WO2022166629A1

WO2022166629A1 - Electron beam irradiation beam detection system and use method therefor

Info

Publication number: WO2022166629A1
Application number: PCT/CN2022/073360
Authority: WO
Inventors: 谷胜栋; 唐志宏
Original assignee: 湖州超群电子科技有限公司
Priority date: 2021-02-02
Filing date: 2022-01-24
Publication date: 2022-08-11
Also published as: CN114839665A

Abstract

An electron beam irradiation beam detection system and a use method therefor. The electron beam irradiation beam detection system comprises an electron emission module, a detection module (3), an acquisition module (8), and a data processing module (4); the electron emission module comprises an electron beam source (1) and a plurality of electrons (2); the detection module (3) comprises a magnetic circuit (5) and a coil (7). The electron beam source (1) emits the electrons (2) into the air, the electrons (2) are detected when passing through the detection module (3), then a signal is acquired by the acquisition module (8), and the acquisition module (8) transmits the signal to the data processing module (4) for data processing to obtain electron beam intensity, so as to obtain the amount of the electrons (2), thereby providing a good feedback condition for the whole system.

Description

A detection system for electron beam irradiation beam current and its use method

technical field

The invention relates to the technical field of electron beam irradiation, in particular to a detection system for electron beam irradiation beam current and a method for using the same.

Background technique

Due to the characteristics of interaction between electrons and matter, electron beams are more and more widely used in the fields of industrial irradiation, scientific research and disinfection and sterilization. The electron beam is generally obtained by heating the filament, forming a cloud of electrons around the filament, and then using an electric field to accelerate the electrons to be pulled out to form an electron beam. The interaction between electrons and matter is relatively strong, and the free path of electrons in the air is relatively short, so the whole process of the above-mentioned electron beam generation needs to be carried out in a high vacuum. For general applications, the electron beam needs to pass through a thin film window to the outside of the vacuum for application. The electron beam travels through the window from the vacuum to the air, where it travels a certain distance and finally reaches the surface of the object to be applied.

In the process of electron passing through the film, scattering will occur, the direction will change, and some will not hit the sample. Similarly, the electron beam will also scatter in the air, and in the process of using electron irradiation, it is necessary to Monitor the electronic dose at any time, so as to provide a good feedback condition for the whole system. In order to solve this problem, the present invention devises a method for detecting electron beam distribution.

SUMMARY OF THE INVENTION

Based on the technical problem that the electron dose needs to be monitored at any time when the electron beam propagates or passes through the thin film, the present invention provides a detection system for electron beam irradiation beam current and a method for using the same.

A detection system for electron beam irradiation beam current proposed by the present invention includes an electron emission module, a detection module, a collection module and a data processing module. The electron emission module includes an electron beam source and a plurality of electrons, and the detection module includes an electron beam source and a plurality of electrons. Magnetic circuits and coils.

Preferably, there are multiple detection modules, and the multiple detection modules form a current transformer group.

Preferably, the distribution areas of electrons ejected by the electron beam source include a first electron area, a second electron area, a third electron area, a fourth electron area, a fifth electron area, a sixth electron area, and a seventh electron area , the eighth electronic area, the ninth electronic area, and each electronic area is detected by the current transformer group.

Preferably, one of the first electron region, the second electron region, the third electron region, the fourth electron region, the fifth electron region, the sixth electron region, the seventh electron region, the eighth electron region and the ninth electron region distributed in a matrix.

Preferably, an electron beam source control module is arranged between the data processing module and the electron beam source, and a transmission channel is arranged between the electron beam source control module and the electron beam source.

A method for using an electron beam irradiation beam current detection system, which specifically includes the following steps:

S1: The electron beam source emits electrons into the air. When the electrons pass through the detection module, they are detected. The entire detection module is a current transformer. The transformer consists of a magnetic circuit and a coil. There is an induced current on it, the signal is collected by the acquisition module, and the acquisition module transmits the signal to the data processing module for data processing, so as to obtain the electron beam current intensity, and then obtain the electron dose.

S2: When the detection module detects electrons, the set current transformer group can obtain the first electronic area, the second electronic area, the third electronic area, the fourth electronic area, and the fifth electronic area through the control and statistics of the system. , the sixth electron region, the seventh electron region, the eighth electron region, and the ninth electron region, the electron beam current intensity of each region, and the beam current density distribution can be obtained through analysis, thereby obtaining the electron dose distribution.

S3: After the data processing module collects and analyzes the signal, the information is fed back to the electron beam source control module, and the electron beam source control module then controls the electron beam source’s efficiency of emitting electrons, thereby changing the electron beam irradiation time and dynamic response. Sample transport speed and irradiation requirements.

S4: When using the current transformer group control circuit, an automatic calibration program can be added, and automatic calibration is performed when the electron beam is turned off, so that the electron beam can accurately hit the sample.

Compared with the prior art, the present invention provides an electron beam irradiation beam current detection system and a method for using the same, which have the following beneficial effects:

1. The electron beam irradiation beam current detection system, the electron beam source emits electrons into the air, when the electrons pass through the detection module, they are detected, and then the signal is collected by the acquisition module, and the acquisition module transmits the signal to the data processing module. Data processing is performed to obtain the electron beam current intensity and then the electron dose, which can provide a good feedback condition for the whole system.

2. The electron beam irradiation beam current detection system includes a current transformer group of multiple current transformers. Through the control, statistics and analysis of the system, the electron beam current intensity of each electron area can be obtained, and further The beam current density distribution is obtained, and thus the dose distribution is obtained.

3. In this electron beam irradiation beam current detection system, after the data acquisition module collects and analyzes the information, it directly feeds back to the electron beam source control module, thereby changing the electron beam irradiation time and dynamically responding to the sample transmission speed and irradiation requirements. .

4. In the detection system of the electron beam irradiation beam current, an automatic calibration program can be added to the control circuit of the transformer. When the electron beam is turned off, the automatic calibration is performed, so that the electron beam can accurately hit the sample.

Description of drawings

1 is a system schematic diagram of a detection system for an electron beam irradiation beam current and a method for using the same proposed by the present invention;

2 is a schematic diagram of electron emission and analysis of a detection system for an electron beam irradiation beam current and a method of using the same proposed by the present invention;

3 is a schematic diagram of electron collection and processing of an electron beam irradiation beam current detection system and a method of use thereof proposed by the present invention;

4 is a schematic diagram of a current transformer group in Embodiment 2 of an electron beam irradiation beam current detection system and a method of using the same proposed by the present invention;

FIG. 5 is a schematic diagram of an electron beam source control module in Embodiment 3 of an electron beam irradiation beam current detection system and a method of using the same proposed by the present invention.

In the figure: 1. Electron beam source; 2. Electronics; 3. Detection module; 4. Data processing module; 5. Magnetic circuit; 7. Coil; 8. Acquisition module; 9. Current transformer group; 10. First electron region; 11, second electron region; 12, third electron region; 13, fourth electron region; 14, fifth electron region; 15, sixth electron region; 16, seventh electron region; 17, eighth electron region area; 18, ninth electron area; 19, electron beam source control module; 20, transmission channel.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments.

In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inside", " The orientation or positional relationship indicated by "outside" is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, so as to The specific orientation configuration and operation are therefore not to be construed as limitations of the present invention.

Example 1

1-3, a detection system for electron beam irradiation beam current includes an electron emission module, a detection module 3, an acquisition module 8 and a data processing module 4, and the electron emission module includes an electron beam source 1 and a plurality of electrons 2, The detection module includes a magnetic circuit 5 and a coil 7 .

S1: The electron beam source 1 emits electrons 2 into the air, and is detected when the electrons 2 pass through the detection system 3. The entire detection system 3 is a current transformer. The transformer consists of a magnetic circuit 5 and a coil 7. When the electrons 2 When passing through the transformer, there is an induced current on the coil 7, the signal is collected by the acquisition module 8, and the signal is transmitted to the data processing module 4 for data processing, thereby obtaining the electron beam current intensity, and then obtaining the electron dose.

Example 2

Referring to FIG. 4 , a detection system for electron beam irradiation beam current further includes a plurality of detection modules 3 provided, and a plurality of detection modules 3 are formed with a current transformer group 9 , and electrons 2 ejected by the electron beam source 1 are provided. The distributed areas include the first electron area 10, the second electron area 11, the third electron area 12, the fourth electron area 13, the fifth electron area 14, the sixth electron area 15, the seventh electron area 16, and the eighth electron area. 17. The ninth electronic area 18, and each electronic area is detected by the current transformer 9 group, the first electronic area 10, the second electronic area 11, the third electronic area 12, the fourth electronic area 13, the fifth electronic area The regions 14 , the sixth electron regions 15 , the seventh electron regions 16 , the eighth electron regions 17 , and the ninth electron regions 18 are distributed in a matrix.

In the first step, the current transformer group 9 and a plurality of electronic areas are also set. When the detection module 3 detects the electronic 2, the current transformer group 9 can obtain the first electronic area 10 through the control and statistics of the system. , the second electron area 11, the third electron area 12, the fourth electron area 13, the fifth electron area 14, the sixth electron area 15, the seventh electron area 16, the eighth electron area 17, and the ninth electron area 18. The electron beam current in each region is strong, and the beam current density distribution can be obtained through analysis, thereby obtaining the electron dose distribution.

Example 3

Referring to FIG. 5 , an electron beam irradiation beam current detection system further includes an electron beam source control module 19 disposed between the data processing module 4 and the electron beam source 1 , and the electron beam source control module 19 is connected to the electron beam source 1 . A transmission channel 20 is provided therebetween.

In the first step, an electron beam control module 19 is also set. After the data processing module 4 collects and analyzes the signal, the information is fed back to the electron beam source control module 19, and the electron beam source control module 19 controls the electron beam source. 1 The efficiency of emitting electrons 2, thereby changing the electron beam irradiation time, dynamically responds to the sample transport speed and irradiation demand. When using the current transformer group 9 to control the circuit, an automatic calibration program can be added, and automatic calibration is performed when the electron beam is turned off, so that the electron beam can accurately hit the sample.

The control method of the present invention is automatically controlled by the controller, and the control circuit of the controller can be realized by simple programming by those skilled in the art. The provision of power supply also belongs to the common knowledge in the art, and the present invention is mainly used to protect the mechanical device , so the present invention will not explain the control mode and circuit connection in detail.

The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. The equivalent replacement or change of the inventive concept thereof shall be included within the protection scope of the present invention.

Claims

A detection system for electron beam irradiation beam current, characterized in that it comprises an electron emission module, a detection module (3), a collection module (8) and a data processing module (4), wherein the electron emission module comprises an electron beam source ( 1) and a plurality of electrons (2), the detection module includes a magnetic circuit (5) and a coil (7).
A detection system for electron beam irradiation beam current according to claim 1, wherein a plurality of detection modules (3) are provided, and a plurality of detection modules (3) form a current transformer group (9).
A detection system for electron beam irradiation beam current according to claim 2, characterized in that, the distribution area of the electrons (2) ejected from the electron beam source (1) includes a first electron area (10), Second electron region (11), third electron region (12), fourth electron region (13), fifth electron region (14), sixth electron region (15), seventh electron region (16), eighth electron region An electronic zone (17), a ninth electronic zone (18), and each electronic zone is detected by a group of current transformers (9).
A detection system for electron beam irradiation beam current according to claim 3, characterized in that the first electron region (10), the second electron region (11), the third electron region (12), the first electron region (10), the second electron region (11), the The four electron region (13), the fifth electron region (14), the sixth electron region (15), the seventh electron region (16), the eighth electron region (17), and the ninth electron region (18) form a matrix distributed.
An electron beam irradiation beam current detection system according to claim 1, wherein an electron beam source control module (19) is arranged between the data processing module (4) and the electron beam source (1). , and a transmission channel (20) is arranged between the electron beam source control module (19) and the electron beam source (1).
A method of using a detection system for electron beam irradiation beam current according to claim 1, characterized in that it specifically comprises the following steps:

S1: The electron beam source (1) emits electrons (2) into the air, and is detected when the electrons (2) pass through the detection module (3), the entire detection module (3) is a current transformer, and the The circuit (5) is composed of the coil (7), when the electron (2) passes through the transformer, there is an induced current on the coil (7), the signal is collected by the acquisition module (8), and the acquisition module (8) then converts the signal It is transmitted to the data processing module (4) for data processing, thereby obtaining the electron beam current intensity, and then obtaining the electron dose.

S2: When the detection module (3) detects the electrons (2), the set current transformer group (9) can be obtained through the control and statistics of the system to obtain the first electronic area (10) and the second electronic area (11) , the third electron region (12), the fourth electron region (13), the fifth electron region (14), the sixth electron region (15), the seventh electron region (16), the eighth electron region (17), the The electron beam current in each region in the nine-electron region (18) is strong, and the beam current density distribution can be obtained through analysis, thereby obtaining the electron dose distribution.

S3: After the data processing module (4) collects and analyzes the signal, the information is fed back to the electron beam source control module (19), and the electron beam source control module (19) then controls the electron beam source (1) to emit electrons ( 2) The efficiency, thereby changing the electron beam irradiation time, dynamically responds to the sample transport speed and irradiation demand.

S4: When using the current transformer group (9) to control the circuit, an automatic calibration program can be added, and automatic calibration is performed when the electron beam is turned off, so that the electron beam can accurately hit the sample.