WO2023027396A1 - Connecteur de transmission de signaux - Google Patents

Connecteur de transmission de signaux Download PDF

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Publication number
WO2023027396A1
WO2023027396A1 PCT/KR2022/012005 KR2022012005W WO2023027396A1 WO 2023027396 A1 WO2023027396 A1 WO 2023027396A1 KR 2022012005 W KR2022012005 W KR 2022012005W WO 2023027396 A1 WO2023027396 A1 WO 2023027396A1
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WO
WIPO (PCT)
Prior art keywords
conductive
signal transmission
conductive sheet
sheet
transmission connector
Prior art date
Application number
PCT/KR2022/012005
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English (en)
Korean (ko)
Inventor
김선아
남윤찬
Original Assignee
(주)티에스이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)티에스이 filed Critical (주)티에스이
Publication of WO2023027396A1 publication Critical patent/WO2023027396A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present invention relates to a signal transmission connector, and more particularly, to a signal transmission connector used to transmit an electrical signal by connecting a test board of a tester and a device under test having different pitches.
  • test sockets for transmitting electrical signals are used in various fields such as the electronic industry or the semiconductor industry.
  • a test socket is used in a semiconductor device test process.
  • a test of a semiconductor device is performed to determine whether a manufactured semiconductor device is defective.
  • a predetermined test signal is sent from a test device to a semiconductor device to determine whether or not the semiconductor device is short-circuited.
  • Such a test apparatus and a semiconductor device are not directly connected to each other, but indirectly connected through a test socket.
  • Test sockets typically include pogo sockets and rubber sockets.
  • a pogo socket it is configured by assembling individually manufactured pogo pins into a housing, and there are few cases of short and leakage between pogo pins, but damage to the package ball or unit cost Demand for rubber sockets is increasing rather than pogo sockets in the semiconductor test process due to rising prices.
  • the rubber socket has a structure in which a conductive part in which a plurality of conductive particles are included inside an elastic material such as silicon is disposed to be insulated from each other inside an insulating part made of an elastic material such as silicon.
  • a rubber socket has a characteristic of exhibiting conductivity only in the thickness direction, and since mechanical means such as soldering or springs are not used, it has excellent durability and can achieve simple electrical connection. In addition, since mechanical shock or deformation can be absorbed, there is an advantage in that smooth connection to a semiconductor device or the like is possible.
  • FIG. 1 schematically shows a test apparatus 1000 having a test socket made of a conventional rubber socket used for testing a device under test.
  • the test socket 20 shown in (a) of FIG. 1 connects a plurality of conductive parts 21 formed at positions corresponding to the terminals 11 of the device under test 10 and the plurality of conductive parts 21 to each other. It includes an insulating part 22 that supports to be spaced apart.
  • the conductive part 21 is formed in a form in which a plurality of conductive particles are included in an elastic insulating material.
  • the conventional test socket 20 is installed on a test board 30 mounted on a tester (not shown), the upper end of the conductive part 21 contacts the terminal 11 of the device under test 10, and the lower end By contacting the pad 31 of the test board 30, the test board 30 and the device under test 10 are electrically connected.
  • the pitch of the pads of the existing test board 30 must also be changed to have the same pitch as the pitch of the device under test 10 .
  • a lot of cost and time are required, which inevitably leads to an increase in test cost and a decrease in work efficiency.
  • the pitch conversion printed circuit board 50 on which the pitch-converted wiring pattern 51 is formed on the lower socket 20 having the same pitch as the pitch of the test board 30 ), and placing the upper socket 40 having the same pitch as the device under test 10 between the device under test 10 having a different pitch and the printed circuit board 50 for converting the pitch, to proceed with the test. is being considered
  • FIG. 2 schematically illustrates a conventional test apparatus 2000 used in a test process of a device under test and a test board having different pitches.
  • an upper pad 52 As shown in FIG. 2, between the upper socket 40 and the lower socket 20 having different pitches, an upper pad 52 and By disposing the printed circuit board 50 for pitch conversion having a lower pad 53, the terminal 11 of the device under test 10 having a different pitch is electrically connected to the pad 31 of the test board 30. run the test
  • the printed circuit board 50 for pitch conversion is disposed between the upper socket 20 and the lower socket 30 made of rubber sockets, a smooth connection with the device under test can be achieved without using mechanical means such as soldering or springs. There is a problem in that the advantage of the rubber socket that enables this is not fully demonstrated.
  • the present invention has been made in view of the above points, and an object of the present invention is to provide a signal transmission connector that easily and electrically mediates between a device under test and a test board having different pitches or displaced from each other.
  • a signal transmission connector for solving the above object is a signal transmission connector electrically mediating a device under test and a test board, comprising: a plurality of through holes formed in an insulating sheet made of an inelastic insulating material; In the through hole, a plurality of conductive sheets in which conductive parts in which a plurality of conductive particles are vertically oriented are disposed in an elastic insulating material, and a plurality of conductive sheets are stacked on top of each of the plurality of conductive sheets at positions corresponding to terminals of the device under test.
  • the middle conductive part of the upper unit conductive sheet contacting the conductive sheet may at least partially contact the upper conductive part, and the middle conductive part of the lower unit conductive sheet contacting the lower conductive sheet may at least partially contact the lower conductive part.
  • the terminals of the device under test and the pads of the test board may have different pitches.
  • terminals of the device under test and the pads of the test board may be arranged offset from each other while having the same pitch.
  • the plurality of conductive sheets may be coupled by a screw fastening method.
  • the diameters of the upper conductive part, the lower conductive part, and the middle conductive part may be different from each other.
  • a plurality of through-holes formed in an insulating sheet made of an inelastic insulating material, and an elastic insulating material in the through-holes are stacked, and the plurality of conductive sheets include: an upper conductive sheet having upper conductive parts formed at positions corresponding to terminals of the device to be tested; a lower conductive sheet having lower conductive parts formed at positions corresponding to the pads of the test board; and an intermediate conductive sheet disposed between the upper conductive sheet and the lower conductive sheet, having an upper portion at least partially in contact with the upper conductive portion, and a lower portion having an intermediate conductive portion at least partially in contact with the lower conductive portion.
  • the terminals of the device under test and the pads of the test board may have different pitches.
  • terminals of the device under test and the pads of the test board may be arranged offset from each other while having the same pitch.
  • the signal transmission connector according to an embodiment of the present invention can be used even when the pitch of the device under test terminals and the pitch of the test board pad are different from each other, and even if the pitch of the device under test is changed, the existing test board can be used as it is. There is an effect.
  • the signal transmission connector according to an embodiment of the present invention can be configured using a prefabricated conductive sheet for each pitch, the time required for manufacturing the signal transmission connector is reduced and the thickness of the signal transmission connector can be freely adjusted. There are advantages to being able to change.
  • the insulating sheet made of an inelastic insulating material supports the conductive part of each conductive sheet, the pressing force of the device to be tested is intensively transmitted only to the conductive part, and thus between the upper and lower conductive parts. A stable connection is possible.
  • the signal transmission connector according to an embodiment of the present invention can detachably stack conductive sheets, only damaged or repairable conductive sheets can be separated and replaced or repaired, thereby reducing test costs and work It has the effect of improving efficiency.
  • the terminals of the device under test and the test board are connected according to the position. It has the effect of making the pad connectable.
  • FIG. 1 shows a test device having a conventional test socket.
  • FIG. 2 shows a conventional test apparatus used in a test process of a device under test and a test board having different pitches.
  • FIG. 3 illustrates one conductive sheet to explain a signal transmission connector according to an embodiment of the present invention.
  • FIG. 4 shows a signal transmission connector according to an embodiment of the present invention.
  • FIG. 5 illustrates a modified example of a signal transmission connector according to an embodiment of the present invention.
  • FIG. 6 illustrates a test device using a signal transmission connector according to an embodiment of the present invention.
  • FIG. 7 illustrates a test device using a signal transmission connector according to another embodiment of the present invention.
  • FIG. 8 is a top view showing various modifications of the signal transmission connector according to the present invention.
  • FIG. 3 shows a conductive sheet to explain a signal transmission connector according to an embodiment of the present invention
  • FIG. 4 shows a signal transmission connector according to an embodiment of the present invention
  • FIG. It shows a modified example of the signal transmission connector according to an embodiment
  • FIG. 6 shows a test device using the signal transmission connector according to an embodiment of the present invention.
  • the signal transmission connector 200 electrically mediates the device under test 100 and the test board 300, and the insulating sheet 420 made of an inelastic insulating material.
  • a plurality of through-holes 421 formed in the through-holes 421, and a plurality of conductive sheets 400 in which a plurality of conductive particles are vertically oriented in an elastic insulating material 410 are disposed.
  • the plurality of conductive sheets include an upper conductive sheet 210 having an upper conductive part 211 formed at each position corresponding to the terminal 101 of the device under test, and a lower conductive sheet 210 at each position corresponding to the pad 301 of the test board.
  • the intermediate conductive parts which are formed by being stacked and disposed vertically, include an intermediate conductive sheet 230 that at least partially contacts, and the middle conductive part 241 of the upper unit conductive sheet 240 that contacts the upper conductive sheet 210 has an upper portion thereof.
  • the middle conductive part 261 of the lower unit conductive sheet 260 that is at least partially in contact with the conductive part 211 and that is in contact with the lower conductive sheet 220 is formed to be in contact with the lower conductive part 221 at least in part.
  • the signal transmission connector 200 connects to the device under test 10 and transmits an electrical signal transmitted from the test board 300, thereby testing the device under test through a tester or electrically connecting electronic devices and various electronic devices. It can be used to connect and transmit electrical signals.
  • the signal transmission connector 200 is installed on the test board 300 to transmit electrical signals between the test board 300 having different pitches and the device under test 100. It is described as an example by performing.
  • FIG. 3 is for explaining the conductive sheet 400, and in FIG. 4, the signal transmission connector 200 used for the test board 300 having a wide pitch interval and the device under test 100 having a narrow pitch interval, An intermediate conductive sheet 230 having three unit conductive sheets 240, 250, and 260 is exemplarily shown and described.
  • the signal transmission connector 200 includes a plurality of through holes 421 formed in an insulating sheet 420 made of an inelastic insulating material, and the through holes 421 ) is formed by stacking a plurality of conductive sheets 400 in which a conductive portion 410 in which a plurality of conductive particles are vertically oriented in an elastic insulating material is disposed.
  • each conductive sheet 400 has the same basic structure, only the insulating sheet 420 and the through hole 421 are shown in FIG. 3 .
  • the insulating sheet 420 is made of an inelastic insulating material and supports adjacent conductive parts 410 to be spaced apart from each other.
  • the through holes 421 are formed in plurality to pass through the insulating sheet 420 in a thickness direction (ie, a direction connecting the upper and lower surfaces of the insulating sheet 420, which is the same as the vertical direction).
  • the insulating sheet 420 may be made of engineering plastics such as polyimide (PI) or other various inelastic insulating materials.
  • PI polyimide
  • the conductive part 410 may be formed in a form in which a plurality of conductive particles are vertically oriented in an elastic insulating material by applying a vertical magnetic field during a manufacturing process.
  • the conductive part 410 may be disposed in the through hole 421 and penetrate the insulating sheet 420 in the thickness direction.
  • a heat-resistant high molecular material having a cross-linked structure for example, silicone rubber
  • a magnetic field may be used as the conductive particles constituting the conductive part 410. It has magnetism so that it can react, for example, particles of a metal showing magnetism such as iron, nickel, cobalt, or alloy particles thereof, or particles containing these metals or these particles are used as core particles, and the core A metal having good conductivity such as gold, silver, palladium, or radium plated on the surface of the particle may be used.
  • the signal transmission connector 200 is formed by stacking a plurality of conductive sheets 400 in which the conductive parts 410 are disposed in the through holes 421 of the insulating sheet 420 described above.
  • the plurality of conductive sheets include an upper conductive sheet 210, a lower conductive sheet 220, and a middle conductive sheet 230 formed by stacking a plurality of unit conductive sheets 240, 250, and 260.
  • the upper conductive sheet 210 is a portion directly contacting the device under test 100 and is disposed on the uppermost side.
  • upper conductive parts 211 are disposed in through-holes formed at positions corresponding to terminals 101 of devices under test. Therefore, the upper conductive part 211 can be connected to the terminal 101 of the device under test.
  • the lower conductive sheet 220 is a portion in direct contact with the test board 300 and is disposed on the lowermost side.
  • the lower conductive parts 221 are disposed in through-holes formed at positions corresponding to the pads 301 of the test board. Accordingly, the lower conductive part 221 may be connected to the pad 301 of the test board.
  • an intermediate conductive sheet 230 is disposed between the upper conductive sheet 210 and the lower conductive sheet 220 .
  • the intermediate conductive sheet 230 is formed by stacking a plurality of unit conductive sheets, and FIG. 4 shows that three unit conductive sheets 240, 250, and 260 are exemplarily stacked, but more unit conductive sheets are stacked. It can be.
  • Each of the unit conductive sheets 240 , 250 , and 260 may have an upper conductive portion 211 or a lower conductive portion 221 and a corresponding number of middle conductive portions 241 , 251 , and 261 formed thereon.
  • the intermediate conductive sheet 230 is formed by stacking such that the intermediate conductive parts 241, 251, and 261 of each unit conductive sheet come into contact with at least a portion of the upper or lower intermediate conductive parts of other units. Accordingly, the intermediate conductive parts 241, 251, and 261 disposed vertically on the intermediate conductive sheet 230 may be electrically connected to each other.
  • the middle conductive portion 241 of the unit conductive sheet 240 (this is referred to as an 'upper unit conductive sheet') in contact with the upper conductive sheet 210 in the middle conductive sheet 230 is at least partially in contact with the upper conductive portion 211
  • the middle conductive part 261 of the unit conductive sheet 260 (referred to as a 'lower unit conductive sheet') in contact with the lower conductive sheet 220 is disposed to come into contact with the lower conductive part 221 at least partially. Accordingly, the upper conductive portion 211 of the upper conductive sheet 210 and the lower conductive portion 221 of the lower conductive sheet 220 may be electrically connected to each other through the middle conductive portion 231 .
  • each of the conductive parts 211, 231, and 221 of the upper conductive sheet 210, the middle conductive sheet 230, and the lower conductive sheet 220 move in a vertical direction. Since it is electrically connected, it can be applied to a test device in which the pitch (b) of the device under test and the pitch (p) of the test board pad are different.
  • the upper conductive sheet 210 is The one with the same upper conductive part 211 is used, the lower conductive sheet 220 is used with the same lower conductive part 221 as the pitch of the test board pad 301, and each unit of the intermediate conductive sheet 230 is used.
  • Conductive sheets 240, 250, and 260 have a pitch that increases from the upper conductive sheet 210 to the lower conductive sheet 220 (i.e., n1>n2>n3) to manufacture a signal transmission connector, thereby performing a test. can do.
  • the pitch (b) of the terminals of the device under test is greater than the pitch (p) of the test board pad, when the signal transmission connector 200 shown in FIG. 6(b)), it can also be applied to a test apparatus in which the pitch (b) of the terminals of the device under test is larger than the pitch (p) of the test board pad.
  • each conductive sheet constituting the signal transmission connector 200 contact many of the conductive parts arranged vertically, it is advantageous for signal transmission, so the diameter (d) of the conductive part of each conductive sheet It is possible to increase or decrease the area in contact between the conductive parts arranged vertically by forming a gradual increase or decrease toward the test board 300 .
  • the middle conductive sheet 230 is composed of three unit conductive sheets 240, 250, and 260, and the conductive parts of each unit conductive sheet 240, 250, and 260 While the pitch of is gradually increased (n1>n2>n3) toward the test board 300, the signal transmission connector 200 shown in FIG. 5 is made of one unit conductive sheet having a conductive part pitch of 'n3'. There is a difference only in that the intermediate conductive sheet 230 is constituted.
  • An intermediate conductive sheet 230 having an intermediate conductive portion 231 is constituted by one unit conductive sheet, and the upper portion of the intermediate conductive portion 231 is at least partially in contact with the upper conductive portion 211, and the lower portion is in contact with the lower conductive portion ( 221, the upper conductive portion 211 of the upper conductive sheet 210 and the lower conductive portion 221 of the lower conductive sheet 220 are electrically connected to each other by the middle conductive portion 231.
  • the middle conductive sheet 230 disposed between the upper conductive sheet 210 and the lower conductive sheet 220 may be composed of an appropriate number of conductive sheets as needed in consideration of the thickness of the signal transmission connector 200 and the like. there is.
  • a plurality of conductive sheets constituting the signal transmission connector 200 may be stacked in the following manner.
  • a conductive sheet is manufactured for each pitch, and an appropriate conductive sheet is taken into account, such as the terminal pitch (b) of the device under test, the pad pitch (p) of the test board, and the distance between the device under test 100 and the test board 300.
  • conductive parts disposed above and below may be stacked so that they come into contact with each other.
  • each of the laminated conductive sheets may be coupled by screw fastening, each conductive sheet may be bonded to each other by using an adhesive, or each conductive sheet may be completely bonded using an adhesive.
  • each conductive sheet may be damaged or need repair, but if only the damaged or repaired conductive sheets are separated and replaced or repaired, cost and time can be reduced. It is more preferable that conductive sheets are laminated.
  • insulating sheets are arranged so that through-holes disposed up and down are connected, a mixture containing a plurality of conductive particles in an elastic insulating material is filled in the through-holes, and then the through-holes are vertically disposed using magnetic poles disposed above and below the through-holes.
  • a plurality of conductive sheets may be stacked by applying a magnetic field in a direction so that a plurality of conductive particles are oriented in a vertical direction, and then curing the mixture to form a conductive portion. According to this method, since each conductive sheet is coupled by the conductive part, there is an advantage in that a separate assembly or bonding process is not required and a process of aligning the conductive part between the conductive sheets is not required.
  • a test device having a signal transmission connector 200 acts as follows.
  • Figure 6 (a) shows the test apparatus 3000 when the terminal pitch (b) of the device under test is smaller than the pad pitch (p) of the test board
  • Figure 6 (b) shows the device under test The test device 4000 in the case where the terminal pitch (b) is larger than the pad pitch (p) of the test board is shown.
  • a picker (not shown) adsorbs the device under test 100 and places it above the signal transmission connector 200 .
  • a pusher presses the device to be tested 100, the terminal 101 of the device to be tested and the upper conductive portion 210 of the upper conductive sheet 210 are electrically connected, and the upper conductive portion 211 ) is electrically connected by compressing the middle conductive part 231 of the middle conductive sheet 230 and the lower conductive part 221 of the lower conductive sheet 220, and the lower conductive part 221 is connected to the pad 301 of the test board.
  • the signal transmission connector 200 electrically connects the test board 300 and the device under test 100 by pressurization of the device under test 100, the test signal of the test board 300 is transmitted to the device under test 100. ), and a test on whether the device under test 100 is defective is performed.
  • the conductive sheet according to the present invention has a structure in which the conductive part is disposed on the insulating sheet 420 made of an inelastic insulating material, the pressing force of the device under test 100 can be applied intensively to the conductive part, thereby providing stable connection between the upper and lower conductive parts. This becomes possible
  • the signal transmission connector according to an embodiment of the present invention can be used even when the pitch of the device under test terminals and the pitch of the test board pad are different from each other, and even if the pitch of the device under test is changed, the existing test There is an effect that the board can be used as it is.
  • the signal transmission connector can be configured using a prefabricated conductive sheet for each pitch, the time required for manufacturing the signal transmission connector is reduced and the thickness of the signal transmission connector can be freely changed.
  • the insulating sheet made of an inelastic insulating material supports the conductive part of each conductive sheet, the pressing force of the device under test is transmitted intensively only to the conductive part, enabling stable connection between the upper and lower conductive parts.
  • the conductive sheets can be detachably stacked, only the damaged or need-to-repair conductive sheets can be separated and replaced or repaired, thereby reducing test costs and improving work efficiency.
  • FIG. 7 illustrates a test device 5000 using a signal transmission connector according to another embodiment of the present invention.
  • the signal transmission connector 200 Compared to the signal transmission connector 200 shown in FIGS. 4 to 6, the signal transmission connector 200 according to another embodiment of the present invention has a terminal pitch (b) of the device under test and a pad pitch (p) of the test board. ) have the same pitch and are displaced left and right by 'x'.
  • FIG. 7 exemplarily, it is shown that the diameter d of the conductive part in each conductive sheet is constant, but is not limited thereto.
  • the signal transmission connector 200 serves as an interface connecting upper and lower electronic devices, and when the terminal 101 of the upper device under test is made of, for example, a C- or S-shaped cobra pin. As such, it may not always match the pad 301 of the test board.
  • the signal transmission connector 200 according to another embodiment of the present invention can be usefully used in this case.
  • the position It has the effect of enabling the terminal of the device to be tested and the pad of the test board to be connected according to the
  • FIG. 8 shows various modifications of the signal transmission connector according to the present invention, and shows a top view.
  • 8(b) shows the device under test 100 and the test board 300 having the same pitch by using the upper conductive part 211, the middle conductive part 231 and the lower conductive part 221 having the same diameter.
  • 8 (b) shows the signal transmission connector used when arranged out of alignment with each other. 8 (b) may be viewed as a top view of the signal transmission connector 200 shown in FIG.
  • the pitch b of the device under test terminal is the pitch of the test board pad using the upper conductive part 211, the middle conductive part 231 and the lower conductive part 221 having different diameters. It shows the signal transmission connector used in the case of (p) greater than.
  • FIG. 8(d) shows the device under test 100 and the test board 300 having the same pitch by using the upper conductive part 211, the middle conductive part 231 and the lower conductive part 221 having different diameters. ) shows the signal transmission connector used when arranged out of alignment with each other.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Leads Or Probes (AREA)
  • Environmental & Geological Engineering (AREA)

Abstract

La présente invention concerne un connecteur de transmission de signaux connecté à un dispositif à inspecter et à une carte d'essai d'un appareil d'essai et utilisé pour transmettre des signaux électriques, le dispositif et l'appareil d'essai présentant des pas différents. Le connecteur de transmission de signaux selon la présente invention est formé par empilement d'une pluralité de feuilles conductrices, dont chacune présente : une pluralité de trous traversants formés dans une feuille isolante constituée d'un matériau isolant non élastique ; et des parties conductrices qui sont dans les trous traversants et dans lesquelles une pluralité de particules conductrices sont orientées verticalement dans un matériau isolant élastique. La pluralité de feuilles conductrices comprend : une feuille conductrice supérieure, dont des parties conductrices supérieures sont formées à chacune des positions correspondant aux bornes du dispositif à inspecter ; une feuille conductrice inférieure, dont des parties conductrices inférieures sont formées à chacune des positions correspondant à des pastilles de la carte d'essai ; et une feuille conductrice intermédiaire, disposée entre la feuille conductrice supérieure et la feuille conductrice inférieure et formée par empilement d'une pluralité de feuilles conductrices unitaires comportant des parties conductrices intermédiaires, dont celles disposées verticalement sont au moins partiellement en contact mutuel. Les parties conductrices intermédiaires d'une feuille conductrice d'unité supérieure en contact avec la feuille conductrice supérieure sont au moins partiellement en contact avec les parties conductrices supérieures et les parties conductrices intermédiaires d'une feuille conductrice d'unité inférieure en contact avec la feuille conductrice inférieure sont au moins partiellement en contact avec les parties conductrices inférieures.
PCT/KR2022/012005 2021-08-27 2022-08-11 Connecteur de transmission de signaux WO2023027396A1 (fr)

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KR1020210114104A KR102597274B1 (ko) 2021-08-27 2021-08-27 신호 전송 커넥터

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KR20130023819A (ko) * 2011-08-30 2013-03-08 주식회사 오킨스전자 테스트 소켓
KR20170104905A (ko) * 2016-03-07 2017-09-18 주식회사 이노글로벌 반도체 디바이스 테스트용 양방향 도전성 소켓, 반도체 디바이스 테스트용 양방향 도전성 모듈 및 이의 제조방법
KR20190098952A (ko) * 2016-12-22 2019-08-23 미쓰이금속광업주식회사 다층 배선판의 제조 방법
KR101956080B1 (ko) * 2017-12-28 2019-03-11 (주)티에스이 고속 신호전달이 가능한 반도체 테스트용 번인 소켓 및 그의 제작 방법

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