WO2022196137A1 - Dispositif de génération de lumière synthétisée - Google Patents

Dispositif de génération de lumière synthétisée Download PDF

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Publication number
WO2022196137A1
WO2022196137A1 PCT/JP2022/003606 JP2022003606W WO2022196137A1 WO 2022196137 A1 WO2022196137 A1 WO 2022196137A1 JP 2022003606 W JP2022003606 W JP 2022003606W WO 2022196137 A1 WO2022196137 A1 WO 2022196137A1
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WO
WIPO (PCT)
Prior art keywords
light
optical waveguide
light source
photodetector
generating device
Prior art date
Application number
PCT/JP2022/003606
Other languages
English (en)
Japanese (ja)
Inventor
明 姫野
浩一 堀井
修 川崎
一樹 岩端
勇多 矢部
俊夫 勝山
祥治 山田
慧 中尾
Original Assignee
セーレンＫｓｔ株式会社
国立大学法人福井大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セーレンＫｓｔ株式会社, 国立大学法人福井大学 filed Critical セーレンＫｓｔ株式会社
Publication of WO2022196137A1 publication Critical patent/WO2022196137A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches

Definitions

  • the present invention is a combined light generating apparatus comprising a light source circuit composed of a light source and an optical waveguide for receiving light emitted from the light source, and an optical multiplexer for combining the light emitted from the plurality of light source circuits.
  • the present invention relates to a synthetic light generating device in which a photodetector for detecting leaked light from the optical waveguide is arranged on an over-cladding layer of the optical waveguide.
  • an optical multiplexer using a plurality of laser diodes as a light source has been known in a synthetic light generation device used as a light source for an image projection device such as a glasses-type terminal or a portable projector (see Patent Document 1).
  • the optical multiplexer is formed by stacking silicon oxide films with a low refractive index and a high refractive index on a silicon substrate using a known chemical vapor deposition method (CVD), sputtering, or the like, and then photolithography using a photomask. It is manufactured through the steps of patterning by lithography, laminating a low refractive index silicon oxide film, and forming an over-cladding layer.
  • CVD chemical vapor deposition method
  • the laser diode which is the light source
  • the laser diode is known to change or deteriorate depending on the environment during use such as temperature, humidity, static electricity, and power supply noise.
  • An optical communication module is known in which a photodetector is provided on the back side opposite to the back side to detect the light emitted to the back side and feedback control is performed to stabilize the output of the laser diode (see Patent Document 2 reference).
  • the photodetector is provided on the back side of the laser diode as in the optical communication module, the number of parts increases in the light propagation direction of the optical multiplexer, and there is a limit to miniaturization of the combined light generation device. There is a problem.
  • the diameter of the emitted light from the rear side is small, it takes time and effort to adjust the position with respect to the light receiving area of the photodetector, which increases the manufacturing cost.
  • the present invention has been made in view of such circumstances, and it is an object of the present invention to provide a synthetic light generating device in which the output of laser diodes is stable, which enables miniaturization and reduces manufacturing costs.
  • a combined light generating device comprising: a light source circuit composed of a light source and an optical waveguide for receiving light emitted from the light source; and an optical combiner for combining light emitted from a plurality of the light source circuits,
  • a synthetic light generating device characterized in that a photodetector for detecting leaked light from an optical waveguide is arranged on an overcladding layer of the optical waveguide.
  • an electrode is provided on the over-cladding layer of the optical waveguide in order to connect with the electrode provided on the lower surface of the photodetector.
  • the detector includes a plurality of light receiving areas.
  • the light sources in the plurality of light source circuits are laser diodes of at least three colors of red, green and blue.
  • the photodetector is arranged on the overcladding layer of the optical waveguide, and the leaked light leaking upward from the overcladding layer of the optical waveguide is detected and feedback-controlled to control the output of the light source.
  • the combined light generating device can be stabilized, and since the number of parts in the optical multiplexer does not increase in the light propagation direction, it is possible to reduce the size.
  • the present invention relates to a synthetic light generating device that reduces manufacturing costs because the position of detectors can be easily adjusted.
  • FIG. 1 is a perspective view of a synthetic light generation device of Example 1.
  • FIG. 3 is an enlarged perspective view of a light source circuit in the synthetic light generating device of Example 1.
  • FIG. FIG. 3 is a side view of the light source circuit of FIG. 2 as seen from the front right side;
  • FIG. 11 is a perspective view of a synthetic light generation device of Example 2;
  • FIG. 1 is a perspective view of a synthetic light generating device 100 of Example 1.
  • the synthetic light generating device 100 is composed of a light source 2 and an optical waveguide 3 for receiving light emitted from the light source. and an optical multiplexer 4 for multiplexing light emitted from the three light source circuits 101. Further, three photodetectors for detecting leakage light from the optical waveguide 3 are provided.
  • a device 5 is arranged on the overcladding layer of the optical waveguide 3, respectively.
  • the light source 2 is not present on the substrate 1, but the substrate 1 is expanded and extended in the direction of the light source 2 and a pedestal is formed, and the light source 2 is arranged on the pedestal. may
  • a set of two optical waveguide over-cladding layer upper surface electrodes 7 is provided on the upper surface of the over-cladding layer of the optical waveguide 3 corresponding to the photodetector 5, and the optical waveguide over-cladding layer
  • the upper surface electrode 7 can be provided by a known method such as a metal pattern formed by semiconductor processing technology such as LSI or printing using conductive ink.
  • the optical waveguide over-cladding layer upper surface electrode 7 may have any form, at least one of the pair of upper surface electrodes 7 may be replaced with another upper surface electrode 7 from the viewpoint of manufacturing cost reduction. It is preferably integrated with one of 7.
  • a laser diode, an edge emitting LED, or the like can be used for the light source 2, but it is preferable to use a laser diode. At least red, green and blue are used as the colors of the light source 2, but other colors such as yellow and purple may be additionally used.
  • the optical waveguide 3 and the optical multiplexer 4 are formed on a substrate 1 made of silicon or the like by using a known chemical vapor deposition method, an etching process, or the like, and forming an undercladding layer 9a (not shown, FIG. 3 to be described later). ), an optical waveguide 3, and an over-cladding layer 9b (not shown, see FIG. 3 described later).
  • the optical waveguide 3 and the optical multiplexer 4 may be manufactured in separate processes, but it is preferable to manufacture them simultaneously in one process from the viewpoint of manufacturing cost reduction.
  • a light source circuit 101 is composed of a light source 2 and an optical waveguide 3 into which light emitted from the light source 2 is incident. are combined using an appropriately designed directional coupler, Mach-Zehnder interferometer, or a combination thereof, and then emitted as one combined light.
  • the form of multiplexing of the optical multiplexer 4 can use any form.
  • a photodiode or the like having a light receiving region 6 on the lower surface is used as the photodetector 5, and the light receiving region 6 detects leaked light leaking upward from the over-cladding layer 9b of the waveguide 3, and a known feedback signal is detected.
  • a circuit (not shown) is used to feedback control the light source 2 to stabilize the output light from the light source 2 .
  • a set of two photodetector electrodes 8 corresponding to the over-cladding layer upper surface electrodes 7 of the optical waveguide 3 are provided on the lower surface of the photodetector 5 .
  • the optical waveguide over-cladding layer upper surface electrode 7 and the photodetector electrode 8 there are at least one electrode corresponding to each of the two electrodes only by arranging the photodetector 5 without requiring any particular position adjustment. are provided at positions where the corresponding electrodes are energized, but are preferably provided at positions where a pair of electrodes are energized together. If only at least one corresponding electrode is provided at the energized position, the energized position of the other one electrode is not particularly limited.
  • FIG. 2 is an enlarged perspective view of the light source circuit 101 in the synthetic light generation device 100 of Example 1.
  • FIG. The illustration of the optical waveguide over-cladding layer top electrode 7 and the photodetector electrode 8 is omitted.
  • the light source 2 and the optical waveguide 3 are directly connected and that 80% or more of the light emitted from the light source 2 is incident on the optical waveguide 3.
  • a lens may be used between the light source 2 and the optical waveguide 3 .
  • a photodetector 5 having a light receiving region 6 on its lower surface is disposed on the overcladding layer 9b (not shown, see FIG. 3 described later) of the optical waveguide 3 .
  • the light source 2 deteriorates due to the environment during use and the output light is reduced, the leaked light is also reduced at the same rate. Feedback control is performed so that the output light of 2 is stabilized.
  • FIG. 3 is a side view of the light source circuit 101 of FIG. 2 as seen from the front right side.
  • a cladding layer upper surface electrode 7 is provided, and the optical waveguide over-cladding layer upper surface electrode 7 is connected to two photodetector electrodes 8 via a bonding material 10 such as silver paste or eutectic solder.
  • the optical waveguide over-cladding layer upper surface electrode 7 and the photodetector electrode 8 must be provided at positions that do not interfere with detection of leaked light.
  • the space between the light receiving region 6 on the lower surface of the detector 5 and the over-cladding layer 9b is filled with a transparent resin used as a sealant or adhesive. can also be taken. It is desirable to use a sealant or adhesive having a refractive index higher than that of the over-cladding layer 9b in order to guide the light to the photodetector 5 more efficiently.
  • FIG. 4 is a perspective view of the synthetic light generation device 100 of Example 2, which is an integrated photodetector having three light receiving regions 6, whereas Example 1 uses three photodetectors 5. The difference is that 5 is used. By integrating the photodetector 5, manufacturing becomes easier, so that the manufacturing cost of the synthetic light generating device of the present invention can be further reduced.
  • the synthetic light generating device 100 of the present invention can stabilize the output light from the light source 2 by detecting leakage light leaking upward from the over-cladding layer 9b of the optical waveguide 3 and feedback-controlling the light source 2. can.
  • the most important issue is to shorten the length in the propagation direction of light, and the thickness of the combined light generation device 100 is small. However, there is little effect on miniaturization of the device.
  • the position of the photodetector 5 can be easily adjusted, so the manufacturing cost does not particularly increase.
  • the synthetic light generating device of the present invention can be used as a light source for image projection devices such as spectacle-type terminals and portable projectors. It is a light generating device.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Led Device Packages (AREA)
  • Semiconductor Lasers (AREA)

Abstract

L'invention concerne un dispositif de génération de lumière synthétisée pour lequel la sortie de diode laser est stable et qui permet une miniaturisation et réduit les coûts de fabrication.　Un dispositif de génération de lumière synthétisée (100) permet la stabilisation de la sortie d'une source de lumière (2) en plaçant un photodétecteur (5) au-dessus d'une couche de recouvrement (9b) d'un guide d'ondes optique (3) pour effectuer une détection et une commande de rétroaction de la lumière ayant fui à partir du guide d'ondes optique (3). Le nombre de composants dans la direction de propagation de la lumière d'un multiplexeur optique (4) n'augmente pas, ce qui permet une miniaturisation, et la position du photodétecteur (5) peut également être facilement ajustée en raison de la détection de la lumière de fuite générée sur la couche de recouvrement (9b) du guide d'ondes optique (3), ce qui permet de réduire les coûts de fabrication.
PCT/JP2022/003606 2021-03-17 2022-01-31 Dispositif de génération de lumière synthétisée WO2022196137A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021043484A JP2022143133A (ja) 2021-03-17 2021-03-17 合成光生成装置
JP2021-043484 2021-03-17

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Publication Number Publication Date
WO2022196137A1 true WO2022196137A1 (fr) 2022-09-22

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023162846A1 (fr) * 2022-02-25 2023-08-31 京セラ株式会社 Substrat de guide d'ondes optique, boîtier de guide d'ondes optique et module de source de lumière

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001215371A (ja) * 2000-02-04 2001-08-10 Sumitomo Osaka Cement Co Ltd モニタ付光導波路型素子
US20050220437A1 (en) * 2004-04-02 2005-10-06 Dong-Su Kim Optical connection block, optical module, and optical axis alignment method using the same
JP2006091878A (ja) * 2004-09-20 2006-04-06 Fujitsu Ltd アタッチメント型光カップラー装置
JP2008089778A (ja) * 2006-09-29 2008-04-17 Sumitomo Osaka Cement Co Ltd 光デバイスおよび光デバイスの製造方法
US20180259728A1 (en) * 2017-03-07 2018-09-13 International Business Machines Corporation Fluid control structure
WO2020213067A1 (fr) * 2019-04-16 2020-10-22 日本電信電話株式会社 Circuit de multiplexage optique et source de lumière

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001215371A (ja) * 2000-02-04 2001-08-10 Sumitomo Osaka Cement Co Ltd モニタ付光導波路型素子
US20050220437A1 (en) * 2004-04-02 2005-10-06 Dong-Su Kim Optical connection block, optical module, and optical axis alignment method using the same
JP2006091878A (ja) * 2004-09-20 2006-04-06 Fujitsu Ltd アタッチメント型光カップラー装置
JP2008089778A (ja) * 2006-09-29 2008-04-17 Sumitomo Osaka Cement Co Ltd 光デバイスおよび光デバイスの製造方法
US20180259728A1 (en) * 2017-03-07 2018-09-13 International Business Machines Corporation Fluid control structure
WO2020213067A1 (fr) * 2019-04-16 2020-10-22 日本電信電話株式会社 Circuit de multiplexage optique et source de lumière

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023162846A1 (fr) * 2022-02-25 2023-08-31 京セラ株式会社 Substrat de guide d'ondes optique, boîtier de guide d'ondes optique et module de source de lumière

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