CN114834038A - Electron beam 3D printing system and using method thereof - Google Patents
Electron beam 3D printing system and using method thereof Download PDFInfo
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- CN114834038A CN114834038A CN202110143034.6A CN202110143034A CN114834038A CN 114834038 A CN114834038 A CN 114834038A CN 202110143034 A CN202110143034 A CN 202110143034A CN 114834038 A CN114834038 A CN 114834038A
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- 238000010894 electron beam technology Methods 0.000 title claims abstract description 98
- 238000010146 3D printing Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000002994 raw material Substances 0.000 claims abstract description 32
- 238000007639 printing Methods 0.000 claims abstract description 14
- 239000000843 powder Substances 0.000 claims abstract description 11
- 238000005507 spraying Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 230000002708 enhancing effect Effects 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000010923 batch production Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/105—Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/141—Processes of additive manufacturing using only solid materials
- B29C64/153—Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
- B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
- B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
Abstract
The invention belongs to the technical field of 3D printing, in particular to an electron beam 3D printing system and a using method thereof, and provides a scheme which comprises an electron emission module, an electron processing module, a powder spraying module and an operation module, wherein the electron emission module comprises an electron beam source, a cathode and electrons, aiming at the problems that the existing 3D printing equipment needs to put printing raw materials and the whole printing device into vacuum, the cost is high, and the volume is large. In the invention, a film through which an electron beam can penetrate is used for sealing vacuum, the electron beam is led out to the air, and then subsequent operation is carried out, so that harsh conditions that the electron beam 3D printing must be carried out in vacuum are avoided, then various electron beam sources, beam current and focusing modules can be flexibly arranged, the position and the size of a focus can be accurately controlled, high-precision beam current operation is easy to realize, the space is saved, and the method is very suitable for being installed on a production line for batch production.
Description
Technical Field
The invention relates to the technical field of 3D printing, in particular to an electron beam 3D printing system and a using method thereof.
Background
Due to the interaction characteristic of electrons and substances, electron beams are increasingly widely applied in the fields of industrial irradiation, scientific research, disinfection and sterilization and the like. The electron beam is typically obtained by heating a filament, forming a cloud of electrons around the filament, and then drawing the electrons out using electric field acceleration to form an electron beam. In recent years, electron beam 3D printing is also rapidly developed, and currently, electron beam 3D printing is mainly performed in two ways, one is to use powder to perform layer-by-layer processing and is suitable for printing relatively large workpieces, and the other is to make materials into threads and perform processing by using a direct hot melting stacking manner of electron beams, and is suitable for printing materials with relatively high requirements on precision.
However, because the free path of electrons in air is relatively short, the current apparatuses using these two principles for 3D printing need to put the printing raw material and the entire printing device into vacuum, which is relatively high in cost and large in volume, and therefore, there is a need to design an electron beam 3D printing system and a method for using the same to solve the above problems.
Disclosure of Invention
Based on the technical problems that printing raw materials and the whole printing device need to be placed in vacuum for existing 3D printing equipment, cost is high, and size is large, the invention provides an electron beam 3D printing system and a using method thereof.
The invention provides an electron beam 3D printing system which comprises an electron emission module, an electron processing module, a powder spraying module and an operation module, wherein the electron emission module comprises an electron beam source, a cathode and electrons, the electrons are emitted from the cathode of the electron beam source, the electron emission module is positioned in a vacuum environment, the electron processing module comprises a beam current and a focusing module, and the electron processing module is positioned between the electron emission module and the operation module.
Preferably, the operation module comprises a first raw material and an operation platform, and the first raw material is placed on the surface of the operation platform.
Preferably, the beam and focus module is located outside the vacuum environment, the beam and focus module is flexibly arranged in position, and the beam and focus module after the flexible step outputs processed electrons.
Preferably, the electron beam source is provided in plurality, and every two electron beam sources are arranged in an array.
Preferably, a grid control module is arranged outside the cathode of the electron beam source.
Preferably, the operating module is provided with a control module, and the control module is provided with a second raw material, and the second raw material is placed on the surface of the operating platform.
A use method of an electron beam 3D printing system specifically comprises the following steps:
s1: firstly, electrons are generated by a cathode at an electron beam source, the electrons are accelerated by an electric field, vacuum is emitted through a window on the electron beam source, a series of beam operation and focusing modules are arranged outside the window, the electrons obtain a required electron beam shape after passing through the beam operation and focusing modules, a first raw material needing 3D printing and located on an operation platform is subjected to thermal melting, so that 3D printing is carried out, the operation platform can drive the first raw material to move and lift, a product subjected to printing processing meets the required requirements, and a powder spraying module is used for spraying powder on the first raw material during printing.
S2: when 3D prints, the beam operation and the focusing module are installed outside vacuum, and by flexibly arranging the modules, the focus position and the focus size can be flexibly and accurately controlled, high-precision beam operation is easy to realize, and space is saved.
S3: when 3D printing is carried out, a plurality of electron beam sources can be used for enhancing the beam current density, every two electron beam sources are arranged, and the common use of the plurality of electron beam sources is realized by adopting a mode of facilitating vacuum external focusing.
S4: a grid control module is arranged outside the cathode to adjust the emission area, the cross section of an irradiation electron beam is controlled at high precision, the electron beam current can be controlled in a pulse mode, the energy density is controlled accurately, and 3D printing can be achieved on temperature sensitive materials.
S5: when 3D prints, the control module that sets up can produce filiform or flaky second raw and other materials, with second raw and other materials tiling on the operation platform surface, uses the electron beam to carry out the bombardment heating, and electron beam source changes voltage and electric current size along with the position removes, can produce the energy of different power and different energy density, prints the product of higher accuracy.
Compared with the prior art, the invention provides an electron beam 3D printing system and a using method thereof, and the electron beam 3D printing system has the following beneficial effects:
1. according to the electron beam 3D printing system and the using method thereof, a film which can be penetrated by an electron beam is used for sealing vacuum, the electron beam is led out to the air, and then subsequent operation is carried out, so that the harsh condition that the electron beam 3D printing must be carried out in vacuum is avoided, and because the vacuum environment is avoided, various electron beam sources, beam current and focusing modules can be flexibly arranged, the focus position and the focus size can be accurately controlled, high-precision beam current operation is easy to realize, the space is saved, and the electron beam 3D printing system is very suitable for being installed on a production line for batch production.
2. According to the electron beam 3D printing system and the using method thereof, the grid control is increased through the arranged grid control module, the emission area is adjusted, and the cross section of the irradiated electron beam is controlled at high precision. And the beam current can be controlled in a pulse mode, the energy density can be accurately controlled, and 3D printing can be achieved on temperature sensitive materials.
3. According to the electron beam 3D printing system and the using method thereof, in the whole electron beam 3D printing process, the voltage can be freely controlled and adjusted, and the voltage, the current intensity and the irradiation area can be finely controlled according to the type of the material and the size of the material.
4. The electron beam 3D printing system and the using method thereof are changed, the arranged control module can generate a second raw material in a filamentous or flaky shape, the second raw material is flatly laid on the surface of the operation platform, the electron beam is used for bombardment heating, the electron beam source changes the voltage and the current along with the position movement, the energy with different powers and different energy densities can be generated, and products with higher precision can be printed.
Drawings
FIG. 1 is a system diagram of an electron beam 3D printing system and a method for using the same according to the present invention;
FIG. 2 is a general schematic diagram of an electron beam 3D printing system and a method for using the same according to the present invention;
fig. 3 is a schematic view of a beam current and focusing module of an electron beam 3D printing system and a method for using the same according to the present invention;
FIG. 4 is a schematic diagram of various electron beam sources of an electron beam 3D printing system and a method for using the same according to the present invention;
FIG. 5 is a schematic diagram of a gate control module of an electron beam 3D printing system and a method for using the same according to the present invention;
fig. 6 is a general schematic diagram of an embodiment 2 of an electron beam 3D printing system and a method for using the same according to the present invention.
In the figure: 1. an electron beam source; 2. a cathode; 3. electrons; 4. a beam and focus module; 5. a powder spraying module; 6. a first raw material; 7. an operating platform; 8. a control module; 9. a second raw material; 10. processing the electrons; 11. and a gate control module.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Example 1
Referring to fig. 1-5, an electron beam 3D printing system includes an electron emission module including an electron beam source 1, a cathode 2, and electrons 3, the electrons 3 being emitted from the cathode 2 of the electron beam source 1, an electron processing module including a beam current and focusing module 4, an electron spraying module 5, and an operation module, the electron emission module being located inside a vacuum environment, the electron processing module being located between the electron emission module and the operation module.
In the invention, the operation module comprises a first raw material 6 and an operation platform 7, and the first raw material 6 is placed on the surface of the operation platform 7.
In the invention, the beam and focusing module 4 is positioned outside the vacuum environment, the beam and focusing module 4 is flexibly arranged, and the processed electrons 10 are output by the beam and focusing module 4 after the flexible step.
In the present invention, the electron beam source 1 is provided in plural, and every two electron beam sources 1 are arranged one by one.
In the present invention, a gate control module 11 is provided outside the cathode 2 of the electron beam source 1.
A use method of an electron beam 3D printing system specifically comprises the following steps:
s1: firstly, electrons 3 are generated by a cathode 2 at an electron beam source 1, the electrons 3 are accelerated through an electric field, vacuum is emitted through a window on the electron beam source 1, a series of beam operation and focusing modules 4 are arranged outside the window, the electrons obtain a required electron beam shape after passing through the beam operation and focusing modules 4, a first raw material 6 which needs to be printed in a 3D mode and is positioned on an operation platform 7 is subjected to thermal melting, so that 3D printing is conducted, the operation platform 7 can drive the first raw material 6 to move and lift, a product which is processed by printing meets the required requirement, and the powder spraying module 5 conducts powder spraying on the first raw material 6 during printing.
S2: when 3D prints, the beam operation and focusing module 4 is installed outside the vacuum, and by flexibly arranging these modules, the focus position and focus size can be flexibly and accurately controlled, high-precision beam operation is easily realized, and space is saved.
S3: when 3D printing is carried out, a plurality of electron beam sources 1 can be used for enhancing the beam density, every two electron beam sources 1 are arranged, and the common use of the plurality of electron beam sources is realized by adopting a mode which is convenient for vacuum external focusing.
S4: a grid control module 11 is arranged outside the cathode 2, so that the emission area is adjusted, the cross section of an irradiation electron beam is controlled at high precision, the electron beam current can be controlled in a pulse mode, the precise control of energy density is realized, and 3D printing can be realized on temperature sensitive materials.
Example 2
Referring to fig. 6, the electron beam 3D printing system further includes an operation module provided with a control module 8, the control module 8 is provided with a second raw material 9, and the second raw material 9 is placed on the surface of the operation platform 7.
A use method of an electron beam 3D printing system specifically comprises the following steps:
in the first step, a control module 8 is further arranged in the operation module, the control module 8 can generate a second raw material 9 in a filiform or sheet shape, the second raw material 9 is flatly laid on the surface of the operation platform 7, electron beams are used for bombardment heating, the electron beam source 1 changes the voltage and the current along with the position movement, energy with different powers and different energy densities can be generated, and products with higher precision can be printed.
The control mode of the invention is automatically controlled by the controller, the control circuit of the controller can be realized by simple programming of a person skilled in the art, the supply of the power supply also belongs to the common knowledge in the field, and the invention is mainly used for protecting mechanical devices, so the control mode and the circuit connection are not explained in detail in the invention.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (7)
1. An electron beam 3D printing system, comprising an electron emission module, an electron processing module, a powder injection module (5) and an operation module, wherein the electron emission module comprises an electron beam source (1), a cathode (2) and electrons (3), the electrons (3) are emitted from the cathode (2) of the electron beam source (1), the electron emission module is located inside a vacuum environment, the electron processing module comprises a beam current and a focusing module (4), and the electron processing module is located between the electron emission module and the operation module.
2. An electron beam 3D printing system according to claim 1, characterized in that the handling module comprises a first raw material (6) and a handling platform (7), and the first raw material (6) is placed on the surface of the handling platform (7).
3. An electron beam 3D printing system according to claim 1, characterized in that the beam and focus module (4) is located outside the vacuum environment, the beam and focus module (4) is flexibly arranged in position, and the beam and focus module (4) after the flexible step is output with processed electrons (10).
4. An electron beam 3D printing system according to claim 1, characterized in that said electron beam source (1) is provided in plurality, and that every two electron beam sources (1) are arranged one by one.
5. An electron beam 3D printing system according to claim 1, characterized in that the cathode (2) of the electron beam source (1) is externally provided with a grid control module (11).
6. An electron beam 3D printing system according to claim 1, characterized in that the handling module is provided with a control module (8), and the control module (8) is provided with a second raw material (9), the second raw material (9) being placed on the surface of the handling platform (7).
7. The use method of the electron beam 3D printing system is characterized by comprising the following steps:
s1: firstly, a cathode (2) at an electron beam source (1) generates electrons (3), the electrons (3) are accelerated through an electric field, vacuum is emitted through a window on the electron beam source (1), a series of beam operation and focusing modules (4) are arranged outside the window, the electrons obtain a required electron beam shape after passing through the beam operation and focusing modules (4), a first raw material (6) which needs 3D printing and is positioned on an operation platform (7) is subjected to thermal melting, so that 3D printing is carried out, the operation platform (7) can drive the first raw material (6) to move and lift, products subjected to printing processing meet the required requirements, and a powder spraying module (5) sprays powder to the first raw material (6) during printing.
S2: when 3D prints, the beam operation and focusing module (4) are installed outside vacuum, and by flexibly arranging the modules, the focus position and the focus size can be flexibly and accurately controlled, high-precision beam operation is easy to realize, and space is saved.
S3: when 3D printing is carried out, a plurality of electron beam sources (1) can be used for enhancing the beam current density, every two electron beam sources (1) are arranged one by one, and the common use of the plurality of electron beam sources is realized by adopting a mode of facilitating vacuum external focusing.
S4: a grid control module (11) is arranged outside the cathode (2), the emission area is adjusted, the cross section of an irradiation electron beam is controlled in a high-precision mode, the electron beam current can be controlled in a pulse mode, accurate control of energy density is achieved, and 3D printing can be achieved on temperature sensitive materials.
S5: during 3D printing, the arranged control module (8) can generate a second raw material (9) in a filiform or sheet shape, the second raw material (9) is flatly laid on the surface of the operation platform (7), electron beams are used for bombardment heating, the electron beam source (1) changes the voltage and the current along with position movement, energy with different powers and different energy densities can be generated, and products with higher precision can be printed.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110143034.6A CN114834038A (en) | 2021-02-02 | 2021-02-02 | Electron beam 3D printing system and using method thereof |
| PCT/CN2022/073368 WO2022166631A1 (en) | 2021-02-02 | 2022-01-24 | Electron beam 3d printing system and method of use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110143034.6A CN114834038A (en) | 2021-02-02 | 2021-02-02 | Electron beam 3D printing system and using method thereof |
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| CN114834038A true CN114834038A (en) | 2022-08-02 |
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| CN202110143034.6A Pending CN114834038A (en) | 2021-02-02 | 2021-02-02 | Electron beam 3D printing system and using method thereof |
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| WO (1) | WO2022166631A1 (en) |
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| CN116619748B (en) * | 2023-05-30 | 2024-05-14 | 南方科技大学 | 3D printing device and 3D printing method |
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| US20170173690A1 (en) * | 2015-12-22 | 2017-06-22 | Sodick Co., Ltd. | Three dimensional printer |
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| CN110508918A (en) * | 2019-09-06 | 2019-11-29 | 中国航空制造技术研究院 | A kind of electron beam increases fuse material manufacturing device and method |
| CN110838427B (en) * | 2019-11-20 | 2022-04-29 | 中国航空制造技术研究院 | Electronic gun device for fuse wire additive manufacturing |
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- 2021-02-02 CN CN202110143034.6A patent/CN114834038A/en active Pending
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- 2022-01-24 WO PCT/CN2022/073368 patent/WO2022166631A1/en active Application Filing
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| CN105813827A (en) * | 2013-12-16 | 2016-07-27 | 阿卡姆股份公司 | Control of additive manufacturing methof for forming three-dimensional articles using two control modes |
| US20170173690A1 (en) * | 2015-12-22 | 2017-06-22 | Sodick Co., Ltd. | Three dimensional printer |
| CN105711104A (en) * | 2016-05-10 | 2016-06-29 | 大族激光科技产业集团股份有限公司 | Laser 3d printing system and printing method thereof |
| US20180169784A1 (en) * | 2016-12-21 | 2018-06-21 | Arcam Ab | Additive manufacturing of three-dimensional articles |
| WO2019070034A1 (en) * | 2017-10-06 | 2019-04-11 | 株式会社Ihi | Three-dimensional laminate shaped article manufacturing device and three-dimensional laminate shaped article manufacturing method |
| CN109686642A (en) * | 2017-10-19 | 2019-04-26 | 爱德万测试株式会社 | Three-dimensional lamination arthroplasty devices and lamination shaping method |
| CN111512410A (en) * | 2017-12-22 | 2020-08-07 | 阿尔卡姆公司 | Enhanced electron beam generation |
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| WO2022166631A1 (en) | 2022-08-11 |
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