WO2022239589A1 - 圧力センサモジュールおよび分注装置 - Google Patents
圧力センサモジュールおよび分注装置 Download PDFInfo
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- WO2022239589A1 WO2022239589A1 PCT/JP2022/017532 JP2022017532W WO2022239589A1 WO 2022239589 A1 WO2022239589 A1 WO 2022239589A1 JP 2022017532 W JP2022017532 W JP 2022017532W WO 2022239589 A1 WO2022239589 A1 WO 2022239589A1
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- pressure sensor
- sensor module
- semiconductor element
- module according
- pressure
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- 239000000758 substrate Substances 0.000 claims abstract description 56
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000009530 blood pressure measurement Methods 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 claims description 88
- 239000010409 thin film Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 25
- 230000004048 modification Effects 0.000 description 17
- 238000012986 modification Methods 0.000 description 17
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 239000007788 liquid Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical group C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- -1 polydimethylsiloxane Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 101000793686 Homo sapiens Azurocidin Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
- G01N35/1009—Characterised by arrangements for controlling the aspiration or dispense of liquids
Definitions
- the present invention relates to a pressure sensor module and a dispensing device, for example, to one to which a piezoresistive semiconductor element is applied.
- a typical pressure sensor has a diaphragm formed on a part of a semiconductor substrate on which a piezoresistive element is formed.
- the diaphragm When the diaphragm is deformed by the external pressure of a liquid or gas, the amount of change in the semiconductor element is detected by a Wheatstone bridge circuit. The resistance change is electrically measured by, for example, and converted into a pressure value for measurement.
- an anisotropic etching method or a dry etching method of silicon is applied to the back side of the surface of the semiconductor substrate on which the detection element is formed, so that part of the semiconductor substrate is thinned. , a diaphragm is formed.
- a sensing portion of a semiconductor substrate on which a piezoresistive element or the like is formed is processed to be thin to an arbitrary thickness, and by thinning, the diaphragm can be easily deformed when pressure is applied.
- Patent Document 1 discloses a pressure sensor in which a member obtained by bonding a glass substrate to a semiconductor substrate on which a diaphragm is formed by a bonding technique such as anodic bonding is mounted in the vicinity of a pressure introduction hole of a housing for measuring pressure. It is Disclosed is an example in which a protrusion is installed at the outlet of a pressure introduction hole formed inside a pressure introduction pipe with dimensions matching the inner diameter of the pressure introduction hole, and the thickness of the bonding layer is determined by the height of the protrusion. ing.
- FIG. 1 is a diagram showing the basic configuration of the dispensing device 1 of Example 1.
- the dispensing device 1 has a pressure sensor module 15 .
- a flow path system of the dispensing device 1 includes a nozzle 2 , a syringe pump 4 , an electromagnetic valve 5 , a gear pump 6 and a system water tank 7 .
- the material of the piezoresistive semiconductor element 3 applied to FIGS. 3 and 4 is preferably silicon, and the thickness is, for example, preferably 100 ⁇ m or less, particularly preferably 50 ⁇ m or less.
- the thickness of the silicon becomes thinner, it becomes possible to expand the deformation area with respect to minute pressure fluctuations, and it is possible to improve the detection accuracy.
- FIG. 13 shows plan views of various modifications.
- FIG. 13(a) shows an example in which two positioning projections 38b arranged at the corners of the piezoresistive semiconductor element 3 are arranged. preferably. The corners of the positioning protrusion 38b where the X direction and the Y direction intersect may be chamfered as shown. With this configuration, positioning can be performed with a small number of positioning protrusions 38b.
- the positioning protrusion 38d which is partly chamfered, is positioned at a position corresponding to the center of the piezoresistive semiconductor element 3 in the X direction and deviated from the center of the piezoresistive semiconductor element 3 in the Y direction. Shown is an example in which the In this example, other structures may be used for the positioning method of the piezoresistive semiconductor element 3 as long as the outer circumference is aligned.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
流路および分岐路が形成された流路基板と、
圧力を検出する歪検出部と、
を備える圧力センサモジュールであって、
前記分岐路は、前記流路から分岐し、一端において前記歪検出部に接続され、
前記歪検出部は、前記分岐路の前記一端を塞ぐように、少なくとも部分的に接合層を介して配置され、
前記分岐路の前記一端を囲むように突起部が設けられる。
本明細書は本願の優先権の基礎となる日本国特許出願番号2021-081572号の開示内容を包含する。
本発明の実施例1を図1から図3を参照し説明する。
本発明の実施例2を図8の断面図を用いて説明する。以下、実施例1と共通する部分については説明を省略する場合がある。
本発明の実施例3を以下に説明する。実施例1または2と共通する部分については説明を省略する場合がある。
本発明の実施例4を図11を用いて説明する。実施例1~3のいずれかと共通する部分については説明を省略する場合がある。
本発明の実施例5を図12を用いて説明する。実施例1~4のいずれかと共通する部分については説明を省略する場合がある。
本明細書で引用した全ての刊行物、特許および特許出願はそのまま引用により本明細書に組み入れられるものとする。
Claims (13)
- 流路および分岐路が形成された流路基板と、
圧力を検出する歪検出部と、
を備える圧力センサモジュールであって、
前記分岐路は、前記流路から分岐し、一端において前記歪検出部に接続され、
前記歪検出部は、前記分岐路の前記一端を塞ぐように、少なくとも部分的に接合層を介して配置され、
前記分岐路の前記一端を囲むように突起部が設けられる
ことを特徴とする圧力センサモジュール。 - 請求項1に記載の圧力センサモジュールにおいて、前記突起部の内側の寸法は、前記分岐路の内側の寸法より大きいことを特徴とする、圧力センサモジュール。
- 請求項2に記載の圧力センサモジュールにおいて、前記突起部は前記歪検出部に形成されることを特徴とする、圧力センサモジュール。
- 請求項2に記載の圧力センサモジュールにおいて、前記突起部の高さは前記接合層の厚さに等しいことを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールにおいて、前記突起部の内側の面積は、前記歪検出部の圧力計測面積と一致することを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールにおいて、前記突起部の高さは50μm以下であることを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールにおいて、前記流路基板は、前記突起部の外縁より外側に溝を備えることを特徴とする、圧力センサモジュール。
- 請求項2に記載の圧力センサモジュールにおいて、前記分岐路の前記一端側に面取り部が設けられることを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールにおいて、前記歪検出部を前記分岐路の反対側から覆うキャップを備えることを特徴とする、圧力センサモジュール。
- 請求項9に記載の圧力センサモジュールにおいて、前記分岐路の軸方向から見た場合に、前記キャップと前記歪検出部とが接触する領域と、前記突起部と前記歪検出部とが接触する領域とが、少なくとも部分的に重なり合っていることを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールにおいて、前記歪検出部の位置を決めるための位置決め突起が、前記流路基板に形成されていることを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールにおいて、前記歪検出部は、薄膜の半導体素子を備えることを特徴とする、圧力センサモジュール。
- 請求項1に記載の圧力センサモジュールを備えることを特徴とする、分注装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18/279,448 US20240230441A9 (en) | 2021-05-13 | 2022-04-11 | Pressure Sensor Module and Dispensing Device |
CN202280019264.4A CN116981922A (zh) | 2021-05-13 | 2022-04-11 | 压力传感器模块以及分注装置 |
EP22801005.4A EP4339574A1 (en) | 2021-05-13 | 2022-04-11 | Pressure sensor module and dispensing device |
Applications Claiming Priority (2)
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---|---|---|---|
JP2021-081572 | 2021-05-13 | ||
JP2021081572A JP2022175292A (ja) | 2021-05-13 | 2021-05-13 | 圧力センサモジュールおよび分注装置 |
Publications (1)
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WO2022239589A1 true WO2022239589A1 (ja) | 2022-11-17 |
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PCT/JP2022/017532 WO2022239589A1 (ja) | 2021-05-13 | 2022-04-11 | 圧力センサモジュールおよび分注装置 |
Country Status (4)
Country | Link |
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EP (1) | EP4339574A1 (ja) |
JP (1) | JP2022175292A (ja) |
CN (1) | CN116981922A (ja) |
WO (1) | WO2022239589A1 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5828876A (ja) * | 1981-08-12 | 1983-02-19 | Mitsubishi Electric Corp | 半導体圧力センサ装置 |
JPH07174654A (ja) * | 1993-12-20 | 1995-07-14 | Hokuriku Electric Ind Co Ltd | 圧力センサ |
JPH09126925A (ja) * | 1995-11-02 | 1997-05-16 | Hokuriku Electric Ind Co Ltd | 半導体圧力センサ |
JP2000111435A (ja) * | 1998-10-08 | 2000-04-21 | Saginomiya Seisakusho Inc | 燃焼圧センサ |
JP2001201415A (ja) * | 2000-01-21 | 2001-07-27 | Fujikura Ltd | 半導体圧力センサ |
JP2014235106A (ja) * | 2013-06-04 | 2014-12-15 | 株式会社日本自動車部品総合研究所 | 圧力センサ及びその製造方法 |
US20190078914A1 (en) * | 2017-09-12 | 2019-03-14 | Silicon Microstructures, Inc. | Pressure sensor cap having flow path with dimension variation |
JP2020071191A (ja) * | 2018-11-02 | 2020-05-07 | 株式会社日立ハイテク | 分注装置 |
JP2021081572A (ja) | 2019-11-19 | 2021-05-27 | 京セラドキュメントソリューションズ株式会社 | 表示制御装置、画像処理装置、表示制御方法 |
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2021
- 2021-05-13 JP JP2021081572A patent/JP2022175292A/ja active Pending
-
2022
- 2022-04-11 WO PCT/JP2022/017532 patent/WO2022239589A1/ja active Application Filing
- 2022-04-11 CN CN202280019264.4A patent/CN116981922A/zh active Pending
- 2022-04-11 EP EP22801005.4A patent/EP4339574A1/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5828876A (ja) * | 1981-08-12 | 1983-02-19 | Mitsubishi Electric Corp | 半導体圧力センサ装置 |
JPH07174654A (ja) * | 1993-12-20 | 1995-07-14 | Hokuriku Electric Ind Co Ltd | 圧力センサ |
JPH09126925A (ja) * | 1995-11-02 | 1997-05-16 | Hokuriku Electric Ind Co Ltd | 半導体圧力センサ |
JP2000111435A (ja) * | 1998-10-08 | 2000-04-21 | Saginomiya Seisakusho Inc | 燃焼圧センサ |
JP2001201415A (ja) * | 2000-01-21 | 2001-07-27 | Fujikura Ltd | 半導体圧力センサ |
JP2014235106A (ja) * | 2013-06-04 | 2014-12-15 | 株式会社日本自動車部品総合研究所 | 圧力センサ及びその製造方法 |
US20190078914A1 (en) * | 2017-09-12 | 2019-03-14 | Silicon Microstructures, Inc. | Pressure sensor cap having flow path with dimension variation |
JP2020071191A (ja) * | 2018-11-02 | 2020-05-07 | 株式会社日立ハイテク | 分注装置 |
JP2021081572A (ja) | 2019-11-19 | 2021-05-27 | 京セラドキュメントソリューションズ株式会社 | 表示制御装置、画像処理装置、表示制御方法 |
Also Published As
Publication number | Publication date |
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CN116981922A (zh) | 2023-10-31 |
JP2022175292A (ja) | 2022-11-25 |
US20240133757A1 (en) | 2024-04-25 |
EP4339574A1 (en) | 2024-03-20 |
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