WO2022230305A1 - ガス分析装置、流体制御システム、ガス分析用プログラム、ガス分析方法 - Google Patents

ガス分析装置、流体制御システム、ガス分析用プログラム、ガス分析方法 Download PDF

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WO2022230305A1
WO2022230305A1 PCT/JP2022/005599 JP2022005599W WO2022230305A1 WO 2022230305 A1 WO2022230305 A1 WO 2022230305A1 JP 2022005599 W JP2022005599 W JP 2022005599W WO 2022230305 A1 WO2022230305 A1 WO 2022230305A1
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concentration
gas
ideal
compound
analysis
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English (en)
French (fr)
Japanese (ja)
Inventor
基延 高橋
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Horiba Stec Co Ltd
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Horiba Stec Co Ltd
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Priority to US18/288,097 priority Critical patent/US20240201157A1/en
Priority to KR1020237036338A priority patent/KR20240001142A/ko
Priority to CN202280031414.3A priority patent/CN117280197A/zh
Priority to JP2023517074A priority patent/JPWO2022230305A1/ja
Publication of WO2022230305A1 publication Critical patent/WO2022230305A1/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0067—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/18—Water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0068—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display using a computer specifically programmed

Definitions

  • the present invention relates to a gas analyzer, a fluid control system, a gas analysis program, and a gas analysis method.
  • hydrogen peroxide gas which is obtained by vaporizing hydrogen peroxide
  • hydrogen peroxide gas is generated by vaporizing an aqueous solution in which liquid hydrogen peroxide is mixed with water.
  • the present invention has been made to solve the above problems, and when there is a difference between the actual concentration of the compound gas obtained by vaporizing the compound and the desired ideal concentration, it is easy to identify the cause. Its main task is to
  • a gas analyzer is a gas analyzer for analyzing a compound gas and H 2 O gas generated in a main reaction in which an aqueous solution obtained by mixing a compound and water is vaporized, wherein the concentration of the compound gas is a first concentration calculation unit that calculates the concentration of the H 2 O gas; a first concentration calculation unit that calculates the concentration of the H 2 O gas; a first actual concentration that is the concentration of the compound gas calculated by the first concentration calculation unit; A first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, is compared with a second actual concentration, which is the concentration of the H 2 O gas calculated by the second concentration calculation unit.
  • an analysis unit that compares the concentration with a second ideal concentration that is the concentration of the H 2 O gas when the main reaction proceeds ideally; and an output unit that outputs analysis results based on the comparison by the analysis unit. It is characterized by comprising
  • the first actual concentration and the first ideal concentration which are the concentrations of the compound gas
  • the analysis results are output. It is possible to grasp whether or not there is a difference between the first ideal concentrations, and also compare the second actual concentration and the second ideal concentration, which are the concentrations of H 2 O gas, and output the analysis results. Therefore, it becomes easy to specify factors that cannot be understood only from comparison of the first actual density and the first ideal density as factors of the difference between the first actual density and the first ideal density.
  • the analysis unit determines that the first actual concentration is lower than the first ideal concentration
  • the analysis unit compares the second actual concentration with the second ideal concentration to determine the type of the side reaction.
  • the determination result is preferably output by the output unit as the analysis result. This makes it easier to identify the type of side reaction and to take appropriate measures to reduce the difference between the first actual concentration and the first ideal concentration.
  • the type of side reaction includes at least one of liquefaction of the compound gas, decomposition of the compound gas, or redissolution of the compound gas into liquefied H 2 O gas. preferably
  • the analysis unit compares the first actual concentration and the first ideal concentration to determine whether or not a side reaction other than the main reaction occurs, and the determination result is the analysis result. It is preferably output by an output unit. With such a configuration, when there is a difference between the first actual concentration and the first ideal concentration, there is a high probability that a side reaction other than the main reaction is occurring, or there is a high probability that there is another factor. can be determined whether is high.
  • the analysis unit compares the first actual concentration and the first ideal concentration to determine whether or not an abnormality has occurred on the side of the gas analyzer, and outputs the determination result as the analysis result to the output unit. is preferably output by With such a configuration, when there is a difference between the first actual density and the first ideal density, it is possible to determine whether there is a high probability that an abnormality has occurred on the apparatus side, or that there is a high probability that there is another factor. can judge.
  • the set temperature of the vaporizer for vaporizing the aqueous solution is determined based on the analysis results.
  • the first concentration calculation unit may calculate the concentration of hydrogen peroxide, formaldehyde, or peracetic acid.
  • the first density calculator and the second density calculator calculate the density based on an output signal output from a common photodetector.
  • concentrations of the compound gas and the H 2 O gas can be calculated using a common photodetector, so that the device can be made compact and the manufacturing cost can be reduced.
  • the present invention also includes a fluid control system comprising a vaporizer for vaporizing the aqueous solution, a fluid control device provided in a flow path for guiding the aqueous solution to the vaporizer, and the gas analyzer described above. .
  • the gas analysis program according to the present invention is used in a gas analyzer for analyzing compound gas and H 2 O gas generated in the main reaction in which an aqueous solution obtained by mixing a compound and water is vaporized, a first concentration calculator that calculates the concentration of the compound gas; a second concentration calculator that calculates the concentration of the H 2 O gas;
  • the actual concentration is compared with the first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and the concentration of the H 2 O gas calculated by the second concentration calculation unit an analysis unit that compares a certain second actual concentration with a second ideal concentration that is the concentration of the H 2 O gas when the main reaction proceeds ideally; and outputs an analysis result based on the comparison by the analysis unit.
  • It is characterized by making the computer exhibit the function as an output unit for outputting.
  • a gas analysis method is a gas analysis method for analyzing a compound gas and H 2 O gas generated in a main reaction in which an aqueous solution obtained by mixing a compound and water is vaporized, wherein the calculated A first actual concentration, which is the concentration of the compound gas, is compared with a first ideal concentration, which is the concentration of the compound gas when the main reaction proceeds ideally, and the calculated concentration of the H 2 O gas is calculated. and a second ideal concentration, which is the concentration of the H 2 O gas when the main reaction proceeds ideally; and an analysis result based on the comparison by the analysis step. and an output step of outputting.
  • a gas analyzer is a gas analyzer for analyzing a compound gas and H 2 O gas generated in a main reaction in which an aqueous solution obtained by mixing a compound and water is vaporized, wherein the concentration of the compound gas is a first concentration calculator that calculates A second concentration calculation unit that calculates the concentration of the H 2 O gas, a first actual concentration that is the concentration of the compound gas calculated by the first concentration calculation unit, and a case where the main reaction proceeds ideally while outputting the first ideal concentration, which is the concentration of the compound gas, so that it can be compared with the second actual concentration, which is the concentration of the H 2 O gas calculated by the second concentration calculating unit, and the main reaction and an output unit for outputting the second ideal concentration, which is the concentration of the H 2 O gas in the case of ideal progress, so as to be able to be compared with the second ideal concentration.
  • the first actual concentration and the first ideal concentration which are the concentrations of the compound gas
  • the second actual concentration and the second ideal concentration which are the concentrations of the H 2 O gas
  • FIG. 1 is a schematic diagram showing a fluid control system incorporating a gas analyzer according to an embodiment of the present invention
  • FIG. 2 is a schematic diagram showing the configuration of the density monitor of the same embodiment
  • FIG. 3 is a functional block diagram for explaining functions of an information processing unit according to the embodiment
  • FIG. 4 is a flowchart for explaining the operation of the information processing apparatus according to the embodiment; The functional block diagram explaining the function of the information processing part of other embodiment. The functional block diagram explaining the function of the information processing part of other embodiment.
  • FIG. 4 is a schematic diagram showing a fluid control system incorporating a gas analyzer according to another embodiment; The schematic diagram which shows the sterilization processing apparatus which incorporated the gas analyzer which concerns on other embodiment.
  • Reference Signs List 100 Gas analyzer 200 Fluid control system S Gas supply space 10 Vaporizer L1 Gas supply path 30 Concentration monitor 40 Information processor 41 First concentration calculator 42 Second concentration calculator 43 Ideal concentration storage unit 44 Analysis unit 45 Output unit
  • the gas analyzer 100 of this embodiment constructs a fluid control system 200 for controlling the gas supplied to a predetermined gas supply space S, and measures the concentration of the gas. be.
  • the fluid control system 200 supplies a material gas to a process chamber, which is, for example, a gas supply space S of a semiconductor manufacturing apparatus.
  • a vaporizer 10 for vaporizing an aqueous solution obtained by mixing a compound and water as a liquid material; ing.
  • the liquid material of the present embodiment is obtained by mixing hydrogen peroxide (H 2 O 2 ) and water (H 2 O) to adjust the concentration of hydrogen peroxide to a desired level. hydrogen oxide gas.
  • the vaporizer 10 heats and/or decompresses the liquid material to vaporize it, and includes a heater (not shown) for heating the liquid material and a nozzle (not shown) for ejecting and vaporizing the liquid material.
  • the vaporizer 10 is connected to a material introduction path L2 through which the liquid material stored in the reservoir 20 is introduced and a carrier gas introduction path L3 through which the carrier gas is introduced.
  • a pressurized gas introduction path L4 for introducing gas is connected.
  • the material introduction path L2 is provided with a first mass flow controller MFC1 as a fluid control device for controlling the flow rate of the liquid material
  • the carrier gas introduction path L3 is provided with a fluid control device for controlling the flow rate of the carrier gas.
  • a second mass flow controller MFC2 is provided.
  • oxygen is used here as the carrier gas and the pressurized gas, nitrogen, argon, hydrogen, or the like may be used depending on the type of liquid material.
  • the gas supply path L1 connects the vaporizer 10 and the gas supply space S, as shown in FIG.
  • By-product gas flows.
  • the compound gas is hydrogen peroxide gas
  • the by-product gas is H 2 O gas
  • oxygen which is the above-described carrier gas and pressurized gas, also flows through gas supply path L1 along with these gases.
  • the by-product gas is produced by the main reaction as described above, but its concentration can also vary due to side reactions other than the main reaction, and can also be a factor that varies the concentration of the compound gas. . Therefore, the finding of technical significance in monitoring the concentration of the by-product gas is the present invention, which will be described in detail below.
  • the side reactions in this embodiment include, as shown in FIG. can be mentioned.
  • the gas analyzer 100 of this embodiment includes a concentration monitor 30 provided in the gas supply line L1, and an information processing section 40 that acquires an output signal from the concentration monitor 30.
  • the concentration monitor 30 does not necessarily have to be provided in the gas supply path L1, and may be provided in a branched flow path branched from the gas supply path L1, for example.
  • the concentration monitor 30 analyzes the measurement target component contained in the gas by an infrared absorption method. Specifically, as shown in FIG. 31 and a detection unit 32 containing a photodetector for detecting the infrared light X that has passed through the gas. A light intensity signal of the infrared light X detected by the photodetector is used as an output signal to provide information. It is configured to be output to the processing unit 40 .
  • the information processing unit 40 is a general-purpose or dedicated computer including a CPU, a memory, an AD converter, a DA converter, and the like. It can be anything.
  • the information processing section 40 operates in cooperation with the CPU and its peripheral devices in accordance with the gas analysis program stored in the predetermined area of the memory, so that, as shown in FIG. It functions as a density calculator 42 , an ideal density storage section 43 , an analysis section 44 and an output section 45 .
  • the gas concentration described below may mean the component concentration of the gas, or may mean the partial pressure of the gas.
  • the operation of the information processing section 40 of the present embodiment will also be described below together with the description of the function of each section.
  • the first concentration calculator 41 calculates the concentration of hydrogen peroxide gas, which is a compound gas (hereinafter also referred to as the first actual concentration). While receiving the intensity signal, the value indicated by the light intensity signal is arithmetically processed to calculate the concentration of the hydrogen peroxide gas contained in the gas flowing through the gas supply path L1 as the first actual concentration. Note that this arithmetic processing uses the first calibration curve data indicating the relationship between the value indicated by the light intensity signal and the first actual concentration, and this first calibration curve data is set in a predetermined area of the memory. stored in the calibration curve data storage unit 46 (see FIG. 4).
  • the second concentration calculator 42 calculates the concentration of H 2 O gas, which is a by-product gas (hereinafter also referred to as the second actual concentration), and specifically, the output signal from the photodetector.
  • the light intensity signal is received, and the value indicated by the light intensity signal is processed to calculate the concentration of H 2 O gas contained in the gas flowing through the gas supply path L1 as the second actual concentration.
  • the second calibration curve data indicating the relationship between the value indicated by the light intensity signal and the second actual concentration is used in this arithmetic processing, and this second calibration curve data is set in a predetermined area of the memory. stored in the calibration curve data storage unit 46 (see FIG. 4).
  • the first density calculator 41 and the second density calculator 42 are configured to calculate the first actual density and the second actual density, respectively, based on the output signal output from the common photodetector. This makes it possible to reduce the size of the device and the manufacturing cost.
  • the first density calculator 41 and the second density calculator 42 are configured to calculate the first actual density and the second actual density, respectively, based on output signals output from different photodetectors. It's okay to be there.
  • the ideal concentration storage unit 43 is set in a predetermined area of the memory, and stores the first ideal concentration, which is the concentration of hydrogen peroxide gas when the above-described main reaction proceeds ideally, and the above-described main reaction.
  • a second ideal concentration is stored, which is the concentration of H 2 O gas when proceeding ideally.
  • the first ideal concentration can be pre-calculated, for example, prior to initiation of the control process by the fluid control system 200 .
  • the titration concentration obtained by actually measuring the concentration of hydrogen peroxide contained in the aqueous solution stored in the reservoir 20 by titration or the like, and the total flow rate of the gas flowing through the concentration monitor 30 (the amount of hydrogen peroxide gas Calculated based on the theoretical concentration of hydrogen peroxide (specifically, the volume fraction of hydrogen peroxide) theoretically obtained using the flow rate, the flow rate of H 2 O gas, and the flow rate of oxygen gas) be able to.
  • This theoretical concentration is the concentration of hydrogen peroxide gas when the aqueous solution stored in the reservoir 20 is 100% vaporized, in other words, the concentration of hydrogen peroxide gas when only the main reaction described above occurs. .
  • this theoretical concentration may be set as the first ideal concentration, in the present embodiment, considering that the compound gas is reduced considerably due to, for example, condensation during the process from the reservoir 20 to the concentration monitor 30, the first ideal concentration is assumed to be the first ideal concentration. setting the concentration. That is, since there is a difference between the theoretical concentration and the concentration measured by the concentration monitor 30 (referred to as the effective concentration), the ratio of the effective concentration to the theoretical concentration (hereinafter referred to as vaporization efficiency) is obtained in advance. The first ideal concentration is obtained by multiplying the theoretical concentration by the vaporization efficiency. Note that the effective concentration may be set as the first ideal concentration without calculating the vaporization efficiency.
  • the second ideal concentration can be pre-calculated, for example, before initiation of the control process by the fluid control system 200 .
  • the concentration obtained by multiplying this theoretical concentration by the vaporization efficiency described above is taken as the second ideal concentration.
  • the concentration of H 2 O gas measured in advance by the concentration monitor 30 before the start of the control process by the fluid control system 200 may be used as the second ideal concentration.
  • the first ideal density and the second ideal density calculated in this manner are input from the outside via, for example, input means, and stored in the ideal density storage unit 43 .
  • the information processing section 40 is provided with a function as an ideal density calculation section for calculating the first ideal density and the second ideal density, and the first ideal density and the second ideal density calculated by this ideal density calculation section may be stored in the ideal density storage unit 43 .
  • the analysis unit 44 compares the first actual density and the first ideal density, and also compares the second actual density and the second ideal density. The relationship is determined, and the magnitude relationship between the second actual density and the second ideal density is determined.
  • the analysis unit 44 of the present embodiment compares the first actual concentration and the first ideal concentration to determine whether or not a side reaction other than the main reaction has occurred, and whether or not an abnormality has occurred on the device side. It is configured to determine whether or not
  • the analysis unit 44 first compares the first actual density and the first ideal density (S1). Then, when the difference between the first actual concentration and the first ideal concentration is equal to or less than the predetermined threshold value, the analysis unit 44 determines that the above-described main reaction is progressing ideally (S2).
  • the analysis unit 44 determines the magnitude relationship between the first actual density and the first ideal density (S3 ), it is determined whether or not a side reaction other than the main reaction has occurred, or whether or not an abnormality has occurred on the device side (S4, S5).
  • the analysis unit 44 determines that there is an abnormality on the device side (S4).
  • Abnormality includes, for example, improper calibration, setting errors of various set values such as the above-described first calibration curve data, second calibration curve data, vaporization efficiency, and the like.
  • the analysis unit 44 determines that a side reaction other than the main reaction is occurring (S5).
  • the analysis unit 44 identifies the type of side reaction based on the results of comparison between the second actual concentration and the second ideal concentration.
  • the types of side reactions include liquefaction of hydrogen peroxide gas, decomposition of hydrogen peroxide gas, and re-dissolution of hydrogen peroxide gas in water in which H 2 O gas is liquefied. (See FIG. 2), and the types of side reactions specified by the analysis unit 44 may include at least one of liquefaction, decomposition, and re-dissolution.
  • the analysis unit 44 of the present embodiment compares the second actual concentration and the second ideal concentration (S6), and if the difference between the second actual concentration and the second ideal concentration is equal to or less than a predetermined threshold, excessive It is determined that the hydrogen oxide gas is liquefied (S7).
  • the analysis unit 44 determines the magnitude relationship between the second actual density and the second ideal density (S8). . Then, when the second actual concentration is higher than the second ideal concentration, the analysis unit 44 determines that the hydrogen peroxide gas is decomposed as a side reaction (S9), and the second actual concentration becomes the second ideal concentration. If it is lower than , the analysis unit 44 determines that one or more of liquefaction, decomposition, and re-dissolution of hydrogen peroxide gas occurs as a side reaction (S10).
  • the analysis result by the analysis unit 44 includes at least the comparison result between the first actual density and the first ideal density and the comparison result between the second actual density and the second ideal density.
  • the analysis results of this embodiment include various judgment results determined based on the comparison results, that is, whether there is an abnormality in the device side, whether or not a side reaction other than the main reaction has occurred. , the type of side reaction taking place (liquefaction, decomposition, or redissolution) is also included.
  • the analysis result based on the comparison by the analysis unit 44 is visually output by the output unit 45 .
  • the output unit 45 visually outputs a part or all of the information contained in the analysis result. It is configured to display and output the type of side reaction on the display. Note that the output unit 45 may print out the analysis results on paper or the like.
  • the first actual concentration and the first ideal concentration which are the concentrations of hydrogen peroxide gas, are compared and the analysis result is output. It is possible to grasp whether there is a difference between the concentration and the first ideal concentration, that is, whether the main reaction is progressing ideally.
  • the second actual concentration and the second ideal concentration which are the concentrations of the H 2 O gas
  • the second actual concentration and the second ideal concentration which are the concentrations of the H 2 O gas
  • the difference between the first actual concentration and the first ideal concentration is caused by the first It is not possible to know only from the comparison of the first actual concentration and the first ideal concentration, for example, the occurrence of an abnormality on the device side, the occurrence of a side reaction such as liquefaction, decomposition, or re-dissolution of hydrogen peroxide gas. , it becomes easier to identify a highly probable factor from among various factors, and to take appropriate measures to reduce the difference between the first actual density and the first ideal density.
  • the present invention is not limited to the above embodiments.
  • the output unit 45 outputs that there is an abnormality on the device side, that a side reaction has occurred, and the type of the side reaction. It may be output. Further, the comparison result (magnitude relationship) between the first actual density and the first ideal density and the comparison result (magnitude relationship) between the second actual density and the second ideal density may be displayed. In this case, the analysis unit 44 does not need to determine whether there is an abnormality on the device side, whether a side reaction has occurred, or the type of the side reaction.
  • the output unit 45 may display or print out the analysis results, or may output the analysis results to the adjustment unit 47 as shown in FIG.
  • the adjustment unit 47 is configured to adjust the set temperature of the vaporizer 10 and the set flow rates of the mass flow controllers MFC1 and MFC2, for example, so that the difference between the first actual concentration and the first ideal concentration becomes small.
  • the output unit 45 outputs the first actual density and the first ideal density so as to be comparable without outputting the analysis result by the analysis unit 44, and outputs the second actual density and the second ideal density, for example, It may be output to a display or the like for comparison.
  • the information processing section 40 may not have the function of the analysis section 44 .
  • the information processing section 40 may also have a function as an ideal density calculation section 48 for calculating the first ideal density and the second ideal density, as shown in FIG. .
  • the ideal concentration calculator 48 there is a mode in which the first ideal concentration and the second ideal concentration are calculated using the vaporization efficiency input via the input means.
  • the information processing section 40 When the difference between the first actual density and the first ideal density exceeds a predetermined threshold value as a result of the comparing section comparing the first actual density and the first ideal density, the information processing section 40 notifies that fact. It may further have a function as an informing unit to do so.
  • part of the functions of the first density calculation unit 41, the second density calculation unit 42, the analysis unit 44, and the output unit 45 included in the information processing unit 40 may be provided in another computer, or the ideal density
  • the storage unit 43 may be set in a predetermined area of an external memory separate from the memory of the information processing unit 40 .
  • the fluid control system 200 ejects the liquid material from the nozzles to vaporize it.
  • the fluid control system 200 includes a vaporizer including a vaporization tank 11 that stores an aqueous solution obtained by mixing a compound and water and vaporizes the aqueous solution, and a carrier that introduces a carrier gas into the vaporization tank 11. It comprises a gas introduction path L3, a mass flow controller MFC as a fluid control device provided in the carrier gas introduction path L3, and a gas supply path L1 for supplying the gas vaporized by the vaporization tank 11 to the gas supply space S such as a chamber. , a concentration monitor 30 provided in the gas supply path L1, and an information processing section 40 for acquiring an output signal from the concentration monitor 30. As shown in FIG.
  • the gas analyzer 100 may be applied to a sterilization apparatus 300 for sterilizing objects to be sterilized such as medical equipment.
  • this sterilization apparatus 300 includes a gas supply space S as a chamber for accommodating an object to be sterilized, a vaporizer 10 for vaporizing an aqueous solution obtained by mixing a compound and water, and a gas vaporized by the vaporizer 10. to the chamber, a concentration monitor 30 provided in the gas supply passage L1, and an information processing section 40 for obtaining an output signal from the concentration monitor 30.
  • the first concentration calculator 41 may calculate the concentration of formaldehyde contained in the gas flowing through the gas supply path L1.
  • the compound that is mixed with water may be peracetic acid.
  • an aqueous solution obtained by mixing peracetic acid and water is contained in a container, and the concentration monitor 30 monitors the concentration of peracetic acid gas and H 2 O gas contained in the vapor in the container. You should monitor.
  • the present invention when there is a difference between the actual concentration of the compound gas obtained by vaporizing the compound and the desired ideal concentration, it is possible to easily identify the cause.

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PCT/JP2022/005599 2021-04-30 2022-02-14 ガス分析装置、流体制御システム、ガス分析用プログラム、ガス分析方法 Ceased WO2022230305A1 (ja)

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Application Number Priority Date Filing Date Title
US18/288,097 US20240201157A1 (en) 2021-04-30 2022-02-14 Gas analysis device, fluid control system, program for gas analysis, and gas analysis method
KR1020237036338A KR20240001142A (ko) 2021-04-30 2022-02-14 가스 분석 장치, 유체 제어 시스템, 가스 분석용 프로그램, 가스 분석 방법
CN202280031414.3A CN117280197A (zh) 2021-04-30 2022-02-14 气体分析装置、流体控制系统、气体分析用程序及气体分析方法
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US5892229A (en) * 1996-04-22 1999-04-06 Rosemount Analytical Inc. Method and apparatus for measuring vaporous hydrogen peroxide
JPH11230899A (ja) * 1997-11-14 1999-08-27 Ethicon Inc 過酸化水素蒸気等の濃度測定装置および測定方法
JP2000217894A (ja) * 1998-12-30 2000-08-08 Ethicon Inc ロ―ドを決定するために少量の滅菌剤を用いる滅菌方法
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JP2021507272A (ja) * 2017-12-21 2021-02-22 メディヴェーターズ インコーポレイテッド 過酢酸蒸気および過酸化水素蒸気を検出する方法およびシステム

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