WO2023004865A1 - 测漏推车及测漏方法 - Google Patents

测漏推车及测漏方法 Download PDF

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Publication number
WO2023004865A1
WO2023004865A1 PCT/CN2021/110997 CN2021110997W WO2023004865A1 WO 2023004865 A1 WO2023004865 A1 WO 2023004865A1 CN 2021110997 W CN2021110997 W CN 2021110997W WO 2023004865 A1 WO2023004865 A1 WO 2023004865A1
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WO
WIPO (PCT)
Prior art keywords
leak
component
trolley
tested
leak detection
Prior art date
Application number
PCT/CN2021/110997
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English (en)
French (fr)
Inventor
李思远
Original Assignee
长鑫存储技术有限公司
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Publication date
Application filed by 长鑫存储技术有限公司 filed Critical 长鑫存储技术有限公司
Priority to US17/449,457 priority Critical patent/US20230030617A1/en
Publication of WO2023004865A1 publication Critical patent/WO2023004865A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material

Definitions

  • the embodiment of the present application relates to, but is not limited to, a leak testing trolley and a leak testing method.
  • the thin film deposition machine will replace the lid (Dome) on the top of the chamber and the nozzle (Top injector) of the reaction gas connected to the lid on the top of the chamber, and dismount the machine. Clean the Dome and Top injector for next use.
  • Dome and Top injector are brittle ceramic materials, scratches are likely to occur on the surface of Dome and Top injector during the cleaning process, and scratches will affect the reliability of the bonding surface of Dome and Top injector, thereby making
  • the chamber leak rate (chamber leak rate) of the thin film deposition machine increases and cannot pass the Helium leak test (Helium leak test), so it is necessary to reinstall the Dome and Top injector, and each reinstallation will consume a large amount of PM in PM. Part of the time and delay the simultaneous progress of other PM projects, thus increasing the cost of materials and time.
  • An embodiment of the present application provides a leak testing trolley, which at least includes: a car body and a fixing clip arranged on the car body; wherein, the car body is used to place the leak testing component; the fixing clip is used to fix The car body and the leak test component; the car body has a leak test hole, the leak test hole is located in the projection area of the leak test component on the car body, the leak test hole It is used to realize the leak test of the component to be tested for leaks.
  • the embodiment of the present application also provides a leak testing method, which is at least applied to the above-mentioned leak testing trolley; the method includes: using the leak testing trolley to predict the leakage of the component to be tested; when the prediction When the leak result meets the requirements, the leak test is performed on the component to be tested again on a specific machine.
  • Fig. 1 is an optional structural schematic diagram of a leak detection trolley provided in the embodiment of the present application
  • Figure 2a is an optional structural schematic diagram of a leak detection trolley provided in the embodiment of the present application.
  • Figures 2b and 2c are the top view and bottom view of the leak detection trolley provided by the embodiment of the present application, respectively;
  • Fig. 2d is a schematic structural diagram of the connection bracket provided by the embodiment of the present application.
  • Figure 3 is a schematic flow chart of an optional leak detection method provided in the embodiment of the present application.
  • FIGS. 4a and 4b are schematic structural views of the chamber dome provided by the embodiment of the present application.
  • FIGS 4c and 4d are schematic structural views of the spray head provided in the embodiment of the present application.
  • Fig. 4e is a schematic diagram of the combined structure of the chamber dome and the spray head provided by the embodiment of the present application;
  • Figures 4f and 4g are structural schematic diagrams of fixing the combined structure of the chamber dome and the spray head on the leak testing trolley provided by the embodiment of the present application;
  • Fig. 4h is a structural schematic diagram of the helium measurement of the combined structure of the chamber dome and the jet head by using the leak detection trolley provided by the embodiment of the present application.
  • the Dome and the Top injector are bonded by an O-ring (O-ring), the Dome and the Top injector are very closely bonded after running for a period of time in a vacuum environment and at a higher process temperature. And both Dome and Top injector are made of ceramic material, so both Dome and Top injector are consumable parts.
  • O-ring O-ring
  • the usual way to maintain the thin film deposition machine is to send the Dome and Top injector to the designated cleaning manufacturer for cleaning.
  • the cleaning manufacturer will use sandblasting, acid soaking and other processes to clean the surface of the Dome and Top injector. and surface roughness requirements. Since the Dome and Top injector are made of ceramic materials and the material is curved, ceramic brittle materials are prone to scratches or chipping during sandblasting, and scratches and chipping will also affect the gap bonding between the Dome and Top injector. reliability. Moreover, repeated use of parts for many times will also lead to problems in the life of parts, which will increase the leakage rate of the chamber of the machine and fail to pass the helium leak test.
  • the embodiment of the present application provides a leak testing trolley and a leak testing method, which can realize the leak testing of the components to be tested outside the machine, saving time and labor costs.
  • Fig. 1 is an optional structural schematic diagram of a leak detection trolley provided in the embodiment of the present application.
  • the leak detection trolley 10 includes a vehicle body 101 and a fixing clip arranged on the vehicle body 102.
  • the vehicle body 101 is used to place the leakage component to be tested (not shown in the figure); the fixing clip 102 is used to fix the vehicle body 101 and the leakage component to be tested;
  • the leak hole A, the leak test hole A is located in the projected area of the leak test component on the vehicle body 101 , the leak test hole A is used to implement leak test on the leak test component.
  • the leak testing hole may be located at any position within the projection area of the component to be tested on the vehicle body, for example, at the center of the projection area or at the edge of the projection area.
  • the leak detection hole may be a circular hole, an oval hole, a triangular hole, a square hole or a polygonal hole.
  • the leak detection hole is connected to an external leak detector through a leak detection pipeline, and then the leakage detection of the component to be tested is performed by the leak detector.
  • the leak detection hole may be an NW25 flange interface.
  • the vehicle body 101 includes a box body 1011 and a connecting bracket 1012; one end of the connecting bracket 1012 is fixedly connected to the box body 1011, and the connecting bracket 1012 is used to support the box body 1011.
  • the box body 1011 has a bottom plate 1011a and at least one side plate 1011b connected with the bottom plate 1011a.
  • the box body 1011 is used to place the leak test component, the leak test component is located on the surface of the bottom plate 1011a in the box body 1011, the leak test hole A is located on the bottom plate 1011a, and the fixing clip 102 is located on the at least one side panel 1011b.
  • the fixing clip 102 may be a buckle clip, an elastic clip or other types of clips.
  • the box body is an open container for containing the leakage component to be tested.
  • the box body has four side plates, two adjacent side plates are connected to each other, and each side plate is connected to the bottom plate.
  • the box may also have one side panel, three side panels or five side panels.
  • the connecting bracket and the box body may also be movably connected.
  • the leak-testing component includes at least a first component and a second component, and the first component and the second component are fixed together to form the leak-testing component.
  • the first component and the second component may be two independent components on a specific machine.
  • the specific machine may be, for example, a thin film deposition machine, an etching machine or a packaging machine.
  • the first component may be a chamber dome (Dome), and the second component may be a top injector.
  • the leak testing trolley provided in the embodiment of the present application can implement leak testing on the components to be tested outside the machine, saving time and labor costs.
  • Fig. 2a is an optional structural schematic diagram of a leak detection trolley provided in the embodiment of the present application.
  • the leak detection trolley 10 includes a vehicle body 101, a fixing clip 102 arranged on the vehicle body, a brakeable universal Wheel (not shown in the figure) and support platform 103.
  • the vehicle body 101 is used to place the leakage component to be tested; the fixing clip 102 is used to fix the vehicle body 101 and the leakage component to be tested; the vehicle body 101 has a leak detection hole A, and the The leak testing hole A is located in the projected area of the leak testing component on the vehicle body 101 , and the leak testing hole A is used for leak testing the leak testing component.
  • the vehicle body 101 includes a box body 1011 and a connecting bracket 1012; one end of the connecting bracket 1012 is fixedly or flexibly connected to the box body 1011, and the other end of the connecting bracket 1012 is connected to the box body 1012.
  • the above-mentioned brakeable universal wheel is rotationally connected.
  • the box body 1011 is used to place the leak testing component;
  • the connecting bracket 1012 is used to support the box body 1011;
  • the brakeable universal wheels enable the leak testing trolley 10 to move freely.
  • the leak testing trolley provided in the embodiment of the present application can move freely through brakeable universal wheels and stop at any suitable place, which is convenient for use.
  • the leak detection trolley includes four brakeable universal wheels.
  • the leak detection trolley may also include two fixed casters and two brakeable universal wheels, and the two fixed casters are driven by the two brakeable universal wheels so that the leak detection trolley can move freely.
  • the box body 1011 has a bottom plate 1011a and at least one side plate 1011b connected to the bottom plate.
  • Figures 2b and 2c are respectively a top view and a bottom view of the leak detection trolley, combined with Figures 2a-2c As shown, it can be seen that the leak detection hole A is located at the center of the bottom plate 1011a, and the fixing clip 102 is located on the at least one side plate 1011b.
  • a groove B is also provided on the bottom plate 1011a, and the groove B is located at the contact position between the bottom plate 1011a and the leakage component to be tested.
  • the groove B is used to place a sealing member, so as to realize the sealing between the bottom plate and the leakage component to be tested through the sealing member.
  • the groove B can be a circular groove, an oval groove, a triangular groove, a square groove or a polygonal groove.
  • the sealing member may be a sealing ring or a sealing strip, for example, an O-ring.
  • a seal is provided between the leak testing component and the leak testing trolley (that is, in the groove), so as to avoid damage to the joint surface of the leak testing component.
  • the support platform is a platform with a specific thickness. 2a and 2c, the support platform 103 is located in the projection area of the bottom plate 1011a, and the area of the support platform 103 is smaller than or equal to the area of the bottom plate 1011a.
  • the leak detection hole A is connected to an external leak detector through a leak detection pipeline, and then the leakage detection of the component to be tested is performed by the leak detector.
  • the support platform 103 is used to increase the stability of the engineer's hands when installing the leak detection pipeline.
  • Fig. 2d is a schematic structural diagram of the connecting bracket provided by the embodiment of the present application.
  • the connecting bracket 1012 includes a connecting rod 1012a and an adjusting leg 1012b; the connecting rod 1012a is clamped with the adjusting leg 1012b , and the connecting rod 1012a and the adjusting leg 1012b can move relatively; the connecting rod 1012a and the adjusting leg 1012b are jointly used to adjust the height of the leak detection trolley.
  • the adjustment foot can be snapped into the connecting rod, the adjustment foot has a plurality of protrusions, and the corresponding connecting rod has a plurality of slots; or, the adjustment foot There are a plurality of slots on the frame, and a plurality of protrusions on the corresponding connecting rod, and the slots and the protrusions are used together to adjust the relative position of the connecting rod and the adjusting leg.
  • the support platform 103 is fixedly connected or slidably connected to the adjustment stand 1012b; the adjustment stand 1012b is also used to adjust the height of the support stand 103 .
  • the connecting bracket supporting the box is composed of two parts that can move relatively, and the supporting platform can move relatively relative to the connecting bracket, the height of the leak testing trolley and the leak testing cart can be adjusted accordingly.
  • the height of the supporting platform in the trolley can be adjusted according to requirements, which is convenient for use.
  • an embodiment of the present application further provides a leak detection method, which is at least applied to the leak detection trolley in the above embodiments.
  • Fig. 3 is an optional schematic flow chart of the leak detection method provided in the embodiment of the present application. As shown in Fig. 3, the method includes the following steps:
  • Step S301 using the leak testing trolley to predict the leak of the component to be leak tested.
  • the leak detection trolley at least includes a car body and a fixing clip arranged on the car body; the car body includes at least a box body, the box body has at least a bottom plate, and the A leak detection hole and a groove are arranged on the bottom plate.
  • Step S301 may include the following steps:
  • a seal is placed in said groove.
  • the sealing member may be a sealing ring or a sealing strip.
  • the leak testing component is sealed and fixed on the leak testing trolley.
  • the seal is located at the contact position between the leak test component and the bottom plate of the box body, and the leak test component and the leak test trolley are fixed through the seal and the fixing clip on the vehicle body.
  • the leak detection hole, the vacuum pump and the leak detector are connected through a leak detection pipeline.
  • one end of the leak detection pipeline is at least connected to the leak detection hole through a flange, and the other end of the leak detection pipeline is respectively connected to a vacuum pump and a leak detector.
  • Predicting the leak of the component to be tested is performed by the vacuum pump and the leak detector.
  • the leak prediction of the component to be tested for leakage through the vacuum pump and the leak detector includes:
  • the vacuum pump is used to vacuumize the sealed space between the component to be tested for leaks and the trolley for leak testing.
  • the vacuum pump may be a gas capture pump or a gas transfer pump.
  • a specific type of gas is sprayed outside the component to be leak tested; wherein the leak detector can detect the specific type of gas.
  • the specific type of gas may be helium, neon, argon, krypton or xenon
  • the leak detector may be a helium detector, an argon detector, a krypton detector or Xenon meter.
  • the sealed space is continuously pumped, so as to predict the leak of the component to be tested.
  • leak testing of components to be leak tested can be realized.
  • the component to be tested for leaks includes at least a first component and a second component, and the first component and the second component are two independent components on the specific machine platform.
  • the method before sealing and fixing the leak testing component on the leak testing trolley, the method further includes: fixing and combining the first component and the second component to form A fixed composite structure.
  • Step S302 judging whether the predicted missing result meets the requirements.
  • the leak detector detects the specific type of gas, it indicates that the predicted leak result does not meet the requirements; when the leak detector does not detect the specific type of gas, it indicates that the predicted leak result meets the requirements.
  • the predicted missing result meets the requirements execute step S303; when the predicted missing result does not meet the requirements, return to step S301.
  • the predicted leakage result when the predicted leakage result does not meet the requirements, it indicates that the airtightness inside the component to be tested is not good. At this time, a new component to be tested needs to be replaced, and the predicted leakage is performed again until the result of the predicted leakage meets the requirements. .
  • Step S303 perform leak test again on the component to be leak tested on a specific machine.
  • step S303 includes the following steps:
  • Leak testing is performed again on the fixed combined structure on the specific machine platform by using a leak tester.
  • the leak testing trolley After the predicted leakage of the fixed combination structure of the first component and the second component is passed on the leak testing trolley, it is shown that the airtightness inside the component to be tested for leaks is good. At this time, the complete fixed combination The structure is installed on a specific machine, and the leak test is performed again. If the result of the leak test again does not meet the requirements, then it can only indicate that the gap between the leak test component and the specific machine is not tight. In this way, rapid Determine the leak point and deal with it accurately without affecting the production capacity of the machine.
  • the leak if the leak is tested directly on a specific machine, it will occupy the machine and affect the production capacity. First, assemble the leak test outside the machine, and the machine can be produced normally. The leak test will be completed more quickly, saving time.
  • the leak testing components including Dome and Top injector, and the leak testing process as helium leak testing process as an example, the leak testing method provided in the embodiment of the present application will be described in detail.
  • the spray head includes two parts, one part is a top injector cover (Top injector cover) 411 , and the other part is a top injector body 412 .
  • the gas spray head cover 411 and the gas spray head main body 412 respectively also have four fastening screw holes D1, D2 and five gas transmission pipe ports E1, E2.
  • the process of externally assembling the chamber dome 40 and the spray head is as follows: first place the spray head main body 412 on the surface of the chamber dome 40, and then cover the spray head cover 411 on the spray head main body 412. Finally, four fastening screws are used to fix the spray head cover 411, the spray head main body 412 and the chamber dome 40, forming a composite structure 42 as shown in FIG. 4e. Wherein, the air spray head cover 411 and the air spray head main body 412 are sealed by a large O-ring 411a and five small O-rings 412a.
  • the combined structure 42 of the chamber dome and the jet nozzle is fixed on the leak detection trolley 43, so that the combined structure 42 of the chamber dome and the jet nozzle can be checked by the leak detection trolley 43. Make predictions.
  • the leak testing trolley 43 is connected to the external helium detector 45 through the leak testing pipeline 44, and the helium detector 45 is used to predict the combined structure 42 of the chamber dome and the jet nozzle. leak.
  • the process of using the leak detection trolley 43 to predict the leak of the combined structure 42 of the chamber dome and the air injection head is: first vacuumize the inner space of the chamber dome and the air injection head. Secondly, spray helium around the dome of the chamber and the jet head (i.e.
  • the periphery of the combined structure 42 again, adopt the helium measuring instrument 45 to pump air and test always, if the helium measuring instrument 45 numerical value rises, it will report to the police (due to the helium The tester is sensitive to the helium test, if the chamber dome and the jet head are not sealed well, the helium injected from the outside must enter the chamber dome and the jet head through the gap and be detected by the helium tester), if If the helium detector 45 has no alarm, it is considered that the seal between the chamber dome and the jet head is good.
  • the sealing between the chamber dome and the gas injection head is detected by the helium detector, the combined structure of the chamber dome and the gas injection head is removed together, and installed on the thin film deposition machine platform, and the process is carried out again. Put into use after helium test.
  • the leak detection method provided in the embodiment of the present application is at least applied to the helium testing cart in the above embodiment.
  • the technical features not disclosed in detail in the embodiment of the present application please refer to the above embodiment for understanding, and will not repeat them here.
  • Dome and Top injector are assembled outside the machine, and a movable external leak detection cart is used, which can realize the advantages of convenient movement, time saving, and accurate helium measurement; and it will not scratch the Dome
  • the joint surface of the combined structure with the Top injector can realize the advantages of fast leak detection, fast separation and fast clarification.
  • the disclosed devices and methods may be implemented in non-target ways.
  • the device embodiments described above are only illustrative.
  • the division of the units is only a logical function division.
  • the various components shown or discussed are coupled with each other, or directly coupled.

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Abstract

一种测漏推车（10，43）及测漏方法，其中，测漏推车（10，43）至少包括：车体（101）和设置于车体（101）上的固定夹（102）；车体（101）用于放置待测漏组件；固定夹（102）用于固定车体（101）与待测漏组件；车体（101）具有一测漏孔（A），测漏孔（A）位于待测漏组件在车体（101）上的投影区域内，测漏孔（A）用于实现对待测漏组件进行测漏。

Description

测漏推车及测漏方法
相关申请的交叉引用
本申请基于申请号为202110864554.6、申请日为2021年07月29日、发明名称为“测漏推车及测漏方法”的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此引入本申请作为参考。
技术领域
本申请实施例涉及但不限于一种测漏推车及测漏方法。
背景技术
薄膜沉积机台在腔室清洗保养(Preventive Maintenance，PM)时会对腔室顶部的盖子(Dome)和与腔室顶部的盖子连接的反应气体的喷嘴(Top injector)进行更换，并对下机的Dome和Top injector进行清洗，以便下次使用。
然而，由于Dome和Top injector均属于脆性陶瓷材料，在清洗过程中，Dome和Top injector的表面容易产生划痕，而划痕会影响到Dome和Top injector隙合面的隙合可靠性，进而使得薄膜沉积机台的腔室泄漏率(chamber leak rate)增大，无法通过氦检漏试验(Helium leak test)，如此便需要重装Dome和Top injector，而每次重装都会消耗PM中的大部分时间且耽误其他PM项目的同时进行，从而增加了用料成本和时间成本。
发明内容
本申请实施例提供一种测漏推车，至少包括：车体和设置于所述车体上的固定夹；其中，所述车体用于放置待测漏组件；所述固定夹用于固定所述车体与所述待测漏组件；所述车体具有一测漏孔，所述测漏孔位于所述待测漏组件在所述车体上的投影区域内，所述测漏孔用于实现对所述待测漏组件进行测漏。
本申请实施例还提供一种测漏方法，所述测漏方法至少应用于上述测漏推车；所述方法包括：通过所述测漏推车对待测漏组件进行预测漏；当所述预测漏结果满足要求时，在特定机台上对所述待测漏组件进行再次测漏。
附图说明
在附图(其不一定是按比例绘制的)中，相似的附图标记可在不同的视图中描述相似的部件。具有不同字母后缀的相似附图标记可表示相似部件的不同示例。附图以示例而非限制的方式大体示出了本文中所讨论的各个实施例。
图1为本申请实施例提供的测漏推车的一种可选的结构示意图；
图2a为本申请实施例提供的测漏推车的一种可选的结构示意图；
图2b和2c分别为本申请实施例提供的测漏推车的俯视图和仰视图；
图2d为本申请实施例提供的连接支架的结构示意图；
图3为本申请实施例提供的测漏方法的一种可选的流程示意图
图4a和4b为本申请实施例提供的腔室圆顶的结构示意图；
图4c和4d为本申请实施例提供的喷气头的结构示意图；
图4e为本申请实施例提供的腔室圆顶和喷气头的组合结构的示意图；
图4f和4g为本申请实施例提供的将腔室圆顶和喷气头的组合结构固定在测漏推车上的结构示意图；
图4h为本申请实施例提供的采用测漏推车对腔室圆顶和喷气头的组合结构进行氦测的结构示意图。
具体实施方式
下面将参照附图更详细地描述本申请公开的示例性实施方式。虽然附图中显示了本申请的示例性实施方式，然而应当理解，可以以各种形式实现本申请，而不应被这里阐述的具体实施方式所限制。相反，提供这些实施方式是为了能够更透彻地理解本申请，并且能够将本申请公开的范围完整的传达给本领域的技术人员。
在下文的描述中，给出了大量具体的细节以便提供对本申请更为彻底的理解。然而，对于本领域技术人员而言显而易见的是，本申请可以无需一个或多个这些细节而得以实施。在其他的例子中，为了避免与本申请发生混淆，对于本领域公知的一些技术特征未进行描述；即，这里不描述实际实施例的全部特征，不详细描述公知的功能和结构。
在附图中，为了清楚，层、区、元件的尺寸以及其相对尺寸可能被夸大。自始至终相同附图标记表示相同的元件。
应当明白，当元件或层被称为“在……上”、“与……相邻”、“连接到”或“耦合到”其它元件或层时，其可以直接地在其它元件或层上、与之相邻、连接或耦合到其它元件或层，或者可以存在居间的元件或层。相反，当元件被称为“直接在……上”、“与……直接相邻”、“直接连接到”或“直接耦合到”其它元件或层时，则不存在居间的元件或层。应当明白，尽管可使用术语第一、第二、第三等描述各种元件、部件、区、层和/或部分，这些元件、部件、区、层和/或部分不应当被这些术语限制。这些术语仅仅用来区分一个元件、部件、区、层或部分与另一个元件、部件、区、层或部分。因此，在不脱离本申请教导之下，下面讨论的第一元件、部件、区、层或部分可表示为第二元件、部件、区、层或部分。而当讨论的第二元件、部件、区、层或部分时，并不表明本申请必然存在第一元件、部件、区、层或部分。
在此使用的术语的目的仅在于描述具体实施例并且不作为本申请的限制。在此使用时，单数形式的“一”、“一个”和“所述/该”也意图包括复数形式，除非上下文清楚指出另外的方式。还应明白术语“组成”和/或“包括”，当在该说明书中使用时，确定所述特征、整数、步骤、操作、元件和/或部件的存在，但不排除一个或更多其它的特征、整数、步骤、操作、元件、部件和/或组的存在或添加。在此使用时，术语“和/或”包括相关所列项目的任何及所有组合。
相关技术中，由于Dome和Top injector通过O型密封圈(O-ring)进行隙合，Dome和Top injector在真空环境和较高的制程温度下运行一段时间后Dome和Top injector隙合非常紧密，并且Dome和Top injector都属于陶瓷材质，所以Dome和Top injector都属于易损耗零件。
目前对薄膜沉积机台进行保养的通常做法是，对下机后的Dome和Top injector送洗指定的清洗厂商进行清洗，清洗厂商会使用喷砂、泡酸等工艺来达到Dome和Top injector表面清洁和表面粗糙度的要求。由于Dome和Top injector为陶瓷材料且料件为曲面形状，陶瓷脆性材质容易在喷砂处理时产生划痕或崩瓷，划痕和崩瓷也会影响到Dome和Top injector隙合面的隙合可靠性。且多次的零件重复利用也会导致零件寿命问题，使机台的腔室泄漏率增大，无法通过氦检漏试验。然而，相关技术中影响机台的腔室泄漏率的原因有很多，因此，在氦检漏试验未通过时，需要重装Dome和Top injector或者更换新的Dome和Top injector进行重装再次测漏，而每次的重装都会消耗PM中的大部分时间且耽误其他PM项目的同时进行，从而增加了用料成本和时间成本。
基于相关技术中存在的上述问题，本申请实施例提供一种测漏推车及测漏方法，能够在机台外部实现对待测漏组件进行测漏，节约了时间成本和人力成本。
图1为本申请实施例提供的测漏推车的一种可选的结构示意图，如图1所示，所述测漏推车10包括车体101和设置于所述车体上的固定夹102。
其中，所述车体101用于放置待测漏组件(图中未示出)；所述固定夹102用于固定所述车体101与所述待测漏组件；所述车体具有一测漏孔A，所述测漏孔A位于所述待测漏组件在所述车体101上的投影区域内，所述测漏孔A用于实现对所述待测漏组件进行测漏。
这里，所述测漏孔可以位于所述待测漏组件在所述车体上的投影区域内的任意一个位置，例如，位于投影区域的中心或投影区域的边缘。所述测漏孔可以是圆形孔、椭圆形孔、三角形孔、方形孔或者多边形孔。所述测漏孔通过一测漏管道连接至外部的测漏仪，进而通过所述测漏仪对所述待测漏组件进行测漏。本申请实施例中，所述测漏孔可以为NW25法兰接口。
本申请实施例中，所述车体101包括一箱体1011和一连接支架1012；所述连接支架1012的一端与箱体1011固定连接，所述连接支架1012用于支撑所述箱体1011。其中，所述箱体1011具有一底板1011a和与所述底板1011a连接的至少一个侧板1011b。所述箱体1011用于放置所述待测漏组件，所述待测漏组件位于箱体1011中的底板1011a的表面，所述测漏孔A位于所述底板1011a上，且所述固定夹102位于所述至少一个侧板1011b上。这里，所述固定夹102可以是卡扣夹、弹力夹或者其它类型的夹子。
本申请实施例中，所述箱体为一敞口的容纳器，用于容纳所述待测漏组件。所述箱体具有四个侧板，相邻的两个侧板相互连接，且每一侧板均与底板连接。在其它实施例中，所述箱体也可以具有一个侧板、三个侧板或者五个侧板。
在一些实施例中，所述连接支架与所述箱体还可以是活动连接的。
本申请实施例中，所述待测漏组件至少包括第一组件和第二组件，所述第一组件和所述第二组件固定在一起形成所述待测漏组件。所述第一组件和所述第二组件可以分别为特定机台上的两个独立的部件。所述特定机台例如可以为薄膜沉积机台、刻蚀机台或者封装机台。在一些实施例中，当所述特定机台为薄膜沉积机台时，所述第一组件可以为腔室圆顶(Dome)，所述第二组件可以为喷气头(Top injector)。
本申请实施例提供的测漏推车能够在机台外部实现对待测漏组件进行测漏，节约 了时间成本和人力成本。
图2a为本申请实施例提供的测漏推车的一种可选的结构示意图，所述测漏推车10包括车体101、设置于所述车体上的固定夹102、可刹车万向轮(图中未示出)和支撑台103。
其中，所述车体101用于放置待测漏组件；所述固定夹102用于固定所述车体101与所述待测漏组件；所述车体101具有一测漏孔A，所述测漏孔A位于所述待测漏组件在所述车体101上的投影区域内，所述测漏孔A用于实现对所述待测漏组件进行测漏。
在一些实施例中，所述车体101包括一箱体1011和一连接支架1012；所述连接支架1012的一端与所述箱体1011固定或活动连接，所述连接支架1012的另一端与所述可刹车万向轮转动连接。其中，所述箱体1011用于放置所述待测漏组件；所述连接支架1012用于支撑所述箱体1011；所述可刹车万向轮使得所述测漏推车10能够自由移动。
本申请实施例提供的测漏推车可以通过可刹车万向轮自由移动，并停止于任何合适的地方，方便使用。
本申请实施例中，所述测漏推车包括四个可刹车万向轮。在其它实施例中，所述测漏推车还可以包括两个固定脚轮和两个可刹车万向轮，通过两个可刹车万向轮带动两个固定脚轮使得测漏推车可以自由移动。
在一些实施例中，所述箱体1011具有一底板1011a和与所述底板连接的至少一个侧板1011b，图2b、2c分别为测漏推车的俯视图和仰视图，结合图2a～2c所示，可以看出，所述测漏孔A位于所述底板1011a的中心，且所述固定夹102位于所述至少一个侧板1011b上。所述底板1011a上还设置有一凹槽B，所述凹槽B位于所述底板1011a与所述待测漏组件的接触位置。
本申请实施例中，所述凹槽B用于放置密封件，以通过所述密封件实现所述底板与所述待测漏组件之间的密封。所述凹槽B可以为圆形凹槽、椭圆形凹槽、三角形凹槽、方形凹槽或者多边形凹槽。所述密封件可以为密封圈或者密封条，例如，O型密封圈(O-ring)。
本申请实施例中，在待测漏组件与测漏推车之间(即凹槽中)设置密封件，可以避免损伤待测漏组件的隙合面。
本申请实施例中，所述支撑台为具有特定厚度的一个平台。请继续参见图2a和 2c，所述支撑台103位于所述底板1011a的投影区域内，且所述支撑台103的面积小于或者等于所述底板1011a的面积。本申请实施例中，所述测漏孔A通过测漏管道连接至外部的测漏仪，进而通过所述测漏仪对所述待测漏组件进行测漏。所述支撑台103用于在安装所述测漏管道时，增加工程师手部的稳定性。
图2d为本申请实施例提供的连接支架的结构示意图，如图2d所示，所述连接支架1012包括连接杆1012a和调整脚架1012b；所述连接杆1012a和所述调整脚架1012b卡接，且所述连接杆1012a与所述调整脚架1012b能够相对移动；所述连接杆1012a和所述调整脚架1012b共同用于调节所述测漏推车的高度。
在一些实施例中，所述调整脚架可以卡接在连接杆内，所述调整脚架上具有多个凸起，对应的所述连接杆上具有多个卡槽；或者，所述调整脚架上具有多个卡槽，对应的所述连接杆上具有多个凸起，所述卡槽和所述凸起共同用于调节所述连接杆和所述调整脚架的相对位置。
在一些实施例中，所述支撑台103与所述调整脚架1012b固定连接或者滑动连接；所述调整脚架1012b还用于调节所述支撑台103的高度。
本申请实施例提供的测漏推车，由于支撑箱体的连接支架由可以相对移动的两部分组成，且支撑台相对于连接支架可以相对移动，如此，使得测漏推车的高度以及测漏推车中的支撑台的高度均可以依据需求进行调整，方便使用。
除此之外，本申请实施例还提供一种测漏方法，所述测漏方法至少应用于上述实施例中的测漏推车。图3为本申请实施例提供的测漏方法的一种可选的流程示意图，如图3所示，所述方法包括以下步骤：
步骤S301、通过所述测漏推车对待测漏组件进行预测漏。
本申请实施例中，所述测漏推车至少包括车体和设置于所述车体上的固定夹；所述车体至少包括一箱体，所述箱体至少具有一底板，且所述底板上设置有一测漏孔和一凹槽。步骤S301可以包括以下步骤：
在所述凹槽中放置密封件。
这里，所述密封件可以是密封圈或者密封条。
通过所述密封件和所述固定夹，将所述待测漏组件密封固定于所述测漏推车上。
所述密封件位于待测漏组件与箱体底板的接触位置，通过密封件和车体上的固定夹，将所述待测漏组件与所述测漏推车进行固定。
通过测漏管道连接所述测漏孔、真空泵和测漏仪。
本申请实施例中，所述测漏管道的一端至少通过法兰连接至所述测漏孔，所述测漏管道的另一端分别连接至真空泵和测漏仪。
通过所述真空泵和所述测漏仪对所述待测漏组件进行预测漏。
在一些实施例中，所述通过所述真空泵和所述测漏仪对所述待测漏组件进行预测漏，包括：
通过所述真空泵，对所述待测漏组件和所述测漏推车之间的密封空间进行抽真空处理。
这里，所述真空泵可以是气体捕集泵或者气体传输泵。
在所述待测漏组件的外部喷射特定类型的气体；其中，所述测漏仪能够检测出所述特定类型的气体。
本申请实施例中，所述特定类型的气体可以是氦气、氖气、氩气、氪气或者氙气，对应地，所述测漏仪可以是氦测仪、氩测仪、氪测仪或者氙测仪。
通过所述测漏仪，对所述密封空间进行持续性地抽气处理，以实现对所述待测漏组件进行预测漏。
由于所述待测漏组件和所述车体之间的是完全密封的，此时，在待测漏组件周围喷射特定类型的气体，并通过测漏仪检测待测漏组件内部是否存在该特定类型的气体，如此，可以实现对待测漏组件进行测漏。
本申请实施例中，所述待测漏组件至少包括第一组件和第二组件，所述第一组件和所述第二组件分别为所述特定机台上的两个独立的部件。
在一些实施例中，在将所述待测漏组件密封固定于所述测漏推车上之前，所述方法还包括：将所述第一组件和所述第二组件的进行固定组合，形成一固定组合结构。
步骤S302、判断所述预测漏结果是否满足要求。
在测漏仪检测出所述特定类型的气体的情况下，表明预测漏结果不满足要求；在测漏仪没有检测出所述特定类型的气体的情况下，表明预测漏结果满足要求。本申请实施例中，当所述预测漏结果满足要求时，执行步骤S303；当预测漏结果不满足要求时，返回执行步骤S301。
本申请实施例中，当预测漏结果不满足要求时，表明待测组件内部的气密性不好，这时，需要更换新的待测组件，再次进行预测漏，直至预测漏的结果符合要求。
步骤S303、在特定机台上对所述待测漏组件进行再次测漏。
在一些实施例中，步骤S303包括以下步骤：
对经过所述预测漏的固定组合结构进行拆卸。
将拆卸的所述固定组合结构安装在所述特定机台上。
通过测漏仪，在所述特定机台上对所述固定组合结构进行再次测漏。
本申请实施例中，在测漏推车上对第一组件和第二组件的固定组合结构进行预测漏通过之后，表明待测漏组件内部的气密性良好，此时，将完整的固定组合结构安装在特定机台上，进行再次测漏，若再次测漏的结果不符合要求，那么，只能说明是待测漏组件与特定机台之间的隙合不紧密，如此，可以实现快速确定出漏气点，并准确应对，不会影响机台的产能。
本申请实施例中，如果直接在特定机台上测漏的话会占用机台、影响产能，先在机台外组装测漏，机台可以正常生产，而且外部测好后再在机台上测漏就会更快速的完成测漏测试，节约时间。
下面，以特定机台为薄膜沉积机台、待测漏组件包括Dome和Top injector、测漏过程为氦测漏过程为例，对本申请实施例提供的测漏方法进行详细介绍。
首先，将Dome和Top injector在外部组合好，再将组合好Dome和Top injector放置到氦测工具车(对应上述实施例中的测漏推车)上，摆放稳固，然后用加压固定片(对应上实施例中的固定夹)紧固，将氦测仪连接到氦测车底部法兰上，开启氦测仪进行氦测(对应上述实施例中的预测漏过程)；其次，在氦测结果通过后，在薄膜沉积机台上进行再次氦测(对应上述实施例中的再次测漏过程)。
如图4a和4b所示，薄膜沉积机台中腔室圆顶40与喷气头结合的地方为氦测易漏区域C，腔室圆顶40表面包括四个紧固螺丝孔D和五个气体传输管道口E。如图4c和4d所示，本申请实施例中，喷气头包括两个部分，一部分为喷气头盖(Top injector cover)411，另一部分为喷气头主体412。其中，喷气头盖411和喷气头主体412分别也具有四个紧固螺丝孔D1、D2和五个气体传输管道口E1、E2。本申请实施例中，薄膜沉积机台上的氦测易漏区域C可能产生漏气的点有三个：一是喷气头盖密封圈处漏气；二是喷气头盖和喷气头主体密封圈处漏气；三是腔室圆顶与喷气头配合安装时漏气。
本申请实施例中，将腔室圆顶40与喷气头进行外部组装的过程为：先将喷气头主体412放置在腔室圆顶40的表面，然后将喷气头盖411盖在喷气头主体412的表面，最后采用四个紧固螺丝将喷气头盖411、喷气头主体412和腔室圆顶40进行固定，形成了如图4e所示的组合结构42。其中，喷气头盖411、喷气头主体412之间通过 一个大的O型密封圈411a和五个小的O型密封圈412a进行密封。
如图4f和4g所示，将腔室圆顶与喷气头的组合结构42固定在测漏推车43上，以通过所述测漏推车43对腔室圆顶与喷气头的组合结构42进行预测漏。如图4h所示，本申请实施例中，测漏推车43通过测漏管道44连接至外部的氦测仪45，采用氦测仪45对腔室圆顶与喷气头的组合结构42进行预测漏。
请继续参见图4h，在一些实施例中，采用测漏推车43对腔室圆顶与喷气头的组合结构42进行预测漏的过程是：先将腔室圆顶与喷气头内部空间抽真空；其次，在腔室圆顶和喷气头周围(即组合结构42的外围)喷氦气；再次，采用氦测仪45一直抽气进行测试，若氦测仪45数值上升则会报警(因氦测仪对氦气得测试较敏感，若腔室圆顶和喷气头没有密封好则外部喷射的氦气必定会通过缝隙进入腔室圆顶和喷气头内部并被氦测仪检测到)，若氦测仪45没有报警则认为腔室圆顶和喷气头之间的密封性良好。
在通过氦测仪检测出腔室圆顶和喷气头之间的密封性良好的情况下，将腔室圆顶和喷气头的组合结构一起拆下，并安装在薄膜沉积机台上，再次进行氦测后投入使用。
本申请实施例提供的测漏方法至少应用于上述实施例中的氦测推车，对于本申请实施例未详尽披露的技术特征，请参照上述实施例进行理解，这里不再赘述。
本申请实施例提供的测漏方法，将Dome和Top injector在机台外组装，使用可移动外接测漏推车，能够实现移动方便，节约时间，精准氦测的优点；并且不会刮伤Dome和Top injector组合结构的隙合面，能够实现快速测漏，快速分离，快速厘清的优点。
在本申请所提供的几个实施例中，应该理解到，所揭露的设备和方法，可以通过非目标的方式实现。以上所描述的设备实施例仅仅是示意性的，例如，所述单元的划分，仅仅为一种逻辑功能划分，实际实现时可以有另外的划分方式，如：多个单元或组件可以结合，或可以集成到另一个系统，或一些特征可以忽略，或不执行。另外，所显示或讨论的各组成部分相互之间的耦合、或直接耦合。
本申请所提供的几个方法或设备实施例中所揭露的特征，在不冲突的情况下可以任意组合，得到新的方法实施例或设备实施例。
以上所述，仅为本申请实施例的一些实施方式，但本申请实施例的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请实施例揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本申请实施例的保护范围之内。因此，本申请实施例 的保护范围应以权利要求的保护范围为准。

Claims (15)

  1. 一种测漏推车，至少包括：车体和设置于所述车体上的固定夹；
    其中，所述车体用于放置待测漏组件；
    所述固定夹用于固定所述车体与所述待测漏组件；
    所述车体具有一测漏孔，所述测漏孔位于所述待测漏组件在所述车体上的投影区域内，所述测漏孔用于实现对所述待测漏组件进行测漏。
  2. 根据权利要求1所述的测漏推车，其中，所述车体至少包括一箱体；所述箱体具有一底板和与所述底板连接的至少一个侧板；
    所述测漏孔位于所述底板上，且所述固定夹位于所述至少一个侧板上；所述箱体用于放置所述待测漏组件。
  3. 根据权利要求2所述的测漏推车，其中，所述底板上还设置有一凹槽，所述凹槽位于所述底板与所述待测漏组件的接触位置；
    所述凹槽用于放置密封件，以通过所述密封件实现所述底板与所述待测漏组件之间的密封。
  4. 根据权利要求3所述的测漏推车，其中，所述车体还包括一连接支架；所述测漏推车还包括可刹车万向轮；
    所述连接支架的一端与所述箱体固定连接，所述连接支架用于支撑所述箱体；
    所述连接支架的另一端与所述可刹车万向轮转动连接，所述可刹车万向轮使得所述测漏推车能够自由移动。
  5. 根据权利要求4所述的测漏推车，所述测漏推车还包括设置于所述连接支架之间的支撑台；
    所述支撑台位于所述底板的投影区域内，且所述支撑台的面积小于或者等于所述底板的面积。
  6. 根据权利要求5所述的测漏推车，其中，所述连接支架包括连接杆和调整脚架；
    所述连接杆和所述调整脚架卡接，且所述连接杆与所述调整脚架能够相对移动；所述连接杆和所述调整脚架共同用于调节所述测漏推车的高度。
  7. 根据权利要求6所述的测漏推车，其中，所述支撑台与所述调整脚架固定连接或者滑动连接；
    所述调整脚架还用于调节所述支撑台的高度。
  8. 根据权利要求1所述的测漏推车，其中，所述测漏孔通过法兰连接测漏管道的一端；
    所述测漏管道的另一端分别连接真空泵和测漏仪，所述真空泵和所述测漏仪共同用于通过所述测漏管道和所述测漏孔对所述待测漏组件进行测漏。
  9. 根据权利要求1所述的测漏推车，其中，所述待测漏组件至少包括第一组件和第二组件；
    其中，所述第一组件和所述第二组件分别为特定机台上的两个独立的部件。
  10. 根据权利要求9所述的测漏推车，其中，所述第一组件包括腔室圆顶；所述第二组件包括喷气头；
    所述腔室圆顶和所述喷气头为薄膜沉积机台上的两个独立的部件。
  11. 一种测漏方法，至少应用于上述权利要求1至10任一项所述的测漏推车；所述方法包括：
    通过所述测漏推车对待测漏组件进行预测漏；
    当所述预测漏结果满足要求时，在特定机台上对所述待测漏组件进行再次测漏。
  12. 根据权利要求11所述的方法，其中，所述测漏推车至少包括车体和设置于所述车体上的固定夹；所述车体至少包括一箱体，所述箱体至少具有一底板，且所述底板上设置有一测漏孔和一凹槽；
    所述通过所述测漏推车对待测漏组件进行预测漏，包括：
    在所述凹槽中放置密封件；
    通过所述密封件和所述固定夹，将所述待测漏组件密封固定于所述测漏推车上；
    通过测漏管道连接所述测漏孔、真空泵和测漏仪；
    通过所述真空泵和所述测漏仪对所述待测漏组件进行预测漏。
  13. 根据权利要求12所述的方法，其中，所述通过所述真空泵和所述测漏仪对所述待测漏组件进行预测漏，包括：
    通过所述真空泵，对所述待测漏组件和所述测漏推车之间的密封空间进行抽真空处理；
    在所述待测漏组件的外部喷射特定类型的气体；其中，所述测漏仪能够检测出所述特定类型的气体；
    通过所述测漏仪，对所述密封空间进行持续性地抽气处理，以实现对所述待测漏 组件进行预测漏。
  14. 根据权利要求13所述的方法，其中，所述待测漏组件至少包括第一组件和第二组件；所述第一组件和所述第二组件分别为所述特定机台上的两个独立的部件；在将所述待测漏组件密封固定于所述测漏推车上之前，所述方法还包括：
    将所述第一组件和所述第二组件的进行固定组合，形成一固定组合结构。
  15. 根据权利要求14所述的方法，其中，所述在特定机台上对所述待测漏组件进行再次测漏，包括：
    对经过所述预测漏的固定组合结构进行拆卸；
    将拆卸的所述固定组合结构安装在所述特定机台上；
    通过测漏仪，在所述特定机台上对所述固定组合结构进行再次测漏。
PCT/CN2021/110997 2021-07-29 2021-08-05 测漏推车及测漏方法 WO2023004865A1 (zh)

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