WO2023002861A1 - 加熱装置 - Google Patents

加熱装置 Download PDF

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Publication number
WO2023002861A1
WO2023002861A1 PCT/JP2022/027009 JP2022027009W WO2023002861A1 WO 2023002861 A1 WO2023002861 A1 WO 2023002861A1 JP 2022027009 W JP2022027009 W JP 2022027009W WO 2023002861 A1 WO2023002861 A1 WO 2023002861A1
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WO
WIPO (PCT)
Prior art keywords
electrode
heating
metal plate
collective
heating device
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PCT/JP2022/027009
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English (en)
French (fr)
Japanese (ja)
Inventor
浩幸 前田
Original Assignee
京セラ株式会社
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Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Priority to JP2023536689A priority Critical patent/JP7706552B2/ja
Publication of WO2023002861A1 publication Critical patent/WO2023002861A1/ja

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/03—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater

Definitions

  • the disclosed embodiments relate to heating devices.
  • Patent Document 1 discloses a heating device in which a heat insulating material is provided on substantially the entire back surface of the heating plate (the surface located on the opposite side of the heating surface) in order to prevent heat dissipation from the heating plate ( See Patent Document 1).
  • a heating device includes a heating plate, a plurality of heaters, and a collective electrode.
  • the heating plate has a heating surface and a plurality of recesses opposite the heating surface.
  • a plurality of heaters are positioned in the plurality of recesses, respectively, and are connected to lead electrodes, respectively.
  • a collective electrode is connected to two or more lead electrodes.
  • FIG. 1 is a side view of the heating device according to the embodiment viewed from the Y-axis negative direction.
  • FIG. 2 is a cross-sectional view of the heater according to the embodiment.
  • FIG. 3 is a plan view of the heating device according to the embodiment viewed from the Z-axis positive direction.
  • FIG. 4 is a cross-sectional view taken along line IV-IV shown in FIG.
  • FIG. 5 is a cross-sectional view taken along line VV shown in FIG.
  • FIG. 6 is a side view of the heating device according to the embodiment viewed from the negative direction of the X-axis.
  • FIG. 7 is a cross-sectional view taken along line VII--VII shown in FIG. FIG.
  • FIG. 8 is a side view of the heating device according to the embodiment viewed from the positive direction of the Y-axis.
  • FIG. 9 is a plan view of a plurality of cathode-side collective electrodes according to the embodiment, viewed from the Z-axis negative direction.
  • FIG. 10 is a cross-sectional view of a collective electrode on the anode side according to the first modified example.
  • FIG. 11 is a cross-sectional view of a collective electrode on the anode side according to the second modification.
  • FIG. 12 is a side view of a plurality of anode-side collective electrodes according to the third modification, viewed from the negative direction of the X-axis.
  • FIG. 13 is a side view of a heating device according to a fourth modification as seen from the Y-axis negative direction.
  • FIG. 14 is a side view of a heating device according to a fifth modified example viewed from the negative direction of the X-axis.
  • the cartridge heater has a temperature distribution in the longitudinal direction. For this reason, in a configuration that prevents heat dissipation by using a heat insulating material as in the technique described in Patent Document 1, there is a difference between the temperature of the metal plate near the central portion of the heat insulating material and the temperature of the metal plate near the outer peripheral portion. It was difficult to make the temperature of the metal plate uniform.
  • the heat generated in a plurality of cartridge heaters may dissipate separately from the lead electrodes of the cartridge heaters, causing the temperature of the metal plate to become non-uniform.
  • FIG. 1 is a side view of the heating device 100 according to the embodiment viewed from the Y-axis negative direction.
  • the surface located on the side of the object to be heated is defined as the "upper surface”
  • the surface located on the opposite side of the object to be heated is defined as the "lower surface”.
  • the heating device 100 is not limited to this, and may be used upside down, for example, or may be used in an arbitrary posture.
  • the heating device 100 shown in FIG. 1 has a heating plate 110, a fixed plate 120, a plurality of heaters 130, and a support plate 150.
  • the heating device 100 also has a plurality of anode-side collective electrodes 160 and a plurality of cathode-side collective electrodes 170 .
  • the anode-side collective electrode 160 and the cathode-side collective electrode 170 are examples of collective electrodes.
  • the heating plate 110 is, for example, a plate-like member made of metal.
  • the heating plate 110 has an upper surface 110a that can come into contact with an object to be heated. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated.
  • the upper surface 110a is used, for example, for heating a mold as an example of an object to be heated.
  • a plurality of recesses 113 into which the plurality of heaters 130 are respectively inserted are positioned on a lower surface 110b (an example of the opposite surface) of the heating plate 110 opposite to the heating surface.
  • the plurality of heaters 130 are inserted into the plurality of recesses 113 respectively.
  • the plurality of heaters 130 are positioned in the plurality of recesses 113 respectively.
  • the plurality of heaters 130 are arranged so as to be perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface.
  • the heater 130 has a temperature distribution in the longitudinal direction.
  • FIG. 2 is a cross-sectional view of the heater 130 according to the embodiment.
  • the heater 130 has a heater main body 131, a fixing member 132, an anode side lead electrode 133, and a cathode side lead electrode .
  • the anode-side lead electrode 133 and the cathode-side lead electrode 134 are examples of lead electrodes.
  • the heater body 131 is a ceramic heater.
  • the heater main body 131 has a heating resistor 131a inside a ceramic body.
  • seizure between the heating plate 110 and the heater main body 131, which are made of metal, can be suppressed. Therefore, for example, the problem that the heater main body 131 is seized to the heating plate 110 and the heater 130 cannot be replaced is less likely to occur.
  • the length of the heater main body 131 that is, the length of the ceramic body can be, for example, about 1 mm or more and 200 mm or less.
  • the outer dimensions of the ceramic body can be, for example, about 0.5 mm or more and 100 mm or less.
  • the shape of the heater main body 131 that is, the shape of the ceramic body is cylindrical, for example.
  • the shape of the heater main body 131 is not limited to the columnar shape, and may be, for example, an elliptical columnar shape or a prismatic shape.
  • the material of the ceramic body is, for example, ceramic having insulating properties.
  • oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used as the material of the ceramic body.
  • the heating resistor 131a is a member that generates heat when current flows. One end of the heating resistor 131a is connected to a coil portion 133a of an anode-side lead electrode 133, which will be described later. The other end of the heating resistor 131a is connected to a coil portion 134a of a cathode-side lead electrode 134, which will be described later.
  • the heating resistor 131a may include, for example, a high-resistance conductor containing tungsten, molybdenum, or the like.
  • the dimensions of the heating resistor 131a can be, for example, a width of 0.1 mm or more and 5 mm or less, a thickness of 0.05 mm or more and 0.3 mm or less, and a total length of 1 mm or more and 500 mm or less.
  • the heating resistor 131a may be made of conductive ceramics containing, for example, tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor 131a can be reduced. Thereby, the thermal stress between the ceramic body and the heating resistor 131a can be reduced. As a result, durability of the heater body 131 can be enhanced.
  • the fixing member 132 has a tubular shape surrounding the peripheral surface of the heater main body 131 .
  • the fixing member 132 has, for example, a first member 132a and a second member 132b.
  • a male screw 132c is located on the outer peripheral surface of the first member 132a.
  • the material of the first member 132a is, for example, a metal material having heat resistance.
  • a material of the fixing member 132 for example, an alloy containing Fe or Ni can be used.
  • the fixing member 132 can be made of stainless steel, Fe--Ni--Co alloy, Ni-based heat-resistant alloy, or the like.
  • the second member 132b is positioned between the first member 132a and the coil portion 134a of the lead electrode 134 on the cathode side.
  • the material of the second member 132b is, for example, insulating ceramics.
  • the material of the second member 132b may be, for example, alumina or silicon nitride.
  • the anode-side lead electrode 133 and the cathode-side lead electrode 134 are fixed to the peripheral surface of the heater main body 131 .
  • One end of the anode-side lead electrode 133 is connected to an external power supply via an anode-side collective electrode 160, which will be described later, and the other end is electrically connected to the heating resistor 131a.
  • One end of the cathode-side lead electrode 134 is connected to an external power supply via a cathode-side collective electrode 170, which will be described later, and the other end is electrically connected to the heating resistor 131a.
  • the anode-side lead electrode 133 and the cathode-side lead electrode 134 are, for example, wires containing metal materials such as nickel, iron, or nickel-based heat-resistant alloys.
  • the cross sections of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be circular, elliptical, or rectangular, for example.
  • the outer diameters of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be, for example, 0.5 mm or more and 2.0 mm or less.
  • the anode-side lead electrode 133 has a coil portion 133a and a terminal portion 133b.
  • the coil portion 133a is a portion of the anode-side lead electrode 133 that is spirally wound along the peripheral surface of the heater body 131, and is electrically connected to one end of the heating resistor 131a.
  • the terminal portion 133b is a portion of the anode-side lead electrode 133 that is drawn out of the heater main body 131 from the coil portion 133a.
  • the terminal portion 133b extends outward in the longitudinal direction of the heater main body 131 (here, in the Z-axis negative direction) from the rear end of the heater main body 131 .
  • the cathode-side lead electrode 134 has a coil portion 134a and a terminal portion 134b.
  • the coil portion 134a is a portion spirally wound along the peripheral surface of the heater main body 131, and is electrically connected to the other end of the heating resistor 131a.
  • the terminal portion 134b is a portion of the cathode-side lead electrode 134 that is pulled out from the coil portion 134a.
  • the terminal portion 134b extends radially outward of the heater main body 131 (here, in the positive Y-axis direction) from the peripheral surface of the heater main body 131 .
  • the lead electrodes (anode side lead electrode 133 and cathode side lead electrode 134) of the heater 130 are drawn out from the coil portions 133a and 134a located along the peripheral surface of the heater main body 131 and the coil portions 133a and 134a. and terminal portions 133b and 134b.
  • the coil portions 133a and 134a function as springs, so stress is less likely to concentrate. Therefore, the heater 130 configured in this way has high durability.
  • the anode-side lead electrode 133 is positioned closer to the rear end side of the heater main body 131 than the cathode-side lead electrode 134 has been described, but the positions of the anode-side lead electrode 133 and the cathode-side lead electrode 134 are different.
  • the relationship may be reversed. That is, the lead electrode provided at the position of the anode lead electrode 133 shown in FIG. 2 may be the cathode lead electrode 134 . Moreover, the lead electrode provided at the position of the cathode side lead electrode 134 shown in FIG. 2 may be the anode side lead electrode 133 .
  • FIG. 3 is a plan view of the heating device 100 according to the embodiment viewed from the Z-axis positive direction.
  • the upper surface 110a of the heating plate 110 which is the heating surface, is shown in the shape of a rectangular plate, and the positions of the plurality of recesses 113 are indicated by dashed lines.
  • the plurality of recesses 113 shown in FIG. 3 are arranged in 6 rows and 6 columns. That is, the heating plate 110 according to the embodiment has a total of 36 recesses 113 . Note that the arrangement and number of the plurality of recesses 113 are not limited to the illustrated example.
  • the fixed plate 120 is, for example, a plate-like member made of metal, and is arranged apart from the heating plate 110 .
  • a plurality of heaters 130 that are respectively inserted into the plurality of recesses 113 are fixed to the fixed plate 120 . How the heater 130 is fixed to the fixing plate 120 will be described later.
  • the support plate 150 is fixed to the fixed plate 120 by a plurality of columnar members 151 while being separated from the fixed plate 120 .
  • a space for arranging the terminal portions 133b and 134b of each heater 130, in other words, an anode-side collective electrode 160 and a cathode-side collective electrode 170, which will be described later, are arranged. A space for this can be secured between the support plate 150 and the fixing plate 120 .
  • the support plate 150 and the plurality of columnar members 151 may be omitted as necessary.
  • FIG. 4 is a cross-sectional view along line IV-IV shown in FIG. 5 is a cross-sectional view taken along line VV shown in FIG. 4 and 5, illustration of the support plate 150 and the plurality of columnar members 151 is omitted.
  • the heating device 100 is configured by a plurality of heaters 130 fixed to a fixed plate 120 and inserted into a plurality of recesses 113 of a heating plate 110, respectively.
  • the heating plate 110 has a first plate member 111 and a second plate member 112 .
  • the first plate member 111 is a plate member having an upper surface 110a of the heating plate 110, which is a heating surface.
  • the first plate member 111 is joined to the second plate member 112 by fixing members 114 such as bolts. That is, the lower surface 111a of the first plate member 111 opposite to the upper surface 110a is a joint surface to which the second plate member 112 is joined.
  • the second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a surface to be joined that is joined to the joint surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a.
  • a plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.
  • Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface of each recess 113 (ceiling surface in the posture shown in FIG. 5).
  • the fixing plate 120 is separated from the heating plate 110 by being connected to the heating plate 110 by a connecting member 121 such as a bolt with a gap formed between the fixing plate 120 and the heating plate 110 . It is By arranging the fixed plate 120 apart from the heating plate 110, it is possible to suppress the temperature rise of the fixing portions (for example, fixing holes 120a described later) of the plurality of heaters 130 with respect to the fixed plate 120. FIG. On the other hand, since the heat taken from the heating plate 110 by the fixing plate 120 is reduced, the temperature rise of the heating plate 110 can be accelerated.
  • the fixing plate 120 has a plurality of fixing holes 120 a at positions corresponding to the plurality of recesses 113 .
  • a plurality of heaters 130 are respectively inserted and fixed to the plurality of fixing holes 120a.
  • the plurality of recesses 113, the plurality of fixing holes 120a, and the plurality of heaters 130 will be simply referred to as “recesses 113,” “fixing holes 120a,” and “heaters 130,” respectively, when there is no particular need to distinguish them. call.
  • a heater main body 131 of the heater 130 penetrates through the fixing hole 120 a and its tip is inserted into the recess 113 .
  • the base end of the heater main body 131 protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, rather than the lower surface of the fixed plate 120.
  • the anode lead electrode 133 and the cathode lead electrode 134 are positioned at the proximal end of the heater main body 131 .
  • the anode lead electrode 133 and the cathode lead electrode 134 are separated from the heating surface.
  • the side lead electrodes 134 can be kept away. Therefore, according to such a configuration, heat transfer to the anode side lead electrode 133 and the cathode side lead electrode 134 can be suppressed.
  • a fixing member 132 of the heater 130 fixes the heater main body 131 to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a.
  • a female screw is formed in a portion of the inner wall of the fixing hole 120a located on the side opposite to the heating plate 110 .
  • the fixing member 132 has an external thread 132c on the outer peripheral portion of the first member 132a.
  • the fixing plate 120 Since the heater main body 131 is thus fixed to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a, the fixing plate 120 is less likely to receive heat from the heater main body 131. As a result, the temperature rise of the fixing plate 120 is suppressed, so that the heat radiated from the fixing plate 120 toward the proximal end portion of the heater main body 131 where the anode lead electrode 133 and the cathode lead electrode 134 are provided is reduced. Suppressed. Therefore, according to the heating device 100 according to the embodiment, the deterioration of the anode lead electrode 133 and the cathode lead electrode 134 in the heater 130 can be reduced.
  • a spacer member 140 is arranged between the heating plate 110 and the fixed plate 120 .
  • the spacer member 140 has a tubular shape, and the connecting member 121 is inserted therethrough.
  • the material of the spacer member 140 is preferably heat-resistant ceramic, for example.
  • a material of the spacer member 140 for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. As a result, thermal expansion and thermal contraction of the spacer member 140 can be reduced, and wear of the spacer member 140 can be reduced.
  • the anode collective electrode 160 is electrically connected to the anode lead electrodes 133 of the plurality of heaters 130 .
  • the heating device 100 has 36 heaters 130, and the anode-side collective electrode 160 is connected to the anode-side lead electrodes 133 of the 6 heaters 130 arranged in a line among the 36 heaters 130. is electrically connected to The heating device 100 has a total of six anode-side collective electrodes 160 (see FIG. 7).
  • the cathode-side collective electrode 170 is electrically connected to the cathode-side lead electrodes 134 of the plurality of heaters 130 .
  • the heating device 100 has 36 heaters 130, and the cathode-side collective electrode 170 is connected to the cathode-side lead electrodes 134 of the 6 heaters 130 arranged in a line among the 36 heaters 130. is electrically connected to The heating device 100 has a total of six cathode-side collective electrodes 170 (see FIG. 9).
  • the heating device 100 has the anode-side collective electrode 160 connected to two or more anode-side lead electrodes 133 of two or more heaters 130 among the plurality of heaters 130 of the heating device 100. Moreover, the heating device 100 according to the embodiment has a cathode-side collective electrode 170 connected to two or more cathode-side lead electrodes 134 of two or more heaters 130 among the plurality of heaters 130 of the heating device 100 .
  • the heat generated by a plurality of (here, six) heaters 130 is transferred to one collective electrode via lead electrodes.
  • the heat generated in each heater 130 can be prevented from dissipating separately from the lead electrodes of each heater 130 . Therefore, according to the heating device 100 according to the embodiment, uniformity of heat can be improved.
  • FIG. 6 is a side view of the heating device 100 according to the embodiment viewed from the negative direction of the X-axis.
  • FIG. 7 is a cross-sectional view taken along line VII--VII shown in FIG.
  • FIG. 8 is a side view of the heating device 100 according to the embodiment viewed from the positive Y-axis direction.
  • FIG. 9 is a plan view of a plurality of cathode-side collective electrodes 170 according to the embodiment, viewed from the Z-axis negative direction.
  • the anode-side collective electrode 160 has a first metal plate 161, a second metal plate 162, and a plurality of fixing members 163.
  • the first metal plate 161 and the second metal plate 162 are metal plate members having a rectangular cross-sectional view.
  • the fixing member 163 detachably fixes the first metal plate 161 and the second metal plate 162 .
  • Fixing member 163 is, for example, a bolt.
  • the anode collective electrode 160 is electrically connected to the anode lead electrodes 133 by sandwiching the terminal portions 133b of the anode lead electrodes 133 between the first metal plate 161 and the second metal plate 162. .
  • the first metal plate 161 and the second metal plate 162 extend along the X-axis direction, and a plurality of (here, six) arranged along the X-axis direction. ) is sandwiched therebetween.
  • the fixing between the first metal plate 161 and the second metal plate 162 by the fixing member 163 can be released. Therefore, for example, when any one of the plurality of heaters 130 fails, only the failed heater can be replaced. Thus, according to the heating device 100 according to the embodiment, it is easy to replace the heater 130 .
  • a plurality of (here, six) anode-side collective electrodes 160 are arranged along the Y-axis direction.
  • the connecting positions of the anode-side collective electrodes 160 and the terminal portions 133 b overlap the upper surface 110 a of the heating plate 110 . ing.
  • the anode-side collective electrode 160 and the terminal portion 133b within the range of the heating region, for example, compared to the case where the anode-side collective electrode 160 and the terminal portion 133b are connected outside the heating region.
  • heat dissipation from each heater 130 to the outside of the heating device 100 can be suppressed. Therefore, according to the heating device 100 according to the embodiment, the heat uniformity can be further improved.
  • the cathode-side collective electrode 170 has a first metal plate 171, a second metal plate 172, and a plurality of fixing members 173.
  • the first metal plate 171 and the second metal plate 172 are metal plate materials having a rectangular cross-sectional view.
  • the fixing member 173 detachably fixes the first metal plate 171 and the second metal plate 172 .
  • Fixing member 173 is, for example, a bolt.
  • the cathode-side collective electrode 170 is electrically connected to the plurality of cathode-side lead electrodes 134 by sandwiching the terminal portions 134b of the plurality of cathode-side lead electrodes 134 between the first metal plate 171 and the second metal plate 172. .
  • the first metal plate 171 and the second metal plate 172 extend along the X-axis direction, and a plurality of (here, six) arranged along the X-axis direction. ) sandwiches the terminal portion 134b (see FIGS. 8 and 9).
  • the plurality of cathode-side lead electrodes 134 can be connected in a straight line, so that the plurality of cathode-side lead electrodes 134 can be connected in the shortest distance. Moreover, even if the length of the terminal portion 134b varies, the connection is easy.
  • the fixation of the first metal plate 171 and the second metal plate 172 by the fixing member 173 can be released, for example, if one of the plurality of heaters 130 fails, only the failed heater can be replaced. can be replaced.
  • the heating device 100 according to the embodiment it is easy to replace the heater 130 .
  • a plurality (here, six) of cathode-side collective electrodes 170 are arranged along the Y-axis direction.
  • the connecting positions of the cathode-side collective electrodes 170 and the terminal portions 134b are located on the upper surface 110a of the heating plate 110. overlaps with
  • the cathode-side collective electrode 170 and the terminal portion 134b within the range of the heating region, for example, compared to the case of connecting the cathode-side collective electrode 170 and the terminal portion 134b outside the heating region.
  • the heat uniformity can be further improved.
  • the heating device 100 since the heating device 100 according to the embodiment employs a configuration in which the lead electrode is sandwiched between two metal plates on both the anode side and the cathode side, the above configuration is employed only on one of the anode side and the cathode side. Heat uniformity can be further improved as compared with the case.
  • the anode-side collective electrode 160 and the cathode-side collective electrode 170 are parallel. With such a configuration, the direction of thermal expansion or thermal contraction of the anode-side collective electrode 160 is aligned with the direction of thermal expansion or thermal contraction of the cathode-side collective electrode 170, so stress in the shear direction is less likely to be applied to the heater 130. Become. Therefore, according to the heating device 100, durability of the plurality of heaters 130 can be enhanced.
  • FIG. 10 is a cross-sectional view of an anode-side collective electrode 160 according to a first modified example.
  • the first metal plate 161 of the anode-side collective electrode 160 has a concave portion 161a (an example of a first concave portion) on the surface facing the second metal plate 162 (an example of the first facing surface).
  • the second metal plate 162 of the anode-side collective electrode 160 may have a concave portion 162a (an example of a second concave portion) on the surface facing the first metal plate 161 (an example of the second facing surface).
  • the concave portions 161a and 162a have, for example, a groove shape extending along the extending direction of the terminal portion 133b (here, the Z-axis direction).
  • the anode-side collective electrode 160 may have recesses 161 a and 162 a in the first metal plate 161 and the second metal plate 162 .
  • the first metal plate 161 and the second metal plate 162 can function as springs.
  • the force that clamps the terminal portion 133b can be maintained for a long period of time.
  • the recess 161a of the first metal plate 161 and the recess 162a of the second metal plate 162 may face each other. With such a configuration, the force of the spring generated by the first metal plate 161 and the second metal plate 162 can be appropriately transmitted to each terminal portion 133b.
  • the recess 161a and the recess 162a do not necessarily have to face each other.
  • the anode-side collective electrode 160 may have recesses 161 a and 162 a only on one of the first metal plate 161 and the second metal plate 162 .
  • Plate 172 may also have similar recesses. That is, the first metal plate 171 of the cathode-side collective electrode 170 may have a concave portion on the surface facing the second metal plate 172 . Also, the second metal plate 172 of the cathode-side collective electrode 170 may have a concave portion on the surface facing the first metal plate 171 . Also, the concave portion of the first metal plate 171 and the concave portion of the second metal plate 172 may face each other.
  • FIG. 11 is a cross-sectional view of an anode-side collective electrode 160 according to a second modified example.
  • the anode-side collective electrode 160 has one metal plate 165, for example.
  • the metal plate 165 has a plurality of insertion holes 165a arranged along the longitudinal direction of the metal plate 165 (here, the X-axis direction).
  • the insertion hole 165 a is a through hole extending through the metal plate 165 along the extending direction of the terminal portion 133 b of the anode lead electrode 133 (here, the Z-axis direction).
  • the terminal portion 133b of the anode-side lead electrode 133 is inserted through each insertion hole 165a. In other words, the anode-side lead electrode 133 is located in the insertion hole 165a.
  • the metal plate 165 may have fixing holes 165b communicating with the insertion holes 165a for each of the plurality of insertion holes 165a.
  • a fixing member 166 for fixing the terminal portion 133b of the anode lead electrode 133 is inserted through the fixing hole 165b.
  • the fixing member 166 is, for example, a bolt, and a screw groove is formed on the inner surface of the fixing hole 165b.
  • the terminal portion 133b of the anode-side lead electrode 133 is sandwiched between the inner surface of the insertion hole 165a and the fixing member 166 inserted through the fixing hole 165b. As a result, the terminal portion 133 b is electrically connected to the anode-side collective electrode 160 .
  • the plurality of terminal portions 133b can be appropriately connected to the anode-side collective electrode 160.
  • the terminal portion 133b only needs to be in contact with at least the metal plate 165. Therefore, the metal plate 165 of the anode-side collective electrode 160 does not necessarily need to be provided with the fixing holes 165b and the fixing member 166 . In this case, for example, by making the diameter of insertion hole 165a slightly larger than that of terminal portion 133b, the contact between terminal portion 133b and fixing hole 165b can be enhanced. Alternatively, the metal plate 165 and the terminal portion 133b may be electrically connected by filling the insertion hole 165a with a brazing material, a solder material, or the like.
  • the cathode-side collective electrode 170 may have a metal plate with a plurality of through holes. Further, the cathode-side collective electrode 170 may have a fixing hole communicating with each of the plurality of through holes.
  • FIG. 12 is a side view of a plurality of anode-side collective electrodes 160 according to the third modification, viewed from the negative direction of the X-axis.
  • at least one of the plurality of anode-side collective electrodes 160 extends in a direction ( Here, the position in the Z-axis direction) may be different from that of other anode-side collective electrodes 160 .
  • the plurality of anode-side collective electrodes 160 can be arranged with higher density.
  • the heat dissipation of the plurality of anode-side collective electrodes 160 can be improved.
  • At least one of the plurality of cathode-side collective electrodes 170 is arranged in a direction (here, the Z-axis direction) may be different from the other cathode-side collecting electrodes 170 .
  • FIG. 13 is a side view of the heating device 100 according to the fourth modification as seen from the Y-axis negative direction.
  • at least one of the plurality of anode-side collective electrodes 160 (an example of an anisotropic collective electrode) has an inclination with respect to the upper surface 110 a (see FIG. 1 etc.), which is the heating surface of the heating plate 110 . may be different from the anode-side collective electrode 160 of .
  • the height positions of the anode-side collective electrodes 160 are shifted, so that the heat dissipation of the plurality of anode-side collective electrodes 160 can be improved.
  • the heating device 100 may have the inclinations of the plurality of cathode-side collective electrodes 170 varied. That is, at least one of the plurality of cathode-side collective electrodes 170 (an example of a different-tilt collective electrode) has an inclination with respect to the upper surface 110a (see FIG. 1 , etc.), which is the heating surface of the heating plate 110. The slope may be different from 170.
  • FIG. 14 is a side view of the heating device 100 according to the fifth modification as seen from the X-axis negative direction.
  • the extending directions of the anode-side collective electrode 160 and the cathode-side collective electrode 170 may be perpendicular to each other.
  • the example shown in FIG. 14 shows an example in which the anode-side collective electrode 160 extends along the Y-axis direction and the cathode-side collective electrode 170 extends along the X-axis direction.
  • heat diffusion in the X-axis direction and heat diffusion in the Y-axis direction can be made uniform.
  • heating device 110 heating plate 110a upper surface 110b lower surface 111 first plate member 111a lower surface 112 second plate member 112a upper surface 112b through hole 113 recess 114 joining member 120 fixing plate 120a fixing hole 121 connecting member 130 heater 131 heater body 131a heating resistor 131a tip 132 fixing member 132a first member 132b second member 133 anode side lead electrode 133a coil portion 133b terminal portion 134 cathode side lead electrode 134a coil portion 134b terminal portion 140 spacer member 150 support plate 151 columnar member 160 anode Side collective electrode 161 First metal plate 161a Recess 162 Second metal plate 162a Recess 163 Fixing member 165 Metal plate 165a Insertion hole 165b Fixing hole 166 Fixing member 170 Cathode collective electrode 171 First metal plate 172 Second metal plate 173 Fixing Element

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  • Resistance Heating (AREA)
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07183059A (ja) * 1993-12-22 1995-07-21 Tokyo Sokki Kenkyusho:Kk 端子台
JPH10125452A (ja) * 1996-10-18 1998-05-15 Toshiba Corp ヒータバンドル
JP2011165507A (ja) * 2010-02-10 2011-08-25 Bridgestone Corp ヒータユニット
JP2016207595A (ja) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置
JP2017134912A (ja) * 2016-01-25 2017-08-03 京セラ株式会社 セラミックヒータ
JP2019503566A (ja) * 2016-01-28 2019-02-07 ジャーワ エレクトロニクス カンパニー リミテッド 独立制御ｐｔｃヒーター及び装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2612405B2 (ja) * 1992-05-11 1997-05-21 積水化成品工業株式会社 防曇鏡

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07183059A (ja) * 1993-12-22 1995-07-21 Tokyo Sokki Kenkyusho:Kk 端子台
JPH10125452A (ja) * 1996-10-18 1998-05-15 Toshiba Corp ヒータバンドル
JP2011165507A (ja) * 2010-02-10 2011-08-25 Bridgestone Corp ヒータユニット
JP2016207595A (ja) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置
JP2017134912A (ja) * 2016-01-25 2017-08-03 京セラ株式会社 セラミックヒータ
JP2019503566A (ja) * 2016-01-28 2019-02-07 ジャーワ エレクトロニクス カンパニー リミテッド 独立制御ｐｔｃヒーター及び装置

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