WO2023026929A1 - 加熱装置 - Google Patents

加熱装置 Download PDF

Info

Publication number
WO2023026929A1
WO2023026929A1 PCT/JP2022/031108 JP2022031108W WO2023026929A1 WO 2023026929 A1 WO2023026929 A1 WO 2023026929A1 JP 2022031108 W JP2022031108 W JP 2022031108W WO 2023026929 A1 WO2023026929 A1 WO 2023026929A1
Authority
WO
WIPO (PCT)
Prior art keywords
heater
heaters
heating
pattern
heating device
Prior art date
Application number
PCT/JP2022/031108
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
健 岡村
Original Assignee
京セラ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Priority to JP2023543848A priority Critical patent/JP7693006B2/ja
Publication of WO2023026929A1 publication Critical patent/WO2023026929A1/ja

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/72—Plates of sheet metal

Definitions

  • the disclosed embodiments relate to heating devices.
  • Patent Document 1 discloses a heating device in which a plurality of heaters are arranged parallel to the heating surface of the mold by inserting the heaters into a plurality of holes formed in the side surface of the mold.
  • a heating device has a heating plate and a plurality of heaters.
  • the heating plate has a heating surface, and a plurality of recesses are formed on the back surface opposite to the heating surface.
  • a plurality of heaters are respectively inserted into the plurality of recesses.
  • a wiring portion having a planarly spreading pattern is positioned inside each of the plurality of heaters. Further, at least one heater among the plurality of heaters has a pattern surface orientation of the wiring portion different from the pattern surface orientation of the other heaters adjacent to the heater.
  • FIG. 1 is a side view of the heating device according to the embodiment viewed from the Y-axis negative direction.
  • FIG. 2 is a plan view of the heating device according to the embodiment viewed from the Z-axis positive direction.
  • 3 is a side cross-sectional view taken along line III-III shown in FIG. 2.
  • FIG. 4 is a cross-sectional view of the heater according to the embodiment.
  • 5 is a cross-sectional view taken along line VV shown in FIG. 4.
  • FIG. FIG. 6 is a schematic diagram for explaining an example of the orientation of pattern surfaces of heating resistors of a plurality of heaters.
  • FIG. 7 is a schematic diagram for explaining another example of the orientation of the pattern surfaces of the heating resistors of the plurality of heaters.
  • FIG. 8 is a schematic diagram for explaining another example of the orientation of the pattern surfaces of the heating resistors of the plurality of heaters.
  • 9 is an enlarged plan cross-sectional view of the IX portion shown in FIG. 8.
  • FIG. 10 is an enlarged side sectional view of the X portion shown in FIG. 8.
  • FIG. 11 is a schematic diagram for explaining another example of the orientation of the pattern surfaces of the heating resistors of the plurality of heaters.
  • FIG. 12 is a schematic diagram for explaining another example of the orientation of the pattern surfaces of the heating resistors of the plurality of heaters.
  • FIG. 13 is a cross-sectional plan view showing another example of the heater according to the embodiment; FIG.
  • FIG. 14 is a schematic diagram for explaining another example of the orientation of the pattern surfaces of the heating resistors of the plurality of heaters.
  • FIG. 15 is a cross-sectional plan view showing another example of the heater according to the embodiment.
  • FIG. 16 is a schematic diagram for explaining another example of the orientation of the pattern surfaces of the heating resistors of the plurality of heaters.
  • the conventional technology described above has room for further improvement in terms of improving the uniformity of heat within the heating surface. Therefore, it is expected to provide a heating apparatus capable of improving uniformity of heat within the heating surface.
  • FIG. 1 is a side view of the heating device 100 according to the embodiment viewed from the Y-axis negative direction.
  • FIG. 2 is a plan view of the heating device 100 according to the embodiment viewed from the Z-axis positive direction.
  • 3 is a side cross-sectional view taken along line III-III shown in FIG. 2.
  • the heating device 100 when the heating device 100 is brought into contact with the object to be heated, the surface located on the side of the object to be heated is defined as the "upper surface”, and the surface located on the opposite side of the object to be heated is defined as the “lower surface”. .
  • the heating device 100 is not limited to this, and may be used upside down, for example, or may be used in an arbitrary posture.
  • the heating device 100 shown in FIG. 1 has a heating plate 110, a plurality of heaters 120, and a fixed plate .
  • the heating plate 110 is, for example, a plate-like member made of metal, and has an upper surface 110a that can come into contact with an object to be heated. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated.
  • the upper surface 110a is used, for example, for heating a mold as an example of an object to be heated.
  • a plurality of recesses 113 are formed in the lower surface 110b of the heating plate 110 opposite to the heating surface.
  • the heating plate 110 has a first plate member 111 , a second plate member 112 and a heat insulating member 115 .
  • the first plate member 111 is a plate member having an upper surface 110a of the heating plate 110, which is a heating surface.
  • the first plate member 111 has a heat insulating member 115 disposed between the first plate member 111 and the second plate member 112, and a joint member 114 such as a bolt (see FIGS. 2 and 3). is joined to the second plate member 112 by . That is, the lower surface 111a of the first plate member 111 opposite to the upper surface 110a is a joint surface to which the second plate member 112 is joined.
  • a plurality of recesses 111b are formed in a lower surface 111a of the first plate member 111 opposite to the heating surface.
  • the second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a surface to be joined that is joined to the joint surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a.
  • a plurality of through holes 112b are formed in the second plate member 112 at positions corresponding to the plurality of recesses 111b.
  • the heat insulating member 115 is interposed between the first plate member 111 and the second plate member 112 .
  • the heat insulating member 115 is, for example, a sheet-like member made of heat insulating fibers having gaps inside, such as porous or cotton, and conducts heat from the first plate member 111 side to the second plate member 112 side. It has the function of limiting transmission.
  • a plurality of through holes 115a are formed in the heat insulating member 115 at positions corresponding to the plurality of recesses 111b.
  • the material of the heat insulating member 115 is preferably heat insulating ceramics or glass, for example.
  • oxide ceramics such as aluminum oxide, nitride ceramics such as silicon nitride or aluminum nitride, or carbide ceramics such as silicon carbide can be used.
  • Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b, each of the plurality of through holes 115a, and the plurality of recesses 111b. That is, the inner surface of each through hole 112b, the inner surface of each through hole 115a, and the inner surface of each recess 111b form the inner surface of each recess 113, and the bottom surface of each recess 111b forms the bottom surface of each recess 113.
  • the tip portions 120a of the plurality of heaters 120 are positioned in the plurality of recesses 111b in a state in which the plurality of heaters 120 are inserted into the plurality of recesses 113, respectively.
  • the maximum heat generation point is heated. It can be close to the top surface 110a of the heating plate 110, which is a surface. As a result, the heating device 100 according to the embodiment can efficiently heat the upper surface 110a of the heating plate 110, which is the heating surface. Further, by locating the tip portions 120 a of the plurality of heaters 120 within the plurality of recesses 111 b , the maximum heat generating point can be kept away from the base end portions 120 b of the plurality of heaters 120 .
  • the heating device 100 can improve the effect of preventing deterioration of the anode-side lead electrode 123 and the cathode-side lead electrode 124 .
  • each tip 120a of the plurality of heaters 120 may or may not be in contact with the bottom surface of each recess 111b.
  • the fixing plate 130 is, for example, a plate-like member made of metal. A plurality of heaters 120 are fixed to the fixed plate 130 .
  • the fixed plate 130 is spaced apart from the second plate member 112 .
  • the fixed plate 130 is connected to the second plate member 112 with a connecting member 131 such as a bolt, with a gap formed between the fixed plate 130 and the heating plate 110 .
  • the fixed plate 130 is connected to the second plate member 112 by a plurality of (here, four) connecting members 131 .
  • the connecting member 131 has a distal end portion 131a formed with an external thread that can be fitted into the internal thread of the screw hole 112c of the second plate member 112 .
  • a distal end portion 131 a of the connecting member 131 fits into the screw hole 112 c of the second plate member 112 and extends in the direction of the first plate member 111 so as not to penetrate the heat insulating member 115 .
  • the tip portion 131a of the connecting member 131 extends from the lower surface 110b of the second plate member 112 to the upper surface 112a in the screw hole 112c, and extends to the surface of the heat insulating member 115 exposed from the screw hole 112c. in contact.
  • the tip portion 131a of the connecting member 131 extends toward the first plate member 111 so as not to penetrate the heat insulating member 115, thereby avoiding contact between the connecting member 131 and the first plate member 111. can be done. As a result, heat conduction from the first plate member 111 having the upper surface 110a, which is a heating surface, to the connecting member 131 is reduced.
  • the positions of the tip portions 131 a of the plurality of connecting members 131 are aligned on the same plane as the surface of the heat insulating member 115 .
  • the length of the heat transfer path from the first plate member 111 to the tip portions 131a of the plurality of connecting members 131 is made uniform, so that the heat uniformity of the first plate member 111 is improved.
  • the connecting member 131 has a spacer member 140 on the outer periphery of the portion located between the fixed plate 130 and the second plate member 112 .
  • the spacer member 140 has a tubular shape surrounding the outer periphery of the portion of the connecting member 131 located between the fixed plate 130 and the second plate member 112 , and is in contact with the fixed plate 130 and the second plate member 112 .
  • a gap may or may not be provided between the inner peripheral surface of the spacer member 140 and the outer peripheral surface of the connecting member 131 .
  • the spacer member 140 As a material for the spacer member 140, for example, metal such as stainless steel can be used. Thereby, the durability of the spacer member 140 can be improved, and the distance between the fixed plate 130 and the second plate member 112 can be maintained constant.
  • the second plate member 112 is, as shown in FIG. It is joined to the first plate member 111 .
  • the second plate member 112 is joined to the first plate member 111 by a plurality of (four in the example shown in FIG. 2) joining members 114 .
  • the plurality of heaters 120 are inserted into the plurality of recesses 113 respectively. Thereby, the plurality of heaters 120 are arranged so as to be perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface. In this way, by arranging the plurality of heaters 120 perpendicular to the upper surface 110a (heating surface) of the heating plate 110, variations in the distance between the plurality of heaters 120 and the heating surface are reduced. Heat uniformity within the heating surface can be improved. Also, the heater 120 has a temperature distribution in the longitudinal direction.
  • the temperature difference due to the temperature distribution of the heaters 120 is less likely to occur between the central portion and the outer peripheral portion of the upper surface 110a. can do.
  • the plurality of recesses 113 are arranged parallel to the sides of the heating plate 110 .
  • the heating plate 110 has a side parallel to the X-axis and a side parallel to the Y-axis.
  • a plurality of recesses 113 are arranged in a matrix parallel to the X-axis and the Y-axis.
  • FIG. 4 is a cross-sectional view of the heater 120 according to the embodiment.
  • 5 is a cross-sectional view taken along line VV shown in FIG. 4. As shown in FIG.
  • the heater 120 has a heater main body 121, a fixing member 122, an anode side lead electrode 123, and a cathode side lead electrode .
  • the heater body 121 is a ceramic heater.
  • the heater main body 121 is bar-shaped and has a distal end portion 120a and a proximal end portion 120b.
  • the heater body 121 is inserted into the recess 113 from the tip portion 120a side.
  • the heater main body 121 has a heating resistor 125 inside the ceramic body.
  • seizure between the heating plate 110 and the heater main body 121, which are made of metal, is less likely to occur.
  • the problem that the heater main body 121 is seized to the heating plate 110 and the heater 120 cannot be replaced is less likely to occur.
  • the heating resistor 125 (an example of the wiring portion) has a pattern (here, a substantially U-shaped pattern) that extends in a plane inside the heater body 121 .
  • the heating resistor 125 is positioned inside the heater main body 121 and includes two extending portions 125a extending along the longitudinal direction of the heater main body 121 (here, the Z-axis direction). It has a folded portion 125b that connects the two extended portions 125a on the distal end side.
  • the surface of the heating resistor 125 perpendicular to the plane on which the pattern shape of the heating resistor 125 spreads is referred to as the pattern surface S of the heating resistor 125.
  • the pattern surface S faces a direction orthogonal to the longitudinal direction (Z-axis direction) of the heater main body 121 .
  • the heating resistor 125 does not have front and back sides, and either of the two sides of the heating resistor 125 may be defined as the pattern surface S. In other words, both surfaces of the heating resistor 125 may be defined as the pattern surface S.
  • the length of the heater main body 121 that is, the length of the ceramic body can be, for example, about 1 mm or more and 200 mm or less.
  • the outer dimensions of the ceramic body can be, for example, about 0.5 mm or more and 100 mm or less.
  • the shape of the heater main body 121 that is, the shape of the ceramic body is, for example, a columnar shape as shown in FIG.
  • the shape of the heater main body 121 is not limited to a columnar shape, and may be, for example, an elliptical columnar shape or a prismatic shape.
  • the material of the ceramic body is, for example, ceramic having insulating properties.
  • oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used as the material of the ceramic body.
  • the heating resistor 125 is a member that generates heat when current flows. One end of the heating resistor 125 is connected to a coil portion 123a of an anode-side lead electrode 123, which will be described later. The other end of the heating resistor 125 is connected to a coil portion 124a of a cathode-side lead electrode 124, which will be described later.
  • the heating resistor 125 may contain a high-resistance conductor containing, for example, tungsten or molybdenum.
  • the dimensions of the heating resistor 125 can be, for example, a width of 0.1 mm or more and 5 mm or less, a thickness of 0.05 mm or more and 0.3 mm or less, and a total length of 1 mm or more and 500 mm or less.
  • the heating resistor 125 may be a conductive ceramic containing tungsten carbide, for example. In this case, the difference in thermal expansion between the ceramic body and the heating resistor 125 can be reduced. Thereby, thermal stress between the ceramic body and the heating resistor 125 can be reduced. As a result, durability of the heater main body 121 can be enhanced.
  • the fixing member 122 has a tubular shape surrounding the peripheral surface of the heater main body 121 .
  • the fixing member 122 has, for example, a first member 122a and a second member 122b.
  • a male screw 122c is located on the outer peripheral surface of the first member 122a.
  • the material of the first member 122a is, for example, a metal material having heat resistance.
  • a material of the fixing member 122 for example, an alloy containing Fe or Ni can be used.
  • the fixing member 122 can be made of stainless steel, Fe--Ni--Co alloy, Ni-based heat-resistant alloy, or the like.
  • the second member 122b is positioned between the first member 122a and the coil portion 124a of the lead electrode 124 on the cathode side.
  • the material of the second member 122b is, for example, insulating ceramics.
  • the material of the second member 122b may be, for example, alumina or silicon nitride.
  • the anode-side lead electrode 123 and the cathode-side lead electrode 124 are fixed to the peripheral surface of the heater main body 121 .
  • the anode-side lead electrode 123 has one end connected to an external power source (not shown) and the other end electrically connected to the heating resistor 125 .
  • One end of the cathode-side lead electrode 124 is connected to an external power source (not shown), and the other end is electrically connected to the heating resistor 125 .
  • the anode-side lead electrode 123 and the cathode-side lead electrode 124 are, for example, wires containing metal materials such as nickel, iron, or nickel-based heat-resistant alloys.
  • the cross sections of the anode-side lead electrode 123 and the cathode-side lead electrode 124 may be circular, elliptical, or rectangular, for example.
  • the outer diameters of the anode-side lead electrode 123 and the cathode-side lead electrode 124 may be, for example, 0.5 mm or more and 2.0 mm or less.
  • the anode-side lead electrode 123 has a coil portion 123a and a terminal portion 123b.
  • the coil portion 123a is a portion of the anode-side lead electrode 123 that is spirally wound along the circumferential surface of the heater main body 121, and is electrically connected to one end of the heating resistor 125.
  • the terminal portion 123b is a portion of the anode-side lead electrode 123 that is drawn out of the heater main body 121 from the coil portion 123a.
  • the terminal portion 123b extends outward in the longitudinal direction of the heater body 121 (here, in the Z-axis negative direction) from the rear end of the heater body 121 .
  • the cathode-side lead electrode 124 has a coil portion 124a and a terminal portion 124b.
  • the coil portion 124 a is spirally wound along the peripheral surface of the heater main body 121 and electrically connected to the other end of the heating resistor 125 .
  • the terminal portion 124b is a portion of the cathode-side lead electrode 124 that is pulled out from the coil portion 124a.
  • the terminal portion 124b extends radially outward of the heater main body 121 (here, in the positive Y-axis direction) from the peripheral surface of the heater main body 121 .
  • the lead electrodes (the anode lead electrode 123 and the cathode lead electrode 124) of the heater 120 are drawn out from the coil portions 123a and 124a located along the peripheral surface of the heater main body 121 and the coil portions 123a and 124a. and terminal portions 123b and 124b.
  • the coil portions 123a and 124a function as springs, so stress is less likely to concentrate. Therefore, the heater 120 configured in this manner has high durability.
  • the lead electrode provided at the position of the anode lead electrode 123 shown in FIG. 4 may be the cathode lead electrode 124 .
  • the lead electrode provided at the position of the cathode side lead electrode 124 shown in FIG. 4 may be the anode side lead electrode 123 .
  • a plurality of heaters 120 included in the heating device 100 are inserted into a plurality of recesses 113 formed in the lower surface 110b of the heating plate 110 .
  • the heating device 100 has a spacer member 170 on the outer periphery of the portion of the joining member 114 that penetrates the heat insulating member 115 .
  • the spacer member 170 has a tubular shape surrounding the portion of the joining member 114 that penetrates the heat insulating member 115 and is in contact with the first plate member 111 and the second plate member 112 .
  • a gap may or may not be provided between the inner peripheral surface of the spacer member 170 and the outer peripheral surface of the joining member 114 .
  • Surrounding the outer periphery of the joining member 114 with the cylindrical spacer member 170 makes it difficult for the heat of the joining member 114 to be transmitted to the heat insulating member 115 .
  • the spacer member 170 is preferably made of, for example, ceramic with relatively high heat insulation.
  • As the material of the spacer member 170 for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. This further reduces heat transfer from the joining member 114 to the heat insulating member 115 .
  • FIG. 6 is a schematic diagram for explaining an example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120. As shown in FIG.
  • At least one heater 120 among the plurality of heaters 120 is arranged such that the pattern surface S of the heating resistor 125 is oriented in the direction of another heater adjacent to that heater 120 .
  • the orientation of the pattern surface S at 120 is different.
  • the orientation of the pattern surface S5 of the heater 120_5 is different from the orientation of the pattern surface S6 of the heater 120_6 adjacent to the heater 120_5.
  • a ceramic heater containing a heat generating resistor with a planar pattern tends to have anisotropic temperature distribution compared to a cartridge heater containing a coil-shaped heat generating resistor with a three-dimensional pattern. Therefore, when a plurality of ceramic heaters are arranged on the heating plate, if the pattern surfaces of the heating resistors are oriented in the same direction, the in-plane temperature distribution of the heating surface may be anisotropic. That is, there is a possibility that the uniformity of heat on the heating surface may deteriorate.
  • the heating device 100 according to the embodiment since the directions of the pattern surfaces S of the two adjacent heaters 120 are not aligned, the in-plane temperature distribution of the heating surface is less likely to be anisotropic. Therefore, the heating device 100 according to the embodiment can improve heat uniformity within the heating surface.
  • At least two heaters 120 adjacent to each other among the plurality of heaters 120 of the heating device 100 should have different directions of the pattern surfaces S.
  • the plurality of heaters 120 located in the central portion of the upper surface 110a of the heating plate 110, which is a heating surface
  • two heaters 120 each include: It is preferable that the directions of the pattern surfaces S are different.
  • the heater 120 adjacent to the heater 120 in the arrangement direction (the X-axis direction and the Y-axis direction) of the plurality of heaters 120 is defined as “the heater 120 adjacent to the heater 120".
  • the heaters 120 adjacent to the heaters 120 in directions diagonal to the arrangement direction of the plurality of heaters 120 for example, directions of 45 degrees, 135 degrees, 225 degrees, and 315 degrees when viewed from the heaters 120) It is good also as “the heater 120 adjacent to the heater 120" including it.
  • the pattern surface S are preferably different by at least 10 degrees or more.
  • the direction of the pattern surface S of at least one heater 120 among the plurality of heaters 120 is set to two or more other heaters 120 adjacent to the heater 120 so as to surround the heater 120 . may be different from the orientation of any pattern surface S in .
  • heaters 120_2, 120_4, 120_6, and 120_8 are adjacent to heater 120_5 so as to surround heater 120_5.
  • the orientation of the pattern surface S5 of the heater 120_5 is different from the orientation of any of the pattern surfaces S2, S4, S6 and S8 of the heaters 120_2, 120_4, 120_6 and 120_8.
  • the heating device 100 having such a configuration can further improve the heat uniformity within the heating surface.
  • the heaters 120_2, 120_4, 120_6, and 120_8 that are adjacent to the heater 120_5 in the arrangement direction (the X-axis direction and the Y-axis direction) of the plurality of heaters 120 are described as “ described as "two or more other heaters 120".
  • 120_3, 120_7, and 120_9 may also be included in "two or more other heaters 120 adjacent to the heater 120 so as to surround the heater 120". That is, the orientation of the pattern surface S5 of the heater 120_5 may be different from the orientation of any of the pattern surfaces S1 to S4 and S6 to S9 of the heaters 120_1 to 120_4 and 120_6 to 120_9.
  • orientation of the pattern surface S of at least one heater 120 among the plurality of heaters 120 may be orthogonal to the orientation of the pattern surface S of the other heaters 120 adjacent to that heater 120 .
  • the pattern surface S8 of the heater 120_8 is orthogonal to the pattern surface S9 of the heater 120_9 adjacent to the heater 120_8.
  • the pattern surface S1 of the heater 120_1 is orthogonal to the pattern surface S2 of the heater 120_2 adjacent to the heater 120_1 and also orthogonal to the pattern surface S4 of the heater 120_4 adjacent to the heater 120_1.
  • the heating device 100 having such a configuration can further improve the heat uniformity within the heating surface.
  • FIG. 7 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120. As shown in FIG.
  • the directions of the pattern surfaces S of the adjacent heaters 120 may be different. With such a configuration, it is possible to improve the uniformity of heat over the entire heating surface.
  • FIG. 8 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120.
  • FIG. 9 is an enlarged plan cross-sectional view of the IX portion shown in FIG. 10 is an enlarged side cross-sectional view of the X portion shown in FIG.
  • At least one heater 120_11 out of the plurality of heaters 120 is a plane see-through (cross-sectional view in FIG. ), the center position C1 of the heater main body 121 and the center position C2 of the heating resistor 125 may be shifted.
  • the center position C2 of the heating resistor 125 may be rephrased as the center position of the folded portion 125b in plan see-through shown in FIG.
  • the central position C1 of the heater main body 121 may be rephrased as the position of the central axis of the heater 120 .
  • the heating device 100 is not only the heater 120 in which the center position C1 of the heater body 121 and the center position C2 of the heating resistor 125 are aligned, but also the center position C1 of the heater body 121 and the heating resistor.
  • a heater 120 (here, heater 120_11) deviated from the center position C2 of 125 may also be provided.
  • the positions of the heat generating resistors 125 that generate the highest heat can be dispersed for each heater 120, so that the heat uniformity within the heating surface can be improved.
  • At least one heater 120_12 among the plurality of heaters 120 and the heater 120_13 adjacent to this heater 120_12 have different distances from the tip portion 120a of the heater main body 121 to the folded portion 125b.
  • the heating resistor 125 has the maximum heat generation point at the folded portion 125b. Therefore, with such a configuration, the position of the maximum heat generation point in the thickness direction of the heating plate 110 can be dispersed for each heater 120 . Therefore, the heating device 100 having such a configuration can improve the heat uniformity within the heating surface.
  • FIG. 11 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120.
  • FIG. 11 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120.
  • the pattern of the heater 120 positioned at the outermost periphery of the upper surface 110a of the heating plate 110 among the plurality of heaters 120 in plan perspective seen from the direction perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface.
  • the plane S may be orthogonal to the edges 110c-110f of the top surface 110a of the heating plate 110.
  • the heaters 120_21 to 120_24 located in the XI1 part are located closest to the edge 110c of the upper surface 110a of the heating plate 110 among the plurality of heaters 120.
  • FIG. The pattern surfaces S21 to S24 of these heaters 120_21 to 120_24 are perpendicular to the edge 110c.
  • the pattern surfaces S of the plurality of heaters 120 located in the XI2 section are orthogonal to the edge 110d
  • the pattern surfaces S of the plurality of heaters 120 located in the XI3 section are orthogonal to the edge 110e
  • XI4 The pattern surface S of the plurality of heaters 120 located in the part is perpendicular to the edge 110f.
  • the heating device 100 having such a configuration can make it difficult for the temperature of the edge of the heating plate 110 to drop, and can further improve the uniformity of heat within the plane of the heating surface.
  • the heater 120_25 located at the XI5 portion is located closest to the corner between the edge 110c and the edge 110d of the upper surface 110a of the heating plate 110. .
  • the pattern surface S25 of the heater 120_25 extends toward the corner between the edge 110c and the edge 110d.
  • the pattern surface S of the heater 120 positioned at the XI6 portion extends toward the corner portion between the edge 110d and the edge 110e, and the pattern surface S of the heater 120 positioned at the XI7 is formed between the edge 110e and the edge 110f.
  • the pattern surface S of the heater 120 located at the XI8 portion extends toward the corner between the edge 110f and the edge 110c.
  • FIG. 12 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120. As shown in FIG.
  • the pattern surfaces S31 to S34 of these heaters 120_31 to 120_34 may be rotationally symmetrical with respect to the center point C3 of the upper surface 110a. In the example shown in FIG. 12, the pattern surfaces S31 to S34 extend radially around the center point C3.
  • the temperature distribution in the central portion of the upper surface 110a of the heating plate 110 can be made symmetrical. , the temperature uniformity of the object to be heated is likely to be maintained.
  • FIG. 13 is a plan sectional view showing another example of the heater 120 according to the embodiment.
  • FIG. 14 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120. As shown in FIG.
  • the heater 120 may have two or more heating resistors 125 with pattern surfaces S parallel to each other inside the heater body 121 .
  • Two or more heating resistors 125 are connected in parallel to the cathode side lead electrode 124 and the anode side lead electrode 123 .
  • FIG. 13 shows an example in which the heater 120 has two heating resistors 125, the number of the heating resistors 125 included in the heater 120 may be three or more.
  • the plurality of heaters 120 of the heating device 100 may incorporate two or more heating resistors 125 as shown in FIG. With such a configuration, compared to the case where the heater 120 incorporates one heat generating resistor 125, the maximum heat generation zone (folding portion 125b) in the heater 120 is dispersed. It is possible to make the anisotropy of the temperature to be generated more difficult. Therefore, the heating device 100 having such a configuration can further improve the heat uniformity within the heating surface.
  • FIG. 15 is a plan sectional view showing another example of the heater 120 according to the embodiment.
  • FIG. 16 is a schematic diagram for explaining another example of the orientation of the pattern surface S of the heating resistors 125 of the plurality of heaters 120. As shown in FIG.
  • the heater body 121 of the heater 120 may be square bar-shaped.
  • the pattern surface S of the heater 120 and the pattern surface S of the heater 120 adjacent to the heater 120 are perpendicular to each other.
  • heaters 120 whose pattern surfaces S extend in the Y-axis direction and heaters 120 whose pattern surfaces S extend in the X-axis direction are alternately arranged along the X-axis direction. They are arranged alternately along the axial direction.
  • the heating device 100 having such a configuration can further improve the heat uniformity within the heating surface.
  • the heating device has a heating plate (heating plate 110 as an example) and a plurality of heaters (heaters 120 as an example).
  • the heating plate has a heating surface (the upper surface 110a of the heating plate 110 as an example) and a plurality of recesses (the recesses 113 as an example) on the back surface opposite to the heating surface (the lower surface 110b of the heating plate 110 as an example). ) is formed.
  • a plurality of heaters are respectively inserted into the plurality of recesses.
  • a wiring portion (heating resistor 125 as an example) having a pattern extending in a plane is positioned inside each of the plurality of heaters. In at least one heater among the plurality of heaters, the orientation of the pattern surface (as an example, pattern surface S) of the wiring portion is different from the orientation of the pattern surface of the other heaters adjacent to the heater.
  • the heating device 100 according to the embodiment can improve heat uniformity within the heating surface.
  • heating device 110 heating plate 110a upper surface 110b lower surface 111 first plate member 111a lower surface 111b recess 112 second plate member 112a upper surface 112b through hole 113 recess 114 joining member 115 heat insulating member 115a through hole 120 heater 120a distal end 120b proximal end Part 121 Heater main body 122 Fixing member 122a First member 122b Second member 123 Anode side lead electrode 124 Cathode side lead electrode 125 Heating resistor 125a Extension 125b Folding part 130 Fixing plate 131 Connecting member 140 Spacer member 170 Spacer member S Pattern surface

Landscapes

  • Resistance Heating (AREA)
PCT/JP2022/031108 2021-08-27 2022-08-17 加熱装置 WO2023026929A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023543848A JP7693006B2 (ja) 2021-08-27 2022-08-17 加熱装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-139157 2021-08-27
JP2021139157 2021-08-27

Publications (1)

Publication Number Publication Date
WO2023026929A1 true WO2023026929A1 (ja) 2023-03-02

Family

ID=85321931

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/031108 WO2023026929A1 (ja) 2021-08-27 2022-08-17 加熱装置

Country Status (2)

Country Link
JP (1) JP7693006B2 (enrdf_load_stackoverflow)
WO (1) WO2023026929A1 (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046323A (ja) * 1990-04-23 1992-01-10 Mitsubishi Electric Home Appliance Co Ltd 電気こたつ
JP2004079440A (ja) * 2002-08-21 2004-03-11 Ngk Insulators Ltd 加熱装置およびその製造方法
JP2010287573A (ja) * 2009-06-11 2010-12-24 Semes Co Ltd 基板加熱ユニット及びこれを含む基板処理装置
JP2013058627A (ja) * 2011-09-08 2013-03-28 Shin Etsu Handotai Co Ltd エピタキシャル成長装置
JP2016207595A (ja) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5988403B2 (ja) 2012-12-21 2016-09-07 京セラ株式会社 ヒータ
JP6791636B2 (ja) 2016-01-25 2020-11-25 京セラ株式会社 セラミックヒータ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046323A (ja) * 1990-04-23 1992-01-10 Mitsubishi Electric Home Appliance Co Ltd 電気こたつ
JP2004079440A (ja) * 2002-08-21 2004-03-11 Ngk Insulators Ltd 加熱装置およびその製造方法
JP2010287573A (ja) * 2009-06-11 2010-12-24 Semes Co Ltd 基板加熱ユニット及びこれを含む基板処理装置
JP2013058627A (ja) * 2011-09-08 2013-03-28 Shin Etsu Handotai Co Ltd エピタキシャル成長装置
JP2016207595A (ja) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置

Also Published As

Publication number Publication date
JPWO2023026929A1 (enrdf_load_stackoverflow) 2023-03-02
JP7693006B2 (ja) 2025-06-16

Similar Documents

Publication Publication Date Title
TW575934B (en) A heating apparatus
US10483136B2 (en) Ceramic heater and electrostatic chuck
US7525071B2 (en) Power-supplying member and heating apparatus using the same
EP2852247B1 (en) Heating wire arrangement for ceramic heater
JP6527296B2 (ja) 構造的に支持される平面放射体を有するｘ線管
TW201038107A (en) Precision strip heating element
JP2012054234A (ja) 導電性接点構成
WO2023026929A1 (ja) 加熱装置
WO2020155968A1 (zh) 电池模块
JP2014022247A (ja) セラミックヒーター
JP5430997B2 (ja) セラミックヒータ
JP2018046079A (ja) 保持装置
JP2017117525A (ja) ヒータ
WO2023002861A1 (ja) 加熱装置
CN116895590A (zh) 静电吸盘
JP6108163B2 (ja) 面状発熱体
EP4518579A1 (en) Heating device
JP2023173194A (ja) 加熱装置
JP2023160042A (ja) 加熱装置
JPH10125505A (ja) 正特性サーミスタ及び正特性サーミスタ装置
JP7433200B2 (ja) ヒータ
JP7074946B1 (ja) 加熱装置
WO2023032755A1 (ja) 加熱装置
WO2022137769A1 (ja) 加熱装置
KR20150076259A (ko) 진공 밸브

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22861217

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2023543848

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22861217

Country of ref document: EP

Kind code of ref document: A1