WO2023026470A1 - Capteur de champ magnétique et procédé de détection de champ magnétique - Google Patents

Capteur de champ magnétique et procédé de détection de champ magnétique Download PDF

Info

Publication number
WO2023026470A1
WO2023026470A1 PCT/JP2021/031497 JP2021031497W WO2023026470A1 WO 2023026470 A1 WO2023026470 A1 WO 2023026470A1 JP 2021031497 W JP2021031497 W JP 2021031497W WO 2023026470 A1 WO2023026470 A1 WO 2023026470A1
Authority
WO
WIPO (PCT)
Prior art keywords
signal
magnetic field
resonance frequency
vibration mode
current signal
Prior art date
Application number
PCT/JP2021/031497
Other languages
English (en)
Japanese (ja)
Inventor
貴城 塚本
秀治 田中
Original Assignee
国立大学法人東北大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国立大学法人東北大学 filed Critical 国立大学法人東北大学
Priority to PCT/JP2021/031497 priority Critical patent/WO2023026470A1/fr
Priority to JP2023543609A priority patent/JPWO2023026470A1/ja
Publication of WO2023026470A1 publication Critical patent/WO2023026470A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux

Definitions

  • the present invention relates to a magnetic field sensor and a magnetic field detection method, for example, a magnetic field sensor and a magnetic field using a gyro device having a single (one) mode-matched two-dimensional vibrator (resonance frequencies of two orthogonal axes match). It relates to a detection method.
  • Patent Document 1 discloses a magnetic field sensor using a semiconductor element such as a Hall sensor.
  • a magnetic field sensor using a semiconductor element such as a Hall sensor, as described in Patent Document 1 has temperature dependence and is not robust against temperature changes. Therefore, there is a possibility that the measurement accuracy of the magnetic field deteriorates due to the change in temperature. Therefore, a magnetic field sensor that is robust against changes in temperature is desired.
  • One of the purposes of the present invention is to provide a new and useful magnetic field sensor and magnetic field detection method for solving these problems.
  • One aspect of the present invention is It is driven by a drive signal corresponding to a first rotational vibration mode and a drive signal corresponding to a second rotational vibration mode, and is further driven by a first current signal corresponding to the first rotational vibration mode and a second rotational vibration mode corresponding to the second rotational vibration mode.
  • a single two-dimensional oscillator to which a current signal is input; a first detector that detects the amplitude and phase of a component corresponding to a first rotational vibration mode from the signal output from the two-dimensional vibrator; a second detector that detects the amplitude and phase of a component corresponding to the second rotational vibration mode from the signal output from the two-dimensional vibrator; a first oscillation circuit that outputs a first resonance frequency corresponding to a first rotational vibration mode based on the phase detected by the first detector; a second oscillation circuit that outputs a second resonance frequency corresponding to a second rotational vibration mode based on the phase detected by the second detector; A magnetic field sensor that detects a magnetic field based on a first resonance frequency and a second resonance frequency.
  • a second current signal corresponding to is input,
  • a first detection unit detects the amplitude and phase of a component corresponding to the first rotational vibration mode from the signal output from the two-dimensional oscillator,
  • a second detection unit detects the amplitude and phase of a component corresponding to the second rotational vibration mode from the signal output from the two-dimensional oscillator,
  • the first oscillation circuit outputs a first resonance frequency corresponding to the first rotational vibration mode based on the phase detected by the first detector;
  • the second oscillation circuit outputs a second resonance frequency corresponding to the second rotational vibration mode based on the phase detected by the second detector;
  • the magnetic field detection method wherein the magnetic field detection unit detects the magnetic field based on the first resonance frequency and the second resonance frequency.
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made;
  • FIG. 2 is a diagram that is referred to when a description of the underlying technology of the present invention is made; It is a figure referred when description about an outline of one embodiment is made. It is a figure referred when description about an outline of one embodiment is made. It is a figure referred when description about an outline of one embodiment is made. It is a figure referred when description about an outline of one embodiment is made. It is a figure referred when description about an outline of one embodiment is made. It is a figure referred when description about an outline of one embodiment is made. It is a figure referred when description about an outline of one embodiment is made.
  • FIG. 4 is a diagram for explaining a configuration example of a two-dimensional transducer according to one embodiment
  • 1 is a block diagram showing a configuration example of a magnetic field sensor according to an embodiment
  • FIG. It is a figure for demonstrating an example of the effect obtained by one embodiment.
  • the present invention is a magnetic field sensor obtained by improving the gyro device described in the above patent document, that is, a magnetic field sensor applying the principle of FM (Frequency Modulation) gyroscope. Therefore, in order to facilitate understanding of the present invention, the contents described in the above-mentioned patent documents, which are the premise of the present invention, will be briefly described. It should be noted that the present invention does not necessarily include all of the contents described in the above patent documents, and a part thereof may be used.
  • gyroscope a general gyro device (gyroscope) will be described.
  • MEMS Micro Electro Mechanical Systems
  • the gyro device detects the angular velocity of rotation (hereinafter referred to as the rotational angular velocity as appropriate).
  • a plurality of methods are known for detecting the rotational angular velocity ⁇ z .
  • AM Amplitude Modulation
  • the angular velocity is obtained by measuring the amplitude (displacement) along the sense axis (eg, Y-axis) that changes due to the Coriolis force when vibration is applied along the drive axis (eg, X-axis). Since the amplitude in the sense axis direction is proportional to the rotational angular velocity ⁇ z , the rotational angular velocity ⁇ z can be detected by detecting the amplitude.
  • the resonance frequencies in the drive axis direction and the sense axis direction are set to be different (mode mismatch) in consideration of the fact that the vibration applied in the drive axis direction directly excites the sense axis direction.
  • the second method is a method called force rebalancing, in which feedback control is applied so that the AM mode amplitude in the sense axis direction is always 0, and the rotational angular velocity is obtained from the magnitude of the feedback signal.
  • a vibrator in which the resonance frequencies of the drive axis and the sense axis are matched (mode-matched) can be used.
  • the scale factor the magnitude of the output with respect to the rotational angular velocity fluctuates due to temperature and the like.
  • the embodiment described later employs driving the gyro device in FM mode.
  • the FM mode has advantages such as accurate and stable sensitivity (scale factor), superior temperature characteristics in principle, and unlimited dynamic range. mentioned.
  • An FM mode gyro is composed of a vibrator (also called a resonator) that vibrates in two orthogonal (independent) axial directions.
  • a vibrator also called a resonator
  • vibrators whose resonance frequencies are matched on each axis (mode-matched) are used. In this state, it is known that when a rotational angular velocity is given to the vibrator, the relationship represented by the following formula 1 holds.
  • Equation 1 ⁇ is the resonance frequency, ⁇ is the resonance frequency when no rotation is applied (since the mode is matched, the resonance frequency is the same for both axes), and ⁇ z is the rotational angular velocity given to the oscillator.
  • the vibration referred to below is not limited to linear vibration (for example, X direction and Y direction), and any vibration can be used as long as it is a mode-matched orthogonal vibration mode.
  • the two orthogonal vibrations are not necessarily simple linear vibrations, but the state of displacement in each vibration mode is represented by mode coordinates (generalized coordinates), it can be treated in exactly the same way as linear vibration.
  • mode coordinates generalized coordinates
  • one mode is called "X axis (or X direction)”
  • Y axis (or Y direction) Modes 1 and 2 in FIGS. 1 and 2 are mathematically or vibrationally orthogonal).
  • Equation 2 the resonance frequencies in the X-axis and Y-axis directions match when no rotation is applied, that is, mode match. It is divided into z and ⁇ - ⁇ z . Assuming that these two resonance frequencies are ⁇ 1 and ⁇ 2 , the difference (deviation) between the resonance frequencies ⁇ 1 and ⁇ 2 is proportional to the rotational angular velocity ⁇ z .
  • the rotation angular velocity ⁇ z can be obtained by the following formula 3.
  • the FM mode has been described above. For example, control is performed to excite one vibrator that is two-dimensionally mode-matched in the above-described FM mode (hereinafter referred to as a two-dimensional vibrator as appropriate). Therefore, in order to obtain the rotational angular velocity ⁇ z , the components of the CW mode (first rotational vibration mode) and CCW mode (second rotational vibration mode) contained in the rotational vibration (output) of the two-dimensional oscillator must be separated. must be detected by Therefore, next, a method for separating and detecting the CW mode component and the CCW mode component from the output of the two-dimensional oscillator will be described.
  • FIG. 3 is a diagram for explaining a general synchronous detection method.
  • a signal having a predetermined amplitude (Amplitude) and phase (Phase) in the input signal (Signal) SI is input.
  • An input signal SI is branched and input to multipliers (mixers) 1 and 3, respectively.
  • multipliers In the coherent detection method, two signals whose phases are shifted by 90 degrees are used as reference signals, and after the reference signals are multiplied by separate multipliers 1 and 3, filtering is performed to obtain a demodulated output. For example, a cosine wave and a sine wave are used as reference signals, the multiplier 1 multiplies the input signal SI by the cosine wave, and the multiplier 3 multiplies the input signal SI by the sine wave.
  • the signal output from the multiplier 1 is input to the LPF (Low Pass Filter) 2 and filtered. Filtering by the LPF 2 outputs only components that have the same frequency and the same phase as the reference signal (cosine wave in this example).
  • the signal output from the multiplier 3 is input to the LPF 4 and filtered. Filtering by the LPF 4 outputs only components having the same frequency and phase as the reference signal (sin wave in this example) in the multiplier 3 .
  • the input signal SI is demodulated by outputs from LPFs 2 and 4, and the amplitude r and phase ⁇ of the input signal SI are detected based on the demodulated output.
  • processing is performed to detect the CW mode component and the CCW mode component.
  • the CW mode component By developing and applying this synchronous detection method, processing is performed to detect the CW mode component and the CCW mode component.
  • FIG. 4 is a diagram for explaining a method of detecting a CW mode component from the input signal SI.
  • a signal output from the two-dimensional oscillator is input as the input signal SI.
  • the input signal SI can be expressed in vector representation including components in the X and Y directions, as shown.
  • the input signal SI is branched and input to multipliers 1 and 3, respectively.
  • Signals CW-I (In phase) and CW-Q (Quadrature Phase) are used as reference signals, and the multiplier 1 multiplies the input signal SI by the signal CW-I.
  • Multiplication by I is performed by the multiplier 3 .
  • Signals CW-I and CW-Q are signals having the same amplitude, frequency, and rotation direction, but with a phase difference of 90 degrees, as symbolically shown in FIG.
  • the input signal SI is multiplied by the signal CW-I by the multiplier 1, and the output is supplied to the LPF 2.
  • the multiplier 3 multiplies the input signal SI by the signal CW-Q, and the output is supplied to the LPF 4 .
  • the input signal SI is demodulated, and the amplitude r and phase ⁇ of the CW mode component included in the input signal SI can be detected based on the demodulated output.
  • FIG. 5 is a diagram for explaining a detailed configuration example of the multipliers 1 and 3 described above.
  • the multiplier 1 includes, for example, a multiplier 1a, a multiplier 1b, and an adder 1c.
  • the multiplier 3 includes, for example, a multiplier 3a, a multiplier 3b, and an adder 3c.
  • signals (amplitudes) in the X-axis and Y-axis directions are input to the multiplier 1 as the input signal SI.
  • the multiplier 1a multiplies the signal SIX by the X-axis component of the signal CW-I
  • the multiplier 1b multiplies the signal SIY by the Y-axis component of the signal CW-I.
  • the adder 1c adds the outputs of the multipliers 1a and 1b and outputs the result to the LPF2.
  • the multiplier 3a multiplies the signal SIX by the X-axis component of the signal CW-Q, and the multiplier 3b multiplies the signal SIY by the Y-axis component of the signal CW-Q.
  • the adder 3c adds the outputs of the multipliers 3a and 3b and outputs the result to the LPF 4.
  • FIG. 6 is an example of detection using the signal CW-I as a reference signal.
  • the signal in the X-axis direction of CW-I is a sine wave
  • the signal in the Y-axis direction is a cosine wave. If it is assumed that the input signal SI is only the component of the signal CW-I, the output waveform of the multiplier 1a is the waveform WA1a, and the output waveform of the multiplier 1b is the waveform WA2a.
  • the waveform of the signal obtained by adding the outputs of the multipliers by the adder 1c becomes the waveform WA3a.
  • this signal waveform is passed through LPF2
  • the waveform of the obtained signal becomes waveform WA4a (DC component) similar to waveform WA3a because the filtering process by LPF2 is equivalent to the process of obtaining the average. That is, when the input signal SI contains the component of the signal CW-I, the component can be detected by detection using the signal CW-I.
  • the example shown in FIG. 7 is an example of detection using the signal CW-I as a reference signal, but it is assumed that the input signal SI is only the component of the signal CW-Q that is 90 degrees out of phase with the signal CW-I.
  • the output waveform of the multiplier 1a becomes the waveform WA1b
  • the output waveform of the multiplier 1b becomes the waveform WA2b.
  • the signal obtained by adding the outputs of these waveforms by the adder 1c becomes 0 as shown in the figure, and therefore the output of the LPF 2 also becomes 0 as shown in the figure.
  • the example shown in FIG. 8 is an example of detection using the signal CW-I as the reference signal, but the input signal SI is only the component of the counterclockwise signal CCW-I whose rotation direction is different from that of the signal CW-I.
  • the output waveform of the multiplier 1a becomes the waveform WA1c
  • the output waveform of the multiplier 1b becomes the waveform WA2c.
  • the waveform of the signal obtained by adding the outputs of the multipliers by the adder 1c becomes a waveform WA3c that is symmetrical with 0 as the center.
  • the signal of waveform WA3a is passed through LPF2, its output becomes 0 as shown.
  • the example shown in FIG. 9 is an example of detection using the signal CW-I as the reference signal. This is an example assuming only the component of the signal CCW-Q whose phase differs from I by 90 degrees.
  • the output waveform of the multiplier 1a becomes the waveform WA1d
  • the output waveform of the multiplier 1b becomes the waveform WA2d.
  • the waveform of the signal obtained by adding the outputs of the multipliers by the adder 1c becomes a waveform WA3d that is symmetrical about 0 as the center.
  • the signal of waveform WA3d is passed through LPF2, its output becomes 0 as shown.
  • any two-dimensional oscillation (expressed by the linear combination of CW-I, CW-Q, CCW-I, and CCW-Q) occurring in the two-dimensional oscillator is expressed by using the signal CW-I as a reference signal.
  • CW-I the signal that is expressed by the linear combination of CW-I, CW-Q, CCW-I, and CCW-Q
  • synchronous detection only the component of the signal CW-I included in the output signal of the two-dimensional oscillator is obtained. This is also true for detected components when using other signals as reference signals. Table 1 below is obtained by summarizing the above.
  • two detectors are provided and the reference signal in each detector is set to a combination of signal CW-I and signal CW-Q, and a combination of signal CCW-I and signal CCW-Q, two-dimensional vibration CW mode component and CCW mode component can be detected independently from the child's output.
  • FIG. 10 is a diagram showing a configuration example of the gyro device 10.
  • the gyro device 10 includes, for example, a single two-dimensional oscillator 15, a drive signal generator 20, a first detector 30a, a first PLL (Phase Locked Loop) circuit 40a as an example of a first oscillation circuit, A first AGC (Automatic Gain Control) section 50a, a second detection section 30b, a second PLL circuit 40b as an example of a second oscillation circuit, a second AGC section 50b, and a two-dimensional oscillator 15 provided on the input side of the Amplifiers 61a and 61b and amplifiers 62a and 62b provided on the output side of the two-dimensional oscillator 15 are provided.
  • a first PLL Phase Locked Loop
  • the gyro device 10 may be equipped with a DA (Digital to Analog) converter and an AD (Analog to Digital) converter, and may perform each process by digital signal processing.
  • the DA converter is provided, for example, in front of the amplifiers 61a and 61b, and configured to convert the digital drive signal output from the drive signal generator 20 into an analog drive signal.
  • the AD converter is provided, for example, in the rear stage of the amplifiers 62a and 62b, and is configured to convert analog format signals output from the two-dimensional oscillator 15 into digital format.
  • the two-dimensional vibrator 15 is, for example, a ring-shaped vibrating member that can be excited by drive signals corresponding to CW mode and CCW mode.
  • the shape of the two-dimensional vibrator 15 is not limited to the ring shape, and may be any shape such as a square plate, a cylinder, a square prism, or a quadruple mass using four masses. is.
  • the drive signal generator 20 supplies the two-dimensional vibrator 15 with a drive signal obtained by multiplexing a drive signal corresponding to the CW mode (first drive signal) and a drive signal corresponding to the CCW mode (second drive signal).
  • the drive signal supplied from the drive signal generator 20 excites the two-dimensional vibrator 15 .
  • the drive signal for the X-axis direction corresponding to the CW mode is a cos wave (hereinafter referred to as cos cw signal)
  • the drive signal for the Y-axis direction is a -sin wave (hereinafter referred to as -sin cw signal). is used.
  • the drive signal does not necessarily have to be a cosine wave or a -sin wave as long as the Y-direction signal leads the X-direction signal by 90 degrees in phase.
  • -cos wave hereinafter referred to as -cos CCW signal
  • -sin wave hereinafter referred to as -sin CCW signal
  • the drive signal does not necessarily need to be a -cos wave or -sin wave if the Y-direction signal is 90 degrees behind the X-direction signal.
  • the drive signal generator 20 for example, generates a drive signal corresponding to the CW mode based on the signal fed back from the first PLL circuit 40a, and generates a drive signal corresponding to the CCW mode based on the signal fed back from the second PLL circuit 40b. Generate a signal.
  • the drive signal generator 20 includes, for example, a multiplier 201, a multiplier 202, a multiplier 203, a multiplier 204, an adder 205, and an adder 206.
  • the first detector 30 a detects the amplitude r cw and the phase ⁇ cw of the CW component included in the output of the two-dimensional oscillator 15 . Details of the first detection unit 30a will be described later.
  • the first PLL circuit 40a includes a phase comparator 41a, a PID (Proportional Integral Differential) control section 42a, and an oscillator 43a such as a VCO (Voltage Controlled Oscillator) or an NCO (Numerical Controlled Oscillator) that can change the oscillation frequency.
  • an oscillator 43a such as a VCO (Voltage Controlled Oscillator) or an NCO (Numerical Controlled Oscillator) that can change the oscillation frequency.
  • VCO Voltage Controlled Oscillator
  • NCO Numerical Controlled Oscillator
  • the first AGC section 50a includes an amplitude comparator 51a and a PID control section 52a.
  • the output of the first AGC section 50 a is configured to be fed back to the drive signal generation section 20 .
  • the second detection section 30b detects the amplitude r CCW and phase ⁇ CCW of the CCW component included in the output of the two-dimensional oscillator 15 . Details of the second detection unit 30b will be described later.
  • the second PLL circuit 40b includes a phase comparator 41b, a PID control section 42b, and an oscillator 43b capable of changing the oscillation frequency of VCO, NCO, or the like. Although detailed illustration is omitted to prevent the illustration from becoming complicated, the output of the second PLL circuit 40b (it may be all or part of the output) is the drive signal generation unit 20, the second It is configured to be fed back to each of the detection units 30b.
  • the second AGC section 50b includes an amplitude comparator 51b and a PID control section 52b.
  • the output of the second AGC section 50b is configured to be fed back to the drive signal generation section 20.
  • FIG. 11 is a diagram for explaining a configuration example of the first detection unit 30a.
  • the first detection unit 30a includes detectors 31a and 32a to which the signal output from the two-dimensional transducer 15 is branched and input, an LPF 33a that filters the output of the detector 31a, and an output of the detector 32a.
  • An LPF 34a that performs filtering and an amplitude phase detector 35a that detects the amplitude r cw and phase ⁇ cw of the CW component contained in the output signal of the two-dimensional oscillator 15 based on the outputs from the LPF 33a and LPF 34a. .
  • the detector 31a includes a multiplier 310a to which an X-axis component of the output from the two-dimensional oscillator 15 is input, and a multiplier 310a to which a Y-axis component of the output from the two-dimensional oscillator 15 is input. 311a and an adder 312a for adding the respective outputs of the multipliers 310a and 311a.
  • the detector 32a includes a multiplier 320a to which the X-axis direction component of the output from the two-dimensional oscillator 15 is input, and a multiplier 320a to which the Y-axis direction component of the output from the two-dimensional oscillator 15 is input. 321a and an adder 322a for adding the respective outputs of the multipliers 320a and 321a.
  • the CW-I component in the X-axis direction is a sine signal
  • the CW-I component in the Y-axis direction is a cos signal
  • the CW-Q component in the X-axis direction is a cos signal
  • the CW-I component in the Y-axis direction is a cos signal
  • the -Q component is the -sin signal.
  • FIG. 12 is a diagram for explaining a configuration example of the second detection unit 30b.
  • the second detection unit 30b includes detectors 31b and 32b to which the signal from the two-dimensional transducer 15 is branched and input, an LPF 33b that performs filtering on the output of the detector 31b, and a filter on the output of the detector 32b. and an amplitude phase detector 35b for detecting the amplitude r CCW and phase ⁇ CCW of the CCW component contained in the output signal of the two-dimensional oscillator 15 based on the outputs from the LPF 33 b and LPF 34 b.
  • the detector 31b includes a multiplier 310b to which an X-axis component of the output from the two-dimensional oscillator 15 is input, and a multiplier 310b to which a Y-axis component of the output from the two-dimensional oscillator 15 is input. 311b and an adder 312b that adds the outputs from the multipliers 310b and 311b.
  • the detector 32b includes a multiplier 320b to which the X-axis component of the output from the two-dimensional oscillator 15 is input, and a multiplier 320b to which the Y-axis component of the output from the two-dimensional oscillator 15 is input. 321b and an adder 322b that adds the respective outputs of the multipliers 320b and 321b.
  • the CCW-I component in the X-axis direction is a -sin signal
  • the CCW-I component in the Y-axis direction is a cos signal
  • the CCW-Q component in the X-axis direction is a -cos signal
  • the Y-axis direction is the -sin signal.
  • FIG. A drive signal generator 20 generates a drive signal for the two-dimensional oscillator 15 .
  • the output signal from the multiplier 201 is supplied to the adder 205,
  • the output signal from multiplier 202 is provided to adder 206 .
  • the -cos CCW signal and the -sin CCW signal are each multiplied by multipliers 203 and 204 by signals fed back from PID control section 52b, and then the output signal from multiplier 203 is supplied to adder 205.
  • a two-dimensional oscillator 15 is excited by the inputs X d and Y d , and outputs X s and Y s from the two-dimensional oscillator 15 are obtained.
  • the outputs Xs and Ys from the two-dimensional vibrator 15 are amplified with an appropriate amplification factor by the amplifiers 62a and 62b, the outputs Xs are branched and sent to the first and second detectors 30a and 30b, respectively. Then, the output Ys is branched and input to the first and second detectors 30a and 30b.
  • the first detector 30 a detects the CW component included in the output of the two-dimensional oscillator 15 .
  • the detector 31a in the first detection unit 30a detects the signal CW-I, and the result is filtered by the LPF 33a. The component is detected, and the detection result is supplied to the amplitude phase detector 35a.
  • the detector 32a in the first detection unit 30a detects the signal CW-Q, and the result is filtered by the LPF 34a to detect the CW-Q component included in the output of the two-dimensional oscillator 15. and supplies the detection result to the amplitude phase detector 35a.
  • the amplitude phase detector 35a detects the amplitude r cw and the phase ⁇ cw of the CW component contained in the output signal of the two-dimensional oscillator 15 based on the outputs from the LPF 33a and LPF 34a. That is, as described above, by performing synchronous detection using the signals CW-I and CW-Q as reference signals, only the CW component contained in the output of the two-dimensional oscillator 15 can be detected.
  • the phase ⁇ cw detected by the first detector 30a is supplied to the first PLL circuit 40a.
  • the part 42a performs control to set the phase ⁇ cw to 90°, that is, the resonance frequency f cw .
  • the oscillator 43a is controlled by the output from the PID control section 42a, whereby the signal sin cw and the signal cos cw of the resonance frequency fcw are output from the oscillator 43a.
  • the amplitude r cw obtained by the first detection section 30a is supplied to the first AGC section 50a.
  • the amplitude comparator 51a in the first AGC unit 50a compares the amplitude r cw with a predetermined first set value Rset ,cw, and based on the comparison result, the PID control unit 52a adjusts the amplitude r cw to the predetermined first set value. Executes the control with the value R set,cw .
  • the output from the PID controller 52a is fed back to the drive signal generator 20, and the gain is controlled so that the amplitude of the drive signal corresponding to the CW mode is maintained at the first set value Rset,cw .
  • the amplitude phase detector 35b detects the amplitude r CCW and the phase ⁇ CCW of the CCW component included in the output signal of the two-dimensional vibrator 15 based on the outputs from the LPF 33b and LPF 34b. That is, as described above, by synchronously detecting the signal CCW-I and the signal CCW-Q as reference signals, only the CCW component included in the output of the two-dimensional oscillator 15 can be detected.
  • the phase ⁇ CCW obtained by the second detector 30b is supplied to the second PLL circuit 40b.
  • the phase comparator 41b in the second PLL circuit 40b compares the phase ⁇ CCW with 90°, and based on the comparison result, the PID controller 42b controls the phase ⁇ CCW to 0, that is, the resonance frequency fcw .
  • the oscillator 43b is controlled by the output from the PID control section 42b, whereby the oscillator 43b outputs the signal sin CCW and the signal cos CCW of the resonance frequency f CCW which are in phase with each other.
  • the resonance frequency f CCW is fed back to the input side, and control is performed to maintain the resonance frequency of the driving signal corresponding to the CCW mode at the resonance frequency f CCW .
  • the signal sin CCW and the signal cos CCW are fed back to the second detector 30b, and based on this, the signal CCW-I and the signal CCW-Q are generated as reference signals.
  • the amplitude r CCW obtained by the second detection section 30b is supplied to the second AGC section 50b.
  • the amplitude comparator 51b in the second AGC section 50b compares the amplitude rCCW with the second set value Rset ,CCW , and based on the comparison result, the PID control section 52b determines whether the amplitude rCCW is the second set value Rset,CCW. Execute control to be CCW .
  • the output from the PID controller 52b is fed back to the drive signal generator 20, and the gain is controlled so that the amplitude of the drive signal corresponding to the CCW mode is maintained at the second set value Rset ,CCW .
  • FIG. 13 is a diagram schematically showing the flow of signals in the gyro device 10.
  • FIG. Thick lines in FIG. 13 indicate the flow of signals.
  • the CCW component contained in the output of the two-dimensional oscillator 15 is cut by the first detection section 30a, and only the CW component loops through one system (upper system in FIG. 13).
  • the CW component contained in the output of the two-dimensional oscillator 15 is cut by the second detector 30b, and only the CCW component loops through the other system (lower system in FIG. 13).
  • the angular velocity detector 70 angular velocity detector 70
  • the angular velocity detector 70 is described as being incorporated in the gyro device 10, but may be incorporated in another device.
  • FIG. 14 is a diagram showing a configuration example of the angular velocity detector 70.
  • the angular velocity detector 70 includes a subtractor 71 and a multiplier 72, for example.
  • the angular velocity detector 70 obtains the resonance frequency f cw output from the first PLL circuit 40a and the resonance frequency f CCW output from the second PLL circuit 40b.
  • it is multiplied by a constant (in the case of an ideal oscillator with an angular gain of 1, it is multiplied by 1/2). That is, the angular velocity detection unit 70 detects the rotation angular velocity ⁇ z by performing the same calculation as Equation 3 described above. By integrating this rotational angular velocity ⁇ z , the gyro device 10 can detect the angle of rotation.
  • the gyro device 10 described above since it is composed of a single two-dimensional vibrator, it is possible to reduce the size of the device, and the vibrator can be used in the same manner as when a plurality of vibrators are used. It eliminates the need to match the characteristics and usage environment of Furthermore, it is possible to independently detect the components corresponding to CW and CCW modes from the output of the two-dimensional oscillator, detect the rotational angular velocity from these detection results, and finally detect the rotational angle. can.
  • This embodiment realizes a magnetic field sensor (magnetic field sensor 1000) in which the temperature dependence is canceled by improving the gyro device 10 described above.
  • magnetic field sensor 1000 magnetic field sensor 1000
  • the principle of such a magnetic field sensor will be schematically described with reference to FIGS. 15 to 18.
  • FIG. 15 to 18 the principle of such a magnetic field sensor will be schematically described with reference to FIGS. 15 to 18.
  • FIG. 15 shows the circular motion of the two-dimensional oscillator 15 in the CW mode described above
  • FIG. 16 is a diagram schematically showing the circular motion of the two-dimensional oscillator 15 in the CCW mode described above.
  • 15 and 16 (the same applies to FIGS. 17 and 18), the two-dimensional vibrator 15 is represented by a circular mass, and four springs supporting the mass (a pair of springs in each of the X and Y directions). is shown schematically.
  • the two-dimensional oscillator 15 Since the two-dimensional oscillator 15 has equivalent spring constants in the x-axis and y-axis, in other words, it is degenerate, normally (when no magnetic field is applied), the same frequency f 0 to vibrate.
  • f cw be the frequency of rotational motion in CW mode
  • f ccw f 0
  • f ccw f 0
  • f 0 is the frequency defined by the mass of the mass and the spring constant.
  • Degeneracy means that many modes have the same energy (that is, resonance frequency).
  • the resonance frequency of the two-dimensional oscillator 15 is the same for each rotational vibration mode in the stationary coordinate system.
  • Equation (6) the degeneracy is resolved by the presence of the magnetic field, and the vibration frequencies in each vibration mode become those shown in Equations (4) and (5).
  • f 0 has temperature dependence, that is, the Young's modulus of the two-dimensional oscillator 15 changes with temperature.
  • the frequency difference (f cw ⁇ f ccw ) is not affected by temperature because f 0 is cancelled.
  • the current flowing through the two-dimensional oscillator 15 can be controlled. From the above, for example, the magnetic field can be measured by removing the influence of the current i by calculation after measuring the frequency difference. Since the frequency difference is not affected by temperature changes as described above, it is possible to measure the magnetic field with high accuracy.
  • the magnetic field sensor when the gyro device 10 is used as a magnetic field sensor, the magnetic field sensor also detects angular velocity. In the absence of a magnetic field, an angular rate modulated frequency term k ⁇ appears (for CW mode), as shown in equation (7) below.
  • FIG. 19 is a diagram schematically showing spectra of waveforms corresponding to respective terms.
  • the horizontal axis of FIG. 19 indicates the signal frequency, and the vertical axis indicates the magnitude of the signal.
  • a waveform WA5 corresponds to the term 2 k ⁇ dependent on the angular velocity
  • a waveform WA6 corresponds to the term 2 ⁇ f(I, B) dependent on the magnetic field and current.
  • the magnitude of the controllable current i is modulated at a predetermined frequency.
  • the predetermined frequency (the frequency of the modulated signal) is a frequency higher than the angular velocity frequency (for example, 100 Hz) to be detected.
  • the frequency fluctuation component due to the magnetic field (waveform WA6 in this example) is frequency-shifted to the high frequency side. If this is represented by an equation, it becomes the following equation (10).
  • a frequency fluctuation component caused by a magnetic field can be detected by synchronous detection at the frequency W B . Since the magnitude of the current i is known, only the magnetic field component can be detected by dividing by the current i.
  • the two-dimensional vibrator 15A has, for example, an additional configuration for causing a current to flow through the two-dimensional vibrator 15A.
  • FIG. 21 shows a configuration example of the two-dimensional oscillator 15A.
  • the two-dimensional oscillator 15A has a mass 151 near the center.
  • the shape of the mass 151 is not limited to a rectangular shape, and may be other shapes such as a circular shape. In principle, one mass 151 may be used, but a plurality of masses may be used. For example, using four cells 151 can increase the Q value.
  • the two-dimensional oscillator 15A is a degenerate oscillator, so it has a symmetrical and equivalent configuration in each of the X and Y directions.
  • Such a configuration generally includes a drive electrode, a shuttle connected to mass 151 and driven by the drive electrode, and a sense electrode for detecting displacement of the shuttle.
  • a drive electrode 151A is provided on the X+ side (right side in FIG. 21).
  • Drive electrode 151A is connected to shuttle 151B.
  • a voltage is applied to the comb-teeth electrode of the drive electrode 151A to displace the shuttle 151B, thereby displacing the mass 151 connected to the shuttle 151B.
  • the displacement of the shuttle 151B can be detected by detecting a change in electrostatic capacity generated in the comb-teeth electrodes of the sense electrode 151C.
  • the shuttle 151B is also provided with ports 151D and 151E for current flow. For example, control is performed to flow current from the port 151D to the port 151E.
  • a drive electrode 153A is provided on the Y+ side (upper side in FIG. 21).
  • Drive electrode 153A is connected to shuttle 153B.
  • a voltage is applied to the comb-teeth electrode of the drive electrode 153A to displace the shuttle 153B, thereby displacing the mass 151 connected to the shuttle 153B.
  • Displacement of the shuttle 153B can be detected by detecting a change in capacitance generated in the comb-tooth electrodes of the sense electrode 153C.
  • the shuttle 153B is also provided with ports 153D and 153E for current flow. For example, control is performed to flow current from the port 153D to the port 153E.
  • a drive electrode 154A is provided on the Y-side (lower side in FIG. 21).
  • Drive electrode 154A is connected to shuttle 154B.
  • a voltage is applied to the comb-teeth electrode of the drive electrode 154A to displace the shuttle 154B, thereby displacing the mass 151 connected to the shuttle 154B.
  • Displacement of the shuttle 154B can be detected by detecting a change in capacitance generated in the comb-tooth electrodes of the sense electrode 154C.
  • Shuttle 154B is also provided with ports 154D and 154E for conducting current. For example, control is performed to flow current from the port 154D to the port 154E.
  • FIG. 22 is a block diagram showing a configuration example of a magnetic field sensor (magnetic field sensor 1000) according to this embodiment.
  • the magnetic field sensor 1000 has, for example, all the components of the gyro device 10 described above.
  • the same reference numerals are given to the same or similar configurations as those of the gyro device 10, and redundant explanations will be omitted as appropriate.
  • FIG. 22 only the configuration strongly related to the present invention is illustrated, and the illustration of other configurations is appropriately omitted.
  • the magnetic field sensor 1000 includes a two-dimensional oscillator 15A, a drive signal generator 20, a first detector 30a, a second detector 30b, a first PLL circuit 40a, and a second PLL circuit 40b. Further, the magnetic field sensor 1000 further includes a first current signal generator 80a, a second current signal generator 80b, a signal source 82, a mixer 85, an adder 86, a magnetic field detector 91, and an LPF 92 as an angular velocity detector. including.
  • the first current signal generator 80a generates a first current signal corresponding to the CW mode.
  • the first current signal generator 80a has a first current signal converter 81a, a first gain modulator 82a, and a multiplier 83a.
  • the first current signal converter 81a uses a signal (for example, sin cw and cos cw of the resonance frequency fcw ) output from the oscillator 43a of the first PLL circuit 40a and converts the signal into a current.
  • the first gain modulation section 82a generates a signal for amplitude modulation from a predetermined frequency signal (for example, a sine wave signal of 100 Hz or more) generated by the signal source 82.
  • a predetermined frequency signal for example, a sine wave signal of 100 Hz or more
  • the second current signal generator 80b generates a second current signal corresponding to CCW mode.
  • the second current signal generator 80b has a second current signal converter 81b, a second gain modulator 82b, a multiplier 83b, and an inverter circuit 84.
  • the second current signal converter 81b uses the signal (for example, sin ccw and cos ccw of the resonance frequency fcw ) output from the oscillator 43b of the second PLL circuit 40b and converts the signal into a current.
  • the inversion circuit 84 inverts the current signal output from the second current signal converter 81b. As a result, the direction of the second current signal generated by the second current signal generator 80b is opposite to the direction of the first current signal.
  • the second gain modulating section 82b generates a signal for amplitude modulation from a predetermined frequency signal (for example, a sine wave signal of 100 Hz or higher) generated by the signal source 82 .
  • This signal is multiplied by the current signal in the multiplier 83b to give modulation and generate a second current signal.
  • the current signal converter 81b, the multiplier 83b, and the inverting circuit 84 may be switched in their structural order.
  • the mixing section 85 mixes (multiplexes) the first current signal generated by the first current signal generating section 80a and the second current signal generated by the second current signal generating section 80b.
  • the first current signal and the second current signal mixed by the mixing section 85 are input to the two-dimensional vibrator 15A.
  • the adder 86 calculates the difference between the resonance frequency f cw (an example of the first resonance frequency) output from the PID 42a and the resonance frequency f ccw (an example of the second resonance frequency) output from the PID 42b. As a result, ⁇ f, which is the difference between the resonance frequency f cw and the resonance frequency f ccw , is obtained. ⁇ f is input to each of the magnetic field detection section 91 and the second LPF 92 .
  • the magnetic field detector 91 detects the magnetic field based on the resonance frequency f cw and the resonance frequency f ccw .
  • the magnetic field detector 91 has a multiplier 91a and a first LPF 91b.
  • Multiplier 91a multiplies ⁇ f by the modulated signal from signal source 82 .
  • the first LPF 91b filters the output of the multiplier 91a so as to pass only low-frequency signals (below the cutoff frequency).
  • the magnetic field is detected by performing an appropriate calculation (for example, calculation for removing the current component) for detecting the magnetic field.
  • the second LPF 92 filters the output of the adder 86 to pass only low-frequency (below the cutoff frequency) signals. Thereby, only the signal of the component corresponding to the angular velocity is extracted. Angular velocities are detected by performing appropriate calculations (for example, calculations similar to those performed by the angular velocity detector 70 in the gyro device 10 described above) on the signals that have passed through the second LPF 92 .
  • the drive signal generated by the drive signal generator 20 excites the two-dimensional vibrator 15A.
  • the x-direction and y-direction current signals (first current signal (Ix) and second current signal (Iy)) mixed by the mixing unit 85 are input to the two-dimensional vibrator 15A.
  • the phase ⁇ cw is detected by performing the processing described above by the first detection unit 30a.
  • the phase ⁇ cw is provided to the first PLL circuit 40a.
  • the PID control unit 42a performs control so that the phase ⁇ cw becomes the resonance frequency fcw based on the comparison result of the phase comparator 41a.
  • the resonance frequency f cw output from the PID controller 42 a is supplied to the adder 86 .
  • a signal output from the oscillator 43a is fed back to the drive signal generator 20 and used to generate the drive signal.
  • a signal output from the oscillator 43a is converted into a current signal by the first current signal converter 81a.
  • the converted current signal is amplitude-modulated by a first gain modulating section 82a and a multiplier 83a according to a signal generated by a signal source 82 to generate a first current signal.
  • a second current signal is generated by performing similar processing in the CCW loop. After being mixed by the mixing unit 85, the first current signal and the second current signal are input to the two-dimensional vibrator 15A.
  • the resonance frequency f cw output from the PID control section 42 b of the second PLL circuit 40 b is supplied to the adder 86 .
  • the calculation performed by the adder 86 provides ⁇ f, which is the difference between the resonance frequency f cw and the resonance frequency f ccw .
  • the signal of the magnetic field component is shifted to the low frequency side (the signal of the angular velocity component is shifted to the high frequency side). Then, the signal of the magnetic field component shifted to the low frequency side is detected by the first LPF 91b, and the magnetic field is detected using the detected signal of the magnetic field component.
  • the signal of the angular velocity component on the low frequency side is detected by the second LPF 92 with respect to ⁇ f, and the angular velocity is detected using the detected signal of the angular velocity component.
  • FIG. 23A to 23C show an example (simulation result) of the effect obtained by this embodiment.
  • FIG. 23A is a diagram showing the relationship between the magnetic field (horizontal axis) and the frequency of each mode of CW and CCW (vertical axis).
  • line LNA corresponds to CW mode
  • line LNB corresponds to CCW mode.
  • the frequency of each mode changes (the magnitude is the same, but the direction of increase and decrease is opposite).
  • FIG. 23B is a graph when the results of FIG. 23A are viewed in terms of frequency difference. As shown in FIG. 23B, it can be seen that the frequency difference is approximately directly proportional to the magnetic field.
  • FIG. 23C is a graph showing the results of FIG. 23B on a log scale. As shown in FIG. 23C, it can be seen that the linearity is exhibited over a wide range (6-digit range in this example).
  • 1 nT (nanotesla) is a change of about 1 ⁇ Hz.
  • FM gyro a change of 1°/hr corresponds to 0.77 ⁇ Hz.
  • the FM gyro has a stability of about 1°/h. That is, it indicates that the magnetic field can be sufficiently detected with a stability of nT or less. According to this embodiment, it is possible to realize a magnetic field sensor that is smaller than geomagnetism and has a wide dynamic range.
  • the signal generated by the signal source 82 not only a single-frequency sine wave but also other methods such as spread spectrum technology using a wideband signal may be applied. That is, the signal of the magnetic field component and the signal of the angular velocity component may be separated by spreading the gain with a predetermined spreading code and then despreading the gain.
  • the shape, excitation method (electrostatic, electromagnetic, piezoelectric, etc.), etc. are not limited to a specific method, etc., as long as the vibrator is two-dimensionally mode-matched.
  • the circuit that processes the output of the two-dimensional oscillator 15 can also be configured with an integrated circuit such as an ASIC (Application Specific Integrated Circuit).
  • ASIC Application Specific Integrated Circuit
  • the magnetic field sensor may be configured to include other circuit elements or the like within the scope of the effects of the present invention. Also, part of the processing in the magnetic field sensor may be performed by another device, a cloud server, or the like. Further, the present invention may be configured as a sensor that detects only magnetic fields without detecting angular velocity.
  • the magnetic field sensor of the present invention can be applied to other devices (for example, various electronic devices such as game devices, imaging devices, smartphones, mobile phones, personal computers, automobiles, trains, airplanes, helicopters, small aircraft, space equipment, etc.) mobile body, robot, etc.).
  • various electronic devices such as game devices, imaging devices, smartphones, mobile phones, personal computers, automobiles, trains, airplanes, helicopters, small aircraft, space equipment, etc.
  • the present invention can be realized by an apparatus, a method, and a system (cloud system, etc.) consisting of a plurality of apparatuses. can be combined with

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention concerne un capteur de champ magnétique qui ne présente pas de dépendance vis-à-vis de la température.　Le présent capteur de champ magnétique comprend : un seul oscillateur bidimensionnel qui est commandé par un signal de commande correspondant à un premier mode d'oscillation rotative et un signal de commande correspondant à un second mode d'oscillation rotative, et dans lequel sont entrés un premier signal de courant correspondant au premier mode d'oscillation rotative et un second signal de courant correspondant au second mode d'oscillation rotative ; et une unité de détection de champ magnétique qui fournit en sortie une première fréquence de résonance et une seconde fréquence de résonance correspondant au premier mode d'oscillation rotative sur la base d'une sortie de signal provenant de l'oscillateur bidimensionnel, et détecte un champ magnétique sur la base de la première fréquence de résonance et de la seconde fréquence de résonance.
PCT/JP2021/031497 2021-08-27 2021-08-27 Capteur de champ magnétique et procédé de détection de champ magnétique WO2023026470A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2021/031497 WO2023026470A1 (fr) 2021-08-27 2021-08-27 Capteur de champ magnétique et procédé de détection de champ magnétique
JP2023543609A JPWO2023026470A1 (fr) 2021-08-27 2021-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/031497 WO2023026470A1 (fr) 2021-08-27 2021-08-27 Capteur de champ magnétique et procédé de détection de champ magnétique

Publications (1)

Publication Number Publication Date
WO2023026470A1 true WO2023026470A1 (fr) 2023-03-02

Family

ID=85322574

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2021/031497 WO2023026470A1 (fr) 2021-08-27 2021-08-27 Capteur de champ magnétique et procédé de détection de champ magnétique

Country Status (2)

Country Link
JP (1) JPWO2023026470A1 (fr)
WO (1) WO2023026470A1 (fr)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340792A (ja) * 2003-05-16 2004-12-02 Tdk Corp 角速度センサおよび角速度検出装置
JP2004340790A (ja) * 2003-05-16 2004-12-02 Tdk Corp 角速度センサおよび角速度検出装置
US20160084654A1 (en) * 2014-09-24 2016-03-24 The Regents Of The University Of California Fully balanced micro-machined inertial sensor
JP2017506337A (ja) * 2014-02-05 2017-03-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ センサ装置、及び、少なくとも一つのサイズモ系質量要素を有するセンサ装置の動作方法
JP2017227591A (ja) * 2016-06-24 2017-12-28 セイコーエプソン株式会社 信号処理回路、物理量検出装置、姿勢演算装置、電子機器及び移動体
JP2019128326A (ja) * 2018-01-26 2019-08-01 株式会社東芝 検出器
JP2020118603A (ja) * 2019-01-25 2020-08-06 国立大学法人 東京大学 角速度センサ
JP2020169819A (ja) * 2019-04-01 2020-10-15 国立大学法人東北大学 ジャイロ装置およびジャイロ装置の制御方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340792A (ja) * 2003-05-16 2004-12-02 Tdk Corp 角速度センサおよび角速度検出装置
JP2004340790A (ja) * 2003-05-16 2004-12-02 Tdk Corp 角速度センサおよび角速度検出装置
JP2017506337A (ja) * 2014-02-05 2017-03-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ センサ装置、及び、少なくとも一つのサイズモ系質量要素を有するセンサ装置の動作方法
US20160084654A1 (en) * 2014-09-24 2016-03-24 The Regents Of The University Of California Fully balanced micro-machined inertial sensor
JP2017227591A (ja) * 2016-06-24 2017-12-28 セイコーエプソン株式会社 信号処理回路、物理量検出装置、姿勢演算装置、電子機器及び移動体
JP2019128326A (ja) * 2018-01-26 2019-08-01 株式会社東芝 検出器
JP2020118603A (ja) * 2019-01-25 2020-08-06 国立大学法人 東京大学 角速度センサ
JP2020169819A (ja) * 2019-04-01 2020-10-15 国立大学法人東北大学 ジャイロ装置およびジャイロ装置の制御方法

Also Published As

Publication number Publication date
JPWO2023026470A1 (fr) 2023-03-02

Similar Documents

Publication Publication Date Title
US9846055B2 (en) Continuous mode reversal for rejecting drift in gyroscopes
US9869552B2 (en) Gyroscope that compensates for fluctuations in sensitivity
US8042393B2 (en) Arrangement for measuring a rate of rotation using a vibration sensor
JP4620055B2 (ja) コリオリの角速度計を用いて回転速度／加速度を測定する方法およびこの目的に適ったコリオリの角速度計
Leland Mechanical-thermal noise in MEMS gyroscopes
US7874209B2 (en) Capacitive bulk acoustic wave disk gyroscopes with self-calibration
JP4370331B2 (ja) コリオリの角速度計において直交バイアスを補償するための方法、および、これに適したコリオリの角速度計
JP2008122371A (ja) Ｍｅｍｓ慣性センサの力再平衡およびパラメトリック増幅
TWI482946B (zh) 旋轉速率感測器用的補償電路與其補償方法
US20160334214A1 (en) Hemispherical resonator gyro
JP2009025283A (ja) 一体型加速度計・角速度計システム
JP2008008884A (ja) 時間で変動する電圧を使用したｍｅｍｓ慣性センサのフォース・リバランシング
JP2011039074A (ja) 機械式センサとこれを含む機械式レートジャイロスコープとその操作方法
Casinovi et al. Electrostatic self-calibration of vibratory gyroscopes
JP2014178195A (ja) バイアス補正機能を備えた振動型ジャイロ
Shkel et al. Two types of micromachined vibratory gyroscopes
US20140013845A1 (en) Class ii coriolis vibratory rocking mode gyroscope with central fixed post
TWI724127B (zh) 陀螺儀裝置及陀螺儀裝置之控制方法
WO2023026470A1 (fr) Capteur de champ magnétique et procédé de détection de champ magnétique
JPH02129514A (ja) 角速度センサー
JP7302129B2 (ja) ジャイロ装置およびジャイロ装置の制御方法
JP3002663B2 (ja) 振動性回転センサの振動モードを制御するための方法および装置
JP7115733B2 (ja) 積分型ジャイロ装置および積分型ジャイロ装置の制御方法
US11493534B1 (en) Continuous online self-calibrating resonant FM microelectromechanical systems (MEMS) accelerometer
JP2023127143A (ja) 圧力センサおよび圧力検出方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21955080

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2023543609

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE