WO2022168467A1 - 分光測定装置、及び分光測定方法 - Google Patents

分光測定装置、及び分光測定方法 Download PDF

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Publication number
WO2022168467A1
WO2022168467A1 PCT/JP2021/046916 JP2021046916W WO2022168467A1 WO 2022168467 A1 WO2022168467 A1 WO 2022168467A1 JP 2021046916 W JP2021046916 W JP 2021046916W WO 2022168467 A1 WO2022168467 A1 WO 2022168467A1
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Prior art keywords
sample
light
illumination
slit
objective lens
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PCT/JP2021/046916
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English (en)
French (fr)
Japanese (ja)
Inventor
克昌 藤田
一樹 畔堂
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University of Osaka NUC
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Osaka University NUC
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Priority to JP2022579380A priority Critical patent/JP7527041B2/ja
Priority to US18/275,245 priority patent/US20240110830A1/en
Priority to EP21924852.3A priority patent/EP4290217A4/en
Publication of WO2022168467A1 publication Critical patent/WO2022168467A1/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G01J2003/045—Sequential slits; Multiple slits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering

Definitions

  • the present invention relates to a spectroscopic measurement device and a spectroscopic measurement method, and more particularly to a spectroscopic measurement device and a spectroscopic measurement method for spectroscopically measuring signal light such as Raman scattered light generated in a sample.
  • Non-Patent Document 1 discloses a Raman imaging method in which sheet illumination is used as excitation light and Raman scattered light from a sample is detected by a spectroscope.
  • excitation light is sheet illumination by a cylindrical lens.
  • the Raman scattered light is propagated to the spectroscope by an optical system including an objective lens, a notch filter, a bandpass filter, and the like.
  • the excitation light is applied to the sample without passing through the objective lens.
  • the present disclosure has been made in view of the above points, and aims to provide a spectroscopic measurement apparatus and a spectroscopic measurement method capable of spectroscopic measurement with a high SN ratio by reducing background light.
  • the spectroscopic measurement apparatus includes a detection objective lens into which signal light from a sample is incident, a slit having a slit opening through which the signal light passes, and a signal light passing through the slit opening that is detected according to the wavelength. a wavelength dispersion element that disperses, a two-dimensional photodetector that detects the signal light dispersed by the wavelength dispersion element, a processing unit that generates a spectral image based on the detection signal of the two-dimensional photodetector, an illumination optical system for causing illumination light to enter the sample from the side of the detection objective lens.
  • the above spectroscopic measurement device may further include means for scanning the sample or the illumination light.
  • the above spectroscopic measurement device may further comprise means for causing the sample to flow through the channel.
  • the arrangement direction of the pixels of the two-dimensional photodetector and the dispersion direction of the wavelength dispersive element may be oblique.
  • the slit may be a multi-slit having a plurality of slit openings.
  • the slit aperture may be formed along a direction perpendicular to or parallel to the optical axis direction of the illumination light incident on the sample.
  • the illumination optical system may focus the illumination light on the sample as a Bessel beam, sheet illumination, or lattice illumination.
  • the above spectroscopic measurement apparatus further includes an illumination objective lens for condensing the illumination light onto the sample, and a filter disposed between the illumination objective lens and the sample for transmitting the illumination light. good too.
  • the above spectroscopic measurement apparatus further includes an illumination objective lens for condensing the illumination light onto the sample, and a polarization control element that causes the sample to be polarized in a direction parallel to the optical axis of the illumination light.
  • the slit opening may be formed along the direction of the optical axis.
  • the sample may flow in a channel, and the optical axis of the illumination light incident on the sample may be in a direction perpendicular to the direction of the channel.
  • At least one surface of the channel may be a reflecting surface that reflects the signal light.
  • the signal light from the sample flowing through the channel is detected by different pixels of the two-dimensional photodetector, and the detection signals from the different pixels are integrated. good too.
  • the signal light may be detected at a magnification corresponding to one pixel of the two-dimensional photodetector in the direction orthogonal to the wavelength dispersion direction of the wavelength dispersion element.
  • the sample or illumination light may be scanned in a direction along the optical axis of the detection objective lens.
  • the spectroscopic measurement method includes the steps of illuminating a sample from the side of a detection objective lens, causing signal light from the sample to enter the detection objective lens, and applying the signal light to a slit of a slit. passing through an aperture; wavelength-dispersing the signal light that has passed through the slit aperture by a wavelength dispersion element; and detecting the signal light wavelength-dispersed by the wavelength dispersion element using a two-dimensional photodetector. and generating a spectroscopic image based on the detection signal of the two-dimensional photodetector.
  • the present invention it is possible to provide a spectroscopic measurement device and a spectroscopic measurement method capable of spectroscopic measurement with a high SN ratio by reducing background light.
  • FIG. 1 is a schematic diagram showing an optical system of a spectrometer according to Embodiment 1.
  • FIG. It is a perspective view which shows a sample and an objective lens typically.
  • FIG. 8 is a schematic diagram showing an optical system of a spectroscopic measurement device according to Embodiment 2; It is a perspective view which shows a sample and an objective lens typically.
  • FIG. 11 is a schematic diagram showing an optical system of a spectroscopic measurement device according to Embodiment 3; It is a perspective view which shows a sample and an objective lens typically.
  • FIG. 11 is a schematic diagram showing an optical system of a spectroscopic measurement device according to Modification 1 of Embodiment 3; FIG.
  • FIG. 11 is a schematic diagram showing an optical system of a spectroscopic measurement device according to Embodiment 4; It is a perspective view which shows a sample and an objective lens typically.
  • FIG. 11 is a schematic diagram showing an optical system of a spectroscopic measurement device according to Modification 2 of Embodiment 4; It is a figure for demonstrating the wavelength-dispersion direction in the light-receiving surface of a photodetector. It is a figure which shows an example of an optical system.
  • FIG. 10 is a diagram showing a configuration for detecting Raman scattered light emitted to the ⁇ Z side;
  • FIG. 10 is a diagram showing a configuration for detecting Raman scattered light emitted to the ⁇ Z side;
  • FIG. 10 is a diagram showing a configuration for detecting Raman scattered light emitted to the ⁇ Z side;
  • FIG. 2 is a diagram showing the configuration of Examples 1 to 4;
  • FIG. 12 is a diagram showing the configuration of Example 5;
  • FIG. 12 is a diagram showing the configuration of Examples 6 and 7;
  • FIG. 12 is a diagram showing the configuration of an eighth embodiment;
  • FIG. 22 is a diagram showing the configuration of Example 9;
  • FIG. 10 is a diagram showing a configuration using a polarization control element that controls polarization of illumination light; It is a figure which shows the example in which the optical axis of illumination light and signal light inclines from the perpendicular direction. It is a figure which shows the example in which the optical axis of illumination light and signal light inclines from the perpendicular direction. It is a schematic diagram which shows an example of the slit direction and the direction of a flow path.
  • FIG. 4 is a schematic diagram for explaining the operation of a sample flowing through a channel and a pixel;
  • FIG. 4 is a schematic diagram for explaining the operation of a sample flowing through a channel and a pixel;
  • FIG. 4 is a schematic diagram for explaining the operation of a sample flowing through a channel and a pixel;
  • FIG. 4 is a schematic diagram for explaining the operation of a sample flowing through a channel and a pixel;
  • FIG. 1 is a schematic diagram showing the optical system of the spectrometer 1. As shown in FIG. 1, a YZ plan view is shown on the left side, and an XZ plan view is shown on the right side.
  • FIG. 2 is a diagram schematically showing the objective lens 31 and the sample S.
  • the spectrometer 1 includes an illumination optical system 10 , a drive stage 20 , a detection optical system 30 and a processing section 51 . Note that the driving stage 20 is omitted in FIG.
  • the Z direction is the detection direction. Therefore, the Z direction is a direction parallel to the optical axis of the objective lens 31 .
  • the XY plane is a plane perpendicular to the optical axis of the detection light and parallel to the plane on which the sample S is arranged.
  • the Y direction is the optical axis direction of the illumination light L1 with which the sample S is irradiated. That is, the Y direction is a direction parallel to the optical axis of the lens 11 that converges the illumination light L1 on the sample S.
  • the illumination optical system 10 is an optical system for guiding the illumination light L1 to the sample S.
  • a light source (not shown) generates illumination light L1.
  • the illumination light L1 is an Nd/YVO4 laser that emits CW (Continuous Wave) light with a wavelength of 532 nm.
  • the illumination optical system 10 has a lens 11 .
  • the lens 11 serves as an illumination objective lens for condensing the illumination light L1 onto the sample S. As shown in FIG.
  • the optical axis of the lens 11 is parallel to the Y direction.
  • the illumination light L1 is applied to the sample S from the side of the objective lens 31 .
  • the illumination light L1 is a Bessel beam.
  • the illumination optical system 10 may form a Bessel beam using an axicon lens or spatial modulator (not shown).
  • the illumination light L1 is excitation light that excites the sample S.
  • Raman scattered light is generated from the region of the sample S illuminated by the illumination light L1. Raman scattered light is emitted in various directions.
  • the detection optical system 30 includes an objective lens 31 , a lens 32 , a slit 41 , a lens 42 , a grating 43 , a lens 44 and a photodetector 50 .
  • a slit 41, a lens 42, a grating 43, a lens 44, and a spectroscope 40 are constructed.
  • the detection optical system 30 guides the Raman scattered light generated by the sample S to the photodetector 50 .
  • the objective lens 31 is a detection objective lens.
  • the optical axis of the objective lens 31 is perpendicular to the optical axis of the lens 11 .
  • Raman scattered light emitted in the direction of the objective lens 31 that is, in the +Z direction, enters the objective lens 31 .
  • Raman scattered light condensed by the objective lens 31 enters the lens 32 .
  • the focal point of the objective lens 31 may coincide with the focal point of the illumination light L1.
  • the Raman scattered light from the objective lens 31 be the signal light L2.
  • the lens 32 converges the signal light L2 onto the slit 41 .
  • the slit 41 has a slit opening with the Y direction as the longitudinal direction and the X direction as the lateral direction (slit width direction).
  • the slit 41 is arranged at a position conjugate with the focal plane of the objective lens 31 . High resolution can be obtained by the confocal effect.
  • the signal light L2 that has passed through the slit 41 is condensed by the lens 42 into a parallel light beam.
  • the grating 43 is a wavelength dispersion element that wavelength-disperses the signal light L2.
  • the grating 43 has a diffraction angle corresponding to the wavelength, and wavelength-disperses the signal light L2 in a direction tilted from the longitudinal direction (Y direction) of the slit.
  • the wavelength dispersion element of the spectroscope 40 is not limited to the grating 43, and a prism or the like can be used.
  • the signal light L2 from the grating 43 is incident on the photodetector 50 via the lens 44.
  • the lens 44 is an imaging lens and forms an image of the slit aperture on the light receiving surface of the photodetector 50 .
  • the photodetector 50 is a two-dimensional photodetector such as a CCD (Charge Coupled Device) camera or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.
  • the photodetector 50 has, for example, a plurality of pixels arranged along the X direction and the Y direction. The Y coordinate of photodetector 50 corresponds to the position at the slit aperture.
  • the Y coordinate of the photodetector 50 corresponds to the position on the sample S in the Y direction. Further, when the chromatic dispersion direction is a direction orthogonal to the Y direction, the X coordinate of the photodetector 50 corresponds to the wavelength of the signal light L2.
  • the sample S is placed on the drive stage 20.
  • the drive stage 20 is a three-dimensional movable stage that can be driven in the XYZ directions. For example, the drive stage 20 moves the sample S in the X direction. Thereby, the illumination position on the sample S and the detection area of the photodetector 50 on the sample S are scanned. The signal light L2 from the two-dimensional area of the sample S is detected by scanning the sample S in the direction perpendicular to the slit opening.
  • the optical system may be scanned instead of scanning by the drive stage 20 .
  • the processing unit 51 is an information processing device such as a personal computer.
  • the photodetector 50 outputs a detection signal to the processing section 51 .
  • the processing unit 51 stores the value of the detection signal for each pixel of the photodetector 50 in a memory or the like.
  • the processing unit 51 associates the detection signal with the scanning position of the drive stage 20 .
  • the processing unit 51 generates a spectral image based on the detection signal.
  • a Raman spectral image can be displayed on the screen by performing a predetermined operation in the processing unit 51 .
  • the processing unit 51 can store the data of the spectral image in a memory or the like.
  • the spectroscope 40 disperses the signal light L2.
  • the signal light L2 split by the spectroscope 40 is detected by the photodetector 50 . Therefore, one frame image of the photodetector 50 is data of the position and wavelength in the longitudinal direction of the slit.
  • the sample S is moved in the X direction using the drive stage 20 on which the sample S is placed. Thereby, the detection area of the photodetector 50 on the sample S is scanned. That is, the sample S is scanned in a direction perpendicular to the longitudinal direction of the slit. Raman scattered light from a two-dimensional area of the sample S can be detected. A two-dimensional Raman spectroscopic image of the sample S can be captured.
  • the illumination optical system 10 illuminates the sample S from the side of the objective lens 31 .
  • the illumination light L 1 is applied to the sample S without passing through the objective lens 31 . Since the objective lens 31 and the lens 11 are not coaxial, background light from the sample and the optical system can be reduced. It becomes possible to detect the signal light L2 with a high SN ratio. Furthermore, high-throughput Raman spectroscopy imaging can be realized.
  • the amount of Raman scattered light is about ten orders of magnitude lower than that of fluorescence.
  • fluorescence and scattered light may be generated in areas other than the sample due to illumination light irradiation.
  • various optical elements such as objective lenses, filters, and intermediate optical systems also generate fluorescence and Raman scattered light.
  • the substrate of the sample S also generates fluorescence and Raman scattered light. If fluorescence and Raman scattered light from sources other than the sample S are detected as background light, the SN ratio will decrease. Furthermore, fluorescence and Raman scattered light are generated also from the sample S other than the focal plane.
  • the detection optical system 30 may be provided with a filter such as an edge filter.
  • the SN ratio can be further increased by providing a filter that transmits Raman scattered light and shields the illumination light L1 in the optical path.
  • FIG. 3 is a schematic diagram showing the optical system of the spectrometer 1. As shown in FIG. In FIG. 3, the YZ plane view is shown on the left side, and the XZ plane view is shown on the right side.
  • FIG. 4 is a perspective view schematically showing the objective lens 31 and the sample S. FIG. The drive stage 20 is omitted in FIG.
  • multi-beam illumination is performed.
  • the basic configuration of the spectroscopic measurement apparatus 1 other than the multi-beam illumination is the same as that of the first embodiment, so the description is omitted.
  • FIGS. 3 and 4 three multi-beams are used, and these are shown as illumination beams L11, L12, and 13.
  • FIG. The three illumination beams L11, L12, and L13 will be collectively referred to as illumination light L1.
  • the illumination light L1 comprises three illumination beams L11, L12, L13.
  • the number of illumination beams is not limited to three, and may be two, four or more.
  • the illumination beams L11, L12, and L13 propagate along optical axes parallel to the Y direction.
  • Three illumination beams L11, L12, and L13 are arranged in the X direction. That is, the illumination beam L13 is on the +X side of the illumination beam L12, and the illumination beam L11 is on the -X side. In the X-direction, the illumination beams L11, L12, L13 illuminate different positions of the sample S.
  • Each of the illumination beams L11, L12, and L13 is a Bessel beam.
  • a multi-slit 41M is arranged on the incident side of the spectroscope 40 .
  • a plurality of slit openings are provided in the multi-slit 41M.
  • the multi-slit 41M has three slit apertures, the same as the number of illumination beams.
  • Each slit opening has the Y direction as its longitudinal direction.
  • Each slit opening has the X direction as the lateral direction (width direction).
  • a plurality of slit openings are arranged side by side in the X direction.
  • the focal plane of the objective lens 31 is located conjugate with the multi-slit 41M.
  • the Raman scattered light from the area illuminated by the illumination beam L11 is transmitted through the first slit aperture.
  • Raman scattered light from the area illuminated by illumination beam L12 passes through the second slit aperture.
  • Raman scattered light from the area illuminated by the illumination beam L13 is transmitted through the third slit aperture.
  • the drive stage and the like scan the sample S in the X direction. Thereby, a Raman spectral image can be obtained. Also in the present embodiment, Raman scattered light can be detected with a high SN ratio as in the first embodiment. Furthermore, since the signal light L2 from a plurality of regions can be detected simultaneously, the spectroscopic measurement time can be shortened.
  • FIG. 5 is a schematic diagram showing the optical system of the spectrometer 1. As shown in FIG. In FIG. 5, the YZ plan view is shown on the left side, and the XZ plan view is shown on the right side.
  • FIG. 6 is a perspective view schematically showing the objective lens 31 and the sample S. FIG. The driving stage 20 is omitted in FIG.
  • sheet-like lighting is used. Since this is the same as the first embodiment except that the sheet-shaped illumination is used, the description is omitted.
  • a slit 41 having one slit aperture is provided on the incident side of the spectroscope 40 .
  • the illumination light L1 is incident on the sample S with the Y direction as the optical axis direction.
  • the illumination light L1 is sheet-like illumination light spread in the X direction.
  • sheet-like illumination is formed by using a cylindrical lens.
  • the cylindrical lens converges the illumination light L1 in the Z direction and does not converge in the X direction.
  • the illumination light L1 uniformly illuminates a wide area of the sample S in the X direction. That is, an area sufficiently wider than the field of view of the objective lens 31 is illuminated with the uniform illumination light L1.
  • the relative position of the sample S with respect to the objective lens 31 is moved in the X direction.
  • the drive stage on which the sample S is placed is driven in the X direction.
  • the detection optical system 30 including the objective lens 31 may be moved.
  • the detection area of the photodetector 50 on the sample S changes in the X direction.
  • Raman scattered light from a two-dimensional area of the sample S can be detected.
  • a Raman spectral image can be captured with a high SN ratio.
  • FIG. 7 is a diagram showing a spectrometer 1 according to Modification 1, which is a modification of Embodiment 3. As shown in FIG. In FIG. 7, the YZ plan view is shown on the left side, and the XZ plan view is shown on the right side. In FIG. 7, the direction of the slit 41 and the wavelength dispersion direction are different from those in the configuration of FIG. Specifically, the slit 41 is provided with a slit opening whose longitudinal direction is the X direction. The width direction of the slit opening is the Y direction.
  • the grating 43 wavelength-disperses the signal light L2 in the X direction and the tilted direction.
  • the grating 43 disperses the signal light L2 in the Y direction according to the wavelength.
  • the relative position of the objective lens 31 with respect to the sample S moves in the Y direction.
  • Raman scattered light from a two-dimensional area in the XY directions can be detected.
  • a Raman spectroscopic image can be captured with a high SN ratio.
  • FIG. 8 is a schematic diagram showing the optical system of the spectrometer 1. As shown in FIG. In FIG. 8, the YZ plan view is shown on the left side, and the XZ plan view is shown on the right side.
  • FIG. 9 is a perspective view schematically showing the objective lens 31 and the sample S. FIG. Note that the sample S is omitted in FIG.
  • a multi-slit 41M is used as in the second embodiment.
  • the multi-slit 41M has a plurality of slit openings. Each slit opening has the Y direction as its longitudinal direction. A plurality of slit openings are arranged side by side in the X direction.
  • the relative position of the sample S with respect to the objective lens 31 is moved in the X direction.
  • Raman scattered light from a two-dimensional area in the XY directions can be detected.
  • a Raman spectroscopic image can be captured with a high SN (Signal to Noise) ratio.
  • the signal light L2 from a plurality of regions can be detected simultaneously, the spectroscopic measurement time can be shortened.
  • FIG. 10 is a diagram showing a spectrometer 1 according to Modification 2, which is a modification of Embodiment 4.
  • the YZ plan view is shown on the left side
  • the XZ plan view is shown on the right side.
  • the direction of the multi-slit 41M and the wavelength dispersion direction are different from those in the configuration of FIG.
  • the multi-slit 41M is provided with a slit opening whose longitudinal direction is the X direction.
  • the width direction of the slit opening is the Y direction.
  • a plurality of slit openings are arranged side by side in the Y direction.
  • the grating 43 wavelength-disperses the signal light L2 in the X direction and the tilted direction.
  • the grating 43 disperses the signal light L2 in the Y direction according to the wavelength.
  • the relative position of the objective lens 31 with respect to the sample S moves in the Y direction.
  • Raman scattered light from a two-dimensional area in the XY directions can be detected.
  • a Raman spectroscopic image can be captured with a high SN ratio.
  • the sample S is irradiated with the illumination light L1 from the side of the objective lens 31 . That is, the illumination light L ⁇ b>1 and the signal light L ⁇ b>2 are not coaxial, and the sample S is irradiated with the illumination light L ⁇ b>1 without passing through the objective lens 31 . Thereby, Raman scattered light can be detected with a high SN ratio.
  • Wavelength dispersion direction An example of the wavelength dispersion direction and the pixel arrangement direction that can be applied to the above embodiment and its modifications will be described with reference to FIG. 11 .
  • 11 shows the multi-slit 41M and the light receiving surface of the photodetector 50.
  • the multi-slit 41M has five slit openings A1 to A5.
  • the longitudinal direction of each of the slit openings A1 to A5 is the Y direction. That is, the X direction is the lateral direction (width direction) of the slit openings A1 to A5.
  • Five slit openings A1 to A5 are arranged in the X direction.
  • the detection areas B1 to B5 in which the detection light passing through the slit openings A1 to A5 are detected are parallelograms.
  • the signal light L2 that has passed through the slit aperture A1 is dispersed in the detection area B1.
  • the signal light L2 that has passed through the slit apertures A2-A5 is dispersed in the detection regions B2-B5, respectively.
  • the detection areas B1 to B5 have two sides parallel to the Y direction, and the remaining two sides are inclined from the X direction.
  • the directions of the two sides inclined from the X direction are the dispersion directions of the grating 43 .
  • the chromatic dispersion direction is tilted from the X direction. By doing so, the measurable wavelength range can be widened, and the number of data in the wavelength direction can be increased.
  • the detection areas B1 to B5 are set so as not to overlap each other. For example, the long wavelength ( ⁇ n) side of the detection region B1 is shifted from the short wavelength ( ⁇ 1) side of the detection region B2.
  • FIG. 12 is a diagram showing an example of the illumination optical system 10 and the detection optical system 30. As shown in FIG. FIG. 12 shows an example of an optical system that scans the illumination area. That is, the illumination area on the sample S is scanned by the optical scanner 108 deflecting the illumination light L1.
  • the illumination optical system 10 includes a light source 101 , lenses 102 to 104 , a lens 105 , a mirror 106 , a dichroic mirror 107 , an optical scanner 108 , a lens 109 , a dichroic mirror 110 , a mirror 111 , lenses 112 and 113 .
  • the light source 101 is, for example, a laser light source, and generates monochromatic illumination light L1. Illumination light L1 is incident on mirror 106 via lenses 102-105.
  • the lens 104 is an axicon lens or a cylindrical lens.
  • the illumination light L1 is a Bessel beam as in Embodiments 1 and 2
  • the lens 104 is an axicon lens.
  • the lens 104 is a cylindrical lens.
  • the mirror 106 reflects the illumination light L1 toward the dichroic mirror 107.
  • the dichroic mirror 107 has wavelength characteristics that reflect the illumination light L1 and transmit the Raman scattered light.
  • Illumination light L ⁇ b>1 reflected by dichroic mirror 107 enters optical scanner 108 .
  • the optical scanner 108 is, for example, a galvanomirror, and deflects the illumination light L1 in the X direction. Thereby, the sample S is scanned with the illumination light L1.
  • the illumination light L1 reflected by the optical scanner 108 enters the dichroic mirror 110 via the lens 109 .
  • the dichroic mirror 110 has wavelength characteristics that reflect the illumination light L1 and transmit the Raman scattered light.
  • Illumination light L ⁇ b>1 reflected by dichroic mirror 110 enters mirror 111 .
  • the illumination light L1 reflected by the mirror 111 is incident on the sample S via the lenses 112 and 113 .
  • a lens 113 is an illumination objective lens.
  • the detection optical system 30 includes an objective lens 301 , a mirror 302 , a lens 303 , a dichroic mirror 110 , a lens 109 , an optical scanner 108 , a dichroic mirror 107 , a lens 310 and a spectroscope 40 .
  • a dichroic mirror 110 , a lens 109 , and an optical scanner 108 are common to the detection optical system 30 and the illumination optical system 10 .
  • the illumination light L1 is incident on the sample S from the side of the objective lens 301 of the detection optical system 30 .
  • Raman scattered light generated in the sample S enters the objective lens 301 .
  • the Raman scattered light from the objective lens 301 be the signal light L2.
  • Signal light L2 is reflected by mirror 302 .
  • Signal light L2 from mirror 302 enters dichroic mirror 110 via lens 303 .
  • the dichroic mirror 110 is a beam splitter that splits the optical paths of the signal light L2 and the illumination light L1 depending on the wavelength.
  • the signal light L2 transmitted through the dichroic mirror 110 enters the optical scanner 108 via the lens 109 .
  • the optical scanner 108 descans the signal light L2.
  • the signal light L2 reflected by the optical scanner 108 is incident on the dichroic mirror 107 .
  • the dichroic mirror 107 is a beam splitter that splits the optical paths of the signal light L2 and the illumination light L1 depending on the wavelength.
  • the signal light L2 that has passed through the dichroic mirror 107 enters the lens 310 .
  • a lens 310 is an imaging lens, and forms an image of the sample S on the slit 41 of the spectroscope 40 .
  • the signal light L2 that has passed through the slit aperture of the slit 41 is wavelength-dispersed by the spectroscope 40 . Detected by a photodetector 50 dispersed by a spectroscope 40 .
  • Raman scattered light is detected with a high SN ratio as in the embodiment. Furthermore, the illumination position on the sample S can be scanned using the optical scanner 108 .
  • FIG. 13 is a side view schematically showing the periphery of the sample S.
  • the illumination light L1 is a Bessel beam.
  • Sample S is, for example, a spheroid or an organoid.
  • Raman scattered light is generated in various directions from the region illuminated by the illumination light L1.
  • the Raman scattered light generated in the +Z direction from the sample S is defined as Raman scattered light LSu, and the Raman scattered light generated in the ⁇ Z direction is defined as Raman scattered light LSd.
  • Objective lenses 31 for detection are arranged on the +Z side and -Z side of the sample S, respectively.
  • the objective lens 31 on the +Z side of the sample S is shown as an objective lens 31u
  • the objective lens 31 on the -Z side is shown as an objective lens 31d.
  • a sample S is arranged between the objective lens 31u and the objective lens 31d. That is, the objective lens 31u and the objective lens 31d are coaxial.
  • the Raman scattered light LSu enters the objective lens 31u.
  • the signal light L2u is dispersed and detected by the spectroscope 40 in the same manner as in the above embodiments.
  • the Raman scattered light LSd enters the objective lens 31d.
  • the Raman scattered light LSd from the objective lens 31d be the signal light L2d.
  • the signal light L2d is dispersed and detected by the spectroscope 40 in the same manner as in the above embodiments.
  • the detection optical system 30 can be provided for each of the signal light L2u and the signal light L2d. By doing so, the amount of detected Raman scattered light can be almost doubled.
  • the illumination light L1 is incident on the sample S from the sides of the objective lenses 31u and 31d. That is, the optical axis of the illumination light L1 passes through the space between the objective lens 31u and the objective lens 31d. By doing so, detection can be performed at a high SN ratio.
  • the optical axis of the illumination light L1 is parallel to the Y-axis. Also, a high NA, low magnification, wide field of view objective lens can be used.
  • FIG. 14 is a side view schematically showing another example of 4 ⁇ detection.
  • sample S is placed on substrate 400 .
  • the substrate 400 is, for example, a metal substrate made of stainless steel and has a high light reflectance.
  • a main surface of the substrate 400 is parallel to the XY plane.
  • a sample S is placed on the +Z side surface of the substrate 400 .
  • the sample S is, for example, a cell sheet, molecules on the substrate 400, or bacteria.
  • the objective lens 31 is arranged only on the +Z side of the substrate 400 .
  • the illumination light L1 is irradiated onto the sample S from the side of the objective lens 31 .
  • the optical axis of illumination light L1 is slightly tilted from the Y direction.
  • the illumination light L1 travels in the -Z direction.
  • the illumination light L1 can be sheet illumination.
  • Raman scattered light is emitted from the sample S in various directions. Raman scattered light traveling in the ⁇ Z direction is incident on the substrate 400 .
  • the substrate 400 reflects Raman scattered light directed in the -Z direction.
  • the Raman scattered light reflected by the substrate 400 travels in the +Z direction and enters the objective lens 31 . Therefore, the Raman scattered light generated in the ⁇ Z direction as well as in the +Z direction can be incident on the objective lens 31 .
  • Detection light from the objective lens 31 is guided to the spectroscope 40 by the detection optical system 30 described above. By doing so, the amount of detected Raman scattered light can be almost doubled. Also, a high NA, low magnification, wide field of view objective lens can be used.
  • the sample S is irradiated with the illumination light L1 from the side of the objective lens 31 as well.
  • the optical axis of the sheet-shaped illumination light L1 may be tilted from the Y direction.
  • the sample S may be irradiated with the illumination light L1 from the objective lens side (+Z side).
  • FIG. 15 is a YZ plan view schematically showing a channel chip 500 holding a sample.
  • the sample is assumed to be a fluid flowing through channels 501-504.
  • the channel chip 500 is a microchannel chip in which microchannels are formed.
  • a biological sample can flow through channels 501-504.
  • sample cells and bacteria are flowing through the channels 501 to 504 .
  • the sample to be flowed through the flow path may be separated into individual components that are output via high performance liquid chromatography (HPLC), or may be incorporated into a part of the flow cytometry process.
  • HPLC high performance liquid chromatography
  • the channel chip 500 has channels 501 to 504 formed along the X direction.
  • Each of the channels 501 to 504 is a microchannel with the X direction as the sample channel direction.
  • the YZ cross-sectional shape of the channels 501 to 504 is rectangular.
  • the liquid sample flowing in the X direction is irradiated with the illumination light L1.
  • the illumination light L1 is incident on the channel 501 along the Y direction.
  • the direction of the optical axis of the illumination light L1 is perpendicular to the direction of the flow path of the sample.
  • a wide area in the direction of the flow path is illuminated by using sheet-like illumination as the illumination light L1.
  • the longitudinal direction of the slit opening of the slit 41 can be the Y direction. Therefore, a wide area in the direction of the flow path can be used as the detection area.
  • the optical axis direction, slit direction, and flow path direction of the illumination light L1 are not limited to the above examples.
  • the illumination light L1 may be one or a plurality of Bessel beams.
  • the reflective elements 12 are provided adjacent to the channels 501-504.
  • the reflective element 12 is held by the channel chip 500 .
  • Illumination light L ⁇ b>1 condensed by lens 11 enters reflection element 12 .
  • the reflective element 12 functions as a mirror having a metal reflective surface.
  • the reflective surface of the reflective element 12 is flat and inclined at 45° from the Z-axis.
  • the lens 11 is arranged below the channel chip 500 .
  • the reflecting surface of the reflecting element 12 may be a concave surface so as to focus the illumination light L1 on the sample.
  • the optical axis of the lens 11 is parallel to the Z direction. Therefore, the reflecting element 12 reflects the illumination light L1 from the lens 11 toward the channels 501-504. As a result, the sample flowing through the channels 501 to 504 is illuminated and Raman scattered light is generated.
  • Channels 501-504 represent Examples 1-4, respectively. Each example will be described below.
  • Example 1 indicated by flow path 501 Example 1 indicated by flow path 501 will be described.
  • the illumination light L1 is condensed at the center of the channel 501 .
  • Raman scattered lights LSu and LSd are generated.
  • Raman scattered light LSu is Raman scattered light generated in the +Z direction
  • Raman scattered light LSd is Raman scattered light generated in the ⁇ Z direction.
  • Detection optical systems 30 are provided on both sides of the channel chip 500, respectively. By doing so, Raman scattered light emitted in various directions can be detected.
  • Example 2 indicated by flow path 502 Example 2 indicated by flow path 502 will be described.
  • the illumination light L1 is condensed at the center of the channel 501 .
  • Raman scattered lights LSu and LSd are generated.
  • a reflecting mirror 322 is arranged on the ⁇ Z side of the channel 502 .
  • the reflecting mirror 322 is arranged below the channel chip 500 .
  • the reflecting mirror 322 is a concave mirror such as a spherical mirror or an ellipsoidal mirror.
  • the Raman scattered light LSd reflected to the -Z side is incident on the reflecting mirror 322, it is reflected in the +Z direction. Therefore, the objective lens 31 (not shown in FIG. 15) should be placed only on the +Z side of the channel 502, as in FIG. Since the detection optical system can be shared between the Raman scattered light LSu and the Raman scattered light LSd, the device configuration can be simplified.
  • Example 3 indicated by flow path 503 will be described.
  • the illumination light L1 illuminates the entire sample.
  • the condensing position of the illumination light L1 is shifted from the channel 503 in the +Y direction. Therefore, Raman scattered light is generated from a wide area of the channel 503 . By doing so, it is possible to detect Raman scattered light from a wider area. By doing so, it is possible to efficiently detect signal light from a sample that is thick in the Z direction.
  • one surface on the -Z side of the channel 503 is a metal reflecting surface 323 . Therefore, the Raman scattering light LS emitted to the -Z side is reflected by the metal reflecting surface 323. FIG. Then, the Raman scattered light LS reflected by the metal reflecting surface 323 travels in the +Z direction.
  • the objective lens 31 (not shown in FIG. 15) may be arranged only on the +Z side of the flow path 502 . Therefore, as in the second embodiment, the device configuration can be simplified.
  • Example 4 indicated by channel 504 will be described.
  • two surfaces of the channel 504 function as dichroic mirrors 324 .
  • a dichroic mirror 324 serves as an incident surface on the incident side of the illumination light L1 and an exit surface on the exit side.
  • the dichroic mirror 324 transmits the illumination light L1, which is the excitation light, and reflects the Raman scattered light. Raman scattered light emitted in the +Y direction or the -Y direction is reflected by the dichroic mirror 324 .
  • the Raman scattered light having the -Z direction component is reflected by the dichroic mirror 324 and the metal reflecting surface 323 . Therefore, it is extracted in the +Z direction from the channel 504 .
  • Raman scattered light with a large +Y direction component can be incident on the objective lens 31 (not shown in FIG. 15). That is, it is possible to detect Raman scattered light having a Y-direction component larger than the Z-direction component. Therefore, the amount of light detected by the photodetector can be made higher than in the second and third embodiments.
  • FIG. 16 is a diagram showing the channel 505 of Example 5.
  • the cross-sectional shape of the channel 505 is a curved surface. That is, the channel 505 is elliptical in YZ plan view.
  • the inner peripheral surface of the flow path 505 serves as a metal reflecting surface 525 .
  • the +Z side of the channel 505 serves as an extraction portion 505a. Therefore, channel 505 functions as an integrating sphere.
  • the Raman scattered light emitted in various directions is reflected by the metal reflecting surface 525 and extracted from the extracting portion 505a. This makes it possible to increase the amount of light detected by the photodetector.
  • a portion through which the illumination light L1 passes is configured to transmit the illumination light.
  • FIG. 17 is a YZ plan view showing a channel 506 corresponding to Example 6 and a channel 507 corresponding to Example 7.
  • a channel 506 is formed in the channel chip 500 .
  • the channel 506 is formed along the X direction.
  • the illumination light L1 is sheet illumination.
  • a slit 41 is provided directly above the channel 506 .
  • the slit 41 is placed on the channel chip 500 . In this configuration, a slit 41 may be arranged between the detection objective lens (not shown) and the sample S.
  • the slit 41 is formed along the direction of the flow path 506 . That is, the slit opening of the slit 41 has the X direction as the longitudinal direction and the Y direction as the lateral direction (slit width direction).
  • a filter 38 is provided at the slit opening of the slit 41 .
  • the filter 38 blocks the illumination light L1 and transmits the Raman scattered light.
  • the filter 38 is provided between the slit 41 and the channel 506 , it may be arranged closer to the spectroscope 40 than the slit 41 .
  • the slit 41 is provided on the sample side of the detection objective lens. Therefore, there is no need to provide an imaging optical system in the middle of the detection optical system. Therefore, the device configuration can be simplified.
  • the slit 41 may be a multi-slit 41M.
  • a condensing element 527 is added to the configuration of the sixth embodiment. Specifically, a condensing element 527 is provided above the channel 507 .
  • the condensing element 527 functions as a lens that condenses the Raman scattered light.
  • the Raman scattered light condensed by the condensing element 527 enters the slit 41 .
  • the condensing element 527 is provided inside the channel chip 500 .
  • the condensing element 527 can be mounted in the channel chip 500 by forming a curved surface on the +Z side of the channel 507 .
  • the condensing element 527 may be a cylindrical lens whose longitudinal direction is the X direction.
  • the detection NA can be increased. Therefore, spatial resolution can be increased. Furthermore, the incident NA of the spectroscopic optical system of the spectroscope 40 can be reduced.
  • FIG. 18 is a YZ plan view showing an eighth embodiment.
  • the filter 16 is provided near the channel 508 .
  • the filter 16 is, for example, a laser line filter or a bandpass filter that transmits the laser wavelength of the laser light that becomes the illumination light L1.
  • Filter 16 is positioned between reflective element 12 and channel 508 .
  • a filter 16 is arranged in the optical path between the lens 11, which is an illumination objective lens, and the sample.
  • Raman scattered light is generated only by light of the laser wavelength. Therefore, the noise of signal light can be reduced, and Raman spectroscopy can be appropriately performed.
  • FIG. 19 is a YZ plan view showing the ninth embodiment.
  • the filter 16 is arranged between the sample S and the lens 11 .
  • the lens 11 is an illumination objective lens that converges the illumination light L1 on the sample S as described above.
  • the optical axis of the lens 11 is parallel to the Y direction.
  • the illumination light L1 condensed by the lens 11 is incident on the sample S through the filter 16 .
  • it is a laser line filter or a bandpass filter that transmits the laser wavelength of the laser light that becomes the illumination light L1.
  • the filter 16 has a thickness of about 300 ⁇ m. Such a configuration can also prevent light other than the laser wavelength from entering the sample. Raman scattered light is generated only by light of the laser wavelength. Therefore, the noise of signal light can be reduced, and Raman spectroscopy can be appropriately performed.
  • FIG. 20 is a YZ plan view showing the configuration around the sample.
  • the polarization state of the illumination light L1 is shown schematically.
  • the illumination light L1 condensed on the sample is polarized parallel to the optical axis (Y direction) of the illumination light L1.
  • the illumination light L1 is sheet illumination.
  • the slit opening of the slit 41 is parallel to the Y direction.
  • a polarization control element 17 is arranged between the lens 11 and the sample S.
  • the polarization control element 17 is a split wavelength plate.
  • the polarization control element 17 is desirably divided into two.
  • the illumination light L1 is condensed by the lens 11 . Therefore, at the focal position of the lens 11, the illumination light L1 can produce a large electric field component in its optical axis direction. That is, at the detection position, the polarization direction of the illumination light L1 is parallel to the optical axis direction.
  • the polarization control element 17 may be arranged closer to the light source than the lens 11 .
  • the signal light L2 incident on the slit 41 has a large polarization component parallel to the slit aperture.
  • the P-polarized component becomes large.
  • the groove direction of the grating 43 and the vibration direction of the electric field vector are parallel, and when it is S-polarized, the groove direction and the vibration direction of the electric field vector are orthogonal. Therefore, the diffraction efficiency of the grating 43 can be increased. Since the polarization characteristics differ depending on the grating characteristics and the wavelength region to be observed, the polarization is controlled according to the conditions.
  • the filter 16 may be used in the optical path for any of sheet illumination, Bessel beam, and multi-beam.
  • 4 ⁇ detection may be performed for any of sheet illumination, Bessel beams, and multibeams. Two or more of the embodiments, modifications, and examples may be combined as appropriate.
  • lattice lighting may be used.
  • lattice illumination the sample S can be illuminated with a lattice illumination pattern.
  • an edge filter that blocks light of the wavelength of the illumination light L1 and transmits Raman scattered light may be arranged in the optical path of the signal light L2.
  • the following three exposure methods can be used. 1) The sample in the channel is stopped and measured, and after the measurement is completed, the sample is flown and the next sample is measured. 2) Measurement is performed while the sample is flowing through the channel. At this time, the charge shift speed of the CCD camera and the flow speed of the sample in the channel are made the same, and the signal light from the same sample is integrated in a single pixel. 3) Measurement is performed while the sample is flowing through the channel. At this time, after measuring a plurality of times with a short exposure time, the signal of a single sample is integrated by data processing. The position of the sample at the time of measurement is measured by microscopic observation such as Rayleigh scattering.
  • Raman data from the same sample is extracted on the CCD and integrated.
  • Signal light from the same sample is detected by different pixels of the photodetector 50 . That is, the signal light from the same sample flowing through the channel is detected multiple times by the photodetector 50 .
  • Detection signals of different pixels of the photodetector 50 are integrated to obtain Raman scattered light from the same sample.
  • Cells (bacteria):camera pixels preferably close to 1:1 overall magnification.
  • a sample cell corresponds to one pixel of the photodetector 50 .
  • the magnification of the entire apparatus is 1, assuming that the cell diameter is 20 ⁇ m, the cell fits in (1 ⁇ n) pixels.
  • n is an integer of 2 or more and corresponds to the number of pixels in the direction of dispersion of Raman scattered light.
  • Teledyne PIXIS400B one pixel of which is 20 ⁇ m square, can be used. Magnification can be changed depending on the size of the cells and purpose.
  • the cell when observing at a magnification of about 5 times the entire device, assuming that the cell diameter is 20 ⁇ m, the cell will fit into (5 ⁇ n) pixels.
  • the SN ratio can be improved by lowering the overall magnification.
  • One pixel of the photodetector 50 corresponds to a sample cell.
  • the magnification of the objective lens 31 or the like may be determined so that cells can be detected with a size equivalent to one pixel.
  • the photodetector 50 detects the signal light dispersed by the spectroscope 40 . Therefore, on the light receiving surface of the photodetector 50, the signal light from the cells spreads in the dispersion direction. Even if the magnification is set such that one pixel of the photodetector 50 corresponds to the sample cell, the signal light from the cell is detected by a plurality of pixels in the dispersion direction. Signal light from cells is detected by (1 ⁇ n) pixels of the photodetector 50 . In other words, the signal light from the cells is detected by one pixel of the photodetector 50 in the direction orthogonal to the scattering direction.
  • the signal light L2 is detected at such a magnification that the cell of the sample corresponds to one pixel of the photodetector 50 in the direction orthogonal to the wavelength dispersion direction of the wavelength dispersion element.
  • the measurement is preferably performed at a magnification such that the cells are contained within 5 pixels or less, and more preferably at a magnification such that the cells are contained within 1 pixel or less.
  • the illumination light L1 may be scanned in the optical axis direction of the objective lens 31 for detection.
  • the entire cell is illuminated while scanning the lateral illumination at high speed in that direction.
  • the illumination light L1 is scanned in the Z direction.
  • the spectroscopic measurement was performed while scanning the sample or the illumination light, but the sample or the illumination light may not be scanned.
  • the measurement may be performed while the sample is flowing through the channel. That is, instead of the means for scanning the sample or the illumination light, there may be means for causing the sample to flow through the channel.
  • FIG. 12 shows an example of a configuration in which the optical axes of illumination light and detection light are tilted in the horizontal direction and the vertical direction.
  • water 601 is stored in the dish 600. Furthermore, a sample substrate 603 for holding the sample S is arranged in the dish 600 . A sample S is placed on the sample substrate 603 .
  • An objective lens 31 and a lens 11 are arranged above the dish 600 .
  • An objective lens 31 and a lens 11 are arranged obliquely above the sample S.
  • the sample S is irradiated with illumination light L1 from obliquely above the sample.
  • the illumination light L1 from the lens 11 propagates through water and enters the sample S.
  • Raman scattered light generated in the sample S and propagating obliquely upward enters the objective lens 31 .
  • the Raman scattered light from the sample S propagates through water and enters the objective lens 31 .
  • Fig. 22 shows another example of a configuration in which the optical axes of illumination light and detection light are tilted in the horizontal direction and the vertical direction.
  • water 601 is stored in dish 600 .
  • a sample S is arranged in the dish 600 .
  • Dish 600 is made of a transparent material such as glass.
  • the objective lens 31 and lens 11 are arranged below the dish 600 . That is, the sample S is irradiated with the illumination light L1 from obliquely below the sample S. As shown in FIG. The illumination light L1 from the lens 11 is transmitted through the bottom of the dish 600 and enters the sample S. FIG. Also, Raman scattered light generated in the sample S and traveling obliquely downward enters the objective lens 31 . Raman scattered light from the sample S passes through the bottom of the dish 600 and enters the objective lens 31 .
  • the signal light is mainly Raman scattered light, but the signal light may be light other than Raman scattered light. Therefore, the spectroscopic measurement apparatus according to this embodiment may be a spectroscopic measurement apparatus other than Raman spectroscopy.
  • it may be a spectrometer that detects fluorescence excited by excitation light, or a spectrometer that measures an infrared absorption spectrum or a near-infrared absorption spectrum. These spectrometers can also measure spectra with a high SN ratio.
  • it is suitable for a spectroscopic measurement device that requires high-speed measurement and repeated measurement. Applications of the spectrometer are not limited to imaging. If the sample is a uniform sample such as a solution, a large area can be measured simultaneously, so the amount of signal increases and the measurement time can be shortened. In this case the measured spectra are integrated.
  • the spectrometer 1 can spectroscopically measure spontaneous Raman scattered light. Further, the spectrometer 1 may spectroscopically measure stimulated Raman scattering light.
  • the sample When measuring stimulated Raman scattering light, the sample may be irradiated with pump light and Stokes light. That is, two laser light sources with different wavelengths are used. In this case, the pump light and the Stokes light may be arranged so that the sample is irradiated from the side.
  • FIG. 23 to 25 are diagrams schematically showing the channel 501 provided in the channel chip 500.
  • FIG. FIG. 23 is a diagram schematically showing a configuration in which the longitudinal direction of the slit is parallel to the direction of the flow channel 501.
  • FIG. 24 is a diagram schematically showing the configuration when the longitudinal direction of the slit is inclined from the direction of the flow channel 501.
  • FIG. 25 is a diagram schematically showing a configuration in which the channel 501 meanders.
  • FIG. 23 to 25 show the slit opening A1 of the slit projected onto the channel chip 500.
  • the longitudinal direction of the slit opening A1 is parallel to the X direction. That is, the width direction of the slit opening A1 is the Y direction. A region corresponding to the slit opening A1 becomes a detection region of the flow channel 501 .
  • the illumination direction is parallel to the Y direction.
  • the Z direction perpendicular to the plane of the paper is parallel to the optical axis of the objective lens.
  • samples 710 and 711 to be measured are flowing through the channel 501 .
  • the samples 710 and 711 can be biological samples such as cells.
  • a fluid for flowing samples 710 and 711 is supplied to the channel 501 .
  • the channel 501 is provided along the X direction. Therefore, the samples 710 and 711 flow in the X direction.
  • the longitudinal direction of the slit opening A1 and the direction of the channel 501 are parallel.
  • the longitudinal direction of the slit opening A1 is inclined from the direction of the flow channel 501. In FIG. That is, the direction of the channel 501 is inclined from the X direction and the Y direction.
  • the sample 710 flows through the channel 501 across the detection area corresponding to the slit opening A1. Therefore, with the configuration of FIG. 24, signal light from a wider range of the sample 710 can be detected. For example, assume that the width of the channel 501 is wider than the size corresponding to the width of the slit opening A1. As shown in FIG. 23, it is assumed that there is a sample 711 flowing through the channel 501 deviated from the center of the channel 501 in the Y direction. In this case, only signal light from part of the sample 711 can be detected.
  • any sample 710 can cross the detection area corresponding to slit aperture A1. Therefore, the entire sample 710 passes through the detection area corresponding to the slit aperture A1.
  • the signal light from a wider area of the sample 710 can be measured by the photodetector 50 detecting the signal light while the sample 710 traverses the slit aperture A1.
  • the channel 501 is bent in a meandering manner.
  • a sample 710 flowing through the channel 501 reciprocates in the Y direction. That is, the sample 710 alternately flows along the channel 501 in the +Y direction and the -Y direction.
  • the sample 710 flows through the channel 501 so as to repeatedly cross the detection area corresponding to the slit opening A1. By doing so, the spectroscopic measurement of the sample 710 can be repeatedly performed.
  • a cooling region 702 may be provided in at least part of the channel chip 500 .
  • the channel chip 500 is cooled in the cooling area 702 .
  • a cooling means such as a coolant is in contact with the channel chip 500 .
  • a tributary 703 may be provided in the middle of the channel 501 .
  • the flow velocity of the sample 710 can be changed. That is, the measurement can be performed by changing the flow velocity.
  • a solution or a drug that reacts with the sample 710 may be supplied from the branch stream 703 . By doing so, it becomes possible to measure the change in the spectrum due to the reaction. In other words, spectra can be measured before, during, and after the reaction.
  • FIG. 26 to 28 are schematic diagrams showing the operation of the sample 710 flowing through the channel 501 and the pixels of the photodetector 50.
  • FIG. A sample 710 is a cell or the like flowing through the channel 501 .
  • the sample 710 flows through the channel 501 together with a fluid such as a solution.
  • the slit direction and the spectroscopic method are perpendicular to each other.
  • FIG. 26 to 28 schematically show four pixel columns of the photodetector 50.
  • Pixels in the first column are a pixel column 151 .
  • the second, third, and fourth pixel columns are pixel columns 152-154.
  • the charge shift speed of the CCD camera and the flow speed of the sample in the channel are made the same.
  • a Raman spectrum is measured in one pixel row. That is, the arrangement direction of pixels included in the pixel row 151 is parallel to the spectral direction of the spectroscope 40 .
  • the orthogonal direction orthogonal to the spectral direction corresponds to the direction of the flow channel. Therefore, the signal light from the sample 710 flowing through the channel 501 is detected in the order of the pixel row 151, the pixel row 152, the pixel row 153, and the pixel row 154.
  • the flow speed is adjusted so that the speed at which the sample 710 flows through the channel 501 and the transfer speed of the signal charge between the pixel columns match.
  • the sample 710 exists at a position corresponding to the pixel column 151.
  • the CCD reads the signal charges generated by the pixels of the first pixel row 151 .
  • signal light from the sample 710 is detected by each pixel of the pixel array 151 .
  • the sample 710 flows through the channel 501 as shown in FIGS. In FIG. 27, the sample 710 has moved to a corresponding position between the pixel columns 151 and 152 . Signal charges read out from the pixels of the pixel row 151 are transferred to the pixel row 152 .
  • each pixel of the pixel row 152 generates a signal charge corresponding to the amount of light received.
  • signal light from sample 710 is detected by each pixel of pixel array 152 .
  • the CCD reads the signal charges generated by the pixels in the second pixel row 152 . Therefore, the signal charges generated in the pixels of the first pixel row and the signal charges generated in the pixels of the second pixel row 152 are integrated.
  • the integrated number of pixels is not limited to four.
  • the flow speed of the sample is adjusted to a speed corresponding to the signal charge transfer speed. Then, in the photodetector 50, signal charges of a plurality of pixels are integrated. Signal light L2 from the same sample 710 is accumulated in a plurality of pixel columns and detected. This enables measurement with a higher SN ratio.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/JP2021/046916 2021-02-04 2021-12-20 分光測定装置、及び分光測定方法 Ceased WO2022168467A1 (ja)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006113021A (ja) * 2004-10-18 2006-04-27 Univ Waseda ラマン分光装置、及び分光装置
JP2009063462A (ja) * 2007-09-07 2009-03-26 Sony Corp 光学測定装置及び微粒子解析装置
JP2018128325A (ja) * 2017-02-07 2018-08-16 ナノフォトン株式会社 分光顕微鏡及び、及び分光観察方法
JP2019045625A (ja) * 2017-08-31 2019-03-22 国立大学法人北陸先端科学技術大学院大学 Ｓｈｇ顕微鏡及びｓｈｇ光を観察する方法
JP2021500558A (ja) * 2017-10-23 2021-01-07 ザ ユナイテッド ステイツ オブ アメリカ， アズ リプレゼンテッド バイ ザ セクレタリー， デパートメント オブ ヘルス アンド ヒューマン サービシーズ スペクトル散乱フローサイトメトリのための光学構成方法
JP2021016751A (ja) 2019-07-17 2021-02-15 有限会社トライ金型 冷却機能付小型容器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5870188A (en) * 1995-09-20 1999-02-09 Kyoto Dei-Ichi, Kagaku Co. Ltd. Measuring method and measuring apparatus by light scattering
JP2000074834A (ja) * 1998-08-31 2000-03-14 Hitachi Electronics Eng Co Ltd Ｄｎａ塩基配列決定装置
JP5337676B2 (ja) * 2009-06-25 2013-11-06 株式会社日立ハイテクノロジーズ 蛍光分析装置および蛍光検出装置
JP7158004B2 (ja) * 2018-08-31 2022-10-21 株式会社四国総合研究所 ガス濃度測定装置およびガス濃度連続測定方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006113021A (ja) * 2004-10-18 2006-04-27 Univ Waseda ラマン分光装置、及び分光装置
JP2009063462A (ja) * 2007-09-07 2009-03-26 Sony Corp 光学測定装置及び微粒子解析装置
JP2018128325A (ja) * 2017-02-07 2018-08-16 ナノフォトン株式会社 分光顕微鏡及び、及び分光観察方法
JP2019045625A (ja) * 2017-08-31 2019-03-22 国立大学法人北陸先端科学技術大学院大学 Ｓｈｇ顕微鏡及びｓｈｇ光を観察する方法
JP2021500558A (ja) * 2017-10-23 2021-01-07 ザ ユナイテッド ステイツ オブ アメリカ， アズ リプレゼンテッド バイ ザ セクレタリー， デパートメント オブ ヘルス アンド ヒューマン サービシーズ スペクトル散乱フローサイトメトリのための光学構成方法
JP2021016751A (ja) 2019-07-17 2021-02-15 有限会社トライ金型 冷却機能付小型容器

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ISHAN BARMANA KHAY MING TANBGAJENDRA PRATAP SINGHB: "Optical sectioning using single-plane-illumination Raman imaging", J. RAMAN SPECTROSC., vol. 41, 2010, pages 1099 - 1101
See also references of EP4290217A4

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