WO2022158275A1 - Détecteur de substance - Google Patents

Détecteur de substance Download PDF

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Publication number
WO2022158275A1
WO2022158275A1 PCT/JP2021/048873 JP2021048873W WO2022158275A1 WO 2022158275 A1 WO2022158275 A1 WO 2022158275A1 JP 2021048873 W JP2021048873 W JP 2021048873W WO 2022158275 A1 WO2022158275 A1 WO 2022158275A1
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WO
WIPO (PCT)
Prior art keywords
substance
chamber
ventilation means
detection device
sensor
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PCT/JP2021/048873
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English (en)
Japanese (ja)
Inventor
健治 緒方
俊介 和田
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Ｉ－Ｐｅｘ株式会社
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Publication of WO2022158275A1 publication Critical patent/WO2022158275A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

Definitions

  • the present invention relates to a substance detection device.
  • Patent Document 1 discloses an odor sensor that detects an odorant adsorbed on a substance adsorption film based on a weight change of the substance adsorption film.
  • this odor sensor detachment of odorants from the substance adsorption film is achieved by introducing air containing less odorants into the chamber and discharging the sample gas from the chamber.
  • the present invention has been made under the above circumstances, and an object of the present invention is to provide a substance detection device capable of suppressing deterioration of accuracy by desorbing a substance adsorbed on a substance sensor.
  • the substance detection device comprises: a first substance sensor that detects a substance contained in the gas; a first chamber in which the first substance sensor is arranged and provided with an inlet for inflowing the gas and an outlet for discharging the gas; a first ventilation means capable of ventilating the inside of the first chamber through the inlet; The first ventilation means is ventilating the first chamber through the inlet when detecting the substance by the first substance sensor; When the detection of the substance by the first substance sensor ends, ventilation through the inlet is stopped.
  • the second ventilation means is stopping ventilation through the outlet when the substance is detected by the first substance sensor; When the detection of the substance by the first substance sensor is completed, the inside of the first chamber is ventilated through the outlet; You can do it.
  • the second ventilation means is ventilating the first chamber through the outlet when the substance is detected by the first substance sensor; When the detection of the substance by the first substance sensor is finished, ventilation through the outlet is stopped; You can do it.
  • the second ventilation means constantly ventilates the interior of the first chamber through the outlet, You can do it.
  • the second ventilation means is a shutter, pump, fan or solenoid valve, You can do it.
  • a through-hole communicating the first space and the second space is provided at a position that does not affect the concentration difference of the substance between the first space and the second space. , You can do it.
  • a second substance sensor disposed in the second chamber and detecting the substance discharged from the outlet; You can do it.
  • a tubular member for sending the gas discharged from the outlet to a second air space having a lower concentration of the substance than the first air space communicating with the first chamber via the inlet; You can do it.
  • the first ventilation means is a shutter, pump, fan or solenoid valve, You can do it.
  • the first substance sensor comprises a vibrator to which the substance is adsorbed, desorbing the adsorbed substance by vibrating the vibrator; You can do it.
  • the inside of the first chamber is ventilated through the inflow port when the substance is detected by the first substance sensor, and the inside of the first chamber is ventilated through the inflow port when the detection of the substance by the first substance sensor is completed. to stop. Therefore, the deterioration of accuracy can be suppressed by desorbing the substance adsorbed on the substance sensor.
  • FIG. 1 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 1 of the present invention
  • FIG. 2 is a side view of a first substance sensor that constitutes the substance detection device of FIG. 1
  • FIG. FIG. 2B is an enlarged view of a driving portion that constitutes the first substance sensor of FIG. 2A
  • 2 is a flow chart showing the operation of the substance detection device of FIG. 1
  • FIG. 2 is a schematic diagram showing a state during detection of the substance detection device of FIG. 1
  • FIG. 2 is a schematic diagram showing a state after detection of the substance detection device of FIG. 1;
  • FIG. 5 is a diagram showing changes in the amount of adsorbed substances in the substance sensor when substance detection is performed a plurality of times without closing the inflow port by the first ventilation means
  • FIG. 6B is a diagram showing changes in detection sensitivity when substance detection is performed multiple times in the case of FIG. 6A.
  • FIG. 10 is a diagram showing changes in the amount of adsorbed substances in the substance sensor when the operation of closing the inflow port by the first ventilation means is performed and substance detection is performed a plurality of times;
  • FIG. 7B is a diagram showing changes in detection sensitivity when substance detection is performed multiple times in the case of FIG. 7A. It is a figure which shows a structure in case a 1st ventilation means is a pump.
  • FIG. 4 is a diagram showing a configuration in which the first ventilating means is a pump and a filter is provided at the outlet; It is a figure which shows a structure in case a 1st ventilation means is a fan.
  • FIG. 3 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 2 of the present invention; 13 is a flow chart showing the operation of the substance detection device of FIG. 12; 13 is a timing chart showing another example of the operation of the substance detection device of FIG. 12; FIG.
  • FIG. 4 is a diagram showing a configuration in which the second ventilating means is a pump;
  • FIG. 4 is a diagram showing a configuration in which the second ventilation means is an electromagnetic valve; It is a figure which shows a structure in case a 2nd ventilation means is a fan.
  • FIG. 5 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 3 of the present invention;
  • FIG. 10 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 4 of the present invention;
  • FIG. 10 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 5 of the present invention;
  • FIG. 18 is a schematic diagram showing a modification of the configuration of the substance detection device of FIG. 17;
  • FIG. 18 is a schematic diagram showing a modification of the configuration of the substance detection device of FIG. 17;
  • FIG. 11 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 6 of the present invention
  • FIG. 11 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 7 of the present invention
  • FIG. 11 is a schematic diagram showing Modification 1 of the configuration of the substance detection device according to Embodiment 3 of the present invention
  • FIG. 11 is a schematic diagram showing a modification 2 of the configuration of the substance detection device according to Embodiment 3 of the present invention
  • 1 is a schematic diagram showing the configuration of a substance detection device capable of continuously detecting substances
  • FIG. It is a figure which shows the modification of a substance sensor.
  • the substance detection device 1 includes a first substance sensor 10 , a first chamber 20 and a first ventilation means 30 .
  • the substance detection device 1 detects the substance 3 emitted from the odor source 2 into the gas.
  • the first substance sensor 10 detects the substance 3 contained in the surrounding gas.
  • the substance 3 can be, for example, an odor-causing substance that is dispersed in the gas from the odor source 2 and constitutes the odor.
  • the substance 3 to be detected is, for example, a gaseous substance that constitutes a chemical substance to be detected that is contained in the air, for example, among the group of chemical substances that constitute odors.
  • Examples of chemical substances to be detected include odor-causing substances having specific odors such as ammonia, mercaptans, aldehydes, hydrogen sulfide, and amines.
  • the first substance sensor 10 includes a vibrator 11 to which the substance 3 is adsorbed, and a fixing portion 12 that fixes the end portion of the vibrator 11 to the first chamber 20 .
  • the vibration frequency or amplitude changes as the substance 3 is adsorbed.
  • the first substance sensor 10 detects the presence or absence of adsorption of the substance 3 by detecting changes in vibration frequency or amplitude.
  • the fixed part 12 is, for example, a silicon substrate.
  • the vibrator 11 includes, for example, a vibrating beam 11a, a driving portion 11b formed on the beam 11a, a substance adsorption film 11c formed on the beam 11a opposite to the driving portion 11b, Prepare.
  • the beam 11a is a cantilever beam whose one end is fixed to the fixed portion 12 and which can vibrate in one direction.
  • the silicon substrate constituting the fixing portion 12 can be used in a state of protruding.
  • the drive section 11b includes a conductive lower electrode layer 13a, a piezoelectric element layer 13b composed of piezoelectric elements, and a conductive upper electrode layer 13c.
  • the lower electrode layer 13a, the piezoelectric element layer 13b and the upper electrode layer 13c are laminated in this order.
  • the piezoelectric element layer 13b expands and contracts. Due to this expansion and contraction, the beam 11a bends and vibrates.
  • the lower electrode layer 13a is grounded to a ground electrode (not shown).
  • a drive electrode (not shown) is connected to the upper electrode layer 13c.
  • a driving voltage is applied between the upper electrode layer 13c and the lower electrode layer 13a via the ground electrode and the driving electrode.
  • the upper electrode layer 13c is also connected to detection electrodes (not shown).
  • a signal indicating the potential difference between the upper electrode layer 13c and the lower electrode layer 13a is output via the ground electrode and the detection electrode as a detection signal indicating the vibration state of the beam 11a.
  • the substance adsorption film 11c is made of a material that adsorbs the substance 3.
  • the vibration frequency and amplitude of the vibrator 11 change. The change appears as a change in the frequency and amplitude of the detected signal. Therefore, adsorption of the substance 3 can be detected based on the detection signal indicating the vibration state of the beam 11a.
  • the substance adsorption film 11c there is a limit to the amount of the substance 3 that can be adsorbed by the vibrator 11, and the substance 3 will not be adsorbed any more. That is, the adsorption amount of the substance 3 to the vibrator 11 is saturated. Therefore, the first substance sensor 10 desorbs the substance 3 from the vibrator 11 after performing the detection processing of the substance 3 . Specifically, the first substance sensor 10 continues to vibrate the vibrator 11 even after the substance 3 detection process is finished. Due to this vibration, the substance 3 adsorbed on the substance adsorption film 11c can be desorbed. In other words, the substance adsorption film 11c can be reused by desorbing the substance 3 after adsorbing the substance 3 .
  • Various materials can be used for the material of the substance adsorption film 11c. For example, a crystal oscillator, a metal oxide semiconductor, an organic semiconductor, or the like is used as the substance adsorption film 11c.
  • the first chamber 20 is a container having a chamber capable of containing gas therein.
  • a first substance sensor 10 is provided in a room within the first chamber 20 .
  • the first chamber 20 is provided with an inlet 20a for inflowing gas and an outlet 20b for discharging gas.
  • a material for the first chamber 20 a material that can prevent gas from flowing into the interior is used. For example, metal may be used, or other materials such as plastic may be used.
  • the inlet 20a and the outlet 20b are provided on opposite sides of each other. Therefore, when the inlet 20a faces the odor source 2, the outlet 20b faces away from the odor source 2. FIG. In this case, the air space communicating with the inlet 20a and the air space communicating with the outlet 20b tend to have different concentrations of the substance 3 from each other.
  • the inlet 20a and the outlet 20b may be provided on a surface of the first chamber 20 adjacent to the surface on which the inlet 20a is provided. That is, the inlet 20a and the outlet 20b may be provided on the same plane. Also, the first chamber 20 may be placed in an air space where the concentration of the substance 3 is the same.
  • the first substance sensor 10 is arranged at a position facing the inflow port 20a. More specifically, the first substance sensor 10 is arranged such that the substance adsorption film 11c faces the inlet 20a. This makes it easier for the gas flowing in through the inlet 20a to come into contact with the substance adsorption film 11c.
  • the first ventilation means 30 is an opening/closing means for opening and closing the inflow port 20a.
  • the first ventilation means 30 is assumed to be a shutter. This shutter can be manually opened and closed. By opening the shutter, the inside of the first chamber 20 can be ventilated through the inlet 20a.
  • the substance detection device 1 opens the inflow port 20a by the first ventilation means 30 when the first substance sensor 10 detects a substance. Thereby, the inside of the first chamber 20 is ventilated through the inlet 20a. Furthermore, the substance detection device 1 closes the inlet 20a by the first ventilation means 30 when the substance detection by the first substance sensor 10 is completed. As a result, ventilation through the inflow port 20a is stopped.
  • the substance detection device 1 is operated by the first ventilation means 30 with the inflow port 20a facing the airspace where the gas containing the substance 3 exists, that is, the airspace where the odor source 2 exists.
  • the inlet 20a is opened (step S1).
  • the first ventilation means 30 slides to open the inlet 20a of the first chamber 20, as shown in FIG.
  • gas containing the substance 3 enters the interior of the first chamber 20 .
  • the substance detection device 1 performs sensor detection for detecting the substance 3 by the first substance sensor 10 (step S2).
  • the substance 3 that has entered the first chamber 20 is adsorbed on the substance adsorption film 11 c of the vibrator 11 of the first substance sensor 10 .
  • the first substance sensor 10 detects changes in vibration frequency or amplitude of the vibrator 11 due to adsorption of the substance 3 .
  • the substance detection device 1 closes the inlet 20a of the first chamber 20 by the first ventilation means 30, as shown in FIG. 5 (step S3). This stops the inflow of the substance 3 into the first chamber 20 through the inlet 30a.
  • the substance detection device 1 vibrates the vibrator 11 of the first substance sensor 10 to desorb the substance 3 (step S4).
  • the substance 3 adsorbed to the first substance sensor 10 is desorbed from the first substance sensor 10 .
  • the air space communicating with the outlet 20b is far from the odor source 2, so the concentration of the substance 3 contained in the gas is low. Therefore, the substance 3 desorbed from the first substance sensor 10 is discharged from the discharge port 20b. Thereby, the first substance sensor 10 is initialized, that is, refreshed.
  • the substance detection process ends.
  • the substance detection process for detecting the substance 3 is performed in such a procedure, and is repeated as necessary.
  • FIG. 6A continuously shows the time change of the ratio of the adsorption amount of the substance 3 when the saturated adsorption amount of the substance 3 in this case is 100% for the first time and the second time
  • FIG. 3 When the detection sensitivity for substance 3 is assumed to be 100%, the change over time in the ratio of detection sensitivity for substance 3 is shown superimposed on the first time and the second time. As shown in FIG.
  • FIGS. 7A and 7B show changes over time in the saturated adsorption amount of substance 3, the adsorption amount of substance 3 when the detection sensitivity is 100%, and the rate of detection sensitivity in this embodiment.
  • the substance detection device 1 according to the present embodiment can desorb the substance 3 from the first substance sensor 10 and initialize the state of the first substance sensor 10 for each detection. Therefore, as shown in FIG. 7B, the detection sensitivity of the first substance sensor 10 can be kept high over multiple detections.
  • the first ventilation means 30 is assumed to be a shutter.
  • the first ventilation means 30 may be a pump, as shown in FIG.
  • step S1 the pump is driven to allow the gas containing the substance 3 to flow into the first chamber 20 through the inlet 20a to ventilate the first chamber 20, and in step S3, the pump is stopped to stop the ventilation in the first chamber 20 .
  • the gas of the substance 3 can be forcibly sucked into the first chamber 20, so that the detection sensitivity of the substance 3 can be enhanced.
  • the first ventilation means 30 may be an electromagnetic valve, as shown in FIG.
  • step S1 as shown in FIG. 10
  • the solenoid valve is opened to allow the gas containing the substance 3 to flow in through the inlet 20a, and the first chamber 20 is ventilated through the inlet 20a. conduct.
  • step S3 as shown in FIG. 9, the electromagnetic valve is closed to prevent the gas containing the substance 3 from flowing through the inlet 20a, and the first chamber 20 is ventilated through the inlet 20a. to stop.
  • the inflow port 20a can be automatically opened and closed. Note that the control of this solenoid valve can be performed by a controller (not shown).
  • the first ventilation means 30 may be a two-way pump capable of switching the gas inflow direction.
  • the inlet 20a and the outlet 20b are the same opening.
  • a third opening 20c is provided instead of the discharge port 20b, and a filter 41 is installed in the third opening 20c.
  • a filter 41 that does not allow the substance 3 to pass through is used.
  • step S ⁇ b>1 the bidirectional pump as the first ventilation means 30 causes gas to flow into the first chamber 20 . Furthermore, in step S3, the bidirectional pump discharges the gas to the outside of the first chamber 20. As shown in FIG. At the time of discharge, a gas having a low concentration of the substance 3 flows into the first chamber 20 through the filter 41 , and the substance 3 can be desorbed from the first substance sensor 10 to refresh the first substance sensor 10 . Become. That is, in this case, gas flows in from the third opening 20c.
  • the filter 41 may be omitted if the concentration of the substance 3 is sufficiently low in the airspace communicating with the third opening 20c.
  • the first ventilation means 30 may be a fan, as shown in FIG. 11B.
  • the fan sends gas into the first chamber 20 by rotating.
  • step S1 the fan is rotated to allow the gas containing the substance 3 to flow in through the inlet 20a, thereby ventilating the first chamber 20 through the inlet 20a.
  • step S3 the rotation of the fan is stopped so that gas does not enter through the inlet 20a, and the ventilation inside the first chamber 20 through the inlet 20a is stopped.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the first embodiment in that a second ventilation means 40 for opening and closing the discharge port 20b is provided.
  • the second ventilation means 40 like the first ventilation means 30, is a shutter as an opening/closing means.
  • the second ventilation means 40 closes the outlet 20b to stop ventilation via the outlet 20b. Further, when the detection of the substance 3 by the first substance sensor 10 is completed, the discharge port 20b is opened by the second ventilation means 40, and the inside of the first chamber 20 is ventilated through the discharge port 20b.
  • step S1 the inlet 20a is opened (step S1), sensor detection is performed (step S2), the inlet 20a is closed (step S3), and the substance 3 is desorbed (step S4). It is the same as the first embodiment.
  • the substance detection device 1 performs an operation of closing the outlet 20b by the second ventilation means 40 and stopping ventilation via the outlet 20b in step S1. Further, in step S3, the discharge port 20b is opened by the second ventilation means 40, and the inside of the first chamber 20 is ventilated through the discharge port 20b. By performing such an operation, it is possible to prevent the substance 3 from being discharged from the discharge port 20b by closing the discharge port 20b at the time of detection. The substance 3 desorbed from can be discharged from the discharge port 20b. This operation is effective when the concentration of the substance 3 in the air space on the side of the outlet 20b is lower than the concentration of the substance 3 in the air space on the side of the inlet 20a.
  • the opening and closing operations of the first ventilation means 30 and the second ventilation means 40 may be interlocked. That is, when the first ventilation means 30 opens, the second ventilation means 40 closes, and when the first ventilation means 30 closes, the second ventilation means 40 opens.
  • the inlet 20a and the outlet 20b are open, the substance 3 may flow into the first chamber 20 continuously.
  • an operation different from that described above may be performed for opening and closing the discharge port 20b.
  • the discharge port 20b is opened by the second ventilation means 40 to ventilate the inside of the first chamber 20 through the discharge port 20b.
  • the outlet 20b may be closed by the second ventilation means 40 to stop the ventilation inside the first chamber 20 via the outlet 20b.
  • the second ventilation means 40 ventilates the inside of the first chamber 20 through the outlet 20b even when the substance 3 is detected by the first substance sensor 10, Ventilation in the first chamber 20 may be continued even after the detection of the substance 3 by the substance sensor 10 is finished. That is, the second ventilation means 40 may constantly ventilate the inside of the first chamber 20 through the outlet 20b.
  • the concentration of the substance 3 is high outside, it may be appropriate to continuously ventilate with the second ventilation means 40 in this way. For example, if the first substance sensor 10 detects a smoke substance, if the outside is full of smoke, the inside of the first chamber 20 must be constantly ventilated in order to exhaust the smoke. In such a case, it is desirable to constantly ventilate the interior of the first chamber 20 with the second ventilation means 40 .
  • the second ventilation means 40 is assumed to be a shutter.
  • the second ventilation means 40 may be a pump, as shown in Figure 14A. By doing so, the gas of the substance 3 can be forcibly discharged out of the first chamber 20, so that the detection sensitivity of the substance 3 can be enhanced.
  • a pump it is desirable to provide a through hole 42 for taking in outside air into the first chamber 20 on the same side as the outlet 20b.
  • the pump is stopped during the detection of the substance 3 and , the gas in the first chamber 20 can be discharged by a pump.
  • the second ventilation means 40 is a pump
  • the pump is stopped during detection, After the detection is finished, the gas in the first chamber 20 may be discharged by a pump.
  • the second ventilation means 40 may be an electromagnetic valve, as shown in FIG. 14B. By doing so, the second ventilation means 40 can be automatically opened and closed by a controller (not shown). Also, the second ventilation means 40 may be a fan, as shown in FIG. 14C. The fan can be rotated manually, automatically, or by the gas flow obtained from the first ventilation means 30, and the gas in the first chamber 20 can be discharged from the outlet 20b. As mentioned above, it may be desirable for the second ventilation means 40 to be a pump or a fan when the concentration of the substance 3 is high outside.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the first embodiment in that a partition section 50 is provided.
  • the partition part 50 separates a first space 60 communicating with the first chamber 20 through the inlet 20a and a second space 61 communicating with the first chamber 20 through the outlet 20b.
  • the partition 50 physically separates the first air space 60 and the second air space 61 so that the substance 3 emitted from the odor source 2 does not move to the second air space 61 . can be lower than the concentration of substance 3 in the first airspace 60 .
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the third embodiment in that the partition portion 50 is provided with the through hole 51 .
  • the through-hole 51 is positioned in the first chamber 20 so as not to affect the concentration difference of the substance 3 between the first space 60 and the second space 61 so as to communicate the first space 60 and the second space 61 . is provided. In the first chamber 20, if there is a difference in concentration of the substance 3 between the first space 60 and the second space 61, the first space 60 and the second space 61 need not be completely shielded.
  • the filter 41 may be installed in the through hole 51. In this way, movement of the substance 3 from the first airspace 60 to the second airspace 61 can be prevented.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the third embodiment shown in FIG. 15 in that a second chamber 70 is provided. .
  • the second chamber 70 communicates with the first chamber 20 and the second air space 61 via the outlet 20b.
  • the gas discharged from the discharge port 20b is held in the second chamber 70 once.
  • a second chamber 70 may be provided to perform a specific treatment before discharging into the second airspace 61.
  • a member made of a material that easily adsorbs the substance 3 may be arranged in the second chamber 70 , the member may be made to adsorb the substance 3 , and the member may be removed from the second chamber 70 .
  • a pump as the second ventilation means 40 may be provided at the discharge port 20b of the first chamber 20.
  • a through hole (not shown) may be provided between the first chamber 20 and the second chamber 70 in addition to the discharge port 20b.
  • the first ventilation means 30 and the second ventilation means 40 may be shutters, pumps, electromagnetic valves, and fans.
  • a pump may be provided between the second chamber 70 and the second space 61.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the fifth embodiment in that a second substance sensor 71 is provided.
  • a second substance sensor 71 is arranged in the second chamber 70 .
  • the second substance sensor 71 detects the substance 3 discharged from the discharge port 20b. Based on the detection result of the second substance sensor 71, it is possible to confirm how much substance 3 remains in the first chamber 20.
  • FIG. 1 A second substance sensor 71 is arranged in the second chamber 70 .
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the second embodiment in that a tubular member 80 is provided.
  • the tubular member 80 receives the gas discharged from the two-way pump as the second ventilation means 40 attached to the discharge port 20b through the first air space 60 communicating through the inlet 20a. 2 Send to airspace 61. At the same time, tubular member 80 delivers gas taken from second air space 61 to first chamber 20 .
  • the bidirectional pump used as the second ventilating means 40 a pump capable of inflowing gas in both directions at the same time is used.
  • the length of the tubular member 80 is not particularly limited, and the length may be adjustable.
  • a plurality of tubular members 80 may be configured to be connectable.
  • the substance detection device 1 is effective when there is no airspace with a low concentration of the substance 3 around it.
  • the first ventilation means 30 when the substance 3 is detected by the first substance sensor 10 arranged inside the first chamber 20, the first ventilation means 30 causes the first chamber 20 to is opened, and when the detection of the substance 3 by the first substance sensor 10 is completed, the first ventilation means 30 closes the inlet 20a. Therefore, it is possible to refresh the first substance sensor 10 and suppress deterioration of accuracy.
  • the second ventilation means 40 for opening and closing the outlet 20b is provided.
  • the discharge port 20b is opened by the second ventilation means 40.
  • the discharge port 20b is closed by the second ventilation means 40, thereby preventing the substance 3 contained in the gas from being discharged from the discharge port 20b and suppressing a decrease in the concentration of the substance 3. becomes possible.
  • the first air space 60 communicates with the first chamber 20 via the inlet 20a, and the first chamber 20 communicates with the first chamber 20 via the outlet 20b.
  • a partition part 50 is provided to partition the second air space 61 having a low concentration of 3. By doing so, it is possible to more reliably change the concentration of the substance 3 around the first substance sensor 10 between the time of detection and the time of non-detection.
  • the partition part 50 separates the first space 60 and the second space 61 in the first chamber 20 at positions that do not affect the concentration difference of the substance 3 between the first space 60 and the second space 61 .
  • a through hole 51 communicating with the second air space 61 is provided.
  • the partition part 50 may be of a size that causes a difference in concentration of the substance 3 between the first space 60 and the second space 61 in the first chamber 20 .
  • the partition part 50 can be shaped like a brim protruding from the first chamber 20 .
  • the second ventilation means 40 may be provided in the substance detection device 1 having a configuration including the partition section 50 .
  • FIG. 21A shows a configuration in which the second ventilation means 40 is a shutter.
  • the shutter can be closed during the detection of the substance 3 and opened after the detection.
  • the second ventilation means 40 can be an electromagnetic valve.
  • FIG. 21B shows a configuration in which the second ventilation means 40 is a pump.
  • the pump can be stopped during the detection of the substance 3, and after the detection is completed, the pump can be driven to discharge the gas in the first chamber 20.
  • gas is introduced into the first chamber 20 through the through hole 42 .
  • the second ventilation means 40 can be a fan.
  • the pump can be stopped during the detection of the substance 3, and after the detection is completed, the pump can be driven to introduce gas into the first chamber 20. In this case, the gas inside the first chamber 20 is discharged through the through hole 42 .
  • the opening/closing timing of the second ventilation means 40 does not need to be synchronized with the opening/closing timing of the first ventilation means 30.
  • the first ventilation means 30 is opened and the second ventilation means 40 is closed, and when the detection is finished, the first ventilation means 30 is closed, but the second ventilation means 40 remains closed, and the first ventilation means 40 is closed.
  • the second ventilation means 40 may be opened after sufficient time has passed for the substance 3 to desorb from the substance sensor 10 . In this manner, the opening and closing timings of the first ventilation means 30 and the second ventilation means 40 can be appropriately changed depending on the concentration of the surrounding substance 3 and the like.
  • the degree of opening and closing of the first ventilation means 30 and the second ventilation means 40 may be controlled as necessary.
  • the opening area of the shutters may be changed in several stages.
  • the suction force may be changed in several steps.
  • the second chamber 70 is provided which communicates with the first chamber 20 and the second air space 61 via the discharge port 20b. By doing so, it is possible to gradually discharge the gas to be detected.
  • a second substance sensor 71 is arranged in the second chamber 70 and detects the substance 3 discharged from the discharge port 20b. By doing so, it is possible to determine whether the concentration of the substance 3 in the gas discharged from the first chamber 20 has decreased.
  • a tubular member 80 is provided for sending the gas discharged from the outlet 20b to the second air space 61 having a lower concentration of the substance 3 than the first air space 60 communicating through the inlet 20a. In this way, the first substance sensor 10 can be refreshed even if there is no air space with a low concentration of the substance 3 near the first chamber 20 .
  • the first ventilation means 30 is a pump, an electromagnetic valve, or a fan. By doing so, the gas to be detected can be reliably drawn into the first chamber 20 .
  • the first substance sensor 10 includes the vibrator 11 to which the substance 3 is adsorbed, and by vibrating the vibrator 11, the adsorbed substance 3 is desorbed. By doing so, the substance adsorbed to the first substance sensor 10 can be easily desorbed.
  • the substance 3 is desorbed from the first substance sensor 10 after the substance 3 is detected by the first substance sensor 10 .
  • the substance 3 cannot be detected. Therefore, as shown in FIG. 22, two rows of combinations of the first substance sensor 10, the first chamber 20, and the first ventilation means 30 are prepared, and while the substance 3 is detected by the first substance sensor 10 of one row, , desorption of the substance 3 from the first substance sensor 10 in the other column may be performed, and then the columns for detecting the substance 3 may be alternately switched. By doing so, it becomes possible to detect the substance 3 without a break.
  • first substance sensor 10 the first chamber 20, the first ventilation means 30, and the like may be provided. By doing so, it is possible to cope with the case where the time for desorbing the substance 3 is longer than the time for detecting the substance 3 .
  • the first substance sensor 10 detects adsorption of the substance 3 from changes in the vibration frequency or amplitude of the vibrator 11 .
  • the invention is not limited to this.
  • Other methods may be used to detect the substance 3 .
  • a sensor whose electrical characteristics such as resistance change due to adsorption of the substance 3 may be used. Even in this case, the sensor may be vibrated when the substance 3 is desorbed.
  • first substance sensor 10 is provided in the first chamber 20 in the above embodiment.
  • the invention is not limited to this.
  • a plurality of first substance sensors 10 may be provided in the first chamber 20 .
  • first substance sensors 10 that detect different substances may be provided.
  • the beam 11a of the vibrator 11 is a cantilever beam.
  • the beam 11a may be cross-shaped.
  • the beam 11 a is suspended in a through hole provided in the substrate 4 .
  • the beam 11a is formed by intersecting a first beam 11d and a second beam 11e.
  • a lower electrode layer 13a and a piezoelectric element layer 13b are formed on the beam 11a in the same manner as in the configuration shown in FIG. 2B.
  • drive electrodes 14 are formed on both ends of the first beam 11d
  • detection electrodes 15 are formed on both ends of the second beam 11e.
  • a voltage signal applied between the drive electrode 14 and the lower electrode layer 13a excites the first beam 11d, and a voltage signal between the detection electrode 15 and the lower electrode layer 13a is detected as a detection signal. .
  • the beam 11a it is possible to use various beams such as a beam fixed at both ends or a beam fixed at three points.
  • the inlet 20a and the outlet 20b have substantially the same size.
  • the invention is not limited to this.
  • the inlet 20a may be made larger than the outlet 20b. In this way, the effect of opening and shielding the inlet 20a by the first ventilation means 30 can be further enhanced.
  • the substance to be detected is a chemical substance that constitutes an odor, but the present invention is not limited to this.
  • odorless chemical substances contained in gas may be detected.
  • the substance detection device 1 can be used in various environments.
  • the substance detection device 1 can be applied to the drinking check of a driver who drives an automobile.
  • the substance 3 to be detected is the volatile component of alcohol.
  • the substance detection device 1 is used by being incorporated in such an automobile.
  • the substance detection device 1 may be attached to a portable device such as a smart phone.
  • the present invention can be applied to the detection of substances contained in gas.
  • 1 Substance detection device 2 Odor source, 3 Substance, 4 Substrate, 5 Through hole, 10 First substance sensor, 11 Vibrator, 11a Beam, 11b Actuator, 11c Substance adsorption film, 11d First beam, 11e Second 2 beams, 12 fixing part, 13a lower electrode layer, 13b piezoelectric element layer, 13c upper electrode layer, 14 drive electrode, 15 detection electrode, 20 first chamber, 20a inlet, 20b outlet, 20c third opening, 30 First ventilation means, 40 Second ventilation means, 41 Filter, 42 Through hole, 50 Partition, 51 Through hole, 60 First space, 61 Second space, 70 Second chamber, 71 Second substance sensor, 80 Tubular member

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un détecteur de substance (1) comprenant un premier capteur de substance (10), une première chambre (20) et un premier moyen de ventilation (30). Le premier capteur de substance (10) détecte une substance (3) contenue dans un gaz. La première chambre (20) a le premier capteur de substance (10) disposé à l'intérieur de celle-ci et comporte une entrée (20a) pour permettre au gaz de s'écouler à l'intérieur de celle-ci et une sortie (20b) pour décharger le gaz. Le premier moyen de ventilation (30) peut ventiler l'intérieur de la première chambre (20) à travers l'entrée (20a). Le premier moyen de ventilation (30) ventile l'intérieur de la première chambre (20) par l'intermédiaire de l'entrée (20a) et là où la détection de la substance (3) par le premier capteur de substance (10) est achevée, la ventilation à travers l'entrée (20a) est arrêtée.
PCT/JP2021/048873 2021-01-22 2021-12-28 Détecteur de substance WO2022158275A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021009029 2021-01-22
JP2021-009029 2021-01-22

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WO2022158275A1 true WO2022158275A1 (fr) 2022-07-28

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TW (1) TW202232078A (fr)
WO (1) WO2022158275A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063242A (ja) * 1992-06-19 1994-01-11 Sanyo Electric Co Ltd 匂い検知装置
JP2002525578A (ja) * 1998-09-11 2002-08-13 フェムトメトリクス，インコーポレイテッド 化学センサーアレイ
US20080317089A1 (en) * 2007-06-22 2008-12-25 Decagon Devices, Inc. Apparatus, Method, and System for Measuring Water Activity and Weight
JP2017161300A (ja) * 2016-03-08 2017-09-14 株式会社デンソー 乗り物用臭い判別システム
WO2020246276A1 (fr) * 2019-06-03 2020-12-10 Ｉ－Ｐｅｘ株式会社 Système et procédé de détection de substance

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063242A (ja) * 1992-06-19 1994-01-11 Sanyo Electric Co Ltd 匂い検知装置
JP2002525578A (ja) * 1998-09-11 2002-08-13 フェムトメトリクス，インコーポレイテッド 化学センサーアレイ
US20080317089A1 (en) * 2007-06-22 2008-12-25 Decagon Devices, Inc. Apparatus, Method, and System for Measuring Water Activity and Weight
JP2017161300A (ja) * 2016-03-08 2017-09-14 株式会社デンソー 乗り物用臭い判別システム
WO2020246276A1 (fr) * 2019-06-03 2020-12-10 Ｉ－Ｐｅｘ株式会社 Système et procédé de détection de substance

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