KR20240001142A - 가스 분석 장치, 유체 제어 시스템, 가스 분석용 프로그램, 가스 분석 방법 - Google Patents
가스 분석 장치, 유체 제어 시스템, 가스 분석용 프로그램, 가스 분석 방법 Download PDFInfo
- Publication number
- KR20240001142A KR20240001142A KR1020237036338A KR20237036338A KR20240001142A KR 20240001142 A KR20240001142 A KR 20240001142A KR 1020237036338 A KR1020237036338 A KR 1020237036338A KR 20237036338 A KR20237036338 A KR 20237036338A KR 20240001142 A KR20240001142 A KR 20240001142A
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- South Korea
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- concentration
- gas
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- Pending
Links
- 238000004868 gas analysis Methods 0.000 title claims abstract description 45
- 239000012530 fluid Substances 0.000 title claims description 25
- 238000000034 method Methods 0.000 title claims description 25
- 150000001875 compounds Chemical class 0.000 claims abstract description 73
- 238000004458 analytical method Methods 0.000 claims abstract description 68
- 238000004364 calculation method Methods 0.000 claims abstract description 45
- 238000006243 chemical reaction Methods 0.000 claims abstract description 43
- 230000008016 vaporization Effects 0.000 claims abstract description 32
- 239000007864 aqueous solution Substances 0.000 claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000009834 vaporization Methods 0.000 claims abstract description 19
- 238000002156 mixing Methods 0.000 claims abstract description 14
- 239000007789 gas Substances 0.000 claims description 166
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 71
- 230000002159 abnormal effect Effects 0.000 claims description 45
- 238000007086 side reaction Methods 0.000 claims description 31
- 239000006200 vaporizer Substances 0.000 claims description 19
- 230000005856 abnormality Effects 0.000 claims description 18
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 claims description 10
- 238000000354 decomposition reaction Methods 0.000 claims description 10
- 238000004090 dissolution Methods 0.000 claims description 8
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 claims description 2
- 230000010365 information processing Effects 0.000 description 18
- 230000006870 function Effects 0.000 description 11
- 239000011344 liquid material Substances 0.000 description 11
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 9
- 239000012159 carrier gas Substances 0.000 description 9
- 238000011088 calibration curve Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000001954 sterilising effect Effects 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000004659 sterilization and disinfection Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 101100023111 Schizosaccharomyces pombe (strain 972 / ATCC 24843) mfc1 gene Proteins 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
- G01N33/0067—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/18—Water
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N2001/028—Sampling from a surface, swabbing, vaporising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
- G01N33/0068—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display using a computer specifically programmed
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021078046 | 2021-04-30 | ||
| JPJP-P-2021-078046 | 2021-04-30 | ||
| PCT/JP2022/005599 WO2022230305A1 (ja) | 2021-04-30 | 2022-02-14 | ガス分析装置、流体制御システム、ガス分析用プログラム、ガス分析方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20240001142A true KR20240001142A (ko) | 2024-01-03 |
Family
ID=83846891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020237036338A Pending KR20240001142A (ko) | 2021-04-30 | 2022-02-14 | 가스 분석 장치, 유체 제어 시스템, 가스 분석용 프로그램, 가스 분석 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240201157A1 (https=) |
| JP (1) | JPWO2022230305A1 (https=) |
| KR (1) | KR20240001142A (https=) |
| CN (1) | CN117280197A (https=) |
| TW (1) | TW202244485A (https=) |
| WO (1) | WO2022230305A1 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000217894A (ja) | 1998-12-30 | 2000-08-08 | Ethicon Inc | ロ―ドを決定するために少量の滅菌剤を用いる滅菌方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5600142A (en) * | 1995-05-26 | 1997-02-04 | Uop | Measurement of vaporized hydrogen peroxide |
| US5892229A (en) * | 1996-04-22 | 1999-04-06 | Rosemount Analytical Inc. | Method and apparatus for measuring vaporous hydrogen peroxide |
| AU753047B2 (en) * | 1997-11-14 | 2002-10-03 | Ethicon Inc. | Method for measuring the concentration of hydrogen peroxide vapor |
| WO2003006963A1 (en) * | 2001-07-10 | 2003-01-23 | Steris Inc. | Monitor and control using mid-infrared spectroscopy for vapor hydrogen peroxide processing technics |
| KR20180003429A (ko) * | 2016-06-30 | 2018-01-09 | 가부시키가이샤 호리바 세이사꾸쇼 | 가스 농도 측정 장치 |
| JP2018004400A (ja) * | 2016-06-30 | 2018-01-11 | 株式会社堀場製作所 | ガス濃度測定装置 |
| US20200390923A1 (en) * | 2017-12-21 | 2020-12-17 | Medivators Inc. | System and method for detecting peractic acid and hydrogen peroxide vapor |
-
2022
- 2022-02-14 WO PCT/JP2022/005599 patent/WO2022230305A1/ja not_active Ceased
- 2022-02-14 US US18/288,097 patent/US20240201157A1/en active Pending
- 2022-02-14 JP JP2023517074A patent/JPWO2022230305A1/ja active Pending
- 2022-02-14 CN CN202280031414.3A patent/CN117280197A/zh active Pending
- 2022-02-14 KR KR1020237036338A patent/KR20240001142A/ko active Pending
- 2022-04-14 TW TW111114143A patent/TW202244485A/zh unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000217894A (ja) | 1998-12-30 | 2000-08-08 | Ethicon Inc | ロ―ドを決定するために少量の滅菌剤を用いる滅菌方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022230305A1 (ja) | 2022-11-03 |
| TW202244485A (zh) | 2022-11-16 |
| CN117280197A (zh) | 2023-12-22 |
| JPWO2022230305A1 (https=) | 2022-11-03 |
| US20240201157A1 (en) | 2024-06-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20231023 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20241226 Comment text: Request for Examination of Application |