WO2022158275A1 - Substance detector - Google Patents

Substance detector Download PDF

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Publication number
WO2022158275A1
WO2022158275A1 PCT/JP2021/048873 JP2021048873W WO2022158275A1 WO 2022158275 A1 WO2022158275 A1 WO 2022158275A1 JP 2021048873 W JP2021048873 W JP 2021048873W WO 2022158275 A1 WO2022158275 A1 WO 2022158275A1
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WO
WIPO (PCT)
Prior art keywords
substance
chamber
ventilation means
detection device
sensor
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Application number
PCT/JP2021/048873
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French (fr)
Japanese (ja)
Inventor
健治 緒方
俊介 和田
Original Assignee
Ｉ－Ｐｅｘ株式会社
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Application filed by Ｉ－Ｐｅｘ株式会社 filed Critical Ｉ－Ｐｅｘ株式会社
Publication of WO2022158275A1 publication Critical patent/WO2022158275A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

Definitions

  • the present invention relates to a substance detection device.
  • Patent Document 1 discloses an odor sensor that detects an odorant adsorbed on a substance adsorption film based on a weight change of the substance adsorption film.
  • this odor sensor detachment of odorants from the substance adsorption film is achieved by introducing air containing less odorants into the chamber and discharging the sample gas from the chamber.
  • the present invention has been made under the above circumstances, and an object of the present invention is to provide a substance detection device capable of suppressing deterioration of accuracy by desorbing a substance adsorbed on a substance sensor.
  • the substance detection device comprises: a first substance sensor that detects a substance contained in the gas; a first chamber in which the first substance sensor is arranged and provided with an inlet for inflowing the gas and an outlet for discharging the gas; a first ventilation means capable of ventilating the inside of the first chamber through the inlet; The first ventilation means is ventilating the first chamber through the inlet when detecting the substance by the first substance sensor; When the detection of the substance by the first substance sensor ends, ventilation through the inlet is stopped.
  • the second ventilation means is stopping ventilation through the outlet when the substance is detected by the first substance sensor; When the detection of the substance by the first substance sensor is completed, the inside of the first chamber is ventilated through the outlet; You can do it.
  • the second ventilation means is ventilating the first chamber through the outlet when the substance is detected by the first substance sensor; When the detection of the substance by the first substance sensor is finished, ventilation through the outlet is stopped; You can do it.
  • the second ventilation means constantly ventilates the interior of the first chamber through the outlet, You can do it.
  • the second ventilation means is a shutter, pump, fan or solenoid valve, You can do it.
  • a through-hole communicating the first space and the second space is provided at a position that does not affect the concentration difference of the substance between the first space and the second space. , You can do it.
  • a second substance sensor disposed in the second chamber and detecting the substance discharged from the outlet; You can do it.
  • a tubular member for sending the gas discharged from the outlet to a second air space having a lower concentration of the substance than the first air space communicating with the first chamber via the inlet; You can do it.
  • the first ventilation means is a shutter, pump, fan or solenoid valve, You can do it.
  • the first substance sensor comprises a vibrator to which the substance is adsorbed, desorbing the adsorbed substance by vibrating the vibrator; You can do it.
  • the inside of the first chamber is ventilated through the inflow port when the substance is detected by the first substance sensor, and the inside of the first chamber is ventilated through the inflow port when the detection of the substance by the first substance sensor is completed. to stop. Therefore, the deterioration of accuracy can be suppressed by desorbing the substance adsorbed on the substance sensor.
  • FIG. 1 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 1 of the present invention
  • FIG. 2 is a side view of a first substance sensor that constitutes the substance detection device of FIG. 1
  • FIG. FIG. 2B is an enlarged view of a driving portion that constitutes the first substance sensor of FIG. 2A
  • 2 is a flow chart showing the operation of the substance detection device of FIG. 1
  • FIG. 2 is a schematic diagram showing a state during detection of the substance detection device of FIG. 1
  • FIG. 2 is a schematic diagram showing a state after detection of the substance detection device of FIG. 1;
  • FIG. 5 is a diagram showing changes in the amount of adsorbed substances in the substance sensor when substance detection is performed a plurality of times without closing the inflow port by the first ventilation means
  • FIG. 6B is a diagram showing changes in detection sensitivity when substance detection is performed multiple times in the case of FIG. 6A.
  • FIG. 10 is a diagram showing changes in the amount of adsorbed substances in the substance sensor when the operation of closing the inflow port by the first ventilation means is performed and substance detection is performed a plurality of times;
  • FIG. 7B is a diagram showing changes in detection sensitivity when substance detection is performed multiple times in the case of FIG. 7A. It is a figure which shows a structure in case a 1st ventilation means is a pump.
  • FIG. 4 is a diagram showing a configuration in which the first ventilating means is a pump and a filter is provided at the outlet; It is a figure which shows a structure in case a 1st ventilation means is a fan.
  • FIG. 3 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 2 of the present invention; 13 is a flow chart showing the operation of the substance detection device of FIG. 12; 13 is a timing chart showing another example of the operation of the substance detection device of FIG. 12; FIG.
  • FIG. 4 is a diagram showing a configuration in which the second ventilating means is a pump;
  • FIG. 4 is a diagram showing a configuration in which the second ventilation means is an electromagnetic valve; It is a figure which shows a structure in case a 2nd ventilation means is a fan.
  • FIG. 5 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 3 of the present invention;
  • FIG. 10 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 4 of the present invention;
  • FIG. 10 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 5 of the present invention;
  • FIG. 18 is a schematic diagram showing a modification of the configuration of the substance detection device of FIG. 17;
  • FIG. 18 is a schematic diagram showing a modification of the configuration of the substance detection device of FIG. 17;
  • FIG. 11 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 6 of the present invention
  • FIG. 11 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 7 of the present invention
  • FIG. 11 is a schematic diagram showing Modification 1 of the configuration of the substance detection device according to Embodiment 3 of the present invention
  • FIG. 11 is a schematic diagram showing a modification 2 of the configuration of the substance detection device according to Embodiment 3 of the present invention
  • 1 is a schematic diagram showing the configuration of a substance detection device capable of continuously detecting substances
  • FIG. It is a figure which shows the modification of a substance sensor.
  • the substance detection device 1 includes a first substance sensor 10 , a first chamber 20 and a first ventilation means 30 .
  • the substance detection device 1 detects the substance 3 emitted from the odor source 2 into the gas.
  • the first substance sensor 10 detects the substance 3 contained in the surrounding gas.
  • the substance 3 can be, for example, an odor-causing substance that is dispersed in the gas from the odor source 2 and constitutes the odor.
  • the substance 3 to be detected is, for example, a gaseous substance that constitutes a chemical substance to be detected that is contained in the air, for example, among the group of chemical substances that constitute odors.
  • Examples of chemical substances to be detected include odor-causing substances having specific odors such as ammonia, mercaptans, aldehydes, hydrogen sulfide, and amines.
  • the first substance sensor 10 includes a vibrator 11 to which the substance 3 is adsorbed, and a fixing portion 12 that fixes the end portion of the vibrator 11 to the first chamber 20 .
  • the vibration frequency or amplitude changes as the substance 3 is adsorbed.
  • the first substance sensor 10 detects the presence or absence of adsorption of the substance 3 by detecting changes in vibration frequency or amplitude.
  • the fixed part 12 is, for example, a silicon substrate.
  • the vibrator 11 includes, for example, a vibrating beam 11a, a driving portion 11b formed on the beam 11a, a substance adsorption film 11c formed on the beam 11a opposite to the driving portion 11b, Prepare.
  • the beam 11a is a cantilever beam whose one end is fixed to the fixed portion 12 and which can vibrate in one direction.
  • the silicon substrate constituting the fixing portion 12 can be used in a state of protruding.
  • the drive section 11b includes a conductive lower electrode layer 13a, a piezoelectric element layer 13b composed of piezoelectric elements, and a conductive upper electrode layer 13c.
  • the lower electrode layer 13a, the piezoelectric element layer 13b and the upper electrode layer 13c are laminated in this order.
  • the piezoelectric element layer 13b expands and contracts. Due to this expansion and contraction, the beam 11a bends and vibrates.
  • the lower electrode layer 13a is grounded to a ground electrode (not shown).
  • a drive electrode (not shown) is connected to the upper electrode layer 13c.
  • a driving voltage is applied between the upper electrode layer 13c and the lower electrode layer 13a via the ground electrode and the driving electrode.
  • the upper electrode layer 13c is also connected to detection electrodes (not shown).
  • a signal indicating the potential difference between the upper electrode layer 13c and the lower electrode layer 13a is output via the ground electrode and the detection electrode as a detection signal indicating the vibration state of the beam 11a.
  • the substance adsorption film 11c is made of a material that adsorbs the substance 3.
  • the vibration frequency and amplitude of the vibrator 11 change. The change appears as a change in the frequency and amplitude of the detected signal. Therefore, adsorption of the substance 3 can be detected based on the detection signal indicating the vibration state of the beam 11a.
  • the substance adsorption film 11c there is a limit to the amount of the substance 3 that can be adsorbed by the vibrator 11, and the substance 3 will not be adsorbed any more. That is, the adsorption amount of the substance 3 to the vibrator 11 is saturated. Therefore, the first substance sensor 10 desorbs the substance 3 from the vibrator 11 after performing the detection processing of the substance 3 . Specifically, the first substance sensor 10 continues to vibrate the vibrator 11 even after the substance 3 detection process is finished. Due to this vibration, the substance 3 adsorbed on the substance adsorption film 11c can be desorbed. In other words, the substance adsorption film 11c can be reused by desorbing the substance 3 after adsorbing the substance 3 .
  • Various materials can be used for the material of the substance adsorption film 11c. For example, a crystal oscillator, a metal oxide semiconductor, an organic semiconductor, or the like is used as the substance adsorption film 11c.
  • the first chamber 20 is a container having a chamber capable of containing gas therein.
  • a first substance sensor 10 is provided in a room within the first chamber 20 .
  • the first chamber 20 is provided with an inlet 20a for inflowing gas and an outlet 20b for discharging gas.
  • a material for the first chamber 20 a material that can prevent gas from flowing into the interior is used. For example, metal may be used, or other materials such as plastic may be used.
  • the inlet 20a and the outlet 20b are provided on opposite sides of each other. Therefore, when the inlet 20a faces the odor source 2, the outlet 20b faces away from the odor source 2. FIG. In this case, the air space communicating with the inlet 20a and the air space communicating with the outlet 20b tend to have different concentrations of the substance 3 from each other.
  • the inlet 20a and the outlet 20b may be provided on a surface of the first chamber 20 adjacent to the surface on which the inlet 20a is provided. That is, the inlet 20a and the outlet 20b may be provided on the same plane. Also, the first chamber 20 may be placed in an air space where the concentration of the substance 3 is the same.
  • the first substance sensor 10 is arranged at a position facing the inflow port 20a. More specifically, the first substance sensor 10 is arranged such that the substance adsorption film 11c faces the inlet 20a. This makes it easier for the gas flowing in through the inlet 20a to come into contact with the substance adsorption film 11c.
  • the first ventilation means 30 is an opening/closing means for opening and closing the inflow port 20a.
  • the first ventilation means 30 is assumed to be a shutter. This shutter can be manually opened and closed. By opening the shutter, the inside of the first chamber 20 can be ventilated through the inlet 20a.
  • the substance detection device 1 opens the inflow port 20a by the first ventilation means 30 when the first substance sensor 10 detects a substance. Thereby, the inside of the first chamber 20 is ventilated through the inlet 20a. Furthermore, the substance detection device 1 closes the inlet 20a by the first ventilation means 30 when the substance detection by the first substance sensor 10 is completed. As a result, ventilation through the inflow port 20a is stopped.
  • the substance detection device 1 is operated by the first ventilation means 30 with the inflow port 20a facing the airspace where the gas containing the substance 3 exists, that is, the airspace where the odor source 2 exists.
  • the inlet 20a is opened (step S1).
  • the first ventilation means 30 slides to open the inlet 20a of the first chamber 20, as shown in FIG.
  • gas containing the substance 3 enters the interior of the first chamber 20 .
  • the substance detection device 1 performs sensor detection for detecting the substance 3 by the first substance sensor 10 (step S2).
  • the substance 3 that has entered the first chamber 20 is adsorbed on the substance adsorption film 11 c of the vibrator 11 of the first substance sensor 10 .
  • the first substance sensor 10 detects changes in vibration frequency or amplitude of the vibrator 11 due to adsorption of the substance 3 .
  • the substance detection device 1 closes the inlet 20a of the first chamber 20 by the first ventilation means 30, as shown in FIG. 5 (step S3). This stops the inflow of the substance 3 into the first chamber 20 through the inlet 30a.
  • the substance detection device 1 vibrates the vibrator 11 of the first substance sensor 10 to desorb the substance 3 (step S4).
  • the substance 3 adsorbed to the first substance sensor 10 is desorbed from the first substance sensor 10 .
  • the air space communicating with the outlet 20b is far from the odor source 2, so the concentration of the substance 3 contained in the gas is low. Therefore, the substance 3 desorbed from the first substance sensor 10 is discharged from the discharge port 20b. Thereby, the first substance sensor 10 is initialized, that is, refreshed.
  • the substance detection process ends.
  • the substance detection process for detecting the substance 3 is performed in such a procedure, and is repeated as necessary.
  • FIG. 6A continuously shows the time change of the ratio of the adsorption amount of the substance 3 when the saturated adsorption amount of the substance 3 in this case is 100% for the first time and the second time
  • FIG. 3 When the detection sensitivity for substance 3 is assumed to be 100%, the change over time in the ratio of detection sensitivity for substance 3 is shown superimposed on the first time and the second time. As shown in FIG.
  • FIGS. 7A and 7B show changes over time in the saturated adsorption amount of substance 3, the adsorption amount of substance 3 when the detection sensitivity is 100%, and the rate of detection sensitivity in this embodiment.
  • the substance detection device 1 according to the present embodiment can desorb the substance 3 from the first substance sensor 10 and initialize the state of the first substance sensor 10 for each detection. Therefore, as shown in FIG. 7B, the detection sensitivity of the first substance sensor 10 can be kept high over multiple detections.
  • the first ventilation means 30 is assumed to be a shutter.
  • the first ventilation means 30 may be a pump, as shown in FIG.
  • step S1 the pump is driven to allow the gas containing the substance 3 to flow into the first chamber 20 through the inlet 20a to ventilate the first chamber 20, and in step S3, the pump is stopped to stop the ventilation in the first chamber 20 .
  • the gas of the substance 3 can be forcibly sucked into the first chamber 20, so that the detection sensitivity of the substance 3 can be enhanced.
  • the first ventilation means 30 may be an electromagnetic valve, as shown in FIG.
  • step S1 as shown in FIG. 10
  • the solenoid valve is opened to allow the gas containing the substance 3 to flow in through the inlet 20a, and the first chamber 20 is ventilated through the inlet 20a. conduct.
  • step S3 as shown in FIG. 9, the electromagnetic valve is closed to prevent the gas containing the substance 3 from flowing through the inlet 20a, and the first chamber 20 is ventilated through the inlet 20a. to stop.
  • the inflow port 20a can be automatically opened and closed. Note that the control of this solenoid valve can be performed by a controller (not shown).
  • the first ventilation means 30 may be a two-way pump capable of switching the gas inflow direction.
  • the inlet 20a and the outlet 20b are the same opening.
  • a third opening 20c is provided instead of the discharge port 20b, and a filter 41 is installed in the third opening 20c.
  • a filter 41 that does not allow the substance 3 to pass through is used.
  • step S ⁇ b>1 the bidirectional pump as the first ventilation means 30 causes gas to flow into the first chamber 20 . Furthermore, in step S3, the bidirectional pump discharges the gas to the outside of the first chamber 20. As shown in FIG. At the time of discharge, a gas having a low concentration of the substance 3 flows into the first chamber 20 through the filter 41 , and the substance 3 can be desorbed from the first substance sensor 10 to refresh the first substance sensor 10 . Become. That is, in this case, gas flows in from the third opening 20c.
  • the filter 41 may be omitted if the concentration of the substance 3 is sufficiently low in the airspace communicating with the third opening 20c.
  • the first ventilation means 30 may be a fan, as shown in FIG. 11B.
  • the fan sends gas into the first chamber 20 by rotating.
  • step S1 the fan is rotated to allow the gas containing the substance 3 to flow in through the inlet 20a, thereby ventilating the first chamber 20 through the inlet 20a.
  • step S3 the rotation of the fan is stopped so that gas does not enter through the inlet 20a, and the ventilation inside the first chamber 20 through the inlet 20a is stopped.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the first embodiment in that a second ventilation means 40 for opening and closing the discharge port 20b is provided.
  • the second ventilation means 40 like the first ventilation means 30, is a shutter as an opening/closing means.
  • the second ventilation means 40 closes the outlet 20b to stop ventilation via the outlet 20b. Further, when the detection of the substance 3 by the first substance sensor 10 is completed, the discharge port 20b is opened by the second ventilation means 40, and the inside of the first chamber 20 is ventilated through the discharge port 20b.
  • step S1 the inlet 20a is opened (step S1), sensor detection is performed (step S2), the inlet 20a is closed (step S3), and the substance 3 is desorbed (step S4). It is the same as the first embodiment.
  • the substance detection device 1 performs an operation of closing the outlet 20b by the second ventilation means 40 and stopping ventilation via the outlet 20b in step S1. Further, in step S3, the discharge port 20b is opened by the second ventilation means 40, and the inside of the first chamber 20 is ventilated through the discharge port 20b. By performing such an operation, it is possible to prevent the substance 3 from being discharged from the discharge port 20b by closing the discharge port 20b at the time of detection. The substance 3 desorbed from can be discharged from the discharge port 20b. This operation is effective when the concentration of the substance 3 in the air space on the side of the outlet 20b is lower than the concentration of the substance 3 in the air space on the side of the inlet 20a.
  • the opening and closing operations of the first ventilation means 30 and the second ventilation means 40 may be interlocked. That is, when the first ventilation means 30 opens, the second ventilation means 40 closes, and when the first ventilation means 30 closes, the second ventilation means 40 opens.
  • the inlet 20a and the outlet 20b are open, the substance 3 may flow into the first chamber 20 continuously.
  • an operation different from that described above may be performed for opening and closing the discharge port 20b.
  • the discharge port 20b is opened by the second ventilation means 40 to ventilate the inside of the first chamber 20 through the discharge port 20b.
  • the outlet 20b may be closed by the second ventilation means 40 to stop the ventilation inside the first chamber 20 via the outlet 20b.
  • the second ventilation means 40 ventilates the inside of the first chamber 20 through the outlet 20b even when the substance 3 is detected by the first substance sensor 10, Ventilation in the first chamber 20 may be continued even after the detection of the substance 3 by the substance sensor 10 is finished. That is, the second ventilation means 40 may constantly ventilate the inside of the first chamber 20 through the outlet 20b.
  • the concentration of the substance 3 is high outside, it may be appropriate to continuously ventilate with the second ventilation means 40 in this way. For example, if the first substance sensor 10 detects a smoke substance, if the outside is full of smoke, the inside of the first chamber 20 must be constantly ventilated in order to exhaust the smoke. In such a case, it is desirable to constantly ventilate the interior of the first chamber 20 with the second ventilation means 40 .
  • the second ventilation means 40 is assumed to be a shutter.
  • the second ventilation means 40 may be a pump, as shown in Figure 14A. By doing so, the gas of the substance 3 can be forcibly discharged out of the first chamber 20, so that the detection sensitivity of the substance 3 can be enhanced.
  • a pump it is desirable to provide a through hole 42 for taking in outside air into the first chamber 20 on the same side as the outlet 20b.
  • the pump is stopped during the detection of the substance 3 and , the gas in the first chamber 20 can be discharged by a pump.
  • the second ventilation means 40 is a pump
  • the pump is stopped during detection, After the detection is finished, the gas in the first chamber 20 may be discharged by a pump.
  • the second ventilation means 40 may be an electromagnetic valve, as shown in FIG. 14B. By doing so, the second ventilation means 40 can be automatically opened and closed by a controller (not shown). Also, the second ventilation means 40 may be a fan, as shown in FIG. 14C. The fan can be rotated manually, automatically, or by the gas flow obtained from the first ventilation means 30, and the gas in the first chamber 20 can be discharged from the outlet 20b. As mentioned above, it may be desirable for the second ventilation means 40 to be a pump or a fan when the concentration of the substance 3 is high outside.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the first embodiment in that a partition section 50 is provided.
  • the partition part 50 separates a first space 60 communicating with the first chamber 20 through the inlet 20a and a second space 61 communicating with the first chamber 20 through the outlet 20b.
  • the partition 50 physically separates the first air space 60 and the second air space 61 so that the substance 3 emitted from the odor source 2 does not move to the second air space 61 . can be lower than the concentration of substance 3 in the first airspace 60 .
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the third embodiment in that the partition portion 50 is provided with the through hole 51 .
  • the through-hole 51 is positioned in the first chamber 20 so as not to affect the concentration difference of the substance 3 between the first space 60 and the second space 61 so as to communicate the first space 60 and the second space 61 . is provided. In the first chamber 20, if there is a difference in concentration of the substance 3 between the first space 60 and the second space 61, the first space 60 and the second space 61 need not be completely shielded.
  • the filter 41 may be installed in the through hole 51. In this way, movement of the substance 3 from the first airspace 60 to the second airspace 61 can be prevented.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the third embodiment shown in FIG. 15 in that a second chamber 70 is provided. .
  • the second chamber 70 communicates with the first chamber 20 and the second air space 61 via the outlet 20b.
  • the gas discharged from the discharge port 20b is held in the second chamber 70 once.
  • a second chamber 70 may be provided to perform a specific treatment before discharging into the second airspace 61.
  • a member made of a material that easily adsorbs the substance 3 may be arranged in the second chamber 70 , the member may be made to adsorb the substance 3 , and the member may be removed from the second chamber 70 .
  • a pump as the second ventilation means 40 may be provided at the discharge port 20b of the first chamber 20.
  • a through hole (not shown) may be provided between the first chamber 20 and the second chamber 70 in addition to the discharge port 20b.
  • the first ventilation means 30 and the second ventilation means 40 may be shutters, pumps, electromagnetic valves, and fans.
  • a pump may be provided between the second chamber 70 and the second space 61.
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the fifth embodiment in that a second substance sensor 71 is provided.
  • a second substance sensor 71 is arranged in the second chamber 70 .
  • the second substance sensor 71 detects the substance 3 discharged from the discharge port 20b. Based on the detection result of the second substance sensor 71, it is possible to confirm how much substance 3 remains in the first chamber 20.
  • FIG. 1 A second substance sensor 71 is arranged in the second chamber 70 .
  • the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the second embodiment in that a tubular member 80 is provided.
  • the tubular member 80 receives the gas discharged from the two-way pump as the second ventilation means 40 attached to the discharge port 20b through the first air space 60 communicating through the inlet 20a. 2 Send to airspace 61. At the same time, tubular member 80 delivers gas taken from second air space 61 to first chamber 20 .
  • the bidirectional pump used as the second ventilating means 40 a pump capable of inflowing gas in both directions at the same time is used.
  • the length of the tubular member 80 is not particularly limited, and the length may be adjustable.
  • a plurality of tubular members 80 may be configured to be connectable.
  • the substance detection device 1 is effective when there is no airspace with a low concentration of the substance 3 around it.
  • the first ventilation means 30 when the substance 3 is detected by the first substance sensor 10 arranged inside the first chamber 20, the first ventilation means 30 causes the first chamber 20 to is opened, and when the detection of the substance 3 by the first substance sensor 10 is completed, the first ventilation means 30 closes the inlet 20a. Therefore, it is possible to refresh the first substance sensor 10 and suppress deterioration of accuracy.
  • the second ventilation means 40 for opening and closing the outlet 20b is provided.
  • the discharge port 20b is opened by the second ventilation means 40.
  • the discharge port 20b is closed by the second ventilation means 40, thereby preventing the substance 3 contained in the gas from being discharged from the discharge port 20b and suppressing a decrease in the concentration of the substance 3. becomes possible.
  • the first air space 60 communicates with the first chamber 20 via the inlet 20a, and the first chamber 20 communicates with the first chamber 20 via the outlet 20b.
  • a partition part 50 is provided to partition the second air space 61 having a low concentration of 3. By doing so, it is possible to more reliably change the concentration of the substance 3 around the first substance sensor 10 between the time of detection and the time of non-detection.
  • the partition part 50 separates the first space 60 and the second space 61 in the first chamber 20 at positions that do not affect the concentration difference of the substance 3 between the first space 60 and the second space 61 .
  • a through hole 51 communicating with the second air space 61 is provided.
  • the partition part 50 may be of a size that causes a difference in concentration of the substance 3 between the first space 60 and the second space 61 in the first chamber 20 .
  • the partition part 50 can be shaped like a brim protruding from the first chamber 20 .
  • the second ventilation means 40 may be provided in the substance detection device 1 having a configuration including the partition section 50 .
  • FIG. 21A shows a configuration in which the second ventilation means 40 is a shutter.
  • the shutter can be closed during the detection of the substance 3 and opened after the detection.
  • the second ventilation means 40 can be an electromagnetic valve.
  • FIG. 21B shows a configuration in which the second ventilation means 40 is a pump.
  • the pump can be stopped during the detection of the substance 3, and after the detection is completed, the pump can be driven to discharge the gas in the first chamber 20.
  • gas is introduced into the first chamber 20 through the through hole 42 .
  • the second ventilation means 40 can be a fan.
  • the pump can be stopped during the detection of the substance 3, and after the detection is completed, the pump can be driven to introduce gas into the first chamber 20. In this case, the gas inside the first chamber 20 is discharged through the through hole 42 .
  • the opening/closing timing of the second ventilation means 40 does not need to be synchronized with the opening/closing timing of the first ventilation means 30.
  • the first ventilation means 30 is opened and the second ventilation means 40 is closed, and when the detection is finished, the first ventilation means 30 is closed, but the second ventilation means 40 remains closed, and the first ventilation means 40 is closed.
  • the second ventilation means 40 may be opened after sufficient time has passed for the substance 3 to desorb from the substance sensor 10 . In this manner, the opening and closing timings of the first ventilation means 30 and the second ventilation means 40 can be appropriately changed depending on the concentration of the surrounding substance 3 and the like.
  • the degree of opening and closing of the first ventilation means 30 and the second ventilation means 40 may be controlled as necessary.
  • the opening area of the shutters may be changed in several stages.
  • the suction force may be changed in several steps.
  • the second chamber 70 is provided which communicates with the first chamber 20 and the second air space 61 via the discharge port 20b. By doing so, it is possible to gradually discharge the gas to be detected.
  • a second substance sensor 71 is arranged in the second chamber 70 and detects the substance 3 discharged from the discharge port 20b. By doing so, it is possible to determine whether the concentration of the substance 3 in the gas discharged from the first chamber 20 has decreased.
  • a tubular member 80 is provided for sending the gas discharged from the outlet 20b to the second air space 61 having a lower concentration of the substance 3 than the first air space 60 communicating through the inlet 20a. In this way, the first substance sensor 10 can be refreshed even if there is no air space with a low concentration of the substance 3 near the first chamber 20 .
  • the first ventilation means 30 is a pump, an electromagnetic valve, or a fan. By doing so, the gas to be detected can be reliably drawn into the first chamber 20 .
  • the first substance sensor 10 includes the vibrator 11 to which the substance 3 is adsorbed, and by vibrating the vibrator 11, the adsorbed substance 3 is desorbed. By doing so, the substance adsorbed to the first substance sensor 10 can be easily desorbed.
  • the substance 3 is desorbed from the first substance sensor 10 after the substance 3 is detected by the first substance sensor 10 .
  • the substance 3 cannot be detected. Therefore, as shown in FIG. 22, two rows of combinations of the first substance sensor 10, the first chamber 20, and the first ventilation means 30 are prepared, and while the substance 3 is detected by the first substance sensor 10 of one row, , desorption of the substance 3 from the first substance sensor 10 in the other column may be performed, and then the columns for detecting the substance 3 may be alternately switched. By doing so, it becomes possible to detect the substance 3 without a break.
  • first substance sensor 10 the first chamber 20, the first ventilation means 30, and the like may be provided. By doing so, it is possible to cope with the case where the time for desorbing the substance 3 is longer than the time for detecting the substance 3 .
  • the first substance sensor 10 detects adsorption of the substance 3 from changes in the vibration frequency or amplitude of the vibrator 11 .
  • the invention is not limited to this.
  • Other methods may be used to detect the substance 3 .
  • a sensor whose electrical characteristics such as resistance change due to adsorption of the substance 3 may be used. Even in this case, the sensor may be vibrated when the substance 3 is desorbed.
  • first substance sensor 10 is provided in the first chamber 20 in the above embodiment.
  • the invention is not limited to this.
  • a plurality of first substance sensors 10 may be provided in the first chamber 20 .
  • first substance sensors 10 that detect different substances may be provided.
  • the beam 11a of the vibrator 11 is a cantilever beam.
  • the beam 11a may be cross-shaped.
  • the beam 11 a is suspended in a through hole provided in the substrate 4 .
  • the beam 11a is formed by intersecting a first beam 11d and a second beam 11e.
  • a lower electrode layer 13a and a piezoelectric element layer 13b are formed on the beam 11a in the same manner as in the configuration shown in FIG. 2B.
  • drive electrodes 14 are formed on both ends of the first beam 11d
  • detection electrodes 15 are formed on both ends of the second beam 11e.
  • a voltage signal applied between the drive electrode 14 and the lower electrode layer 13a excites the first beam 11d, and a voltage signal between the detection electrode 15 and the lower electrode layer 13a is detected as a detection signal. .
  • the beam 11a it is possible to use various beams such as a beam fixed at both ends or a beam fixed at three points.
  • the inlet 20a and the outlet 20b have substantially the same size.
  • the invention is not limited to this.
  • the inlet 20a may be made larger than the outlet 20b. In this way, the effect of opening and shielding the inlet 20a by the first ventilation means 30 can be further enhanced.
  • the substance to be detected is a chemical substance that constitutes an odor, but the present invention is not limited to this.
  • odorless chemical substances contained in gas may be detected.
  • the substance detection device 1 can be used in various environments.
  • the substance detection device 1 can be applied to the drinking check of a driver who drives an automobile.
  • the substance 3 to be detected is the volatile component of alcohol.
  • the substance detection device 1 is used by being incorporated in such an automobile.
  • the substance detection device 1 may be attached to a portable device such as a smart phone.
  • the present invention can be applied to the detection of substances contained in gas.
  • 1 Substance detection device 2 Odor source, 3 Substance, 4 Substrate, 5 Through hole, 10 First substance sensor, 11 Vibrator, 11a Beam, 11b Actuator, 11c Substance adsorption film, 11d First beam, 11e Second 2 beams, 12 fixing part, 13a lower electrode layer, 13b piezoelectric element layer, 13c upper electrode layer, 14 drive electrode, 15 detection electrode, 20 first chamber, 20a inlet, 20b outlet, 20c third opening, 30 First ventilation means, 40 Second ventilation means, 41 Filter, 42 Through hole, 50 Partition, 51 Through hole, 60 First space, 61 Second space, 70 Second chamber, 71 Second substance sensor, 80 Tubular member

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Abstract

A substance detector (1) comprises a first substance sensor (10), a first chamber (20), and a first ventilation means (30). The first substance sensor (10) detects a substance (3) contained in a gas. The first chamber (20) has the first substance sensor (10) arranged inside thereof and is provided with an inlet (20a) for allowing the gas to flow therein and an outlet (20b) for discharging the gas. The first ventilation means (30) can ventilate the inside of the first chamber (20) through the inlet (20a). The first ventilation means (30) ventilates the inside of the first chamber (20) via the inlet (20a), and where the detection of the substance (3) by the first substance sensor (10) is completed, the ventilation through the inlet (20a) is stopped.

Description

物質検出装置Substance detection device
　本発明は、物質検出装置に関する。 The present invention relates to a substance detection device.
　特許文献１には、物質吸着膜の重量変化によって、その物質吸着膜に吸着した匂い物質を検出する匂いセンサが開示されている。この匂いセンサでは、物質吸着膜からの匂い物質の離脱を、匂い物質の含有量が少ない空気をチャンバ内に入れ、チャンバ内のサンプルガスを排出することで実現している。 Patent Document 1 discloses an odor sensor that detects an odorant adsorbed on a substance adsorption film based on a weight change of the substance adsorption film. In this odor sensor, detachment of odorants from the substance adsorption film is achieved by introducing air containing less odorants into the chamber and discharging the sample gas from the chamber.
特許第６５０８６８９号公報Japanese Patent No. 6508689
　上記特許文献１に記載の匂いセンサでは、物質吸着膜から匂い物質を離脱させるために、空気をチャンバ内に入れる必要がある。しかしながら、匂いセンサが設置される環境によっては、匂い物質の含有量が少ない空気をチャンバ内に入れることができない場合もある。このような場合には、匂い物質が匂いセンサに供給され続けるため、物質吸着膜から匂い物質を十分に離脱させることができず、匂い物質の検知精度が悪化する。 In the odor sensor described in Patent Document 1 above, it is necessary to introduce air into the chamber in order to detach the odorant from the substance adsorption film. However, depending on the environment in which the odor sensor is installed, it may not be possible to introduce air containing less odorants into the chamber. In such a case, since the odorant continues to be supplied to the odor sensor, the odorant cannot be sufficiently separated from the substance adsorption film, and the detection accuracy of the odorant deteriorates.
　本発明は、上記実情の下になされたものであり、物質センサに吸着した物質を脱離して精度の悪化を抑制することができる物質検出装置を提供することを目的とする。 The present invention has been made under the above circumstances, and an object of the present invention is to provide a substance detection device capable of suppressing deterioration of accuracy by desorbing a substance adsorbed on a substance sensor.
　上記目的を達成するために、本発明に係る物質検出装置は、
　気体に含まれる物質を検出する第１物質センサと、
　前記第１物質センサを内部に配置し、前記気体を流入する流入口と前記気体を排出する排出口とが設けられた第１チャンバと、
　前記流入口を介して前記第１チャンバ内を換気可能な第１換気手段と、を備え、
　前記第１換気手段は、
　前記第１物質センサにより前記物質を検出する際に、前記流入口を介した前記第１チャンバ内の換気を行い、
　前記第１物質センサによる前記物質の検出が終了すると、前記流入口を介した換気を停止する。 In order to achieve the above object, the substance detection device according to the present invention comprises:
a first substance sensor that detects a substance contained in the gas;
a first chamber in which the first substance sensor is arranged and provided with an inlet for inflowing the gas and an outlet for discharging the gas;
a first ventilation means capable of ventilating the inside of the first chamber through the inlet;
The first ventilation means is
ventilating the first chamber through the inlet when detecting the substance by the first substance sensor;
When the detection of the substance by the first substance sensor ends, ventilation through the inlet is stopped.
　この場合、前記排出口を介して前記第１チャンバ内を換気可能な第２換気手段を備える、
　こととしてもよい。 In this case, it comprises a second ventilation means capable of ventilating the inside of the first chamber through the outlet,
You can do it.
　前記第２換気手段は、
　前記第１物質センサにより前記物質を検出する際に、前記排出口を介した換気を停止し、
　前記第１物質センサによる前記物質の検出が終了すると、前記排出口を介した前記第１チャンバ内の換気を行う、
　こととしてもよい。 The second ventilation means is
stopping ventilation through the outlet when the substance is detected by the first substance sensor;
When the detection of the substance by the first substance sensor is completed, the inside of the first chamber is ventilated through the outlet;
You can do it.
　前記第２換気手段は、
　前記第１物質センサにより前記物質を検出する際に、前記排出口を介した前記第１チャンバ内の換気を行い、
　前記第１物質センサによる前記物質の検出が終了すると、前記排出口を介した換気を停止する、
　こととしてもよい。 The second ventilation means is
ventilating the first chamber through the outlet when the substance is detected by the first substance sensor;
When the detection of the substance by the first substance sensor is finished, ventilation through the outlet is stopped;
You can do it.
　前記第２換気手段は、常時、前記排出口を介した前記第１チャンバ内の換気を行う、
　こととしてもよい。 The second ventilation means constantly ventilates the interior of the first chamber through the outlet,
You can do it.
　前記第２換気手段は、シャッタ、ポンプ、ファン又は電磁弁である、
　こととしてもよい。 The second ventilation means is a shutter, pump, fan or solenoid valve,
You can do it.
　前記流入口を介して前記第１チャンバと連通する第１空域と、前記排出口を介して前記第１チャンバと連通し、前記第１空域よりも前記物質の濃度が低い第２空域と、を仕切る仕切部を備える、
　こととしてもよい。 a first air space communicating with the first chamber through the inlet; and a second air space communicating with the first chamber through the outlet and having a lower concentration of the substance than the first air space. Equipped with a partition for partitioning,
You can do it.
　前記仕切部では、
　前記第１チャンバにおいて、前記第１空域と前記第２空域との前記物質の濃度差に影響を与えない位置に、前記第１空域と前記第２空域とを連通する貫通孔が設けられている、
　こととしてもよい。 In the partition,
In the first chamber, a through-hole communicating the first space and the second space is provided at a position that does not affect the concentration difference of the substance between the first space and the second space. ,
You can do it.
　前記排出口を介して前記第１チャンバと連通するとともに、前記第２空域と連通する第２チャンバを備える、
　こととしてもよい。 a second chamber communicating with the first chamber through the outlet and communicating with the second airspace;
You can do it.
　前記第２チャンバ内に配置され、前記排出口から排出される前記物質を検出する第２物質センサを備える、
　こととしてもよい。 a second substance sensor disposed in the second chamber and detecting the substance discharged from the outlet;
You can do it.
　前記排出口から排出された前記気体を、前記流入口を介して前記第１チャンバと連通する第１空域よりも前記物質の濃度が低い第２空域に送る管状部材を備える、
　こととしてもよい。 a tubular member for sending the gas discharged from the outlet to a second air space having a lower concentration of the substance than the first air space communicating with the first chamber via the inlet;
You can do it.
　前記第１換気手段は、シャッタ、ポンプ、ファン又は電磁弁である、
　こととしてもよい。 The first ventilation means is a shutter, pump, fan or solenoid valve,
You can do it.
　前記第１物質センサは、前記物質が吸着する振動子を備え、
　前記振動子を振動させることにより、吸着した前記物質を脱離する、
　こととしてもよい。 The first substance sensor comprises a vibrator to which the substance is adsorbed,
desorbing the adsorbed substance by vibrating the vibrator;
You can do it.
　本発明によれば、第１物質センサにより物質を検出する際に、流入口を介した第１チャンバ内の換気を行い、第１物質センサによる物質の検出が終了すると、流入口を介した換気を停止する。このため、物質センサに吸着した物質を脱離して精度の悪化を抑制することができる。 According to the present invention, the inside of the first chamber is ventilated through the inflow port when the substance is detected by the first substance sensor, and the inside of the first chamber is ventilated through the inflow port when the detection of the substance by the first substance sensor is completed. to stop. Therefore, the deterioration of accuracy can be suppressed by desorbing the substance adsorbed on the substance sensor.
本発明の実施の形態１に係る物質検出装置の構成を示す模式図である。1 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 1 of the present invention; FIG. 図１の物質検出装置を構成する第１物質センサの側面図である。2 is a side view of a first substance sensor that constitutes the substance detection device of FIG. 1; FIG. 図２Ａの第１物質センサを構成する駆動部の拡大図である。FIG. 2B is an enlarged view of a driving portion that constitutes the first substance sensor of FIG. 2A; 図１の物質検出装置の動作を示すフローチャートである。2 is a flow chart showing the operation of the substance detection device of FIG. 1; 図１の物質検出装置の検出時における状態を示す模式図である。FIG. 2 is a schematic diagram showing a state during detection of the substance detection device of FIG. 1; 図１の物質検出装置の検出後における状態を示す模式図である。FIG. 2 is a schematic diagram showing a state after detection of the substance detection device of FIG. 1; 第１換気手段により流入口を閉じることなく複数回の物質検出を行った場合の物質センサにおける物質の吸着量の変化を示す図である。FIG. 5 is a diagram showing changes in the amount of adsorbed substances in the substance sensor when substance detection is performed a plurality of times without closing the inflow port by the first ventilation means; 図６Ａの場合で複数回の物質検出を行った場合の検出感度の変化を示す図である。FIG. 6B is a diagram showing changes in detection sensitivity when substance detection is performed multiple times in the case of FIG. 6A. 第１換気手段により流入口を閉じる動作を行って複数回の物質検出を行った場合の物質センサにおける物質の吸着量の変化を示す図である。FIG. 10 is a diagram showing changes in the amount of adsorbed substances in the substance sensor when the operation of closing the inflow port by the first ventilation means is performed and substance detection is performed a plurality of times; 図７Ａの場合で複数回の物質検出を行った場合の検出感度の変化を示す図である。FIG. 7B is a diagram showing changes in detection sensitivity when substance detection is performed multiple times in the case of FIG. 7A. 第１換気手段がポンプである場合の構成を示す図である。It is a figure which shows a structure in case a 1st ventilation means is a pump. 第１換気手段である電磁弁が閉じた状態の構成を示す図である。It is a figure which shows the structure of the state in which the electromagnetic valve which is a 1st ventilation means was closed. 第１換気手段である電磁弁が開いた状態の構成を示す図である。It is a figure which shows the structure of the state in which the electromagnetic valve which is a 1st ventilation means was opened. 第１換気手段がポンプであり、排出口にフィルタを設けた場合の構成を示す図である。FIG. 4 is a diagram showing a configuration in which the first ventilating means is a pump and a filter is provided at the outlet; 第１換気手段がファンである場合の構成を示す図である。It is a figure which shows a structure in case a 1st ventilation means is a fan. 本発明の実施の形態２に係る物質検出装置の構成を示す模式図である。FIG. 3 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 2 of the present invention; 図１２の物質検出装置の動作を示すフローチャートである。13 is a flow chart showing the operation of the substance detection device of FIG. 12; 図１２の物質検出装置の動作の他の例を示すタイミングチャートである。13 is a timing chart showing another example of the operation of the substance detection device of FIG. 12; 第２換気手段がポンプである場合の構成を示す図である。FIG. 4 is a diagram showing a configuration in which the second ventilating means is a pump; 第２換気手段が電磁弁である場合の構成を示す図である。FIG. 4 is a diagram showing a configuration in which the second ventilation means is an electromagnetic valve; 第２換気手段がファンである場合の構成を示す図である。It is a figure which shows a structure in case a 2nd ventilation means is a fan. 本発明の実施の形態３に係る物質検出装置の構成を示す模式図である。FIG. 5 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 3 of the present invention; 本発明の実施の形態４に係る物質検出装置の構成を示す模式図である。FIG. 10 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 4 of the present invention; 本発明の実施の形態５に係る物質検出装置の構成を示す模式図である。FIG. 10 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 5 of the present invention; 図１７の物質検出装置の構成の変形例を示す模式図である。FIG. 18 is a schematic diagram showing a modification of the configuration of the substance detection device of FIG. 17; 本発明の実施の形態６に係る物質検出装置の構成を示す模式図である。FIG. 11 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 6 of the present invention; 本発明の実施の形態７に係る物質検出装置の構成を示す模式図である。FIG. 11 is a schematic diagram showing the configuration of a substance detection device according to Embodiment 7 of the present invention; 本発明の実施の形態３に係る物質検出装置の構成の変形例その１を示す模式図である。FIG. 11 is a schematic diagram showing Modification 1 of the configuration of the substance detection device according to Embodiment 3 of the present invention; 本発明の実施の形態３に係る物質検出装置の構成の変形例その２を示す模式図である。FIG. 11 is a schematic diagram showing a modification 2 of the configuration of the substance detection device according to Embodiment 3 of the present invention; 連続して物質の検出が可能な物質検出装置の構成を示す模式図である。1 is a schematic diagram showing the configuration of a substance detection device capable of continuously detecting substances; FIG. 物質センサの変形例を示す図である。It is a figure which shows the modification of a substance sensor.
　以下、本発明の実施の形態について図面を参照して詳細に説明する。各図面においては、同一又は同等の部分に同一の符号を付す。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same code|symbol is attached|subjected to the same or equivalent part.
実施の形態１
　まず、本発明の実施の形態１について説明する。図１に示すように、物質検出装置１は、第１物質センサ１０と、第１チャンバ２０と、第１換気手段３０と、を備える。本実施の形態では、物質検出装置１は、匂い発生源２から気体中に放出される物質３を検出する。 Embodiment 1
First, Embodiment 1 of the present invention will be described. As shown in FIG. 1 , the substance detection device 1 includes a first substance sensor 10 , a first chamber 20 and a first ventilation means 30 . In this embodiment, the substance detection device 1 detects the substance 3 emitted from the odor source 2 into the gas.
　第１物質センサ１０は、周囲の気体に含まれる物質３を検出する。物質３は、例えば匂い発生源２から気体中に分散し、その匂いを構成する匂い原因物質であるとすることができる。検出対象となる物質３は、例えば、匂いを構成する化学物質群のうち、例えば空気中に含まれる検出対象の化学物質を構成する気体状の物質である。検出対象の化学物質としては、例えばアンモニア、メルカプタン、アルデヒド、硫化水素、アミンなどの特有の臭気を有する匂い原因物質がある。 The first substance sensor 10 detects the substance 3 contained in the surrounding gas. The substance 3 can be, for example, an odor-causing substance that is dispersed in the gas from the odor source 2 and constitutes the odor. The substance 3 to be detected is, for example, a gaseous substance that constitutes a chemical substance to be detected that is contained in the air, for example, among the group of chemical substances that constitute odors. Examples of chemical substances to be detected include odor-causing substances having specific odors such as ammonia, mercaptans, aldehydes, hydrogen sulfide, and amines.
　図２Ａに示すように、第１物質センサ１０は、物質３が吸着する振動子１１と、振動子１１の端部を第１チャンバ２０に固定する固定部１２と、を備える。振動子１１では、物質３が吸着することにより、振動周波数又は振幅が変化する。第１物質センサ１０は、振動周波数又は振幅の変化を検出して、物質３の吸着の有無を検出する。固定部１２は、例えば、シリコン基板である。 As shown in FIG. 2A, the first substance sensor 10 includes a vibrator 11 to which the substance 3 is adsorbed, and a fixing portion 12 that fixes the end portion of the vibrator 11 to the first chamber 20 . In the vibrator 11, the vibration frequency or amplitude changes as the substance 3 is adsorbed. The first substance sensor 10 detects the presence or absence of adsorption of the substance 3 by detecting changes in vibration frequency or amplitude. The fixed part 12 is, for example, a silicon substrate.
　より具体的には、振動子１１は、例えば、振動可能な梁１１ａと、梁１１ａ上に形成された駆動部１１ｂと、梁１１ａにおいて駆動部１１ｂの反対に形成された物質吸着膜１１ｃと、を備える。梁１１ａは、一端が固定部１２に固定され、一方向に振動可能な片持ち梁である。梁１１ａとしては、固定部１２を構成するシリコン基板が張り出した状態のものを用いることができる。 More specifically, the vibrator 11 includes, for example, a vibrating beam 11a, a driving portion 11b formed on the beam 11a, a substance adsorption film 11c formed on the beam 11a opposite to the driving portion 11b, Prepare. The beam 11a is a cantilever beam whose one end is fixed to the fixed portion 12 and which can vibrate in one direction. As the beam 11a, the silicon substrate constituting the fixing portion 12 can be used in a state of protruding.
　図２Ｂに示すように、駆動部１１ｂは、導電性の下部電極層１３ａと、圧電素子で構成される圧電素子層１３ｂと、導電性の上部電極層１３ｃと、を備える。下部電極層１３ａ、圧電素子層１３ｂ及び上部電極層１３ｃは、この順に積層されている。下部電極層１３ａと、上部電極層１３ｃとの間に、周期的に変動する電圧信号を印加すると、圧電素子層１３ｂが伸縮する。この伸縮により、梁１１ａが撓んで振動する。 As shown in FIG. 2B, the drive section 11b includes a conductive lower electrode layer 13a, a piezoelectric element layer 13b composed of piezoelectric elements, and a conductive upper electrode layer 13c. The lower electrode layer 13a, the piezoelectric element layer 13b and the upper electrode layer 13c are laminated in this order. When a periodically fluctuating voltage signal is applied between the lower electrode layer 13a and the upper electrode layer 13c, the piezoelectric element layer 13b expands and contracts. Due to this expansion and contraction, the beam 11a bends and vibrates.
　下部電極層１３ａは、不図示の接地電極に接地されている。また、上部電極層１３ｃには、不図示の駆動電極が接続されている。接地電極及び駆動電極を介して駆動電圧が上部電極層１３ｃと、下部電極層１３ａとの間に印加される。上部電極層１３ｃは、不図示の検出電極にも接続されている。上部電極層１３ｃと下部電極層１３ａとの電位差を示す信号が、梁１１ａの振動状態を示す検出信号として接地電極及び検出電極を介して出力される。 The lower electrode layer 13a is grounded to a ground electrode (not shown). A drive electrode (not shown) is connected to the upper electrode layer 13c. A driving voltage is applied between the upper electrode layer 13c and the lower electrode layer 13a via the ground electrode and the driving electrode. The upper electrode layer 13c is also connected to detection electrodes (not shown). A signal indicating the potential difference between the upper electrode layer 13c and the lower electrode layer 13a is output via the ground electrode and the detection electrode as a detection signal indicating the vibration state of the beam 11a.
　物質吸着膜１１ｃは、物質３を吸着する素材で形成されている。物質吸着膜１１ｃに物質３が吸着すると、振動子１１の振動周波数及び振幅が変化する。その変化は、検出信号の周波数及び振幅の変化として現れる。したがって、上述の梁１１ａの振動状態を示す検出信号に基づいて、物質３の吸着を検出することができる。 The substance adsorption film 11c is made of a material that adsorbs the substance 3. When the substance 3 is adsorbed on the substance adsorption film 11c, the vibration frequency and amplitude of the vibrator 11 change. The change appears as a change in the frequency and amplitude of the detected signal. Therefore, adsorption of the substance 3 can be detected based on the detection signal indicating the vibration state of the beam 11a.
　物質吸着膜１１ｃにおいて、振動子１１に吸着可能な物質３の量には限界があり、それ以上は物質３が吸着しなくなる。すなわち、振動子１１への物質３の吸着量は飽和する。そこで、第１物質センサ１０は、物質３の検出処理を行った後、振動子１１から物質３を脱離する。具体的には、第１物質センサ１０は、物質３の検出処理終了後も、引き続き振動子１１を振動させる。この振動により、物質吸着膜１１ｃに吸着した物質３を脱離することができる。すなわち、物質吸着膜１１ｃは、物質３を吸着した後、物質３を脱離して再利用可能となっている。物質吸着膜１１ｃの材質には、様々なものを用いることができる。例えば、水晶発振子、金属酸化物半導体、有機半導体などが物質吸着膜１１ｃとして用いられる。 In the substance adsorption film 11c, there is a limit to the amount of the substance 3 that can be adsorbed by the vibrator 11, and the substance 3 will not be adsorbed any more. That is, the adsorption amount of the substance 3 to the vibrator 11 is saturated. Therefore, the first substance sensor 10 desorbs the substance 3 from the vibrator 11 after performing the detection processing of the substance 3 . Specifically, the first substance sensor 10 continues to vibrate the vibrator 11 even after the substance 3 detection process is finished. Due to this vibration, the substance 3 adsorbed on the substance adsorption film 11c can be desorbed. In other words, the substance adsorption film 11c can be reused by desorbing the substance 3 after adsorbing the substance 3 . Various materials can be used for the material of the substance adsorption film 11c. For example, a crystal oscillator, a metal oxide semiconductor, an organic semiconductor, or the like is used as the substance adsorption film 11c.
　図１に示すように、第１チャンバ２０は、内部に気体を収容可能な部屋を有する容器である。第１チャンバ２０内の部屋に、第１物質センサ１０が設けられている。第１チャンバ２０には、第１物質センサ１０を内部に配置し、気体を流入する流入口２０ａと気体を排出する排出口２０ｂとが設けられている。第１チャンバ２０の材質としては、内部への気体の流入を防ぐことができるものが用いられる。例えば、金属が用いられてもよいし、プラスチックなど、他の材質が用いられてもよい。 As shown in FIG. 1, the first chamber 20 is a container having a chamber capable of containing gas therein. A first substance sensor 10 is provided in a room within the first chamber 20 . The first chamber 20 is provided with an inlet 20a for inflowing gas and an outlet 20b for discharging gas. As a material for the first chamber 20, a material that can prevent gas from flowing into the interior is used. For example, metal may be used, or other materials such as plastic may be used.
　第１チャンバ２０において、流入口２０ａと排出口２０ｂとは、互いに逆側に設けられている。したがって、流入口２０ａを匂い発生源２に向けると、排出口２０ｂは、匂い発生源２の反対を向くようになる。この場合には、流入口２０ａに連通する空域と、排出口２０ｂに連通する空域とでは、物質３の濃度が互いに異なる空域となりやすくなっている。 In the first chamber 20, the inlet 20a and the outlet 20b are provided on opposite sides of each other. Therefore, when the inlet 20a faces the odor source 2, the outlet 20b faces away from the odor source 2. FIG. In this case, the air space communicating with the inlet 20a and the air space communicating with the outlet 20b tend to have different concentrations of the substance 3 from each other.
　なお、流入口２０ａと排出口２０ｂとは、第１チャンバ２０において、流入口２０ａが設けられた面に隣接する面に設けられてもよい。すなわち、流入口２０ａと排出口２０ｂとは、同じ面に設けられるようにしてもよい。また、物質３の濃度が同じ空域に、第１チャンバ２０が置かれる場合もある。 The inlet 20a and the outlet 20b may be provided on a surface of the first chamber 20 adjacent to the surface on which the inlet 20a is provided. That is, the inlet 20a and the outlet 20b may be provided on the same plane. Also, the first chamber 20 may be placed in an air space where the concentration of the substance 3 is the same.
　第１チャンバ２０内において、第１物質センサ１０は、流入口２０ａに対向する位置に配置されている。より具体的には、物質吸着膜１１ｃが流入口２０ａに対向するように、第１物質センサ１０が配置されている。これにより、流入口２０ａを介して流入する気体が、物質吸着膜１１ｃに接触し易くなっている。 Within the first chamber 20, the first substance sensor 10 is arranged at a position facing the inflow port 20a. More specifically, the first substance sensor 10 is arranged such that the substance adsorption film 11c faces the inlet 20a. This makes it easier for the gas flowing in through the inlet 20a to come into contact with the substance adsorption film 11c.
　第１換気手段３０は、流入口２０ａを開閉する開閉手段である。本実施の形態では、第１換気手段３０は、シャッタであるものとする。このシャッタは、手動で開閉可能である。シャッタは、開くことにより、流入口２０ａを介して第１チャンバ２０内を換気可能である。 The first ventilation means 30 is an opening/closing means for opening and closing the inflow port 20a. In this embodiment, the first ventilation means 30 is assumed to be a shutter. This shutter can be manually opened and closed. By opening the shutter, the inside of the first chamber 20 can be ventilated through the inlet 20a.
　物質検出装置１は、第１物質センサ１０により物質を検出する際に、第１換気手段３０により流入口２０ａを開く。これにより、流入口２０ａを介した第１チャンバ２０内の換気が行われる。さらに、物質検出装置１は、第１物質センサ１０による物質の検出が終了すると、第１換気手段３０により流入口２０ａを閉じる。これにより、流入口２０ａを介した換気が停止される。 The substance detection device 1 opens the inflow port 20a by the first ventilation means 30 when the first substance sensor 10 detects a substance. Thereby, the inside of the first chamber 20 is ventilated through the inlet 20a. Furthermore, the substance detection device 1 closes the inlet 20a by the first ventilation means 30 when the substance detection by the first substance sensor 10 is completed. As a result, ventilation through the inflow port 20a is stopped.
　続いて、本実施の形態１に係る物質検出装置１の動作、すなわち物質３を検出する物質検出処理について説明する。 Next, the operation of the substance detection device 1 according to Embodiment 1, that is, the substance detection process for detecting the substance 3 will be described.
　図３に示すように、まず、物質検出装置１は、物質３を含む気体が存在する空域、すなわち匂い発生源２が存在する空域に流入口２０ａを向けた状態で、第１換気手段３０により、流入口２０ａを開く（ステップＳ１）。これにより、図４に示すように、第１換気手段３０がスライドして、第１チャンバ２０の流入口２０ａを開く。この結果、物質３を含む気体が、第１チャンバ２０の内部に入っていく。 As shown in FIG. 3, first, the substance detection device 1 is operated by the first ventilation means 30 with the inflow port 20a facing the airspace where the gas containing the substance 3 exists, that is, the airspace where the odor source 2 exists. , the inlet 20a is opened (step S1). As a result, the first ventilation means 30 slides to open the inlet 20a of the first chamber 20, as shown in FIG. As a result, gas containing the substance 3 enters the interior of the first chamber 20 .
　続いて、物質検出装置１は、第１物質センサ１０により物質３を検出するセンサ検出を行う（ステップＳ２）。第１チャンバ２０内に入った物質３は、第１物質センサ１０の振動子１１の物質吸着膜１１ｃに吸着する。第１物質センサ１０は、物質３の吸着による振動子１１の振動周波数又は振幅の変化を検出する。 Subsequently, the substance detection device 1 performs sensor detection for detecting the substance 3 by the first substance sensor 10 (step S2). The substance 3 that has entered the first chamber 20 is adsorbed on the substance adsorption film 11 c of the vibrator 11 of the first substance sensor 10 . The first substance sensor 10 detects changes in vibration frequency or amplitude of the vibrator 11 due to adsorption of the substance 3 .
　物質３の検出終了後、物質検出装置１は、図５に示すように、第１換気手段３０により、第１チャンバ２０の流入口２０ａを閉じる（ステップＳ３）。これにより、流入口３０ａを介した物質３の第１チャンバ２０内への流入が停止する。 After completion of detection of the substance 3, the substance detection device 1 closes the inlet 20a of the first chamber 20 by the first ventilation means 30, as shown in FIG. 5 (step S3). This stops the inflow of the substance 3 into the first chamber 20 through the inlet 30a.
　続いて、物質検出装置１は、第１物質センサ１０の振動子１１を振動させ、物質３の脱離を行う（ステップＳ４）。これにより、第１物質センサ１０に吸着した物質３が第１物質センサ１０から脱離する。排出口２０ｂに連通する空域では、匂い発生源２から遠いため、気体に含まれる物質３の濃度が低くなっている。このため、第１物質センサ１０から脱離した物質３は、排出口２０ｂから排出される。これにより、第１物質センサ１０が初期化、すなわちリフレッシュされる。 Subsequently, the substance detection device 1 vibrates the vibrator 11 of the first substance sensor 10 to desorb the substance 3 (step S4). As a result, the substance 3 adsorbed to the first substance sensor 10 is desorbed from the first substance sensor 10 . The air space communicating with the outlet 20b is far from the odor source 2, so the concentration of the substance 3 contained in the gas is low. Therefore, the substance 3 desorbed from the first substance sensor 10 is discharged from the discharge port 20b. Thereby, the first substance sensor 10 is initialized, that is, refreshed.
　以上、ステップＳ１～Ｓ４が実行された後、物質検出処理が終了する。物質３を検出する物質検出処理はこのような手順で行われ、必要に応じて繰り返される。 After steps S1 to S4 have been executed, the substance detection process ends. The substance detection process for detecting the substance 3 is performed in such a procedure, and is repeated as necessary.
　ここで、ステップＳ３における第１換気手段３０の閉動作を行うことなく、物質検出処理を連続して行った場合について考える。この場合、１回目の検出後、第１物質センサ１０に吸着した物質３の多くが吸着したままとなって２回目の検出が行われる。図６Ａは、この場合の物質３の飽和吸着量を１００％とした場合の物質３の吸着量の割合の時間変化を１回目と２回目とで連続して示しており、図６Ｂでは、物質３に対する検出感度を１００％とした場合の物質３の検出感度の割合の時間変化を１回目と２回目とで重ね合わせて示している。図６Ａに示すように、１回目の検出では吸着した物質３の多くが吸着したままとなり、２回目の検出では、検出開始後すぐに第１物質センサ１０における物質３の吸着量が飽和している。したがって、図６Ｂに示すように、２回目の検出では、物質３の検出感度が低下する。 Here, consider the case where the substance detection process is continuously performed without performing the closing operation of the first ventilation means 30 in step S3. In this case, after the first detection, most of the substance 3 adsorbed on the first substance sensor 10 remains adsorbed, and the second detection is performed. FIG. 6A continuously shows the time change of the ratio of the adsorption amount of the substance 3 when the saturated adsorption amount of the substance 3 in this case is 100% for the first time and the second time, and FIG. When the detection sensitivity for substance 3 is assumed to be 100%, the change over time in the ratio of detection sensitivity for substance 3 is shown superimposed on the first time and the second time. As shown in FIG. 6A, most of the adsorbed substance 3 remains adsorbed in the first detection, and in the second detection, the adsorption amount of the substance 3 in the first substance sensor 10 saturates immediately after the start of detection. there is Therefore, as shown in FIG. 6B, the detection sensitivity for the substance 3 is lowered in the second detection.
　一方、図７Ａ及び図７Ｂは、本実施の形態における、物質３の飽和吸着量、検出感度を１００％とした場合の物質３の吸着量、検出感度の割合の時間変化を示している。図７Ａに示すように、本実施の形態に係る物質検出装置１では、検出毎に、第１物質センサ１０から物質３を脱離し、第１物質センサ１０の状態を初期化することができる。このため、図７Ｂに示すように、複数回の検出に渡って、第１物質センサ１０の検出感度を高く保つことができる。 On the other hand, FIGS. 7A and 7B show changes over time in the saturated adsorption amount of substance 3, the adsorption amount of substance 3 when the detection sensitivity is 100%, and the rate of detection sensitivity in this embodiment. As shown in FIG. 7A, the substance detection device 1 according to the present embodiment can desorb the substance 3 from the first substance sensor 10 and initialize the state of the first substance sensor 10 for each detection. Therefore, as shown in FIG. 7B, the detection sensitivity of the first substance sensor 10 can be kept high over multiple detections.
　なお、本実施の形態では、第１換気手段３０をシャッタであるものとした。しかしながら、本発明はこれには限られない。第１換気手段３０は、図８に示すように、ポンプであってもよい。この場合、ステップＳ１では、ポンプを駆動して流入口２０ａを介して、物質３が含まれる気体を第１チャンバ２０内に流入させて第１チャンバ２０内の換気を行い、ステップＳ３では、ポンプの駆動を停止して第１チャンバ２０内の換気を停止すればよい。このようにすれば、物質３の気体を強制的に第１チャンバ２０内に吸引することができるので、物質３の検出感度を高めることができる。 It should be noted that, in the present embodiment, the first ventilation means 30 is assumed to be a shutter. However, the invention is not limited to this. The first ventilation means 30 may be a pump, as shown in FIG. In this case, in step S1, the pump is driven to allow the gas containing the substance 3 to flow into the first chamber 20 through the inlet 20a to ventilate the first chamber 20, and in step S3, the pump is stopped to stop the ventilation in the first chamber 20 . By doing so, the gas of the substance 3 can be forcibly sucked into the first chamber 20, so that the detection sensitivity of the substance 3 can be enhanced.
　また、第１換気手段３０は、図９に示すように、電磁弁であってもよい。ステップＳ１では、図１０に示すように、電磁弁を開いて、流入口２０ａを介して物質３が含まれる気体を流入可能な状態とし、流入口２０ａを介した第１チャンバ２０内の換気を行う。また、ステップＳ３では、図９に示すように、電磁弁を閉じて、流入口２０ａを介して物質３が含まれる気体を流入できない状態とし、流入口２０ａを介した第１チャンバ２０内の換気を停止する。この電磁弁の制御により、流入口２０ａを自動的に開閉できるようになる。なお、この電磁弁の制御は、不図示のコントローラによって行うことができる。 Also, the first ventilation means 30 may be an electromagnetic valve, as shown in FIG. In step S1, as shown in FIG. 10, the solenoid valve is opened to allow the gas containing the substance 3 to flow in through the inlet 20a, and the first chamber 20 is ventilated through the inlet 20a. conduct. Further, in step S3, as shown in FIG. 9, the electromagnetic valve is closed to prevent the gas containing the substance 3 from flowing through the inlet 20a, and the first chamber 20 is ventilated through the inlet 20a. to stop. By controlling this electromagnetic valve, the inflow port 20a can be automatically opened and closed. Note that the control of this solenoid valve can be performed by a controller (not shown).
　また、図１１Ａに示すように、第１換気手段３０を、気体の流入方向を切り替え可能な双方向ポンプとしてもよい。この場合、流入口２０ａと排出口２０ｂとは、同一の開口となる。第１チャンバ２０では、排出口２０ｂに代えて第３開口２０ｃを設け、第３開口２０ｃにフィルタ４１を設置する。フィルタ４１は、物質３が通過できないものが用いられる。 Also, as shown in FIG. 11A, the first ventilation means 30 may be a two-way pump capable of switching the gas inflow direction. In this case, the inlet 20a and the outlet 20b are the same opening. In the first chamber 20, a third opening 20c is provided instead of the discharge port 20b, and a filter 41 is installed in the third opening 20c. A filter 41 that does not allow the substance 3 to pass through is used.
　ステップＳ１において、第１換気手段３０としての双方向ポンプは、第１チャンバ２０内に気体を流入する。さらに、ステップＳ３において、双方向ポンプは、第１チャンバ２０の外部に気体を排出する。排出の際、フィルタ４１を介して第１チャンバ２０内に物質３の濃度が低い気体が流入し、物質３を第１物質センサ１０から脱離して第１物質センサ１０をリフレッシュすることが可能となる。すなわち、この場合には、第３開口２０ｃから気体が流入するようになる。 In step S<b>1 , the bidirectional pump as the first ventilation means 30 causes gas to flow into the first chamber 20 . Furthermore, in step S3, the bidirectional pump discharges the gas to the outside of the first chamber 20. As shown in FIG. At the time of discharge, a gas having a low concentration of the substance 3 flows into the first chamber 20 through the filter 41 , and the substance 3 can be desorbed from the first substance sensor 10 to refresh the first substance sensor 10 . Become. That is, in this case, gas flows in from the third opening 20c.
　なお、第３開口２０ｃに連通する空域において、物質３の濃度が十分に低い場合には、フィルタ４１はなくてもよい。 Note that the filter 41 may be omitted if the concentration of the substance 3 is sufficiently low in the airspace communicating with the third opening 20c.
　また、第１換気手段３０は、図１１Ｂに示すように、ファンであってもよい。ファンは、回転することにより、気体を第１チャンバ２０内に送り込む。ステップＳ１では、ファンを回転させて、流入口２０ａを介して物質３が含まれる気体を流入可能な状態とし、流入口２０ａを介した第１チャンバ２０内の換気を行う。また、ステップＳ３では、ファンの回転を停止させて、気体が流入口２０ａを介して入らない状態とし、流入口２０ａを介した第１チャンバ２０内の換気を停止する。 Also, the first ventilation means 30 may be a fan, as shown in FIG. 11B. The fan sends gas into the first chamber 20 by rotating. In step S1, the fan is rotated to allow the gas containing the substance 3 to flow in through the inlet 20a, thereby ventilating the first chamber 20 through the inlet 20a. Further, in step S3, the rotation of the fan is stopped so that gas does not enter through the inlet 20a, and the ventilation inside the first chamber 20 through the inlet 20a is stopped.
実施の形態２
　次に、本発明の実施の形態２に係る物質検出装置１について説明する。図１２に示すように、本実施の形態に係る物質検出装置１は、排出口２０ｂを開閉する第２換気手段４０を備える点が、上記実施の形態１に係る物質検出装置１と異なっている。第２換気手段４０は、第１換気手段３０と同様に、開閉手段としてのシャッタである。 Embodiment 2
Next, a substance detection device 1 according to Embodiment 2 of the present invention will be described. As shown in FIG. 12, the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the first embodiment in that a second ventilation means 40 for opening and closing the discharge port 20b is provided. . The second ventilation means 40, like the first ventilation means 30, is a shutter as an opening/closing means.
　本実施の形態では、第１物質センサ１０により物質３を検出する際に、第２換気手段４０により排出口２０ｂを閉じて、排出口２０ｂを介した換気を停止する。また、第１物質センサ１０による物質３の検出が終了すると、第２換気手段４０により排出口２０ｂを開いて、排出口２０ｂを介した第１チャンバ２０内の換気を行う。 In the present embodiment, when the substance 3 is detected by the first substance sensor 10, the second ventilation means 40 closes the outlet 20b to stop ventilation via the outlet 20b. Further, when the detection of the substance 3 by the first substance sensor 10 is completed, the discharge port 20b is opened by the second ventilation means 40, and the inside of the first chamber 20 is ventilated through the discharge port 20b.
　次に、本実施の形態に係る物質検出装置１の動作について説明する。図１３Ａに示すように、流入口２０ａを開き（ステップＳ１）、センサ検出を行い（ステップＳ２）、流入口２０ａを閉じ（ステップＳ３）、物質３の脱離を行う（ステップＳ４）流れは、上記実施の形態１と同じである。 Next, the operation of the substance detection device 1 according to this embodiment will be described. As shown in FIG. 13A, the inlet 20a is opened (step S1), sensor detection is performed (step S2), the inlet 20a is closed (step S3), and the substance 3 is desorbed (step S4). It is the same as the first embodiment.
　本実施の形態に係る物質検出装置１では、上述の動作に加え、ステップＳ１において、第２換気手段４０により排出口２０ｂを閉じて、排出口２０ｂを介して換気を停止する動作を行う。さらに、ステップＳ３において、第２換気手段４０により排出口２０ｂを開き、排出口２０ｂを介して第１チャンバ２０内を換気する動作を行う。このような動作を行えば、検出時には、排出口２０ｂを閉じて物質３が排出口２０ｂから排出されるのを防ぐことができ、検出後には、排出口２０ｂを開いて、第１物質センサ１０から脱離された物質３を排出口２０ｂから排出することができる。この動作は、排出口２０ｂ側の空域における物質３の濃度が、流入口２０ａ側の空域における物質３の濃度より低い場合に有効である。 In addition to the above-described operations, the substance detection device 1 according to the present embodiment performs an operation of closing the outlet 20b by the second ventilation means 40 and stopping ventilation via the outlet 20b in step S1. Further, in step S3, the discharge port 20b is opened by the second ventilation means 40, and the inside of the first chamber 20 is ventilated through the discharge port 20b. By performing such an operation, it is possible to prevent the substance 3 from being discharged from the discharge port 20b by closing the discharge port 20b at the time of detection. The substance 3 desorbed from can be discharged from the discharge port 20b. This operation is effective when the concentration of the substance 3 in the air space on the side of the outlet 20b is lower than the concentration of the substance 3 in the air space on the side of the inlet 20a.
　第１換気手段３０と第２換気手段４０の開閉動作は、連動するようにしてもよい。すなわち第１換気手段３０が開くと第２換気手段４０が閉じて、第１換気手段３０が閉じると、第２換気手段４０が開くように連動させるようにしてもよい。 The opening and closing operations of the first ventilation means 30 and the second ventilation means 40 may be interlocked. That is, when the first ventilation means 30 opens, the second ventilation means 40 closes, and when the first ventilation means 30 closes, the second ventilation means 40 opens.
　なお、例えば、図１２に示す物質検出装置１の構成において、流入口２０ａ側と排出口２０ｂ側とにおいて、気体に含まれる物質３の濃度に差が認められない場合もある。また、流入口２０ａと排出口２０ｂとが開いていれば、物質３が絶え間なく第１チャンバ２０内に流入してしまう場合もある。このような場合には、排出口２０ｂの開閉については、上述とは異なる動作を行うようにしてもよい。例えば、第１物質センサ１０により物質３を検出する際に、第２換気手段４０により排出口２０ｂを開いて、排出口２０ｂを介した第１チャンバ２０内の換気を行い、第１物質センサ１０による物質３の検出が終了すると、第２換気手段４０により排出口２０ｂを閉じて、排出口２０ｂを介した第１チャンバ２０内の換気を停止するようにしてもよい。このようにすれば、第１チャンバ２０の内部への、物質３が含まれる気体の流入を遮断することができる。気体の流入を遮断すれば、第１チャンバ２０内の物質３の濃度を低下させることができるので、第１物質センサ１０の振動により、物質３を脱離し易くすることができる。 It should be noted that, for example, in the configuration of the substance detection device 1 shown in FIG. 12, there may be no difference in the concentration of the substance 3 contained in the gas between the inlet 20a side and the outlet 20b side. Also, if the inlet 20a and the outlet 20b are open, the substance 3 may flow into the first chamber 20 continuously. In such a case, an operation different from that described above may be performed for opening and closing the discharge port 20b. For example, when the substance 3 is detected by the first substance sensor 10, the discharge port 20b is opened by the second ventilation means 40 to ventilate the inside of the first chamber 20 through the discharge port 20b. After the detection of the substance 3 by , the outlet 20b may be closed by the second ventilation means 40 to stop the ventilation inside the first chamber 20 via the outlet 20b. By doing so, it is possible to block the inflow of the gas containing the substance 3 into the first chamber 20 . By blocking the inflow of gas, the concentration of the substance 3 in the first chamber 20 can be reduced, so that the vibration of the first substance sensor 10 can facilitate desorption of the substance 3 .
　また、図１３Ｂに示すように、第２換気手段４０は、第１物質センサ１０により物質３を検出する際にも、排出口２０ｂを介した第１チャンバ２０内の換気を行うとともに、第１物質センサ１０による物質３の検出が終了しても、第１チャンバ２０内の換気を継続するようにしてもよい。すなわち、第２換気手段４０は、常時、排出口２０ｂを介した第１チャンバ２０内の換気を行うようにしてもよい。外部において、物質３の濃度が高い場合には、このように、第２換気手段４０で絶えず換気を行うのが適切な場合もある。例えば、第１物質センサ１０が煙の物質を検知するものである場合、外部に煙が充満している場合には、第１チャンバ２０内から煙を排出するために絶えず換気する必要がある。このような場合には、第２換気手段４０で常時第１チャンバ２０内を絶えず換気するのが望ましい。 Further, as shown in FIG. 13B, the second ventilation means 40 ventilates the inside of the first chamber 20 through the outlet 20b even when the substance 3 is detected by the first substance sensor 10, Ventilation in the first chamber 20 may be continued even after the detection of the substance 3 by the substance sensor 10 is finished. That is, the second ventilation means 40 may constantly ventilate the inside of the first chamber 20 through the outlet 20b. When the concentration of the substance 3 is high outside, it may be appropriate to continuously ventilate with the second ventilation means 40 in this way. For example, if the first substance sensor 10 detects a smoke substance, if the outside is full of smoke, the inside of the first chamber 20 must be constantly ventilated in order to exhaust the smoke. In such a case, it is desirable to constantly ventilate the interior of the first chamber 20 with the second ventilation means 40 .
　なお、本実施の形態では、第２換気手段４０をシャッタであるものとした。しかしながら、本発明はこれには限られない。第２換気手段４０は、図１４Ａに示すように、ポンプであってもよい。このようにすれば、物質３の気体を強制的に第１チャンバ２０外に排出することができるので、物質３の検出感度を高めることができる。なお、第２換気手段４０としてポンプを用いた場合には、第１チャンバ２０に外気を取り込む貫通孔４２を、排出口２０ｂと同じ側に設けるのが望ましい。 It should be noted that, in the present embodiment, the second ventilation means 40 is assumed to be a shutter. However, the invention is not limited to this. The second ventilation means 40 may be a pump, as shown in Figure 14A. By doing so, the gas of the substance 3 can be forcibly discharged out of the first chamber 20, so that the detection sensitivity of the substance 3 can be enhanced. In addition, when a pump is used as the second ventilation means 40, it is desirable to provide a through hole 42 for taking in outside air into the first chamber 20 on the same side as the outlet 20b.
　図１４Ａに示すように、第２換気手段４０をポンプとした場合、本実施の形態に係る物質検出装置１と同様に、物質３の検出中は、ポンプを停止し、物質３の検出終了後は、ポンプにより第１チャンバ２０内の気体の排出動作を行うことができる。 As shown in FIG. 14A, when the second ventilation means 40 is a pump, the pump is stopped during the detection of the substance 3 and , the gas in the first chamber 20 can be discharged by a pump.
　また、第２換気手段４０をポンプとした場合、流入口２０ａ側と排出口２０ｂ側とにおいて、気体に含まれる物質３の濃度に差が認められない場合、検出中は、ポンプを停止し、検出終了後は、ポンプにより第１チャンバ２０内の気体の排出動作を行うようにしてもよい。 Further, when the second ventilation means 40 is a pump, if there is no difference in the concentration of the substance 3 contained in the gas between the inlet 20a side and the outlet 20b side, the pump is stopped during detection, After the detection is finished, the gas in the first chamber 20 may be discharged by a pump.
　また、第２換気手段４０は、図１４Ｂに示すように、電磁弁であってもよい。このようにすれば、第２換気手段４０を不図示のコントローラにより自動的に開閉できるようになる。また、第２換気手段４０は、図１４Ｃに示すように、ファンであってもよい。ファンは、手動、自動又は第１換気手段３０から得られる気体の流れで回転し、第１チャンバ２０内の気体を排出口２０ｂから排出することができる。上述のように、外部において、物質３の濃度が高い場合には、第２換気手段４０をポンプ又はファンとするのが望ましい。 Also, the second ventilation means 40 may be an electromagnetic valve, as shown in FIG. 14B. By doing so, the second ventilation means 40 can be automatically opened and closed by a controller (not shown). Also, the second ventilation means 40 may be a fan, as shown in FIG. 14C. The fan can be rotated manually, automatically, or by the gas flow obtained from the first ventilation means 30, and the gas in the first chamber 20 can be discharged from the outlet 20b. As mentioned above, it may be desirable for the second ventilation means 40 to be a pump or a fan when the concentration of the substance 3 is high outside.
実施の形態３
　次に、本発明の実施の形態３に係る物質検出装置１について説明する。図１５に示すように、本実施の形態に係る物質検出装置１は、仕切部５０を備える点が、上記実施の形態１に係る物質検出装置１と異なっている。 Embodiment 3
Next, a substance detection device 1 according to Embodiment 3 of the present invention will be described. As shown in FIG. 15, the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the first embodiment in that a partition section 50 is provided.
　仕切部５０は、流入口２０ａを介して第１チャンバ２０と連通する第１空域６０と、排出口２０ｂを介して第１チャンバ２０と連通する第２空域６１と、を仕切る。この仕切部５０により、第１空域６０と、第２空域６１とを物理的に分離し、匂い発生源２から発せられた物質３が第２空域６１まで移動しないようにして、第２空域６１の物質３の濃度を、第１空域６０の物質３の濃度よりも低くすることができる。 The partition part 50 separates a first space 60 communicating with the first chamber 20 through the inlet 20a and a second space 61 communicating with the first chamber 20 through the outlet 20b. The partition 50 physically separates the first air space 60 and the second air space 61 so that the substance 3 emitted from the odor source 2 does not move to the second air space 61 . can be lower than the concentration of substance 3 in the first airspace 60 .
実施の形態４
　次に、本発明の実施の形態４に係る物質検出装置１について説明する。図１６に示すように、本実施の形態に係る物質検出装置１は、仕切部５０に貫通孔５１が設けられている点が、上記実施の形態３に係る物質検出装置１と異なっている。 Embodiment 4
Next, a substance detection device 1 according to Embodiment 4 of the present invention will be described. As shown in FIG. 16, the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the third embodiment in that the partition portion 50 is provided with the through hole 51 .
　貫通孔５１は、第１チャンバ２０において、第１空域６０と第２空域６１との物質３の濃度差に影響を与えない位置に、第１空域６０と第２空域６１とを連通するように設けられている。第１チャンバ２０において、第１空域６０と第２空域６１との物質３の濃度差が出るのであれば、第１空域６０と第２空域６１との間を、完全に遮蔽する必要はない。 The through-hole 51 is positioned in the first chamber 20 so as not to affect the concentration difference of the substance 3 between the first space 60 and the second space 61 so as to communicate the first space 60 and the second space 61 . is provided. In the first chamber 20, if there is a difference in concentration of the substance 3 between the first space 60 and the second space 61, the first space 60 and the second space 61 need not be completely shielded.
　なお、貫通孔５１にフィルタ４１を設置するようにしてもよい。このようにすれば、第１空域６０から第２空域６１への物質３の移動を防止することができる。 Note that the filter 41 may be installed in the through hole 51. In this way, movement of the substance 3 from the first airspace 60 to the second airspace 61 can be prevented.
実施の形態５
　次に、本発明の実施の形態５に係る物質検出装置１について説明する。図１７に示すように、本実施の形態に係る物質検出装置１は、第２チャンバ７０が設けられている点が、図１５に示す上記実施の形態３に係る物質検出装置１と異なっている。 Embodiment 5
Next, a substance detection device 1 according to Embodiment 5 of the present invention will be described. As shown in FIG. 17, the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the third embodiment shown in FIG. 15 in that a second chamber 70 is provided. .
　第２チャンバ７０は、排出口２０ｂを介して第１チャンバ２０と連通するとともに、第２空域６１と連通する。排出口２０ｂから排出された気体は、第２チャンバ７０に一旦保持される。第２空域６１に気体をそのまま排出するのが望ましくない場合には、第２チャンバ７０を設け、特定の処置を行ってから第２空域６１に排出することもできる。また、第２チャンバ７０内に、物質３を吸着しやすい素材の部材を配置し、その部材に物質３を吸着させて、部材を第２チャンバ７０から取り出すようにしてもよい。 The second chamber 70 communicates with the first chamber 20 and the second air space 61 via the outlet 20b. The gas discharged from the discharge port 20b is held in the second chamber 70 once. If it is not desirable to directly discharge the gas into the second airspace 61, a second chamber 70 may be provided to perform a specific treatment before discharging into the second airspace 61. FIG. Alternatively, a member made of a material that easily adsorbs the substance 3 may be arranged in the second chamber 70 , the member may be made to adsorb the substance 3 , and the member may be removed from the second chamber 70 .
　なお、図１８に示すように、第１チャンバ２０の排出口２０ｂに、第２換気手段４０としてのポンプを設けるようにしてもよい。この場合には、排出口２０ｂの他に、第１チャンバ２０と第２チャンバ７０との間に不図示の貫通孔を設けておけばよい。このように、第１換気手段３０及び第２換気手段４０は、シャッタであってもよいし、ポンプ、電磁弁、ファンであってもよい。 In addition, as shown in FIG. 18, a pump as the second ventilation means 40 may be provided at the discharge port 20b of the first chamber 20. In this case, a through hole (not shown) may be provided between the first chamber 20 and the second chamber 70 in addition to the discharge port 20b. Thus, the first ventilation means 30 and the second ventilation means 40 may be shutters, pumps, electromagnetic valves, and fans.
　さらに、第２チャンバ７０と第２空域６１との間に、ポンプを設けるようにしてもよい。 Furthermore, a pump may be provided between the second chamber 70 and the second space 61.
実施の形態６
　次に、本発明の実施の形態６に係る物質検出装置１について説明する。図１９に示すように、本実施の形態に係る物質検出装置１は、第２物質センサ７１を設けている点が、上記実施の形態５に係る物質検出装置１と異なっている。 Embodiment 6
Next, a substance detection device 1 according to Embodiment 6 of the present invention will be described. As shown in FIG. 19, the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the fifth embodiment in that a second substance sensor 71 is provided.
　第２物質センサ７１は、第２チャンバ７０に配置されている。第２物質センサ７１は、排出口２０ｂから排出される物質３を検出する。第２物質センサ７１の検出結果に基づいて、第１チャンバ２０内に物質３がどの程度残留しているかを確認することが可能となる。 A second substance sensor 71 is arranged in the second chamber 70 . The second substance sensor 71 detects the substance 3 discharged from the discharge port 20b. Based on the detection result of the second substance sensor 71, it is possible to confirm how much substance 3 remains in the first chamber 20. FIG.
実施の形態７
　次に、本発明の実施の形態７に係る物質検出装置１について説明する。図２０に示すように、本実施の形態に係る物質検出装置１は、管状部材８０を備える点が、上記実施の形態２に係る物質検出装置１と異なっている。 Embodiment 7
Next, a substance detection device 1 according to Embodiment 7 of the present invention will be described. As shown in FIG. 20, the substance detection device 1 according to the present embodiment differs from the substance detection device 1 according to the second embodiment in that a tubular member 80 is provided.
　管状部材８０は、排出口２０ｂに取り付けられた第２換気手段４０としての双方向ポンプから排出された気体を、流入口２０ａを介して連通する第１空域６０よりも物質３の濃度が低い第２空域６１に送る。これと同時に、管状部材８０は、第２空域６１から取り入れた気体を第１チャンバ２０に送る。ここで、第２換気手段４０として用いられる双方向ポンプとしては、双方向の気体の流入を同時に行うことができるものが用いられる。なお、管状部材８０の長さは特に制限はなく、長さを調整可能なものであってもよい。複数の管状部材８０を連結可能に構成してもよい。 The tubular member 80 receives the gas discharged from the two-way pump as the second ventilation means 40 attached to the discharge port 20b through the first air space 60 communicating through the inlet 20a. 2 Send to airspace 61. At the same time, tubular member 80 delivers gas taken from second air space 61 to first chamber 20 . Here, as the bidirectional pump used as the second ventilating means 40, a pump capable of inflowing gas in both directions at the same time is used. The length of the tubular member 80 is not particularly limited, and the length may be adjustable. A plurality of tubular members 80 may be configured to be connectable.
　本実施の形態に係る物質検出装置１は、その周辺に、物質３の濃度が低い空域がない場合に有効である。 The substance detection device 1 according to the present embodiment is effective when there is no airspace with a low concentration of the substance 3 around it.
　以上詳細に説明したように、本実施の形態によれば、第１チャンバ２０の内部に配置された第１物質センサ１０により物質３を検出する際に、第１換気手段３０により第１チャンバ２０の流入口２０ａを開くとともに、第１物質センサ１０による物質３の検出が終了すると、第１換気手段３０により流入口２０ａを閉じる。このため、第１物質センサ１０をリフレッシュして精度の悪化を抑制することができる。 As described in detail above, according to the present embodiment, when the substance 3 is detected by the first substance sensor 10 arranged inside the first chamber 20, the first ventilation means 30 causes the first chamber 20 to is opened, and when the detection of the substance 3 by the first substance sensor 10 is completed, the first ventilation means 30 closes the inlet 20a. Therefore, it is possible to refresh the first substance sensor 10 and suppress deterioration of accuracy.
　また、上記実施の形態によれば、排出口２０ｂを開閉する第２換気手段４０を備えるものとし、第１物質センサ１０により物質３を検出する際に、第２換気手段４０により排出口２０ｂを閉じ、第１物質センサ１０による物質３の検出が終了すると、第２換気手段４０により排出口２０ｂを開くものとした。このようにすれば、検出時には、第２換気手段４０により排出口２０ｂを閉じることにより、排出口２０ｂから気体に含まれる物質３が排出されるのを防ぎ、物質３の濃度の低下を抑制することが可能となる。 Further, according to the above-described embodiment, the second ventilation means 40 for opening and closing the outlet 20b is provided. When the detection of the substance 3 by the first substance sensor 10 is completed, the discharge port 20b is opened by the second ventilation means 40. FIG. In this way, at the time of detection, the discharge port 20b is closed by the second ventilation means 40, thereby preventing the substance 3 contained in the gas from being discharged from the discharge port 20b and suppressing a decrease in the concentration of the substance 3. becomes possible.
　また、上記実施の形態によれば、流入口２０ａを介して第１チャンバ２０と連通する第１空域６０と、排出口２０ｂを介して第１チャンバ２０と連通し、第１空域６０よりも物質３の濃度が低い第２空域６１と、を仕切る仕切部５０を備えるものとした。このようにすれば、検出時と非検出時とで、第１物質センサ１０の周囲の物質３の濃度をより確実に変化させることが可能となる。 Further, according to the above embodiment, the first air space 60 communicates with the first chamber 20 via the inlet 20a, and the first chamber 20 communicates with the first chamber 20 via the outlet 20b. A partition part 50 is provided to partition the second air space 61 having a low concentration of 3. By doing so, it is possible to more reliably change the concentration of the substance 3 around the first substance sensor 10 between the time of detection and the time of non-detection.
　また、上記実施の形態によれば、仕切部５０により、第１チャンバ２０において、第１空域６０と第２空域６１との物質３の濃度差に影響を与えない位置に、第１空域６０と第２空域６１とを連通する貫通孔５１が設けられているものとした。仕切部５０は、第１チャンバ２０において、第１空域６０と第２空域６１との間で、物質３の濃度に差が出る程度の大きさとすればよい。この場合、仕切部５０を、第１チャンバ２０から張り出すつばのような形状とすることも可能である。 Further, according to the above-described embodiment, the partition part 50 separates the first space 60 and the second space 61 in the first chamber 20 at positions that do not affect the concentration difference of the substance 3 between the first space 60 and the second space 61 . A through hole 51 communicating with the second air space 61 is provided. The partition part 50 may be of a size that causes a difference in concentration of the substance 3 between the first space 60 and the second space 61 in the first chamber 20 . In this case, the partition part 50 can be shaped like a brim protruding from the first chamber 20 .
　なお、図２１Ａ及び図２１Ｂに示すように、仕切部５０を備える構成を有する物質検出装置１において、第２換気手段４０を設けるようにしてもよい。図２１Ａには、第２換気手段４０がシャッタである場合の構成が示されている。この場合、物質３の検出中は、シャッタを閉じ、検出終了後は、シャッタを開くようにすることができる。また、この場合でも、第２換気手段４０を電磁弁とすることができる。 In addition, as shown in FIGS. 21A and 21B, the second ventilation means 40 may be provided in the substance detection device 1 having a configuration including the partition section 50 . FIG. 21A shows a configuration in which the second ventilation means 40 is a shutter. In this case, the shutter can be closed during the detection of the substance 3 and opened after the detection. Also in this case, the second ventilation means 40 can be an electromagnetic valve.
　また、図２１Ｂには、第２換気手段４０がポンプである場合の構成が示されている。この場合、物質３の検出中は、ポンプを停止し、検出終了後は、ポンプを駆動して、第１チャンバ２０内の気体を排出することができる。この場合、第１チャンバ２０内には、貫通孔４２を介して気体が導入される。また、この場合でも、第２換気手段４０をファンとすることができる。 Also, FIG. 21B shows a configuration in which the second ventilation means 40 is a pump. In this case, the pump can be stopped during the detection of the substance 3, and after the detection is completed, the pump can be driven to discharge the gas in the first chamber 20. FIG. In this case, gas is introduced into the first chamber 20 through the through hole 42 . Also in this case, the second ventilation means 40 can be a fan.
　また、図２１Ｂに示す構成の場合、物質３の検出中は、ポンプを停止し、検出終了後は、ポンプを駆動して、第１チャンバ２０内に気体を導入することができる。この場合、貫通孔４２を介して第１チャンバ２０内の気体が排出される。 In addition, in the case of the configuration shown in FIG. 21B, the pump can be stopped during the detection of the substance 3, and after the detection is completed, the pump can be driven to introduce gas into the first chamber 20. In this case, the gas inside the first chamber 20 is discharged through the through hole 42 .
　第２換気手段４０の開閉のタイミングは、第１換気手段３０の開閉のタイミングと同期している必要はない。例えば、検出中は、第１換気手段３０を開くとともに第２換気手段４０を閉じ、検出が終了したときに第１換気手段３０を閉じるが、第２換気手段４０は閉じたままとし、第１物質センサ１０から物質３が脱離した十分な時間が経過した後に、第２換気手段４０を開くようにしてもよい。このように、第１換気手段３０及び第２換気手段４０の開閉のタイミングは、周辺の物質３の濃度等によって適宜変更することができる。 The opening/closing timing of the second ventilation means 40 does not need to be synchronized with the opening/closing timing of the first ventilation means 30. For example, during detection, the first ventilation means 30 is opened and the second ventilation means 40 is closed, and when the detection is finished, the first ventilation means 30 is closed, but the second ventilation means 40 remains closed, and the first ventilation means 40 is closed. The second ventilation means 40 may be opened after sufficient time has passed for the substance 3 to desorb from the substance sensor 10 . In this manner, the opening and closing timings of the first ventilation means 30 and the second ventilation means 40 can be appropriately changed depending on the concentration of the surrounding substance 3 and the like.
　また、必要に応じて第１換気手段３０及び第２換気手段４０の開閉度を制御するようにしてもよい。第１換気手段３０及び第２換気手段４０がシャッタ又は電磁弁である場合には、シャッタが開く面積を数段階に変更するようにしてもよい。第１換気手段３０及び第２換気手段４０がポンプ又はファンである場合には、その吸引力を数段階に変更するようにしてもよい。 Also, the degree of opening and closing of the first ventilation means 30 and the second ventilation means 40 may be controlled as necessary. When the first ventilation means 30 and the second ventilation means 40 are shutters or electromagnetic valves, the opening area of the shutters may be changed in several stages. When the first ventilation means 30 and the second ventilation means 40 are pumps or fans, the suction force may be changed in several steps.
　また、上記実施の形態によれば、排出口２０ｂを介して第１チャンバ２０と連通するとともに、第２空域６１と連通する第２チャンバ７０を備えるものとしている。このようにすれば、検出対象となった気体を段階的に排出することが可能となる。 Further, according to the above embodiment, the second chamber 70 is provided which communicates with the first chamber 20 and the second air space 61 via the discharge port 20b. By doing so, it is possible to gradually discharge the gas to be detected.
　第２チャンバ７０に配置され、排出口２０ｂから排出される物質３を検出する第２物質センサ７１を備えるものとしている。このようにすれば、第１チャンバ２０から排出される気体の物質３の濃度が、低下しているか否かを判定することが可能となる。 A second substance sensor 71 is arranged in the second chamber 70 and detects the substance 3 discharged from the discharge port 20b. By doing so, it is possible to determine whether the concentration of the substance 3 in the gas discharged from the first chamber 20 has decreased.
　排出口２０ｂから排出された気体を、流入口２０ａを介して連通する第１空域６０よりも物質３の濃度が低い第２空域６１に送る管状部材８０を備えるものとしている。このようにすれば、物質３の濃度が低い空域が第１チャンバ２０の近くにない状態であっても、第１物質センサ１０をリフレッシュすることが可能となる。 A tubular member 80 is provided for sending the gas discharged from the outlet 20b to the second air space 61 having a lower concentration of the substance 3 than the first air space 60 communicating through the inlet 20a. In this way, the first substance sensor 10 can be refreshed even if there is no air space with a low concentration of the substance 3 near the first chamber 20 .
　また、上記実施の形態によれば、第１換気手段３０は、ポンプ、電磁弁又はファンであるものとしている。このようにすれば、検出対象となる気体を第１チャンバ２０内に確実に引き込むことができるようになる。 Also, according to the above embodiment, the first ventilation means 30 is a pump, an electromagnetic valve, or a fan. By doing so, the gas to be detected can be reliably drawn into the first chamber 20 .
　また、上記実施の形態によれば、第１物質センサ１０は、物質３が吸着する振動子１１を備え、振動子１１を振動させることにより、吸着した物質３を脱離するものとしている。このようにすれば、第１物質センサ１０に吸着した物質を脱離し易くなる。 Further, according to the above embodiment, the first substance sensor 10 includes the vibrator 11 to which the substance 3 is adsorbed, and by vibrating the vibrator 11, the adsorbed substance 3 is desorbed. By doing so, the substance adsorbed to the first substance sensor 10 can be easily desorbed.
　なお、上記実施の形態では、第１物質センサ１０による物質３の検出を行った後、第１物質センサ１０からの物質３の脱離を行っている。この場合、第１物質センサ１０からの物質３の脱離を行っている間は、物質３の検出を行うことができない。そこで、図２２に示すように、第１物質センサ１０、第１チャンバ２０及び第１換気手段３０の組み合わせを２列用意し、一方の列の第１物質センサ１０で物質３の検出を行う間は、他方の列の第１物質センサ１０からの物質３の脱離を行うようにし、その後、物質３の検出を行う列を交互に切り替えるようにしてもよい。このようにすれば、物質３の検出を切れ目なく行うことが可能となる。 It should be noted that in the above embodiment, the substance 3 is desorbed from the first substance sensor 10 after the substance 3 is detected by the first substance sensor 10 . In this case, while the substance 3 is being desorbed from the first substance sensor 10, the substance 3 cannot be detected. Therefore, as shown in FIG. 22, two rows of combinations of the first substance sensor 10, the first chamber 20, and the first ventilation means 30 are prepared, and while the substance 3 is detected by the first substance sensor 10 of one row, , desorption of the substance 3 from the first substance sensor 10 in the other column may be performed, and then the columns for detecting the substance 3 may be alternately switched. By doing so, it becomes possible to detect the substance 3 without a break.
　なお、第１物質センサ１０、第１チャンバ２０及び第１換気手段３０等を３つ以上備えるようにしてもよい。このようにすれば、物質３を検出する時間よりも、物質３を脱離する時間が長い場合に対応することができる。 It should be noted that three or more of the first substance sensor 10, the first chamber 20, the first ventilation means 30, and the like may be provided. By doing so, it is possible to cope with the case where the time for desorbing the substance 3 is longer than the time for detecting the substance 3 .
　なお、上記実施の形態では、第１物質センサ１０を、振動子１１の振動周波数又は振幅の変化により、物質３の吸着を検出するものとしている。しかしながら、本発明はこれには限られない。他の方式で物質３を検出するものであってもよい。例えば、物質３の吸着により抵抗などの電気特性が変化するセンサを用いるようにしてもよい。この場合でも、物質３の脱離を行う場合には、センサを振動させるようにしてもよい。 It should be noted that in the above embodiment, the first substance sensor 10 detects adsorption of the substance 3 from changes in the vibration frequency or amplitude of the vibrator 11 . However, the invention is not limited to this. Other methods may be used to detect the substance 3 . For example, a sensor whose electrical characteristics such as resistance change due to adsorption of the substance 3 may be used. Even in this case, the sensor may be vibrated when the substance 3 is desorbed.
　なお、上記実施の形態では、第１チャンバ２０内に第１物質センサ１０が設けられるものとした。しかしながら、本発明はこれには限られない。第１チャンバ２０内に複数の第１物質センサ１０が設けられるようにしてもよい。この場合、例えば、検出する物質が互いに異なる第１物質センサ１０が設けられるようにしてもよい。 It should be noted that the first substance sensor 10 is provided in the first chamber 20 in the above embodiment. However, the invention is not limited to this. A plurality of first substance sensors 10 may be provided in the first chamber 20 . In this case, for example, first substance sensors 10 that detect different substances may be provided.
　上記実施の形態では、振動子１１の梁１１ａを片持ち梁としている。しかしながら、本発明はこれには限られない。図２３に示すように梁１１ａを十字状にしてもよい。梁１１ａは、基板４に設けられた貫通孔に懸架されている。梁１１ａは、第１の梁１１ｄと、第２の梁１１ｅとが交差することによって形成されている。梁１１ａの上には、図２Ｂに示す構成と同様に、下部電極層１３ａと、圧電素子層１３ｂとが形成されている。さらに、第１の梁１１ｄの両端には、駆動電極１４が形成されており、第２の梁１１ｅの両端には、検出電極１５が形成されている。駆動電極１４と下部電極層１３ａとの間に加えられる電圧信号により、第１の梁１１ｄが加振され、検出電極１５と下部電極層１３ａとの間の電圧信号が、検出信号として検出される。 In the above embodiment, the beam 11a of the vibrator 11 is a cantilever beam. However, the invention is not limited to this. As shown in FIG. 23, the beam 11a may be cross-shaped. The beam 11 a is suspended in a through hole provided in the substrate 4 . The beam 11a is formed by intersecting a first beam 11d and a second beam 11e. A lower electrode layer 13a and a piezoelectric element layer 13b are formed on the beam 11a in the same manner as in the configuration shown in FIG. 2B. Further, drive electrodes 14 are formed on both ends of the first beam 11d, and detection electrodes 15 are formed on both ends of the second beam 11e. A voltage signal applied between the drive electrode 14 and the lower electrode layer 13a excites the first beam 11d, and a voltage signal between the detection electrode 15 and the lower electrode layer 13a is detected as a detection signal. .
　この他、梁１１ａとしては、両端固定梁又は３点で固定された梁など、様々なものを用いることが可能である。 In addition, as the beam 11a, it is possible to use various beams such as a beam fixed at both ends or a beam fixed at three points.
　上記実施の形態では、流入口２０ａと排出口２０ｂとをほぼ同じ大きさとしている。しかしながら、本発明はこれには限られない。例えば、流入口２０ａの大きさを排出口２０ｂより大きくするようにしてもよい。このようにすれば、第１換気手段３０による流入口２０ａの開放及び遮蔽の効果をより大きくすることができる。 In the above embodiment, the inlet 20a and the outlet 20b have substantially the same size. However, the invention is not limited to this. For example, the inlet 20a may be made larger than the outlet 20b. In this way, the effect of opening and shielding the inlet 20a by the first ventilation means 30 can be further enhanced.
　また、上記実施の形態では、検出対象となる物質を、匂いを構成する化学物質としたが、本発明はこれには限られない。例えば、無臭で気体中に含まれる化学物質を検出するようにしてもよい。 Also, in the above embodiment, the substance to be detected is a chemical substance that constitutes an odor, but the present invention is not limited to this. For example, odorless chemical substances contained in gas may be detected.
　本実施の形態に係る物質検出装置１は、様々な環境で用いることができる。例えば、自動車を運転する運転手の飲酒チェック等に物質検出装置１を適用することができる。この場合、検出対象となる物質３は、アルコールの揮発成分となる。物質検出装置１は、このような自動車に組み込まれて使用される。この他、物質検出装置１は、スマートフォンなどの携帯装置に取り付けられるようにしてもよい。 The substance detection device 1 according to this embodiment can be used in various environments. For example, the substance detection device 1 can be applied to the drinking check of a driver who drives an automobile. In this case, the substance 3 to be detected is the volatile component of alcohol. The substance detection device 1 is used by being incorporated in such an automobile. Alternatively, the substance detection device 1 may be attached to a portable device such as a smart phone.
　この発明は、この発明の広義の精神と範囲を逸脱することなく、様々な実施の形態及び変形が可能とされるものである。また、上述した実施の形態は、この発明を説明するためのものであり、この発明の範囲を限定するものではない。すなわち、この発明の範囲は、実施の形態ではなく、特許請求の範囲によって示される。そして、特許請求の範囲内及びそれと同等の発明の意義の範囲内で施される様々な変形が、この発明の範囲内とみなされる。 Various embodiments and modifications of the present invention are possible without departing from the broad spirit and scope of the present invention. Moreover, the embodiment described above is for explaining the present invention, and does not limit the scope of the present invention. That is, the scope of the present invention is indicated by the claims rather than the embodiments. Various modifications made within the scope of the claims and within the meaning of equivalent inventions are considered to be within the scope of the present invention.
　なお、本願については、２０２１年１月２２日に出願された日本国特許出願２０２１－９０２９号を基礎とする優先権を主張し、本明細書中に日本国特許出願２０２１－９０２９号の明細書、請求の範囲、図面全体を参照として取り込むものとする。 This application claims priority based on Japanese Patent Application No. 2021-9029 filed on January 22, 2021, and the specification of Japanese Patent Application No. 2021-9029 is herein included. , claims, and the entire drawing are incorporated by reference.
　本発明は、気体に含まれる物質の検出に適用することができる。 The present invention can be applied to the detection of substances contained in gas.
　１　物質検出装置、２　匂い発生源、３　物質、４　基板、５　貫通孔、１０　第１物質センサ、１１　振動子、１１ａ　梁、１１ｂ　駆動部、１１ｃ　物質吸着膜、１１ｄ　第１の梁、１１ｅ　第２の梁、１２　固定部、１３ａ　下部電極層、１３ｂ　圧電素子層、１３ｃ　上部電極層、１４　駆動電極、１５　検出電極、２０　第１チャンバ、２０ａ　流入口、２０ｂ　排出口、２０ｃ　第３開口、３０　第１換気手段、４０　第２換気手段、４１　フィルタ、４２　貫通孔、５０　仕切部、５１　貫通孔、６０　第１空域、６１　第２空域、７０　第２チャンバ、７１　第２物質センサ、８０　管状部材 1 Substance detection device, 2 Odor source, 3 Substance, 4 Substrate, 5 Through hole, 10 First substance sensor, 11 Vibrator, 11a Beam, 11b Actuator, 11c Substance adsorption film, 11d First beam, 11e Second 2 beams, 12 fixing part, 13a lower electrode layer, 13b piezoelectric element layer, 13c upper electrode layer, 14 drive electrode, 15 detection electrode, 20 first chamber, 20a inlet, 20b outlet, 20c third opening, 30 First ventilation means, 40 Second ventilation means, 41 Filter, 42 Through hole, 50 Partition, 51 Through hole, 60 First space, 61 Second space, 70 Second chamber, 71 Second substance sensor, 80 Tubular member

Claims (13)

  1. 　気体に含まれる物質を検出する第１物質センサと、
    　前記第１物質センサを内部に配置し、前記気体を流入する流入口と前記気体を排出する排出口とが設けられた第１チャンバと、
    　前記流入口を介して前記第１チャンバ内を換気可能な第１換気手段と、を備え、
    　前記第１換気手段は、
    　前記第１物質センサにより前記物質を検出する際に、前記流入口を介した前記第１チャンバ内の換気を行い、
    　前記第１物質センサによる前記物質の検出が終了すると、前記流入口を介した換気を停止する、
    　物質検出装置。     a first substance sensor that detects a substance contained in the gas;
    a first chamber in which the first substance sensor is arranged and provided with an inlet for inflowing the gas and an outlet for discharging the gas;
    a first ventilation means capable of ventilating the inside of the first chamber through the inlet;
    The first ventilation means is
    ventilating the first chamber through the inlet when detecting the substance by the first substance sensor;
    When the detection of the substance by the first substance sensor is finished, ventilation through the inlet is stopped;
    Substance detection device.
  2. 　前記排出口を介して前記第１チャンバ内を換気可能な第２換気手段を備える、
    　請求項１に記載の物質検出装置。     A second ventilation means capable of ventilating the inside of the first chamber through the outlet,
    The substance detection device according to claim 1.
  3. 　前記第２換気手段は、
    　前記第１物質センサにより前記物質を検出する際に、前記排出口を介した換気を停止し、
    　前記第１物質センサによる前記物質の検出が終了すると、前記排出口を介した前記第１チャンバ内の換気を行う、
    　請求項２に記載の物質検出装置。     The second ventilation means is
    stopping ventilation through the outlet when the substance is detected by the first substance sensor;
    When the detection of the substance by the first substance sensor is completed, the inside of the first chamber is ventilated through the outlet;
    The substance detection device according to claim 2.
  4. 　前記第２換気手段は、
    　前記第１物質センサにより前記物質を検出する際に、前記排出口を介した前記第１チャンバ内の換気を行い、
    　前記第１物質センサによる前記物質の検出が終了すると、前記排出口を介した換気を停止する、
    　請求項２に記載の物質検出装置。     The second ventilation means is
    ventilating the first chamber through the outlet when the substance is detected by the first substance sensor;
    When the detection of the substance by the first substance sensor is finished, ventilation through the outlet is stopped;
    The substance detection device according to claim 2.
  5. 　前記第２換気手段は、常時、前記排出口を介した前記第１チャンバ内の換気を行う、
    　請求項２に記載の物質検出装置。     The second ventilation means constantly ventilates the interior of the first chamber through the outlet,
    The substance detection device according to claim 2.
  6. 　前記第２換気手段は、シャッタ、ポンプ、ファン又は電磁弁である、
    　請求項２から５のいずれか一項に記載の物質検出装置。     The second ventilation means is a shutter, pump, fan or solenoid valve,
    The substance detection device according to any one of claims 2 to 5.
  7. 　前記流入口を介して前記第１チャンバと連通する第１空域と、前記排出口を介して前記第１チャンバと連通し、前記第１空域よりも前記物質の濃度が低い第２空域と、を仕切る仕切部を備える、
    　請求項１から６のいずれか一項に記載の物質検出装置。     a first air space communicating with the first chamber through the inlet; and a second air space communicating with the first chamber through the outlet and having a lower concentration of the substance than the first air space. Equipped with a partition for partitioning,
    The substance detection device according to any one of claims 1 to 6.
  8. 　前記仕切部では、
    　前記第１チャンバにおいて、前記第１空域と前記第２空域との前記物質の濃度差に影響を与えない位置に、前記第１空域と前記第２空域とを連通する貫通孔が設けられている、
    　請求項７に記載の物質検出装置。     In the partition,
    In the first chamber, a through-hole communicating the first space and the second space is provided at a position that does not affect the concentration difference of the substance between the first space and the second space. ,
    The substance detection device according to claim 7.
  9. 　前記排出口を介して前記第１チャンバと連通するとともに、前記第２空域と連通する第２チャンバを備える、
    　請求項７又は８に記載の物質検出装置。     a second chamber communicating with the first chamber through the outlet and communicating with the second airspace;
    The substance detection device according to claim 7 or 8.
  10. 　前記第２チャンバ内に配置され、前記排出口から排出される前記物質を検出する第２物質センサを備える、
    　請求項９に記載の物質検出装置。     a second substance sensor disposed in the second chamber and detecting the substance discharged from the outlet;
    The substance detection device according to claim 9 .
  11. 　前記排出口から排出された前記気体を、前記流入口を介して前記第１チャンバと連通する第１空域よりも前記物質の濃度が低い第２空域に送る管状部材を備える、
    　請求項１から６のいずれか一項に記載の物質検出装置。     a tubular member for sending the gas discharged from the outlet to a second air space having a lower concentration of the substance than the first air space communicating with the first chamber via the inlet;
    The substance detection device according to any one of claims 1 to 6.
  12. 　前記第１換気手段は、シャッタ、ポンプ、ファン又は電磁弁である、
    　請求項１から１１のいずれか一項に記載の物質検出装置。     The first ventilation means is a shutter, pump, fan or solenoid valve,
    The substance detection device according to any one of claims 1 to 11.
  13. 　前記第１物質センサは、前記物質が吸着する振動子を備え、
    　前記振動子を振動させることにより、吸着した前記物質を脱離する、
    　請求項１から１２のいずれか一項に記載の物質検出装置。     The first substance sensor comprises a vibrator to which the substance is adsorbed,
    desorbing the adsorbed substance by vibrating the vibrator;
    The substance detection device according to any one of claims 1 to 12.
PCT/JP2021/048873 2021-01-22 2021-12-28 Substance detector WO2022158275A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063242A (en) * 1992-06-19 1994-01-11 Sanyo Electric Co Ltd Smell detecting device
JP2002525578A (en) * 1998-09-11 2002-08-13 フェムトメトリクス，インコーポレイテッド Chemical sensor array
US20080317089A1 (en) * 2007-06-22 2008-12-25 Decagon Devices, Inc. Apparatus, Method, and System for Measuring Water Activity and Weight
JP2017161300A (en) * 2016-03-08 2017-09-14 株式会社デンソー Odor discrimination system for vehicles
WO2020246276A1 (en) * 2019-06-03 2020-12-10 Ｉ－Ｐｅｘ株式会社 Substance detection system and substance detection method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063242A (en) * 1992-06-19 1994-01-11 Sanyo Electric Co Ltd Smell detecting device
JP2002525578A (en) * 1998-09-11 2002-08-13 フェムトメトリクス，インコーポレイテッド Chemical sensor array
US20080317089A1 (en) * 2007-06-22 2008-12-25 Decagon Devices, Inc. Apparatus, Method, and System for Measuring Water Activity and Weight
JP2017161300A (en) * 2016-03-08 2017-09-14 株式会社デンソー Odor discrimination system for vehicles
WO2020246276A1 (en) * 2019-06-03 2020-12-10 Ｉ－Ｐｅｘ株式会社 Substance detection system and substance detection method

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