US20240151510A1 - Analysis device - Google Patents

Analysis device Download PDF

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Publication number
US20240151510A1
US20240151510A1 US18/278,616 US202118278616A US2024151510A1 US 20240151510 A1 US20240151510 A1 US 20240151510A1 US 202118278616 A US202118278616 A US 202118278616A US 2024151510 A1 US2024151510 A1 US 2024151510A1
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United States
Prior art keywords
moving
yoke
mirror
cylindrical
parts
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US18/278,616
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English (en)
Inventor
Takahisa Araki
Kota NAGASAO
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Shimadzu Corp
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Shimadzu Corp
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Publication date
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Assigned to SHIMADZU CORPORATION reassignment SHIMADZU CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ARAKI, TAKAHISA, NAGASAO, Kota
Publication of US20240151510A1 publication Critical patent/US20240151510A1/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets

Definitions

  • the present invention relates to an analysis device including a driving part that moves a position of a mirror.
  • a Michelson two-beam interferometer used in a Fourier transform infrared spectroscope has a configuration in which an infrared light emitted from an infrared light source is divided into two directions by a beam splitter toward a fixed mirror and a moving mirror, and the light reflected from the fixed mirror and the light reflected from the moving mirror are combined again by the beam splitter.
  • FTIR Fourier transform infrared spectroscope
  • a voice coil motor (hereinafter also referred to as a VCM) is used as a driving part that moves the position of the moving mirror.
  • the VCM is a driving part that obtains a thrust of a moving part according to an electromagnetic force generated by arranging the moving part provided with a coil in a magnetic field and passing a current through the coil. Further, the VCM is capable of obtaining high-speed control on the moving part in its structure and is excellent in driving such as reciprocating the moving part at a constant speed.
  • the thrust of the moving part varies depending on the position of the moving part.
  • the moving mirror is fixed to the moving part and reciprocated, but in the case where the VCM cannot reciprocate the moving part at a constant speed, there is a problem of decreased reproducibility of measurement data.
  • the present invention has been made to solve the above problems, and an objective thereof is to provide an analysis device including a driving part capable of reciprocating a moving part at a constant speed in a wider stroke range without an increase in size.
  • An analysis device includes a moving mirror and a driving part.
  • a position of the moving mirror is movable.
  • the driving part moves the position of the moving mirror.
  • the driving part includes a cylindrical part and a voice coil motor.
  • the moving mirror is fixed on one surface of the cylindrical part.
  • the voice coil motor is connected at another surface of the cylindrical part and reciprocates the cylindrical part.
  • the voice coil motor includes a yoke in a cylindrical shape, magnets provided at two ends of the yoke, a fixing part, a lid part, a moving part, and a plurality of support parts.
  • the fixing part is in a cylindrical shape enclosing the yoke and fixes, at a bottom surface, the yoke provided with the magnets.
  • the lid part is provided with a plurality of windows and covers an opening surface of the fixing part.
  • the moving part is arranged between the yoke and the fixing part, and a coil in a cylindrical shape is fixed on the moving part.
  • the plurality of support parts each include one end fixed to the moving part and another end connected at the another surface of the cylindrical part through the window.
  • the moving part can be reciprocated in a wider range without an increase in size. Further, in the analysis device described above, since the mirror can be reciprocated in a wider range, it is possible to achieve measurements with high resolution.
  • FIG. 1 is a block diagram showing a configuration of an analysis device according to an embodiment.
  • FIG. 2 is a cross-sectional view showing a configuration of the driving part according to the embodiment.
  • FIG. 3 is a cross-sectional perspective view showing the configuration of the driving part according to the embodiment.
  • FIG. 4 is a perspective view showing the configuration of the driving part according to the embodiment.
  • FIG. 5 is a graph showing a thrust of the driving part according to the embodiment.
  • FIG. 6 is a graph showing a thrust of a driving part according to a comparative example.
  • FIG. 7 is a view showing a configuration of a lid part according to a modification example.
  • FIG. 8 is a cross-sectional perspective view showing a configuration of a driving part according to a modification example.
  • FIG. 1 is a block diagram showing a configuration of an analysis device according to an embodiment.
  • an FTIR is described and illustrated as an example of the analysis device.
  • the analysis device of the embodiment is not limited to the FTIR, but may be similarly applied to any analysis device including a device that moves a position of a mirror and creates an optical path length difference, for example, in nonlinear Raman spectroscopy.
  • the FTIR shown in FIG. 1 includes a main interferometer composed of an infrared light source 410 , a condenser mirror 431 a , a collimator mirror 431 b , a beam splitter 440 , a moving mirror 450 , and a fixed mirror 460 , all accommodated in an interferometer chamber 400 .
  • a driving part 100 is connected to the moving mirror 450 , and the driving part 100 moves the position of the moving mirror 450 .
  • an infrared light emitted from the infrared light source 410 is split into two portions by the beam splitter 440 after passing by the condenser mirror 431 a and the collimator mirror 431 b .
  • One portion is reflected by the fixed mirror 460
  • the other portion is reflected by the moving mirror 450
  • the two portions are combined again at the same optical path to form an infrared interference light.
  • the infrared interference light is condensed by a parabolic mirror 432 and enters a sample chamber 470 , and upon irradiation onto a sample S, it undergoes absorption at a wavelength specific to the sample S.
  • the infrared interference light that has undergone absorption passes by an ellipsoidal mirror 433 , is detected by an infrared light detector 480 , and is Fourier transformed to generate a power spectrum.
  • FIG. 2 is a cross-sectional view showing a configuration of the driving part 100 according to the embodiment.
  • FIG. 3 is a cross-sectional perspective view showing the configuration of the driving part 100 according to the embodiment.
  • the driving part 100 includes a cylindrical part 52 on one surface of which the moving mirror 450 is fixed, and a VCM 1 connected at a surface (another surface) of the cylindrical part 52 opposite to the surface on which the moving mirror 450 is fixed.
  • the VCM 1 moves the position of the moving mirror 450 by reciprocating the cylindrical part 52 .
  • the moving mirror 450 is fixed to a tip (left side in FIG. 2 ) of the cylindrical part 52 , and the cylindrical part 52 and the moving mirror 450 are supported by a linear motion mechanism to undergo reciprocation.
  • the linear motion mechanism is, for example, a linear guide in which a guide 55 b supporting the cylindrical part 52 undergoes a linear motion on a rail 55 a .
  • the linear motion mechanism is not limited to a linear guide in which the guide 55 b is contact-supported on the rail 55 a , but may also be configured such that the guide is supported on the rail in a non-contact manner such as magnetic levitation or air bearings.
  • the VCM 1 includes a fixing part 73 in a cylindrical shape corresponding to an outer yoke, and a yoke 75 in a cylindrical shape corresponding to an inner yoke and fixed to a bottom surface of the fixing part 73 .
  • the fixing part 73 and the yoke 75 are made of iron (made of magnetic material), and the fixing part 73 encloses the yoke 75 such that a central axis of the fixing part 73 coincides with a central axis of the yoke 75 .
  • Magnets 74 a and 74 b are provided at two ends of the yoke 75 in a central axis direction (left-right direction in the figure).
  • the yoke 75 is fixed to the bottom surface of the fixing part 73 with the magnet 74 b interposed therebetween.
  • the magnet 74 a , the yoke 75 , and the magnet 74 b are fixed to the bottom surface of the fixing part 73 in a sequence of the magnet 74 a , the yoke 75 , and the magnet 74 b .
  • a lid part 76 is provided at an opening surface of the fixing part 73 opposed to the bottom surface.
  • the VCM 1 magnets are provided at two ends of the yoke 75 , and two magnets are used.
  • the thrust of a moving part can be increased.
  • the thrust of the moving part can be increased and uniformity of the magnetic field can be ensured to expand the range of moving the moving part (lengthen a stroke).
  • the magnet 74 a and the magnet 74 b are the same magnet, their shapes may also be different as long as their magnetic forces are the same.
  • a magnetic flux leaking from the opening surface of the fixing part 73 is confined by the lid part 76 formed of a material with higher magnetic permeability than air.
  • the lid part 76 formed of a material with higher magnetic permeability than air.
  • the VCM 1 is provided with a moving part 72 a , on which a coil in a cylindrical shape is fixed, between the yoke 75 and the fixing part 73 .
  • a support part 72 b for connecting with the cylindrical part 52 is provided at one end of the moving part 72 a .
  • Four support parts 72 b are provided through windows 77 provided at the lid part 76 .
  • the moving part 72 a and the four support parts 72 b may be integrally formed as a bobbin for winding a coil wire. Of course, the four support parts 72 b may also be formed to be connected afterwards to the moving part 72 a around which a coil wire has been wound.
  • a slit 73 a in a long hole shape extending in the central axis direction is formed at a lateral surface of the fixing part 73 .
  • the slit 73 a is symmetrically formed with respect to the central axis and is formed in an up-down direction with the central axis interposed therebetween in FIG. 2 .
  • the moving part 72 a includes, on an outer peripheral surface, an annular-shaped coil wound with a wire, and the coil is electrically connected with a power source (not shown) via a power supply terminal (power supply line) 72 c arranged to penetrate the slit 73 a .
  • the coil upon passing a current through the coil of the moving part 72 a via the power supply terminal 72 c , the coil receives an electromagnetic force (Lorentz force) due to the magnetic field formed between the fixing part 73 and yoke 75 and moves in the central axis direction, which thereby reciprocates the moving mirror 450 fixed to the cylindrical part 52 .
  • an electromagnetic force (Lorentz force) due to the magnetic field formed between the fixing part 73 and yoke 75 and moves in the central axis direction, which thereby reciprocates the moving mirror 450 fixed to the cylindrical part 52 .
  • FIG. 4 is a perspective view showing the configuration of the driving part according to the embodiment.
  • the lid part 76 is composed of four parts 76 a to 76 d .
  • four windows 77 are formed.
  • the lid part 76 could not transmit the thrust of the moving part 72 a to the cylindrical part 52 or the moving mirror 450 by simply covering the opening surface of the fixing part 73 .
  • the thrust of the moving part 72 a is transmitted to the cylindrical part 52 and the moving mirror 450 by the four support parts 72 b connected to the cylindrical part 52 and the moving mirror 450 through the windows 77 .
  • one support part 72 b from the central axis to transmit the thrust of the moving part 72 a to the cylindrical part 52 and the moving mirror 450 .
  • the moving mirror 450 is connected to a tip of one support part 72 b and the moving part 72 a is reciprocated, with the mechanical rigidity of the moving mirror 450 decreasing and the resonance frequency decreasing, an oscillation phenomenon during high-speed driving occurs and driving at a constant speed cannot be performed.
  • the FTIR it is necessary to reciprocate the moving mirror 450 uniformly to obtain high reproducibility, so it is necessary to transmit the thrust of the moving part 72 a to the cylindrical part 52 or the moving mirror 450 by a plurality of support parts 72 b.
  • FIG. 4 four support parts 72 b are symmetrically provided with respect to the central axis, and the support parts 72 b extend in a straight line from the moving part 72 a .
  • the lid part 76 is divided into four parts 76 a to 76 d , and the four parts 76 a to 76 d are combined to form the four windows 77 .
  • removal directions of the four parts 76 a to 76 d are respectively radial directions.
  • FIG. 5 is a graph showing the thrust of the driving part 100 according to the embodiment.
  • FIG. 6 is a graph showing the thrust of a driving part according to a comparative example.
  • the driving part of the comparative example does not adopt the configuration of the VCM 1 included in the driving part 100 but has a configuration excluding the magnet 74 a and the lid part 76 from the VCM 1 shown in FIG. 2 .
  • FIG. 5 shows a change in the thrust at each position of the coil (moving part 72 a ), with the horizontal axis representing the coil position and the vertical axis representing the thrust.
  • the values of the coil position and the thrust shown in FIG. 5 and FIG. 6 are shown in level values normalized as comparable values.
  • uniformity of the thrust is ensured from 0 level to 56 level of the coil position, and it is possible to ensure a usage range of moving the moving mirror 450 .
  • FIG. 6 similarly shows a change in the thrust at each position of the coil (moving part), with the horizontal axis representing the coil position and the vertical axis representing the thrust.
  • uniformity of the thrust is ensured from 0 level to 40 level of the coil position, and it is possible to ensure a usage range of moving the moving mirror.
  • the usage range can be expanded by 16 levels, and the usage range is expanded by approximately 1.4 times. Further, in the driving part 100 , while the usage range is expanded compared to the driving part of the comparative example, an equivalent thrust is still ensured.
  • FIG. 5 and FIG. 6 are graphs showing the change in the thrust at each position in the case where a current value is changed in a predetermined range to pass a current through the coil. As understood from FIG. 5 and FIG. 6 , even if the current value flowing through the coil is changed in the predetermined range, a substantially same relationship between the coil position and the thrust can be obtained.
  • the lid part 76 is composed of the four parts 76 a to 76 d .
  • the embodiment is not limited thereto, and the lid part may also be composed of a plurality of parts in a quantity equal to the quantity of the windows.
  • FIG. 7 is a view showing a configuration of a lid part according to a modification example. As shown in FIG. 7 , a lid part 760 is composed of five parts 760 a to 760 e to provide five windows 77 .
  • the lid part As the quantity of the divided parts increases, it becomes necessary to reduce the size (area) of each part to ensure assemblability. For example, in the case where the lid part is divided into five parts, the area of the lid part decreases by approximately 5% compared to the case of being divided into four parts. With the area of the lid part decreasing, leakage of the magnetic flux from the lid part increases and the thrust of the driving part decreases. In other words, there is a trade-off relationship between increasing the quantity of the support parts and the windows and the thrust of the driving part.
  • the plurality of parts divided from the lid part are attracted with the magnet, the work of forming the lid part by combining the plurality of parts or dividing the lid into the plurality of parts is difficult.
  • the plurality of parts have a shape capable of being respectively pulled out in the radial directions of the lid part.
  • FIG. 8 is a cross-sectional perspective view showing a configuration of a driving part according to a modification example. Configurations of a driving part 100 a shown in FIG. 8 that are the same as the configurations of the driving part 100 shown in FIG. 2 will be labeled with the same reference signs, and detailed descriptions thereof will not be repeated.
  • the driving part 100 a does not support the cylindrical part 52 and the moving mirror 450 by four support parts 72 b , but supports the cylindrical part 52 and the moving mirror 450 by two support parts 72 b .
  • the two support parts 72 b are provided symmetrically with respect to the central axis, and the support parts 72 b extend in a straight line from the moving part 72 a .
  • the natural frequency of the moving part 72 a itself decreases compared to the case of connecting the moving part 72 a and the cylindrical part 52 by four support parts 72 b .
  • the driving part 100 a can reciprocate the moving mirror 450 uniformly.
  • the driving part 100 a the oscillation in directions in which the two support parts 72 b are not provided increases.
  • the lid part 76 is divided into two parts, and the two parts are combined to form two windows 77 .
  • assemblability of the driving part 100 a increases.
  • An analysis device includes: a moving mirror ( 450 ), a position of the moving mirror being movable; and a driving part ( 100 , 100 a ) which moves the position of the moving mirror ( 450 ).
  • the driving part ( 100 , 100 a ) is a driving part which moves the position of the moving mirror ( 450 ), and includes: a cylindrical part ( 52 ) on one surface of which a mirror is fixed; and a voice coil motor ( 70 ) which is connected at another surface of the cylindrical part and reciprocates the cylindrical part.
  • the voice coil motor includes: a yoke ( 75 ) in a cylindrical shape; magnets ( 74 a , 74 b ) provided at two ends of the yoke; a fixing part ( 73 ) which is in a cylindrical shape enclosing the yoke and fixes, at a bottom surface, the yoke provided with the magnets; a lid part ( 76 ) which is provided with a plurality of windows ( 77 ) and covers an opening surface of the fixing part; a moving part ( 72 a ) which is arranged between the yoke and the fixing part and on which a coil in a cylindrical shape is fixed; and a plurality of support parts ( 72 b ) each including one end fixed to the moving part and another end connected at the another surface of the cylindrical part through the window.
  • the lid part is provided at the opening surface of the fixing part, and the cylindrical part on which the mirror is fixed is supported by the support parts provided through the windows of the lid part, it is possible to reciprocate the moving part in a wider range without an increase in size. Further, according to the analysis device described in Item 1, since the mirror can be reciprocated in a wider range, it is possible to achieve measurements with high wavenumber resolution.
  • the lid part is composed of a plurality of parts ( 76 a to 76 d , 760 a to 760 e ), and the windows are formed by combining the plurality of parts.
  • the lid part is composed of a plurality of parts, it is possible to increase assemblability of the voice coil motor.
  • the analysis device described in Item 3 by including the plurality of parts in a quantity equal to the quantity of the windows, it is possible to suppress an increase in the quantity of the parts more than necessary, suppress a decrease in the area of the lid part, and suppress a decrease in the thrust of the driving part.
  • the plurality of support parts are at least three or more support parts.
  • the plurality of support parts are at least three or more support parts, it is possible to ensure high mechanical rigidity of the moving part and uniformly reciprocate the moving part.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Spectrometry And Color Measurement (AREA)
US18/278,616 2021-03-18 2021-12-21 Analysis device Pending US20240151510A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021044445 2021-03-18
JP2021-044445 2021-03-18
PCT/JP2021/047283 WO2022196015A1 (ja) 2021-03-18 2021-12-21 分析装置

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US20240151510A1 true US20240151510A1 (en) 2024-05-09

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Application Number Title Priority Date Filing Date
US18/278,616 Pending US20240151510A1 (en) 2021-03-18 2021-12-21 Analysis device

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US (1) US20240151510A1 (ja)
EP (1) EP4311091A1 (ja)
JP (1) JP7464190B2 (ja)
CN (1) CN116868491A (ja)
WO (1) WO2022196015A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6278205B2 (ja) 2015-01-29 2018-02-14 株式会社島津製作所 フーリエ変換型分光光度計
US20180113026A1 (en) 2015-04-16 2018-04-26 Shimadzu Corporation Fourier transform spectroscope
EP3490124A4 (en) 2016-07-25 2020-02-26 Shimadzu Corporation ACOUSTIC COIL MOTOR, MOBILE MIRROR UNIT AND INTERFERENCE SPECTROPHOTOMETER PROVIDED WITH SAID MOTOR
JP7070557B2 (ja) 2017-04-17 2022-05-18 株式会社島津製作所 フーリエ変換型赤外分光光度計
JP2019158348A (ja) 2018-03-07 2019-09-19 株式会社島津製作所 干渉分光光度計及び二光束干渉計

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WO2022196015A1 (ja) 2022-09-22
EP4311091A1 (en) 2024-01-24
JP7464190B2 (ja) 2024-04-09
JPWO2022196015A1 (ja) 2022-09-22
CN116868491A (zh) 2023-10-10

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