8, a nut 5, a seal member 6, and an O-ring 11.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded portion 3b.
- the O-ring 11 is placed between the head 8a of the hexagonal bolt 8 and the plate member 3, and is a rubber material that functions as a sealing member that is sealed by being crushed.
- the threaded portion 8b of the hexagonal bolt 8 is engaged with the threaded portion 3b by tightening the head portion 8a of the hexagonal bolt 8 on the plate member 3 side.
- the screw portion 8b of the hexagon bolt 8 inserted through the hole portion 2a of the flange portion 2F is tightened by the nut 5 on the flange portion 2F side.
- a welding member 29 is used to spot-weld a plurality of locations (for example, two locations) where the end surface of the plate member 3 and the head portion 8a of the hexagonal bolt 8 intersect.
- An O-ring 11 seals the space between the head 8a of the hexagon bolt 8 and the plate member 3. As shown in FIG.
- a soft gasket for example, can be used for the sealing member 6 .
- the seal member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the hexagonal bolt 8 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- the space between the flange portion 2F and the plate member 3 and the position where the O-ring 11 is connected are sealed to form a leakage blocking structure that blocks leakage of raw gas or carrier gas from the plate member 3 side to the flange portion 2F side. It is formed.
- the leakage blocking structure is formed, so that gas leakage in the attachment area 1J associated with replacement of the adsorption/desorption member 15 can be prevented. Therefore, it is possible to prevent uncleaned gas from being discharged into the atmosphere, and to use the first adsorption/desorption treatment apparatus 100 for a long period of time only by exchanging the adsorption/desorption member 15 .
- FIG. 14 is an enlarged view of the mounting area in the tenth embodiment.
- a mounting region 1K of the tenth embodiment includes a mounting plate 2, a plate member 3, a hexagon bolt 8, a nut 5, a seal member 6, and an O-ring 11.
- the mounting plate 2 has a hole portion 2a in the flange portion 2F.
- the plate member 3 has a threaded portion 3b.
- the O-ring 11 is placed between the nut 5 and the flange portion 2F, and is a rubber material that functions as a sealing member that is sealed by being crushed.
- the head 8a of the hexagon bolt 8 on the plate member 3 side is tightened so that the threaded portion 8b of the hexagon bolt 8 is engaged with the threaded portion 3b.
- the threaded portion 8b of the hexagonal bolt 8 inserted through the hole 2a of the flange portion 2F is tightened by the nut 5 on the flange portion 2F side.
- a welding member 29 is used to spot-weld a plurality of locations (for example, two locations) where the end surface of the plate member 3 and the head portion 8a of the hexagonal bolt 8 intersect.
- An O-ring 11 seals between the nut 5 and the flange portion 2F.
- a soft gasket for example, can be used for the sealing member 6 .
- the seal member 6 is arranged on the lower surface of the flange portion 2F at a position on the adsorption/desorption element 131 side when viewed from the hexagonal bolt 8 .
- the seal member 6 is annularly arranged around the opening 3A of the plate member 3 .
- the seal member 6 is annularly compressed between the flange portion 2F and the plate-like member 3 when the adsorption/detachment member 15 is attached to improve airtightness.
- the space between the flange portion 2F and the plate member 3 and the position where the O-ring 11 is connected are sealed to form a leakage blocking structure that blocks leakage of raw gas or carrier gas from the plate member 3 side to the flange portion 2F side. It is formed.
- gas leakage from the attachment area 1K associated with the replacement of the adsorption/desorption member 15 can be prevented by forming the leak blocking structure. Therefore, it is possible to prevent uncleaned gas from being discharged into the atmosphere, and to use the first adsorption/desorption treatment apparatus 100 for a long period of time only by exchanging the adsorption/desorption member 15 .
- the seal member 6 may be omitted. Further, an annular groove may be provided in the plate-like member 3 in order to facilitate positioning of the seal member 6 .
- the shape of the adsorption/desorption element 131 may be a shape other than a cylindrical shape.
- the adsorption/desorption element 131 may have a hollow quadrangular prism structure.
- the shape of the mounting plate 2 may also be square according to the shape of the adsorption/desorption element 131 .
- the plurality of attachment areas may be arranged in a square shape in a plan view. In this manner, the arrangement of the attachment regions may be changed according to the shape of the adsorption/desorption element 131 .
- sealing tape may be wrapped around the threaded portion of each bolt. By wrapping the sealing tape, the airtightness can be improved and the bottle can be protected.
- the seal tape is made of, for example, polytetrafluoroethylene.
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Abstract
Description
図1は、本実施の形態における有機溶剤含有ガス処理システムの構成を概略的に示す図である。図1に示すように、有機溶剤含有ガス処理システム10における吸脱着処理装置100において、有機溶剤を含む被処理ガスAは、被処理ガスライン101を通り被処理ガス送風機102により吸着ガスライン103を経由して上ダンパー106A、106B、および、下ダンパー107A、107Bの開閉により吸着工程となっている吸着槽104A、104Bに送られる。その後、有機溶剤は、吸着槽内の吸脱着素子105A、105Bを通過中に吸着される。被処理ガスAは、清浄空気Bとなって大気中に放出される。
図5は、実施の形態2における取付領域の拡大図である。実施の形態2の取付領域1Bは、取付板2と、板状部材3と、寸切りボルト4と、ナット5と、シール部材6と、台座部7と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。台座部7は、板状部材3の上部に固定され、ねじ切り凹部7aを有する。取付領域1Bでは、孔部2aを挿通した寸切りボルト4をねじ切り凹部7aへ累合する。次いで、寸切りボルト4のフランジ部2F側をナット5を用いて締め付ける。
図6は、実施の形態3における取付領域の拡大図である。実施の形態3の取付領域1Cは、取付板2と、板状部材3と、六角ボルト8と、シール部材6と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り凹部3aを有する。取付領域1Cでは、孔部2aを挿通した六角ボルト8の頭部8aを締め付けることにより六角ボルト8のねじ部8bをねじ切り凹部3aへ累合することで、フランジ部2F側を締め付ける。
図7は、実施の形態4における取付領域の拡大図である。実施の形態4の取付領域1Dは、取付板2と、板状部材3と、六角ボルト8と、シール部材6と、台座部7と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。台座部7は、板状部材3の上部に固定され、ねじ切り凹部7aを有する。取付領域1Dでは、孔部2aを挿通した六角ボルト8の頭部8aを締め付けることにより六角ボルト8のねじ部8bをねじ切り凹部7aへ累合することで、フランジ部2F側を締め付ける。
図8は、実施の形態5における取付領域の拡大図である。実施の形態5の取付領域1Eは、取付板2と、板状部材3と、寸切りボルト4と、ナット5と、シール部材6と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り部3bを有する。取付領域1Eでは、孔部2aを挿通しねじ切り部3bへ累合した寸切りボルト4のフランジ部2F側をナット5を用いて締め付ける。寸切りボルト4は、板状部材3の端面からはみ出すように固定される。次いで、板状部材3の端面からはみ出した寸切りボルト4の端部と板状部材3とが交わる位置を密閉部材としての溶接部材9により全周溶接する。
図9は、参考例における取付領域の拡大図である。参考例の取付領域1Fは、取付板2と、板状部材3と、六角ボルト8と、ナット5と、シール部材6と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り部3bを有する。取付領域1Fでは、板状部材3側の六角ボルト8の頭部8aを締め付けることにより六角ボルト8のねじ部8bをねじ切り部3bへ累合する。取付領域1Fでは、フランジ部2Fの孔部2aを挿通した六角ボルト8のねじ部8bをフランジ部2F側においてナット5により締め付ける。次いで、板状部材3の端面と六角ボルト8の頭部8aとが交わる位置を密閉部材としての溶接部材9により全周溶接する。
図10は、実施の形態6における取付領域の拡大図である。実施の形態6の取付領域1Gは、取付板2と、板状部材3と、六角ボルト8と、ナット5と、シール部材6と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り部3bを有する。取付領域1Gでは、フランジ部2Fの孔部2aを挿通した六角ボルト8のねじ部8bをねじ切り部3bへ累合する。取付領域1Fでは、フランジ部2F側の六角ボルト8の頭部8aを締め付けるとともに、板状部材3側をナット5により締め付ける。次いで、フランジ部2Fの端面と六角ボルト8の頭部8aとが交わる位置を密閉部材としての溶接部材9により全周溶接する。
図11は、実施の形態7における取付領域の拡大図である。実施の形態7の取付領域1Hは、取付板2と、板状部材3と、寸切りボルト4と、ナット5と、シール部材6と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り部3bを有する。取付領域1Hでは、孔部2aを挿通しねじ切り部3bへ累合した寸切りボルト4のフランジ部2F側をナット5を用いて締め付ける。寸切りボルト4は、板状部材3の端面と同一面となる位置で固定される。次いで、板状部材3の端面と寸切りボルト4の端部とが交わる位置を密閉部材としての溶接部材9により全周溶接する。
図12は、実施の形態8における取付領域の拡大図である。実施の形態8の取付領域1Iは、取付板2と、板状部材3と、寸切りボルト4と、ナット5と、シール部材6と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3の上部には、寸切りボルト4がスタッド溶接により板状部材3に対し垂直に取付けられる。板状部材3と寸切りボルト4とは、溶接部19において接合される。
図13は、実施の形態9における取付領域の拡大図である。実施の形態9の取付領域1Jは、取付板2と、板状部材3と、六角ボルト8と、ナット5と、シール部材6と、Oリング11と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り部3bを有する。Oリング11は、六角ボルト8の頭部8aと板状部材3との間に配置され、押しつぶされることで密閉される密閉部材として機能するゴム製の材料である。
図14は、実施の形態10における取付領域の拡大図である。実施の形態10の取付領域1Kは、取付板2と、板状部材3と、六角ボルト8と、ナット5と、シール部材6と、Oリング11と、を含む。取付板2は、フランジ部2Fに孔部2aを有する。板状部材3は、ねじ切り部3bを有する。Oリング11は、ナット5とフランジ部2Fとの間に配置され、押しつぶされることで密閉される密閉部材として機能するゴム製の材料である。
上記実施の形態において、シール部材6を無くすようにしてもよい。また、シール部材6の位置決めを容易にするために板状部材3に環状の溝部を設けてもよい。
Claims (8)
- 有機溶剤を含有する原ガスから有機溶剤を分離することで原ガスを清浄化して排出するとともに、原ガスから分離した有機溶剤をキャリアガスを用いて回収する吸脱着処理装置内に配置され、有機溶剤を吸着および脱着する吸脱着部材の取付構造であって、
前記吸脱着処理装置の内部上方には前記吸脱着部材を挿通させる1または2以上の開口孔を含む板状部材が配置され、
前記吸脱着部材は、筒状の吸脱着素子と、前記吸脱着素子の上面に設けられ、前記吸脱着素子の縁部から外方に向かって張り出すフランジ部を有する取付板と、を含み、
前記吸脱着部材を前記開口孔に挿通させて、前記吸脱着処理装置の内部に収容される際に、前記フランジ部と前記板状部材とが重なる位置に設けられる取付領域を備え、
前記取付領域は、ボルトを含み、
前記フランジ部は、孔部を有し、
前記ボルトは、前記板状部材側で固定され、
前記取付領域では、前記孔部を挿通した前記ボルトを前記フランジ部側から締め付けることにより、前記フランジ部と前記板状部材との間を繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、吸脱着部材の取付構造。 - 有機溶剤を含有する原ガスから有機溶剤を分離することで原ガスを清浄化して排出するとともに、原ガスから分離した有機溶剤をキャリアガスを用いて回収する吸脱着処理装置内に配置され、有機溶剤を吸着および脱着する吸脱着部材の取付構造であって、
前記吸脱着処理装置の内部上方には前記吸脱着部材を挿通させる1または2以上の開口孔を含む板状部材が配置され、
前記吸脱着部材は、筒状の吸脱着素子と、前記吸脱着素子の上面に設けられ、前記吸脱着素子の縁部から外方に向かって張り出すフランジ部を有する取付板と、を含み、
前記吸脱着部材を前記開口孔に挿通させて、前記吸脱着処理装置の内部に収容される際に、前記フランジ部と前記板状部材とが重なる位置に設けられる取付領域を備え、
前記取付領域は、寸切りボルトと、ナットと、を含み、
前記フランジ部は、孔部を有し、
前記板状部材は、ねじ切り部を有し、
前記取付領域では、前記孔部を挿通し前記ねじ切り部へ累合した前記寸切りボルトの前記フランジ部側を締め付けるとともに、前記ねじ切り部の端部を密閉部材で覆うことにより、前記フランジ部と前記板状部材との間および前記密閉部材を繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、吸脱着部材の取付構造。 - 有機溶剤を含有する原ガスから有機溶剤を分離することで原ガスを清浄化して排出するとともに、原ガスから分離した有機溶剤をキャリアガスを用いて回収する吸脱着処理装置内に配置され、有機溶剤を吸着および脱着する吸脱着部材の取付構造であって、
前記吸脱着処理装置の内部上方には前記吸脱着部材を挿通させる1または2以上の開口孔を含む板状部材が配置され、
前記吸脱着部材は、筒状の吸脱着素子と、前記吸脱着素子の上面に設けられ、前記吸脱着素子の縁部から外方に向かって張り出すフランジ部を有する取付板と、を含み、
前記吸脱着部材を前記開口孔に挿通させて、前記吸脱着処理装置の内部に収容される際に、前記フランジ部と前記板状部材とが重なる位置に設けられる取付領域を備え、
前記取付領域は、六角ボルトと、Oリングと、ナットと、を含み、
前記フランジ部は、孔部を有し、
前記板状部材は、ねじ切り部を有し、
前記取付領域では、前記六角ボルトを前記ねじ切り部へ累合し、前記孔部を挿通した前記フランジ部の前記六角ボルトのねじ部を前記ナットで締め付けるとともに、前記孔部または前記ねじ切り部の少なくともいずれか一方を前記Oリングで密閉することにより、前記フランジ部と前記板状部材との間および前記Oリングを繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、吸脱着部材の取付構造。 - 有機溶剤を含有する原ガスから有機溶剤を分離することで原ガスを清浄化して排出するとともに、原ガスから分離した有機溶剤をキャリアガスを用いて回収する吸脱着処理装置内に配置され、有機溶剤を吸着および脱着する吸脱着部材の取付構造であって、
前記吸脱着処理装置の内部上方には前記吸脱着部材を挿通させる1または2以上の開口孔を含む板状部材が配置され、
前記吸脱着部材は、筒状の吸脱着素子と、前記吸脱着素子の上面に設けられ、前記吸脱着素子の縁部から外方に向かって張り出すフランジ部を有する取付板と、を含み、
前記吸脱着部材を前記開口孔に挿通させて、前記吸脱着処理装置の内部に収容される際に、前記フランジ部と前記板状部材とが重なる位置に設けられる取付領域を備え、
前記取付領域は、六角ボルトと、ナットと、を含み、
前記フランジ部は、孔部を有し、
前記板状部材は、ねじ切り部を有し、
前記取付領域では、前記孔部を挿通した前記六角ボルトを前記ねじ切り部へ累合し、前記六角ボルトの前記板状部材側を前記ナットで締め付けるとともに、前記フランジ部側の前記六角ボルトの頭部の周囲を全周溶接することにより、溶接部および前記フランジ部と前記板状部材との間を繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、吸脱着部材の取付構造。 - 有機溶剤を含有する原ガスから有機溶剤を分離することで原ガスを清浄化して排出するとともに、原ガスから分離した有機溶剤をキャリアガスを用いて回収する吸脱着処理装置内に配置され、有機溶剤を吸着および脱着する吸脱着部材の取付構造であって、
前記吸脱着処理装置の内部上方には前記吸脱着部材を挿通させる1または2以上の開口孔を含む板状部材が配置され、
前記吸脱着部材は、筒状の吸脱着素子と、前記吸脱着素子の上面に設けられ、前記吸脱着素子の縁部から外方に向かって張り出すフランジ部を有する取付板と、を含み、
前記吸脱着部材を前記開口孔に挿通させて、前記吸脱着処理装置の内部に収容される際に、前記フランジ部と前記板状部材とが重なる位置に設けられる取付領域を備え、
前記取付領域は、ボルトと、前記板状部材の上部に固定される台座部と、を含み、
前記フランジ部は、孔部を有し、
前記台座部は、ねじ切り部を有し、
前記取付領域では、前記孔部を挿通した前記ボルトを前記ねじ切り部へ累合し、前記フランジ部側を締め付けることにより、前記フランジ部と前記台座部との間および前記台座部と前記板状部材との間を繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、吸脱着部材の取付構造。 - 前記板状部材は、ねじ切り凹部を有し、
前記取付領域では、前記孔部を挿通した前記ボルトを前記ねじ切り凹部へ累合し、前記フランジ部側を締め付けることにより、前記フランジ部と前記板状部材との間および前記ねじ切り凹部を繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、請求項1に記載の吸脱着部材の取付構造。 - 前記板状部材の上部に前記ボルトが垂直に溶接され、
前記取付領域では、前記孔部を挿通した前記ボルトの前記フランジ部側を締め付けることにより、前記フランジ部と前記板状部材との間および前記ボルトの溶接部との間を繋ぐ位置が密閉されて、前記板状部材側から前記フランジ部側へ原ガスまたはキャリアガスの漏洩を遮断する漏洩遮断構造が形成される、請求項1に記載の吸脱着部材の取付構造。 - 前記漏洩遮断構造は、前記孔部から見て前記吸脱着素子側の位置において、前記フランジ部の下面にシール部材を有する、請求項1から請求項7のいずれか1項に記載の吸脱着部材の取付構造。
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KR102648977B1 (ko) | 2018-11-12 | 2024-03-20 | 엘지디스플레이 주식회사 | 유기발광 표시장치 |
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- 2022-09-01 WO PCT/JP2022/032999 patent/WO2023037964A1/ja active Application Filing
- 2022-09-01 CN CN202280060457.4A patent/CN117999117A/zh active Pending
- 2022-09-01 KR KR1020247010650A patent/KR20240052819A/ko unknown
- 2022-09-01 JP JP2022577656A patent/JPWO2023037964A1/ja active Pending
- 2022-09-06 TW TW111133628A patent/TW202319104A/zh unknown
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JPWO2023037964A1 (ja) | 2023-03-16 |
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