WO2022196015A1 - 分析装置 - Google Patents
分析装置 Download PDFInfo
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- WO2022196015A1 WO2022196015A1 PCT/JP2021/047283 JP2021047283W WO2022196015A1 WO 2022196015 A1 WO2022196015 A1 WO 2022196015A1 JP 2021047283 W JP2021047283 W JP 2021047283W WO 2022196015 A1 WO2022196015 A1 WO 2022196015A1
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- WIPO (PCT)
- Prior art keywords
- yoke
- cylindrical
- moving
- mirror
- fixed
- Prior art date
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- 238000004458 analytical method Methods 0.000 title claims abstract description 15
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 12
- 230000004907 flux Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
Definitions
- the present invention relates to an analyzer that includes a drive unit that moves the position of a mirror.
- the Michelson two-beam interferometer used for FTIR uses a beam splitter to split infrared light emitted from an infrared light source into two directions, a fixed mirror and a movable mirror. The beam is divided into two beams, and the light reflected by the fixed mirror and returned is combined with the light reflected by the movable mirror and returned by the beam splitter.
- FTIR by moving a movable mirror back and forth in the incident optical axis direction (back and forth direction), the difference in the optical path lengths of the two split beams is changed to generate interference light (International Publication No. 2016/166872). No.: Patent Document 1).
- a voice coil motor (hereinafter also referred to as VCM) is used as a drive unit that moves the position of the movable mirror.
- VCM is a driving unit that obtains a thrust force of the moving unit by arranging a moving unit having a coil in a magnetic field and generating an electromagnetic force by applying a current to the coil.
- the VCM is structurally capable of high-speed control of the moving part, and is excellent in driving such as reciprocating movement of the moving part at a constant speed.
- the thrust of the moving part varies depending on the position of the moving part.
- the thrust force of the moving part is insufficient, and there is a problem that the moving part cannot reciprocate at a constant speed.
- FTIR a movable mirror is fixed to a moving part and reciprocated.
- the VCM cannot reciprocate the moving part at a constant speed, there is a problem that the reproducibility of measurement data decreases.
- the present invention was made to solve this problem, and the purpose is to provide a drive unit that can reciprocate the moving unit at a constant speed in a wider stroke range without increasing the size.
- One object is to provide an apparatus.
- An analysis device is an analysis device that includes a movable mirror whose position can be moved, and a driving unit that moves the position of the movable mirror.
- the drive unit includes a cylinder portion to which the moving mirror is fixed on one surface, and a voice coil motor connected to the other surface of the cylinder portion to reciprocate the cylinder portion.
- the voice coil motor includes a cylindrical yoke, magnets provided at both ends of the yoke, a cylindrical fixing portion that encloses the yoke and that fixes the yoke with the magnets at the bottom, and a plurality of windows.
- a moving part to which a cylindrical coil arranged between the yoke and the fixed part is fixed; one end of which is fixed to the moving part; and a plurality of supports connected on the other side of the.
- the cover is provided on the opening surface of the fixing unit, and the support provided through the window of the cover supports the cylinder for fixing the mirror.
- the moving part can be reciprocated with .
- the mirror can be reciprocated over a wider range, so measurement with high resolution is possible.
- FIG. 1 is a block diagram showing the configuration of an analysis device according to an embodiment
- FIG. FIG. 3 is a cross-sectional view showing the configuration of the drive section of the embodiment
- It is a cross-sectional perspective view which shows the structure of the drive part of embodiment.
- It is a perspective view which shows the structure of the drive part of embodiment.
- It is a graph which shows the thrust of the drive part of embodiment.
- It is a graph which shows the thrust of the drive part of a comparative example.
- It is a figure which shows the structure of the cover part of a modification.
- FIG. 1 is a block diagram showing the configuration of an analysis device according to an embodiment.
- FTIR will be described as an example of an analysis apparatus.
- the analysis apparatus of the embodiment is not limited to FTIR.
- any analysis apparatus equipped with a device for moving the position of a mirror such as nonlinear Raman spectroscopy to provide an optical path length difference can be similarly applied. be able to.
- a drive unit 100 is connected to the movable mirror 450 , and the drive unit 100 moves the position of the movable mirror 450 .
- the infrared light emitted from the infrared light source 410 passes through the condenser mirror 431a and the collimator mirror 431b and is split into two by the beam splitter 440, one of which is the fixed mirror 460 and the other of which is the movable mirror. It is reflected at 450 and combined again along the same optical path to become infrared interference light.
- the infrared interference light When the infrared interference light is collected by the parabolic mirror 432, enters the sample chamber 470, and irradiates the sample S, the sample S undergoes absorption at a wavelength specific to the sample.
- the absorbed infrared interference light passes through an ellipsoidal mirror 433, is detected by an infrared photodetector 480, and is Fourier transformed to create a power spectrum.
- FIG. 2 is a cross-sectional view showing the configuration of the driving section 100 of the embodiment.
- FIG. 3 is a cross-sectional perspective view showing the configuration of the drive unit 100 of the embodiment.
- the drive unit 100 includes a cylindrical portion 52 to which the movable mirror 450 is fixed on one surface, and a VCM 1 connected to the surface of the cylindrical portion 52 opposite to the surface to which the movable mirror 450 is fixed (the other surface). ing.
- the VCM 1 moves the position of the movable mirror 450 by reciprocating the cylindrical portion 52 .
- a movable mirror 450 is fixed to the tip of the cylindrical portion 52 (on the left side in FIG. 2), and the cylindrical portion 52 and the movable mirror 450 are supported by a linear motion mechanism to reciprocate.
- the linear motion mechanism is, for example, a linear guide, and a guide 55b that supports the cylindrical portion 52 linearly moves on the rail 55a.
- the direct-acting mechanism is not limited to a linear guide in which the guide 55b is contact-supported on the rail 55a, and may be configured such that the guide is supported on the rail in a non-contact manner such as magnetic levitation or air bearing.
- the VCM 1 has a tubular fixed portion 73 corresponding to the outer yoke and a tubular yoke 75 fixed to the bottom surface of the fixed portion 73 corresponding to the inner yoke.
- the fixed portion 73 and the yoke 75 are made of iron (made of a magnetic material), and the fixed portion 73 includes the yoke 75 so that the central axis of the fixed portion 73 and the central axis of the yoke 75 are aligned.
- Magnets 74a and 74b are provided at both ends of the yoke 75 in the central axis direction (horizontal direction in the figure). Therefore, the yoke 75 is fixed to the bottom surface of the fixed portion 73 with the magnet 74b interposed therebetween.
- the magnet 74a, the yoke 75, and the magnet 74b are fixed to the bottom surface of the fixed portion 73 in this order.
- a lid portion 76 is provided on the opening surface of the fixing portion 73 facing the bottom surface.
- the VCM1 magnets are provided at both ends of the yoke 75, and two magnets are used. Therefore, a magnet is provided at one end of the yoke 75, and the thrust force of the moving part can be increased in the VCM 1 compared to the VCM using one magnet. That is, in the VCM 1, by increasing the magnetic flux density in the fixed portion 73, it is possible to increase the thrust force of the moving portion and secure the homogeneity of the magnetic field to widen the moving range of the moving portion (lengthen the stroke).
- the magnets 74a and 74b are the same magnets, they may have different shapes as long as they have the same magnetic force.
- the magnetic flux leaking from the opening surface of the fixed portion 73 is confined by the lid portion 76 made of a material having a higher magnetic permeability than air. Therefore, in the VCM 1, it is possible to suppress the decrease in the magnetic field on the opening side of the fixed portion 73, and the range in which the moving portion is moved is widened (the stroke is long) while ensuring the homogeneity of the magnetic field up to the opening side. .
- the VCM 1 is provided with a moving portion 72a in which a cylindrical coil is fixed between the yoke 75 and the fixed portion 73.
- a support portion 72b for connecting with the cylindrical portion 52 is provided at one end of the moving portion 72a.
- Four support portions 72 b are provided through windows 77 provided in the lid portion 76 .
- the moving portion 72a and the four supporting portions 72b may be integrally formed as a bobbin around which the conductor wire of the coil is wound. Of course, the four supporting portions 72b may be connected later to the moving portion 72a around which the conductor wire of the coil is wound.
- An elongated slit 73a extending in the direction of the central axis is formed on the side surface of the fixing portion 73 .
- the slits 73a are formed symmetrically with respect to the central axis, and are formed vertically across the central axis in FIG.
- the moving part 72a has an annular coil with a conductive wire wound around its outer peripheral surface. not shown).
- FIG. 4 is a perspective view showing the configuration of the drive section of the embodiment.
- the lid portion 76 is composed of four parts 76a-76d. Four windows 77 are formed by combining these four parts 76a to 76d.
- the lid portion 76 cannot transmit the thrust force of the moving portion 72 a to the cylindrical portion 52 and the moving mirror 450 by simply covering the opening surface of the fixed portion 73 . Therefore, in the VCM 1 , four support portions 72 b connected to the cylindrical portion 52 and the moving mirror 450 through the windows 77 transmit the thrust of the moving portion 72 a to the cylindrical portion 52 and the moving mirror 450 .
- four supporting portions 72b are provided symmetrically with respect to the central axis, and the supporting portions 72b extend linearly from the moving portion 72a.
- the natural frequency of the moving portion 72a itself can be increased, and the moving mirror 450 can be uniformly reciprocated.
- the lid portion 76 is divided into four parts 76a to 76d as shown in FIG. are combined to form four windows 77 .
- the VCM 1 can be easily assembled.
- the direction of removal of the four parts 76a to 76d is the radial direction.
- FIG. 5 is a graph showing the thrust force of the drive unit 100 according to the embodiment.
- FIG. 6 is a graph showing the thrust of the drive unit of the comparative example.
- the driving section of the comparative example does not employ the configuration of the VCM 1 of the driving section 100, and has a configuration in which the magnet 74a and the lid section 76 are removed from the VCM 1 shown in FIG.
- FIG. 5 the change in thrust at each position of the coil (moving part 72a) is shown with the horizontal axis representing the coil position and the vertical axis representing the thrust.
- the coil positions and thrust values shown in FIGS. 5 and 6 are shown as standardized level values as comparable values.
- the uniformity of the thrust is ensured from the 0 level to the 56th level of the coil position, and it is possible to ensure the use range for moving the movable mirror 450.
- FIG. 6 similarly shows changes in thrust at each position of the coil (moving part), with the horizontal axis representing the coil position and the vertical axis representing the thrust.
- the uniformity of the thrust force is ensured from the 0 level to the 40 level of the coil position, and it is possible to ensure the use range for moving the movable mirror. Therefore, in the drive unit 100, the use range can be widened by 16 levels compared to the drive unit of the comparative example, and the use range is expanded by about 1.4 times.
- the drive unit 100 secures an equivalent thrust while expanding the range of use compared to the drive unit of the comparative example.
- FIGS. 5 and 6 show graphs showing changes in thrust at each position when current is applied to the coil while changing the current value within a predetermined range. As can be seen from FIGS. 5 and 6, substantially the same relationship between the coil position and the thrust force can be obtained even if the current value applied to the coil is changed within a predetermined range.
- FIG. 7 is a diagram showing a configuration of a lid portion of a modified example. As shown in FIG. 7, the lid portion 760 is provided with five windows 77, and thus is composed of five parts 760a to 760e.
- the size (area) of each part must be reduced in order to ensure ease of assembly.
- the area of the lid is reduced by about 5% compared to when the lid is divided into four parts.
- magnetic flux leakage from the lid increases and the thrust of the driving section decreases.
- each of the plurality of parts has a shape that can be pulled out in the radial direction of the lid.
- FIG. 8 is a cross-sectional perspective view showing the configuration of the drive unit of the modified example.
- drive unit 100a shown in FIG. 8 the same components as those of drive unit 100 shown in FIG. 2 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
- the driving section 100a supports the cylindrical section 52 and the movable mirror 450 with two supporting sections 72b instead of supporting the cylindrical section 52 and the movable mirror 450 with the four supporting sections 72b.
- two supporting portions 72b are provided symmetrically with respect to the central axis, and the supporting portions 72b extend linearly from the moving portion 72a.
- the natural frequency of the moving portion 72a itself is higher than when the moving portion 72a and the cylindrical portion 52 are connected by the four support portions 72b. becomes lower.
- the driving portion 100a can reciprocate the moving mirror 450 uniformly. can be made
- the drive section 100a the vibration in the direction in which the two support sections 72b are not provided increases. Therefore, in order to reduce the vibration, the drive section preferably supports the cylindrical section 52 and the movable mirror 450 with three support sections 72b.
- the lid portion 76 is divided into two parts as shown in FIG. 77.
- the assembling efficiency of the drive unit 100a is improved.
- An analysis device includes a movable mirror (450) whose position can be moved, and a drive unit (100, 100a) that moves the position of the movable mirror (450).
- the driving part (100, 100a) is a driving part for moving the position of the movable mirror (450), and is composed of a cylindrical part (52) fixing the mirror on one side and a cylindrical part (52) on the other side of the cylindrical part.
- a voice coil motor (70) that is connected at the surface and reciprocates the cylindrical portion, the voice coil motor comprising a cylindrical yoke (75), magnets (74a, 74b) provided at both ends of the yoke;
- a fixing part (73) having a cylindrical shape containing the yoke and fixing the yoke provided with a magnet at the bottom surface, a lid part (76) provided with a plurality of windows (77) and covering the opening surface of the fixing part, and the yoke.
- the cover is provided on the opening surface of the fixing unit, and the support provided through the window of the cover supports the cylinder for fixing the mirror, it is possible to increase the size of the drive unit. It is possible to reciprocate the moving part in a wider range than that.
- the analyzer described in item 1 since the mirror can be reciprocated in a wider range, measurement with high wavenumber resolution is possible.
- the lid portion is composed of a plurality of parts (76a to 76d, 760a to 760e), and a window is configured by combining the plurality of parts.
- the lid is composed of a plurality of parts, it is possible to improve the ease of assembly of the voice coil motor.
- the plurality of support portions is at least three or more.
- the uniformity of the magnetic flux density in the fixed part 73 is increased.
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
図1は、実施の形態の分析装置の構成を示すブロック図である。本実施の形態では、分析装置の一例としてFTIRを例に説明する。なお、実施の形態の分析装置は、FTIRに限定されるものではなく、例えば、非線形ラマン分光法などの鏡の位置を移動させ光路長差をつける装置を備える分析装置であれば同様に適用することができる。
FTIRでは、移動鏡450の移動速度を一定に保つことで、スペクトルを高い再現性で取得することができる。また、FTIRでは、移動鏡450を移動させる範囲をより広い範囲にすることで精度の高い測定が可能となる。本実施の形態では、移動鏡450を移動させる駆動部100にVCMを用いている。図2は、実施の形態の駆動部100の構成を示す断面図である。また、図3は、実施の形態の駆動部100の構成を示す断面斜視図である。
蓋部76の構成について説明する。図4は、実施の形態の駆動部の構成を示す斜視図である。図4に示すように、蓋部76は、4つのパーツ76a~76dで構成されている。この4つのパーツ76a~76dを組み合わせることで4つの窓77が構成される。蓋部76は、固定部73の開口面を単純に覆うだけでは筒部52や移動鏡450に移動部72aの推力を伝達することができない。そのため、VCM1では、窓77を通って筒部52や移動鏡450に接続される4本の支持部72bで、筒部52や移動鏡450に移動部72aの推力を伝達している。
駆動部100の推力の均一性について説明する。図5は、実施の形態の駆動部100の推力を示すグラフである。図6は、比較例の駆動部の推力を示すグラフである。比較例の駆動部は、駆動部100が有するVCM1の構成を採用しておらず、図2に示すVCM1から磁石74aおよび蓋部76を除いた構成である。
(1) 図4で示したように蓋部76は、4つのパーツ76a~76dで構成されると説明した。しかし、これに限定されず、蓋部は、窓の数と同じ数の複数のパーツで構成されてもよい。図7は、変形例の蓋部の構成を示す図である。図7で示したように蓋部760には、5つの窓77が設けられるので、5つのパーツ760a~760eで構成される。
上述した複数の例示的な実施形態は、以下の態様の具体例であることが当業者により理解される。
Claims (5)
- 位置を移動させることが可能な移動鏡と、
前記移動鏡の位置を移動させる駆動部と、を備える分析装置であって、
前記駆動部は、
一方の面に前記移動鏡を固定する筒部と、
前記筒部の他方の面で接続され、前記筒部を往復移動させるボイスコイルモータと、を備え、
前記ボイスコイルモータは、
筒状のヨークと、
前記ヨークの両端に設けられる磁石と、
前記ヨークを内包する筒状で、前記磁石を設けた前記ヨークを底面で固定する固定部と、
複数の窓が設けられ、前記固定部の開口面を覆う蓋部と、
前記ヨークと前記固定部との間に配置される筒状のコイルが固定された移動部と、
前記移動部に一端が固定され、他端が前記窓を通って前記筒部の他方の面で接続される複数の支持部と、を含む、分析装置。 - 前記蓋部は、複数のパーツで構成され、前記複数のパーツを組み合わせることで前記窓が構成される、請求項1に記載の分析装置。
- 前記蓋部は、前記窓の数と同じ数の前記複数のパーツで構成される、請求項2に記載の分析装置。
- 前記複数の支持部は、少なくとも3本以上である、請求項1~請求項3のいずれか1項に記載の分析装置。
- 前記ヨークの一端に設けられる前記磁石と他端に設けられる前記磁石とは、同じ磁力を有する、請求項1~請求項4のいずれか1項に記載の分析装置。
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JP2023506761A JP7464190B2 (ja) | 2021-03-18 | 2021-12-21 | 分析装置 |
CN202180094232.6A CN116868491A (zh) | 2021-03-18 | 2021-12-21 | 分析装置 |
US18/278,616 US20240151510A1 (en) | 2021-03-18 | 2021-12-21 | Analysis device |
EP21931757.5A EP4311091A1 (en) | 2021-03-18 | 2021-12-21 | Analysis device |
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Citations (5)
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JP2016142527A (ja) * | 2015-01-29 | 2016-08-08 | 株式会社島津製作所 | フーリエ変換型分光光度計 |
WO2016166872A1 (ja) | 2015-04-16 | 2016-10-20 | 株式会社島津製作所 | フーリエ変換型分光光度計 |
WO2018020847A1 (ja) * | 2016-07-25 | 2018-02-01 | 株式会社島津製作所 | ボイスコイルモータ、並びに、それを備える移動鏡ユニット及び干渉分光光度計 |
WO2018193499A1 (ja) * | 2017-04-17 | 2018-10-25 | 株式会社島津製作所 | フーリエ変換型赤外分光光度計 |
JP2019158348A (ja) * | 2018-03-07 | 2019-09-19 | 株式会社島津製作所 | 干渉分光光度計及び二光束干渉計 |
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2021
- 2021-12-21 WO PCT/JP2021/047283 patent/WO2022196015A1/ja active Application Filing
- 2021-12-21 JP JP2023506761A patent/JP7464190B2/ja active Active
- 2021-12-21 US US18/278,616 patent/US20240151510A1/en active Pending
- 2021-12-21 CN CN202180094232.6A patent/CN116868491A/zh active Pending
- 2021-12-21 EP EP21931757.5A patent/EP4311091A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016142527A (ja) * | 2015-01-29 | 2016-08-08 | 株式会社島津製作所 | フーリエ変換型分光光度計 |
WO2016166872A1 (ja) | 2015-04-16 | 2016-10-20 | 株式会社島津製作所 | フーリエ変換型分光光度計 |
WO2018020847A1 (ja) * | 2016-07-25 | 2018-02-01 | 株式会社島津製作所 | ボイスコイルモータ、並びに、それを備える移動鏡ユニット及び干渉分光光度計 |
WO2018193499A1 (ja) * | 2017-04-17 | 2018-10-25 | 株式会社島津製作所 | フーリエ変換型赤外分光光度計 |
JP2019158348A (ja) * | 2018-03-07 | 2019-09-19 | 株式会社島津製作所 | 干渉分光光度計及び二光束干渉計 |
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CN116868491A (zh) | 2023-10-10 |
JPWO2022196015A1 (ja) | 2022-09-22 |
US20240151510A1 (en) | 2024-05-09 |
JP7464190B2 (ja) | 2024-04-09 |
EP4311091A1 (en) | 2024-01-24 |
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