WO2022196289A1 - 感圧センサ - Google Patents
感圧センサ Download PDFInfo
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- WO2022196289A1 WO2022196289A1 PCT/JP2022/007875 JP2022007875W WO2022196289A1 WO 2022196289 A1 WO2022196289 A1 WO 2022196289A1 JP 2022007875 W JP2022007875 W JP 2022007875W WO 2022196289 A1 WO2022196289 A1 WO 2022196289A1
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- Prior art keywords
- pressure
- electrode
- conductive layer
- sensitive
- sensor
- Prior art date
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- 239000000463 material Substances 0.000 claims description 25
- 238000010586 diagram Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
Definitions
- the present invention relates to pressure sensors, and more particularly to pressure sensors configured to detect pressure.
- Patent Document 1 discloses a pressure sensor.
- the present invention has been made to solve such problems, and an object of the present invention is to provide a pressure-sensitive sensor in which an output value related to pressure changes more linearly with changes in the load applied to the pressure-sensitive sensor. is to provide
- a pressure sensor is configured to detect pressure.
- This pressure sensor includes a first sheet member and a second sheet member.
- the second sheet member is arranged to overlap the first sheet member.
- First and second electrodes are formed on the first sheet member.
- a third electrode covered with a pressure-sensitive conductive layer is formed on the second sheet member.
- the second sheet member does not have the third electrode formed thereon, but has only the pressure-sensitive conductive layer formed thereon.
- current flows from one of the first and second electrodes to the other mainly through the pressure-sensitive conductive layer when the pressure-sensitive sensor is used. Since current flows in a wide range of the pressure-sensitive conductive layer, the volume resistance value due to the pressure-sensitive conductive layer increases.
- the inventor(s) have found that the linearity of the pressure-sensitive sensor is adversely affected as the volume resistance attributed to the pressure-sensitive conductive layer increases.
- the linearity of the pressure sensor means the linearity of the change in the output value of the pressure sensor with respect to the change in the load applied to the pressure sensor.
- the output value of the pressure sensor is obtained by converting the resistance value output indicated by the hyperbola into a voltage value output passing through the origin, for example, by using an operational amplifier.
- the pressure-sensitive conductive layer covers the third electrode in the second sheet member. Therefore, in this pressure-sensitive sensor, current flows from one of the first and second electrodes to the other through the pressure-sensitive conductive layer and the third electrode when the pressure-sensitive sensor is used. In this case, compared with the case where the third electrode is not formed on the second sheet member, the current flows in a narrow range of the pressure-sensitive conductive layer, so the volume resistance value due to the pressure-sensitive conductive layer becomes small. . Therefore, according to this pressure-sensitive sensor, the volume resistance value resulting from the pressure-sensitive conductive layer is reduced, so that the linearity of the pressure-sensitive sensor can be improved.
- the third electrode may be made of the same material as the first and second electrodes.
- L1/T1 may be greater than 40, where L1 is the distance between the first and second electrodes and T1 is the thickness of the pressure-sensitive conductive layer.
- each of the first and second electrodes may have a comb tooth-shaped portion.
- FIG. 2 is a diagram schematically showing a II-II cross section of FIG. 1; It is a figure which shows typically a part of cross section of the pressure-sensitive sensor of comparison object. It is a figure which shows typically a part of cross section of a pressure sensor. It is a figure which shows the linearity of the pressure-sensitive sensor of comparison object.
- FIG. 4 is a diagram showing linearity of the pressure sensor according to the embodiment; It is a figure which shows typically the plane of the 1st electrode, 2nd electrode, and pressure-sensitive conductive layer which are contained in the pressure-sensitive sensor in a modification.
- FIG. 1 is a diagram schematically showing a part of a plane of pressure-sensitive sensor 10 according to the present embodiment.
- FIG. 2 is a diagram schematically showing the II-II section of FIG.
- the pressure sensor 10 is configured to detect applied pressure.
- the pressure sensor 10 includes a first sheet member 50 and a second sheet member 60 .
- the first sheet member 50 and the second sheet member 60 are overlapped with each other.
- Each of the first sheet member 50 and the second sheet member 60 has a substantially circular portion and a rectangular portion in plan view.
- the first sheet member 50 and the second sheet member 60 are not adhered to each other at their substantially circular portions.
- the pressure sensor 10 detects the pressure with which the first sheet member 50 and the second sheet member 60 are sandwiched.
- the first sheet member 50 includes a base material 100, a first electrode 110 and a second electrode 120.
- the base material 100 is a sheet-like member and has a substantially circular portion and a rectangular portion.
- the base material 100 is made of, for example, a flexible material such as polyimide or PET (polyethylene terephthalate).
- Each of the first electrode 110 and the second electrode 120 is formed on the base material 100 .
- Each of the first electrode 110 and the second electrode 120 has a comb tooth-shaped portion and a rectangular portion in plan view.
- the first electrode 110 and the second electrode 120 are arranged such that their comb teeth are staggered.
- Each of the first electrode 110 and the second electrode 120 is made of, for example, a metal foil such as silver foil, copper foil, aluminum foil, or the like, or a conductive polymer. Note that the materials for the first electrode 110 and the second electrode 120 are not limited to these, and any material with high conductivity may be used.
- the second sheet member 60 includes a base material 200, a third electrode 220, and a pressure-sensitive conductive layer 210.
- the base material 200 is a sheet-like member and has substantially the same shape as the base material 100 .
- the base material 200 is made of, for example, a flexible material such as polyimide or PET.
- the third electrode 220 is formed on the base material 200 .
- the shape of the third electrode 220 is substantially circular in plan view.
- the third electrode 220 is made of, for example, a metal foil such as silver foil, copper foil, or aluminum foil, or a conductive polymer. Note that the material of the third electrode 220 is not limited to these, and any material with high conductivity may be used.
- the third electrode 220 is made of the same material as the first electrode 110 and the second electrode 120 .
- the pressure-sensitive conductive layer 210 is formed on the second sheet member 60 so as to cover the third electrode 220 .
- the pressure-sensitive conductive layer 210 has a substantially circular shape that is one size larger than the third electrode 220 in plan view.
- the pressure-sensitive conductive layer 210 is made of pressure-sensitive conductive ink. Known pressure-sensitive conductive ink containing conductive particles can be used as the pressure-sensitive conductive ink.
- Examples of the conductive particles contained in the pressure-sensitive conductive ink include carbon-based particles (including fibrous materials) such as carbon black, graphite, carbon nanotubes, carbon nanohorns, carbon nanofibers, and carbon nanocoils; iron, nickel, Metal particles such as copper, aluminum, magnesium, platinum, silver, gold, and alloys containing at least one of these metals; tin oxide, zinc oxide, silver iodide, copper iodide, barium titanate, indium tin oxide , conductive inorganic material particles such as strontium titanate, and the like.
- the conductive particles may be used singly or in combination of two or more.
- L1/T1 is greater than 40, where L1 is the distance between the first electrode 110 and the second electrode 120, and T1 is the thickness of the pressure-sensitive conductive layer 210. Also, 1/T1 may be greater than 50. That is, in the pressure-sensitive sensor 10 , the distance L1 between the first electrode 110 and the second electrode 120 is much longer than the thickness T1 of the pressure-sensitive conductive layer 210 .
- each of the first electrode 110 and the second electrode 120 is in contact with the pressure-sensitive conductive layer 210 regardless of whether the pressure-sensitive sensor 10 is in use.
- a voltage is applied between the first electrode 110 and the second electrode 120 when the pressure sensor 10 is used.
- the first electrode 110 is connected to the positive electrode of the power source V1
- the second electrode 120 is connected to the negative electrode of the power source V1.
- the first electrode 110 and the second electrode 120 are electrically connected via the pressure-sensitive conductive layer 210 and the third electrode 220 .
- the pressure applied to pressure sensor 10 increases, the contact area between each of first electrode 110 and second electrode 120 and pressure-sensitive conductive layer 210 increases.
- the resistance value between the first electrode 110 and the second electrode 120 decreases, and the current value generated between the first electrode 110 and the second electrode 120 increases. By detecting this change in current value, the pressure applied to the pressure sensor 10 is detected.
- the pressure-sensitive conductive layer 210 covers the third electrode 220 .
- the output value related to pressure is obtained by converting the resistance value output indicated by the hyperbola into a voltage value output passing through the origin, for example, by using an operational amplifier.
- FIG. 3 is a diagram schematically showing a part of the cross section of the pressure-sensitive sensor 10A for comparison.
- the third electrode 220 is not formed on the base material 200 in the pressure sensor 10A. Only the pressure-sensitive conductive layer 210A is formed on the base material 200. As shown in FIG. 3
- the resistance component caused by the contact area between each of the first electrode 110 and the second electrode 120 and the pressure-sensitive conductive layer 210A changes greatly.
- the volume resistance component caused by the pressure-sensitive conductive layer 210A hardly changes. That is, the volume resistance component caused by the pressure-sensitive conductive layer 210A exists as an offset with respect to the total resistance component between the first electrode 110 and the second electrode 120.
- FIG. Since the pressure sensor 10A detects pressure based on the change in the resistance value between the first electrode 110 and the second electrode 120, when the offset value (the volume resistance component caused by the pressure sensitive conductive layer 210A) increases, the sensitivity increases.
- the linearity of pressure sensor 10A is degraded. That is, the inventors (and others) have found that the linearity of the pressure sensor 10A is adversely affected as the volume resistance value caused by the pressure sensitive conductive layer 210A increases.
- FIG. 4 is a diagram schematically showing a part of the cross section of pressure sensor 10 according to the present embodiment.
- pressure sensitive conductive layer 210 covers third electrode 220 .
- the resistance value of the third electrode 220 is much lower than the resistance value of the pressure-sensitive conductive layer 210 . Therefore, when pressure is applied to the pressure sensor 10 , current flows between the first electrode 110 and the second electrode 120 via the pressure sensitive conductive layer 210 and the third electrode 220 .
- the pressure-sensitive conductive layer 210 current mainly flows in the thickness direction of the pressure-sensitive conductive layer 210 . Since the length of the pressure-sensitive conductive layer 210 in the thickness direction is much shorter than the length between the first electrode 110 and the second electrode 120, the range in which the current flows in the pressure-sensitive conductive layer 210 is shown in FIG. narrower compared to Therefore, between the first electrode 110 and the second electrode 120, the volume resistance value due to the pressure-sensitive conductive layer 210 becomes small. As a result, according to the pressure-sensitive sensor 10, the volume resistance value caused by the pressure-sensitive conductive layer 210 is reduced, so the linearity of the pressure-sensitive sensor 10 can be improved.
- FIG. 5 is a diagram showing the linearity of the pressure sensor 10A for comparison.
- FIG. 6 is a diagram showing the linearity of pressure sensor 10 according to the present embodiment.
- the horizontal axis indicates the load applied to the pressure sensor, and the vertical axis indicates the output of the pressure sensor. 5 and 6, it can be seen that the pressure sensor 10 has higher linearity than the pressure sensor 10A.
- pressure-sensitive conductive layer 210 covers third electrode 220 in second sheet member 60 . Therefore, in the pressure-sensitive sensor 10, when the pressure-sensitive sensor 10 is used, a current flows from one of the first electrode 110 and the second electrode 120 to the other through the pressure-sensitive conductive layer 210 and the third electrode 220. flow. In this case, compared to the case where the third electrode 220 is not formed on the second sheet member 60, the current flows in a narrower range of the pressure-sensitive conductive layer 210, so the volume resistance caused by the pressure-sensitive conductive layer 210 increases. value becomes smaller. Therefore, according to the pressure-sensitive sensor 10, since the volume resistance value resulting from the pressure-sensitive conductive layer 210 is reduced, the linearity of the pressure-sensitive sensor 10 can be improved.
- FIG. 7 is a diagram schematically showing a plane of the first electrode 110B, the second electrode 120B, and the pressure-sensitive conductive layer 210B included in the pressure-sensitive sensor in the modified example.
- the shapes of the first electrode 110B, the second electrode 120B, and the pressure-sensitive conductive layer 210B may be, for example, shapes as shown in FIG. good. That is, the areas of the first electrode and the second electrode can be made wider than in the pressure-sensitive sensor 10 according to the above embodiment.
- the pressure-sensitive conductive layer has minute unevenness. The unevenness and the distribution of the conductive material affect the output accuracy of the pressure sensor.
- the first electrode 110 was connected to the positive electrode of the power source V1, and the second electrode 120 was connected to the negative electrode of the power source V1.
- the connection relationship between the power supply V1 and each electrode is not limited to this.
- the first electrode 110 may be connected to the negative pole of the power supply V1
- the second electrode 120 may be connected to the positive pole of the power supply V1.
- the pressure-sensitive conductive layer 210 and the third electrode 220 each have a substantially circular shape in plan view.
- the shape of each of the pressure-sensitive conductive layer 210 and the third electrode 220 does not necessarily have to be substantially circular.
- the shape of each of the pressure-sensitive conductive layer 210 and the third electrode 220 may be rectangular.
- each of the first electrode 110, the second electrode 120 and the third electrode 220 is made of the same material.
- each of the first electrode 110, the second electrode 120 and the third electrode 220 does not necessarily have to be made of the same material.
- Each of the first electrode 110, the second electrode 120 and the third electrode 220 may be made of different materials, for example.
- L1/T1 was larger than 40, where L1 was the distance between the first electrode 110 and the second electrode 120 and T1 was the thickness of the pressure-sensitive conductive layer 210 .
- L1/T1 may be less than 40. At least, the distance L1 between the first electrode 110 and the second electrode 120 should be longer than the thickness T1 of the pressure-sensitive conductive layer 210 .
- 10, 10A, 10B pressure sensor 50 first sheet member, 60 second sheet member, 100, 200 base material, 110, 110B first electrode, 120, 120B second electrode, 210, 210A, 210B pressure sensitive conductive layer , 220 third electrode, V1 power supply.
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Abstract
Description
図1は、本実施の形態に従う感圧センサ10の平面の一部を模式的に示す図である。図2は、図1のII-II断面を模式的に示す図である。
上述のように、感圧センサ10においては、感圧導電層210が第3電極220を覆っている。この理由について次に説明する。一般的に、感圧センサにおいては、圧力に関する出力値が感圧センサに加えられる荷重の変化に対してより直線的に変化することが求められている。ここで、圧力に関する出力値は、例えば、オペアンプを用いることによって、双曲線で示される抵抗値出力が原点を通る電圧値出力に変換されたものである。
以上のように、本実施の形態に従う感圧センサ10においては、第2シート部材60において、感圧導電層210が第3電極220を覆っている。したがって、この感圧センサ10においては、感圧センサ10の使用時に、感圧導電層210及び第3電極220を介して、第1電極110及び第2電極120の一方から他方に向かって電流が流れる。この場合には、第2シート部材60に第3電極220が形成されていない場合と比較して、感圧導電層210の狭い範囲において電流が流れるため、感圧導電層210に起因する体積抵抗値は小さくなる。したがって、感圧センサ10によれば、感圧導電層210に起因する体積抵抗値が小さくなるため、感圧センサ10の直線性を改善することができる。
以上、実施の形態について説明したが、本発明は、上記実施の形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて、種々の変更が可能である。以下、変形例について説明する。
上述のように、第2シート部材60に第3電極220を形成することによって、例えば、櫛歯間の距離が長くなっても感圧センサの直線性は大きく低下しない。そもそも、各電極を櫛歯型にする必要もない。
上記実施の形態においては、電源V1の正極に第1電極110が接続され、電源V1の負極に第2電極120が接続された。しかしながら、電源V1と各電極との接続関係はこれに限定されない。例えば、電源V1の負極に第1電極110が接続され、電源V1の正極に第2電極120が接続されてもよい。
上記実施の形態において、感圧導電層210及び第3電極220の各々の形状は、平面視において略円形状であった。しかしながら、感圧導電層210及び第3電極220の各々の形状は、必ずしも略円形状である必要はない。例えば、感圧導電層210及び第3電極220の各々の形状は、矩形状であってもよい。
上記実施の形態において、第1電極110、第2電極120及び第3電極220の各々は同一の材料で構成された。しかしながら、第1電極110、第2電極120及び第3電極220の各々は、必ずしも同一の材料で構成されなくてもよい。第1電極110、第2電極120及び第3電極220の各々は、例えば、互いに異なる材料で構成されてもよい。
上記実施の形態において、第1電極110及び第2電極120間の距離をL1とし、感圧導電層210の厚みをT1とした場合に、L1/T1は40よりも大きかった。しかしながら、L1/T1は40よりも小さくてもよい。少なくとも、第1電極110及び第2電極120間の距離L1が感圧導電層210の厚みT1よりも長ければよい。
Claims (4)
- 圧力を検出するように構成された感圧センサであって、
第1シート部材と、
前記第1シート部材に重ねて配置された第2シート部材とを備え、
前記第1シート部材には、第1及び第2電極が形成されており、
前記第2シート部材には、感圧導電層によって覆われた第3電極が形成されており、
前記感圧センサの使用時には、前記第1及び第2電極間に電圧が印加され、
前記感圧センサが使用中であるか否かにかかわらず、前記第1及び第2電極の各々は、前記感圧導電層に接触している、感圧センサ。 - 前記第3電極は、前記第1及び第2電極と同一の材料で構成されている、請求項1に記載の感圧センサ。
- 前記第1及び第2電極間の距離をL1とし、前記感圧導電層の厚みをT1とした場合に、L1/T1は40よりも大きい、請求項1又は請求項2に記載の感圧センサ。
- 前記第1及び第2電極の各々は、櫛歯形状の部分を有している、請求項1から請求項3のいずれか1項に記載の感圧センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18/281,984 US20240159605A1 (en) | 2021-03-17 | 2022-02-25 | Pressure sensor |
KR1020237033778A KR20230157373A (ko) | 2021-03-17 | 2022-02-25 | 압력감지 센서 |
CN202280021211.6A CN117043562A (zh) | 2021-03-17 | 2022-02-25 | 压力传感器 |
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JP2021043131A JP2022142881A (ja) | 2021-03-17 | 2021-03-17 | 感圧センサ |
JP2021-043131 | 2021-03-17 |
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WO2022196289A1 true WO2022196289A1 (ja) | 2022-09-22 |
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PCT/JP2022/007875 WO2022196289A1 (ja) | 2021-03-17 | 2022-02-25 | 感圧センサ |
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US (1) | US20240159605A1 (ja) |
JP (1) | JP2022142881A (ja) |
KR (1) | KR20230157373A (ja) |
CN (1) | CN117043562A (ja) |
WO (1) | WO2022196289A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006513408A (ja) * | 2003-01-07 | 2006-04-20 | アイイーイー インターナショナル エレクトロニクス アンド エンジニアリング エス.エイ. | 微細構造化面をもつ弾性センサ層で構成される圧力センサ |
JP2009503867A (ja) * | 2005-07-29 | 2009-01-29 | スリーエム イノベイティブ プロパティズ カンパニー | 櫛歯状の力スイッチ及びセンサー |
CN212658366U (zh) * | 2020-07-10 | 2021-03-05 | 成都柔电云科科技有限公司 | 一种柔性压力传感器及阵列式压力检测装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001159569A (ja) | 1999-12-02 | 2001-06-12 | Denso Corp | 感圧センサ |
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-
2022
- 2022-02-25 KR KR1020237033778A patent/KR20230157373A/ko unknown
- 2022-02-25 US US18/281,984 patent/US20240159605A1/en active Pending
- 2022-02-25 CN CN202280021211.6A patent/CN117043562A/zh active Pending
- 2022-02-25 WO PCT/JP2022/007875 patent/WO2022196289A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006513408A (ja) * | 2003-01-07 | 2006-04-20 | アイイーイー インターナショナル エレクトロニクス アンド エンジニアリング エス.エイ. | 微細構造化面をもつ弾性センサ層で構成される圧力センサ |
JP2009503867A (ja) * | 2005-07-29 | 2009-01-29 | スリーエム イノベイティブ プロパティズ カンパニー | 櫛歯状の力スイッチ及びセンサー |
CN212658366U (zh) * | 2020-07-10 | 2021-03-05 | 成都柔电云科科技有限公司 | 一种柔性压力传感器及阵列式压力检测装置 |
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KR20230157373A (ko) | 2023-11-16 |
CN117043562A (zh) | 2023-11-10 |
US20240159605A1 (en) | 2024-05-16 |
JP2022142881A (ja) | 2022-10-03 |
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