WO2022265006A1 - Unité de génération de plasma, dispositif de génération de plasma et système de stérilisation - Google Patents

Unité de génération de plasma, dispositif de génération de plasma et système de stérilisation Download PDF

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Publication number
WO2022265006A1
WO2022265006A1 PCT/JP2022/023784 JP2022023784W WO2022265006A1 WO 2022265006 A1 WO2022265006 A1 WO 2022265006A1 JP 2022023784 W JP2022023784 W JP 2022023784W WO 2022265006 A1 WO2022265006 A1 WO 2022265006A1
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WO
WIPO (PCT)
Prior art keywords
plasma
plasma generation
generation unit
electrode
electrodes
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PCT/JP2022/023784
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English (en)
Japanese (ja)
Inventor
英孝 宮▲崎▼
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日本未来科学研究所合同会社
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Publication of WO2022265006A1 publication Critical patent/WO2022265006A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/18—Radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

Definitions

  • the present invention relates to a plasma generation unit, a plasma generator and a sterilization system.
  • Patent Literature 1 relates to an air cleaning device using plasma, and states, "In a housing provided with an air inlet and an outlet for plasma treatment, the air flow is made into a turbulent state and a dielectric barrier discharge narrow gap plasma is generated. A large number of electrodes are arranged in a matrix (matrix), and the plasma generated by the electrodes and the air containing viruses, pathogens, mycotoxins, etc. are efficiently contacted and mixed” (abstract). doing.
  • the present invention has been made to solve the above and other problems, and is a plasma generation unit that takes in ambient air and makes it possible to sterilize the taken-in ambient air efficiently and effectively. , to provide a plasma generator and a sterilization system.
  • a plate-like first electrode and a plate-like second electrode having substantially the same planar shape as the first electrode are provided.
  • Plasma generating parts are provided so that their flat surfaces face each other with a gap of , and two or more of the plasma generating parts are stacked in a thickness direction with a predetermined interval from each other.
  • Each of the plasma generating units has a spacing member configured to support both sides of the plasma generating unit, and a predetermined AC voltage is applied between the first and second electrodes of each of the plasma generating units.
  • a plasma generation device is configured to apply a predetermined AC voltage between the plasma generation unit and first and second electrodes of each of the plasma generation units provided in the plasma generation unit. and a plasma power supply.
  • the plasma power supply section may supply an AC voltage to the first and second electrodes that is adjusted according to the state of plasma generated in the plasma generation section.
  • the sterilization system is arranged so as to face the gap formed between the first and second electrodes in the plasma generator and the plasma generating section of the plasma generator.
  • a blower unit and an ozone decomposition filter disposed between the gap and the blower unit.
  • Plasma generation units, plasma generators and sterilization systems are provided that are capable of performing.
  • FIG. 1 is a perspective view of a plasma generation unit according to one embodiment of the present invention.
  • 2 is a partial cross-sectional view of the plasma generation unit of FIG. 1;
  • FIG. FIG. 3 is a plan view of a plasma generation unit according to one embodiment of the present invention.
  • FIG. 4 is a diagram showing a circuit configuration example of a plasma generator according to one embodiment of the present invention.
  • FIG. 5 is a diagram showing a configuration example of a sterilization system using the plasma generator of FIG. 6 is a diagram showing a configuration example of a control circuit included in the sterilization system illustrated in FIG. 5.
  • FIG. 1 is a perspective view of a plasma generation unit 10 according to one embodiment of the present invention
  • FIG. 2 is a partial cross-sectional view of the plasma generation unit 10 of FIG. 1
  • FIG. 3 is a plan view of the plasma generation unit 10 of FIG. 4A and 4B are diagrams showing a configuration example of a plasma generation circuit for operating the plasma generation unit 10.
  • FIG. 1 is a perspective view of a plasma generation unit 10 according to one embodiment of the present invention
  • FIG. 2 is a partial cross-sectional view of the plasma generation unit 10 of FIG. 1
  • FIG. 3 is a plan view of the plasma generation unit 10 of FIG. 4A and 4B are diagrams showing a configuration example of a plasma generation circuit for operating the plasma generation unit 10.
  • FIG. 1 is a perspective view of a plasma generation unit 10 according to one embodiment of the present invention
  • FIG. 2 is a partial cross-sectional view of the plasma generation unit 10 of FIG. 1
  • FIG. 3 is a plan view of the plasma generation unit 10 of FIG.
  • the plasma generation unit 10 of this embodiment is formed in a rectangular parallelepiped shape having a rectangular plane as a whole.
  • ambient air is drawn in from the front of the plasma generation unit 10 on the front side of the page, passes through multiple flow paths in the plasma generation unit 10, and is exhausted from the back on the opposite side. be.
  • the air flow paths formed in the plasma generation unit 10 are flat slit-shaped. Each channel is called a plasma generation gap G here.
  • One gap G is formed between the first electrode 16a and the second electrode 16b for plasma generation.
  • the first electrode 16a and the second electrode 16b are rectangular flat metal plates, and in this embodiment, they are aluminum plates, but other conductive materials such as stainless steel plates may also be used.
  • Dielectric layers 14 are provided on the surfaces of the first electrode 16a and the second electrode 16b facing each other, and the dielectric layers 14 are separated from each other by separators 12, which are spacing members, and supported so as to be parallel to each other. doing.
  • Dielectric layer 14 may be formed, for example, as a layer of glass. Although the dielectric layer 14 is provided on both surfaces of the first electrode 16a and the second electrode 16b facing each other in this embodiment, it may be provided only on the surface of one of the electrodes.
  • each plasma generation gap G is set to 2 mm, and the thickness of each of the first electrode 16a and the second electrode 16b is set to 2 mm.
  • An appropriate number (for example, about 30 to 40 steps) of gaps G are provided in the height direction.
  • the separator 12 is made of an electrically insulating resin material or the like, and is 6 mm thick in this embodiment considering the thickness of each electrode is 2 mm.
  • the width of each gap G is preferably set to about 200 mm, and the depth of the gap G along the flow direction is preferably set to about 300 mm. It can be determined according to the required air flow rate.
  • an atmospheric pressure cold plasma is generated between the electrodes and acts on the air, water vapor in the gap G to produce, as is known, singlet oxygen ( 1 O 2 ), ozone (O 3 ), for example. , hydroxyl radicals (OH), superoxide anion radicals (O 2 ⁇ ), hydroperoxy radicals (HO 2 ), hydrogen peroxide (H 2 O 2 ).
  • the air passing through each gap G of the plasma generating unit 10 flows in contact with the plasma that is continuously spread in each gap G and is generated.
  • Microorganisms such as viruses and bacteria contained in the ambient air sucked into each gap G are destroyed in a very short time on the order of microseconds by contacting the plasma in the gap G, and the active oxygen Inactivation of viruses and sterilization of microorganisms are performed by mixing with multi-plasma gas containing seeds.
  • FIG. 4 shows a configuration example of a plasma generation circuit applied to the plasma generation unit 10 of this embodiment.
  • the plasma generation circuit includes a plasma power supply unit 20 having a booster unit 24 connected to each electrode pair consisting of a first electrode 16a and a second electrode 16b, and an inverter 22 for supplying alternating current to the booster unit 24.
  • a general neon transformer used for lighting a neon tube can be adopted as the plasma power supply unit 20 .
  • the inverter 22 of the plasma power supply unit 20 receives DC 12V from an external power supply.
  • the inverter 22 outputs an AC voltage controlled according to the input DC voltage and supplies the voltage to the booster 24 .
  • the control method, the type of switching element, and the like may be appropriately selected.
  • the function of the inverter 22 is to output an AC voltage corresponding to the input DC voltage.
  • the output voltage is controlled by parameters such as the distance between the electrodes, the material of the electrodes, the planar dimension, and the thickness. Note that the AC frequency may be appropriately determined.
  • the plasma generation unit 10 uses barrier discharge, but if the voltage between the electrodes is low, the discharge will not occur. It leads to electrode breakage due to reduction in generation efficiency and concentration of discharge at a specific location.
  • stable barrier discharge is maintained by controlling the AC voltage applied between the electrodes. Also, by controlling the AC voltage applied between the electrodes, it is configured to efficiently generate multi-plasma gas containing active oxygen species while suppressing generation of harmful ozone (O 3 ).
  • FIG. 5 schematically shows an exploded perspective view of a sterilization system 100 configured using the plasma generation unit 10 described so far.
  • the sterilization system 100 is configured by providing an ozone decomposition filter 30, a plasma generation unit 10, an ozone decomposition filter 30, an ozone sensor 40, and an electric fan 50 in order from the intake side for sucking ambient air.
  • FIG. 5 shows these components simply arranged along the flow path of the ambient air, but these components can be housed in, for example, a cylindrical housing to provide a sterilization system 100. can be realized.
  • the plasma generation unit 10 can have, for example, a configuration as described with reference to FIGS. 1-4.
  • the ozone decomposition filters 30, which are arranged upstream and downstream of the plasma generation unit 10, remove ozone (O3), which is harmful to the human body and has a unique odor, among various active species generated by the plasma of the plasma generation unit 10. 3 ) is provided for the purpose of preventing leakage to the outside of the system 100.
  • FIG. 1 As the ozone decomposition filter 30, a general-purpose ozone decomposition filter used in copiers and the like can be appropriately selected and employed. The shape and size of the ozone decomposition filter 30 may also be determined according to the specifications of the sterilization system 100 to be applied.
  • the reason why the ozone decomposition filter 30 is also provided on the upstream side of the plasma generation unit 10 is to prevent ozone from flowing out of the plasma generation unit 10 by flowing back through the flow path. If there is no problem with this point, the ozone decomposition filter 30 on the upstream side may be omitted.
  • the ozone sensor 40 is a sensor device that measures the concentration of ozone contained in the exhaust downstream of the ozone decomposition filter 30 in the rear stage of the plasma generation unit 10 .
  • a highly sensitive semiconductor gas sensor can be preferably used. Recommendation (FY 2020)" Journal of Occupational Hygiene, 2020; 62(5): 198-230).
  • the electric fan 50 as a blower unit functions as an exhaust fan for the sterilization system 100.
  • ambient air is introduced into the sterilization system 100 and sterilized by the plasma as it passes through the plasma generation unit 10 .
  • FIG. 6 shows a configuration example of a control circuit in the sterilization system 100 of FIG.
  • the control circuit includes a DC power supply section 60, a plasma power supply section 20, a control section 70, and an input/output section 80.
  • the control circuit includes a DC power supply section 60, a plasma power supply section 20, a control section 70, and an input/output section 80.
  • a 100 V AC, 50/60 Hz commercial power supply is supplied to the sterilization system 100 .
  • the DC power supply section 60 generates 24 V DC and 5 V DC, which are power supplies for the control circuit, and 12 V DC, which is the operating power supply for the plasma generation unit 10 .
  • the control unit 70 is a functional unit that manages operation control of the entire sterilization system 100, and can be configured using a microprocessor module, for example.
  • the input/output unit 80 can include input devices such as operation buttons and touch pads, and output devices such as LED lamps and liquid crystal displays.
  • control unit 70 ⁇ ON/OFF control of the plasma power supply unit 20 based on the input signal from the input/output unit 80 ⁇ ON/OFF control of the plasma power supply unit 20 based on the concentration signal from the ozone sensor 40 ⁇ Output voltage control of the plasma power supply unit 20 based on detection of the plasma current value
  • the atmospheric pressure low-temperature plasma generated by the plasma generation unit 10 can efficiently sterilize the surrounding air. Moreover, since the output voltage of the plasma power supply unit 20 is controlled according to the state of the generated plasma, it is possible to continuously generate stable atmospheric pressure low temperature plasma.
  • Plasma generation unit 12 Separator 14 Dielectric layer 16a First electrode 16b Second electrode 20
  • Plasma power supply unit 22 Inverter 24 Boosting unit 30
  • Ozone decomposition filter 40 Ozone sensor 50
  • Electric fan 60 DC power supply unit 70
  • Control unit 80 Input/output unit 100 Sterilization System G Plasma generation gap

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  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • Toxicology (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Plasma Technology (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Abstract

La présente invention permet d'aspirer de l'air ambiant et de réaliser de manière efficiente et efficace un traitement de stérilisation de l'air ambiant aspiré.　Cette unité de génération de plasma comprend : des sections de génération de plasma dans lesquelles une première électrode en forme de plaque plate et une seconde électrode en forme de plaque plate, qui a sensiblement la même forme plane que la première électrode, sont disposées de telle sorte que leurs surfaces se font face à un espacement prédéterminé ; et un élément d'espacement configuré pour supporter les deux parties d'extrémité d'au moins deux des sections de génération de plasma de telle sorte que les sections de génération de plasma sont empilées avec un espacement prédéterminé entre elles dans la direction de l'épaisseur. Lorsqu'une tension alternative prédéterminée est appliquée entre les première et seconde électrodes de chacune des sections de génération de plasma, un plasma basse température à pression atmosphérique est généré entre les première et seconde électrodes de chacune des sections de génération de plasma.
PCT/JP2022/023784 2021-06-14 2022-06-14 Unité de génération de plasma, dispositif de génération de plasma et système de stérilisation WO2022265006A1 (fr)

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JP2021-098812 2021-06-14
JP2021098812A JP2022190472A (ja) 2021-06-14 2021-06-14 プラズマ発生ユニット、プラズマ発生装置及び殺菌システム

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230042251A1 (en) * 2021-08-09 2023-02-09 TellaPure, LLC Methods and apparatus for generating atmospheric pressure, low temperature plasma background

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Publication number Priority date Publication date Assignee Title
JP7541222B1 (ja) 2023-05-19 2024-08-28 カーボントレードネオ株式会社 プラズマ処理装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000252098A (ja) * 1999-03-02 2000-09-14 Kitamura Masahiro 非平衡プラズマ発生装置
KR20060017191A (ko) * 2004-08-20 2006-02-23 연세대학교 산학협력단 공기정화장치
JP2018130208A (ja) * 2017-02-14 2018-08-23 日本特殊陶業株式会社 空気清浄器
JP2019155006A (ja) * 2018-03-16 2019-09-19 株式会社東芝 ガス処理装置
US20200396819A1 (en) * 2019-06-14 2020-12-17 NanoGuard Technologies, LLC Electrode assembly, dielectric barrier discharge system and use thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000252098A (ja) * 1999-03-02 2000-09-14 Kitamura Masahiro 非平衡プラズマ発生装置
KR20060017191A (ko) * 2004-08-20 2006-02-23 연세대학교 산학협력단 공기정화장치
JP2018130208A (ja) * 2017-02-14 2018-08-23 日本特殊陶業株式会社 空気清浄器
JP2019155006A (ja) * 2018-03-16 2019-09-19 株式会社東芝 ガス処理装置
US20200396819A1 (en) * 2019-06-14 2020-12-17 NanoGuard Technologies, LLC Electrode assembly, dielectric barrier discharge system and use thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230042251A1 (en) * 2021-08-09 2023-02-09 TellaPure, LLC Methods and apparatus for generating atmospheric pressure, low temperature plasma background

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