WO2022163779A1 - 気泡率センサ、これを用いた流量計および極低温液体移送管 - Google Patents
気泡率センサ、これを用いた流量計および極低温液体移送管 Download PDFInfo
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- WO2022163779A1 WO2022163779A1 PCT/JP2022/003170 JP2022003170W WO2022163779A1 WO 2022163779 A1 WO2022163779 A1 WO 2022163779A1 JP 2022003170 W JP2022003170 W JP 2022003170W WO 2022163779 A1 WO2022163779 A1 WO 2022163779A1
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- electrode
- sensor according
- porosity
- insulating tube
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
- G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/74—Devices for measuring flow of a fluid or flow of a fluent solid material in suspension in another fluid
Definitions
- the present disclosure relates to a void fraction sensor for measuring the void fraction of a cryogenic liquid such as liquid hydrogen, a flow meter using the void fraction sensor, and a cryogenic liquid transfer pipe.
- liquid hydrogen has a high volumetric efficiency and can be stored for a long period of time, so various techniques for its utilization have been developed.
- a method for accurately measuring the flow rate, which is necessary when handling a large amount of liquid hydrogen has not been established industrially. The main reason for this is that liquid hydrogen is highly vaporizable and is a fluid with a large change in gas/liquid ratio.
- liquid hydrogen is a liquid with an extremely low temperature (boiling point of -253°C), has a very high thermal conductivity, and has a low latent heat. Therefore, the liquid hydrogen becomes a so-called two-phase flow in which gas and liquid are mixed in the transfer piping. Therefore, since the content ratio of bubbles varies greatly, the flow rate of liquid hydrogen flowing through a pipe cannot be accurately determined by simply measuring the flow velocity, as is the case with ordinary liquids.
- Non-Patent Document 1 proposes a capacitance type void fraction sensor that measures capacitance using a pair of electrodes.
- a porosity sensor of the present disclosure includes an insulating tube having a through hole for flowing a cryogenic liquid, and a pair of planar electrodes attached to the outer wall surface of the insulating tube.
- the insulating tube has an electrode mounting portion in which the distance D1 between the inner wall surfaces of the electrodes in the direction perpendicular to the electrode surfaces is shorter than the distance D2 between the inner wall surfaces of the electrodes in the direction parallel to the electrode surfaces.
- a flow meter of the present disclosure measures the flow rate of a cryogenic liquid flowing through a through-hole, and includes the above-described porosity sensor and a current meter that measures the flow velocity of the cryogenic liquid flowing through the through-hole. .
- the present disclosure provides a cryogenic liquid transfer tube with the above flow meter.
- FIG. 1 is a schematic perspective view of a porosity sensor according to an embodiment of the present disclosure
- FIG. FIG. 2 is a schematic perspective view showing a vertical fracture surface of the porosity sensor shown in FIG. 1
- FIG. 2 is a schematic perspective view showing a horizontal fracture surface of the porosity sensor shown in FIG. 1
- 2 is a vertical sectional view of the porosity sensor shown in FIG. 1
- FIG. 2 is a horizontal sectional view of the porosity sensor shown in FIG. 1
- FIG. FIG. 2 is a cross-sectional view taken along line IV-IV of the porosity sensor shown in FIG. 1
- FIG. 2 is a cross-sectional view of the void content sensor shown in FIG. 1 taken along line V-V;
- FIG. 2 is a sectional view taken along the line VI-VI of the porosity sensor shown in FIG. 1;
- FIG. 4 is a schematic perspective view of the porosity sensor in a state in which bundles are attached to the outer peripheral surfaces of the inflow port and the outflow port of the insulating tube, respectively;
- 2 is a schematic perspective view showing a state in which the porosity sensor shown in FIG. 1 is accommodated in a housing;
- FIG. 11 is a schematic perspective view showing a vertical fracture surface of the porosity sensor and housing shown in FIG. 10;
- FIG. 12 is a schematic perspective view showing a horizontal fracture surface of the porosity sensor and housing shown in FIG. 11;
- FIG. FIG. 6 is a vertical sectional view showing a modification of the porosity sensor shown in FIGS.
- FIG. 10 is a schematic perspective view of a porosity sensor according to another embodiment of the present disclosure
- 15 is a schematic perspective view showing a vertical fracture surface of the porosity sensor shown in FIG. 14
- FIG. 15 is a schematic perspective view showing a horizontal fracture surface of the porosity sensor shown in FIG. 14
- FIG. 10 is a schematic perspective view of a porosity sensor according to another embodiment of the present disclosure
- 15 is a schematic perspective view showing a vertical fracture surface of the porosity sensor shown in FIG. 14
- FIG. 15 is a schematic perspective view showing a horizontal fracture surface of the porosity sensor shown in FIG. 14
- FIG. 1 is a perspective view showing a porosity sensor 1 according to an embodiment of the present disclosure
- FIGS. 2 and 3 are a schematic perspective view showing a vertical fracture surface and a schematic perspective view showing a horizontal fracture surface of the porosity sensor 1.
- the porosity sensor 1 comprises an insulating tube 2 having a through hole 3 for flowing a cryogenic liquid, and a pair of planar electrodes 4 attached to the outer wall surface of the insulating tube 2 . , 4.
- the insulating tube 2 is formed by stacking two half-shaped insulating tube members 21, 21 on each other.
- the insulating tube 2 has a pair of recesses 6 , 6 that open in a direction perpendicular to the axis of the through hole 3 .
- a pair of electrodes 4, 4 are mounted on the bottom surfaces of recesses 6, 6 provided in the insulating tube 2, respectively, and face each other (see FIG. 2).
- a conductive pin 7 is individually connected to each electrode 4 .
- An airtight terminal 8 is attached to the conducting pin 7 . The airtight terminal 8 will be described later.
- the insulating tube 2 is formed with the recesses 6, 6 as described above, the distance between the electrodes 4, 4 attached to the bottom surfaces of these recesses 6, 6 is narrow. As a result, the capacitance accumulated between the electrodes 4, 4 is increased, and the measurement accuracy of the bubble ratio of the cryogenic liquid flowing through the through hole 3 can be improved.
- the positions of the electrodes 4, 4 and the area of the electrode surface 41 can be set to obtain optimum measurement accuracy.
- the electrode surfaces 41, 41 refer to the surfaces on which the electrodes 4, 4 are attached to the bottom surfaces of the recesses 6, 6. As shown in FIG.
- the distance D1 between the inner wall surfaces 3a, 3a in the electrode mounting portion 5 means the shortest distance
- the distance D2 between the inner wall surfaces 3b, 3b means the longest distance.
- the distances D1 and D2 can be appropriately determined according to the supply amount of the cryogenic liquid, the measurement accuracy of the bubble ratio, etc., and are not particularly limited.
- the length is 10% or more, preferably 20% or more, and 67% or less, preferably 50% or less. Therefore, at least the shape of the through hole 3 in the cross section perpendicular to the axial center of the through hole 3 in the electrode mounting portion 5 is preferably elliptical or rectangular.
- the electrode mounting portion 5 refers to a portion to which the electrodes 4, 4 are mounted.
- the insulating tube 2 is smooth in the vertical cross-section in the direction perpendicular to the electrode surfaces 41, 41 from the circular inlet 31 and outlet 32 of the cryogenic liquid to the end of the parallel region E2, respectively. , the distance between the inner wall surfaces 3a, 3a gradually decreases.
- the insulating tube 2 has an inner wall surface 3b, an inner wall surface 3b, and an inner wall surface 3b toward an inlet 31 and an outlet 32 of the through hole 3 from a parallel region E2 in a horizontal cross section in a direction parallel to the electrode surfaces 41, 41, as shown in FIG. The distance between 3b increases smoothly.
- the inner wall surfaces 3a, 3a of the through hole 3 are parallel to each other, and the distance D1 is the minimum. Moreover, the inner wall surfaces 3b, 3b of the through hole 3 are parallel to each other, and the distance D2 is the maximum.
- the parallel region E2 includes the electrode mounting region E1 (that is, the electrode mounting portion 5), and the electrode mounting region E1 is preferably located substantially in the center of the parallel region E2.
- the distance between the inner wall surfaces 3a, 3a smoothly increases from the parallel region E2 toward the inlet 31 and the outlet 32 of the through hole 3. Therefore, stress concentration is less likely to occur on the inner wall surfaces 3a and 3a than in the case where the distance between the inner wall surfaces 3a and 3a increases stepwise toward the inlet 31 and the outlet 32, and it can be used for a long period of time. be able to.
- the distance between the inner wall surfaces 3b, 3b smoothly decreases from the parallel region E2 toward the inlet 31 and the outlet 32 of the through hole 3.
- the length of the parallel region E2 is 105% or more, preferably 150% or more, and preferably 5000% or less of the length of the electrode region E1.
- At least one of the inner wall surfaces 3a, 3a does not have the parallel region E2, and the distance D1 between them is continuous from the inlet 31 and the outlet 32 toward the electrode mounting portion 5. It may be curved so as to be substantially smaller.
- the direction of curvature of the inner wall surfaces 3a, 3a is preferably concave when viewed from the axis of the through hole 3.
- at least one of the inner wall surfaces 3b, 3b does not have a parallel region E2, and the distance D2 between them is from the inlet 31 and the outlet 32 toward the electrode mounting portion 5. You may curve so that it may become large continuously.
- the direction of curvature of the inner wall surfaces 3 b , 3 b may be convex when viewed from the axis of the through hole 3 .
- FIGS. 6 to 8 show how the shape of the through hole 3 changes sequentially from the inlet 31 of the through hole 3 toward the electrode mounting portion 5.
- FIG. Each through hole 3 shown in FIGS. 6 to 8 has the same cross-sectional area perpendicular to the axis of the through hole 3 . Thereby, the supply amount of the cryogenic liquid can be maintained without dropping.
- the insulating tube 2 in this embodiment is formed by stacking two half-shaped insulating tube members 21, 21 on each other. Then, as shown in FIG. 9, an annular binding member 9 is mounted on the outer peripheral surfaces of the inlet and outlet of the insulating tube 2 to integrally join the half-split insulating tube members 21 and 21 together.
- the insulating tube members 21, 21 may be bound with the binding body 9 without using the joining material. Alternatively, instead of the binding body 9 or together with the binding body 9, the joining surfaces of the insulating tube members 21, 21 may be joined with a sealing material that is stable against the cryogenic liquid flowing through the insulating tube 2. .
- FIG. 10 shows a state in which the bubble rate sensor 1 is accommodated in the housing 10.
- the porosity sensor 1 is surrounded by a housing 10 .
- FIG. 11 which is a schematic perspective view showing a vertical fracture surface of the housing 10, and FIG. and a lid portion 102 that seals the opening of the frame portion 101 .
- the porosity sensor 1 in which the insulating tube members 21 and 21 shown in FIG. 9 are bound by the binding member 9 is accommodated in the frame portion 101, and then the frame portion 101 and the lid portion 102 are joined by welding or brazing.
- a first connecting pipe 11 and a second connecting pipe 12 are connected to both end openings (inflow port 31 and outflow port 32) of the through hole 3 of the porosity sensor 1, respectively.
- the first connection pipe 11 is inserted through the inlet 31 and joined to the lid portion 102 at its outer peripheral surface by welding or brazing.
- the second connection pipe 12 is formed integrally with the frame portion 101 , it may be joined to the frame portion 101 like the lid portion 102 .
- An insertion hole 13 is formed in the frame portion 101 of the housing 10 .
- An airtight terminal 8 is attached to the insertion hole 13 , and a conductive pin 7 that is individually connected to the electrode 4 is fixed in the insertion hole 13 .
- the housing 10 is provided with a vacuum exhaust valve 14 (e.g., a needle valve for evacuation) to form a vacuum space 15 (insulating layer) between the bubble ratio sensor 1 and the housing 10.
- a vacuum exhaust valve 14 e.g., a needle valve for evacuation
- the vacuum space 15 is positioned on the outer peripheral side of the bubble rate sensor 1 in this manner, heat insulating performance for the bubble rate sensor 1 is ensured.
- the airtight terminal 8 suppresses leakage of the cryogenic liquid from the bubble ratio sensor 1 to the outside, the measurement accuracy of the bubble ratio is further improved.
- a first connection pipe 11 having a supply hole on the inlet 31 side of the through hole 3 is connected to the insulating pipe 2, and the through hole 3 is cut perpendicular to the axis of the through hole 3.
- the area is preferably 90% or more and 110% or less of the cross-sectional area of the supply hole perpendicular to the axis of the supply hole.
- a second connecting pipe 12 having a discharge hole on the outflow port 32 side of the through hole 3 is connected to the insulating pipe 2, and the cross-sectional area of the through hole 3 perpendicular to the axis of the through hole 3 is the axis of the discharge hole. It is preferably 90% or more and 110% or less of the cross-sectional area of the discharge hole perpendicular to the core. This suppresses an increase in pressure loss. As a result, the generation of air bubbles can be suppressed, so that the measurement accuracy of the air bubble ratio of the cryogenic liquid can be improved.
- a frame portion 101 and a lid portion 102 that constitute the housing 10 are made of metal or ceramics.
- the first connecting pipe 11 and the second connecting pipe 12 are preferably metal pipes.
- the frame body part 101 is preferably made of ceramics such as silicon nitride, sialon, etc., such as austenitic stainless steel (eg, SUS316L) having a nickel content of 10.4% by mass or more, for example. good.
- the lid portion 102 is preferably made of, for example, a Fernico-based alloy, Fe--Ni alloy, Fe--Ni--Cr--Ti--Al alloy, Fe--Cr--Al alloy, Fe--Co--Cr alloy, or the like.
- the inner diameter of the frame body part 101 is preferably 1 mm or more with respect to the outer diameter of the insulating tube 2, preferably 10 mm or more with respect to the outer diameter of the insulating tube 2, in order to obtain sufficient heat insulation performance. It should be 200 mm or less, preferably 100 mm or less relative to the outer diameter of the tube 2 .
- the lid portion 102 is airtightly joined to the outer peripheral surface of the insulating tube 2 by brazing.
- the electrodes 4, 4 can be made of, for example, copper foil, aluminum foil, or the like. In order to form the electrode 4 on the bottom surface of each concave portion 6, for example, a vacuum vapor deposition method, a metallizing method, or an active metal method can be used. Also, a metal plate to be the electrode 4 may be adhered to the bottom surface of the recess 6 .
- the thickness of the electrodes 4, 4 should be 10 ⁇ m or more, preferably 20 ⁇ m or more, and 2 mm or less, preferably 1 mm or less.
- the insulating tube 2 is made of ceramics mainly composed of, for example, zirconia, alumina, sapphire, aluminum nitride, silicon nitride, sialon, cordierite, mullite, yttria, silicon carbide, cermet, ⁇ -eucryptite, and the like.
- the ceramics are ceramics containing alumina as a main component, the ceramics may contain silicon, calcium, magnesium, sodium or the like as oxides.
- the main component in ceramics refers to a component that accounts for 60% by mass or more of the total 100% by mass of the components that make up the ceramics.
- the main component is preferably a component that accounts for 95% by mass or more of the total 100% by mass of the components that constitute the ceramics.
- Components constituting the ceramics may be determined using an X-ray diffractometer (XRD). After identifying the component, the content of each component is determined using an X-ray fluorescence spectrometer (XRF) or an ICP emission spectrometer, and the content of the elements that make up the component is determined, and converted to the identified component. good.
- XRD X-ray diffractometer
- the insulating tube 2 is preferably made of low thermal expansion ceramics.
- the low thermal expansion ceramics are ceramics having a coefficient of linear expansion of 0 ⁇ 20 ppb/K or less at 22° C., where the temperature range for measuring the coefficient of linear expansion is 0° C. to 50° C. Since low thermal expansion ceramics have a low coefficient of linear expansion, they are less likely to break even if they are subjected to thermal shock by a cryogenic liquid containing a cryogenic liquid.
- the coefficient of linear expansion of the low thermal expansion ceramics may be obtained by using, for example, an optical heterodyne one-path interferometer.
- the low-thermal-expansion ceramic preferably contains cordierite as the main crystal phase, alumina, mullite and sapphirine as sub-crystal phases, and an amorphous phase containing Ca as the grain boundary phase.
- the crystal phase ratio of the main crystal phase is 95% by mass or more and 97.5% by mass or less
- the crystal phase ratio of the secondary crystal phase is 2.5% by mass or more and 5% by mass or less
- the Ca content relative to the total amount is It is preferably not less than 0.4% by mass and not more than 0.6% by mass in terms of CaO, and further includes zirconia, and the content of zirconia in the total amount is preferably not less than 0.1% by mass and not more than 1.0% by mass.
- the low-thermal-expansion ceramic does not easily expand and contract, so it can be used for a long period of time.
- low thermal expansion ceramics for example, those described in Japanese Patent No. 5430389 can be employed.
- the ceramics constituting the insulating tube 2 should preferably have a dielectric constant of 11 or less in the operating temperature range. Since the cryogenic liquid has a low relative dielectric constant, when the relative dielectric constant of the ceramics is small, the relative dielectric constant of the ceramic becomes close to that of the cryogenic liquid, and the high frequency characteristics are improved. In particular, when it is 11 or less, it is possible to further improve the measurement accuracy of the porosity of the cryogenic liquid.
- the operating temperature range refers to the temperature range during transfer of the cryogenic liquid.
- the insulating tube 2 may be made of ceramics containing silicon nitride or sialon as a main component. These ceramics have high mechanical strength and high thermal shock resistance, so that they are less likely to break even when subjected to thermal shock.
- the ceramics contain calcium oxide, aluminum oxide and oxides of rare earth elements, and contain calcium oxide and aluminum oxide with respect to a total of 100% by mass of calcium oxide, aluminum oxide and oxides of rare earth elements. The amount is 0.3% by mass or more and 1.5% by mass or less, 14.2% by mass or more and 48.8% by mass or less, and the balance is the oxide of the rare earth element.
- Such ceramics for example, those described in Japanese Patent No. 5430389 can be employed.
- the arithmetic mean roughness Ra in the roughness curve of the inner wall surfaces 3a and 3b in the direction parallel to the axis of the through hole 3 is preferably 0.2 ⁇ m or less.
- the arithmetic mean roughness Ra in the roughness curve of the inner wall surfaces 3a, 3b is 0.2 ⁇ m or less, the flow resistance of the cryogenic liquid caused by the inner wall surfaces 3a, 3b is suppressed, so that the flow velocity of the cryogenic liquid is reduced. Distribution stabilizes. That is, since variations in the flow velocity are suppressed, it is possible to improve the measurement accuracy of the bubble ratio of the cryogenic liquid.
- Arithmetic mean roughness Ra conforms to JIS B 0601: 2001 and can be measured using a laser microscope (manufactured by Keyence Corporation, ultra-depth color 3D shape measuring microscope (VK-X1000 or its successor model)).
- the illumination method is coaxial illumination
- the measurement magnification is 240 times
- the cutoff value ⁇ s is absent
- the cutoff value ⁇ c is 0.08 mm
- the end effect is corrected
- the measurement range is 1425 ⁇ m ⁇ 1067 ⁇ m.
- Line roughness may be measured by drawing four lines to be measured in the measurement range at approximately equal intervals. The length of one line to be measured is 1280 ⁇ m.
- the relative density of ceramics is, for example, 92% or more and 99.9% or less.
- the relative density is expressed as a percentage (proportion) of the apparent density of the ceramics determined according to JIS R 1634-1998 with respect to the theoretical density of the ceramics.
- the insulating tube 2 is made of ceramics having a plurality of closed pores, and the value obtained by subtracting the average circle equivalent diameter of the closed pores from the average distance between the centers of gravity of adjacent closed pores interval) may be 8 ⁇ m or more and 18 ⁇ m. Closed pores are independent of each other. When the interval between closed pores is 8 ⁇ m or more, the closed pores exist in a relatively dispersed state, resulting in high mechanical strength. On the other hand, when the interval between closed pores is 18 ⁇ m or less, even if microcracks originating from the outline of closed pores are generated due to repeated thermal shocks, there is a high probability that the expansion of the microcracks will be blocked by the surrounding closed pores. Become. Therefore, the insulating tube 2 can be used for a long period of time when the distance between the closed pores is 8 ⁇ m or more and 18 ⁇ m or less.
- the skewness of the equivalent circle diameter of closed pores may be greater than the skewness of the distance between the centers of gravity of closed pores.
- the skewness Sk is an index (statistic) indicating how much the distribution is skewed from the normal distribution, that is, the symmetry of the distribution.
- the skewness is greater than 0, the tail of the distribution is on the right side.
- the distribution is symmetrical, and when the skewness is less than 0, the tail of the distribution tends to the left.
- the skewness of the equivalent circle diameter of closed pores is greater than the skewness of the distance between the centroids of closed pores.
- the mode is positioned to the left (zero side) of the mode of the distance between centroids. That is, there are many closed pores with a small equivalent circle diameter, and these closed pores are present more sparsely, so that a ceramic member having both mechanical strength and thermal shock resistance can be obtained.
- the skewness of the equivalent circle diameter of the closed pores is 1 or more, and the skewness of the distance between the centroids of the closed pores is 0.7 or less.
- the difference between the skewness of the equivalent circle diameter of the closed pores and the skewness of the distance between the centers of gravity of the closed pores is 0.3 or more.
- diamond abrasive grains having an average particle diameter D50 of 3 ⁇ m are used to grind a copper disk. Polish with Thereafter, by polishing with a tin plate using diamond abrasive grains having an average particle diameter D50 of 0.5 ⁇ m, a polished surface having an arithmetic mean roughness (Ra) of 0.2 ⁇ m or less in the roughness curve is obtained.
- the arithmetic mean roughness Ra of the polished surface is the same as the measurement method described above.
- the polished surface was observed at a magnification of 200 times, and an average range was selected, for example, an area of 7.2 ⁇ 10 4 ⁇ m 2 (horizontal length of 310 ⁇ m, vertical length of 233 ⁇ m).
- An observation image is obtained by photographing a certain range with a CCD camera. Using this observation image as an object, the distance between the centers of gravity of the closed pores was measured using the image analysis software "Azo-kun (ver 2.52)" (registered trademark, manufactured by Asahi Kasei Engineering Co., Ltd.). Find the distance.
- the image analysis software is described as "Azo-kun", it indicates the image analysis software manufactured by Asahi Kasei Engineering Corporation.
- the setting conditions for this method are, for example, a threshold of 165, which is an index indicating the brightness of an image, a dark brightness, a small figure removal area of 1 ⁇ m 2 , and no noise removal filter.
- the threshold may be adjusted according to the brightness of the observation image, and the brightness is darkened, the binarization method is manual, the small figure removal area is 1 ⁇ m 2 , and the noise removal filter is provided.
- the threshold may be adjusted so that the marker appearing in the observed image matches the shape of the closed pore.
- the equivalent circle diameter of closed pores can be obtained by obtaining the equivalent circle diameter of open pores using the above observed image as a target by a technique called particle analysis.
- the setting conditions may be the same as the setting conditions used to obtain the distance between the centers of gravity of closed pores.
- the circle-equivalent diameter of closed pores and the skewness of the center-to-center distance may be obtained using the function Skew provided in Excel (registered trademark, Microsoft Corporation).
- An example of a method for manufacturing an insulating tube made of such ceramics will be described.
- a case where the main component of the ceramics forming the edge pipe is alumina will be described.
- Aluminum oxide powder (purity of 99.9% by mass or more), which is the main component, and powders of magnesium hydroxide, silicon oxide, and calcium carbonate are put into a pulverizing mill together with a solvent (ion-exchanged water) to obtain powders.
- a solvent ion-exchanged water
- an organic binder and a dispersant for dispersing the aluminum oxide powder are added and mixed to obtain a slurry.
- the content of magnesium hydroxide powder is 0.3 to 0.42% by mass
- the content of silicon oxide powder is 0.5 to 0.8% by mass
- the content of calcium carbonate powder is The content is 0.06 to 0.1% by mass
- the balance is aluminum oxide powder and unavoidable impurities.
- Organic binders include acrylic emulsion, polyvinyl alcohol, polyethylene glycol, polyethylene oxide and the like.
- a uniaxial press molding device or a cold isostatic press molding device is used to pressurize at a molding pressure of 78 MPa or more and 118 MPa or less to form a columnar molded body. obtain. If necessary, the compact is formed with recesses that will become recesses after firing by cutting. The molded body is fired at a firing temperature of 1580° C. or higher and 1780° C. or lower for a holding time of 2 hours or longer and 4 hours or shorter to obtain an insulating tube.
- the molding should be fired at a firing temperature of 1600° C. or more and 1760° C. or less for a holding time of 2 hours or more and 4 hours or less.
- the compact obtained by pressurizing at a molding pressure of 96 MPa or more and 118 MPa or less is heated to a sintering temperature. It may be fired at 1600° C. or higher and 1760° C. or lower for a holding time of 2 hours or longer and 4 hours or shorter.
- the inner peripheral surface may be formed by grinding the surface of the insulating tube facing the through hole. Further, the surface of the recess in which the electrode is mounted may be ground to form the bottom surface.
- FIG. 13 shows a modification of the embodiment shown in FIGS. 1-3.
- the recess 6' has a first recess 61 that opens to the outside and a second recess 62 provided on the bottom surface of the first recess 61.
- the second recess 62 has an opening area of
- the electrode 4 ′ is attached to the bottom surface of the second recess 62 , which is smaller than the first recess 61 .
- the positioning accuracy of the electrode 4' is further improved, so that the measurement accuracy of the bubble ratio of the cryogenic liquid can be improved.
- Others are the same as those of the above-described embodiment, so detailed description thereof will be omitted.
- FIG. 14 shows a porosity sensor 1' surrounded by a housing 10.
- FIG. 15 and 16 are a schematic perspective view showing the vertical fracture surface and a schematic perspective view showing the horizontal fracture surface.
- the porosity sensor 1' has a plurality of pairs of recesses 6a, 6b, and 6c that open in the direction perpendicular to the axis of the through hole 3' of the insulating tube 2. ing. Electrodes 4a, 4b and 4c are attached to the bottom surfaces of the recesses 6a, 6b and 6c, respectively. The recesses 6a, 6b, 6c are arranged along the axis of the through hole 3'.
- the electrode mounting portion 5' refers to a portion on which the plurality of electrodes 4a, 4b, and 4c are mounted, for example, a portion on which concave portions 6a, 6b, and 6c are formed.
- the distance D1 between the inner wall surfaces of the electrodes 4a, 4b, and 4c in the direction perpendicular to the electrode surfaces of the electrodes 4a, 4b, and 4c in the electrode mounting portion 5' It is formed to be shorter than the distance D2 between the wall surfaces. Since the porosity is measured with a plurality of electrodes 4a, 4b, and 4c in this manner, the measurement accuracy is further improved. Others are the same as the above-described embodiment.
- This flow meter measures the flow rate of the cryogenic liquid flowing through the through-holes 3, 3', and comprises the above-described bubble ratio sensors 1, 1' and a flow meter (not shown).
- the bubble rate sensors 1, 1' and the flow rate meter are attached to a cryogenic liquid transfer pipe (hereinafter sometimes abbreviated as a transfer pipe) (not shown).
- the bubble rate is measured by the bubble rate sensors 1 and 1', and the density d (kg/m 3 ) of the cryogenic liquid is calculated from this.
- Ask. This is because the density d of the cryogenic liquid corresponds to the dielectric constant and thus also to the capacitance measured by the porosity sensors 1, 1'.
- v is the flow velocity (m/sec) of the cryogenic liquid obtained by the current meter, and a is the cross-sectional area (m 2 ) of the through hole 3 in the electrode mounting portion 5
- the flow rate F (kg/sec) is obtained by the following equation. ) is required.
- the flow meter further comprises an arithmetic device to which the porosity sensors 1, 1' and the flow meter are connected in order to perform the above arithmetic. This makes it possible to easily measure the flow rate of the cryogenic liquid, which facilitates management when transferring a large amount of the cryogenic liquid industrially.
- Cryogenic liquids to be measured by the bubble rate sensors 1 and 1′ of the present disclosure include liquid hydrogen ( ⁇ 253° C.), liquid nitrogen ( ⁇ 196° C.), liquid helium ( ⁇ 269° C.), and liquefied natural gas. ( ⁇ 162° C.), liquid argon ( ⁇ 186° C.), etc. (the value in parentheses indicates the liquefying temperature). Therefore, a cryogenic liquid in the present disclosure refers to a liquid that is liquefied at a cryogenic temperature of -162°C or less.
- the porosity sensor of the present disclosure is not limited to the above embodiments, and various modifications and improvements are possible within the scope of the present disclosure.
- Reference Signs List 1 1' porosity sensor 2 insulating tube 21 insulating tube member 3, 3' through hole 3a, 3b inner wall surface 31 inlet 32 outlet 4, 4', 4a, 4b, 4c electrode 5, 5', 5a, 5b , 5c electrode mounting portion 6, 6', 6a, 6b, 6c recess 61 first recess 62 second recess 7 conductive pin 8 airtight terminal 9 bundle 10 housing 101 frame 102 lid 11 first connecting tube 12 second 2 Connection pipe 13 Insertion hole 14 Vacuum exhaust valve 15 Vacuum space D1 (shortest) distance D2 (longest) distance
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Abstract
Description
従って、気泡の含有割合の変化が大きいため、配管内を流れる液体水素の流量を測定するには、通常の液体のように流速を測定するだけでは、正確な流量を知ることはできない。
本開示は、上記流量計を備えた極低温液体移送管を提供するものである。
各電極4には導通ピン7が個別に接続されている。導通ピン7には気密端子8が取付けられている。気密端子8については後述する。
ここで、電極面41、41とは、電極4、4が凹部6、6の底面に装着された面を言う。
従って、少なくとも電極装着部5における貫通孔3の軸心に垂直な断面内の貫通孔3の形状は、楕円状または矩形状であるのがよい。このように上記断面内の貫通孔3の形状が単純形状となり、しかも、軸心に沿って稜線がない形状となるので、気泡の発生のばらつきが抑制され、気泡率の測定精度が向上する。
なお、電極装着部5とは、電極4、4が装着される部位をいい、具体的には、電極4、4が装着される凹部6,6の底面を含め、これら底面に挟まれる部分をいう。
平行領域E2の長さは、電極領域E1の長さの105%以上、好ましくは150%以上であるのがよく、5000%以下であるのがよい。
同様に、内壁面3b、3bが平行領域E2を有さずに、内壁面3b、3bの少なくとも一方が、それらの間の距離D2が流入口31および流出口32から電極装着部5に向かって連続的に大きくなるように湾曲していてもよい。内壁面3b、3bの湾曲の方向は、貫通孔3の軸心から見て凸状に湾曲していてもよい。
なお、絶縁管部材21、21は接合材を用いず結束体9で結束してもよい。あるいは、結束体9に代えて、または結束体9と共に、絶縁管部材21,21の接合面同士を、絶縁管2内を流れる極低温液体に対して安定な封止材で接合してもよい。
筐体10の垂直破断面を示す概略斜視図である図11および水平破断面を示す概略斜視図である図12に示すように、筐体10は、気泡率センサ1を収容する枠体部101と、枠体部101の開口を封止する蓋部102とを備える。
図9に示す絶縁管部材21、21が結束体9で結束された気泡率センサ1は、枠体部101内に収容後、枠体部101と蓋部102とが溶接またはろう接によって接合される。気泡率センサ1の貫通孔3の両端開口(流入口31および流出口32)には、第1接続管11、第2接続管12がそれぞれ接続される。
第1接続管11は、流入口31内に挿通され、外周面が蓋部102と溶接またはろう接によって接合されている。第2接続管12は、枠体部101と一体に形成されているが、蓋部102と同様に枠体部101と接合するものであってもよい。
また、筐体10には、真空排気弁14(真空排気用のニードル弁等)が設けられており、気泡率センサ1と筐体10との間に真空空間15(断熱層)を形成している。このように、気泡率センサ1の外周側に真空空間15が位置しているので、気泡率センサ1に対する断熱性能が確保される。その結果、外気温度の影響による気泡の発生が抑制されるため、気泡率の測定精度が向上する。また、気密端子8によって、気泡率センサ1から外部への極低温液体のリークが抑制されるため、気泡率の測定精度がさらに向上する。
蓋部102は、例えば、フェルニコ系合金、Fe-Ni合金、Fe-Ni-Cr-Ti-Al合金、Fe-Cr-Al合金、Fe-Co-Cr合金等から形成されるのがよい。
枠体部101の内径は、十分な断熱性能を得るうえで、絶縁管2の外径に対して1mm以上、好ましくは、絶縁管2の外径に対して10mm以上であるのがよく、絶縁管2の外径に対して200mm以下、好ましくは100mm以下であるのがよい。蓋部102は絶縁管2の外周面にろう付けによって気密に接合される。
具体的には、上記セラミックスは、酸化カルシウム,酸化アルミニウムおよび希土類元素の酸化物を含み、酸化カルシウム,酸化アルミニウムおよび希土類元素の酸化物の合計100質量%に対して、酸化カルシウムおよび酸化アルミニウムの含有量がそれぞれ0.3質量%以上1.5質量%以下,14.2質量%以上48.8質量%以下であり、残部が前記希土類元素の酸化物である。前記窒化珪素は、組成式がSi6-ZAlZOZN8-Z(z=0.1~1)で表されるβ-サイアロンであり、平均結晶粒径が20μm以下(但し、0μmを除く。)である。このようなセラミックスとしては、例えば、特許第5430389号公報に記載のものが採用可能である。
閉気孔間の間隔が8μm以上の場合、閉気孔が比較的分散された状態で存在するため、機械的強度が高くなる。一方、閉気孔間の間隔が18μm以下の場合、冷熱衝撃が繰り返し与えられ、閉気孔の輪郭を起点とするマイクロクラックが発生したとしても、周囲の閉気孔により、その伸展が遮られる確率が高くなる。このことから、閉気孔間の間隔が8μm以上18μm以下であると、絶縁管2を長期間に亘って用いることができる。
例えば、閉気孔の円相当径の歪度は1以上であり、閉気孔の重心間距離の歪度は0.7以下である。閉気孔の円相当径の歪度と、閉気孔の重心間距離の歪度との差は、0.3以上である。
閉気孔の重心間距離および円相当径を求めるには、まず、セラミックスを形成する絶縁管2の一方の端面から軸方向に向かって、平均粒径D50が3μmのダイヤモンド砥粒を用いて銅盤にて研磨する。その後、平均粒径D50が0.5μmのダイヤモンド砥粒を用いて錫盤にて研磨することにより、粗さ曲線における算術平均粗さ(Ra)が0.2μm以下である研磨面を得る。
この観察像を対象として、画像解析ソフト「A像くん(ver2.52)」(登録商標、旭化成エンジニアリング(株)製)を用いて分散度計測の重心間距離法という手法で閉気孔の重心間距離を求めればよい。以下、画像解析ソフト「A像くん」と記載した場合、旭化成エンジニアリング(株)製の画像解析ソフトを示す。
閉気孔の円相当径および重心間距離の歪度は、それぞれExcel(登録商標、Microsoft Corporation)に備えられている関数Skewを用いて求めればよい。
主成分である酸化アルミニウム粉末(純度が99.9質量%以上)と、水酸化マグネシウム、酸化珪素および炭酸カルシウムの各粉末とを粉砕用ミルに溶媒(イオン交換水)とともに投入して、粉末の平均粒径(D50)が1.5μm以下になるまで粉砕した後、有機結合剤と、酸化アルミニウム粉末を分散させる分散剤とを添加、混合してスラリーを得る。
ここで、上記粉末の合計100質量%における水酸化マグネシウム粉末の含有量は0.3~0.42質量%、酸化珪素粉末の含有量は0.5~0.8質量%、炭酸カルシウム粉末の含有量は0.06~0.1質量%であり、残部が酸化アルミニウム粉末および不可避不純物である。
有機結合剤は、アクリルエマルジョン、ポリビニールアルコール、ポリエチレングリコール、ポリエチレンオキサイド等である。
成形体には、必要に応じて切削加工により、焼成後に凹部となる凹みが形成される。
焼成温度を1580℃以上1780℃以下、保持時間を2時間以上4時間以下として成形体を焼成して絶縁管を得る。
図14は、筐体10で囲繞した気泡率センサ1´を示している。図15および図16はその垂直破断面を示す概略斜視図および水平破断面を示す概略斜視図である。
この実施形態においても、電極装着部5´において、電極4a、4b、4cの電極面に垂直な方向における内壁面間の距離D1が、電極4a、4b、4cの電極面に平行な方向における内壁面間の距離D2よりも短くなるように形成されている。
このように複数の電極4a、4b、4cで気泡率を測定するので、測定精度がより向上する。その他は前述の実施形態と同様である。
そして、流速計で求めた極低温液体の流速(m/秒)をv、電極装着部5における貫通孔3の断面積(m2)をaとしたとき、次式によって流量F(kg/秒)が求められる。
F=d×v×a
流量計は、上記演算を行うために、気泡率センサ1、1´および流速計が接続された演算装置をさらに備えている。これにより、極低温液体の流量測定を簡単に行うことができるので、工業的に極低温液体を大量移送する場合に管理が容易になる。
2 絶縁管
21 絶縁管部材
3、3´ 貫通孔
3a、3b 内壁面
31 流入口
32 流出口
4、4´、4a、4b、4c 電極
5、5´、5a、5b、5c 電極装着部
6、6´、6a、6b、6c 凹部
61 第1凹部
62 第2凹部
7 導通ピン
8 気密端子
9 結束体
10 筐体
101 枠体部
102 蓋部
11 第1接続管
12 第2接続管
13 挿通孔
14 真空排気弁
15 真空空間
D1 (最短)距離
D2 (最長)距離
Claims (16)
- 極低温液体を流すための貫通孔を有する絶縁管と、該絶縁管の外壁面に装着された一対の面状の電極と、を備え、
前記絶縁管は、前記電極の電極面に垂直な方向における内壁面間の距離D1が、前記電極の前記電極面に平行な方向における内壁面間の距離D2よりも短い電極装着部を有する、気泡率センサ。 - 少なくとも前記電極装着部において、前記距離D1を特定する、対向する前記内壁面が互いに平行であるか、または前記内壁面のうち、少なくとも一方の内壁面が前記貫通孔の軸心から見て凹状に湾曲している、請求項1に記載の気泡率センサ。
- 少なくとも前記電極装着部において、前記距離D2を特定する、対向する前記内壁面が互いに平行であるか、または前記内壁面のうち、少なくとも一方の内壁面が前記貫通孔の軸心から見て凸状に湾曲している、請求項1または2に記載の気泡率センサ。
- 前記貫通孔の流入口側に供給孔を有する第1接続管が前記絶縁管に接続され、前記貫通孔の軸心に垂直な貫通孔の断面積は、前記供給孔の軸心に垂直な供給孔の断面積の90%以上110%以下である、請求項1~3のいずれかに記載の気泡率センサ。
- 前記貫通孔の流出口側に排出孔を有する第2接続管が前記絶縁管に接続され、前記貫通孔の軸心に垂直な貫通孔の断面積は、前記排出孔の軸心に垂直な排出孔の断面積の90%以上110%以下である、請求項1~4のいずれかに記載の気泡率センサ。
- 少なくとも前記電極装着部における、前記貫通孔の軸心に平行な方向の前記内壁面の粗さ曲線における算術平均粗さRaは0.2μm以下である、請求項1~5のいずれかに気泡率センサ。
- 少なくとも前記電極装着部における、前記貫通孔の軸心に垂直な貫通孔の断面形状は、楕円状または矩形状である、請求項1~6のいずれかに記載の気泡率センサ。
- 前記絶縁管は、少なくとも前記電極装着部において、前記電極の前記電極面に垂直な方向に開口する1対の凹部を有してなり、前記電極が装着された外壁面は、前記凹部の底面である、請求項1~7のいずれかに記載の気泡率センサ。
- 前記凹部は、外部に開口する第1凹部と、該第1凹部の底面に設けられ、開口面積が前記第1凹部よりも小さい第2凹部とを有し、前記電極が装着された外壁面は、前記第2凹部の底面に装着されてなる、請求項8に記載の気泡率センサ。
- 前記絶縁管は、低熱膨張セラミックスからなる、請求項1~9のいずれかに記載の気泡率センサ。
- 前記絶縁管は、窒化珪素またはサイアロンを主成分とするセラミックスからなる、請求項1~9のいずれかに記載の気泡率センサ。
- 前記絶縁管は、使用温度域での比誘電率が11以下であるセラミックスからなる、請求項1~11のいずれかに記載の気泡率センサ。
- 前記絶縁管は、複数の閉気孔を有するセラミックスからなり、隣り合う前記閉気孔の重心間距離の平均値から前記閉気孔の円相当径の平均値を差し引いた値が8μm以上18μmである、請求項1~12のいずれかに記載の気泡率センサ。
- 前記閉気孔の円相当径の歪度は、前記閉気孔の重心間距離の歪度よりも大きい、請求項13に記載の気泡率センサ。
- 前記貫通孔内を流れる極低温液体の流量を測定する流量計であって、請求項1~14のいずれかに記載の気泡率センサと、前記極低温液体が前記貫通孔内を流れる流速を測定する流速計とを備えた流量計。
- 請求項15に記載の流量計を備えた極低温液体移送管。
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US18/274,968 US20240110820A1 (en) | 2021-01-29 | 2022-01-27 | Void fraction sensor, flowmeter using the same, and cryogenic liquid transfer pipe |
KR1020237025713A KR20230125049A (ko) | 2021-01-29 | 2022-01-27 | 기포율 센서, 이것을 사용한 유량계 및 극저온 액체이송관 |
CN202280012396.4A CN116829931A (zh) | 2021-01-29 | 2022-01-27 | 气泡率传感器、使用该气泡率传感器的流量计及极低温液体移送管 |
EP22745998.9A EP4286839A1 (en) | 2021-01-29 | 2022-01-27 | Void fraction sensor, flowmeter employing same, and cryogenic liquid transfer tube |
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WO2023100793A1 (ja) * | 2021-11-30 | 2023-06-08 | 京セラ株式会社 | 気泡率計 |
WO2024106473A1 (ja) * | 2022-11-16 | 2024-05-23 | 京セラ株式会社 | 気泡率センサ、これを用いた流量計および極低温液体移送管 |
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- 2022-01-27 KR KR1020237025713A patent/KR20230125049A/ko unknown
- 2022-01-27 US US18/274,968 patent/US20240110820A1/en active Pending
- 2022-01-27 CN CN202280012396.4A patent/CN116829931A/zh active Pending
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WO2024106473A1 (ja) * | 2022-11-16 | 2024-05-23 | 京セラ株式会社 | 気泡率センサ、これを用いた流量計および極低温液体移送管 |
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US20240110820A1 (en) | 2024-04-04 |
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JPWO2022163779A1 (ja) | 2022-08-04 |
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