CN117280197A - 气体分析装置、流体控制系统、气体分析用程序及气体分析方法 - Google Patents

气体分析装置、流体控制系统、气体分析用程序及气体分析方法 Download PDF

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Publication number
CN117280197A
CN117280197A CN202280031414.3A CN202280031414A CN117280197A CN 117280197 A CN117280197 A CN 117280197A CN 202280031414 A CN202280031414 A CN 202280031414A CN 117280197 A CN117280197 A CN 117280197A
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CN
China
Prior art keywords
concentration
gas
analysis
ideal
compound
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Pending
Application number
CN202280031414.3A
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English (en)
Chinese (zh)
Inventor
高桥基延
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
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Horiba Stec Co Ltd
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Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Publication of CN117280197A publication Critical patent/CN117280197A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0067—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/18—Water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0068—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display using a computer specifically programmed

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
CN202280031414.3A 2021-04-30 2022-02-14 气体分析装置、流体控制系统、气体分析用程序及气体分析方法 Pending CN117280197A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021078046 2021-04-30
JP2021-078046 2021-04-30
PCT/JP2022/005599 WO2022230305A1 (ja) 2021-04-30 2022-02-14 ガス分析装置、流体制御システム、ガス分析用プログラム、ガス分析方法

Publications (1)

Publication Number Publication Date
CN117280197A true CN117280197A (zh) 2023-12-22

Family

ID=83846891

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280031414.3A Pending CN117280197A (zh) 2021-04-30 2022-02-14 气体分析装置、流体控制系统、气体分析用程序及气体分析方法

Country Status (6)

Country Link
US (1) US20240201157A1 (https=)
JP (1) JPWO2022230305A1 (https=)
KR (1) KR20240001142A (https=)
CN (1) CN117280197A (https=)
TW (1) TW202244485A (https=)
WO (1) WO2022230305A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5600142A (en) * 1995-05-26 1997-02-04 Uop Measurement of vaporized hydrogen peroxide
US5892229A (en) * 1996-04-22 1999-04-06 Rosemount Analytical Inc. Method and apparatus for measuring vaporous hydrogen peroxide
AU753047B2 (en) * 1997-11-14 2002-10-03 Ethicon Inc. Method for measuring the concentration of hydrogen peroxide vapor
US6333002B1 (en) * 1998-12-30 2001-12-25 Ethicon, Inc. Sterilization process using small amount of sterilant to determine the load
WO2003006963A1 (en) * 2001-07-10 2003-01-23 Steris Inc. Monitor and control using mid-infrared spectroscopy for vapor hydrogen peroxide processing technics
KR20180003429A (ko) * 2016-06-30 2018-01-09 가부시키가이샤 호리바 세이사꾸쇼 가스 농도 측정 장치
JP2018004400A (ja) * 2016-06-30 2018-01-11 株式会社堀場製作所 ガス濃度測定装置
US20200390923A1 (en) * 2017-12-21 2020-12-17 Medivators Inc. System and method for detecting peractic acid and hydrogen peroxide vapor

Also Published As

Publication number Publication date
WO2022230305A1 (ja) 2022-11-03
TW202244485A (zh) 2022-11-16
KR20240001142A (ko) 2024-01-03
JPWO2022230305A1 (https=) 2022-11-03
US20240201157A1 (en) 2024-06-20

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