CN1300933A - Slope angle sensor using magnetosensitive resistor - Google Patents
Slope angle sensor using magnetosensitive resistor Download PDFInfo
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- CN1300933A CN1300933A CN 01102651 CN01102651A CN1300933A CN 1300933 A CN1300933 A CN 1300933A CN 01102651 CN01102651 CN 01102651 CN 01102651 A CN01102651 A CN 01102651A CN 1300933 A CN1300933 A CN 1300933A
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Abstract
A pendulum-type slope angle sensor using magnetosensitive resistor is disclosed. The rotary axle is fixed to pendulum fixing frame by bearings. The pendulum and permanent magnet are respectively installed to both ends of said rotary axle. A magnetosensitive resistor chip is concentrically linked via conic pin. Said pendulum fixing frame is sealed between the partition with small hole, end cover and casing, where damping oil is fully filled. The space above said partition is filled by the damping oil but retains a certain gap. Its advantages are high concentricity, sensitive response, high stability and temp characteristics, small size and low cost.
Description
The present invention relates to the contactless slant angle sensor of a kind of deadweight pendulum-type mistor.
The sensor of measuring the angle of inclination at present has multiple structures such as differential transformer type, condenser type, precision resistor formula, quartzy vibratory drilling method, Watson method, optical code disk formula, polaroid type, air bubble electrode formula and " air-flow hot wire type " formula.Wherein most complex structures, cost are higher, and have certain limitation aspect stability of handling in serviceable life, environmental suitability, faint original signal and the antijamming capability.
Mistor type slant angle sensor is a kind of mechanical structure type transducer.It adopts mistor as sensitive element (being called for short the MR element), utilizes the deadweight pendulum to drive permanent magnet and rotates, and makes the variation of induced flux contactlessly of MR element.The variation that permanent magnet and MR element are relatively rotated angle transforms into the variation of resistance, converts the pitch angle output of to standard electric signal through signal transformation.Just because of the characteristics of contactless induction of signal on the structure, make such slant angle sensor have following characteristics: 2. 1. without mechanical friction except that bearing do not have electrical noise, a signal to noise ratio (S/N ratio) height; 3. serviceable life is extremely long; 4. reliability height; 5. the MR element is not subjected to the influence of the medium such as water, oil, vapour, dust in the gap to the induction of magnetic field intensity, has improved the adaptability of environment greatly; 6. ingenious, the compact conformation of this slant angle sensor design, original signal big, be easy to standardization, resolution is higher, is easy to realize cost degradation.
Present magnetosensitive slant angle sensor (theory structure is as shown in Figure 1), rotating shaft (1) is fixed on the pendulum fixed mount (3) by two bearings (2) and (2 ＇), and deadweight pendulum (4) and semi-circular permanent magnet (5) are separately fixed at the rotating shaft two ends.Mistor chip (being called for short the MR element) (6) and concentric being installed together of permanent magnet (5) of upward fixing in rotating shaft (1).The pendulum fixed mount connects with end cap (9).Mistor chip (6) structural principle is circular semibridge system structure (13) as shown in Figure 2.When the deadweight pendulum relatively rotates with end cap, cause permanent magnet (5) and the relative area coverage generation of semibridge system mistor chip (13) differential change, cause output voltage V out to change, the relation of the anglec of rotation and output voltage is as shown in Figure 3.At V
Out=1/2 V
In(V
InBe input voltage) near ± 45 ° of scopes are approximately linear in Fig. 4.Because the general temperature coefficient of semiconductor material is bigger, the mistor chip temperature coefficient made from InSb monocrystalline, InSb film, InSb-NiSb eutectic composites is 1～2%, the temperature compensation complexity, discreteness is big, be difficult in the environment that is higher than 55 ℃ and guarantee accuracy requirement, limited range of application greatly.
In the physical construction shown in the accompanying drawing 1, put the influence that is subjected to vibrating to output signal in order to reduce deadweight, in pendulum and the chip integral sealing damping oil (10) between end cap (9) and shell (12).Because the variation of ambient temperature, the damping oil volume can expand with heat and contract with cold, and must reserve certain space (11) during sealing, otherwise the leakage that must cause damping oil to produce owing to thermal expansion.Just because of the existence in this space, when slant angle sensor rotated, the rocking of damping oil can prolong pendulum on the contrary and reach and stablize the used time; The vibration of external environment also can cause the vibration of damping oil, influences the stability of integral sensors output signal.As measurement of angle, guarantee that the concentricity of permanent magnet and chip is most important.With structure shown in Figure 1 or adopt common round platform (8) location, tend to occur the monolateral accumulation of error and cause the integral sensors linearity to reduce.Usually in the manufacture process of slant angle sensor, fixed mount (3), (7) are installed in the center of end cap (9), and pendulum can be realized 360 ° of rotations continuously like this.Because between this kind sensor output characteristics linear zone ± 45 ° restriction, cause the sensor internal first half useless substantially, space availability ratio is not high, no matter from miniaturization, the cost degradation aspect of material consumption, machining period, damping oil loading and product, is unfavorable factor.
The object of the present invention is to provide a kind ofly adapt to the small angle inclination angular measurement, temperature applicable range is big, vibrostability is high, be easy to realize the sensor of miniaturization and cost degradation.
Formation of the present invention: as shown in Figure 5, adopt the sensitive element of semiconductor magnetic-sensing resistor chip (20) as incline measurement, with bearing (16) and (16 ＇) rotating shaft (15) is fixed on the pendulum fixed mount (17), pendulum (14) and permanent magnet (21) are installed respectively at the rotating shaft two ends, and mistor chip (20) is bonded on the chip fixed mount (22) with one heart.With identical circular cone tip face (23) location, guarantee the concentricity between chip and the permanent magnet between chip fixed mount and the pendulum fixed mount.Keep 0.1～2 mm clearance between mistor chip (20) and the permanent magnet (21), constitute contactless induction of signal structure.The pendulum fixed mount is sealed among rectangular clapboard (24) downside and end cap (19) and the shell (28).Fig. 5 is a structural representation of the present invention: add a rectangular clapboard (24) at pendulum (14) and pendulum fixed mount (17) upside, sensor internal is divided into two spaces up and down, its volume ratio is between 50%: 50% to 1%: 99%, and concrete rate value is determined by the measure expansion amount of damping oil that sensor internal is adorned.Have one or more small through hole (27) on the rectangular clapboard (24), the diameter in hole is 0.1～15 millimeter, and the area summation of being punched should be less than 50% of the dividing plate total area; Damping oil fills up rectangular clapboard (24) below, the partially filled damping oil of rectangular clapboard superjacent air space (25), the air void of staying (26) greater than the measure expansion amount of damping oil, when ambient temperature changes, corresponding change can take place in the damping oil volume, it can interpenetrate up and down by the hole (27) on the rectangular clapboard (24), and pendulum space of living in always is in damping oil and fills up state; When integral sensors rotates or external environment when producing vibration, can produce and flow or rock although go up the damping oil that does not fill up in the space, can not have influence on down the damping action that the damping oil that filled up in the space is brought into normal play.When this structure has solved no dividing plate, slant angle sensor is inner owing to reserve the existence of clearance, extraneous vibration or existence rotation momentum state produce damping oil down and rock, impacting the to-and-fro movement of deadweight pendulum causes output signal to be difficult to stable disadvantage, significantly reduce sensor and reached the stable used time of output, improved the sensor vibrostability.
Slant angle sensor is as angle measurement unit, and the permanent magnet (21) that deadweight pendulum (14) drives is the key factor that directly influences the linear sensor degree with the location concentricity of mistor chip (20).The present invention adopts MR element (20) concentric bonding with chip fixed mount (22) precision, adopts circular cone tip face (23) to cooperate between chip fixed mount (22) and the pendulum fixed mount (17), the automatic centering of formation assembling process tip face.When this method can overcome with the assembling of round platform or circular groove location, the Concentricity tolerance that the unidirectional accumulation of machined part error causes improved the linearity of sensor greatly.
Cooperate the concentricity problem that solved just because of circular cone tip face between chip fixed mount and the pendulum fixed mount, can be with the eccentric arrangement of pendulum fixed mount, shown in accompanying drawing 5 (a), eccentric throw (30) can produce moment and the scope that takes measurement of an angle is determined by pendulum length or pendulum shown in accompanying drawing 5-(b).Significantly reduce the physical dimension of slant angle sensor, realized the miniaturization of product, reduced various raw materials consumptions and processing cost.
In the many applications of industrial environment, require big (as-40～125 ℃) scope that takes measurement of an angle of serviceability temperature scope less (as≤± 35 °).The present invention adopts ferromagnetism permalloy mistor chip, alternative semiconductors type mistor chip.Although permalloy material change rate of magnetic reluctance is 2～5%, well below the semi-conductor type magneto-resistance material, its temperature coefficient is generally 0.1～0.2% than the little order of magnitude of semiconductor magnetic-sensing resistor material.The permalloy film magneto-resistance material, as Ni-Fe, Ni-Co, Ni-Fe-Co etc., because the anisotropy of material internal structure, the pass between resistivity and the externally-applied magnetic field is: ρ=ρ
∥Cos
2θ+ρ
⊥Sin
2θ
Wherein: ρ
∥Electricalresistivity when being parallel to by mistor chip current direction for externally-applied magnetic field
⊥For the resistivity θ of externally-applied magnetic field perpendicular to by mistor chip current direction the time is that angle between externally-applied magnetic field and the electrical current direction is shown in accompanying drawing 6 and accompanying drawing 8, with the low-dimensional permalloy mistor film that is plated on the substrate slice (34), adopt photoetching, wet chemistry to corrode or dry method ion etching makes that four groups of stripeds are vertical mutually, the chip (36) of Hui Sideng four arm electrical bridge (31) is as sensitive element, alternative semiconductors mistor chip (20) is installed on the chip fixed mount (22) with one heart.The available devitrified glass of substrate slice (34), glass, potsherd, aluminium oxide, magnesium oxide, ferrite or silicon chip etc. are made.The permanent magnet material that adopts Surface field intensity 500～3500 oersteds is as signal triggering permanent magnet (37), with permanent magnet N, S extreme direction and the parallel installation of rotating shaft (38) radial direction.When the magnetic field (33) by this chip plane when direction rotates, the relation between output voltage and the rotational angle as shown in Figure 7.Full bridge structure low-dimensional permalloy mistor chip because the difference structure characteristics, its sensitivity is 2 times of semibridge system permalloy chip, temperature coefficient is well below compensation back semiconductor type mistor chip 0.05%/Vin. Δ T, the technical parameter index.Output characteristic curve is a zero crossing, the sinusoidal curve in 360 ° of two cycles.(35) represented interval is the scope of near zero-crossing point ± 35 °, and family curve is approximately straight line, and when input voltage was 5V, output voltage V out was the voltage signal of zero crossing ± 40～100 millivolt, as shown in Figure 7.
Have anisotropic trilamellar membrane tunnel junction of saturation magnetic field magneto-resistor or Spin Valve giant magnetic resistor material for low-dimensional, as: Fe/SiO
2/ Fe, Fe/Al
2O
3/ Fe, Fe/Al
2O
3/ NiFe, NiFe/Al
2O
3/ Fe, Co/Al
2O
3/ Fe/FeMn etc., trilamellar membrane tunnel junction or Spin Valve giant magnetic resistor material be not confined to above-mentioned for example.The typical electrical conductance of trilamellar membrane tunnel junction giant magnetic resistor material and the characteristic relation of externally-applied magnetic field are as shown in Figure 9.Room-temperature magnetoresistance rate of change Δ R/R
0〉=5～20%.As shown in Figure 10, the giant magnet resistance film material that will have above-mentioned characteristic is plated on the substrate slice (40), employing photoetching, wet chemistry corrode or dry method ion etching is made and mutual vertical, the Hui Sideng four arm electrical bridge (39) of four groups of stripeds of the identical figure of permalloy mistor chip, as shown in figure 10, substituting permalloy mistor chip (36) is installed on the chip fixed mount (22) with one heart.The available devitrified glass of substrate slice (40), glass, potsherd, aluminium oxide, magnesium oxide, ferrite or silicon chip etc. are made.The output characteristic curve shape is identical with permalloy mistor chip, and when input voltage was 5V, output voltage V out was zero crossing ± 50～200mV.Specifically numerical value is determined by used giant magnet resistance film material and change rate of magnetic reluctance, as shown in figure 11.
The invention has the advantages that: advantages such as not only having kept the contactless induction of signal of mistor type slant angle sensor, do not have wearing and tearing, no electrical noise, long service life, response speed are fast, setting by band oil leaking hole dividing plate, successfully solved to preventing damping oil the influence of interspacing in advance of expanding with heat and contract with cold, shortened the response time integral sensors stability and vibration resistance.Cooperate by circular cone tip face between chip fixed mount and the pendulum fixed mount, the assembling process automatic centering provides the method for a kind of effective raising assembling concentricity and linear sensor degree for utilizing mistor to take measurement of an angle.Off-centre design by deadweight pendulum structure, can reduce the physical dimension of sensor greatly, various raw materials consumptions and processing cost have been reduced, can realize the miniaturization and the cost degradation of product, make the cost of mistor formula slant angle sensor cost, for the trial of having a mind to is made in the marketization that realizes magnetosensitive slant angle sensor product well below different test philosophies (as: hot wire type, bubble type, condenser type) slant angle sensor.Adopt full-bridge type ferromagnetism permalloy mistor chip alternative semiconductors mistor chip, can widen the measurement demand of mistor deadweight pendulum-type slant angle sensor greatly, be adapted to fields such as metallurgy, oil, mining, engineering machinery, auto industry and war industry especially for low-angle, wide serviceability temperature scope.Utilization has anisotropy giant magnetoresistance chip and substitutes permalloy mistor chip, can improve the sensitivity of slant angle sensor original signal, improves the performance of sensor.
The present invention is further described below in conjunction with accompanying drawing.
Fig. 1 is existing slope angle sensor using magnetosensitive resistor machine construction principle figure.
Fig. 2 is a semiconductor magnetic-sensing resistor slant angle sensor chip operation schematic diagram.(13) be the differential circular semiconductor magnetic-sensing resistor chips of half-bridge three ends, deadweight pendulum (4) is by driving permanent magnet (5) rotation by two bearings (2) and (2 ＇) fixing rotating shaft (1), applying direct supply "+" "-" utmost point respectively at half-bridge mistor (13) two ends, is output voltage between the tap of half-bridge chip center and power supply "-" utmost point.
Fig. 3 is 360 ° of mistor output voltages of permanent magnet rotation and rotational angle relation curve.
Fig. 4 is for being V with the output voltage
InOutput signal characteristics curve in/2 points ± 45 degree scope.
Fig. 5 is a structural representation of the present invention.A is a front view, and b is a left view.Mistor chip (20) bonds on the chip carrier (22) with one heart; Permanent magnet (21) is fixed on rotating shaft step place; Two bearings (16) and (16 ＇) are fixed on rotating shaft (15) on the pendulum fixed mount (17), and pendulum (14) is fixed on the other end of rotating shaft; Chip carrier (22) connects by circular cone tip face (23) self-centering with pendulum fixed mount (17), is fixed on the end cap (19) with eccentricity (30), and rectangular clapboard with holes (24) is placed in pendulum fixed mount top, end cap (19) and shell (28) sealing; Damping oil (18) fills up the dividing plate downside, and the dividing plate upper portion is filled damping oil (25), keeps certain clearance (26).(29) be the pendulum rotation direction, (27) are small through hole.
Fig. 6 chews for this and adopts the permalloy film material to make mistor chip operation schematic diagram.(34) be substrate slice, (31) are sensitive chip Wheatstone bridge figure.(32) be four signal lead solder joint terminations of full-bridge chip.(33) be rotating permanent magnet.
Fig. 7 is when input voltage 5V, and rotating permanent magnet (33) rotates the output characteristic curve of 360 ° of permalloy chips.
Fig. 8 is for adopting the structure principle chart with mistor effect permalloy film chip slant angle sensor.The mistor chip (36) that will have full bridge structure figure (31) is installed on the chip fixed mount (22) with one heart; Permanent magnet N, the S extreme direction of Surface field intensity 500～3500 oersteds are settled along the radial direction of rotating shaft (38).
Fig. 9 is for having the anisotropic trilamellar membrane tunnel junction of saturation field magneto-resistor giant magnetic resistor material typical electrical conductance and externally-applied magnetic field family curve.(this figure is Fe/Al
2O
3/ Fe family curve).
Figure 10 is for having the anisotropic trilamellar membrane tunnel junction of saturation field magneto-resistor giant magnetoresistance Wheatstone bridge chip synoptic diagram.
Figure 11 makes the slant angle sensor output characteristic curve for having saturation field magneto-resistor anisotropy trilamellar membrane tunnel junction giant magnetoresistance.
Figure 12 is inventive principle figure.
Embodiment 1:
On 5 * 5 square millimeters of silicon chips, the InSb film is made circular semibridge system mistor chip, effective responsive dimension of picture is 3.2 millimeters of Φ.This sensitive element chip is bonded at shown in accompanying drawing 5-a on the structure SMIS horse (22) with one heart.On pendulum fixed mount (17), with two miniature bearings (16) (16 ') fixed rotating shafts (15); Processed the step of center line in rotating shaft one side, semi-circular surface field 〉=3000 oersted Nd-Fe-B permanent magnets are guaranteed to be bonded in one heart on the step of axle.The fixing deadweight of rotating shaft other end pendulum (14).Chip fixed mount (22) relies on pyramid type tip face (23) self-centering bonding with pendulum fixed mount (17), is fixed on the end cap (19) for (30) 15 millimeters with eccentric throw.Place one and have 2 millimeters aperture rectangular clapboards of 2 φ, high 3 millimeters places are bent apart from shell (28) internal diameter top in its position, and after end cap (19) and shell (28) sealing were bonding, interpolation silicone oil was damping oil.The lower partition fills up, and the partially filled damping oil in dividing plate top is reserved the gap (26) of 1.5 millimeter apart from the top, to overcome the influence that the damping oil volume change of expanding with heat and contract with cold produced and to eliminate the influence of extraneous vibration to deadweight pendulum (14).50 millimeters of physical dimension φ, high 35 millimeters, in ± 45 ° of scopes, the linearity 1.5%, 0～55 ℃ of serviceability temperature, the mistor formula slant angle sensor of the miniaturization of response time≤0.1S.
Embodiment 2:
To be plated in the permalloy mistor film on the glass substrate (34), be etched into 4 * 4 square millimeters of four end full-bridge type mistor chips (31) as shown in Figure 4.Guaranteeing under the prerequisite of concentricity the semiconductor magnetic-sensing resistor chip (20) in the alternative embodiment 1 with this chip (36).Simultaneously the permanent magnet among the embodiment 1 (21) is changed into the NdFeB material permanent magnet (37) of Surface field intensity 3000 oersteds.N, S extreme direction and rotating shaft (38) radial parallel of permanent magnet (37) are installed, and as shown in Figure 8, other structures are constant.Obtain output characteristic curve as shown in Figure 5 thus.In ± 35 ° of measurement ranges, when input voltage was 5V, output voltage was zero crossing ± 50～60mV signal, the linearity 1.5%, serviceability temperature-40 °～100 ℃, response time≤0.1 second.By the electric signal standardization, can obtain the standard output signals of 1～5V or 4～20mA.
Embodiment 3:
To have anisotropy giant magnet resistance film Fe/Al
2O
3/ Fe material is plated on the glass substrate (40), adopts figure and the similar manufacturing process identical with processing permalloy mistor chip, obtains the giant magnetoresistance chip, as shown in figure 10.It under the situation of other structure and invariant position, is substituted permalloy mistor chip (36), obtain the output characteristic curve of shape as shown in figure 11.The Vout maximal value is ± 150mV.By the electric signal standardization, can obtain the standard output signals of 1～5V or 4～20mA.
Claims (4)
1, the contactless slant angle sensor of a kind of deadweight pendulum-type mistor, it is characterized in that: adopt the sensitive element of semiconductor magnetic-sensing resistor chip (20) as incline measurement, with bearing (16) and (16 ') rotating shaft (15) is fixed on the pendulum fixed mount (17), pendulum (14) and permanent magnet (21) are installed respectively at the rotating shaft two ends, and mistor chip (20) is bonded on the chip fixed mount (22) with one heart; With identical circular cone tip face (23) location, guarantee the concentricity between chip and the permanent magnet between chip fixed mount and the pendulum fixed mount; Keep 0.1～2 mm clearance between mistor chip (20) and the permanent magnet (21), constitute contactless induction of signal structure; The pendulum fixed mount is sealed among rectangular clapboard (24) downside and end cap (19) and the shell (28); Add a rectangular clapboard (24) at pendulum (14) and pendulum fixed mount (17) upside, sensor internal is divided into two spaces up and down, its volume ratio is between 50%: 50% to 1%: 99%, and concrete rate value is determined by the measure expansion amount of damping oil that sensor internal is adorned; Have one or more small through hole (27) on the rectangular clapboard (24), the diameter in hole is 0.1～15 millimeter, and the area summation of being punched should be less than 50% of the dividing plate total area; Damping oil fills up rectangular clapboard (24) below, the partially filled damping oil of rectangular clapboard superjacent air space (25), the air void of staying (26) greater than the measure expansion amount of damping oil, when ambient temperature changes, corresponding change can take place in the damping oil volume, it can interpenetrate up and down by the hole on the rectangular clapboard (24), and pendulum space of living in always is in damping oil and fills up state; Mistor chip (20) is concentric bonding with the chip fixed mount, adopts circular cone tip face (23) to cooperate between chip fixed mount and the bearing fixing frame, the automatic centering of formation assembling process tip face.
2, sensor according to claim 1 is characterized in that: the pendulum fixed mount is placed so that eccentric throw (30) is eccentric, and eccentric throw (30) produces moment by pendulum length or pendulum and the scope that takes measurement of an angle is determined.
3, sensor according to claim 1 and 2, it is characterized in that: with the low-dimensional permalloy mistor film that is plated on the substrate slice (34), adopt photoetching, wet chemistry to corrode or dry method ion etching makes that four groups of stripeds are vertical mutually, the chip (36) of Hui Sideng four arm electrical bridge (31) is as sensitive element, alternative semiconductors mistor chip (20), and it is installed on the chip fixed mount (22) with one heart; The available devitrified glass of substrate slice (34), glass, potsherd, aluminium oxide, magnesium oxide, ferrite or silicon chip are made; The permanent magnet material that adopts Surface field intensity 500～3500 oersteds is as signal triggering permanent magnet (37), with permanent magnet N, S extreme direction and the parallel installation of rotating shaft (38) radial direction.
4, sensor according to claim 1 and 2, it is characterized in that: have the anisotropic giant magnet resistance film of magneto-resistor under saturation magnetic field with the low-dimensional that is plated on the substrate slice (40), adopt photoetching, wet chemistry to corrode or dry method ion etching makes that four groups of stripeds are vertical mutually, the chip of Hui Sideng four arm electrical bridge (39) is as sensitive element, alternative semiconductors mistor chip (20) or permalloy mistor chip (36), and it is installed on the chip fixed mount (22) with one heart; The available devitrified glass of substrate slice (40), glass, potsherd, aluminium oxide, magnesium oxide, ferrite or silicon chip etc. are made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01102651 CN1118682C (en) | 2001-02-08 | 2001-02-08 | Slope angle sensor using magnetosensitive resistor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01102651 CN1118682C (en) | 2001-02-08 | 2001-02-08 | Slope angle sensor using magnetosensitive resistor |
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| Publication Number | Publication Date |
|---|---|
| CN1300933A true CN1300933A (en) | 2001-06-27 |
| CN1118682C CN1118682C (en) | 2003-08-20 |
Family
ID=4652898
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01102651 Expired - Fee Related CN1118682C (en) | 2001-02-08 | 2001-02-08 | Slope angle sensor using magnetosensitive resistor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101680740B (en) * | 2007-05-29 | 2011-06-01 | Nxp股份有限公司 | External magnetic field angle determination |
| CN102126477A (en) * | 2011-02-16 | 2011-07-20 | 电子科技大学 | Anti-rollover early warning device for automobile |
| CN101636633B (en) * | 2007-01-03 | 2011-12-28 | 肖克沃奇股份有限公司 | Anti-vibration tilt detector |
| CN103234048A (en) * | 2013-04-11 | 2013-08-07 | 北京交通大学 | Dustproof sealing device of magnetic liquid and for wind sensor |
| CN108469594A (en) * | 2018-03-13 | 2018-08-31 | 海宁嘉晨汽车电子技术有限公司 | A kind of high-precision, closed loop gradient magnetoresistive sensor |
| CN113029088A (en) * | 2021-05-08 | 2021-06-25 | 国网新疆电力有限公司喀什供电公司 | Online monitoring system and monitoring method for tower inclination |
| CN114590732A (en) * | 2022-03-04 | 2022-06-07 | 晋城市国盛机械股份有限公司 | Pressurization antiskid system for hoisting long steel rail by electric hoist |
| WO2022183827A1 (en) * | 2021-03-01 | 2022-09-09 | 歌尔微电子股份有限公司 | Sensor and electronic device |
-
2001
- 2001-02-08 CN CN 01102651 patent/CN1118682C/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101636633B (en) * | 2007-01-03 | 2011-12-28 | 肖克沃奇股份有限公司 | Anti-vibration tilt detector |
| CN101680740B (en) * | 2007-05-29 | 2011-06-01 | Nxp股份有限公司 | External magnetic field angle determination |
| US10209321B2 (en) | 2007-05-29 | 2019-02-19 | Nxp B.V. | External magnetic field angle determination |
| CN102126477A (en) * | 2011-02-16 | 2011-07-20 | 电子科技大学 | Anti-rollover early warning device for automobile |
| CN103234048A (en) * | 2013-04-11 | 2013-08-07 | 北京交通大学 | Dustproof sealing device of magnetic liquid and for wind sensor |
| CN103234048B (en) * | 2013-04-11 | 2015-10-28 | 北京交通大学 | A kind of magnetic liquid dust-proof sealing device for wind sensor |
| CN108469594A (en) * | 2018-03-13 | 2018-08-31 | 海宁嘉晨汽车电子技术有限公司 | A kind of high-precision, closed loop gradient magnetoresistive sensor |
| CN108469594B (en) * | 2018-03-13 | 2023-07-07 | 武汉嘉晨电子技术有限公司 | High-precision closed-loop gradient magnetic resistance sensor |
| WO2022183827A1 (en) * | 2021-03-01 | 2022-09-09 | 歌尔微电子股份有限公司 | Sensor and electronic device |
| CN113029088A (en) * | 2021-05-08 | 2021-06-25 | 国网新疆电力有限公司喀什供电公司 | Online monitoring system and monitoring method for tower inclination |
| CN114590732A (en) * | 2022-03-04 | 2022-06-07 | 晋城市国盛机械股份有限公司 | Pressurization antiskid system for hoisting long steel rail by electric hoist |
| CN114590732B (en) * | 2022-03-04 | 2024-08-06 | 晋城市国盛机械股份有限公司 | Pressurizing anti-skid system for hoisting long steel rail by electric hoist |
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| Publication number | Publication date |
|---|---|
| CN1118682C (en) | 2003-08-20 |
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