WO2023002736A1 - Dispositif de traitement laser et procédé de traitement laser - Google Patents

Dispositif de traitement laser et procédé de traitement laser Download PDF

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Publication number
WO2023002736A1
WO2023002736A1 PCT/JP2022/019419 JP2022019419W WO2023002736A1 WO 2023002736 A1 WO2023002736 A1 WO 2023002736A1 JP 2022019419 W JP2022019419 W JP 2022019419W WO 2023002736 A1 WO2023002736 A1 WO 2023002736A1
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WIPO (PCT)
Prior art keywords
laser
dust collection
laser processing
processing apparatus
nozzle
Prior art date
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PCT/JP2022/019419
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English (en)
Japanese (ja)
Inventor
義博 山田
武 今井
大里 矢島
秀行 濱村
芳明 廣田
Original Assignee
日本製鉄株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 日本製鉄株式会社 filed Critical 日本製鉄株式会社
Priority to CN202280045791.2A priority Critical patent/CN117580672A/zh
Priority to KR1020247000787A priority patent/KR20240017953A/ko
Priority to EP22845675.2A priority patent/EP4353397A1/fr
Publication of WO2023002736A1 publication Critical patent/WO2023002736A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B23K2103/04—Steel or steel alloys

Definitions

  • the present disclosure relates to a laser processing apparatus and a laser processing method.
  • a laser beam is applied to the surface of a steel sheet being conveyed in a preset conveying direction, as in the magnetic domain control treatment of grain-oriented electrical steel sheets disclosed in Japanese Patent Application Laid-Open No. 57-203720.
  • Irradiation is sometimes practiced to apply some processing to the surface of the steel sheet.
  • Dust called laser spatter is generated from the surface of the steel sheet along with the irradiation of the laser beam.
  • the generated laser spatter adheres to the surface of the steel sheet, it may adversely affect the performance of the steel sheet. Therefore, it is required to remove the generated laser spatter from the periphery of the steel plate. Therefore, techniques have been proposed for removing laser spatter from the periphery of the steel plate.
  • Japanese Patent Application Publication No. 2019-509394 describes laser irradiation equipment for forming grooves on the surface of the steel sheet, and an air knife for removing molten iron remaining inside the grooves formed on the surface of the steel sheet. , a dust collection hood for aspirating and removing fumes and molten iron.
  • Korean Patent Publication No. 170011860 and Korean Patent Publication No. 001626601 disclose a laser processing apparatus equipped with an air knife for blowing off the molten material inside the groove of the processing portion where the laser is irradiated on the surface of the steel sheet. ing. The ejected jet of the air knife, that is, the jetted air flow reaches the grooves on the surface of the steel plate.
  • a laser processing apparatus includes a jetted air nozzle. According to the disclosed air nozzle, it is said that the jetted air does not reach the laser-irradiated portion, and spatters are prevented from adhering to the laser light emitting portion.
  • Patent Document 1 JP-A-57-203720
  • Patent Document 2 JP-A-2019-509394
  • Patent Document 3 Korean Patent Publication No. 170011860
  • Patent Document 4 Korean Patent Publication No. 001626601
  • Patent Document 5 JP-A-2020- 138227
  • Patent Document 6 JP-A-58-187290
  • Patent Document 7 Chinese Utility Model Publication No. 202226886
  • the laser power of the irradiated laser should be increased. It is required to raise the power up to about 3 kW. Along with this demand, it is estimated that the amount of generated laser sputtering will also increase. In order to cope with the increase in laser spatter, there is a demand for further improvement in dust collection efficiency.
  • An object of the present disclosure is to provide a laser processing apparatus and a laser processing method capable of more efficiently collecting laser spatter generated along with laser light irradiation.
  • the present disclosing persons have made earnest studies on air knives as disclosed in the above-mentioned Japanese Patent Application Publication No. 2019-509394.
  • the present inventors have found that using an air knife that creates an air flow that can scrape out the laser spatter remaining inside the grooves formed on the surface of the steel plate, conversely, reduces the dust collection efficiency of the laser sputter. It was found that it is one of the factors that reduce the
  • a laser processing apparatus includes a laser light source unit for irradiating a surface of a steel sheet conveyed in a preset conveying direction with a laser beam; a first nozzle that injects gas toward a light irradiation site in parallel with the optical axis direction of the laser light; and a dust collection mechanism for collecting laser spatter generated from the irradiation site through a dust collection port.
  • a laser processing method irradiates a surface of a steel sheet being transported in a preset transport direction with a laser beam from a laser light source unit, and , a gas is jetted from a first nozzle toward the irradiation site of the laser light in parallel with the optical axis direction of the laser light, and in the conveying direction, either upstream or downstream of the irradiation site.
  • Laser spatter generated from the irradiation site is collected from the dust collection port of the dust collection mechanism provided only.
  • FIG. 1 is a side view schematically illustrating an example of a configuration of a laser processing device according to an embodiment of the present disclosure
  • FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is a side view which illustrates typically an example of a structure of the laser processing apparatus which concerns on this embodiment. It is a side view explaining the positional relationship of the dust collection mechanism part in the laser processing apparatus which concerns on this embodiment. It is a side view which extracts and explains typically a part of movement of dry air of a laser processing device concerning this embodiment, and movement of laser sputtering.
  • FIG. 10 is a side view schematically explaining partly extracted movement of dry air and movement of laser sputtering in the laser processing apparatus according to the first comparative example; FIG.
  • FIG. 11 is a side view schematically explaining partly extracted movement of dry air and movement of laser sputtering in a laser processing apparatus according to a second comparative example;
  • FIG. 11 is a side view schematically explaining partly extracted movement of dry air and movement of laser sputtering in a laser processing apparatus according to a third comparative example;
  • It is an explanatory view for explaining a shape of a dust collection mechanism part in a laser processing device concerning this embodiment.
  • It is an explanatory view for explaining a shape of a dust collection mechanism part in a laser processing device concerning this embodiment.
  • It is an explanatory view for explaining a dust collection mechanism part in a laser processing device concerning this embodiment.
  • FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment of the present disclosure;
  • FIG. FIG. 4 is a graph diagram for explaining an embodiment
  • the present disclosing parties conducted a thorough examination.
  • the air flow in the vicinity of the laser beam irradiation area in a more appropriate state without using an air knife that produces a strong air flow, the dust collection efficiency of laser sputtering can be further improved. I realized that it could be improved.
  • FIGS. 1A to 11B are side views schematically illustrating an example of the configuration of a laser processing apparatus according to this embodiment.
  • FIG. 2 is a side view for explaining the positional relationship of the dust collecting mechanism in the laser processing apparatus according to this embodiment.
  • FIG. 7A to 7C are side views explaining the shape of the dust collecting mechanism in the laser processing apparatus according to this embodiment.
  • FIG. 8 is a side view illustrating the dust collection mechanism in the laser processing apparatus according to this embodiment.
  • 9A to 11B are side views schematically explaining modifications of the configuration of the laser processing apparatus according to this embodiment.
  • the laser processing apparatus is an apparatus that performs processing for forming grooves by irradiating the surface of a steel sheet with a laser beam. This is a device that collects laser spatter, which is generated dust.
  • laser processing apparatus may be regarded as “laser sputter dust collector” and “laser processing method” may be regarded as “laser sputter dust collection method.”
  • the steel sheet for which the laser processing apparatus according to this embodiment is used is not particularly limited, and the laser processing apparatus according to this embodiment can be applied to various known steel sheets.
  • the processing using a laser beam which is the focus of the present embodiment, is not particularly specified, and is performed at an arbitrary timing in the manufacturing process for manufacturing various steel sheets.
  • the laser processing apparatus according to this embodiment can be applied to various types of processing.
  • the laser processing apparatus 1 includes a laser light source section 10, a first nozzle 20, and a dust collecting mechanism section 30.
  • the laser light source unit 10, the first nozzle 20, and the dust collection mechanism unit 30 are controlled in operation by various computers (not shown), such as a process computer for overall control of the steel plate manufacturing process.
  • the laser processing apparatus 1 includes, for example, adjacent transport rolls R provided at predetermined intervals along the transport direction C of the steel plate S. is installed in
  • the laser light source unit 10 irradiates the surface of the steel plate S to be processed with a laser beam LB having a predetermined wavelength.
  • the laser beam LB can be scanned along the width direction of the steel sheet S or along a direction slightly inclined with respect to the width direction in plan view.
  • the plate width direction of the steel plate S is a direction orthogonal to the conveying direction C of the steel plate S and penetrating through the planes of FIGS. 1A and 1B.
  • the laser light source unit 10 includes a laser light source (not shown) for irradiating a laser light LB having a wavelength and intensity necessary for realizing a process of interest, and a laser light LB emitted from the laser light source to the surface of the steel sheet S. and an optical system (not shown) for guiding light to.
  • the laser light source is not particularly limited, and various laser light sources such as various solid-state laser light sources, gas laser light sources, and semiconductor laser light sources can be used.
  • the optical system is not particularly limited, and various optical systems for guiding the laser beam LB to the surface of the steel plate S can be used.
  • the installation position of the laser light source unit 10 as described above is not particularly limited, for example, as schematically shown in FIGS. , the irradiation optical axis of the laser beam LB is preferably provided substantially perpendicular to the surface of the steel plate S.
  • the first nozzle 20 is provided below the laser light source section 10 as a gas injection section.
  • a nozzle port of the first nozzle 20 opens toward the steel plate S.
  • the laser beam LB can be irradiated through the nozzle port of the first nozzle 20 .
  • the first nozzles 20 may be separately provided at the position on the upstream side in the transport direction C and the position on the downstream side in the transport direction C, respectively. Further, the first nozzle 20 may be composed of a plurality of nozzles arranged along the width direction of the steel plate S.
  • the first nozzle 20 is an air nozzle that injects dry air, which is an example of gas, supplied from an air supply pipe (not shown) toward a portion of the surface of the steel plate S irradiated with the laser beam LB.
  • 1A and 1B show discharge jets of dry air ejected from both the position on the upstream side in the conveying direction C and the position on the downstream side in the conveying direction C in the laser beam LB emitting portion 12 of the laser light source portion 10. 20A is illustrated.
  • the first nozzle 20 is arranged so that the jetted dry air overlaps the laser beam LB over the entire scanning width of the laser beam LB in the width direction of the steel plate S. Even without being affected by the fluid force of the dry air jetted from the first nozzle 20 (that is, the force applied from the fluid due to contact with the fluid), the surface of the steel sheet S is heated by the energy of the laser, and due to phase change and thermal expansion, The generated laser spatter LS rolls up from the surface of the steel plate. The curled up laser spatter LS is collected by the dust collection mechanism 30 along with the air flow by the dust collection mechanism 30, which will be described later.
  • the laser processing apparatus 1 uses an air knife having a flow velocity such that the laser sputter LS is scraped out from the inside of the groove on the surface of the steel sheet, as disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 2019-509394. Instead, an air nozzle that jets dry air at a flow rate lower than that of the air knife is used. As a result, unlike an air knife, the flow of air for dust collection is not disturbed, and the flow of the laser spatter LS emitted from the surface of the steel plate S is not disturbed, and the air flow is superimposed on the air flow of the dust collection mechanism part 30. can be done.
  • the installation position of the first nozzle 20 is not particularly specified as long as it is a position where dry air can be jetted onto the surface of the steel plate S.
  • the first nozzle 20 is preferably provided directly above the steel plate S as shown in FIGS. 1A and 1B.
  • the first nozzle 20 emits laser light so that the nozzle main axis direction of the first nozzle 20, in other words, the traveling direction of the jetted dry air, is substantially coaxial with the optical axis direction of the laser light LB in the laser light source unit 10. It is more preferable to be provided parallel to the optical axis direction of the LB.
  • the dry air illustrated in FIGS. 1A and 1B is jetted toward the surface of the steel plate S so as to be substantially perpendicular to the surface of the steel plate S in parallel with the optical axis direction of the laser beam LB.
  • the amount of dry air ejected from the first nozzle 20 is equal to or less than the suction amount of the dust collecting mechanism 30, which will be described later.
  • the laser spatter LS is blown up from the surface of the steel plate S, and the dry air from the first nozzle 20 is sufficient for sucking the laser spatter LS. It is possible to more reliably suppress the flow from being disturbed.
  • the injection amount of dry air injected from the first nozzle 20 is more finely controlled.
  • the injection amount of dry air is not limited to the suction amount of the dust collection mechanism or less, and can be arbitrarily changed.
  • the discharge wind speed of the dry air jetted from the first nozzle 20 is set to a value equal to or lower than the suction flow speed by the dust collecting mechanism 30, which will be described later.
  • the discharge wind speed of the dry air is not limited to the suction flow speed of the dust collecting mechanism or less, and can be changed arbitrarily.
  • a specific example of the first nozzle 20 for injecting dry air in the above-described state is not particularly limited, and various known air-injecting nozzles can be used as long as the above-described state can be realized. It is possible to use nozzles. Examples of the air injection nozzle of the present disclosure include various slit nozzles.
  • the gas injected from the first nozzle 20 is not limited to dry air as described above, and may be nitrogen, argon, carbon dioxide, helium, or the like.
  • the dust collection mechanism unit 30 is a mechanism that collects the laser spatter LS floating near the irradiation site of the laser beam LB by ejecting dry air from the first nozzle 20 .
  • the dust collection mechanism unit 30 has an external appearance composed of, for example, a dust collection hood or the like having a dust collection port for collecting the laser spatter LS. It has a dust channel and a suction pump P provided on the dust collection channel.
  • the dust collection mechanism unit 30 is configured to suck the atmosphere around the dust collection port with a predetermined suction amount, and the suction operation collects the laser spatter LS floating near the irradiation site of the laser beam LB. Collect dust from the mouth.
  • the specific configuration of the dust collecting mechanism section 30 is not particularly limited, and various known mechanisms can be used as appropriate.
  • the number of dust collecting mechanism units is not limited to one, and may be plural.
  • a plurality of dust collection mechanism sections may be arranged along the vertical direction.
  • the plurality of dust collecting mechanism portions may be arranged along the plate width direction.
  • the dust collection mechanism 30, as schematically shown in FIGS. It is provided only on either the upstream side or the downstream side of the irradiation site of the laser beam LB in FIG. 1B.
  • the dust collection mechanism part 30 is not provided both upstream and downstream of the irradiation site of the laser beam LB.
  • the dust collection mechanism 30 by providing the dust collection mechanism 30 only on the upstream side or only on the downstream side of the irradiation site of the laser light LB, the vicinity of the irradiation site of the laser light LB , it is possible to prevent the flow of air for sucking the laser spatter LS from becoming stagnant, and to reliably collect the laser spatter LS.
  • the dust collection mechanism unit 30 as described above is provided only downstream of the irradiation site of the laser beam LB, as schematically shown in FIG. 1B. more preferred.
  • the steel sheet S which is the target of processing in the present embodiment, is conveyed along the conveying direction C, an air flow directed from the upstream side to the downstream side in the conveying direction C (that is, accompanying flow) is generated. . Therefore, by providing the dust collection mechanism 30 only on the downstream side of the irradiation site of the laser beam LB, it is possible to utilize the entrained flow, and it is possible to more reliably collect the laser spatter LS.
  • the amount of suction by the dust collection mechanism 30 is preferably equal to or greater than the amount of dry air injected from the first nozzle 20 . As a result, it is possible to more reliably prevent the flow of air around the irradiation site of the laser beam LB from becoming stagnant, and it is possible to more reliably collect the laser spatter LS. Note that, in the present disclosure, the amount of suction by the dust collecting mechanism is not limited to the amount of dry air injected from the first nozzle or more, and can be arbitrarily changed.
  • the suction flow velocity by the dust collection mechanism 30 is preferably 15 m/sec or more and 50 m/sec or less, and more preferably 20 m/sec or more and 30 m/sec or less.
  • the suction flow velocity is set to 15 m/sec or more and 50 m/sec or less, it is possible to more reliably collect the laser spatter LS without disturbing the flow of air around the irradiation site of the laser beam LB. If the suction flow velocity is less than 15 m/sec, the spatter suction rate will decrease.
  • the suction flow velocity by the dust collection mechanism is not limited to 15 m/sec or more and 50 m/sec or less, and can be arbitrarily changed.
  • the case where the laser processing apparatus 1 according to the present embodiment is viewed from the side of the steel sheet S is set.
  • Viewing from the side of the steel sheet S means viewing the steel sheet S along the width direction from the direction in which the thickness of the steel sheet S can be read. Further, when the laser beam LB is scanned, “viewing from the side of the steel plate S” can mean viewing along the scanning direction.
  • the laser processing apparatus 1 When the laser processing apparatus 1 is viewed from the side of the steel plate S, as shown in FIG. is represented as distance a. Further, the minimum value of the height from the portion of the steel plate S irradiated with the laser beam LB to the lower end of the dust collection port of the dust collection mechanism 30 is represented as a distance b.
  • the distance a as shown in FIG. 2 is preferably 25 mm or less.
  • the reduction in the dust collecting power of the laser sputter LS by the dust collecting mechanism 30 is more reliably suppressed, and the adherence of the laser sputter LS to the laser light source 10 and the first nozzle 20 is further reduced. It is possible to reliably prevent this, and it is possible to contribute to improvement in the durability of the laser light source section 10 and the first nozzle 20 .
  • the distance a as shown in FIG. 2 is more preferably 20 mm. Note that the lower limit of the distance a is not particularly defined, and although it depends on the state of congestion of each facility around the dust collection port, the lower limit is substantially about 1 mm.
  • the distance b as shown in FIG. 2 is preferably 10 mm or less. Since the distance b is 10 mm or less, the reduction in the dust collecting power of the laser sputter LS by the dust collecting mechanism 30 is more reliably suppressed, and the adhesion of the laser sputter LS to the laser light source 10 and the first nozzle 20 is further reduced. It is possible to reliably prevent this, and it is possible to contribute to improvement in the durability of the laser light source section 10 and the first nozzle 20 .
  • the distance b as shown in FIG. 2 is more preferably 5 mm. Note that the lower limit of the distance b is not particularly defined, and although it depends on the density of equipment around the dust collection port, the lower limit is substantially about 1 mm.
  • the distance a as shown in FIG. 2 is 25 mm or less and the distance b is 10 mm or less.
  • the dust collection efficiency of the laser sputter LS by the dust collection mechanism 30 can be more reliably increased to 90% or higher, resulting in an effect of improving the durability of the laser light source 10 and the first nozzle 20 as described above.
  • the effect of suppressing damage to the surface of the steel sheet S due to clogging of the dust collecting mechanism 30 and dropping of the laser spatter LS onto the surface of the steel sheet S can be more reliably exhibited.
  • a plurality of laser light source units are installed in the plate width direction for one steel plate, and a plurality of dust collection mechanism units corresponding to each of the installed plurality of laser light source units are installed. good. Further, the plurality of laser light source units and the dust collection mechanism units corresponding to the respective laser light source units may be arranged so as to cross the plate width direction in plan view.
  • FIG. A laser processing apparatus 1 according to this embodiment in FIG. 3 corresponds to the laser processing apparatus 1 according to this embodiment in FIG. 1B.
  • the laser beam LB passes through the nozzle port of the first nozzle 20 and irradiates the steel sheet S.
  • 20 A of discharge jets from the 1st nozzle 20 go to irradiation site
  • the jet 20A that does not reach the irradiation site SA is diffused along the surface of the steel plate S between the first nozzle 20 and the steel plate S toward the outside of the optical axis, i.e., the outside of the main axis direction of the nozzle. do.
  • the flow of the ejection jet 20A toward the irradiation site SA and the flow of the ejection jet 20A outward in the direction of the main axis of the nozzle prevent the laser spatter LS from adhering to the emitting portion 12 of the laser light source portion 10.
  • the ejection jet 20A is directed toward the outside of the optical axis, the laser spatter LS inside the groove of the irradiation site SA is less likely to scatter due to the ejection jet 20A.
  • the discharge jet 20A toward the outside of the optical axis guides the laser spatter LS generated at the irradiation site SA to the suction airflow DF.
  • the first nozzle 20 is not attached to the lower portion of the laser light source section 10, but is located on the left side of the optical axis of the laser beam LB and away from the emission section 12. provided in Therefore, the discharge jet 20A from the first nozzle 20 is not parallel to the optical axis of the laser beam LB, but crosses the optical axis toward the irradiation site SA of the laser beam LB on the surface of the steel plate S.
  • a low-pressure portion is generated by the ejected jet 20A from the first nozzle 20 to guide the laser sputtering LS to the first nozzle 20 .
  • the jet 20A that does not reach the irradiation site SA travels along the surface of the steel plate S between the first nozzle 20 and the steel plate S to the outside in the direction of the main axis of the nozzle. spread toward.
  • the discharge jet 20A is not formed in the vicinity of the emitting portion 12 of the laser light source portion 10, the effect of preventing adhesion of the laser spatter LS to the emitting portion 12 is smaller than in the present embodiment.
  • the laser beam LB passes through the nozzle port of the air knife 60 and irradiates the steel sheet S.
  • a discharged jet 60A from the air knife 60 is directed from a position in the vicinity of the emitting portion 12 to the irradiation site SA of the laser beam LB on the surface of the steel plate S in parallel with the optical axis of the laser beam LB.
  • the laser spatter LS generated at the irradiation site SA is vigorously scattered substantially radially from the irradiation site SA.
  • the scattered laser spatter LS is not sufficiently guided to the suction airflow DF of the dust collecting mechanism section 30 . Also, the laser spatter LS is likely to adhere to the emitting portion 12 of the laser light source portion 10 .
  • a jet 60 A discharged from the air knife 60 generates a low pressure portion to guide the laser sputtering LS to the first nozzle 20 .
  • the air knife 60 is not attached to the lower portion of the laser light source section 10, but is provided on the left side of the optical axis of the laser beam LB and away from the emission section 12. be done. Therefore, the ejected jet 60A from the air knife 60 is not parallel to the optical axis of the laser beam LB, but rather crosses the optical axis toward the irradiation site SA of the laser beam LB on the surface of the steel plate S.
  • the laser spatter LS generated at the irradiation site SA is vigorously scattered substantially radially from the irradiation site SA due to the discharge jet 60A reaching the irradiation site SA.
  • the scattered laser spatter LS is not sufficiently guided to the suction airflow DF of the dust collecting mechanism section 30 as in the second comparative example.
  • a low-pressure portion is generated by the ejected jet 60A from the air knife 60, and as a result, the laser spatter LS is likely to adhere to the emitting portion 12 of the laser light source portion 10.
  • the upper surface of the dust collection mechanism 30 is directed in the direction in which the laser spatter LS is sucked from the dust collection port. , the distance from the surface of the steel sheet S, more specifically, the distance from the position of the surface of the steel sheet S at the irradiation site of the laser beam LB is long.
  • the internal space of the dust collection mechanism 30 increases in height in the direction in which the laser spatter LS is sucked from the dust collection port. It may have a continuously increasing structure, for example, a tapered shape.
  • the internal space of the dust collection mechanism 30 has a height that increases stepwise in the direction in which the laser spatter LS is sucked from the dust collection port. It may have a staircase structure that makes it higher.
  • the outer shape of the dust collecting mechanism section 30, more specifically, the outer shape of the dust collecting hood may have a substantially parallelogram shape.
  • the shape of the bottom surface of the dust collecting mechanism 30 is not particularly limited as long as it does not hinder the flow of air. It may be a horizontal plane as shown in FIG. 7C, or may have a shape such that the distance from the surface of the steel plate S is long as shown in FIG. 7C.
  • Dust is collected along with the parabolic air flow without obstruction of the air flow. As a result, it is possible to prevent the laser spatter LS from directly hitting the upper inner wall surface of the internal space, and to more reliably prevent the adhesion of the laser sputter LS to the inner wall surface.
  • a plate made of carbon may be arranged above the inner wall of the dust collecting mechanism 30 in the vertical direction.
  • the dust collection hood that forms the wall surface of the dust collection mechanism 30 is generally made of various metals.
  • a plate made of carbon is placed at a position where the collected laser sputter LS can reach, thereby preventing direct reaction between the laser sputter LS and the metal forming the wall surface. Therefore, it is possible to prevent adhesion of the laser sputter LS. As a result, it is possible to reduce the number of times the inner wall needs to be cleaned in order to remove the adhering laser spatter LS.
  • FIG. 8 illustrates a case where the carbon plate is provided on the entire upper surface of the dust collection mechanism 30, the carbon plate may be arranged at least at a portion where the laser spatter LS can adhere. , the dust collecting mechanism 30 may not be arranged on the entire upper surface.
  • a plate made of carbon can be installed at a site to which the laser spatter LS can adhere, such as a side surface of the dust collection mechanism 30, in addition to the top surface of the dust collection mechanism 30.
  • the wall surface of the dust collection mechanism 30 itself may be made of a carbon plate.
  • the laser processing apparatus 1 includes the laser light source unit 10, the first nozzle 20, and the dust collection mechanism unit 30, and further includes a rectifying plate 40.
  • the rectifying plate 40 is provided at a position facing the dust collection port for the laser sputtering LS in the dust collection mechanism section 30 .
  • the rectifying plate 40 is a member provided to more reliably prevent stagnation of the air flow in the vicinity of the irradiated portion of the laser beam LB. By further providing the rectifying plate 40, it becomes possible to further stabilize the flow of air in the vicinity of the irradiation site of the laser beam LB. Furthermore, since the rectifying plate 40 is provided, the aperture ratio in the vicinity of the irradiated portion of the laser beam LB is reduced, and as a result, the flow velocity of the air flow can be increased, and the laser spatter LS can be more reliably collected. becomes possible.
  • the arrangement direction of the rectifying plate 40 is not particularly defined, but is vertically oriented as shown in FIG. 9A (that is, the direction in which the long sides of the rectifying plate 40 shown in FIG. 9A are substantially parallel to the vertical direction). , or may be arranged horizontally as shown in FIG. 9B (that is, in a direction in which the long sides of the current plate 40 shown in FIG. 9B are substantially parallel to the horizontal direction). Further, the straightening plate 40 may be arranged obliquely.
  • the material and specific shape of the rectifying plate 40 are not particularly specified, and may be appropriately selected according to the environment in which the rectifying plate 40 is installed.
  • the laser processing apparatus 1 includes, in addition to the laser light source unit 10, the first nozzle 20, and the dust collection mechanism unit 30, dry air as an example of gas. You may have the 2nd nozzle 50 which injects.
  • the second nozzle 50 is provided so as to face the dust collection port for the laser sputtering LS in the dust collection mechanism 30 , and jets dry air toward the dust collection port of the dust collection mechanism 30 .
  • By providing the second nozzle 50 it is possible to more reliably prevent stagnation of the air flow toward the dust collection mechanism section 30, and it is possible to more reliably collect the laser spatter LS.
  • the amount of dry air ejected from the second nozzle 50 is equal to or less than the amount of suction of the dust collection mechanism 30 .
  • the amount of dry air ejected from the second nozzle 50 is equal to or less than the amount of suction of the dust collection mechanism 30 .
  • a specific example of the second nozzle 50 for injecting dry air in the above-described state is not particularly limited, and various known air-injecting nozzles can be used as long as the above-described state can be realized. It is possible to use nozzles. Examples of the air injection nozzle of the present disclosure include various slit nozzles.
  • the gas injected from the second nozzle 50 is not limited to dry air as described above, and may be nitrogen, argon, carbon dioxide, helium, or the like.
  • the laser processing apparatus 1 according to the present embodiment is installed between adjacent transport rolls R provided at predetermined intervals along the transport direction C of the steel plate S. explained.
  • the installation position of the laser processing apparatus 1 according to this embodiment is not limited to such a case.
  • the laser processing apparatus 1 according to the present embodiment may be installed above the roll surface of the steel plate support roll R′ that changes the conveying direction C of the steel plate S. good.
  • FIG. 11A when the laser processing apparatus 1 according to the present embodiment is provided with respect to the steel plate support rolls R′ for changing the pass line of the steel plate S conveyed in the horizontal direction to the oblique direction. is illustrated.
  • the laser processing apparatus 1 according to the present embodiment is provided for the steel plate support rolls R′ for changing the pass line of the steel plate S conveyed obliquely upward to obliquely downward. case is illustrated.
  • the laser processing apparatus 1 according to this embodiment can be installed at any position on the transfer line on which the steel plate S is transferred.
  • the laser processing apparatus 1 may further include at least one of the current plate 40 and the second nozzle 50 .
  • the laser processing method according to the present embodiment is a method for collecting laser spatter LS, which is dust generated from a portion irradiated with the laser beam LB due to the laser beam LB with which the surface of the steel sheet is irradiated.
  • the surface of a steel sheet being conveyed in a preset conveying direction is irradiated with a laser beam LB from a laser light source unit, and toward the irradiated portion of the laser beam LB, Dry air, which is an example of gas, is jetted from the first nozzle in parallel with the optical axis direction of the laser beam LB.
  • the laser spatter LS is collected from a dust collection port of the dust collection mechanism provided only on either the upstream side or the downstream side of the irradiated portion of the laser beam LB.
  • the air flow in the vicinity of the irradiation site of the laser beam LB is controlled to a more appropriate state, thereby making it possible to further improve the dust collection efficiency of the laser sputter LS.
  • the laser processing apparatus and laser processing method according to the present disclosure will be specifically described while showing an example and a fourth comparative example.
  • the examples shown below are merely examples of the laser processing apparatus and the laser processing method according to the present disclosure, and the laser processing apparatus and the laser processing method according to the present disclosure are not limited to the examples shown below.
  • the computer simulation was performed using Fluent, which is commercially available numerical calculation software, and the dust collection efficiency and the wall arrival rate were changed by changing the suction amount of the dust collection mechanism from 0 m 3 /min to 12 m 3 /min. verified how it changes.
  • the injection amount of dry air from the first nozzle was constant at 0.02 kg/sec.
  • the dust collection efficiency was calculated as (the number of laser sputtered particles reaching the depth of the dust collection channel provided in the dust collecting mechanism)/(the number of generated laser sputtered particles).
  • the wall surface arrival rate was calculated as (the number of laser-sputtered particles in contact with the wall surface)/(the number of generated laser-sputtered particles).
  • the laser sputter was reflected on the wall surface, and even if the particles reached and contacted the wall surface, the laser sputter particles that reached the back of the dust collection channel contributed to the dust collection efficiency. counted as particles.
  • Figures 13A and 13B show simulation results regarding dust collection efficiency.
  • the horizontal axis indicates the suction amount of the dust collection mechanism
  • the vertical axis indicates the dust collection efficiency.
  • FIG. 13B expands and shows a part of FIG. 13A.
  • the plots indicated by “ ⁇ ” are the results of the laser processing apparatus shown in FIG. 1B
  • the plots indicated by " ⁇ ” are the results of the laser processing apparatus shown in FIG. 9A.
  • the plot indicated by " ⁇ ” is the result of the laser processing apparatus shown in FIG. 10
  • the plot indicated by " ⁇ ” is the result of the laser processing apparatus according to the fourth comparative example shown in FIG. is.
  • the laser processing apparatus corresponding to the embodiment of the present disclosure in the region where the suction amount of the dust collection mechanism is 2 m 3 /min or more, the laser processing apparatus corresponding to the fourth comparative example of the present disclosure It can be seen that the dust collection efficiency is superior to that of the Moreover, as is clear from FIG. 13B, in any laser processing apparatus, the dust collection efficiency is 100% in the region where the suction amount is 8 m 3 /min or more.
  • Figures 14A and 14B show the simulation results regarding the wall adhesion rate.
  • the horizontal axis indicates the suction amount of the dust collecting mechanism
  • the vertical axis indicates the wall adhesion rate.
  • FIG. 14B expands and shows a part of FIG. 14A.
  • the plots indicated by “ ⁇ ” are the results of the laser processing apparatus shown in FIG. 1B
  • the plots indicated by " ⁇ ” are the results of the laser processing apparatus shown in FIG. 9A.
  • the plot indicated by " ⁇ ” is the result of the laser processing apparatus shown in FIG. 10
  • the plot indicated by " ⁇ ” is the result of the laser processing apparatus according to the fourth comparative example shown in FIG. is.
  • the laser processing apparatus corresponding to the examples of the present disclosure exhibits an excellent wall surface reach rate, while as is clear from FIG. 14A, the fourth comparative example of the present disclosure It can be seen that with the laser processing apparatus corresponding to , the wall surface reaching rate increases as the suction amount increases.
  • an analysis model corresponding to the laser processing apparatus 1 shown in FIG. 7B was set. Then, using an analytical model, the positional relationship between the irradiation site of the laser beam LB and the dust collection mechanism, and the relationship between the discharge flow velocity of the dry air from the first nozzle and the suction flow velocity of the dust collection mechanism, are calculated using commercially available numerical calculations. Each verification was performed by computer simulation using software Fluent.
  • the dust collection efficiency of laser sputtering was calculated as (the number of laser sputter particles that reached the depths of the dust collection channel provided in the dust collection mechanism)/(the number of generated laser sputter particles).
  • the steel plate arrival rate of laser sputtering was calculated as (the number of laser-sputtered particles in contact with the steel plate)/(the number of generated laser-sputtered particles).
  • the first nozzle arrival rate of laser sputtering was calculated as (the number of laser-sputtered particles in contact with the first nozzle)/(the number of generated laser-sputtered particles).
  • the wall surface arrival rate which indicates the ratio of the laser sputter reaching the wall surface of the dust collecting mechanism, was calculated as (number of laser sputter particles contacting the wall surface of the dust collecting mechanism)/(number of generated laser sputter particles).
  • the laser sputter is reflected on the wall surface, and even if the particles reach and contact the wall surface, the laser sputtered particles that reach the depths of the dust collection channel contribute to the dust collection efficiency. counted as particles
  • the distance b shown in FIG. 2 (that is, the minimum value of the height from the irradiated portion of the steel plate S with the laser beam LB to the lower end of the dust collection port of the dust collection mechanism 30) is 1 mm, 3 mm, 5 mm, 7 mm, and 10 mm. It was verified what kind of behavior the steel plate reaching rate and the wall reaching rate show by changing. At this time, the discharge wind speed of the dry air jetted from the first nozzle was set to 20 m/sec, and the suction flow speed of the dust collection mechanism was set to 30 m/sec. Each attainment rate obtained was evaluated based on the following evaluation criteria. The results obtained are shown in Table 1 below.
  • Step A each achievement rate value is less than 1%
  • Score B each arrival rate value is 1% or more and 50% or less
  • Score C each arrival rate value is more than 50%
  • the distance b shown in FIG. 2 is fixed to 5 mm, and the distance a shown in FIG. It was verified what kind of behavior the dust collection efficiency and the steel plate arrival rate show.
  • the discharge wind speed of the dry air jetted from the first nozzle was set to 20 m/sec, and the suction flow speed of the dust collection mechanism was set to 30 m/sec.
  • the obtained dust collection efficiency and steel plate arrival rate were evaluated based on the evaluation criteria.
  • the evaluation criteria for the steel plate arrival rate are as described above.
  • the evaluation criteria for the dust collection efficiency are as follows. The results obtained are shown in Table 2 below.
  • the distance a shown in FIG. 2 is set to 20 mm, and the distance b is fixed to 5 mm. It was verified how the above dust collection efficiency behaves while changing the suction flow rate. The evaluation criteria are as described above. The results obtained are shown in Table 3 below.
  • aspect 1 is a laser light source unit that irradiates a laser beam onto the surface of the steel plate that is conveyed in a preset conveying direction; a first nozzle that injects gas parallel to the optical axis direction of the laser beam toward the irradiation site of the laser beam; a dust collection mechanism provided only on either the upstream side or the downstream side of the irradiation site in the transport direction and collecting laser spatter generated from the irradiation site from a dust collection opening; A laser processing device.
  • Aspect 2 is The injection amount of the gas injected from the first nozzle is equal to or less than the suction amount of the dust collection mechanism.
  • Aspect 3 is The dust collecting mechanism is installed only on the downstream side in the conveying direction, 3.
  • Aspect 4 is When the laser processing apparatus is viewed from the side of the steel plate, the separation distance in the conveying direction between the irradiated portion of the steel plate with the laser beam and the dust collection port of the dust collection mechanism is , is less than or equal to 25 mm;
  • the laser processing apparatus according to any one of aspects 1 to 3.
  • Aspect 5 is When the laser processing apparatus is viewed from the side of the steel plate, the minimum height from the irradiated portion of the steel plate to the lower end of the dust collection port of the dust collection mechanism is 10 mm or less. be, The laser processing apparatus according to any one of aspects 1 to 4.
  • Aspect 6 is Further comprising a straightening plate provided so as to face the dust collection port of the laser sputtering in the dust collection mechanism,
  • the laser processing apparatus according to any one of aspects 1 to 5.
  • Aspect 7 is Further comprising a second nozzle provided to face the dust collection port for the laser sputtering in the dust collection mechanism and injecting gas toward the dust collection port,
  • the laser processing apparatus according to any one of aspects 1 to 6.
  • Aspect 8 is The injection amount of the gas injected from the second nozzle is equal to or less than the suction amount of the dust collection mechanism.
  • Aspect 9 is The suction flow velocity by the dust collection mechanism is 15 m / sec or more and 50 m / sec or less.
  • the laser processing apparatus according to any one of aspects 1 to 8.
  • Aspect 10 is When the laser processing apparatus is viewed from the side surface of the steel plate, the upper surface of the dust collection mechanism portion has a longer distance from the surface of the steel plate in the direction in which the laser spatter is attracted from the dust collection port. has a structure of The laser processing apparatus according to any one of aspects 1 to 9.
  • Aspect 11 is A plate made of carbon is arranged on the upper part of the inner wall of the dust collection mechanism in the vertical direction, The laser processing apparatus according to any one of aspects 1 to 10.
  • Aspect 12 is The wall surface of the dust collection mechanism is composed of a carbon plate, The laser processing apparatus according to any one of aspects 1 to 11.
  • Aspect 13 is The laser processing device is installed between adjacent transport rolls provided at predetermined intervals along the transport direction, The laser processing apparatus according to any one of aspects 1 to 12.
  • Aspect 14 is The laser processing device is installed above the roll surface of the steel plate support roll that changes the conveying direction, The laser processing apparatus according to any one of aspects 1 to 12.
  • a laser beam is irradiated from a laser light source unit to the surface of a steel sheet that is conveyed in a preset conveying direction, and a first Inject gas from the nozzle, In the conveying direction, the laser spatter generated from the irradiation site is collected from a dust collection port of a dust collection mechanism provided only on either the upstream side or the downstream side of the irradiation site.
  • Laser processing method is irradiated from a laser light source unit to the surface of a steel sheet that is conveyed in a preset conveying direction, and a first Inject gas from the nozzle, In the conveying direction, the laser spatter generated from the irradiation site is collected from a dust collection port of a dust collection mechanism provided only on either the upstream side or the downstream side of the irradiation site.
  • a laser sputter dust collector that collects laser spatter, which is dust generated from a laser beam irradiation site due to a laser beam irradiated onto the surface of a steel plate, a laser light source unit that irradiates a laser beam onto the surface of the steel plate being conveyed in a predetermined direction; an air nozzle for injecting gas to the irradiation site of the laser light; a dust collection mechanism that is provided only on either the upstream side or the downstream side of the irradiation site of the laser beam in the conveying direction of the steel plate and collects the laser spatter from the dust collection port; Laser sputter dust collector.
  • Another aspect 2 is The laser sputter dust collector according to another aspect 1, wherein the injection amount of the gas injected from the air nozzle is equal to or less than the suction amount of the dust collection mechanism.
  • Another aspect 3 is 3.
  • Another aspect 4 is When the laser sputter dust collector is viewed from the side of the steel plate, the separation in the conveying direction between the irradiation position of the laser beam on the steel plate and the dust collection port of the dust collection mechanism. 4.
  • Another aspect 5 is When the laser sputter dust collector is viewed from the side of the steel plate, the minimum height from the laser beam irradiation position on the steel plate to the lower end of the dust collection port of the dust collection mechanism is 10 mm.
  • Another aspect 6 is The laser sputter dust collector according to any one of other aspects 1 to 5, wherein the air nozzle is provided so that the nozzle main axis direction of the air nozzle is substantially parallel to the optical axis direction of the laser light in the laser light source unit. .
  • Another aspect 7 is 7.
  • Another aspect 8 is 8. Any one of the other aspects 1 to 7, further comprising a second nozzle that is provided to face the dust collection port for the laser sputtering in the dust collection mechanism and injects gas toward the dust collection port.
  • the laser sputter dust collector according to any one of the above.
  • Another aspect 9 is The laser sputtering dust collector according to another aspect 8, wherein the injection amount of the gas injected from the second nozzle is equal to or less than the suction amount of the dust collection mechanism.
  • Another aspect 10 is 10.
  • Another aspect 11 is When the laser sputter dust collector is viewed from the side surface of the steel plate, the upper surface of the dust collection mechanism portion is positioned in the direction in which the laser spatter is sucked from the dust collection port, from the surface of the steel plate. 11.
  • Another aspect 12 is 12.
  • Another aspect 13 is 12.
  • Another aspect 14 is The laser sputter dust collector according to any one of other aspects 1 to 13, wherein the laser sputter dust collector is installed between adjacent conveying rolls provided at predetermined intervals along the conveying direction of the steel plate. Device.
  • Another aspect 15 is 14.
  • a laser sputter dust collection method for collecting laser spatter which is dust generated from a laser beam irradiated portion due to a laser beam irradiated onto a surface of a steel plate, comprising: irradiating a surface of a steel sheet being conveyed in a predetermined direction with a laser beam from a laser light source unit, and injecting a gas from an air nozzle to a portion irradiated with the laser beam, Laser sputter dust collection, in which the laser sputter is collected from a dust collection opening of a dust collection mechanism provided only on either the upstream side or the downstream side of the laser beam irradiation site in the conveying direction of the steel sheet.
  • laser processing device 10 laser light source unit 12 emission unit 20 first nozzle 20A discharge jet 30 dust collection mechanism unit 40 straightening plate 50 second nozzle 60 air knife 60A discharge jet C transport direction DF suction airflow LB laser light LS laser sputtering P suction pump R Conveyor roll R' Steel plate support roll S Steel plate SA Irradiation part

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

Ce dispositif de traitement laser comprend : une unité de source de lumière laser qui émet un faisceau laser sur la surface d'une tôle d'acier qui est transportée dans une direction de transport prédéfinie ; une première buse qui projette, parallèlement à la direction de l'axe optique du faisceau laser, du gaz vers un site d'irradiation du faisceau laser ; et une unité de mécanisme de collecte de poussière qui est disposée uniquement sur le côté amont ou sur le côté aval du site d'irradiation dans la direction de transport et qui collecte, à partir d'un orifice de collecte de poussière, des projections laser générées à partir du site d'irradiation.
PCT/JP2022/019419 2020-11-05 2022-04-28 Dispositif de traitement laser et procédé de traitement laser WO2023002736A1 (fr)

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CN202280045791.2A CN117580672A (zh) 2020-11-05 2022-04-28 激光加工装置及激光加工方法
KR1020247000787A KR20240017953A (ko) 2020-11-05 2022-04-28 레이저 가공 장치 및 레이저 가공 방법
EP22845675.2A EP4353397A1 (fr) 2020-11-05 2022-04-28 Dispositif de traitement laser et procédé de traitement laser

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JP2021120919A JP2022075490A (ja) 2020-11-05 2021-07-21 レーザスパッタ集塵装置及びレーザスパッタ集塵方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155947A (en) * 1978-05-31 1979-12-08 Masami Kobayashi Preventing welding sputter deposition
JPS57203720A (en) 1981-06-06 1982-12-14 Nippon Steel Corp Treatment of electromagnetic steel plate
JPS58187290A (ja) 1982-04-24 1983-11-01 Nippon Steel Corp レ−ザ−ビ−ム照射処理方法
JPS63101186U (fr) * 1986-12-19 1988-07-01
JPH09192876A (ja) * 1996-01-18 1997-07-29 Amada Co Ltd レーザ加工機における集塵方法およびその装置
JP2002336986A (ja) * 2001-05-07 2002-11-26 Jenoptik Automatisierungstechnik Gmbh レーザ材料加工用工具ヘッド
JP2011156541A (ja) * 2010-01-29 2011-08-18 Musashino Kikai:Kk レーザ加工機
CN202226886U (zh) 2011-08-17 2012-05-23 武汉钢铁(集团)公司 St机组激光刻痕除尘系统
KR101626601B1 (ko) * 2014-12-24 2016-06-01 주식회사 포스코 방향성 전기 강판의 자구 미세화 방법 및 그 장치
KR20170011860A (ko) 2015-07-24 2017-02-02 주식회사 포스코 집진 장치 및 이를 구비한 방향성 전기강판의 자구미세화 설비
JP2019509394A (ja) 2016-01-22 2019-04-04 ポスコＰｏｓｃｏ 方向性電磁鋼板の磁区微細化方法及びその装置
JP2020138227A (ja) 2019-03-01 2020-09-03 日本製鉄株式会社 表面加工装置
JP2021120919A (ja) 2020-01-30 2021-08-19 大日本印刷株式会社 照明装置

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155947A (en) * 1978-05-31 1979-12-08 Masami Kobayashi Preventing welding sputter deposition
JPS57203720A (en) 1981-06-06 1982-12-14 Nippon Steel Corp Treatment of electromagnetic steel plate
JPS58187290A (ja) 1982-04-24 1983-11-01 Nippon Steel Corp レ−ザ−ビ−ム照射処理方法
JPS63101186U (fr) * 1986-12-19 1988-07-01
JPH09192876A (ja) * 1996-01-18 1997-07-29 Amada Co Ltd レーザ加工機における集塵方法およびその装置
JP2002336986A (ja) * 2001-05-07 2002-11-26 Jenoptik Automatisierungstechnik Gmbh レーザ材料加工用工具ヘッド
JP2011156541A (ja) * 2010-01-29 2011-08-18 Musashino Kikai:Kk レーザ加工機
CN202226886U (zh) 2011-08-17 2012-05-23 武汉钢铁(集团)公司 St机组激光刻痕除尘系统
KR101626601B1 (ko) * 2014-12-24 2016-06-01 주식회사 포스코 방향성 전기 강판의 자구 미세화 방법 및 그 장치
KR20170011860A (ko) 2015-07-24 2017-02-02 주식회사 포스코 집진 장치 및 이를 구비한 방향성 전기강판의 자구미세화 설비
JP2019509394A (ja) 2016-01-22 2019-04-04 ポスコＰｏｓｃｏ 方向性電磁鋼板の磁区微細化方法及びその装置
JP2020138227A (ja) 2019-03-01 2020-09-03 日本製鉄株式会社 表面加工装置
JP2021120919A (ja) 2020-01-30 2021-08-19 大日本印刷株式会社 照明装置

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