WO2022175775A1 - 表示装置、表示装置の作製方法、表示モジュール、及び電子機器 - Google Patents
表示装置、表示装置の作製方法、表示モジュール、及び電子機器 Download PDFInfo
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- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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Definitions
- One embodiment of the present invention relates to a display device and a manufacturing method thereof.
- One embodiment of the present invention also relates to a display module and an electronic device.
- one embodiment of the present invention is not limited to the above technical field.
- Technical fields of one embodiment of the present invention include semiconductor devices, display devices, light-emitting devices, power storage devices, memory devices, electronic devices, lighting devices, input devices (e.g., touch sensors and the like), and input/output devices (e.g., touch panels and the like). ), their driving methods, or their manufacturing methods.
- display devices are expected to be applied to various uses.
- applications of large display devices include home television devices (also referred to as televisions or television receivers), digital signage (digital signage), and PIDs (Public Information Displays).
- smart phones, tablet terminals, and the like are being developed as personal digital assistants.
- display devices that have various functions in addition to displaying images, such as a function as a touch sensor or a function of capturing a fingerprint or palm print for authentication.
- Devices that require high-definition display devices include, for example, virtual reality (VR), augmented reality (AR), alternative reality (SR), and mixed reality (MR).
- VR virtual reality
- AR augmented reality
- SR alternative reality
- MR mixed reality
- a light-emitting element (also referred to as a light-emitting device, an EL element, or an EL device) using the electroluminescence (hereinafter referred to as EL) phenomenon can easily be made thin and light, and can respond quickly to an input signal. It has characteristics such as being able to be driven using a DC constant voltage power supply, and is applied to display devices.
- Patent Literature 1 discloses a display device for VR using an organic EL element (also referred to as an organic EL device).
- each organic EL element When manufacturing a display device having a plurality of organic EL elements, it is preferable to form the light-emitting layer of each organic EL element in an island shape, that is, to separate each organic EL element.
- layers provided in common for two adjacent light emitting units such as a hole injection layer, a hole transport layer. It is possible to suppress the flow of current between two adjacent light-emitting units through one or more of the light-emitting layer, the electron-transporting layer, the electron-injecting layer, and the intermediate layer (charge-generating layer). can. Therefore, unintended light emission (also referred to as crosstalk) of the organic EL element can be suppressed. Therefore, the contrast of an image displayed on the display device can be increased, and a display device with high display quality can be realized.
- the layer contours may be blurred and the edge thickness may be reduced.
- the thickness of the island-shaped light-emitting layer may vary depending on the location.
- the manufacturing yield will be low due to low dimensional accuracy of the metal mask and deformation due to heat or the like.
- An object of one embodiment of the present invention is to provide a high-definition display device.
- An object of one embodiment of the present invention is to provide a high-resolution display device.
- An object of one embodiment of the present invention is to provide a large-sized display device.
- An object of one embodiment of the present invention is to provide a highly reliable display device.
- An object of one embodiment of the present invention is to provide an inexpensive display device.
- An object of one embodiment of the present invention is to provide a multifunctional display device.
- An object of one embodiment of the present invention is to provide a highly convenient display device.
- An object of one embodiment of the present invention is to provide a novel display device.
- An object of one embodiment of the present invention is to provide a method for manufacturing a high-definition display device.
- An object of one embodiment of the present invention is to provide a method for manufacturing a high-resolution display device.
- An object of one embodiment of the present invention is to provide a method for manufacturing a large-sized display device.
- An object of one embodiment of the present invention is to provide a highly reliable method for manufacturing a display device.
- An object of one embodiment of the present invention is to provide a method for manufacturing a display device with high yield.
- An object of one embodiment of the present invention is to provide a method for manufacturing a multifunctional display device.
- An object of one embodiment of the present invention is to provide a highly convenient method for manufacturing a display device.
- An object of one embodiment of the present invention is to provide a novel method for manufacturing a display device.
- One embodiment of the present invention includes a first light-emitting element, a light-receiving element adjacent to the first light-emitting element, a first sidewall having a region provided between the first light-emitting element and the light-receiving element, and a second a sidewall, the first light emitting element having a first pixel electrode, a first light emitting layer on the first pixel electrode, and a common electrode on the first light emitting layer;
- the light-receiving element has a second pixel electrode, a light-receiving layer on the second pixel electrode, and a common electrode on the light-receiving layer.
- one embodiment of the present invention includes a first sidewall having a first light-emitting element, a light-receiving element adjacent to the first light-emitting element, a region provided between the first light-emitting element and the light-receiving element, 2 sidewalls, a third sidewall, and a fourth sidewall, and the first light emitting element includes a first pixel electrode, a first light emitting layer on the first pixel electrode, and a first pixel electrode.
- the light-receiving element has a second pixel electrode, a light-receiving layer on the second pixel electrode, and a common electrode on the light-receiving layer, and the first The sidewall is in contact with the side surface of the first pixel electrode and at least part of the side surface of the first light-emitting layer, and the second sidewall is in contact with the side surface of the second pixel electrode and at least part of the side surface of the light-receiving layer.
- the third sidewall covers at least part of the side surface and top surface of the first sidewall; the fourth sidewall covers at least part of the side surface and top surface of the second sidewall; This is a display device in which a common electrode is provided on sidewalls.
- a common layer is provided between the first light-emitting layer and the light-receiving layer and the common electrode, and the common layer serves as an electron injection layer or a hole injection layer in the first light-emitting element. and the common layer may function as an electron-transporting layer or a hole-transporting layer in the light-receiving element.
- the first pixel electrode and the second pixel electrode are provided on an insulating layer, and the insulating layer has a first protrusion in a region overlapping with the first pixel electrode to provide insulation.
- the layer may have a second protrusion in a region overlapping with the second pixel electrode.
- the first light-emitting element includes a first intermediate layer on the first light-emitting layer, a second light-emitting layer on the first intermediate layer, and a common electrode on the second light-emitting layer. and, wherein the first sidewall may contact at least a portion of the side surface of the first intermediate layer and the side surface of the second light emitting layer.
- the second light-emitting element includes a third pixel electrode, a third light-emitting layer on the third pixel electrode, and a light-emitting layer on the third light-emitting layer.
- a second intermediate layer, a fourth light emitting layer on the second intermediate layer, and a common electrode on the fourth light emitting layer, a first light emitting element and a second light emitting element are adjacent to each other, the first light-emitting layer and the third light-emitting layer have the function of emitting light of the same color, and the second light-emitting layer and the fourth light-emitting layer emit light of the same color. It may have a function of emitting light.
- a protective layer is provided on the common electrode, and a first colored layer is provided on the protective layer so as to have a region overlapping with the first light-emitting layer and the second light-emitting layer, A second colored layer on the protective layer so as to have a region overlapping with the third light-emitting layer and the fourth light-emitting layer, and the first colored layer and the second colored layer have different colors may have a function of transmitting light of
- a display module including the display device of one embodiment of the present invention and at least one of a connector and an integrated circuit is also one embodiment of the present invention.
- Another embodiment of the present invention is an electronic device including the display module of one embodiment of the present invention and at least one of a housing, a battery, a camera, a speaker, and a microphone.
- an insulating layer is formed, a conductive film, a first light-emitting film, and a first sacrificial film are sequentially formed over the insulating layer, and the first sacrificial film and the first sacrificial film are formed over the insulating layer.
- a light-receiving film and a second sacrificial film are formed in this order, and the second sacrificial film and the light-receiving film are etched to form a light-receiving layer on the conductive film and a second sacrificial layer on the light-receiving layer.
- the conductive film is etched to form a first pixel electrode under the first light-emitting layer and a second pixel electrode under the light-receiving layer, side surfaces of the first and second pixel electrodes, forming a first insulating film covering at least part of a side surface of the first light-emitting layer, a side surface of the light-receiving layer, and side surfaces and upper surfaces of the first and second sacrificial layers; to form a first sidewall in contact with the side surface of the first pixel electrode and at least part of the side surface of the first light-emitting layer, the side surface of the second pixel electrode, and at least part of the side surface of the light-receiving layer and removing the first sacrificial layer and the second sacrificial layer, and forming a common electrode on the first light-emitting layer and the light-receiving layer.
- an insulating layer is formed, a conductive film, a first light-emitting film, and a first sacrificial film are sequentially formed over the insulating layer, and the first sacrificial film and the first sacrificial film are formed over the insulating layer.
- a light-receiving film and a second sacrificial film are formed in this order, and the second sacrificial film and the light-receiving film are etched to form a light-receiving layer on the conductive film and a second sacrificial layer on the light-receiving layer.
- the conductive film is etched to form a first pixel electrode under the first light-emitting layer and a second pixel electrode under the light-receiving layer, side surfaces of the first and second pixel electrodes, forming a first insulating film covering at least part of a side surface of the first light-emitting layer, a side surface of the light-receiving layer, and side surfaces and upper surfaces of the first and second sacrificial layers;
- a second insulating film is formed thereon, and the first insulating film and the second insulating film are etched to form at least part of the side surface of the first pixel electrode and the side surface of the first light-emitting layer.
- the conductive film may be etched using the first sacrificial layer and the second sacrificial layer as masks.
- a common layer is formed on the first light-emitting layer and the light-receiving layer, and the common layer is the first pixel electrode.
- the light-emitting element functions as an electron injection layer or a hole injection layer
- the common layer is common to the second pixel electrode and the light-receiving layer.
- a light-receiving element having an electrode may have a function as an electron-transporting layer or a hole-transporting layer.
- recesses may be formed in the insulating layer in the step of etching the conductive film.
- an intermediate film, a second light-emitting film, and a first sacrificial film are formed in this order on the first light-emitting film, and the first sacrificial film, the second light-emitting film, the intermediate film, and etching the first light-emitting film to form a first light-emitting layer on the conductive film, a first intermediate layer on the first light-emitting layer, and a second light-emitting layer on the first intermediate layer; forming a first sacrificial layer on the second light-emitting layer, side surfaces of the first and second pixel electrodes, side surfaces of the first and second light-emitting layers, and side surfaces of the first intermediate layer; forming a first insulating film covering at least part of the side surface of the absorption layer and the side surfaces and upper surfaces of the first and second sacrificial layers; etching the first insulating film; a first sidewall in contact with at least a portion of a side surface
- the first sacrificial film, the second light-emitting film, the intermediate film, and the first light-emitting film are etched to form a third light-emitting layer on the conductive film and a third light-emitting layer on the third light-emitting layer.
- a second colored layer having a layer overlapping region may be formed on the protective layer, and the first colored layer and the second colored layer may have a function of transmitting light of different colors. .
- One embodiment of the present invention can provide a high-definition display device.
- a high-resolution display device can be provided.
- a large display device can be provided.
- a highly reliable display device can be provided.
- an inexpensive display device can be provided.
- a multifunctional display device can be provided.
- a highly convenient display device can be provided.
- One embodiment of the present invention can provide a novel display device.
- a method for manufacturing a high-definition display device can be provided.
- a method for manufacturing a high-resolution display device can be provided.
- a method for manufacturing a large display device can be provided.
- a highly reliable method for manufacturing a display device can be provided.
- a method for manufacturing a display device with high yield can be provided.
- a method for manufacturing a multifunctional display device can be provided.
- a highly convenient method for manufacturing a display device can be provided.
- a novel method for manufacturing a display device can be provided.
- FIG. 1A and 1B are top views showing configuration examples of pixels.
- 1C to 1E are cross-sectional views showing examples of electronic devices.
- 2A to 2C are schematic diagrams showing examples of applications of the electronic device.
- FIG. 3 is a top view showing a configuration example of a display device.
- 4A to 4F are top views showing configuration examples of the display device.
- 5A to 5D are top views showing configuration examples of the display device.
- 6A and 6B are cross-sectional views showing configuration examples of the display device.
- FIG. 6C is a cross-sectional view showing a configuration example of the light emitting unit.
- FIG. 6D is a cross-sectional view showing a configuration example of the light receiving unit.
- 7A and 7B are cross-sectional views showing configuration examples of the display device.
- FIG. 7C is a cross-sectional view showing a configuration example of the light emitting unit.
- 8A and 8B are cross-sectional views showing configuration examples of the display device.
- FIG. 8C is a cross-sectional view showing a configuration example of the light receiving unit.
- 9A and 9B are cross-sectional views showing configuration examples of the display device.
- 10A and 10B are cross-sectional views showing configuration examples of the display device.
- 11A to 11C are cross-sectional views showing configuration examples of display devices.
- 12A and 12B are cross-sectional views showing configuration examples of the display device.
- FIG. 13 is a top view showing a configuration example of a display device.
- 14A to 14D are cross-sectional views showing configuration examples of display devices.
- 15A to 15E are cross-sectional views illustrating an example of a method for manufacturing a display device.
- 16A to 16E are cross-sectional views illustrating an example of a method for manufacturing a display device.
- 17A to 17D are cross-sectional views illustrating an example of a method for manufacturing a display device.
- 18A to 18D are cross-sectional views illustrating an example of a method for manufacturing a display device.
- 19A to 19G are cross-sectional views illustrating an example of a method for manufacturing a display device.
- 20A to 20D are cross-sectional views illustrating an example of a method for manufacturing a display device.
- FIG. 21 is a perspective view showing a configuration example of a display module.
- FIG. 21 is a perspective view showing a configuration example of a display module.
- FIG. 22 is a cross-sectional view showing a configuration example of a display device.
- FIG. 23 is a cross-sectional view showing a configuration example of a display device.
- 24A and 24B are perspective views showing configuration examples of the display module.
- FIG. 25 is a cross-sectional view showing a configuration example of a display device.
- FIG. 26 is a cross-sectional view showing a configuration example of a display device.
- FIG. 27 is a cross-sectional view showing a configuration example of a display device.
- 28A and 28B are diagrams illustrating examples of electronic devices.
- 29A and 29B are diagrams illustrating examples of electronic devices.
- 30A and 30B are diagrams illustrating examples of electronic devices.
- 31A to 31D are diagrams illustrating examples of electronic devices.
- 32A to 32F are diagrams illustrating examples of electronic devices.
- film and “layer” can be interchanged depending on the case or circumstances.
- conductive layer can be changed to the term “conductive film.”
- insulating film can be changed to the term “insulating layer”.
- a device manufactured using a metal mask or FMM fine metal mask, high-definition metal mask
- a device with an MM (metal mask) structure is sometimes referred to as a device with an MML (metal maskless) structure.
- a display device of one embodiment of the present invention includes a display portion in which pixels are arranged in matrix.
- a pixel includes a light-emitting element, which is a type of display element (also referred to as a display device), and a light-receiving element (also referred to as a light-receiving device).
- the pixel includes a light-receiving element, so that the display device of one embodiment of the present invention can detect an object that is in contact with or close to the display portion.
- the display device of one embodiment of the present invention can function as, for example, a touch sensor or a near-touch sensor (also referred to as a hover sensor). Therefore, the display device of one embodiment of the present invention can be a multifunctional display device by including a light-receiving element in each pixel.
- a conductive film is formed over an insulating layer.
- a first layer having a first light-emitting film is formed over the conductive film.
- an intermediate film is formed on the first layer.
- a second layer having a second light-emitting film is formed over the intermediate film.
- a first sacrificial film is formed on the second layer.
- a resist mask is formed over the first sacrificial film by photolithography or the like. After that, the first sacrificial film, the second layer, the intermediate film, and the first layer are etched using the resist mask. Thus, the first light emitting unit on the conductive film, the first intermediate layer on the first light emitting unit, the second light emitting unit on the first intermediate layer, and the second light emitting unit on the second light emitting unit.
- a sacrificial layer 1 is formed in an island shape.
- a third light-emitting unit over the conductive film, a second intermediate layer over the third light-emitting unit, a fourth light-emitting unit over the second intermediate layer, and a second light-emitting unit over the fourth light-emitting unit and a sacrificial layer of are formed in an island shape.
- the first to fourth light-emitting units have first to fourth light-emitting layers, respectively.
- a third layer having a light-receiving film is formed over the conductive film and the first and second sacrificial layers. After that, a second sacrificial film is formed on the third layer.
- a resist mask is formed over the second sacrificial film by photolithography or the like. After that, the second sacrificial film and the third layer are etched using a resist mask. Thus, the light receiving unit on the conductive film and the third sacrificial layer on the light receiving unit are formed in an island shape.
- the light receiving unit has a light receiving layer.
- the conductive film is etched using the first to third sacrificial layers as masks.
- the first pixel electrode under the first light emitting unit, the second pixel electrode under the third light emitting unit, and the third pixel electrode under the light receiving unit are formed in an island shape.
- the island-shaped light-emitting units, the light-receiving units, and the like are formed by a photolithography method or the like, not by a metal mask pattern. be. Therefore, it is possible to realize a high-definition display device or a display device with a high aperture ratio, which has been difficult to achieve.
- the light-emitting units and the like can be formed in an island shape, a display device with high contrast and high display quality can be realized.
- the above method can reduce the distance to 3 ⁇ m or less, 2 ⁇ m or less, or 1 ⁇ m or less.
- the patterns of the light emitting unit and the light receiving unit themselves can be made much smaller than when a metal mask is used.
- the thickness varies between the center and the edge of the pattern. The effective area that can be used is smaller.
- the manufacturing method described above since a film formed to have a uniform thickness is etched, the island-shaped light-emitting layer, the light-receiving layer, and the like can be formed with a uniform thickness. Therefore, even if the light-emitting unit and the light-receiving unit have fine patterns, almost the entire area thereof can be used as the light-emitting region or the light-receiving region. Therefore, a display device having both high definition and high aperture ratio can be manufactured.
- the light-emitting element has a structure in which two or more light-emitting units are stacked with an intermediate layer interposed therebetween. That is, the light-emitting element included in the display device of one embodiment of the present invention can have a tandem structure.
- the light-emitting element can emit white light by, for example, making the colors of light emitted by two stacked light-emitting units complementary. Therefore, by providing a colored layer in a region overlapping with a light-emitting element, the display device of one embodiment of the present invention can perform full-color display, for example.
- each of the first to fourth light-emitting units includes at least a light-emitting layer, and preferably consists of a plurality of layers.
- the light-receiving unit includes at least a light-receiving layer, and preferably consists of a plurality of layers. Specifically, it is preferable to have one or more layers on the light-emitting layer and to have one or more layers on the light-receiving layer. Other layers are provided between the light-emitting layer and the sacrificial layer and between the light-receiving layer and the sacrificial layer to prevent the light-emitting layer and the light-receiving layer from being exposed to the outermost surface during the manufacturing process of the display device. be able to.
- each of the first to fourth light-emitting units and the light-receiving unit preferably has a carrier-transporting layer on the light-emitting layer or on the light-receiving layer in addition to the light-emitting layer or the light-receiving layer.
- the sacrificial layer is removed, and the remaining layers forming the light-emitting element are used as common layers. It is formed in common with the light emitting elements.
- a common electrode also referred to as an upper electrode
- the common layer functions as, for example, a carrier injection layer in the light emitting device.
- the common layer can be used as a constituent element of a light-receiving element as well as a light-emitting element. In this case, the common layer functions as, for example, a carrier transport layer in the light receiving element.
- the carrier injection layer that can be used as a common layer is often a layer with relatively high conductivity in the light-emitting element. Therefore, when the common layer is in contact with the side surface of the island-shaped layer, the light emitting element may be short-circuited. Also, in the light-receiving element, there is a possibility that the light-receiving element is short-circuited when the common layer is in contact with the side surface of the island-shaped layer.
- the common layer is not provided and, for example, the carrier injection layer is provided in an island shape
- the light emitting element is short-circuited when the common electrode is in contact with the side surface of the light emitting unit, the side surface of the light receiving unit, or the side surface of the pixel electrode.
- sidewalls also referred to as sidewalls, sidewall protective layers, sidewall insulating films, insulating layers, or the like
- sidewalls are provided to cover the side surfaces of the island-shaped layers.
- FIG. 1A and 1B are top views illustrating configuration examples of pixels included in a display device of one embodiment of the present invention.
- the pixel 110 shown in FIG. 1A has sub-pixel G, sub-pixel B, sub-pixel R, sub-pixel PS, and sub-pixel W.
- sub-pixel G sub-pixel G
- sub-pixel B sub-pixel B
- sub-pixel R sub-pixel R
- sub-pixel PS sub-pixel W
- FIG. 1A shows an example in which sub-pixels are arranged in two rows and three columns in one pixel 110 .
- the pixel 110 shown in FIG. 1A has three sub-pixels (sub-pixel G, sub-pixel B, and sub-pixel R) in the upper row (first row), and It has two sub-pixels (sub-pixel PS and sub-pixel W).
- the pixel 110 shown in FIG. 1A has two subpixels (subpixel G and subpixel PS) in the left column (first column) and subpixels in the center column (second column). B and sub-pixel R in the right column (third column). Furthermore, it has sub-pixels W over the second and third columns.
- a pixel 110 shown in FIG. 1B differs from the pixel 110 shown in FIG. 1A in that it has two sub-pixels W.
- FIG. 1B A pixel 110 shown in FIG. 1B differs from the pixel 110 shown in FIG. 1A in that it has two sub-pixels W.
- FIG. 1B shows an example in which sub-pixels are arranged in two rows and three columns in one pixel 110 .
- the pixel 110 shown in FIG. 1B has three sub-pixels (sub-pixel G, sub-pixel B, and sub-pixel R) in the upper row (first row), and It has three sub-pixels (sub-pixel PS and two sub-pixels W).
- the pixel 110 shown in FIG. 1B has two sub-pixels (sub-pixel G and sub-pixel PS) in the left column (first column) and two sub-pixels in the center column (second column). It has sub-pixels (sub-pixel B and sub-pixel W), and has two sub-pixels (sub-pixel R and sub-pixel W) in the right column (third column).
- the layout of the sub-pixels is not limited to the configuration shown in FIG. 1A or 1B. Other examples of sub-pixel layouts will be described later.
- FIG. 1C and 1D illustrate an example of a cross-sectional view of an electronic device 10 including a display device of one embodiment of the present invention.
- FIG. 1C is a schematic diagram illustrating the function of the electronic device 10 as a display device and the function of detecting an object in contact with the electronic device 10.
- FIG. 1D is a schematic diagram illustrating the function of the electronic device 10 as a display device and the function of detecting an object approaching the electronic device 10.
- FIG. 1E is a schematic diagram illustrating the function of the electronic device 10 as a lighting device.
- Electronic device 10 shown in FIGS. 1C to 1E has display device 100 between housing 103 and protective member 105 .
- the display device 100 shown in FIGS. 1C to 1E corresponds to the cross-sectional structure along the dashed-dotted line A1-A2 in FIG. 1A.
- the sub-pixel R has a function of emitting red light 31R.
- the sub-pixel G has a function of emitting green light 31G.
- the sub-pixel B has a function of emitting blue light 31B.
- the sub-pixel PS functions as a light-receiving region
- the sub-pixel W has a function of emitting white light 31W.
- Sub-pixel R, sub-pixel G, sub-pixel B, and sub-pixel W each have a light-emitting element. Also, the sub-pixel PS has a light receiving element. A light-emitting element and a light-receiving element are provided between the substrate 102 and the substrate 120 .
- the light-receiving area of the sub-pixel PS is preferably small, and may be smaller than the light-emitting area of the sub-pixel W, for example.
- the smaller the light-receiving area the narrower the imaging range, which makes it possible to suppress the blurring of the imaging result and improve the resolution. Therefore, high-definition or high-resolution imaging can be performed by using the sub-pixels PS.
- the sub-pixels PS can be used to capture images for personal authentication using fingerprints, palm prints, irises, pulse shapes (including vein shapes and artery shapes), or faces.
- green light 31G emitted by the sub-pixel G is reflected by an object 108 (here, a finger) in contact with or close to the protective member 105, and reflected from the object 108.
- Light 32G is incident on the sub-pixel PS. This allows the electronic device 10 to detect the object 108 . Therefore, the electronic device 10 can function as an optical sensor.
- the electronic device 10 has a function as an optical sensor, it can detect the object 108 even if the object 108 is not in contact with the protective member 105 as shown in FIG. 1D. Therefore, the electronic device 10 can perform, for example, a non-contact operation corresponding to a touch operation of a touch panel. Therefore, the electronic device 10 can be used hygienically. For example, even when the electronic device 10 is used by an unspecified number of people, it is possible to prevent the user of the electronic device 10 from being infected with bacteria, viruses, or the like attached to the electronic device 10 .
- the electronic device 10 has a function as an optical sensor, the object 108 can be detected even if the object 108 is, for example, a gloved finger or a finger with water droplets.
- the electronic device 10 can be a highly convenient electronic device.
- the display device 100 can be a highly convenient display device.
- the electronic device 10 can image the fingerprint of the object 108 using the sub-pixels PS.
- the electronic device 10 can image the fingerprint of the object 108 . Thereby, the electronic device 10 can perform fingerprint authentication.
- the pixel 110 is provided with the sub-pixel PS, for example, the entire display section of the display device 100 can be imaged. Therefore, the imaging range can be widened, for example, compared to the case where the light receiving area is provided outside the display unit. Thereby, for example, two or more fingers can be brought into contact with the imaging range. In this case, the electronic device 10 can capture, for example, multiple fingerprints. Therefore, the accuracy of authentication in the electronic device 10 can be improved. Specifically, for example, the false rejection rate and the false acceptance rate can be lowered.
- the entire palm can be brought into contact with the image capturing range.
- the electronic device 10 can perform authentication based on the palm print.
- FIGS. 1C and 1D show an example in which the sub-pixel PS detects an object using the green light 31G emitted by the sub-pixel G
- the wavelength of the light detected by the sub-pixel PS is particularly limited. not.
- the sub-pixel PS preferably detects visible light, and preferably detects one or more of colors such as blue, purple, violet, green, yellow-green, yellow, orange, and red. Also, the sub-pixel PS may detect infrared light.
- the sub-pixel PS may have the function of detecting the red light 31R emitted by the sub-pixel R. Also, the sub-pixel PS may have a function of detecting the blue light 31B emitted by the sub-pixel B.
- FIG. 1 the sub-pixel PS may have the function of detecting the red light 31R emitted by the sub-pixel R. Also, the sub-pixel PS may have a function of detecting the blue light 31B emitted by the sub-pixel B.
- the sub-pixel that emits the light detected by the sub-pixel PS is preferably provided near the sub-pixel PS within the pixel 110 .
- the pixel 110 can be configured such that the sub-pixel PS detects light emitted by the sub-pixel G adjacent to the sub-pixel PS. With such a configuration, the accuracy of light detection by the sub-pixels PS can be enhanced.
- the sub-pixel W emits white light 31W.
- the light emitting element included in the sub-pixel W should be configured by stacking two or more light emitting layers, and the light emitting layers should be selected so that the light emitted from each layer has a complementary color relationship. For example, by setting the emission color of the first light-emitting layer and the emission color of the second light-emitting layer to have a complementary color relationship, it is possible to obtain a configuration in which the entire light-emitting element emits white light. The same applies to a light-emitting element having three or more light-emitting layers.
- the sub-pixel R, the sub-pixel G, and the sub-pixel B are also provided with light-emitting elements that emit white light.
- the sub-pixel R with a colored layer that transmits red light
- the sub-pixel G with a colored layer that transmits green light
- the sub-pixel B with a colored layer that transmits blue light
- R, subpixel G, and subpixel B can be red, green, and blue subpixels, respectively.
- the white light 31W may be light with high instantaneous brightness such as flash light or strobe light, or may be light with high color rendering properties such as reading light.
- the color temperature of the white light may be lowered.
- the white light 31W can be a warm white light (e.g., 2500K or more and less than 3250K) or a warm white color (3250K or more and less than 3800K), so that the light source can be easy on the eyes of the user.
- the strobe light function can be realized, for example, by repeating light emission and non-light emission in a short cycle.
- the flashlight function can be realized by, for example, a configuration that generates a flash of light by instantaneous discharge using the principle of an electric double layer or the like.
- FIGS. 2A to 2C are schematic diagrams showing examples of applications of the electronic device.
- the electronic device 10 when the electronic device 10 is provided with a camera function, by using a strobe light function or a flashlight function, the electronic device 10 can take an image even at night as shown in FIG. 2A.
- the display device 100 of the electronic device 10 functions as a surface light source, and shadows are less likely to occur on the subject, so a clear image can be captured.
- the strobe light function or flash light function can be used not only at night.
- the color temperature of white light emission may be increased.
- the color temperature of the light emitted from the electronic device 10 may be white (3800K or more and less than 4500K), neutral white (4500K or more and less than 5500K), or daylight color (5500K or more and less than 7100K).
- the flash when the flash emits light that is more intense than necessary, there are cases in which portions of the image that originally have varying degrees of brightness become white (so-called blown out highlights). On the other hand, if the flash light emission is too weak, the dark portions of the image may become solid black (so-called black saturation). On the other hand, the sub-pixel PS may detect the brightness around the object, so that the light emitted from the sub-pixel W may be adjusted to the optimum light amount. That is, it can be said that the electronic device 10 has a function as an exposure meter.
- the strobe light function and the flash light function can be used for security purposes, self-defense purposes, and the like.
- the thug can be frightened by causing the electronic device 10 to emit light toward the thug.
- the display device 100 of the electronic device 10 is a surface light source, even if the orientation of the display device 100 is slightly deviated, the luminescence of the display device 100 can be seen by the thug.
- the display device 100 when functioning as a flashlight for crime prevention or self-defense, it is preferable to set the brightness higher than that during nighttime imaging shown in FIG. 2A.
- the electronic device 10 may emit a sound such as a relatively loud buzzing sound in order to call for help from the surroundings. By uttering a sound near the thug's face, it is possible to frighten the thug not only with the light but also with the sound, which is preferable.
- the electronic device 10 capable of emitting light with high color rendering properties may be used as a reading lamp, for example.
- electronic device 10 is secured to desk 14 using support 12 .
- the electronic device 10 can be used as a reading lamp. Since the display device 100 of the electronic device 10 functions as a surface light source, it is difficult for the object (the book in FIG. 2C) to be shaded, and since the distribution of the reflected light from the object is gentle, the light is less likely to be reflected. This improves the visibility of the target and makes it easier to see.
- the emission spectrum of the light emitting element included in the sub-pixel W is broad, blue light is relatively reduced. Therefore, for example, eye strain of the user of the electronic device 10 can be reduced.
- the configuration of the support 12 is not limited to that shown in FIG. 2C. Arms, movable parts, or the like may be appropriately provided so that the range of motion is widened as much as possible. Further, in FIG. 2C, the support 12 holds the electronic device 10 in a sandwiched manner, but the present invention is not limited to this. For example, a configuration using a magnet, a suction cup, or the like as appropriate may be employed.
- White is preferable as the luminescent color for the above lighting applications.
- the emission color for lighting purposes there is no particular limitation on the emission color for lighting purposes, and the user of the electronic device 10 can appropriately select the optimum emission color such as white, blue, purple, blue-violet, green, yellow-green, yellow, orange, and red. One or more can be selected.
- the display device of this embodiment mode has a structure in which pixels are arranged in a matrix in a display portion.
- a pixel can have a structure in which a plurality of types of sub-pixels each having a light-emitting element are included.
- the pixel has a sub-pixel having a light receiving element.
- a pixel can be configured to have four types of sub-pixels. One of the four sub-pixels is a sub-pixel having a light receiving element. The remaining three sub-pixels are red (R), green (G) and blue (B) sub-pixels and yellow (Y), cyan (C) and magenta (M) sub-pixels.
- R red
- G green
- B blue
- Y yellow
- C cyan
- M magenta
- the pixel can be configured to have five types of sub-pixels.
- One of the five sub-pixels is a sub-pixel having a light receiving element.
- the remaining four sub-pixels include R, G, B, and white (W) four-color sub-pixels and R, G, B, and Y four-color sub-pixels.
- the arrangement of sub-pixels includes, for example, a stripe arrangement, a matrix arrangement, a delta arrangement, and the like.
- top surface shapes of sub-pixels include triangles, quadrilaterals (including rectangles and squares), polygons such as pentagons, shapes with rounded corners, ellipses, and circles.
- the top surface shape of the sub-pixel corresponds to the top surface shape of the light emitting region of the light emitting element.
- the top surface shape of the sub-pixel may be a polygonal shape with rounded corners, an elliptical shape, a circular shape, or the like.
- a light-emitting unit included in a light-emitting element and a light-receiving unit included in a light-receiving element are processed into an island shape using a resist mask.
- the light-emitting unit has at least a light-emitting layer
- the light-receiving unit has at least a light-receiving layer.
- the resist film formed on the light-emitting unit and the light-receiving unit needs to be cured at a temperature lower than the heat-resistant temperature of the light-emitting unit and the light-receiving unit. Therefore, curing of the resist film may be insufficient depending on the heat resistance temperature of the materials of the light emitting unit and the light receiving unit and the curing temperature of the resist material.
- a resist film that is insufficiently hardened may take a shape away from the desired shape during processing.
- the top surface shape of the light-emitting unit and the light-receiving unit may be a polygonal shape with rounded corners, an elliptical shape, a circular shape, or the like. For example, when an attempt is made to form a resist mask with a square top surface shape, a resist mask with a circular top surface shape is formed, and the light emitting unit and the light receiving unit may have circular top surface shapes.
- a technique for correcting the mask pattern in advance so that the design pattern and the transfer pattern match.
- OPC Optical Proximity Correction
- a pattern for correction is added to the figure corner portion or the like on the mask pattern.
- FIG. 3 is a top view illustrating a configuration example of the display device 100, which is a display device of one embodiment of the present invention.
- the display device 100 has a display section in which a plurality of pixels 110 are arranged in a matrix, and a connection section 140 outside the display section.
- One pixel 110 is composed of four sub-pixels: sub-pixel 110a, sub-pixel 110b, sub-pixel 110c, and sub-pixel 110d.
- FIG. 3 shows an example in which sub-pixels of different colors are arranged side by side in the X direction and sub-pixels of the same color are arranged side by side in the Y direction. Note that sub-pixels of different colors may be arranged side by side in the Y direction, and sub-pixels of the same color may be arranged side by side in the X direction.
- FIG. 3 shows an example in which the connecting portion 140 is positioned below the display portion when viewed from above
- the position of the connecting portion 140 is not particularly limited.
- the connecting portion 140 may be provided at least one of the upper side, the right side, the left side, and the lower side of the display portion when viewed from above, and may be provided so as to surround the four sides of the display portion.
- the number of connection parts 140 may be singular or plural.
- the pixel 110 shown in FIG. 3 is composed of four sub-pixels: sub-pixel 110a, sub-pixel 110b, sub-pixel 110c, and sub-pixel 110d.
- One of the sub-pixels 110a, 110b, 110c, and 110d has a light receiving element.
- the remaining three have light-emitting elements that emit white light, for example.
- the subpixel 110a, the subpixel 110b, and the subpixel 110c can be provided with light-emitting elements that emit white light.
- a colored layer transmitting red light in the sub-pixel 110a By providing a colored layer transmitting red light in the sub-pixel 110a, a colored layer transmitting green light in the sub-pixel 110b, and a colored layer transmitting blue light in the sub-pixel 110c, 110a, subpixel 110b, and subpixel 110c can be red, green, and blue subpixels, respectively.
- the sub-pixel 110d can be a sub-pixel having a light receiving element.
- a stripe arrangement is applied to the pixels 110 shown in FIGS. 4A to 4C.
- the pixel 110 shown in FIGS. 4A to 4C can be said to be a modification of the pixel 110 shown in FIG.
- FIG. 4A is an example in which each sub-pixel has a rectangular top surface shape
- FIG. 4B is an example in which each sub-pixel has a top surface shape connecting two semicircles and a rectangle
- FIG. This is an example where the sub-pixel has an elliptical top surface shape.
- FIG. 4D is an example in which each sub-pixel has a square top surface shape
- FIG. 4E is an example in which each sub-pixel has a substantially square top surface shape with rounded corners
- FIG. which have a circular top shape.
- Pixel 125a has two sub-pixels (sub-pixel 110a and sub-pixel 110b) in the upper row (first row), and two sub-pixels (sub-pixel 110c, and sub-pixel 110d).
- Pixel 125b has two sub-pixels (sub-pixel 110c and sub-pixel 110d) in the upper row (first row) and two sub-pixels (sub-pixel 110a, sub-pixel 110d) in the lower row (second row). and sub-pixel 110b).
- FIG. 5A is an example in which each sub-pixel has a substantially square top surface shape with rounded corners
- FIG. 5B is an example in which each sub-pixel has a circular top surface shape.
- FIG. 5C shows an example in which sub-pixels are arranged in two rows and three columns in one pixel 110 .
- Pixel 110 has three sub-pixels (sub-pixel 110a, sub-pixel 110b, and sub-pixel 110c) in the upper row (first row) and one sub-pixel in the lower row (second row). (sub-pixel 110d).
- pixel 110 has subpixel 110a in the left column (first column), subpixel 110b in the middle column (second column), and subpixel 110b in the right column (third column).
- 110c, and sub-pixels 110d are provided over these three columns.
- a pixel 110 shown in FIG. 5D has a sub-pixel 110a, a sub-pixel 110b, a sub-pixel 110c, and a sub-pixel 110d having a substantially trapezoidal or triangular top surface shape with rounded corners.
- the sub-pixel 110a has a larger emission area than the sub-pixels 110b, 110c, and 110d.
- the shape and size of each sub-pixel can be determined independently.
- sub-pixels having more reliable light-emitting elements can be made smaller.
- sub-pixel 110a may be a blue sub-pixel
- sub-pixels 110b, 110c, and 110d may be red sub-pixels, green sub-pixels, and sub-pixels having light receiving elements, respectively.
- a display device of one embodiment of the present invention is a top emission type in which light is emitted in a direction opposite to a substrate provided with a light-emitting element, and light is emitted toward a substrate provided with a light-emitting element.
- a bottom emission type bottom emission type
- a double emission type dual emission type in which light is emitted from both sides may be used.
- FIG. 6A is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- FIG. 6A is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- the display device 100 includes a light-emitting element 130 and a light-receiving element 150 provided on a layer 101 including a transistor, and a protective layer 131 and a protective layer 131 to cover the light-emitting element 130 and the light-receiving element 150 .
- a layer 132 is provided.
- a colored layer 133 (a colored layer 133 a , a colored layer 133 b , and a colored layer 133 c ) is provided over the protective layer 132 .
- a substrate 120 is attached to the protective layer 132 and the colored layer 133 with a resin layer 119 .
- sidewalls 121 are provided in regions between adjacent light emitting elements 130 and between adjacent light emitting elements 130 and light receiving elements 150 .
- the layer 101 including transistors for example, a stacked structure in which a plurality of transistors are provided over a substrate and an insulating layer is provided to cover the transistors can be applied.
- the layer 101 including transistors may have recesses between adjacent light emitting elements 130 and between adjacent light emitting elements 130 and light receiving elements 150 . That is, the layer 101 including a transistor may have projections in a region overlapping with the light-emitting element 130 and a region overlapping with the light-receiving element 150 .
- the recess and the protrusion may be provided in an insulating layer located on the outermost surface of the layer 101 including the transistor.
- a structural example of the layer 101 including a transistor will be described later in Embodiment 2. FIG.
- the light emitting element 130 has a function of emitting white light, for example.
- a light-emitting element having a function of emitting white light is sometimes referred to as a white light-emitting element.
- a display device including a white light-emitting element can perform full-color display by being combined with a colored layer (also referred to as a color filter).
- the light receiving element 150 has a function of detecting light incident on the light receiving element 150 and generating charges according to the amount of light. That is, the light receiving element 150 functions as a photoelectric conversion element (also referred to as a photoelectric conversion device).
- the light emitting element 130 has a light emitting unit between a pair of electrodes
- the light receiving element 150 has a light receiving unit between a pair of electrodes.
- one of a pair of electrodes may be referred to as a pixel electrode and the other may be referred to as a common electrode.
- one electrode functions as an anode and the other electrode functions as a cathode.
- one electrode functions as an anode and the other electrode functions as a cathode.
- the case where the pixel electrode functions as an anode and the common electrode functions as a cathode will be described as an example.
- the light-emitting element 130 includes a pixel electrode 111 over the layer 101 including a transistor, a light-emitting unit 112_1 over the pixel electrode 111, an intermediate layer 113 over the light-emitting unit 112_1, a light-emitting unit 112_2 over the intermediate layer 113, and a light-emitting unit 112_2. It has an upper common layer 114 and a common electrode 115 on the common layer 114 .
- the common layer 114 can have, for example, a layer (electron injection layer) containing a material with high electron injection properties. Note that when the pixel electrode 111 functions as a cathode and the common electrode 115 functions as an anode, the common layer 114 can have, for example, a hole injection layer.
- the light receiving element 150 has a pixel electrode 111PS on the layer 101 including the transistor, a light receiving unit 152 on the pixel electrode 111PS, a common layer 114 on the light receiving unit 152, and a common electrode 115 on the common layer 114.
- the common layer 114 functions, for example, as an electron transport layer in the light receiving element 150 .
- the pixel electrode 111PS functions as a cathode and the common electrode 115 functions as an anode
- the common layer 114 in the light receiving element 150 functions as, for example, a hole transport layer.
- the pixel electrode 111, the light emitting unit 112, and the intermediate layer 113 are formed in an island shape for each light emitting element . That is, the pixel electrode 111, the light emitting unit 112, and the intermediate layer 113 are separately provided for each light emitting element 130. FIG. Also, the pixel electrode 111PS and the light receiving unit 152 are formed in an island shape for each light receiving element 150 .
- the layer 101 including a transistor can have projections in a region overlapping with the pixel electrode 111 and a region overlapping with the pixel electrode 111PS.
- the light-emitting unit 112_1, the intermediate layer 113, and the light-emitting unit 112_2 can be collectively referred to as a layer 103a.
- a conductive film that transmits visible light is used for the electrode from which light is extracted.
- a conductive film that reflects visible light is preferably used for the electrode on the side from which light is not extracted.
- indium tin oxide also referred to as In—Sn oxide, ITO
- In—Si—Sn oxide also referred to as ITSO
- indium zinc oxide In—Zn oxide
- In—W— Zn oxide alloys containing aluminum (aluminum alloys) such as alloys of aluminum, nickel, and lanthanum (Al-Ni-La)
- Al-Ni-La alloys of silver, palladium and copper
- elements belonging to Group 1 or Group 2 of the periodic table of elements not exemplified above e.g., lithium (Li), cesium (Cs), calcium (Ca), strontium (Sr)), europium (Eu), ytterbium Rare earth metals such as (Yb), alloys containing these in appropriate combinations, graphene, and the like can be used.
- connection portion 140 a connection electrode 111C on the layer 101 including a transistor, a common electrode 115 on the connection electrode 111C, a protective layer 131 on the common electrode 115, a protective layer 132 on the protective layer 131, a protective layer It has a resin layer 119 on 132 and a substrate 120 on the resin layer 119 .
- the connection electrode 111C is electrically connected with the common electrode 115 .
- FIG. 6C is a cross-sectional view showing a detailed configuration example of the layer 103a.
- the light emitting unit 112_1 has, for example, a layer 181, a layer 182 on the layer 181, a light emitting layer 183_1 on the layer 182, and a layer 184 on the light emitting layer 183_1.
- the light-emitting unit 112_2 has, for example, a layer 182 on the intermediate layer 113, a light-emitting layer 183_2 on the layer 182, and a layer 184 on the light-emitting layer 183_2.
- the layer 181 includes, for example, a layer containing a highly hole-injecting substance (hole-injection layer).
- the layer 182 includes, for example, a layer containing a substance with a high hole-transport property (hole-transport layer).
- the layer 184 includes, for example, a layer containing a highly electron-transporting substance (electron-transporting layer).
- the layer 181 has an electron injection layer or the like.
- Layer 182 also includes an electron transport layer and the like. Additionally, layer 184 comprises a hole transport layer and the like.
- the light-emitting unit 112 may include a layer containing a highly hole-blocking substance (hole-blocking layer) or a layer containing a highly electron-blocking substance (electron-blocking layer). .
- the layers 182, 184, and the like may have the same configuration (material, film thickness, etc.) between the light emitting unit 112_1 and the light emitting unit 112_2, or may have different configurations.
- the present invention is not limited to this.
- the layer 181 has a function of both a hole-injection layer and a hole-transport layer, or when the layer 181 has a function of both an electron-injection layer and an electron-transport layer , the layer 182 may be omitted.
- the layer 184 By providing the layer 184 over the light-emitting layer 183_2, exposure of the light-emitting layer 183 to the outermost surface during the manufacturing process of the display device 100 can be suppressed, and damage to the light-emitting layer 183 can be reduced. Thereby, the reliability of the light emitting element 130 can be improved.
- the intermediate layer 113 has a function of injecting electrons into one of the light-emitting unit 112_1 and the light-emitting unit 112_2 and injecting holes into the other when a voltage is applied between the pixel electrode 111 and the common electrode 115. .
- the intermediate layer 113 can also be called a charge generation layer.
- the color of light emitted by the light-emitting layer 183_1 and the color of light emitted by the light-emitting layer 183_2 can be complementary colors, for example.
- the light emitting element 130 can emit white light as a whole.
- one of the light-emitting layer 183_1 or the light-emitting layer 183_2 can emit red light and green light, and the other of the light-emitting layer 183_1 or the light-emitting layer 183_2 can emit blue light.
- one of the light-emitting layers 183_1 and 183_2 can emit yellow light or orange light, and the other of the light-emitting layers 183_1 and 183_2 can emit blue light.
- the light-emitting layer 183 when one light-emitting layer 183 emits light of two or more colors, the light-emitting layer 183 can have a laminated structure of two or more layers. For example, when one light-emitting layer 183 emits red light and green light, the light-emitting layer 183 can have a stacked structure of a layer emitting red light and a layer emitting green light.
- a structure in which a plurality of light-emitting units 112 are stacked with intermediate layers 113 interposed therebetween, like the light-emitting element 130, is referred to as a tandem structure in this specification.
- a structure having one light emitting unit 112 between a pair of electrodes is called a single structure.
- the tandem structure can also be called a stack structure, for example.
- the light-emitting element can emit light with high luminance.
- the tandem structure can reduce the current required to obtain the same luminance as compared with the single structure, so that the power consumption of the display device can be reduced and the reliability of the light-emitting element can be improved.
- a structure in which the light-emitting layer is separated for each light-emitting element may be referred to as an SBS (side-by-side) structure.
- SBS side-by-side
- the material and structure can be optimized for each light-emitting element, so the degree of freedom in selecting the material and structure increases, and it becomes easy to improve the luminance and reliability of the light-emitting element. .
- the light emitting element 130 has a tandem structure and an SBS structure. Therefore, it is possible to have both the merit of the tandem structure and the merit of the SBS structure.
- the display device 100 has a structure in which the light-emitting units 112 are arranged in series in two stages, and thus can be called a two-stage tandem structure.
- the light emitting element 130 included in the sub-pixel 110a, the light emitting element 130 included in the sub-pixel 110b, and the light emitting element 130 included in the sub-pixel 110c can all be white light emitting elements.
- the color emitted by the light-emitting element 130 is not changed according to the color exhibited by the sub-pixel. Therefore, the color emitted by the light-emitting layer 183 does not have to be different for each light-emitting element 130 . Therefore, for example, the light-emitting layers 183 included in all the light-emitting elements 130 can be collectively formed. Therefore, the display device 100 can be manufactured at a lower cost and with a higher yield than when the color emitted by the light-emitting layer 183 is changed according to the color of the sub-pixel. Therefore, the price of the display device 100 can be reduced.
- FIG. 6D is a cross-sectional view showing a detailed configuration example of the light receiving unit 152.
- the light receiving unit 152 has, for example, a layer 182 , a light receiving layer 193 on the layer 182 and a layer 184 on the light receiving layer 193 .
- the layers 182 and 184 included in the light-receiving unit 152 may have the same configuration (material, film thickness, etc.) as the layers 182 and 184 included in the layer 103a, or may have different configurations.
- the layer 184 By providing the layer 184 over the light-receiving layer 193, exposure of the light-receiving layer 193 to the outermost surface can be suppressed during the manufacturing process of the display device 100, and damage to the light-receiving layer 193 can be reduced. Thereby, the reliability of the light receiving element 150 can be improved. Since the common layer 114 on the light receiving unit 152 functions as an electron transport layer in the light receiving element 150, the light receiving unit 152 may not have the layer 184 functioning as an electron transport layer.
- the hole-injecting layer is a layer that injects holes from the anode to the hole-transporting layer, and contains a material with high hole-injecting properties.
- highly hole-injecting materials include aromatic amine compounds and composite materials containing a hole-transporting material and an acceptor material (electron-accepting material).
- the hole-transporting layer is a layer that transports holes injected from the anode to the light-emitting layer by means of the hole-injecting layer. Also, the hole transport layer is a layer that transports holes to the light receiving layer.
- a hole-transporting layer is a layer containing a hole-transporting material. As the hole-transporting material, a substance having a hole mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more is preferable. Note that substances other than these can be used as long as they have a higher hole-transport property than electron-transport property.
- hole-transporting materials include materials with high hole-transporting properties such as ⁇ -electron-rich heteroaromatic compounds (e.g., carbazole derivatives, thiophene derivatives, furan derivatives, etc.) and aromatic amines (compounds having an aromatic amine skeleton). is preferred.
- ⁇ -electron-rich heteroaromatic compounds e.g., carbazole derivatives, thiophene derivatives, furan derivatives, etc.
- aromatic amines compounds having an aromatic amine skeleton
- the electron-transporting layer is a layer that transports electrons injected from the cathode to the light-emitting layer by the electron-injecting layer. Also, the electron transport layer is a layer that transports electrons to the light receiving layer.
- the electron-transporting layer is a layer containing an electron-transporting material. As an electron-transporting material, a substance having an electron mobility of 1 ⁇ 10 ⁇ 6 cm 2 /Vs or more is preferable. Note that substances other than these substances can be used as long as they have a higher electron-transport property than hole-transport property.
- electron-transporting materials include metal complexes having a quinoline skeleton, metal complexes having a benzoquinoline skeleton, metal complexes having an oxazole skeleton, metal complexes having a thiazole skeleton, oxadiazole derivatives, triazole derivatives, imidazole derivatives, ⁇ electron deficient including oxazole derivatives, thiazole derivatives, phenanthroline derivatives, quinoline derivatives with quinoline ligands, benzoquinoline derivatives, quinoxaline derivatives, dibenzoquinoxaline derivatives, pyridine derivatives, bipyridine derivatives, pyrimidine derivatives, and other nitrogen-containing heteroaromatic compounds
- a material having a high electron transport property such as a type heteroaromatic compound can be used.
- the electron injection layer is a layer that injects electrons from the cathode into the electron transport layer, and is a layer containing a material with high electron injection properties.
- Alkali metals, alkaline earth metals, or compounds thereof can be used as materials with high electron injection properties.
- a composite material containing an electron-transporting material and a donor material (electron-donating material) can also be used as a material with high electron-injecting properties.
- the electron injection layer examples include lithium, cesium, ytterbium, lithium fluoride (LiF), cesium fluoride (CsF), calcium fluoride (CaF x , X is an arbitrary number), and 8-(quinolinolato)lithium (abbreviation: Liq), 2-(2-pyridyl)phenoratritium (abbreviation: LiPP), 2-(2-pyridyl)-3-pyridinolatritium (abbreviation: LiPPy), 4-phenyl-2-(2-pyridyl)pheno Alkali metals such as latolithium (abbreviation: LiPPP), lithium oxide (LiO x ), cesium carbonate, alkaline earth metals, or compounds thereof can be used.
- the electron injection layer may have a lamination structure of two or more layers. As the laminated structure, for example, lithium fluoride can be used for the first layer and ytterbium can be used for the second layer.
- a material having an electron transport property may be used for the electron injection layer.
- a compound having a lone pair of electrons and an electron-deficient heteroaromatic ring can be used as the electron-transporting material.
- a compound having at least one of a pyridine ring, diazine ring (pyrimidine ring, pyrazine ring, pyridazine ring), and triazine ring can be used.
- the lowest unoccupied molecular orbital (LUMO) of the organic compound having an unshared electron pair is preferably ⁇ 3.6 eV or more and ⁇ 2.3 eV or less.
- CV cyclic voltammetry
- photoelectron spectroscopy optical absorption spectroscopy
- inverse photoelectron spectroscopy etc. are used to determine the highest occupied molecular orbital (HOMO) level and LUMO level of an organic compound. can be estimated.
- BPhen 4,7-diphenyl-1,10-phenanthroline
- NBPhen 2,9-bis(naphthalen-2-yl)-4,7-diphenyl-1,10-phenanthroline
- HATNA diquinoxalino [2,3-a:2′,3′-c]phenazine
- TmPPPyTz 2,4,6-tris[3′-(pyridin-3-yl)biphenyl-3-yl]-1,3 , 5-triazine
- TmPPPyTz 2,4,6-tris[3′-(pyridin-3-yl)biphenyl-3-yl]-1,3 , 5-triazine
- a light-emitting layer is a layer containing a light-emitting substance.
- the emissive layer can have one or more emissive materials.
- a substance exhibiting emission colors such as blue, purple, blue-violet, green, yellow-green, yellow, orange, and red is used as appropriate.
- a substance that emits near-infrared light can be used as the light-emitting substance.
- Examples of light-emitting substances include fluorescent materials, phosphorescent materials, TADF materials, quantum dot materials, and the like.
- fluorescent materials include pyrene derivatives, anthracene derivatives, triphenylene derivatives, fluorene derivatives, carbazole derivatives, dibenzothiophene derivatives, dibenzofuran derivatives, dibenzoquinoxaline derivatives, quinoxaline derivatives, pyridine derivatives, pyrimidine derivatives, phenanthrene derivatives, naphthalene derivatives, and the like. be done.
- Examples of phosphorescent materials include organometallic complexes (especially iridium complexes) having a 4H-triazole skeleton, 1H-triazole skeleton, imidazole skeleton, pyrimidine skeleton, pyrazine skeleton, or pyridine skeleton, and phenylpyridine derivatives having an electron-withdrawing group.
- organometallic complexes especially iridium complexes
- platinum complexes, rare earth metal complexes, etc. which are used as ligands, can be mentioned.
- the light-emitting layer may contain one or more organic compounds (host material, assist material, etc.) in addition to the light-emitting substance (guest material).
- One or both of a hole-transporting material and an electron-transporting material can be used as the one or more organic compounds.
- Bipolar materials or TADF materials may also be used as one or more organic compounds.
- the light-emitting layer preferably includes, for example, a phosphorescent material and a combination of a hole-transporting material and an electron-transporting material that easily form an exciplex.
- ExTET Exciplex-Triplet Energy Transfer
- a combination that forms an exciplex that emits light that overlaps with the wavelength of the absorption band on the lowest energy side of the light-emitting substance energy transfer becomes smooth and light emission can be efficiently obtained. With this configuration, high efficiency, low-voltage driving, and long life of the light-emitting element can be realized at the same time.
- a material applicable to an electron injection layer such as lithium
- a material applicable to the hole injection layer can be preferably used.
- a layer containing a hole-transporting material and an acceptor material can be used for the intermediate layer.
- a layer containing an electron-transporting material and a donor material can be used for the intermediate layer.
- the absorption layer has an n-type semiconductor and a p-type semiconductor.
- Electron-accepting organic semiconductor materials such as fullerenes (eg, C 60 , C 70 , etc.) and fullerene derivatives can be used as n-type semiconductor materials for the light-receiving layer.
- Fullerenes have a soccer ball-like shape, which is energetically stable.
- Fullerene has both deep (low) HOMO and LUMO levels. Since fullerene has a deep LUMO level, it has an extremely high electron-accepting property (acceptor property). Normally, like benzene, when the ⁇ -electron conjugation (resonance) spreads in the plane, the electron-donating property (donor property) increases.
- C 60 and C 70 have broad absorption bands in the visible light region, and C 70 is particularly preferable because it has a larger ⁇ -electron conjugated system than C 60 and has a wide absorption band in the long wavelength region.
- [6,6]-Phenyl-C71-butylic acid methyl ester (abbreviation: PC70BM), [6,6]-Phenyl-C61-butylic acid methyl ester (abbreviation: PC60BM), 1′, 1′′,4′,4′′-Tetrahydro-di[1,4]methanonaphthaleno[1,2:2′,3′,56,60:2′′,3′′][5,6]fullerene- C60 (abbreviation: ICBA) and the like.
- PC70BM [6,6]-Phenyl-C71-butylic acid methyl ester
- PC60BM [6,6]-Phenyl-C61-butylic acid methyl ester
- ICBA 1,6]fullerene- C60
- Materials for the n-type semiconductor include metal complexes having a quinoline skeleton, metal complexes having a benzoquinoline skeleton, metal complexes having an oxazole skeleton, metal complexes having a thiazole skeleton, oxadiazole derivatives, triazole derivatives, imidazole derivatives, Oxazole derivatives, thiazole derivatives, phenanthroline derivatives, quinoline derivatives, benzoquinoline derivatives, quinoxaline derivatives, dibenzoquinoxaline derivatives, pyridine derivatives, bipyridine derivatives, pyrimidine derivatives, naphthalene derivatives, anthracene derivatives, coumarin derivatives, rhodamine derivatives, triazine derivatives, quinone derivatives, etc. is mentioned.
- Materials for the p-type semiconductor of the absorption layer include copper (II) phthalocyanine (CuPc), tetraphenyldibenzoperiflanthene (DBP), zinc phthalocyanine (ZnPc), and tin phthalocyanine.
- electron-donating organic semiconductor materials such as (SnPc) and quinacridone;
- Examples of p-type semiconductor materials include carbazole derivatives, thiophene derivatives, furan derivatives, and compounds having an aromatic amine skeleton.
- materials for p-type semiconductors include naphthalene derivatives, anthracene derivatives, pyrene derivatives, triphenylene derivatives, fluorene derivatives, pyrrole derivatives, benzofuran derivatives, benzothiophene derivatives, indole derivatives, dibenzofuran derivatives, dibenzothiophene derivatives, indolocarbazole derivatives, porphyrin derivatives, phthalocyanine derivatives, naphthalocyanine derivatives, quinacridone derivatives, polyphenylenevinylene derivatives, polyparaphenylene derivatives, polyfluorene derivatives, polyvinylcarbazole derivatives, polythiophene derivatives and the like.
- the HOMO level of the electron-donating organic semiconductor material is preferably shallower (higher) than the HOMO level of the electron-accepting organic semiconductor material.
- the LUMO level of the electron-donating organic semiconductor material is preferably shallower (higher) than the LUMO level of the electron-accepting organic semiconductor material.
- a spherical fullerene as the electron-accepting organic semiconductor material and an organic semiconductor material having a nearly planar shape as the electron-donating organic semiconductor material. Molecules with similar shapes tend to gather together, and when molecules of the same type aggregate, the energy levels of the molecular orbitals are close to each other, so the carrier transportability can be enhanced.
- the absorption layer is preferably formed by co-depositing an n-type semiconductor and a p-type semiconductor.
- the absorption layer may be formed by laminating an n-type semiconductor and a p-type semiconductor.
- At least part of the side surface of the pixel electrode 111 and at least part of the side surface of the pixel electrode 111PS are covered with sidewalls 121 . This can prevent the common layer 114 from contacting the side surfaces of the pixel electrode 111 and the pixel electrode 111PS.
- at least part of the side surface of the light emitting unit 112 and the side surface of the intermediate layer 113 may be covered with the sidewall 121 . This can prevent the common layer 114 from coming into contact with the side surface of either the light emitting unit 112 or the intermediate layer 113 .
- at least part of the side surface of the light receiving unit 152 may be covered with the side wall 121 . This can prevent the common layer 114 from contacting the side surface of the light receiving unit 152 .
- the short circuit of the light emitting element 130 and the short circuit of the light receiving element 150 can be suppressed.
- at least part of the side surface of the connection electrode 111C can also be covered with the side wall 121 .
- a common layer 114 can be provided over the sidewalls 121 .
- a common electrode 115 is provided over the common layer 114 , and protective layers 131 and 132 are provided over the common electrode 115 .
- FIGS. 6A and 6B show an example in which the sidewall 121 has a two-layer structure of sidewalls 121a and 121b.
- the X-direction thickness and the Y-direction thickness of the sidewall 121b can be thicker than the X-direction thickness and the Y-direction thickness of the sidewall 121a.
- the shape of the end portion of the side wall 121b can be rounded, that is, curved. Rounded end portions of the sidewalls 121b are preferable because coverage with the common layer 114, the common electrode 115, and the protective layer 131 is enhanced.
- the sidewall 121a covers at least part of the side surface of the pixel electrode 111 and at least part of the side surface of the pixel electrode 111PS. Moreover, the sidewall 121 a may cover at least part of the side surface of the light emitting unit 112 and the intermediate layer 113 , and may cover at least part of the side surface of the light receiving unit 152 . Specifically, as shown in FIG. 6A, the sidewall 121a can be in contact with at least part of the side surface of the pixel electrode 111, the side surface of the light emitting unit 112, and the side surface of the intermediate layer 113. FIG.
- the side wall 121a can be configured to contact at least a part of the side surface of the pixel electrode 111PS and the side surface of the light receiving unit 152 . Furthermore, as shown in FIG. 6B, the sidewall 121a can be configured to contact at least part of the side surface of the connection electrode 111C. As shown in FIGS. 6A and 6B, the sidewall 121b covers at least part of the side surface and top surface of the sidewall 121a.
- an inorganic insulating film such as an oxide insulating film, a nitride insulating film, an oxynitride insulating film, or a nitride oxide insulating film can be used, for example.
- oxide insulating films include silicon oxide films, aluminum oxide films, gallium oxide films, germanium oxide films, yttrium oxide films, zirconium oxide films, lanthanum oxide films, neodymium oxide films, hafnium oxide films, and tantalum oxide films.
- the nitride insulating film include a silicon nitride film and an aluminum nitride film.
- the oxynitride insulating film examples include a silicon oxynitride film, an aluminum oxynitride film, and the like.
- a silicon nitride oxide film, an aluminum nitride oxide film, or the like can be given.
- oxynitride refers to a material whose composition contains more oxygen than nitrogen
- nitride oxide refers to a material whose composition contains more nitrogen than oxygen. point to the material.
- the sidewalls 121a and 121b can be formed by various film formation methods such as sputtering, vapor deposition, chemical vapor deposition (CVD), and atomic layer deposition (ALD). .
- the sidewalls 121a formed directly on the light emitting unit 112 and the intermediate layer 113 are preferably formed by the ALD method.
- the side walls 121b are preferably formed by a sputtering method because productivity can be improved.
- an aluminum oxide film formed by ALD can be used for the sidewall 121a
- a silicon nitride film formed by sputtering can be used for the sidewall 121b.
- one or both of the sidewalls 121a and 121b preferably have a function as a barrier insulating film against at least one of water and oxygen.
- one or both of the sidewalls 121a and 121b preferably have a function of suppressing diffusion of at least one of water and oxygen.
- one or both of the sidewalls 121a and 121b preferably have a function of capturing or fixing at least one of water and oxygen (also referred to as gettering).
- a barrier insulating film means an insulating film having a barrier property.
- the term "barrier property" refers to a function of suppressing diffusion of a corresponding substance (also referred to as low permeability).
- the corresponding substance has a function of capturing or fixing (also called gettering).
- One or both of the sidewalls 121a and 121b has the barrier insulating film function or the gettering function described above, so that impurities (typically, water or oxygen) that can diffuse into the light-emitting element and the light-receiving element from the outside can be prevented. ) can be prevented from entering.
- impurities typically, water or oxygen
- a highly reliable display device can be provided.
- FIG. 6A shows an example in which an air gap 134 is formed between the layer 101 containing transistors and the common layer 114 .
- Voids 134 may not be formed.
- voids 134 are not formed, at least one of common layer 114 , common electrode 115 , and protective layer 131 is filled between adjacent light emitting elements 130 and between adjacent light receiving elements 150 . Also, the region that can become the void may be filled with an insulator.
- the voids 134 contain, for example, any one or more selected from air, nitrogen, oxygen, carbon dioxide, and group 18 elements (typically helium, neon, argon, xenon, krypton, etc.). Further, the gap may contain a gas used for forming the common layer 114 or the like, for example. For example, when the common layer 114 is formed by vacuum deposition, the space may be in a reduced-pressure atmosphere. In addition, when gas is contained in the space 134, identification of the gas can be performed by a gas chromatography method or the like.
- the refractive index of the gap 134 is lower than the refractive index of the side wall 121 , the light emitted from the light emitting unit 112 is reflected at the interface between the side wall 121 and the gap 134 .
- the gap 134 may be filled with a filler.
- the filler include epoxy resin, acrylic resin, silicone resin, phenol resin, polyimide resin, imide resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, EVA (ethylene vinyl acetate) resin, and the like.
- Photoresist may also be used as the filler.
- the photoresist used as the filler may be a positive photoresist or a negative photoresist.
- an inorganic insulating material when filling the gap 134 with a filler, it is preferable to combine an inorganic insulating material and an organic insulating material.
- an inorganic insulating material there is a laminated structure in which aluminum oxide and a photoresist on the aluminum oxide are provided.
- the aluminum oxide described above is preferably formed by an ALD method because it can improve the coverage.
- the shape of the layer formed after forming the side wall 121 varies depending on the material, film formation method, film thickness, and the like, and is not particularly limited.
- the display device of one embodiment of the present invention has a structure in which short-circuiting of the light-emitting element 130 is suppressed by including the sidewall 121 . Therefore, it is possible to widen the range of selection of the material, film formation method, and film thickness of the layer formed after the sidewall 121 is formed.
- the display device 100 preferably has protective layers 131 and 132 on the light emitting element 130 and the light receiving element 150 .
- the protective layers 131 and 132 By providing the protective layers 131 and 132, the reliability of the light emitting element 130 and the light receiving element 150 can be improved. Note that the display device 100 may not have the protective layer 131 or the protective layer 132 .
- the conductivity of the protective layers 131 and 132 does not matter. At least one of an insulating film, a semiconductor film, and a conductive film can be used for the protective layers 131 and 132 .
- the protective layers 131 and 132 have inorganic films, oxidation of the common electrode 115 can be suppressed, and impurities (moisture, oxygen, etc.) can be suppressed from entering the light-emitting element 130 and the light-receiving element 150. can do. Therefore, deterioration of the light-emitting element 130 and the light-receiving element 150 can be suppressed, and the reliability of the display device can be improved.
- an inorganic insulating film such as an oxide insulating film, a nitride insulating film, an oxynitride insulating film, or a nitride oxide insulating film can be used, for example.
- oxide insulating films include silicon oxide films, aluminum oxide films, gallium oxide films, germanium oxide films, yttrium oxide films, zirconium oxide films, lanthanum oxide films, neodymium oxide films, hafnium oxide films, and tantalum oxide films.
- the nitride insulating film include a silicon nitride film and an aluminum nitride film.
- the oxynitride insulating film examples include a silicon oxynitride film, an aluminum oxynitride film, and the like.
- a silicon nitride oxide film, an aluminum nitride oxide film, or the like can be given.
- Each of the protective layers 131 and 132 preferably includes a nitride insulating film or a nitride oxide insulating film, and more preferably includes a nitride insulating film.
- the protective layers 131 and 132 include In—Sn oxide (also referred to as ITO), In—Zn oxide, Ga—Zn oxide, Al—Zn oxide, or indium gallium zinc oxide (In -Ga-Zn oxide, also referred to as IGZO) or the like can be used.
- the inorganic film preferably has a high resistance, and specifically, preferably has a higher resistance than the common electrode 115 .
- the inorganic film may further contain nitrogen.
- the protective layers 131 and 132 132 When light emitted from the light emitting element 130 is extracted through the protective layers 131 and 132 and light enters the light receiving element 150 through the protective layers 131 and 132, the protective layers 131 and 132 132 preferably has high transparency to visible light.
- ITO, IGZO, and aluminum oxide are each preferred because they are inorganic materials that are highly transparent to visible light.
- the protective layers 131 and 132 for example, a stacked structure of an aluminum oxide film and a silicon nitride film over the aluminum oxide film, or a stacked structure of an aluminum oxide film and an IGZO film over the aluminum oxide film. etc. can be used.
- impurities such as water and oxygen
- the protective layer 131 and the protective layer 132 may have an organic film.
- the protective layer 132 may have both organic and inorganic films.
- the protective layer 131 and the protective layer 132 may be formed using different deposition methods.
- the protective layer 131 may be formed using an ALD method
- the protective layer 132 may be formed using a sputtering method.
- a colored layer 133 is provided on the protective layer 132 .
- the colored layer 133 has a region overlapping with the light-emitting element 130 , specifically a region overlapping with the light-emitting layer 183 .
- 6A shows an example in which a different colored layer 133 (colored layer 133a, colored layer 133b, or colored layer 133c) is provided for each light emitting element 130.
- FIG. 1 shows an example in which a different colored layer 133 (colored layer 133a, colored layer 133b, or colored layer 133c) is provided for each light emitting element 130.
- the colored layer 133a, the colored layer 133b, and the colored layer 133c have a function of transmitting lights of different colors.
- the colored layer 133a has a function of transmitting red light
- the colored layer 133b has a function of transmitting green light
- the colored layer 133c has a function of transmitting blue light. Accordingly, the display device 100 can perform full-color display.
- the colored layer 133a, the colored layer 133b, and the colored layer 133c may have a function of transmitting any one of cyan, magenta, and yellow light.
- adjacent colored layers 133 preferably have overlapping regions. Specifically, in a region that does not overlap with the light emitting unit 112, it is preferable to have a region where the adjacent colored layer 133 overlaps.
- the colored layers 133 can function as a light shielding layer in a region where the colored layers 133 overlap. Therefore, it is possible to suppress leakage of light emitted from the light emitting element 130 to adjacent sub-pixels. For example, light emitted from the light emitting element 130 overlapping the colored layer 133a can be prevented from entering the colored layer 133b. Therefore, the contrast of an image displayed on the display device can be increased, and a display device with high display quality can be realized.
- the light shielding layer can be provided, for example, on the surface of the substrate 120 on the resin layer 119 side. Also, the colored layer 133 may be provided on the surface of the substrate 120 on the resin layer 119 side.
- the protective layer 132 is preferably flattened. This makes it easier to form the colored layer 133 .
- the protective layer 132 does not have to be planarized.
- the display device 100 may not have the protective layer 132 .
- the colored layer 133 can be provided so as to be in contact with the protective layer 131, for example.
- the edge of the upper surface of the pixel electrode 111 is not covered with an insulating layer. Therefore, the distance between adjacent light emitting elements 130 can be extremely narrowed. Therefore, a high-definition or high-resolution display device can be obtained.
- the display device 100 can narrow the distance between the light emitting elements 130 .
- the distance between the light emitting elements 130 is 1 ⁇ m or less, preferably 500 nm or less, more preferably 200 nm or less, 100 nm or less, 90 nm or less, 70 nm or less, 50 nm or less, 30 nm or less, 20 nm or less, 15 nm or less, or It can be 10 nm or less.
- the distance between the side surface of the light emitting unit 112 of the light emitting element 130 and the side surface of the light emitting unit 112 of the adjacent light emitting element 130 is 1 ⁇ m or less, preferably 0.5 ⁇ m (500 nm) or less. and more preferably 100 nm or less.
- adjacent elements do not have to be in contact with each other.
- the light emitting units 112 of the adjacent light emitting elements 130 are not in contact, it can be said that the two light emitting units 112 are adjacent.
- optical members can be arranged outside the substrate 120 .
- optical members include polarizing plates, retardation plates, light diffusion layers (diffusion films, etc.), antireflection layers, and light collecting films.
- an antistatic film that suppresses adhesion of dust, a water-repellent film that prevents adhesion of dirt, a hard coat film that suppresses the occurrence of scratches due to use, a shock absorption layer, etc. are arranged. may
- Glass, quartz, ceramic, sapphire, resin, metal, alloy, semiconductor, or the like can be used for the substrate 120 .
- a material that transmits the light is used for the substrate on the side from which the light from the light-emitting element is extracted.
- Using a flexible material for the substrate 120 can increase the flexibility of the display device.
- a polarizing plate may be used as the substrate 120 .
- polyester resins such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyacrylonitrile resins, acrylic resins, polyimide resins, polymethyl methacrylate resins, polycarbonate (PC) resins, polyethersulfone (PES) resins, respectively.
- resin polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PTFE) Resin, ABS resin, cellulose nanofiber, etc.
- glass having a thickness that is flexible may be used.
- a substrate having high optical isotropy is preferably used as the substrate of the display device. It can also be said that a substrate with high optical isotropy has low birefringence (small birefringence amount).
- the absolute value of the retardation (retardation) value of the substrate with high optical isotropy is preferably 30 nm or less, more preferably 20 nm or less, and even more preferably 10 nm or less.
- Films with high optical isotropy include triacetylcellulose (TAC, also called cellulose triacetate) films, cycloolefin polymer (COP) films, cycloolefin copolymer (COC) films, and acrylic films.
- TAC triacetylcellulose
- COP cycloolefin polymer
- COC cycloolefin copolymer
- the film when a film is used as the substrate, the film may absorb water, which may cause shape change such as wrinkling of the display panel. Therefore, it is preferable to use a film having a low water absorption rate as the substrate. For example, it is preferable to use a film with a water absorption of 1% or less, more preferably 0.1% or less, and even more preferably 0.01% or less.
- various curable adhesives such as photocurable adhesives such as ultraviolet curable adhesives, reaction curable adhesives, thermosetting adhesives, and anaerobic adhesives can be used.
- These adhesives include epoxy resins, acrylic resins, silicone resins, phenol resins, polyimide resins, imide resins, PVC (polyvinyl chloride) resins, PVB (polyvinyl butyral) resins, EVA (ethylene vinyl acetate) resins, and the like.
- a material with low moisture permeability such as epoxy resin is preferable.
- a two-liquid mixed type resin may be used.
- an adhesive sheet or the like may be used.
- materials that can be used for conductive layers such as various wirings and electrodes constituting display devices include aluminum, titanium, chromium, nickel, copper, yttrium, zirconium, molybdenum, silver, Examples include metals such as tantalum and tungsten, and alloys containing these metals as main components. Membranes containing these materials can be used in single layers or in laminated configurations.
- a conductive oxide such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, zinc oxide containing gallium, or graphene
- metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, and titanium, or alloy materials containing such metal materials can be used.
- a nitride of the metal material for example, titanium nitride
- it is preferably thin enough to have translucency.
- a stacked film of any of the above materials can be used as the conductive layer.
- a laminated film of an alloy of silver and magnesium and indium tin oxide, or the like because the conductivity can be increased.
- conductive layers such as various wirings and electrodes that constitute a display device, and conductive layers (conductive layers functioning as pixel electrodes or common electrodes) of light-emitting elements.
- Examples of insulating materials that can be used for each insulating layer include resins such as acrylic resins and epoxy resins, and inorganic insulating materials such as silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, and aluminum oxide.
- FIG. 6A illustrates an example in which two light-emitting units 112 are stacked
- one embodiment of the present invention is not limited to this.
- 7A is a cross-sectional view showing a configuration example between the dashed-dotted lines X1-X2 in FIG. 3 when three light emitting units 112 are stacked
- FIG. 7B is a configuration example between the dashed-dotted lines Y1-Y2 in FIG. It is a cross-sectional view showing the.
- the light-emitting element 130 includes the pixel electrode 111 on the layer 101 including the transistor, the light-emitting unit 112_1 on the pixel electrode 111, the intermediate layer 113_1 on the light-emitting unit 112_1, and the light-emitting layer 113_1 on the intermediate layer 113_1. It has a unit 112_2, an intermediate layer 113_2 on the light emitting unit 112_2, a light emitting unit 112_3 on the intermediate layer 113_2, a common layer 114 on the light emitting unit 112_3, and a common electrode 115 on the common layer 114. Since the example shown in FIG.
- the light emitting element 130 can be said to have a three-stage tandem structure.
- the light-emitting units 112_1 to 112_3 and the intermediate layers 113_1 and 113_2 can be collectively referred to as a layer 103b.
- FIG. 7C is a cross-sectional view showing a detailed configuration example of the layer 103b.
- the light-emitting unit 112_3 has, for example, a layer 182 on the intermediate layer 113_2, a light-emitting layer 183_3 on the layer 182, and a layer 184 on the light-emitting layer 183_3.
- the light-emitting layers 183_1 to 183_3 can each emit red light, green light, or blue light, for example.
- the light emitting layer 183_1 may emit red light
- the light emitting layer 183_2 may emit green light
- the light emitting layer 183_3 may emit blue light.
- the light-emitting layer 183_1 can emit blue light
- the light-emitting layer 183_2 can emit yellow light, yellow-green light, or green light
- the light-emitting layer 183_3 can emit blue light.
- the light-emitting layer 183_1 can emit blue light
- the light-emitting layer 183_2 can emit red light, yellow, yellow-green, or green light
- the light-emitting layer 183_3 can emit blue light.
- the light emitting element 130 may have a structure in which four or more light emitting units 112 are stacked. That is, the light emitting element 130 may have a tandem structure of four or more stages.
- the luminance obtained from the light-emitting element 130 can be increased with the same amount of current in accordance with the number of layers.
- the current required to obtain the same luminance can be reduced, so the power consumption of the light-emitting element 130 can be reduced according to the number of stacked layers.
- FIG. 6A and the like show an example in which the light receiving element 150 has one light receiving unit 152
- one aspect of the present invention is not limited to this.
- 8A is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3 when two light-receiving units 152 are stacked in the light-receiving element 150
- FIG. - It is sectional drawing which shows the structural example between Y2.
- the light-receiving element 150 includes a pixel electrode 111PS on the layer 101 including a transistor, a light-receiving unit 152_1 on the pixel electrode 111PS, an intermediate layer 113PS on the light-receiving unit 152_1, and a light-receiving element on the intermediate layer 113PS. It has a unit 152_2, a common layer 114 on the light receiving unit 152_2, and a common electrode 115 on the common layer 114.
- the light receiving element 150 can be said to have a two-stage tandem structure.
- the light receiving units 152_1 and 152_2, and the intermediate layer 113PS can be collectively referred to as a layer 103c.
- FIG. 8C is a cross-sectional view showing a detailed configuration example of the layer 103c.
- the light-receiving unit 152_1 has a light-receiving layer 193_1 between the layers 182 and 184
- the light-receiving unit 152_2 has a light-receiving layer 193_2 between the layers 182 and 184.
- the light receiving element 150 may have a structure in which three or more light receiving units 152 are stacked. That is, the light receiving element 150 may have a tandem structure of three or more stages.
- FIG. 9A is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3
- FIG. 9B is a cross-sectional view showing a configurational example between the dashed-dotted line Y1-Y2 in FIG. 9A and 9B are modifications of the configuration shown in FIGS. 6A and 6B, differing in that the side wall 121 has a single-layer structure.
- sidewall 121 may, for example, have the same material as sidewall 121a and be formed in the same manner as sidewall 121a.
- an aluminum oxide film formed by the ALD method can be used as the side wall 121 shown in FIGS. 9A and 9B.
- the steps for manufacturing the sidewalls 121 can be simplified, and the number of steps for manufacturing the display device 100 can be reduced. Thereby, the display device 100 can be manufactured at a low cost and the yield can be increased. Therefore, the price of the display device 100 can be reduced.
- FIGS. 10A and 10B are modifications of the configuration shown in FIGS. 6A and 6B, in that there are no recesses between adjacent light emitting elements 130 and between adjacent light emitting elements 130 and light receiving elements 150. is different. That is, the display device 100 shown in FIGS. 10A and 10B does not have convex portions in the regions overlapping with the light emitting elements 130 and the regions overlapping with the light receiving elements 150 . For example, when the etching selectivity between the insulating layer located on the outermost surface of the layer 101 including the transistor and other layers is high, the display device 100 may have the structure shown in FIGS. 10A and 10B.
- FIG. 11A is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- FIG. FIG. 11A is a modification of the configuration shown in FIG. 6A, and differs from the display device 100 shown in FIG. 6A in that the light-emitting element 130 has a layer 114a instead of the common layer 114.
- FIG. between dashed-dotted line Y1-Y2, it can be set as the same structure as FIG. 6B.
- Layer 114a can comprise, for example, an electron injection layer. Note that if the pixel electrode 111 functions as a cathode and the common electrode 115 functions as an anode, the layer 114a can have, for example, a hole injection layer.
- the layer 114 a is formed in an island shape for each light emitting element 130 like the pixel electrode 111 , the light emitting unit 112 and the intermediate layer 113 . In other words, the layer 114a is separately provided for each light emitting element 130 .
- the layer 114a can be configured such that the light receiving element 150 is not provided with the layer 114a.
- FIG. 11B is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- FIG. FIG. 11B is a modification of the configuration shown in FIG. 6A, in which gaps 134 are not formed between adjacent light emitting elements 130 and between adjacent light emitting elements 130 and light receiving elements 150, and a common layer 114 is filled. is shown.
- common electrodes 115 may be filled between adjacent light emitting elements 130 and between adjacent light emitting elements 130 and light receiving elements 150.
- a protective layer 131 may be filled.
- dashed-dotted line Y1-Y2 it can be set as the same structure as FIG. 6B.
- gaps 134 may not be formed as shown in FIG. 11B.
- the distance between adjacent light emitting elements 130 and the distance between adjacent light emitting elements 130 and light receiving elements 150 may differ.
- the distance between adjacent light emitting elements 130 and light receiving elements 150 may be longer than the distance between adjacent light emitting elements 130 .
- gaps 134 may be formed between adjacent light emitting elements 130 and may not be formed between adjacent light emitting elements 130 and light receiving elements 150 .
- the display device 100 has the sidewalls 121, even if the common layer 114 or the like is filled between the adjacent light emitting elements 130 as shown in FIG. , intermediate layer 113 , and light receiving unit 152 . Therefore, even if the common layer 114 or the like is filled between the adjacent light emitting elements 130, the short circuit of the light emitting elements 130 can be suppressed. Further, even if the common layer 114 or the like is filled between the adjacent light emitting element 130 and the light receiving element 150, the short circuit of the light emitting element 130 and the light receiving element 150 can be suppressed.
- FIG. 11C is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- FIG. FIG. 11C is a modification of the configuration shown in FIG. 6A, and differs from the configuration shown in FIG. 6A in that a filter 153 is provided in the sub-pixel 110d.
- dashed-dotted line Y1-Y2 it can be set as the same structure as FIG. 6B.
- Filter 153 is provided on protective layer 132 and has a region that overlaps light receiving element 150 . Specifically, filter 153 has a region that overlaps light-receiving layer 193 shown in FIG. 6D.
- adjacent colored layers 133 and filters 153 can have overlapping regions. Note that the adjacent colored layer 133 and filter 153 may not have overlapping regions.
- Filter 153 has a function of blocking light of a specific wavelength.
- the filter 153 has a function of blocking ultraviolet light.
- the filter 153 By providing the filter 153 in the display device 100, it is possible to suppress the noise current from flowing through the light receiving element 150, for example. Therefore, since the display device 100 can perform imaging with a high S/N ratio, it is possible to detect an object that is in contact with or close to the display device 100, and to perform authentication and the like with high accuracy. Note that the display device 100 does not have to have the filter 153 .
- FIG. 12A is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- FIG. FIG. 12A differs from FIG. 6A in the configuration of the light emitting element 130 .
- dashed-dotted line Y1-Y2 it can be set as the same structure as FIG. 6B.
- an optical adjustment layer 116 is provided between the pixel electrode 111 and the light emitting unit 112_1.
- the light-emitting element 130 of the sub-pixel 110a is provided with an optical adjustment layer 116a
- the light-emitting element 130 of the sub-pixel 110b is provided with an optical adjustment layer 116b
- the light-emitting element 130 of the sub-pixel 110c is provided with an optical adjustment layer 116b. is provided with an optical adjustment layer 116c.
- the optical adjustment layer 116a, the optical adjustment layer 116b, and the optical adjustment layer 116c each transmit visible light. Also, the optical adjustment layer 116a, the optical adjustment layer 116b, and the optical adjustment layer 116c have different thicknesses. Due to the different thickness, the optical path length can be varied for each light emitting element 130 .
- the pixel electrode 111 is a conductive layer reflective to visible light
- the common electrode 115 is a conductive layer reflective and transparent to visible light.
- the light emitting element 130 can have a so-called microcavity structure (microresonator structure). As a result, the light emitting element 130 can emit light with an enhanced specific wavelength. Therefore, the light emitting element 130 can emit light with high color purity.
- a conductive material that transmits visible light can be used.
- conductive oxides such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, gallium-containing zinc oxide, silicon-containing indium tin oxide, and silicon-containing indium zinc oxide can be used. .
- FIG. 12B is a cross-sectional view showing a configuration example between the dashed-dotted line X1-X2 in FIG. 3.
- FIG. FIG. 12B is a modification of the configuration shown in FIG. 12A, and differs from the configuration shown in FIG. 12A in that the colored layer 133 is not provided.
- dashed-dotted line Y1-Y2 it can be set as the same structure as FIG. 6B.
- the light emitting element 130 having the optical adjustment layer 116 allows the light emitting element 130 to have a microcavity structure and emit light with high color purity. Therefore, for example, when the sub-pixel 110a emits red, the sub-pixel 110b emits green, and the sub-pixel 110c emits blue, the light emitted by the light-emitting element 130 provided in the sub-pixel 110a has an enhanced red color. Similarly, the light emitted by the light emitting element 130 provided in the sub-pixel 110b becomes light with enhanced green color, and the light emitted by the light emitting element 130 provided in the sub-pixel 110c becomes light with enhanced blue color. Therefore, the display device 100 can be configured without the colored layer 133 .
- the display device 100 does not have the colored layer 133 , the light emitted from the light emitting element 130 is not absorbed by the colored layer 133 . Therefore, the light extraction efficiency of the display device 100 can be enhanced.
- the display device 100 does not have the colored layer 133, the display device 100 can be configured without the protective layer 132 that can function as a planarization layer.
- FIG. 3 illustrates an example in which the pixel 110 includes four sub-pixels: sub-pixel 110a, sub-pixel 110b, sub-pixel 110c, and sub-pixel 110d; however, one embodiment of the present invention is not limited to this.
- FIG. 13 is a top view showing a configuration example of the display device 100.
- a pixel 110 shown in FIG. 13 is composed of five sub-pixels: a sub-pixel 110a, a sub-pixel 110b, a sub-pixel 110c, a sub-pixel 110d, and a sub-pixel 110e.
- the sub-pixel 110a, the sub-pixel 110b, the sub-pixel 110c, and the sub-pixel 110e have light-emitting elements that emit white light, for example.
- a colored layer transmitting red light in the sub-pixel 110a, a colored layer transmitting green light in the sub-pixel 110b, and a colored layer transmitting blue light in the sub-pixel 110c, 110a, subpixel 110b, and subpixel 110c can be red, green, and blue subpixels, respectively.
- the sub-pixel 110e can be a white sub-pixel.
- Sub-pixel 110d can be a sub-pixel having a light receiving element.
- FIG. 13 shows an example in which sub-pixels are arranged in two rows and three columns in one pixel 110 .
- Pixel 110 has three sub-pixels (sub-pixel 110a, sub-pixel 110b, and sub-pixel 110c) in the upper row (first row) and two sub-pixels in the lower row (second row). (sub-pixel 110d and sub-pixel 110e).
- pixel 110 has sub-pixel 110a and sub-pixel 110d in the left column (column 1), sub-pixel 110b in the center column (column 2), and sub-pixel 110b in the right column (column 3).
- it has sub-pixels 110e over the second and third columns.
- FIG. 14A is a cross-sectional view showing a configuration example between dashed line X3-X4 in FIG. 13, and FIG. 14B is a cross-sectional view showing a configuration example between dashed line X5-X6 in FIG. 14C is a cross-sectional view showing a configuration example between dashed line Y3-Y4 in FIG. 13, and FIG. 14D is a cross-sectional view showing a configuration example between dashed line Y5-Y6 in FIG.
- the sub-pixel 110e which can be a white sub-pixel, does not have the colored layer 133, as shown in FIGS. 14B and 14D. can be done.
- 15A to 15E, 16A to 16E, 17A to 17D, and 18A to 18D are cross-sectional views illustrating an example of a method for manufacturing the display device 100 illustrated in FIGS. 3, 6A, and 6B.
- a cross-sectional view taken along dashed line X1-X2 in FIG. 3 and a cross-sectional view taken along Y1-Y2 are shown side by side.
- Thin films (insulating films, semiconductor films, conductive films, etc.) that make up the display device are formed using a sputtering method, a CVD method, a vacuum deposition method, a pulsed laser deposition (PLD) method, an ALD method, or the like. be able to.
- the CVD method includes a plasma enhanced CVD (PECVD) method, a thermal CVD method, and the like. Also, one of the thermal CVD methods is the metal organic CVD (MOCVD) method.
- thin films that make up the display device can be applied by spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife, slit coating, roll coating, curtain coating, etc. It can be formed by a method such as coating or knife coating.
- a vacuum process such as a vapor deposition method and a solution process such as a spin coating method or an ink jet method can be used for manufacturing the light emitting element and the light receiving element.
- vapor deposition methods include sputtering, ion plating, ion beam vapor deposition, molecular beam vapor deposition, physical vapor deposition (PVD) such as vacuum vapor deposition, and chemical vapor deposition (CVD).
- the functional layers (hole injection layer, hole transport layer, light emitting layer, electron transport layer, etc.) contained in the light emitting unit and the functional layers (hole transport layer, light emitting layer, electron transport layer, etc.) contained in the light receiving unit
- vapor deposition method vacuum vapor deposition method, etc.
- coating method dip coating method, die coating method, bar coating method, spin coating method, spray coating method, etc.
- printing method inkjet method, screen (stencil printing) method, offset (lithographic printing) method, flexographic (letterpress printing) method, gravure method, microcontact method, or the like).
- the processing can be performed using a photolithography method or the like.
- the thin film may be processed by a nanoimprint method, a sandblast method, a lift-off method, or the like.
- an island-shaped thin film may be directly formed by a film formation method using a shielding mask such as a metal mask.
- the photolithography method there are typically the following two methods.
- One is a method of forming a resist mask on a thin film to be processed, processing the thin film by etching or the like, and removing the resist mask.
- the other is a method of forming a photosensitive thin film, then performing exposure and development to process the thin film into a desired shape.
- the light used for exposure may be, for example, i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or a mixture thereof.
- ultraviolet rays, KrF laser light, ArF laser light, or the like can also be used.
- extreme ultraviolet light (EUV: Extreme Ultra-violet) or X-rays may be used.
- An electron beam can also be used instead of the light used for exposure.
- the use of extreme ultraviolet light, X-rays, or electron beams is preferable because extremely fine processing is possible.
- a photomask is not necessary when exposure is performed by scanning a beam such as an electron beam.
- a dry etching method, a wet etching method, a sandblasting method, or the like can be used for processing the thin film.
- a layer 101 including a transistor is formed.
- the topmost surface of the layer 101 containing the transistors can be an insulating layer.
- a conductive film 111A which later becomes the pixel electrode 111, the pixel electrode 111PS, and the connection electrode 111C, is formed over the layer 101 including the transistor.
- a layer 112_1A that will later become the light-emitting unit 112_1 is formed over the conductive film 111A.
- a film that will be the layer 181 later, a film that will be the layer 182 later, a light-emitting film that will be the light-emitting layer 183_1 later, and a film that will be the layer 184 later are formed in this order.
- an intermediate film 113A that will later become the intermediate layer 113 is formed on the layer 112_1A.
- a layer 112_2A that will later become the light emitting unit 112_2 is formed on the intermediate film 113A. Specifically, a film that will be the layer 182 later, a light-emitting film that will be the light-emitting layer 183_2 later, and a film that will be the layer 184 later are formed in this order.
- the film of the layer 112_1A, the intermediate film 113A, and the film of the layer 112_2A can be formed, for example, by an evaporation method, a sputtering method, an inkjet method, or the like. Note that the method is not limited to this, and the film forming method described above can be used as appropriate.
- the layer 112_1A, the intermediate film 113A, and the layer 112_2A are not provided in the connecting portion 140.
- FIG. For example, when the film of the layer 112_1A, the intermediate film 113A, and the film of the layer 112_2A are formed by vapor deposition (or sputtering), a shielding mask is used so that these films are not formed on the connection portion 140. is preferred.
- a sacrificial film 141a is formed over the layer 112_2A.
- the sacrificial film 141 a is also provided on the connecting portion 140 .
- the sacrificial film 141a a film having high etching resistance to the film included in the layer 112_2A, the intermediate film 113A, and the layer 112_1A, that is, a film having a high etching selectivity can be used.
- the sacrificial film 141a can be a film having a high etching selectivity with respect to a protective film such as a protective film 143a to be described later.
- a film that can be removed by a wet etching method that causes less damage to the films of the layer 112_2A, the intermediate film 113A, and the layer 112_1A can be used.
- the sacrificial film 141a for example, an inorganic film such as a metal film, an alloy film, a metal oxide film, a semiconductor film, or an inorganic insulating film can be used.
- the sacrificial film 141a can be formed by various film formation methods such as a sputtering method, a vapor deposition method, a CVD method, and an ALD method.
- the sacrificial film 141a for example, metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum, or the metal materials can be used.
- metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum, or the metal materials can be used.
- a low melting point material such as aluminum or silver.
- a metal oxide such as indium gallium zinc oxide (also referred to as In—Ga—Zn oxide, IGZO) can be used.
- indium oxide, indium zinc oxide (In—Zn oxide), indium tin oxide (In—Sn oxide), indium titanium oxide (In—Ti oxide), indium tin zinc oxide (In—Sn -Zn oxide), indium titanium zinc oxide (In-Ti-Zn oxide), indium gallium tin zinc oxide (In-Ga-Sn-Zn oxide), or the like can be used.
- indium tin oxide containing silicon or the like can be used.
- element M is aluminum, silicon, boron, yttrium, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten , or one or more selected from magnesium).
- M is preferably one or more selected from gallium, aluminum, and yttrium.
- Inorganic insulating materials such as aluminum oxide, hafnium oxide, and silicon oxide can be used for the sacrificial film 141a.
- the sacrificial film 141a it is preferable to use a material that can be dissolved in a solvent that is chemically stable at least for the film that is included in the layer 112_2A and which will become the layer 184 later.
- a material that dissolves in water or alcohol can be suitably used for the sacrificial film 141a.
- the solvent can be removed at a low temperature in a short time by performing heat treatment in a reduced-pressure atmosphere, so that thermal damage to the layer 112_2A, the intermediate film 113A, and the layer 112_1A can be reduced. It is possible and preferable.
- wet film formation methods that can be used to form the sacrificial film 141a include spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, and knife coating. There are coats, etc.
- an organic material such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, or alcohol-soluble polyamide resin can be used.
- PVA polyvinyl alcohol
- polyvinyl butyral polyvinylpyrrolidone
- polyethylene glycol polyglycerin
- pullulan polyethylene glycol
- pullulan polyglycerin
- pullulan water-soluble cellulose
- alcohol-soluble polyamide resin water-soluble polyamide resin
- a protective film 143a is formed on the sacrificial film 141a (FIG. 15A).
- the protective film 143a is a film used as a mask when etching the sacrificial film 141a later. Further, the sacrificial film 141a is exposed when the protective film 143a is etched later. Therefore, the sacrificial film 141a and the protective film 143a are selected from a combination of films having a high etching selectivity. Therefore, a film that can be used for the protective film 143a can be selected according to the etching conditions for the sacrificial film 141a and the etching conditions for the protective film 143a.
- a gas containing fluorine also referred to as a fluorine-based gas
- An alloy containing molybdenum and niobium, an alloy containing molybdenum and tungsten, or the like can be used for the protective film 143a.
- a metal oxide film such as IGZO or ITO is used as IGZO or ITO is used. and can be used for the protective film 143a.
- the protective film 143a is not limited to this, and can be selected from various materials according to the etching conditions for the sacrificial film 141a and the etching conditions for the protective film 143a. For example, it can be selected from films that can be used for the sacrificial film 141a.
- a nitride film for example, can be used as the protective film 143a.
- nitrides such as silicon nitride, aluminum nitride, hafnium nitride, titanium nitride, tantalum nitride, tungsten nitride, gallium nitride, and germanium nitride can also be used.
- an oxide film can be used as the protective film 143a.
- an oxide film or an oxynitride film such as silicon oxide, silicon oxynitride, aluminum oxide, aluminum oxynitride, hafnium oxide, or hafnium oxynitride can be used.
- a resist mask 145a is formed on the protective film 143a (FIG. 15B).
- a resist material containing a photosensitive resin such as a positive resist material or a negative resist material can be used.
- the layer 112_2A may be affected by the solvent of the resist material. A film or the like that becomes the layer 184 may be dissolved. Using the protective film 143a can prevent such a problem from occurring.
- the resist mask 145a may be formed directly on the sacrificial film 141a without using the protective film 143a.
- a portion of the protective film 143a not covered with the resist mask 145a is removed by etching to form a protective layer 149a.
- etching the protective film 143a it is preferable to use etching conditions with a high selectivity so that the sacrificial film 141a is not removed by the etching.
- Etching of the protective film 143a can be performed by wet etching or dry etching. By using dry etching, reduction of the pattern of the protective film 143a can be suppressed.
- the removal of the resist mask 145a can be performed by wet etching or dry etching.
- the resist mask 145a is preferably removed by dry etching (also referred to as plasma ashing) using an oxygen gas as an etching gas.
- the removal of the resist mask 145a is performed in a state in which the sacrificial film 141a is provided over the layer 112_2A, so that the influence on the layer 112_2A, the intermediate film 113A, and the layer 112_1A is suppressed.
- the layers 112_1A and 112_2A come into contact with oxygen, the electrical characteristics may be adversely affected; therefore, it is suitable for etching using oxygen gas such as plasma ashing.
- a portion of the sacrificial film 141a not covered with the protective layer 149a is removed by etching to form a sacrificial layer 147a (FIG. 15D).
- the sacrificial film 141a can be etched by wet etching or dry etching, but a dry etching method is preferably used because pattern shrinkage can be suppressed.
- portions of the layer 112_2A, the intermediate film 113A, and the layer 112_1A that are not covered with the sacrificial layer 147a are removed by etching, and the light-emitting unit 112_2, the intermediate layer 113, and the light-emitting unit 112_1 are removed.
- the protective layer 149a may be removed by etching at the same time as or before the etching of the layer 112_2A, the intermediate film 113A, and the layer 112_1A.
- etching gas containing no oxygen as its main component dry etching using an etching gas containing no oxygen as its main component. Accordingly, deterioration of the layer 112_2A, the intermediate film 113A, and the layer 112_1A can be suppressed, and a highly reliable display device can be realized.
- the etching gas containing no oxygen as a main component include noble gases such as CF 4 , C 4 F 8 , SF 6 , CHF 3 , Cl 2 , H 2 O, BCl 3 , H 2 and He. Further, a mixed gas of the above gas and a diluent gas that does not contain oxygen can be used as an etching gas.
- a layer 152A that will later become the light receiving unit 152 is formed over the conductive film 111A and the protective layer 149a. Specifically, a film that will later become the layer 182 , a light-receiving film that will later become the light-receiving layer 193 , and a film that will later become the layer 184 are formed in this order.
- a film included in the layer 152A can be formed, for example, by an evaporation method, a sputtering method, an inkjet method, or the like. Note that the method is not limited to this, and the film forming method described above can be used as appropriate.
- layer 152A is not provided on connecting portion 140.
- FIG. For example, when films included in the layer 152A are formed by vapor deposition (or sputtering), it is preferable to use a shielding mask so that these films are not formed on the connection portion 140.
- FIG. 1 when films included in the layer 152A are formed by vapor deposition (or sputtering), it is preferable to use a shielding mask so that these films are not formed on the connection portion 140.
- a sacrificial film 141b is formed over the layer 152A.
- the sacrificial film 141b is also provided on the connecting portion 140 .
- the sacrificial film 141b can be formed by a film formation method similar to that of the sacrificial film 141a and can have a material similar to that of the sacrificial film 141a.
- the sacrificial film 141b can be a film having high resistance to the etching treatment of the film of the layer 152A, that is, a film having a high etching selectivity.
- the sacrificial film 141b can use a film having a high etching selectivity with respect to a protective film such as a protective film 143b to be described later. Further, for the sacrificial film 141b, a film that can be removed by a wet etching method that causes less damage to the film of the layer 152A can be used.
- a protective film 143b is formed on the sacrificial film 141b (FIG. 16A).
- the protective film 143b can be formed by a film formation method similar to that of the protective film 143a and can have a material similar to that of the protective film 143a.
- Resist mask 145b is formed on the protective film 143b (FIG. 16B). Resist mask 145b can have a material similar to resist mask 145a.
- a portion of the protective film 143b that is not covered with the resist mask 145b is removed by etching to form a protective layer 149b.
- the protective layer 149b is also formed on the connecting portion 140 at the same time.
- the etching of the protective film 143b can be performed by the same method as the etching of the protective film 143a.
- the resist mask 145b is removed (FIG. 16C).
- the resist mask 145b can be removed by a method similar to that of the resist mask 145a.
- a portion of the sacrificial film 141b not covered with the protective layer 149b is removed by etching to form a sacrificial layer 147b (FIG. 16D).
- a sacrificial layer 147b is also formed on the connecting portion 140 at the same time. Etching of the sacrificial layer 147b can be performed by a method similar to etching of the sacrificial layer 147a.
- a portion of the layer 152A that is not covered with the sacrificial layer 147b is removed by etching to form the light receiving unit 152 (FIG. 16E).
- the protective layer 149b may be removed by etching at the same time as the etching of the light receiving unit 152 or before the etching.
- Dry etching using an etching gas that does not contain oxygen as its main component is preferably used for etching the layer 152A. Accordingly, deterioration of the layer 152A can be suppressed, and a highly reliable display device can be realized.
- connection electrode 111C is formed (FIG. 17A).
- part of the layer 101 including the transistor (specifically, the insulating layer located on the outermost surface) is etched to form a recess in some cases.
- the recess is provided in the layer 101 including the transistor will be described as an example, but the recess may not be provided.
- the pixel electrode 111, the pixel electrode 111PS, the connection electrode 111C, the light emitting unit 112_1, the intermediate layer 113, the light emitting unit 112_2, the light receiving unit 152, the sacrificial layer 147a, the sacrificial layer 147b, the protective layer 149a, and the protective layer 149b are covered.
- an insulating film 121A that will later become the side wall 121a is formed.
- the insulating film 121A is preferably formed by a method that causes less damage to the light-emitting unit 112 and the light-receiving unit 152 . Also, the insulating film 121A and the insulating film 121B are formed at a temperature lower than the heat resistant temperature of the light emitting unit 112 and the light receiving unit 152 .
- an aluminum oxide film can be formed using the ALD method. The use of the ALD method is preferable because a film with high coverage can be formed.
- a silicon oxynitride film or a silicon nitride film can be formed as the insulating film 121B by a PECVD method or a sputtering method.
- the insulating film 121B and the insulating film 121A are etched to form sidewalls 121b and 121a (FIG. 17C).
- the sidewall 121a is formed to cover at least part of the side surface of the pixel electrode 111, the side surface of the pixel electrode 111PS, and the side surface of the connection electrode 111C. Further, the sidewall 121a may cover at least part of the side surface of the light emitting unit 112_1, the side surface of the intermediate layer 113, and the side surface of the light emitting unit 112_2, and may cover at least part of the side surface of the light receiving unit 152. Specifically, as shown in FIG.
- the sidewall 121a is in contact with at least part of the side surface of the pixel electrode 111, the side surface of the light-emitting unit 112_1, the side surface of the intermediate layer 113, and the side surface of the light-emitting unit 112_2. can do.
- the side wall 121a can be configured to contact at least a part of the side surface of the pixel electrode 111PS and the side surface of the light receiving unit 152 .
- the sidewall 121a can be configured to contact at least part of the side surface of the connection electrode 111C.
- the sidewall 121a is preferably formed to cover at least part of the side surface of the light emitting unit 112_1, the side surface of the intermediate layer 113, the side surface of the light emitting unit 112_2, and the side surface of the light receiving unit 152.
- FIG. This suppresses the common layer 114 or the common electrode 115 to be formed later from being in contact with the light-emitting unit 112_1, the intermediate layer 113, the light-emitting unit 112_2, and the light-receiving unit 152, and suppresses short-circuiting of the light-emitting element and the light-receiving element. be able to.
- damage to the light-emitting unit 112_1, the intermediate layer 113, the light-emitting unit 112_2, and the light-receiving unit 152 in subsequent steps can be suppressed.
- the entire side surface of the pixel electrode 111, the entire side surface of the pixel electrode 111PS, and the connection electrode can be formed. It is possible to cover the entire side surface of 111C with the side wall 121a, which is preferable.
- the sidewall 121b is formed to cover at least part of the side surface and top surface of the sidewall 121a.
- the insulating films 121A and 121B are preferably etched by a dry etching method.
- the insulating films 121A and 121B are preferably etched by anisotropic etching.
- the insulating film 121A and the insulating film 121B can be etched using an etching gas that can be used for etching the sacrificial film 141a or the sacrificial film 141b.
- the choice of etching method is wider than in the etching of the sacrificial films 141a and 141b.
- a gas containing oxygen may be used as an etching gas when the insulating films 121A and 121B are etched.
- sacrificial layer 147a, sacrificial layer 147b, protective layer 149a, and protective layer 149b are removed (FIG. 17D). Thereby, the light emitting unit 112_2, the light receiving unit 152, and the connection electrode 111C are exposed.
- a common layer 114 is formed on the side wall 121, the light emitting unit 112_2, and the light receiving unit 152 (FIG. 18A). This may result in the formation of voids 134 in the regions between sidewalls 121b and in the recesses of layer 101 containing the transistors.
- the common layer 114 is not provided on the connection electrode 111C, and the connection electrode 111C remains exposed.
- common layer 114 functions as either an electron injection layer or a hole injection layer in light emitting device 130 .
- the common layer 114 functions as either an electron transport layer or a hole transport layer in the light receiving element 150 .
- the common layer 114 can be formed by a vapor deposition method (including a vacuum vapor deposition method), a transfer method, a printing method, an inkjet method, a coating method, or the like.
- the common layer 114 is provided so as to cover at least part of the upper surface of the light emitting unit 112_2, the upper surface of the light receiving unit 152, and the upper surface and side surfaces of the side walls 121.
- the common layer 114 has high conductivity, for example, the pixel electrode 111 and the common layer 114 may come into contact with each other, causing a short circuit in the light emitting element. In addition, contact between the pixel electrode 111PS and the common layer 114 may cause a short circuit in the light receiving element.
- the sidewall 121 covers at least part of the side surface of the pixel electrode 111, the side surface of the light emitting unit 112_1, the side surface of the intermediate layer 113, the side surface of the light emitting unit 112_2, and the side surface of the light receiving unit 152.
- the highly conductive common layer 114 can be prevented from being in contact with them, and short-circuiting of the light-emitting element 130 and the light-receiving element 150 can be prevented. Thereby, the reliability of the light emitting element 130 and the light receiving element 150 can be improved.
- a common electrode 115 is formed on the common layer 114 and the connection electrode 111C (FIG. 18B). Thereby, the light emitting element 130 and the light receiving element 150 are formed.
- a sputtering method or a vacuum deposition method can be used to form the common electrode 115 .
- a protective layer 131 is formed on the common electrode 115, and a protective layer 132 is formed on the protective layer 131 (FIG. 18C).
- Methods for forming the protective layers 131 and 132 include a vacuum deposition method, a sputtering method, a CVD method, an ALD method, and the like.
- the protective layer 131 and the protective layer 132 may be films formed using different film formation methods.
- the protective layer 131 and the protective layer 132 may each have a single-layer structure or a laminated structure.
- a colored layer 133a, a colored layer 133b, and a colored layer 133c are formed over the protective layer 132 so as to overlap with the light-emitting units 112_1 and 112_2 (FIG. 18D).
- the colored layer 133a, the colored layer 133b, and the colored layer 133c can be formed at desired positions by an inkjet method, a photolithography method, or the like.
- a different colored layer 133 (a colored layer 133a, a colored layer 133b, or a colored layer 133c) can be formed for each light-emitting element .
- the substrate 120 is attached to the coloring layer 133 and the protective layer 132 using the resin layer 119, whereby the display device 100 shown in FIGS. 6A and 6B can be manufactured.
- the island-shaped light-emitting unit having the light-emitting layer is not formed by the pattern of the metal mask, but is etched after the light-emitting unit is formed over the entire surface.
- the island-shaped light-receiving units having the light-receiving layer are not formed by a pattern of a metal mask, but are formed by etching after forming the light-receiving units on one surface.
- the island-shaped light-emitting units and the island-shaped light-receiving units can be formed with a uniform thickness. Further, a high-definition display device or a display device with a high aperture ratio can be realized.
- 19A to 19G and 20A to 20D are cross-sectional views illustrating an example of a method for manufacturing the display device 100 illustrated in FIGS. , and a cross-sectional view between Y1-Y2 are shown side by side.
- description of the same points as the manufacturing method of the display device 100 shown in FIGS. 6A and 6B will be omitted as appropriate.
- a layer 101 including a transistor is formed, and a conductive film 111A which later becomes the pixel electrode 111, the pixel electrode 111PS, and the connection electrode 111C is formed over the layer 101 including the transistor. is deposited (FIG. 19A).
- a layer 116A is formed on the conductive film 111A (FIG. 19B).
- a sputtering method or a vacuum deposition method, for example, can be used to form the layer 116A.
- Layer 116A can be part of optical adjustment layer 116a, which will be described in more detail below. Therefore, a conductive material that transmits visible light can be used for the layer 116A.
- conductive oxides such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, gallium-containing zinc oxide, silicon-containing indium tin oxide, and silicon-containing indium zinc oxide can be used. .
- Resist mask 146a is formed on the layer 116A (FIG. 19C). Resist mask 146a can have a material similar to resist mask 145a and resist mask 145b.
- a layer 116B is formed over the conductive film 111A and the layer 116A (FIG. 19E).
- Layer 116B can be deposited in a similar deposition method as layer 116A and can have a material similar to layer 116A.
- a resist mask 146b is formed on the layer 116B (FIG. 19F).
- the resist mask 146b is formed to have regions that overlap the layer 116A and regions that do not overlap the layer 116A.
- the resist mask 146b can be formed, for example, so as to overlap the entire layer 116A and have regions that do not overlap the layer 116A.
- a layer 116C is formed over the conductive film 111A and over the layer 116B (FIG. 20A).
- Layer 116C can be deposited in a manner similar to layers 116A, etc. and can have materials similar to layers 116A, etc. FIG.
- a layer 112_1A that will later become the light-emitting unit 112_1 an intermediate film 113A that will later become the intermediate layer 113, a layer 112_2A that will later become the light-emitting unit 112_2, a sacrificial film 141a, and a protective film 143a are sequentially formed ( Figure 20B).
- a resist mask 145a is formed on the protective film 143a (FIG. 20C).
- the protective film 143a, the sacrificial film 141a, the layer 112_2A, the intermediate film 113A, the layer 112_1A, the layer 116C, the layer 116B, and part of the layer 116A are removed by etching. do.
- a protective layer 149a, a sacrificial layer 147a, a light-emitting unit 112_2, an intermediate layer 113, a light-emitting unit 112_1, an optical adjustment layer 116a, an optical adjustment layer 116b, and an optical adjustment layer 116c are formed (FIG. 20D).
- the optical adjustment layer 116a can have a three-layer lamination structure of a layer 116A, a layer 116B, and a layer 116C.
- the optical adjustment layer 116b can have a two-layer lamination structure of a layer 116B and a layer 116C.
- the optical adjustment layer 116c can have a single-layer structure of the layer 116C.
- the optical adjustment layer 116a can be made thicker than the optical adjustment layers 116b and 116c, and the optical adjustment layer 116b can be made thicker than the optical adjustment layer 116c.
- a display device of one embodiment of the present invention includes a tandem light-emitting element and a light-receiving element. Side walls of the pixel electrode, the light-emitting layer, the carrier transport layer, and the intermediate layer of the light-emitting element are covered with sidewalls. In addition, each side surface of the pixel electrode, the light receiving layer, and the carrier transport layer of the light receiving element is covered with a side wall.
- the light-emitting unit included in the light-emitting element is etched while the light-emitting layer and the carrier transport layer are stacked. Further, the light receiving unit of the light receiving element is etched while the light receiving layer and the carrier transport layer are laminated.
- the display device has a structure in which damage to the light-emitting layer and damage to the light-receiving layer are reduced.
- the sidewalls prevent contact between the pixel electrode and a layer that can be used as a common layer (such as a carrier injection layer) or the common electrode, thereby suppressing short-circuiting of the light emitting element.
- FIG. 21 is a perspective view showing a configuration example of the display module 280a.
- the display module 280 a has a display device 100 , an FPC 472 and an IC 473 .
- a display device 100 shown in FIG. 21 has a structure in which a substrate 451 and a substrate 120 are bonded together.
- the substrate 120 is indicated by dashed lines.
- the display device 100 includes a display portion 462, a circuit 464, wirings 465, and the like.
- the circuit 464 for example, a scanning line driver circuit can be used.
- the wiring 465 has a function of supplying signals and power to the display portion 462 and the circuit 464 .
- the signal and power are input to the wiring 465 from the outside through the FPC 472 or input to the wiring 465 from the IC 473 .
- FIG. 21 shows an example in which the IC 473 is provided on the substrate 451 by a COG (Chip On Glass) method, a COF (Chip On Film) method, or the like.
- a COG Chip On Glass
- COF Chip On Film
- the IC 473 for example, an IC having a scanning line driver circuit, a signal line driver circuit, or the like can be applied.
- the display module 280a may be configured without the IC 473 or the like.
- the IC may be mounted on the FPC 472 by the COF method or the like.
- FIG. 22 shows a part of a display device 100a that can be applied to the display device 100 shown in FIG. An example of a cross section when each part is cut is shown.
- a display device 100a illustrated in FIG. 22 includes a transistor 201, a transistor 205, a light-emitting element 130, a light-receiving element 150, a colored layer 133, and the like between a substrate 451 and a substrate 120.
- FIG. 22 A display device 100a illustrated in FIG. 22 includes a transistor 201, a transistor 205, a light-emitting element 130, a light-receiving element 150, a colored layer 133, and the like between a substrate 451 and a substrate 120.
- the light-emitting element 130 and the light-receiving element 150 the light-emitting element and the light-receiving element exemplified in Embodiment 1 can be applied.
- Both the transistor 201 and the transistor 205 are formed over the substrate 451 . These transistors can be made with the same material and the same process.
- An insulating layer 211 , an insulating layer 213 , an insulating layer 215 , and an insulating layer 214 are provided in this order over the substrate 451 .
- a stacked structure from the substrate 451 to the insulating layer 214 corresponds to the layer 101 including the transistor in Embodiment 1.
- FIG. 1 A stacked structure from the substrate 451 to the insulating layer 214 corresponds to the layer 101 including the transistor in Embodiment 1.
- Part of the insulating layer 211 functions as a gate insulating layer of each transistor.
- Part of the insulating layer 213 functions as a gate insulating layer of each transistor.
- An insulating layer 215 is provided over the transistor.
- An insulating layer 214 is provided over the transistor and functions as a planarization layer. Note that the number of gate insulating layers and the number of insulating layers covering a transistor are not limited, and each may have a single layer or two or more layers.
- a material into which impurities such as water and hydrogen are difficult to diffuse is preferably used for at least one insulating layer that covers the transistor. This allows the insulating layer to function as a barrier layer. With such a structure, diffusion of impurities from the outside into the transistor can be effectively suppressed, and the reliability of the display device can be improved.
- An inorganic insulating film is preferably used for each of the insulating layers 211 , 213 , and 215 .
- the inorganic insulating film for example, a silicon nitride film, a silicon oxynitride film, a silicon oxide film, a silicon oxynitride film, an aluminum oxide film, an aluminum nitride film, or the like can be used.
- a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, a neodymium oxide film, or the like may be used.
- two or more of the insulating films described above may be laminated and used.
- the organic insulating film preferably has an opening near the edge of the display device 100a. As a result, it is possible to prevent impurities from entering through the organic insulating film from the end portion of the display device 100a.
- the organic insulating film may be formed so that the edges of the organic insulating film are positioned inside the edges of the display device 100a so that the organic insulating film is not exposed at the edges of the display device 100a.
- An organic insulating film is suitable for the insulating layer 214 that functions as a planarization layer.
- materials that can be used for the organic insulating film include acrylic resins, polyimide resins, epoxy resins, polyamide resins, polyimideamide resins, siloxane resins, benzocyclobutene-based resins, phenolic resins, precursors of these resins, and the like.
- An opening is formed in the insulating layer 214 in a region 228 shown in FIG. As a result, even when an organic insulating film is used for the insulating layer 214 , it is possible to prevent external impurities from entering the light emitting element 130 and the light receiving element 150 through the insulating layer 214 . Therefore, the reliability of the display device 100a can be improved.
- the transistors 201 and 205 include a conductive layer 221 functioning as a gate, an insulating layer 211 functioning as a gate insulating layer, conductive layers 222a and 222b functioning as sources and drains, a semiconductor layer 231, and an insulating layer functioning as a gate insulating layer. It has a layer 213 and a conductive layer 223 that functions as a gate. Here, the same hatching pattern is applied to a plurality of layers obtained by processing the same conductive film.
- the insulating layer 211 is located between the conductive layer 221 and the semiconductor layer 231 .
- the insulating layer 213 is located between the conductive layer 223 and the semiconductor layer 231 .
- the structure of the transistor included in the display device of this embodiment There is no particular limitation on the structure of the transistor included in the display device of this embodiment.
- a planar transistor, a staggered transistor, an inverted staggered transistor, or the like can be used.
- a top-gate transistor structure or a bottom-gate transistor structure may be used.
- gates may be provided above and below a semiconductor layer in which a channel is formed.
- a structure in which a semiconductor layer in which a channel is formed is sandwiched between two gates is applied to the transistors 201 and 205 .
- a transistor may be driven by connecting two gates and applying the same signal to them.
- the threshold voltage of the transistor may be controlled by applying a potential for controlling the threshold voltage to one of the two gates and applying a potential for driving to the other.
- the crystallinity of the semiconductor material used for the transistor is not particularly limited, either. (semiconductors having A single crystal semiconductor or a crystalline semiconductor is preferably used because deterioration in transistor characteristics can be suppressed.
- a semiconductor layer of a transistor preferably includes a metal oxide (also referred to as an oxide semiconductor).
- the display device of this embodiment preferably uses a transistor including a metal oxide for a channel formation region (hereinafter referred to as an OS transistor).
- the semiconductor layer of the transistor may comprise silicon. Examples of silicon include amorphous silicon and crystalline silicon (low-temperature polysilicon, monocrystalline silicon, etc.).
- the semiconductor layer includes, for example, indium and M (M is gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, one or more selected from hafnium, tantalum, tungsten, and magnesium) and zinc.
- M is preferably one or more selected from aluminum, gallium, yttrium, and tin.
- an oxide containing indium (In), gallium (Ga), and zinc (Zn) (also referred to as IGZO) is preferably used for the semiconductor layer.
- the In atomic ratio in the In-M-Zn oxide is preferably equal to or higher than the M atomic ratio.
- connection portion 204 is provided in a region of the substrate 451 where the substrate 120 does not overlap.
- the wiring 465 is electrically connected to the FPC 472 through the conductive layer 466 and the connection layer 242 .
- the conductive layer 466 can be formed in the same step as the pixel electrode.
- the conductive layer 466 is exposed on the upper surface of the connecting portion 204 . Thereby, the connecting portion 204 and the FPC 472 can be electrically connected via the connecting layer 242 .
- optical members can be arranged outside the substrate 120 .
- optical members include polarizing plates, retardation plates, light diffusion layers (diffusion films, etc.), antireflection layers, and light collecting films.
- an antistatic film that suppresses adhesion of dust, a water-repellent film that prevents adhesion of dirt, a hard coat film that suppresses the occurrence of scratches due to use, a shock absorption layer, etc. are arranged. may
- the insulating layer 215 and the protective layer 131 are in contact with each other through the opening of the insulating layer 214 in the region 228 near the edge of the display device 100a.
- the inorganic insulating film included in the insulating layer 215 and the inorganic insulating film included in the protective layer 131 are in contact with each other. This can prevent impurities from entering the light emitting element 130 and the light receiving element 150 from the outside through the organic insulating film. Therefore, the reliability of the display device 100a can be improved.
- Glass, quartz, ceramic, sapphire, resin, metal, alloy, semiconductor, or the like can be used for the substrate 451 and the substrate 120, respectively.
- a material that transmits the light is used for the substrate on the side from which the light from the light-emitting element is extracted.
- a flexible material for the substrate 451 and the substrate 120 the flexibility of the display device can be increased.
- a polarizing plate may be used as the substrate 451 or the substrate 120 .
- polyester resins such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyacrylonitrile resins, acrylic resins, polyimide resins, polymethyl methacrylate resins, polycarbonate (PC) resins, and polyether resins are used, respectively.
- PES resin Sulfone (PES) resin, polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PTFE) resin, ABS resin, cellulose nanofiber, or the like can be used.
- PES polytetyrene resin
- polyamideimide resin polyurethane resin
- polyvinyl chloride resin polyvinylidene chloride resin
- polypropylene resin polytetrafluoroethylene (PTFE) resin
- PTFE resin polytetrafluoroethylene
- ABS resin cellulose nanofiber, or the like
- One or both of the substrate 451 and the substrate 120 may be made of glass having a thickness that is flexible.
- various curable adhesives such as photocurable adhesives such as ultraviolet curable adhesives, reaction curable adhesives, thermosetting adhesives, and anaerobic adhesives can be used.
- These adhesives include epoxy resins, acrylic resins, silicone resins, phenol resins, polyimide resins, imide resins, PVC (polyvinyl chloride) resins, PVB (polyvinyl butyral) resins, EVA (ethylene vinyl acetate) resins, and the like.
- a material with low moisture permeability such as epoxy resin is preferable.
- a two-liquid mixed type resin may be used.
- an adhesive sheet or the like may be used.
- connection layer 242 an anisotropic conductive film (ACF), an anisotropic conductive paste (ACP), or the like can be used.
- ACF anisotropic conductive film
- ACP anisotropic conductive paste
- a colored layer 133 is provided between the light emitting element 130 and the substrate 120 in the display device 100a.
- the transistors are formed on substrate 451 .
- the display device 100a can be a top emission display device. Therefore, in the display device 100a, the substrate 451 can be a non-light-transmitting substrate.
- FIG. 23 is a cross-sectional view showing a configuration example of the display device 100b.
- the display device 100b is a modification of the display device 100a, and differs from the display device 100a in that the colored layer 133 is provided between the light emitting element 130 and the substrate 451.
- the display device 100b can be a bottom emission display device. Therefore, in the display device 100b, the substrate 120 can be a non-light-transmitting substrate.
- FIG. 24A is a perspective view showing a configuration example of the display module 280b.
- the display module 280b has the display device 100 and the FPC 290 .
- the display module 280 b has a substrate 291 and a substrate 292 .
- the display module 280 b has a display section 281 .
- the display section 281 is an area for displaying an image in the display module 280b, and is an area where light from each pixel provided in the pixel section 284, which will be described later, can be visually recognized.
- FIG. 24B shows a perspective view schematically showing the configuration on the substrate 291 side.
- a circuit section 282 , a pixel circuit section 283 on the circuit section 282 , and a pixel section 284 on the pixel circuit section 283 are stacked on the substrate 291 .
- a terminal portion 285 for connecting to the FPC 290 is provided on a portion of the substrate 291 that does not overlap with the pixel portion 284 .
- the terminal portion 285 and the circuit portion 282 are electrically connected by a wiring portion 286 composed of a plurality of wirings.
- the pixel section 284 has a plurality of pixels 110 arranged periodically. An enlarged view of one pixel 110 is shown on the right side of FIG. 24B.
- the pixel 110 exemplified in Embodiment 1 can be applied to the pixel 110 .
- FIG. 24B shows an example in which sub-pixels 110a, 110b, 110c, and 110d are arranged in stripes.
- the pixel circuit section 283 has a plurality of pixel circuits 283a arranged periodically.
- the pixel circuit 283a has a function of controlling light emission by the light emitting element and light reception by the light receiving element.
- the transistors included in the circuit portion 282 and the transistors included in the pixel circuit portion 283 may have the same structure or different structures.
- the structures of the plurality of transistors included in the circuit portion 282 may all be the same, or may be of two or more types.
- the structures of the plurality of transistors included in the pixel circuit portion 283 may all be the same, or may be of two or more types.
- the circuit section 282 has a circuit that drives each pixel circuit 283 a of the pixel circuit section 283 .
- a circuit that drives each pixel circuit 283 a of the pixel circuit section 283 For example, it is preferable to have one or both of a scan line driver circuit and a signal line driver circuit.
- at least one of an arithmetic circuit, a memory circuit, a power supply circuit, and the like may be provided.
- the FPC 290 functions as wiring for supplying a video signal, power supply potential, or the like to the circuit section 282 from the outside. Also, an IC (integrated circuit) may be mounted on the FPC 290 .
- the aperture ratio (effective display area ratio) of the display portion 281 is extremely high. can be raised.
- the aperture ratio of the display section 281 can be 40% or more and less than 100%, preferably 50% or more and 95% or less, more preferably 60% or more and 95% or less.
- the pixels 110 can be arranged with extremely high density, and the definition of the display portion 281 can be extremely high.
- the pixels 110 may be arranged with a resolution of 2000 ppi or more, preferably 3000 ppi or more, more preferably 5000 ppi or more, and still more preferably 6000 ppi or more, and 20000 ppi or less, or 30000 ppi or less. preferable.
- a display module 280b Since such a display module 280b has extremely high definition, it can be suitably used for equipment for VR such as a head-mounted display, or equipment for glasses-type AR. For example, even in the case of a configuration in which the display portion of the display module 280b is viewed through a lens, the display module 280b has an extremely high-definition display portion 281, so pixels cannot be viewed even if the display portion is enlarged with the lens. , a highly immersive display can be performed. Moreover, the display module 280b is not limited to this, and can be suitably used for electronic equipment having a relatively small display unit. For example, it can be suitably used for a display part of a wearable electronic device such as a wristwatch.
- FIG. 25 is a cross-sectional view showing a configuration example of a display device 100c that can be applied to the display device 100 shown in FIG.
- the display device 100 c has a substrate 301 , a light emitting element 130 , a capacitor 240 and a transistor 310 .
- the substrate 301 corresponds to the substrate 291 in FIGS. 24A and 24B.
- a stacked structure from the substrate 301 to the insulating layer 255 corresponds to the layer 101 including the transistor in Embodiment 1.
- FIG. 1 A stacked structure from the substrate 301 to the insulating layer 255 corresponds to the layer 101 including the transistor in Embodiment 1.
- a transistor 310 has a channel formation region in the substrate 301 .
- the substrate 301 for example, a semiconductor substrate such as a single crystal silicon substrate can be used.
- Transistor 310 includes a portion of substrate 301 , conductive layer 311 , low resistance region 312 , insulating layer 313 and insulating layer 314 .
- the conductive layer 311 functions as a gate electrode.
- An insulating layer 313 is located between the substrate 301 and the conductive layer 311 and functions as a gate insulating layer.
- the low resistance region 312 is a region in which the substrate 301 is doped with impurities and functions as a source or drain.
- the insulating layer 314 is provided to cover the side surface of the conductive layer 311 .
- a device isolation layer 315 is provided between two adjacent transistors 310 so as to be embedded in the substrate 301 .
- An insulating layer 261 is provided to cover the transistor 310 and a capacitor 240 is provided over the insulating layer 261 .
- the capacitor 240 has a conductive layer 241, a conductive layer 245, and an insulating layer 243 positioned therebetween.
- the conductive layer 241 functions as one electrode of the capacitor 240
- the conductive layer 245 functions as the other electrode of the capacitor 240
- the insulating layer 243 functions as the dielectric of the capacitor 240 .
- the conductive layer 241 is provided over the insulating layer 261 and embedded in the insulating layer 254 .
- the conductive layer 241 is electrically connected to one of the source and drain of the transistor 310 by a plug 271 embedded in the insulating layer 261 .
- An insulating layer 243 is provided over the conductive layer 241 .
- the conductive layer 245 is provided in a region overlapping with the conductive layer 241 with the insulating layer 243 provided therebetween.
- An insulating layer 255 is provided to cover the capacitor 240 , and the light emitting element 130 , the light receiving element 150 and the like are provided over the insulating layer 255 .
- a protective layer 131 is provided on each of the light emitting element 130 and the light receiving element 150 .
- a protective layer 132 is provided on the protective layer 131 , and the substrate 120 is bonded onto the protective layer 132 with a resin layer 119 .
- Embodiment 1 can be referred to for details of the components from the light emitting element 130 and the light receiving element 150 to the substrate 120 .
- Substrate 120 corresponds to substrate 292 in FIG. 24A.
- the pixel electrode of the light emitting element 130 and the pixel electrode of the light receiving element 150 are embedded in the insulating layer 255, the plug 256 embedded in the insulating layer 243, the conductive layer 241 embedded in the insulating layer 254, and the insulating layer 261. It is electrically connected to one of the source or drain of transistor 310 by plug 271 .
- FIG. 26 is a cross-sectional view showing a configuration example of the display device 100d.
- the display device 100d differs from the display device 100c mainly in that the configuration of the transistors is different. Note that the description of the same parts as those of the display device 100c may be omitted.
- the transistor 320 is a transistor (OS transistor) in which a metal oxide is applied to a semiconductor layer in which a channel is formed.
- the transistor 320 has a semiconductor layer 321 , an insulating layer 323 , a conductive layer 324 , a pair of conductive layers 325 , an insulating layer 326 , and a conductive layer 327 .
- the substrate 331 corresponds to the substrate 291 in FIGS. 24A and 24B.
- a stacked structure from the substrate 331 to the insulating layer 255 corresponds to the layer 101 including the transistor in Embodiment 1.
- An insulating layer 332 is provided over the substrate 331 .
- the insulating layer 332 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the substrate 331 into the transistor 320 and oxygen from the semiconductor layer 321 toward the insulating layer 332 side.
- a film into which hydrogen or oxygen is less likely to diffuse than a silicon oxide film such as an aluminum oxide film, a hafnium oxide film, or a silicon nitride film, can be used.
- a conductive layer 327 is provided over the insulating layer 332 and an insulating layer 326 is provided to cover the conductive layer 327 .
- the conductive layer 327 functions as a first gate electrode of the transistor 320, and part of the insulating layer 326 functions as a first gate insulating layer.
- An oxide insulating film such as a silicon oxide film is preferably used for at least a portion of the insulating layer 326 that is in contact with the semiconductor layer 321 .
- the upper surface of the insulating layer 326 is preferably planarized.
- the semiconductor layer 321 is provided over the insulating layer 326 .
- the semiconductor layer 321 preferably has a metal oxide film having semiconductor properties.
- a pair of conductive layers 325 is provided on and in contact with the semiconductor layer 321 and functions as a source electrode and a drain electrode.
- An insulating layer 328 is provided to cover the top surface and side surfaces of the pair of conductive layers 325 , the side surface of the semiconductor layer 321 , and the like, and the insulating layer 264 is provided over the insulating layer 328 .
- the insulating layer 328 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing into the semiconductor layer 321 from the insulating layer 264 or the like and oxygen from leaving the semiconductor layer 321 .
- an insulating film similar to the insulating layer 332 can be used as the insulating layer 328.
- An opening reaching the semiconductor layer 321 is provided in the insulating layer 328 and the insulating layer 264 .
- the insulating layer 323 and the conductive layer 324 are buried in contact with the side surfaces of the insulating layer 264 , the insulating layer 328 , and the conductive layer 325 and the top surface of the semiconductor layer 321 .
- the conductive layer 324 functions as a second gate electrode, and the insulating layer 323 functions as a second gate insulating layer.
- the top surface of the conductive layer 324, the top surface of the insulating layer 323, and the top surface of the insulating layer 264 are planarized so that their heights are approximately the same, and the insulating layers 329 and 265 are provided to cover them. .
- the insulating layers 264 and 265 function as interlayer insulating layers.
- the insulating layer 329 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing into the transistor 320 from the insulating layer 265 or the like.
- an insulating film similar to the insulating layers 328 and 332 can be used.
- a plug 274 electrically connected to one of the pair of conductive layers 325 is provided so as to be embedded in the insulating layer 265 , the insulating layer 329 , the insulating layer 264 , and the insulating layer 328 .
- the plug 274 includes a conductive layer 274a that covers the side surfaces of the openings of the insulating layers 265, the insulating layers 329, the insulating layers 264, and the insulating layer 328 and part of the top surface of the conductive layer 325, and the conductive layer 274a. It preferably has a conductive layer 274b in contact with the top surface and side surfaces. At this time, a conductive material into which hydrogen and oxygen are difficult to diffuse is preferably used for the conductive layer 274a.
- the layer 101 including a transistor may have various inorganic insulating films.
- the inorganic insulating film for example, a silicon nitride film, a silicon oxynitride film, a silicon oxide film, a silicon oxynitride film, an aluminum oxide film, an aluminum nitride film, or the like can be used.
- a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, a neodymium oxide film, or the like may be used.
- two or more of the insulating films described above may be laminated and used.
- the configuration from the insulating layer 254 to the substrate 120 in the display device 100d is similar to that of the display device 100c.
- FIG. 27 is a cross-sectional view showing a configuration example of the display device 100e.
- the display device 100e has a structure in which a transistor 310 in which a channel is formed in a substrate 301 and a transistor 320 including a metal oxide in a semiconductor layer in which the channel is formed are stacked.
- 100d is the main difference. Note that the description of the same parts as those of the display device 100c and the display device 100d may be omitted.
- An insulating layer 261 is provided to cover the transistor 310 , and a conductive layer 251 is provided over the insulating layer 261 .
- An insulating layer 262 is provided to cover the conductive layer 251 , and the conductive layer 252 is provided over the insulating layer 262 .
- the conductive layers 251 and 252 each function as wirings.
- An insulating layer 263 and an insulating layer 332 are provided to cover the conductive layer 252 , and the transistor 320 is provided over the insulating layer 332 .
- An insulating layer 265 is provided to cover the transistor 320 and a capacitor 240 is provided over the insulating layer 265 . Capacitor 240 and transistor 320 are electrically connected by plug 274 .
- the transistor 320 can be used as a transistor forming a pixel circuit. Further, the transistor 310 can be used as a transistor forming a pixel circuit or a transistor forming a driver circuit (a scan line driver circuit or a signal line driver circuit) for driving the pixel circuit. Further, the transistors 310 and 320 can be used as transistors included in various circuits such as an arithmetic circuit and a memory circuit.
- a pixel circuit not only a pixel circuit but also a driver circuit and the like can be formed immediately below the light-emitting element 130 and the light-receiving element 150; It is possible to downsize the display device.
- the metal oxide preferably contains at least indium or zinc. In particular, it preferably contains indium and zinc. In addition to these, aluminum, gallium, yttrium, tin and the like are preferably contained. In addition, one or more selected from boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc. may be contained. .
- a metal oxide can be formed by a sputtering method, a CVD method, an ALD method, or the like.
- MOCVD for example, can be used as the CVD method.
- Crystal structures of oxide semiconductors include amorphous (including completely amorphous), CAAC (c-axis-aligned crystalline), nc (nanocrystalline), CAC (cloud-aligned composite), single crystal, and polycrystal. (polycrystal) and the like.
- the crystal structure of the film or substrate can be evaluated using an X-ray diffraction (XRD) spectrum.
- XRD X-ray diffraction
- it can be evaluated using an XRD spectrum obtained by GIXD (Grazing-Incidence XRD) measurement.
- GIXD Gram-Incidence XRD
- the GIXD method is also called a thin film method or a Seemann-Bohlin method.
- the peak shape of the XRD spectrum is almost symmetrical.
- the peak shape of the XRD spectrum is left-right asymmetric.
- the asymmetric shape of the peaks in the XRD spectra clearly indicates the presence of crystals in the film or substrate. In other words, the film or substrate cannot be said to be in an amorphous state unless the shape of the peaks in the XRD spectrum is symmetrical.
- the crystal structure of the film or substrate can be evaluated by a diffraction pattern (also referred to as a nanobeam electron diffraction pattern) observed by nano beam electron diffraction (NBED).
- a diffraction pattern also referred to as a nanobeam electron diffraction pattern
- NBED nano beam electron diffraction
- a halo is observed in the diffraction pattern of a quartz glass substrate, and it can be confirmed that the quartz glass is in an amorphous state.
- a spot-like pattern is observed instead of a halo. Therefore, it is presumed that the IGZO film deposited at room temperature is neither crystalline nor amorphous, but in an intermediate state and cannot be concluded to be in an amorphous state.
- oxide semiconductors may be classified differently from the above when their structures are focused. For example, oxide semiconductors are classified into single-crystal oxide semiconductors and non-single-crystal oxide semiconductors. Examples of non-single-crystal oxide semiconductors include the above CAAC-OS and nc-OS. Non-single-crystal oxide semiconductors include polycrystalline oxide semiconductors, amorphous-like oxide semiconductors (a-like OS), amorphous oxide semiconductors, and the like.
- CAAC-OS is an oxide semiconductor that includes a plurality of crystal regions, and the c-axes of the plurality of crystal regions are oriented in a specific direction. Note that the specific direction is the thickness direction of the CAAC-OS film, the normal direction to the formation surface of the CAAC-OS film, or the normal direction to the surface of the CAAC-OS film.
- a crystalline region is a region having periodicity in atomic arrangement. If the atomic arrangement is regarded as a lattice arrangement, the crystalline region is also a region with a uniform lattice arrangement. Further, CAAC-OS has a region where a plurality of crystal regions are connected in the a-b plane direction, and the region may have strain.
- the strain refers to a portion where the orientation of the lattice arrangement changes between a region with a uniform lattice arrangement and another region with a uniform lattice arrangement in a region where a plurality of crystal regions are connected. That is, CAAC-OS is an oxide semiconductor that is c-axis oriented and has no obvious orientation in the a-b plane direction.
- each of the plurality of crystal regions is composed of one or a plurality of minute crystals (crystals having a maximum diameter of less than 10 nm).
- the maximum diameter of the crystalline region is less than 10 nm.
- the size of the crystal region may be about several tens of nanometers.
- CAAC-OS contains indium (In) and oxygen.
- a tendency to have a layered crystal structure also referred to as a layered structure in which a layer (hereinafter referred to as an In layer) and a layer containing the element M, zinc (Zn), and oxygen (hereinafter referred to as a (M, Zn) layer) are stacked.
- the (M, Zn) layer may contain indium.
- the In layer contains the element M.
- the In layer may contain Zn.
- the layered structure is observed as a lattice image in, for example, a high-resolution TEM (Transmission Electron Microscope) image.
- a plurality of bright points are observed in the electron beam diffraction pattern of the CAAC-OS film.
- a certain spot and another spot are observed at point-symmetrical positions with respect to the spot of the incident electron beam that has passed through the sample (also referred to as a direct spot) as the center of symmetry.
- the lattice arrangement in the crystal region is basically a hexagonal lattice, but the unit lattice is not always regular hexagon and may be non-regular hexagon. Moreover, the distortion may have a lattice arrangement of pentagons, heptagons, or the like. Note that in CAAC-OS, no clear crystal grain boundary can be observed even near the strain. That is, it can be seen that the distortion of the lattice arrangement suppresses the formation of grain boundaries. This is because CAAC-OS can tolerate strain due to the fact that the arrangement of oxygen atoms is not dense in the a-b plane direction, and the bond distance between atoms changes due to the substitution of metal atoms. it is conceivable that.
- a crystal structure in which clear grain boundaries are confirmed is called a so-called polycrystal.
- a grain boundary becomes a recombination center, and there is a high possibility that carriers are trapped and cause a decrease in the on-state current of a transistor, a decrease in field-effect mobility, and the like. Therefore, a CAAC-OS in which no clear grain boundaries are observed is one of crystalline oxides having a crystal structure suitable for a semiconductor layer of a transistor.
- a structure containing Zn is preferable for forming a CAAC-OS.
- In--Zn oxide and In--Ga--Zn oxide are preferable because they can suppress the generation of grain boundaries more than In oxide.
- a CAAC-OS is an oxide semiconductor with high crystallinity and no clear grain boundaries. Therefore, it can be said that the decrease in electron mobility due to grain boundaries is less likely to occur in CAAC-OS.
- a CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, an oxide semiconductor including CAAC-OS has stable physical properties. Therefore, an oxide semiconductor including CAAC-OS is resistant to heat and has high reliability.
- CAAC-OS is also stable against high temperatures (so-called thermal budget) in the manufacturing process. Therefore, the use of the CAAC-OS for the OS transistor makes it possible to increase the degree of freedom in the manufacturing process.
- nc-OS has periodic atomic arrangement in a minute region (eg, a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm).
- the nc-OS has minute crystals.
- the size of the minute crystal is, for example, 1 nm or more and 10 nm or less, particularly 1 nm or more and 3 nm or less, the minute crystal is also called a nanocrystal.
- nc-OS does not show regularity in crystal orientation between different nanocrystals. Therefore, no orientation is observed in the entire film.
- an nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor depending on the analysis method.
- an nc-OS film is subjected to structural analysis using an XRD apparatus, out-of-plane XRD measurement using ⁇ /2 ⁇ scanning does not detect a peak indicating crystallinity.
- an nc-OS film is subjected to electron beam diffraction (also referred to as selected area electron beam diffraction) using an electron beam with a probe diameter larger than that of nanocrystals (for example, 50 nm or more), a diffraction pattern like a halo pattern is obtained. Observed.
- an nc-OS film is subjected to electron diffraction (also referred to as nanobeam electron diffraction) using an electron beam with a probe diameter close to or smaller than the nanocrystal size (for example, 1 nm or more and 30 nm or less)
- electron diffraction also referred to as nanobeam electron diffraction
- an electron beam with a probe diameter close to or smaller than the nanocrystal size for example, 1 nm or more and 30 nm or less
- An a-like OS is an oxide semiconductor having a structure between an nc-OS and an amorphous oxide semiconductor.
- An a-like OS has void or low density regions. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS. In addition, the a-like OS has a higher hydrogen concentration in the film than the nc-OS and the CAAC-OS.
- CAC-OS relates to material composition.
- CAC-OS is, for example, one structure of a material in which elements constituting a metal oxide are unevenly distributed with a size of 0.5 nm or more and 10 nm or less, preferably 1 nm or more and 3 nm or less, or in the vicinity thereof.
- one or more metal elements are unevenly distributed in the metal oxide, and the region having the metal element has a size of 0.5 nm or more and 10 nm or less, preferably 1 nm or more and 3 nm or less, or a size in the vicinity thereof.
- the mixed state is also called a mosaic shape or a patch shape.
- CAC-OS is a structure in which the material is separated into a first region and a second region to form a mosaic shape, and the first region is distributed in the film (hereinafter, also referred to as a cloud shape). is called). That is, CAC-OS is a composite metal oxide in which the first region and the second region are mixed.
- the atomic ratios of In, Ga, and Zn to the metal elements constituting the CAC-OS in the In—Ga—Zn oxide are represented by [In], [Ga], and [Zn], respectively.
- the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film.
- the second region is a region where [Ga] is greater than [Ga] in the composition of the CAC-OS film.
- the first region is a region in which [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region.
- the second region is a region in which [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.
- the first region is a region mainly composed of indium oxide, indium zinc oxide, or the like.
- the second region is a region containing gallium oxide, gallium zinc oxide, or the like as a main component. That is, the first region can be rephrased as a region containing In as a main component. Also, the second region can be rephrased as a region containing Ga as a main component.
- the CAC-OS in the In—Ga—Zn oxide means a region containing Ga as a main component and a region containing In as a main component in a material structure containing In, Ga, Zn, and O. Each region is a mosaic, and refers to a configuration in which these regions exist randomly. Therefore, CAC-OS is presumed to have a structure in which metal elements are unevenly distributed.
- a CAC-OS can be formed, for example, by a sputtering method under conditions in which the substrate is not heated.
- a sputtering method one or more selected from inert gas (typically argon), oxygen gas, and nitrogen gas may be used as the film formation gas. good.
- inert gas typically argon
- oxygen gas oxygen gas
- nitrogen gas nitrogen gas
- an EDX mapping obtained using energy dispersive X-ray spectroscopy shows that a region containing In as a main component It can be confirmed that the (first region) and the Ga-based region (second region) are unevenly distributed and have a mixed structure.
- the first region is a region with higher conductivity than the second region. That is, when carriers flow through the first region, conductivity as a metal oxide is developed. Therefore, by distributing the first region in the form of a cloud in the metal oxide, a high field effect mobility ( ⁇ ) can be realized.
- the second region is a region with higher insulation than the first region.
- the leakage current can be suppressed by distributing the second region in the metal oxide.
- CAC-OS when used for a transistor, the conductivity caused by the first region and the insulation caused by the second region act in a complementary manner to provide a switching function (turning ON/OFF). functions) can be given to the CAC-OS.
- a part of the material has a conductive function
- a part of the material has an insulating function
- the whole material has a semiconductor function.
- CAC-OS is most suitable for various semiconductor devices including display devices.
- Oxide semiconductors have various structures and each has different characteristics.
- An oxide semiconductor of one embodiment of the present invention includes two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, a CAC-OS, an nc-OS, and a CAAC-OS. may
- an oxide semiconductor with low carrier concentration is preferably used for a transistor.
- the carrier concentration of the oxide semiconductor is 1 ⁇ 10 17 cm ⁇ 3 or less, preferably 1 ⁇ 10 15 cm ⁇ 3 or less, more preferably 1 ⁇ 10 13 cm ⁇ 3 or less, more preferably 1 ⁇ 10 11 cm ⁇ 3 or less. 3 or less, more preferably less than 1 ⁇ 10 10 cm ⁇ 3 and 1 ⁇ 10 ⁇ 9 cm ⁇ 3 or more.
- the impurity concentration in the oxide semiconductor film may be lowered to lower the defect level density.
- a low impurity concentration and a low defect level density are referred to as high-purity intrinsic or substantially high-purity intrinsic.
- an oxide semiconductor with a low carrier concentration is sometimes referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor.
- the trap level density may also be low.
- the charge trapped in the trap level of the oxide semiconductor takes a long time to disappear and may behave like a fixed charge. Therefore, a transistor whose channel formation region is formed in an oxide semiconductor with a high trap level density might have unstable electrical characteristics.
- Impurities include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, silicon, and the like.
- the concentration of silicon or carbon in the oxide semiconductor and the concentration of silicon or carbon in the vicinity of the interface with the oxide semiconductor are equal to 2. ⁇ 10 18 atoms/cm 3 or less, preferably 2 ⁇ 10 17 atoms/cm 3 or less.
- the concentration of alkali metal or alkaline earth metal in the oxide semiconductor obtained by SIMS is set to 1 ⁇ 10 18 atoms/cm 3 or less, preferably 2 ⁇ 10 16 atoms/cm 3 or less.
- the nitrogen concentration in the oxide semiconductor obtained by SIMS is less than 5 ⁇ 10 19 atoms/cm 3 , preferably 5 ⁇ 10 18 atoms/cm 3 or less, more preferably 1 ⁇ 10 18 atoms/cm 3 or less. , more preferably 5 ⁇ 10 17 atoms/cm 3 or less.
- the oxide semiconductor reacts with oxygen that bonds to a metal atom to form water, which may cause oxygen vacancies.
- oxygen vacancies When hydrogen enters the oxygen vacancies, electrons, which are carriers, may be generated.
- part of hydrogen may bond with oxygen that bonds with a metal atom to generate an electron, which is a carrier. Therefore, a transistor including an oxide semiconductor containing hydrogen is likely to have normally-on characteristics. Therefore, hydrogen in the oxide semiconductor is preferably reduced as much as possible.
- the hydrogen concentration obtained by SIMS is less than 1 ⁇ 10 20 atoms/cm 3 , preferably less than 1 ⁇ 10 19 atoms/cm 3 , more preferably less than 5 ⁇ 10 18 atoms/cm. Less than 3 , more preferably less than 1 ⁇ 10 18 atoms/cm 3 .
- the electronic devices of this embodiment each include the display device of one embodiment of the present invention in a display portion.
- the display device of one embodiment of the present invention can easily have high definition and high resolution. Therefore, it can be used for display portions of various electronic devices.
- Examples of electronic devices include televisions, desktop or notebook personal computers, computer monitors, digital signage, large game machines such as pachinko machines, and other electronic devices with relatively large screens.
- Cameras digital video cameras, digital photo frames, mobile phones, mobile game machines, personal digital assistants, sound reproducing devices, and the like.
- the display device of one embodiment of the present invention can have high definition, it can be suitably used for an electronic device having a relatively small display portion.
- electronic devices include wristwatch-type and bracelet-type information terminals (wearable devices), VR devices such as head-mounted displays, glasses-type AR devices, and MR devices. wearable devices that can be attached to
- a display device of one embodiment of the present invention includes HD (1280 ⁇ 720 pixels), FHD (1920 ⁇ 1080 pixels), WQHD (2560 ⁇ 1440 pixels), WQXGA (2560 ⁇ 1600 pixels), 4K (2560 ⁇ 1600 pixels), 3840 ⁇ 2160) and 8K (7680 ⁇ 4320 pixels).
- the resolution it is preferable to set the resolution to 4K, 8K, or higher.
- the pixel density (definition) of the display device of one embodiment of the present invention is preferably 100 ppi or more, preferably 300 ppi or more, more preferably 500 ppi or more, more preferably 1000 ppi or more, more preferably 2000 ppi or more, and 3000 ppi or more.
- the display device can support various screen ratios such as 1:1 (square), 4:3, 16:9, 16:10.
- the electronic device of this embodiment includes sensors (force, displacement, position, velocity, acceleration, angular velocity, number of revolutions, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage , power, radiation, flow, humidity, gradient, vibration, odor or infrared).
- the electronic device of this embodiment can have various functions. For example, functions to display various information (still images, moving images, text images, etc.) on the display unit, functions to display calendars, dates or times, functions to execute various software (programs), wireless communication functions, recording It can have a function of reading a program or data recorded on a medium. Note that the functions of the electronic device are not limited to these, and can have various functions.
- the electronic device may have a plurality of display units. In addition, even if the electronic device is equipped with a camera, etc., and has a function of capturing still images or moving images and storing them in a recording medium (external or built into the camera), a function of displaying the captured image on the display unit, etc. good.
- FIGS. 28A, 28B, 29A, and 29B An example of a wearable device that can be worn on the head will be described with reference to FIGS. 28A, 28B, 29A, and 29B.
- These wearable devices have one or both of the function of displaying AR content and the function of displaying VR content.
- these wearable devices may have a function of displaying SR or MR content in addition to AR and VR content.
- the electronic device has a function of displaying content such as AR, VR, SR, and MR, it is possible to enhance the immersive feeling of the user.
- Electronic device 700a shown in FIG. 28A and electronic device 700b shown in FIG. It has a portion (not shown), an imaging portion (not shown), a pair of optical members 753 , a frame 757 and a pair of nose pads 758 .
- the display device of one embodiment of the present invention can be applied to the display panel 751 . Therefore, the electronic device can display images with extremely high definition.
- the electronic device 700 a and the electronic device 700 b can each project an image displayed on the display panel 751 onto the display area 756 of the optical member 753 . Since the optical member 753 has translucency, the user can see the image displayed in the display area superimposed on the transmitted image visually recognized through the optical member 753 . Therefore, the electronic device 700a and the electronic device 700b are electronic devices capable of AR display.
- the electronic device 700a and the electronic device 700b may be provided with a camera capable of capturing an image of the front as an imaging unit. Further, each of the electronic devices 700a and 700b includes an acceleration sensor such as a gyro sensor to detect the orientation of the user's head and display an image corresponding to the orientation in the display area 756. can also be provided with a camera capable of capturing an image of the front as an imaging unit. Further, each of the electronic devices 700a and 700b includes an acceleration sensor such as a gyro sensor to detect the orientation of the user's head and display an image corresponding to the orientation in the display area 756. can also
- the communication unit has a wireless communication device, and can supply a video signal or the like by the wireless communication device.
- a connector capable of connecting a cable to which the video signal and the power supply potential are supplied may be provided.
- the electronic device 700a and the electronic device 700b are provided with a battery and can be charged wirelessly and/or wiredly.
- the housing 721 may be provided with a touch sensor module.
- the touch sensor module has a function of detecting that the outer surface of the housing 721 is touched.
- the touch sensor module can detect a user's tap operation, slide operation, or the like, and execute various processes. For example, it is possible to perform processing such as pausing or resuming a moving image by a tap operation, and it is possible to perform fast-forward or fast-reverse processing by a slide operation. Further, by providing a touch sensor module for each of the two housings 721, the range of operations can be expanded.
- Various touch sensors can be applied as the touch sensor module.
- various methods such as a capacitance method, a resistive film method, an infrared method, an electromagnetic induction method, a surface acoustic wave method, and an optical method can be adopted.
- a photoelectric conversion element can be used as the light receiving element.
- One or both of an inorganic semiconductor and an organic semiconductor can be used for the active layer of the photoelectric conversion element.
- the display device of one embodiment of the present invention can be applied to the display portion 820 . Therefore, the electronic device can display images with extremely high definition. This allows the user to feel a high sense of immersion.
- the display unit 820 is provided inside the housing 821 at a position where it can be viewed through the lens 832 . By displaying different images on the pair of display portions 820, three-dimensional display using parallax can be performed.
- Each of the electronic device 800a and the electronic device 800b can be said to be an electronic device for VR.
- a user wearing the electronic device 800 a or 800 b can view an image displayed on the display unit 820 through the lens 832 .
- the electronic device 800a and the electronic device 800b each have a mechanism for adjusting the left and right positions of the lens 832 and the display unit 820 so that they are optimally positioned according to the position of the user's eyes. preferably. Further, it is preferable to have a mechanism for adjusting focus by changing the distance between the lens 832 and the display portion 820 .
- the wearing portion 823 allows the user to wear the electronic device 800a or the electronic device 800b on the head.
- the shape is illustrated as a temple of spectacles (also referred to as a joint, a temple, etc.), but the shape is not limited to this.
- the mounting portion 823 may be worn by the user, and may be, for example, a helmet-type or band-type shape.
- the imaging unit 825 has a function of acquiring external information. Data acquired by the imaging unit 825 can be output to the display unit 820 . An image sensor can be used for the imaging unit 825 . Also, a plurality of cameras may be provided so as to be able to deal with a plurality of angles of view such as telephoto and wide angle.
- a distance measuring sensor (hereinafter also referred to as a detection unit) that can measure the distance to an object may be provided. That is, the imaging unit 825 is one aspect of the detection unit.
- the detection unit for example, an image sensor or a distance image sensor such as LIDAR (Light Detection and Ranging) can be used.
- LIDAR Light Detection and Ranging
- Electronic device 800a may have a vibration mechanism that functions as a bone conduction earphone.
- a vibration mechanism that functions as a bone conduction earphone.
- one or more of the display portion 820, the housing 821, and the mounting portion 823 can be provided with the vibration mechanism. Accordingly, it is possible to enjoy video and audio simply by wearing the electronic device 800a without the need for separate audio equipment such as headphones, earphones, or speakers.
- Each of the electronic device 800a and the electronic device 800b may have an input terminal.
- a cable for supplying a video signal from a video output device or the like and electric power for charging a battery provided in the electronic device can be connected to the input terminal.
- An electronic device of one embodiment of the present invention may have a function of wirelessly communicating with the earphone 750 .
- Earphone 750 has a communication unit (not shown) and has a wireless communication function.
- the earphone 750 can receive information (eg, audio data) from the electronic device by wireless communication function.
- electronic device 700a shown in FIG. 28A has a function of transmitting information to earphone 750 by a wireless communication function.
- electronic device 800a shown in FIG. 29A has a function of transmitting information to earphone 750 by a wireless communication function.
- the electronic device may have an earphone section.
- Electronic device 700 b shown in FIG. 28B has earphone section 727 .
- the earphone section 727 and the control section can be configured to be wired to each other.
- a part of the wiring connecting the earphone section 727 and the control section may be arranged inside the housing 721 or the mounting section 723 .
- electronic device 800 b shown in FIG. 29B has earphone section 827 .
- the earphone unit 827 and the control unit 824 can be configured to be wired to each other.
- a part of the wiring connecting the earphone section 827 and the control section 824 may be arranged inside the housing 821 or the mounting section 823 .
- the earphone section 827 and the mounting section 823 may have magnets. Accordingly, the earphone section 827 can be fixed to the mounting section 823 by magnetic force, which is preferable because it facilitates storage.
- the electronic device may have an audio output terminal to which earphones, headphones, or the like can be connected. Also, the electronic device may have one or both of an audio input terminal and an audio input mechanism.
- the voice input mechanism for example, a sound collecting device such as a microphone can be used.
- the electronic device may function as a so-called headset.
- both the glasses type (the electronic devices 700a and 700b and the like) and the goggle type (the electronic devices 800a and 800b and the like) are suitable. be.
- the electronic device of one embodiment of the present invention can transmit information to the earphone by wire or wirelessly.
- An electronic device 6500 illustrated in FIG. 30A is a personal digital assistant that can be used as a smart phone.
- An electronic device 6500 includes a housing 6501, a display portion 6502, a power button 6503, a button 6504, a speaker 6505, a microphone 6506, a camera 6507, a light source 6508, and the like.
- the display device of one embodiment of the present invention can be applied to the display portion 6502 . Therefore, the electronic device 6500 can be an electronic device capable of extremely high-definition display.
- the display portion 6502 can function as a touch sensor or a near-touch sensor, and can capture an image of a fingerprint, a palm print, or the like. Therefore, electronic device 6500 can be a multifunctional electronic device.
- FIG. 30B is a schematic cross-sectional view including the end of the housing 6501 on the microphone 6506 side.
- a light-transmitting protective member 6510 is provided on the display surface side of the housing 6501, and a display panel 6511, an optical member 6512, a printed circuit board 6517, and a battery 6518 are provided in a space surrounded by the housing 6501 and the protective member 6510. etc. are placed.
- a display panel 6511 and an optical member 6512 are fixed to the protective member 6510 with an adhesive layer (not shown).
- a portion of the display panel 6511 is folded back in a region outside the display portion 6502, and the FPC 6515 is connected to the folded portion.
- An IC6516 is mounted on the FPC6515.
- the FPC 6515 is connected to terminals provided on the printed circuit board 6517 .
- the display device of one embodiment of the present invention can be applied to the display panel 6511 .
- FIG. 31A shows an example of a television device.
- a television set 7100 has a display portion 7000 incorporated in a housing 7101 .
- a configuration in which a housing 7101 is supported by a stand 7103 is shown.
- the operation of the television apparatus 7100 shown in FIG. 31A can be performed by operation switches provided in the housing 7101 and a separate remote controller 7111 .
- the display portion 7000 may be provided with a touch sensor, and the television device 7100 may be operated by touching the display portion 7000 with a finger or the like.
- the remote controller 7111 may have a display section for displaying information output from the remote controller 7111 .
- a channel and a volume can be operated with operation keys or a touch panel included in the remote controller 7111 , and an image displayed on the display portion 7000 can be operated.
- the television device 7100 is configured to include a receiver, a modem, and the like.
- the receiver can receive general television broadcasts. Also, by connecting to a wired or wireless communication network via a modem, one-way (from the sender to the receiver) or two-way (between the sender and the receiver, or between the receivers, etc.) information communication is performed. is also possible.
- FIG. 31B shows an example of a notebook personal computer.
- a notebook personal computer 7200 has a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, and the like.
- the display portion 7000 is incorporated in the housing 7211 .
- FIG. 31C An example of digital signage is shown in FIG. 31C and FIG. 31D.
- a digital signage 7300 illustrated in FIG. 31C includes a housing 7301, a display portion 7000, speakers 7303, and the like. Furthermore, it can have an LED lamp, an operation key (including a power switch or an operation switch), connection terminals, various sensors, a microphone, and the like.
- FIG. 31D is a digital signage 7400 mounted on a cylindrical post 7401.
- FIG. A digital signage 7400 has a display section 7000 provided along the curved surface of a pillar 7401 .
- the wider the display unit 7000 the more information can be provided at one time.
- the wider the display unit 7000 the more conspicuous it is, and the more effective the advertisement can be, for example.
- the digital signage 7300 or 7400 is preferably capable of cooperating with an information terminal 7311 or information terminal 7411 such as a smartphone possessed by the user through wireless communication.
- advertisement information displayed on the display portion 7000 can be displayed on the screen of the information terminal 7311 or the information terminal 7411 .
- display on the display portion 7000 can be switched.
- the digital signage 7300 or the digital signage 7400 can execute a game using the screen of the information terminal 7311 or 7411 as an operating means (controller). This allows an unspecified number of users to simultaneously participate in and enjoy the game.
- the display device of one embodiment of the present invention can be applied to the display portion 7000 in the electronic devices illustrated in FIGS. 31A to 31D. Therefore, the electronic device can display images with extremely high definition.
- the display portion 7000 can function as a touch sensor or a near-touch sensor, and can capture an image of a fingerprint, a palm print, or the like. Therefore, the electronic device can have multiple functions.
- the electronic device shown in FIGS. 32A to 32F includes a housing 9000, a display unit 9001, a speaker 9003, operation keys 9005 (including a power switch or an operation switch), connection terminals 9006, sensors 9007 (force, displacement, position, speed , acceleration, angular velocity, number of rotations, distance, light, liquid, magnetism, temperature, chemical substances, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell, or infrared rays function), a microphone 9008, and the like.
- FIG. 32A is a perspective view showing a mobile information terminal 9101.
- the mobile information terminal 9101 can be used as a smart phone, for example.
- the portable information terminal 9101 may be provided with a speaker 9003, a connection terminal 9006, a sensor 9007, and the like.
- the mobile information terminal 9101 can display text and image information on its multiple surfaces.
- FIG. 32A shows an example in which three icons 9050 are displayed.
- Information 9051 indicated by a dashed rectangle can also be displayed on another surface of the display portion 9001 . Examples of the information 9051 include notification of incoming e-mail, SNS, telephone call, title of e-mail or SNS, sender name, date and time, remaining battery level, radio wave intensity, and the like.
- an icon 9050 or the like may be displayed at the position where the information 9051 is displayed.
- FIG. 32B is a perspective view showing the mobile information terminal 9102.
- the portable information terminal 9102 has a function of displaying information on three or more sides of the display portion 9001 .
- information 9052, information 9053, and information 9054 are displayed on different surfaces.
- the user can confirm the information 9053 displayed at a position where the mobile information terminal 9102 can be observed from above the mobile information terminal 9102 while the mobile information terminal 9102 is stored in the chest pocket of the clothes.
- the user can check the display without taking out the portable information terminal 9102 from the pocket, and can determine, for example, whether to receive a call.
- FIG. 32C is a perspective view showing a wristwatch-type personal digital assistant 9200.
- the mobile information terminal 9200 can be used as a smart watch (registered trademark), for example.
- the display portion 9001 has a curved display surface, and display can be performed along the curved display surface.
- the mobile information terminal 9200 can also make hands-free calls by mutual communication with a headset capable of wireless communication, for example.
- the portable information terminal 9200 can perform mutual data transmission and charging with another information terminal through the connection terminal 9006 . Note that the charging operation may be performed by wireless power supply.
- FIG. 32D to 32F are perspective views showing a foldable personal digital assistant 9201.
- FIG. FIG. 32D is a perspective view of the portable information terminal 9201 in an unfolded state
- FIG. 32F is a folded state
- FIG. 32E is a perspective view of a state in the middle of changing from one of FIGS. 32D and 32F to the other.
- the portable information terminal 9201 has excellent portability in the folded state, and has excellent display visibility due to a seamless wide display area in the unfolded state.
- a display portion 9001 included in the portable information terminal 9201 is supported by three housings 9000 connected by hinges 9055 .
- the display portion 9001 can be bent with a curvature radius of 0.1 mm or more and 150 mm or less.
- the display device of one embodiment of the present invention can be applied to the display portion 9001 in the electronic devices illustrated in FIGS. 32A to 32F. Therefore, the electronic device can display images with extremely high definition. Further, the display portion 9001 can function as a touch sensor or a near-touch sensor, and can capture an image of a fingerprint, a palm print, or the like. Therefore, the electronic device can have multiple functions.
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Abstract
Description
図2A乃至図2Cは、電子機器の用途の一例を示す模式図である。
図3は、表示装置の構成例を示す上面図である。
図4A乃至図4Fは、表示装置の構成例を示す上面図である。
図5A乃至図5Dは、表示装置の構成例を示す上面図である。
図6A、及び図6Bは、表示装置の構成例を示す断面図である。図6Cは、発光ユニットの構成例を示す断面図である。図6Dは、受光ユニットの構成例を示す断面図である。
図7A、及び図7Bは、表示装置の構成例を示す断面図である。図7Cは、発光ユニットの構成例を示す断面図である。
図8A、及び図8Bは、表示装置の構成例を示す断面図である。図8Cは、受光ユニットの構成例を示す断面図である。
図9A、及び図9Bは、表示装置の構成例を示す断面図である。
図10A、及び図10Bは、表示装置の構成例を示す断面図である。
図11A乃至図11Cは、表示装置の構成例を示す断面図である。
図12A、及び図12Bは、表示装置の構成例を示す断面図である。
図13は、表示装置の構成例を示す上面図である。
図14A乃至図14Dは、表示装置の構成例を示す断面図である。
図15A乃至図15Eは、表示装置の作製方法の一例を示す断面図である。
図16A乃至図16Eは、表示装置の作製方法の一例を示す断面図である。
図17A乃至図17Dは、表示装置の作製方法の一例を示す断面図である。
図18A乃至図18Dは、表示装置の作製方法の一例を示す断面図である。
図19A乃至図19Gは、表示装置の作製方法の一例を示す断面図である。
図20A乃至図20Dは、表示装置の作製方法の一例を示す断面図である。
図21は、表示モジュールの構成例を示す斜視図である。
図22は、表示装置の構成例を示す断面図である。
図23は、表示装置の構成例を示す断面図である。
図24A、及び図24Bは、表示モジュールの構成例を示す斜視図である。
図25は、表示装置の構成例を示す断面図である。
図26は、表示装置の構成例を示す断面図である。
図27は、表示装置の構成例を示す断面図である。
図28A、及び図28Bは、電子機器の一例を示す図である。
図29A、及び図29Bは、電子機器の一例を示す図である。
図30A、及び図30Bは、電子機器の一例を示す図である。
図31A乃至図31Dは、電子機器の一例を示す図である。
図32A乃至図32Fは、電子機器の一例を示す図である。
本実施の形態では、本発明の一態様の表示装置とその作製方法について図面を用いて説明する。
図1C、及び図1Dに、本発明の一態様の表示装置を有する電子機器10の断面図の一例を示す。ここで、図1Cは、電子機器10の、表示装置としての機能と、電子機器10に接触する物体を検出する機能を説明する模式図である。また、図1Dは、電子機器10の、表示装置としての機能と、電子機器10に近接する物体を検出する機能を説明する模式図である。さらに、図1Eは、電子機器10の、照明装置としての機能を説明する模式図である。
本実施の形態の表示装置は、表示部に画素がマトリクス状に配列された構成を有する。画素は、発光素子を有する副画素を、複数種有する構成とすることができる。また、画素は、受光素子を有する副画素を有する。例えば、画素は、副画素を4種類有する構成とすることができる。当該4つの副画素のうち、1つは、受光素子を有する副画素である。残りの3つの副画素としては、赤色(R)、緑色(G)、青色(B)の3色の副画素、及び黄色(Y)、シアン(C)、マゼンタ(M)の3色の副画素等が挙げられる。又は、画素は副画素を5種類有する構成とすることができる。当該5つの副画素のうち、1つは受光素子を有する副画素である。残りの4つの副画素としては、R、G、B、白色(W)の4色の副画素、及びR、G、B、Yの4色の副画素等が挙げられる。
次に、表示装置100の作製方法の一例を説明する。図15A乃至図15E、図16A乃至図16E、図17A乃至図17D、及び図18A乃至図18Dは、図3、図6A、及び図6Bに示す表示装置100の作製方法の一例を示す断面図であり、図3における一点鎖線X1−X2間の断面図と、Y1−Y2間の断面図と、を並べて示している。
本実施の形態では、本発明の一態様の表示装置について図面を用いて説明する。
図21は、表示モジュール280aの構成例を示す斜視図である。表示モジュール280aは、表示装置100と、FPC472と、IC473と、を有する。
図22は、図21に示す表示装置100に適用することができる表示装置100aの、FPC472を含む領域の一部、回路464の一部、表示部462の一部、及び端部を含む領域の一部をそれぞれ切断したときの断面の一例を示す。
図23は、表示装置100bの構成例を示す断面図である。表示装置100bは、表示装置100aの変形例であり、着色層133が、発光素子130と基板451の間に設けられる点が、表示装置100aと異なる。つまり、表示装置100bは、ボトムエミッション型の表示装置とすることができる。よって、表示装置100bにおいて、基板120は透光性を有さない基板とすることができる。
図24Aは、表示モジュール280bの構成例を示す斜視図である。表示モジュール280bは、表示装置100と、FPC290と、を有する。
図25は、図24に示す表示装置100に適用することができる表示装置100cの構成例を示す断面図である。表示装置100cは、基板301、発光素子130、容量240、及びトランジスタ310を有する。
図26は、表示装置100dの構成例を示す断面図である。表示装置100dは、トランジスタの構成が異なる点で、表示装置100cと主に相違する。なお、表示装置100cと同様の部分については説明を省略することがある。
図27は、表示装置100eの構成例を示す断面図である。表示装置100eは、基板301にチャネルが形成されるトランジスタ310と、チャネルが形成される半導体層に金属酸化物を含むトランジスタ320とが積層された構成を有する点で、表示装置100c、及び表示装置100dと主に相違する。なお、表示装置100c、及び表示装置100dと同様の部分については説明を省略することがある。
本実施の形態では、上記の実施の形態で説明したOSトランジスタに用いることができる金属酸化物について説明する。
酸化物半導体の結晶構造としては、アモルファス(completely amorphousを含む)、CAAC(c−axis−aligned crystalline)、nc(nanocrystalline)、CAC(cloud−aligned composite)、単結晶(single crystal)、及び多結晶(polycrystal)等が挙げられる。
なお、酸化物半導体は、構造に着目した場合、上記とは異なる分類となる場合がある。例えば、酸化物半導体は、単結晶酸化物半導体と、それ以外の非単結晶酸化物半導体と、に分けられる。非単結晶酸化物半導体としては、例えば、上述のCAAC−OS、及びnc−OSがある。また、非単結晶酸化物半導体には、多結晶酸化物半導体、擬似非晶質酸化物半導体(a−like OS:amorphous−like oxide semiconductor)、非晶質酸化物半導体、等が含まれる。
CAAC−OSは、複数の結晶領域を有し、当該複数の結晶領域はc軸が特定の方向に配向している酸化物半導体である。なお、特定の方向とは、CAAC−OS膜の厚さ方向、CAAC−OS膜の被形成面の法線方向、又はCAAC−OS膜の表面の法線方向である。また、結晶領域とは、原子配列に周期性を有する領域である。なお、原子配列を格子配列とみなすと、結晶領域とは、格子配列の揃った領域でもある。さらに、CAAC−OSは、a−b面方向において複数の結晶領域が連結する領域を有し、当該領域は歪みを有する場合がある。なお、歪みとは、複数の結晶領域が連結する領域において、格子配列の揃った領域と、別の格子配列の揃った領域と、の間で格子配列の向きが変化している箇所を指す。つまり、CAAC−OSは、c軸配向し、a−b面方向には明らかな配向をしていない酸化物半導体である。
nc−OSは、微小な領域(例えば、1nm以上10nm以下の領域、特に1nm以上3nm以下の領域)において原子配列に周期性を有する。別言すると、nc−OSは、微小な結晶を有する。なお、当該微小な結晶の大きさは、例えば、1nm以上10nm以下、特に1nm以上3nm以下であることから、当該微小な結晶をナノ結晶ともいう。また、nc−OSは、異なるナノ結晶間で結晶方位に規則性が見られない。そのため、膜全体で配向性が見られない。従って、nc−OSは、分析方法によっては、a−like OS又は非晶質酸化物半導体と区別が付かない場合がある。例えば、nc−OS膜に対し、XRD装置を用いて構造解析を行うと、θ/2θスキャンを用いたOut−of−plane XRD測定では、結晶性を示すピークが検出されない。また、nc−OS膜に対し、ナノ結晶よりも大きいプローブ径(例えば50nm以上)の電子線を用いる電子線回折(制限視野電子線回折ともいう)を行うと、ハローパターンのような回折パターンが観測される。一方、nc−OS膜に対し、ナノ結晶の大きさと近いかナノ結晶より小さいプローブ径(例えば1nm以上30nm以下)の電子線を用いる電子線回折(ナノビーム電子線回折ともいう)を行うと、ダイレクトスポットを中心とするリング状の領域内に複数のスポットが観測される電子線回折パターンが取得される場合がある。
a−like OSは、nc−OSと非晶質酸化物半導体との間の構造を有する酸化物半導体である。a−like OSは、鬆又は低密度領域を有する。即ち、a−like OSは、nc−OS及びCAAC−OSと比べて、結晶性が低い。また、a−like OSは、nc−OS及びCAAC−OSと比べて、膜中の水素濃度が高い。
次に、上述のCAC−OSの詳細について、説明を行う。なお、CAC−OSは材料構成に関する。
CAC−OSとは、例えば、金属酸化物を構成する元素が、0.5nm以上10nm以下、好ましくは、1nm以上3nm以下、又はその近傍のサイズで偏在した材料の一構成である。なお、以下では、金属酸化物において、一つ又は複数の金属元素が偏在し、該金属元素を有する領域が、0.5nm以上10nm以下、好ましくは、1nm以上3nm以下、又はその近傍のサイズで混合した状態をモザイク状、又はパッチ状ともいう。
続いて、上記酸化物半導体をトランジスタに用いる場合について説明する。
ここで、酸化物半導体中における各不純物の影響について説明する。
本実施の形態では、本発明の一態様の電子機器について、図28乃至図32を用いて説明する。
Claims (16)
- 第1の発光素子と、前記第1の発光素子と隣接する受光素子と、前記第1の発光素子と前記受光素子の間に設けられる領域を有する第1の側壁及び第2の側壁と、を有し、
前記第1の発光素子は、第1の画素電極と、前記第1の画素電極上の第1の発光層と、前記第1の発光層上の共通電極と、を有し、
前記受光素子は、第2の画素電極と、前記第2の画素電極上の受光層と、前記受光層上の前記共通電極と、を有し、
前記第1の側壁は、前記第1の画素電極の側面、及び前記第1の発光層の側面の少なくとも一部と接し、
前記第2の側壁は、前記第2の画素電極の側面、及び前記受光層の側面の少なくとも一部と接し、
前記第1の側壁上、及び前記第2の側壁上に前記共通電極が設けられる表示装置。 - 第1の発光素子と、前記第1の発光素子と隣接する受光素子と、前記第1の発光素子と前記受光素子の間に設けられる領域を有する第1の側壁、第2の側壁、第3の側壁、及び第4の側壁と、を有し、
前記第1の発光素子は、第1の画素電極と、前記第1の画素電極上の第1の発光層と、前記第1の発光層上の共通電極と、を有し、
前記受光素子は、第2の画素電極と、前記第2の画素電極上の受光層と、前記受光層上の前記共通電極と、を有し、
前記第1の側壁は、前記第1の画素電極の側面、及び前記第1の発光層の側面の少なくとも一部と接し、
前記第2の側壁は、前記第2の画素電極の側面、及び前記受光層の側面の少なくとも一部と接し、
前記第3の側壁は、前記第1の側壁の側面及び上面の少なくとも一部を覆い、
前記第4の側壁は、前記第2の側壁の側面及び上面の少なくとも一部を覆い、
前記第1乃至第4の側壁上に前記共通電極が設けられる表示装置。 - 請求項1又は2において、
前記第1の発光層、及び前記受光層と、前記共通電極と、の間に共通層を有し、
前記共通層は、前記第1の発光素子において、電子注入層又は正孔注入層としての機能を有し、
前記共通層は、前記受光素子において、電子輸送層又は正孔輸送層としての機能を有する表示装置。 - 請求項1又は2において、
前記第1の画素電極、及び前記第2の画素電極は、絶縁層上に設けられ、
前記絶縁層は、前記第1の画素電極と重なる領域に第1の凸部を有し、
前記絶縁層は、前記第2の画素電極と重なる領域に第2の凸部を有する表示装置。 - 請求項1又は2において、
前記第1の発光素子は、前記第1の発光層上の第1の中間層と、前記第1の中間層上の第2の発光層と、前記第2の発光層上の前記共通電極と、を有し、
前記第1の側壁は、前記第1の中間層の側面、及び前記第2の発光層の側面の少なくとも一部と接する表示装置。 - 請求項5において、
第2の発光素子を有し、
前記第2の発光素子は、第3の画素電極と、前記第3の画素電極上の第3の発光層と、前記第3の発光層上の第2の中間層と、前記第2の中間層上の第4の発光層と、前記第4の発光層上の前記共通電極と、を有し、
前記第1の発光素子と、前記第2の発光素子と、は隣接し、
前記第1の発光層と、前記第3の発光層と、は同一の色の光を発する機能を有し、
前記第2の発光層と、前記第4の発光層と、は同一の色の光を発する機能を有する表示装置。 - 請求項6において、
前記共通電極上に、保護層を有し、
前記第1の発光層、及び前記第2の発光層と重なる領域を有するように、前記保護層上に第1の着色層を有し、
前記第3の発光層、及び前記第4の発光層と重なる領域を有するように、前記保護層上に第2の着色層を有し、
前記第1の着色層と、前記第2の着色層と、は異なる色の光を透過する機能を有する表示装置。 - 請求項1又は2に記載の表示装置と、
コネクタ及び集積回路のうち少なくとも一方と、を有する表示モジュール。 - 請求項8に記載の表示モジュールと、
筐体、バッテリ、カメラ、スピーカ、及びマイクのうち少なくとも一つと、を有する電子機器。 - 絶縁層を形成し、
前記絶縁層上に、導電膜、第1の発光膜、及び第1の犠牲膜を順に成膜し、
前記第1の犠牲膜、及び前記第1の発光膜をエッチングして、前記導電膜上の第1の発光層と、前記第1の発光層上の第1の犠牲層と、を形成し、
前記導電膜上、及び前記第1の犠牲層上に、受光膜、及び第2の犠牲膜を順に成膜し、
前記第2の犠牲膜、及び前記受光膜をエッチングして、前記導電膜上の受光層と、前記受光層上の第2の犠牲層と、を形成し、
前記導電膜をエッチングして、前記第1の発光層下の第1の画素電極と、前記受光層下の第2の画素電極と、を形成し、
前記第1及び第2の画素電極の側面と、前記第1の発光層の側面と、前記受光層の側面と、前記第1及び第2の犠牲層の側面及び上面と、の少なくとも一部を覆う第1の絶縁膜を成膜し、
前記第1の絶縁膜をエッチングして、前記第1の画素電極の側面、及び前記第1の発光層の側面の少なくとも一部と接する第1の側壁と、前記第2の画素電極の側面、及び前記受光層の側面の少なくとも一部と接する第2の側壁と、を形成し、
前記第1の犠牲層、及び前記第2の犠牲層を除去し、
前記第1の発光層上、及び前記受光層上に共通電極を形成する表示装置の作製方法。 - 絶縁層を形成し、
前記絶縁層上に、導電膜、第1の発光膜、及び第1の犠牲膜を順に成膜し、
前記第1の犠牲膜、及び前記第1の発光膜をエッチングして、前記導電膜上の第1の発光層と、前記第1の発光層上の第1の犠牲層と、を形成し、
前記導電膜上、及び前記第1の犠牲層上に、受光膜、及び第2の犠牲膜を順に成膜し、
前記第2の犠牲膜、及び前記受光膜をエッチングして、前記導電膜上の受光層と、前記受光層上の第2の犠牲層と、を形成し、
前記導電膜をエッチングして、前記第1の発光層下の第1の画素電極と、前記受光層下の第2の画素電極と、を形成し、
前記第1及び第2の画素電極の側面と、前記第1の発光層の側面と、前記受光層の側面と、前記第1及び第2の犠牲層の側面及び上面と、の少なくとも一部を覆う第1の絶縁膜を成膜し、
前記第1の絶縁膜上に第2の絶縁膜を成膜し、
前記第1の絶縁膜、及び前記第2の絶縁膜をエッチングして、前記第1の画素電極の側面、及び前記第1の発光層の側面の少なくとも一部と接する第1の側壁と、前記第2の画素電極の側面、及び前記受光層の側面の少なくとも一部と接する第2の側壁と、前記第1の側壁の側面及び上面の少なくとも一部を覆う第3の側壁と、前記第2の側壁の側面及び上面の少なくとも一部を覆う第4の側壁と、を形成し、
前記第1の犠牲層、及び前記第2の犠牲層を除去し、
前記第1の発光層上、及び前記受光層上に共通電極を形成する表示装置の作製方法。 - 請求項10又は11において、
前記第1の犠牲層、及び前記第2の犠牲層をマスクに用いて、前記導電膜をエッチングする表示装置の作製方法。 - 請求項10又は11において、
前記第1の犠牲層、及び前記第2の犠牲層を除去した後、前記第1の発光層上、及び前記受光層上に共通層を形成し、
前記共通層は、前記第1の画素電極と、前記第1の発光層と、前記共通電極と、を有する発光素子において、電子注入層又は正孔注入層としての機能を有し、
前記共通層は、前記第2の画素電極と、前記受光層と、前記共通電極と、を有する受光素子において、電子輸送層又は正孔輸送層としての機能を有する表示装置の作製方法。 - 請求項10又は11において、
前記導電膜のエッチング工程において、前記絶縁層に凹部を形成する表示装置の作製方法。 - 請求項10又は11において、
前記第1の発光膜上に、中間膜、第2の発光膜、及び前記第1の犠牲膜を順に成膜し、
前記第1の犠牲膜、前記第2の発光膜、前記中間膜、及び前記第1の発光膜をエッチングして、前記導電膜上の前記第1の発光層と、前記第1の発光層上の第1の中間層と、前記第1の中間層上の第2の発光層と、前記第2の発光層上の前記第1の犠牲層と、を形成し、
前記第1及び第2の画素電極の側面と、前記第1及び第2の発光層の側面と、前記第1の中間層の側面と、前記受光層の側面と、前記第1及び第2の犠牲層の側面及び上面と、の少なくとも一部を覆う前記第1の絶縁膜を成膜し、
前記第1の絶縁膜をエッチングして、前記第1の画素電極の側面、前記第1の発光層の側面、前記第1の中間層の側面、及び前記第2の発光層の側面の少なくとも一部と接する前記第1の側壁と、前記第2の画素電極の側面、及び前記受光層の側面の少なくとも一部と接する前記第2の側壁と、を形成する表示装置の作製方法。 - 請求項15において、
前記第1の犠牲膜、前記第2の発光膜、前記中間膜、及び前記第1の発光膜をエッチングして、前記導電膜上の第3の発光層と、前記第3の発光層上の第2の中間層と、前記第2の中間層上の第4の発光層と、前記第4の発光層上の第3の犠牲層と、を形成し、
前記導電膜をエッチングして、前記第3の発光層下の第3の画素電極を形成し、
前記共通電極上に、保護層を形成し、
前記第1及び第2の発光層と重なる領域を有する第1の着色層と、前記第3及び第4の発光層と重なる領域を有する第2の着色層とを、前記保護層上に形成し、
前記第1の着色層と、前記第2の着色層と、は異なる色の光を透過する機能を有する表示装置の作製方法。
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