WO2022183827A1 - Sensor and electronic device - Google Patents

Abstract

Disclosed in the present application are a sensor and an electronic device. The sensor comprises a fixing portion; a vibration portion, which is connected to the fixing portion and can vibrate relative to the fixing portion; and at least two sensing units, each of the sensing units comprising at least one permanent magnet and at least four functional sensing elements, wherein the permanent magnet is arranged on the vibration portion, the functional sensing elements are arranged on the fixing portion, the four functional sensing elements in each of the sensing units are connected to form a primary full-bridge structure, and four primary full-bridge structures are connected to form a secondary full-bridge structure.

Description

Sensors and Electronics

This application claims the priority of the Chinese patent application filed on March 1, 2021 with application number 202110227553.0, the entire contents of which are incorporated herein by reference.

technical field

The present application relates to the technical field of acoustic-electrical conversion, and in particular, to a sensor and an electronic device applying the sensor.

Background technique

At present, there are many kinds of sensors on the market, such as pressure sensors, displacement sensors, etc., all of which detect the vibration of the diaphragm through the principle of plate capacitors. The detection unit provided inside the sensor can detect the change of the magnetic field of the permanent magnet during the vibration of the diaphragm, and change the output electrical signal according to the detected change of the magnetic field. However, in the sensor application process, due to the influence of temperature and other factors, the electrical signal output by the sensor is prone to errors.

technical problem

The main purpose of the present application is to provide a sensor, which aims to improve the accuracy of the sensor output signal.

technical solutions

In order to achieve the above purpose, the sensor proposed in this application includes a fixing part;

a vibrating part, the vibrating part is connected to the fixing part and can vibrate relative to the fixing part; and

At least four sensing units, each of which includes at least one permanent magnet and at least four functional sensing elements, and at least four of the functional sensing elements in each of the sensing units are distributed in all the sensing units. On both sides of the permanent magnet, the permanent magnet is arranged on the vibrating part, the functional sensing element is arranged on the fixing part, and the four functional sensing elements in each sensing unit are connected to form A first-level full-bridge structure; four of the first-level full-bridge structures are connected to form a second-level full-bridge structure.

In one embodiment, the magnetic pole direction of the permanent magnet is parallel to the plane where the vibrating portion is located, and the sensitive direction of the functional sensing element is perpendicular to the plane where the vibrating portion is located;

Or, the magnetic pole direction of the permanent magnet is perpendicular to the plane where the vibrating part is located, and the sensitive direction of the functional sensing element is parallel to the plane where the vibrating part is located.

In one embodiment, the length direction of the functional sensing element in each of the sensing units is arranged at an included angle with the length direction of the permanent magnet, and the included angle is an acute angle or an obtuse angle.

In one embodiment, the functional sensing elements on both sides of the permanent magnet in each of the sensing units are symmetrically arranged or uniformly arranged.

In one embodiment, each of the sensing units includes eight functional sensing elements, and the functional sensing elements in each of the sensing units form one or two first-level full-bridge structures.

In one embodiment, the vibrating membrane includes a fixed portion and at least two vibrating portions, both of the vibrating portions are connected to the fixed portion, and the fixed portions extend to opposite sides of each vibrating portion. , the permanent magnets in the two sensing units are respectively arranged on one of the vibrating parts, and the functional sensing elements in each of the vibrating parts are arranged on the fixing part and symmetrically distributed on the permanent magnets. both sides of the magnet.

In one embodiment, the vibrating parts are evenly arranged on the fixing part at intervals.

In one embodiment, the fixing portion has a first side edge and a second side edge arranged opposite to each other, the first side edge is recessed toward the second side edge to form two notches, and the second side edge is concave. Two notches are formed concavely toward the first side, and the four vibrating parts are respectively connected to the fixing part at the four notches to form a cantilever structure.

In one embodiment, the fixing portion further has a third side edge and a fourth side edge arranged opposite to each other, and the two notches located on the first side edge are adjacent to the third side edge and the fourth side edge respectively. , the two notches located on the second side are adjacent to the third side and the fourth side respectively.

The present application also proposes an electronic device, including a sensor;

the sensor includes a fixing part;

a vibrating part, the vibrating part is connected to the fixing part and can vibrate relative to the fixing part; and

At least four sensing units, each of which includes at least one permanent magnet and at least four functional sensing elements, and at least four of the functional sensing elements in each of the sensing units are distributed in all the sensing units. On both sides of the permanent magnet, the permanent magnet is arranged on the vibrating part, the functional sensing element is arranged on the fixing part, and the four functional sensing elements in each sensing unit are connected to form A first-level full-bridge structure; four of the first-level full-bridge structures are connected to form a second-level full-bridge structure.

beneficial effect

The sensor of the technical solution of the present application includes at least two sensing units, each sensing unit includes at least one permanent magnet and at least four functional sensing elements, and the at least four functional sensing elements in each sensing unit are distributed in On both sides of the permanent magnet, the permanent magnet is arranged on the vibration part, and the functional sensing element is arranged on the fixed part. During the vibration of the vibration part relative to the fixed part, the permanent magnet vibrates relative to the functional sensing element, and the magnetic field generated by the permanent magnet can Acting on the functional sensing element, and during the vibration process of the permanent magnet, the magnetic field acting on the functional sensing element changes continuously. The functional sensing element is electrically connected to the sensor chip, and the functional sensing element is affected by the changing magnetic field. Output the changing electrical signal, and the chip performs corresponding command control according to the received signal.

At least four functional sensing elements in each sensing unit can be connected to form a first-level full bridge structure. The first-level full bridge satisfies the principle of Wheatstone bridge. The functional sensing element is the bridge arm of the bridge. The sensing unit of the bridge can more accurately detect the change of the magnetic field to which each functional sensing element is subjected. In the bridge structure, the common influence of other factors such as temperature drift on each functional sensing element can be eliminated, thereby reducing the sensor noise caused by temperature drift and the like, and improving the signal-to-noise ratio.

Four first-level full-bridge structures constitute a second-level full-bridge structure, and each first-level full-bridge structure constitutes a bridge arm of the second-level full-bridge structure, forming a second-level full-bridge structure. The two-stage full bridge also satisfies the principle of Wheatstone bridge. The two-stage full-bridge structure can eliminate the common influence of other factors such as temperature drift on each sensing unit, thereby further reducing the sensor noise caused by temperature drift and the like. , to further improve the signal-to-noise ratio.

Description of drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained according to the structures shown in these drawings without any creative effort.

FIG. 1 is a schematic structural diagram of an embodiment of a sensor of the present application;

Fig. 2 is the sectional view along the A-A direction of Fig. 1;

3 is a schematic structural diagram of another embodiment of the sensor of the present application;

4 is a schematic diagram of the direction of the magnetic field applied by the planar permanent magnet to the functional sensing element during the vibration of the vibrating portion;

5 is a schematic diagram of the direction of the magnetic field applied by the vertical permanent magnet to the functional sensing element during the vibration of the vibrating portion;

6 is a schematic diagram of the sensitive direction of the functional sensing element when the permanent magnet is a vertical permanent magnet;

7 is a schematic diagram of the arrangement structure of the functional sensing elements when eight functional sensing elements are provided in the sensing unit;

FIG. 8 is a schematic diagram of another arrangement structure of the functional sensing elements when eight functional sensing elements are provided in the sensing unit.

Description of reference numbers:

label	name	label	name
100	sensor	313	third side
10	substrate	314	fourth side
20	support	315	gap
30	Diaphragm	32	Vibration Department
31	Fixed part	33	Sensing unit
311	first side	331	Permanent magnets
312	second side	332	Functional sensing element

The realization, functional characteristics and advantages of the purpose of the present application will be further described with reference to the accompanying drawings in conjunction with the embodiments.

Embodiments of the present invention

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relationship between various components under a certain posture (as shown in the accompanying drawings). The relative positional relationship, the movement situation, etc., if the specific posture changes, the directional indication also changes accordingly.

In addition, descriptions involving "first", "second", etc. in this application are only for descriptive purposes, and should not be construed as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In addition, the technical solutions between the various embodiments can be combined with each other, but must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that the combination of such technical solutions does not exist. , is not within the scope of protection claimed in this application.

Referring to FIG. 1 , the present application proposes a sensor 100 , the sensor 100 includes a fixed part 31 and a vibration part 32 , the fixed part 31 is configured to be connected to the vibration part 32 , and the vibration part 32 can be opposite to the fixed part during the operation of the sensor 100 31 to vibrate. When the vibrating part 32 is not vibrating, the fixing part 31 and the vibrating part 32 can be located in the same plane, or can be located in different planes, and can be designed in different ways according to different needs, as long as the vibrating part 32 and the fixing part 31 can be It is sufficient that each element set on the above satisfies the positional relationship defined in this application.

With reference to FIG. 2 , the sensor 100 in the technical solution of the present application may include a substrate 10 , a support portion 20 and a diaphragm 30 . The support portion 20 is connected between the substrate 10 and the vibrating film 30, and surrounds the substrate 10 and the vibrating film 30 to form a closed or open cavity. In the area corresponding to the cavity, that is, the part where the diaphragm 30 is not connected to the support part 20 , the diaphragm 30 detects the pressure change of the air to generate vibration.

In the embodiment shown in FIG. 1 and FIG. 2 , the fixed part 31 and the vibration part 32 of the sensor 100 may both be located on the diaphragm 30 , that is, the part of the diaphragm 30 connected to the support part 20 is defined as the fixed part 31 , and the vibration part 30 is defined as the fixed part 31 . The part of the diaphragm 30 not connected to the support part 20 is defined as the vibration part 32 , the part of the diaphragm 30 not connected to the support part 20 is formed as a suspended structure, and the vibration part 32 of the suspended structure vibrates relative to the fixed part 31 under the change of air pressure.

The sensor 100 of the technical solution of the present application is provided with at least two sensing units 33 on the diaphragm 30 . Each sensing unit 33 includes at least one permanent magnet 331 and at least four functional sensing elements 332. The at least four functional sensing elements 332 in each sensing unit 33 are distributed on both sides of the permanent magnet 331. The permanent magnets 331 is set on the vibration part 32, and the functional sensing element 332 is set on the fixed part 31. During the vibration of the vibration part 32 relative to the fixed part 31, the permanent magnet 331 vibrates relative to the functional sensing element 332, and the magnetic field generated by the permanent magnet 331 It can act on the functional sensing element 332, and during the vibration process of the permanent magnet 331, the magnetic field acting on the functional sensing element 332 changes continuously. The functional sensing element 332 is electrically connected to the chip of the sensor 100, and the functional sensing element The element 332 is subjected to a changing magnetic field to output a changing electrical signal, and the chip performs corresponding command control according to the received signal.

At least four functional sensing elements 332 in each sensing unit 33 can be connected to form a first-level full bridge structure. The first-level full bridge satisfies the principle of a Wheatstone bridge. The functional sensing elements 332 are the bridge arms of the bridge. The sensor unit 33 combined to form a full bridge can more accurately detect the change of the magnetic field received by each functional sensor element 332 . In the bridge structure, the common influence of other factors such as temperature drift on each functional sensing element 332 can be eliminated, thereby reducing the noise of the sensor 100 caused by temperature drift and the like, and improving the signal-to-noise ratio.

Four first-level full-bridge structures constitute a second-level full-bridge structure, and each first-level full-bridge structure constitutes a bridge arm of the second-level full-bridge structure, forming a second-level full-bridge structure. The second-level full bridge also satisfies the Wheatstone bridge principle, and the second-level full-bridge structure can eliminate the common influence of other factors such as temperature drift on each sensing unit 33, so as to further reduce the sensor caused by temperature drift, etc. 100 noise, further improving the signal-to-noise ratio.

When there are two sensing units 33, each sensing unit 33 may include eight functional sensing elements 332, and the eight functional sensing elements 332 in each sensing unit 33 may form two primary full In the bridge structure, the two sensing units 33 can form four first-level full-bridge structures, and the four first-level full-bridge structures can form a second-level full-bridge structure.

When there are four sensing units 33, each sensing unit 33 may include four functional sensing elements 332, and the four functional sensing elements 332 in each sensing unit 33 may form a first-level full bridge The four sensing units 33 can form four one-full bridge structures, and the four first-level full-bridge structures can form a two-level full-bridge structure.

In the technical solution of the present application, the functional sensing element 332 may be a Hall sensor, a giant magnetoresistive sensor, a tunneling magnetoresistive sensor or an anisotropic magnetoresistive sensor, and may also be other sensors, which are not limited herein.

The permanent magnet 331 in each sensing unit 33 may be a planar permanent magnet or a vertical permanent magnet, and the planar permanent magnet is that the magnetic pole direction of the permanent magnet 331 is parallel to the plane where the vibration part 32 is located, that is, the N pole and the S pole of the permanent magnet 331 The vertical permanent magnets are arranged along the plane direction of the vibrating portion 32, and the vertical permanent magnet is that the magnetic pole direction of the permanent magnet 331 is perpendicular to the plane where the vibrating portion 32 is located, that is, the N pole and the S pole of the permanent magnet 331 are arranged along the vertical direction of the plane where the vibrating portion 32 is located.

When the permanent magnet 31 is placed on a plane, the connecting line between the N pole and the S pole of the permanent magnet 31 is arranged parallel to the plane where the vibration part 32 is located. FIG. 4 shows the functional sensing element 332 when the functional sensing element 332 is in the z-axis positive (z+) position and the z-axis negative (z-) position relative to the permanent magnet 331 during the vibrating process of the vibrating portion 32 . The direction of action of the magnetic field by the permanent magnet 331 (the total amount and component of the magnetic field applied to the functional sensing element 332 ), in this illustration, the position of the permanent magnet 331 is assumed to be 0 during the vibration of the vibrating part 32 . .

When the permanent magnet 331 is placed vertically, the line connecting the N pole and the S pole of the permanent magnet 331 is perpendicular to the plane where the vibration part 32 is located. FIG. 5 shows when the functional sensing element 332 is in the positive z-axis (z+) position and in the negative z-axis (z-) position relative to the permanent magnet 331 during the vibrating process of the vibrating part 32 , the functional sensing element 332 The direction of action of the magnetic field by the permanent magnet 331 (the total amount and component of the magnetic field applied to the functional sensing element 332 ), in this illustration, the position of the permanent magnet 331 is assumed to be 0 during the vibration of the vibrating part 32 . .

When the permanent magnet 331 is a plane permanent magnet 331, in the same sensing unit 33, during the vibration of the vibrating part 32 relative to the fixed part 31, the magnetic field acting on the functional sensing element 332 has a constant component in the vertical direction. The sensitive direction of the functional sensing element 332 in the sensing unit 33 is the vertical direction, that is, the sensitive direction of the functional sensing element 332 is perpendicular to the plane where the vibration part 32 is located, and the magnetic field component in the vertical direction can be detected. , so that the vibration of the vibration part 32 can be accurately detected. When the functional sensing element 332 is a giant magnetoresistive sensor or a tunneling magnetoresistive sensor, the sensitive direction may be the magnetization direction of the pinned layer.

When the permanent magnet 331 is a vertical permanent magnet 331, in the same sensing unit 33, the magnetic field acting on the functional sensing element 332 during the vibration of the vibrating part 32 relative to the fixed part 31 has a constant component in the plane direction. The sensitive direction of the functional sensing element 332 in the sensing unit 33 is the plane direction, that is, the sensitive direction of the functional sensing element 332 is parallel to the plane where the vibration part 32 is located, and the magnetic field component in the plane direction can be detected. , so that the vibration of the vibration part 32 can be accurately detected.

The functional sensing elements 332 in each sensing unit 33 are evenly distributed on opposite sides of the permanent magnet 331 . Referring to FIG. 6 , in this embodiment, each sensing unit 33 is provided with four functional sensing elements 332 , two functional sensing elements 332 and the other two functional sensing elements 332 in each sensing unit 33 are respectively on opposite sides of the permanent magnet 331 . In this embodiment, the permanent magnet 331 in the sensing unit 33 is a vertical permanent magnet 331, that is, the N pole and the S pole of the permanent magnet 331 are arranged along the vertical direction of the plane where the vibrating part 32 is located. The four functional sensing elements 332 are respectively defined as: S1, S2, S3 and S4, wherein S1 and S2 are located on one side of the permanent magnet 331, S3 and S4 are located on the other side of the permanent magnet 331, and the sensitive directions of S1 and S2 are facing The permanent magnet 331 is arranged, and the sensitive directions of S3 and S4 are arranged away from the permanent magnet 331 .

5 and 6 , when the vibrating part 32 moves to the top of the fixed part 31 on the z-axis, that is, the permanent magnet 331 is located above the functional sensing element 332 in the z-axis direction, and the functional sensing element 332 is above the functional sensing element 332 . The magnetic field component of z- is shown in the dashed line position of z- in Figure 5. At this time, the sensitive directions of S1 and S2 are consistent with the magnetic field component direction, and the sensitive directions of S3 and S4 are opposite to the magnetic field component direction, and the output resistance of S1 and S2 decreases. , the output resistance of S3 and S4 increases.

In the embodiment shown in FIG. 7 and FIG. 8 , each sensing unit 33 may further include eight functional sensing elements 332 , and the eight functional elements are evenly distributed on opposite sides of the permanent magnet 331 . The four functional sensing elements 332 in the sensing unit 33 can form a first-level full-bridge structure, and there are four functional elements in each sensing element, which can form two first-level full-bridge structures, which can be carried out according to different combinations. Connection, a full-bridge structure that satisfies the Wheatstone bridge principle is sufficient.

In this embodiment, the four sensing units 33 can form eight first-level full-bridge structures, and the four first-level full-bridge structures can form a second-level full-bridge structure. Therefore, they can be formed by different combinations. Different two-level full-bridge structures can be specifically selected according to the distribution position of each sensing unit 33 and different requirements. It can be understood that, in this embodiment, two secondary full-bridge structures can also be formed, and the two full-bridge structures can be combined for detection.

The arrows in FIG. 7 and FIG. 8 show the sensitive direction of the functional sensing element 332. The functional sensing element 332 in each sensing unit 33 can be placed in parallel or perpendicular to the permanent magnet 331, so as to If the sensitive direction of the functional sensing element 332 is consistent with or opposite to the direction of the received magnetic field component, the effect of detecting the change of the magnetic field component is more accurate.

When the number of functional sensing elements 332 in each sensing unit 33 is large, in order to save installation space and reduce the overall size of the sensor 100, the length direction of the functional sensing elements 332 in each sensing unit 33 can be The length direction of the permanent magnet 331 is arranged at an included angle, that is, the sensitive direction of the functional sensing element 332 in each sensing unit 33 and the magnetic field component of the permanent magnet 331 in the sensing unit 33 acting on the functional sensing element 332 The direction is set at an included angle, and the included angle is either an acute angle or an obtuse angle.

The relative positions of the functional sensing element 332 and the permanent magnet 331 described in this application are based on the standard structure of the functional sensing element 332 and the permanent magnet 331 , that is, it is assumed that the functional sensing element 332 and the permanent magnet 331 are both It is a rectangular parallelepiped structure and has a length direction, a width direction and a height direction, and the same is true for the functional sensing element 332 . The functional sensing elements 332 in each sensing unit 33 are evenly distributed along the width direction of the permanent magnet 331 . When the functional sensing element 332 is parallel to the permanent magnet 331 , that is, the lengthwise direction of the functional sensing element 332 is parallel to the lengthwise direction of the permanent magnet 331 , at this time, the lengthwise direction lines passing through the center of the permanent magnet 331 are the two sides of the permanent magnet 331 The axis of symmetry of the functional sensing element 332; the functional sensing element 332 and the permanent magnet 331 are arranged at an angle, that is, the length direction of the functional sensing element 332 and the length direction of the permanent magnet 331 are arranged at an angle. When the permanent magnet 331 is a planar permanent magnet 331, the N and S poles of the permanent magnet 331 are arranged along the length direction of the permanent magnet 331; when the permanent magnet 331 is a vertical permanent magnet 331, the N and S poles of the permanent magnet 331 are arranged along the length of the permanent magnet 331. The magnets 331 are arranged in the height direction. The sensitive direction of the functional sensing element 332 is perpendicular to its length direction.

In each sensing unit 33 , adjacent functional sensing elements 332 located on the same side of the permanent magnet 331 are symmetrically arranged along the length direction of the permanent magnet 331 . The included angle between the functional sensing element 332 in each sensing unit 33 and the permanent magnet 331 may be 45°, the included angle between two adjacent functional elements is 90°, and the plurality of functional sensing elements 332 located on the same side of the permanent magnet 331 Arranged in order to form a "W" shape, or "M" shape.

In the embodiments shown in FIGS. 7 and 8 , the permanent magnets 331 are vertical permanent magnets 331 , and the figures show the sensitive direction of each functional sensing element 332 in a sensing unit 33 .

Referring to FIG. 7 , the functional sensing elements 332 on both sides of the permanent magnet 331 in each sensing unit 33 are symmetrically arranged; referring to FIG. The above two embodiments respectively provide different arrangements of the functional sensing elements 332 in one sensing unit 33 .

It can be understood that the sensing unit 33 of the technical solution of the present application may further include more functional sensing elements 332 , which may be specifically designed according to the overall size of the sensor 100 and the functions to be implemented. When the sensor 100 includes more functional sensing elements 332, the number of first-level full-bridge structures composed of the functional sensing elements 332 may be larger, and four first-level full-bridge structures may form a second-level full-bridge structure. When the number of two-level full-bridge structures that can be combined is more, four two-level full-bridges can form a three-level full-bridge, and so on. As long as the structure allows, selection can be made according to different needs.

In each sensing unit 33, the permanent magnet 331 is located in the vibration part 32, and the functional sensing element 332 is located in the fixed part 31, so that the diaphragm 30 can be designed accordingly according to the requirements.

In the embodiment of the present application, the vibrating membrane 30 includes a fixed portion 31 and at least four vibrating portions 32. The four vibrating portions 32 are all connected to the fixing portion 31. The fixing portions 31 extend to opposite sides of each vibrating portion 32. The permanent magnets 331 in the sensing unit 33 are respectively disposed on a vibrating portion 32 , and the functional sensing elements 332 in each vibrating portion 32 are disposed on the fixing portion 31 and symmetrically distributed on both sides of the permanent magnet 331 .

Since the functional sensing elements 332 in each sensing unit 33 are respectively disposed on both sides of the permanent magnet 331 in the sensing unit 33, the fixed portion 31 on the diaphragm 30 needs to extend to both sides of the vibrating portion 32, For the installation of the functional sensing element 332 .

The vibrating parts 32 are evenly spaced on the fixing part 31 , so that each sensing unit 33 is evenly distributed on the vibrating membrane 30 , and multiple sensing units 33 can detect the vibration effect of the vibrating membrane 30 more accurately.

Referring to FIG. 1 , the fixing portion 31 has a first side edge 311 and a second side edge 312 disposed opposite to each other. The first side edge 311 is recessed toward the second side edge 312 to form two notches 315 , and the second side edge 312 faces the first side edge 312 . Two notches 315 are concavely formed in the direction of the side edge 311 , and the four vibrating parts 32 are respectively connected to the fixing part 31 at the four notches 315 to form a cantilever structure.

In this embodiment, the four sensing units 33 are respectively located on two pairs of two sides of the diaphragm 30 , so that the full-bridge structure formed by the sensing units 33 has a more accurate vibration detection effect on the diaphragm 30 .

Further referring to FIG. 1 , the fixing portion 31 also has a third side edge 313 and a fourth side edge 314 arranged oppositely, and the first side edge 311 , the second side edge 312 , the third side edge 313 and the fourth side edge 314 are connected in sequence , the two notches 315 on the first side 311 are adjacent to the third side 313 and the fourth side 314 respectively, the two notches 315 on the second side 312 are respectively adjacent to the third side 313 and the fourth side 314, and so on The arrangement can make the distribution of the four sensing units 33 on the diaphragm 30 more uniform, and the detection of the vibration effect of the diaphragm 30 is more accurate.

In this embodiment, each vibrating portion 32 is connected to the bottom edge of the corresponding notch 315 , and each vibrating portion 32 can vibrate relative to the fixed portion 31 when subjected to changes in air pressure. The permanent magnets in each sensing unit 33 331 are respectively installed on a vibration part 32, and the functional sensing elements 332 in each sensing unit 33 are arranged on the fixed parts 31 on both sides of the corresponding permanent magnet 331. During the vibration of the vibration part 32 relative to the fixed part 31, the function The magnitude and direction of the magnetic field of the corresponding permanent magnet 331 to which the sensing element 332 is subjected are constantly changing.

It can be understood that the structure of the vibrating membrane 30 can also be as shown in FIG. 3 , and the vibrating portion 32 can also be formed by directly opening a groove on the vibrating membrane 30, and the groove is arranged around the three sides of the vibrating portion 32, Only one side of the vibrating part 32 is connected to the fixing part 31 to form a cantilever structure can also achieve the technical effect of the technical solution of the present application.

The present application also proposes an electronic device, the electronic device includes a sensor 100, and the specific structure of the sensor 100 refers to the above-mentioned embodiments. Since the electronic device adopts all the technical solutions of all the above-mentioned embodiments, it has at least the technology of the above-mentioned embodiments. All the functions brought by the solution will not be repeated here.

The electronic device also includes a main control board. The chip of the sensor 100 is electrically connected to the main control board of the electronic device. The main control board obtains the signal data of the sensor 100 chip and controls the electronic device to perform corresponding functions. The sensor 100 chip can also be integrated in the electronic device. The main control board of the device can improve the integration degree of the electronic device, so that the structure of the electronic device can be more compact and small.

The electronic device further includes a housing, and the sensor 100 is accommodated in the housing to protect the electrical components inside the electronic device and the sensor 100 . The chip in the sensor 100 of the present application may also be directly disposed on the main control board of the electronic device, and integrated with other electrical components on the main control board, so as to achieve the effect of compact structure.

The electronic device can be a portable mobile terminal such as a mobile phone, a tablet computer, a game console, etc., or a vehicle-mounted device or a corresponding structure on a smart home. The sensor 100 can be a microphone, a pressure sensor, a displacement sensor, or other sensors well-known in the art .

The electronic device may further include a display screen and/or keys, the display screen and keys are electrically connected to the main control board, and a user can control the function of the sensor 100 by touching the display screen and/or keys.

The above descriptions are only optional embodiments of the present application and are not intended to limit the scope of the patent of the present application. Under the inventive concept of the present application, any equivalent structural transformations made by using the contents of the description and drawings of the present application, or direct/indirect Applications in other related technical fields are included in the scope of patent protection of this application.

Claims (10)

1. A sensor comprising:

   fixed part;

   a vibrating part, the vibrating part is connected to the fixing part and can vibrate relative to the fixing part; and

   At least two sensing units, each of which includes at least one permanent magnet and at least four functional sensing elements, and at least four of the functional sensing elements in each of the sensing units are distributed over all the sensing units. On both sides of the permanent magnet, the permanent magnet is arranged on the vibrating part, the functional sensing element is arranged on the fixing part, and the four functional sensing elements in each sensing unit are connected to form A first-level full-bridge structure; four of the first-level full-bridge structures are connected to form a second-level full-bridge structure.
2. The sensor according to claim 1, wherein the magnetic pole direction of the permanent magnet is parallel to the plane where the vibrating part is located, and the sensitive direction of the functional sensing element is perpendicular to the plane where the vibrating part is located;

   Or, the magnetic pole direction of the permanent magnet is perpendicular to the plane where the vibrating part is located, and the sensitive direction of the functional sensing element is parallel to the plane where the vibrating part is located.
3. The sensor according to claim 1, wherein the length direction of the functional sensing element in each of the sensing units is arranged at an included angle with the length direction of the permanent magnet, and the included angle is an acute angle or an obtuse angle.
4. The sensor according to claim 1, wherein the functional sensing elements on both sides of the permanent magnet in each of the sensing units are arranged symmetrically or in the same arrangement.
5. The sensor of claim 1, wherein each of the sensing units includes eight functional sensing elements, and the functional sensing elements in each of the sensing units form one or two first-stage full-bridge structures.
6. The sensor according to any one of claims 1 to 5, wherein the diaphragm comprises a fixed part and at least two vibration parts, both of the vibration parts are connected to the fixed part, and the fixed part extends to Located on opposite sides of each of the vibrating parts, the permanent magnets in the two sensing units are respectively arranged in one of the vibrating parts, and the functional sensing elements in each of the vibrating parts are arranged in the other vibrating parts. The fixed part is symmetrically distributed on both sides of the permanent magnet.
7. The sensor according to claim 6, wherein the vibrating parts are evenly arranged on the fixing part at intervals.
8. The sensor according to claim 6, wherein the fixing portion has a first side edge and a second side edge arranged opposite to each other, and the first side edge is recessed toward the second side edge to form two notches, so The second side is recessed toward the first side to form two notches, and the four vibrating parts are respectively connected to the fixing part at the four notches to form a cantilever structure.
9. The sensor according to claim 8, wherein the fixing portion further has a third side edge and a fourth side edge arranged opposite to each other, and the two notches located on the first side edge are adjacent to the third side edge and the fourth side edge respectively. In the fourth side edge, the two notches located on the second side edge are adjacent to the third side edge and the fourth side edge respectively.
10. An electronic device comprising a sensor as claimed in any one of claims 1 to 9.